JP7343675B1 - vertical heating furnace - Google Patents

Abstract

An object of the present invention is to suppress transport misalignment of a transported object. A vertical heating furnace (10) includes a furnace body (11), a plurality of rotating bodies (31, 32, 41, 42), a rotating device (50), and a lifting device (55). The plurality of rotating bodies each have a first part 30a, 40a having a plurality of support parts 30a1, 40a1 that supports the transported object A, and a second part 30b, 40b provided at a different position from the first part. We are prepared. When the rotary body supports the conveyed object, the rotating device rotates the rotary body so that the first supporting portion moves to a position where the conveyed object can be supported, and the elevating device rotates the rotary body in a plurality of rotations. The rotating body that supports the transported object is raised. When the rotary body does not support the conveyed object, the rotating device rotates the rotary body so that the second portion faces the side surface of the conveyed object. The second part is placed at a predetermined position to correct the misalignment of the transported object. [Selection diagram] Figure 2

Description

The present disclosure relates to a vertical heating furnace.

Japanese Unexamined Patent Publication No. 2022-037806 discloses several forms of a vertical heating furnace that can transport objects in the vertical direction. Of these, FIGS. 18 to 21 of the same publication disclose a vertical heating furnace in which a pair of first rack shafts and a pair of second rack shafts are used as feed support members. In this embodiment, the first rack shaft and the second rack shaft have a plurality of support teeth that support the object to be transported. The support teeth are formed at regular intervals along the height direction. The object to be transported is supported from four corners by a pair of first rack shafts and a pair of second rack shafts. The pair of first rack shafts and the pair of second rack shafts are each driven in the vertical direction by a vertical actuator. Further, the pair of first rack shafts and the pair of second rack shafts are each rotated by 90 degrees around the rotation axis by a rotary actuator. As a result, the pair of first rack shafts and the pair of second rack shafts are switched between a state in which they support an object to be transported and a state in which they do not support an object to be transported. According to such a vertical heating furnace, the pair of first rack shafts and the pair of second rack shafts are switched between a state in which the object is supported and a state in which the object is not supported, while the object is vertically supported. conveyed in the direction.

JP2022-037806A

By the way, in the above-mentioned vertical heating furnace disclosed in JP-A No. 2022-037806, the pair of first rack shafts and the pair of second rack shafts are in a state of supporting the object to be transported and a state of supporting the object to be transported. The object to be conveyed is conveyed in the vertical direction while being switched between a state in which it is not carried out and a state in which it is not carried out. However, when the present inventor conducted further trials, it was found that as the conveyance progresses, the position of the conveyed object may shift.

The vertical heating furnace disclosed herein includes a furnace body having an internal furnace space in which the objects to be transported are transported along the height direction, and a conveyor body provided in the furnace space and in which the objects to be transported are transported. A plurality of rotating bodies having rotation axes set along the height direction around the area, a rotation device that rotates the rotating bodies around the rotational axis, and at least one of the plurality of rotating bodies having the rotational axis as the rotational axis. It is equipped with a lifting device that raises and lowers it along the line. Each of the plurality of rotating bodies includes a first part having a plurality of support parts that support objects to be transported, and a second part provided at a different position from the first part. The plurality of support parts are provided at predetermined intervals along the height direction in the first part. When the rotary body supports the conveyed object, the rotating device rotates the rotary body so that the first supporting portion moves to a position where the conveyed object can be supported, and the elevating device rotates the rotary body in a plurality of rotations. The rotating body that supports the transported object is raised or lowered. When the rotary body does not support the conveyed object, the rotating device rotates the rotary body so that the second part faces the side surface of the conveyed object, and the second part has a predetermined position that corrects the misalignment of the conveyed object. is placed in the correct position. In such a vertical heating furnace, even if the conveyed object shifts during conveyance, the position can be easily corrected. This suppresses transport deviation of the transported object.

FIG. 1 is a schematic cross-sectional view of a vertical heating furnace 10. FIG. 2 is a schematic cross-sectional view of the vertical heating furnace 10. FIG. 3 is a time chart showing control by the control device 60. FIG. 4 is a schematic diagram showing the operations of the first rotating body group 30 and the second rotating body group 40. FIG. 5 is a schematic diagram showing the operations of the first rotating body group 30 and the second rotating body group 40. FIG. 6 is a schematic diagram showing the operations of the first rotating body group 30 and the second rotating body group 40. FIG. 7 is a time chart showing control by the control device 60. FIG. 8 is a time chart showing control by the control device 60 according to another embodiment. FIG. 9 is a schematic diagram of the first rotating body group 30 and the second rotating body group 40. FIG. 10 is a time chart showing control by the control device 60 according to another embodiment. FIG. 11 is a schematic diagram showing a vertical heating furnace 10A according to another embodiment.

Hereinafter, one embodiment of the present disclosure will be described in detail with reference to the drawings. In addition, in the following drawings, the same reference numerals are given to members and parts that have the same function. Furthermore, the dimensional relationships (length, width, thickness, etc.) in each figure do not reflect the actual dimensional relationships. The directions of upward, downward, left, right, front, and rear are respectively represented by arrows U, D, L, R, F, and Rr in the figure. Here, the directions of top, bottom, left, right, front, and back are only determined for convenience of explanation, and do not limit the present invention unless specifically mentioned. In this specification, the "height direction" corresponds to the vertical direction indicated by the arrow in the figure.

<Vertical heating furnace 10>
1 and 2 are schematic cross-sectional views of a vertical heating furnace 10. FIG. 1 shows a cross section of the vertical heating furnace 10 along the height direction. In addition, in FIG. 1, illustration of the transported object A supported by the rotating body is partially omitted. FIG. 2 shows a cross section of the furnace body 11 taken along line II-II in FIG. In FIG. 2, the positions of the rotating bodies 31, 32, 41, 42 when they can support the transported object A are shown by solid lines, and the positions of the rotating bodies 31, 32, 42 when they cannot support the transported object A are shown by solid lines. , 42 are indicated by two-dot chain lines.

As shown in FIG. 1, the vertical heating furnace 10 includes a furnace body 11 and a conveying device 20. The vertical heating furnace 10 further includes a control device 60 that controls the conveyance device 20. In the vertical heating furnace 10, the object A to be transported is transported along the height direction. The vertical heating furnace 10 includes a heater 15 for heat-treating the workpiece. The object to be processed (not shown) is placed on the object A and is transported through the furnace body 11 while being heat-treated.

In this embodiment, the transported object A is plate-shaped. Such a plate-shaped object to be transported A is also called a setter. The material to be transported A is not particularly limited, but may be appropriately selected from materials having required heat resistance and reaction resistance. In this embodiment, a ceramic object A is used. As shown in FIG. 2, the transported object A has a substantially square shape in plan view. The transported object A has a pair of first side surfaces A1 (hereinafter also simply referred to as side surfaces A1), a pair of second side surfaces A2 (hereinafter also simply referred to as side surfaces A2), an upper surface A3, and a lower surface A4 (see FIG. 1). ). The pair of first side surfaces A1 are formed substantially parallel to each other. The pair of second side surfaces A2 are formed substantially parallel to each other. In this embodiment, a workpiece to be heat-treated in the vertical heating furnace 10 is placed on the upper surface A3 of the workpiece A. Note that the object to be transported is not limited to this form. The object to be transported may be, for example, a box-shaped object also called a pod or a sagger. A lid may be placed on the object to be transported. Further, as the object to be transported, for example, a plate-shaped object to be processed may be directly transported.

<Furnace body 11>
The furnace body 11 has an internal furnace space 12 in which the objects A are transported along the height direction. In the furnace space 12, a transport area 12a is set in which the object to be transported A is transported. The conveyance area 12a is an area through which the conveyed object A is conveyed along the height direction. The conveyance area 12a is set in the height direction from the height at which the conveyed object A is brought in to the height at which it is conveyed out (see FIG. 1). The conveyance area 12a is set approximately at the center of the furnace space 12 in the width direction (left-right direction and front-back direction) of the furnace body 11. The transport area 12a may have a shape (in this embodiment, a substantially square shape) corresponding to the planar shape of the transported object A in a plane perpendicular to the height direction.

As shown in FIG. 1, the furnace body 11 is formed longer in the height direction (vertical direction) of the furnace body 11 than in the width direction of the furnace body 11. The furnace body 11 has side walls 11a to 11d (see FIGS. 1 and 2), a bottom portion 11e, and a ceiling portion 11f. The furnace space 12 is surrounded by side walls 11a to 11d, a bottom portion 11e, and a ceiling portion 11f. The side wall 11a and the side wall 11b face each other in the left-right direction. The side wall 11c and the side wall 11d face each other in the front-rear direction (see FIG. 2). The bottom portion 11e and the ceiling portion 11f face each other in the vertical direction. Steps 11g and 11h are provided at the upper and lower portions of the side walls 11a to 11d. The furnace space 12 within the furnace body 11 is narrower below than the lower step 11g. Moreover, the furnace space 12 within the furnace body 11 is narrower above than the upper step 11h.

The furnace body 11 is provided with an inlet 13 for carrying in the object A and an outlet 14 for carrying out the object A. In this embodiment, the entrance 13 is provided at the bottom of the furnace body 11. The export port 14 is provided at the upper part of the furnace body 11. The object to be transported A is transported within the furnace space 12 from below to above.

The loading port 13 is provided in the side wall 11a. The loading port 13 is formed to penetrate below the step 11g of the side wall 11a along the thickness direction (horizontal direction) of the furnace body 11. From the loading port 13, the objects A are sequentially loaded by the loading device 13a. Although detailed description will be omitted, the loading device 13a may be a device for loading the object A into the furnace body 11 from the loading chamber 13b connected via the loading port 13.

The outlet 14 is provided on the side wall 11b. The outlet 14 is formed to penetrate above the step 11h of the side wall 11b along the thickness direction (horizontal direction) of the furnace body 11. From the carry-out port 14, the objects A are sequentially carried out by the carry-out device 14a. Although detailed description will be omitted, the unloading device 14a may be a device for unloading the object A from inside the furnace body 11 to the unloading chamber 14b connected via the unloading port 14.

A heater 15 is provided in the furnace space 12 of the furnace body 11 . The heater 15 is a device for heating the object. The heater 15 is arranged in an area above the step 11g and below the step 11h. In this embodiment, the heater 15 has a cylindrical shape. The heater 15 is inserted into the furnace body 11 through through holes formed in the side walls 11a to 11d. The heater 15 spans from one side wall 11a, 11c to the other side wall 11b, 11d in the furnace space 12. The heaters 15 are arranged intermittently along the height direction. Note that the type of heater 15 is not particularly limited. For example, the heater may be a ceramic heater or a metal heater. The heater is not limited to a cylindrical heater, and for example, a plate-shaped panel heater may be used. The type and shape of the heater can be appropriately selected depending on the heating conditions such as the target heating temperature. A temperature sensor may be provided in the furnace space 12 of the furnace body 11 to measure the internal temperature. As the temperature sensor, for example, a thermocouple, an infrared thermometer, etc. can be used.

In this embodiment, the side walls 11a to 11d, the bottom portion 11e, and the ceiling portion 11f of the furnace body 11 are made of a heat insulating material. As the heat insulating material, for example, a ceramic fiberboard formed into a predetermined shape can be used. A ceramic fiber board is a board material formed into a plate shape by adding an inorganic filler and an inorganic/organic binder to so-called bulk fiber. The furnace body 11 may be configured by stacking ceramic fiber boards in the thickness direction of the furnace body 11, for example. The thicknesses of the side walls 11a to 11d, the bottom portion 11e, and the ceiling portion 11f of the furnace body 11 are set to a required thickness such that the heat in the furnace space 12 is sufficiently insulated.

The furnace body 11 is placed on a base 16. The base 16 may have a space on the side opposite to the surface on which the furnace body 11 is placed. In this space, for example, piping for supplying and exhausting atmospheric gas into the furnace space 12, a drive device for driving a rotating body described below, etc. may be arranged.

The side and top surfaces of the furnace body 11 are surrounded by an outer wall 17. The outer wall 17 may be made of a metal plate having the required heat resistance and strength. The outer wall 17 may be, for example, a stainless steel plate. In this embodiment, the outer wall 17 is a substantially rectangular plate. An outer wall 17a is attached to the ceiling portion 11f of the furnace body 11. The outer wall 17a is formed wider than the ceiling portion 11f. The edge of the outer wall 17a projects outward from the furnace body 11. The side surfaces (side walls 11a to 11d) of the furnace body 11 are surrounded by an outer wall 17b. The upper and lower ends of the outer wall 17b are bent. The bent portion of the outer wall 17b is connected to the protruding portion of the outer wall 17a and the base 16. A space is formed between the outer wall 17b and the side walls 11a to 11d. In this space, for example, piping for supplying and exhausting atmospheric gas into the furnace space 12, electrodes of the heater 15, etc. may be arranged.

Although not shown, the furnace body 11 may be provided with a gas supply pipe and a gas exhaust pipe. The gas supply pipe is a pipe for supplying atmospheric gas into the furnace body 11. A gas cylinder for supplying atmospheric gas may be connected to the gas supply pipe. Although not particularly limited, examples of the atmospheric gas include nitrogen, argon, air, oxygen, carbon dioxide, and hydrogen. The atmospheric gas is appropriately selected depending on the heating conditions of the object to be processed. The gas exhaust pipe is a pipe for exhausting atmospheric gas from inside the furnace body 11. An exhaust device such as an exhaust pump may be connected to the gas exhaust pipe. When a reaction gas is generated from the object to be processed, the reaction gas is exhausted from the gas exhaust pipe. By providing the furnace body 11 with a gas supply pipe and a gas exhaust pipe, the atmosphere within the furnace body 11 can be adjusted.

<Transport device 20>
The conveyance device 20 is a device that conveys the object A to be conveyed along the height direction. In this embodiment, the conveyance device 20 is configured to be able to convey the objects A to be conveyed sequentially from the bottom to the top. The transport device 20 includes a plurality of rotating bodies 31, 32, 41, 42 (see FIG. 2), a rotating device 50, and a lifting device 55.

<Plural rotating bodies 31, 32, 41, 42>
The plurality of rotating bodies 31 , 32 , 41 , 42 are provided in the furnace space 12 inside the furnace body 11 . The plurality of rotating bodies 31, 32, 41, and 42 are each formed into a substantially rectangular plate shape extending in the height direction. The rotating bodies 31, 32, 41, and 42 are arranged around the transport area 12a in which the object to be transported is transported, and each has a rotation axis set along the height direction. In this embodiment, the rotating bodies 31 and 32 are arranged diagonally to each other with respect to the transport area 12a where the objects to be transported are transported. The rotating bodies 41 and 42 are arranged diagonally to each other with respect to the transport area 12a where the object to be transported is transported. The rotating bodies 31, 32, 41, and 42 are configured to rotate around a rotation axis by a rotating device 50. The rotational axes of the rotating bodies 31, 32, 41, and 42 are set around the transport area 12a.

The rotating bodies 31, 32, 41, and 42 are made of a material with excellent heat resistance. In this embodiment, the rotating bodies 31, 32, 41, 42 are made of ceramic. The rotating bodies 31, 32, 41, and 42 are formed to have substantially the same shape. The rotating bodies 31 and 32 are held at their upper and lower ends by being attached to brackets 33a and 34a, respectively. Shafts 33 and 34 extending in the height direction are attached to the upper and lower ends of the rotating bodies 31 and 32, respectively. The shafts 33 and 34 of the rotating bodies 31 and 32 are provided to extend upward and downward from the brackets 33a and 34a, respectively. The rotating bodies 41 and 42 are held at their upper and lower ends by being attached to brackets 43a and 44a, respectively. Shafts 43 and 44 extending in the height direction are attached to the upper and lower ends of the rotating bodies 41 and 42, respectively. The shafts 43 and 44 of the rotating bodies 41 and 42 are provided to extend upward and downward from the brackets 43a and 44a, respectively. The shafts 43 and 44 of the rotating bodies 41 and 42 may be provided integrally with the brackets 43a and 44a. In FIG. 2, positions corresponding to the axes 33, 34, 43, 44 of the rotating bodies 31, 32, 41, 42 are respectively drawn with broken lines.

In this embodiment, the brackets 33a, 34a, 43a, 44a and the shafts 33, 34, 43, 44 are provided at the upper and lower ends of the rotating bodies 31, 32, 41, 42. The upper and lower ends of the rotating bodies 31, 32, 41, and 42 are arranged at positions where the temperature inside the furnace body 11 is lowered. The brackets 33a, 34a, 43a, 44a and the shafts 33, 34, 43, 44 are preferably metal members having the required heat resistance and mechanical strength. A rotating device 50, which will be described later, is attached to the rotating bodies 31 and 32 via brackets 33a and 34a and shafts 33 and 34. A rotating device 50 and a lifting device 55, which will be described later, are attached to the rotating bodies 41 and 42 via brackets 43a and 44a and shafts 43 and 44.

The rotating bodies 31 and 32 are appropriately referred to as a first rotating body group 30. The rotating bodies 41 and 42 are arranged at different positions from the rotating bodies 31 and 32. The rotating bodies 41 and 42 are appropriately referred to as a second rotating body group 40. In this embodiment, as shown in FIG. 2, the plurality of rotating bodies 31, 32, 41, 42 include a first rotating body group 30 and a second rotating body group 40. A pair of each of the first rotating body group 30 and the second rotating body group 40 are provided. The rotating bodies 31 and 32 of the first rotating body group 30 are arranged diagonally across the transport area 12a. The rotating bodies 41 and 42 of the second rotating body group 40 are arranged diagonally across the transport area 12a. In this embodiment, the first rotary body group 30 and the second rotary body group 40 have their respective rotation axes provided outside the corners of the conveyance area 12a, which is set to have a substantially square shape in the front-rear direction and the left-right direction. It is located in Below, the first rotating body group 30 is also simply referred to as the rotating body group 30, and the second rotating body group 40 is also simply referred to as the rotating body group 40.

The plurality of rotating bodies 31, 32, 41, 42 are provided at positions different from the first parts 30a, 40a, which have the plurality of support parts 30a1, 40a1 that support the transported object A, and the first parts 30a, 40a. and second parts 30b and 40b, respectively. The plurality of support parts 30a1, 40a1 are provided at predetermined intervals along the height direction in the first parts 30a, 40a. The shape of the rotating body 31 will be explained below.

As shown in FIG. 1, the rotating body 31 is formed into a substantially rectangular plate shape extending in the height direction. The height of the rotating body 31 is longer than the width D1 (see FIG. 2) and the thickness D2 (see FIG. 2) of the rotating body. The rotating body 31 has a size that can be accommodated in the furnace space 12 in the height direction. The length of the rotating body 31 is shorter than the distance between the bottom part 11e and the ceiling part 11f of the furnace body 11, and longer than the distance of the conveyance area along the height direction. The rotating body 31 includes a first part 30a and a second part 30b (see FIG. 2).

In this embodiment, the first portion 30a is set on one surface of a rotating body 31 formed in a plate shape. The first part 30a has a plurality of support parts 30a1. The support part 30a1 is a part for supporting the object A to be transported. The support portion 30a1 protrudes from the first portion 30a. The plurality of support parts 30a1 are provided at predetermined intervals along the height direction in the first part 30a. In this embodiment, the interval between the supporting parts 30a1 is wider than the thickness of the object A to be transported. The spacing between the supporting parts 30a1 can be appropriately selected depending on the dimensions of the object A to be transported.

As shown in FIG. 2, the support portion 30a1 has a substantially trapezoidal shape in which the width becomes slightly narrower from the base end toward the tip end in plan view. The support portion 30a1 has an upper end surface 30a2 that supports the object A to be transported. The upper end surface 30a2 of the support portion 30a1 is a substantially horizontal plane. In other words, the upper end surface 30a2 of the support portion 30a1 is not inclined from the base end toward the distal end. As a result, the transported object A placed on the upper end surface 30a2 of the support portion 30a1 is unlikely to shift. The surface of the support portion 30a1 opposite to the upper end surface 30a2 is inclined so that the thickness thereof gradually increases from the tip to the base end of the support portion 30a1. This improves the strength of the support portion 30a1. For example, even if a load is applied to the support portion 30a1 due to long-term use of the vertical heating furnace 10, the support portion 30a1 is unlikely to break. Therefore, the durability of the vertical heating furnace 10 can be good. Note that the shape of the support portion 30a1 is not particularly limited.

The second portion 30b is provided at a different position on the rotating body 31 from the first portion 30a. In this embodiment, in the rotating body 31, the second portion 30b is provided on a surface opposite to the surface on which the first portion 30a is provided. The second portion 30b is a substantially flat surface.

Like the rotating body 31, the rotating body 32 includes a first part 30a and a second part 30b. The first portion 30a of the rotating body 32 has a plurality of support portions 30a1. The rotating bodies 41 and 42 of the rotating body group 40 include a first part 40a and a second part 40b similar to the first part 30a and the second part 30b of the rotating body group 30. The first portion 40a of the rotating bodies 41 and 42 has a plurality of support portions 40a1. The support portion 40a1 has an upper end surface 40a2 that supports the object A to be transported. The configuration of the support portions 40a1 of the rotating bodies 41 and 42 is the same as that of the support portion 30a1, so a detailed explanation will be omitted.

As described above, the rotating bodies 31 and 32 have rotation axes set along the height direction (the length direction of the rotating bodies 31 and 32). The rotating shaft is set at a position biased to one side in the width direction of the rotating bodies 31 and 32 (see FIG. 2). The shafts 33 and 34 are attached along rotational axes set on the rotating bodies 31 and 32. In this embodiment, the shafts 33 and 34 are attached to the ends of the rotating bodies 31 and 32 in the width direction. The shafts 33 and 34 overlap in the height direction. The shafts 33 and 34 are provided around the conveyance area 12a in a plane perpendicular to the height direction of the vertical heating furnace 10. The shafts 33 and 34 are arranged outside the corners of the conveyance area 12a whose plane perpendicular to the height direction is approximately square. The configuration and arrangement of the rotating bodies 41, 42 and the shafts 43, 44 are similar to the configurations of the rotating bodies 31, 32 and the shafts 33, 34, so a detailed explanation will be omitted.

As shown in FIG. 1, the lower shafts 34, 44 are inserted into through holes formed in the bottom portion 11e of the furnace body 11. The gap between the through hole and the shafts 34, 44 may be filled with a sealing material having heat insulation and heat resistance. The shafts 34 and 44, which are inserted through the bottom surface portion 11e, are inserted into a guide 18 attached to the base 16. The guide 18 is attached to the back surface of the base 16 (the surface opposite to the surface on which the furnace body 11 is placed). As the guide 18, for example, a bush or the like may be used.

The upper shafts 33, 43 are inserted into through holes formed in the ceiling portion 11f of the furnace body 11. A gap between the through hole and the shafts 33, 43 may be filled with a sealing material having heat insulation and heat resistance. The shafts 33 and 43 are connected to a rotating device 50 outside the furnace body 11. In this embodiment, a rotating device 50 is connected to a shaft 33 attached to the rotating bodies 31 and 32 of the first rotating body group 30. A rotating device 50 and a lifting device 55 are connected to a shaft 43 attached to the rotating bodies 41 and 42 of the second rotating body group 40 .

<Rotating device 50>
The rotating device 50 is a device that rotates the rotating bodies 31, 32, 41, and 42 around a rotation axis. Although detailed illustration is omitted, in this embodiment, the same number of rotating devices 50 as the rotating bodies 31, 32, 41, and 42 are provided. Although not particularly limited, the rotating device 50 includes two rotating devices 50a connected to the rotating bodies 31 and 32 of the first rotating body group 30, respectively, and two rotating devices 50a connected to the rotating bodies 41 and 42 of the second rotating body group 40, respectively. It includes two rotating devices 50b. The rotation device 50a rotates the first rotating body group 30 around the rotation axis. The rotation device 50b rotates the second rotating body group 40 around the rotation axis.

The rotating device 50 controls the rotation angle of each of the connected rotating bodies 31, 32, 41, 42, and rotates the rotating bodies 31, 32, 41, 42 at a predetermined angle. In this embodiment, the rotating device 50 rotates the rotating bodies 31, 32, 41, and 42 to provide a supporting posture capable of supporting the transported object A and a correction posture capable of correcting the position of the transported object A. Switch. The rotation device 50 can be realized by, for example, a servo motor, a rotary actuator, or the like.

The rotating device 50 is provided outside the furnace body 11. The rotating device 50 may be mounted on the upper outer wall 17a of the furnace body 11. Note that the rotating device 50 does not necessarily need to be connected to the upper shafts 33, 43. For example, the rotation device 50 may be connected to the lower shafts 34, 44. At this time, the rotation device 50 can be provided in a space on the opposite side of the surface of the base 16 on which the furnace body 11 is placed. The rotation device 50 may be connected to both the upper shaft 33, 43 and the lower shaft 34, 44.

The rotating bodies 31, 32, 41, and 42 connected to the rotating device 50 have rotating shafts set therein. In this embodiment, the rotational axes of the rotating bodies 31 and 32 coincide with the axial centers of the cylindrical shafts 33 and 34. The rotational axes of the rotating bodies 41 and 42 coincide with the axial centers of the cylindrical shafts 43 and 44. In other words, the rotational axes of the rotating bodies 31, 32, 41, 42 are defined by the attached shafts 33, 34, 43, 44.

As shown in FIG. 2, the rotating device 50 (see FIG. 1) switches between a supporting posture and a correcting posture by rotating the rotating bodies 31, 32, 41, and 42. Note that the rotating bodies 31, 32, 41, and 42 may be configured to be able to independently control their rotations. The rotations of some of the rotating bodies 31, 32, 41, and 42 may be controlled so that they rotate simultaneously.

When supporting the object A, the rotating device 50 moves the object A to a position where the supporting parts 30a1, 40a1 of the first parts 30a, 40a of the rotating bodies 31, 32, 41, 42 can support the object A. The rotating bodies 31, 32, 41, and 42 are rotated. In this embodiment, when the first rotating body group 30 supports the transported object A, the first portion 30a of the first rotating body group 30 is directed toward the pair of second side surfaces A2 of the transported object A. Placed. When the second rotating body group 40 supports the transported object A, the first portion 40a of the second rotating body group 40 is arranged to face the pair of first side surfaces A1 of the transported object A. As a result, the rotating body that supports the transported object A assumes a supporting posture.

At this time, the upper end surfaces 30a2, 40a2 of the support portions 30a1, 40a1 of the first portions 30a, 40a are arranged at positions facing the lower surface A4 of the transported object A. This allows the rotating bodies 31, 32, 41, and 42 to support the transported object A. The angle of the rotating bodies 31, 32, 41, 42 at this time is also referred to as a support angle.

When the rotating bodies 31, 32, 41, 42 do not support the object A, the rotating device 50 rotates the rotating bodies 31, 32, 42 so that the second parts 30b, 40b face the side surfaces A1, A2 of the object A. Rotate 41 and 42. In this embodiment, when the first rotating body group 30 does not support the transported object A, the second portion 30b of the first rotating body group 30 is directed toward the pair of first side surfaces A1 of the transported object A. Placed. When the second rotating body group 40 does not support the transported object A, the second portion 40b of the second rotating body group 40 is arranged so as to face the pair of second side surfaces A2 of the transported object A. As a result, the rotating body that does not support the transported object A assumes a correcting posture.

At this time, the second portions 30b and 40b are placed at predetermined positions to correct the displacement of the transported object A. The angles of the rotating bodies 31, 32, 41, and 42 at this time are also referred to as correction angles. In this embodiment, the second portions 30b and 40b are arranged at positions facing the side surfaces A1 and A2 of the transported object A with a gap left between them. When the position of the transported object A shifts in the lateral direction (direction perpendicular to the height direction), the second portions 30b and 40b hit the side surfaces A1 and A2 of the transported object A, thereby changing the position of the transported object A. can be corrected. The positions of the second parts 30b and 40b can be set appropriately according to the dimensions of the object A to be transported.

Although not particularly limited, in the embodiment shown in FIG. 2, the rotating bodies 31, 32, 41, 42 are switched to the correction angle by rotating 270 degrees clockwise from the support angle. The rotating bodies 31, 32, 41, 42 are switched to the support angle by rotating 270 degrees counterclockwise from the correction angle. Note that the rotating direction and angle of the rotating body are not limited to this form. The rotating direction and angle of the rotating bodies can be appropriately set depending on the number and shape of the rotating bodies, the shape of the object to be transported, and the like.

In this embodiment, the object A is transported in a state where the rotating bodies 31 and 32 do not support the object A, and the rotating bodies 41 and 42 support the object A. The rotating device 50b moves the rotating bodies 41 and 42 to a support position where the above-mentioned object to be transported A can be supported. The rotating device 50a moves the rotating bodies 31 and 32 to a position where the above-described displacement of the transported object A is corrected. In this state, among the rotating bodies 31 , 32 , 41 , 42 , the rotating bodies 41 , 42 that support the transported object A are driven by the lifting device 55 . As a result, the object A to be transported is transported upward.

<Lifting device 55>
The elevating device 55 is a device that raises and lowers the rotating body along the rotation axis. The lifting device 55 raises and lowers the rotating bodies 41 and 42 (second rotating body group 40) among the plurality of rotating bodies 31, 32, 41, and 42. As the elevating device 55, for example, a cylinder or the like may be used. The lifting device 55 is provided on the upper outer wall 17a of the furnace body 11. Although not particularly limited, the elevating device 55 is connected to the shaft 43 above the second group of rotating bodies 40 via a rotating device 50a connected to the second group of rotating bodies 40. In this embodiment, the lifting device 55 lifts and lowers the second rotating body group 40 and the rotating device 50b to which the second rotating body group 40 is connected.

The second rotating body group 40 is configured to be raised and lowered to a preset position by a lifting device 55. A reference position for the second rotary body group 40 is set in the lifting device 55 . The reference position is a position that serves as a reference for raising and lowering the second rotating body group 40. In this embodiment, the reference position is set so that the first rotating body group 30 and the second rotating body group 40, which do not rise or fall, are arranged at the same height. In other words, when the second rotating body group 40 is at the reference position, the first rotating body group 30 and the second rotating body group 40 are arranged at the same height. The elevating and lowering device 55 has set elevating and lowering positions when elevating and lowering the second rotating body group 40 . In this embodiment, the upper position when raising the second rotating body group 40 is set. The upper position is set higher than the reference position by the pitch of the supporting parts 30a1 and 40a1. The elevating device 55 is configured to be able to elevate the second rotating body group 40 to a position slightly higher or lower than the reference position and the upper position described above. Thereby, it is possible to adjust to a position where the other support part does not interfere with the conveyed object A supported by one support part.

By combining the lifting and lowering of the second rotating body group 40 by the lifting device 55 and the rotation of the first rotating body group 30 and the second rotating body group 40 by the rotating device 50, the transported object A is sequentially moved in the height direction. transported along. In this embodiment, the conveyed object A is conveyed upward by a distance corresponding to the pitch of the support parts 30a1 and 40a1.

In this embodiment, as shown in FIG. 1, the lifting device 55 is placed approximately in the center of the outer wall 17a at the top of the furnace body 11. A rod 51 extends upward from the lifting device 55. A support plate 52 is attached to the rod 51. A rotating device 50b is attached to the support plate 52. In this embodiment, both rotating devices 50b connected to the rotating bodies 41 and 42 of the second rotating body group 40 are attached to the support plate 52. Thereby, it is not necessary to provide the lifting device 55 for each of the rotating bodies 41 and 42 of the second rotating body group 40. Furthermore, since the pair of second rotating body groups 40 are connected to one lifting device 55, it is easy to synchronize the timing of raising and lowering the second rotating body group 40.

Note that the lifting device 55 may be connected to the lower shaft 44, or may be connected to both the upper shaft 43 and the lower shaft 44. Separate lifting devices 55 may be connected to the second rotating body group 40, respectively. In this embodiment, the elevating device 55 is connected only to the second rotating body group 40, but the invention is not limited to this embodiment. The elevating device 55 may be connected to both the first rotary body group 30 and the second rotary body group 40 so that they can be raised and lowered independently.

By the way, in the trial conducted by the present inventor, when the transported object is transported along the height direction using a vertical heating furnace in which the transported object is sequentially transported along the height direction, the transported object is An event of deviation in the direction (direction perpendicular to the height direction) occurred. In a vertical heating furnace in which objects to be transported are sequentially transported from the bottom to the top, such a shift in the lateral direction of the objects to be transported can become larger as the object goes upward. The inventor believes that this phenomenon, in which the lateral deviation of the transported object increases as it goes upward, is due to the fact that the lateral deviation of the transported object accumulates from the bottom to the top. There is.

In the embodiment described above, the vertical heating furnace 10 includes a furnace body 11, a plurality of rotating bodies 31, 32, 41, 42 provided in the furnace space 12, a rotating device 50, and a lifting device 55. ing. The furnace body 11 has an internal furnace space 12 in which the objects A are transported along the height direction. The rotation axes of the plurality of rotating bodies 31, 32, 41, and 42 are set along the height direction around the conveyance area 12a where the object A is conveyed. The rotating device 50 rotates the rotating bodies 31, 32, 41, and 42 around a rotation axis. The lifting device 55 lifts and lowers the rotating bodies 41 and 42 along the rotation axis. The plurality of rotating bodies 31, 32, 41, 42 are provided at positions different from the first parts 30a, 40a, which have the plurality of support parts 30a1, 40a1 that support the transported object A, and the first parts 30a, 40a. and second parts 30b and 40b, respectively. The plurality of support parts 30a1, 40a1 are provided at predetermined intervals along the height direction in the first parts 30a, 40a.

When the rotating body supports the transported object A, the rotating device 50 rotates the rotating body so that the supporting parts 30a1 and 40a1 of the first parts 30a and 40a move to a position where the transported object A can be supported, In addition, the lifting device 55 raises the rotating body that supports the transported object A among the plurality of rotating bodies 31, 32, 41, and 42. When the rotating body does not support the object A, the rotating device 50 rotates the rotating body so that the second parts 30b and 40b face the side surfaces A1 and A2 of the object A. The second parts 30b and 40b are arranged at predetermined positions to correct the displacement of the object A to be transported.

In the vertical heating furnace 10 having such a configuration, when the object A is lifted, the object A is supported by the support section 40a1 of the first section 40a of the rotary body group 40 connected to the lifting device 55. There is. At this time, the second portion 30b of the rotating body group 30 that does not support the object A is directed toward the side surface A1 of the object A. By conveying the conveyed object A in this state, the displacement of the conveyed object A that may occur during conveyance is appropriately corrected by the second portion 30b of the rotary body group 30, and the conveyed object A is conveyed. Therefore, the object A to be transported inside the vertical heating furnace 10 is unlikely to suffer from transport troubles due to transport misalignment.

Further, when the second rotating body group 40 that has been raised descends, the second portion 40b of the second rotating body group 40 is directed toward the side surface A2 of the object A to be transported. As a result, even if the conveyed object A shifts in the direction of the side surface A2, the shift can be corrected by the second portion 40b of the second rotating body group 40. Therefore, the object A to be transported inside the vertical heating furnace 10 is easily transported with the misalignment corrected.

In the embodiment described above, when the first rotating body group 30 does not support the transported object A, the second portion 30b of the first rotating body group 30 is directed toward the pair of first side surfaces A1 of the transported object A. It is located in When the second rotating body group 40 does not support the object A, the second portion 40b of the second rotating body group 40 is arranged to face the pair of second side surfaces A2 of the object A. Therefore, when not supporting the conveyed object A, the first rotary body group 30 and the second rotary body group 40 are arranged at positions where they correct different side surfaces A1 and A2 from mutually different directions. As a result, the position of the conveyed object A is corrected from both side surfaces A1 and A2. As a result, transportation troubles due to transportation misalignment of the transported object A are less likely to occur.

<Control device 60>
The control device 60 controls the rotating device 50 and the lifting device 55. The control device 60 is realized by, for example, a microcomputer. The angle and timing at which the rotating bodies 31, 32, 41, and 42 are rotated by the rotating device 50 are programmed into the control device 60. The height and timing for raising and lowering the rotating bodies 31, 32, 41, and 42 by the lifting device 55 are programmed in the control device 60. In this embodiment, the lifting device 55 raises and lowers the rotating bodies 41 and 42 (second rotating body group 40) among the rotating bodies 31, 32, 41, and 42.

The control device 60 controls the rotating device 50 according to a predetermined program to rotate the rotating bodies 31, 32, 41, and 42. As a result, the control device 60 adjusts the angles of the rotating bodies 31, 32, 41, and 42 to a support angle that can support the transported object A, and a position of the transported object A that does not support the transported object A. Switch to correction angle.

In this embodiment, the rotating bodies 31 and 32 of the pair of first rotating body groups 30 rotate at the same timing, and the rotating bodies 41 and 42 of the pair of second rotating body groups 40 rotate at the same timing. It is configured. In other words, the control device 60 controls the rotating device 50a to rotate the first rotating body group 30 at the same timing. The control device 60 controls the rotating device 50b to rotate the second group of rotating bodies 40 at the same timing. The transported object A is supported by at least one of the pair of first rotating body groups 30 and the pair of second rotating body groups 40 with the transported object A in between. Further, the first rotating body group 30 or the second rotating body group 40 corrects the transported object A from both sides (in this embodiment, the side surface A1 or the side surface A2) so as to sandwich the transported object A therebetween. Therefore, of the side surfaces A1 and A2 of the conveyed object A, opposing sides are supported and corrected substantially simultaneously. Therefore, the transported object A is easily supported stably.

The control device 60 controls the lifting device 55 according to a predetermined program to lift and lower the second rotating body group 40. In this embodiment, the control device 60 controls the lifting device 55 to move the second rotating body group 40 to a predetermined position. As described above, the reference position is set at a position that is at the same height as the first rotating body group 30 that is not connected to the lifting device 55. When the second rotating body group 40 is located at the reference position, the upper and lower ends of the first rotating body group 30 and the second rotating body group 40 are arranged at substantially the same height. When the second rotating body group 40 is located at the upper position, the second rotating body group 40 is arranged at a position higher than the reference position by the pitch of the supporting parts 30a1 and 40a1. In addition to the upper position and the reference position, the positions to which the second rotating body group 40 moves are also set to positions at slightly different heights from the upper position and the reference position. By moving the second rotating body group 40 to a position higher or lower than the upper position and the reference position, interference of the other support part with the conveyed object A supported by one support part is suppressed. I can do it. In other words, by moving the second rotating body group 40 to a position slightly higher or lower than the upper position and the reference position, the transported object can be moved between the first rotating body group 30 and the second rotating body group 40. The delivery of A can become smoother. Note that the position where the rotating body is raised and lowered is not limited to this position.

By combining the rotation of the first rotary body group 30 and the second rotary body group 40 by the rotation device 50 and the lifting and lowering of the second rotary body by the lifting device 55, the transported object A is sequentially moved from the bottom to the top. transported. The conveyed object A is conveyed while being supported by the first rotary body group 30 and supported by the second rotary body group 40 repeatedly. An example of control of the rotating device 50 and the lifting device 55 realized by the control device 60 will be described below.

FIG. 3 is a time chart showing control by the control device 60. In FIG. 3, the operations of the first rotating body group 30 and the second rotating body group 40, which are realized by controlling the rotating device 50 and the lifting device 55 by the control device 60, are shown in chronological order. In FIG. 3, the angle and position of the first rotating body group 30 are shown by a two-dot chain line, and the angle and position of the second rotating body group 40 are shown by a solid line. 4 to 6 are schematic diagrams showing the operations of the first rotating body group 30 and the second rotating body group 40. In FIGS. 4 to 6, the direction in which the rotating bodies 31, 32, 41, and 42 rotate in each step is indicated by an arrow.

<Step S0>
Step S0 (see FIG. 3) may be an initial state. In step S0, the angles of the first rotating body group 30 and the second rotating body group 40 are both set to support angles. The position of the first rotating body group 30 is set to a reference position. The position of the second rotating body group 40 is set at a position slightly lower than the reference position. At this time, as shown in FIG. 4, the first portion 30a of the first rotating body group 30 is directed toward the second side surface A2 of the object A to be transported. The first portion 40a of the second rotating body group 40 is directed toward the first side surface A1 of the object A to be transported. The conveyed object A is supported by the support portion 30a1 of the first rotating body group 30.

<Step S1>
In step S1 (see FIG. 3), the control device 60 controls the elevating device 55 to perform a process of elevating the second rotating body group 40. The lifting device 55 raises the second rotating body group 40 to a position higher than the reference position. The lifting device 55 is configured such that the support portion 40a1 of the second rotating body group 40 supports the transported object A, and the transported object A (or the processed object placed on the transported object A) is rotated upward in the first rotation. It is raised to a position where it does not hit the support part 30a1 of the body group 30. Here, the lifting device 55 raises the second rotating body group 40 so that it is slightly higher than the first rotating body group 30. As a result, the transported object A is supported by the second rotating body group 40. For this reason, even when the first rotary body group 30 is rotated in a later process, the support portion 30a1 is unlikely to come into contact with the side surface A2 of the transported object A, and displacement of the transported object A is less likely to occur.

<Step S2>
In step S2 (see FIG. 3), the control device 60 controls the rotation device 50a to execute a process of rotating the first rotating body group 30. The rotation device 50a rotates the first rotating body group 30 270 degrees clockwise. As shown in FIG. 5, the second portion 30b of the first rotating body group 30 is oriented toward the first side surface A1 of the object A to be transported. At this time, the angle of the first rotating body group 30 is set to the correction angle. As a result, the second portion 30b of the first rotary body group 30 is arranged at a position where the displacement of the transported object A is corrected from the first side surface A1 side. The angle of the second rotating body group 40 remains the support angle.

<Step S3>
In step S3 (see FIG. 3), the control device 60 controls the elevating device 55 to perform a process of elevating the second rotating body group 40. At this time, the second portion 30b of the first rotating body group 30 is in a state facing the first side surface A1 of the object A to be transported. In this embodiment, the elevating device 55 raises the second rotating body group 40 by the pitch of the support parts 30a1 and 40a1. As a result, the second rotating body group 40 supporting the transported object A is lifted above the upper position. The conveyed object A is above the support part 30a1 which is one step above, and the support part 30a1 does not hit the side surface A2 of the conveyed object A even when the first rotating body group 30 rotates in later processing. lifted into position.

<Step S4>
In step S4 (see FIG. 3), the control device 60 controls the rotation device 50a to execute a process of rotating the first rotating body group 30. The rotation device 50a rotates the first rotating body group 30 270 degrees counterclockwise. As shown in FIG. 4, the first portion 30a of the first group of rotating bodies 30 is directed toward the second side surface A2 of the object A again. The angle of the first rotating body group 30 is set to a support angle. As a result, the support portion 30a1 of the first portion 30a of the first rotary body group 30 is placed at a position to support the transported object A. The angle of the first rotating body group 30 and the angle of the second rotating body group 40 are both set to support angles.

<Step S5>
In step S5 (see FIG. 3), the control device 60 controls the lifting device 55 to lower the second rotating body group 40. The lifting device 55 lowers the second rotary body group 40 to a position where the support portion 30a1 of the first rotary body group 30 supports the transported object A. Here, the lifting device 55 lowers the second rotating body group 40 to the upper position. As a result, the conveyed object A is transferred from the second rotating body group 40 to the first rotating body group 30 and is supported by the first rotating body group 30. Therefore, even when the second rotary body group 40 is rotated in a later process, the support portion 40a1 is unlikely to come into contact with the side surface A1 of the transported object A, and displacement of the transported object A is less likely to occur.

<Step S6>
In step S6 (see FIG. 3), the control device 60 controls the rotation device 50b to execute a process of rotating the second rotating body group 40. The rotation device 50b rotates the second rotating body group 40 270 degrees clockwise. As shown in FIG. 6, the second portion 40b of the second rotating body group 40 is directed toward the second side surface A2 of the object A to be transported. At this time, the angle of the second rotating body group 40 is set to the correction angle. The second portion 40b of the second rotating body group 40 is arranged at a position to correct the displacement of the transported object A from the second side surface A2 side. The angle of the first rotating body group 30 is set to a support angle.

<Step S7>
In step S7 (see FIG. 3), the control device 60 controls the lifting device 55 to lower the second rotating body group 40. At this time, the second portion 40b of the second rotating body group 40 is in a state facing the second side surface A2 of the object A to be transported. The lifting device 55 lowers the second rotating body group 40 to a position where the transported object A is supported by the first rotating body group 30. The lifting device 55 lowers the second rotating body group 40 to a position where the support portion 40a1 does not touch the side surface of the transported object A even when the second rotating body group 40 rotates in a later process. Here, the elevating device 55 lowers the second rotating body group 40 by the pitch of the support portions 30a1 and 40a1 so that the second rotating body group 40 is slightly lower than the reference position. The second rotating body group 40 descends with the second portion 40b facing the side surface A2 of the object A2. Note that since the conveyed object A is supported by the first rotating body group 30, it is not raised or lowered.

<Step S8>
In step S8 (see FIG. 3), the control device 60 controls the rotation device 50b to execute a process of rotating the second rotating body group 40. The rotation device 50b rotates the second rotating body group 40 270 degrees counterclockwise. As shown in FIG. 4, the first portion 40a of the second rotating body group 40 is again directed toward the first side surface A1 of the transported object A. At this time, the angle of the first rotating body group 30 and the angle of the second rotating body group 40 are set to support angles.

After the angle of the second rotating body group 40 is set to the support angle in step S8, the process in step S1 is executed again. The control device 60 controls the lifting device 55 to raise the second rotating body group 40 to a higher position than the reference position. Here, the lifting device 55 raises the second rotating body group 40 to a position slightly higher than the reference position. As a result, the transported object A is transferred from the first rotary body group 30 to the second rotary body group 40 and is supported by the second rotary body group 40 .

In this way, by the processing in steps S1 to S8, the object A to be transported is transported one step at a time to the upper support sections 30a1 and 40a1. In the vertical heating furnace 10, the control device 60 can repeatedly execute the processes of steps S1 to S8. At this time, the rotating bodies that are raised and lowered by the lifting device 55 are limited to the second rotating body group 40. Therefore, control by the control device 60 can be simplified. Further, since the rotating bodies 31, 32 are not raised or lowered, the driving of the rotating bodies 31, 32, 41, 42 becomes simple. As a result, a relatively simple device configuration can be realized. Furthermore, since the first rotary body group 30 is driven only by rotation, the sealing material between the shafts 33 and 34 attached to the first rotary body group 30 and the furnace body 11 is less likely to deteriorate. As a result, durability and maintainability can be improved.

Moreover, in the embodiment described above, the process of raising the second rotating body group 40 that supports the transported object A with the second portion 30b of the first rotating body group 30 facing the side surface A1 of the transported object A is performed. (Step S3), and a process of lowering the second rotating body 40 that does not support the transported object A with the second portion 40b of the second rotating body group 40 facing the side surface A2 of the transported object A (step S7). ) is being executed. Therefore, when the transported object A is transported, the transported object A is position-corrected alternately from the first side surface A1 side and the second side surface A2 side. The conveyed object A is sequentially moved along the height direction by the second rotary body group 40 while the displacement in the lateral direction (front/rear direction and left/right direction) is appropriately corrected by the second part 30b of the first rotary body group 30. transported. Therefore, transportation troubles due to shifting of the transported object A during transportation are less likely to occur.

In the embodiment described above, the first group of rotating bodies 30 is not raised and lowered, and the objects A are sequentially conveyed upward by the raising and lowering of the second group of rotating bodies 40. However, the transport of the object A to be transported and the control by the control device 60 realized by the vertical heating furnace 10 are not limited to the above-described embodiment. For example, a lifting device may be connected to the first rotating body group 30 as well as to the second rotating body group 40. The lifting device connected to the first rotating body group 30 may be configured to be able to rise and fall at a different timing from the lifting device 55 connected to the second rotating body group 40. Hereinafter, a configuration in which both the first rotating body group 30 and the second rotating body group 40 can be raised and lowered will be described. In addition, in the form described below, the elevating device 55 controlled by the control device 60 is also connected to the first rotating body group 30, and the control device 60 executes a control different from that in the embodiment described above. This embodiment is the same as the embodiment described above except for the following.

FIG. 7 is a time chart showing control by the control device 60. FIG. 7 shows control of a control device 60 according to another embodiment. In FIG. 7, as in FIG. 3, the angle and position of the first rotating body group 30 are shown by a two-dot chain line, and the angle and position of the second rotating body group 40 are shown by a solid line.

<Steps S0 to S7>
First, similar to the embodiment described above, the processes of steps S0 to S7 (see FIG. 7) are executed. As a result, the object to be transported A is transported by the second rotating body group 40 to the support section 30a1 located one step above, and is supported by the first rotating body group 30. At this time, the angle of the first rotating body group 30 is set to the support angle. The first rotating body group 30 is arranged at a reference position. The angle of the second rotating body group 40 is set to a correction angle. The second rotating body group 40 is located lower than the reference position and at a position where it does not interfere with the transported object A. In this embodiment, in steps S11 to S20 after step 7, control different from that in the embodiment described above is executed.

<Step S11>
In step S11 (see FIG. 7), the control device 60 controls the elevating device 55 to perform a process of elevating the first rotating body group 30. Here, the second portion 40b of the second rotating body group 40 is in a state facing the side surface A2 of the object A to be transported. The lifting device 55 raises the first rotating body group 30 above the upper position. As a result, the transported object A is located above the supporting section 40a1 which is located one step above, and the supporting section 40a1 remains on the side surface of the transported object A even when the second rotating body group 40 rotates in later processing. You can lift it to a position where it won't hit you. Further, in step S11, the control device 60 controls the lifting device 55 to raise the second rotating body group 40 to the reference position.

<Step S12>
In step S12 (see FIG. 7), the control device 60 controls the rotation device 50b to execute a process of rotating the second rotating body group 40 (see FIG. 4). As a result, the angle of the first rotating body group 30 and the angle of the second rotating body group 40 are both set to the support angle.

<Step S13>
In step S13 (see FIG. 7), the control device 60 controls the lifting device 55 to execute a process of lowering the first rotating body group 30. The lifting device 55 supports the first rotating body group 30, the supporting part 40a1 of the second rotating body group 40 supports the transported object A, and the supporting part 30a1 of the first rotating body group 30 supports the transported object A. Lower it to a position where it won't hit. Here, the lifting device 55 lowers the first rotating body group 30 slightly below the upper position. Thereby, the transported object A is supported by the second rotating body group 40.

<Step S14>
In step S14 (see FIG. 7), the control device 60 controls the rotation device 50a to execute a process of rotating the first rotating body group 30 (see FIG. 5). As a result, the second portion 30b of the first rotary body group 30 is arranged at a position where the displacement of the transported object A is corrected from the first side surface A1 side. As a result, even if the transported object A is shifted, the position of the transported object A can be corrected from the first side surface A1 side.

<Step S15>
In step S15 (see FIG. 7), the control device 60 controls the lifting device 55 to lower the first rotating body group 30. The lifting device 55 lowers the first group of rotating bodies 30 to a position where the object to be transported A is supported by the second group of rotating bodies 40 . Here, the lifting device 55 lowers the first rotating body group 30 so that the first rotating body group 30 is slightly lower than the reference position. Thereby, the transported object A is supported by the second rotating body group 40.

<Step S16>
In step S16 (see FIG. 7), the control device 60 controls the elevating device 55 to perform a process of elevating the second rotating body group 40. Here, the second portion 30b of the first rotating body group 30 is in a state facing the side surface A1 of the object A to be transported. The lifting device 55 raises the second rotating body group 40 above the upper position. As a result, the transported object A is located above the support section 30a1 which is one step above, and even when the first rotary body group 30 rotates in a later process, the support section 30a1 is placed on the side surface A2 of the transported object A. It can be lifted to a position where it will not be hit. Further, in step S16, the control device 60 controls the lifting device 55 to raise the first rotating body group 30 to the reference position.

<Step S17>
In step S17 (see FIG. 7), the control device 60 controls the rotation device 50a to execute a process of rotating the first rotating body group 30 (see FIG. 4). The angle of the first rotating body group 30 and the angle of the second rotating body group 40 are both set to support angles.

<Step S18>
In step S18 (see FIG. 7), the control device 60 controls the lifting device 55 to lower the first rotating body group 30. The lifting device 55 supports the second rotary body group 40 such that the support portion 30a1 of the first rotary body group 30 supports the transported object A, and the support portion 40a1 of the second rotary body group 40 supports the transported object A. Lower it to a position where it won't hit. Here, the lifting device 55 lowers the second rotating body group 40 slightly below the upper position. Thereby, the transported object A is supported by the first rotating body group 30.

<Step S19>
In step S19 (see FIG. 7), the control device 60 controls the rotation device 50b to execute a process of rotating the second rotating body group 40 (see FIG. 6). As a result, the second portion 40b of the second rotating body group 40 is placed at a position where the displacement of the transported object A is corrected from the second side surface A2 side. As a result, even if the transported object A is misaligned, the position of the transported object A can be corrected from the second side surface A2 side.

<Step S20>
In step S20 (see FIG. 7), the control device 60 controls the lifting device 55 to lower the second group of rotating bodies 40. The lifting device 55 lowers the second rotating body group 40 to a position where the transported object A is supported by the first rotating body group 30. The lifting device 55 lowers the support portion 40a1 to a position where it does not hit the side surface of the transported object A even when the second rotating body group 40 rotates in a later process. Here, the lifting device 55 lowers the second rotating body group 40 so that the second rotating body group 40 is slightly lower than the reference position. Thereby, the transported object A is supported by the first rotating body group 30.

In this way, by the processing in steps S11 to S20, the transported object A is alternately lifted by the first rotating body group 30 and the second rotating body group 40. As a result, the transported object A is transported one step at a time to the upper support sections 30a1 and 40a1. In the vertical heating furnace 10, the control device 60 can repeatedly execute the processes of steps S11 to S20. Here, the process of raising the first rotating body group 30 that supports the transported object A with the second portion 40b of the second rotating body group 40 facing the side surface A2 of the transported object A (step S11); , a process (step S16) of raising the second rotating body group 40 that supports the transported object A with the second portion 30b of the first rotating body group 30 facing the side surface A1 of the transported object A is executed. be done. As a result, the object A to be transported is alternately transported one stage by the first rotating body group 30 and the second rotating body group 40. The conveyed object A is not continuously conveyed by the same group of rotating bodies. The conveyed object A is alternately conveyed and position-corrected by the first rotating body group 30 and the second rotating body group 40. Therefore, transportation troubles due to transportation misalignment of the transported object A are less likely to occur.

Further, the control device 60 may be configured to perform simpler control. FIG. 8 is a time chart showing control by the control device 60 according to another embodiment. In FIG. 8, as in FIG. 3, the angle and position of the first rotating body group 30 are shown by a two-dot chain line, and the angle and position of the second rotating body group 40 are shown by a solid line. In the embodiment shown in FIG. 8, unlike the embodiment shown in FIG. 3, the second rotating body group 40 is controlled by the control device 60 to either the reference position or the upper position. Ru.

<Step S30>
Step S30 (see FIG. 8) may be in an initial state. In step S30, the angles of the first rotating body group 30 and the second rotating body group 40 are both set to support angles. The positions of the first rotating body group 30 and the second rotating body group 40 are both set to reference positions. At this time, as shown in FIG. 4, the first portion 30a of the first rotating body group 30 is directed toward the second side surface A2 of the object A to be transported. The first portion 40a of the second rotating body group 40 is directed toward the first side surface A1 of the object A to be transported. The conveyed object A can be supported by the support section 30a1 of the first rotating body group 30 and the support section 40a1 of the second rotating body group 40.

<Step S31>
In step S31 (see FIG. 8), the control device 60 controls the rotation device 50a to execute a process of rotating the first rotating body group 30. The rotation device 50a rotates the first rotating body group 30 270 degrees clockwise. As shown in FIG. 5, the second portion 30b of the first rotating body group 30 is oriented toward the first side surface A1 of the object A to be transported. At this time, the angle of the first rotating body group 30 is set to the correction angle. As a result, the second portion 30b of the first rotary body group 30 is arranged at a position where the displacement of the transported object A is corrected from the first side surface A1 side. The angle of the second rotating body group 40 remains the support angle.

<Step S32>
In step S32 (see FIG. 8), the control device 60 controls the elevating device 55 to perform a process of elevating the second rotating body group 40. At this time, the second portion 30b of the first rotating body group 30 is in a state facing the first side surface A1 of the object A to be transported. In this embodiment, the lifting device 55 raises the second rotating body group 40 to the upper position. The conveyed object A is lifted to the position of the support part 40a1 one step above.

<Step S33>
In step S33 (see FIG. 8), the control device 60 controls the rotation device 50a to execute a process of rotating the first rotating body group 30. The rotation device 50a rotates the first rotating body group 30 270 degrees counterclockwise. As shown in FIG. 4, the first portion 30a of the first group of rotating bodies 30 is directed toward the second side surface A2 of the object A again. The angle of the first rotating body group 30 is set to a support angle. As a result, the support portion 30a1 of the first portion 30a of the first rotary body group 30 is placed at a position to support the transported object A. The angle of the first rotating body group 30 and the angle of the second rotating body group 40 are both set to support angles.

<Step S34>
In step S34 (see FIG. 8), the control device 60 controls the rotation device 50b to execute a process of rotating the second rotating body group 40. The rotation device 50b rotates the second rotating body group 40 270 degrees clockwise. As shown in FIG. 6, the second portion 40b of the second rotating body group 40 is directed toward the second side surface A2 of the object A to be transported. At this time, the angle of the second rotating body group 40 is set to the correction angle. The second portion 40b of the second rotating body group 40 is arranged at a position to correct the displacement of the transported object A from the second side surface A2 side. The angle of the first rotating body group 30 is set to a support angle. The conveyed object A is supported by the first rotating body group 30.

<Step S35>
In step S35 (see FIG. 8), the control device 60 controls the lifting device 55 to lower the second group of rotating bodies 40. At this time, the second portion 40b of the second rotating body group 40 is in a state facing the second side surface A2 of the object A to be transported. The lifting device 55 lowers the second rotating body group 40 to a position where the transported object A is supported by the first rotating body group 30. Here, the lifting device 55 lowers the second rotating body group 40 to the reference position. The second rotating body group 40 descends with the second portion 40b facing the side surface A2 of the object A2. Note that since the conveyed object A is supported by the first rotating body group 30, it is not raised or lowered.

<Step S36>
In step S36 (see FIG. 8), the control device 60 controls the rotation device 50b to execute a process of rotating the second rotating body group 40. The rotation device 50b rotates the second rotating body group 40 270 degrees counterclockwise. As shown in FIG. 4, the first portion 40a of the second rotating body group 40 is again directed toward the first side surface A1 of the transported object A. At this time, the angle of the first rotating body group 30 and the angle of the second rotating body group 40 are set to support angles.

After the angle of the second rotating body group 40 is set to the support angle in step S36, the process of step S31 is executed again. As a result, the transported object A is transferred to the support section 30a1 located one stage above by the second rotating body group 40 with the displacement of the transported object A adjusted by the first rotating body group 30, and is moved upward one stage at a time. transported. Further, in this embodiment, the rotating body (in this embodiment, the second rotating body group 40) is set to be located at either the reference position or the upper position. Thereby, the transported object A can be transported in the transport direction with simpler control.

Further, the control device 60 may control the angles of the first rotating body group 30 and the second rotating body group 40 to angles other than the support angle and the correction angle. FIG. 9 is a schematic diagram of the first rotating body group 30 and the second rotating body group 40. In FIG. 9, retraction angles are set for the first rotating body group 30 and the second rotating body group 40. At the retraction angle, the second portions 30b and 40b are located further away from the transported object A than at the correction angle. In FIG. 9, when the rotating bodies 31, 32, 41, and 42 are set at the support angle, they are indicated by solid lines, when they are set at the correction angle, they are indicated by two-dot chain lines, and when they are set at the retraction angle, they are indicated by broken lines. has been done. The retraction angle is set to an angle between the support angle and the correction angle. In this embodiment, the retraction angle is a position rotated 90 degrees counterclockwise from the correction angle and 180 degrees clockwise from the support angle. Note that the support angle is not limited to this angle, and can be set to any angle between the correction angle and the support angle.

FIG. 10 is a time chart showing control by the control device 60 according to another embodiment. FIG. 10 shows control by the control device 60 in which a retraction angle is set as the angle at which the rotary bodies 31, 32, 41, and 42 are rotated by the rotation device 50. In FIG. 10, as in FIG. 3, the angle and position of the first rotating body group 30 are shown by a chain double-dashed line, and the angle and position of the second rotating body group 40 are shown by a solid line.

<Step S40>
Step S40 (see FIG. 10) may be in an initial state. In step S40, the angles of the first rotating body group 30 and the second rotating body group 40 are both set to support angles. The position of the first rotating body group 30 is set to a reference position. The position of the second rotating body group 40 is set at a position slightly lower than the reference position.

<Step S41>
In step S41 (see FIG. 10), the control device 60 controls the elevating device 55 to perform a process of elevating the second rotating body group 40. The lifting device 55 raises the second rotating body group 40 to a position higher than the reference position. Here, the lifting device 55 raises the second rotating body group 40 so that it is slightly higher than the first rotating body group 30. As a result, the transported object A is supported by the second rotating body group 40.

<Step S42>
In step S42 (see FIG. 10), the control device 60 controls the rotating device 50a to execute a process of rotating the first rotating body group 30. The rotation device 50a rotates the first rotating body group 30 270 degrees clockwise. The second portion 30b of the first rotating body group 30 is directed toward the first side surface A1 of the object A to be transported. At this time, the angle of the first rotating body group 30 is set to the correction angle. As a result, the second portion 30b of the first rotary body group 30 is arranged at a position where the displacement of the transported object A is corrected from the first side surface A1 side. The angle of the second rotating body group 40 remains the support angle.

<Step S43>
In step S43 (see FIG. 10), the control device 60 controls the rotation device 50a to execute a process of rotating the first rotating body group 30. The rotation device 50a rotates the first rotating body group 30 90 degrees counterclockwise. As a result, the first rotating body group 30 is set to the retracted angle. The second portion 30b of the first rotating body 30 is separated from the side surface A1 of the object A to be transported.

<Step S44>
In step S44 (see FIG. 10), the control device 60 controls the elevating device 55 to perform a process of elevating the second rotating body group 40. The elevating device 55 raises the second rotating body group 40 by the pitch of the support parts 30a1 and 40a1. As a result, the second rotating body group 40 supporting the transported object A is lifted above the upper position. At this time, the transported object A is transported while being separated from the second portion 30b of the first rotating body group 30.

<Step S45>
In step S45 (see FIG. 10), the control device 60 controls the rotating device 50a to execute a process of rotating the first rotating body group 30. The rotation device 50a rotates the first rotating body group 30 180 degrees counterclockwise. The first portion 30a of the first group of rotating bodies 30 is directed toward the second side surface A2 of the object A again. The angle of the first rotating body group 30 is set to a support angle. The angle of the first rotating body group 30 and the angle of the second rotating body group 40 are both set to support angles.

<Step S46>
In step S46 (see FIG. 10), the control device 60 controls the lifting device 55 to lower the second rotating body group 40. The lifting device 55 lowers the second rotating body group 40 to the upper position. As a result, the conveyed object A is transferred from the second rotating body group 40 to the first rotating body group 30 and is supported by the first rotating body group 30.

<Step S47>
In step S47 (see FIG. 10), the control device 60 controls the rotation device 50b to execute a process of rotating the second rotating body group 40. The rotation device 50b rotates the second rotating body group 40 270 degrees clockwise. The second portion 40b of the second rotating body group 40 is directed toward the second side surface A2 of the object A to be transported. At this time, the angle of the second rotating body group 40 is set to the correction angle. As a result, the second portion 40b of the second rotating body group 40 is placed at a position where the displacement of the transported object A is corrected from the second side surface A2 side. The angle of the first rotating body group 30 remains the support angle.

<Step S48>
In step S48 (see FIG. 10), the control device 60 controls the rotation device 50b to execute a process of rotating the second rotating body group 40. The rotation device 50b rotates the second rotating body group 40 90 degrees counterclockwise. As a result, the second rotating body group 40 is set to the retracted angle. The second portion 40b of the second rotating body 40 is separated from the side surface A2 of the object A to be transported.

<Step S49>
In step S49 (see FIG. 10), the control device 60 controls the lifting device 55 to lower the second rotating body group 40. The lifting device 55 lowers the second rotary body group 40 by the pitch of the support portions 30a1 and 40a1. The second portion 40b of the second rotating body group 40 descends while being separated from the transported object A.

<Step S50>
In step S50 (see FIG. 10), the control device 60 controls the rotation device 50b to execute a process of rotating the second rotating body group 40. The rotation device 50b rotates the second rotating body group 40 180 degrees counterclockwise. The first portion 40a of the second rotating body group 40 is directed toward the first side surface A1 of the object A again. At this time, the angle of the first rotating body group 30 and the angle of the second rotating body group 40 are set to support angles.

After the angle of the second rotating body group 40 is set to the support angle in step S50, the process in step S41 is executed again. In this manner, through the processing in steps S41 to S50, the object A is transported one step at a time to the upper support sections 30a1 and 40a1. When the lifting device 55 raises the transported object A, the second portion 30b of the first rotary body 30 that does not support the transported object A is moved from the predetermined position where the transported object A is corrected. It is placed at a position away from object A. This makes it difficult for the side surfaces A1 and A2 of the transported object A to rub against the rotating bodies 31, 32, 41, and 42 when the transported object A is transported upward. Furthermore, even when the object A is not being transported, the second portion 40b of the second rotating body 40 is placed at a position away from the object A when the second rotating body group 40 descends. configured to descend. As a result, problems such as rubbing against the side surfaces A1 and A2 of the transported object A when the second rotating body group 40 descends are less likely to occur.

Although the transport of the object A has been described above by giving a plurality of examples of control by the control device 60, the transport of the object A is not limited to the above-mentioned form.

In the embodiment described above, the object to be transported A is transported upward in the vertical heating furnace 10, but the invention is not limited to this form. In the vertical heating furnace 10, an entrance is set above the furnace body 11, and an exit is set below the furnace body 11, and the object A may be transported from the top to the bottom. This configuration is based on, for example, the timing of rotating the rotating bodies 31, 32, 41, 42 by the rotating device 50, which is programmed in the control device 60, and the timing of lifting and lowering the rotating bodies 31, 32, 41, 42 by the lifting device 55. This can be achieved by changing the timing.

In the embodiment described above, in the vertical heating furnace 10, the objects A to be transported are transported one stage at a time in the support parts 30a1 and 40a1 arranged in the vertical direction, but the invention is not limited to this form. In the vertical heating furnace 10, the objects A to be transported may be transported in multiple stages at support parts 30a1 and 40a1 arranged in the vertical direction. Such a configuration can be realized, for example, by using the control device 60 to change the height at which the lifting device 55 raises and lowers the rotating bodies 31, 32, 41, and 42. In this way, by changing the control program of the control device 60, the conveyance conditions such as the direction, speed, timing, etc. of conveyance of the object A can be set as appropriate. The conveyance conditions can be set according to the processing conditions of the object to be processed, etc.

Furthermore, the configurations of the rotating bodies 31, 32, 41, and 42 are not limited to the embodiments described above, and various changes can be made. FIG. 11 is a schematic diagram showing a vertical heating furnace 10A according to another embodiment. FIG. 11 schematically shows a cross section across the height direction of the vertical heating furnace 10A. The vertical heating furnace 10A shown in FIG. 11 has the same configuration as the vertical heating furnace 10 except for the rotating body 70.

As shown in FIG. 11, the vertical heating furnace 10A includes a plurality of rotating bodies 70 (four in this embodiment). The rotating body 70 is formed into a substantially rectangular plate shape extending in the height direction (not shown). The rotation axis of the rotating body 70 is set along the height direction of the vertical heating furnace 10. The rotation axis of the rotating body 70 is set approximately at the center of the rotating body 70 in a plane that crosses the height direction. The rotation axes of the plurality of rotating bodies 70 are set outside the corners of the conveyance area 12a, respectively, similarly to the rotating bodies 31, 32, 41, and 42 (see FIG. 2).

In this embodiment, the plurality of rotating bodies 70 each include a first part 70a and a second part 70b. The first part 70a has a plurality of support parts 70a1. The second portion 70b is a portion disposed at a position to correct the displacement of the transported object A. The second part 70b is provided at a different position from the first part 70a. In this embodiment, the first part 70a and the second part 70b are provided on one surface (in this embodiment, the surface facing the transported object A) of the rotating body 70 formed in a plate shape. In other words, the first part 70a and the second part 70b are provided on the same plane. The first portion 70a and the second portion 70b are set at approximately half of one surface of the rotating body 70 formed in a plate shape. The boundary between the first part 70a and the second part 70b is formed along the height direction.

A rotating device 50 (see FIG. 1) is connected to each of the plurality of rotating bodies 70. The plurality of rotating bodies 70 are rotated by the rotating device 50 and can be switched between a support angle and a correction angle. In FIG. 11, the rotating body 70 set at the supporting angle is shown by a solid line, and the rotating body 70 set at the correcting angle is shown by a broken line. In the embodiment shown in FIG. 11, the rotating body 70 is switched to the correction angle by rotating 90 degrees clockwise from the support angle. The rotating body 70 is switched to the support angle by rotating 90 degrees counterclockwise from the correction angle.

Although detailed explanations have been given above with reference to specific embodiments, these are merely examples and do not limit the scope of the claims. In this way, the technology described in the claims includes various modifications and changes of the embodiments described above.

Note that this specification includes the following items 1 to 9. Items 1 to 9 below are not limited to the embodiments described above.

Item 1 relates to a vertical heating furnace. In item 1, the vertical heating furnace is
a furnace body having an internal furnace space in which objects to be transported are transported along the height direction;
a plurality of rotating bodies that are provided in the furnace space and have rotating axes set along a height direction around a conveying area in which the objects to be conveyed are conveyed;
a rotation device that rotates the rotating body around the rotation axis;
an elevating device that raises and lowers at least one rotating body among the plurality of rotating bodies along the rotation axis,
The plurality of rotating bodies are
a first part having a plurality of support parts that support the transported object;
and a second part provided at a different position from the first part,
The plurality of supporting parts are provided at predetermined intervals along the height direction in the first part,
When the rotating body supports the conveyed object, the rotating device rotates the rotating body so that the supporting part of the first part moves to a position where it can support the conveyed object, and The lifting device raises or lowers the rotating body that supports the transported object among the plurality of rotating bodies,
When the rotating body does not support the transported object, the rotating device rotates the rotating body so that the second part faces the side surface of the transported object, and the second part supports the transported object. placed in a predetermined position to correct any misalignment.

Item 2 is the vertical heating furnace described in item 1,
The second portion is provided on a surface opposite to the surface on which the first portion is provided.

Item 3 is the vertical heating furnace described in item 1,
The first part and the second part are provided on the same plane.

Item 4 is the vertical heating furnace described in any one of items 1 to 3,
The support section has a horizontal upper end surface that supports a lower surface of the object to be transported.

Item 5 is the vertical heating furnace described in any one of items 1 to 4,
The plurality of rotating bodies each include a first rotating body group and a second rotating body group arranged diagonally, the first rotating body group rotating at the same timing, and the second rotating body group rotating at the same timing. are configured to rotate at the same timing.

Item 6 is the vertical heating furnace described in item 5,
When the first rotating body group does not support the conveyed object, a second portion of the first rotating body group is directed toward the pair of first side surfaces of the conveyed object,
When the second group of rotating bodies does not support the object, the second part of the second group of rotating bodies is directed toward a pair of second side surfaces of the object, which are different from the pair of first side surfaces. It is configured so that

Item 7 is the vertical heating furnace described in item 5 or 6,
Further comprising a control device that controls the rotating device and the lifting device,
The control device includes:
raising or lowering the second rotary body group that supports the conveyed object with the second portion of the first rotary body group facing the side surface of the conveyed object;
and raising or lowering the second rotary body group that does not support the conveyed object with the second part of the second rotary body group facing a side surface of the conveyed object. It is configured.

Item 8 is the vertical heating furnace described in item 5 or 6,
Further comprising a control device that controls the rotating device and the lifting device,
The control device includes:
raising or lowering the first rotary body group that supports the conveyed object with the second part of the second rotary body group facing the side surface of the conveyed object;
and raising or lowering the second rotary body group supporting the conveyed object with the second part of the first rotary body group facing a side surface of the conveyed object. It is configured.

Item 9 is the vertical heating furnace described in any one of items 1 to 8,
When the elevating device raises and lowers the object, the second portion of the rotating body that does not support the object moves closer to the object than the predetermined position that corrects the displacement of the object. placed at a distance from.

A Objects to be transported A1, A2 Side surface A3 Upper surface A4 Lower surface 10, 10A Vertical heating furnace 11 Furnace body 11a to 11d Side wall 11e Bottom part 11f Ceiling part 12 Furnace space 12a Transport area 13 Carrying inlet 14 Carrying out outlet 20 Carrying device 30 1 rotating body group 30a, 40a 1st part 30b, 40b 2nd part 30a1, 40a1 Support part 30a2, 40a2 Upper end surface 31, 32, 41, 42 Rotating body 33, 34, 43, 44 Shaft 40 2nd rotating body group 50 , 50a, 50b Rotating device 55 Lifting device 60 Control device 70 Rotating body

Claims (9)

a furnace body having an internal furnace space in which objects to be transported are transported along the height direction;
a plurality of rotating bodies that are provided in the furnace space and have rotating axes set along a height direction around a conveying area in which the objects to be conveyed are conveyed;
a rotation device that rotates the rotating body around the rotation axis;
an elevating device that raises and lowers at least one rotating body among the plurality of rotating bodies along the rotation axis,
The plurality of rotating bodies are
a first part having a plurality of support parts that support the transported object;
and a second part provided at a different position from the first part,
The plurality of supporting parts are provided at predetermined intervals along the height direction in the first part,
When the rotating body supports the conveyed object, the rotating device rotates the rotating body so that the supporting part of the first part moves to a position where it can support the conveyed object, and The lifting device raises or lowers the rotating body that supports the transported object among the plurality of rotating bodies,
When the rotating body does not support the transported object, the rotating device rotates the rotating body so that the second part faces the side surface of the transported object, and the second part supports the transported object. The vertical heating furnace is disposed at a predetermined position for correcting misalignment, and is located at a position facing the side surface of the object to be conveyed in the circumferential direction of the rotating shaft . The vertical heating furnace according to claim 1, wherein the second part is provided on a surface opposite to the surface on which the first part is provided. The vertical heating furnace according to claim 1, wherein the first part and the second part are provided on the same plane. The vertical heating furnace according to any one of claims 1 to 3, wherein the support portion has a horizontal upper end surface that supports a lower surface of the object to be transported. The plurality of rotating bodies each include a first rotating body group and a second rotating body group arranged diagonally, the first rotating body group rotating at the same timing, and the second rotating body group rotating at the same timing. The vertical heating furnace according to any one of claims 1 to 3, wherein the vertical heating furnaces are configured to rotate at the same timing. When the first rotating body group does not support the conveyed object, a second portion of the first rotating body group is directed toward the pair of first side surfaces of the conveyed object,
When the second group of rotating bodies does not support the object, the second part of the second group of rotating bodies is directed toward a pair of second side surfaces of the object, which are different from the pair of first side surfaces. The vertical heating furnace according to claim 5, wherein the vertical heating furnace is configured to be heated. Further comprising a control device that controls the rotating device and the lifting device,
The control device includes:
raising or lowering the second rotary body group that supports the conveyed object with the second portion of the first rotary body group facing the side surface of the conveyed object;
and raising or lowering the second rotary body group that does not support the conveyed object with the second part of the second rotary body group facing a side surface of the conveyed object. The vertical heating furnace according to claim 5, configured. Further comprising a control device that controls the rotating device and the lifting device,
The control device includes:
raising or lowering the first rotary body group that supports the conveyed object with the second part of the second rotary body group facing the side surface of the conveyed object;
Raising or lowering the second rotating body group supporting the conveyed object with the second part of the first rotating body group facing the side surface of the conveyed object is performed. The vertical heating furnace according to claim 5, wherein the vertical heating furnace is configured as follows. When the lifting device raises and lowers the object, the second portion of the rotary body that does not support the object is moved closer to the object than the predetermined position that corrects the displacement of the object. The vertical heating furnace according to any one of claims 1 to 3, which is located at a location remote from the furnace.

Images