JP7341458B2 - Work pasting device and contact position control device - Google Patents

Description

The present invention relates to a workpiece bonding device and a contact position control device.

As a conventional workpiece bonding device, for example, Patent Document 1 discloses a two-layer vacuum chamber type device that bonds a second workpiece made of a film or the like to a first workpiece made of a substrate or the like. The workpiece bonding apparatus described in Patent Document 1 includes a movable chamber body having a diaphragm that covers a pneumatic recess, and a fixed chamber body located opposite to the movable chamber body. This workpiece bonding device expands a diaphragm by pressurizing the internal space of the pneumatic recess, and bonds a second workpiece attached to the diaphragm to a first workpiece accommodated in a fixed chamber.

Japanese Patent Application Publication No. 2010-49048

In order to prevent air from entering between the first workpiece and the second workpiece, it is ideal that the second workpiece is bonded to the first workpiece in order from the center toward the outside. However, in the configuration described in Patent Document 1, the internal space of the pneumatic recess is pressurized from a vacuum state to atmospheric pressure, and the diaphragm rapidly expands. For this reason, it is difficult to define the position and range in which the second workpiece is pushed by the diaphragm, and there is a risk that an unnoticeable amount of air may enter between the workpieces to be bonded.

An object of the present invention is to provide a workpiece bonding device and a contact position control device that can suppress air from entering between the workpieces to be bonded.

In order to achieve the above object, the workpiece bonding apparatus according to the first aspect of the present invention includes:
a first chamber;
a second chamber facing the first chamber and in which a first workpiece is installed;
a diaphragm that adheres a sheet-shaped second workpiece to the first workpiece by expanding as pressure is applied to the internal space of the first chamber;
a roller that can roll along an opposing surface of the second work that faces the first work;
a movement control unit that controls movement of the roller in the in - plane direction of the opposing surface and movement of the roller in the out-of-plane direction of the opposing surface ,
The movement control section includes:
In the process of the expansion of the diaphragm, the roller is moved from a predetermined position between the second workpiece and the first workpiece and in contact with the opposing surface to the outer circumferential direction of the second workpiece and the Move it away from the diaphragm .
In order to achieve the above object, a workpiece bonding apparatus according to a second aspect of the present invention includes:
a first chamber;
a second chamber facing the first chamber and in which a first workpiece is installed;
a diaphragm that adheres a sheet-shaped second workpiece to the first workpiece by expanding as pressure is applied to the internal space of the first chamber;
a roller that can roll along an opposing surface of the second work that faces the first work;
a movement control unit that controls movement of the roller at least in the in-plane direction of the opposing surface;
a work stage provided at a position closer to the first work than the diaphragm and to which the second work is mounted;
a guide portion that guides movement of the work stage toward the first workpiece as the diaphragm expands;
The movement control section includes:
In the process of expanding the diaphragm, the roller is moved from a predetermined position between the second workpiece and the first workpiece and in contact with the opposing surface toward the outer circumference of the second workpiece. .

In order to achieve the above object, a contact position control device according to a third aspect of the present invention includes:
By pressurizing the diaphragm from one side, the second workpiece in the form of a film located between the diaphragm and the first workpiece is bonded to the first workpiece located on the other side of the diaphragm. A contact position control device that controls a position where a second workpiece contacts the first workpiece,
a roller that can roll along an opposing surface of the second work that faces the first work;
a movement control unit that controls movement of the roller in the in - plane direction of the opposing surface and movement of the roller in the out-of-plane direction of the opposing surface ,
The movement control section includes:
In the process of the expansion of the diaphragm, the roller is moved from a predetermined position between the second workpiece and the first workpiece and in contact with the opposing surface to the outer circumferential direction of the second workpiece and the Move it away from the diaphragm .

According to the present invention, it is possible to suppress air from entering between the works to be bonded.

FIG. 1 is a schematic diagram of a workpiece bonding apparatus in a state in which an upper chamber is closed according to an embodiment of the present invention. FIG. 2 is a schematic diagram including a view of the configuration of an upper chamber and the like in the workpiece bonding apparatus as seen from below. FIG. 3 is a schematic diagram of the workpiece bonding device in a state where the upper chamber is open. 3 is a flowchart illustrating an example of workpiece bonding processing. It is a figure for explaining the function of a roller. FIG. 7 is a diagram for explaining the function of a roller according to Modification 1. FIG. FIG. 7 is a diagram for explaining the function of a roller according to a second modification.

An embodiment of the present invention will be described with reference to the drawings.

As shown in FIG. 1, the workpiece bonding apparatus 10 according to the present embodiment is a two-layer vacuum chamber type apparatus in which a second workpiece W2 made of a film or the like is attached to a first workpiece W1 made of a substrate or the like. The first work W1 is an object to which the second work W2 is attached. The second workpiece W2 is a sheet-like member (including film-like and thin-plate-like members) that is attached to the first workpiece W1.

In the following, the configuration will be appropriately described using X, Y, and Z axes defined in the drawings and perpendicular to each other. In each axis direction, the direction in which the arrow points is defined as the positive (+) direction. For example, each of the X and Y axes is an axis along the in-plane direction of the second workpiece W2 in an unflexed state.

As shown in FIGS. 1 and 2, the workpiece bonding apparatus 10 includes an upper chamber 21, a lower chamber 31, a diaphragm 22, a workpiece stage 25, a chamber drive section 42, a control section 40, and a vacuum pump 41. , switching valves 43a and 43b, rollers 50a and 50b, roller position adjustment sections 60a and 60b, a guide section 70, and an alignment camera 80.

The lower chamber 31 is box-shaped and opens toward the upper chamber 21 . The lower chamber 31 has an internal space 31a that becomes a sealed space when the upper chamber 21 is closed. A workpiece support stand 32 is provided on the inner bottom surface of the lower chamber 31 . The workpiece support table 32 is a table on which the first workpiece W1 is mounted, and supports the first workpiece W1 on its upper surface. Note that the installation of the first work W1 on the work support stand 32 and the setting of the lower chamber 31 on the work support stand 32 on which the first work W1 is installed may be done manually or automatically by a robot (not shown). It's okay to be hurt. When the lower chamber 31 is driven by a robot, a configuration similar to or similar to a chamber drive section 42 that drives the upper chamber 21, which will be described later, can be adopted.

As shown in FIG. 1, the first workpiece W1 in this embodiment has an M-shaped cross-sectional shape along a plane parallel to the XZ plane. The first workpiece W1 has, for example, a shape that is curved with respect to the X axis but extends linearly without being curved with respect to the Y axis. Further, the first workpiece W1 is formed symmetrically (left-right symmetrical in FIG. 1) with respect to a virtual plane parallel to the YZ plane. Note that the first workpiece W1 may have a shape that is curved with respect to at least one of the X axis and the Y axis.

The upper chamber 21 is box-shaped and opens toward the lower chamber 31 . The upper chamber 21 is opened and closed with respect to the lower chamber 31 by a chamber drive unit 42 .

The diaphragm 22 has a membrane shape, and its outer peripheral end is fixed to the opening of the upper chamber 21, as shown in FIG. The internal space 21a of the upper chamber 21 is sealed by the diaphragm 22. The diaphragm 22 is made of an elastic body that elastically deforms when the internal space 21a of the upper chamber 21 is pressurized, such as a superelastic body such as rubber.

The work stage 25 faces the diaphragm 22 in the Z direction, and is provided at a position closer to the work support base 32 than the diaphragm 22 is. As shown in FIG. 2, the work stage 25 has a rectangular shape in plan view. The workpiece stage 25 is pushed in a direction toward the workpiece support base 32 by the expansion of the diaphragm 22, thereby attaching the second workpiece W2 to the first workpiece W1.

The work stage 25 includes a stage section 25a on which the second work W2 is mounted, and a stage support section 25b that elastically supports the stage section 25a with respect to the upper chamber.

The stage portion 25a has a larger area than the second workpiece W2, and is formed into a plate shape. The stage portion 25a is made of a material or shape that is less likely to be elastically deformed by external force than the diaphragm 22, and is elastically deformable along the curved surface of the first workpiece W1. For example, the stage portion 25a is made of a resin such as vinyl chloride, which has a higher elastic modulus than the diaphragm 22, or metal. The second workpiece W2 is mounted on the lower surface of the stage section 25a.
Note that the stage portion 25a and the second workpiece W2 may be bonded to each other via a removable slightly adhesive layer (not shown). Further, a configuration is adopted in which a vacuum chamber (not shown) is formed inside the stage part 25a, and the second workpiece W2 is attracted to the stage part 25a by evacuating this vacuum chamber with a vacuum source (not shown). You may.

The stage support section 25b elastically supports the stage section 25a with respect to the upper chamber 21. For example, one end of the stage support section 25b is fixed to the outer edge of the stage section 25a, and the other end is fixed to the inner peripheral surface of the upper chamber 21. The stage support portion 25b is an elastic body, and is formed of a material or shape that is more easily deformed by external force than the stage portion 25a. The stage support portion 25b is pushed by the diaphragm 22 and thereby elastically deforms more than the stage portion 25a.
As shown in FIG. 2, the stage support portion 25b is composed of, for example, four elastic portions E1 to E4 each having a band shape. It is supported by the upper chamber 21 via. The elastic parts E1 to E4 pull the stage part 25a toward its outer circumference. Each of the elastic parts E1 to E4 is made of, for example, a band-shaped rubber, a spring, or the like. The elastic parts E1 to E4 are provided, for example, at each of the four corners of the work stage 25, and pull the work stage 25 toward the outer circumference with a uniform force. The stage support portion 25b is made of, for example, a superelastic body such as rubber, a spring, or the like.
Note that the stage support section 25b may have a sheet shape, and a configuration may be adopted in which the stage section 25a is fixed on the lower surface thereof. In this case, the stage support portion 25b may be made of resin such as vinyl chloride. Moreover, the stage part 25a may be fixed to the stage support part 25b with bolts, adhesive, etc., or may be insert-molded into the stage support part 25b. Moreover, the stage support part 25b may be formed of the same material as the stage part 25a, and may be formed with a thinner thickness than the stage part 25a.

The chamber drive section 42 includes, for example, a cylinder operated by hydraulic pressure or pneumatic pressure, and moves the upper chamber 21 toward or away from the lower chamber 31 under the control of the control section 40 . This allows the upper chamber 21 to be opened and closed relative to the lower chamber 31.

The vacuum pump 41 operates under the control of the control unit 40 and brings at least one of the internal space 21a of the upper chamber 21 and the internal space 31a of the lower chamber 31 into a vacuum state.

The switching valves 43a and 43b are composed of, for example, electric valves or electromagnetic valves.
The switching valve 43a is provided in a flow path 45a that connects the vacuum pump 41 and the internal space 21a. Under the control of the control unit 40, the switching valve 43a can be operated in a conductive state in which the flow path 45a is fluidly connected, a blocked state in which the flow path 45a is shut off, and an open state in which the internal space 21a is opened to the atmosphere. Switch between. Note that, in addition to the switching valve 43a, a release valve for opening the internal space 21a may be provided in the upper chamber 21.
The switching valve 43b is provided in a flow path 45b that connects the vacuum pump 41 and the internal space 31a. Under the control of the control unit 40, the switching valve 43b can be operated in a conductive state in which the flow path 45b is fluidly connected, a blocked state in which the flow path 45b is blocked, and an open state in which the internal space 31a is opened to the atmosphere. Switch between. Note that, in addition to the switching valve 43b, a release valve for opening the internal space 31a may be provided in the lower chamber 31.

As shown in FIG. 2, the roller 50a and the roller 50b each have a cylindrical shape extending in the Y direction. One of the rollers 50a and 50b is located at one end of the work stage 25 in the X direction, and the other is located at the other end of the work stage 25 in the X direction. A shaft portion 51a extending in the Y direction is inserted into the roller 50a. The roller 50a is configured to be rotatable by sliding on the outer peripheral surface of the shaft portion 51a. Both ends of the shaft portion 51a are supported by shaft support portions 52a. The shaft support section 52a is movable in each of the X and Z directions by a roller position adjustment section 60a. That is, the roller 50a is movable in each of the X and Z directions by the roller position adjustment section 60a via the shaft section 51a and the shaft support section 52a. Note that the support mode and movement mode of the roller 50b are the same as those of the roller 50a, so below, the configuration related to one roller 50a will be mainly explained.

The roller position adjustment section 60a shown in FIG. 2 moves the roller 50a in each of the X and Z directions under the control of the control section 40. Thereby, the roller position adjustment section 60a adjusts the position of the roller 50a in the X and Z directions with respect to the second workpiece W2 mounted on the workpiece stage 25. Specifically, the roller position adjustment section 60a includes, as a configuration not shown, an X-direction moving section that moves the shaft support section 52a in the X direction, and a Z-direction moving section that moves the shaft support section 52a in the Z direction. For example, each of the X-direction moving section and the Z-direction moving section includes a motor, a ball screw that extends in each movement direction and is rotated by the motor, and a slider that moves by axial rotation of the ball screw.

The other roller 50b is also configured to be able to slide and rotate around the shaft part 51b supported by the shaft support part 52b, and is controlled in the X and Z directions by the roller position adjustment part 60b that operates under the control of the control part 40. It is configured to be movable in each direction.

Note that the structure for moving the roller 50a (part of the shaft support part 52a and the roller position adjustment part 60a) maintains the airtight state of the internal space 31a formed when the upper chamber 21 is closed with respect to the lower chamber 31. It is set up so that it can be realized. Thereby, even if the internal space 31a is in a vacuum state, the position of the roller 50a within the internal space 31a can be adjusted. The same applies to the configuration related to the roller 50b. Moreover, the roller position adjustment parts 60a and 60b may be provided in the internal space 31a.

The guide portion 70 guides the movement of the work stage 25 toward the first work W1 as the diaphragm 22 expands. The guide section 70 includes a pair of guide shafts 71 and a pair of stage fixing sections 72 having an insertion hole 72a through which the guide shafts 71 pass. As shown in FIG. 2, the stage fixing part 72 is a plate-shaped metal fitting, and is fixed to the side surface of the rectangular plate-shaped stage part 25a. In this example, the pair of stage fixing parts 72 are arranged so as to sandwich the stage part 25a from the lateral direction (Y direction) of the stage part 25a. Each stage fixing section 72 is located at the center of the stage section 25a in the longitudinal direction (X direction). The insertion hole 72a is a through hole that penetrates the stage fixing portion 72 in its thickness direction (Z direction). The diameter of the insertion hole 72a is set larger than the diameter of the guide shaft 71.

The pair of guide shafts 71 extend in the Z direction so as to pass through the insertion holes 72a of the stage portion 25a. The guide shaft 71 is formed into a cylindrical shape that is longer than the distance that the stage section 25a moves as the diaphragm 22 expands. The base end of the guide shaft 71 is fixed to the inner surface of the upper plate 21a of the upper chamber 21, for example. As shown in FIG. 2, the pair of guide shafts 71 are arranged at the center in the longitudinal direction of the stage section 25a. For example, the first workpiece W1 is mounted on the workpiece support base 32 such that the center portion C1 in the X direction is aligned with the guide shaft 71. Further, the second workpiece W2 is mounted on the workpiece stage 25 so that its center portion C2 in the X direction is aligned with the guide shaft 71. In other words, the guide shaft 71 is configured to support the second workpiece W2 so that the center portion C2 of the second workpiece W2 properly expands toward the center portion C1 of the first workpiece W1 when the workpieces are bonded together as described later. to guide you.

When the diaphragm 22 expands, the stage section 25a is pushed by the diaphragm 22 and moves downward (-Z direction). At this time, the movement of the stage portion 25a is guided by the guide shaft 71 through the insertion hole 72a. Therefore, when the stage part 25a moves, the stage part 25a is prevented from shifting along its surface direction, and thereby the second workpiece W2 is stuck to the first workpiece W1 with a deviation from the desired position. It is suppressed. As an example, the positional deviation can be 50 μm or less.

The alignment camera 80 photographs the first workpiece W1 and the second workpiece W2, and outputs the photographed data to the control unit 40. The alignment camera 80 includes, for example, four cameras for photographing corners located on diagonal lines of each of the first workpiece W1 and the second workpiece W2. The control unit 40 measures the amount of positional deviation between the first workpiece W1 and the second workpiece W2 in the X direction and the Y direction by analyzing the photographic data from the alignment camera 80. Furthermore, the positioning camera 80 is configured to be movable via a drive unit (not shown) under the control of the control unit 40.

The control unit 40 controls the overall operation of the workpiece bonding device 10, and controls each of the chamber drive unit 42, vacuum pump 41, switching valves 43a, 43b, roller position adjustment units 60a, 60b, and positioning camera 80. control the behavior of The control unit 40 includes a CPU (Central Processing Unit), a ROM (Read Only Memory) that stores a program that defines the procedure of processing by the CPU, a program that is executed in response to appropriate numerical input by the user, and other necessary information. It is equipped with a RAM (Random Access Memory) for temporarily storing data, a timer for measuring time, etc. In the ROM of the control unit 40, a program for executing a workpiece bonding process, which will be described later, is stored in advance, and the CPU reads and executes the program. Note that the control unit 40 may be one in which the CPU and another dedicated circuit cooperate to control the operation of the workpiece bonding apparatus 10.

In particular, the control unit 40 adjusts the distance between the rollers 50a and 50b in the X direction when attaching the second workpiece W2 to the first workpiece W1 using the diaphragm 22 that expands by pressurizing the internal space 21a. The position where the second workpiece W2 starts contacting the first workpiece W1 is adjusted. The rollers 50a and 50b can adjust the range in which the second workpiece W2 can expand as the diaphragm 22 and the workpiece stage 25 expand.
Specifically, when bonding the works, the expandable range of the second work W2 is regulated so that the second work W2 is bonded to the first work W1 in order from the center C2 to the outer periphery. The movement trajectory of the rollers 50a, 50b is determined in advance through simulation, experiment, etc., and the trajectory data is stored in the ROM. Then, the control unit 40 moves the roller 50a in each of the X and Z directions via the roller position adjustment unit 60a by numerical control (NC (Numerical Control)) so that the rollers 50a and 50b operate according to the trajectory data. The roller 50b is moved in each of the X and Z directions via the roller position adjustment section 60b. In addition, in this embodiment, since the first workpiece W1 is formed symmetrically, the roller 50a and the roller 50b are interlocked symmetrically.

For example, the roller 50a that moves according to the trajectory data is movable to each of the initial position P0, masked position P1, and non-masked position P2 shown in FIG.
The initial position P0 is a position that does not come into contact with the second workpiece W2 mounted on the workpiece stage 25, and is, for example, the position of the outer edge of the workpiece stage 25 in the X direction. Note that the initial position P0 may be a position where the roller 50a contacts the workpiece stage 25 as long as it does not prevent the attachment of the second workpiece W2 to the workpiece stage 25.
The mask position P1 is a position between the second workpiece W2 mounted on the workpiece stage 25 and the first workpiece W1 mounted on the workpiece support base 32, and is a position between the second workpiece W2 mounted on the workpiece stage 25 and the first workpiece W1 mounted on the workpiece support base 32. This is the position where it comes into contact with the opposing surface S (the surface of the second work W2 that faces the first work W1). For example, the mask position P1 is a position moved by a predetermined amount in the X direction from the initial position P0 toward the center C2 of the second workpiece W2 mounted on the workpiece stage 25. When the roller 50a moves from the initial position P0 to the mask position P1, since the roller 50a can rotate around the shaft portion 51a, it can smoothly roll on the opposing surface S of the second workpiece W2. The roller 50a located at the mask position P1 covers the facing surface S of the second work W2 from below, thereby regulating the position at which the second work W2 contacts the first work W1.
The non-mask position P2 is a position that does not come into contact with the second workpiece W2 mounted on the workpiece stage 25, and is a position that does not prevent the entire surface of the second workpiece W2 from being attached to the first workpiece W1. For example, the non-mask position P2 is a position moved from the mask position P1 to the outer circumferential side in the X direction of the second workpiece W2 mounted on the workpiece stage 25, and is moved in the direction away from the workpiece stage 25 and the diaphragm 22 (-Z direction).

The roller 50b, which moves according to the trajectory data, moves to the initial position P0, the mask position P1, and the non-mask position P2, and to the initial position Q0, the mask position Q1, and the non-mask position Q2, which are symmetrical in FIG. It is movable.
Further, the mask positions P1 and Q1 are positions closer to the outer circumference of the second workpiece W2 in the X direction than the center portion C2 of the second workpiece W2 mounted on the workpiece stage 25. Due to the distance in the X direction between the roller 50a at the mask position P1 and the roller 50b at the mask position Q1, the center C of the second work W2 can be brought into contact with the first work W1 before the outer circumferential side.

(Workpiece bonding process)
Next, the workpiece bonding process executed by the control unit 40 will be described with reference mainly to the flowchart shown in FIG. At the start of the workpiece bonding process, as shown in FIG. 2 workpiece W2 is mounted. Either a surface of the first workpiece W1 facing the second workpiece W2 or a surface of the second workpiece W2 facing the first workpiece W1 is coated with an adhesive such as a sheet of OCA (Optical Clear Adhesive) or the like. A liquid OCR (Optical Clear Resin) or the like is provided. It is assumed that at the start of the workpiece bonding process, the roller 50a is at the initial position P0, and the roller 50b is at the initial position Q0.

First, the control unit 40 executes workpiece positioning processing (step S1).
In the workpiece positioning process, as shown in FIG. 3, the control unit 40 causes the positioning camera 80 to enter between the first workpiece W1 and the second workpiece W2, and photographs the first workpiece W1 and the second workpiece W2. . Subsequently, the control unit 40 measures the positional deviation between the first workpiece W1 and the second workpiece W2 based on the photographic data from the alignment camera 80. This positional deviation is, for example, the amount of positional deviation of the second workpiece W2 with respect to the first workpiece W1 in the X direction and the Y direction. Subsequently, the control unit 40 controls the movement of the upper chamber 21 in each of the X and Y directions via the chamber drive unit 42 as necessary so as to eliminate the measured positional deviation. In this way, the control unit 40 adjusts the position of the second work W2 with respect to the first work W1 (positioning of the first work W1 and the second work W2). For example, during this alignment, the control unit 40 moves the upper chamber 21 in the X direction so that the center of the second workpiece W2 coincides with the center of the area where the second workpiece W2 is attached to the first workpiece W1. Move it in the Y direction. Note that when the alignment is completed, the alignment camera 80 is moved under the control of the control unit 40 to a position where it does not interfere with the opening/closing operation of the upper chamber 21.

When the above alignment is completed, the control unit 40 closes the upper chamber 21 to the lower chamber 31 via the chamber drive unit 42 (step S2).

Subsequently, the control unit 40 moves the roller 50a from the initial position P0 to the mask position P1 via the roller position adjustment unit 60a, and moves the roller 50b from the initial position Q0 to the mask position Q1 via the roller position adjustment unit 60b. (step S3).
Note that before closing the upper chamber 21, the rollers 50a and 50b may be moved to the mask positions P1 and Q1.

Subsequently, the control unit 40 brings the switching valves 43a and 43b into a conductive state and operates the vacuum pump 41 to bring the internal space 21a and the internal space 31a into a vacuum state (step S4).

Subsequently, the control unit 40 pressurizes the internal space 21a to atmospheric pressure by switching the switching valve 43a to the open state, and moves the rollers 50a, 50b from the mask positions P1, Q1 to the non-mask positions P2, Q2. (Step S5).

For example, first, the control unit 40 pressurizes the internal space 21a while keeping the rollers 50a and 50b at mask positions P1 and Q1. Due to the pressurization of the internal space 21a, the diaphragm 22 expands toward the first workpiece W1 and pushes the workpiece stage 25, on which the second workpiece W2 is mounted, downward. In this case, the expansion range of the diaphragm 22 and the workpiece stage 25 on which the second workpiece W2 is attached is regulated by the rollers 50a and 50b located at the mask positions P1 and Q1. The work stage 25 on which the work W2 is mounted expands downward between the roller 50a located at the mask position P1 and the roller 50b located at the mask position Q1. In this process, the shape of the second workpiece W2 mounted on the workpiece stage 25 changes from state A0 to state A1 shown in FIG. 5, and the center portion C2 contacts the first workpiece W1 first.

Then, when the center portion C2 of the second workpiece W2 comes into contact with the first workpiece W1, the control unit 40 gradually moves the rollers 50a and 50b from the masked positions P1 and Q1 to the non-masked positions P2 and Q2. . In this process, the shape of the second workpiece W2 mounted on the workpiece stage 25 changes from state A1 to state A2 shown in FIG. It's getting worse. Therefore, air is prevented from entering between the first workpiece W1 and the second workpiece W2. When the diaphragm 22 is sufficiently expanded, the stage portion 25a of the workpiece stage 25 will be in a curved state along the upper surface of the first workpiece W1. As a result, the entire area of the second workpiece W2 is pressed against the first workpiece W1. Further, even if the diaphragm 22 becomes wavy during the expansion process of the diaphragm 22, the stage portion 25a of the work stage 25 does not become wavy and maintains a flat plate shape. This also prevents air from entering between the first workpiece W1 and the second workpiece W2.

The control unit 40 measures the elapsed time from the pressurization of the internal space 21a using a timer, and when the elapsed time reaches a set time predetermined in the ROM, the control unit 40 controls the rollers at the mask positions P1 and Q1. It is only necessary to start moving 50a and 50b to the non-masked positions P2 and Q2. The set time can be determined as appropriate depending on the time at which the center portion C2 of the second workpiece W2 starts contacting the first workpiece W1. Further, the control unit 40 moves the rollers 50a and 50b based on the aforementioned locus data stored in the ROM in advance. Further, after the workpieces are bonded together, the control unit 40 returns the rollers 50a and 50b to the initial positions P0 and Q0.

Subsequently, the control unit 40 sets the internal space 31a to atmospheric pressure by switching the switching valve 43b to the open state, and then opens the upper chamber 21 with respect to the lower chamber 31 via the chamber drive unit 42, thereby opening the upper chamber 21. is moved in the Z direction so as to move away from the second work W2 (step S6). Thereby, the bonded first workpiece W1 and second workpiece W2 can be taken out from the lower chamber 31. With this, the workpiece bonding process is completed.

Note that the present invention is not limited to the above embodiments and drawings. It is possible to make changes (including deletion of constituent elements) as appropriate without changing the gist of the present invention. Various modifications will be explained below.

The first workpiece W1 is not limited to the shape described in the above embodiment, and can take various shapes including Modifications 1 and 2 described below.

(Modification 1)
As in Modification 1 shown in FIG. 6, the first workpiece W1 may have a W-shaped cross-sectional shape along a plane parallel to the XZ plane. The first workpiece W1 has a shape that is curved with respect to the X-axis, but not curved with respect to the Y-axis, and extends linearly, for example. Further, the first workpiece W1 is formed symmetrically (left-right symmetrical in FIG. 6) with respect to a virtual plane parallel to the YZ plane.
Also in this modification example 1, the expandable range of the second workpiece W2 is such that when the workpieces are pasted together, the second workpiece W2 is pasted to the first workpiece W in order from the center part C2 to the outer peripheral part. The locus of movement of the rollers 50a, 50b regulating the movement of the rollers 50a, 50b may be determined in advance through simulation, experiment, etc., and the locus data may be stored in the ROM. Then, the control unit 40 may execute a process similar to the workpiece bonding process shown in FIG. 4 . In particular, in step S5, for example, the control unit 40 pressurizes the internal space 21a while keeping the rollers 50a and 50b at the mask positions P1 and Q1. The diaphragm 22 and the work stage 25 to which the second work W2 is mounted expand downward between the roller 50a located at the mask position P1 and the roller 50b located at the mask position Q1. In this process, the shape of the second workpiece W2 mounted on the workpiece stage 25 changes from state A0 to state A1 shown in FIG. 6, and the center portion C2 contacts the first workpiece W1 first. Then, when the center portion C2 of the second workpiece W2 comes into contact with the first workpiece W1, the control unit 40 gradually moves the rollers 50a and 50b from the masked positions P1 and Q1 to the non-masked positions P2 and Q2. . In this process, the shape of the second workpiece W2 mounted on the workpiece stage 25 changes from state A1 to state A2 shown in FIG. It's getting worse. Therefore, air is prevented from entering between the first workpiece W1 and the second workpiece W2.

(Modification 2)
As in Modification 2 shown in FIG. 7, the first workpiece W1 may have an S-shaped cross-sectional shape along a plane parallel to the XZ plane. The first workpiece W1 has a shape that is curved with respect to the X-axis, but not curved with respect to the Y-axis, and extends linearly, for example. Note that, unlike the above embodiments and the first modification, the first workpiece W1 according to the second modification is formed asymmetrically with respect to a virtual plane parallel to the YZ plane.
In such a second modification, one of the pair of rollers 50a, 50b may be omitted. For example, when bonding the works, the roller 50a regulates the expandable range of the second work W2 so that the second work W2 is attached to the first work W1 in order from the center C2 to the outer circumference. The movement trajectory of the robot may be determined in advance through simulation, experiment, etc., and the trajectory data may be stored in the ROM. Then, the control unit 40 may execute a process similar to the workpiece bonding process shown in FIG. 4 . Particularly in step S5, for example, the control unit 40 pressurizes the internal space 21a while keeping the roller 50a at the mask position P1. The work stage 25 to which the diaphragm 22 and the second work W2 are attached expands downward between the roller 50a located at the mask position P1 and the end opposite to the roller 50a. In this process, the shape of the second workpiece W2 mounted on the workpiece stage 25 changes from state A0 to state A1 shown in FIG. 7, and the center portion C2 contacts the first workpiece W1 first. Then, when the center portion C2 of the second work W2 comes into contact with the first work W1, the control unit 40 gradually moves the roller 50a from the mask position P1 to the non-mask position P2. In this process, the shape of the second workpiece W2 mounted on the workpiece stage 25 changes from state A1 to state A2 shown in FIG. It's getting worse. Therefore, air is prevented from entering between the first workpiece W1 and the second workpiece W2.
In the above-described modifications 1 and 2, the shape of the workpiece support base 32 may be appropriately determined according to the shape of the first workpiece W1 so that the first workpiece W1 can be stably installed.

(Other variations)
The first workpiece W1 may have a curved shape (a convex curved surface or a concave curved surface) different from the above example, or may have a flat plate shape. In any case, by controlling the positions of the rollers 50a and 50b as described above, the second workpiece W2 can be attached to the first workpiece W1 in order from the center C2 to the outer circumferential side. It is possible to suppress air from entering between the second workpiece W2 and the second workpiece W2. However, the workpiece bonding apparatus 10 having the above configuration is suitable when the surface of the first workpiece W1 to which the second workpiece W2 is bonded has a curved surface. This is because it is difficult to properly attach the second workpiece W2 to the first workpiece W1 having a curved surface in order from the center C2 to the outer circumferential side, compared to the flat first workpiece W1. Further, the first workpiece W1 may have a partially curved shape or a protruding shape. As long as the first work W1 and the second work W2 can be bonded together using the work bonding method described above, the material, shape, and size of the first work W1 and the second work W2 are arbitrary. be.

In the above example, the upper chamber 21 is moved with respect to the lower chamber 31, but a configuration in which the lower chamber 31 is moved with respect to the upper chamber 21 may be adopted, or a configuration in which the upper chamber 21 and the lower chamber 31 are moved is shown. A configuration in which each of them is movable may be adopted. Further, the upper chamber 21 and the lower chamber 31 may be relatively movable in each direction of the X, Y, and Z axes.

The work stage 25 described above may be omitted, and a configuration may be adopted in which the diaphragm 22 contacts the second work W2. In this case, the movement of the rollers 50a and 50b may be controlled with respect to the second workpiece W2 attached to the diaphragm 22 in the same manner as described above.

Further, depending on the shape of the first workpiece W1, one of the rollers 50a and 50b may be omitted as described above, or the number of rollers whose positions can be controlled may be increased. For example, when the first workpiece W1 has a shape that curves with respect to both the It is also possible to arrange it along the line or to be able to move it in the diagonal direction of the second workpiece W2. In this case, the movement locus of each of the plurality of rollers is determined by simulation or experiment so that the second workpiece W2 is pasted to the first workpiece W1 in order from the center C2 to the outer circumference when the workpieces are pasted together. etc. may be determined in advance. Further, the configuration and shape of the guide portion 70 can also be changed according to the size and shape of the first workpiece W1. As long as the work stage 25 can be expanded along the guide part 70 and the center part C2 of the second work W2 can be stably brought into contact with the first work W1, the configuration and shape of the guide part 70 can be changed. Optional.

Further, the planar shapes of the diaphragm 22, the work stage 25, the second work W2, etc. are not limited to a rectangular shape (including a square), but may be a perfect circle, an ellipse, a polygon, or the like.

Further, the first work W1 may be any object as long as it is an object to which the second work W2 can be attached. For example, when the first workpiece W1 is plate-shaped, a liquid crystal substrate, a plasma display substrate, a solar cell module substrate, etc. can be employed as the first workpiece W1. Further, the second work W2 may be any sheet-like member that is attached to the first work W1. For example, various functional films such as antistatic, antireflective, etc. can be used as the second workpiece W2.

(summary)
(1) The workpiece bonding apparatus 10 described above includes an upper chamber 21 (an example of a first chamber), a lower chamber 31 (an example of a second chamber), a diaphragm 22, rollers 50a and 50b, and, for example, a control 40 and a movement control section consisting of roller position adjustment sections 60a and 60b. The lower chamber 31 faces the upper chamber 21, and the first workpiece W1 is installed therein. The diaphragm 22 expands as pressure is applied to the internal space 21a of the upper chamber 21, thereby bonding the sheet-shaped second workpiece W2 to the first workpiece W1. The rollers 50a and 50b can roll along the opposing surface S of the second workpiece W2. The movement control unit controls movement of the rollers 50a and 50b at least in the in-plane direction (for example, the X direction) of the opposing surface S. During the expansion process of the diaphragm 22, the movement control unit moves the rollers 50a and 50b to mask positions P1 and Q1 (predetermined positions) that are between the second workpiece W2 and the first workpiece W1 and are in contact with the opposing surface S. (for example, toward the non-masked positions P2, Q2) toward the outer circumference of the second work W2.
According to the configuration (1) above, as described above, it is possible to suppress air from entering between the first workpiece W1 and the second workpiece W2.

(2) Specifically, the mask positions P1 and Q1 are outside the center C2 of the second workpiece W2 (the second workpiece W2 installed on the workpiece stage 25 or the diaphragm 22), and the movement control section 22 expands and the center portion C2 of the second workpiece W2 comes into contact with the first workpiece W1, the rollers 50a and 50b are moved from the mask positions P1 and Q1 toward the outer circumferential direction.

(3) The movement control unit also controls the movement of the rollers 50a, 50b in the out-of-plane direction (for example, the Z direction) of the opposing surface S, and in the process of expanding the diaphragm 22, moves the rollers 50a, 50b to the mask position P1, It may be moved from Q1 in the outer circumferential direction and in a direction away from the diaphragm 22 (for example, in the −Z direction).

(4) Further, the workpiece bonding device 10 may include the workpiece stage 25 and the guide section 70. The work stage 25 is provided at a position closer to the first work 22 than the diaphragm 22, and the second work W2 is mounted thereon. The guide portion 70 guides the movement of the work stage 25 toward the first work W1 as the diaphragm 22 expands.
According to the configuration (4) above, even if the diaphragm 22 becomes wavy when the diaphragm 22 expands, the work stage 25 on which the second workpiece W2 is mounted is suppressed from waving. Therefore, it is possible to suppress air from entering between the first workpiece W1 and the second workpiece W2. Moreover, since the work stage 25 can be expanded along the guide part 70, the center part C2 of the second work W2 can be stably brought into contact with the first work W1.

(5) Specifically, the work stage 25 includes a stage section 25a on which the second work W2 is mounted, and a stage support section 25b that elastically supports the stage section 25a with respect to the upper chamber 21. The stage portion 25a is made of a material having a higher elastic modulus than the diaphragm 22.

(6) Furthermore, the surface of the first work W1 to which the second work W2 is attached may have a curved surface.

(7) The workpiece bonding device 10 described above includes the following contact position control device. The contact position control device pressurizes the diaphragm 22 from one side, so that the second work W1 in the form of a film located between the diaphragm 22 and the first work W1 is moved to the first work W1 located on the other side of the diaphragm 22. When bonding W2 together, the position where the second workpiece W2 contacts the first workpiece W1 is controlled.
The contact position control device includes rollers 50a and 50b, and a movement control section including, for example, a control section 40 and roller position adjustment sections 60a and 60b. The rollers 50a and 50b can roll along the opposing surface S of the second workpiece W2. The movement control unit controls movement of the rollers 50a and 50b at least in the in-plane direction (for example, the X direction) of the opposing surface S. During the expansion process of the diaphragm 22, the movement control unit moves the rollers 50a and 50b to mask positions P1 and Q1 (predetermined positions) that are between the second workpiece W2 and the first workpiece W1 and are in contact with the opposing surface S. (for example, toward the non-masked positions P2, Q2) toward the outer circumference of the second work W2.
According to the configuration (7) above, as described above, it is possible to suppress air from entering between the first workpiece W1 and the second workpiece W2.

In the above description, descriptions of known technical matters have been omitted as appropriate in order to facilitate understanding of the present invention.

10... Work pasting device W1... First work, C1... Central part W2... Second work, C2... Central part, S... Opposing surface 21... Upper chamber (an example of the first chamber), 21a... Internal space 22... Diaphragm 25... Work stage (25a... Stage part, 25b... Stage support part)
42... Chamber drive unit 31... Lower chamber (an example of a second chamber), 31a... Internal space 41... Vacuum pump, 43a, 43b... Switching valve 40... Control unit 50a, 50b... Roller, 60a, 60b... Roller position adjustment unit 70...Guide part, 80...Positioning camera

Claims (6)

a first chamber;
a second chamber facing the first chamber and in which a first workpiece is installed;
a diaphragm that adheres a sheet-shaped second workpiece to the first workpiece by expanding as pressure is applied to the internal space of the first chamber;
a roller that can roll along an opposing surface of the second work that faces the first work;
a movement control unit that controls movement of the roller in the in - plane direction of the opposing surface and movement of the roller in the out-of-plane direction of the opposing surface ,
The movement control section includes:
In the process of the expansion of the diaphragm, the roller is moved from a predetermined position between the second workpiece and the first workpiece and in contact with the opposing surface to the outer circumferential direction of the second workpiece and the move away from the diaphragm ,
Work pasting device. a first chamber;
a second chamber facing the first chamber and in which a first workpiece is installed;
a diaphragm that adheres a sheet-shaped second workpiece to the first workpiece by expanding as pressure is applied to the internal space of the first chamber;
a roller that can roll along an opposing surface of the second work that faces the first work;
a movement control unit that controls movement of the roller at least in the in-plane direction of the opposing surface ;
a work stage provided at a position closer to the first work than the diaphragm and to which the second work is mounted;
a guide portion that guides movement of the work stage toward the first workpiece as the diaphragm expands ;
The movement control section includes:
In the process of expanding the diaphragm, the roller is moved from a predetermined position between the second workpiece and the first workpiece and in contact with the opposing surface toward the outer circumference of the second workpiece. ,
Work pasting device. The work stage includes a stage part on which the second work is mounted, and a stage support part that elastically supports the stage part with respect to the first chamber,
The stage portion is formed of a material having a higher elastic modulus than the diaphragm.
The workpiece bonding device according to claim 2 . The predetermined position is outside the center of the second workpiece,
The movement control section includes:
After the diaphragm expands and the center portion of the second workpiece contacts the first workpiece, moving the roller from the predetermined position toward the outer circumferential direction;
The workpiece bonding apparatus according to any one of claims 1 to 3 . the surface of the first workpiece to which the second workpiece is attached has a curved surface;
The workpiece bonding device according to any one of claims 1 to 4 . By pressurizing the diaphragm from one side, the second workpiece in the form of a film located between the diaphragm and the first workpiece is bonded to the first workpiece located on the other side of the diaphragm. A contact position control device that controls a position where a second workpiece contacts the first workpiece,
a roller that can roll along an opposing surface of the second work that faces the first work;
a movement control unit that controls movement of the roller in the in - plane direction of the opposing surface and movement of the roller in the out-of-plane direction of the opposing surface ,
The movement control section includes:
In the process of the expansion of the diaphragm, the roller is moved from a predetermined position between the second workpiece and the first workpiece and in contact with the opposing surface to the outer circumferential direction of the second workpiece and the move away from the diaphragm ,
Contact position control device.

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