JP7339394B1 - Information processing device, information processing method, and program - Google Patents

Abstract

An object of the present invention is to assist a user in adjusting or maintaining an electron microscope. [Solution] A control unit acquires a first confirmation image taken by an electron microscope from a confirmation sample to confirm the state of the electron microscope after a predetermined adjustment is made; A first image taken from the confirmation sample using an electron microscope when the adjustment result is good, and a second image taken from the confirmation sample using an electron microscope when the adjustment result by the predetermined adjustment is not good. By inputting a confirmation image into a trained model that has been trained using as training data, a first judgment result is obtained as to whether or not the adjustment result of the electron microscope is good after a predetermined adjustment has been made. and outputting the first determination result to an output device. [Selection diagram] Figure 6

Description

The present invention relates to an information processing device, an information processing method, and a program.

Conventionally, various adjustment methods have been proposed for electron microscopes. For example, Patent Literature 2 below describes providing a display device that displays an optical axis adjustment image 15a obtained based on secondary electrons detected by a detector when performing optical axis adjustment. .

Further, in Patent Document 3 below, an issue is to quantify an artificial criterion and determine whether or not to adjust the axis of the charged particle beam based on the quantified criterion. Then, in Patent Document 3, the adjustment conditions of the optical element that adjusts the charged particle beam are changed, a plurality of images are acquired under the different adjustment conditions, and the image quality is selected from among the acquired images. selecting an acceptable image or an unacceptable image; obtaining a first image quality evaluation value based on the selected image; obtaining the obtained first image quality evaluation value and an image obtained by scanning the charged particle beam; A comparison with the second image quality evaluation value obtained from is described.

JP 2020-74294 A Japanese Patent Application Laid-Open No. 2016-35800 JP 2010-182424 A JP 2008-84565 A Japanese Patent Application Laid-Open No. 2015-2059 JP-A-6-325714

However, the conventional techniques described above do not provide a sufficient support mechanism when a user adjusts or maintains an electron microscope. As such, individual skill variations may occur in the adjustment or maintenance of electron microscopes. As a result, the device may not be used as desired.

The present invention, in one aspect, assists a user in adjusting or maintaining an electron microscope.

An embodiment of the present invention is exemplified by an information processing device including a control unit. The control unit acquires a first confirmation image captured by the electron microscope from a confirmation sample for confirming the state of the electron microscope after the predetermined adjustment is made, and adjusts by the predetermined adjustment. A first image taken from the confirmation sample with the electron microscope when the result is good and a second image taken from the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is not good A first determination of whether or not the adjustment result of the electron microscope after the predetermined adjustment is good by inputting the confirmation image into a trained model that has been trained using the image of and as teacher data and outputting the first determination result to an output device.

According to this information processing apparatus, it is possible to assist the user in adjusting or maintaining the electron microscope.

FIG. 1 is a diagram illustrating the configuration of an information system including an electron microscope according to one embodiment. FIG. 2 is a diagram illustrating the state of the optical axis. FIG. 3 is a diagram illustrating a knob for adjusting the optical axis of the electron beam. FIGS. 4A and 4B are diagrams illustrating electron microscope images of a sample photographed with the optical axis of the electron beam placed at a proper position and with the optical axis of the electron beam deviated from the proper position. FIG. 5 is a diagram illustrating a hardware configuration of an information processing apparatus; FIG. 6 is a diagram illustrating the program configuration and data flow in the information system. FIG. 7 is a diagram exemplifying the number of pieces of learning data and the determination result of confirmation images by a trained model. FIG. 8 is a diagram illustrating a processing flow of the information processing apparatus according to this embodiment. FIG. 9 is a diagram illustrating processing of the information processing apparatus according to Modification 1 of the present embodiment. FIG. 10 is a diagram illustrating processing of the information processing apparatus according to Modification 2 of the present embodiment.

Hereinafter, an electron microscope, an information system including the electron microscope, an information processing method, and a program according to one embodiment will be described with reference to the drawings.

(System configuration)
FIG. 1 is a diagram illustrating the configuration of an information system including an electron microscope 3 according to this embodiment. This information system has an electron microscope 3 and an information processing device 1 . The type of the electron microscope 3 is not limited, and the electron microscope 3 may be, for example, a scanning electron microscope, a transmission electron microscope, or the like. FIG. 1 illustrates the configuration of a scanning electron microscope.

As shown in FIG. 1, the electron microscope 3 includes an electron gun 32, an electron optical system 3EO for controlling the electron beam emitted from the electron gun 32, a stage 39 on which the sample 4 is mounted, a detector 37, and a control circuit. 31 and.

The electron gun 32 extracts electrons from a filament or the like at a predetermined acceleration voltage and supplies an electron beam to the electron optical system 3EO. The electron optical system 3EO has functions such as shaping, converging, or deflecting the electron beam. The electron optical system 3EO has a converging lens 33, a converging diaphragm 34, an astigmatism correction coil 3A, an objective lens 35, and an objective diaphragm . However, the electron optical system 3EO may have a plurality of converging lenses 33 and a plurality of converging diaphragms 34 .

The converging lens 33 controls the beam diameter of the electron beam passing through the converging diaphragm 34 and makes it enter the objective lens 35 and the objective diaphragm 36 . The astigmatism correction coil 3A controls the trajectory of the electron beam so that the cross-sectional shape of the electron beam becomes nearly circular. The objective lens 35 converges the electron beam controlled by the converging lens 33 to the minimum beam size at the surface of the sample 4 to form an electron probe. The objective diaphragm 36 restricts the electron beam converged by the converging lens 33 to the vicinity of the central axis and converges it by the objective lens 35 to reduce aberration.

A sample 4 is mounted on the stage 39 . In this embodiment, the sample 4 mounted on the stage 39 when the electron microscope 3 is maintained, inspected, or adjusted is called a standard sample. The electron microscope 3 irradiates the sample 4 with an electron beam converged by the objective lens 35 , detects secondary electrons or reflected electrons with the detector 37 , and obtains an electron microscope image of the surface of the sample 4 .

The control circuit 31 controls each part of the lens barrel of the electron microscope 3 and the stage 39 according to a command from the information processing apparatus 1, or acquires detection values from the sensors of each part. For example, the control circuit 31 controls electron emission from the electron gun 32 by a control signal C1 to the electron gun 32 . For example, the control circuit 31 controls the electron extraction voltage from the electron gun 32 . Also, for example, the control circuit 31 controls the convergence of the electron beam by a control signal C2 to the converging lens 33 . Further, for example, the control circuit 31 corrects the astigmatism of the electron beam by a control signal CA to the astigmatism correction coil 3A. Furthermore, for example, the control circuit 31 controls the electron beam to converge on the surface of the sample 4 and form a focal point by a control signal C3 to the objective lens 35 . In addition, the control circuit 31 deflects the electron beam with a deflection coil or an electrostatic deflection plate included in the electron optical system 3EO to scan the sample 4 . Furthermore, the control circuit 31 generates an electron microscope image of the sample 4 based on the detection signal from the detector 37 and information on the deflection position of the electron beam. Further, the control circuit 31 controls movement of the stage 39 by a control signal C4 to the stage 39. FIG.

The information processing apparatus 1 sends various commands to the control circuit 31 to control each part of the electron microscope 3 or monitor each part. The information processing device 1 also displays an electron microscope image of the sample 4 on a display (for example, the display device 14 in FIG. 5). The information processing apparatus 1 communicates with various systems such as external computers, servers, database systems, etc. via the network N1. The network N1 may be a Local Area Network (LAN) within the premises where the electron microscope 3 is installed, or may be a communication line connecting remote locations. The network N1 may be a dedicated line such as a Virtual Private Network (VPN) or a public network such as the Internet.

(Example of electron microscope maintenance and adjustment)
Examples of maintenance and adjustment items for the electron microscope are as follows.
(1) Replacing the filament when the filament is broken (2) Cleaning the Wehnelt electrode, etc., when replacing the filament (3) Cleaning the anode (4) Replacing the focusing diaphragm 34 (5) Replacing the objective diaphragm 36 (6) Replacing the cooling fan Cleaning of intake port (7) Adjustment of optical axis of electron beam After the execution of (1) to (5), the optical axis adjustment of (7) is performed.

FIG. 2 illustrates the state of the optical axis. FIG. 2A illustrates a state in which the optical axis of the electron beam has been adjusted to a proper position. When the optical axis is in a proper state, the central axis of the electron beam extracted from the electron gun 32 passes through the center of the circular converging aperture 34 and the center of the objective aperture 36, and irradiates the sample 4, etc. on the stage 39. be.

(B) of FIG. 2 illustrates a state in which the optical axis of the electron beam is shifted from the proper position. When the optical axis of the electron beam is deviated from the proper position, for example, the central axis of the electron beam extracted from the electron gun 32 does not pass through the center of the circular converging diaphragm 34 and passes through the convergence diaphragm 34 with an asymmetrical cross-sectional shape. In this case, the convergence of the electron beam by the objective lens 35 tends to be insufficient, and as a result, it becomes difficult to form an electron probe with the minimum beam size on the surface of the sample 4 . Therefore, the electron microscope image obtained from the sample 4 is difficult to focus. In this case, the current of the electron beam is reduced as compared with the state of (A) in which the optical axis is placed at an appropriate position. Also, the S/N (signal/noise) ratio of the detection signal obtained from the detector 37 is lowered compared to the state of (A) in which the optical axis is placed at an appropriate position. Furthermore, the brightness of the electron microscope image of the sample 4 obtained from the detector 37 is reduced compared to the state in (A) where the optical axis is properly positioned.

FIG. 3 illustrates a knob for adjusting the optical axis of the electron beam. In this embodiment, the optical axis of the electron beam is adjusted by moving the electron source of the electron gun 32 on a horizontal plane perpendicular to the center axis of the lens barrel of the electron microscope 3 . The electron source of the electron gun 32 is, for example, the portion of the electron gun 32 that includes the cathode (filament), the Wehnelt electrode, and the anode. FIG. 3 illustrates knobs 32A to 32D provided outside the housing of the electron gun 32. As shown in FIG. In this example, knobs 32A and 32C adjust the position in the direction of a first axis (for example, the X axis) on a horizontal plane perpendicular to the central axis of the lens barrel. Further, the knobs 32B and 32D adjust the position in the direction of the second axis (for example, the Y axis) perpendicular to the first axis on the horizontal plane perpendicular to the central axis of the lens barrel. A user or a maintenance person of the electron microscope 3 adjusts the pair of knobs 32A and 32C or the pair of knobs 32B and 32D so that the position of the optical axis of the electron beam is aligned with the central axis of the lens barrel of the electron microscope 3. Adjust to match. For example, the user or maintenance personnel operates the knobs 32A and 32C to adjust the brightness of the electron microscope image of the sample 4 to be relatively brightest.

FIG. 4 illustrates electron microscope images of the sample 4 taken with the optical axis of the electron beam at the proper position and with the optical axis of the electron beam deviated from the proper position. FIG. 4A is an electron microscope image of the sample 4 with the optical axis adjusted to the proper position. 4B, 4C, and 4D are 11.25 degrees, respectively, when the positions of the knobs 32A and 32C (or knobs 32B and 32D) in the state of FIG. 4A are 0 degrees. 10 is an electron microscopy image of Sample 4 at rotations of 22.5 degrees, 22.5 degrees, and 33.75 degrees; As already explained in FIG. 3, the electron source of electron gun 32 moves in the horizontal plane by a distance corresponding to the amount of rotation of knobs 32A and 32C (or knobs 32B and 32D). As a result, (B), (C), and (D) of FIG. 4 are electron microscope images of the sample 4 when the optical axis of the electron beam is shifted from the proper position. In FIG. 4, as shown in (A), (B), (C), and (D), the contrast and brightness of the electron microscope image decrease as the amount of rotation of the knob, that is, the amount of deviation of the optical axis increases.

Hereinafter, in the present embodiment, correct labels are set for the image in FIG. 4A, incorrect labels are set for the images in FIGS. The learning system used is trained to create a trained model. In the present embodiment, the information system acquires an electron microscope image taken from the sample 4 after adjusting the optical axis, inputs it to the trained model, and determines whether the optical axis of the electron beam is at the proper position or is at a misaligned position. determines whether it is in

(composition)
FIG. 5 illustrates the hardware configuration of the information processing device 1. As shown in FIG. The configuration of the information processing device 1 is similar to that of a normal computer. The information processing apparatus 1 has a CPU 11, a main storage device 12, and an external device connected via an external interface (I/F), and executes information processing by a computer program. External storage device 13, display device 14, operation device 15, and communication device 16 can be exemplified as external devices. The CPU 11, main storage device 12, and external interface (I/F) can be called a control unit.

The CPU 11 executes a computer program developed in the main storage device 12 and provides the functions of the information processing apparatus 1 . The CPU 11 is also called a processor. However, the CPU 11 is not limited to a single processor, and may have a multiprocessor configuration. Also, the CPU 11 may be a single processor connected by a single socket, and may have a multi-core configuration. Furthermore, at least part of the processing of the information processing device 1 is a digital signal processor (DSP), a graphics processing unit (GPU), a numerical processor, a vector processor, a dedicated processor such as an image processing processor, an application specific integrated circuit (ASIC), etc. may be provided by Also, at least part of the information processing device 1 may be a dedicated large scale integration (LSI) such as a Field-Programmable Gate Array (FPGA) or other digital circuits. Further, at least part of the information processing device 1 may include an analog circuit.

The main storage device 12 is also simply called a memory, and stores computer programs executed by the CPU 11, data processed by the CPU 11, and the like. The main storage device 12 is a dynamic random access memory (DRAM), a static random access memory (SRAM), a read only memory (ROM), or the like. Furthermore, the external storage device 13 is used, for example, as a storage area that assists the main storage device 12, and stores computer programs executed by the CPU 11, data processed by the CPU 11, and the like. The external storage device 13 is a hard disk drive, Solid State Drive (SSD), or the like. Further, the information processing apparatus 1 may be provided with a drive device for removable storage media. Removable storage media are, for example, Blu-ray discs, Digital Versatile Discs (DVDs), Compact Discs (CDs), flash memory cards, and the like.

The information processing device 1 also has a display device 14 , an operation device 15 and a communication device 16 . The display device 14 is, for example, a liquid crystal display, an electroluminescence panel, or the like. The operating device 15 is, for example, a keyboard, pointing device, or the like. In this embodiment, a mouse is exemplified as the pointing device. The communication device 16 exchanges data with other devices on the network N1 (see FIG. 1).

FIG. 6 is a diagram illustrating the program configuration and data flow in this information system. This information system has an apparatus status acquisition program 101 , a maintenance management support program 102 , and a learning system 111 . The device status acquisition program 101 and the maintenance management support program 102 are programs executed by the CPU 11 of the information processing device 1 . Learning system 111 may be a program executed by a computer. In that case, the learning system 111 may be a system provided by the CPU 11 of the information processing device 1 executing a program in the main storage device 12 . Further, the learning system 111 may be a system provided by executing a program by another computer that can communicate with the information processing apparatus 1 through the network N1 (see FIG. 1).

Furthermore, the learning system 111 may be a system including a neural network as hardware. Furthermore, in the case where the learning system 111 is a system including a neural network as hardware, the learning system 111 may be installed in the premises where the information processing apparatus 1 is installed. Moreover, the learning system 111 may operate within the same housing as the information processing apparatus 1 . Further, when the learning system 111 is a system including a neural network as hardware, the learning system 111 may be a system capable of communicating with the information processing apparatus 1 through the network N1 (see FIG. 1).

The learning system 111 creates a trained model A 112A as a first trained model, a trained model B 112B as a second trained model, and the like by learning teacher data. The teacher data for creating the learned model A 112A is, for example, an electron microscope image of the sample 4 photographed with the optical axis of the electron beam adjusted to the proper position, as described with reference to FIG. Including those with Further, the teacher data includes data in which an electron microscope image of the sample 4 photographed with the optical axis of the electron beam deviated from the proper position is labeled as incorrect. Teacher data is a set of data with these labels attached. When creating such teacher data, adjustments other than the optical axis of the electron beam, for example, the converging aperture 34
and the objective aperture 36 are adjusted to be free from contamination. The electron microscope image of the sample 4 captured with the optical axis of the electron beam adjusted to the proper position is the first image captured from the confirmation sample with the electron microscope 3 when the adjustment result by the predetermined adjustment is good. is an example of an image of Further, the electron microscope image of the sample 4 photographed with the optical axis of the electron beam deviated from the proper position is the second image photographed from the confirmation sample by the electron microscope 3 when the adjustment result by the predetermined adjustment is not good. is an example of an image of

Learning system 111 has, for example, a convolutional layer network for deep learning. The convolutional layer network may be a hardware network or a virtual one constructed by a computer program in the CPU 11 . The learning system 111 generates a trained model A 112A or the like in which filtering coefficients of a plurality of convolutional layers included in the convolutional layer network are adjusted by inputting teacher data as described above. Then, for example, the learned model A 112A, when an electron microscope image for confirmation is input from the maintenance management support program 102, has completed the optical axis adjustment of the electron microscope 3 from which the electron microscope image for confirmation has been acquired. (Correct) or unadjusted (Incorrect). As described with reference to FIG. 4, the electron microscope image with the optical axis not adjusted has lower contrast and brightness than the electron microscope image with the optical axis adjusted (correct answer).

FIG. 7 exemplifies the number of learning data items and the judgment result of the confirmation electron microscope image by the trained model A 112A. FIG. 7A illustrates the configuration of teacher data and the number of electron microscope images. In the example of FIG. 7, the number of electron microscope images is 60 for correct data (TRUE) and 60 for incorrect data (FALSE). Also, among the incorrect data, 15 sheets each have a knob rotation angle (see FIG. 3) of 11.25 degrees, 22.5 degrees, 33.75 degrees, and 45 degrees. It should be noted that all adjustment items other than the optical axis have already been adjusted at the time of photographing the correct and incorrect data in this case. Therefore, for example, the convergence diaphragm 34, the objective diaphragm 36, etc. are not contaminated, and the teacher data are acquired in a state in which astigmatism is corrected.

FIG. 7B exemplifies the determination result of the electron microscope image for confirmation by the learned model A 112A. In the determination by the learned model A 112A, the recall rate of 75%, the precision rate of 88.2%, A result of F value of 81.1% is obtained. In addition, for the electron microscope image that should be determined as correct data (TRUE) taken when the optical axis has been adjusted, the result was a recall rate of 90%, a precision rate of 78.3%, and an F value of 83.7%. is obtained. It should be noted that all adjustment items other than the optical axis have already been adjusted at the time of photographing the electron microscope image for confirmation in this case.

Here, the recall rate is the ratio of electron microscope images whose true values are judged to be "correct" by the learning system. Also, the precision is generally an index that indicates how correct the output result is in a learning system that performs judgment by machine learning. For example, it is the percentage of the electron microscope images that the learning system judged to be "correct" and for which the true value was actually correct. The F value is the harmonic mean of recall and precision.

Also, for example, the teacher data for creating the trained model B 112B may include images taken corresponding to the degree of contamination of one or more of the convergence aperture 34 and the objective aperture 36 . For example, the training data may include data in which electron microscope images of the sample 4 taken when the convergence aperture 34 and the objective aperture 36 have sufficiently low levels of contamination are labeled as correct. In addition, the teacher data is an electron microscope image of the sample 4 captured when the contamination level of one or more of the converging aperture 34 and the objective aperture 36 has deteriorated beyond a predetermined limit, and is labeled as an incorrect answer. may include attached data. The training data may be a collection of data labeled in this way. It should be noted that all adjustment items other than the convergence diaphragm 34 and the objective diaphragm 36 have already been adjusted at the time of photographing the electron microscope image for confirmation in this case. An electron microscope image taken of the sample 4 when the level of contamination on the focusing diaphragm 34 and the objective diaphragm 36 is sufficiently low is an example of a third image. Further, an electron microscope image of the sample 4 obtained when the contamination level of one of the converging diaphragm 34 and the objective diaphragm 36 exceeds a predetermined limit is an example of the fourth image.

The learning system 111 generates a trained model B 112B by inputting such teacher data. Then, as exemplified in FIG. 6, the learned model B 112B, when an electron microscope image for confirmation is input from the maintenance management support program 102, is the state of the converging aperture 34 and the objective aperture 36 of the electron microscope 3. judge. For example, the trained model B 112B determines that contamination of the convergence aperture 34 and the objective aperture 36 is sufficiently low (correct) in the electron microscope 3 from which the confirmation electron microscope image was acquired. Trained Model B 112B also determines that the level of contamination of at least one of convergence aperture 34 and objective aperture 36 exceeds a predetermined limit (wrong answer). When at least one of the converging aperture 34 and the objective aperture 36 is contaminated, the astigmatism becomes large, and the pattern in the electron microscope image of the surface of the sample 4 is uniformly distorted in a certain direction to some extent. It often looks stretched in that direction.

The device status acquisition program 101 acquires various information via the control circuit 31 of the electron microscope 3 . The information acquired by the device state acquisition program 101 is, for example, an electron microscope image of the sample 4, various physical quantities, and the like. Examples of various physical quantities include brightness of an electron microscope image, change in the electron microscope image during focus adjustment, astigmatism correction amount, image contrast, and the like.

The brightness of the electron microscope image can be calculated, for example, as the average value of each pixel in the pixel array in the electron microscope image of the sample 4 . The brightness of the electron microscope image may be the result of a user's determination of relative brightness. For example, when the user operates the knobs 32A and 32C for optical axis adjustment illustrated in FIG. , the optical axis may be adjusted. The information processing device 1 may receive such adjustment results from the user.

How the electron microscope image changes during focus adjustment is, for example, when the current of the objective lens 35 is changed, the electron microscope image displayed on the display device 14 is accompanied by parallel movement on the screen of the display device 14. whether or not it changes. If the optical axis of the electron beam is deviated from the center of the lens barrel (for example, the center of the aperture of the converging diaphragm 34), the current of the objective lens 35 is changed to change the focus of the electron beam. The beam irradiation position shifts. As a result, the electron microscope image displayed on the display device 14 is translated on the screen. In this way, it is possible to determine whether the optical axis of the electron beam is deviated from the center of the lens barrel by parallel movement of the electron microscope image on the screen corresponding to the change in the current value of the objective lens 35 .

The astigmatism correction amount can be specified as the current value of the astigmatism correction coil 3A. The presence or absence of astigmatism can be identified by deformation of the shape in an electron microscope image of the sample 4 . For example, when the sample 4 has a known surface structure, it is sufficient to detect that the pattern in the electron microscope image of the sample 4 is uniformly distorted in a specific direction with respect to the known surface structure. Note that the presence or absence of astigmatism may be determined by the user. Furthermore, even if the user maximizes the current value of the astigmatism correction coil 3A, the astigmatism cannot be corrected and the electron microscope image is uniformly distorted in a specific direction. Contamination is likely to exceed limits. This information system judges the state of the electron microscope based on the judgment of the electron microscope image based on the trained teacher data and the input from the user. This information system supports maintenance work and adjustment work of the electron microscope 3 .

(processing flow)
FIG. 8 illustrates a processing flow of the information processing apparatus 1 according to this embodiment. This processing is executed by the CPU 11 of the information processing apparatus 1 according to a computer program developed in the main storage device 12 so as to be executable. In this process, the information processing apparatus 1 receives an input indicating that the optical axis of the electron beam has been adjusted as an example of the predetermined adjustment (hereinafter referred to as "optical axis adjusted input") (S1). Instead of the input indicating that the optical axis has been adjusted, for example, a command from the user to determine the state of the electron microscope 3 after optical axis adjustment may be input to the information processing apparatus 1 . When the information processing apparatus 1 receives an input indicating that the optical axis has been adjusted, the information processing apparatus 1 acquires an electron microscope image of the sample 4 for confirmation (S2). The electron microscope image acquired in S2 is an example of the first confirmation image, and the process of S2 is an example of acquiring the first confirmation image.

Then, the information processing apparatus 1 inputs the electron microscope image of the sample 4 to the learned model A 12A and acquires the determination result (S3). As described above, the trained model A 12A has learned the electron microscope image of the sample 4 when the optical axis adjustment is good and the electron microscope image of the sample 4 when the optical axis adjustment is not good. Also, the determination result in S3 is an example of the first determination result.

If the determination result of the learned model A 12A indicates that the optical axis adjustment is good (OK), the information processing device 1 outputs to the display device 14 that the optical axis adjustment is good (S5). On the other hand, if the determination result of the learned model A 12A indicates that the optical axis adjustment is not good (OK), the information processing device 1 outputs an instruction to re-execute the optical axis adjustment to the display device 14 (S6). The processing of S5 and S6 is an example of outputting the first determination result.

(Effect of Embodiment)
As described above, the information system of the present embodiment has learned the electron microscope image of the sample 4 when the optical axis adjustment is good and the electron microscope image of the sample 4 when the optical axis adjustment is not good. It has a trained model A 12A. Then, this information system judges the electron microscope image of the sample 4 after the optical axis adjustment using the learned model A 12A. Conventionally, the quality of the optical axis adjustment is determined, for example, by changes in the relative brightness of the electron microscope image displayed on the display device 4, or by the electron microscope image on the screen of the display device 4 when the objective lens 35 is adjusted. It is determined by the user based on the presence or absence of parallel movement of . As in the present embodiment, by acquiring the determination result from the trained model A 12A, it is possible to obtain a determination in a short time that does not depend on the user's subjectivity. Therefore, the present information system can improve functions and usability especially in terms of maintenance management for users of electron microscopes or service personnel in charge of maintenance management.

(Modification)
FIG. 9 illustrates processing of the information processing apparatus 1 according to Modification 1 of the present embodiment. In the process of FIG. 8, when the determination result of the learned model A 12A indicates that the optical axis adjustment is not good (OK), the information processing device 1 outputs an instruction to re-execute the optical axis adjustment to the display device 14, End the process. However, the information processing device 1 may perform further determination according to the user's operation.

In FIG. 9, the processing from S1 to S5 is the same as in FIG. 8, so the description thereof will be omitted. If the determination result of the learned model A 12A indicates that the optical axis adjustment is not good (OK), the information processing device 1 outputs an instruction to the user to confirm the optical axis adjustment to the display device 14, and the user (S11). As explained in FIG. 8, trained model A 12A
is an example of the first determination result. The process of S11 is an example of outputting an instruction to readjust the optical axis of the electron beam to the display device 14, which is an output device, when the first determination result is not good.

Then, the user confirms the optical axis adjustment again. Here, for example, the user operates the knobs 32A and 32C (or the knobs 32B and 32D) illustrated in FIG. 3 to confirm whether the electron microscope image is relatively brightest. Also, for example, when the current value of the objective lens 35 is adjusted, the user confirms that there is no parallel movement of the electron microscope image on the screen of the display device 4 or that the movement is minimal. These procedures allow the user to confirm that the optical axis has been adjusted to the proper position. If the user recognizes that the optical axis has not been adjusted to an appropriate position, the user can adjust the optical axis again according to a predetermined procedure. That is, confirmation of optical axis adjustment includes readjustment of the optical axis.

Then, the information processing device 1 receives the confirmation result of the optical axis adjustment. Then, if the user's confirmation result indicates that the optical axis adjustment is not satisfactory (OK) (N in S12), the information processing apparatus 1 outputs an error (S13). In this case, for example, the person in charge of maintenance and management is notified of error information and a request for maintenance work. This is because there is a possibility that a problem that cannot be solved by the user's adjustment has occurred.

On the other hand, if the optical axis adjustment is confirmed by the user as being good (OK) (Y in S12), the information processing apparatus 1 acquires an electron microscope image of the sample 4 for confirmation again. Then, the information processing apparatus 1 inputs the acquired electron microscope image of the sample 4 to the learned model B 12B, and acquires the determination result (S14). Here, acquiring the electron microscope image of the confirmation sample 4 again means obtaining a second confirmation image captured from the confirmation sample 4 with the electron microscope 3 after the optical axis is readjusted. This is an example of acquiring. Also, the process of S14 is an example of acquiring the second determination result as to whether or not the contaminant state of the aperture is below the standard.

Here, the trained model B 12B is an electron microscope image of the sample 4 when either the convergence diaphragm 34 or the objective diaphragm 36 is contaminated, and an electron microscope image when neither the convergence diaphragm 34 nor the objective diaphragm 36 is contaminated. The electron microscope image of sample 4 has already been learned. If the determination result of the trained model B 12B is good (OK) (Y in S15), the information processing device 1 ends the process.

On the other hand, if the determination result of the trained model B 12B is not good (OK) (N in S15), the information processing apparatus 1 outputs to the display device 14 an instruction to prompt the user to correct astigmatism. Then, the information processing apparatus 1 waits for input of the correction result from the user (S16). Correction of astigmatism is performed by adjusting the current of the astigmatism correction coil 3A. Then, when it is input that the astigmatism correction result is good (OK) (Y in S17), the information processing apparatus 1 ends the process. If the determination result of the trained model B 12B is not good (OK) (N in S15), the information processing apparatus 1 may immediately perform the process of S18 without performing the processes of S16 and S17. . In this case, the information processing apparatus 1 outputs to the display device 14 an instruction to the user to replace at least one of the convergence aperture 34 and the objective aperture 36 and correct astigmatism after the replacement.

On the other hand, when it is input that the result of astigmatism correction is not satisfactory (OK) (N in S17), the information processing apparatus 1 replaces at least one of the converging aperture 34 and the objective aperture 36, and An instruction to the user to correct astigmatism after replacement is output to the display device 14 . Then, the information processing apparatus 1 waits for input from the user of the result of the subsequent astigmatism correction (S18). The result of the astigmatism correction is not good (OK) means that the astigmatism of the electron beam cannot be adjusted within the reference range by the astigmatism correction. In this case, at least one of the convergence diaphragm 34 and the objective diaphragm 36 is exchanged. Note that the user may replace all of the convergence aperture 34 and the objective aperture 36 . Then, the user corrects astigmatism after changing the diaphragm. When it is input that the result of astigmatism correction after aperture change is good (OK) (Y in S19), the information processing apparatus 1 ends the process. At this time, the information processing apparatus 1 may input the electron microscope image of the sample 4 to the learned model B 12B again to acquire the determination result.

On the other hand, when it is input that the result of astigmatism correction after replacement of all of the convergence diaphragm 34 and the objective diaphragm 36 is not good (OK) (N in S19), the information processing device 1 1 outputs an error (S20). In this case, for example, the person in charge of maintenance and management is notified of error information and a request for maintenance work.

According to the processing of the modified example as described above, when the determination result of the learned model A 12A after the optical axis adjustment is not good (OK), the information processing device 1 instructs to reconfirm the optical axis adjustment. Instructions for the user are output to the display device 14 . As a result, the information processing apparatus 1 determines the electron microscope image of the sample 4 for confirmation using the learned model B 12B while confirming that the optical axis has been adjusted. Therefore, the information processing apparatus 1 can more reliably determine contamination of the convergence diaphragm 34, the objective diaphragm 36, etc., after excluding the state in which the optical axis is not adjusted. Furthermore, when the determination result of the learned model B 12B is not good (OK) (N in S15), the information processing apparatus 1 instructs correction of astigmatism. Therefore, even if it is determined that the convergence diaphragm 34, the objective diaphragm 36, etc. may be contaminated, the information processing apparatus 1 first instructs the user to correct astigmatism. As a result, even if convergence diaphragm 34, objective diaphragm 36, etc., may be contaminated, replacement of convergence diaphragm 34, objective diaphragm 36, etc. is not required if astigmatism can be corrected. On the other hand, if the astigmatism correction result is not good (OK), the information processing apparatus 1 instructs replacement of at least one of the convergence diaphragm 34 and the objective diaphragm 36 . That is, the information processing apparatus 1 instructs replacement of at least one of the convergence diaphragm 34 and the objective diaphragm 36 when it is determined that astigmatism cannot be corrected. In this way, the information processing apparatus 1 combines the determination by the learned model A 12A and the learned model B 12B for the electron microscope image of the confirmation sample 4 with the result of the user's maintenance work of the electron microscope 3. can support the user's maintenance and management work.

FIG. 10 illustrates processing of the information processing device 1 according to Modification 2 of the present embodiment. In FIG. 8 (Modification 1), after the user reconfirms the optical axis adjustment, the information processing apparatus 1 inputs the electron microscope image of the sample 4 to the learned model B 12B, and determines whether or not astigmatism correction is necessary. was judged. However, the information processing apparatus 1 may prompt the user for confirmation instead of having the trained model B 12B make such determination. That is, when the reconfirmation result of the optical axis adjustment by the user is good (OK) (Y in S12), the information processing apparatus 1 acquires the electron microscope image of the sample 4 for confirmation again. Then, the user is instructed to check the acquired electron microscope image of the confirmation sample 4 (S14A). As described with reference to FIG. 9, the reacquired electron microscope image of the confirmation sample 4 is the second confirmation image. Therefore, the processing of S14A can be said to be an example of receiving a judgment on the image quality of the second confirmation image from the user.

If the user inputs that the confirmation result is good (OK) (Y in S15A), the information processing apparatus 1 ends the process. On the other hand, when the user inputs that the confirmation result is not good (OK) (N in S15A), the information processing apparatus 1 executes the processing following the instruction to correct astigmatism (S16), as in FIG. do it.

As described above, the information processing apparatus 1 performs the determination of the electron microscope image of the confirmation sample 4 by the learned model A 12A and the maintenance of the electron microscope 3 by the user, as in the first modification. Combine with administrative work status. By combining these, the information processing apparatus 1 can determine the state of the electron microscope 3 and support the user's maintenance work.

In the above-described embodiment, the scanning electron microscope is used as an example to determine the image of the sample 4 captured by the trained model A 12A, the trained model B 12B, etc., adjust the optical axis, correct astigmatism, and A process for assisting aperture replacement has been exemplified. However, practice of the present invention is not limited to the case where the electron microscope 3 is a scanning electron microscope. In other words, even if the electron microscope 3 is a transmission electron microscope, the information processing apparatus 1 can carry out processing for supporting the user, as in the above embodiment. When the electron microscope 3 is a transmission electron microscope, the image of the sample 4 may be, for example, an image captured by a CCD camera or a CMOS camera of a fluorescent screen irradiated with transmitted electrons. .

(Computer-readable recording medium)
A program that causes a computer or other machine or device (hereinafter referred to as a computer or the like) to implement any of the functions described above can be recorded in a computer-readable recording medium. By causing a computer or the like to read and execute the program on the recording medium, the function can be provided.

Here, a computer-readable recording medium is a recording medium that can store information such as data and programs by electrical, magnetic, optical, mechanical, or chemical action and can be read by a computer, etc. Say. Examples of such recording media that can be removed from a computer or the like include memories such as flexible disks, magneto-optical disks, CD-ROMs, CD-R/Ws, DVDs, Blu-ray disks, DATs, 8 mm tapes, and flash memories. There are cards, etc. Moreover, there are a hard disk, Read Only Memory (ROM), etc. as a recording medium fixed to a computer or the like. Additionally, Solid State Drives
(SSD) can be used as a recording medium that can be removed from a computer or the like, or as a recording medium that is fixed to a computer or the like.

1 Information Processing Device 3 Electron Microscope 4 Specimen 31 Control Circuit 32 Electron Gun 33 Converging Lens 34 Converging Diaphragm 35 Objective Lens 36 Objective Diaphragm 39 Stage 3A Astigmatism Correction Coil

Claims (6)

Acquiring a first confirmation image captured by the electron microscope from a confirmation sample for confirming the state of the electron microscope after a predetermined adjustment;
A first image taken from the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is good, and the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is not good Adjustment result of the electron microscope after the predetermined adjustment is made by inputting the first confirmation image into the trained model trained using the second image photographed from and as teacher data Acquiring a first determination result as to whether or not is good;
and outputting the first determination result to an output device ,
The predetermined adjustment is an optical axis adjustment of the electron beam,
Further, the control unit outputs to the output device an instruction to readjust the optical axis of the electron beam when the first determination result is not favorable;
obtaining a second confirmation image taken from the confirmation sample with the electron microscope after the optical axis has been readjusted;
A third image taken from the confirmation sample with the electron microscope when the contamination state of all the diaphragms provided in the electron microscope is below the standard, and the contamination state of any one of the diaphragms provided in the electron microscope is below the standard. The second confirmation image is applied to a second trained model that has been trained using the fourth image taken from the confirmation sample with the electron microscope when it has deteriorated beyond the obtaining a second determination result as to whether or not the contaminant state of the aperture is below a standard by inputting;
outputting to the output device an instruction to correct astigmatism of the electron beam when the second determination result is not favorable;
and outputting to the output device an instruction to replace at least one aperture provided in the electron microscope when the astigmatism of the electron beam cannot be adjusted within a reference range by performing the astigmatism correction. Information processing device to execute . Acquiring a first confirmation image captured by the electron microscope from a confirmation sample for confirming the state of the electron microscope after a predetermined adjustment;
A first image taken from the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is good, and the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is not good Learning is performed using the second image taken from the
obtaining a first determination result as to whether or not the adjustment result of the electron microscope after the predetermined adjustment is good by inputting the first confirmation image into the learned model;
and outputting the first determination result to an output device,
The predetermined adjustment is an optical axis adjustment of the electron beam,
Further, the control unit outputs to the output device an instruction to readjust the optical axis of the electron beam when the first determination result is not favorable;
obtaining a second confirmation image taken by the electron microscope from the confirmation sample after the optical axis is readjusted;
Receiving a judgment on the image quality of the second confirmation image from a user, and when the judgment that the image quality is insufficient is input, an instruction to correct astigmatism of the electron beam is output to the output device. and
and outputting to the output device an instruction to replace at least one aperture provided in the electron microscope when the astigmatism of the electron beam cannot be adjusted within a reference range by performing the astigmatism correction. Information processing device to execute. obtaining a first confirmation image captured by the electron microscope from a confirmation sample for confirming the state of the electron microscope after the computer has made a predetermined adjustment;
A first image taken from the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is good, and the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is not good Adjustment result of the electron microscope after the predetermined adjustment is made by inputting the first confirmation image into the trained model trained using the second image photographed from and as teacher data Acquiring a first determination result as to whether or not is good;
and outputting the first determination result to an output device ,
The predetermined adjustment is an optical axis adjustment of the electron beam,
The computer further outputs to the output device an instruction to readjust the optical axis of the electron beam when the first determination result is not favorable;
obtaining a second confirmation image taken from the confirmation sample with the electron microscope after the optical axis has been readjusted;
A third image taken from the confirmation sample with the electron microscope when the contamination state of all the diaphragms provided in the electron microscope is below the standard, and the contamination state of any one of the diaphragms provided in the electron microscope is below the standard. The second confirmation image is applied to a second trained model that has been trained using the fourth image taken from the confirmation sample with the electron microscope when it has deteriorated beyond the obtaining a second determination result as to whether or not the contaminant state of the aperture is below the standard by inputting;
outputting to the output device an instruction to correct astigmatism of the electron beam when the second determination result is not favorable;
and outputting to the output device an instruction to replace at least one aperture provided in the electron microscope when the astigmatism of the electron beam cannot be adjusted within a reference range by performing the astigmatism correction. The information processing method to be performed . obtaining a first confirmation image captured by the electron microscope from a confirmation sample for confirming the state of the electron microscope after the computer has made a predetermined adjustment;
A first image taken from the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is good, and the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is not good Adjustment result of the electron microscope after the predetermined adjustment is made by inputting the first confirmation image into the trained model trained using the second image photographed from and as teacher data Acquiring a first determination result as to whether or not is good;
and outputting the first determination result to an output device,
The predetermined adjustment is an optical axis adjustment of the electron beam,
The computer further outputs to the output device an instruction to readjust the optical axis of the electron beam when the first determination result is not favorable;
obtaining a second confirmation image taken by the electron microscope from the confirmation sample after the optical axis is readjusted;
Receiving a judgment on the image quality of the second confirmation image from a user, and when the judgment that the image quality is insufficient is input, an instruction to correct astigmatism of the electron beam is output to the output device. and
and outputting to the output device an instruction to replace at least one aperture provided in the electron microscope when the astigmatism of the electron beam cannot be adjusted within a reference range by performing the astigmatism correction. The information processing method to be performed. Acquiring a first confirmation image captured by the electron microscope from a confirmation sample for confirming the state of the electron microscope after the computer is adjusted in a predetermined manner;
A first image taken from the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is good, and the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is not good Adjustment result of the electron microscope after the predetermined adjustment is made by inputting the first confirmation image into the trained model trained using the second image photographed from and as teacher data Acquiring a first determination result as to whether or not is good;
and outputting the first determination result to an output device,
The predetermined adjustment is an optical axis adjustment of the electron beam,
further outputting to the computer an instruction to readjust the optical axis of the electron beam to the output device when the first determination result is not favorable;
obtaining a second confirmation image taken from the confirmation sample with the electron microscope after the optical axis has been readjusted;
A third image taken from the confirmation sample with the electron microscope when the contamination state of all the diaphragms provided in the electron microscope is below the standard, and the contamination state of any one of the diaphragms provided in the electron microscope is below the standard. The second confirmation image is applied to a second trained model that has been trained using the fourth image taken from the confirmation sample with the electron microscope when it has deteriorated beyond the obtaining a second determination result as to whether or not the contaminant state of the aperture is below the standard by inputting;
outputting to the output device an instruction to correct astigmatism of the electron beam when the second determination result is not favorable;
and outputting to the output device an instruction to replace at least one aperture provided in the electron microscope when the astigmatism of the electron beam cannot be adjusted within a reference range by performing the astigmatism correction. program to run. Acquiring a first confirmation image captured by the electron microscope from a confirmation sample for confirming the state of the electron microscope after the computer is adjusted in a predetermined manner;
A first image taken from the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is good, and the confirmation sample with the electron microscope when the adjustment result by the predetermined adjustment is not good Adjustment result of the electron microscope after the predetermined adjustment is made by inputting the first confirmation image into the trained model trained using the second image photographed from and as teacher data Acquiring a first determination result as to whether or not is good;
and outputting the first determination result to an output device,
The predetermined adjustment is an optical axis adjustment of the electron beam,
further outputting to the computer an instruction to readjust the optical axis of the electron beam to the output device when the first determination result is not favorable;
obtaining a second confirmation image taken by the electron microscope from the confirmation sample after the optical axis is readjusted;
Receiving a judgment on the image quality of the second confirmation image from a user, and when the judgment that the image quality is insufficient is input, an instruction to correct astigmatism of the electron beam is output to the output device. and
and outputting to the output device an instruction to replace at least one aperture provided in the electron microscope when the astigmatism of the electron beam cannot be adjusted within a reference range by performing the astigmatism correction. program to run.

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