JP7325705B2 - copy machine - Google Patents

copy machine Download PDF

Info

Publication number
JP7325705B2
JP7325705B2 JP2019084020A JP2019084020A JP7325705B2 JP 7325705 B2 JP7325705 B2 JP 7325705B2 JP 2019084020 A JP2019084020 A JP 2019084020A JP 2019084020 A JP2019084020 A JP 2019084020A JP 7325705 B2 JP7325705 B2 JP 7325705B2
Authority
JP
Japan
Prior art keywords
hole
suction
rod
movable member
spherical surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019084020A
Other languages
Japanese (ja)
Other versions
JP2020181889A (en
Inventor
洋己 下田
武志 西川
二朗 石辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2019084020A priority Critical patent/JP7325705B2/en
Priority to TW109112626A priority patent/TWI830899B/en
Priority to KR1020200046604A priority patent/KR20200125463A/en
Priority to CN202010330180.5A priority patent/CN111867348B/en
Publication of JP2020181889A publication Critical patent/JP2020181889A/en
Application granted granted Critical
Publication of JP7325705B2 publication Critical patent/JP7325705B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408—Incorporating a pick-up tool
    • H05K13/0409—Sucking devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Die Bonding (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)

Description

本発明は、ワークを装着対象部位に平行に倣わせて装着するのに用いる倣い装置に関するものである。 BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copying device used for mounting a work in parallel with a mounting target site.

例えば半導体チップ等のワークをプリント基板などの装着対象部位に平行に倣わせて装着する場合、特許文献１や特許文献２あるいは特許文献３等に開示されているような倣い装置が使用される。この倣い装置は、図１０に概略的に示すように、凹球面６１を備えた固定部材６０と、前記凹球面６１に揺動自在に嵌合する凸球面６３を備えた可動部材６２とを有していて、前記可動部材６２に、ワークＷを吸着により保持する吸着治具６４が取り付けられる。そして、前記吸着治具６４の先端の吸着口６５にワークＷを吸着させた状態で、ポート６６から前記凹球面６１と凸球面６３との間にエアを供給して該凹球面６１と凸球面６３とを非接触状態にし、その状態で、前記吸着治具６４に保持されたワークＷを装着対象部位６７に押し付けることにより、前記可動部材６２及び吸着治具６４を前記凹球面６１に沿って変位させ、前記吸着治具６４に保持されたワークＷを、前記装着対象部位６７に平行に押し付けて装着するものである。図中の符号６８で示す部材は、通気性を有する多孔質部材である。 For example, when a workpiece such as a semiconductor chip is to be mounted on a mounting target portion such as a printed circuit board by parallel copying, a copying apparatus as disclosed in Patent Document 1, Patent Document 2, or Patent Document 3 is used. This copying apparatus, as schematically shown in FIG. 10, has a fixed member 60 having a concave spherical surface 61 and a movable member 62 having a convex spherical surface 63 fitted to the concave spherical surface 61 so as to swing freely. A suction jig 64 for holding the workpiece W by suction is attached to the movable member 62 . Then, in a state in which the workpiece W is adsorbed to the suction port 65 at the tip of the suction jig 64, air is supplied from the port 66 to between the concave spherical surface 61 and the convex spherical surface 63, thereby separating the concave spherical surface 61 and the convex spherical surface. 63 is brought into a non-contact state, and in this state, the workpiece W held by the suction jig 64 is pressed against the mounting target portion 67 , thereby moving the movable member 62 and the suction jig 64 along the concave spherical surface 61 . The work W displaced and held by the suction jig 64 is pressed parallel to the mounting target portion 67 to be mounted. A member indicated by reference numeral 68 in the drawing is a porous member having air permeability.

ところが、前記公知の倣い装置は、通常、前記吸着治具６４の内部に、前記吸着口６５に通じる吸引孔６９が形成されると共に、該吸着治具６４の側面に、前記吸引孔６９に通じる配管接続口７０が設けられていて、この配管接続口７０に吸引用の配管（ホース）７１を接続した状態で使用される。このため、前記可動部材６２及び吸引治具６４の変位によって前記配管７１が変形した際に、該配管７１の変形に伴う弾性力が前記治具６４を介して前記可動部材６２に作用し、この弾性力により、前記可動部材６２の円滑且つ適正な変位が阻害されて倣い精度が低下するおそれがあった。 However, in the known copying apparatus, a suction hole 69 communicating with the suction port 65 is normally formed inside the suction jig 64, and a side surface of the suction jig 64 communicates with the suction hole 69. A pipe connection port 70 is provided, and a pipe (hose) 71 for suction is connected to the pipe connection port 70 when used. Therefore, when the pipe 71 is deformed due to the displacement of the movable member 62 and the suction jig 64, the elastic force accompanying the deformation of the pipe 71 acts on the movable member 62 via the jig 64, and this The elastic force may hinder the smooth and proper displacement of the movable member 62, resulting in a decrease in the tracing accuracy.

特許第４０８１２４７号公報Japanese Patent No. 4081247 特許第４５４７６５２号公報Japanese Patent No. 4547652 特許第５１８５８８６号公報Japanese Patent No. 5185886

本発明の技術的課題は、ワークを吸着するための吸着治具に吸引用の配管を直接接続する必要がなく、従って、前記吸着治具に前記配管の変形に伴う弾性力が作用しないために倣い精度の低下を来すことのない、簡単で合理的な構造を有する倣い装置を提供することにある。 A technical problem of the present invention is that there is no need to directly connect a pipe for suction to a suction jig for sucking a workpiece, and therefore elastic force due to deformation of the pipe does not act on the suction jig. To provide a copying apparatus having a simple and rational structure which does not cause deterioration of copying accuracy.

前記課題を解決するため、本発明は、凹球面を有する固定部材と、前記凹球面に嵌合する凸球面を有する可動部材とを備え、前記凹球面と凸球面との間にエアを供給することにより該凹球面と凸球面とを非接触状態にし、その状態で前記可動部材を前記凹球面に沿って変位させることにより、該可動部材に取り付けられる吸着治具に吸着されたワークを装着対象部位に平行に押し付けるように構成された倣い装置において、前記倣い装置は、前記可動部材の凸球面を前記固定部材の凹球面に押し付けることにより該可動部材をロックするロック機構と、前記吸着治具に通じる吸引用流路とを有し、前記ロック機構は、前記固定部材の内部を前記凹球面の中心軸に沿って延びるロッド孔と、該ロッド孔の内部に摺動自在に挿入されたロッドとを有し、該ロッドの基端部に、エアの作用により該ロッドを前進及び後退させるピストンが設けられ、該ロッドの先端は、前記可動部材の凸球面に形成された中心孔を遊動状態に貫通して該可動部材の内部の凹部内に進入し、該ロッドの先端に、前記凹部の底面に係止及び離脱する係止部が形成されており、前記吸引用流路は、前記固定部材に形成された吸引用ポートと、前記ロッドの先端に開口して前記吸着治具に通じる吸引用開口と、前記吸引用ポートと前記吸引用開口とを結ぶ吸引用連通孔とを有し、前記吸引用連通孔は、前記ロッドの外周を取り囲む環状孔と、該環状孔と前記吸引用ポートとを結ぶ第１連通孔と、前記ロッドの内部を前記中心軸方向に延びて前記吸引用開口に連通する第２連通孔と、該第２連通孔と前記環状孔とを結ぶ第３連通孔とを有することを特徴とする。 In order to solve the above-mentioned problems, the present invention includes a fixed member having a concave spherical surface and a movable member having a convex spherical surface that fits into the concave spherical surface, and supplies air between the concave spherical surface and the convex spherical surface. By doing so, the concave spherical surface and the convex spherical surface are brought into a non-contact state, and by displacing the movable member along the concave spherical surface in this state, the work chucked by the chucking jig attached to the movable member can be mounted. In a copying apparatus configured to be pressed in parallel with a part, the copying apparatus includes a locking mechanism that locks the movable member by pressing the convex spherical surface of the movable member against the concave spherical surface of the fixed member; The lock mechanism includes a rod hole extending along the central axis of the concave spherical surface inside the fixing member, and a rod slidably inserted into the rod hole. A piston is provided at the base end of the rod for advancing and retracting the rod by the action of air, and the tip of the rod moves through a central hole formed in the convex spherical surface of the movable member. a locking portion that penetrates into the concave portion inside the movable member and that locks and disengages from the bottom surface of the concave portion is formed at the tip of the rod; a suction port formed in a member; a suction opening that opens at the tip of the rod and communicates with the suction jig; and a suction communication hole that connects the suction port and the suction opening ; The suction communication hole includes an annular hole surrounding the outer periphery of the rod, a first communication hole connecting the annular hole and the suction port, and the suction opening extending inside the rod in the central axis direction. and a third communication hole connecting the second communication hole and the annular hole.

本発明の倣い装置において、前記ロッドの先端の前記吸引用開口は、前記吸着治具のエア吸引管をねじ込んで接続するための螺子孔であることが望ましい。 In the copying apparatus of the present invention , it is preferable that the suction opening at the tip of the rod is a screw hole for screwing and connecting an air suction tube of the suction jig.

また、本発明の倣い装置においては、前記可動部材に形成された前記凹部の底面は凹球面状をなし、前記ロッドの先端の前記係止部は円形をなしていて、該係止部の背面の、前記凹部の底面に対向する係止面は平坦面をなし、前記係止部には、前記可動部材の中心孔を外部に開放する複数の排気孔が形成されていても良い。 Further, in the copying apparatus of the present invention, the bottom surface of the concave portion formed in the movable member has a concave spherical shape, the locking portion at the tip of the rod has a circular shape, and the back surface of the locking portion is circular. (2) A locking surface facing the bottom surface of the recess may be a flat surface, and the locking portion may be formed with a plurality of exhaust holes for opening the center hole of the movable member to the outside.

また、本発明の倣い装置において、前記固定部材に形成された前記ロッド孔の孔端は前記凹球面に開口し、該孔端に拡大孔部が形成されており、該拡大孔部の孔径は前記可動部材の中心孔の孔径より大きくても構わない。 Further, in the copying apparatus of the present invention, the end of the rod hole formed in the fixed member is open to the concave spherical surface, the end of the hole is formed with an enlarged hole, and the diameter of the enlarged hole is It may be larger than the hole diameter of the center hole of the movable member.

更に、本発明の倣い装置において、前記固定部材は非磁性材からなり、また、前記可動部材は磁性材からなっていて、前記固定部材の前記凹球面には、前記中心軸を取り囲む環状の第１収容溝が形成され、該第１収容溝の内部に、非磁性材からなる環状の多孔質部材が前記凹球面の一部を形成するように収容され、前記第１収容溝の背後には、前記中心軸を取り囲む環状の第２収容溝が前記第１収容溝に連なるように形成され、該第２収容溝の内部に、環状の永久磁石が収容されると共に、該永久磁石の外周と前記第２収容溝の内周との間に環状のエア供給孔が形成され、該エア供給孔は、前記固定部材に形成されたフローティング用ポートに連通すると共に、前記第１収容溝に前記多孔質部材の背面側で連通していても良い。 Further, in the copying apparatus of the present invention, the fixed member is made of a non-magnetic material, and the movable member is made of a magnetic material. An annular porous member made of a non-magnetic material is accommodated in the first accommodation groove so as to form a part of the concave spherical surface, and behind the first accommodation groove is a an annular second accommodation groove surrounding the central axis is formed so as to be continuous with the first accommodation groove, an annular permanent magnet is accommodated in the second accommodation groove, and the outer circumference of the permanent magnet and the An annular air supply hole is formed between the inner periphery of the second accommodation groove, the air supply hole communicates with the floating port formed in the fixed member, and the porous air supply hole is connected to the first accommodation groove. It may be communicated on the back side of the material member.

この場合、前記第２収容溝の内径は前記第１収容溝の内径より大きく、該第２収容溝の外径は前記第１収容溝の外径より小さくても構わない。 In this case, the inner diameter of the second containing groove may be larger than the inner diameter of the first containing groove, and the outer diameter of the second containing groove may be smaller than the outer diameter of the first containing groove.

本発明の倣い装置は、可動部材をロックするためのロック機構を形成するロッドを、吸引用流路を形成するための部材として兼用し、該ロッドに形成した吸引用流路を通じて吸着治具にワーク吸着用の吸引力を作用させるようにしたので、従来の倣い装置のように前記吸着治具に吸引用の配管を接続する必要がなく、従って、前記配管が変形した場合の弾性力が前記吸着治具に作用することがないため、倣い精度の低下を来すことがない。 In the copying apparatus of the present invention, the rod forming the lock mechanism for locking the movable member is also used as a member for forming the suction flow path, and the suction flow path formed in the rod passes through the suction jig. Since the suction force for sucking the workpiece is applied, it is not necessary to connect a suction pipe to the suction jig as in the conventional copying apparatus. Since there is no action on the suction jig, there is no deterioration in the scanning accuracy.

本発明に係る倣い装置の第１実施形態を示す断面図である。1 is a cross-sectional view showing a first embodiment of a copying apparatus according to the present invention; FIG. 図１の要部拡大図である。FIG. 2 is an enlarged view of a main portion of FIG. 1; 図２の要部拡大図である。FIG. 3 is an enlarged view of a main portion of FIG. 2; 前記倣い装置の一つの動作状態を、吸着治具の中間部分を省略して示す断面図である。FIG. 4 is a cross-sectional view showing one operating state of the copying apparatus, omitting an intermediate portion of a suction jig; 前記倣い装置の他の動作状態を、吸着治具の中間部分を省略して示す断面図である。FIG. 5 is a cross-sectional view showing another operating state of the copying apparatus, omitting an intermediate portion of the suction jig; 前記倣い装置の他の動作状態を、吸着治具の中間部分を省略して示す断面図である。FIG. 5 is a cross-sectional view showing another operating state of the copying apparatus, omitting an intermediate portion of the suction jig; 前記倣い装置の他の動作状態を、吸着治具の中間部分を省略して示す断面図である。FIG. 5 is a cross-sectional view showing another operating state of the copying apparatus, omitting an intermediate portion of the suction jig; 本発明に係る倣い装置の変形例を示す断面図である。FIG. 5 is a cross-sectional view showing a modification of the copying apparatus according to the present invention; 本発明に係る倣い装置の第２実施形態を示す要部断面図である。FIG. 10 is a cross-sectional view of essential parts showing a second embodiment of a copying apparatus according to the present invention; 従来の倣い装置の断面図である。1 is a cross-sectional view of a conventional copying device; FIG.

図１－図７は本発明に係る倣い装置の第１実施形態を示すものである。この倣い装置１は、凹球面３を有する固定部材２と、前記凹球面３に揺動自在に嵌合する凸球面５を有する可動部材４とを有していて、図７に示すように、前記凹球面３と凸球面５との間にエアを供給して該凹球面３と凸球面５とを非接触状態にし、その状態で、前記可動部材４の前面に取り付けられた吸着治具６に半導体チップ等のワークＷを吸着により保持させて、該ワークＷをプリント基板などの装着対象部位９に押し付けることにより、前記吸着治具６を介して前記可動部材４を前記凹球面３に沿って変位（傾斜）させ、それにより、前記ワークＷを前記装着対象部位９に平行に倣わせて装着するものである。 1 to 7 show a first embodiment of a copying apparatus according to the present invention. This copying apparatus 1 has a fixed member 2 having a concave spherical surface 3 and a movable member 4 having a convex spherical surface 5 which is fitted to the concave spherical surface 3 so as to swing freely. Air is supplied between the concave spherical surface 3 and the convex spherical surface 5 to bring the concave spherical surface 3 and the convex spherical surface 5 into a non-contact state. The work W such as a semiconductor chip is held by suction, and the work W is pressed against a mounting target portion 9 such as a printed circuit board, thereby moving the movable member 4 along the concave spherical surface 3 via the suction jig 6. The work W is displaced (tilted) by pressing, thereby mounting the work W so as to follow the mounting target portion 9 in parallel.

図１において、前記凹球面３の曲率半径と凸球面５の曲率半径とは互いに等しく、前記凸球面５の曲率中心Ｃは、前記装着対象部位９の中心に設定されている。従って、前記吸着治具６の中心軸Ｌ方向の長さは、前記曲率半径に見合う長さであるが、図示した例では、該吸着治具６の中間部分は省略されている。 In FIG. 1 , the radius of curvature of the concave spherical surface 3 and the radius of curvature of the convex spherical surface 5 are equal to each other, and the center of curvature C of the convex spherical surface 5 is set at the center of the mounting target portion 9 . Therefore, the length of the chucking jig 6 in the central axis L direction is a length corresponding to the radius of curvature, but in the illustrated example, the intermediate portion of the chucking jig 6 is omitted.

また、前記固定部材２は、ロボットアーム等の作業機器に取り付けるための部材であって、非磁性材からなる第１部材２ａと非磁性材からなる第２部材２ｂとをシール部材１０を介してボルト（不図示）で連結することにより、矩形のブロック形に形成され、前記第１部材２ａの前面に前記凹球面３が形成され、前記第２部材２ｂの後面に前記作業機器に取り付けるための取付面２ｃが形成されている。 Further, the fixing member 2 is a member for attaching to a working device such as a robot arm, and is a member that connects a first member 2a made of a non-magnetic material and a second member 2b made of a non-magnetic material through a sealing member 10. By connecting with bolts (not shown), it is formed into a rectangular block shape, the concave spherical surface 3 is formed on the front surface of the first member 2a, and the rear surface of the second member 2b is for attaching to the work equipment. A mounting surface 2c is formed.

前記固定部材２の凹球面３には、該凹球面３の中心を通る中心軸Ｌを取り囲む環状の第１収容溝１１が形成され、該第１収容溝１１の内部に、非磁性材からなる環状の多孔質部材１３が収容され、該多孔質部材１３の前面は前記凹球面３の一部を形成している。前記多孔質部材１３は、連続気孔を有する焼結体からなっていて、通気性を有する。 The concave spherical surface 3 of the fixing member 2 is formed with an annular first accommodating groove 11 surrounding the central axis L passing through the center of the concave spherical surface 3, and the first accommodating groove 11 is made of a non-magnetic material. An annular porous member 13 is accommodated, the front surface of which forms part of the concave spherical surface 3 . The porous member 13 is made of a sintered body having continuous pores and has air permeability.

前記第１収容溝１１の背後には、前記中心軸Ｌを取り囲む環状の第２収容溝１２が、前記第１収容溝１１に連なるように形成され、該第２収容溝１２の内部に、環状の永久磁石１４が、該永久磁石１４の前面と前記多孔質部材１３の背面との間に若干の間隔を保った状態で収容されている。
図２に示すように、前記第２収容溝１２の内径ｄ１は、前記第１収容溝１１の内径Ｄ１より大きく、該第２収容溝１２の外径ｄ２は、前記第１収容溝１１の外径Ｄ２より小さい。このため、前記永久磁石１４は、前記多孔質部材１３の真後ろに配置され、該永久磁石１４の磁力が、磁性材製の前記可動部材４に、前記多孔質部材１３を介して作用することになる。 Behind the first accommodation groove 11, an annular second accommodation groove 12 surrounding the central axis L is formed so as to be continuous with the first accommodation groove 11. Inside the second accommodation groove 12, an annular A permanent magnet 14 is accommodated with a slight gap between the front surface of the permanent magnet 14 and the back surface of the porous member 13 .
As shown in FIG. 2, the inner diameter d1 of the second containing groove 12 is larger than the inner diameter D1 of the first containing groove 11, and the outer diameter d2 of the second containing groove 12 is the outer diameter of the first containing groove 11. Smaller than diameter D2. Therefore, the permanent magnet 14 is arranged directly behind the porous member 13, and the magnetic force of the permanent magnet 14 acts on the movable member 4 made of a magnetic material through the porous member 13. Become.

また、前記永久磁石１４の外径ｄ３を前記第２収容溝１２の外径ｄ２より小さくすることにより、該永久磁石１４の外周と前記第２収容溝１２の内周との間に環状のエア供給孔１５が形成され、該エア供給孔１５が、前記固定部材２の側面に形成されたフローティング用ポート１６に連通孔１７を通じて連通すると共に、前記第１収容溝１１にも、前記多孔質部材１３の背面側で連通している。該多孔質部材１３の背面には、該背面と前記永久磁石１４の前面との間の間隔を拡大するための環状の凹部１８が形成され、この凹部１８が前記エア供給孔１５に連通している。 Further, by making the outer diameter d3 of the permanent magnet 14 smaller than the outer diameter d2 of the second receiving groove 12, an annular air is formed between the outer periphery of the permanent magnet 14 and the inner periphery of the second receiving groove 12. A supply hole 15 is formed, and the air supply hole 15 communicates with a floating port 16 formed on the side surface of the fixed member 2 through a communication hole 17. 13 communicates with each other on the back side. An annular recess 18 is formed on the back surface of the porous member 13 to increase the distance between the back surface and the front surface of the permanent magnet 14 . there is

これにより、前記フローティング用ポート１６から前記エア供給孔１５にエアが供給されると、該エアが、前記多孔質部材１３の内部を通って前記凹球面３と凸球面５との間に流入し、該凹球面３と凸球面５とを非接触状態にするため、図５及び図７に示すように、前記可動部材４がフローティング状態になる。このとき、前記エアの圧力により前記凸球面５が前記凹球面３から離間する力と、前記永久磁石１４により前記可動部材４が固定部材２側に吸引される力とが釣り合うことで、前記凹球面３と凸球面５とは、微少な空隙Ｇを介して非接触状態を維持する。
前記フローティング用ポート１６が排気状態になると、前記可動部材４は、前記永久磁石１４により前記固定部材２側に吸引され、図１及び図２に示すように、前記凸球面５が凹球面３に接触した状態になる。 Thus, when air is supplied from the floating port 16 to the air supply hole 15, the air passes through the interior of the porous member 13 and flows between the concave spherical surface 3 and the convex spherical surface 5. In order to keep the concave spherical surface 3 and the convex spherical surface 5 in a non-contact state, the movable member 4 is in a floating state as shown in FIGS. At this time, the force that separates the convex spherical surface 5 from the concave spherical surface 3 due to the pressure of the air and the force that the movable member 4 is attracted toward the fixed member 2 by the permanent magnet 14 are balanced. The spherical surface 3 and the convex spherical surface 5 are maintained in a non-contact state via a minute gap G.
When the floating port 16 is in an exhausted state, the movable member 4 is attracted toward the fixed member 2 by the permanent magnet 14, and the convex spherical surface 5 becomes the concave spherical surface 3 as shown in FIGS. come into contact.

従って、前記フローティング用ポート１６と、前記連通孔１７及びエア供給孔１５と、前記多孔質部材１３と、前記凹球面３及び凸球面５とは、前記可動部材４をフローティング状態にするためのフローティング機構を形成するものである。 Therefore, the floating port 16, the communication hole 17, the air supply hole 15, the porous member 13, the concave spherical surface 3, and the convex spherical surface 5 are provided for floating the movable member 4 in a floating state. It forms the mechanism.

前記可動部材４は、鉄等の磁性材により形成されていて、その後面に前記凸球面５が形成され、前面に前記吸着治具６を螺子で取り付けるための取付面４ａが形成されている。前記凸球面５の正面視形状は円形であり、前記取付面の正面視形状は矩形である。 The movable member 4 is made of a magnetic material such as iron, and has the convex spherical surface 5 formed on its rear surface and a mounting surface 4a for mounting the chucking jig 6 with a screw on its front surface. The convex spherical surface 5 has a circular shape when viewed from the front, and the mounting surface has a rectangular shape when viewed from the front.

また、前記倣い装置１は、前記可動部材４の凸球面５を前記固定部材２の凹球面３に押し付けることによって該可動部材４をロックするロック機構２０を有している。
前記ロック機構２０は、前記固定部材２の内部を前記中心軸Ｌに沿って延びるロッド孔２１と、該ロッド孔２１の内部に２つのリップ型のシール部材２３ａ，２３ｂを介して摺動自在に挿入されたロッド２２とを有している。 The copying apparatus 1 also has a lock mechanism 20 that locks the movable member 4 by pressing the convex spherical surface 5 of the movable member 4 against the concave spherical surface 3 of the fixed member 2 .
The locking mechanism 20 includes a rod hole 21 extending along the central axis L inside the fixed member 2, and two lip-shaped sealing members 23a and 23b slidably inside the rod hole 21. and a rod 22 inserted.

前記ロッド２２の基端部には、エアの作用により該ロッド２２を前進及び後退させるピストン２４が、シール部材２５を介して取り付けられている。前記ピストン２４は、前記固定部材２の前記第１部材２ａと第２部材２ｂとの間に形成されたピストン室２６内に、ピストンシール２７を介して摺動自在に収容され、該ピストン２４によって前記ピストン室２６の内部が、第１圧力室２８と第２圧力室２９とに区画されている。また、前記固定部材２の側面には、ロック用ポート３０とロック解除用ポート３１とが形成され、前記ロック用ポート３０は前記第１圧力室２８に連通し、前記ロック解除用ポート３１は前記第２圧力室２９に連通している。 A piston 24 is attached to the proximal end of the rod 22 via a seal member 25 for advancing and retracting the rod 22 by the action of air. The piston 24 is slidably accommodated in a piston chamber 26 formed between the first member 2a and the second member 2b of the fixed member 2 via a piston seal 27. The interior of the piston chamber 26 is divided into a first pressure chamber 28 and a second pressure chamber 29 . A locking port 30 and an unlocking port 31 are formed on the side surface of the fixing member 2. The locking port 30 communicates with the first pressure chamber 28, and the unlocking port 31 communicates with the first pressure chamber 28. It communicates with the second pressure chamber 29 .

前記ロッド２２とピストン２４とを連結するため、該ロッド２２の基端部には、小径化した取付部２２ａが形成され、該取付部２２ａが、前記ピストン２４の中心に形成された取付孔２４ａ内に挿入され、該ピストン２４の一端は前記ロッド２２の段部２２ｂに係止し、該ピストン２４の他端は、前記ロッド２２に取り付けられたＣ形リング３２に係止している。 In order to connect the rod 22 and the piston 24, a mounting portion 22a having a reduced diameter is formed at the base end of the rod 22, and the mounting portion 22a is a mounting hole 24a formed in the center of the piston 24. One end of the piston 24 engages a shoulder 22b of the rod 22 and the other end of the piston 24 engages a C-ring 32 attached to the rod 22. As shown in FIG.

一方、前記ロッド２２の先端には、該ロッド２２の長さ方向の中央部分、即ち、前記ロッド孔２１内を摺動する部分より径の小さい小径部２２ｃが形成され、この小径部２２ｃが、前記可動部材４の凸球面５の中心に形成された中心孔３３を遊動状態に貫通して、該可動部材４の内部に形成された円形の凹部３４内に進入し、該小径部２２ｃの先端に、円形の係止部３５が形成され、該係止部３５が、前記凹部３４の凹球面状をした底面３４ａに係止及び離脱するようになっている。 On the other hand, at the tip of the rod 22, a small-diameter portion 22c having a smaller diameter than the central portion of the rod 22 in the longitudinal direction, that is, the portion that slides in the rod hole 21, is formed. It passes through the center hole 33 formed at the center of the convex spherical surface 5 of the movable member 4 in a floating state, enters a circular concave portion 34 formed inside the movable member 4, and enters the tip of the small diameter portion 22c. A circular engaging portion 35 is formed on the inner surface of the recess 34, and the engaging portion 35 engages and disengages from the bottom surface 34a of the recess 34 having a concave spherical shape.

前記係止部３５の直径ｄ４は、前記ロッド２２の中央部分の直径ｄ５及び前記中心孔３３の孔径ｄ６より大きいが、前記凹部３４の内径ｄ７よりは小さく、該係止部３５の中心軸Ｌ方向の高さ（厚み）ｈ１は、前記凹部３４の深さｈ２より小さい。また、前記係止部３５の背面、即ち、前記凹部３４の底面３４ａに対向する係止面３５ａは、平坦面をなしている。更に、前記係止部３５には、前記可動部材４の中心孔３３を外部に開放する複数の排気孔３６が、該係止部３５を中心軸Ｌの方向に貫通するように形成されている。 The diameter d4 of the engaging portion 35 is larger than the diameter d5 of the central portion of the rod 22 and the hole diameter d6 of the central hole 33, but smaller than the inner diameter d7 of the recess 34. The height (thickness) h1 in the direction is smaller than the depth h2 of the concave portion 34 . The rear surface of the engaging portion 35, that is, the engaging surface 35a facing the bottom surface 34a of the recess 34 is flat. Furthermore, a plurality of exhaust holes 36 for opening the center hole 33 of the movable member 4 to the outside are formed in the engaging portion 35 so as to pass through the engaging portion 35 in the direction of the central axis L. .

前記ロック機構２０において、前記ロック用ポート３０を排気状態にすると共に、前記ロック解除用ポート３１を給気状態にすると、図１及び図５に示すように、前記ピストン２４の作用によりロッド２２が前進（下降）し、該ロッド２２の先端の係止部３５が可動部材４の凹部３４の底面３４ａから離間するため、前記可動部材４のロックは解除される。その逆に、前記ロック解除用ポート３１を排気状態にすると共に、前記ロック用ポート３０を給気状態にすると、図４に示すように、前記ピストン２４の作用によりロッド２２が後退（上昇）して前記係止部３５が可動部材４の凹部３４の底面３４ａに係止し、該可動部材４を引き上げて前記凸球面５を前記固定部材２の凹球面３に押し付けるため、該可動部材４はロックされる。 In the lock mechanism 20, when the lock port 30 is put in the exhaust state and the lock release port 31 is put in the air supply state, the rod 22 is moved by the action of the piston 24 as shown in FIGS. As the rod 22 advances (lowers) and the engaging portion 35 at the tip of the rod 22 separates from the bottom surface 34a of the concave portion 34 of the movable member 4, the movable member 4 is unlocked. Conversely, when the lock release port 31 is put in the exhaust state and the lock port 30 is put in the air supply state, as shown in FIG. The engaging portion 35 is engaged with the bottom surface 34a of the concave portion 34 of the movable member 4, and the movable member 4 is pulled up to press the convex spherical surface 5 against the concave spherical surface 3 of the fixed member 2. Therefore, the movable member 4 is locked.

また、図２に示すように、前記固定部材２に形成されたロッド孔２１の孔径は、前記ロッド２２の中央部分の直径ｄ５とほぼ同径であって、前記可動部材４の中心孔３３の孔径ｄ６より僅かに小さいが、該ロッド孔２１の前端には、図３に示すように、該ロッド孔２１の孔径を次第に拡大させて前記中心孔３３の孔径ｄ６に近づけるためのテーパー部２１ａが形成され、該テーパー部２１ａの前端に、拡大孔部２１ｂが形成されている。該拡大孔部２１ｂは、座繰りにより形成されたもので、該拡大孔部２１ｂの孔径ｄ８は、前記中心孔３３の孔径ｄ６より大きく、該拡大孔部２１ｂの孔縁２１ｃは、前記中心孔３３の孔縁３３ａの回りを取り囲んでいる。
このような拡大孔部２１ｂを前記ロッド孔２１の孔端に形成したことにより、倣い動作のために前記凸球面５が凹球面３に対して変位した場合に、前記中心孔３３の孔縁３３ａと前記拡大孔部２１ｂの孔縁２１ｃとが交叉しないか、あるいは交叉してもその度合いは小さいため、こじり等による動作不良が発生しにくい。 Further, as shown in FIG. 2, the diameter of the rod hole 21 formed in the fixed member 2 is substantially the same as the diameter d5 of the central portion of the rod 22, and the diameter of the central hole 33 of the movable member 4 is approximately the same. At the front end of the rod hole 21, although slightly smaller than the hole diameter d6, as shown in FIG. An enlarged hole portion 21b is formed at the front end of the tapered portion 21a. The enlarged hole portion 21b is formed by countersinking, the hole diameter d8 of the enlarged hole portion 21b is larger than the hole diameter d6 of the central hole 33, and the hole edge 21c of the enlarged hole portion 21b is the same as that of the central hole. 33 surrounds the edge 33a of the hole.
By forming such an enlarged hole portion 21b at the hole end of the rod hole 21, when the convex spherical surface 5 is displaced with respect to the concave spherical surface 3 due to copying operation, the hole edge 33a of the center hole 33 is and the hole edge 21c of the enlarged hole portion 21b do not intersect, or even if they intersect to a small degree, malfunction due to prying or the like is unlikely to occur.

前記倣い装置１には、更に、図１及び図２に示すように、前記吸着治具６に通じるワーク吸着のための吸引用流路４０が形成されている。
前記吸引用流路４０は、前記固定部材２の側面に形成された吸引用ポート４１と、前記ロッド２２の先端に開口して前記吸着治具６に通じる吸引用開口４２と、前記吸引用ポート４１と前記吸引用開口４２とを結ぶ吸引用連通孔４３とを有している。 As shown in FIGS. 1 and 2, the copying apparatus 1 is further formed with a suction channel 40 for sucking a workpiece, which communicates with the suction jig 6 .
The suction channel 40 includes a suction port 41 formed on the side surface of the fixing member 2, a suction opening 42 opened at the tip of the rod 22 and communicating with the suction jig 6, and the suction port. 41 and a suction communication hole 43 that connects the suction opening 42 .

前記吸引用連通孔４３は、前記２つのシール部材２３ａ，２３ｂ間の位置で前記ロッド孔２１の一部に前記ロッド２２の外周を取り囲むように形成された環状孔４３ａと、該環状孔４３ａと前記吸引用ポート４１とを結ぶ第１連通孔４３ｂと、前記ロッド２２の内部を中心軸Ｌ方向に延びて該ロッド２２の先端の前記吸引用開口４２に連通する第２連通孔４３ｃと、前記第２連通孔４３ｃと前記環状孔４３ａとを連通させるために前記ロッド２２の内部に放射状に形成された複数の第３連通孔４３ｄとを有している。
前記ロッド２２の先端の前記吸引用開口４２は、前記吸着治具６のエア吸引管５１をねじ込んで接続するための螺子孔である。 The suction communication hole 43 includes an annular hole 43a formed in a portion of the rod hole 21 between the two seal members 23a and 23b so as to surround the outer circumference of the rod 22, and the annular hole 43a. a first communication hole 43b connecting with the suction port 41; a second communication hole 43c extending inside the rod 22 in the central axis L direction and communicating with the suction opening 42 at the tip of the rod 22; A plurality of third communication holes 43d are radially formed inside the rod 22 to allow communication between the second communication hole 43c and the annular hole 43a.
The suction opening 42 at the tip of the rod 22 is a screw hole for screwing and connecting the air suction tube 51 of the suction jig 6 .

前記吸着治具６は、前記可動部材４の前端の前記取付面４ａに取り付けられる中空の治具本体５０と、該治具本体５０の内部に配設された前記エア吸引管５１とを有し、前記治具本体５０の前端には、ワークＷを吸着するための前記吸着口７が形成されている。また、前記エア吸引管５１の基端には、前記吸引用開口４２に螺着するための螺子部５１ａが形成され、該エア吸引管５１の先端には、弾性変形可能な吸着パッド５２が取り付けられ、該吸着パッド５２の先端が、前記治具本体５０の内部において、前記吸着口７の周りのシート部７ａに気密に接触している。 The suction jig 6 has a hollow jig body 50 attached to the attachment surface 4 a at the front end of the movable member 4 and the air suction pipe 51 disposed inside the jig body 50 . , the suction port 7 for sucking the workpiece W is formed at the front end of the jig body 50 . A threaded portion 51a for screwing into the suction opening 42 is formed at the proximal end of the air suction tube 51, and an elastically deformable adsorption pad 52 is attached to the distal end of the air suction tube 51. The tip of the suction pad 52 is in airtight contact with the sheet portion 7a around the suction port 7 inside the jig body 50. As shown in FIG.

これにより、前記固定部材２の吸引用ポート４１から、該固定部材２及びロッド２２に形成された前記吸引用連通孔４３、前記ロッド２２の先端の吸引用開口４２、及び前記エア吸引管５１を通じてエアが吸引されると、前記治具本体５０の前端の吸着口７にワークＷが吸着され、また、前記吸引用ポート４１が外気に開放されるか又は給気状態になると、前記ワークＷが前記治具本体５０から解放される。
従って、前記吸引用流路４０と吸着治具６とによって、前記ワークＷを吸着するための吸着機構が形成されていることになる。 As a result, from the suction port 41 of the fixing member 2 , through the suction communication hole 43 formed in the fixing member 2 and the rod 22 , the suction opening 42 at the tip of the rod 22 , and the air suction tube 51 , the air is sucked. When the air is sucked, the work W is sucked by the suction port 7 at the front end of the jig body 50, and when the suction port 41 is opened to the outside air or air is supplied, the work W is sucked. It is released from the jig main body 50 .
Therefore, a suction mechanism for sucking the work W is formed by the suction flow path 40 and the suction jig 6 .

なお、図１中の符号４７で示す部分は、前記可動部材４が固定部材２に対して中心軸Ｌの回りに回転するのを規制するための回転規制機構である。この回転規制機構４７の構成は特許文献２等によって公知であり、本実施形態においては、この公知の回転規制機構と実質的に同じ構成の回転規制機構４７を採用しているため、その構成の説明は省略することとする。 1 is a rotation restricting mechanism for restricting rotation of the movable member 4 about the central axis L with respect to the fixed member 2. As shown in FIG. The configuration of this rotation restricting mechanism 47 is known from Patent Document 2 and the like, and in the present embodiment, a rotation restricting mechanism 47 having substantially the same configuration as this known rotation restricting mechanism is employed. Description is omitted.

次に、前記構成を有する倣い装置１を使用し、トレー等に置かれたワークＷを吸着により保持して装着対象部位９まで搬送し、該装着対象部位９の傾きに倣わせた状態で装着するときの動作の一例について説明する。 Next, using the copying apparatus 1 having the above configuration, the workpiece W placed on a tray or the like is held by suction and conveyed to the mounting target site 9, and mounted in a state following the inclination of the mounting target site 9. An example of the operation when doing so will be described.

なお、以下の説明では、前記ロック機構２０において、図４に示すように、前記ロック用ポート３０を給気状態にすると共に前記ロック解除用ポート３１を排気状態にすることによって前記可動部材４をロックした状態を、ロックオン又はロック機構がオンの状態にあるといい、図５に示すように、前記ロック用ポート３０を排気状態にすると共に前記ロック解除用ポート３１を給気状態にすることによって前記可動部材４のロックを解除した状態を、ロックオフ又はロック機構がオフの状態にあるといい、また、前記フローティング機構において、図５及び図７に示すように、前記フローティング用ポート１６を給気状態にすることによって前記可動部材４をフローティング状態にした状態を、フローティングオン又はフローティング機構がオンの状態にあるといい、図４に示すように、前記フローティング用ポート１６を開放状態（非給気状態）にすることによって前記可動部材４のフローティング状態を解除した状態を、フローティングオフ又はフローティング機構がオフの状態であるという。更に、前記吸着機構において、図６及び図７に示すように、前記吸引用ポート４１を吸引状態にすることによって前記吸引治具でワークＷを吸着した状態を、吸着オン又は吸着機構がオンの状態にあるといい、図４及び図５に示すように、前記吸引用ポート４１を開放状態又は給気状態にすることによって前記吸引治具からワークＷを解放した状態を、吸着オフ又は吸着機構がオフの状態にあるという。 In the following description, in the lock mechanism 20, as shown in FIG. 4, the movable member 4 is moved by setting the lock port 30 to the air supply state and the lock release port 31 to the exhaust state. The locked state is referred to as a lock-on state or a lock-mechanism-on state, and as shown in FIG. The state in which the lock of the movable member 4 is released by is referred to as a lock-off state or a state in which the lock mechanism is turned off. A state in which the movable member 4 is brought into a floating state by supplying air is referred to as a floating-on state or a floating mechanism-on state, and as shown in FIG. The state in which the floating state of the movable member 4 is canceled by switching to the air supply state is referred to as floating off or the state in which the floating mechanism is off. Further, in the suction mechanism, as shown in FIGS. 6 and 7, the state in which the workpiece W is suctioned by the suction jig by setting the suction port 41 to the suction state is defined as suction ON or when the suction mechanism is ON. As shown in FIGS. 4 and 5, the state in which the workpiece W is released from the suction jig by opening the suction port 41 or supplying air is defined as the suction OFF state or the suction mechanism state. is in the off state.

図１は、前記倣い装置１がイニシャルポジションにあって倣い動作が行われていないときの状態である。このとき、全てのポート１６，３０，３１，４１は排気状態（開放状態）にあるため、該倣い装置１は、ロックオフ、フローティングオフ、吸着オフの状態にあり、このため、前記可動部材４のロックは解除されていて、該可動部材４は、永久磁石１４に吸引されて固定部材２に当接した状態にあり、また、前記吸着治具６の吸着口７に吸引力は作用していない。 FIG. 1 shows a state in which the copying apparatus 1 is at the initial position and no copying operation is being performed. At this time, since all the ports 16, 30, 31 and 41 are in the exhausted state (opened state), the copying apparatus 1 is in lock-off, floating-off and suction-off states. is released, the movable member 4 is attracted by the permanent magnet 14 and is in contact with the fixed member 2, and the suction force is not acting on the suction port 7 of the suction jig 6. do not have.

この状態から前記倣い装置１が、トレー等に置かれたワークＷの位置まで移動する場合には、図４に示すように、前記ロック解除用ポート３１を排気状態にすると共に前記ロック用ポート３０を給気状態にすることにより、前記ロック機構２０がオンの状態に切り換わり、前記可動部材４がロックされる。このとき、前記フローティング用ポート１６及び吸引用ポート４１はそれぞれ開放状態のままであるため、前記フローティング機構及び吸着機構はオフのままである。 When the copying apparatus 1 moves from this state to the position of the work W placed on a tray or the like, as shown in FIG. is supplied with air, the lock mechanism 20 is switched to the ON state, and the movable member 4 is locked. At this time, since the floating port 16 and the suction port 41 remain open, the floating mechanism and the suction mechanism remain off.

そして、前記倣い装置１がワークＷの位置まで移動し、前記吸着治具６の先端が前記ワークＷに当接すると、図５に示すように、該倣い装置１は、前記ロック用ポート３０が排気状態になると共に前記ロック解除用ポート３１が給気状態になることによりロックオフの状態になり、また、前記フローティング用ポート１６が給気状態になることによりフローティングオンの状態になる。このため、前記可動部材４及び吸着治具６は、前記ワークＷの姿勢に倣って変位する。しかし、前記吸着機構はオフのままである。 Then, when the copying apparatus 1 moves to the position of the work W and the tip of the suction jig 6 comes into contact with the work W, the copying apparatus 1 closes the locking port 30 as shown in FIG. When the air is supplied to the lock release port 31 while the air is being exhausted, the lock is turned off. When the floating port 16 is supplied with air, the air is supplied to the floating on state. Therefore, the movable member 4 and the suction jig 6 are displaced following the posture of the work W. As shown in FIG. However, the adsorption mechanism remains off.

このとき、前記フローティング用ポート１６からエア供給孔１５及び多孔質部材１３を通じて前記凹球面３と凸球面５との間の空隙Ｇ内に噴射されたエアは、該空隙Ｇの外周から外部に流出するほか、前記空隙Ｇの内周からも、前記可動部材４の中心孔３３の内周とロッド２２の外周との間の空間部を通って前記凹部３４内に流入し、主として前記係止部３５の排気孔３６から、前記可動部材４と吸着治具６との間に形成された排気孔３７を通って外部に流出する。 At this time, the air injected into the gap G between the concave spherical surface 3 and the convex spherical surface 5 from the floating port 16 through the air supply hole 15 and the porous member 13 flows out from the outer periphery of the gap G. In addition, the inner circumference of the gap G also flows through the space between the inner circumference of the center hole 33 of the movable member 4 and the outer circumference of the rod 22 and into the recess 34, mainly at the locking portion. From the exhaust hole 36 of 35, it flows out to the outside through the exhaust hole 37 formed between the movable member 4 and the suction jig 6. As shown in FIG.

また、前記可動部材４が前記固定部材２に対して変位（傾斜）することができる角度範囲は、前記中心孔３３の孔径ｄ６の範囲であり、図５には、前記可動部材４が、前記中心孔３３の内壁が前記ロッド２２の側面に当接する位置まで、最大限傾斜した状態が示されている。 Further, the angular range in which the movable member 4 can be displaced (tilted) with respect to the fixed member 2 is the range of the hole diameter d6 of the central hole 33. In FIG. A state in which the inner wall of the central hole 33 abuts against the side surface of the rod 22 is shown.

また、前記倣い動作が行われたとき、前記可動部材４と、前記吸着治具６の治具本体５０とは、前記中心軸Ｌに対して傾斜するのに対し、前記エア吸引管５１は、その基端が前記ロッド２２に連結されているため傾斜しない。この時の該エア吸引管５１と前記治具本体５０との間の角度のずれは、前記吸着パッド５２が撓むことによって吸収される。 Further, when the copying operation is performed, the movable member 4 and the jig body 50 of the suction jig 6 are inclined with respect to the central axis L, while the air suction tube 51 is Since its proximal end is connected to the rod 22, it does not tilt. The angle deviation between the air suction tube 51 and the jig body 50 at this time is absorbed by the deflection of the suction pad 52 .

前記倣い動作が完了したあと、前記倣い装置１は、図６に示すように、前記吸引用ポート４１が吸引状態になることによって吸着オンの状態に切り換わるため、前記吸着治具６にワークＷが吸着され、それと同時に、ロックオン及びフローティングオフの状態に切り換わることにより、前記可動部材４及び吸着治具６は、ロック機構２０によってその時の姿勢にロックされる。 After the copying operation is completed, as shown in FIG. is sucked, and at the same time, the movable member 4 and the suction jig 6 are locked in the posture at that time by the lock mechanism 20 by switching to the lock-on and floating-off states.

次に、ワークＷを吸着した前記倣い装置１は、図６の動作状態を維持したまま、図７に示すように装着対象部位９に移動し、該装着対象部位９に前記ワークＷを押し当てる。そして、ロックオフ、フローティングオン、吸着オンの動作状態に切り換わることにより、前記ワークＷを吸着治具６に吸着したまま、前記可動部材４及び吸着治具６の変位によって該ワークＷを前記装着対象部位９に平行に倣わせ、該装着対象部位９に装着する。 Next, the copying apparatus 1 having attracted the workpiece W moves to the mounting target portion 9 as shown in FIG. 7 while maintaining the operation state shown in FIG. . By switching to the operation states of lock-off, floating-on, and suction-on, the workpiece W is mounted by displacement of the movable member 4 and the suction jig 6 while the suction jig 6 is suctioned to the workpiece W. It is made to follow the target part 9 in parallel and is attached to the attachment target part 9 .

続いて前記倣い装置１は、前記吸引用ポート４１を外部に開放するか又は該吸引用ポート４１から吸引用流路４０にエアを供給することにより吸着オフに切り換わり、前記ワークＷを吸着治具６から解放する。そのあと該倣い装置１は、ロックオン及びフローティングオフの状態に切り換わることにより、図４に示すように、前記可動部材４及び吸着治具６はロックされる。 Subsequently, the copying apparatus 1 is switched to suction OFF by opening the suction port 41 to the outside or by supplying air from the suction port 41 to the suction channel 40, and the workpiece W is suctioned. Release from tool 6. After that, the copying apparatus 1 is switched to the lock-on and floating-off states, thereby locking the movable member 4 and the suction jig 6 as shown in FIG.

そして、前記ワークＷを解放した前記倣い装置１は、前記ロックオン、フローティングオフ、吸着オフの動作状態のまま、次の作業に移行するか、あるいは、イニシャルポジションに移動して次の作業のために待機する。
作業を終了する場合、前記倣い装置１は、ロックオフ、フローティングオフ、吸着オフの状態（図１参照）に切り換わる。 After releasing the workpiece W, the copying apparatus 1 shifts to the next operation while maintaining the lock-on, floating-off, and suction-off operation states, or moves to the initial position for the next operation. wait for
When finishing the work, the copying apparatus 1 switches to the lock-off, floating-off, and suction-off states (see FIG. 1).

以上に詳述したように、前記倣い装置１は、前記可動部材４をロックするためのロック機構２０を形成するロッド２２を、前記吸引用流路４０を形成するための部材として兼用し、該ロッド２２に形成した吸引用流路４０を通じて吸着治具６にワーク吸着用の吸引力を作用させるように構成されているので、従来の倣い装置のように前記吸着治具６に吸引用の配管を直接接続する必要がなく、従って、前記配管が変形した場合の弾性力が、前記吸着治具６に、倣い動作に対する抵抗力として作用することがなく、このため、前記可動部材４の正常な変位が阻害されて倣い精度の低下を来すことがない。 As described in detail above, in the copying apparatus 1, the rod 22 forming the lock mechanism 20 for locking the movable member 4 is also used as a member for forming the suction channel 40. Since a suction force for sucking a workpiece is applied to the suction jig 6 through the suction flow path 40 formed in the rod 22, a pipe for suction is attached to the suction jig 6 as in the conventional copying apparatus. Therefore, the elastic force when the pipe is deformed does not act on the suction jig 6 as a resistance force against the copying operation. Displacement is not obstructed and the lowering of the scanning accuracy is not caused.

図８に示す変形例は、倣い装置１に取り付けられる吸着治具６Ａの構成が、図１－図７に示す吸着治具６の構成と相違している。
即ち、前記図１－図７に示す吸着治具６は、治具本体５０の前端の吸着口７にワークＷを吸着するタイプであるが、図８に示す吸着治具６Ａは、吸着パッド５２でワークＷを直接吸着するタイプである。このとき、前記治具本体５０の前端の吸着口７Ａの口径は、前記吸着パッド５２の口径より大きく形成され、前記吸着パッド５２に吸着されたワークＷの外周部分が前記吸着口７Ａの口縁に当接するようになっており、それにより、該ワークＷが安定した姿勢に保たれるようになっている。
この変形例における倣い装置１の構成は、図１－図７における倣い装置１の構成と同じである。 In the modified example shown in FIG. 8, the structure of the suction jig 6A attached to the copying apparatus 1 is different from the structure of the suction jig 6 shown in FIGS.
That is, the suction jig 6 shown in FIGS. 1 to 7 is of a type that sucks the work W to the suction port 7 at the front end of the jig body 50, but the suction jig 6A shown in FIG. It is a type that directly sucks the workpiece W with At this time, the diameter of the suction port 7A at the front end of the jig body 50 is formed larger than the diameter of the suction pad 52, and the outer peripheral portion of the workpiece W sucked by the suction pad 52 is the rim of the suction port 7A. so that the work W can be kept in a stable posture.
The configuration of the copying apparatus 1 in this modification is the same as the configuration of the copying apparatus 1 in FIGS. 1-7.

図９は本発明に係る倣い装置の第２実施形態の要部を示すもので、この第２実施形態の倣い装置１Ａでは、ロック機構２０のロッド２２とピストン２４との取付構造が前記第１実施形態の倣い装置１と相違している。即ち、この第２実施形の倣い装置１Ａにおいては、ロッド２２の基端部の取付軸部２２ｄをピストン２４の取付孔２４ａ内に挿入し、該取付軸部２２ｄに取り付けた２つの係止リング４８ａ，４８ｂを前記ピストン２４の一端及び他端に係止させている。
前記第２実施形態の倣い装置１のその他の構成は、前記第１実施形態の倣い装置１と実質的に同じである。 FIG. 9 shows the essential parts of a second embodiment of a copying apparatus according to the present invention. It differs from the copying apparatus 1 of the embodiment. That is, in the copying apparatus 1A of the second embodiment, the mounting shaft portion 22d of the base end portion of the rod 22 is inserted into the mounting hole 24a of the piston 24, and two locking rings are attached to the mounting shaft portion 22d. 48a and 48b are engaged with one end and the other end of the piston 24, respectively.
Other configurations of the copying apparatus 1 of the second embodiment are substantially the same as those of the copying apparatus 1 of the first embodiment.

１，１Ａ 倣い装置
２ 固定部材
３ 凹球面
４ 可動部材
５ 凸球面
６，６Ａ 吸着治具
９ 装着対象部位
１１ 第１収容溝
１２ 第２収容溝
１３ 多孔質部材
１４ 永久磁石
１５ エア供給孔
１６ フローティング用ポート
２０ ロック機構
２１ ロッド孔
２１ｂ 拡大孔部
２２ ロッド
２４ ピストン
３３ 中心孔
３４ 凹部
３４ａ 底面
３５ 係止部
３５ａ 係止面
３６ 排気孔
４０ 吸引用流路
４１ 吸引用ポート
４２ 吸引用開口
４３ 吸引用連通孔
４３ａ 環状溝
４３ｂ 第１連通孔
４３ｃ 第２連通孔
４３ｄ 第３連通孔
５１ エア吸引管
Ｗ ワーク
Ｌ 中心軸
Ｄ１，ｄ１ 内径
Ｄ２，ｄ２ 外径
ｄ６，ｄ８ 孔径 REFERENCE SIGNS LIST 1, 1A Copying device 2 Fixed member 3 Concave spherical surface 4 Movable member 5 Convex spherical surface 6, 6A Suction jig 9 Mounting target site 11 First accommodation groove 12 Second accommodation groove 13 Porous member 14 Permanent magnet 15 Air supply hole 16 Floating port 20 lock mechanism 21 rod hole 21b enlarged hole portion 22 rod 24 piston 33 center hole 34 recess 34a bottom surface 35 locking portion 35a locking surface 36 exhaust hole 40 channel for suction 41 port for suction 42 opening for suction 43 for suction Communication hole 43a Annular groove 43b First communication hole 43c Second communication hole 43d Third communication hole 51 Air suction pipe W Work L Center axis D1, d1 Inside diameter D2, d2 Outside diameter d6, d8 Hole diameter

Claims (6)

凹球面を有する固定部材と、前記凹球面に嵌合する凸球面を有する可動部材とを備え、前記凹球面と凸球面との間にエアを供給することにより該凹球面と凸球面とを非接触状態にし、その状態で前記可動部材を前記凹球面に沿って変位させることにより、該可動部材に取り付けられる吸着治具に吸着されたワークを装着対象部位に平行に押し付けるように構成された倣い装置において、
前記倣い装置は、前記可動部材の凸球面を前記固定部材の凹球面に押し付けることにより該可動部材をロックするロック機構と、前記吸着治具に通じる吸引用流路とを有し、
前記ロック機構は、前記固定部材の内部を前記凹球面の中心軸に沿って延びるロッド孔と、該ロッド孔の内部に摺動自在に挿入されたロッドとを有し、該ロッドの基端部に、エアの作用により該ロッドを前進及び後退させるピストンが設けられ、該ロッドの先端は、前記可動部材の凸球面に形成された中心孔を遊動状態に貫通して該可動部材の内部の凹部内に進入し、該ロッドの先端に、前記凹部の底面に係止及び離脱する係止部が形成されており、
前記吸引用流路は、前記固定部材に形成された吸引用ポートと、前記ロッドの先端に開口して前記吸着治具に通じる吸引用開口と、前記吸引用ポートと前記吸引用開口とを結ぶ吸引用連通孔とを有し、
前記吸引用連通孔は、前記ロッドの外周を取り囲む環状孔と、該環状孔と前記吸引用ポートとを結ぶ第１連通孔と、前記ロッドの内部を前記中心軸方向に延びて前記吸引用開口に連通する第２連通孔と、該第２連通孔と前記環状孔とを結ぶ第３連通孔とを有する、
ことを特徴とする倣い装置。 A fixed member having a concave spherical surface and a movable member having a convex spherical surface fitted to the concave spherical surface are provided. By bringing the movable member into a contact state and displacing the movable member along the concave spherical surface in that state, the workpiece attracted by a suction jig attached to the movable member is pressed in parallel against the mounting target site. in the device,
The copying device has a locking mechanism that locks the movable member by pressing the convex spherical surface of the movable member against the concave spherical surface of the fixed member, and a suction channel that communicates with the suction jig,
The locking mechanism has a rod hole extending along the central axis of the concave spherical surface inside the fixed member, and a rod slidably inserted into the rod hole, and a base end portion of the rod. A piston is provided for advancing and retracting the rod by the action of air, and the tip of the rod passes through a center hole formed in the convex spherical surface of the movable member in a floating state to enter the concave portion inside the movable member. an engaging portion that enters into and engages with and disengages from the bottom surface of the recess is formed at the tip of the rod;
The suction channel connects a suction port formed in the fixing member, a suction opening that opens at the tip of the rod and communicates with the suction jig, and connects the suction port and the suction opening. and a suction communication hole,
The suction communication hole includes an annular hole surrounding the outer periphery of the rod, a first communication hole connecting the annular hole and the suction port, and the suction opening extending inside the rod in the central axis direction. and a third communication hole connecting the second communication hole and the annular hole,
A copying apparatus characterized by: 前記ロッドの先端の前記吸引用開口は、前記吸着治具のエア吸引管をねじ込んで接続するための螺子孔であることを特徴とする請求項１に記載の倣い装置。 2. A copying apparatus according to claim 1 , wherein said suction opening at the tip of said rod is a screw hole for screwing and connecting an air suction tube of said suction jig. 前記可動部材に形成された前記凹部の底面は凹球面状をなし、
前記ロッドの先端の前記係止部は円形をなしていて、該係止部の背面の、前記凹部の底面に対向する係止面は平坦面をなし、前記係止部には、前記可動部材の中心孔を外部に開放する複数の排気孔が形成されている、
ことを特徴とする請求項１又は２に記載の倣い装置。 a bottom surface of the concave portion formed in the movable member has a concave spherical shape;
The engaging portion at the tip of the rod is circular, and the engaging surface on the back surface of the engaging portion facing the bottom surface of the recess is flat. A plurality of exhaust holes are formed to open the central hole of the
3. The copying apparatus according to claim 1 , wherein: 前記固定部材に形成された前記ロッド孔の孔端は前記凹球面に開口し、該孔端に拡大孔部が形成されており、該拡大孔部の孔径は前記可動部材の中心孔の孔径より大きいことを特徴とする請求項１から３の何れかに記載の倣い装置。 The hole end of the rod hole formed in the fixed member is open to the concave spherical surface, and an enlarged hole portion is formed in the hole end, and the hole diameter of the enlarged hole portion is larger than the hole diameter of the central hole of the movable member. 4. The copying apparatus according to claim 1, wherein the copying apparatus is large. 前記固定部材は非磁性材からなり、前記可動部材は磁性材からなっており、
前記固定部材の前記凹球面には、前記中心軸を取り囲む環状の第１収容溝が形成され、該第１収容溝の内部に、非磁性材からなる環状の多孔質部材が前記凹球面の一部を形成するように収容されており、
前記第１収容溝の背後には、前記中心軸を取り囲む環状の第２収容溝が前記第１収容溝に連なるように形成され、該第２収容溝の内部に、環状の永久磁石が収容されると共に、該永久磁石の外周と前記第２収容溝の内周との間に環状のエア供給孔が形成され、該エア供給孔は、前記固定部材に形成されたフローティング用ポートに連通すると共に、前記第１収容溝に前記多孔質部材の背面側で連通している、
ことを特徴とする請求項１から４の何れかに記載の倣い装置。 The fixed member is made of a non-magnetic material, the movable member is made of a magnetic material,
An annular first accommodation groove surrounding the central axis is formed in the concave spherical surface of the fixing member. It is housed to form a part,
Behind the first accommodation groove, an annular second accommodation groove surrounding the central axis is formed so as to be continuous with the first accommodation groove, and an annular permanent magnet is accommodated inside the second accommodation groove. An annular air supply hole is formed between the outer circumference of the permanent magnet and the inner circumference of the second receiving groove, and the air supply hole communicates with the floating port formed in the fixed member. , communicating with the first accommodation groove on the back side of the porous member;
5. The copying apparatus according to any one of claims 1 to 4 , characterized in that: 前記第２収容溝の内径は前記第１収容溝の内径より大きく、該第２収容溝の外径は前記第１収容溝の外径より小さいことを特徴とする請求項５に記載の倣い装置。 6. The copying apparatus according to claim 5 , wherein the inner diameter of said second containing groove is larger than the inner diameter of said first containing groove, and the outer diameter of said second containing groove is smaller than the outer diameter of said first containing groove. .
JP2019084020A 2019-04-25 2019-04-25 copy machine Active JP7325705B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019084020A JP7325705B2 (en) 2019-04-25 2019-04-25 copy machine
TW109112626A TWI830899B (en) 2019-04-25 2020-04-15 Copying apparatus
KR1020200046604A KR20200125463A (en) 2019-04-25 2020-04-17 Copying apparatus
CN202010330180.5A CN111867348B (en) 2019-04-25 2020-04-24 imitation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019084020A JP7325705B2 (en) 2019-04-25 2019-04-25 copy machine

Publications (2)

Publication Number Publication Date
JP2020181889A JP2020181889A (en) 2020-11-05
JP7325705B2 true JP7325705B2 (en) 2023-08-15

Family

ID=72985764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019084020A Active JP7325705B2 (en) 2019-04-25 2019-04-25 copy machine

Country Status (4)

Country Link
JP (1) JP7325705B2 (en)
KR (1) KR20200125463A (en)
CN (1) CN111867348B (en)
TW (1) TWI830899B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015216265A (en) 2014-05-12 2015-12-03 Smc株式会社 Alignment device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08304835A (en) * 1995-04-28 1996-11-22 Hitachi Electron Eng Co Ltd Sticking device
JPH10156779A (en) * 1996-11-29 1998-06-16 Nec Corp Robot hand
JP4050427B2 (en) * 1999-02-26 2008-02-20 シーケーディ株式会社 Copying device
JP2001230594A (en) * 2000-02-21 2001-08-24 Murata Mfg Co Ltd Vacuum suction apparatus of mounting device
JP4547652B2 (en) * 2000-04-03 2010-09-22 Ｓｍｃ株式会社 Automatic alignment pressing device
JP4081247B2 (en) 2001-05-31 2008-04-23 シーケーディ株式会社 Copying apparatus and copying state holding method in copying apparatus
CN100510874C (en) * 2004-11-24 2009-07-08 喜开理株式会社 Floating unit and floating device with tilting function
JP5185886B2 (en) 2009-05-28 2013-04-17 三菱電機株式会社 Copy mechanism
JP5760726B2 (en) * 2011-06-10 2015-08-12 株式会社リコー Component bonding apparatus, droplet discharge head manufacturing apparatus, and component bonding method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015216265A (en) 2014-05-12 2015-12-03 Smc株式会社 Alignment device

Also Published As

Publication number Publication date
CN111867348A (en) 2020-10-30
CN111867348B (en) 2023-08-29
JP2020181889A (en) 2020-11-05
TW202109684A (en) 2021-03-01
TWI830899B (en) 2024-02-01
KR20200125463A (en) 2020-11-04

Similar Documents

Publication Publication Date Title
JP2008185214A (en) Clamping device
JP2007268625A (en) Clamper and machining apparatus including it
JP2012218112A (en) Robot hand including floating mechanism
KR20160094944A (en) Clamp device
JP5212830B2 (en) Clamping device
JP7325705B2 (en) copy machine
KR20200020675A (en) Gripping device
TWI655992B (en) Fixture device
JP2020011352A (en) Suction positioning device
JP7076354B2 (en) Centering device
WO2005102616A1 (en) Holding device for rod
JP2005230946A (en) Chuck mechanism, and machining device and machining method using the same
JP7295366B2 (en) Suction jig
TWI714294B (en) Clamping device
JPH0810521Y2 (en) Fluid pressure actuator
CN216731507U (en) Vacuum suction jig
US11478901B2 (en) Pneumatic fixture clamp
JP6672323B2 (en) Component chuck device and component mounting device
TWI572259B (en) Apparatus for gripping semi-conductive board with vacuum
JP2000356204A (en) Hydraulic cylinder
CN217452177U (en) Harmonic speed reduction type rotating chuck
JP2567433Y2 (en) Vacuum suction pad
EP4133519B1 (en) Clamping device and method for smoothing a curved sample
JP6191537B2 (en) Alignment device
JPH11182505A (en) Fluid pressure cylinder for vacuum suction

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220201

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230117

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20230119

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230216

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230411

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230511

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230716

R150 Certificate of patent or registration of utility model

Ref document number: 7325705

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150