JP7319663B2 - Clean room units and clean rooms - Google Patents

Description

The present invention relates to clean room units and clean rooms.

As the clean room described in Patent Document 1 has been applied for by a major general construction company, a conventional clean room is a building structure, and generally requires large-scale capital investment, and layout changes, expansions, and reductions after operation can be easily performed. It was also difficult to use distributed facilities. Also, it is generally difficult to operate a part of the facility, and it wasted power by always operating the whole.
Therefore, in the clean room described in Patent Document 2, three types of clean room units with different areas to ensure cleanliness are prepared, and by combining them, a block type clean room with diversified specifications like a block house is created. is suggesting.

However, the block-type clean room of Patent Document 2 also has the same idea of constructing a building structure as Patent Document 1, and could not achieve cost reduction, flexible specification setting and change, and various operating conditions. rice field.

Japanese Patent Application Laid-Open No. 2006-317048 JP 2018-115487 A

An object of the present invention is to provide a variety of clean rooms, including conversion of existing buildings to clean rooms.

A clean room unit according to the present invention is an air purification unit having a dust collector for sucking and purifying air in a space, and a clean air blowing device for blowing the air purified by the dust collector into the space as clean air. and an ion generation unit that is connected to the air purification unit and emits ions into the space, wherein the clean air blowing device includes a duct that sends upward the air purified by the dust collector; An elongated air supply chamber for blowing air sent through a duct to the upper part of the space, the dust collector includes an elongated air intake chamber for sucking air at the lower part of the space, and a fan for sucking air and sending it to the duct; and a filter for purifying the air sucked from the air intake chamber, wherein the air supply chamber and the air intake chamber are arranged substantially parallel to each other, and the ion generating unit has an elongated shape with a length substantially equal to that of the air-supply chamber, and is disposed substantially parallel to and close to the air-supply chamber.

According to the present invention, various types of clean rooms can be realized, including conversion of existing buildings to clean rooms, and cost reduction, flexible specification setting and modification, and various operating conditions of clean rooms are possible.

1 is a perspective view showing a clean room (Example 1) using a clean room unit (Example 1) according to the present invention; FIG. FIG. 2 is a vertical cross-sectional block diagram showing the ion generating unit of FIG. 1; FIG. 5 is a front view showing Example 2 of the clean room unit according to the present invention; 4 is a partially broken right side view of FIG. 3; FIG. 4 is a perspective view of FIG. 3; FIG. FIG. 10 is a perspective view showing a third embodiment of the clean room unit according to the present invention; FIG. 11 is a perspective view showing Example 4 of the clean room unit according to the present invention; Fig. 2 is a perspective view showing a second embodiment of a clean room according to the present invention; 1 is a block diagram showing a control system of a clean room according to the present invention; FIG.

[Clean room unit (unit unit) Example 1]
[Clean room example 1]
Next, a clean room (Example 1) using Example 1 of the clean room unit (unit unit) according to the present invention will be described with reference to FIG.

The clean room CR has a plurality of unit units CU installed on the left and right wall surfaces W1 and W2 of the room R of the existing building.
The air purification unit 100 includes a clean air blowing device 110 and a dust collector 120. The clean air blowing device 110 sends air (clean air) CA purified by the dust collector 120 upward through a duct 112, The air is blown downward and sideways (including forward) from air supply holes 115 of air supply chamber 114, which has a hollow rectangular parallelepiped shape or hollow prismatic shape, that is, a compact elongated air supply chamber 114 provided near the ceiling CE, for example. The air supply chamber 114 has an elongated shape extending substantially perpendicularly to the wall surface W1 of the room R in a direction away from the duct 112, that is, in a direction away from the wall surface W1 (hereinafter, this direction is referred to as "forward"). have. In the unit unit CU, the surface on the opposite side of the "front" is referred to as "back", and the surface on the "front" side is referred to as "front".

The dust collector 120 has a fan 122, and is provided in the lower part of the room R, for example, on the floor FL. Contaminated air IA in R is sucked and cleaned by filter 126 . The intake chamber 124 has an elongated shape extending substantially perpendicularly to the wall surface W1 of the room R in a direction away from the wall surface W1 (forward). The fan 122 and the filter 126 are provided in a casing 128 connected to the lower end of the duct 112 near the wall surface W1 (however, if a passage is provided on the wall side, the filter 126 is separated from the passage). are placed in The fan 122 draws in the contaminated air IA purified by the lower filter 126 and pumps it upwards to the upper filter 126 where it is further purified and sent to the duct 112 . Therefore, air that has been cleaned in two stages is supplied to the air supply chamber 114 , and highly purified air is blown out from the air supply chamber 114 .

The air supply chamber 114 and the air intake chamber 124 protrude substantially horizontally forward and are arranged in parallel on the same vertical plane. ing. As a result, the clean air blown out from the air supply chamber 114 blows clean air CA from the wall surfaces W1 and W2 at least within the range of the length of the air supply chamber 114 and the air intake chamber 124. The wind CA is diffused to the outside, and the polluted air IA in and around the area is purified to generate clean air CA. In other words, air purification and clean air generation are achieved over a wide area between and around the air supply chamber 114 and the air intake chamber 124 despite their compact elongated shape.

The configuration of the ion generation unit 200 has a configuration similar to, for example, Japanese Patent No. 4358008 according to the invention of the inventor of the present application. A needle electrode 230 arranged corresponding to each ion emission port 222 is housed in the casing 220 of the above, and a high voltage is applied to the needle electrode 230 from a high voltage power supply 234 through a high voltage supply line 232, Extract the ions IN downwards.
The ion generation unit 200 is fixed to the lower side of the air supply chamber 114 via a spacer 210 so as to be substantially parallel to the air supply chamber 114, and ionizes the clean air CA blown out from the air supply chamber 114 and the surrounding air. . As a result, the static electricity of objects such as workers M1 and M2 and floating foreign matter (not shown) in the room R is neutralized, the adhesion phenomenon of foreign matter is prevented, and the generation of defective products due to adhesion of foreign matter is prevented.

The ion generating unit 200 has a columnar shape, that is, an elongated shape , and has approximately the same length as the air supply chamber 114, and is arranged in close proximity to the air supply chamber 114 in parallel. ions IN can be emitted against it. Thereby, the ions IN are carried by the clean air CA and diffused over a wide area.

The fan 122 and the upper and lower filters 126 are components of the dust collector 120. In the clean air blowing device 110, the fan 122 and the upper filter 126 are shared with the dust collector 120. Air chamber 114 is a component. By sharing the fan 122 and the upper filter 126 with the dust collector 120, the clean air blower 110 is simplified and the cost is reduced.

In the clean air blowing device 110, by arranging the air supply chamber 114 near the ceiling CE, it is possible to prevent the clean air CA from blowing up foreign matter such as dust on the floor surface FL, thus facilitating the cleaning of the room R.

In the clean room CR of the present embodiment, the cooperation of the air purification unit 100 and the ion generation unit 200 purifies the air while strongly suppressing the foreign matter adhesion phenomenon inside, so the inside of the room R is strongly cleaned. become. Conventionally, in order to prevent foreign matter from entering from the outside when opening and closing the door DO shown in FIG. Even if foreign matter is floating, the foreign matter adhesion phenomenon can be suppressed, so there is no need to increase the internal pressure to prevent foreign matter from entering from the outside, and the air pressure can be set to the same pressure as the outside. As a result, the cost of boosting equipment and operation can be reduced, and the working environment can be improved.
It goes without saying that each unit CU can individually set its operating status, and can be operated or stopped according to the status of the installation location. In addition, the control mode will be described in detail in a second embodiment.

The unit CU is installed in the room R of the existing building so that it can be installed and removed, and if the room R is used for purposes other than the clean room CR, it can be removed and diverted to another clean room. is also possible. Also, when changing the specifications of the clean room CR, it is easy to move, increase or decrease the unit CU.
The unit unit CU is installed by fixing the air supply chamber 114 to the ceiling CE, the duct 112 and the casing 128 to the wall surfaces W1 and W2, and the intake chamber 124 to the floor FL using anchor bolts (not shown) or the like. Alternatively, a variety of methods can be employed, such as a method in which the unit CU is made into a rigid structure that can stand on its own as a whole, and the whole is suspended from the wall surfaces W1 and W2 in the air supply chamber 114 .
[Clean room unit (unit unit) Example 2]

Next, Example 2 of the unit will be described. The same reference numerals are given to the same or corresponding parts as those of the first embodiment, and the description thereof will be omitted.

3 to 5, the unit CU is suspended by a suspension 300 attached to the wall surface W. FIG. This makes it possible to install the unit CU with extremely simple and easy work.
The suspension 300 is fixed to the wall surface W, and the end of the upper surface of the air supply chamber 114 of the unit unit CU that contacts the wall surface W is connected to the suspension 300 . Since the unit CU is suspended and supported by the suspension 300 in this way, it is not essential that the unit CU is rigid enough to stand on its own.
Further, on both sides of the casing 128 of the dust collector 120, support legs 400 are provided that protrude in the direction along the floor surface FL and the wall surface W (hereinafter referred to as the “horizontal direction”). is ensured. The unit unit CU is stably held by cooperation of the support leg 400 and the suspension 300, and is safe from unexpected shocks such as earthquakes.
In the unit unit CU of this embodiment, the air supply chamber 114 has a semi-cylindrical shape with a flat upper surface and a cylindrical lower surface, and an air supply hole 115 is formed in the lower surface. As a result, the clean air CA can be evenly blown downward in all directions on each cross section of the air supply chamber 114 . Similarly, the intake chamber 124 has a semi-cylindrical shape with a flat bottom surface and a cylindrical top surface, and an intake hole 125 is formed in the top surface. As a result, the contaminated air IA can be evenly sucked from all directions of each cross section and tip of the intake chamber 124 .
[Clean room unit (unit unit) Example 3]

Next, Example 3 of the unit will be described. The same reference numerals are assigned to the same or corresponding parts as those in the first or second embodiment, and the description thereof is omitted.

In FIG. 6, the unit CU has an arm 500 that extends horizontally forward from the upper end of the duct 112. At the tip of the arm 500, there is a feeder that extends in the left-right direction symmetrically with respect to the arm 500. An air chamber 114 is provided. That is, the insufflation chamber 114 is in a skewed position with respect to the duct 112 , and the rearward projection of the insufflation chamber 114 is orthogonal to the duct 112 . An intake chamber 124 extending in the left-right direction is provided at the lower end of the casing 128 symmetrically with respect to the casing 128, and a support leg 400 extending horizontally toward the front is provided. .
The arm 500 is hollow, and the clean air CA sent upward from the duct 112 is sent from the arm 500 to the air supply chamber 114 .

An ion generation unit 200 is attached to the lower side of the air supply chamber 114 via a spacer 210 in parallel with the air supply chamber 114 to ionize the clean air CA and the surrounding air.

The air supply chamber 114 and the ion generating unit 200 extend in the left-right direction at the tip of the arm 500 projecting forward, and the intake chamber 124 also extends in the left-right direction. In addition, foreign matter adhesion phenomenon is prevented.

In Example 3, since the air supply chamber 114 protrudes in the left-right direction, the letter "T" gives a strong impression when viewed from above. On the other hand, since the unit CU of Examples 1 and 2 has a strong impression of the letter "I" when viewed from above, Examples 1 and 2 are hereinafter referred to as "I type".
[Clean room unit (unit unit) Example 4]

Next, Example 4 of the unit will be described. The same reference numerals are assigned to the same or corresponding portions as those in Examples 1 to 3, and description thereof will be omitted.

In FIG. 7, the fourth embodiment is obtained by changing the configuration of the intake chamber 124 and the support leg 400 in the unit CU of the third embodiment.

The unit unit CU is provided with an arm 500 extending horizontally forward from the upper end of the duct 112 and an air supply chamber 114 extending left and right from the tip of the arm 500, as in the third embodiment. An ion generation unit 200 is attached in parallel with the air supply chamber 114 on the side.

In the third embodiment, the intake chambers 124 are provided as a pair of left and right air intake chambers 124. However, in the present embodiment, the air intake chambers 124 are of an integral structure. It extends in the left-right direction symmetrically with respect to the That is, both the insufflation chamber 114 and the intake chamber 124 are in a skewed position with respect to the duct 112 , and their rear projections are perpendicular to the duct 112 .
As a result, the polluted air IA can be sucked in a wide area that spreads to the left and right away from the casing 128, and dust can be effectively removed.
Horizontal duct 600 directs contaminated air IA drawn from intake chamber 124 towards casing 128 .

The casing 128 is provided with left and right support legs 400 similar to those of the second embodiment to ensure a reaction force against a moment in the left and right direction. A reaction force is also secured against the moment.
[Clean room example 2]

FIG. 8 shows Example 2 of the clean room CR. In the existing room R, I-type unit units CU1 to CU12 and T-type unit units CUT1 to CUT12 are used together.

I-shaped unit units CU1 to CU6 are arranged so that the air supply chamber 114 and the intake chamber 124 protrude vertically from the wall surface W1, facing the wall surface W1. The unit units CU7 to CU12 are arranged so that the air supply chamber 114 and the intake chamber 124 protrude perpendicularly from the wall surface W3, with their back surfaces in contact with the wall surface W3.
That is, the row of the unit units CU1 to CU6 and the row of the unit units CU7 to CU12 purify the space corresponding to the protrusion amount of the air supply chamber 114 and the intake chamber 124 from the entire surface of the wall surfaces W1 and W3, and the surrounding air. be done.

The room R is rectangular, and unit units CUT1 to CUT6 and unit units CUT7 to CUT12 are arranged parallel to the wall surfaces W1 and W3 in the space between the wall surfaces W1 and W3 and separated from the wall surfaces W1 and W3. .
On wall surface W4, unit units CUT1 and CUT12 are spaced apart from wall surfaces W1 and W3, respectively, and are arranged so that arms 500 protrude in the direction of wall surface W2 while their rear surfaces are in contact with wall surface W4. Unit units CUT6 and CUT7 are arranged so as to face the units CUT1 and CUT12, respectively, so that the arms 500 protrude in the direction of the wall surface W4 while their rear surfaces are in contact with the wall surface W2.

Between the unit units CUT1 and CUT6, a pair of unit units CUT2 and CUT3 and a pair of unit units CUT4 and CUT5 are arranged so that the rear surfaces of the unit units CUT2 and CUT3 are in contact with each other or close to each other, and the arm 500 protrudes in the direction of the wall surfaces W4 and W2. are arranged in one column.
The front surface of the unit unit CUT2 faces the front surface of the unit unit CUT1, and the space between them is a region that is expanded left and right by the air supply chamber 114, the intake chamber 124, and the ion generation unit 200 that extend left and right. Cleansed. Similarly, the space between the unit units CUT3 and CUT4 and the space between the unit units CUT5 and CUT6 are areas that expand left and right, and the air is purified.

Between the unit units CUT7 and CUT12, a pair of the unit units CUT8 and CUT9 and a pair of the unit units CUT10 and CUT11 are arranged in a line so that the arms 500 protrude in the directions of the wall surfaces W2 and W4 while their rear surfaces are in contact with each other. are arranged in
The front surface of the unit unit CUT8 faces the front surface of the unit unit CUT7, and the space between them is a region that is expanded left and right by the air supply chamber 114, the intake chamber 124, and the ion generation unit 200 that extend left and right. Cleansed. Similarly, the space between the unit units CUT9 and CUT10 and the space between the unit units CUT11 and CUT12 are also areas that expand left and right, and the air is purified.
Therefore, in the space between the wall surfaces W1 and W3, the air is purified in the area extending to the left and right by the row of the unit units CUT1 to CUT6 and the row of the unit units CUT7 to CUT12, and the space in contact with the wall surfaces W1 and W3 is the unit unit. The air is cleaned by the row of CU1 to CU6 and the row of unit units CU7 to CU12, and the entire room R is evenly cleaned.
Needless to say, the number of I-type and T-type clean room units CU and CUT to be arranged and the number of T-type clean unit pairs to be arranged can be arbitrarily selected according to the situation of the room R.
[Example 3 of clean room]

Next, a third embodiment in which a plurality of clean rooms CR1 to CR4 are provided in which I-type and T-type unit units are mixed will be described.

In FIG. 9, a total of a unit units CU11 to CU1a are installed in the clean room CR1, a total of b unit units CU21 to CU2b are installed in the clean room CR2, and a total of c unit units CU31 to CU31 are installed in the clean room CR3. CU3c is installed, and a total of d unit units CU41 to CU4d are installed in the clean room CR4. These unit units CU11 to CU1a, CU21 to CU2b, CU31 to CU3c, and CU41 to CU4d are each connected to a controller CNT, which operates each unit under appropriate conditions and detects its operating status. .

For example, if there is a clean room that does not operate, all the units in that clean room will be stopped, and in a clean room that requires strong purification, all the unit units will be operated. Operation power can be saved.

Each clean room CR1, CR2, CR3, CR4 can be equipped with one or more pollution degree meters. For example, unit units CU11, CU12, . . . , CU1a, CU21, CU22, . , IM1a, IM21, IM22, . . . , IM2b, IM31, IM32, . Install and connect each pollution degree measuring instrument to the controller CNT. The controller CNT controls the operating status of the corresponding unit based on the measured value of each contamination measuring instrument. This allows optimum operation of the entire clean room CR1-CR4.

As described above, each unit CU, CUT can perform air purification, clean air blowing, and static elimination independently in a limited area with the minimum required configuration. Since the range of purification, clean air blowing, and static elimination can be adjusted, optimum air purification, clean air blowing, and static elimination can be provided for various spaces.

In the above embodiment, the air supply chamber 114 and the air intake chamber 124 have a linear shape and are arranged substantially parallel to each other. can also be adopted, and it goes without saying that it is also possible to give a twist or the like to the mutual positional relationship.
In the above embodiment, the thrust of the fan 122 of the dust collector 120 is used as the blowing force of the clean air blowing device, but it is also possible to increase the thrust by providing a separate fan.

CA Clean air CE Ceiling CNT Controller CU Unit units CU1 to CU12 Unit units CU11, CU12, ..., CU1a Unit units CU21, CU22, ..., CU2b Unit units CU31, CU32, ..., CU3c Unit unit CU41 , CU42, . ..., IM2b Pollution degree measuring instruments IM31, IM32, ..., IM3c Pollution degree measuring instruments IM41, IM42, ..., IM4d Pollution degree measuring instruments IN Ion R, R1, R2, R4 Room W, W1 to W4 Wall surface 100 Air purification unit 110 Clean air blower 112 Duct 114 Air supply chamber 115 Air supply hole 120 Dust collector 122 Fan 124 Air intake chamber 125 Air intake hole 126 Filter 128 Casing 200 Ion generation unit 210 Spacer 220 Casing 222 Ion discharge port 230 Needle electrode 232 high voltage supply line 234 high voltage power supply 300 suspension 400 support leg 500 arm 600 horizontal duct

Claims (11)

an air purification unit having a dust collector for sucking and purifying air in a space, and a clean air blowing device for blowing the air purified by the dust collector into the space as clean air;
an ion generation unit connected to the air purification unit and emitting ions into the space;
with
The clean air blowing device comprises a duct for sending upward the air purified by the dust collector, and an elongated air sending chamber for blowing the air sent by the duct to the upper part of the space,
The dust collector includes an elongated intake chamber for sucking air in the lower part of the space, a fan for sucking air from the intake chamber and sending it to the duct, and a filter for purifying the air sucked from the intake chamber. and
the insufflation chamber and the intake chamber are arranged substantially parallel to each other;
The ion generating unit has an elongated shape with a length substantially equal to that of the gas supply chamber, and is arranged close to and substantially parallel to the gas supply chamber.
clean room unit. 2. The clean room unit of claim 1 , wherein said air supply chamber and intake chamber extend away from said duct. 3. A clean room unit according to claim 1 or 2 , wherein the air delivery chamber is in a skewed position with respect to the duct and the rearward projection is orthogonal to the duct. 3. A clean room unit according to claim 1 or 2, wherein the intake chamber is in a staggered position with respect to the duct and the rearward projection is orthogonal to the duct. 5. A clean room unit according to any preceding claim , wherein the intake chamber is approximately the same length as the air supply chamber. A clean room in which one or a plurality of clean room units according to any one of claims 1 to 5 are installed in a predetermined space. 5. A clean room in which one or a plurality of pairs of clean room units according to claim 3 or 4 are arranged with their backs in contact with each other or arranged close to each other. 8. The clean room according to claim 6 , further comprising a controller to which a plurality of said clean room units are connected. 9. The clean room according to any one of claims 6 to 8 , wherein said clean room unit can be installed and removed from said space. 6. A clean room unit according to any one of the preceding claims , wherein the installed clean room is set at an atmospheric pressure equal to the external atmospheric pressure. 10. A clean room according to any one of claims 6 to 9 , wherein said space is set to a pressure equal to the pressure outside.