JP7300080B2 - Multi-axis sensor - Google Patents

Description

The present invention relates to a multiaxial sensor that detects forces in multiaxial directions.

In general, it is known to provide a multiaxial sensor with a stopper structure in order to protect it from damage and breakage due to application of an excessive load exceeding the rating (see Patent Document 1).

JP-A-10-293070

However, in the case of a multi-axis sensor, when trying to protect external forces applied in multiple directions with a single stopper structure, highly accurate processing technology for each part or complicated adjustment after assembly is often required. On the other hand, if a separate stopper structure is provided for external forces in each axial direction, the number of parts increases, the size of the sensor as a whole increases, and the manufacturing cost increases.

An object of embodiments of the present invention is to provide a multiaxial sensor that can more easily provide a stopper structure for protection against external forces in multiaxial directions.

A multiaxial sensor according to the aspect of the present invention includes a flat plate-shaped first region located in a central portion, and an elastic body formed integrally with the first region, and the elastic body is formed integrally with the first region. a second region located on the outer peripheral side; multiaxial force detection means for detecting forces in multiaxial directions based on the amount of relative displacement between the first region and the second region; first stopper means contacting a gap between the first area portion and the second area portion and functioning as a stopper against a force in a direction parallel to the plane of the flat plate; A second stopper means including a stopper portion arranged so as to sandwich a part of each of the region portions between the upper surface and the lower surface and functioning as a stopper against a force in a direction perpendicular to the plane of the flat plate shape is provided.

According to the embodiments of the present invention, it is possible to provide a multiaxial sensor in which a stopper structure for protecting against external forces in multiaxial directions can be more easily provided.

1 is a top view showing the configuration of a multiaxial sensor according to a first embodiment of the present invention; FIG. FIG. 2 is a cross-sectional view taken along line AA′ of the Z-axis direction stopper portion of FIG. 1 according to the first embodiment; The block diagram which shows the 1st modification of the Z-axis direction stopper part which concerns on 1st Embodiment. The block diagram which shows the 2nd modification of the Z-axis direction stopper part which concerns on 1st Embodiment. FIG. 4 is a flowchart showing a method for manufacturing the multiaxial sensor according to the first embodiment; FIG. 4 is a top view showing the configuration of a multiaxial sensor according to a second embodiment of the present invention; FIG. 7 is a cross-sectional view taken along line BB′ of the Z-axis direction stopper portion of FIG. 6 according to the second embodiment;

(First embodiment)
FIG. 1 is a top view showing the configuration of a multiaxial sensor 10 according to the first embodiment of the invention.
The multiaxial sensor 10 has a thick flat plate shape. The outer shape of the multiaxial sensor 10 is a flange shape that has the same shape at every predetermined angle from the center. The brim-shaped surface is circular, polygonal, or the like. For example, the multi-axis sensor 10 is mounted on a robot or the like.

The multi-axis sensor 10 detects 6 axes of X-axis direction force Fx, Y-axis direction force Fy, Z-axis direction force Fz, X-axis moment Mx, Y-axis moment My, and Z-axis moment Mz. . Here, the X, Y and Z axes are orthogonal to each other, and the XY plane formed by the X and Y axes is parallel to the planar portion of the multiaxial sensor 10 . The Z axis is perpendicular to the XY plane or planar portion of the multi-axis sensor 10 .

The multiaxial sensor 10 includes a first area portion 1 , a second area portion 2 , a plurality of strain generating bodies 3 , and a plurality of Z-axis direction stopper portions 4 . A dotted line in FIG. 1 indicates the attachment position of the Z-axis direction stopper portion 4 . The multiaxial sensor 10 may include a detection circuit, a base, a cover, various wirings, or attachment parts for attaching the multiaxial sensor 10 to a mounting location, for detecting displacements in multiaxial directions, if necessary. shall be prepared.

The first region portion 1 and the second region portion 2 are elastic bodies integrally formed of a material such as metal. The first area portion 1 is formed in an annular shape with a hole in the center, and is positioned at the central portion (central portion) of the multiaxial sensor 10 . The second region portion 2 is positioned so as to overlap the center of the first region portion 1 and cover the outer periphery of the first region portion 1 . Note that the elastic body of the multiaxial sensor 10 may have any shape as long as the second region 2 is located on the outer peripheral side of at least a portion of the first region 1 . For example, a portion of the first region portion 1 may be positioned between the second region portions 2 or on the outer peripheral side.

The first region portion 1 is attached to the movable portion and the second region portion 2 is attached to the fixed portion. The multiaxial sensor 10 detects forces in multiaxial (six-axis) directions based on relative displacement amounts between the first region 1 and the second region 2 . Note that the first region portion 1 may be attached to the fixed portion, and the second region portion 2 may be attached to the movable portion. For example, when the multi-axis sensor 10 is provided at a joint of a robot, one of the first area part 1 and the second area part 2 is attached to the hand or arm of the robot, and the other rotates in the Z-axis direction. It is attached to a motor or speed reducer that serves as a power source that generates torque on a shaft.

A plurality of strain generating bodies 3 are arranged so that the longitudinal direction extends in the radial direction at equal intervals from the center, and are provided so as to connect (straddle) the first region portion 1 and the second region portion 2. be done. Note that the strain-generating body 3 may be provided in any manner as long as it is provided so as to apply force due to relative displacement between the first region portion 1 and the second region portion 2 . For example, the strain-generating body 3 may be provided so as to be attached to a beam connecting the first region 1 and the second region 2 . Although any number of strain-generating bodies 3 may be provided as long as they are two or more, three or more are required to function as a force sensor that detects six axes. Here, the configuration of the multiaxial sensor 10 in which four strain-generating bodies 3 are provided at intervals of 90 degrees from the center will be mainly described.

The strain-generating body 3 is configured by attaching a plurality of strain gauges that serve as sensors for detecting strain to a rectangular plate-shaped member that serves as a base. The strain gauge is configured to produce an electrical displacement when deformed. As long as at least one strain gauge is provided for one strain-generating body 3, any number of strain gauges may be provided and may be arranged in any direction. Any strain gauge may be used as long as it produces an electrically detectable displacement. For example, the strain gauge may change electrical resistance or generate voltage according to the amount of deformation. By detecting these electrical displacements, the multiaxial sensor 10 performs calculations so as to extract only the force in the axial direction to be measured, thereby measuring the force on each axis.

The mounting hole H1 is a screw hole through which a bolt is inserted to mount the multiaxial sensor 10 on a fixed side such as a base. The mounting hole H2 is a screw hole for passing a bolt to mount the multiaxial sensor 10 on the movable side of a movable part or the like. The mounting hole H3 is a screw hole for passing a bolt 45 to mount the Z-axis direction stopper portion 4 to the multiaxial sensor 10 . Other holes are provided by removing light or the like for reasons such as weight reduction or adjusting the detection sensitivity of the sensor.

Next, the stopper structure portion SP will be described.
The stopper structural portion SP includes the first structural portion 11 of the first region portion 1 , the second structural portion 21 of the second region portion 2 , and the Z-axis direction stopper portion 4 . Here, the stopper structure portion SP has a shape in which the first structure portion 11 protrudes in the radial direction from the first region portion 1 located in the central portion toward the second region portion 2 located in the outer peripheral portion. Not exclusively. For example, the stopper structure portion SP may have a shape in which the second structure portion 21 protrudes radially from the second region portion 2 located in the outer peripheral portion toward the first region portion 1 located in the central portion.

The first structural portion 11 and the second structural portion 21 face each other on a plane parallel to the Z-axis.
The first gap SP1 is a gap between the radially opposing surfaces between the first structural portion 11 and the second structural portion 21 . The complete contact of the first gap SP1 serves as a stopper against the translational forces Fx and Fy in the XY plane direction. Specifically, when translational forces Fx and Fy in the XY plane directions are applied to the first region portion 1, the first structural portion 11 contacts the opposing second structural portion 21 via the first gap SP1, It serves as a stopper against translational forces Fx and Fy in the XY plane direction.

The second gap SP2 is a gap between surfaces facing each other in the circumferential direction between the first structural portion 11 and the second structural portion 21 . The complete contact of the second gap SP2 serves as a stopper against the Z-axis moment Mz. Specifically, when the Z-axis moment Mz is applied, the first structural portion 11 comes into contact with the opposing second structural portion 21 via the second gap SP2, thereby acting as a stopper against the Z-axis moment Mz.

FIG. 2 is a cross-sectional view of the Z-axis direction stopper portion 4 of FIG. 1 according to the present embodiment cut along line AA' (radial direction). Although the Z-axis direction stopper portion 4 is fixed to the second region portion 2 here, it may be fixed to the first region portion 1 .
The Z-axis direction stopper portion 4 includes a first stopper member 41 , a second stopper member 42 , a first adjusting member 43 , a second adjusting member 44 , bolts 45 and nuts 46 .

The first stopper member 41 is arranged to cover the first gap SP1 between the first structural portion 11 and the second structural portion 21 via the first adjusting member 43 from above. The second stopper member 42 is arranged to cover the first gap SP1 between the first structural portion 11 and the second structural portion 21 via the second adjusting member 44 from below. That is, a pair of stopper members 41 and 42 sandwich the first gap SP1 between the first structural portion 11 and the second structural portion 21 with two adjusting members 43 and 44 interposed therebetween. 41 to 44 are arranged.

The bolt 45 is inserted through the first stopper member 41, the first adjusting member 43, the second structural portion 21, the second adjusting member 44, and the second stopper member 42 in this order from the upper surface. A nut 46 is passed through the tip of a bolt 45 protruding from the bottom surface of the second stopper member 42 and tightened. Thereby, the Z-axis direction stopper portion 4 is fixed to the elastic body. Although the Z-axis direction stopper portion 4 is attached to the elastic body with the bolt 45 and the nut 46 here, the Z-axis direction stopper portion 4 may be attached in any way.

The first stopper member 41 and the second stopper member 42 may have any configuration as long as they sandwich at least a part of each of the first structural portion 11 and the second structural portion 21 . For example, it may be configured to sandwich the second gap SP2 between the first structural portion 11 and the second structural portion 21 .

The third gap SP3 is a gap formed in the Z-axis direction between the first stopper member 41 and the first structural portion 11 due to the interposition of the first adjustment member 43 . The fourth gap SP4 is a gap formed in the Z-axis direction between the second stopper member 42 and the first structural portion 11 due to the interposition of the second adjusting member 44 . The third gap SP3 and the fourth gap SP4 serve as stoppers against the X-axis moment Mx, the Y-axis moment My, and the Z-axis direction force Fz.

The first adjustment member 43 and the second adjustment member 44 are shims, washers, or the like. The adjusting members 43 and 44 may be of any type as long as they adjust the width (the length in the Z-axis direction) of the gaps SP3 and SP4 between the stopper members 41 and 42 and the second structural portion 21. It's okay. By selecting the thicknesses of the first adjustment member 43 and the second adjustment member 44, the widths of the gaps SP3 and SP4 are adjusted.

Note that the Z-axis direction stopper portion 4 may be modified as follows.
As in the first modification of the Z-axis direction stopper portion 4a shown in FIG. 3, portions corresponding to the first adjustment member 43 and the second adjustment member 44 are integrated so as to be included in the stopper members 41a and 42a, respectively. may

Also, like the second modification of the Z-axis direction stopper portion 4b shown in FIG. 4, the portions corresponding to the first adjusting member 43 and the second adjusting member 44 are integrated so as to be included in the second structural portion 21b. may be For example, the thickness of the second structural portion 21b may be thicker than the thickness of the first structural portion 11 by the thickness of the first adjusting member 43 and the second adjusting member 44 . Similarly, when the Z-axis direction stopper portion 4b is provided in the first structural portion 11, the portions corresponding to the first adjusting member 43 and the second adjusting member 44 are integrated so as to be included in the first structural portion 11. may

Furthermore, as shown in FIGS. 3 and 4, the stopper members 41, 41a, 42, 42a may be provided with recesses DN on their surfaces so that the head portion of the bolt 45 and the nut 46 portion do not protrude from their respective surfaces. good.
FIG. 5 is a flowchart showing a method of manufacturing the multiaxial sensor 10 according to this embodiment.

Next, a method of determining the gaps SP1 to SP4 of the stopper structure portion SP in the manufacturing process of the multiaxial sensor 10 will be described. It should be noted that the manufacturing method of the multi-axis sensor 10 described here is an example, and the manufacturing does not necessarily have to be performed in this manner.
The specification of the multi-axis sensor 10 is determined based on the purpose or application (step S101). The relative displacement amount between the first region portion 1 and the second region portion 2 determined by the force in each direction based on the created specifications and the gap based on the minimum processing width that can be handled by the processing device, the elastic body And the strain-generating body 3 is designed. The processing equipment includes wire cut processing (electrical discharge processing), laser processing, and the like.

The force to be applied is not limited to the rated value, and may be any value as long as it does not exceed the maximum force applied during normal operation of the device in which the multiaxial sensor 10 is mounted. In the following, the rating shall be interpreted in the same way.
A specific design is as follows.
First, a material is selected based on the magnitude of the force, etc. (step S102). For example, aluminum alloy, carbon steel, alloy steel, or stainless steel.

Next, the dimensions of the elastic beam and the strain body 3 are calculated based on the Young's modulus of the material. Specifically, some parameters are provisionally set, and specific dimensions are adjusted and determined. For example, the length, thickness and number of elastic beams are tentatively set according to the required external dimensions (step S103). A first gap SP1 of the relative displacement amount between the first region portion 1 and the second region portion 2 determined by the force in each direction based on the specifications and the gap based on the minimum processing width that can be handled by the processing device is tentatively Set (step S104).

Here, when the width of the beam is b and the thickness of the beam is h, the moment of inertia of area is expressed by the following equation.
I=b·(ĥ3)/12
Further, when the force based on the specification is F, the length of the beam is L, the number of beams (effective number of beams) is n, and the Young's modulus of the beam material is E, the first gap SP1 is obtained by the following equation It is found like

SP1=((F/n)*(L^3))/3*E*I
The width of the elastic beam is calculated from the provisionally set first gap SP1 (step S105). Here, the first gap SP1 has a dimension equal to or greater than the minimum machining width that can be handled by the machining apparatus. For example, the width of SP1 is desirably in the range of 10 μm to 200 μm, particularly desirably 50 μm to 100 μm.

The amount of deformation of the strain-generating body 3 is calculated from the first gap SP1, and the dimensions (length, width and thickness) of the strain-generating body 3 are calculated until the predetermined force detection sensitivity is obtained, and provisionally set. (step S106, step S107).
Here, the relationship between the first gap SP1 and the strain ε of the strain-generating body 3 is represented by the following equation.

ε=(3/2)·(hs/Lŝ2)·(SP1·α)
(SP1·α)=(Fs−Lŝ3)/3·Es·Is
where α is the coefficient depending on the mounting position of the strain-generating body 3, Fs is the force applied to the strain-generating body 3, Ls is the length of the strain-generating body 3, Es is the Young's modulus of the material of the strain-generating body 3, and Is is the The second moment of area of the strain body 3, hs is the width of the strain body 3, and bs is the thickness of the strain body 3. Note that hs and bs are reversed depending on the direction of the force.

A section modulus or section moment of inertia is calculated from the determined dimension values of each part of the strain generating body 3, and stress calculation is performed. It is determined whether the calculated stress has a sufficient safety factor with respect to the yield strength or fatigue limit of the selected material (step S108). If it is determined that sufficient strength cannot be obtained, such as when the safety factor is less than 1, the material is reviewed (No in step S108), the temporarily set parameters are adjusted, and the dimensions of each part are determined.

For example, intensity is determined as follows.
The stress σ is expressed as follows.
σ=(6·(F/n)·L)/(b·h^2)
If the stress σ is smaller than the fatigue limit σw of the material or smaller than the proof stress σy of the material, it is determined that the strength is sufficient.
Such a design may be derived by calculation using the formulas described above, may be derived by structural analysis using computer simulation, may be derived by using an elastic body manufactured for trial production, or may be derived by other methods. method can be used.

The beam dimension of the elastic body, the dimension of the strain generating body 3, and the forces and moments (Fx, Fy, Fz, Mx, My, Mz) in each direction based on the specifications determined as described above, the second gap SP2, the third gap SP3 of the Z-axis direction stopper portion 4, and the fourth gap SP4 of the Z-axis direction stopper portion 4 are calculated (Yes in step S108, step S109).

First, the second gap SP2 is the sum (δFx+δMz) of the displacement amount δFx based on the translational force Fx in the X-axis direction and the displacement amount δMz based on the moment Mz about the Z-axis, or the translational force Fy in the Y-axis direction. and the displacement δMz based on the moment Mz about the Z-axis (δFy+δMz). That is, it is determined by the following equation.

SP2=δFx+δMz=δFy+δMz
Next, the third gap SP3 and the fourth gap SP4 of the Z-axis direction stopper portion 4 have a displacement amount δMx based on the moment Mx about the X-axis, a displacement amount δMy based on the moment My about the Y-axis, and translation in the Z-axis direction. It is determined by the following equation based on the displacement amount δFz based on the force Fz.

SP3=SP4=.delta.Mx.sin .theta.+.delta.My.cos .theta.+.delta.Fz
Here, θ is the angle from the X-axis to the arrangement position of the Z-axis direction stopper portion 4 .
Note that the above-described design method is an example, and is not limited to this.
If there is no problem with the design, the elastic body is cut out from the material using the processing device described above. Thus, an elastic body is manufactured (step S110).

Based on the third gap SP3 and the fourth gap SP4, the Z-axis direction stopper portion 4 is designed and manufactured (step S111).
After manufacturing the elastic body and the Z-axis direction stopper part 4, the Z-axis direction stopper part 4 is attached to the elastic body (step S112). Thus, the multi-axis sensor 10 is manufactured.

Note that the shape of the multiaxial sensor 10 may be appropriately changed according to various purposes, such as weight reduction or increased sensor sensitivity.
According to this embodiment, the gaps SP1 and SP2 between the first region portion 1 (movable portion) and the second region portion 2 (fixed portion) and the stopper structure portion SP composed of the Z-axis direction stopper portion 4 are By providing them, it is possible to independently and separately set the operating points of the stopper for each of the translational forces Fx and Fy in the XY plane direction, the Z-axis moment Mz, and the forces Fz, Mx and My acting in the Z-axis direction.

Specifically, by making the width of the gaps SP1 and SP2 between the first region portion 1 and the second region portion 2 smaller than the amount of displacement of the elastic body due to the overload, the translational forces Fx and Fy in the XY plane direction and a stopper can be set for the Z-axis moment Mz. Further, by setting the width of the two gaps SP3 and SP4 of the Z-axis direction stopper portion 4 to be smaller than the amount of displacement of the elastic body due to overload, the stoppers for the forces Fz, Mx, and My acting in the Z-axis direction can be set. can be done.

Further, the surfaces where the first region portion 1 and the second region portion 2 face each other are flat surfaces. Therefore, the elastic body including the first region portion 1 and the second region portion 2 can have a shape that can be wire-cut. Here, the shape that can be processed by wire cutting means a shape that can be formed by cutting the outer shape with a straight line (wire). is.

Further, the surfaces (that is, the wire cut surface) where the first region portion 1 and the second region portion 2 face each other are parallel to the Z axis (perpendicular to the XY plane). Therefore, by stacking a plurality of elastic bodies in the vertical direction (Z-axis direction), it is possible to wire-cut a plurality of elastic bodies at once.

For example, if the wire-cut surfaces of the elastic bodies are inclined with respect to the Z-axis, even if a plurality of elastic bodies are stacked, the wire-cut surfaces of the respective elastic bodies will not line up in a single plane. Therefore, it is not possible to wire-cut a plurality of elastic bodies with such a shape at once. On the other hand, in the present embodiment, when a plurality of elastic bodies are stacked, the wire-cut surfaces of the respective elastic bodies are arranged in a single plane. can be done.

Note that the Z-axis direction stopper portion 4 may be configured in any way as long as it functions as a stopper against at least the translational force Fz in the Z-axis direction. Even in such a case, effects other than those of the Z-axis direction stopper portion 4 can be similarly obtained.

(Second embodiment)
FIG. 6 is a top view showing the configuration of a multiaxial sensor 10A according to the second embodiment of the invention. FIG. 7 is a cross-sectional view of the Z-axis direction stopper portion 4 of FIG. 6 according to the present embodiment cut along line BB' (radial direction).
A multiaxial sensor 10A is the multiaxial sensor 10 according to the first embodiment shown in FIG. It replaces the second structural portion 21A. Other points are the same as those of the multi-axis sensor 10 according to the first embodiment.

The Z-axis direction stopper portion 4A integrates the first stopper member 41, the second stopper member 42, the first adjustment member 43, and the second adjustment member 44 of the Z-axis direction stopper portion 4 in the first embodiment. , so that it can be attached to the second structural portion 21A without using the bolts 45 and nuts 46. As shown in FIG. Other points are the same as those of the Z-axis direction stopper portion 4 according to the first embodiment.

The Z-axis direction stopper portion 4A has a gap forming portion 411 and an insertion portion 412 .
The gap forming portion 411 has a concave shape that covers the upper and lower surfaces of the first structural portion 11 and the second structural portion 21A. In a state where the Z-axis direction stopper portion 4A is attached to the multiaxial sensor 10A, the gap forming portion 411 is arranged so as to sandwich the first structural portion 11 from above and below. A third gap SP3 is formed between the upper surface of the first structural portion 11 and the upper portion of the gap forming portion 411 . A fourth gap SP4 is formed between the lower surface of the first structural portion 11 and the lower portion of the gap forming portion 411 .

The insertion portion 412 is a recessed portion provided at the back of the recess of the gap forming portion 411 . The vertical width of the concave shape of the insertion portion 412 is substantially the same (slightly longer) than the thickness of the second structural portion 21A. When the Z-axis direction stopper portion 4A is attached to the multiaxial sensor 10A, the outer peripheral portion of the second structural portion 21A is embedded in the insertion portion 412. As shown in FIG. By press-fitting the outer peripheral portion of the second structural portion 21A into the insertion portion 412 of the Z-axis direction stopper portion 4A, the Z-axis direction stopper portion 4A is fixed and attached to the multi-axis sensor 10A.

The second structural portion 21A has a shape in which the outer peripheral portion to which the Z-axis direction stopper portion 4A is attached is cut into a concave shape HL when viewed from above in the second structural portion 21 according to the first embodiment. By providing the concave shape HL, the outer edge of the Z-axis direction stopper portion 4A matches the outer edge of the multiaxial sensor 10A. The recess shape HL may be formed so that the outer edge of the Z-axis direction stopper portion 4A is located inside the outer edge of the multiaxial sensor 10A. Further, the concave shape HL may be a shape that functions as a guide when inserting the outer peripheral portion of the second structural portion 21A into the insertion portion 412 .

The second structural portion 21A may have the same shape as the second structural portion 21 according to the first embodiment without providing the concave shape HL.
According to this embodiment, in addition to the effects of the first embodiment, the following effects can be obtained.
By applying the Z-axis direction stopper portion 4A, it is possible to reduce the number of parts compared to the Z-axis direction stopper portion 4 according to the first embodiment.

Further, by providing the second structural portion 21A with the concave shape HL, even if the Z-axis direction stopper portion 4A is attached to the multiaxial sensor 10A, the radial size (top surface area) of the multiaxial sensor 10A is increased. can be avoided. Further, the concave shape HL is shaped so as to serve as a guide when the outer peripheral portion of the second structural portion 21A is inserted into the insertion portion 412, thereby facilitating attachment of the Z-axis direction stopper portion 4A to the multiaxial sensor 10A. be able to.

In addition, the present invention is not limited to the above-described embodiments, and components may be deleted, added, or changed. Also, a new embodiment may be created by combining or exchanging constituent elements of a plurality of embodiments. Even if such an embodiment is directly different from the above-described embodiments, those having the same meaning as the present invention have been described as embodiments of the present invention, and the description thereof has been omitted.

DESCRIPTION OF SYMBOLS 1... 1st area|region part 2... 2nd area|region part 3... Strain element 4... Z-axis direction stopper part 10... Multiaxial sensor 11... First structural part 21... Second structural part H1, H2, H3: Mounting holes, SP: Stopper structure.

Claims (6)

a flat plate-shaped first region located in the central portion;
a second region portion forming an elastic body integrally with the first region portion and positioned on the outer peripheral side of at least a part of the first region portion;
multiaxial force detection means for detecting forces in multiaxial directions based on the amount of relative displacement between the first area portion and the second area portion;
a first stopper means that contacts a gap between the first area portion and the second area portion and functions as a stopper against a force in a direction parallel to the plane of the flat plate;
A second region including a stopper portion disposed so as to sandwich a portion of each of the first region portion and the second region portion between the upper surface and the lower surface, and functioning as a stopper against force in a direction perpendicular to the plane of the flat plate shape. and stopper means. 2. The apparatus according to claim 1 , wherein said second stopper means comprises adjusting means for adjusting the width of a gap between said stopper portion and said first region portion or said second region portion. Multi-axis sensor. 2. The multiaxial sensor according to claim 1 , wherein said second stopper means is fixed to said elastic body with a bolt. 2. The multiaxial sensor according to claim 1 , wherein the second stopper means is inserted from the outer peripheral side of the elastic body so as to sandwich the elastic body and is fixed. 5. The multiaxial sensor according to claim 4 , wherein the elastic body has a recess for mounting the second stopper means on its outer periphery. 5. The multiaxial sensor according to claim 4 , wherein said elastic body includes a shape that serves as a guide for attaching said second stopper means.

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