JP7288667B2 - Deformation analysis method and deformation analysis device - Google Patents

Description

TECHNICAL FIELD The present invention relates to a deformation analysis method and a deformation analysis apparatus for analyzing the deformation state of an object to be measured, and in particular, to analyze the three-dimensional deformation state by measuring the distance by laser interference in a three-dimensional space (X, Y, Z). It relates to a deformation analysis method and a deformation analysis device.

2. Description of the Related Art Conventionally, a three-dimensional deformation analysis device is known that analyzes the deformation state of a measurement object using three-dimensional shape information obtained by a laser three-dimensional measurement device (see Patent Documents 1 and 2, for example).

The inventors of the present invention detect the interference light of an optical comb between the reference light irradiated on the reference surface and the measurement light irradiated on the measurement surface with a reference photodetector, and detect the reference light reflected by the reference surface and The interference light of the optical comb with the measurement light reflected by the measurement surface is detected by a measurement photodetector, and from the time difference between the two interference signals obtained by the reference photodetector and the measurement photodetector, the reference surface By obtaining the difference between the distance to and the distance to the measurement surface, we have previously proposed a rangefinder, a distance measuring method, and an optical three-dimensional shape measuring machine that can be performed with high accuracy and in a short time. (For example, see Patent Document 3.)

JP-A-2010-66169 JP 2018-96707 A Japanese Patent No. 5231883

In measuring the axial force of the bolt fastened to the object to be fastened, the depth image of the bolt head before fastening is used to calculate the amount of recession (depression amount) of the bolt head after fastening. The head displacement amount is calculated by calculating the depression amount (depression amount) of the bolt head using the distance image and calculating the difference between the calculated depression amounts before and after fastening.

In this way, when obtaining the displacement amount of the head using the distance image of the head after tightening the bolt, since the head rotates by tightening the bolt, the distance image of the head before tightening and the head after tightening The direction of the head is different from the distance image of , and an error occurs in the calculated amount of displacement of the head.

In the technology disclosed in Patent Document 2, by rotating an imaging device for obtaining a distance image of the head so as to correspond to the rotation angle of the head before and after fastening, the head in the distance image of the head before and after fastening is obtained. By making the postures the same, errors are reduced.

The posture of the object to be measured may change before and after the force is applied, such as the posture change due to the rotation of the head before and after tightening bolts. In order to detect deformation due to force, it is necessary to accurately recognize the shape of the object and obtain the relative height change between the same reference portion and the point of interest.

When analyzing a three-dimensional deformation state using a three-dimensional measuring device, the measurement light that irradiates the measurement object is scanned in two-dimensional (X, Y) directions, and the reflected light of the measurement light from the measurement object is detected. The distance image obtained by this process contains errors caused by the inclination of the optical axis of the measuring light and scanning errors caused by the scanning means. Even if a measuring instrument with high measurement accuracy is used, the coordinate error in the two-dimensional (X, Y) plane increases depending on the height due to changes in the posture of the object to be measured. make the detection of In this situation, even if distance measurement is performed by optical comb interference, which can be performed with high accuracy and in a short time, the accuracy of deformation analysis is limited by coordinate errors in the two-dimensional (X, Y) plane. The measurement accuracy is not due to optical comb interference.

To avoid these problems, the distance between the image sensor and the object to be measured is finely adjusted so that the height of the reference part and the point of interest are approximately the same, and the measurement is performed within the two-dimensional (X, Y) plane. It is necessary to adjust the relative angle between the imaging element and the measurement object so that the angle of the object is the same before and after the force is applied, so that the height of the point of interest can be measured under the same conditions.

Therefore, in view of the conventional circumstances as described above, an object of the present invention is to solve the problem of optical comb interference in a three-dimensional space (X, Y, Z) without being restricted by coordinate errors in a two-dimensional (X, Y) plane. To provide a deformation analysis method and a deformation analysis device capable of measuring a distance with a measurement accuracy of 20 mm, obtaining a range image of an object to be measured before and after deformation, and accurately analyzing a three-dimensional deformation state.

Other objects of the present invention and specific advantages obtained by the present invention will become clearer from the description of the embodiments described below.

The present invention scans the surface of the object to be measured in the two-dimensional (X, Y) direction with a laser beam that irradiates the object to be measured as measurement light in a three-dimensional (X, Y, Z) space, thereby performing the above measurement. Irradiation of the measurement light before and after deformation of the measurement object is obtained from an interference signal obtained by detecting interference light between the reflected light of the measurement light irradiated to the object and reflected by the measurement object and the reference light. A deformation analysis method for generating distance information (z _s ) to a position (x _s , y _s , z _s ) and analyzing the deformation state of the object to be measured, wherein the surface of the object to be measured is scanned. As a three-dimensional distribution of the correction amount in the three-dimensional (X, Y, Z) space of the irradiation position (x _S , y _S , z _S ) of the measurement light scanned in the two-dimensional (X, Y) direction by The calibration data (Δx _C , Δy _C , Δz _C ) are held, and the interference signal obtained by scanning the surface of the measurement object in two-dimensional (X, Y) directions with the measurement light is used to obtain the three-dimensional Distance information (z _S ) to the irradiation position (x _S , y _S , z _S ) of the measurement light in the original (X, Y, Z) space is calculated, and the calibration data (Δx _C , Δy _C , Δz _C ) to generate calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) before and after deformation of the measurement object, and the calibration of the measurement object before deformation distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) and the calibrated distance image information of the measurement object after deformation (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) is used to analyze the deformation state of the object to be measured.

In the deformation analysis method according to the present invention, the measurement light is applied to a calibration jig that provides pre-calibrated coordinate position (x ₀ , y ₀ , z ₀ ) information in a three-dimensional (X, Y, Z) space. _From the obtained interference signal, _calibration data (Δx _C , _{Δy C} , Δz _C ) can be generated as a three-dimensional distribution of the correction amount and stored in the calibration data storage means.

Further, in the deformation analysis method according to the present invention, the measurement object is a member deformed by heating , and the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) and using the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) obtained after heating, the state of thermal deformation of the measurement object is calculated. can be analyzed.

Further, in the deformation analysis method according to the present invention, the object to be measured is a beam member deformed by a load, and the calibrated distance image information (x _S +Δx _C , y S +Δy C , y _S +Δy _C , z _S +Δz _C ) _(Before) and the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) obtained after application of the load, the load of the beam member It is possible to analyze the deformation state due to

Further, in the deformation analysis method according to the present invention, the measurement object is a headed shaft, and the calibrated distance image information (x _S +Δx _C , y _S + Δy _C , z _S + Δz _C ) _(Before) and the calibrated distance image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After) obtained after applying the axial force Then, the deformation state of the head due to the axial force of the headed shaft can be analyzed.

にて示される差分Δｚを上記軸力印加前後の上記頭付き軸体の頭部の変形量とするものとすることができる。 Further, in the deformation analysis method according to the present invention, the calibrated distance image information (x _S +Δx _C , y _S + Δy _C , z _S + Δz _C ) _(Before) and the calibrated range image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After) obtained after application of the axial force, the head A reference point is set at the edge of the head, and the average value of distance information of pixels within a predetermined range around the reference point is used as a reference plane, and the depth from the reference plane to the deepest point of the head Δz _{( Before) After)} respectively, the following formula

The difference .DELTA.z indicated by is the deformation amount of the head portion of the headed shaft before and after the application of the axial force.

にて示される差分Δｚを上記軸力印加前後の上記頭付き軸体の頭部の変形量とするものとすることができる。 Furthermore, in the deformation analysis method according to the present invention, the calibrated distance image information (x _S +Δx _C , y _S + Δy _C , z _S + Δz _C ) _(Before) and the calibrated distance image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After) obtained after application of the axial force. Depths Δz _(Before) and Δz _(After) from the reference plane to the deepest point of the head, using the average value of the distance information of each pixel on the circumference of a predetermined radius from the center of gravity as a reference plane. respectively, and the following formula

The difference .DELTA.z indicated by is the deformation amount of the head portion of the headed shaft before and after the application of the axial force.

Further, the present invention is a deformation analysis apparatus, and includes a measurement light generating means for emitting a laser beam as a measurement light for irradiating an object to be measured in a three-dimensional (X, Y, Z) space; scanning means for scanning the surface of an object to be measured in two-dimensional (X, Y) directions; and irradiation positions (x _S , y _S , z _S ) of the measurement light that scans the surface of the object to be measured by the scanning means calibration data holding means for holding calibration data (Δx _C , Δy _C , Δz _C ) as a three-dimensional distribution of correction amounts in the three-dimensional (X, Y, Z) space; interference light detection means for generating an interference signal by a photodetector in which the reflected light of the measurement light reflected by the measurement object and the reference light enter as interference light via an interference optical system; and the interference light detection. Distance information (z _s ) from the interference signal obtained by means to the irradiation position (x _s , y _s , z _s ) of the measurement object irradiated with the measurement light is calculated and given by the calibration data holding means Arithmetic processing means for generating calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) by adding the calibration data (Δx _C , Δy _C , Δz _C ) obtained from the , the measurement object before deformation generated by the arithmetic processing means from distance information (z S ) to the irradiation position (x _S , y _S , z _S ) of the measurement object before and after deformation of the measurement object _; The calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) and the calibrated distance image information (x _S +Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After) is used to analyze the deformation state of the object to be measured.

In the deformation analysis apparatus according to the present invention, the scanning means relatively moves the measurement object and the optical axis of the measurement light, and scans the surface of the measurement object with the measurement light. be able to.

Further, in the deformation analysis apparatus according to the present invention, the scanning means may be composed of a two-dimensional movable mirror mechanism for moving the optical axis by changing the angle of reflection of the measurement light.

Further, in the deformation analysis apparatus according to the present invention, the scanning means includes a one-dimensional movable mirror mechanism for moving the optical axis by changing the angle of reflection of the measurement light, and the one-dimensional movable mirror mechanism. It may comprise a one-dimensional feed mechanism for relatively moving the measurement object and the optical axis of the measurement light in a direction perpendicular to the moving direction of the optical axis.

Further, in the deformation analysis apparatus according to the present invention, the scanning means may be composed of a two-dimensional feed mechanism for moving the measurement object or the optical axis of the measurement light in two-dimensional directions.

Further, in the deformation analysis apparatus according to the present invention, the scanning means may irradiate the measurement object with the laser beam emitted from the measurement light generation means as measurement light through a telecentric optical system. .

Further, in the deformation analysis apparatus according to the present invention, the calibration data holding means may be provided with coordinate position (x ₀ , y ₀ , z ₀ ) information calibrated in advance in a three-dimensional (X, Y, Z) space. From the interference signal obtained by irradiating the jig with the measurement light, the irradiation position (x _S , y _S , z _S ) as a three-dimensional distribution of correction amounts (Δx _C , Δy _C , Δz _C ) can be generated and held.

Further, in the deformation analysis apparatus according to the present invention, the object to be measured is a member deformed by heating, and the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) and the calibrated distance image information obtained after heating (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) , the measurement object It is possible to analyze the state of thermal deformation of

Further, in the deformation analysis apparatus according to the present invention, the object to be measured is a beam member deformed by a load, and the calibrated distance image information (x _S +Δx _C , y _S + Δy _C , z _S + Δz _C ) _(Before) and the calibrated distance image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After) obtained after application of the load , the deformation state due to the load of the beam member can be analyzed.

Further, in the deformation analysis apparatus according to the present invention, the object to be measured is a headed shaft, and the arithmetic processing means calculates the calibrated distance of the head of the headed shaft before applying the axial force. Image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(Before) and the calibrated range image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) obtained after axial force application ) _(After) can be used to analyze the deformation state of the head due to the axial force of the headed shaft.

にて示される差分Δｚを上記軸力印加前後の上記頭付き軸体の頭部の変形量とするものとすることができる。 In the deformation analysis apparatus according to the present invention, the arithmetic processing means may include the calibrated distance image information ( x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) and the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) ₍ After) obtained after application of the axial force ₎ , the depth Δz _(Before) and Δz _(After) are obtained respectively, and the following equation

The difference .DELTA.z indicated by is the deformation amount of the head portion of the headed shaft before and after the application of the axial force.

にて示される差分Δｚを上記軸力印加前後の上記頭付き軸体の頭部の変形量とするものとすることができる。
In the deformation analysis apparatus according to the present invention, the arithmetic processing means may include the calibrated distance image information ( x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) and the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) ₍ After) obtained after application of the axial force ₎ , the center of gravity of the head is obtained, and the average value of the distance information of each pixel on the circumference of a predetermined radius from the center of gravity is used as a reference plane, and the depth Δz _(Before) , Δz _(After) , respectively, and the following equation

The difference .DELTA.z indicated by is the deformation amount of the head portion of the headed shaft before and after the application of the axial force.

Further, in the deformation analysis apparatus according to the present invention, the first and second light sources emit coherent reference light and measurement light whose intensity or phase is periodically modulated and whose modulation periods are different from each other, and a predetermined optical path. a reference photodetector for detecting interference light between the reference light passing through the reference optical path having a predetermined optical path length and the measurement light irradiated onto the surface of the object to be measured; The scanning means scans the surface of the measurement object with the measurement light emitted from the laser rangefinder, which includes a measurement light detector that detects interference light between the measurement light reflected by the surface of the measurement object and the reflected light. The surface to be measured is scanned in two-dimensional (X, Y) directions, and the arithmetic processing means calculates the speed of light from the time difference between the interference signal detected by the reference photodetector and the interference signal detected by the measurement photodetector. and the difference between the distance to the reference surface and the distance to the measurement surface from the refractive index at the measurement wavelength, and the deformation state of the measurement object can be analyzed.

Further, the laser rangefinder may be an optical comb rangefinder including an optical comb generator that emits the reference light and an optical comb generator that emits the measurement light.

In the present invention, the surface of the object to be measured is scanned in the two-dimensional (X, Y) direction with a laser beam that irradiates the object to be measured as measurement light in a three-dimensional (X, Y, Z) space, and the above measurement is performed. Irradiation of the measurement light before and after deformation of the measurement object is obtained from an interference signal obtained by detecting interference light between the reflected light of the measurement light irradiated to the object and reflected by the measurement object and the reference light. In order to generate the distance information (z _S ) to the position (x _S , y _S , z _S ) and analyze the deformation state of the measurement object, the surface of the measurement object is scanned two-dimensionally (X, Hold calibration data (Δx C , Δy _C , Δz _C ) in the three-dimensional (X, Y, Z) space of the irradiation position (x _S , y _S , z _S ) of the _measurement light scanned in the Y) direction and calibrated by the calibration data (Δx _C , Δy _C , Δz _C ) from the interference signal obtained by scanning the surface of the measurement object in two-dimensional (X, Y) directions with the measurement light. distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) is generated. Deformation analysis can be performed with high accuracy using the distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) from which coordinate errors in the two-dimensional (X, Y) plane are removed.

Further, by generating calibrated range image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) from the interference signal obtained by the optical comb rangefinder, the three-dimensional space (X, Y, Z ), the distance can be measured with the measurement accuracy by optical comb interference, and the deformation analysis can be performed with high accuracy.

Therefore, according to the present invention, distance measurement is performed with measurement accuracy by optical comb interference in the three-dimensional space (X, Y, Z) without being restricted by coordinate errors in the two-dimensional (X, Y) plane, It is possible to provide a deformation analysis method and a deformation analysis apparatus capable of obtaining range images of an object to be measured before and after deformation and accurately analyzing a three-dimensional deformation state.

1 is a schematic diagram showing a basic configuration of a deformation analysis device to which the present invention is applied; FIG. It is a schematic diagram which shows the basic composition of the laser range finder with which the said deformation|transformation analysis apparatus was equipped. It is a model perspective view which shows typically the structure of the laser scanner with which the said deformation|transformation analysis apparatus was equipped. It is a schematic perspective view which shows the modification of the said laser scanner typically. FIG. 2 is a diagram schematically showing the structure of a calibration jig used for obtaining calibration data in the deformation analysis apparatus, where (A) is a front view of the calibration jig and (B) is a plane of the calibration jig; It is a diagram. FIG. 4 is a diagram for explaining coordinate positions (x, y, z) in a three-dimensional (X, Y, Z) space given by the calibration sphere in the calibration jig, and (A) is a front view of the calibration sphere; , (B) is a plan view of the calibration sphere. FIG. 4 is a front view of a calibration sphere for explaining calibration using a least-square sphere applied to the calibration sphere in the calibration jig; FIG. 2 is a diagram schematically showing the structure of a calibration plate used as a calibration jig for calibrating a one-dimensional movable mirror mechanism, where (A) is a plan view of the calibration plate, (B) is a front view of the calibration plate, and (C) ) is a side view of the calibration plate. FIG. 3 is a schematic diagram showing the shape of the slit of the calibration plate observed by the laser rangefinder provided in the deformation analysis device, (A) shows the slit shape of the distance image at the focal position, and (B) shows the height position. FIG. 10(z) shows the slit shape of the distance image, and (C) is a schematic diagram showing the slit shapes of the two distance images superimposed. FIG. 4 is a diagram for explaining a process of acquiring calibration data by irradiating the calibration plate with measurement light, and FIG. (B) is a side view of the head portion of the laser rangefinder. 4 is a flow chart showing a procedure of acquisition processing of calibration data by the calibration plate. 4 is a flow chart showing a procedure of a deformation analysis method according to the present invention implemented by the deformation analysis device; FIG. 4 is a schematic diagram for explaining an example of performing deformation analysis using a member that deforms due to heating as a measurement object, and is a schematic diagram for explaining a case where deformation analysis is performed by the deformation analysis apparatus, and (A) is a measurement before deformation. It is a front view of an object, and (B) is a front view of the measurement object after deformation. FIG. 4 is a schematic diagram for explaining an example of performing deformation analysis using a member deformed by a load as a measurement object, and is a schematic diagram for explaining a case where deformation analysis is performed by the deformation analysis apparatus, and (A) is a measurement before deformation. It is a front view of an object, and (B) is a front view of the measurement object after deformation. FIG. 4 is a schematic diagram for explaining an example of performing deformation analysis using a shaft with a head that deforms due to an axial force as a measurement object, (A) is a front view of the shaft head before deformation, and (B) is a deformation. Fig. 10 is a front view of the rear shaft head; FIG. 4 is a schematic diagram for explaining an example of performing deformation analysis of a headed shaft by setting reference points, (A) schematically showing the state of the headed shaft before deformation, and (B). is a front view of a shaft with a head. FIG. 4A is a schematic diagram for explaining an example of performing deformation analysis of a headed shaft with an xy plane including a reference point as a reference plane, and FIG. , (B) is a front view of the headed shaft body after deformation. FIG. 4 is a schematic diagram for explaining an example of performing deformation analysis of a headed shaft with an xy plane including a circumference of a predetermined radius from the center of gravity as a reference plane, and (A) schematically shows the state of the headed shaft before deformation; FIG. 2B is a front view of the headed shaft before deformation; FIG. FIG. 4 is a schematic diagram for explaining an example of performing deformation analysis of a headed shaft with an xy plane including a circumference of a predetermined radius from the center of gravity as a reference plane, and FIG. 3B is a front view of the headed shaft body after deformation. FIG. FIG. 4 is a schematic diagram for explaining an example of performing a deformation analysis for analyzing the deformation of the head of a bolt having a hexagonal head due to an axial force when the bolt is tightened; (A) schematically shows the state of the bolt before deformation; FIG. 4B is a front view of the bolt before deformation. FIG. 4 is a schematic diagram for explaining an example of performing a deformation analysis for analyzing the deformation of the head portion due to the axial force when the bolt having a hexagonal head portion is tightened; (A) schematically shows the state of the bolt after deformation; FIG. 4B is a front view of the bolt after deformation. FIG. 4 is a schematic diagram showing a specific configuration example of an optical comb rangefinder provided as a laser rangefinder in the deformation analysis device; It is a schematic diagram which shows the other structural example of the optical comb range finder with which the said deformation|transformation analysis apparatus is equipped.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that common constituent elements will be described by attaching common reference numerals in the drawings. Further, the present invention is not limited to the following examples, and can be arbitrarily modified without departing from the gist of the present invention.

The present invention is applied to a deformation analysis apparatus 100 configured as shown in FIG. 1, for example.

This deformation analysis apparatus 100 analyzes the shape change of the measurement object 1 by three-dimensional distance measurement by interference of laser beams in a three-dimensional (X, Y, Z) space. A scanning unit that scans the surface 1a of the measurement object 1 in two-dimensional (X, Y) directions with a laser rangefinder 20 provided above the measurement table 10, and a measurement light Ls emitted from the laser rangefinder 20. 30, an arithmetic processing unit 40 to which the interference signal S _M of the laser light obtained by the interference light detector 25 of the laser rangefinder 20 is supplied.

FIG. 2 is a schematic diagram showing the basic configuration of the laser rangefinder 20 provided in this deformation analysis device 100. As shown in FIG.

The laser rangefinder 20 includes a measurement light generator 21 that generates and emits a laser beam as measurement light Ls to irradiate the measurement object 1, and a measurement light generator 21 that irradiates the surface 1a of the measurement object 1 with the measurement light Ls that irradiates the measurement object 1. An interference light detector 25 is provided for detecting the interference light of the reflected light Ls' reflected by the surface 1a of 1 and generating the interference signal _SM of the laser light.

The interference light detection unit 25 includes a beam splitter 22 on which the laser light emitted from the measurement light generator 21 is incident, a reference plane 23 on which the laser light reflected by the beam splitter 22 is incident as the reference light L _ref , The reference light L _ref incident on the reference surface 23 and the reflected light L _ref ′ reflected by the reference surface 23 are transmitted through the beam splitter 22 and incident, and the laser beam transmitted through the beam splitter 22 is used as the measurement light Ls. An interference light detector 24 is provided when the reflected light Ls' irradiated to the surface 1a of the measurement object 1 and reflected by the surface 1a of the measurement object 1 is reflected by the beam splitter 22 and enters.

The interference light detector 24 detects interference light between the reflected light L _ref ' from the reference surface 23 and the reflected light Ls' from the surface 1a of the measurement object 1 input via the beam splitter 22, and outputs an interference signal _SM . Generate.

The interference signal S _M generated by the interference light detector 24 is emitted from the measurement light generator 21 and is incident on the interference light detector 24 as reflected light L _ref ' and reflected light Ls'. It includes phase information indicating the time difference corresponding to the difference in the optical path length of each optical path that passes through.

In the laser rangefinder 20, the arithmetic processing unit 41 of the arithmetic processing unit 40, as will be described later, uses the phase information indicating the time difference contained in the interference signal _SM to determine the difference in the optical path length from the surface 1a of the measurement object 1. You can find the distance to That is, the distance to the surface 1a of the measurement object 1 given as the difference in optical path length can be calculated by multiplying the time difference by the speed of light C in vacuum and dividing by the refractive index ng.

FIG. 3 is a perspective view schematically showing the configuration of a laser scanner 30A provided as the scanning unit 30 of this deformation analysis apparatus 100. As shown in FIG.

The laser scanner 30A comprises a two-axis galvanomirror mechanism 33 comprising two motors 31X and 31Y and two mirrors 32X and 32Y, and a telecentric f-.theta.

The measurement light Ls emitted from the laser rangefinder 20 is reflected by the first mirror 32X, enters the second mirror 32Y, is reflected by the second mirror 32Y, and is measured through the telecentric f-θ lens 35. The surface 1a of the object 1 is irradiated.

The first mirror 32X is driven by the motor 31X to change the angle of reflection of the measurement light Ls, thereby moving the optical axis of the measurement light Ls in the X-axis direction of the three-dimensional (X, Y, Z) space. Let In addition, the second mirror 32Y is driven by the motor 31Y to change the angle of reflection of the measurement light Ls, thereby reflecting the optical axis of the measurement light Ls in the Y-axis direction of the three-dimensional space (X, Y, Z). to move.

That is, the measurement light Ls emitted from the laser rangefinder 20 is moved in two-dimensional (X, Y) directions by a two-dimensional galvanomirror mechanism 33 whose optical axis is a two-dimensional movable mirror mechanism. Through the θ lens 35, the surface 1a of the measurement object 1 is irradiated from the Z-axis direction.

The surface 1a of the measurement object 1 is scanned in two-dimensional (X, Y) directions by the measurement light Ls irradiated from the Z-axis direction via the telecentric f-θ lens 35 .

That is, the laser scanner 30A irradiates the measurement object 1 with laser light as the measurement light Ls in a three-dimensional (X, Y, Z) space, and scans the surface 1a of the measurement object 1 with the measurement light Ls, that is, the laser light. It functions as a scanning means for scanning.

The measurement light Ls irradiated onto the surface 1a of the measurement object 1 from the Z-axis direction through the telecentric f-θ lens 35 is reflected by the surface 1a of the measurement object 1, and the reflected light Ls′ is emitted by the laser scanner 30A. returned to

The two mirrors 32X and 32Y in the two-axis galvanomirror mechanism 33 can be replaced with polygon mirrors. Also, the telecentric f-.theta. lens 35 can be replaced with a telecentric optical system having optical characteristics equivalent to those of the telecentric f-.theta. lens.

In this deformation analysis apparatus 100, the measurement light Ls is emitted from the laser rangefinder 20 through the scanning unit 30 toward the object 1 to be measured from the Z-axis direction, and is reflected by the surface 1a of the object 1 to be measured in the Z-axis direction. The reflected light Ls′ returns to the interference light detection section 25 of the laser rangefinder 20, and the distance to the surface 1a of the measurement object 1 is calculated in the arithmetic processing section 41 of the arithmetic processing device 40. FIG.

The scanning unit 30 of the deformation analysis apparatus 100 is an XY stage that mechanically moves a head unit that emits an optical laser beam as the measurement light Ls from the laser rangefinder 20 in two-dimensional (X, Y) directions. good too. Alternatively, an XY stage may be installed on the measurement table 10 to move the object 1 to be measured in two-dimensional (X, Y) directions. That is, the surface 1a of the measurement object 1 can be scanned with the measurement light Ls by relatively moving the measurement object 1 and the optical axis of the measurement light Ls by the XY stage.

Further, as shown in FIG. 4, a scanning unit 30B configured by combining a one-dimensional movable mirror mechanism 33X and a mechanical feed mechanism spreads the measurement light Ls applied to the surface 1a of the measurement object 1 two-dimensionally (X , Y) direction.

That is, the scanning unit 30B shown in FIG. 4 has a one-axis galvanomirror mechanism including a mirror 32X driven by a motor 31X, that is, a one-dimensional movable mirror mechanism 33X, and the one-dimensional movable mirror mechanism 33X. a telecentric f-θ lens (or a telecentric optical system having optical characteristics equivalent to those of the telecentric f-θ lens) 35′ for irradiating the surface 1a of the measurement object 1 from the Z-axis direction with the measurement light Ls moved in the axial direction; The one-dimensional mirror mechanism 33X includes a Y stage for relatively moving the measurement object 1 and the optical axis of the measurement light Ls in the direction of movement of the optical axis, that is, the Y-axis direction perpendicular to the X-axis direction. and a feed mechanism 36Y.

In the scanning unit 30B shown in FIG. 4, a Y stage is installed on the measuring table 10 as a one-dimensional feed mechanism 36Y.

In this deformation analysis apparatus 100, the measurement light Ls that scans the surface 1a of the measurement object 1 by the scanning unit 30 is reflected by the surface 1a of the measurement object 1, and the reflected light Ls' passes through the scanning unit 30. By being returned to the laser rangefinder 20, the interference light detector 25 of the laser rangefinder 20 detects the interference light between the reflected light L _ref ' by the reference surface 23 and the reflected light Ls' by the measurement object 1 and interferes. A signal _SM is generated, and the distance to the surface 1a of the measurement object 1 is calculated in the arithmetic processing unit 41 of the arithmetic processing unit 40 .

The arithmetic processing unit 40 in the deformation analysis apparatus 100 includes an arithmetic processing unit 41 for analyzing the deformation state of the measurement object 1 based on the interference signal _SM obtained by the interference light detection unit 25 of the laser rangefinder 20, a calibration It has functions such as a calibration data holding section 42 for giving data to the arithmetic processing section 41 and a control section 43 for controlling them. The control unit 43 also has a function of controlling the operation of the scanning unit 30 .

The arithmetic processing unit 40 controls the scanning unit 30 with the control unit 43 to scan the surface 1a of the measurement object 1 with the measurement light Ls in two-dimensional (X, Y) directions, and simultaneously scans the measurement object 1 with the laser rangefinder 20. The distance to the surface 1a of the object 1 is measured to acquire distance information, and the distance to the irradiation position of the measurement light Ls and the position is accumulated for a plurality of points in the arithmetic processing unit 41, thereby measuring the object to be measured in a non-contact manner. Distance image information indicating the three-dimensional shape of the object 1 is generated before and after the deformation of the measurement object 1, and the deformation state of the measurement object 1 is analyzed based on the distance image information before and after the deformation.

In this deformation analysis apparatus 100, the calibration data storage unit 42 stores calibration data (Δx, Δy, Δz) is retained.

5A is a plan view of the calibration jig 50, and FIG. 5B is a front view of the calibration jig 50. FIG.

The calibration jig 50 comprises a substrate 51 made of a material having a coefficient of thermal expansion required by JIS/ISO standards, a plurality of steel balls arrayed on the substrate 51, and multiple steel balls having their center coordinates calibrated. of calibration spheres 52.

The substrate 51 has a plurality of conical surfaces 53 formed at grid-like intersection positions, that is, two-dimensional (X, Y) coordinate positions. Hold the calibration sphere 52 at a position, ie, a two-dimensional (X, Y) coordinate position. A through hole may be provided in the central portion of the conical surface 53 , and a steel ball tapped from the bottom surface may be threaded through to draw the steel ball into the conical surface 53 and hold it.

As the calibration ball 52, a steel ball having a sufficiently high degree of sphericity compared to the accuracy of the measuring instrument with which sufficient accuracy can be obtained for determining the center coordinates during calibration is used.

As shown in FIGS. 6A and 6B, a front view and a plan view of the calibration sphere 52 in the calibration jig 50 are shown in FIG. In the xy plane at the height z, the radius s
s=√(r ² −z ² )
Since the surface of the calibration sphere 52 is located on the circumference of the A coordinate position (x, y, z) can be given.

In this deformation analysis apparatus 100, the scanning unit 30 irradiates the calibration jig 50 shown in FIG. With respect to the distance image obtained by measuring the three-dimensional shape of with the laser rangefinder 20, for example, the top of the calibration sphere 52 where the distance to the surface of the calibration jig 50 obtained from the measurement result by the laser rangefinder 20 is the shortest Determine _the coordinate position _{of p} (x _p +Δx _p , y _p +Δy _p , z _p +Δz _p ) and the error ( Δx _p , Δy _p , Δz _p ) are calculated, and the radius s in the xy plane at the height z from the center o
s=√(r ² −z ² )
Calculate the error (Δx _x , Δy _y , Δz _z ) for the coordinate position (x _S , y _S , z _S ) on the circumference of the and save it as calibration data (Δx _C , Δy _C , Δz _C ) can be done.

The coordinates of a plurality of points on the surface of each calibration sphere 52 of the calibration jig 50 are measured by a reference device such as a calibrated contact-type three-dimensional measuring instrument, and a least-squares sphere is applied to the measurement data to obtain the central coordinate o= Assume that the true values of (X ₀ , Y ₀ , Z ₀ ) and the radius r have been obtained.

Here, if the emission direction of the measurement light Ls emitted from the laser rangefinder 20 to the calibration jig 50 via the scanning unit 30 does not match the Z-axis direction, the laser rangefinder 20 detects the surface of the calibration sphere 52. Since the coordinate positions (x _S , y _S , z _S ) on the surface of the calibration sphere 52 at which measurement results with the same distance to the measurement light are obtained deviate from the circumference of the radius s in the xy plane, the amount of deviation can be determined from the amount of deviation of the measurement light Calibration data can be obtained for changes in the launch direction of Ls.

Further, with this calibration jig 50, the three-dimensional coordinates can be calibrated by finding the center coordinates by applying a least-square sphere to the measurement data.

As shown in FIG. 7, the calibration sphere 52 in this calibration jig 50 has a radius of r (>0) and center coordinates of S ₀ =(X ₀ , Y ₀ , Z ₀ ) on an arbitrary surface. The coordinate S _s of point s in
|S _s −S ₀ |=r
meet. The coordinates of a plurality of points on the surface of each calibration sphere 52 of the calibration jig 50 are measured by a reference device such as a calibrated contact-type three-dimensional measuring instrument, and the center coordinates S ₀ =( X ₀ , Y ₀ , Z ₀ ) and the true values of the radius r are obtained.

In this deformation analysis apparatus 100, the scanning unit 30 irradiates the calibration jig 50 shown in FIG. , a least-squares sphere is applied to the measurement data of each calibration sphere 52 of the calibration jig 50 to obtain the central coordinates. A correction amount is obtained so that the inter-sphere distance or relative coordinates of the calibration spheres 52 match the calibration values. Furthermore, by performing the same measurement while changing the installation height of the calibration jig 50, calibration data (Δx _C , Δy _C , Δz _C ) can be saved as a three-dimensional distribution of correction amounts.

Here, even if the emission direction of the measurement light Ls emitted from the laser rangefinder 20 to the calibration jig 50 via the scanning unit 30 does not match the Z-axis direction, calibration is performed using a format including rotational coordinate conversion. data can be obtained.

For calibration of the one-dimensional movable mirror mechanism 33X, for example, a calibration plate 60 having a structure as shown in FIGS. 8A, 8B, and 8C can be used.
8A is a plan view of the calibration plate 60, FIG. 8B is a front view of the calibration plate 60, and FIG. 8C is a side view of the calibration plate 60. FIG.

The calibration plate 60 is composed of a flat plate 61 having a thickness of 2 mm and having two rows of slits 62 each having a width of 2 mm and a length of 8 mm and having an interval of 4 mm.

When the calibration plate 60 is scanned with the measurement light Ls emitted from the laser rangefinder 20 through the scanning unit 30B, the measurement light Ls is reflected at portions other than the slit 62, and the reflected light Ls' returns to the laser rangefinder 20. , the measurement light Ls passes through the slit 62 and the reflected light Ls′ does not return to the laser rangefinder 20. Therefore, as shown in FIG. In the range image 60, the change in the scanning speed in the X-axis direction by the one-dimensional movable mirror mechanism 33X appears as a change in the slit interval. appears as a misalignment. In FIG. 9A, ● indicates the center position of the slit 62 .

Here, it is assumed that the calibration of the one-dimensional feed mechanism 36Y made up of the Y stage has been performed separately.

Two-dimensional calibration is performed at the focal position, and the center coordinates of the slit 62 at the focal position are determined from the height information and light intensity information of the calibration plate 60 obtained by the laser rangefinder 20. calibration data can be obtained.

Further, by moving the head portion of the laser rangefinder 20 in the Z-axis direction, two-dimensional calibration is performed at the height position z, and from the height information and the light intensity information of the calibration plate 60 obtained by the laser rangefinder 20, , the calibration data at the height position z can be obtained by determining the center coordinates of the slit 62 at the height position z.

Furthermore, the deviation between the center coordinates of the slit 62 at the focal position and the center coordinates of the slit 62 at the height position z is Z Since the tilt with respect to the axis, that is, the change in the emission direction of the measurement light Ls is shown, calibration data for the change in the emission direction of the measurement light Ls can be obtained from the shift amount.

FIGS. 10A and 10B are diagrams for explaining the process of irradiating the calibration plate 60 with the measurement light Ls to acquire the calibration data. 2 is a front view of a head portion 20a of a laser rangefinder 20 in the deformation analysis device 100, and (B) is a side view of the head portion 20a of the laser rangefinder 20. FIG.

In the calibration data acquisition process, as shown in FIGS. 10A and 10B, the calibration plate 60 is irradiated with the measurement light Ls, and the scanning unit 30B scans the calibration plate 60 with the measurement light Ls in the X-axis direction. While scanning in the Y-axis direction, the height information and light intensity information of the calibration plate 60 are obtained by the laser rangefinder 20 at the focal position, and the center coordinates of the slit 62 at the focal position are determined. At the height position z obtained by moving the head part 20a of the total 20 in the Z-axis direction, the height information and light intensity information of the calibration plate 60 are obtained by the laser rangefinder 20, and the center coordinates of the slit 62 at the focal position are determined. Then, based on the determined central coordinates of each slit 62, three-dimensional calibration data is generated.

That is, the calibration data acquisition process by the calibration plate 60 is performed according to the procedure shown in the flowchart of FIG.

In the calibration data acquisition process, first, two-dimensional calibration is performed at the focal position in the first procedure (ST1).

In the second procedure (ST2), height information and light intensity information of the calibration plate 60 are obtained by the laser rangefinder 20, and the central coordinates of the slit 62 at the focal position are determined.

Here, in FIG. 9A showing an example of a distance image at the focal position of the calibration plate 60 observed by the laser rangefinder 20, ● indicates the center position of the slit 62. In FIG.

In the third procedure (ST3), the head portion 20a of the laser rangefinder 20 is moved in the Z-axis direction.

In the fourth step (ST4), height information and light intensity information of the calibration plate 60 are obtained by the laser rangefinder 20 at the height position z, and the center coordinates of the slit 62 at the height position z are determined.

Here, in (B) of FIG. 9 showing an example of the distance image at the height position z of the calibration plate 60 observed by the laser rangefinder 20, the circle indicates the center position of the slit 62. As shown in FIG.

Then, in the fifth procedure (ST5), the center coordinates of the slit 62 at the focal position determined in the second procedure (ST2) and the height position z determined in the fourth procedure (ST4) Three-dimensional calibration data is generated based on the coordinates of the center of the slit 62 at .

Here, (C) of FIG. 9 shows an example of a distance image at the focal position of the calibration plate 60 observed by the laser rangefinder 20 shown in (A) of FIG. 4 is a diagram in which examples of distance images at height position z of the calibration plate 60 observed by the laser rangefinder 20 are superimposed. FIG.

In (C) of FIG. 9, the center position of the slit 62 at the focal position indicated by ● and the height position z indicated by ◯ in an example of the image of the calibration plate 60 observed by the laser rangefinder 20 The deviation of the center position of the slit 62 indicates the inclination of the optical axis of the measurement light Ls with respect to the Z-axis in scanning in the X-axis direction, that is, the change in the emission direction of the measurement light Ls. From the amount of change in the central coordinate of 62 and the amount of movement in the Z-axis direction, the emission direction of the measurement light Ls can be obtained as a three-dimensional vector, and three-dimensional calibration data can be generated from this three-dimensional vector. .

In the deformation analysis apparatus 100, the arithmetic processing unit 41 of the arithmetic processing unit ₄₀ determines the irradiation position (x _S , y _S , z _S ) is _calculated , _and three-dimensional position _information ( x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ).

Then, the pre-deformation data generated from the distance information (z _S ) to the irradiation position (x _S , y _S , z _S ) of the measurement object 1 before and after the deformation of the measurement object 1 by the arithmetic processing unit 41 . The calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) of the measurement object 1 and the calibrated distance image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After) is used to analyze the deformation state of the measurement object 1 .

In this deformation analysis apparatus 100, the deformation analysis method according to the present invention is carried out according to the procedure shown in the flowchart of FIG.

That is, in this deformation analysis apparatus 100, the surface 1a of the measurement object 1 is two-dimensionally (X, Y ) direction, and the interference signal S obtained by detecting the interference light between the reflected light Ls′ of the measurement light Ls irradiated to the measurement object 1 and reflected by the measurement object 1 and the reference light. Distance information (z _s ) from _M to the irradiation position (x _s , y _s , z _s ) of the measurement light Ls before and after deformation of the measurement object 1 is generated, and the deformation state of the measurement object 1 is generated. _In performing _analysis processing for analyzing the above _, the three-dimensional ( The calibration data (Δx _C , Δy _C , Δz _C ) in the X, Y, Z) space are held in the calibration data holding unit 42 (step ST11).

Then, in the arithmetic processing unit 40 of the deformation analysis apparatus 100, the laser light emitted from the laser rangefinder 20 passes through the scanning unit 30 to the measurement object 1 as the measurement light Ls according to the installed measurement control program. The scanning unit 30 scans the surface 1a of the measurement object 1 with the measurement light Ls in two-dimensional (X, Y) directions, From the interference signal _SM obtained by detecting the interference light between the reflected light Ls' of the measurement light Ls and the reference light by the interference signal detection unit 25 of the laser rangefinder 20, the arithmetic processing unit 41 of the arithmetic processing unit 40 , the measurement process for obtaining the irradiation position (x _S , y _S , z _S ) of the measurement light Ls, that is, the distance information (z _S ) to the surface 1a of the measurement object 1 is executed before and after the deformation of the measurement object 1. do.

That is, the irradiation position _{(x S ,} y Distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) obtained by calibrating the distance information (z _S ) to the above calibration data (Δx C , Δy _C , Δz _C ) to S _, z _{S ) (Before)} is generated by the arithmetic processing unit 41 (step ST12), after that, the measurement object 1 is deformed (step ST13), and the surface 1a of the measurement object 1 after deformation is two-dimensionally ( The distance information (z) to the irradiation position (x, y, z) of the measurement light Ls generated from the interference signal _SM obtained by scanning in the X, Y) direction is used as the calibration data Δx _C , Δy _C , Δz _C ) calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) is generated by the arithmetic processing unit 41 (step ST14).

Furthermore, in the arithmetic processing unit 40 of the deformation analysis apparatus 100, the calibrated distance image information (x _S +Δx _C , y S +Δy C , y _S +Δy _C , z _S +Δz _C ) _(Before) and the calibrated range image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) of the measurement object 1 after deformation. The deformation state of the object is analyzed, and a good/bad decision is made depending on whether or not the amount of deformation is greater than a predetermined threshold value (step ST15).

Here, the laser rangefinder 20 scans the surface 1a of the measurement object 1 with the measurement light Ls in two-dimensional (X, Y) directions, and the arithmetic processing unit 41 of the arithmetic processing unit 40 scans the surface 1a of the measurement object 1. In the measurement control program that acquires the distance information (z) to 1a and performs calibration processing, it is necessary to incorporate a processing program for calibration processing, and the change in the existing measurement control program becomes large. In 40, the irradiation position ( _{xS , yS} , _zS ) to obtain distance image information (x _S , y _S , z _S ) by generating point group distance information (z _S ) or grid-like interpolated distance information (z _S ), and distance Generate distance image information (x _S +Δx C , y _S +Δy _C , z S +Δz _C ) calibrated by calibration data (Δx _C , Δy _C , Δz _C ) from image information (x _S , y _S , _{z S )} You may make it install the conversion processing program which carries out.

In this deformation analysis apparatus 100, for example, a member 1A deformed by heating is used as the object 1 to be measured, and as shown in FIG. , Y) direction and calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) obtained by the arithmetic processing unit 41 of the arithmetic processing unit 40 _(Before) , and FIG. As shown in (B) of 13, the surface 1a of the deformed member 1A after heating is scanned with the measurement light Ls in two-dimensional (X, Y) directions, and a calibrated distance image obtained by the arithmetic processing unit 41. Information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) is generated by the arithmetic processing unit 40, and distance image information (x _S +Δx _C , y Detect the difference between _S + Δy _C , z _S + Δz _C ) _(Before) and the distance image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After) indicating the surface shape of the member 1A after heating By doing so, the distance image information before heating ((x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(Before) is used as a reference value, and the deformation amount Δz
Δz=(z _S +Δz _C ) _(After) −(z _S +Δz) _(Before)
can be calculated.

Moreover, in this deformation analysis apparatus 100, for example, a beam member 1B deformed by a load is used as the object 1 to be measured, and as shown in FIG. Scanning in two-dimensional (X, Y) directions with light Ls, calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) , and (B) in FIG. As shown, the surface 1a of the beam member 1B deformed after the load due to gravity is applied by placing the heavy object 2 thereon is scanned in the two-dimensional (X, Y) direction with the measurement light Ls to obtain calibrated distance image information ( x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) is generated by the arithmetic processing unit 41 of the arithmetic processing unit 40, and distance image information indicating the surface shape of the beam member 1B before being deformed by the load. ( _xS + _ΔxC , _yS + _ΔyC , _zS + _ΔzC ) _(Before) and distance image information ( _xS + _ΔxC , _yS + _ΔyC , _zS ) indicating the surface shape of the beam member 1B after being deformed by the load +Δz _C ) _(After) , the deformation amount of the beam member 1B after deformation can be calculated using the distance image information (x+Δx, y+Δy, z+Δz) _(Before) before deformation as a reference value. .

Furthermore, the deformation analysis apparatus 100 measures a headed shaft _1C such as a stud bolt, a headed stud, a nail, a screw, a bolt, a rivet, etc. whose head _1c2 is deformed by applying an axial force to the shaft 1c1. As shown in FIG. 15A, the surface of the head _1c2 of the headed shaft _1C before applying a tensile force to the shaft 1c1 is measured two-dimensionally (X, Calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) obtained by the arithmetic processing unit 41 of the arithmetic processing unit 40 by scanning in the Y) direction _(Before) , and FIG. (B), the surface of the deformed head portion _1c2 of the shaft 1C after applying a tensile force to the shaft portion _1c1 is scanned with the measuring light Ls in two-dimensional (X, Y) directions, The calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) obtained by the arithmetic processing unit 41 is generated by the arithmetic processing unit 41, and the distance image information before being deformed by the tensile force is generated by the arithmetic processing unit 41. Distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) indicating the surface shape of the head 1c ₂ of the headed shaft 1C _(Before) and the headed shaft 1C after being deformed by the tensile force By detecting the difference from the distance image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After) indicating the surface shape of the head 1c ₂ of the head 1c 2, the distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) Deformation amount Δz of head 1c ₂ of headed shaft 1C after deformation using _(Before) as a reference value
Δz=(z _S +Δz _C ) _(After) −(z _S +Δz _C ) _(Before)
can be calculated.

Here, in the deformation analysis of the head 1c ₂ of the headed shaft 1C, the distance image information of the head 1c ₂ (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) , (x _S +Δx For _C ,y _S +Δy _C ,z _S +Δz _C ) _(After) , for example, as shown in _FIGS . Depths Δz _{(Before) and} Δz _(After) from the reference plane to the deepest point of the head _1c2 from the average value of the distance information of pixels within a predetermined range are obtained, respectively, and the difference Δz
Δz = Δz _(After) - Δz _(Before)
can be defined as a deformation amount Δz of the head portion _1c2 of the headed shaft member 1C before and after application of the axial force. Thus, the distance image information before and after deformation (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) , (x _S +Δx _C ,y _S +Δy _C ,z _S +Δz _C ) _(After) , and the difference Δz between the depths Δz _{(Before) and} Δz _(After) from the reference point P as the deformation amount Δz, it is possible to perform deformation analysis with higher accuracy.

16A and 16B are diagrams schematically showing the state of the headed shaft 1C before deformation, in which (A) is a plan view of the shaft 1C and (B) is a front view of the headed shaft 1C.

17A and 17B are diagrams schematically showing the state of the headed shaft 1C after deformation, in which (A) is a plan view of the shaft 1C and (B) is a front view of the headed shaft 1C.

Also, an xy plane including a plurality of reference points P along the edge of the head _1c2 can be used as the reference plane.

Furthermore, for example, as shown in FIGS _. 18 and 19, in the deformation analysis of the head 1c ₂ of the headed shaft 1C, the distance image information (x _S +Δx _C ,y _S +Δy _C ,z _S +Δz _C ) _(Before) , (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) , the center of gravity O of the head 1c ₂ is obtained, and the circumference of a circle with a predetermined radius r ₀ from the center of gravity O Using the average value of the distance information of each pixel above as a reference plane, the depths Δz _(Before) and Δz _(After) from the reference plane to the deepest point of the head 1c ₂ are obtained, and the difference Δz
Δz = Δz _(After) - Δz _(Before)
can be defined as a deformation amount Δz of the head portion _1c2 of the headed shaft member 1C before and after the application of the axial force.

18A and 18B are diagrams schematically showing the state of the headed shaft 1C before deformation, where (A) is a plan view of the shaft 1C and (B) is a front view of the headed shaft 1C.

19A and 19B are diagrams schematically showing the state of the headed shaft 1C after deformation, in which (A) is a plan view of the shaft 1C and (B) is a front view of the headed shaft 1C.

In this deformation analysis apparatus 100, the irradiation position (x _S , y _S , z _S ) of the measurement light Ls which scans the surface 1a of the measurement object 1 in the two-dimensional (X, Y) directions by the scanning unit 30 The calibration data (Δx _C , Δy _C , Δz _C ) in the three-dimensional (X, Y, Z) space are held in the calibration data holding unit 42, and the scanning unit 30 scans the surface 1a of the measurement object 1 with the measurement light Ls. is scanned in two-dimensional (X, Y) directions, and from the interference signal S _M obtained by the laser rangefinder 20, the arithmetic processing unit 41 of the arithmetic processing unit 40 determines the irradiation position (x _S , y _s , z _s ), and the distance image information (x _{s + Δx c , y s +} Δy _c , calibrated by the calibration data (Δx _c , Δy _c , Δz _c ). z _S +Δz _C ), the tilt of the optical axis of the measurement light Ls that irradiates the surface 1 a of the measurement object 1 and the nonlinearity of scanning by the scanning unit 30 cause the two-dimensional (X, Y) plane Deformation analysis can be performed with high accuracy using the distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) from which coordinate errors have been removed.

In this deformation analysis _apparatus 100, for example, as shown in _FIGS . , to generate an _{axial force on the shaft portion 1d1 and apply the axial force to the head portion 1d2 , the} correction data (Δx _C , Δy _C , Δz _C ) calibrated distance image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) to irradiate the surface 1a of the measurement object 1 with the measurement light Ls Since the coordinate errors in the two-dimensional (X, Y) plane caused by the tilt of the optical axis of the head 1d2 and the nonlinearity of the scanning by the scanning unit 30 are eliminated, the deformation analysis apparatus 100 performs the following before and after the rotation of the head _1d2 . , the depths Δz _{(Before) and} Δz _(After) from the reference plane to the deepest point of the head 1d ₂ are obtained as described above, and the difference Δz
Δz = Δz _(After) - Δz _(Before)
is a deformation amount Δz of the head portion _1d2 of the hexagonal bolt 1D before and after application of the axial force, deformation analysis can be performed with high accuracy.

20A and 20B are diagrams schematically showing the state of the hexagon bolt 1D before deformation, where (A) is a plan view of the hexagon bolt 1D and (B) is a front view of the hexagon bolt 1D.

21A and 21B are diagrams schematically showing the state of the hexagon bolt 1D after deformation, where (A) is a plan view of the hexagon bolt 1D and (B) is a front view of the hexagon bolt 1D.

In the deformation analysis device 100, by adopting an optical comb rangefinder equipped with an optical comb generator that emits an optical comb as the measurement light Ls as the laser rangefinder 10, the distance can be obtained with high accuracy and in a short time. can be measured.

The laser distance meter 20 irradiates the measurement object 1 with an optical comb as the measurement light Ls, and detects the interference light between the return light Ls' and the reference light, thereby measuring the distance to the measurement object 1. As the optical comb distance meter to be measured, for example, the one described in Patent Document 3 previously proposed by the inventors of the present invention can be adopted.

A specific configuration example of the optical comb rangefinder 20A provided as the laser rangefinder 20 in the deformation analysis apparatus 100 is shown in the schematic diagram of FIG.

In this optical comb rangefinder 20A, for example, interference light between the reference light L _ref applied to the reference plane 23 and the measurement light Ls applied to the surface 1a of the measurement object 1 is detected by the reference photodetector 24A. In addition to detection, interference light between the reference light L _ref ' reflected by the reference surface 23 and the measurement light Ls' reflected by the surface 1a of the measurement object 1 is detected by the measurement light detector 24B, and the calculation is performed. From the time difference between the interference signal S _M1 obtained by detecting the interference light by the reference photodetector 24A and the interference signal S _M2 obtained by detecting the interference light by the measurement photodetector 24B by the processing unit 41, the velocity of light and the refractive index at the measurement wavelength. A difference between the distance _L1 to the reference plane 23 and the distance _L2 to the surface 1a of the measurement object 1 is obtained.

That is, the optical comb distance meter 20A shown in the schematic diagram of _FIG . , a reference light detector 24A for detecting interference light between the reference light L _ref and the measurement light Ls, a reference surface 23 irradiated with the reference light L _ref , and a measurement surface irradiated with the measurement light Ls. A measurement light detector for detecting interference light between the reference light L _ref ′ reflected by the surface 1 a of the measurement object 1 and the reference surface 23 and the measurement light Ls ′ reflected by the surface 1 a of the measurement object 1 . 24B, an arithmetic process in which an interference signal _SM1 obtained by detecting the interference light by the reference photodetector 24A and an interference signal _SM2 obtained by detecting the interference light by the measurement photodetector 24B are supplied. A part 41 is provided.

The first and second light sources 21A and 21B are periodically modulated in intensity or phase, respectively, and emit pulses of coherent reference light L _ref and measurement light Ls having mutually different modulation periods, Consists of two optical frequency comb generators with different optical frequency comb mode intervals for emitting the reference light L _ref and the measuring light Ls, which are coherent and whose modulation periods are different from each other and which are periodically modulated in intensity or phase. .

The reference light L _ref and the measurement light Ls pulse-emitted from the first and second light sources 21A and 21B are mixed and superimposed by a light mixing element 22A made up of a semi-transparent mirror or a polarizing beam splitter. The separation element 22B separates the light directed toward the reference photodetector 24A and the light directed toward the surface 1a of the object 1 to be measured.

Here, the reference light L _ref and the measurement light Ls pulse-emitted from the first and second light sources 21A and 21B are assumed to have planes of polarization perpendicular to each other, and are mixed by a light mixing element 22A consisting of a semitransparent mirror. The mixed light is reflected by the light separation element 22B and enters the reference photodetector 24A through the polarizer 22C, and the mixed light that has passed through the light separation element 22B is polarized by the polarization beam splitter 22D. Accordingly, the reference light _Lref and the measurement light Ls are separated, and the reference light _Lref is incident on the reference surface 23, and the measurement light Ls is incident on the surface 1a of the measurement object 1. there is

Here, the reference light _Lref and the measurement light Ls pulse-emitted from the first and second light sources 21A and 21B are assumed to have orthogonal planes of polarization. A splitter may be used to mix the components of the reference light _Lref and the measurement light Ls whose polarization planes are orthogonal to each other.

Further, the reference light L _ref ′ reflected by the reference surface 23 and the measurement light Ls′ reflected by the surface 1a of the measurement object 1 are mixed by the polarization beam splitter 22D, and the mixed light is the light The light is reflected by the separation element 22B and enters the measuring photodetector 24B via the polarizer 22E.

The reference photodetector 24A receives the mixed light of the reference light _Lref and the measurement light Ls incident via the polarizer 22C, thereby detecting the first and second light sources 21A and 21B. Interference light between the reference light L _ref and the measurement light Ls pulse-emitted from is detected.

Further, the measurement light detector 24B receives the mixed light of the reference light L _ref ′ and the measurement light Ls′ incident via the polarizer 22E, thereby detecting the reference light reflected by the reference surface 23 . Interference light between the light L _ref ′ and the measurement light Ls ′ reflected by the surface 1 a of the measurement object 1 is detected.

In this optical comb rangefinder 20A, the optical path from the light mixing element 22A to the polarization beam _splitter 22D indicated by the thick line in FIG. The reference light _Lref and the measurement light Ls are separated according to the polarization by the polarization beam splitter 22D and made incident on the reference surface 23 and the surface 1a of the object 1 to be measured. Then, the reference light L _ref ' and the measurement light Ls' reflected by the reference surface 23 and the surface 1a of the measurement object 1 are mixed by the polarization beam splitter 22D, and the mixed light is separated by the light separation element 22B. The interference light between the reference light L _ref ′ reflected by the reference surface 23 and the measurement light Ls ′ reflected by the surface 1 a of the measurement object 1 is obtained as the measurement light. Detected by the detector 24B.

Here, the reference light Lref and the measurement light _Ls included in the mixed light guided to the reference photodetector 24A via the light separation element 22B provided on the optical path from the light mixing element 22A to the polarization beam splitter 22D are Since the polarization is orthogonal, no interference signal can be obtained even if the light enters the reference _{photodetector} 24A as it is. By adjusting the orientation of the _polarizer 22C so as to be The interference signal S _M1 is obtained by the reference photodetector 24A. Similarly, since the reference light L _ref ' and the measurement light Ls' included in the mixed light guided to the measurement light detector 24B via the light separation element 22B have orthogonal polarizations, they are directly transmitted to the measurement detector 24B. Since no interference signal is obtained even if the light is incident, a polarizer 22E is inserted and the orientation of the polarizer 22E is adjusted so that it is oblique to the polarization of the reference light L _ref ' and the measurement light Ls'. By setting the polarizer 22E as a transmission component, interference light in which the components of the reference light L _ref ' and the measurement light Ls' are mixed is incident on the measurement light detector 24B. to obtain an interference signal _SM1 . A half-wave plate and a polarizing beam splitter may be used instead of the polarizer.

The interference signal S _M1 obtained by the reference photodetector 24A has a carrier frequency which is the difference between L _ref pulse-emitted from the first and second light sources 21A and 21B and the carrier optical frequency of the measurement light Ls. The same interference waveform is repeated at a frequency that is the difference between the optical pulse repetition frequencies of the reference light L _ref and the measurement light Ls.

In this optical comb rangefinder 20A, the role of the reference photodetector 24A is to generate a reference for delay time measurement. The reference light L _ref and the measurement light Ls pulse-emitted from the first and second light sources 21A and 21B have unequal repetition frequencies. , and there always appears somewhere the moment when the optical pulse of the reference light _Lref and the optical pulse of the measurement light Ls overlap. Moreover, the overlapping moments appear periodically at the repetition frequency of the difference between the repetition frequencies of the reference light _Lref and the measurement light Ls. The moment when the optical pulses overlap with each other is the reference for delay time measurement.

The interference signal S _M2 obtained by the measurement photodetector 24B has a carrier frequency which is the difference between the carrier optical frequencies of the reference light _Lref and the measurement light Ls, like the interference signal S _M1 obtained by the reference photodetector 24A. , has the same repetition frequency as the difference between the optical pulse repetition frequencies of the reference light L _ref and the measurement light Ls. However, the light pulse input to the measurement photodetector 24B is the absolute value of the distance difference (L ₂ -L ₁ ) between the distance L ₁ to the reference surface 23 and the distance L ₂ to the surface 1a of the measurement object 1. Since the timing of the light pulse is delayed by the amount of , the moment when the light pulses overlap is delayed compared to the interference signal _SM1 obtained by the reference photodetector 24A. This delay time is the delay time due to the light pulse propagating through a distance that is twice the absolute value of the distance difference (L ₂ −L ₁ ). distance is obtained.

Therefore, in the optical comb rangefinder 20A, the arithmetic processing unit 41 detects the interference light by the interference signal S _M1 obtained by detecting the interference light by the reference photodetector 24A and the interference light by the measurement photodetector 24B. _The absolute value _{( L2} −L ₁ ).

That is, in the optical comb rangefinder 20A, the reference light L _ref which is pulse-emitted from the first and second light sources 21A and 21B and which is periodically modulated in intensity or phase and has coherence with different modulation periods The reference plane 23 and the surface 1a of the measurement object 1 are irradiated with the measurement light Ls, and interference light between the reference light _Lref irradiated onto the reference plane 23 and the surface 1a of the measurement object 1 and the measurement light Ls is detected as the reference light. In addition to detection by the measurement light detector 24A, interference light between the reference light L _ref ′ reflected by the reference surface 23 and the measurement light Ls′ reflected by the surface 1a of the measurement object 1 is detected by the measurement light detector 24B. , from the time difference between the interference signal S _M1 detected by the reference photodetector 24A and the interference signal S _M2 detected by the measurement photodetector 24B, the calculation processing unit 41 determines the speed of light and the measurement wavelength. By obtaining the absolute value (L ₂ −L ₁ ) of the distance difference between the distance L ₁ from the refractive index to the reference surface 23 and the distance L ₂ to the surface 1a of the measurement object 1, the distance can be determined with high accuracy and It can be measured in a short time.

Further, for the laser range finder 20 provided in the deformation analysis apparatus 100, for example, an optical comb range finder 20B configured as shown in the schematic diagram of FIG. 23 can be employed.

In this optical comb rangefinder 20B, the reference surface 23 is irradiated with the measurement light Ls pulse-emitted from the first laser light source 121A through the first beam splitter 122A, and the pulse is emitted from the first laser light source 121A. The measured light Ls is irradiated onto the surface 1a of the measurement object 1 via the first beam splitter 122A and the second beam splitter 122B. The measurement light Ls applied to the reference plane 23 is reflected by the reference plane 23 and enters the reference photodetector 24A via the first beam splitter 122A and the third beam splitter 122C. Further, the measurement light Ls irradiated onto the surface 1a of the measurement object 1 is reflected by the surface 1a of the measurement object 1, passes through the first beam splitter 122A and the fourth beam splitter 122D, and reaches the measurement light detector. 24B.

Further, the reference light L _ref pulse-emitted from the second laser light source 121B is incident on the third beam splitter 122C via the fifth beam splitter 122E, and the reference light L ref is incident on the third beam splitter 122C. While being mixed with the measurement light Ls' reflected by the surface 115, it is incident on the fourth beam splitter 122D via the fifth beam splitter 122E and the reflecting mirror 122F. It is designed to be mixed with the measurement light Ls' reflected by the surface 1a of the object 1 to be measured.

In the optical comb rangefinder 20B, the reference photodetector 24A detects the interference between the measurement light Ls' reflected by the reference surface 23 and the reference light _Lref mixed in the third beam splitter 22C. Signal _SM1 is detected. Further, the measurement detector 24B detects an interference signal _SM2 between the measurement light Ls' reflected by the surface 1a of the measurement object 1 and the reference light _Lref mixed in the fourth beam splitter 122D. do.

If the timing _tA at which the pulse of the measurement light Ls is emitted from the first laser light source 121A coincides with the timing _tB at which the pulse of the reference light _Lref is emitted from the second laser light source 121B, the reference light The detector 24A detects an interference signal S _M1 between the measurement light Ls' and the reference light L _ref having a time difference indicated by ΔT _M1 .
ΔT _M1 =T ₁ +T _R +T ₄ -T ₂

Here, _T1 is the time corresponding to the optical path length through which the measuring light Ls passes from the first laser light source 121A to the first beam splitter 122A, and _TR is the first optical path length through which the measuring light Ls passes. This is the time corresponding to the optical path length that travels between the beam splitter 122A and the reference plane 23, and _T4 corresponds to the optical path length through which the measurement light Ls passes from the first beam splitter 122A to the reference photodetector 24A. T2 is the time corresponding to the optical path length through which the reference light _Lref passes from the second laser light source 121B to the third beam splitter 122C.

Also, the measurement light detector 24B detects an interference signal SM2 between the measurement light _Ls ' and the reference light _Lref having a time difference indicated by ΔT _M2 .
ΔT _M2 =T ₁ +T ₃ +T _T +T ₇ -T ₈
=T ₁ +T ₃ +T _T +(T ₄ +T ₅ )−(T ₂ +T ₃ +T ₅ )
=T ₁ +T _T +T ₄ -T ₂

Here, _T1 is the time corresponding to the optical path length through which the measuring light Ls passes from the first laser light source 121A to the first beam splitter 122A, and _T3 is the first optical path length through which the measuring light Ls passes. _TT is the time corresponding to the optical path length from the beam splitter 122A to the second beam splitter 122B. _T7 is the time corresponding to the optical path length through which the measurement light Ls passes from the second beam splitter 112B to the fourth beam splitter 122D, and _T8 is the time corresponding to the optical path length of the reference light L It is the time corresponding to the optical path length through which _ref passes from the second laser light source 121B to the fourth beam splitter 122D.

The T7 is the time _T4 corresponding to the optical path length from the first beam splitter 122A through which the measurement light Ls passes to the reference photodetector 24A and the fifth beam splitter 122E through which the reference light _Lref passes. to the reflector 122F, equal to the sum of the time _T5 corresponding to the optical path length from
_T7 = _T4 + _T5
is.

_T8 is the time T2 corresponding to the optical path length from the second laser light source 121B through which the reference light _Lref passes to the third beam splitter 122C, and the time _T2 corresponding to the optical path length through which the measurement light Ls passes. Time _T3 corresponds to the optical path length from the first beam splitter 122A to the second laser light source 121B, and corresponds to the optical path length from the fifth beam splitter 122E to the reflecting mirror 122F through which the reference light _Lref passes. equal to the sum with the time T ₅ ,
_T8 = _T2 + _T3 + _T5
is.

Therefore, the time difference ΔT _M2 is
ΔT _M2 =T ₁ +T ₃ +T _T +T ₇ -T ₈
=T ₁ +T ₃ +T _T +(T ₄ +T ₅ )−(T ₂ +T ₃ +T ₅ )
=T ₁ +T _T +T ₄ -T ₂
is.

Then, the difference (ΔT _M2 −ΔT _M1 ) between the time difference ΔT _M2 and the time difference ΔT _M1 is
ΔT _M2 −ΔT _M1 =T _T −T _R
Therefore, the distance to the surface 1a of the measurement object 1 can be calculated from the time difference between the two interference signals S _M1 and S _M2 obtained from the reference photodetector 24B and the measurement photodetector 24A. .

In this laser rangefinder 20B, the time _TT corresponding to the optical path length of the round trip from the second beam splitter 122B through which the measuring light Ls passes to the surface 1a of the measuring object 1 and the measuring light Ls passing therethrough. The distance from the first beam splitter 122A to the reference plane 23 is calculated as the difference from the time _TR corresponding to the round trip optical path length from the first beam splitter 122A to the reference plane 23. Even without , the time _TR can be given by passing the measurement light Ls through an optical path having a predetermined optical path length.

In the optical comb rangefinders 20A and 20B, instead of having the reference surface 23, a reference optical path having a predetermined optical path length may be provided. Also, the optical path through which the reference light _Lref and the measurement light Ls pass is not limited to a spatial propagation path, and may be an optical fiber or the like.

That is, the optical comb rangefinders 20A and 20B have first and second pulse-emitting reference light L _ref and measurement light Ls which are periodically modulated in intensity or phase and have coherence with mutually different modulation periods. light sources 21A and 21B; a reference light detector 24A for detecting interference light between the reference light L _ref passing through the reference light path having a predetermined optical path length and the measurement light applied to the surface 1a of the measurement object 1; A measurement light detector 24B for detecting interference light between the reference light passed through the reference optical path of the optical path length and the reflected light Ls' of the measurement light Ls reflected by the surface 1a of the measurement object 1 is provided. be able to.

Further, in the arithmetic processing unit 41 of the arithmetic processing unit 40, the interference signal S _M1 detected by the reference photodetector 24A is frequency-analyzed, and the phase information of many optical frequency combs are collectively obtained. The interference signal S _M2 detected by the measuring photodetector 24B is frequency-analyzed to collectively obtain the phase information of a large number of optical frequency combs. A difference between the distance to the reference plane and the distance to the measurement plane can be calculated.

1 measurement object 1A member deformed by heating 1B beam member 1C shaft with head 1D hexagon bolt 1c ₁ , 1d ₁ shaft portion 1c ₂ , 1d ₂ heads 10 measurement table 20 laser rangefinder , 20A, 20B optical comb rangefinder, 21 measurement light generator, 21A, 21B, 121A, 121B light source, 22, 122A to 122E beam splitter, 22A light mixing element, 22B light separation element, 22C polarizer, 22D polarization beam splitter , 23 reference surface, 24 interference photodetector, 24A reference photodetector, 24B measurement photodetector, 25 interference photodetector, 30, 30B scanning unit, 30A laser scanner, 31X, 31Y motor, 32X, 32Y mirror, 33 2-axis galvanometer mirror mechanism 35, 35' telecentric f-θ lens 36Y one-dimensional feed mechanism 40 arithmetic processing unit 41 arithmetic processing unit 42 calibration data holding unit 43 control unit 50 calibration jig 51 Substrate 52 Calibration sphere 53 Conical surface 60 Calibration plate 62 Slit 61 Flat plate 100 Deformation analyzer

Claims (21)

Scanning the surface of the object to be measured in two-dimensional (X, Y) directions with a laser beam that irradiates the object to be measured as measurement light in a three-dimensional (X, Y, Z) space, and irradiating the object to be measured Then, from the interference signal obtained by detecting the interference light between the reflected light of the measurement light reflected by the measurement object and the reference light, the irradiation position of the measurement light before and after the deformation of the measurement object (x _S , y _s , z _s ) to generate distance information (z _s ) and analyze the deformation state of the object to be measured, comprising:
The three-dimensional (X, Y, Z) space of the irradiation position (x _s , y _s , z _s ) of the measurement light that scans the surface of the measurement object in the two-dimensional (X, Y) direction by the scanning means Hold calibration data (Δx _C , Δy _C , Δz _C ) as a three-dimensional distribution of correction amounts in
The irradiation position (x _S , y _S , z _{S ) is} calculated, and the calibrated distance image information _{( x S +} Δx _C , y _S + Δy _C , z _S + Δz _C ) before and after deformation of the measurement object,
The calibrated distance image information of the measurement object before deformation (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) and the calibrated distance image information of the measurement object after deformation A deformation analysis method, comprising analyzing a deformation state of the object to be measured using (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) . From the interference signal obtained by irradiating the measurement light onto a calibration jig that provides coordinate position (x ₀ , y ₀ , z ₀ ) information calibrated in advance in a three-dimensional (X, Y, Z) space, the scanning means The calibration data (Δx C , Δy C , Δz _C ) of the irradiation position (x _S , y _S , z _S ) of the measurement light in the three-dimensional ( _X , _Y , Z) space scanned by 2. The deformation analysis method according to claim 1, wherein the deformation analysis method is generated as a typical distribution and held in a calibration data holding means. The object to be measured is a member that is deformed by heating,
The calibrated distance image information obtained before heating (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(Before) and the calibrated distance image information obtained after heating (x _S + Δx _C , y 3. The deformation analysis method according to claim 1, wherein the state of thermal deformation of the object to be measured is analyzed using _S + Δy _C , z _S + Δz _C ) _(After) . The object to be measured is a beam member deformed by a load,
The calibrated distance image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(Before) obtained before the application of the load and the calibrated distance image information (x _S 3. The deformation analysis method according to claim 1 or 2, wherein + _[ Delta] _xC ,yS+[Delta]yC, _zS +[Delta] _{zC ) (After)} is used to analyze the deformation state due to the load of the beam member. The object to be measured is a shaft with a head,
The calibrated range image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) of the head of the headed shaft obtained before axial force application and the above obtained after axial force application The deformation state of the head due to the axial force of the headed shaft is analyzed using the calibrated distance image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After). The deformation analysis method according to claim 1 or 2. The calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) of the head of the headed shaft obtained before applying the axial force to the head of the headed shaft _{(Before )} and the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) obtained after applying the axial force _(After) ,
A reference point is set at the edge of the head, and the average value of distance information of pixels within a predetermined range around the reference point is used as a reference plane. Depth Δz _(Before) from the reference plane to the deepest point of the head , Δz _(After) , respectively, using the following equation

6. The deformation analysis method according to claim 5, wherein the difference .DELTA.z indicated by is used as the amount of deformation of the head portion of the headed shaft before and after the application of the axial force. The calibrated distance image information (x S +Δx _C , _y S ₊ Δy _C , z _S +Δz _C ) of the head of the headed shaft obtained before applying the axial force to the head of the headed shaft _{(Before )} and the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) obtained after applying the axial force _(After) ,
The center of gravity of the head is obtained, and the average value of the distance information of each pixel on the circumference of a predetermined radius from the center of gravity is used as a reference plane to determine the depth from the reference plane to the deepest point of the head Δz _(Before) , Δz _{( After)} respectively, the following formula

6. The deformation analysis method according to claim 5, wherein the difference .DELTA.z indicated by is used as the amount of deformation of the head portion of the headed shaft before and after the application of the axial force. measurement light generating means for emitting laser light as measurement light for irradiating a measurement object in a three-dimensional (X, Y, Z) space;
scanning means for scanning the surface of the measurement object in two-dimensional (X, Y) directions with the measurement light;
As a three-dimensional distribution of the correction amount in the three-dimensional (X, Y, Z) space of the irradiation position (x _S , y _S , z _S ) of the measurement light that scans the surface of the measurement object by the scanning means calibration data holding means for holding calibration data (Δx _C , Δy _C , Δz _C ) of
Interference light detection in which the reflected light of the measurement light irradiated to the measurement object and reflected by the measurement object and the reference light enter as interference light through an interference optical system to generate an interference signal by a photodetector. means and
Distance information (z _s ) from the interference signal obtained by the interference light detection means to the irradiation position (x _s , y _s , z _s ) of the measurement object irradiated with the measurement light is calculated, and the calibration data Arithmetic processing for generating calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) by adding the calibration data (Δx _C , Δy _C , Δz _C ) provided by the holding means comprising means and
The measuring object before deformation generated by the arithmetic processing _means from the distance information (z S ) to the irradiation position (x _S , y _S , z _S ) of the measuring object before and after deformation of the measuring object The calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) and the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) to analyze the deformation state of the object to be measured. 9. The modification according to claim 8, wherein the scanning means relatively moves the object to be measured and the optical axis of the measurement light to scan the surface of the object to be measured with the measurement light. analysis equipment. 10. The deformation analysis apparatus according to claim 9, wherein said scanning means comprises a two-dimensional movable mirror mechanism for moving an optical axis by changing an angle of reflection of said measurement light. The scanning means includes a one-dimensional movable mirror mechanism that moves the optical axis by changing the angle of reflection of the measurement light, and a moving direction of the optical axis by the one-dimensional movable mirror mechanism. 10. The deformation analysis apparatus according to claim 9, comprising a one-dimensional feed mechanism for relatively moving the object to be measured and the optical axis of the measurement light. 10. The deformation analysis apparatus according to claim 9, wherein the scanning means comprises a two-dimensional feed mechanism for moving the object to be measured or the optical axis of the measurement light in two-dimensional directions. 13. The scanning means irradiates the measuring object with the laser beam emitted from the measuring light generating means as the measuring light through a telecentric optical system. The deformation analysis device according to . The calibration data holding means is obtained by irradiating the measurement light onto a calibration jig that provides pre-calibrated coordinate position (x ₀ , y ₀ , z ₀ ) information in a three-dimensional (X, Y, Z) space. From the obtained interference signal, the three-dimensional distribution of the correction amount of the irradiation position (x _S , y _S , z _S ) of the measurement light in the three-dimensional (X, Y, Z) space scanned by the scanning means 14. The deformation analysis apparatus according to any one of claims 8 to 13, wherein calibration data ([Delta] _xC , [Delta _]yC , [Delta] _zC ) are generated and stored. The object to be measured is a member that is deformed by heating,
By the arithmetic processing means, the calibrated distance image information obtained before heating (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(Before) and the calibrated distance image information obtained after heating ( 15. The state of thermal deformation of the object to be measured is analyzed using x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After). The deformation analysis device according to the item. The object to be measured is a beam member deformed by a load,
By the arithmetic processing means, the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) obtained before the application of the load _(Before) and the calibrated distance image information obtained after the application of the load Deformation state due to the load of the beam member is analyzed using the distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After). The deformation analysis device according to any one of items 1 and 2. The object to be measured is a shaft with a head,
By the arithmetic processing means, the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) of the head of the headed shaft obtained before applying the axial force _(Before) and the axis Using the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S +Δz _C ) _(After) obtained after force application, the deformation state of the head due to the axial force of the headed shaft is calculated. 15. The deformation analysis device according to any one of claims 8 to 14, characterized in that it analyzes. In the arithmetic processing means, the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z _S + Δz _C ) _(Before) and the calibrated range image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After) obtained after applying axial force, a reference point is set at the edge of the head. is set, and the average value of the distance information of pixels within a predetermined range around the reference point is used as a reference plane, and the depths Δz _(Before) and Δz _(After) from the reference plane to the deepest point of the head are obtained. , the expression

18. The deformation analysis apparatus according to claim 17, wherein the difference Δz indicated by is the amount of deformation of the head portion of the headed shaft before and after the application of the axial force. In the arithmetic processing means, the calibrated distance image information (x _S +Δx _C , y _S +Δy _C , z For _S + Δz _C ) _(Before) and the calibrated range image information (x _S + Δx _C , y _S + Δy _C , z _S + Δz _C ) _(After) obtained after applying the axial force, obtain the center of gravity of the head, Depths Δz _{(Before) and} Δz _(After) from the reference plane to the deepest point of the head are obtained by using the average value of the distance information of each pixel on the circumference of a predetermined radius from the center of gravity as a reference plane, respectively . formula

18. The deformation analysis apparatus according to claim 17, wherein the difference Δz indicated by is the amount of deformation of the head portion of the headed shaft before and after the application of the axial force. First and second light sources emitting coherent reference light and measurement light whose intensity or phase is modulated periodically and whose modulation periods are different from each other; and the reference light passing through the reference optical path having a predetermined optical path length. A reference photodetector for detecting light interfering with the measurement light irradiated onto the surface of the measurement object, the reference light passing through the reference optical path having a predetermined optical path length, and the measurement light reflected by the surface of the measurement object measurement light emitted from a laser rangefinder equipped with a measurement light detector that detects interference light with the reflected light of the two-dimensional (X, Y) direction with the surface of the measurement object as the measurement surface by the scanning means Scan to
The arithmetic processing means determines the distance from the speed of light and the refractive index at the measurement wavelength to the reference plane and the measurement from the time difference between the interference signal detected by the reference photodetector and the interference signal detected by the measurement photodetector. 20. The deformation analysis apparatus according to any one of claims 8 to 19, wherein the deformation state of the object to be measured is analyzed by obtaining a difference in distance to the surface. 21. The deformation analysis apparatus according to claim 20, wherein said laser rangefinder is an optical comb rangefinder comprising an optical comb generator for emitting said reference light and an optical comb generator for emitting said measurement light. .

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