JP7284562B2 - Surface measuring device and surface measuring method - Google Patents

Description

The present invention relates to a surface measuring device and a surface measuring method.

Conventionally, there is a surface measuring apparatus that measures the surface of an object to be measured based on an optical lever (see Patent Documents 1 to 4, for example). In such a surface measuring apparatus, linear light emitted from a light source is reflected by the surface of a moving object to be measured, the reflected image projected on a screen is captured by an imaging device, and the resulting captured image is analyzed. Thus, surface measurement of the object to be measured is performed.

Japanese Patent No. 4081414 Japanese Patent No. 6281667 JP-A-04-160304 Japanese Patent No. 6278171

In recent years, there has been a demand for measuring the surface of an object to be measured having a wide width. However, since a single light source cannot irradiate linear light having a required wide irradiation width, there is a problem that it is not possible to easily measure an object to be measured having a wide width.

A method of arranging a plurality of light sources in order to measure the surface of an object to be measured having a wide width has been disclosed (for example, Patent Documents 1 and 2). However, the apparatus configuration such as specific arrangement of light sources is not disclosed, and a surface measuring apparatus with a plurality of light sources arranged has not yet been technically established.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a surface measuring apparatus and a surface measuring method capable of reliably measuring a wide surface of an object to be measured.

A surface measuring apparatus according to the present invention is a surface measuring apparatus for measuring the surface of a moving object to be measured. a second light source that irradiates a second linear light across the width direction of the measuring object; a screen on which the second linear light is reflected by a second reflection region on the surface of the object to be measured and a second reflected image is projected; and the first reflected image and the second reflected image projected on the screen. An imaging device that captures a reflected image to acquire a captured image, and an arithmetic processing device that measures the surface of the object to be measured using the captured image, wherein the measurement target of the first linear light The angle of incidence on the object and the angle of incidence of the second linear light on the object to be measured are the same angle φ, and the first reflection area and the second reflection area are in the moving direction of the object to be measured. and are at continuous positions in the width direction of the object to be measured.

A surface measuring apparatus according to the present invention is a surface measuring apparatus for measuring the surface of a moving object to be measured. a second light source that irradiates a second linear light across the width direction of the measuring object; a screen on which the second linear light is reflected by a second reflection region on the surface of the object to be measured and a second reflected image is projected; and the first reflected image and the second reflected image projected on the screen. An imaging device that captures a reflected image to acquire a captured image, and an arithmetic processing device that measures the surface of the object to be measured using the captured image, wherein the measurement target of the first linear light The angle of incidence on the object and the angle of incidence of the second linear light on the object to be measured are the same angle φ, and the first reflection area and the second reflection area are in the moving direction of the object to be measured. and are positioned continuously in the width direction of the object to be measured, and the first light source and the second light source are at the same position at the time of imaging by the imaging device, the first linear light and Any one of the second linear light is irradiated, and the arithmetic processing unit illuminates the object to be measured based on the captured image formed by either the first linear light or the second linear light. Measure the surface of

A surface measuring apparatus according to the present invention is a surface measuring apparatus for measuring the surface of a moving object to be measured. a light source, a second light source that irradiates second linear light having a second wavelength different from the first wavelength over the width direction of the object to be measured, and The first reflected image is projected by being reflected by the first reflection area on the surface of the object to be measured, and the second linear light is reflected by the second reflection area on the surface of the object to be measured to form a second reflection image. a screen on which is projected, an imaging device that captures the first reflected image and the second reflected image projected on the screen, and obtains a captured image; wherein the angle of incidence of the first linear light on the object to be measured and the angle of incidence of the second linear light on the object to be measured are the same angle φ wherein the first reflective area and the second reflective area are at the same position in the moving direction of the object to be measured and are at consecutive positions in the width direction of the object to be measured, and the arithmetic processing device is and measuring the surface of the object to be measured by separating the first wavelength component and the second wavelength component from the captured image.

A surface measuring method of the present invention is a surface measuring method for measuring a surface of a moving object to be measured, wherein a first linear light irradiation step of irradiating a first linear light across the width direction of the object to be measured; a second linear light irradiation step of irradiating the second linear light across the width direction of the object to be measured; a reflected image projecting step of projecting a first reflected image on the surface of the object to be measured, reflecting the second linear light on a second reflection region of the surface of the object to be measured, and projecting the second reflected image on the screen; an image capturing step of capturing the first reflected image and the second reflected image projected onto the image plane by an image capturing device to obtain captured images; and measuring the surface of the object to be measured by an arithmetic processing unit using the captured images. and an arithmetic processing step, wherein the angle of incidence of the first linear light on the object to be measured and the angle of incidence of the second linear light on the object to be measured are the same angle φ, The first reflective area and the second reflective area are located at different positions in the moving direction of the object to be measured, and are continuous in the width direction of the object to be measured.

According to the present invention, when measuring the surface of an object having a wide width, it is possible to prevent the occurrence of an unmeasurable region due to overlapping of the first reflected image and the second reflected image projected on the screen. In addition, it is possible to prevent omission of measurement of the object to be measured without generating an unmeasured region due to no irradiation of light on the object to be measured. Therefore, it is possible to provide a surface measuring device and a surface measuring method capable of reliably measuring a wide surface of an object to be measured.

It is a perspective view for demonstrating the surface measuring method which this inventor examined. FIG. 2 is a perspective view for explaining a problem of the surface measuring method of FIG. 1; FIG. 2 is a plan view for explaining a problem of the surface measuring method of FIG. 1; BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows the surface measuring apparatus of 1st Embodiment typically. It is the top view which looked at FIG. 4A from the upper side. 5 is a side view of the surface measuring device of FIG. 4 and a front view of the screen of FIG. 4; FIG. It is a perspective view which shows the surface measuring device of 2nd Embodiment typically. 7 is a side view of the surface measuring device of FIG. 6 and a front view of the screen of FIG. 6; FIG. It is the side view of a surface measuring device when changing the irradiation position of a 2nd linear light in 2nd Embodiment, and a front view of a screen. It is a front view of the screen which shows the 1st reflected image, the 2nd reflected image, the 3rd reflected image, and the 4th reflected image projected on the screen of the surface measuring device of 2nd Embodiment. It is the perspective view and front view of a screen for demonstrating the surface measuring device of 3rd Embodiment. It is the perspective view and front view of a screen for demonstrating the surface measuring device of 3rd Embodiment. It is a perspective view for demonstrating the surface measuring device of 4th Embodiment.

Embodiments will be described below with reference to the accompanying drawings. Before describing the embodiments, the results of studies conducted by the inventors of the present application will be described.

(Study of surface measurement method based on optical lever)
As shown in FIG. 1, in the surface measurement method based on an optical lever, linear light L emitted from a light source 100 is reflected from the surface of a moving object 200 to be measured. In the surface measurement method, a reflected image 400 of the linear light L reflected by the object 200 to be measured is projected onto the screen 300 arranged to face the light source 100 . Then, the reflected image 400 projected on the screen 300 is imaged by the imaging device 500, and the surface of the object to be measured 200 is measured by analyzing the reflected image 400 in the obtained captured image.

In recent years, there has been a demand for surface measurement of objects having a wide width using such surface measurement methods. However, due to limitations in the optical system or light output, a single light source 100 cannot irradiate linear light having a wide irradiation width with a sufficient power density. I have a problem. Therefore, it is conceivable to use a plurality of light sources to widen the substantial irradiation width of the linear light.

Here, unlike the surface measurement method based on the optical lever, if the light-section method, which is a general surface measurement method, is used, the light-section method irradiates the object to be measured with slit light, Since it is a method that directly measures the reflected light from the surface, it is easy to arrange a plurality of light sources so that a plurality of slit light beams are continuous along the measurement line in the width direction of the object to be measured. can determine the placement of the light source.

On the other hand, in the surface measurement method based on the optical lever as well, as shown in FIG. A method of irradiating with the light L1 and the second linear light L2 can be considered. At this time, the first linear light L1 and the second linear light L2 reflected by the object 200 to be measured spread toward the screen 300 in a fan shape. It partially overlaps with the second reflected image 400b.

As described above, in the surface measurement method based on the optical lever, unlike the light section method, the linear light L is reflected by the object 200 to be measured, and the reflected image 400 projected on the screen 300 is captured and measured. (Fig. 1). Therefore, as shown in FIG. 2, accurate surface measurement of the object 200 to be measured cannot be performed in a region A where the first reflected image 400a and the second reflected image 400b overlap.

On the contrary to FIG. 2, as shown in FIG. 3, the first reflected image 400a and the second reflected image 400b are linearly connected on the screen 300 in the width direction of the object to be measured 200 without overlapping. Thus, it is conceivable to irradiate the first linear light L1 and the second linear light L2 from the first light source 100a and the second light source 100b, respectively. However, in this case, the measurement object 200 is irradiated with the first linear light L1 and the second linear light L2 at the width direction position C where the first linear light L1 and the second linear light L2 are reflected. There is an area B that is not covered. Since the area B of the object to be measured 200 which is not irradiated with light is not subjected to surface measurement, omission of measurement occurs.

In the surface measuring apparatus and the surface measuring method of the embodiments described below, the first reflected image 400a and the second reflected image 400b overlap on the screen 300, making it impossible to perform accurate surface measurement. It is possible to solve the problem that measurement omission occurs in the width direction of the

(First embodiment)
4 and 5 are diagrams schematically showing the surface measuring device 1 of the first embodiment. In the first embodiment, a mode in which the object 5 to be measured moves on a plane will be described as an example.

As shown in FIG. 4A, the surface measuring device 1 of the first embodiment includes a first light source 11 and a second light source 12, a screen 20, an imaging device 30, and an arithmetic processing device 40. The first light source 11 and the second light source 12 emit a first linear light beam L1 from the upstream side of the movement direction MD of the object 5 to be measured to the surface of the belt-like object 5 moving on the plane of the transport line. and the second linear light L2.

The first light source 11 and the second light source 12 have the same configuration. , and a lens unit such as a rod lens. The first light source 11 and the second light source 12 irradiate the surface of the object 5 to be measured by spreading the light emitted from the light source unit over a fan-shaped surface by the lens unit.

The first light source 11 irradiates the first linear light L1 that spreads along the width direction WD orthogonal to the movement direction MD of the object 5 to be measured and has a narrow width in the movement direction MD. Moreover, the second light source 12 irradiates the second linear light L2 that spreads along the width direction WD of the object to be measured 5 and has a narrow width in the moving direction MD. In the present invention, the first light source 11 and the second light source 12 need only emit light that spreads in a fan shape. is also possible.

The screen 20 is provided at a position facing the first light source 11 and the second light source 12, and the first reflected light of the first linear light L1 reflected by the surface of the object 5 to be measured and the second linear light L1. The second reflected light of the shaped light L2 is projected. The screen 20 has, for example, a width large enough to project the first reflected light and the second reflected light corresponding to the entire width of the object 5 to be measured. In addition, the height of the screen 20 varies depending on the shape of the object 5 to be measured, vibration generated as the object 5 is moved, the thickness of the object 5 to be measured, and the like. The projection position of the light is chosen to be at a height above the screen 20 . The object 5 to be measured is, for example, a strip-shaped steel plate made into a thin plate.

The imaging device 30 is, for example, an area camera such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), and is provided at a position facing the screen 20 . The imaging device 30 captures a first reflected image 21 and a second reflected image 22 formed by projecting the first reflected light and the second reflected light onto the screen 20, respectively, and captures the first reflected image 21 and the second reflected image. 22 is acquired.

Here, the imaging device 30 is controlled by the arithmetic processing device 40, and receives a trigger signal for imaging from the arithmetic processing device 40 each time the object 5 to be measured moves a predetermined distance in the movement direction MD. The imaging device 30 sequentially captures images of the projection plane of the screen 20 on which the first reflected image 21 and the second reflected image 22 are projected in response to a trigger signal output from the arithmetic processing device 40, and outputs the acquired captured image. Output to the arithmetic processing unit 40 .

FIG. 4B is a top plan view of the surface measuring device 1 of FIG. 4A. FIG. 4B focuses on the first linear light L1 and the second linear light L2, and the imaging device 30 and the arithmetic processing device 40 are omitted. As shown in FIGS. 4A and 4B, in the surface measuring apparatus 1 of the first embodiment, the first light source 11 and the second light source 12 arranged above the object to be measured 5 moving on the plane They are arranged at mutually different positions in the moving direction MD of the object 5 .

The first light source 11 and the second light source 12 irradiate the first linear light L1 and the second linear light L2 to mutually different positions in the moving direction MD of the object 5 to be measured by adjusting the arrangement position. As a result, the first reflection area Lx where the first linear light L1 is reflected by the object 5 to be measured and the second reflection area Ly where the second linear light L2 is reflected by the object 5 to be measured are different from each other. Different positions are obtained in the upper moving direction MD. In the example of FIGS. 4A and 4B, the position (hereinafter referred to as the second reflection position) R2 in the movement direction MD of the second reflection region Ly where the second linear light L2 is reflected on the object 5 to be measured is Upstream in the movement direction MD of the object 5 to be measured from the position (hereinafter referred to as the first reflection position) R1 in the movement direction MD of the first reflection region Lx where the first linear light L1 is reflected on the measurement object 5 located on the side.

A band-shaped first reflected image 21 is projected on the screen 20 by reflecting the first linear light L1 on the first reflection area Lx of the object 5 to be measured. Similarly, the second linear light L2 is reflected by the second reflection area Ly of the object 5 to be measured, so that a strip-shaped second reflected image 22 is projected on the screen 20 .

The right side of FIG. 5 shows a side view of the surface measuring device 1 of FIG. 4A, and the left side of FIG. 5 shows a front view of the screen 20 . As shown in FIG. 5, the incident angle of the first linear light L1 to the measured object 5 is set to the same angle φ as the incident angle of the second linear light L2 to the measured object 5 . Here, the incident angle φ is the angle between the surface normal to the surface of the object to be measured 5 and the optical axis of the first linear light L1 (second linear light L2).

Further, as described above, in the case of the present embodiment, the second linear light L2 is positioned upstream of the first linear light L1 in the moving direction MD of the object 5 to be measured (a position away from the screen 20). shows an example of reflection at . Therefore, the distance (d+p) between the second reflection area Ly of the second linear light L2 and the projection plane of the screen 20 on the movement direction MD is the distance between the first reflection area Lx of the first linear light L1 and the screen 20 It is longer than the distance d from the projection surface in the moving direction MD by the distance (interval p) that separates the second reflection area Ly from the screen 20 .

Therefore, the second reflected image 22 projected on the screen 20 by reflecting the second linear light L2 from the object 5 to be measured is the screen 20 by reflecting the first linear light L1 from the object 5 to be measured. is projected at a position above the screen 20 with a shift from the first reflected image 21 projected onto the screen 20 .

As shown in FIG. 4B, the first reflection area Lx where the first linear light L1 is reflected and the second reflection area Ly where the second linear light L2 is reflected are located in the moving direction MD of the object 5 to be measured. The positions are shifted upstream and downstream.

In the first embodiment, the first linear light L1 is arranged between the first reflection region Lx and the second reflection region Ly so as not to cause a non-measurement portion where the surface is not measured in the width direction WD of the object 5 to be measured. and an end E1 on the side closer to the second reflection region Ly among both ends of the first reflection region Lx, and a side closer to the first reflection region Lx among both ends of the second reflection region Ly of the second linear light L2 is arranged at the same position in the width direction WD of the object 5 to be measured. That is, when the first reflection region Lx and the second reflection region Ly are combined, the second reflection region Ly is obtained from the end E2 of the first reflection region Lx farther from the second reflection region Ly in the object 5 to be measured. Of the two end portions of the region Ly, the regions from the first reflective region Lx to the far end E4 are continuous in the width direction WD.

In the above-described first embodiment, E1 and E3 are arranged at the same position in the width direction WD, and there is no gap between the first reflection area Lx and the second reflection area Ly in the width direction WD. Although continuous, the present invention is not limited to this. For example, by arranging the first reflection region Lx and the second reflection region Ly in the width direction WD so that E1 and E3 partially overlap each other when viewed in the width direction WD, The first reflection area Lx and the second reflection area Ly may be continuous.

Specifically, the second light source 12 is arranged upstream in the movement direction MD of the object 5 to be measured, or moved in the width direction WD, so that the second reflection region Ly in the width direction WD becomes the first It may extend to the region of the reflective region Lx. Conversely, by arranging the first light source 11 further upstream in the movement direction MD of the object 5 to be measured or by moving it in the width direction WD, the first reflection region Lx in the width direction WD becomes the second reflection region Lx. You may make it spread even to the area|region of the area|region Ly.

In FIGS. 4A and 4B, two light sources, the first light source 11 and the second light source 12, irradiate a predetermined region in the width direction WD of the object 5 to be measured with the first linear light L1 and the second linear light L2. , the linear light is not irradiated to both end sides of the object 5 to be measured. However, in practice, it is desirable to irradiate the entire width direction WD of the object to be measured 5 with linear light, and for example, the number of light sources and the width of the linear light are adjusted.

Then, as shown in FIG. 4A, the imaging device 30 captures the first reflected image 21 and the second reflected image 22 projected on the screen 20 to obtain the captured images.

The imaging device 30 is connected to the arithmetic processing device 40 and outputs captured images obtained by imaging the first reflected image 21 and the second reflected image 22 on the screen 20 to the arithmetic processing device 40 . The arithmetic processing unit 40 performs image processing using the captured images of the first reflected image 21 and the second reflected image 22 to calculate the surface shape and the like of the object 5 to be measured, and measures the surface of the object 5 to be measured.

In this embodiment, the angle of incidence of the first linear light L1 on the object to be measured 5 and the angle of incidence of the second linear light L2 on the object to be measured 5 are the same angle φ. , the positions at which the first linear light L1 and the second linear light L2 are reflected (that is, the first reflection area Lx and the second reflection area Ly) are shifted from each other in the moving direction MD of the object 5 to be measured. . As a result, the first reflected image 21 and the second reflected image 22 can be projected on the screen 20 in a separated state without overlapping each other. Therefore, in the captured image acquired by the imaging device 30, the first reflected image 21 and the second reflected image 22 overlap each other in the height direction z of the screen 20 corresponding to the moving direction MD of the object 5 to be measured. The image is taken in a state far away from the camera. In this captured image, the first reflected image 21 and the second reflected image 22 are captured so as to overlap each other in the width direction x of the screen 20 corresponding to the width direction WD of the object 5 to be measured.

Therefore, in the surface measuring apparatus 1, even if the first light source 11 and the second light source 12 are used to measure the surface of the object 5 having a wide width, the first reflected image 21 and the second reflected image 22 are The first reflected image 21 and the second reflected image 22 do not overlap in the height direction z on the screen 20, and the first reflected image 21 and the second reflected image 22 partially overlap in the width direction x of the screen 20, resulting in measurement omission in the width direction WD of the object 5 to be measured. It is possible to obtain a captured image without

The arithmetic processing unit 40 of the present embodiment measures the surface of the object 5 to be measured based on the captured image acquired by the imaging device 30, such as changes in shape due to unevenness of the surface, surface roughness, and the like. can be done.

The arithmetic processing unit 40 measures the surface shape of the object 5 to be measured, for example, as follows. If the surface of the object to be measured 5 irradiated with the first linear light L1 and the second linear light L2 has an inclined surface, the first linear light L1 and the second linear light L2 are inclined at the inclined surface. The reflection angle changes according to the angle. According to the principle of the known light section method, the change in the angle of reflection appears as the amount of displacement from the reference position of the first linear light L1 and the second linear light L2. And the position of the second reflected image 22 on the screen 20 moves up and down according to the amount of displacement.

The arithmetic processing unit 40 detects the surface change by detecting the positions of the first reflected image 21 and the second reflected image 22 on the screen from the captured image obtained by capturing the image on the screen 20 .

In the surface measuring apparatus 1 of the present embodiment, as described above, the first reflected image 21 projected on the screen 20 and the second reflected image 22 projected on the screen 20 are projected in a separated state without overlapping. need to be Next, conditions for setting the first reflected image 21 and the second reflected image 22 so that they do not overlap on the screen 20 will be described.

As shown in the front view of the screen 20 in FIG. 5, in order to prevent the first reflected image 21 and the second reflected image 22 from overlapping on the screen 20, the following conditions must be satisfied. Here, the first linear light L1 and the second linear light L2 extending along the width direction WD (FIGS. 4A and 4B) of the object to be measured 5 are reflected on the surface of the object to be measured 5, They are projected onto the screen 20 as a first reflected image 21 and a second reflected image 22 extending along the width direction x of the screen 20 .

Here, on the screen 20, the displacement of the first reflection area Lx and the second reflection area Ly in the movement direction MD of the object 5 to be measured is the first reflection image 21 and the second reflection image 21 in the height direction z of the screen 20. This appears as a shift in the position of the reflected image 22 . Further, the positional deviation of the first reflection area Lx and the second reflection area Ly in the width direction WD of the object to be measured 5 is the first reflection image 21 and the second reflection image in the width direction x of the screen 20 on the screen 20. 22 position shifts.

In order to prevent the first reflected image 21 and the second reflected image 22 from overlapping in the height direction z of the screen 20 corresponding to the moving direction MD of the object 5 to be measured, the first reflected image 21 and the second reflected image The distance Δz between the image 22 and the screen 20 must satisfy the following formula (3).

Here, the range in which the positions of the first reflected image 21 and the second reflected image 22 may change on the screen 20 due to measurement variation or the like and may be projected on the screen 20 is referred to as a change range ER1. do. w is the width (length) in the height direction z of the screen 20 of the variation range ER1, and indicates the variation width in the height direction z of each of the first reflected image 21 and the second reflected image 22 . The variation range ER1 is the variation range of the first reflected image 21 or the second reflected image 22 generated in the height direction z of the screen 20 due to the assumed shape change and vibration of the object 5 to be measured. The line width (thickness) of the first reflected image 21 or the second reflected image 22 in the direction z can be included.

As is clear from the fact that the first reflected image 21 and the second reflected image differ in distance from the first reflection area Lx or the second reflection area Ly to the screen 20, the first light source 11 and the second light source The reflected light from 12 is projected onto the screen at different magnifications. Therefore, strictly speaking, the width of the variation range ER1 of the first reflected image 21 in the height direction z and the width of the variation range ER1 of the second reflected image 22 in the height direction z should be different values. . However, when d>>p, the difference between these values can be regarded as extremely small, so here, it is assumed that both fluctuation ranges are the same ER1, and the fluctuation width is the same w. . On the other hand, it is also possible to use different values as appropriate. In that case, it is preferable to set the value of the larger fluctuation range to w.

In this embodiment, the distance Δz between the first reflected image 21 and the second reflected image 22 is defined as the distance between the first reflected image 21 and the second reflected image 22 projected on the screen 20 in the height direction z. Although the distance is Δz, the present invention is not limited to this. For example, the distance between the center position of the variation range ER1 of the first reflected image 21 in the height direction z of the screen 20 and the center position of the variation range ER1 of the second reflected image 22 in the height direction z of the screen 20 is The distance Δz between the first reflected image 21 and the second reflected image 22 may be used.

The line width of the first reflected image 21 in the height direction z of the screen 20 can be determined, for example, by the distance d from the position of the first reflection area Lx in the moving direction MD to the position of the screen 20 in the moving direction MD. . The value of the variation width w of the first reflected image 21 assumed for the object 5 to be measured can be determined in advance from past operation data or the like in which the surface measurement was performed using the object 5 to be measured.

The line width of the second reflected image 22 in the height direction z of the screen 20 is determined, for example, by the distance (d+p) from the position of the second reflection area Ly in the moving direction MD to the position of the screen 20 in the moving direction MD. be able to. The value of the variation width w of the second reflected image 22 assumed for the object 5 to be measured can be determined in advance from past operational data or the like in which the surface measurement was performed using the object 5 to be measured.

The distance Δz between the first reflected image 21 and the second reflected image 22 in the height direction z of the screen 20 is the distance p in the movement direction MD between the first reflection area Lx and the second reflection area Ly and the first linear light The angle φ of the incident angle of L1 with respect to the object 5 to be measured (hereinafter simply referred to as the incident angle φ) is used to express the following equation (4). In the case of the present embodiment, the angle of incidence of the second linear light L2 with respect to the object 5 to be measured is φ, which is the same as the angle of incidence φ with respect to the object 5 to be measured of the first linear light L1.

Therefore, from the above equation (4), the equation (3) can be expressed as the following equation (5), and the following equation (6) can be obtained.

As described above, in order to prevent the first reflected image 21 and the second reflected image 22 from overlapping each other, the first light source 11 and the second light source 12 should be arranged so as to satisfy the relationship of Expression (6). Specifically, the first reflection area Lx on the measurement target 5 of the first linear light L1 emitted from the first light source 11 and the coverage of the second linear light L2 emitted from the second light source 12 are shown. The distance p between the second reflection region Ly on the measurement object 5 is adjusted, and the first linear light L1 and the second linear light L1 and the second linear light emitted from the first light source 11 and the second light source 12 to the measurement object 5 are adjusted. The incident angle φ of L2 may be adjusted.

Equation (6) above defines the lower limit for preventing the first reflected image 21 and the second reflected image 22 from overlapping each other. For example, in FIG. 5, when the second reflection area Ly is further shifted to a position on the upstream side in the moving direction MD (that is, the side away from the screen 20), the second reflected image 22 on the screen 20 becomes the first reflected image 21 is projected to a position further upward from .

At this time, the line width of the second reflected image 22 increases and the luminance decreases. As the upper limit of the distance when separating the second reflected image 22 and the first reflected image 21, the brightness of the second reflected image 22 on the screen 20 is the brightness of the first reflected image 21 on the screen 20. It is desirable to go up to a distance that drops to 80%. If the brightness of the second reflected image 22 falls below 80% of the brightness of the first reflected image 21, the analysis accuracy of the second reflected image 22 in the captured image decreases, and the surface shape of the object 5 to be measured decreases. This is because the measurement accuracy is degraded.

(Action and effect of the first embodiment)
As described above, in the surface measuring apparatus 1, the first reflection area Lx and the second reflection area Ly are different positions in the movement direction MD of the object 5 to be measured, The first linear light L1 and the second linear light L2 are irradiated so that the first reflective region Lx and the second reflective region Ly are continuous (the first linear light irradiation step and the second linear light irradiation process). A first reflected image 21 is projected onto the screen 20 by reflecting the first linear light L1 from the first reflection region Lx on the surface of the object 5 to be measured, and the second linear light L2 is projected onto the object 5 to be measured. A second reflected image 22 is projected by being reflected by the second reflection area Ly on the surface (reflected image projection step). In the surface measuring apparatus 1, the imaging device 30 captures the first reflected image 21 and the second reflected image 22 on the screen 20 (imaging step), and the arithmetic processing device 40 uses the obtained captured images to measure the object to be measured. 5 surface is measured (calculation process).

As described above, in the surface measuring apparatus 1, the first light source 11 and the second light source 11 are arranged such that the first linear light L1 and the second linear light L2 are reflected at different positions in the movement direction MD of the object 5 to be measured. Since the two light sources 12 are arranged, the first reflected image 21 and the second reflected image 22 are projected on the screen 20 so as not to overlap each other. Therefore, even if the first light source 11 and the second light source 12 are arranged to measure the surface of the object 5 having a wide width, the first reflected image 21 and the second reflected image 22 projected on the screen 20 It is possible to prevent the occurrence of an area that cannot be measured due to the overlap of .

Further, in the surface measuring apparatus 1, the first light source 11 and the second light source 11 and the second light source 11 are arranged so that the first linear light L1 and the second linear light L2 are reflected at successive positions in the width direction WD of the object 5 to be measured. Since the light source 12 is arranged, an unmeasured area is not generated between the first reflection area Lx and the second reflection area Ly in the width direction WD of the object 5 to be measured. It is possible to prevent omission of measurement of the measurement target. Therefore, the entire surface of the object to be measured 5 having a wide width can be reliably measured.

In this embodiment, the case where two light sources, the first light source 11 and the second light source 12, are provided has been described, but the present invention is not limited to this. For example, in addition to the first light source and the second light source, three or more light sources such as a third light source and a fourth light source may be provided. In this case, a reflected image appears on the screen 20 as much as the number of light sources is increased. In such a case, another light source such as a third light source or a fourth light source may be arranged so that the relationship shown in the above equation (6) is satisfied between the reflected images.

Furthermore, in the above-described first embodiment, the case where the first light source 11 and the second light source 12 are arranged on the upstream side in the moving direction MD and the screen 20 is arranged on the downstream side in the moving direction MD has been described. The invention is not limited to this. For example, the first light source 11 and the second light source 12 may be arranged on the downstream side in the moving direction MD, and the screen 20 may be arranged on the upstream side in the moving direction MD.

(Second embodiment)
6 and 7 are diagrams for explaining the surface measuring device 1a of the second embodiment. In the second embodiment, an aspect in which the object 5 to be measured is moved while being curved along the upper curved surface of the roller 50 will be described as an example. As shown in FIG. 6, in the surface measuring apparatus 1a of the second embodiment, the object 5 to be measured is moved while being pressed against the upper curved surface of the roller 50 for the purpose of preventing vibration during movement of the object 5 to be measured. It is different from the above-described first embodiment in that

A tension is applied to the object 5 to be measured, and the object 5 to be measured moves in the movement direction MD while forming a curved surface D by contacting the curved surface of the roller 50 . Then, surface measurement of the object 5 to be measured is performed on the curved surface D of the object 5 to be measured formed by the curved surface of the roller 50 . Since the other elements of the surface measuring device 1a of the second embodiment are the same as those of the surface measuring device 1 of the first embodiment, the same parts are denoted by the same reference numerals and the description thereof is omitted. The following description will focus on the different configuration.

A first light source 11 and a second light source 12 are arranged above the vertex of the curved surface of the roller 50 so as to face the screen 20 in the surface measuring apparatus 1a. In this embodiment, the first light source 11 and the second light source 12 are arranged upstream in the moving direction MD of the object 5 to be measured, and the screen 20 is arranged downstream in the moving direction MD of the object 5 to be measured. are placed. Between the first light source 11 and the second light source 12 and the screen 20, the vertex of the curved surface of the roller 50 is positioned.

In the case of the second embodiment, the first linear light L1 emitted from the first light source 11 is reflected by the first reflection area Lx of the curved surface D of the object 5 to be measured. For example, when the top of the curved surface of the roller 50 is used as a reference position for height, the first light source 11 is arranged at a position higher than this reference position and upstream of the reference position in the moving direction MD. . The first light source 11 irradiates the curved surface of the object 5 to be measured at the top of the curved surface of the roller 50 with the first linear light L1 across the width direction WD of the object to be measured 5 (first linear light L1). light irradiation step).

On the other hand, the second light source 12 is arranged at a position higher than the reference position and lower than the height position of the first light source 11, and is upstream of the reference position in the moving direction MD, similarly to the first light source 11. placed on the side. The second light source 12 emits the second linear light beam across the width direction WD of the measured object 5 at a position different from the position where the first linear light beam L1 is irradiated on the curved surface of the measured object 5. L2 is irradiated (second linear light irradiation step). The second linear light L2 emitted from the second light source 12 is reflected by a second reflected light L2 positioned upstream in the movement direction MD of the object 5 to be measured (that is, on the side away from the screen 20) relative to the first reflection area Lx. It reflects in the area Ly.

Here, the angle of incidence of the first linear light L1 on the object to be measured 5 and the angle of incidence of the second linear light L2 on the object to be measured 5 are the same angle φ, and the first light source 11 and the second light source Reference numeral 12 designates the first reflection region Lx and the second reflection region Ly at different positions in the movement direction MD of the object 5 to be measured, and the first reflection region Lx and the second reflection region Ly in the width direction WD of the object 5 to be measured. The irradiation positions of the first linear light L1 and the second linear light L2 are set so as to be continuous with the two reflection areas Ly without a gap. As a result, in the second embodiment, similarly to the above-described first embodiment, an unmeasured area is generated between the first reflection area Lx and the second reflection area Ly in the width direction WD of the object 5 to be measured. Therefore, it is possible to continuously measure the surface of the object 5 in the width direction WD without interruption.

The first linear light L is reflected by the first reflection area Lx of the object 5 to be measured, and a strip-shaped first reflected image 21 is projected on the screen 20 . Similarly, the second linear light L2 is reflected by the second reflection area Ly of the object 5 to be measured, and a second strip-shaped reflected image 22 is projected onto the screen 20 (reflected image projection step).

The right side of FIG. 7 shows the side view of FIG. 6, and the left side of FIG. 7 shows the front view of the screen 20. As shown in FIG. As shown in FIG. 7, the incident angle φ of the first linear light L1 to the measured object 5 is set to be the same as the incident angle φ of the second linear light L2 to the measured object 5 . Therefore, in the case of the second embodiment, the displacement between the first reflective area Lx and the second reflective area Ly on the surface of the object 5 can be achieved by changing the arrangement positions of the first light source 11 and the second light source 12. is adjusted by

In the case of the second embodiment, as described above, the second light source 12 has the second reflection area upstream in the moving direction MD of the object 5 to be measured from the first reflection area Lx where the first linear light L1 is reflected. The height position is set so that Ly is positioned.

In this way, the second reflection area Ly is on the upstream side farther from the screen 20 than the first reflection area Lx, so that the distance between the second reflection area Ly and the screen 20 is longer than the distance to Therefore, the second reflected image 22 projected on the screen 20 by reflecting the second linear light L2 from the second reflection region Ly of the object 5 to be measured is the first linear light L1 of the object 5 to be measured. It is located above the first reflected image 21 projected on the screen 20 by being reflected by the first reflection area Lx in the height direction z of the screen 20 .

That is, the displacement of the first reflection area Lx and the second reflection area Ly in the movement direction MD of the object 5 to be measured is, on the screen 20, the first reflection image 21 and the second reflection in the height direction z of the screen 20. This appears as a shift in the position of the image 22 . Note that the displacement of the first reflection area Lx and the second reflection area Ly in the width direction WD of the object to be measured 5 is the first reflection image 21 and the second reflection image in the width direction x of the screen 20 on the screen 20. 22 position shifts.

As shown in the front view of the screen 20 on the left side of FIG. The distance Δz between the first reflected image 21 and the second reflected image 22 must satisfy the equation (3) explained in the first embodiment. Here, the case where the first linear light L1 is irradiated to the object 5 to be measured at the top of the curved surface of the roller 50 and the first reflection area Lx is present at the top of the curved surface of the roller 50 will be described below. R1 indicates the position (first reflection position) of the first reflection area Lx in the movement direction MD, and R2 indicates the position (second reflection position) of the second reflection area Ly in the movement direction MD.

Here, z ⁰ shown in FIG. 7 indicates the height position of the first reflected image 21 projected onto the screen 20 . Specifically, ^z0 indicates the height position ^z0 of the first reflected image 21 in the height direction z of the screen 20, using the top of the curved surface of the roller 50 as a reference position for height.

In the present embodiment, the height position ^z0 of the first reflected image 21 is the height position of the first reflected image 21 projected onto the screen 20, but the present invention is limited to this. do not have. For example, the top of the curved surface of the roller 50 may be used as the reference position for height, and the center of the variation range ER1 of the first reflected image 21 on the screen 20 may be set as the height position ^z0 of the first reflected image 21 . The variation range ER1 of the first reflected image 21 is the variation range of the first reflected image 21 generated in the height direction z of the screen 20 due to the assumed shape change and vibration of the object 5 to be measured. The line width (thickness) of the first reflected image 21 in the direction z can be included.

In the second embodiment, similarly to the first embodiment, when d>>r·sin θ (where r is the radius of the roller 50 and θ is the opening angle (described later)), these values are Since the difference can be considered to be extremely small, here, it is assumed that both fluctuation ranges are the same ER1, and the fluctuation width is the same w. On the other hand, it is also possible to use different values as appropriate. In that case, it is preferable to set the value of the larger fluctuation range to w.

z ⁺ shown in FIG. 7 indicates the height position of the second reflected image 22 projected on the screen 20 . Specifically, z 1 ⁺ indicates the height position z 1 ⁺ of the second reflected image 22 in the height direction z of the screen 20 with the top of the curved surface of the roller 50 as the reference position for height.

In the present embodiment, the height position z ⁺ of the second reflected image 22 indicates the height position of the second reflected image 22 projected onto the screen 20, but the present invention is limited to this. do not have. For example, the top of the curved surface of the roller 50 may be used as the reference position for height, and the center of the variation range ER1 of the second reflected image 22 on the screen 20 may be set as the height position z ⁺ of the second reflected image 22 . The variation range ER2 of the second reflected image 22 is the variation range of the second reflected image 22 generated in the height direction z of the screen 20 due to the assumed shape change and vibration of the object 5 to be measured. The line width (thickness) of the second reflected image 22 in the direction z can be included.

In the case of the present embodiment, the second reflection area Ly is shifted upstream in the movement direction MD by the opening angle θ from the first reflection area Lx. As a result, z ⁺ >z ⁰ in the height direction z of the screen 20 .

The opening angle θ is defined by the radius line r1 connecting the center of the cross-sectional circle of the roller 50 from the first reflection region Lx where the first linear light L1 is reflected by the object 5 to be measured, and the second linear light L1 by the object 5 to be measured. It is the angle between the second reflection area Ly where L2 is reflected and the radius line r2 connecting the center (that is, the angle at which the radius lines r1 and r2 intersect at the center of the cross-sectional circle of the roller 50). Here, using the height position z ⁺ of the first reflected image 21 and the height position z ⁰ of the second reflected image 22, the first reflected image 21 and the second reflected image in the height direction z of the screen 20 The distance Δz to the image 22 can be represented by the following equation (7).

FIG. 7 shows a case where the vertex of the roller 50 is used as a height reference position, and the first linear light L1 is irradiated to the first reflection region Lx of the vertex of the roller 50. The position is not necessarily limited to the vertex of roller 50 . For example, even if the opening angle θ is obtained based on the position on the measured object 5 that has moved a predetermined distance upstream or downstream in the movement direction MD from the vertex of the roller 50, the following explanation holds.

Here, the vertex of the roller 50 is defined as a reference position for height, and the distance from the vertex (the first reflection area Lx of the first linear light L1) to the projection plane of the screen 20 on the tangential line at the reference position be d. Further, if the incident angle between the surface normal of the tangential line of the first reflection region Lx of the object 5 to be measured and the optical axis of the first linear light L1 is φ, the distance d and the incident angle φ The height position ^z0 of the reflected image 21 is represented by the following formula (8).

The incident angle between the surface normal of the tangential line to the second reflection region Ly of the object to be measured 5 and the optical axis of the second linear light L2 is also assumed to be the same as the incident angle φ of the first linear light. Assuming that the radius of 50 is r, the height position z 1 ⁺ of the second reflected image 22 is expressed by Equation (9) below. Here, since the opening angle θ is 2 degrees or less and is very small, the assumption that the opening angle θ is very small is used in Equation (9).

Using the above equations (7) and (9), the following equation (10) is obtained.

Therefore, the following formula (11) is obtained by combining the above formula (10) and formula (3).

In the second embodiment, in order to prevent the first reflected image 21 and the second reflected image 22 from overlapping each other, the first light source 11, the second light source 12 and the screen are arranged so as to satisfy the relationship of expression (11). 20 position or the like may be set. Specifically, the angle of incidence of the first linear light L1 on the object to be measured 5 and the angle of incidence of the second linear light L2 on the object to be measured 5 are the same angle φ. When the incident angle φ and the distance d of L1 and the second linear light L2 are set in advance, the opening angle θ between the first light source 11 and the second light source 12 satisfies the relationship of formula (11). should be set as follows.

Equation (11) above defines the lower limit for preventing the first reflected image 21 and the second reflected image 22 from overlapping each other. The upper limit value at which the first reflected image 21 and the second reflected image 22 can be kept apart is defined as follows. As shown in FIG. 7, when the vertex of the roller 50 is the zero height point (reference position of height) and the height position of the upper end of the screen 20 is h, the second reflected image 22 does not come off the screen 20. Therefore, the height position z ⁺ of the second reflected image 22 must be set lower than the height position h of the screen 20 . Therefore, the upper limit is the height position z ⁺ of the second reflected image 22 <the height position h of the upper end of the screen 20 (z ⁺ < h).

FIG. 8, in which the same parts as in FIG. 7 are denoted by the same reference numerals, shows another embodiment, in which the second reflection region Ly in which the second linear light L2 is reflected by the object 5 to be measured is An embodiment when the MD is changed to the downstream side (the side closer to the screen 20) is shown. That is, the second reflection region Ly is shifted toward the screen 20 by the opening angle θ from the first reflection region Lx (reference position) where the first linear light L1 from the first light source 11 is reflected by the object 5 to be measured. Aspects are shown. In this embodiment, the height position z ⁻ of the second reflected image 22 projected onto the screen 20 is obtained from the following equation (12).

Using the above equations (7) and (12), the above equation (10) is obtained, and in the embodiment shown in FIG. 8, similarly to the embodiment shown in FIG. Equation (11) above is obtained.

Even when the second reflection area Ly, in which the second linear light L2 is reflected by the object 5 to be measured, is shifted from the reference position (the first reflection area Lx) toward the screen 20 by the opening angle θ, the formula (11) is satisfied. , the first light source 11 and the second light source 12 may be arranged. Specifically, when the incident angle φ and the distance d of the first linear light L1 and the second linear light L2 are set in advance, the opening angle θ between the first light source 11 and the second light source 12 is should be set so as to satisfy the expression (11).

In the embodiment shown in FIG. 8 as well, the above formula (11) defines the lower limit for preventing the first reflected image 21 and the second reflected image 22 from overlapping each other. The upper limit of the distance between the first reflected image 21 and the second reflected image 22 is defined as follows.

As shown in FIG. 8, when the vertex of the roller 50 is the zero height point (reference position of height) and the height position of the lower end of the screen 20 is hx, the second reflected image 22 does not come off the screen 20. Therefore, the height position z ⁻ of the second reflected image 22 must be set higher than the height position hx of the lower end of the screen 20 . Therefore, the upper limit of the distance between the first reflected image 21 and the second reflected image 22 is the height position z ⁻ of the second reflected image 22 >the height position hx of the lower end of the screen 20 (z ⁻ >hx).

The imaging device 30 captures the first reflected image 21 and the second reflected image 22 on the screen 20 (imaging step), and outputs the acquired captured image to the arithmetic processing device 40 . The arithmetic processing unit 40 performs image processing using the captured images of the first reflected image 21 and the second reflected image 22 to calculate the surface shape and the like of the measured object 5 and measure the surface of the measured object 5 ( calculation process). Note that the surface measurement of the object 5 to be measured by the arithmetic processing unit 40 is the same as in the first embodiment described above, so description thereof will be omitted here.

In the present embodiment, as shown in FIGS. 6 to 8 described above, the mode in which the first light source 11 and the second light source 12 are used as light sources has been described as an example, but the present invention is not limited to this. For example, in addition to the first light source and the second light source, three or more light sources such as a third light source and a fourth light source may be provided. In this case, a reflected image appears on the screen 20 as much as the number of light sources is increased. In such a case, another light source such as a third light source or a fourth light source may be arranged so that the relationship shown in the above equation (11) is satisfied between the reflected images.

Here, in the embodiment as shown in FIG. 7, in addition to the first light source 11 and the second light source 12, a third light source and a fourth light source are further installed to form four first reflected images 21, An example in which the second reflected image 22, the third reflected image, and the fourth reflected image are projected will be described below with reference to FIG. FIG. 9 shows a front view of the screen 20. FIG.

In FIG. 9, the first reflected image 21 represents an image projected on the screen 20 by reflecting the first linear light L1 from the first light source 11 on the curved surface D of the object 5 to be measured. An image 22 represents an image projected on the screen by reflecting the second linear light L2 from the second light source 12 on the curved surface D of the object 5 to be measured. A third reflected image 23 is an image projected on the screen 20 by reflecting the third linear light from a third light source (not shown) on the curved surface D of the object 5 to be measured. shows an image projected on the screen 20 by reflecting the fourth linear light from the fourth light source (not shown) on the curved surface D of the object 5 to be measured. The incident angles of the third linear light and the fourth linear light are also set to be the same incident angle φ as the first linear light L1 and the second linear light L3.

As shown in FIG. 9, at the position P1 of the screen 20, the first reflected image 21 and the second reflected image 22 exist in the height direction z of the screen 20. As shown in FIG. At this time, in order to prevent the first reflected image 21 and the second reflected image 22 from overlapping in the height direction z of the screen 20, for example, the incidence of the first linear light L1 and the second linear light L2 When the angle φ and the distance d are set in advance, the opening angle θ (FIGS. 7 and 8) between the first light source and the second light source is set so as to satisfy the relationship of the above equation (11). be.

At the position P2 of the screen 20, the first reflected image 21, the second reflected image 22, and the third reflected image 23 are present in the height direction z of the screen 20. FIG. At this time, in order to prevent the first reflected image 21, the second reflected image 22, and the third reflected image 23 from overlapping in the height direction z of the screen 20, for example, the first linear light L1, the second When the incident angle φ and the distance d of the linear light L2 and the third linear light are set in advance, the opening angle θ between the first light source and the second light source and the angle between the second light source and the third light source are and the opening angle θ between the first light source and the third light source (FIGS. 7 and 8) are set so as to satisfy the relationship of the above equation (11).

At the position P3 of the screen 20, the second reflected image 22 and the third reflected image 23 are present in the height direction z of the screen 20. As shown in FIG. At this time, in order to prevent the second reflected image 22 and the third reflected image 23 from overlapping in the height direction z of the screen 20, for example, the incident angles of the second linear light L2 and the third linear light When φ and the distance d are set in advance, the opening angle θ (FIGS. 7 and 8) between the second light source and the third light source is set so as to satisfy the relationship of the above equation (11). .

At the position P4 of the screen 20, the second reflected image 22, the third reflected image 23, and the fourth reflected image 24 are present in the height direction z of the screen 20. FIG. At this time, in order to prevent the second reflected image 22, the third reflected image 23, and the fourth reflected image 24 from overlapping in the height direction z of the screen 20, for example, the second linear light L2, the third When the incident angle φ and the distance d of the linear light and the fourth linear light are set in advance, the opening angle θ between the second light source and the fourth light source and the opening angle θ between the second light source and the third light source are The opening angle θ between the third light source and the opening angle θ between the third light source and the fourth light source (FIGS. 7 and 8) are set so as to satisfy the relationship of the above equation (11).

The description of FIG. 9 is similarly applied to the first embodiment in which the object to be measured 5 of the first embodiment moves on a plane. In the second embodiment, the opening angle θ (FIGS. 7 and 8) is set. An interval p (FIG. 5) between the first reflection area Lx and the second reflection area Ly on the object 5 can be set.

(Actions and effects of the second embodiment)
With the above configuration, in the surface measuring apparatus 1a according to the second embodiment, the first reflection area Lx and the second reflection area Ly are at different positions in the moving direction MD of the object to be measured 5 having the curved surface D, and The first linear light L1 and the second linear light L2 are applied so that the first reflection area Lx and the second reflection area Ly are continuous in the width direction WD of the object 5 .

In this way, even when measuring the surface of the object 5 to be measured on which the curved surface D is formed, the surface measuring apparatus 1a uses the first linear light L1 and the second linear light L2 to control the movement of the object 5 to be measured. Since the first light source 11 and the second light source 12 are arranged so that they are reflected at different positions in the direction MD, the first reflected image 21 and the second reflected image 22 are projected so as not to overlap on the screen 20. can. Therefore, even if the first light source 11 and the second light source 12 are arranged to measure the surface of the object 5 having a wide width, the first reflected image 21 and the second reflected image 22 projected on the screen 20 It is possible to prevent the occurrence of an area that cannot be measured due to overlapping.

Also, in the surface measuring apparatus 1a, the first light source 11 and the second light source 11 and the second light source 11 are arranged so that the first linear light L1 and the second linear light L2 are reflected at successive positions in the width direction WD of the object 5 to be measured. Since the light source 12 is arranged, an unmeasured area is not generated between the first reflection area Lx and the second reflection area Ly in the width direction WD of the object 5 to be measured. It is possible to prevent omission of measurement of the measurement target. Therefore, even the curved surface of the object 5 to be measured having a wide width can be reliably measured over the entire surface.

In the above-described second embodiment, the case where the first light source 11 and the second light source 12 are arranged on the upstream side in the moving direction MD and the screen 20 is arranged on the downstream side in the moving direction MD has been described. The invention is not limited to this. For example, the first light source 11 and the second light source 12 may be arranged on the downstream side in the moving direction MD, and the screen 20 may be arranged on the upstream side in the moving direction MD.

(Third embodiment)
10A and 10B are diagrams for explaining the surface measuring device 1b of the third embodiment. The surface measuring apparatus 1b applies a first linear light L1 and a second linear light L2 from the upstream side of the movement direction MD of the object 5 to be measured to the surface of the object 5 moving on the plane of the transport line. It has a first light source 11 and a second light source 12 for irradiation.

Here, the incident angle of the first linear light L1 to the measured object 5 and the incident angle of the second linear light L2 to the measured object 5 are the same angle. Note that the definition of the incident angle is the same as the incident angle φ in the above-described first embodiment, so the description thereof will be omitted here. In addition, a first reflection region Lx is a position where the first linear light L1 is reflected on the surface of the object 5 to be measured, and a second reflection region Lx is a position where the second linear light L2 is reflected on the surface of the object 5 to be measured. The reflective areas Ly are at the same position in the moving direction MD of the object 5 to be measured and at continuous positions in the width direction WD of the object 5 to be measured.

As a result, in the third embodiment, the first reflected image 21 and the second reflected image 22 are projected on the screen 20 by reflecting the first linear light L1 and the second linear light L2 from the object 5 to be measured. are projected to a position overlapping in the height direction z of the screen 20 and partially overlapping in the width direction x of the screen 20 .

However, in the third embodiment, by shifting the irradiation times of the first light source 11 and the second light source 12, the first reflected image 21 and the second reflected image 22 are prevented from appearing on the screen 20 at the same time. This avoids overlapping of the first reflected image 21 and the second reflected image 22 .

As shown in FIGS. 10A and 10B, in the surface measuring apparatus 1b of the third embodiment, the first light source 11 and the second light source 12 are arranged at the same height position from the object 5 to be measured, and the first reflection The region Lx and the second reflection region Ly are arranged at the same position in the movement direction MD of the object 5 to be measured. In addition, the first light source 11 and the second light source 12 are arranged side by side along the width direction WD of the object to be measured 5 at the same height position, and the first reflection area Lx and the second reflection area Ly are They are arranged continuously in the width direction WD of the object 5 to be measured. The first light source 11 and the second light source 12 emit the first linear light L1 and the second linear light L2 at the same position in the movement direction MD of the object 5 to be measured and in the width direction of the object 5 to be measured. Continuous positions are irradiated with WD (first linear light irradiation step and second linear light irradiation step).

As a result, the first linear light L1 and the second linear light L2 are reflected by the object 5 to be measured, the first reflected light and the second reflected light spread toward the screen 20 in a fan shape, and the first reflected image 21 and the second reflected image 22 are projected onto the screen 20, the first reflected image 21 and the second reflected image 22 are at the same height position in the height direction z of the screen 20, and in the width direction x of the screen 20 The images are projected at a position where they are partially overlapped (reflection image projection step).

The surface measuring device 1b of the third embodiment includes an imaging device 30 and an arithmetic processing device 40 to which the imaging device 30 is connected, like the surface measuring device 1 of the first embodiment. In this case, the arithmetic processing unit 40 has a configuration (not shown in FIGS. 10A and 10B) that is also connected to the first light source 11 and the second light source 12, and the first light source 11 and the second light source 12 irradiation times are controlled.

As shown in FIG. 10A, the surface measuring apparatus 1b first reflects the first linear light L1 emitted from the first light source 11 on the surface of the object 5 to be measured, and projects the first reflected image 21 onto the screen 20. do. As a result, only the first linear light L1 is reflected by the object 5 to be measured, and only the first reflected image 21 is projected on the screen 20 . Next, as shown in FIG. 10B, after the irradiation of the first linear light L1 by the first light source 11 is stopped, the irradiation of the second linear light L2 by the second light source 12 is started. As a result, only the second linear light L2 is reflected by the object 5 to be measured, and only the second reflected image 22 is projected on the screen 20. FIG. Thus, the first light source 11 and the second light source 12 alternately emit the first linear light L1 and the second linear light L2.

At this time, the imaging device 30 captures an image of the screen 20 in synchronization with the irradiation time of the first light source 11 and the second light source 12 based on the control signal from the arithmetic processing device 40 (imaging step). In this way, the imaging device 30 adjusts the times for capturing images of the screen 20 so as to include the different irradiation times of the first light source 11 and the second light source 12, thereby obtaining the first reflected image. The screen 20 on which only one of the 21 and the second reflected image 22 is projected is captured to acquire the captured image.

Note that the arithmetic processing unit 40 includes, for example, a PLG (Pulse Generator), and the irradiation times of the first light source 11 and the second light source 12 and Synchronize with the imaging time.

The imaging device 30 captures a captured image acquired by capturing the first reflected image 21 on the screen 20 in accordance with the irradiation time of the first light source 11 and the second image on the screen 20 in accordance with the irradiation time of the second light source 12 . The captured images obtained by capturing the two reflection images 22 are alternately obtained, and the obtained captured images are output to the arithmetic processing unit 40 .

As a result, the arithmetic processing unit 40, like the first embodiment described above, based on the captured image formed by either the first linear light or the second linear light acquired by the imaging device 30, Surface measurement of the measurement object 5 can be performed (arithmetic processing step). Note that the surface measurement of the object 5 to be measured by the arithmetic processing unit 40 is the same as in the first embodiment described above, so description thereof will be omitted here.

(Action and effect of the third embodiment)
With the above configuration, in the surface measuring apparatus 1b according to the third embodiment, the first linear light L1 and The second linear light L2 is emitted. At this time, the first light source 11 and the second light source 12 are irradiated at different times, and the first reflected image 21 and the second reflected image 22 are alternately projected onto the screen 20 . The surface measuring apparatus 1b synchronizes the imaging times of the imaging device 30 with the irradiation times of the first light source 11 and the second light source 12, so that the first reflected image 21 and the second reflected image 22 do not overlap. Instead, a captured image in which only one of the first reflected image 21 and the second reflected image 22 is captured is acquired.

Therefore, in the surface measuring apparatus 1b of the third embodiment, unlike the first and second embodiments, the first light source 11 and the second light source 12 are positioned upstream or downstream of the moving direction MD of the object 5 to be measured. It is possible to prevent the first reflected image 21 and the second reflected image 22 projected on the screen 20 from being overlapped and causing an area that cannot be measured.

As described above, in the surface measuring apparatus 1b as well, the first reflected image 21 projected onto the screen 20 is Also, it is possible to prevent the occurrence of an area that cannot be measured due to overlapping of the second reflected image 22 .

Also, in the surface measuring apparatus 1b, the first light source 11 and the second light source 11 are arranged so that the first linear light L1 and the second linear light L2 are reflected at successive positions in the width direction WD of the object 5 to be measured. Since the light source 12 is arranged, in the width direction WD of the object 5 to be measured, there are a first reflection area Lx where the first linear light L1 is reflected and a second reflection area Ly where the second linear light L2 is reflected. There is no non-measured area due to non-irradiation of light between , and measurement omission of the object 5 to be measured can be prevented. Therefore, even the surface of the object 5 to be measured having a wide width can be reliably measured over the entire surface.

In addition, in the third embodiment described above, as shown in FIGS. 10A and 10B, the case where the first light source 11 and the second light source 12 are provided has been described, but the present invention is not limited to this. For example, as light sources, in addition to the first light source 11 and the second light source 12, three or more light sources such as a third light source and a fourth light source may be provided. Even when the third light source is arranged, the irradiation time between the first light source 11 and the second light source 12, the irradiation time between the first light source 11 and the third light source, the second light source 12 and The first reflected image 21, the second reflected image 22, and the third reflected image are not overlapped with each other by shifting the irradiation time between the third light sources, and the first light source 11, the second light source 12, and the third light source. The imaging time of the imaging device 30 should be synchronized with each irradiation time of .

Further, in the above-described third embodiment, the case where the first reflected image 21 and the second reflected image 22 are captured by one imaging device 30 has been described, but the present invention is not limited to this. Each of the first reflected image 21 and the second reflected image 22 may be captured individually by the device.

In addition, in the above-described third embodiment, the case where the surface of the measured object 5 moving on a plane is measured as the measured object in the same manner as in the above-described first embodiment. For example, the surface of the object 5 to be measured having a curved surface formed by the rollers 50 may be measured in the same manner as in the above-described second embodiment.

Furthermore, in the above-described third embodiment, the case where the first light source 11 and the second light source 12 are arranged on the upstream side in the moving direction MD and the screen 20 is arranged on the downstream side in the moving direction MD has been described. The invention is not limited to this. For example, the first light source 11 and the second light source 12 may be arranged on the downstream side in the moving direction MD, and the screen 20 may be arranged on the upstream side in the moving direction MD.

(Fourth embodiment)
FIG. 11 is a diagram for explaining the surface measuring device 1c of the fourth embodiment. The surface measuring device 1c applies a first linear light beam L1 and a second linear light beam L1 and a second linear light beam L1 from the upstream side of the movement direction MD of the object 5 to be measured to the surface of the belt-like object 5 moving on the plane of the transport line. A first light source 11 and a second light source 12 for emitting light L2 are provided.

Here, the incident angle of the first linear light L1 to the measured object 5 and the incident angle of the second linear light L2 to the measured object 5 are the same angle. Note that the definition of the incident angle is the same as the incident angle φ in the above-described first embodiment, so the description thereof will be omitted here. In addition, a first reflection region Lx is a position where the first linear light L1 is reflected on the surface of the object 5 to be measured, and a second reflection region Lx is a position where the second linear light L2 is reflected on the surface of the object 5 to be measured. The reflective areas Ly are at the same position in the movement direction MD of the object 5 to be measured and at continuous positions in the width direction WD of the object 5 to be measured.

As a result, in the fourth embodiment, the first reflected image 21 and the second reflected image 22 are projected on the screen 20 by reflecting the first linear light L1 and the second linear light L2 from the object 5 to be measured. overlap in the height direction z of the screen 20 and partially overlap in the width direction x of the screen 20 .

However, in the fourth embodiment, by shifting the wavelengths of the first linear light L1 emitted from the first light source 11 and the second linear light L2 emitted from the second light source 12, the projected light is projected onto the screen 20. It is configured such that the first reflected image 21 and the second reflected image 22 can be separated according to the difference in wavelength.

As shown in FIG. 11, in the surface measuring apparatus 1c of the fourth embodiment, the first light source 11 and the second light source 12 are arranged at the same height position from the object 5 to be measured. The second reflection area Ly is arranged at the same position in the movement direction MD of the object 5 to be measured. In addition, the first light source 11 and the second light source 12 are arranged side by side along the width direction WD of the object to be measured 5 at the same height position, and the first reflection area Lx and the second reflection area Ly are They are arranged continuously in the width direction WD of the object 5 to be measured. The first light source 11 and the second light source 12 emit the first linear light L1 and the second linear light L2 at the same position in the movement direction MD of the object 5 to be measured and in the width direction of the object 5 to be measured. Continuous positions are irradiated with WD (first linear light irradiation step and second linear light irradiation step).

However, in the surface measuring apparatus 1c of the fourth embodiment, the first linear light L1 emitted from the first light source 11 is set to the first wavelength, and the second linear light L2 emitted from the second light source 12 is set to , a second wavelength different from the first wavelength, so that the first reflected image 21 and the second reflected image 22 are projected on the screen 20 in a separable manner based on the difference in wavelength (reflected image projection process).

The first linear light L1 emitted from the first light source 11 and the second linear light L2 emitted from the second light source 12 are set to different wavelength bands that can be separated by a known optical filter.

Further, the surface measuring apparatus 1c of the fourth embodiment includes an imaging device 30, which captures the first reflected image 21 and the second reflected image 22 projected onto the screen 20 (imaging step).

In the fourth embodiment, the first reflected image 21 and the second reflected image 22 projected on the screen 20 are imaged by the imaging device 30 in a state in which they are partially overlapped on the screen 20 to acquire the captured image.

The imaging device 30 is connected to the arithmetic processing device 40 and outputs captured images of the first reflected image 21 and the second reflected image 22 on the screen 20 to the arithmetic processing device 40 .

As a result, the arithmetic processing unit 40 converts the first wavelength component and the second wavelength component from the RGB components included in the captured image into data based on the captured image acquired by the imaging device 30. Separate on top. Since each wavelength component corresponds to the shape of the object 5 to be measured in the first reflection region Lx and the second reflection region Ly, the data corresponding to the first wavelength and the data corresponding to the second wavelength , the surface of the object 5 to be measured can be measured.

Note that the imaging device 30 may be an imaging device 30 having a plurality of imaging units. In this case, it is also possible to separate the component of the first wavelength and the component of the second wavelength by attaching an optical filter having a different transmission wavelength band to each imaging unit and capturing an image. be. In that case, the imaging device 30 individually captures images in which the first reflected image 21 and the second reflected image 22 are separated due to the difference between the first wavelength and the second wavelength. In this manner, the processing unit 40 can also measure the surface of the object to be measured 5 from the captured images in which the first reflected image 21 and the second reflected image 22 are independently captured.

(Actions and effects of the fourth embodiment)
With the above configuration, in the surface measuring apparatus 1c according to the fourth embodiment, the first linear light L1 and The second linear light L2 is emitted. The imaging device 30 captures a first reflected image 21 projected on the screen 20 by reflecting the first linear light L1 of the first wavelength from the object 5 to be measured, and a second linear light L2 of the second wavelength. is projected on the screen 20 by being reflected by the object 5 to be measured, and then separated on the data due to the difference in wavelength. In this manner, the arithmetic processing unit 40 separates the first reflected image 21 and the second reflected image 22 from the captured image in which the first reflected image 21 and the second reflected image 22 are captured according to the difference in wavelength, and obtains them. Based on the obtained data, the surface of the object 5 to be measured can be measured.

As described above, in the surface measuring apparatus 1c as well, even if the first light source 11 and the second light source 12 are arranged to measure the surface of the object 5 having a wide width, the first reflected image 21 projected on the screen 20 Also, it is possible to prevent the occurrence of an area that cannot be measured due to overlapping of the second reflected image 22 .

Further, in the surface measuring apparatus 1c as well, the first light source 11 and the second light source 11 are arranged so that the first linear light L1 and the second linear light L2 are reflected at successive positions in the width direction WD of the object 5 to be measured. Since the light source 12 is arranged, an area (first reflection area Lx) where the first linear light L1 of the object 5 to be measured is reflected and an area (second reflection area Ly ) does not occur, and measurement omission of the object 5 to be measured can be prevented. Therefore, even the surface of the object 5 to be measured having a wide width can be reliably measured over the entire surface.

In the fourth embodiment described above, as shown in FIG. 11, the case where the first light source 11 and the second light source 12 are provided has been described, but the present invention is not limited to this. For example, as light sources, in addition to the first light source 11 and the second light source 12, three or more light sources such as a third light source and a fourth light source may be provided. For example, when a third light source is arranged, the wavelength of the third linear light emitted from the third light source is different from that of the other first linear light L1 and second linear light L2. Set to wavelength.

In this case, in addition to the first reflected image 21 and the second reflected image 22, the arithmetic processing unit 40 also produces a third reflected image projected onto the screen 20 by reflecting the third linear light from the object 5 to be measured. A captured image that has been captured is received from the imaging device 30 . The arithmetic processing unit 40 calculates the first reflected image 21, the second reflected image 22, and the third reflected image from the captured images in which the first reflected image 21, the second reflected image 22, and the third reflected image are captured. Separated data can be generated by , and the surface of the object 5 to be measured can be measured based on the data.

In addition, in the fourth embodiment described above, the case where the surface of the object to be measured 5 moving on a plane is measured as the object to be measured in the same manner as in the first embodiment described above. For example, the surface of the object 5 to be measured having a curved surface formed by the rollers 50 may be measured in the same manner as in the above-described second embodiment.

Furthermore, in the fourth embodiment described above, the case where the first light source 11 and the second light source 12 are arranged on the upstream side in the moving direction MD and the screen 20 is arranged on the downstream side in the moving direction MD has been described. The invention is not limited to this. For example, the first light source 11 and the second light source 12 may be arranged on the downstream side in the moving direction MD, and the screen 20 may be arranged on the upstream side in the moving direction MD.

It should be noted that in each embodiment, the incident angle of the first linear light L1 on the object 5 to be measured and the angle of incidence on the object 5 to be measured of the second linear light L2 are the same angle φ. It includes not only the same angle without any difference, but also a slight deviation (error) that occurs when installing the first light source 11 and the second light source 12 and the like. In addition, the fact that the first reflection region Lx and the second reflection region Ly are at the same position in the movement direction MD of the object 5 to be measured means that the first light source 11 and the second light source 12 or the like is included. Even if such a slight deviation occurs, the first reflected image 21 and the second reflected image 22 projected on the screen 20 cannot be measured when measuring the surface of the object 5 having a wide width. It is possible to prevent the occurrence of regions, and it is possible to prevent the measurement omission of the measurement object 5 because the measurement object 5 is not irradiated with light and is not measured.

1, 1a, 1b, 1c Surface measuring device 5 Object to be measured 11 First light source 12 Second light source 20 Screen 21 First reflected image 22 Second reflected image 23 Third reflected image 24 Fourth reflected image 30 Imaging device 40 Arithmetic processing Device 50 Roller L1 First linear light L2 Second linear light Lx First reflection area Ly Second reflection area

Claims (4)

In a surface measuring device for measuring the surface of a moving object to be measured,
a first light source that irradiates a first linear light across the width direction of the object to be measured;
a second light source that irradiates a second linear light across the width direction of the object to be measured;
The first linear light is reflected by the first reflection area on the surface of the object to be measured to project a first reflected image, and the second linear light is reflected by the second reflection area on the surface of the object to be measured. a screen on which a second reflected image is projected by reflecting at;
an imaging device that captures the first reflected image and the second reflected image projected on the screen and obtains a captured image;
an arithmetic processing device that measures the surface of the object to be measured using the captured image;
has
the angle of incidence of the first linear light on the object to be measured and the angle of incidence of the second linear light on the object to be measured are the same angle φ,
The surface measuring device, wherein the first reflective area and the second reflective area are located at different positions in the moving direction of the object to be measured, and are continuous in the width direction of the object to be measured. The object to be measured is moving on a plane,
The surface measuring device according to claim 1, wherein said first light source and said second light source are arranged so as to satisfy the following formula (1).

w is the variation width of each of the first reflected image and the second reflected image in the height direction of the screen corresponding to the movement direction, and p is the variation width of the first reflection area and the second reflection area; spacing in the direction of movement. The object to be measured moves on the curved surface of the roller, and the first linear light and the second linear light are reflected on the surface of the object to be measured on the curved surface,
2. The surface measuring device according to claim 1, wherein said first light source and said second light source are arranged so as to satisfy the following formula (2).

w is the variation width of each of the first reflected image and the second reflected image in the height direction of the screen corresponding to the moving direction, r is the radius of the roller, and θ is the first It is an opening angle formed by a radial line connecting the center of the cross-sectional circle of the roller from the reflection area and a radius line connecting the center from the second reflection area, and d is the opening angle on the tangent line at the vertex of the roller. It is the distance between the vertex and the screen. In a surface measurement method for measuring the surface of a moving object to be measured,
a first linear light irradiation step of irradiating the first linear light across the width direction of the object to be measured;
a second linear light irradiation step of irradiating a second linear light across the width direction of the object to be measured;
The first linear light is reflected by a first reflection area on the surface of the object to be measured, the first reflected image is projected on a screen, and the second linear light is reflected by the second reflection on the surface of the object to be measured. a reflected image projecting step of projecting a second reflected image onto the screen by reflecting at the area;
an imaging step of capturing the first reflected image and the second reflected image projected on the screen with an imaging device to acquire the captured image;
an arithmetic processing step of measuring the surface of the object to be measured by an arithmetic processing device using the captured image;
has
the angle of incidence of the first linear light on the object to be measured and the angle of incidence of the second linear light on the object to be measured are the same angle φ,
The surface measuring method, wherein the first reflective area and the second reflective area are located at different positions in the moving direction of the object to be measured, and are located continuously in the width direction of the object to be measured.

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