JP7282365B2 - Electrode substrates used in electrostatic induction power generating elements - Google Patents

Description

Article 30, Paragraph 2 of the Patent Act applies November 29, 2018 at the following address https://www. powermems. org/cgi-bin/download. Presented in The PowerMEMS 2018 Electronic Technical Digest downloaded from the cgi website [Publications] December 5, 2018, The 18th International Conference on Micro and Nanotechnology for Power Generation on and Energy Conversion Applications (PowerMEMS 2018) announced

TECHNICAL FIELD The present invention relates to an electrode substrate used for an electrostatic induction power generating element.

2. Description of the Related Art Conventionally, an electrostatic induction power generating element using an electret in which an electric charge is injected into an insulating material has been proposed. It is known that such electrostatic induction power generation elements using electrets have high conversion efficiency between electric energy and kinetic energy. For example, Patent Literatures 1 and 2 below also disclose static induction power generation elements using electrets.

The electrostatic induction power generation element can also be realized by applying a voltage to one of the electrodes facing each other and moving the electrodes relative to each other.

Such an electrostatic induction power generating element can be applied to, for example, energy harvesting in the same manner as the piezoelectric element. In the case of piezoelectric elements, attempts have been made to improve the efficiency of power recovery. For example, Non-Patent Document 1 below discloses that the use of SSHI (synchronized switching harvesting on inductor) can improve the efficiency of collecting power from piezoelectric elements. The following non-patent document 2 discloses that SECE (synchronous electric charge extraction) can be used to improve the efficiency of collecting electric power from a piezoelectric element. In addition, the following Non-Patent Document 3 discloses that the use of SSHI (synchronized switching harvesting on inductor) can improve the efficiency of collecting power from an electrostatic induction power generating element.

However, electrostatic induction power generating elements have a capacitance that is about three orders of magnitude smaller than piezoelectric elements, and an output voltage that is about one order of magnitude higher. was there. In particular, since the output voltage is high, there is a problem that the power consumption in the switch control circuit that forms the signal for controlling the oscillation circuit increases. However, no technology has been proposed that is applied to an electrostatic induction power generating element to efficiently reduce power loss due to parasitic capacitance and improve power recovery efficiency.

JP-A-2005-229707 JP-A-2007-312551

E. Lefeuvre, A. Badel, C. Richard, L. Petit, D. Guyomar, A comparison between several vibration-powered piezoelectric generators for standalone systems, Sens. Actuators A 126 (2006) 405-416 E. Lefeuvre, A. Badel, C. Richard, D. Guyomar, Piezoelectric energy harvesting device optimization by synchronous electric charge extraction. J. Intell. Mater. Syst. Y. Liu, and Y. Suzuki,Self-powered SSHI for electret energy harvester”J. Phys.: Conf. Ser., Vol. 1052, (2018) 012022.

SUMMARY OF THE INVENTION An object of the present invention is to provide an electrode substrate for use in an electrostatic induction power generating element for applying a nonlinear power management circuit such as SSHI or SECE to the electrostatic induction power generating element.

In order to achieve the above object, one embodiment of the present invention provides an electrode substrate used in an electrostatic induction power generation element that converts kinetic energy and electrical energy, the charge holding substrate holding charges a first electrode facing the holding surface and generating power to be supplied to a load through a power extraction circuit while moving relative to the charge holding substrate; a second electrode having an area smaller than that of the first electrode, which generates electric power for operating an opening/closing switch control circuit of a power extraction circuit while moving relative to the charge holding substrate. Characterized by

The electrode substrate may be circular, and the first electrode may be provided radially outward, and the second electrode may be radially provided radially inward.

Further, the electrode substrate is circular, and the first electrode has an area exceeding half of the total area of the first electrode and the second electrode, and the second electrode has an area not exceeding half of the total area. may be provided in a radial shape.

Moreover, it is preferable that the relative motion between the electrode substrate and the charge holding substrate is rotational motion.

Further, it is preferable that the first electrode and the second electrode are formed in strips and arranged parallel to each other, and the total area of the first electrode is larger than the total area of the second electrode. is.

Further, it is preferable that the relative motion between the electrode substrate and the charge holding substrate is one-dimensional vibration in a direction perpendicular to the longitudinal direction of the first electrode and the second electrode.

According to the present invention, it is possible to provide an electrode substrate used for an electrostatic induction power generating element for applying a non-linear power management circuit such as SSHI or SECE to the electrostatic induction power generating element.

1 is a diagram showing an example of an energy harvesting device including an electrostatic induction power generating element using an electrode substrate according to an embodiment; FIG. FIG. 5 is an explanatory diagram of the operation of the nonlinear power management circuit when using SSHI according to the embodiment; It is a figure which shows the structural example of the electrode substrate concerning embodiment. FIG. 4 is a diagram showing an example of an electrostatic induction power generating element configured by combining a circular charge holding substrate and an electrode substrate according to the embodiment; FIG. 4 is a cross-sectional view of another configuration example of the electrostatic induction power generating element according to the embodiment; It is a figure which shows the modification of the electrode substrate in the electrostatic induction-type electric power generation element concerning embodiment. FIG. 5 is a diagram showing output measurement results of Example and Comparative Examples 1 and 2;

EMBODIMENT OF THE INVENTION Hereafter, the form (henceforth embodiment) for implementing this invention is demonstrated according to drawing.

FIG. 1 shows an example of an energy harvesting device including an electrostatic induction power generating element using the electrode substrate according to the embodiment. In FIG. 1 , an energy harvesting device 100 includes an electrostatic induction power generating element 10 and a nonlinear power management circuit 12 . The energy harvesting device 100 is connected to an external load 16 via a DC/DC converter 14 as required. Note that the DC/DC converter 14 includes an appropriate rectifier.

The electrostatic induction power generating element 10 includes a charge holding substrate 10a and an electrode substrate 10b facing each other. The charge retention substrate 10a has a function of retaining charges in its near-surface region, and can be made of, for example, an electret. Electrets are formed by injecting charges (eg, negative charges) near the surface of an insulating material such as resin. Known methods such as liquid contact, corona discharge, electron beam, and soft X-rays can be used to inject charges into the insulating material. Note that the charge holding substrate 10a may be formed of a conductor, such as a metal plate, to which a voltage is applied from an appropriate power supply instead of an electret.

A first electrode 10c and a second electrode 10d are formed on the electrode substrate 10b so as to face the charge retention surface of the charge retention substrate 10a. The first electrode 10c faces the charge-retaining surface of the charge-retaining substrate 10a (hereinafter referred to as the charge-retaining surface), and receives load power (externally via the power extraction circuit 12a) while moving relative to the charge-retaining substrate 10a. power supplied to the load). The second electrode 10d faces the charge retention surface of the charge retention substrate 10a and generates power for controlling the nonlinear power management circuit 12 while moving relative to the charge retention substrate 10a. The second electrode 10d has a smaller area facing the charge retention surface than the first electrode 10c. This is because the control power of the nonlinear power management circuit 12 may be smaller than the load power, thereby reducing power loss (power that cannot be supplied to the load). At the same time, the voltage supplied to the switch control circuit 12b of the nonlinear power management circuit 12 becomes lower than the voltage supplied to the power extraction circuit 12a, thereby suppressing the power consumption of the switch control circuit 12b.

The charge holding substrate 10a and the electrode substrate 10b are configured to move relative to each other. As a result, the charge holding substrate 10a and the first electrode 10c and the second electrode 10d also move relative to each other. can generate the above-described load power and control power respectively. Here, the relative motion can generate an electromotive force in the first electrode 10c and the second electrode 10d of the electrode substrate 10b based on electrostatic induction due to the charge held on the charge holding surface of the charge holding substrate 10a. It is not limited as long as it is exercise.

The nonlinear power management circuit 12 can be configured using, for example, SSHI (synchronized switching harvesting on inductor), SECE (synchronous electric charge extraction), or the like. and a switch control circuit 12b that generates a control signal in accordance with the output voltage of the electrode 10d. The power extraction circuit 12a has a switch that is opened and closed by the control signal generated by the switch control circuit 12b.

The power extraction circuit 12a performs opening and closing operations under the control of the switch control circuit 12b, suppresses the influence of the parasitic capacitance existing in the electrostatic induction power generation element 10, and improves the efficiency of power recovery from the first electrode 10c. works like In this case, the switch control circuit 12b detects the peak of the voltage generated by the second electrode 10d and controls the switching operation of the power extraction circuit 12a. Therefore, the peak of the voltage supplied to the switch control circuit 12b and the peak of the voltage supplied to the power extraction circuit 12a are configured to be synchronized. The operation of the nonlinear power management circuit 12 for SSH will be described later.

As described above, the output power of the first electrode 10c of the electrostatic induction power generation element 10 is connected to the external load 16 via the DC/DC converter 14 as required.

FIG. 2 shows an explanatory diagram of the operation of the nonlinear power management circuit 12 when SSHI is used. In FIG. 2, in the SSH used in this embodiment, the output voltage from the first electrode 10c is controlled using the output voltage from the second electrode 10d, and the parasitics present in the electrostatic induction power generating element 10 The power recovery efficiency is improved by suppressing the power consumed by the capacitor Cp. The output voltage from the first electrode 10c is alternating, and in the positive phase of the output voltage, the side of the parasitic capacitance Cp directly connected to the first electrode 10c is positively charged. When SSHI does not operate (is not used), when the output voltage shifts to a negative phase, the negative charge flows into the side of the positively charged parasitic capacitance Cp that is directly connected to the first electrode 10c, thereby extinguishing the charge. and the generated power is consumed. On the other hand, when SSH is used, the switch control circuit 12b is used to match the output voltage from the second electrode 10d, which is in phase with the output voltage from the first electrode 10c, so that the phase of the output voltage has a positive peak. , the switch in the power extracting circuit 12a is closed to operate the internal oscillation circuit to reverse the charges across the charged parasitic capacitance Cp. As a result, when the output voltage from the first electrode 10c shifts to a negative phase, the side of the parasitic capacitance Cp directly connected to the first electrode 10c is negatively charged. does not flow. Therefore, the generated power is consumed by the load 16 via the power extraction circuit 12a without being lost by the parasitic capacitance Cp.

FIGS. 3A and 3B show configuration examples of the electrode substrate 10b. In the examples of FIGS. 3A and 3B, the charge holding substrate 10a facing the electrode substrate 10b is omitted.

In FIG. 3A, the electrode substrate 10b is a circular substrate, and a first electrode 10c and a second electrode 10d are formed in a radial shape (part of a fan shape) from the center of the substrate in point symmetry. . In this case, the first electrode 10c is provided radially outside the electrode substrate 10b, and the second electrode 10d is provided radially inside the electrode substrate 10b. is larger than the total area of the electrodes 10d. In this case, the angle between the first electrode 10c and the second electrode 10d at the center of the circular electrode substrate 10b (central angle of the sector) may be the same or different.

Further, on the electrode substrate 10b, a ground electrode 10e is formed between the first electrodes 10c, and a ground electrode 10g is formed between the second electrodes 10d radially and point-symmetrically. That is, the ground electrodes 10e and the first electrodes 10c are alternately formed in the circumferential direction of the electrode substrate 10b, and the ground electrodes 10g and the second electrodes 10d are alternately formed in the circumferential direction of the electrode substrate 10b. It is

In the example of FIG. 3A, eight first electrodes 10c and eight second electrodes 10d are formed, and the first electrodes 10c are electrically connected to each other and the second electrodes 10d are electrically connected to each other. It is Note that the number of the first electrodes 10c and the second electrodes 10d is not limited to eight, and may be an appropriate number. Also, the ground electrodes 10e are electrically connected to each other and the ground electrodes 10g are electrically connected to each other. A power extraction circuit 12a is connected between the first electrode 10c and the ground electrode 10e, and a switch control circuit 12b is connected between the second electrode 10d and the ground electrode 10g.

The charge holding substrate 10a provided with an electret or the like (not shown in FIG. 3A) is also a circular substrate, and charge is stored in a fan-shaped region that is substantially the same as the combined region of the first electrode 10c and the second electrode 10d. keeping. A plurality of fan-shaped regions (sometimes referred to as charge retention regions) that retain electric charges are formed so as to be separated from each other in the circumferential direction of the charge retention substrate 10a. can be equal to The charge holding substrate 10a has its rotation axis (the axis passing through the center) that coincides with the rotation axis of the electrode substrate 10b, and the charge holding substrate 10a and the electrode substrate 10b move relative to each other by rotating on this rotation axis. As a result, an induced electromotive force is generated between the first electrode 10c and the second electrode 10d due to electrostatic induction due to the charges on the charge holding substrate 10a. At this time, the number of the charge retention regions is the same as the total number of regions of the first electrode 10c and the second electrode 10d, and the planar shape thereof is substantially the same. And since the first electrode 10c and the second electrode 10d are arranged point-symmetrically on the substrate, the induced electromotive force generated in the first electrode 10c and the induced electromotive force generated in the second electrode 10d are Phase is synchronized. Therefore, the peak of the voltage supplied to the switch control circuit 12b and the peak of the voltage supplied to the power extraction circuit 12a for controlling the opening and closing of the switches in the nonlinear power management circuit 12 can be synchronized.

Further, since the total area of the first electrodes 10c is larger than the total area of the second electrodes 10d, a large amount of power can be supplied to the external load 16 from the first electrodes 10c through the power extraction circuit 12a, thereby switching control. A small power is supplied to the circuit 12b from the second electrode 10d. Therefore, the power consumed by the switch control circuit 12b can be reduced, and the power recovery efficiency can be improved.

Next, in the example of FIG. 3B, radially shaped first electrodes 10c, second electrodes 10d, and ground electrodes 10e and 10g are arranged in the circumferential direction of a circular electrode substrate 10b. In this case, the number of first electrodes 10c is greater than the number of second electrodes 10d. As a result, the first electrode 10c is provided in an area exceeding half of the total area of the first electrode 10c and the second electrode 10d, and the second electrode 10d is provided in an area not exceeding half of the total area. . When the first electrode 10c and the second electrode 10d are regarded as the same group, they are arranged point-symmetrically. Also, the ground electrodes 10e and 10g are arranged point-symmetrically when considered as the same group.

In the example of FIG. 3B, six first electrodes 10c and two second electrodes 10d are formed, but the ratio of each area to the total area does not satisfy the above conditions. If so, the number of the first electrodes 10c and the number of the second electrodes 10d can be determined appropriately. When a plurality of first electrodes 10c and second electrodes 10d are formed, they are electrically connected to each other. Also, the ground electrode 10e and the ground electrode 10g are electrically connected to each other. In the case of FIG. 3B, as in the case of FIG. 3A, the power extraction circuit 12a is connected between the first electrode 10c and the ground electrode 10e, and the second electrode 10d and the ground electrode 10g are connected. A switch control circuit 12b is connected between and.

In the example of FIG. 3(b), the charge holding substrate 10a including electrets (not shown) is configured as a circular substrate, and the charge holding substrate 10a is rotated by the rotating shaft as in the case of FIG. 3(a). Thus, the charge holding substrate 10a and the electrode substrate 10b move relative to each other. As a result, an induced electromotive force is generated between the first electrode 10c and the second electrode 10d due to electrostatic induction due to the charges on the charge holding substrate 10a. At this time, the number of the charge retention regions is the same as the total number of regions of the first electrode 10c and the second electrode 10d, and the planar shape thereof is substantially the same. And since the group of the first electrode 10c and the second electrode 10d are arranged point-symmetrically on the substrate, the induced electromotive force generated in the first electrode 10c and the induced electromotive force generated in the second electrode 10d are phase-synchronous. Therefore, the peak of the voltage supplied to the switch control circuit 12b and the peak of the voltage supplied to the power extraction circuit 12a for controlling the opening and closing of the switches in the nonlinear power management circuit 12 can be synchronized.

Further, since the total area of the first electrodes 10c is larger than the total area of the second electrodes 10d, a large amount of power can be supplied to the external load 16 from the first electrodes 10c through the power extraction circuit 12a, thereby switching control. A small power is supplied to the circuit 12b from the second electrode 10d. Therefore, the power consumed by the switch control circuit 12b can be reduced, and the power recovery efficiency can be improved.

FIG. 4 shows an example of an electrostatic induction power generating element 10 configured by combining a circular charge holding substrate 10a and an electrode substrate 10b. In FIG. 4, radial electrets 10E extending in the radial direction of the charge holding substrate 10a and guard electrodes G are alternately arranged in the circumferential direction on the surface of the charge holding substrate 10a facing the electrode substrate 10b. ing. A conductor to which a voltage is applied from an appropriate power source may be used for the charge retention substrate 10a instead of the electret 10E.

A first electrode 10c, a second electrode 10d, and ground electrodes 10e and 10g similar to those in FIG. 3A are formed on the surface of the electrode substrate 10b facing the charge holding substrate 10a. It should be noted that the second electrode 10d and the ground electrode 10g are omitted for drawing purposes. Also, the first electrode 10c and the second electrode 10d may have the same configuration as that shown in FIG. 3(b) instead of that shown in FIG. 3(a). These first electrodes 10c and second electrodes 10d are alternately arranged in the circumferential direction of the electrode substrate 10b together with the ground electrodes 10e and 10g. A power extraction circuit 12a is connected between them, and a switch control circuit 12b is connected between the second electrode 10d and the ground electrode 10g. In the example of FIG. 4, the number of first electrodes 10c and second electrodes 10d and the number of electrets 10E corresponding thereto are greater than in FIGS. The number can be determined as appropriate.

In the electrostatic induction power generation element 10 shown in FIG. 4, the central axis of the charge holding substrate 10a and the electrode substrate 10b is shared, and the charge holding substrate 10a rotates around the central axis as a rotor. The electrode substrate 10b is a stator, and the charge holding substrate 10a and the electrode substrate 10b move relative to each other in the circumferential direction to generate induced electromotive force in the first electrode 10c and the second electrode 10d, thereby extracting power. They are supplied to the circuit 12a and the switch control circuit 12b, respectively.

FIG. 5 shows a cross-sectional view of another configuration example of the electrostatic induction power generating element 10. As shown in FIG. In FIG. 5, the electrostatic induction power generation element 10 includes a charge holding substrate 10a and an electrode substrate 10b that face each other and move relative to each other in a direction parallel to the facing surfaces, as indicated by an arrow A. Electrets 10E and guard electrodes 10G are alternately arranged in the arrow A direction on the opposite surface of the charge retention substrate 10a. In this case, the electret 10E and the guard electrode 10G are formed in a rectangular parallelepiped shape (strip shape) having a rectangular cross section extending in a direction perpendicular to the arrow A direction. A conductor to which a voltage is applied from an appropriate power source may be used for the charge retention substrate 10a instead of the electret 10E.

A first electrode 10c and a second electrode 10d are formed on the facing surface of the electrode substrate 10b. Ground electrodes 10e and 10g are also formed alternately with the first electrode 10c and the second electrode 10d, that is, adjacent to each of them. The first electrode 10c and the second electrode 10d and the electret 10E have the same planar shape, and the spacing between the electrets 10E and the first electrode 10c and/or the second electrode 10d in the arrangement is the same. and the total number of the first electrodes 10c and the second electrodes 10d is the same as the number of electrets 10E.

Also in the example of FIG. 5, the first electrodes 10c are electrically connected to each other and the second electrodes 10d are electrically connected to each other. Also, the ground electrodes 10e are electrically connected to each other and the ground electrodes 10g are electrically connected to each other. A power extraction circuit 12a is connected between the first electrode 10c and the ground electrode 10e, and a switch control circuit 12b is connected between the second electrode 10d and the ground electrode 10g.

Due to the relative movement of the charge holding substrate 10a and the electrode substrate 10b in the direction of arrow A, the induced electromotive force based on the electret 10E is generated between the first electrode 10c and the ground electrode 10e and between the second electrode 10d and the ground electrode 10g. and are supplied to the power extraction circuit 12a and the switch control circuit 12b, respectively. In this case, the relative motion between the charge holding substrate 10a and the electrode substrate 10b can be realized by vibrating the charge holding substrate 10a in the arrow A direction, for example. Alternatively, the charge holding substrate 10a and the electrode substrate 10b may be relatively oscillated by simultaneously parallel-moving in parallel (in the direction of the arrow A) and in opposite directions to the facing surfaces.

At this time, the first electrode 10c and the second electrode 10d and the electret 10E have the same planar shape, and the spacing between the electrets 10E and the first electrode 10c and/or the second electrode 10d in that arrangement is Since the intervals are the same and the total number of the first electrodes 10c and the second electrodes 10d is the same as the number of electrets 10E, the induced electromotive force generated in the first electrodes 10c and the second electrodes 10d The generated induced electromotive force is synchronous in phase. Therefore, the peak of the voltage supplied to the switch control circuit 12b and the peak of the voltage supplied to the power extraction circuit 12a for controlling the opening and closing of the power extraction circuit 12a can be synchronized.

In the example of FIG. 5, there is one second electrode 10d, but the present invention is not limited to this. For example, the number of first electrodes 10c and second electrodes 10d can be determined as appropriate.

FIGS. 6(a) and 6(b) show modifications of the electrode substrate 10b in the electrostatic induction power generating element 10 shown in FIG. In the example of FIG. 6(a), strip-shaped first electrodes 10c and ground electrodes 10e are alternately formed in parallel, and strip-shaped second electrodes 10d and ground electrodes 10g are formed alternately. and parallel to each other. As shown in FIG. 6(a), the first electrode 10c and the second electrode 10d, and the ground electrode 10e and the ground electrode 10g are located at positions corresponding to each other on the plane of the electrode substrate 10b (in the horizontal direction of the drawing). same position). Here, the longitudinal length Lc of each first electrode 10c is longer than the longitudinal length Ld of the second electrode 10d. Therefore, the total area of the first electrodes 10c is larger than the total area of the second electrodes 10d.

In the example of FIG. 6B, the longitudinal length Lc of the first electrode 10c and the longitudinal length Ld of the second electrode 10d are the same. The number of electrodes 10c is greater than the number of second electrodes 10d. The ground electrode 10e and the ground electrode 10g are also formed alternately and in parallel with the first electrode 10c and the second electrode 10d, respectively.

Note that the charge holding substrate 10a (not shown) is the same as that shown in FIG. It is configured to move relative to the substrate 10b.

Examples of the present invention will be specifically described below. The following examples are intended to facilitate understanding of the present invention, and the present invention is not limited to these examples.
Example

A power generation experiment was conducted with an energy harvesting device 100 including the electrostatic induction power generating element 10 using the electrode substrate 10b configured as shown in FIG. 3(b).

The electrode substrate 10b used in the experiment had an outer diameter of 38 mm and an inner diameter of 18 mm. The length of the first electrode 10c and the second electrode 10d is 20 mm (38-18 mm), and the width of the innermost diameter (18 mm) is 185 μm. The outermost diameter (diameter 38 mm) is 390 μm wide and the interval is 105 μm. The number of first electrodes 10c (generating power for load) was 115, and the number of second electrodes 10d (generating power for SSHI control) was four. Although 120 electrodes can be formed in a diameter, in order to suppress electrical interference between the first electrode 10c and the second electrode space 10d, one electrode is omitted and spaced. The ground electrodes 10e and 10g are also formed in the same shape and number as the first electrode 10c and the second electrode 10d, respectively. Moreover, the thickness of each electrode was set to 20 μm or less.

On the other hand, the charge holding substrate 10a of the electrostatic induction power generating element 10 was composed of an electret having a surface potential of -807V. This electret has the same shape as the first electrode 10c and the second electrode 10d, and has a width of 185 μm at the innermost diameter. 120 are arranged along the circumference of 10a.

In addition, the first electrode 10c and the second electrode 10d formed on the electrode substrate 10b and the surface of the electret were opposed to each other at a distance of 300 μm, and the rotation speed of the electret (rotor) was set to 1 rps to cause relative motion.

The output of the energy harvesting device 100 configured as described above was measured by connecting a 100 MΩ resistor to the output side of the SSHI and calculating the output voltage from the current flowing therethrough. The measuring device (ammeter) used at that time is a programmable current amplifier CA5350 (manufactured by NF Circuit Design Block Co., Ltd.).

Also, as Comparative Example 1, an energy harvesting device 100 that does not use SSHI (nonlinear power management circuit 12), and as Comparative Example 2, the second electrode 10d is not used to supply power to the SSH switch control circuit 12b. , an energy harvesting device 100 that divides the load power (first electrode 10c) by resistors (100 MΩ for the load and 4.8 MΩ for the switch control circuit 12b) was formed, and the output was measured in the same manner as in the example. .

FIG. 7 shows output measurement results of Example and Comparative Examples 1 and 2. FIG. As shown in FIG. 7, the output power of Example was 2.6 times that of Comparative Example 1 and 1.33 times that of Comparative Example 2. As a result, the effectiveness of the electrode substrate 10b according to this example could be confirmed.

10 electrostatic induction power generation element 10a charge holding substrate 10b electrode substrate 10c first electrode 10d second electrode 10e, 10g ground electrode 10E electret 10G guard electrode 12 nonlinear power supply management circuit 12a power extraction circuit, 12b switch control circuit, 14 DC/DC converter, 16 load, 100 energy harvesting device.

Claims (6)

An electrode substrate used in an electrostatic induction power generation element that converts kinetic energy and electrical energy,
a first electrode that faces a charge retention surface of a charge retention substrate that retains charges and generates power to be supplied to a load via a power extraction circuit while moving relative to the charge retention substrate;
The first electrode is smaller than the first electrode facing the charge retention surface of the charge retention substrate that retains the charge and generates power for operating the switch control circuit for opening and closing of the power extraction circuit while moving relative to the charge retention substrate. a second electrode formed on the area;
An electrode substrate used for an electrostatic induction power generating element comprising 2. The electrostatic induction according to claim 1, wherein said electrode substrate is circular, said first electrode is provided radially outward and said second electrode is radially provided radially inward. Electrode substrate used for type power generation element. The electrode substrate is circular, and the first electrode has an area exceeding half of the total area of the first electrode and the second electrode, and the second electrode has an area not exceeding half of the total area. 2. The electrode substrate for use in an electrostatic induction power generating element according to claim 1, wherein each of the are provided in a radial shape. 4. The electrode substrate used in the electrostatic induction power generating element according to claim 2, wherein the relative motion between said electrode substrate and said charge holding substrate is rotational motion. 2. The method according to claim 1, wherein said first electrode and said second electrode are strip-shaped and arranged parallel to each other, the total area of said first electrode being greater than the total area of said second electrode. An electrode substrate used in the electrostatic induction power generating element described above. 6. The electrostatic induction power generation according to claim 5, wherein the relative motion between the electrode substrate and the charge holding substrate is one-dimensional vibration in a direction perpendicular to the longitudinal direction of the first electrode and the second electrode. Electrode substrate used in devices.

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