JP7263853B2 - Line drawing device and line drawing method for functional material - Google Patents

Description

In order to impart new properties to the surface of substrates such as glass, plastics, films, silicon wafers, ceramics, paper, etc., the present invention involves drawing a functional material in a predetermined pattern to form a thin film of the functional material. It relates to a line-drawing device and a line-drawing method for a functional material that forms a

BACKGROUND ART In recent years, various products have been manufactured by forming a patterned thin film of a functional material on a substrate. For example, a conductive ink film is formed in a predetermined linear pattern on a base material to form an electric circuit or an electrode, or a high-resistance ink film is formed in a pattern to form a heating element. Furthermore, imparting lyophilicity or liquid repellency to a substrate in a pattern shape is performed in the manufacture of electronic materials such as semiconductors, organic EL elements, organic solar cells, and the like. Methods for forming a thin film of functional materials in a specified pattern include printing methods such as screen printing, inkjet, and dispensers, transfer methods from a sheet on which a pattern-shaped film is formed, and high-precision shaping and placement. There are photolithographic methods, sputtering, and the like, which can be formed on the substrate. The pattern shape is composed of lines with a small width, the line width accuracy and shape accuracy may be relatively low, and when it is required that the pattern shape is easy to change, it is simple and low cost. In addition to a printing method using a dispenser, a line drawing method is selected in which a drawing means such as a pen or a calligraphic pen is brought into contact with a base material to draw.

In the case of the line drawing method, if the pressing force when the drawing means contacts the base material is not constant, the line width and the thickness of the film formed in the pattern shape will fluctuate. Furthermore, unless the pressing force is set to a low value of the order of 0.01 N, the thin film cannot be formed, and depending on the base material, damage may be caused. As means for keeping the pressing force constant in the line drawing method, there is a method in which the pressing force, that is, the pen pressure is measured by a sensor and the pen is pressed against the base material by an actuator so that the pen pressure is kept constant. (For example, Patent Document 1)

JP-A-4-312899

However, the method disclosed in the above-mentioned Patent Document 1 can respond with good responsiveness to pressing force fluctuations based on contact position fluctuations caused by uneven thickness of the base material and vertical movement of the pen during horizontal movement. Can not. In particular, when the pen moves at high speed, it is very difficult to stably control the pressing force to a constant value even if the sensor can measure minute variations in the pressing force. That is, at present, there is no suitable means for stably fixing the line width and thickness of the functional material film formed in the pattern shape to a desired value while keeping the pressing force of the pen against the substrate constant. is.

The present invention is intended to solve the above-mentioned problems, and its object is to enable line drawing while always maintaining a constant low pressing force of drawing means, and to form a film of a functional material formed in a pattern shape. An object of the present invention is to provide a line drawing device and a line drawing method for a functional material that can stably set the line width and thickness to desired constant values.

In order to solve the above-mentioned problems, the line drawing apparatus for functional materials of the present invention comprises drawing means for drawing the functional material linearly on the base material by contacting the drawing part with the base material, and the drawing part of the drawing means. pressing force applying means for contacting the base material with a constant pressing force; base fixing means for fixing and holding the base material; relative movement means for relatively moving the functional material line drawing device, wherein the pressing force applying means applies the drawing means to one end of a seesaw extending in both left and right directions from a rocking rotation center capable of reciprocally rotating by a small amount; is arranged, and a counterweight for adjusting the pressing force is arranged at one end on the opposite side.

Here, the rocking rotation center of the seesaw is arranged substantially on a straight line along the base material surface when the drawing tip of the drawing means contacts the base material surface. It is preferable that the seesaw can be positioned by moving in the direction in which the seesaw extends from the swing rotation center so that the pressing force that brings the drawing portion of the means into contact with the base material can be adjusted.

In the line drawing method of the functional material of the present invention, the pressing force imparting means adjusts the pressing force with which the drawing part of the drawing means contacts the base material by moving and positioning the counterweight. The drawing part of the drawing means to which the functional material is supplied is brought into contact with the base material fixed to the material fixing means and moved by the relative moving means to line draw the functional material on the base material. Characterized by

In the line drawing apparatus for functional materials of the present invention, the drawing means is attached to one end of the seesaw that slightly rocks and rotates. Even if there is positional variation, the drawing means operates according to the contact position variation, so that the pressing force of the drawing means such as a pen against the base material can always be maintained at a constant low value for line drawing. This operational effect is exhibited without change even when the drawing means moves at high speed. Since the pressing force of the drawing means against the base material can always be maintained at a constant low value, the line width and thickness of the film of the functional material formed in the pattern shape can be stably set at a constant value. becomes possible.

Further, in a preferred embodiment of the present invention, the center of swing rotation of the seesaw is roughly arranged on a straight line along the surface of the substrate with which the drawing section of the drawing means contacts. Even if there is a vertical movement, the installation inclination angle of the drawing means with respect to the substrate hardly changes, so that the line width and thickness of the functional material film formed in the pattern shape can be stably made constant.

Furthermore, in a preferred embodiment of the present invention, the pressing force can be positioned by moving the position of the counterweight from the swing rotation center. By adjusting the pressing force of the means to the substrate to a desired value, the line width and thickness of the film of the functional material can be easily set to desired constant values.

1 is a schematic front view of a line drawing device 1 according to the present invention; FIG. 2 is a schematic plan view of a line drawing unit 20 that is part of the line drawing device 1. FIG. 1 is a schematic enlarged front cross-sectional view of one embodiment of drawing means 10. FIG. It is explanatory drawing which shows the line drawing method of the functional material of this invention in steps. FIG. 4 is a plan view showing an example of line drawing on a substrate; FIG. 3 is a schematic front cross-sectional view showing another embodiment of drawing means 100;

The present invention will be described with reference to FIGS. 1-3. 1 is a schematic front view of a line drawing apparatus 1 according to the present invention, FIG. 2 is a schematic plan view of a line drawing unit 20, and FIG. 3 is a schematic enlarged front sectional view of one embodiment of the drawing means 10. FIG.

Referring first to FIG. 1, there is shown a line drawing device 1 in accordance with the present invention. A line drawing apparatus 1 holds a line drawing unit 20 having drawing means 10 for drawing a line of a functional material, and a substrate 4, which is a rectangular base material for line drawing, and draws the line drawing unit 20 three-dimensionally. and an XYZ stage 40 that moves relative to the .

Further details of the drawing means 10 held in part of the line drawing unit 20 are shown in FIG. 3, the drawing means 10 is mounted in a U-shaped elongated hole 23 provided in the tip holding member 25 at the left end of the line drawing unit 20. As shown in FIG. As shown in FIG. 2, the U-shaped elongated hole 23 is open on one side, so the U-shaped elongated hole 23 clamps and fixes the drawing means 10 by the tightening force of the split tightening bolt 24 . Note that in FIG. 3 , oblique lines indicate cross-sectional portions. The drawing means 10 whose cross section is shown is a so-called calligraphy pen, and the drawing section 11 for drawing lines is constructed by bundling a large number of hair-like members of a certain length. It is formed in a tapered conical shape toward the drawing tip portion 16 which is in contact with the substrate 4 and performs line drawing. The opposite side of the drawing tip 16 of the drawing section 11 penetrates and is held in the liquid storage section 13 in the elongated cylindrical cartridge 12 . The liquid storage part 13 is filled with a liquid functional material A, which flows from the opposite side of the drawing tip part of the drawing part 11 to the drawing tip part 16 by a capillary tube, and flows to the drawing tip part. At 16 and its vicinity, the functional material A can be line-drawn on the substrate. A detachable lid 14 is provided on the top of the cartridge 12 to prevent the functional material A from drying. Below the cartridge 12, there is provided a concentric seating surface 15 for vertically supporting the drawing means 10 filled with the functional material A on the tip holding member 25. As shown in FIG.

With the above configuration, the drawing means 10 draws the functional material A linearly on the substrate 4 with the drawing portion 11 in contact with the substrate 4 .

The line drawing unit 20 holding the drawing means 10 described above will be described with reference to FIGS. 1 and 2 again. Referring to FIG. 1, the line drawing unit 20 includes a holding plate 21 fastened and fixed by bolts 39 to a bracket 35 fixed to a Z-axis movable table 81, and a swing rotary shaft 36 attached below the holding plate 21. an L-shaped member 30 rotatably held in the base, a tip holding member 25 holding the drawing means 10 and fixed by a bolt 22 at the left end of the L-shaped member 30, and fixed to the right side of the L-shaped member 30. A threaded shaft 31 extending in the X direction, a cylindrical counterweight 32 threadedly engaged with the threaded shaft 31, and left rotation of the L-shaped member 30 around a swing rotation shaft 36 are controlled by the L-shaped member 30. It is composed of a stopper 37 that comes into contact with the blocking portion 38 and stops. Note that the stopper 37 is attached to the holding plate 21 .

Here, as described above, the drawing means 10 is supported vertically by the lower portion of the cartridge 12 being attached to the U-shaped elongated hole 23 of the tip holding member 25 and the seat surface 15 coming into contact with the upper portion of the tip holding member 25. positioned. Furthermore, since the tip holding member 25 is configured to be rotatable around the center of the bolt 22 when the bolt 22 is loosened, the inclination angle of the drawing means 10 with respect to the substrate 4 is changed from 90 degrees shown in FIG. be able to. By tightening the bolt 22 after setting the desired tilt angle, the tilt angle can be maintained.

The rocking rotation (reciprocating rotation of a very small amount) of the L-shaped member 30 is performed with the center of the rocking rotation shaft 36 as the rocking rotation center O. As shown in FIG. That is, since the L-shaped member 30 is swingably rotatable around the swinging rotation center O, it can be said that the swinging rotary shaft 36 and the L-shaped member 30 constitute a seesaw. The seesaw extends from the rocking rotation center O in both left and right directions, that is, in the X direction. Since the drawing means 10 is arranged on the left side of the swing rotation center O and the counterweight 32 is arranged on the right side, the pressing force of the drawing section 11 of the drawing means 10 to the substrate 4 is set by the counterweight 32 by the action of a seesaw. It becomes possible to Also, the magnitude of the pressing force can be adjusted by changing the weight of the counterweight 32 and the position of the center of gravity. In the line drawing apparatus 1 shown in FIG. 1, the counterweight 32 is rotated around the screw shaft 31 to move the center of gravity of the counterweight 32 relative to the swing rotation center O in the X direction. The pressing force to the substrate 4 can be freely adjusted. The screw shaft 31 has a male thread, and the portion of the counterweight 32 that engages with the screw shaft 31 has a female thread (nut). As a result, the position can be fixed by rotating the counterweight 32 and moving it by a minute amount. .

That is, in this embodiment, the counterweight 32 is moved in the X direction, which is the direction in which the seesaw extends, from the rocking rotation center O so that the pressing force that brings the drawing section 11 of the drawing means 10 into contact with the substrate 4 can be adjusted. It can be said that it is configured so as to be able to be positioned. When the drawing section 11 of the drawing means 10 contacts the substrate 4, the L-shaped member 30 rotates to the left, but a stopper 37 is provided to stop the rotation in the middle so that it does not go too far. However, when drawing a line, the attachment position of the stopper 37 is adjusted so that the stopper 37 and the blocking portion 38 of the L-shaped member do not come into contact with each other. With the above configuration, the line drawing unit 20 serves as a pressing force imparting means for bringing the drawing section 11 of the drawing means 10 into contact with the substrate 4 with a constant pressing force. In order to exhibit such a function, the line drawing unit 20 has an L-shaped member 30 which is a part of a seesaw extending in the X direction, which is both left and right directions, from the pivotal rotation center O which can freely reciprocate slightly. is arranged, and a counterweight 32 for adjusting the pressing force is arranged at one end on the opposite side.

Next, the details of the XYZ stage 40 that constitutes the line drawing apparatus 1 will be described. Looking at FIG. 1, a substrate 4 is placed on a suction cup 50 which is part of the XYZ stage 40 . A large number of suction holes (not shown) are arranged on the upper surface of the suction board 50, and the substrate 4 can be held by suction and fixed by vacuum pressure from a vacuum source (not shown). That is, the suction cup 50 serves as a base material fixing means for fixing and holding the substrate 4 as the base material. The suction cup 50 is fixed on the X-axis movable table 61 of the X-axis linear drive device 60 . The X-axis linear driving device 60 is fixed on the base 41, and can freely reciprocate the X-axis movable table 61 and the suction cup 50 fixed thereto in the X direction.

Next, the Z-axis movable table 81 of the Z-axis linear driving device 80 that constitutes the XYZ stage 40 is fastened and fixed to the bracket 35 that holds the line drawing unit 20 via the holding plate 21 as described above. . As a result, the Z-axis linear driving device 80 freely reciprocates the Z-axis movable table 81, the line drawing unit 20 connected thereto, and the drawing means 10 held at one end thereof in the Z direction, which is the vertical direction. can be made The Z-axis linear drive device 80 is fixed to the Y-axis movable table 71 of the Y-axis linear drive device 70 . The Y-axis linear driving device 70 is attached to the left side surface of the stay portion 43 of the portal frame 42 fixed to the right end portion of the base 41 so as to extend in the Y direction, that is, the direction perpendicular to the paper surface. By driving the Y-axis linear drive device 70, the line drawing unit 20 and the drawing means 10 held at one end thereof can also be freely reciprocated in the Y direction.

With the above configuration, the XYZ stage 40 can freely move the drawing means 10 relative to the substrate 4 fixed to the suction cup 50 in the X, Y, and Z directions. That is, the XYZ stage 40 serves as relative movement means for relatively moving the drawing means 10 in which the drawing section 11 is in contact with the fixedly held substrate 4 with a constant force. The operation is controlled by a control device (not shown) based on preset conditions.

Note that in FIG. 1, the swing rotation center O of the line drawing unit 20 of the line drawing apparatus 1 described in detail above is the same as that of the substrate 4 when the drawing tip 16 of the drawing section 11 of the drawing means 10 contacts the substrate 4 . It is preferable to determine the arrangement position of the rocking rotary shaft 36 so that it is arranged on a line BL (indicated by a dashed line) that is a straight line along the surface of the . The reason for this arrangement is that (1) the thickness of the substrate 4 is uneven, and (2) the drawing means 10 moves up and down due to the traveling of the X-axis movable table 61 and the Y-axis movable table 71 of the XYZ stage 40. However, since the positional variation in the X direction of the drawing tip portion 16 of the drawing means 10 is extremely small, the positional deviation and line width variation when drawing a line in the Y direction can be made small enough to be ignored. is. Positional deviation and line width variation when drawing a line in the Y direction are caused by changes in the installation inclination angle (90 degrees in FIG. 1) of the drawing unit 11 of the drawing unit 10 and the drawing tip 16 with respect to the base material 4. Occur.

Furthermore, it is more preferable to arrange the counterweight 32 and the screw shaft 31 so that the center axis of the screw shaft 31 is aligned with the line BL so that the center of gravity of the counterweight 32 is arranged on the line BL. As a result, even if the drawing means 10 moves up and down due to the above reason, the positional fluctuation of the drawing tip 16 in the X direction and the positional fluctuation of the center of gravity of the counterweight 32 can be minimized. This is because it is possible to reduce the size. In order to obtain the above effects to the maximum, it is preferable that the swing rotation center O is arranged on the line BL. is obtained. For this reason, arranging the rocking rotation center O at a position apart from the line BL within a range of ±1 mm is defined as "substantially arranged". As described above, the swinging rotation center O of the L-shaped member 30 and the like constituting the seesaw is approximately on the line BL which is a straight line along the surface of the substrate 4 when the drawing tip 16 of the drawing means 10 contacts the surface of the substrate 4. Even if it is arranged, it exhibits the same effects as those arranged on the line BL.

Next, with reference to FIG. 4, the line drawing method of the functional material of the present invention using the line drawing apparatus 1 will be described. 4(a) to 4(e) are schematic front views showing enlarged drawing means 10, line drawing unit 20, suction cup 50, and substrate 4, which are a part of line drawing apparatus 1 shown in FIG. A view (a view viewed in the Y direction) is arranged. Steps ST1 to ST5 correspond to FIGS. 4(a) to 4(e), and the situation at each step and the result of the operation of each part are shown in the corresponding figures. The larger the number of step ST, the later it is in terms of time. Furthermore, between (d1) and (d2) in FIG. 4, (d2) comes later in time.

The specific line drawing method shown in FIG. 4 is based on the drawing pattern shown in FIG. FIG. 5 is a plan view showing an example of line drawing on the base material, showing the result of line drawing of the functional material A on the substrate 4 . As shown in FIG. 5, a method of drawing functional material A in a rectangular shape with a line width WL in the order of point C→point D→point E→point F→point C is performed by following step ST in FIG. A specific description will be given.

(Step ST0) (not shown in FIG. 4)
This is a preparatory (setup) step before line drawing. After the drawing means 10 is attached and fixed to the line drawing unit 20, the pressing force is adjusted so that the functional material A can be drawn on the substrate 4 with the line width WL. The drawing end portion 16, which is the tip of the drawing portion 11 of the drawing means 10, is placed on a load measuring device such as an electronic balance, and the counterweight 32 is rotated on the screw shaft 31 while measuring the load to obtain the desired load, that is, the pressing force. The center of gravity position of the counterweight 32 is adjusted so that the value of After the adjustment, each axis of the XYZ stage 40 is returned to the origin. As a result, the sucker 50 moves to the leftmost position in the X direction in FIG. Move to position.

(Step ST1) (situation of FIG. 4(a))
This is line drawing preparation step 1 . After the origin return is completed, the substrate 4 is placed on the suction cup 50 and fixed by suction.

(Step ST2) (situation of FIG. 4(b))
This is line drawing preparation step 2 . By driving the X-axis linear driving device 60 and the Y-axis linear driving device 70 of the XYZ stage 40, both are moved so that the drawing tip 16 of the drawing means 10 is positioned directly above the point C of the substrate 4 shown in FIG. and stop after completion. At this time, the drawing means 10 is stopped at an angle slightly inclined from the vertical by the stopper 37 . At this time, the inclination angle from the vertical is preferably 5 degrees or less, more preferably 1 degree or less.

(Step ST3) (situation of FIG. 4(c))
This is line drawing preparation step 3 . The drawing means 10 is lowered by driving the Z-axis linear driving device 80, and is stopped when the oscillation rotation center O reaches the height position of the surface of the substrate 4 in the Z direction. As a result, the drawing tip 16 of the line drawing means 10 lands and contacts the surface of the substrate 4 . Then, the drawing means 10 becomes perpendicular to the substrate 4 and the stopper 37 moves away from the blocking portion 38 of the L-shaped member 30 .

At this time, the drawing section 11 of the line drawing means 10 is pressed against the substrate 4 with the pressing force adjusted in step ST0. The installation inclination angle of the drawing portion 11 of the drawing means 10 and the drawing tip portion 16 with respect to the substrate 4 is 90 degrees.

(Step ST4) (Situation of (d1) and (d2) in FIG. 4)
This is the line drawing execution step. First, the X-axis linear driving device 60 is driven to move the sucker 50 at a speed V so that the drawing means 10 moves from point C to point D shown in FIG. 5 (state of FIG. 4(d1)). Subsequently, the Y-axis linear driving device 70 and the X-axis linear driving device 60 are sequentially driven to move the drawing means 10 at a speed V from point D→point E→point F→point C shown in FIG. By moving to the point C, it returns to the starting position, and the line drawing of the functional material A with the line width WL on the substrate 4 is completed (the state of FIG. 4(d2)).

(Step ST5) (situation of FIG. 4(e))
This is the end step. By driving the Z-axis linear driving device 80, the drawing means 10 is raised to the origin position in the Z direction (state of FIG. 4(e)). After that, each axis of the XYZ stage 40 is returned to the origin, the suction of the suction cup 50 is released, and the board 4 on which the lines are drawn is taken out.

If line drawing is to be repeated thereafter, the process is executed from step ST1.

By executing the above steps ST0 to ST5, the line drawing unit 20, which is the pressing force applying means, moves and positions the counterweight 32 so that the drawing section 11 of the drawing means 10 is positioned on the substrate 4, which is the base material. After adjusting the contact pressing force, the drawing unit 11 of the drawing unit 10 supplied with the functional material A is brought into contact with the substrate 4 fixed to the suction cup 50 as the substrate fixing unit, and is moved by the relative movement unit. The functional material line drawing method of the present invention, in which the functional material A is drawn on the substrate 4 by moving it with a certain XYZ stage 40, is realized.

Next, another rendering means 100 will be described with reference to FIG. FIG. 6 is a schematic front cross-sectional view showing another embodiment of the drawing means 100, and the shaded area indicates the cross section. In FIG. 6, the drawing means 100 is attached to the U-shaped elongated hole 23 of the leading end holding member 25 of the drawing unit 20 instead of the drawing means 10 shown in FIG. It is firmly held by the tip holding member 25 by tightening with the split tightening bolt 24 . The tip holding member 25 is fixed by a bolt 22 to the left end of the L-shaped member 30 in a state of being inclined by an inclination angle θ from the horizontal. As a result, the center line CL of the drawing means 100 is tilted from the vertical to the substrate 4 by the tilt angle θ. The drawing means 100 is composed of a syringe 102 having a manifold 103 for temporarily storing the functional material A therein, and an elongated pipe-shaped drawing section 101 . Liquid functional material A flows from supply device 110 into manifold 103 of syringe 102 via supply port 104 . Then, it passes through the outflow channel 105 inside the drawing unit 101 communicating with the manifold 103 and flows out from the outflow port 106 to be drawn on the substrate 4 . The line width WL of the drawn functional material film forms a bead in the vicinity of the outlet 106 with a diameter di, so it is slightly larger than the outer diameter do of the pipe-shaped drawn portion 101 . Further, the contact portion 107 of the drawing portion 101 that contacts the substrate 4 is parallel to the surface of the substrate 4 . This is to prevent the drawing section 101 from damaging the surface of the substrate 4 . The contact portion 107 may be R-shaped for this purpose.

Note that the contact portion 107 of the drawing portion 101 is drawn so as to be arranged on a line BL (indicated by a dashed line) that is parallel to the surface of the substrate 4 and passes through the oscillation rotation center O when the contact portion 107 of the drawing portion 101 is in parallel contact with the surface of the substrate 4. Means 100 is preferably configured.

The features of the drawing means 100 described above are that the line width of the drawn functional material film is more stable and that the thickness of the film can be controlled by the supply amount from the supply device 110 . If the inclination angle .theta. is zero, the surface of the substrate 4 covers the outlet 106 of the drawing means 100, which prevents the outflow of the functional material A, which is not preferable. The inclination angle θ is preferably 2 to 30 degrees, more preferably 5 to 15 degrees so that the functional material can flow out from the discharge port 107 by the amount supplied from the supply device 110 .

The supply device 110 includes a supply valve 112 , a syringe pump 120 , a suction tube 113 , a suction valve 114 and a tank 115 on the upstream side of the supply tube 111 connected to the supply port 104 of the drawing means 100 . Here, the supply tube 111 communicates from the drawing means 100 to the syringe pump 120 , and the suction tube 113 communicates from the syringe pump 120 to the tank 115 . The most upstream tank 115 stores the liquid functional material A, and is connected to a compressed air source 116 to apply an arbitrary amount of back pressure to the functional material A. FIG. Functional material A in tank 115 is supplied to syringe pump 120 through suction tube 113 . The syringe pump 120 has a syringe 121 and a piston 122 attached to a main body 123 . Here, the piston 122 can freely reciprocate vertically by a drive source (not shown). The syringe pump 120 is an intermittent constant-volume pump capable of supplying a constant volume of the functional material A to the drawing means 100 by filling a syringe 121 with a constant inner diameter with the functional material A and pushing it out with a piston 122 . When filling the syringe 121 with the functional material A, the suction valve 114, which is the upstream opening/closing valve of the syringe pump 120, is opened, the supply valve 112, which is the downstream opening/closing valve, is closed, and the piston 122 is moved downward. Let When the application liquid filled in the syringe 121 is supplied to the drawing means 100, the suction valve 114 is closed, the supply valve 112 is opened, and the piston 122 is moved upward. The internal functional material A is pushed up and discharged.

The supply device 110 described above may be used to supply the functional material A to the drawing means 10 . In this case, it is preferable not to fully fill the liquid reservoir 13 inside the cartridge 12 with the functional material A. Alternatively, the drawing means 10 may supply the drawing part 11 of the drawing means 10 by immersing it in the functional material A stored in a small container while leaving the liquid storage part 13 empty. In this case, every time the drawing means 10 draws a line, the functional material A is immersed and supplied.

Note that the line drawing method when the drawing means 100 is used in the line drawing apparatus 1 is exactly the same as the line drawing method when the drawing means 10 shown in steps ST0 to ST5 is used except for the following changes. becomes.

(1) In step ST0, after the drawing means 100 is attached to the line drawing unit 20 and fixed, the functional material A is filled from the tank 115 to the outlet 106 of the drawing means 100 in FIG. 6 to discharge residual air. The state of the supply device 110 is that the syringe 121 is fully filled with the functional material A, the suction valve 114 is closed, the supply valve 112 is open, and the piston 122 is at the lowest position. so that it can be supplied to

As for the subsequent adjustment of the pressing force, a value that does not damage the surface of the substrate 4 by the drawing means 100 is obtained in advance, and the value is adjusted to that value. (Because the line width WL does not change with the magnitude of the pressing force).

(2) At step ST4, the supply device 110 supplies the functional material A to the drawing means 100 simultaneously with the movement of the drawing means. The supply amount per unit time is calculated by (relative moving speed V of drawing means 100)×(line width WL of film)×(thickness of film).

The functional materials to which the present invention can be applied are not particularly limited, but are preferably applied to various lyophilic agents, lyophobic agents, conductive inks, high-resistance inks, soldering fluxes, and the like.

Also, the substrate to which the present invention can be applied is not particularly limited, but it is preferably applied to glass substrates, various resin substrates, silicon wafers, films, paper, ceramic substrates, and the like.

The pressing force of the drawing means to the substrate is preferably 0.01 to 5N, more preferably 0.05 to 1N. If it is too small, the drawing means bounces when it lands on the base material, and it takes a long time until it stops.

INDUSTRIAL APPLICABILITY The line-drawing apparatus and line-drawing method for functional materials of the present invention can be used to form films of functional materials having various properties in linear patterns on a substrate.

REFERENCE SIGNS LIST 1 line drawing device 4 substrate 10 drawing means 11 drawing section 12 cartridge 13 liquid storage section 14 lid 15 bearing surface 16 drawing tip section 20 line drawing unit 21 holding plate 22 bolt 23 U-shaped elongated hole 24 split bolt 25 tip holding member 30 L-shaped member 31 screw shaft 32 counterweight 35 bracket 36 oscillating rotary shaft 37 stopper 38 blocking portion 39 bolt 40 XYZ stage 41 base 42 portal frame 43 stay portion 50 sucker 60 X-axis linear drive device 61 X-axis movable table 70 Y-axis linear driving device 71 Y-axis movable table 80 Z-axis linear driving device 81 Z-axis movable table 100 Drawing means
101 drawing part 102 syringe 103 manifold 104 supply port 105 outflow channel 106 outflow port 107 contact part 110 supply device 111 supply tube 112 supply valve 113 suction tube 114 suction valve 115 tank 116 compressed air source 120 syringe pump 121 syringe 122 piston 123 main body A Functional material BL Lines C, D, E, F Point CL Center line O of drawing means 100 Swing rotation center WL Line width θ Inclination angle

Claims (3)

Drawing means for drawing the functional material linearly on the base material by contacting the drawing part with the base material, pressing force imparting means for bringing the drawing part of the drawing means into contact with the base material with a constant pressing force, and the base material and a relative movement means for relatively moving the drawing means in which the drawing unit is in contact with the fixed and held base material with a constant force. and
In the pressing force imparting means, the drawing means is arranged at one end of the seesaw extending in both left and right directions from the pivotal rotation center capable of reciprocally rotating slightly, and a counterweight for adjusting the pressing force is arranged at one end on the opposite side. is placed,
The rocking rotation center of the seesaw is arranged at a position apart from a straight line along the base material surface within a range of ±1 mm when the drawing tip of the drawing means contacts the base material surface. Line drawing equipment for functional materials. Further, the counterweight is configured to be movable and positioned in the direction in which the seesaw extends from the rocking rotation center so that the pressing force that brings the drawing portion of the drawing means into contact with the base material can be adjusted. 2. A line drawing apparatus for functional materials according to claim 1, characterized in that: By using the line drawing apparatus for functional materials according to claim 1 or 2, the pressing force applying means moves and positions the counterweight so that the drawing part of the drawing means contacts the base material with a pressing force. After the adjustment, the drawing part of the drawing means to which the functional material is supplied is brought into contact with the base material fixed to the base material fixing means and moved by the relative movement means, so that the functional material is placed on the base material. A line-drawing method for a functional material, characterized by drawing a line on the

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