JP7228925B2 - Superheated steam generation utilization system - Google Patents

Description

The present invention relates to a system for generating superheated steam and utilizing the generated superheated steam.

Superheated steam is a high-temperature steam obtained by further heating saturated steam (dry saturated steam). It has a heat quantity approximately eight times higher than that of air, and has excellent heat conduction characteristics. used for processing.

The present invention provides a device for generating superheated steam (hereinafter referred to as "superheated steam generator") and a device for using the generated superheated steam (hereinafter referred to as "superheated steam utilization device"). This relates to systems, and related prior art includes the inventions disclosed in Patent Documents 1 to 3 below.

The device according to Patent Document 1 includes a flow control unit that can be connected to a city water line and can control the amount of water supply, a saturated steam generator with a built-in electric heater, a superheated steam generator with a built-in electric heater, and a superheated steam temperature measurement. means and Then, the amount of water supplied to the saturated steam generator installed before the superheated steam generator and the outlet temperature of the superheated steam generator are measured, and the amount of water supplied to the saturated steam generator and the saturated steam generator and the superheated steam generator are measured. A control signal controls the amount of power to be supplied. By performing such control, it is possible to stably supply superheated steam at an accurately controlled flow rate and temperature.

The device according to Patent Document 2 is a superheated steam generator that induction-heats a heating metal body in contact with steam with an induction coil, heats the steam in contact with the heating metal body, and generates superheated steam. The frequency of the AC power supply connected to the induction coil is 50 Hz or 60 Hz, and the wall thickness between the induction coil side facing the induction coil side and the steam contact surface in contact with the steam in the heating metal body is 10 mm or less. be. A temperature control unit is provided for feedback-controlling the temperature of the superheated steam heated by the heating metal body so that the deviation from the target temperature is less than ± 1 ° C. The temperature control unit controls the target temperature. And the PID constant is set according to the target steam generation amount. Such a device applies an AC voltage of 50 Hz or 60 Hz to a heated metal body having a wall thickness of 10 mm or less between the side of the induction coil and the steam contact surface, so that the PID control does not rely only on setting the PID constants. , the effect of being able to control the temperature of superheated steam with high speed response and high accuracy is shown.

In the superheated steam generator according to Patent Document 3, the water supplied to the heating pipe of the primary heating chamber is heated by the gas burner in the boiler section to become steam, and then heated by the heater in the superheated steam generating section to become superheated steam. . Of this superheated steam, only fine steam particles pass through the steam-water separation chamber, are reheated to a desired temperature in the secondary heating chamber, are sent to the processing chamber, and are subjected to the necessary processing on the object to be processed. Compressed air, nitrogen, or carbon dioxide gas is supplied to the processing chamber from an air supply device or a gas supply device as required. At this time, it is disclosed that the temperature control unit controls the heater based on the detection results of temperature sensors provided on the output side of the heating pipe and inside the processing chamber, thereby enabling highly accurate temperature control. there is

JP 2010-065870 A JP 2016-176613 A Republished patent WO2004/005798

FIG. 4 shows an example of a conventional superheated steam generation/utilization system 100. As shown in FIG.
This system 100 includes a boiler 110 that heats a liquid F to generate steam ST, a heater 120 that heats the steam ST generated by the boiler 110 to generate superheated steam SS, and the heater 120 generates It has a superheated steam utilization device 130 that discharges superheated steam SS from a nozzle 131 to heat the object BJ. In this superheated steam generation/utilization system 100 , a portion including the boiler 110 and the heater 120 (a portion other than the superheated steam utilization device 130 ) is called a superheated steam generation device 150 . The boiler 110 and the heater 120 are connected by a pipe 140 through which the steam ST flows, and the heater 120 and the superheated steam generator 130 are connected by a pipe 141 through which the superheated steam SS flows.

A liquid F is stored in the boiler 100, and the structure is such that the liquid F is heated by a heating means 111 installed in the liquid F. As shown in FIG. Further, when the liquid F becomes less due to the generation of steam ST, new liquid F is injected from a liquid injection port (not shown) to prevent dry heating.

In the conventional superheated steam generation and utilization system 100 as exemplified above, the amount of superheated steam generated by the superheated steam generator 150, the pressure for discharging the superheated steam SS into the superheated steam utilization device 130, the superheated steam utilization device 130 The temperatures of the superheated steam SS discharged into the are in a relationship of mutual influence.

For example, the amount of evaporation of liquid F (for example, water. In the following description, water will be exemplified for explanation.) in the boiler 110 is the same as the amount of superheated steam that is finally generated. The amount of evaporation of the water F in the boiler 110 depends on the pressure (hereinafter also referred to as “discharge pressure”) for discharging the superheated steam SS into the superheated steam utilization device 130 . Specifically, the higher the discharge pressure, the smaller the amount of water F evaporated from the boiler 110 (that is, the amount of superheated steam), and the lower the discharge pressure, the larger the amount of water F evaporated from the boiler 110 (that is, the amount of superheated steam). . When the temperature of the superheated steam SS is increased, the volume increases, resulting in a higher discharge pressure. Conversely, when the temperature of the superheated steam SS is decreased, the volume decreases, resulting in a lower discharge pressure.

Thus, in the conventional superheated steam generation/utilization system 100, the amount of superheated steam SS generated, the pressure at which the superheated steam SS is discharged into the superheated steam utilization device 130, and the superheated steam SS discharged into the superheated steam utilization device 130 are in a relationship of influencing each other, and if any parameter is changed, the other parameters are also changed. Therefore, it is difficult to set all the parameters to desired values, and adjustment is difficult.

Further, as described above, if the water F in the boiler 110 evaporates, the water F in the boiler 110 decreases and there is a possibility that the boiler 110 will be boiled dry. Therefore, it is necessary to pour new water F into the boiler 100. . The temperature of this new water F is generally cold at around 20 degrees Celsius, and it takes time to boil the injected water F again. ), the temperature of the superheated steam SS is lowered, and the discharge pressure is lowered.

In order to quickly solve this problem, it is conceivable to raise the temperature of the heating means 111 installed in the boiler 110 to increase the amount of evaporation. Even if the temperature rise of the heating means 111 in the boiler 110 is stopped, the temperature rise of the heating means 111 and the temperature of the water F in the boiler 110 do not stop immediately. is overheated, and the temperature of the superheated steam SS may become too high. When the temperature of the superheated steam SS rises, the discharge pressure automatically rises. As the discharge pressure increases, the amount of evaporation in the boiler decreases. Thus, the superheated steam generation/utilization system 100 using the boiler 110 has the problem that the temperature of the superheated steam, the amount of the superheated steam, and the discharge pressure are closely related, and it is difficult to independently control each of them.

In addition to the above problems, the apparatus mainly including the boiler 110 also has a problem that the start-up time tends to be long. Since the configuration of the system 100 tends to be complicated, the initial cost tends to be high and handling is difficult. Furthermore, there is also the problem that the entire system 100 tends to be large.

A high-frequency system, an induction heating system, an electric heater system, and the like are known as the superheated steam generating device 150 , but at present, most of the devices are mainly composed of the boiler 110 in any system.

The present invention has been made to solve the above problems, and the amount of superheated steam generated by the superheated steam generator, the pressure at which the superheated steam is discharged into the superheated steam utilization device, and the discharge pressure into the superheated steam utilization device To provide a superheated steam generation/utilization system capable of independently adjusting the temperatures of superheated steam and accurately setting arbitrary conditions.

The present invention, which has solved the above problems, is as follows.
(First aspect)
a supply means for pumping the liquid;
a first heater that heats the supplied liquid to generate a heated liquid;
a second heater that sprays the generated heating liquid inside and reheats the generated mist in the process of moving inside to generate superheated steam;
a superheated steam utilization device that discharges the generated superheated steam and heats an object;
supply amount adjusting means for adjusting the amount of liquid supplied to the first heater;
a second heater control means for adjusting the heating temperature of the mist sprayed inside the second heater;
a discharge pressure adjusting means for adjusting the pressure for discharging the superheated steam into the superheated steam utilization device;
A system for generating and utilizing superheated steam, characterized by comprising:

(Effect)
According to the superheated steam generation/utilization system of this aspect, the amount of superheated steam generated by the superheated steam generator, the pressure at which the superheated steam is discharged into the superheated steam utilization device, and the temperature of the superheated steam discharged into the superheated steam utilization device are respectively It can be adjusted independently and can be precisely set to arbitrary conditions.

(Regarding the control of the amount of superheated steam)
For example, when it is desired to increase the amount of superheated steam generated by the superheated steam generator, the amount of mist sprayed into the second heater is increased by increasing the amount of liquid supplied to the first heater by the supply amount adjusting means. increases, and the amount of superheated steam that is finally generated can be increased. If it is desired to reduce the amount of superheated steam generated, the amount of liquid supplied to the first heater should be reduced.

As described above, in the conventional boiler-type superheated steam generator as shown in FIG. 4, the amount of superheated steam is increased or decreased by controlling the heating means provided in the boiler. The amount of water evaporated in the boiler increased or decreased under the influence of the discharge pressure of the boiler, and as a result, the amount of superheated steam generated also increased or decreased.

However, in the first heater of this aspect, instead of evaporating a liquid to generate steam as in a boiler, a heating liquid is generated, and the heating liquid generated in the first heater is transferred to the second heater. Therefore, even if the pressure (discharge pressure) for discharging superheated steam into the superheated steam utilization device increases or decreases, there is almost no effect on the final amount of superheated steam generated.

Specifically, when the discharge pressure adjusting means increases or decreases the pressure for discharging superheated steam into the superheated steam utilization device, the internal pressure of the second heater also increases or decreases (discharge pressure and second heating The pressure inside the vessel becomes almost the same). However, since this embodiment generates a heated liquid by heating the liquid while suppressing boiling in the first heater, the pressure in the second heater from the first heater is higher than the pressure in the second heater. The pressure for supplying the heating liquid is overwhelmingly higher. For example, the pressure for supplying the heating liquid from the first heater to the second heater can be about 3 to 4 MPa, and the pressure in the second heater can be about 0.12 to 0.13 MPa. can. As a result, even if the discharge pressure is increased or decreased, the fluctuation of the discharge pressure hardly affects the amount of superheated steam generated (within a range of minute difference). Therefore, in this aspect, it is possible to easily and accurately increase or decrease only the amount of superheated steam generated simply by adjusting the supply amount of the liquid with the supply amount adjusting means.

(Regarding control of superheated steam discharge pressure)
The pressure for discharging the superheated steam into the superheated steam utilization device can be increased or decreased by the discharge pressure adjusting means. This discharge pressure adjusting means can be provided, for example, in the front stage portion of the superheated steam utilization device or in the superheated steam utilization device itself. As the discharge amount adjusting means, for example, a valve (for example, an electromagnetic valve or a manual valve) for adjusting the flow rate of the superheated steam, an orifice, an exhaust throttle valve , or the like can be used.

As described above, in the conventional boiler-type superheated steam generation/utilization system 100 as shown in FIG. The pressure, the pressure in the heater 120 and the pressure in the boiler 110 were approximately the same. Therefore, if the pressure in the boiler 110 changes when the water injected into the boiler 110 is boiled again, for example, there is a problem that the pressure for discharging the superheated steam SS changes accordingly.

Further, even if the conventional boiler-type superheated steam generation/utilization system 100 is provided with a discharge pressure adjusting means as in the present embodiment to increase or decrease the discharge pressure, there is another problem. That is, as described above, in the conventional boiler-type superheated steam generation/utilization system 100, the discharge pressure, the superheated steam temperature, and the amount of superheated steam are closely related. However, there is a problem that it is difficult to adjust only the discharge pressure to an arbitrary value.

In this aspect, the discharge pressure can be easily increased or decreased by providing the discharge pressure adjusting means. In addition, even if the discharge pressure is changed, the amount of superheated steam and the temperature of the superheated steam are not affected.

That is, in the first heater of this aspect, instead of evaporating a liquid to generate steam as in a boiler, a heating liquid is generated, and the heating liquid generated by the first heater is placed in the second heater. Therefore, even if the pressure for discharging superheated steam into the superheated steam utilization device is increased or decreased by the discharge pressure adjusting means, there is almost no effect on the final amount of superheated steam generated.

Specifically, when the discharge pressure adjusting means increases or decreases the pressure for discharging superheated steam into the superheated steam utilization device, the internal pressure of the second heater also increases or decreases (discharge pressure and second heating The pressure inside the vessel becomes almost the same). However, since this embodiment generates a heated liquid by heating the liquid while suppressing boiling in the first heater, the pressure in the second heater from the first heater is higher than the pressure in the second heater. The pressure for supplying the heating liquid is overwhelmingly higher. Therefore, even if the discharge pressure is increased or decreased, the fluctuation of the discharge pressure hardly affects the amount of superheated steam generated. That is, the amount of superheated steam generated can be adjusted by the supply amount adjusting means without being affected by changes in the discharge pressure.

(About control of superheated steam temperature)
The temperature of the superheated steam can be controlled by adjusting the heating temperature of the mist sprayed inside the second heater by the second heater control means. The second heater control means can be, for example, a control device that adjusts the temperature of the heater provided in the second heater.

As described above, in the conventional boiler-type superheated steam generation/utilization system 100 as shown in FIG. However, when the heating temperature of the boiler 110 is raised in order to raise the temperature of the superheated steam SS, the pressure inside the boiler 110 automatically rises accordingly. The discharge pressure will also rise. Then, when the pressure in the boiler 110 increases, the amount of water F evaporated in the boiler 110 is suppressed and decreases, resulting in a decrease in the amount of superheated steam SS. Thus, in the conventional system 100, it was difficult to independently increase or decrease the temperature of the superheated steam without affecting the discharge pressure or the amount of superheated steam.

In this aspect, the temperature of the superheated steam generated by the second heater can be easily controlled by adjusting the heating temperature of the mist sprayed inside the second heater by the second heater control means. can. The temperature of the superheated steam can be controlled more quickly and accurately than the conventional system, which controls the temperature of the superheated steam by controlling the heating temperature of the boiler.

Moreover, even if the heating temperature of the mist sprayed inside the second heater is changed in order to adjust the superheated steam temperature, the discharge pressure and the amount of superheated steam are hardly affected. That is, in the superheated steam generation and utilization system according to this aspect, it is the discharge pressure adjusting means that determines the discharge pressure, and it is the supply amount adjusting means that determines the amount of superheated steam. has a very large influence, it is almost unaffected by changes in the superheated steam temperature.

(Regarding the first heater)
In addition, in the first heater of this aspect, it is preferable to suppress boiling when heating the liquid, and to keep the liquid in the liquid state without vaporizing the liquid as much as possible. For example, when distilled water (corresponding to the liquid) is supplied to the first heater, high-temperature water (e.g., high-pressure high-temperature water) is used while suppressing the generation of steam when the distilled water is heated by the first heater. (corresponding to the heating liquid) is preferably generated. Compared with the conventional superheated steam generator as shown in FIG. 4, the superheated steam generator of this embodiment has an advantage of high electric heating efficiency. That is, when the first heater that generates the heating liquid while suppressing boiling is used, the watt density (unit: W/cm ² ) of the surface of the heating portion (for example, the heater) of the first heater is kept constant, and the second Since the inside of the first heater is filled with the liquid and the heating portion is always in contact with the liquid, the electric heating efficiency can be increased. By increasing the electric heating efficiency of the first heater in this way, it is possible to make it smaller than conventional products.

(Second aspect)
The superheated steam generation and utilization system according to the first aspect, wherein the supply means is a pump that supplies the liquid to the first heater at a pressure equal to or higher than the vapor pressure of the liquid.

(Effect)
The liquid supply means of the second aspect supplies the liquid to the first heater at a pressure equal to or higher than the vapor pressure of the liquid. Supplying the liquid to the first heater at a pressure equal to or higher than the vapor pressure of the liquid can suppress boiling when the liquid is heated by the first heater. Therefore, it is possible to avoid the occurrence of uneven heat transfer due to boiling and the occurrence of excessively high temperature portions due to overheating of one portion.

(Third aspect)
a heating liquid measuring instrument provided at the rear of the first heater or on a path from the first heater to the second heater for measuring the temperature of the heating liquid;
The superheated steam generation and utilization system according to the first or second aspect, further comprising first heater control means for controlling the temperature of the heating means of the first heater based on the temperature measured by the heating liquid measuring instrument.

(Effect)
The superheated steam generation/utilization system according to this aspect includes the rear part of the first heater (the rear part of the first heater, for example, around the exit), or the path from the first heater to the second heater (for example, the first heating A heating liquid measuring device (heating liquid measuring device) is provided in a pipe connecting between the device and the second heater.The heating liquid flows inside the pipe. In addition, a first heater control means (for example, a control device) is also provided for controlling the heating temperature of the heating means (for example, a heater) of the first heater based on the temperature of the heating liquid measured by the heating liquid measuring instrument. ing.

By controlling the heating temperature of the first heater by the first heater control means, the temperature of the heating liquid discharged from the first heater can be kept constant. As a result, it becomes easier to control the heating temperature of the second heater.

In addition, in the above-mentioned Patent Document 1, the amount of water supplied to the saturated steam generator and the outlet temperature of the superheated steam generator are measured and processed to generate a control signal, and the amount of water supplied to the saturated steam generator, the saturated steam generator and superheating It is disclosed that by controlling the amount of electric power supplied to the electric heater built in the steam generator, it is possible to stably supply superheated steam at an accurately controlled flow rate and temperature.

However, in the control described in Patent Document 1, since the electric power amount of the electric heaters of both the saturated steam generator and the superheated steam generator is controlled based on the temperature of the superheated steam, the electric heater of the saturated steam generator and the superheater It is difficult to predict which of the electric heaters of the steam generator should be controlled to what degree to obtain superheated steam at a desired temperature, and the details of control tend to be complicated. As in this embodiment, by controlling the heating temperature of the first heater based on the temperature of the heating liquid discharged from the first heater, for example, the temperature of the heating liquid discharged from the first heater is kept constant. It is easy to keep the temperature of the finally obtained superheated steam at the desired value.

(Fourth aspect)
a superheated steam measuring instrument provided in the rear part of the second heater or in a path from the second heater to a subsequent device for measuring the temperature of the superheated steam;
The second heater control means controls the temperature of the heating means of the second heater based on the temperature measured by the superheated steam measuring instrument. Steam generation utilization system.

(Effect)
The superheated steam generation/utilization system according to this aspect includes the rear part of the second heater (the rear part of the second heater, for example, around the exit), or the path from the second heater to the subsequent equipment (for example, the second heater and the equipment in the subsequent stage.The superheated steam flows through the inside of the pipe.) is provided with a measuring instrument for the temperature of the heating steam. A structure in which the second heater control means (e.g., control device) controls the heating temperature of the heating means (e.g., heater) of the second heater based on the temperature of the superheated steam measured by the superheated steam temperature measuring instrument. It has become.

By controlling the heating temperature of the second heater by the second heater control means, the temperature of the superheated steam discharged from the second heater can be kept constant. As a result, superheated steam at a desired temperature can be obtained without controlling the heating temperature of the first heater. The temperature of the superheated steam may be brought closer to the desired value by controlling the heating temperature of the first heater.

It should be noted that the advantages when compared with the above-mentioned Patent Document 1 are the same as those described in the column of effects of the third aspect, so description thereof will be omitted here.

(Fifth aspect)
The first heater is
a heating tube that is meandering and arranged in steps;
cartridge heaters respectively arranged inside the heating tubes of each stage and extending from one end side to the other end side of the heating tubes;
A superheated steam generation and utilization system according to any one of the first to fourth aspects.

(Effect)
If a cartridge heater is used as the first heater, pressure resistance can be increased. In particular, since the interior of the first heater is assumed to be at high pressure (eg, 3 to 4 MPa), it is advantageous to use a heater with high pressure resistance.

Moreover, the length of a commercially available cartridge heater is generally about 500 mm. Therefore, if the length of the heating tube of the first heater is lengthened (for example, about 2 m), there arises a problem that only a part of the heating tube can be heated. In this embodiment, the heating tubes are meandering and arranged in stages, and the cartridge heaters are arranged inside the heating tubes of each stage, thereby preventing the occurrence of the aforementioned problems. In addition, by arranging the heating pipes of the cartridge heater in a meandering manner, it is possible to improve the airtightness and increase the power density and the surface temperature.

Class-1 pressure vessels are obligated to be inspected by the prefectural labor bureau at the time of manufacture, installation, etc., and performance inspections are obligated once a year even after the start of use. By arranging the heating pipes in a meandering and stepped manner as in this aspect, the entire first heater can be downsized, and as a result, there is an advantage that the first heater does not correspond to the first pressure vessel.

(Sixth aspect)
The second heater is
It has a nozzle for spraying mist at the bottom, an exhaust port for discharging superheated steam at the top, and a heating cylinder equipped with a heating means inside,
Superheating according to any one of the first to fifth aspects, wherein the mist sprayed inside the heating cylinder is heated by the heating means to become superheated steam in the process of rising in the cylinder. Steam generation utilization system.

(Effect)
According to the second heater of this aspect, the mist sprayed at high pressure becomes a high-speed jet (for example, about 100 m/s) when the pressure is released, and diffuses as a high-speed air current inside the second heater. Therefore, contact efficiency with a heating means (for example, a heater) is increased, and heating is facilitated.

(Seventh aspect)
The second heater has a supply port for supplying preheating heated air and a discharge port for discharging the preheating heated air,
The superheated steam generation and utilization system is
a preheating heated air measuring device that is provided in the rear part of the second heater or in a path from the second heater to a subsequent device and measures the temperature of the preheating heated air;
When the temperature of the preheating heated air measured by the preheating heated air measuring instrument becomes higher than the predetermined temperature of the mist sprayed inside the second heater, the preheating heating and a control means for stopping the supply of air.

(Effect)
According to this aspect, it is possible to appropriately preheat before operating the second heater. Therefore, when the second heater is operated, it is possible to prevent the occurrence of dew condensation inside the second heater and the generation of a large amount of drain.

According to the superheated steam generation/utilization system, the amount of superheated steam, the temperature of the superheated steam, and the discharge pressure can be independently adjusted, and arbitrary conditions can be set with high accuracy.

1 is an overall configuration diagram of a first embodiment of a superheated steam generation/utilization system according to the present invention; FIG. It is the schematic of the 1st heater of the said 1st Embodiment. It is the schematic of the 2nd heater of the said 1st Embodiment. 1 is an overall configuration diagram of a conventional system for generating and utilizing superheated steam; FIG.

Preferred embodiments of the present invention are described below. The following description and drawings merely show one embodiment of the present invention, and should not be construed as limiting the content of the present invention to this embodiment.

(Liquid F)
Although the liquid F supplied to the superheated steam generator 10 is not particularly limited, for example, distilled water (pure water or purified water), city water, industrial water, rain water, or the like can be used. However, city water contains minerals/ionized substances. Deposits of those components contained in city water adhere to the inner surface of the heating pipe 43 of the first heater 4, the nozzle 54 of the second heater 5, and the inner surface of the cylindrical portion 53 of the second heater 5. , malfunction may occur. Therefore, it is preferable to use distilled water as the liquid F. When industrial water or rainwater is used, it is preferable to supply the water to the first heater 4 after removing impurities by RO membrane treatment.

(Supply Means 3)
As shown in FIG. 1, the liquid F is supplied to the first heater 4 by supply means 3 . Although the supply means 3 is not particularly limited, for example, a pump (preferably a metering pump) can be used. As for the type of pump, both positive displacement pumps and non-positive displacement pumps can be used, but positive displacement pumps are particularly preferred. As positive displacement pumps, piston pumps, diaphragm pumps, plunger pumps, screw pumps, gear pumps, vane pumps and the like can be used, but diaphragm pumps and plunger pumps (quantitative high-pressure pumps) are particularly preferred.

In addition, when a plunger pump is used, precise positive displacement metering is possible (the number of revolutions of the plunger pump and the amount of liquid F supplied to the first heater 4 are approximately proportional), so the flow rate of this plunger pump is It is possible to combine a total of two roles. Therefore, when a plunger pump is used, installation of the flow meter 2 becomes unnecessary, and the initial cost can be suppressed.

Further, in the superheated steam generation/utilization system of the present embodiment, there is an advantage that feedback control of the supply amount of the liquid F to be supplied to the first heater 4 as in Patent Document 1 is unnecessary. That is, the amount of superheated steam SS discharged from the second heater 5 is substantially the same as the amount of heating liquid HF supplied from the first heater 4 to the second heater 5 . Also, the amount of heating liquid HF discharged from the first heater 4 is substantially the same as the amount of liquid F supplied to the first heater 4 . Therefore, by controlling the flow rate of the liquid F injected into the first heater 4 by the supply means 3, the amount of superheated steam SS can be easily controlled, and the amount of superheated steam generated can be easily controlled automatically. Become.

When the superheated steam generator 10 is actually operated, the liquid F is pressurized at a high pressure by the supply means 3, and the amount of the superheated steam SS discharged from the second heater 5 is equal to the amount of the liquid F in the first heater. 4 is preferred. Moreover, it is preferable that the supply amount of the liquid F to the first heater 4 is inverter-controlled (inverter rotation speed control).

The supply amount of the liquid F supplied to the first heater 4 is, for example, preferably 0.1 to 10 L/min, more preferably 1 to 8 L/min, and even more preferably 5 L/min. . If the supply amount of the liquid F supplied to the first heater 4 is small (for example, less than 0.1 L/min), the superheated steam generator 10 can generate more superheated steam than originally. It is inefficient because it does not generate enough steam. Further, when the amount of liquid F supplied to the first heater 4 is large (for example, when it is more than 10 L/min), the amount of superheated steam SS discharged from the second heater 5 also increases, Since there is a limit to the heating capacity of the heating means (for example, a heater) of the heater 5, if the limit is exceeded, the superheated steam SS is not sufficiently heated (the temperature of the superheated steam SS is lower than the desired temperature). There is a risk that the second heater 5 will be exhausted.

As described above, by increasing or decreasing the amount of the liquid F supplied to the first heater 4 by the supply means 3, the amount of the superheated steam SS generated by the second heater 5 can be increased or decreased. The amount of the liquid F supplied by the supply means 3 can be adjusted by the supply amount adjustment means 3A. The supply amount adjusting means 3A is not particularly limited as long as it can adjust the supply amount of the liquid F supplied to the first heater 4. For example, a manual flow rate adjustment knob provided on the pump 3 , an electromagnetic flow control knob provided on the pump 3 and a control device for moving the knob, control of the rotation speed of the pump 3 by an inverter, and the like.

Moreover, when the liquid F is supplied to the first heater 4 by the supply means 3, it is preferable to supply the liquid F at a high pressure. By supplying the liquid F at high pressure, the liquid F can be kept liquid in the first heater 4 without boiling. Specifically, it is preferable to supply the liquid F to the first heater 4 at a pressure equal to or higher than the vapor pressure of the liquid F. Since the vapor pressure curve is determined for each liquid F, it is preferable to determine the pressure when supplying the liquid F based on this vapor pressure curve. For example, when water is supplied to the first heater 4 as the liquid F, it is preferably supplied at a pressure of 3 to 7 MPa or higher, more preferably 3 to 4 MPa or higher. Although the means for controlling the supply pressure of the liquid F (supply pressure control means) is not particularly limited, for example, a manual pressure adjustment knob provided in the pump 3, an electromagnetic pressure control knob provided in the pump 3 Examples include an adjustment knob, a control device for moving the knob, and control of the rotation speed of the pump 3 by an inverter.

(Flow meter 2)
A flow meter 2 is preferably provided upstream of the first heater 4 to measure the amount of the liquid F supplied to the first heater 4 . The position where the flow meter 2 is provided is not particularly limited, but for example, it may be provided between the filter 1 and the supply means 3 as shown in FIG. 1 or between the supply means 3 and the first heater 4 (not shown) be able to. Particularly preferably, the flow meter 2 is preferably provided on the pump suction side (before the supply means 3 as shown in FIG. 1). The type of the flow meter 2 is not particularly limited, but for example, an ultrasonic (clamp-on) flow meter, an impeller flow meter, an electromagnetic flow meter, a gear flow meter, or the like can be used.

(Filter 1)
Before the liquid F is supplied to the first heater 4 , it is preferable to remove foreign matter contained in the liquid F with the filter 1 . This is because, if the liquid F contains foreign matter, the foreign matter accumulates inside the first heater 4 and the second heater 5 and causes failure.

In FIG. 1, the filter 1 is provided in the preceding stage of the supply means 3 to remove foreign matter before supplying the liquid F to the supply means 3, but the configuration is not limited to this. Although not shown, the filter 1 may be provided somewhere between the supply means 3 and the first heater 4, for example.

As the filter 1, any known filter can be used. For example, general filtration filters, microfiltration filters, ultrafiltration filters, RO membranes, ion exchange resins, etc. can be used. In particular, it is preferable to use a pleated filter in which a flat filter medium is folded into a bellows shape to form a plurality of pleats and formed into a cylindrical shape. This is because the processing amount of the liquid F per unit time is large and the peeling of the cake formed on the outer surface of the folds is easy. The device for removing the cake formed on the pleated filter and its outer surface is not particularly limited, but for example, those disclosed in JP-A-2020-93231 and JP-A-2021-16826 can be used.

(First heater 4)
As shown in FIG. 1, the first heater 4 heats the liquid F supplied to the first heater 4 to generate the heated liquid HF. The first heater 4 is not particularly limited as long as it can heat the liquid F, but it is preferable to suppress boiling of the liquid F and generate a high-pressure and high-temperature heating liquid HF. For example, the pressure of the generated heating liquid HF is preferably 2-8 MPa, more preferably 2-5 MPa, and even more preferably 4 MPa. If the pressure of the generated heating liquid HF is less than 2 MPa, the particle size of the mist sprayed from the spray nozzle 54 provided inside the second heater 5 becomes large, and there is a risk that the mist cannot be evaporated instantaneously. be. If the pressure of the generated heating liquid HF is higher than 8 MPa, the first heater 4 has a limit value of pressure resistance strength, so the limit value may be exceeded. As a result, the heating liquid HF ( Or liquid F) may leak out. The temperature of the generated heating liquid HF is preferably 170 to 300.degree. C., more preferably 220 to 250.degree. C., even more preferably 240.degree. When the temperature of the generated heating liquid HF is lower than 170° C., the mist sprayed inside the second heater 5 becomes difficult to evaporate instantaneously. When the temperature of the generated heating liquid HF is higher than 250° C., the heating liquid HF boils inside the first heater 4, and as a result, the temperature of the heater of the first heater 4 rises locally. may deteriorate.

As described above, when the heating liquid HF is generated by the first heater 4, it is preferable to generate the heating liquid HF at a high pressure and a high temperature while suppressing the boiling of the liquid F. In order to generate such heating liquid HF, it is preferable to use the first heater 4 illustrated in FIG. 2, for example. The first heater 4 has a supply port 41 for the liquid F, a heating pipe 43 for heating the liquid F, and an outlet 42 for the generated heating liquid HF. The heating pipe 43 is arranged so that the liquid F flowing inside the heating pipe 43 meanders. Specifically, the first heating tube 43A, the third heating tube 43C and the fifth heating tube 43E are arranged substantially parallel. Assuming that the left side of FIG. 2 is the one end side ONS and the right side is the other end side OTS, a supply pipe 41T having a supply port 41 is connected to the one end side ONS end of the first heating pipe 43A. The other end side OTS end portion and the other end side OTS end portion of the third heating pipe 43C are connected by the second heating pipe 43B. The ONS end on one end of the third heating pipe 43C and the ONS end on one end of the fifth heating pipe 43E are connected by a fourth heating pipe 43D, and the OTS end on the other end of the fifth heating pipe 45E A discharge pipe 42T having a discharge port 42 is connected.

In FIG. 2, the movement path HL of the liquid F flowing through the first heater 4 is indicated by dotted arrows. After the liquid F supplied to the first heater 4 from the supply port 41 passes through the inside of the supply pipe 41 and reaches the ONS end on the one end side of the first heating pipe 43A, it flows through the inside of the first heating pipe 45A to one end. from the side ONS to the other side OTS. Then, after passing through the inside of the second heating tube 43B, it passes through the inside of the third heating tube 45C from the other end side OTS to the one end side ONS. Then, after passing through the inside of the fourth heating tube 43D, it passes through the inside of the fifth heating tube 45E from the one end side ONS to the other end side OTS, and finally passes through the inside of the discharge pipe 42T and is discharged from the discharge port 42. be.

As described above, from the first heating pipe 43A to the ONS end on the first heating pipe 43A to the OTS end on the other end of the fifth heating pipe 43E, the liquid F is heated while boiling is suppressed, and the liquid F is heated to a high pressure.・It becomes high temperature heating liquid HF. A heater input cable 44a is connected to each ONS end on one end side of the first heating tube 43A, the third heating tube 43C, and the fifth heating tube 43E, and heat is supplied from the input cable 44a. It has become. Further, a heating means (heater 44b in the example of FIG. 2) extending from the one-end side ONS toward the multi-end side OTS is provided inside each of the heating tubes 43A, 43C, and 43E. The liquid F flowing inside each of the heating pipes 43A to 43E moves from the supply port 41 to the discharge port 42 while being heated by coming into contact with the outer surface of the heated heating means. In the embodiment of FIG. 2, if the temperature of the liquid F flowing through the supply pipe 41T is approximately 20° C. and the temperature of the liquid F flowing through the discharge pipe 42T is approximately 250° C., for example, the temperature of the liquid F flowing through the heating pipe 43B is Heating is preferably performed so that the temperature of the liquid flowing through the heating tube 43D reaches about 95°C and the temperature of the liquid flowing through the heating pipe 43D reaches about 170°C.

It is preferable that the liquid F flows slowly inside each of the heating tubes 43A to 43E. This is because the temperature of the heated liquid F can be controlled more precisely as the residence time in the heating tubes 43A to 43E is increased.

Although FIG. 2 illustrates the heating tube 43 composed of the first heating tube 43A to the fifth heating tube 43E, the length of the heating tube 43 may be changed arbitrarily. For example, the fourth heating tube 43D and the fifth heating tube 43E in FIG. 2 are omitted and the heating tube 43 is composed of the first heating tube 43A to the third heating tube 43C (the length of the heating tube 43 is shorter than that in FIG. 2). form). Further, the heating pipe 43 (a mode in which the length of the heating pipe 43 is longer than that in FIG. 2) in which the sixth heating pipe and the seventh heating pipe are connected to the rear stage of the fifth heating pipe 43E in FIG. 2 may be used. When the length of this heating tube 43 is increased, the position, direction, and length of the sixth heating tube are the same as those of the second heating tube 43B, and the position, direction, and length of the seventh heating tube are the same as those of the third heating tube. As with the heating tube 43C, it is preferable that the heating tube 43 as a whole meanders in a zigzag manner. The length of each heating tube 43 in the width direction WD is preferably substantially the same as the length of the heating means (the heater 44b in the example of FIG. 2) in the width direction WD. This is because if the length of the heating tube 43 in the width direction WD is longer than the length of the heating means 44b in the width direction WD, the liquid F is not heated at some locations in the width direction WD.

As described above, it is preferable that the heating pipe 43 is provided in a zigzag and stepped manner as shown in FIG. By making the heating pipe 43 meander, the entire superheated steam generator can be made compact.

(First thermometer 6A, first heater control means 7A)
The rear part of the first heater 4 (in the embodiment of FIG. 2, the other end of the fifth heating pipe 43E, the discharge pipe 42T, etc.) and the path from the first heater 4 to the second heater 5 is preferably provided with a thermometer 6 for measuring the temperature of the heating liquid HF. In the embodiment of FIG. 1, a thermometer 6 (first temperature A total of 6A) is installed. Then, based on the temperature of the heating liquid HF measured by the thermometer 6 (6A), the control means 7 (first heater control means 7A) controls the heating means of the first heater 4 (implemented in FIGS. 1 and 2). For example, it is preferable to automatically adjust the heating temperature by the heater) by PID control. Specifically, when the temperature of the heating liquid HF is lower than the desired temperature, the control means 7 (7A) raises the temperature of the heating means 44b, and when the temperature of the heating liquid HF is higher than the desired temperature, , the control means 7 (7A) should lower the temperature of the heating means 44b. When two or more thermometers 6 and control means 7 are provided as in the embodiment of FIG. The control means 7 for adjusting the output of the heating means 44b of the first heater 4 based on the temperature measured by the first thermometer 6A is called the first heater control means 7A. A known thermometer such as a mercury thermometer or an alcohol thermometer can be used as the first thermometer 6A.

(Second heater 5)
As shown in FIGS. 1 and 3, the heating liquid HF generated in the first heater 4 moves through the interior of the connecting pipe 8 to the second heater 5 and is sprayed inside the second heater 5. be. The mist generated by this spraying is reheated in the process of moving inside the second heater 5 and becomes superheated steam SS. Then, the superheated steam SS generated by the second heater 5 passes through the inside of the system discharge pipe 9 and the latter superheated steam utilization device 13 (for example, a drying furnace, a heat treatment furnace, a carbonization furnace, an organic matter decomposition furnace, etc. can be sent).

The detailed structure of the second heater 5 will now be described with reference to FIG. Since FIG. 3 shows an example of the embodiment of the second heater 5, other structures may be used as the second heater 5, but the illustrated one generates superheated steam SS from the heating liquid HF. It is an embodiment having excellent performance as a device.

The second heater 5 shown in FIG. 3 has a cylindrical portion 53 extending in the vertical direction UDD, a supply pipe 51T is attached to the lower end of the cylindrical portion 53, and a discharge pipe 52T is attached to the upper end of the cylindrical portion 53. It is A supply port 51 is provided at the tip of the supply pipe 51T (the portion in contact with the tubular portion 53 is called the proximal end), and the tip of the discharge pipe 51T (the portion in contact with the tubular portion 53 is called the proximal portion). ) is provided with an outlet 52 .

One end side of the connecting pipe 8 is connected to the first heater 4 , and the other end side of the connecting pipe 8 is connected to the second heater 5 . More specifically, the other end of the connecting pipe 8 enters the second heater 5 from the supply port 51 of the second heater 5, passes through the inside of the supply pipe 51T, and passes around the axis of the lower end of the tubular portion 53. extends up to A spray nozzle 54 is provided at the other end of the connecting pipe 8 extending in this manner.

The type of the spray nozzle 54 is not particularly limited as long as it can spray the heating liquid HF, and either a one-fluid nozzle or a two-fluid nozzle may be used. However, since the two-fluid nozzle uses compressed air, a large amount of power is used to generate the compressed air. Therefore, from the viewpoint of reducing running costs, it is preferable to use the one-fluid nozzle.

The spray nozzle 54 sprays mist at high pressure, and in FIG. 3, a one-fluid nozzle is used as the spray nozzle 54 . This one-fluid nozzle 54 sprays a mist of 2 to 9 L/min using a pressure of 2.5 to 8 MPa. The mist sprayed from such a single-fluid nozzle 54 has a uniform particle size, and the average particle size is about 20 to 30 μm, and the maximum particle size is about 40 μm or less, which is extremely small. Therefore, the sprayed mist instantly evaporates into vapor. This gaseous vapor is wet vapor having a temperature of about 170° C. or higher, and its particle size is uniform with about 5 μm or less. For this spray nozzle 54, for example, one having an orifice diameter of about 0.5 to 1 mm can be used. For example, a product manufactured by ZIDE (model number: KR-80) can be used.

In addition, the said average particle diameter means what measured the particle|grains which pass an interference fringe with a laser diffraction method, and calculated|required Sauter Mean Diameter (SMD) from the measurement result. The Sauter mean particle size means a particle size having the same surface area to volume ratio as the total area of all particles to the total surface area of all particles, and can be obtained by dividing the total area by the total surface area.

In the second heater 5 shown in FIG. 3, the mist sprayed from the spray nozzle 54 turns into gaseous steam and rises in the cylindrical portion 53, and is reheated to become superheated steam SS in the course of the rise. In FIG. 3, the movement path ML of the gaseous steam and the superheated steam SS within the second heater 5 is indicated by a thick dotted arrow. The generated superheated steam SS passes through the inside of the discharge pipe 52T connected to the upper portion of the cylindrical portion 53 and is discharged from the discharge port 52 to the outside of the second heater 5 .

A heating means 56 is arranged inside the cylindrical portion 53, and the mist is heated by the heating means 56 to generate the superheated steam SS. Although the type of the heating means 56 is not particularly limited, examples thereof include a heater, a heat medium oil heat exchanger, and the like. Examples of the heater include a U-tube, a plate heater, and a fin tube heater. The heating means 56 shown in FIG. 3 is a U-shaped tube, and ten or more U-shaped tubes hang down from the top surface of the cylindrical portion 53 . The position of the U-shaped tube in the vertical direction UDD can be determined arbitrarily, but from the viewpoint of sufficiently heating the mist, the heating means 56 is arranged at least from the height of the supply pipe 51T to the height of the discharge pipe 52T. is preferred.

A drain pipe 57 for discharging the drain DR is provided in the lower portion of the cylindrical portion 53, and the drain DR generated by spraying the mist from the spray nozzle 54 is discharged to the outside through the drain pipe 57. . The drain pipe 57 is provided with a valve 58a, which is in an open state while the mist is being sprayed, and is switched to a closed state when the mist spraying is finished and the drain DR is discharged.

Moreover, before starting the operation of the second heater 5, it is preferable to perform a preheating operation in order to prevent dew condensation from occurring inside the cylindrical portion 53. As shown in FIG. Specifically, the valve 58 a is closed and the valve 58 b is opened to send preheating heated air AR into the pipe 59 . The temperature of the supplied preheating air AR is preferably 170 to 250.degree. C., more preferably 220 to 240.degree. The preheating heated air AR supplied into the pipe 59 passes through the drain pipe 57, enters the cylindrical portion 53 from the supply port 59a of the preheating pressurized air AR, and moves upward from the lower portion DS of the cylindrical portion 53 to the upper portion US. After that, it is discharged to the outside through the discharge pipe 52T (also serving as the discharge port 59b for the preheating pressurized air AR in FIG. 3). A thermometer 6C for measuring the temperature of the preheating air AR may be provided in the exhaust pipe 52T. The temperature of the preheating air AR passing through the outlet 59b is measured by the thermometer 6C, and the measured temperature of the preheating air AR exceeds the temperature of the mist to be sprayed (preferably predetermined). At this stage, it is determined that the cylindrical portion 53 has been sufficiently preheated (a state in which dew condensation hardly occurs even if the mist is sprayed), and a control device (not shown) supplies preheating pressurized air AR. to stop preheating. For example, when the temperature of the mist to be sprayed is set to 230°C in advance, the preheating operation is terminated when the temperature of the preheating heating air AR discharged from the discharge pipe 52T becomes higher than 230°C. After the preheating work is finished, the supply of the heated air AR is stopped, the valve 58b is closed, and the valve 58a is opened, and mist is sprayed from the spray nozzle 54 to generate the superheated steam SS. It should be noted that the determination of whether or not the preheating work should be completed is made by measuring the temperature of the preheating air AR passing through the discharge pipe 52T to determine whether the cylindrical portion 53 has sufficiently warmed up. A thermometer 6 (6D) is attached directly to the cylindrical portion 53, and when the temperature of the inner wall surface of the cylindrical portion 53 reaches or exceeds the temperature of the mist to be sprayed (preferably predetermined), preheating is terminated. may

In the above description, the example of FIG. 3 in which the other end side of the connecting pipe 8 extends to the inside of the cylindrical portion 53 has been shown, but the embodiment is not limited to this. For example, the other end of the connecting pipe 8 may be positioned near the supply port 51 of the second heater 5 and the spray pipe 55 may be provided so as to be continuous with the other end of the connecting pipe 8 . In this case, one end of the spray pipe 55 may be connected to the other end of the connecting pipe 8, and the connection position is not particularly limited, and may be near the supply port 51 of the second heater 5, for example. However, it may be provided on the cylindrical portion 53 side of the supply port 51 or may be provided on the first heater 4 side. Then, the spray pipe 55 may be extended through the inside of the supply pipe 51T to the vicinity of the axial center of the cylindrical portion 53, and the spray nozzle 54 may be provided at the other end of the spray pipe 55.

Moreover, although the second heater 5 shown in FIG. 3 includes the cylindrical portion 53 extending in the vertical direction UDD, the shape of the cylindrical portion 53 is not limited to this. For example, the tubular portion 53 may extend in a substantially horizontal direction, or the tubular portion 53 may extend in another oblique direction. However, since drainage tends to accumulate inside the tubular portion 53 when the superheated steam generator 10 is started up or stopped, the vertically long tubular portion 53 extending in the vertical direction UDD as shown in FIG. Ease of discharge is preferred.

The cylindrical portion 53 of the second heater 5 shown in FIG. 3 has a cylindrical shape with a perfect circular cross section. It may be in the shape of a square cylinder such as a square.

The temperature of the superheated steam SS generated by the second heater 5 is adjusted to the temperature of the superheated steam SS required by the superheated steam utilization device 13. For example, when the superheated steam utilization device 13 is a heating furnace, is preferably 200 to 500°C, more preferably 350 to 450°C. If the temperature of the superheated steam SS is lower than 200°C, the object BJ cannot be sufficiently heated, and if the temperature of the superheated steam SS is higher than 500°C, the object BJ may be overheated.

Also, the amount of superheated steam SS generated by the second heater 5 is adjusted to the amount of superheated steam SS required by the superheated steam utilization device 13 .

(Second thermometer 6B, second control means 7B)
Then, the rear part of the second heater 5 (in the embodiment of FIG. 3, the upper end of the cylindrical part 53, the discharge pipe 52T, etc.) and the outside of the system from the second heater 5 to the latter device (not shown) A thermometer 6 for measuring the temperature of the superheated steam SS is preferably provided in the discharge pipe 9 . In the embodiment of FIG. 1, a thermometer 6 (6B) for measuring the temperature of the superheated steam SS flowing inside the outside discharge pipe 9 is attached to the outside discharge pipe 9 connecting the second heater 5 and the subsequent device. installed. Then, based on the temperature of the superheated steam SS measured by the thermometer 6 (6B), the control means 7 (7B) heats the second heater 5 by the heating means (the heater in the embodiment of FIG. 1 and FIG. 3). Preferably, the temperature is automatically adjusted by PID control. Specifically, when the temperature of the superheated steam SS is lower than the desired temperature, the control means 7 (7B) increases the temperature of the heating means, and when the temperature of the superheated steam SS is higher than the desired temperature, It is preferable that the control means 7 (7B) lower the temperature of the heating means. 1, when two or more thermometers 6 and control means 7 are provided, the thermometer 6 for measuring the temperature of the superheated steam SS generated by the second heater 5 The control means 7 for adjusting the output of the heating means of the second heater 5 based on the temperature measured by the second thermometer 6B is called the second control means 7B. A known thermometer such as a thermocouple or a radiation thermometer can be used as the thermometer 6B for measuring the temperature of the superheated steam SS.

As shown in FIG. 3, the structure is such that the heater heats the saturated steam generated by instantaneously evaporating the high-temperature mist sprayed from the spray nozzle 54 . As shown in FIGS. 1 and 3, the temperature of the superheated steam SS passing through the outlet portion of the second heater 5 (the discharge pipe 52T, the discharge port 52, or their vicinity) or the inside of the system discharge pipe 9 is monitored. It is possible to control the heater of the second heater 5 with the Therefore, even if the temperature of the heating liquid HF discharged from the first heater 4 changes, by controlling the temperature of the heater of the second heater 5, the overheated liquid HF passing through the discharge port 52 of the second heater 5 can be maintained. The temperature of steam SS can be kept constant.

In the conventional boiler-type superheated steam generation/utilization device 100 as shown in FIG. ) changes. When the amount of boiling evaporation changes, the heater 120 (corresponding to the second heater in FIG. 1) disposed downstream of the boiler 110 (corresponding to the first heater in FIG. 1) heats the steam ST. , the temperature of the superheated steam SS exhausted from the outlet of the heater 120 is unstable, and the temperature of the superheated steam SS is difficult to control. In the present embodiment, as described above, the temperature of the superheated steam SS passing through the outlet 52 of the second heater 5 is easily adjusted simply by adjusting the heating temperature of the heating means 56 of the second heater 5. It is possible to solve the problems of the conventional boiler-type superheated steam generation/utilization device 100 .

In addition, in the superheated steam generator 10 of the present embodiment, the inside of the first heater 4 is filled with high-pressure high-temperature water, and boiling of the high-temperature water inside is suppressed. Then, the mist is sprayed from the spray nozzle 54 of the second heater 5, and the pressure that opposes the pressure for spraying this mist is: (A) ventilation resistance in the second heater 5, (B) the second heater 5 to the superheated steam utilization device 13 (for example, a heating furnace; the same applies hereinafter), (C) the resistance of the ejection nozzle 12 of the superheated steam utilization device 13 that uses the superheated steam SS, (D) from the superheated steam utilization device 13 Exhaust pressure of (A) to (D) is added. However, compared to the pressurized pressure of the first heater 4 (proportional to the supply pressure of the liquid F by the supply means 3), these exhaust pressures (A) to (D) are relatively small, so the first heating Heating of the liquid F in the vessel 4 and change in the amount of mist sprayed from the spray nozzle 54 of the second heater 5 are small. In the superheated steam generator 10 of the present embodiment, the liquid F is supplied to the first heater 4 using the supply means 3 such as a plunger pump, and the second Although the amount of mist sprayed from the heater 5 increases or decreases, the supply pressure of the liquid F from the supply means 3 is relatively large, so the values of the exhaust pressure (A) to (D) have changed. Even so, the amount of mist sprayed from the second heater 5 is hardly affected by changes in the exhaust pressure.

(Use of superheated steam SS)
As shown in FIG. 1, the superheated steam SS discharged from the second heater 5 is supplied to the superheated steam utilization device 13 (this superheated steam utilization device 13 is not included in the superheated steam generation device 10) provided in the subsequent stage. , and the superheated steam SS is used in this superheated steam utilization device 13 . Utilization forms of superheated steam SS include activated carbon deaeration, dehydration and drying of silica gel powder, degreasing, coating stripping, food processing, sterilization and washing, carbonization, decomposition of organic matter, and the like. When using the superheated steam SS, the object to be processed BJ can be heated by simply supplying the superheated steam SS into the superheated steam utilization device 13 and heating the entire atmosphere in the superheated steam utilization device 13. , the superheated steam SS is preferably sprayed onto the object to be processed BJ. This is because by spraying the superheated steam SS onto the object BJ to be processed at high speed, the heat of the superheated steam SS can be easily transferred to the inside of the object BJ to be processed, thereby enhancing the heat transfer effect. Therefore, as shown in FIG. 1, it is preferable to provide a plurality of nozzles 12 directed toward the object to be processed BJ, and to spray superheated steam SS from these nozzles 12 to the object to be processed BJ at a high speed. Reference numeral 14 in FIG. 1 denotes a pipe for distributing the superheated steam SS to each nozzle 12. As shown in FIG. Examples of the apparatus for spraying the superheated steam SS as described above include a heating furnace, a heat treatment furnace, a degassing furnace, a drying furnace, and an open spraying method. The pressure in that case depends on the superheated steam blowing nozzle resistance and furnace exhaust resistance. Further, as shown in FIG. 1, it is preferable to provide a discharge pressure adjusting means 11 for adjusting the pressure of the superheated steam SS discharged from the nozzle 12 in the preceding stage of the nozzle 12 . Although an electromagnetic valve is illustrated as the discharge pressure adjusting means 11 in FIG. 1, other means such as a manual valve, an orifice, and an exhaust throttle valve may be used for adjustment. The discharge pressure can be easily adjusted by the discharge pressure adjusting means 11 . Even if the discharge pressure is adjusted, as described above, the amount of superheated steam SS produced and the temperature of the superheated steam SS are hardly affected. In addition, the amount of superheated steam SS generated and the temperature of the superheated steam SS hardly affect the discharge pressure.

In addition, the discharge pressure is adjusted so as to be the discharge pressure required by the superheated steam utilization device 13. For example, when the superheated steam utilization device 13 is a heating furnace, it is set to 0.02 to 0.2 MPa. is preferred, and 0.05 to 0.1 MPa is more preferred. If the discharge pressure of the superheated steam SS is lower than 0.02 MPa, the object BJ cannot be sufficiently heated, and if the discharge pressure of the superheated steam SS is higher than 0.2 MPa, the object BJ may be overheated. be.

(Effect of Embodiment)
According to the superheated steam generator 10 according to the above embodiment, (A) the temperature of the superheated steam SS generated by the second heater 5, and (B) the superheated steam utilization device 13 provided after the second heater 5 (C) Evaporation amount of mist sprayed from the spray nozzle 54 provided inside the second heater 5 (that is, the second (A) the temperature of the superheated steam, (B) the discharge pressure, and (C) the amount of superheated steam generated by the heater 5 can be adjusted independently. can be set with high accuracy.

For example, when the superheated steam generator 10 is started up, if the amount of mist sprayed from the spray nozzle 54 in the second heater 5 is large, the amount of drain water DR increases, which poses a problem. Therefore, it is preferable to reduce the amount of mist sprayed from the spray nozzle 54 at the time of start-up. On the other hand, when the amount of mist sprayed from the spray nozzle 54 is reduced when the superheated steam generator 10 is started up, the amount of superheated steam SS discharged from the second heater 5 is reduced, and the second heater 5 Another problem may occur in that the efficiency (for example, heating efficiency) of the superheated steam utilization device 13 (for example, a heating furnace) provided in the apparatus is deteriorated. In order to solve this problem, it is preferable to increase the temperature of the superheated steam SS discharged from the second heater 5 when starting up the superheated steam generator 10 .

In addition, in the superheated steam utilization device 13 (for example, a heating furnace) provided in the latter stage of the second heater 5, the pressure of the superheated steam SS is used to In many cases, the superheated steam SS is sprayed onto the object to be heated BJ with a high-speed jet. Therefore, depending on the type of the superheated steam utilization device 13, the preferred pressure of the superheated steam SS at the outlet of the second heater 5 may range from 0.1 to 0.2 MPa.

According to the superheated steam generator 10 according to the above embodiment, (A) the temperature of the superheated steam, (B) the discharge pressure, and (C) the amount of superheated steam generated are independently adjusted to arbitrary values with high accuracy. Therefore, the above control can be easily performed.

Here, a mode in which the superheated steam SS generated by the superheated steam generator 10 is sent to various superheated steam utilization devices 13 installed after the second heater 5 and utilized will be described in detail.

For example, the superheated steam SS is sent to the heating furnace as the superheated steam utilization device 13 and used to heat the object to be heated in the heating furnace. In this case, rather than increasing the amount of heating steam SS supplied to the heating furnace from the second heater 5, increasing the temperature of the heating steam SS supplied to the heating furnace is more effective for heat input to the object to be heated by the heating furnace. becomes larger. Therefore, it is required to raise the temperature of the heating steam SS discharged from the second heater 5 . With the superheated steam generator 10 of the above embodiment, the heating efficiency of the second heater 5 is good, so the temperature of the heated steam SS discharged from the second heater 5 can be easily increased.

Further, for example, the superheated steam SS generated by the second heater 5 may be sent to a powder drying device or a powder degassing device as the superheated steam utilization device 13 to be used for powder drying or degassing. In this case, it is necessary to provide a filter to prevent scattering of the powder inside the powder drying apparatus and the powder degassing apparatus in order to prevent the powder from scattering due to the jet flow of the heating steam SS. Due to the presence of the filter provided inside the powder drying device and the powder degassing device, ventilation resistance increases when the superheated steam SS is discharged into the powder drying device and the powder degassing device. Therefore, it is desired to increase the discharge pressure when discharging the superheated steam SS into the powder drying device or the powder degassing device. With the superheated steam generator 10 of the above embodiment, the discharge pressure from the nozzle 12 can be easily increased by the discharge pressure adjusting means (a valve is shown as an example in FIG. 1).

Further, for example, the superheated steam SS generated by the second heater 5 is sent to a surface heating device or a food processing device as the superheated steam utilization device 13 to heat the surface of the object BJ or to heat the food BJ. case is also assumed. In this case, since it is required to uniformly heat the entire object BJ and food BJ, a large amount of superheated steam SS is required. In the superheated steam generator 10 of the above embodiment, the supply means 3 increases the supply amount of the liquid F supplied to the first heater 4, and as a result, the superheated steam is exhausted from the second heater 5. Increases the amount of SS. By increasing the supply amount of the liquid F by the supply means 3 in this way, the amount of the superheated steam SS supplied to the surface heating apparatus and the food processing apparatus can be easily increased.

As described above, in the superheated steam generator 10 of the embodiment, the amount of superheated steam SS supplied to the superheated steam utilization device 13 (sprayed from the spray nozzle provided inside the second heater 5 It is easy to change the temperature of the superheated steam SS and the discharge pressure of the superheated steam SS, and each can be controlled independently (control without affecting other elements). There are advantages.

In addition, in the second heater 5 shown in FIG. 3, the mist sprayed from the spray nozzle 54 is fine particles (high-temperature fine particles) of substantially uniform size, so the heat conduction of the heater surface of the second heater 5 can act uniformly. If the heating density of the heater is unbalanced (heating the heater locally), the insulating material inside the heater may deteriorate. However, as described above, by making the mist sprayed from the spray nozzle 54 into fine particles of a substantially uniform size, heat conduction on the surface of the heater of the second heater 5 can be made uniform. It is no longer necessary to heat the insulating material, and problems such as deterioration of the insulating material can be prevented. As a result, the service life of the second heater 5 can be prevented from being shortened.

Since the superheated steam generator 10 shown in FIGS. 1 to 3 has a simple structure, it is easy to operate and excellent in maintainability. In addition, compared to the volume of the superheated steam generator 150 using a conventional boiler, the volume of the superheated steam generator 10 as shown in FIGS. This has the advantage of facilitating insulation work and reducing heat loss. Furthermore, since the entire device is more compact than similar devices currently on the market (approximately 50% the size of conventional products), it can be used in places with a small site area (factories, etc.).

Furthermore, inexpensive heaters (e.g., cartridge heaters, sheath wire heaters, etc.) can be used for the first heater 4 and the second heater 5, thereby reducing the initial cost of the superheated steam generator 10 itself. . According to the present inventor's trial calculation, the price can be reduced to about half that of conventional products.

In addition, since the amount of water retained inside the first heater 4 shown in FIG. It is characterized by being shorter than conventional products. If the superheated steam generator 10 is kept at a high temperature, there is a danger that the pressurized heating liquid HF and superheated steam SS will blow out. preferable.

Further, when a kanthal heater is used as the heater of the second heater 5, the mist sprayed from the spray nozzle 54 can be heated to a high temperature of 1100° C. or higher, so that the superheated steam SS can be used for the hydrolysis reaction. become able to.

In the case of induction heating and high-frequency heating, which have been conventionally used, pressure-resistant and heat-resistant metal pipes are used. Such a risk can be reduced by using an electric heater as the heater.

1: filter, 2: flow meter, 3: supply means (e.g. pump), 3A: supply amount adjustment means, 4: first heater, 5: second heater, 6: thermometer, 6A: first temperature meter, 6B: second thermometer, 7: control means, 7A: first heater control means, 7B: second heater control means, 8: connecting pipe, 9: system discharge pipe, 10: superheated steam generator , 11: discharge pressure adjusting means, 12: (discharge) nozzle, 13: superheated steam utilization device, 14: pipe, 20: superheated steam generation and utilization system, 41: (liquid F) supply port, 41T: (liquid F ) supply pipe, 42: discharge port (for heating liquid HF), 42T: discharge pipe (for heating liquid HF), 43: heating pipe, 43A: first heating pipe, 43B: second heating pipe, 43C: third heating Pipe, 43D: fourth heating pipe, 43E: fifth heating pipe, 44a: input cable, 44b: heating means (eg heater), 51: supply port (of heating liquid HF), 51T: (of heating liquid HF) Supply pipe, 52: (superheated steam SS) outlet, 52T: (superheated steam SS) discharge pipe, 53: cylindrical portion, 54: spray nozzle, 55: spray pipe, 56: heating means (eg, heater), 57: Drain pipe, 58: Valve, 59: Pipe, 100: (Conventional) superheated steam generation and utilization system, 110: Boiler, 111: (Boiler) heating means, 120: Heater, 130: Superheated steam utilization device, 131: nozzle, 140: pipe, 141: pipe, 150: superheated steam generator, BJ: object, DS: lower side, F: liquid, HF: heating liquid, HL: liquid movement path, ML: vapor movement Path, ONS: one end side, OTS: other end side, SS: superheated steam, ST: steam, UDD: vertical direction, US: upper side, WD: width direction

Claims (6)

a supply means for pumping the liquid;
a first heater that heats the supplied liquid to generate a heated liquid;
a second heater that sprays the generated heating liquid inside and reheats the generated mist in the process of moving inside to generate superheated steam;
a superheated steam utilization device that discharges the generated superheated steam and heats an object;
supply amount adjusting means for adjusting the amount of liquid supplied to the first heater;
a second heater control means for adjusting the heating temperature of the mist sprayed inside the second heater;
a discharge pressure adjusting means for adjusting the pressure for discharging the superheated steam into the superheated steam utilization device;
has
The second heater is
It has a nozzle for spraying mist at the bottom, an exhaust port for discharging superheated steam at the top, and a heating cylinder equipped with a heating means inside,
A superheated steam generating and utilizing system characterized in that the mist sprayed inside the heating cylinder is heated by the heating means to become superheated steam in the process of rising in the cylinder. 2. The system for generating and utilizing superheated steam according to claim 1, wherein said supply means is a pump for supplying said liquid to said first heater at a pressure equal to or higher than the vapor pressure of said liquid. a heating liquid measuring instrument provided at the rear of the first heater or on a path from the first heater to the second heater for measuring the temperature of the heating liquid;
3. The system for generating and utilizing superheated steam according to claim 1, further comprising first heater control means for controlling the temperature of the heating means of said first heater based on the temperature measured by said heating liquid measuring instrument. a superheated steam measuring instrument provided in the rear part of the second heater or in a path from the second heater to a subsequent device for measuring the temperature of the superheated steam;
The superheated steam generator according to any one of claims 1 to 3, wherein the second heater control means controls the temperature of the heating means of the second heater based on the temperature measured by the superheated steam measuring instrument. system of use. The first heater is
a heating tube that is meandering and arranged in steps;
cartridge heaters respectively arranged inside the heating tubes of each stage and extending from one end side to the other end side of the heating tubes;
The superheated steam generation utilization system according to any one of claims 1 to 4, having The second heater has a supply port for supplying preheating heated air and a discharge port for discharging the preheating heated air,
The superheated steam generation and utilization system is
a preheating heated air measuring device that is provided in the rear part of the second heater or in a path from the second heater to a subsequent device and measures the temperature of the preheating heated air;
When the temperature of the preheating heated air measured by the preheating heated air measuring instrument becomes higher than the predetermined temperature of the mist sprayed inside the second heater, the preheating heating The superheated steam generation and utilization system according to any one of claims 1 to 5 , further comprising control means for stopping the supply of air.

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