JP7225394B2 - MONITORING DEVICE FOR HEAT TREATMENT FACILITIES, HEAT TREATMENT FACILITIES, AND MONITORING METHOD FOR HEAT TREATMENT FACILITIES AND MANUFACTURING METHOD - Google Patents

Description

TECHNICAL FIELD The present disclosure relates to monitoring devices and heat treatment equipment for heat treatment equipment and methods of monitoring and manufacturing heat treatment equipment.

In heat treatment equipment such as a continuous annealing furnace, the furnace body of the heat treatment furnace may be deformed due to an increase in internal pressure or the like. If the furnace body deforms, there is a risk that the internal equipment supported by the wall surface (furnace wall) that constitutes the furnace body will fall off or be damaged. Therefore, measures have been proposed to prevent deformation of the furnace body.

For example, in Patent Document 1, in a furnace shell (furnace body) structure of a continuous annealing furnace, continuous It describes the prevention of expansion of the furnace body due to thermal expansion of wall members and rise in internal pressure during operation of the annealing furnace.

Japanese Patent No. 6244249

By adopting the structure in which the wall members are connected to each other using tension members, as described in Patent Document 1, it is believed that the deformation of the furnace body can be suppressed even when the internal pressure of the furnace body rises. However, in this case, the furnace body itself needs to have a structure capable of withstanding higher pressures, which increases the manufacturing cost of the furnace body and thus the manufacturing cost of the heat treatment equipment.

In view of the above circumstances, at least one embodiment of the present invention provides a monitoring device for heat treatment equipment, heat treatment equipment, and a method for monitoring heat treatment equipment that can suppress deformation of a furnace body while suppressing an increase in the manufacturing cost of heat treatment equipment. and to provide a manufacturing method.

A monitoring device for heat treatment equipment according to at least one embodiment of the present invention is a monitoring device for heat treatment equipment, which is provided outside a furnace body of the heat treatment equipment, and includes a pair of furnace walls constituting the furnace body. At least one displacement detector configured to detect displacement in one horizontal direction.

According to at least one embodiment of the present invention, a monitoring device for heat treatment equipment, a heat treatment equipment, and a method for monitoring and manufacturing the heat treatment equipment that can suppress deformation of the furnace body while suppressing an increase in the manufacturing cost of the heat treatment equipment are provided. be done.

1 is a schematic diagram of a heat treatment furnace according to one embodiment; FIG. 1 is a schematic diagram of heat treatment equipment to which a monitoring device according to one embodiment is applied; FIG. FIG. 2B is a schematic view of an internal device and support according to one embodiment, and is a partially enlarged view of FIG. 2A. FIG. 4 is a schematic diagram showing the state of the heat treatment furnace when expansion deformation occurs. 1 is a schematic diagram of a monitoring device including a displacement detector according to one embodiment; FIG. 1 is a schematic diagram of a monitoring device including a displacement detector according to one embodiment; FIG. 1 is a schematic diagram showing the configuration of a monitoring device according to one embodiment; FIG. It is a schematic diagram which shows an example of the form of a deformation|transformation of a furnace body. It is a schematic diagram which shows an example of the form of a deformation|transformation of a furnace body. It is a schematic diagram which shows an example of the form of a deformation|transformation of a furnace body. It is a schematic diagram which shows the arrangement|positioning of a displacement detector in heat processing equipment, and the example of a detection result. It is a schematic diagram which shows the arrangement|positioning of a displacement detector in heat processing equipment, and the example of a detection result. It is a schematic diagram which shows the arrangement|positioning of a displacement detector in heat processing equipment, and the example of a detection result. It is a schematic diagram which shows the arrangement|positioning of a displacement detector in heat processing equipment, and the example of a detection result. It is a schematic diagram which shows the arrangement|positioning of a displacement detector in heat processing equipment, and the example of a detection result. It is a schematic diagram which shows the arrangement|positioning of a displacement detector in heat processing equipment, and the example of a detection result. It is a schematic diagram which shows the arrangement|positioning of a displacement detector in heat processing equipment, and the example of a detection result. It is a schematic diagram which shows the arrangement|positioning of a displacement detector in heat processing equipment, and the example of a detection result. It is a flowchart of the operating method of the heat treatment equipment 1 which concerns on one Embodiment.

Several embodiments of the present invention will now be described with reference to the accompanying drawings. However, the dimensions, materials, shapes, relative arrangements, etc. of the components described as embodiments or shown in the drawings are not intended to limit the scope of the present invention, and are merely illustrative examples. do not have.

First, with reference to FIGS. 1 to 2B, the overall configuration of heat treatment equipment according to some embodiments will be described.

FIG. 1 is a schematic diagram of a heat treatment furnace according to one embodiment. FIG. 2A is a schematic diagram of heat treatment equipment to which a monitoring device according to one embodiment is applied. 2A shows a schematic cross section of the heat treatment furnace shown in FIG. 1 taken along the line AA. FIG. 2B is a schematic diagram of an internal device and support according to one embodiment, and is a partially enlarged view of FIG. 2A.

A heat treatment facility 1 according to some embodiments includes a heat treatment furnace 2 shown in FIGS. 1 and 2A.
The heat treatment furnace 2 shown in FIGS. 1 and 2A is a continuous annealing furnace for continuously annealing a strip-shaped metal plate S (for example, a steel plate). It has a tropical zone 4 , a soaking zone 5 and a cooling zone 6 . Although not shown, the heat treatment furnace 2 further includes an overaging zone and the like provided downstream of the cooling zone 6 .

The heat treatment furnace 2 includes a furnace body 8 (furnace shell), and a plurality of transport rolls 10 for transporting the metal sheet S are provided inside the furnace body 8 . By applying tension to the metal plate S via the transport rolls 10, the metal plate S is transported at a transport speed corresponding to the tension.

An internal device 11 is provided inside the heat treatment furnace 2 . The internal equipment 11 includes, for example, heating means and cooling means for heat-treating the metal plate S conveyed inside the furnace body 8 . In the exemplary embodiment shown in FIG. 1, the heating zone 4 and the soaking zone 5 are provided with radiant tubes 12 for heating the metal plate S as internal equipment 11 . Cooling zone 6 is provided with cooling gas nozzles 14 for cooling metal plate S as internal equipment 11 . Moreover, although not shown, as the internal equipment 11, a burner may be provided in the preheating zone 3, and a heat transfer radiation tube may be provided in the overaging zone (not shown).

The interior of the furnace body 8 has a non-oxidizing atmosphere and an airtight structure to prevent oxidation of the metal plate S to be heat-treated. The heat treatment furnace 2 includes a gas supply section 40 for supplying gas (atmosphere gas) to the interior of the furnace body 8 and a gas discharge section 41 for discharging gas (atmosphere gas) from the furnace body 8 .

The gas supply unit 40 includes a gas supply line 38 and a supply valve 42 for adjusting the amount of gas supplied to the furnace body 8 via the gas supply line 38 . The gas discharge section 41 includes a gas discharge line 39 and a discharge valve 44 for adjusting the amount of gas discharged from the furnace body 8 through the gas discharge line 39 . The pressure inside the furnace body 8 can be adjusted now by the gas supply section 40 and the gas discharge section 41 . As the atmosphere gas inside the furnace body 8, an inert gas such as nitrogen, hydrogen, or the like can be used.

The preheating zone 3 is provided at the inlet of the furnace body 8, heats the atmosphere gas inside the furnace body 8 with a heat exchanger (not shown), and jets it onto the surface of the metal plate S with a circulation fan (not shown). configured to preheat by The exhaust gas from the heating zone 4 is also used for preheating the metal plate S in the preheating zone 3 . The heating zone 4 and the soaking zone 5 are configured to heat the metal plate S by the radiant tube 12 (internal device 11). The temperatures of the heating zone 4 and soaking zone 5 can be adjusted by, for example, increasing or decreasing the amount of fuel supplied to the radiant tube 12 . In the cooling zone 6, the surface of the metal plate S heated in the heating zone 4 and the soaking zone 5 is sprayed with a cooling fluid by a cooling gas nozzle 14 (internal device 11) so as to slowly or rapidly cool the metal plate S. Configured. The overaging zone is configured such that the metal sheet S after being cooled in the cooling zone 6 is overaged by a heat transfer radiation tube (internal device).

In the heat treatment furnace 2 having the above-described structure, the metal plate S passes through the preheating zone 3, the heating zone 4, the soaking zone 5, and the cooling zone 6, so that the metal plate S is annealed. there is

In addition, the heat treatment furnace according to the present invention is not limited to an annealing furnace, and in some embodiments, the heat treatment furnace is a heat treatment furnace for performing heat treatment other than annealing such as quenching, tempering, and normalizing. may

Further, the internal equipment 11 for heat-treating the metal plate S is not limited to the above-described examples (radiant tube 12, cooling gas nozzle 14, heat transfer radiation tube, or burner), and various equipment can be used.

As shown in FIG. 2A, the furnace body 8 of the heat treatment furnace 2 includes a pair of furnace walls 9A and 9B facing each other. More specifically, the furnace body 8 includes a first furnace wall 9A and a second furnace wall 9B (a pair of furnace walls 9) provided to face each other.

Inside the furnace body 8, one of the pair of furnace walls 9 (first furnace wall 9A or second furnace wall 9B) is fixed with the internal device 11 (radiant tube 12 in FIG. 2A). A support portion 16 for supporting the internal equipment 11 is fixed to the other of the pair of furnace walls 9 (the second furnace wall 9B or the first furnace wall 9A) inside the furnace body. The support part 16 is configured to support the internal device 11 while allowing horizontal relative displacement of the internal device 11 with respect to the other of the pair of furnace walls 9 (the second furnace wall 9B or the first furnace wall 9A). there is That is, the internal device 11 is supported by the support portion 16 so as to be slidable in the horizontal direction.

Taking the radiant tube 12 as an example, the support structure of the internal device 11 will be described more specifically. As shown in FIG. 2B, the radiant tube 12 is fixed to the first furnace wall 9A at one end 51 in the horizontal direction. In addition, the radiant tube 12 has a protruding portion 54 that protrudes horizontally toward the second furnace wall 9B at the other end 52 in the horizontal direction. On the other hand, the support portion 16 includes a support plate 15 that horizontally protrudes from the second furnace wall 9B toward the first furnace wall 9A, and ribs 17 that support the support plate 15 . By placing the projecting portion 54 of the radiant tube 12 on the supporting plate 15 of the supporting portion 16, the supporting plate 15 (supporting portion 16) and the projecting portion 54 (radiant tube 12) are positioned horizontally. They are partially overlapped. Thereby, the radiant tube 12 is supported by the support portion 16 so as to be slidable in the horizontal direction.

In addition, as shown in FIG. 2A, when a plurality of internal devices 11 (radiant tubes 12 in FIG. 2A) are provided in the heat treatment furnace 2, the internal device 11 fixed to the first furnace wall 9A in the height direction, In some cases, the internal devices 11 fixed to the second furnace wall 9B are alternately arranged. In this case, the internal equipment 11 fixed to the first furnace wall 9A is supported by the support portion 16 fixed to the second furnace wall 9B, and the internal equipment 11 fixed to the second furnace wall 9B is supported by the second furnace wall 9B. 1 It is supported by a support portion 16 fixed to the furnace wall 9A.

As shown in FIG. 2A, a frame 18 (18A, 18B) is provided outside the furnace body 8. As shown in FIG. The frame 18 is arranged on the side of the furnace wall 9 (9A, 9B) with a distance therebetween. The frame 18 is used, for example, as a scaffold during maintenance of the internal equipment 11 .

In the exemplary embodiment shown in FIG. 2A, a frame 18A is provided laterally to the first furnace wall 9A and a frame 18B is provided laterally to the second furnace wall 9B. Therefore, the frame 18A provided on the first furnace wall 9A side can be used for maintenance of the radiant tube 12 (internal device 11) fixed to the first furnace wall 9A. Further, the frame 18B provided on the second furnace wall 9B side can be used for maintenance of the radiant tube 12 (internal device 11) fixed to the second furnace wall 9B.

In addition, the transport roll 10 provided inside the furnace body 8 is provided so as to rotate together with a roll shaft 13 provided so as to penetrate the first furnace wall 9A and the second furnace wall 9B. 13 is rotatably supported by bearings 19 . Moreover, the bearing 19 is supported by a frame 118 provided outside the furnace body 8 . The penetrating portion of the roll shaft 13 is made airtight by an expansion pipe, an oil seal, or the like (not shown).

As shown in FIG. 2A, the heat treatment facility 1 includes the heat treatment furnace 2 described above and at least one displacement detector 24 (24A, 24B) provided outside the furnace body 8. As shown in FIG. Each of the displacement detectors 24 is configured to detect horizontal displacement of one of a pair of furnace walls 9 (first furnace wall 9A and second furnace wall 9B) that constitute the furnace body 8 .

Here, FIG. 3 is a schematic diagram showing the state of the heat treatment furnace 2 when expansion deformation occurs in the heat treatment furnace 2 shown in FIG. 2A.
Various problems can occur when the furnace body 8 is deformed. For example, like the heat treatment furnace 2 described above, the internal device 11 fixed to one of the pair of furnace walls 9 is horizontally slidably supported by a support portion 16 fixed to the other of the pair of furnace walls 9. When the furnace body 8 has a structure, when expansion deformation (that is, deformation in which the distance between the pair of furnace walls 9 (9A, 9B) increases) occurs (see FIG. 3), the internal equipment 11 and the support 16 in the horizontal direction The amount of overlap with is reduced. Then, when the expansion deformation of the furnace body 8 increases, as shown in FIG. In some cases, it may fall off from the support portion 16 .

In this regard, in the heat treatment equipment 1 according to the above-described embodiment, the displacement of the furnace wall 9 in the horizontal direction can be detected with a simple configuration in which the displacement detector 24 is provided outside the furnace body 8 . Therefore, the deformation of the furnace body 8 can be detected based on this detection result, so that, for example, it is possible to prevent the deformation of the furnace body 8 from increasing. That is, according to the above-described embodiment, it is not necessary to improve the pressure resistance performance of the furnace body 8, and the displacement of the furnace wall 9 can be detected by providing the displacement detector 24 outside the furnace body 8. Since deformation of the body 8 can be detected, deformation of the furnace body can be suppressed while suppressing an increase in the manufacturing cost of the heat treatment equipment 1 . Therefore, it is possible to suppress the occurrence of problems caused by the deformation of the furnace body 8 (for example, falling off of the internal equipment 11 supported by the furnace wall 9, etc.).

Next, the monitoring device according to some embodiments will be described more specifically. 4 and 5 are schematic diagrams of a monitoring device 20 including displacement detectors, respectively, according to one embodiment.

As shown in FIGS. 2A, 4 and 5, in some embodiments, the displacement detectors 24 (first displacement detector 24A, second displacement detector 24B) are at least partially aligned horizontally in pairs. provided between one of the furnace walls 9 (9A, 9B) and the frame 18. Thus, by providing the displacement detector 24 between the furnace wall 9 and the frame 18 in the horizontal direction, it is possible to easily access the displacement detector 24 from the frame 18 serving as a scaffolding. Therefore, the maintenance work of the displacement detector 24 is facilitated.

In some embodiments, for example, as shown in FIGS. 4 and 5, the monitoring device 20 uses a stationary member 26 and a movable member 28 on the outside of the furnace body 8 to detect the furnace wall by the displacement detector 24 . 9 is adapted to detect horizontal displacement. The stationary member 26 is fixed at a position spaced apart from the furnace wall 9 to the outside of the furnace body 8 . The stationary member 26 may be fixed to the frame 18, for example. The movable member 28 is movable together with the furnace wall 9 as the furnace wall 9 is deformed. The displacement detector 24 is configured to detect the relative displacement of the movable member 28 with respect to the stationary member 26 in the horizontal direction.

The displacement detector 24 may be configured to detect that the distance between the stationary member 26 and the movable member 28 in the horizontal direction has become equal to or less than a specified value. In this case, displacement detector 24 may include a proximity switch or limit sensor. Alternatively, the displacement detector 24 may be configured to measure the distance between the stationary member 26 and the movable member 28 in the horizontal direction. In this case, the displacement detector 24 may be configured to measure the above distance using a contactor, laser light, or radar.

Also, one of the stationary member 26 or the movable member 28 may be configured to support the displacement detector 24 . Alternatively, one of the stationary member 26 or the movable member 28 is configured to support the displacement detector 24 and the other of the stationary member 26 or the movable member 28 is a target for detection by the displacement detector 24 (displacement detector 28). 24, or a laser or radar irradiation target by the displacement detector 24).

In the exemplary embodiment shown in FIG. 4 , the monitoring device 20 includes a stationary bracket 60 fixed to the frame 18 as the stationary member 26 and a stiffener (angle iron) fixed to the furnace wall 9 as the movable member 28 . ) 58 and a movable bracket 62 attached thereto. The stationary bracket 60 includes a vertically extending vertical surface 60a, and the movable bracket 62 includes a vertically extending vertical surface 62a, the vertical surfaces 60a and 62a being arranged to face each other.

A horizontally extending slit 64 is provided in the vertical surface of the stationary bracket 60, and a contactor 66 of the proximity switch as the displacement detector 24 is stationary so as to be horizontally movable through the slit 64. It is supported by bracket 60 . When the horizontal distance between the stationary bracket 60 and the movable bracket 62 is reduced to a specified value, the end of the movable bracket 62 comes into contact with the contactor 66 . The contactor 66 detects this contact, thereby detecting that the distance between the stationary bracket 60 and the movable bracket 62 has become narrower than a prescribed value. Thereby, the horizontal relative displacement of the movable bracket 62 with respect to the stationary bracket 60 can be detected.

In the exemplary embodiment shown in FIG. 5 , the monitoring device 20 includes a stationary bracket 68 fixed to the frame 18 as the stationary member 26 and a stiffener (angle iron) fixed to the furnace wall 9 as the movable member 28 . ) 58 and a target plate 70 attached thereto. The target plate 70 is provided approximately parallel to the furnace wall 9 . Displacement detector 24 includes a laser rangefinder 72 configured to measure the horizontal distance between stationary bracket 68 and target plate 70 . The laser rangefinder 72 is configured to emit laser light toward the target plate 70, receive reflected light from the target plate 70, and calculate the distance described above based on these wavelengths and the like. As a result, it is possible to detect that the distance between the stationary bracket 68 and the target plate 70 has become smaller than the specified value, and to detect the relative displacement of the target plate 70 with respect to the stationary bracket 68 in the horizontal direction. can.

In some embodiments, the stationary member 26 and the movable member 28 are provided to at least partially overlap vertically. In this case, even if the furnace wall 9 is vertically elongated due to thermal elongation of the furnace wall 9 and the movable member 28 is moved vertically along with this, the vertical direction of the stationary member 26 and the movable member 28 may be reduced. Since the separation is suppressed, it becomes easier to detect the relative displacement in the horizontal direction of the movable member 28 with respect to the stationary member 26 .

FIG. 6 is a schematic diagram showing the configuration of the monitoring device 20 according to one embodiment. In some embodiments, monitoring device 20 may include controller 22 configured to receive signals indicative of detection results from displacement detectors 24 (24A, 24B). As shown in FIG. 6, the control device 22 may include a determination section 30 and an adjustment section 32, which will be described later.

The control device 22 may include a CPU, a memory (RAM), an auxiliary storage device, an interface, and the like. The control device 22 is configured to receive information (a signal indicating the detection result) from the displacement detector 24 via an interface. The CPU is configured to process the information thus received. Also, the CPU is configured to process a program expanded in the memory.

The determination unit 30, the adjustment unit 32, and the like described above may be implemented as programs executed by the CPU and stored in the auxiliary storage device. During program execution, these programs are expanded in memory. The CPU reads the program from the memory and uses information received from various sensors as necessary to execute instructions included in the program.

In some embodiments, for example, as shown in FIG. 2A, a monitoring device 20 is provided on the first furnace wall 9A side and configured to detect horizontal displacement of the first furnace wall. It includes a detector 24A and a second displacement detector 24B provided on the side of the second furnace wall 9B and configured to detect horizontal displacement of the second furnace wall. The second displacement detector 24B is provided on the opposite side of the furnace space of the furnace body 8 from the first displacement detector 24A. The monitoring device 20 also includes a determination unit 30 ( See FIG. 6).

Here, FIGS. 7 to 9 are schematic diagrams showing examples of deformation forms of the furnace body 8, respectively. 7 to 9, x1 and x2 respectively indicate displacement amounts of the first furnace wall 9A and the second furnace wall 9B at representative positions in the height direction (central position in each figure). 7 to 9, the two-dot chain line indicates the shape of the furnace body 8 before deformation.

The form of deformation that occurs in the furnace body 8 may be expansion, tilting, or the like. For example, in the example shown in FIG. 7 , both the first furnace wall 9A and the second furnace wall facing each other are displaced toward the outside of the furnace body 8 . This indicates that expansion deformation has occurred in the furnace body 8 . In the example shown in FIG. 8, the first furnace wall 9A is displaced toward the inside of the furnace body 8, the second furnace wall 9B is displaced toward the outside of the furnace body 8, and the second furnace wall 9B is displaced toward the outside of the second furnace wall 9B. The amount of displacement x2 toward the inside of the first furnace wall 9A is larger than the amount of displacement x1 toward the inside of the first furnace wall 9A. This means that the furnace body 8 undergoes expansion deformation as well as tilting deformation. On the other hand, in the example shown in FIG. 9, the first furnace wall 9A is displaced toward the inside of the furnace body 8, the second furnace wall 9B is displaced toward the outside of the furnace body 8, and the first furnace wall 9A is displaced. The amount x1 and the displacement amount x2 of the second furnace wall 9B are approximately the same. This means that the furnace body 8 is tilted and deformed.

When the furnace body 8 is only tilted and deformed, the distance between the first furnace wall 9A and the second furnace wall 9B is almost the same as before the deformation. No abnormalities occur in 11th magnitude. On the other hand, when expansion deformation occurs in the furnace body 8, the distance between the first furnace wall 9A and the second furnace wall 9B increases, so the internal equipment 11 supported by the pair of furnace walls 9A and 9B Problems such as falling off may occur.

In this regard, in the above-described embodiment, the pair of furnace walls 9 (the first furnace wall 9A and the second furnace wall 9B) are provided with the first displacement detector 24A and the second displacement detector 24B, respectively. Based on the detection results of the detectors 24A and 24B, it can be determined whether or not the furnace body 8 has undergone expansion deformation. Therefore, based on this determination result, it is possible to prevent the expansion deformation of the furnace body 8 from increasing, and problems caused by the expansion deformation of the furnace body 8 (for example, internal equipment supported by the pair of furnace walls 9 11) can be effectively suppressed.

A pair of the first displacement detector 24A and the second displacement detector 24B, which cooperate to detect expansion deformation, should be provided at approximately the same height position and approximately the same horizontal position. is desirable. For example, as shown in FIG. 2A, when the first displacement detector 24 and the second displacement detector are arranged at positions shifted in the height direction, the first displacement detector 24A and the second displacement detector 24A adjacent to each other in the height direction. It is desirable to use the 2-displacement detector 24B as a pair to detect the expansion deformation of the furnace body 8 .

In some embodiments, the first displacement detector 24A is configured to detect displacement of the first furnace wall 9A toward the outside of the furnace body 8, and the second displacement detector 24B detects the displacement of the second furnace wall. It is configured to be able to detect the outward displacement of the furnace body 8 of 9B. Then, the determination unit 30 determines that both the pair of furnace walls 9 (the first furnace wall 9A and the second furnace wall) move toward the outside of the furnace body 8 by the first displacement detector 24A and the second displacement detector 24B. It is configured to determine that expansion deformation has occurred in the furnace body 8 when it is detected that it is displaced (for example, the state shown in FIG. 7). Thereby, the expansion deformation of the furnace body 8 can be appropriately detected.

In addition, when the displacement detector 24 is of a type capable of measuring the distance between the pair of furnace walls 9 (for example, a rangefinder using a laser, a radar, or a contactor), the determination unit 30 detects the first displacement When the amount of displacement toward the outside of the furnace body 8 of the first furnace wall 9A and the second furnace wall 9B detected by the detector 24A and the second displacement detector 24B is equal to or greater than a specified value, the furnace body 8 expands and deforms. may be determined to have occurred. Alternatively, the determination unit determines that the sum of the displacement amounts of the first furnace wall 9A and the second furnace wall 9B toward the outside of the furnace body 8 detected by the first displacement detector 24A and the second displacement detector 24B is a specified value. It may be determined that expansion deformation has occurred in the furnace body 8 when the above is the case.

In some embodiments, the first displacement detector 24A is configured to detect the amount of displacement of the first furnace wall 9A toward the outside and inside of the furnace body 8, and the second displacement detector 24B It is configured to be able to detect the amount of displacement of the two furnace walls to the outside and inside of the furnace body 8 . Then, the determination unit 30 detects that one of the pair of furnace walls 9A and 9B is displaced toward the outside of the furnace body 8 by the first displacement detector 24A and the second displacement detector 24B. The displacement of the other of the furnace walls 9A and 9B toward the inside of the furnace body 8 is detected, and the amount of displacement of the one of the pair of furnace walls 9A and 9B to the outside is detected by the pair of furnace walls 9A. , 9B (for example, in the state shown in FIG. 8), it is determined that the furnace body 8 has expanded and deformed. Thereby, the expansion deformation of the furnace body can be appropriately detected.

The determining unit 30 determines the difference between the amount of displacement of one of the pair of furnace walls 9A and 9B toward the outside of the furnace body 8 and the amount of displacement of the other of the pair of furnace walls 9A and 9B toward the inside of the furnace body 8. is equal to or greater than a specified value, it may be determined that expansion deformation has occurred in the furnace body 8 .

In some embodiments, monitoring device 20 includes multiple pairs of first displacement detectors 24A and second displacement detectors 24B. Then, the determination unit 30 selects the first displacement detector 24A and the second displacement detector that have determined that expansion deformation has occurred in the furnace body 8 among the plurality of pairs of the first displacement detector 24A and the second displacement detector 24B. Based on the number of pairs of 24B, it is configured to identify factors of expansion deformation.

In this case, based on the number of pairs of the first displacement detector 24A and the second displacement detector 24B determined that expansion deformation has occurred in the furnace body 8 (for example, the absolute number or the ratio to the total number of pairs), the expansion deformation Factors can be identified. For example, when it is determined that expansion deformation has occurred in a certain number of pairs (for example, 20% or more of the total number of pairs) of the total number of pairs of the first displacement detector 24A and the second displacement detector 24B, the furnace body It can be presumed that the increase in the internal pressure of 8 is the cause of the deformation of the furnace body. Further, when it is determined that expansion deformation has occurred in a minority pair (for example, 1 pair) of the total number of pairs of the first displacement detector 24A and the second displacement detector 24B, a specific inside supported by the furnace wall 9 It can be presumed that the deformation of the furnace body is caused by some kind of abnormality in the equipment 11 .

Here, some abnormality that occurs in the internal device 11 is, for example, that the internal device 11 and the support portion 16 are stuck together. In this case, the thermal expansion of the internal equipment 11 in the horizontal direction cannot be absorbed by sliding with the support part 16, so the thermal expansion of the internal equipment 11 deforms the furnace body 8 so that the distance between the furnace walls 9 increases. This is because it can occur.

Therefore, by specifying the factor of the expansion deformation in this way, it is possible to appropriately deal with the expansion deformation of the furnace body based on the specified factor so as not to increase the expansion deformation.

More specifically, with reference to FIGS. 10A to 13B, the identification of the form of deformation of the furnace body 8 and the identification of factors of expansion deformation based on the detection results of the pair of the first displacement detector 24A and the second displacement detector 24B. explain. 10A to 13B are schematic diagrams showing examples of the arrangement and detection results of the first displacement detector 24A and the second displacement detector 24B in the heat treatment facility, respectively. In these figures, the shape of the furnace body 8 is different from the actual one in order to make it easier to see the states of the sensors arranged on the pair of furnace walls 9A and 9B. The arrows in the drawing indicate the conveying direction of the metal plate S inside the furnace body 8 .

In the examples shown in FIGS. 10A to 13B, the first displacement detector 24A and the second displacement detector 24B having the same suffix in the reference numerals are used to form one pair. A combination of the detector 24A ₁₁ and the second displacement detector 24B ₁₁ constitutes one pair. That is, nine pairs of displacement detectors (three pairs each in the vertical direction and three pairs each in the horizontal direction) each of which is a combination of the first displacement detectors 24A ₁₁ to 24A ₃₃ and the second displacement detectors 24B ₁₁ to 24B ₃₃ are provided. is provided.

10A and 10B, the deformation occurring in the furnace body 8 is the same, but the type of the displacement detector 24 that detects the displacement of the furnace wall 9 is different. The displacement detector 24 in FIG. 10A is configured to be able to measure the horizontal distance between the furnace wall 9 and the frame 18 (stationary portion). is detectable. Further, the displacement detector 24 in FIG. 10B is a proximity switch or the like, which detects whether the horizontal distance between the furnace wall 9 and the frame 18 is equal to or less than a specified value with binary values of On/Off. It is possible to detect the furnace wall 9 directed to the outside of the furnace body 8, but not to detect the furnace wall 9 directed to the inside of the furnace body 8.
The same applies to FIGS. 11A to 13B.

As for the cause of the expansion deformation of the furnace body 8, if three or more of the nine pairs of displacement detectors 24A and 24B detect expansion deformation, the furnace body 8 is caused by an increase in the internal pressure of the furnace body 8. If expansion deformation is detected by one pair of the displacement detectors 24A and 24B out of the nine pairs, deformation of the furnace body 8 due to poor sliding between the internal device 11 and the support portion 16 is determined to occur.

In the example shown in FIGS _. 10A _and 10B _, the first displacement detector 24A and _the second displacement detector 24A _and the _second Both of the displacement detectors 24B detect the displacement (expansion deformation) of the furnace wall 9 toward the outside of the furnace body 8 . Therefore, it is determined that the furnace body 8 is expanded and deformed. Further, since expansion deformation is detected by three pairs of the displacement detectors 24 out of the nine pairs, it is determined that the furnace body 8 has expanded and deformed due to the rise in the internal pressure of the furnace body 8 .

In the example shown in FIGS. 11A and 11B, in three pairs of displacement detectors (24A ₁₂ , 24B ₁₂ ), (24A ₂₂ , 24B ₂₂ ), (24A ₃₂ , 24B ₃₂ ), the first displacement detector 24A 8 is detected, and the second displacement detector 24B does not detect the displacement of the furnace wall 9. As shown in FIG. Therefore, in these three pairs, since the total amount of displacement toward the outside of the furnace wall is positive, it is determined that the furnace body 8 is expanding and deforming. Further, since expansion deformation is detected by three pairs of the displacement detectors 24 out of the nine pairs, it is determined that the furnace body 8 has expanded and deformed due to the rise in the internal pressure of the furnace body 8 .

In the example shown in FIG. 12A, in two pairs of displacement detectors (24A ₁₁ , 24B ₁₁ ) and (24A ₁₂ , 24B ₁₂ ), displacement of the furnace wall 9 toward the outside of the furnace body 8 is detected by the first displacement detector 24A. In addition to detection, the second displacement detector 24B detects the displacement of the furnace wall 9 toward the inside of the furnace body 8 . That is, it can be determined that the furnace body 8 is tilted and deformed. Since there is no pair of displacement detectors that have detected expansion deformation, it is not determined that expansion deformation has occurred in the furnace body 8 in the example shown in FIG. 12A.

On the other hand, in the example shown in FIG. 12B, in the two pairs of displacement detectors (24A ₁₁ , 24B ₁₁ ) and (24A ₁₂ , 24B ₁₂ ), the displacement of the furnace wall 9 toward the outside of the furnace body 8 is detected by the first displacement detector 24A. Displacement is detected, but displacement of the furnace body 8 is not detected by the second displacement detector 24B. Therefore, it can be determined that there is a possibility that the furnace body 8 is tilted and deformed. Since there is no pair of displacement detectors that have detected expansion deformation, it is not determined that expansion deformation has occurred in the furnace body 8 in the example shown in FIG. 12B.

In the example shown in FIGS. 13A and 13B, in one pair of displacement detectors (24A ₁₁ , 24B ₁₁ ), the first displacement detector 24A detects the displacement of the furnace wall 9 toward the outside of the furnace body 8, and the displacement of the furnace wall 9 toward the outside of the furnace body 8 is detected. Displacement of the furnace wall 9 is not detected by the displacement detector 24B. Therefore, in this one pair, since the total amount of displacement toward the outside of the furnace wall is positive, it is determined that the furnace body 8 is expanding and deforming. Moreover, since expansion deformation is detected by one pair of displacement detectors 24 out of nine pairs, it is determined that deformation of the furnace body 8 has occurred due to poor sliding between the internal device 11 and the support portion 16 .

In some embodiments, the monitoring device 20 further includes a notification unit 34 configured to notify an abnormality of the furnace body 8 when the determination unit 30 determines that the furnace body 8 has expanded and deformed (Fig. 6). The notification unit 34 is configured to receive a signal indicating an abnormality of the furnace body 8 from the monitoring device 20 . The notification unit 34 may include a display (not shown) that visually indicates information indicating an abnormality in the furnace body 8, a speaker (not shown) that audibly indicates information indicating an abnormality in the furnace body 8, and the like. .

In this way, when it is determined that the furnace body 8 has expanded and deformed, the abnormality of the furnace body 8 is notified. It is possible to deal with the expansion deformation of . Therefore, expansion deformation of the furnace body 8 can be appropriately suppressed.

In some embodiments, when the determination unit 30 determines that the furnace body 8 has expanded and deformed, the monitoring device 20 supplies gas via the gas supply unit 40 so that the internal pressure of the furnace body 8 decreases. It further comprises an adjustment unit 32 (see FIG. 6) configured to adjust the amount of supply or the amount of gas discharged by the gas discharge unit 41 .

According to the above-described embodiment, when it is determined that the furnace body 8 has expanded and deformed, the amount of gas supplied by the gas supply unit 40 or the amount of gas discharged by the gas discharge unit 41 is adjusted so that the internal pressure of the furnace body 8 decreases. Since the discharge amount is adjusted, expansion of expansion deformation of the furnace body 8 can be effectively suppressed. Therefore, it is possible to effectively suppress the falling off of the internal device 11 due to the deformation of the furnace body 8 .

With reference to FIG. 14, a method of operating the heat treatment facility 1 including control of supply and discharge of gas (ambient gas) by the gas supply unit 40 and the gas discharge unit 41 will be described. FIG. 14 is a flow chart of a method for operating the heat treatment equipment 1 according to one embodiment.

First, the internal pressure (furnace pressure) of the furnace body 8 of the heat treatment furnace 2 is set to _P0 (step S102). During normal operation, the control unit 32 adjusts the opening of the supply valve 42 or the discharge valve 44 so that the furnace pressure is constant at the set value _P0 , and the amount of gas supplied by the gas supply unit 40 or The amount of gas discharged by the gas discharge unit 41 is adjusted (step S104).

Next, the determining unit 30 determines whether or not the furnace body 8 has been deformed based on the detection result of the displacement detector 24 (step S106). If no deformation of the furnace body 8 is detected in step S106 (NO in step S106), the operation of maintaining the furnace pressure constant at the set value P0 is continued (returns to step S104). On the other hand, if deformation of the furnace body 8 is detected in step S106 (YES in step S106), it is determined whether or not the deformation is expansion deformation of the furnace body 8 (step S108).

If it is determined in step S108 that there is no expansion deformation (for example, if it is determined that there is tilting deformation of the furnace body 8) (NO in step S108), the notification unit 34 is notified that deformation of the furnace body has occurred. A notification indicating that there is no expansion deformation is output (step S109), and the operation to keep the furnace pressure constant at the set value _P0 is continued (returns to step S104).

On the other hand, if it is determined in step S108 that there is expansion deformation (YES in step S108), a warning indicating that furnace body deformation has occurred is output to the notification unit 34 (step S110). Also, the number of displacement detectors 24 (or the number of pairs of the first displacement detector 24A and the second displacement detector 24B) that have detected expansion deformation of the furnace body 8 is compared with a threshold value (step S112).

In step S112, if the number of displacement detectors 24 that have detected the expansion deformation of the furnace body 8 is less than the threshold value (NO in step S112), it can be determined that the cause of the expansion deformation of the furnace body 8 is not the increase in internal pressure. , continue the operation to keep the furnace pressure constant at the set value _P0 (return to step S104), or determine the cause of the expansion deformation of the furnace body 8 (for example, fixation between the internal equipment 11 and the support portion 16). In order to remove it, the operation of the heat treatment equipment 1 is stopped and maintenance is performed (not shown).

In step S112, if the number of displacement detectors 24 that have detected expansion deformation of the furnace body 8 is greater than or equal to the threshold value (YES in step S112), it can be determined that the cause of the expansion deformation of the furnace body 8 is an increase in internal pressure. Therefore, the furnace pressure set value is changed to P _A which is smaller than the initial set value P ₀ (step S114), and the adjustment unit 32 adjusts the supply valve 42 so that the furnace pressure is constant at the set value P _A after the change. Alternatively, the amount of gas supplied by the gas supply unit 40 or the amount of gas discharged by the gas discharge unit 41 is adjusted by adjusting the opening degree of the discharge valve 44 (step S116).

Thereafter, while the displacement detector 24 continues to detect the displacement of the furnace wall 9 (NO in step S118), it is determined that the expansion deformation of the furnace body 8 is not sufficiently reduced, so the furnace pressure is set. The operation to keep the value _PA constant is continued (return to step S116).

On the other hand, when the displacement detector 24 no longer detects the displacement of the furnace wall 9 (YES in step S118), it can be determined that the expansion deformation of the furnace body 8 has been sufficiently reduced, so the set value of the furnace pressure is initialized. The value is returned to _P0 , and the operation is shifted to maintain the furnace pressure constant at the set value _P0 (return to step S104).

Thus, by appropriately adjusting the amount of gas supplied by the gas supply unit 40 or the amount of gas discharged by the gas discharge unit 41 based on the detection result of the expansion deformation of the furnace body 8, the expansion deformation of the furnace body 8 can be achieved. expansion can be effectively suppressed.

Next, a method for manufacturing the heat treatment equipment 1 according to some embodiments will be described.
A method for manufacturing a heat treatment facility 1 according to one embodiment is a method for manufacturing a heat treatment facility 1 including a pair of furnace walls 9 that are provided to face each other and constitute a furnace body 8, and in the outer side of the furnace body 8 , installing at least one displacement detector 24 configured to detect relative horizontal displacement of one of the pair of furnace walls 9 .

According to the above-described embodiment, for example, the existing heat treatment equipment 1 is provided with the displacement detector 24 configured to detect the horizontal displacement of the furnace wall 9 outside the furnace body 8. A simple procedure makes it possible to detect the horizontal displacement of the furnace wall 9 . As a result, it is possible to prevent the deformation of the furnace body 8 from increasing without incurring much cost, and the deformation of the furnace body 8 can be suppressed while suppressing an increase in the manufacturing cost of the heat treatment equipment 1 . Therefore, it is possible to suppress the occurrence of problems caused by the deformation of the furnace body 8 (for example, falling off of the internal equipment 11 supported by the furnace wall 9, etc.).

The following provides an overview of monitoring devices for heat treatment equipment and heat treatment equipment, as well as methods of monitoring and manufacturing heat treatment equipment, according to some embodiments.

(1) A monitoring device for heat treatment equipment according to at least one embodiment of the present invention,
A monitoring device for a heat treatment facility, comprising:
At least one displacement detector is provided outside a furnace body of the heat treatment facility and configured to detect horizontal displacement of one of a pair of furnace walls that constitute the furnace body.

According to the above configuration (1), the horizontal displacement of the furnace wall can be detected with a simple configuration in which the displacement detector is provided outside the furnace body. Therefore, the deformation of the furnace body can be detected based on this detection result, thereby making it possible, for example, to prevent the deformation of the furnace body from increasing. That is, according to the configuration (1) above, deformation of the furnace body can be suppressed while suppressing an increase in the manufacturing cost of the heat treatment equipment. Therefore, it is possible to suppress the occurrence of problems caused by the deformation of the furnace body (for example, falling off of internal equipment supported by the furnace wall).

(2) In some embodiments, in the configuration of (1) above,
The monitoring device
a stationary member provided outside the furnace body and fixed at a position spaced apart from the one of the pair of furnace walls to the outside of the furnace body;
a movable member provided outside the furnace body and movable together with the one of the pair of furnace walls as the one of the pair of furnace walls deforms,
The displacement detector is configured to detect a relative displacement of the movable member in the horizontal direction with respect to the stationary member.

According to the configuration (2) above, by detecting the relative position of the movable member with respect to the stationary member in the horizontal direction with the above-described displacement detector, the displacement detector, the stationary member, and the movable member are provided outside the furnace body. With such a configuration, the horizontal displacement of the furnace wall can be detected. Therefore, according to the above configuration (2), deformation of the furnace body can be suppressed while suppressing an increase in the manufacturing cost of the heat treatment equipment.

(3) In some embodiments, in the configuration of (1) or (2) above,
the at least one displacement detector comprising:
a first displacement detector provided on one side of the pair of furnace walls and configured to detect horizontal displacement of one of the pair of furnace walls;
positioned on the other side of the pair of furnace walls opposite to the first displacement detector across the furnace space of the furnace body and adapted to detect horizontal displacement of the other of the pair of furnace walls a second displacement detector configured to
including
The monitoring device
It further comprises a determination unit configured to determine whether expansion deformation has occurred in the furnace body based on detection results of the first displacement detector and the second displacement detector.

The form of deformation that occurs in the furnace body is considered to be expansion, tilting, etc. Among these, when expansion deformation occurs, for example, problems such as falling off of internal equipment supported by a pair of furnace walls occur. obtain. In this regard, according to the configuration (3) above, since the first displacement detector and the second displacement detector are provided on the pair of furnace walls, respectively, based on the detection results of these displacement detectors, the It can be determined whether expansion deformation has occurred. Therefore, based on this determination result, it is possible to deal with the expansion deformation of the furnace body so that it does not expand, and problems caused by the expansion deformation of the furnace body (for example, falling off of internal equipment supported by a pair of furnace walls, etc.) ) can be effectively suppressed.

(4) In some embodiments, in the configuration of (3) above,
The first displacement detector is configured to detect displacement of the one of the pair of furnace walls toward the outside of the furnace body,
The second displacement detector is configured to detect displacement of the other of the pair of furnace walls toward the outside of the furnace body,
When the first displacement detector and the second displacement detector detect that both of the pair of furnace walls are displaced toward the outside of the furnace body, the determination unit detects the displacement of the furnace body. It is configured to determine that expansion deformation has occurred in.

According to the above configuration (4), when the first displacement detector and the second displacement detector detect that both of the pair of furnace walls are displaced toward the outside of the furnace body, Since it is determined that the expansion deformation has occurred in the furnace body, the expansion deformation of the furnace body can be appropriately detected.

(5) In some embodiments, in the configuration of (3) or (4) above,
The first displacement detector is configured to detect the amount of displacement of the one of the pair of furnace walls to the outside and inside,
The second displacement detector is configured to be capable of detecting the amount of displacement of the other of the pair of furnace walls to the outside and inside,
The determination unit detects that one of the pair of furnace walls is displaced toward the outside of the furnace body by one of the first displacement detector and the second displacement detector, Displacement of the other of the pair of furnace walls toward the inside of the furnace body is detected by the other of the displacement detector or the second displacement detector, and the displacement of the one of the pair of furnace walls is detected. It is configured to determine that expansion deformation has occurred in the furnace body when the amount of displacement to the outside is larger than the amount of displacement to the inside of the other of the pair of furnace walls.

According to the above configuration (5), one of the pair of furnace walls is displaced toward the outside of the furnace body by the first displacement detector and the second displacement detector, and the other of the pair of furnace walls is displaced toward the furnace body. It is determined that expansion deformation has occurred in the furnace body when it is displaced inward and the amount of outward displacement of one of the pair of furnace walls is greater than the amount of inward displacement of the other of the pair of furnace walls. As a result, the expansion deformation of the furnace body can be appropriately detected.

(6) In some embodiments, in the configuration of any one of (3) to (5) above,
said at least one displacement detector comprises a plurality of pairs of said first displacement detector and said second displacement detector;
The determination unit determines the cause of the expansion deformation based on the number of pairs of the first displacement detector and the second displacement detector that have been determined to have caused expansion deformation in the furnace body, among the plurality of pairs. configured to identify

With configuration (6) above, the cause of the expansion deformation can be specified based on the number of pairs of the first displacement detector and the second displacement detector that have determined that expansion deformation has occurred in the furnace body. For example, out of the total number of pairs of the first displacement detector and the second displacement detector, when it is determined that expansion deformation has occurred in a certain number of pairs (for example, 20% or more of the total number of pairs), the internal pressure of the furnace body It can be inferred that the rise is the factor of furnace body deformation. Further, when it is determined that expansion deformation has occurred in a small number of pairs (for example, one pair) out of the total number of pairs of the first displacement detector and the second displacement detector, some internal equipment supported on the wall of the reactor may be affected. It can be presumed that the occurrence of the abnormality is the cause of the deformation of the furnace body. Therefore, by specifying the factor of the expansion deformation in this way, it is possible to appropriately deal with the expansion deformation of the furnace body based on the specified factor so as not to increase the expansion deformation.

(7) In some embodiments, in the configuration of any one of (3) to (6) above,
The monitoring device
The apparatus further includes a notification unit configured to notify an abnormality of the furnace body when the determination unit determines that the furnace body has expanded and deformed.

According to the above configuration (7), when it is determined that the furnace body has expanded and deformed, the abnormality of the furnace body is notified. It is possible to prevent expansion of the expansion deformation of the furnace body. Therefore, expansion deformation of the furnace body can be appropriately suppressed.

(8) Heat treatment equipment according to at least one embodiment of the present invention,
a pair of furnace walls that are provided to face each other and constitute a furnace body;
the monitoring device according to any one of (1) to (7) above;
Prepare.

According to the above configuration (8), the horizontal displacement of the furnace wall can be detected with a simple configuration in which the displacement detector is provided outside the furnace body. Therefore, the deformation of the furnace body can be detected based on this detection result, thereby making it possible, for example, to prevent the deformation of the furnace body from increasing. That is, according to the above configuration (8), deformation of the furnace body can be suppressed while suppressing an increase in the manufacturing cost of the heat treatment equipment. Therefore, it is possible to suppress the occurrence of problems caused by the deformation of the furnace body (for example, falling off of internal equipment supported by the furnace wall).

(9) In some embodiments, in the configuration of (8) above,
The heat treatment equipment is
an internal device fixed to one of the pair of furnace walls inside the furnace body;
a support portion fixed to the other of the pair of furnace walls inside the furnace body and configured to support the internal equipment while allowing horizontal relative displacement of the pair of furnace walls with respect to the other; ,
further provide.

In the heat treatment equipment of (9) above, the internal equipment fixed to one of the pair of furnace walls is supported by a support portion fixed to the other of the pair of furnace walls while allowing relative displacement in the horizontal direction. When expansion deformation occurs in the furnace body in such heat treatment equipment, the amount of overlap between the internal equipment and the support portion in the horizontal direction decreases. Then, when the expansion deformation of the furnace body increases, the internal equipment and the supporting portion are separated from each other in the horizontal direction, and the internal equipment may drop off from the supporting portion.
In this respect, according to the configuration (9) above, it is possible to detect the horizontal displacement of the furnace wall with a simple configuration in which the displacement detector is provided outside the furnace body. Therefore, deformation such as expansion deformation of the furnace body can be detected based on this detection result, so that it is possible to prevent the deformation of the furnace body from increasing. That is, according to the above configuration (9), deformation of the furnace body can be suppressed while suppressing an increase in the manufacturing cost of the heat treatment equipment. Therefore, it is possible to suppress the occurrence of falling off of the internal equipment due to the deformation of the furnace body.

(10) In some embodiments, in the configuration of (8) or (9) above,
The monitoring device comprises a determination unit configured to determine whether the furnace body has expanded and deformed based on the detection result of the at least one displacement detector,
The heat treatment equipment is
a gas supply unit that supplies gas to the interior of the furnace body;
a gas discharge part for discharging the gas from the inside of the furnace body;
The amount of gas supplied by the gas supply unit or the amount of gas discharged by the gas discharge unit is adjusted so that the internal pressure of the furnace body decreases when the determination unit determines that the furnace body has expanded and deformed. an adjustment unit configured to
further provide.

According to the above configuration (10), when it is determined that the furnace body has expanded and deformed, the amount of gas supplied by the gas supply unit or the amount of gas discharged by the gas discharge unit is reduced so that the internal pressure of the furnace body is reduced. is adjusted, it is possible to effectively suppress expansion of expansion deformation of the furnace body. Therefore, it is possible to effectively suppress the occurrence of falling off of the internal equipment due to the deformation of the furnace body.

(11) In some embodiments, in the configuration of any one of (8) to (10) above,
The heat treatment equipment is
A frame provided outside the furnace body,
The at least one displacement detector is provided at least partially between one of the pair of furnace walls and the frame in the horizontal direction.

According to the configuration (11) above, since the displacement detector is provided between the furnace wall and the frame in the horizontal direction, it is possible to easily access the displacement detector from the frame serving as a foothold. Therefore, the maintenance work of the displacement detector is facilitated.

(12) In some embodiments, in the configuration of any one of (8) to (11) above,
The heat treatment equipment is
A frame provided outside the furnace body and spaced apart from the one of the pair of furnace walls to the outside of the furnace body,
The monitoring device
a stationary member fixed to the frame;
a movable member provided outside the furnace body and movable together with the one of the pair of furnace walls as the one of the pair of furnace walls deforms,
The displacement detector is attached to one of the stationary member and the movable member, and is configured to be capable of detecting horizontal relative displacement of the movable member with respect to the stationary member.

According to the above configuration (12), the stationary member fixed to the frame and the movable member movable together with the furnace wall are used to detect the relative displacement of the movable member in the horizontal direction with respect to the stationary member. That is, since the relative displacement in the horizontal direction is detected by the structure using the frame, the deformation of the furnace body can be detected while suppressing the cost required for installing the monitoring device. Deformation can be suppressed.

(13) A method for monitoring heat treatment equipment according to at least one embodiment of the present invention includes:
A monitoring method for a heat treatment facility, comprising:
A step of detecting horizontal relative displacement of one of a pair of furnace walls constituting the furnace body outside the furnace body of the heat treatment equipment.

According to the method (13) above, since the horizontal displacement of the furnace wall is detected outside the furnace body, the deformation of the furnace body can be detected based on this detection result. It is possible to prevent the deformation of the furnace body from increasing. That is, according to the method (13), deformation of the furnace body can be suppressed while suppressing an increase in the manufacturing cost of the heat treatment equipment. Therefore, it is possible to suppress the occurrence of problems caused by the deformation of the furnace body (for example, falling off of internal equipment supported by the furnace wall).

(14) A method for manufacturing heat treatment equipment according to at least one embodiment of the present invention includes:
A method for manufacturing a heat treatment facility including a pair of furnace walls that are provided to face each other and constitute a furnace body,
installing at least one displacement detector outside the furnace body and configured to detect relative horizontal displacement of one of the pair of furnace walls.

According to the above method (14), a displacement detector configured to detect the horizontal displacement of the furnace wall is installed outside the furnace body. displacement can be detected. As a result, for example, it is possible to prevent the deformation of the furnace body from increasing, and it is possible to suppress the deformation of the furnace body while suppressing an increase in the manufacturing cost of the heat treatment equipment. Therefore, it is possible to suppress the occurrence of problems caused by the deformation of the furnace body (for example, falling off of internal equipment supported by the furnace wall).

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and includes modifications of the above-described embodiments and modes in which these modes are combined as appropriate.

As used herein, expressions such as "in a certain direction", "along a certain direction", "parallel", "perpendicular", "center", "concentric" or "coaxial", etc. express relative or absolute arrangements. represents not only such arrangement strictly, but also the state of being relatively displaced with a tolerance or an angle or distance to the extent that the same function can be obtained.
For example, expressions such as "identical", "equal", and "homogeneous", which express that things are in the same state, not only express the state of being strictly equal, but also have tolerances or differences to the extent that the same function can be obtained. It shall also represent the existing state.
Further, in this specification, expressions representing shapes such as a quadrilateral shape and a cylindrical shape not only represent shapes such as a quadrilateral shape and a cylindrical shape in a geometrically strict sense, but also within the range in which the same effect can be obtained. , a shape including an uneven portion, a chamfered portion, and the like.
Moreover, in this specification, the expressions “comprising”, “including”, or “having” one component are not exclusive expressions excluding the presence of other components.

1 Heat Treatment Equipment 2 Heat Treatment Furnace 3 Preheating Zone 4 Heating Zone 5 Soaking Zone 6 Cooling Zone 8 Furnace Body 9 Furnace Wall 9A First Furnace Wall 9B Second Furnace Wall 10 Transfer Roll 11 Internal Device 12 Radiant Tube 13 Roll Shaft 14 Cooling Gas Nozzle 15 Supporting plate 16 Supporting part 17 Rib 18 Frame 18A Frame 18B Frame 19 Bearing 20 Monitoring device 22 Control device 24 Displacement detector 24A First displacement detector 24B Second displacement detector 26 Stationary member 28 Movable member 30 Judging unit 32 Adjusting unit 34 Notification part 38 Gas supply line 39 Gas discharge line 40 Gas supply part 41 Gas discharge part 42 Supply valve 44 Discharge valve 51 One end side 52 Other end side 54 Protruding part 60 Stationary bracket 60a Vertical surface 62 Movable bracket 62a Vertical surface 64 Slit 66 Contact Child 68 Stationary bracket 70 Target plate 72 Laser rangefinder 118 Frame S Metal plate

Claims (14)

A monitoring device for a heat treatment facility, comprising:
A monitor for a heat treatment facility comprising at least one displacement detector provided outside a furnace body of said heat treatment facility and configured to detect horizontal displacement of one of a pair of furnace walls forming said furnace body. Device. a stationary member provided outside the furnace body and fixed at a position spaced apart from the one of the pair of furnace walls to the outside of the furnace body;
a movable member provided outside the furnace body and movable together with the one of the pair of furnace walls as the one of the pair of furnace walls deforms,
2. The monitoring device for heat treatment equipment according to claim 1, wherein said displacement detector is configured to be capable of detecting horizontal relative displacement of said movable member with respect to said stationary member. the at least one displacement detector comprising:
a first displacement detector provided on one side of the pair of furnace walls and configured to detect horizontal displacement of one of the pair of furnace walls;
positioned on the other side of the pair of furnace walls opposite to the first displacement detector across the furnace space of the furnace body and adapted to detect horizontal displacement of the other of the pair of furnace walls a second displacement detector configured to
including
3. The apparatus according to claim 1, further comprising a determination unit configured to determine whether expansion deformation has occurred in the furnace body based on detection results of the first displacement detector and the second displacement detector. A monitoring device for the heat treatment equipment described. The first displacement detector is configured to detect displacement of the one of the pair of furnace walls toward the outside of the furnace body,
The second displacement detector is configured to detect displacement of the other of the pair of furnace walls toward the outside of the furnace body,
When the first displacement detector and the second displacement detector detect that both of the pair of furnace walls are displaced toward the outside of the furnace body, the determination unit detects the displacement of the furnace body. 4. The monitoring device for heat treatment equipment according to claim 3, configured to determine that expansion deformation has occurred in the heat treatment facility. The first displacement detector is configured to detect the amount of displacement of the one of the pair of furnace walls to the outside and inside,
The second displacement detector is configured to be capable of detecting the amount of displacement of the other of the pair of furnace walls to the outside and inside,
The determination unit detects that one of the pair of furnace walls is displaced toward the outside of the furnace body by one of the first displacement detector and the second displacement detector, Displacement of the other of the pair of furnace walls toward the inside of the furnace body is detected by the other of the displacement detector or the second displacement detector, and the displacement of the one of the pair of furnace walls is detected. 5. The method according to claim 3 or 4, wherein it is determined that expansion deformation has occurred in the furnace body when the amount of displacement to the outside is larger than the amount of displacement to the inside of the other of the pair of furnace walls. A monitoring device for the heat treatment equipment described. said at least one displacement detector comprises a plurality of pairs of said first displacement detector and said second displacement detector;
The determination unit determines the cause of the expansion deformation based on the number of pairs of the first displacement detector and the second displacement detector that have been determined to have caused expansion deformation in the furnace body, among the plurality of pairs. 6. A monitoring device for a heat treatment facility according to any one of claims 3 to 5, adapted to identify. The heat treatment equipment according to any one of claims 3 to 6, further comprising a notification unit configured to notify an abnormality of the furnace body when the determination unit determines that the furnace body has expanded and deformed. monitoring equipment for a pair of furnace walls that are provided to face each other and constitute a furnace body;
a monitoring device according to any one of claims 1 to 7;
Heat treatment equipment with. an internal device fixed to one of the pair of furnace walls inside the furnace body;
a support portion fixed to the other of the pair of furnace walls inside the furnace body and configured to support the internal equipment while allowing horizontal relative displacement of the pair of furnace walls with respect to the other; ,
9. The heat treatment facility of claim 8, further comprising: The monitoring device comprises a determination unit configured to determine whether the furnace body has expanded and deformed based on the detection result of the at least one displacement detector,
a gas supply unit that supplies gas to the interior of the furnace body;
a gas discharge part for discharging the gas from the inside of the furnace body;
The amount of gas supplied by the gas supply unit or the amount of gas discharged by the gas discharge unit is adjusted so that the internal pressure of the furnace body decreases when the determination unit determines that the furnace body has expanded and deformed. an adjustment unit configured to
The heat treatment facility according to claim 8 or 9, further comprising: A frame provided outside the furnace body,
11. The heat treatment facility according to any one of claims 8 to 10, wherein said at least one displacement detector is provided at least partially between one of said pair of furnace walls and said frame in the horizontal direction. A frame provided outside the furnace body and spaced apart from the one of the pair of furnace walls to the outside of the furnace body,
The monitoring device
a stationary member fixed to the frame ;
a movable member provided outside the furnace body and movable together with the one of the pair of furnace walls as the one of the pair of furnace walls deforms,
12. The displacement detector according to any one of claims 8 to 11, wherein the displacement detector is attached to one of the stationary member and the movable member, and is configured to be capable of detecting horizontal relative displacement of the movable member with respect to the stationary member. Heat treatment equipment as described. A monitoring method for a heat treatment facility, comprising:
A method for monitoring heat treatment equipment, comprising the step of detecting relative displacement in the horizontal direction of one of a pair of furnace walls constituting the furnace body outside the furnace body of the heat treatment equipment. A method for manufacturing heat treatment equipment,
The heat treatment equipment is
Including a pair of furnace walls that are provided to face each other and constitute a furnace body,
A method of manufacturing a heat treatment facility, comprising installing at least one displacement detector outside the furnace body, the detector being configured to detect relative horizontal displacement of one of the pair of furnace walls.

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