JP7202187B2 - Touch panel, manufacturing method thereof, and touch display device - Google Patents

Description

RELATED APPLICATIONS This application claims priority from Chinese Patent Application No. 201710719365.3 filed on Aug. 21, 2017, the entire content of which is incorporated herein by reference.

TECHNICAL FIELD The present disclosure relates to the field of display technology, and more particularly to a touch panel, a touch display device and a manufacturing method of the touch panel.

In recent years, the market for small and medium-sized displays has undergone rapid changes, shipments of active matrix light emitting diode (AMOLED) panels have increased rapidly, and the momentum of development has increased rapidly. Flexible display technology offers manufacturers an innovative space. In order to be widely used in high-end mobile phones and new generation wearable display systems, flexible display products need to be equipped with touch sensors. The current mainstream touch sensor manufacturing process includes GFF (Glass+Film+Film, Glass+Film+Film), GF (Glass+Film, Glass+Film) and other types of bridges.

In the design process of touch sensor patterns such as GF bridges, the use of metal bridges or ITO bridges is highly controversial. If a metal bridge is used, it has good ductility but poor shadow removal effect. If ITO bridges are used, they will have a good shadow removal effect, but will be prone to cracking when bent.

According to one aspect of the disclosure, embodiments of the disclosure provide a touch panel. The touch panel comprises a base substrate, first touch sub-electrodes arranged in an array on the base substrate, each arranged along a first direction, and arranged on both sides of the first touch sub-electrodes along a second direction. and a plurality of touch sensing units including two second touch sub-electrodes and electrode slits disposed between each of the second touch sub-electrodes and the first touch sub-electrodes, each of the touch sensing units are electrically connected via at least two first bridges.

Optionally, said electrode slit has a sawtooth shape.

Optionally, a first slit and at least two second bridges are arranged between two adjacent touch sensing units in the first direction, and the at least two second bridges are arranged between the first slit and the at least two second bridges. to electrically connect the two first touch sub-electrodes of the two touch sensing units across.

In some embodiments, a first slit and at least two second bridges are arranged between two adjacent touch sensing units in the first direction. This further improves the shadow removal effect of the touch panel. The flexibility of the touch panel along the second direction is improved.

Optionally, a second slit and at least two third bridges are arranged between two touch sensing units adjacent in the second direction, and the at least two third bridges are connected to the second slit. straddling to electrically connect two immediately adjacent second touch sub-electrodes of the two touch sensing units.

In some embodiments, a second slit and at least two third bridges are arranged between two adjacent touch sensing units in the second direction. This further improves the shadow removal effect of the touch panel. The flexibility of the touch panel along the first direction is improved.

Optionally, the longitudinal direction of said second bridge and/or the longitudinal direction of said third bridge are inclined in said first direction.

By using the second bridge and/or the third bridge inclined in the first direction (or the second direction), the shadow removal effect can be further improved and the conductivity between adjacent touch sensing units is affected. do not give

Optionally, both said first slit and said second slit have a sawtooth shape.

Optionally, each of said touch sensing units further comprises a floating electrode, said floating electrode being located between adjacent first and second touch sub-electrodes, said floating electrode being located between said first touch sub-electrode and said second touch sub-electrode. It is insulated from the second touch sub-electrode, and the first touch sub-electrode, the second touch sub-electrode and the floating electrode are arranged in the same layer.

In some embodiments, the floating electrode insulated from the first touch sub-electrode and the second touch sub-electrode can shield electrical signal interference and improve the touch sensitivity of the touch panel. In addition, the floating electrodes can control the initial capacity and capacity increase of the touch sensing unit to adjust the electrical parameters of the touch sensing unit. In some embodiments, a primary mask process can be used to fabricate the first touch sub-electrode, the second touch sub-electrode, and the floating electrode of the touch panel, thereby simplifying process steps and improving the performance of the touch panel. Overall thickness can be reduced.

Optionally, said floating electrode has serrated edges.

A floating electrode with saw-toothed edges further enhances the shadow removal effect.

Optionally, materials of the first touch sub-electrode, the second touch sub-electrode, the floating electrode and the first bridge are all transparent conductive materials. Those skilled in the art will appreciate that the second and third bridges can also be manufactured using the same transparent conductive material.

In some embodiments, touch is achieved by fabricating the first touch sub-electrode, the second touch sub-electrode, the floating electrode, the first bridge, the second bridge and the third bridge using a transparent conductive material. Reflection of ambient light by the sensing unit can be further removed, and the shadow removal effect can be enhanced. Moreover, since the touch panel of the present disclosure has the structural features as described above, it has the advantage of being able to eliminate the drawback that the transparent conductive material is easily broken when bent.

Optionally, said transparent conductive material is indium tin oxide or indium zinc oxide.

In some embodiments, a process such as magnetron sputtering, chemical vapor deposition or sol-gel is used to form an indium tin oxide or indium zinc oxide film layer, and a mask process is used to form the first touch sub-electrode, the Two touch sub-electrodes, the floating electrode, the first bridge, the second bridge and the third bridge can be fabricated.

According to another aspect of the disclosure, an embodiment of the disclosure also provides a touch display device. The touch display device includes the touch panel described in the above embodiments.

According to yet another aspect of the disclosure, an embodiment of the disclosure further provides a method of manufacturing a touch panel. The method includes providing a base substrate; on the base substrate, first touch sub-electrodes each arranged along a first direction; and arranged on either side of the first touch sub-electrodes along a second direction. arranging a plurality of touch-sensing units in an array, comprising two second touch sub-electrodes and two second touch sub-electrodes arranged in an array, and arranging an electrode slit between each of the second touch sub-electrodes and the first touch sub-electrode; arranging at least two first bridges electrically connecting two second touch sub-electrodes of each of the sensing units.

Optionally, the method comprises forming a first slit between two adjacent touch sensing units in said first direction, and two first touch sub-units of said two touch sensing units straddling said first slit. and disposing at least two second bridges electrically connecting the electrodes.

Optionally, the method comprises: between two touch sensing units adjacent in the second direction, a second slit; and disposing at least two third bridges electrically connecting the two second touch sub-electrodes.

Optionally, the method comprises, on each of the touch sensing units, a floating electrode positioned between adjacent first and second touch sub-electrodes and insulated from said first and second touch sub-electrodes. wherein the first touch sub-electrode, the second touch sub-electrode and the floating electrode are arranged in the same layer.

Optionally, said floating electrode has serrated edges.

Optionally, said first touch sub-electrode, said second touch sub-electrode and said floating electrode of said touch panel are manufactured using a primary mask process.

Optionally, arranging a plurality of touch sensing units in an array on the base substrate comprises forming a pattern of the first touch sub-electrodes and the second touch sub-electrodes on the base substrate by a photolithography process. Disposing at least two first bridges includes forming a first photoresist layer covering a pattern of the first touch sub-electrodes and the second touch sub-electrodes; forming vias at locations corresponding to bridge points of one bridge; and filling the vias with a conductive material to form the first bridge.

Optionally, prior to the step of arranging said at least two first bridges, the method further comprises forming a metal trace pattern around said pattern of first touch sub-electrodes and said second touch sub-electrodes. include.

FIG. 1 is a schematic configuration diagram of a touch panel according to an embodiment of the present disclosure. FIG. 2 is a schematic configuration diagram of a touch sensing unit of the touch panel shown in FIG. 3 is a partial view of the touch sensing unit shown in FIG. 2. FIG. FIG. 4 is a schematic structural diagram of two adjacent touch sensing units according to an embodiment of the present disclosure. 5 is a partial view of two adjacent touch sensing units shown in FIG. 4; FIG. FIG. 6 is a schematic structural diagram of four adjacent touch sensing units according to an embodiment of the present disclosure. FIG. 7 is a flow chart illustrating a method for manufacturing a touch panel according to an embodiment of the present disclosure. FIG. 8a is a schematic diagram showing each step of a touch panel manufacturing method according to an embodiment of the present invention. FIG. 8b is a schematic diagram showing each step of a touch panel manufacturing method according to an embodiment of the present invention. FIG. 8c is a schematic diagram showing each step of a touch panel manufacturing method according to an embodiment of the present invention. FIG. 8d is a schematic diagram showing steps of a method for manufacturing a touch panel according to an embodiment of the present invention.

The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present disclosure. Apparently, the described embodiments are only some of the embodiments of the present disclosure and are not all embodiments. All other embodiments that a person skilled in the art can obtain without creative efforts based on the embodiments of the present disclosure are within the scope of the present disclosure.

The inventors have recognized that there is a need to balance the shadow-removing effect of the bridge and the bending resistance when designing the touch sensor pattern. Metal bridges have good ductility but poor shadow removal. A bridge like ITO material has a good shadow removing effect, but will be prone to cracking when bent. Therefore, it is expected to provide a touch sensor design proposal that achieves both shadow removal effect and bending resistance.

Accordingly, embodiments of the present disclosure provide a touch panel, a touch display device, and a manufacturing method of the touch panel that improve the shadow removal effect of the touch panel and enhance the ability to relieve stress.

According to one aspect of the disclosure, embodiments of the disclosure provide a touch panel. FIG. 1 is a schematic configuration diagram of a touch panel according to an embodiment of the present disclosure. FIG. 2 is a schematic configuration diagram of a touch sensing unit of the touch panel shown in FIG. 3 is a partial view of area A of the touch sensing unit shown in FIG. 2. FIG. The touch panel 100 includes a base substrate 10 and a plurality of touch sensing units 20 arranged in an array on the base substrate 10, as shown in FIGS. Each touch sensing unit 20 includes a first touch sub-electrode 201 arranged along a first direction X and two second touch sub-electrodes 202 arranged on both sides of the first touch sub-electrode 201 along a second direction Y. and an electrode slit 221 disposed between each of the second touch sub-electrodes 202 and the first touch sub-electrodes 201, wherein each two second touch sub-electrodes 202 of the touch sensing unit 20 are at least two are electrically connected via one first bridge 203 .

As shown in FIG. 3, a via plug 205 is provided in the via 204 at the contact location between each bridge 203 and the second touch sub-electrode 202 . Those skilled in the art will understand that in each touch sensing unit 20, a sawtooth-shaped electrode slit can be arranged between the first touch sub-electrode 201 and the second touch sub-electrode 202 (see FIG. 3). 206).

In an embodiment of the present disclosure, the two second touch sub-electrodes 202 in each touch sensing unit 20 are electrically connected by at least two bridges 203 . As shown in FIG. 3, a via plug 205 is provided in the via 204 at the contact position between each bridge 203 and the second touch sub-electrode 202 . The above configuration allows for greater spacing between adjacent bridges. Compared with the denser bridge arrangement in the prior art, the bridge structure in the touch sensing unit 20 is unclear and the shadow elimination effect of the touch panel 100 is improved. Conductive oxide materials such as ITO have poor ductility and are easily cracked when stressed inside, which affects the function of the product. By connecting a plurality of electrodes made of materials such as ITO with a bridge, stress can be released in the connection area and internal stress can be eliminated. Therefore, at least two bridges 203 can increase the ability of stress release of the touch sensing unit 20 . No matter which direction the touch panel 100 according to the embodiment of the present disclosure is bent, the at least two bridges 203 in each touch sensing unit 20 can effectively release the stress and disconnection between the two second touch sub-electrodes 202. is avoided, and the reliability of the flexible touch panel is improved. In addition, according to the above configuration, it is possible to fabricate touch sensing units of various sizes, and to support touch chips having various channel numbers and touch methods.

As shown in FIG. 1, a touch panel 100 according to an embodiment of the present disclosure can arrange trace regions 30 around multiple touch sensing units 20 arranged in an array. A metal trace pattern is disposed inside the trace area 30 for connecting the plurality of touch sensing units 20 to an external circuit.

FIG. 4 is a schematic structural diagram of two adjacent touch sensing units according to an embodiment of the present disclosure. 5 is a partial view of area B of the touch sensing unit shown in FIG. 4. FIG. Optionally, as shown in FIGS. 4 and 5 , a first slit 207 and at least two second bridges 208 are arranged between two touch sensing units 20 adjacent in the first direction X, and the At least two second bridges 208 electrically connect the two first touch sub-electrodes 201 of the two touch sensing units 20 across the first slits 207 .

Optionally, said electrode slit 221 has a sawtooth shape. Due to the light reflection, the edge of the electrode slit 221 (that is, the edge of the first touch sub-electrode or the second touch sub-electrode) has a sawtooth pattern, which further improves the shadow removal effect. Those skilled in the art will appreciate that the electrode slits 221 may have other shapes such as straight lines or curved lines.

In some embodiments, between two touch sensing units 20 adjacent in the first direction X, a first slit 207 and at least two second bridges 208 are arranged. Thereby, the shadow removing effect of the touch panel is further improved, and the flexibility of the touch panel 100 along the second direction Y is improved.

FIG. 6 is a schematic structural diagram of four adjacent touch sensing units according to an embodiment of the present disclosure. Optionally, as shown in FIG. 6 , a second slit 209 and at least two third bridges 210 are arranged between two touch sensing units 20 adjacent in the second direction Y, and the at least two A third bridge 210 electrically connects two directly adjacent second touch sub-electrodes 202 of the two touch sensing units 20 across the second slit 209 .

In some embodiments, a second slit 209 and at least two third bridges 210 are arranged between two touch sensing units 20 adjacent in the second direction Y. This further improves the shadow removal effect of the touch panel. Flexibility of the touch panel along the first direction is improved.

Optionally, the lengthwise direction of said second bridge 208 and/or the lengthwise direction of said third bridge 210 are slanted in said first direction X, as shown in FIGS. 4-6.

The second and/or third bridges inclined in the first direction (or the second direction) can further improve the shadow removal effect without affecting the conductivity between adjacent touch sensing units.

Optionally, both said first slit 207 and second slit 209 have a sawtooth shape. Due to the reflection of light, the pattern formed by the edges of the first slit 207 and the second slit 209 has a sawtooth shape, which further improves the shadow removing effect. Those skilled in the art will appreciate that the first slit 207 and the second slit 209 may have other shapes such as straight lines or curved lines.

Optionally, as shown in FIGS. 2, 4 and 6, each touch sensing unit 20 further comprises a floating electrode 211, said floating electrode 211 connecting the adjacent first touch sub-electrode 201 and second touch sub-electrode 202 together. The floating electrode 211 is insulated from the first touch sub-electrode 201 and the second touch sub-electrode 202, and the first touch sub-electrode 201, the second touch sub-electrode 202 and the floating electrode 211 are the same. arranged in a single layer.

In the context of the present disclosure, two or more objects "arranged on the same layer" means that two or more objects are arranged on the same plane or provided sandwiched between the same layers.

In some embodiments, the floating electrode 211 insulated from the first touch sub-electrode 201 and the second touch sub-electrode 202 can shield electrical signal interference and improve the touch sensitivity of the touch panel. In addition, since the total area of the electrodes is increased by using the floating electrodes 211, the initial capacitance and capacitance increase of the touch sensing unit 20 are controlled using the floating electrodes 211, and the touch sensing unit 20 is electrically connected. You can also adjust parameters. In some embodiments, a primary mask process can be used to fabricate the first touch sub-electrode, the second touch sub-electrode, and the floating electrode of the touch panel, thereby simplifying process steps and improving the performance of the touch panel. Overall thickness can be reduced.

Optionally, as shown in FIGS. 2, 4 and 6, the floating electrode 211 has serrated edges.

A floating electrode with saw-toothed edges further enhances the shadow removal effect.

Optionally, materials of the first touch sub-electrode 201, the second touch sub-electrode 202, the floating electrode 211 and the first bridge 203 are all transparent conductive materials. Those skilled in the art will appreciate that the second bridge 208 and third bridge 210 can also be fabricated using the same transparent conductive material.

In some embodiments, touch is achieved by fabricating the first touch sub-electrode, the second touch sub-electrode, the floating electrode, the first bridge, the second bridge and the third bridge using a transparent conductive material. Reflection of ambient light by the sensing unit can be further removed, and the shadow removal effect can be enhanced. Moreover, since the touch panel according to the embodiment of the present disclosure has the structural features as described above, there is an advantage that it is possible to eliminate the drawback that the transparent conductive material is easily broken when bent.

Optionally, said transparent conductive material is indium tin oxide or indium zinc oxide.

In some embodiments, a process such as magnetron sputtering, chemical vapor deposition or sol-gel is used to form an indium tin oxide or indium zinc oxide film layer, and a mask process is used to form the first touch sub-electrode, the Two touch sub-electrodes, the floating electrode, the first bridge, the second bridge and the third bridge can be fabricated.

According to another aspect of the disclosure, an embodiment of the disclosure also provides a touch display device. The touch display device includes the touch panel described in the above embodiments.

The touch display device can be any product or part with display function, such as mobile phone, tablet, TV, display, notebook, digital photo frame, navigator. For implementation of the touch display device, refer to the embodiment of the touch panel described above, and redundant description will be omitted.

According to yet another aspect of the disclosure, embodiments of the disclosure further provide a method of manufacturing a touch panel. FIG. 7 is a flow chart of a method for manufacturing a touch panel according to one embodiment of the present disclosure. As shown in FIG. 7, the method 700 includes step S701 of providing a base substrate, first touch sub-electrodes on said base substrate each arranged along a first direction, and said touch sub-electrodes along a second direction. A plurality of touch sensing units are arranged in an array, including two second touch sub-electrodes arranged on both sides of a first touch sub-electrode, and an electrode slit is arranged between each of the second touch sub-electrodes and the first touch sub-electrode. and disposing at least two first bridges each electrically connecting two second touch sub-electrodes of each of the touch sensing units S703.

In an embodiment of the present disclosure, the two second touch sub-electrodes of each touch sensing unit are electrically connected by at least two bridges. A via plug is provided in the via at the contact position between each bridge and the second touch sub-electrode. Therefore, with at least four independent bridge points, the bridge structure in the touch sensing unit is unclear and the shadow removal effect of the touch panel is improved. Also, the at least two bridges can increase the stress relief capability of the touch sensing unit. The touch panel according to the embodiments of the present disclosure, when bent in any direction, the at least two bridges of each touch sensing unit can effectively release stress, avoid disconnection between the two second touch sub-electrodes, and be flexible. The reliability of the touch panel is improved. In addition, according to the above configuration, it is possible to fabricate touch sensing units of various sizes, and to support touch chips having various channel numbers and touch methods.

Optionally, the method comprises forming a first slit between two adjacent touch sensing units in said first direction, and two first touch sub-units of said two touch sensing units straddling said first slit. and disposing at least two second bridges electrically connecting the electrodes.

In some embodiments, a first slit and at least two second bridges are arranged between two adjacent touch sensing units in the first direction. This further improves the shadow removal effect of the touch panel. The flexibility of the touch panel along the second direction is improved. Those skilled in the art can understand that the first slits are formed at the same time as the first touch sub-electrodes and the second touch sub-electrodes, and at least two second bridges are formed at the same time as the at least two first bridges.

Optionally, the method comprises: between two touch sensing units adjacent in the second direction, a second slit; and disposing at least two third bridges electrically connecting the two second touch sub-electrodes.

In some embodiments, a second slit and at least two third bridges are arranged between two touch sensing units adjacent in the second direction. This further improves the shadow removal effect of the touch panel. The flexibility of the touch panel along the first direction is improved. Those skilled in the art can understand that the second slits are formed at the same time as the first touch sub-electrode and the second touch sub-electrode, and at least two third bridges are formed at the same time as the at least two first bridges.

Optionally, the method comprises, on each of the touch sensing units, a floating electrode positioned between adjacent first and second touch sub-electrodes and insulated from said first and second touch sub-electrodes. wherein the first touch sub-electrode, the second touch sub-electrode and the floating electrode are arranged in the same layer.

In some embodiments, the floating electrode insulated from the first touch sub-electrode and the second touch sub-electrode can shield electrical signal interference and improve the touch sensitivity of the touch panel. In addition, the floating electrodes can control the initial capacity and capacity increase of the touch sensing unit to adjust the electrical parameters of the touch sensing unit. In some embodiments, a primary mask process can be used to fabricate the first touch sub-electrode, the second touch sub-electrode, and the floating electrode of the touch panel, thereby simplifying process steps and improving the performance of the touch panel. Overall thickness can be reduced.

Optionally, said floating electrode has serrated edges.

A floating electrode with saw-toothed edges further enhances the shadow removal effect.

Optionally, a primary mask process is used to fabricate the first touch sub-electrodes, the second touch sub-electrodes and the floating electrodes of the touch panel.

In some embodiments, a primary mask process can be used to fabricate the first touch sub-electrode, the second touch sub-electrode, and the floating electrode of the touch panel, thereby simplifying process steps and improving the performance of the touch panel. Overall thickness can be reduced.

Optionally, arranging a plurality of touch sensing units in an array on the base substrate comprises forming a pattern of the first touch sub-electrodes and the second touch sub-electrodes on the base substrate by a photolithography process. The step of arranging at least two first bridges includes: forming a first photoresist layer covering a pattern of the first touch sub-electrodes and the second touch sub-electrodes; forming a via at a location corresponding to a bridge point of a bridge; and filling the via with a conductive material to form the first bridge.

8a-8d are schematic diagrams illustrating steps of a method for manufacturing a touch panel according to an embodiment of the present disclosure. An example of a method for manufacturing a touch panel will now be described with reference to FIGS. 8a to 8d. Those skilled in the art will understand that only the configuration of a single touch sensing unit in a cross-sectional view parallel to said second direction Y is exemplarily shown in FIGS. 8a-8d. .

As shown in FIG. 8a, a pattern of first touch sub-electrodes 201 and second touch sub-electrodes 202 is formed on the base substrate 10 by photolithography process. The base substrate 10 may be a glass substrate or a cycloolefin copolymer (COP) film. The material of the first touch sub-electrode 201 and the second touch sub-electrode 202 may be ITO.

As shown in FIG. 8b, a photoresist (OCA) 212 is coated on the pattern of the first touch sub-electrode 201 and the second touch sub-electrode 202, and a via 204 is formed at the bridge point location by photolithography process.

As shown in FIG. 8c, a conductive material such as ITO is formed inside the via 204 and on the surface of the photoresist 212 by, for example, a sputtering process. Next, a photolithography process is used to form the first bridge 203 .

As shown in FIG. 8d, a photoresist 213 is applied on the basis of the structure shown in FIG. 8c to complete the structure of the touch sensing unit.

Optionally, prior to the step of arranging said at least two first bridges, the method further comprises forming a metal trace pattern around said pattern of first touch sub-electrodes and said second touch sub-electrodes. may include

As shown in FIG. 1, in some embodiments, a trace region 30 can be arranged around multiple touch sensing units 20 arranged in an array. A metal trace pattern may be disposed inside the trace area 30 for connecting the plurality of touch sensing units 20 to an external circuit.

According to the touch panel, the touch display device, and the touch panel manufacturing method in the embodiments of the present disclosure, the two second touch sub-electrodes in each touch sensing unit are electrically connected by at least two bridges. A via plug is provided in the via at the contact position between each bridge and the second touch sub-electrode. Therefore, with at least four independent bridge points, the bridge structure in the touch sensing unit is unclear and the shadow removal effect of the touch panel is improved. Also, the at least two bridges can increase the stress relief capability of the touch sensing unit. The touch panel according to the embodiments of the present disclosure, when bent in any direction, the at least two bridges of each touch sensing unit can effectively release stress, avoid disconnection between the two second touch sub-electrodes, and be flexible. The reliability of the touch panel is improved. In addition, according to the above configuration, it is possible to fabricate touch sensing units of various sizes, and to support touch chips having various channel numbers and touch methods.

It will be apparent to those skilled in the art that various modifications and changes can be made in this disclosure without departing from the spirit and scope of this disclosure. Thus, it is intended that the present disclosure include such modifications and variations provided they come within the scope of the appended claims and their equivalents.

REFERENCE SIGNS LIST 10 base substrate 20 touch sensing unit 30 trace area 100 touch panel 201 first touch sub-electrode 202 second touch sub-electrode 203 first bridge 203 bridge 204 via 205 via plug
205 via plug 207 first slit 208 second bridge 209 second slit 210 third bridge 211 floating electrode 212 photoresist (OCA)
212 photoresist 213 photoresist 221 electrode slit

Claims (17)

a base substrate;
first touch sub-electrodes arranged in an array on the base substrate, each arranged along a first direction; two second touch sub-electrodes arranged on both sides of the first touch sub-electrode along a second direction; and a plurality of touch sensing units including electrode slits disposed between each of the second touch sub-electrodes and the first touch sub-electrodes;
including
the two second touch sub-electrodes of each of the plurality of touch sensing units are electrically connected via at least two first bridges ;
Each of the touch sensing units further includes a floating electrode, wherein the floating electrode is positioned between adjacent first and second touch sub-electrodes, and the floating electrode is positioned between the first and second touch sub-electrodes. and the first touch sub-electrode, the second touch sub-electrode and the floating electrode are arranged in the same layer . The touch panel according to claim 1, wherein the electrode slit has a sawtooth shape. A first slit and at least two second bridges are arranged between two touch sensing units adjacent in the first direction, and the at least two second bridges straddle the first slit, The touch panel of claim 1, wherein the two first touch sub-electrodes of the two touch sensing units are electrically connected. A second slit and at least two third bridges are arranged between two touch sensing units adjacent in the second direction, and the at least two third bridges straddle the second slit, The touch panel according to claim 3, wherein two directly adjacent second touch sub-electrodes of two touch sensing units are electrically connected. 5. The touch panel according to claim 4, wherein the length direction of the second bridge or the length direction of the third bridge, or both, are inclined in the first direction. 5. The touch panel of claim 4, wherein both the first slit and the second slit have a sawtooth shape. The touch panel according to any one of claims 1 to 6, wherein the floating electrode has a sawtooth-shaped edge. The material of the first touch sub-electrode, the second touch sub-electrode, the floating electrode and the first bridge are all transparent conductive materials, according to any one of claims 1 to 6. touch panel. The touch panel according to claim 8 , wherein the transparent conductive material is indium tin oxide or indium zinc oxide. A touch display device comprising the touch panel according to any one of claims 1 to 9 . providing a base substrate;
A plurality of touches on the base substrate, each including a first touch sub-electrode arranged along a first direction and two second touch sub-electrodes arranged on both sides of the first touch sub-electrode along a second direction. arranging the sensing units in an array and arranging an electrode slit between each of the second touch sub-electrodes and the first touch sub-electrodes;
arranging at least two first bridges each electrically connecting the two second touch sub-electrodes of each of the touch sensing units;
disposing a floating electrode on each of the touch sensing units, positioned between adjacent first and second touch sub-electrodes and insulated from the first and second touch sub-electrodes. ,
A method of manufacturing a touch panel, wherein the first touch sub-electrode, the second touch sub-electrode and the floating electrode are arranged in the same layer . a first slit between two touch sensing units adjacent in the first direction; 12. The method of claim 11 , further comprising placing two second bridges. electrically connecting a second slit between two touch sensing units adjacent in the second direction, and two second touch sub-electrodes directly adjacent to the two touch sensing units across the second slit; 12. The method of claim 11 , further comprising arranging at least two connecting third bridges. 12. The method of claim 11 , wherein the floating electrode has serrated edges. 12. The method of claim 11 , wherein the first touch sub-electrode, the second touch sub-electrode and the floating electrode of the touch panel are manufactured using a primary mask process. arranging a plurality of touch sensing units in an array on the base substrate includes forming a pattern of the first touch sub-electrodes and the second touch sub-electrodes on the base substrate by a photolithographic process;
The step of arranging the at least two first bridges comprises forming a first photoresist layer covering a pattern of the first touch sub-electrodes and the second touch sub-electrodes; and the first bridges of the first photoresist layer. 12. The method of claim 11 , comprising forming a via at a location corresponding to a bridge point of and filling the via with a conductive material to form the first bridge. Before disposing the at least two first bridges, the method further comprises forming a metal trace pattern around the pattern of the first touch sub-electrodes and the second touch sub-electrodes. 17. The method of claim 16 , wherein

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