JP7175219B2 - wire electric discharge machine - Google Patents

Description

TECHNICAL FIELD The present invention relates to a wire electric discharge machine that simultaneously performs electric discharge machining at a plurality of positions on a workpiece.

A wire electric discharge machine is known which simultaneously cuts out a plurality of plate-shaped bodies from a workpiece by performing electric discharge machining on a plurality of wire portions at the same time. In such a wire electric discharge machine, a plurality of wire portions parallel to each other are formed by rotating one wire electrode a plurality of times. Such a wire electric discharge machine is provided with a plurality of feeders for applying a voltage between the wire portion and the workpiece. Each of the plurality of feeder terminals is insulated from each other in order to individually apply a voltage to each of the plurality of wire portions. A power supply line for supplying a machining current to the wire portion is connected to each power supply pin.

Patent Literature 1 discloses a wire electric discharge machining apparatus having a laminated structure in which a plurality of feeding electrons are laminated. In such a laminated structure, a plurality of feeder terminals are fastened together in a state in which a feeder conductor to which a feeder line is connected and an insulator are sandwiched between the feeder terminals, thereby integrating the plurality of feeder terminals. there is The filamentary portion travels while being in contact with the side surface of the feeder. In the following description, a structure having a plurality of feeders integrated with each other will be referred to as a feeder unit.

Japanese Patent No. 4912330

The interval between the filamentary portions is adjusted according to the thickness of the plate-like body cut out from the workpiece. In the feeder unit, the intervals between the feeders need to be adjusted in order to arrange the feeders according to the spacing between the linear portions. In the case of the power supply unit of Patent Document 1, the power supply conductor connected to the power supply line may interfere with maintenance work. Further, in the case of the power supply unit of Patent Document 1, during maintenance work, the power supply line may come off from the power supply conductor by touching the power supply line with a work tool or the operator's finger. When the power supply line is disconnected from the power supply conductor, it is necessary to reconnect the power supply line to the power supply conductor. For this reason, the conventional technique according to Patent Document 1 has a problem that it is difficult to maintain a feeder unit having a plurality of feeders.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a wire electric discharge machine that enables easy maintenance of a feeder unit having a plurality of feeders.

In order to solve the above-described problems and achieve the object, a wire electric discharge machine according to the present invention includes a first guide roller and a second guide roller around which a wire electrode is wound a plurality of times to guide the movement of the wire electrode. Individual contact with a guide roller and a plurality of wire portions that are portions parallel to each other between the first guide roller and the second guide roller of the wire electrode, and the contact wire portion and the cover a feed for applying a voltage between it and the workpiece. A wire electric discharge machine according to the present invention comprises a holder holding a power feeder unit having a plurality of power feeders integrated with each other , a holding part combined with the holder, and a feeder through which a machining current supplied by a machining power supply flows. a conductor tethered to the end of the feeder for contacting the feeder to electrically connect the feeder to the feeder. The feeder unit is positioned and held by the holder and the pressing portion, whereby each of the plurality of feeders is pressed against the conductor.

Advantageous Effects of Invention According to the present invention, it is possible to easily maintain a feeder unit having a plurality of feeders.

1 is a diagram showing a schematic configuration of a wire electric discharge machine according to Embodiment 1 of the present invention; FIG. 2 is a diagram showing a feeder provided in the wire electric discharge machine shown in FIG. 1 and a configuration for installing the feeder; FIG. 3 is a diagram showing how the feeder unit shown in FIG. 2 is attached to a holder; FIG. 4 is a diagram showing a power supply unit included in a wire electric discharge machine according to a second embodiment of the present invention; Exploded view of the feeder unit shown in FIG. FIG. 10 is a diagram showing a feeder unit included in a wire electric discharge machine according to a third embodiment of the present invention; Exploded view of the feeder unit shown in FIG. A diagram showing a holding mechanism, which is a conductor, of a wire electric discharge machine according to a fourth embodiment of the present invention. FIG. 9 is a view showing the configuration shown in FIG. 8 viewed from a direction different from that of FIG. 8; 9 is a perspective view of the holding mechanism shown in FIG. 8; FIG. FIG. 10 is a view showing the configuration shown in FIG. 8 viewed from a different direction from FIGS. 8 and 9; FIG. 12 is a diagram showing a configuration of the feeder unit shown in FIG. 11 excluding the feeder; FIG. 10 is a diagram showing a holder and a power supply wire as a conductor included in a wire electric discharge machine according to a fifth embodiment of the present invention; FIG. 14 is a diagram showing the power supply unit and power supply wires in a state where the power supply unit is attached to the holder shown in FIG. 13 ; FIG. 15 is a diagram showing another example in which a power supply wire is attached to a holder in the fifth embodiment;

A wire electric discharge machine according to an embodiment of the present invention will be described in detail below with reference to the drawings. In addition, this invention is not limited by this embodiment.

Embodiment 1.
FIG. 1 is a diagram showing a schematic configuration of a wire electric discharge machine according to Embodiment 1 of the present invention. In the wire electric discharge machining apparatus 100, a plurality of wire portions 2a parallel to each other are formed by winding one wire electrode 2 a plurality of times. The wire electric discharge machining apparatus 100 cuts out a plurality of plate-like bodies from the workpiece 7 at once by performing electric discharge machining on each filament portion 2a at the same time. The workpiece 7 is, for example, a monocrystalline or polycrystalline columnar ingot of silicon carbide (SiC), gallium nitride (GaN), silicon, or the like, which is used for semiconductors, solar cells, or the like.

A wire electric discharge machining apparatus 100 includes a first bobbin 1A from which a wire electrode 2 is paid out, and a wire electrode 2 that is paid out from the first bobbin 1A and wound by a plurality of guide rollers 3a, 3b, 3c, and 3d. and a second bobbin 1B taken. The first bobbin 1A is capable of forward rotation for drawing out the wire electrode 2 and reverse rotation opposite to the forward rotation about the rotation axis. The second bobbin 1B is capable of forward rotation for winding the wire electrode 2 and reverse rotation opposite to the forward rotation about the rotation axis. The first bobbin 1A is mounted on a traverse stage that reciprocates in the rotation axis direction. The second bobbin 1B is mounted on a traverse stage that reciprocates in the rotation axis direction. In FIG. 1, illustration of the traverse stage is omitted.

The guide rollers 3a, 3b, 3c, and 3d are wound around the wire electrode 2 a plurality of times at intervals to guide the running of the wire electrode 2 between the first bobbin 1A and the second bobbin 1B. The number of guide rollers provided in the wire electric discharge machine 100 is not limited to four. The wire electric discharge machine 100 may be provided with a plurality of guide rollers.

A plurality of equally spaced guide grooves are formed on the surfaces of the guide rollers 3a, 3b, 3c and 3d. By winding the wire electrode 2 along these guide grooves, the guide rollers 3a, 3b, 3c, and 3d keep the intervals between the wire electrodes 2 in parallel between the guide rollers 3a, 3b, 3c, and 3d constant. Hold.

The wire electrode 2 unwound from the first bobbin 1A is wound around the guide roller 3a, the guide roller 3b, the guide roller 3c, and the guide roller 3d in this order, and the winding from the guide roller 3a is continued again. In this manner, the wire electrode 2 is wound around the second bobbin 1B after making multiple turns between the guide rollers 3a, 3b, 3c, and 3d. The plurality of wire portions 2a are portions of the wire electrode 2 that are parallel to each other between the guide roller 3c as the first guide roller and the guide roller 3d as the second guide roller.

A wire electric discharge machine 100 includes a stage 13 on which a workpiece 7 is placed. The stage 13 reciprocates in a vertical direction perpendicular to the traveling direction of the plurality of wire portions 2a and the direction in which the plurality of wire portions 2a are arranged side by side. The stage 13 changes the position of the workpiece 7 by reciprocating motion in the vertical direction so as to move the workpiece 7 relatively closer to or away from the plurality of linear portions 2a. A machined groove 8 is formed in the workpiece 7 along the plurality of linear portions 2a by the electrical discharge machining of the workpiece 7. As shown in FIG.

The damping guide roller 4A is arranged between the workpiece 7 and the guide roller 3d. The damping guide roller 4B is arranged between the workpiece 7 and the guide roller 3c. A plurality of equally spaced guide grooves 5 are provided in the damping guide rollers 4A and 4B. The damping guide roller 4A and the damping guide roller 4B keep the intervals between the linear portions 2a on the workpiece 7 constant.

The wire electric discharge machining apparatus 100 includes a plurality of feeders 10A and a plurality of feeders 10B for applying a voltage between each of the plurality of wire portions 2a and the workpiece 7. As shown in FIG. The feeder 10A individually contacts every other wire portion 2a among the plurality of wire portions 2a between the damping guide roller 4A and the guide roller 3d. Between the damping guide roller 4B and the guide roller 3c, the feeder 10B individually contacts the wire portions 2a other than the wire portion 2a that contacts the feeder 10A among the plurality of wire portions 2a. The feeders 10A and 10B apply a voltage between the filament portion 2a and the workpiece 7 which are in contact with each other. A machining power supply 14 outputs a machining current. The pulse oscillator 15 performs pulse oscillation. The machining power supply unit 12 applies pulse voltages individually to the feeders 10A and 10B. In FIG. 1, illustration of the configuration for installing the feeders 10A and 10B is omitted. Also, in FIG. 1, the shapes of the feeders 10A and 10B are shown in a simplified manner. The number of feeders 10A and the number of feeders 10B are not limited to the numbers shown in FIG. The number of feeders 10A and the number of feeders 10B can be arbitrarily changed according to the number of wire portions 2a to be subjected to electric discharge machining.

The nozzle 6A is arranged between the damping guide roller 4A and the workpiece 7. As shown in FIG. The nozzle 6B is arranged between the damping guide roller 4B and the workpiece 7 . The plurality of filamentary portions 2a are passed through the nozzles 6A and 6B. The nozzles 6A and 6B have through holes through which the plurality of linear portions 2a are passed. The machining liquid filled inside the nozzles 6A and 6B is jetted to the workpiece 7 through the through holes.

17 A of rotation drive parts have a motor which rotates the 1st bobbin 1A. The traverse driving section 18A drives a traverse stage that reciprocates the first bobbin 1A. The rotation drive section 17B has a motor that rotates the second bobbin 1B. The traverse driving section 18B drives a traverse stage that reciprocates the second bobbin 1B. The traverse drive units 18A and 18B have motors and mechanisms for converting rotary motion of the motors into linear motion. A stage drive unit 19 drives the stage 13 . The stage drive unit 19 has a motor and a mechanism for converting rotary motion of the motor into linear motion. In FIG. 1, illustration of each motor and each mechanism is omitted.

The machining control device 16 controls the entire wire electric discharge machine 100 . The processing control device 16 controls the pulse oscillator 15 , rotation drive units 17 A and 17 B, traverse drive units 18 A and 18 B, and stage drive unit 19 .

Next, a configuration for installing the feeders 10A and 10B will be described. In the following description, the feeder 10A and the feeder 10B may be referred to as the feeder 10 without distinguishing between them.

FIG. 2 is a diagram showing a feeder provided in the wire electric discharge machining apparatus shown in FIG. 1 and a configuration for installing the feeder. The structure shown in FIG. 2 is installed at a position between the damping guide roller 4A and the guide roller 3d shown in FIG. 1, and at a position between the damping guide roller 4B and the guide roller 3c. .

A wire electric discharge machine 100 has a feeder unit 20 . The feeder unit 20 has a plurality of feeders 10 integrated with each other. FIG. 2 shows two feeder units 20 arranged such that the feeders 10 are staggered. The two feeder units 20 have the same configuration.

The feeder unit 20 has a plurality of feeders 10 , a plurality of insulating plates 22 and two spacers 23 . In the feeder unit 20, the plurality of feeders 10 and the plurality of insulating plates 22 are arranged in a line. Since one insulating plate 22 is sandwiched between two feeders 10, the feeders 10 and the insulating plates 22 are arranged alternately. A plurality of feeders 10 and a plurality of insulating plates 22 are arranged between two spacers 23 .

A support rod 21 , which is a support component, penetrates the plurality of feeders 10 , the plurality of insulating plates 22 and the two spacers 23 . By penetrating the plurality of feeders 10, the plurality of insulating plates 22, and the two spacers 23, the support rods 21 are connected to each of the plurality of feeders 10, each of the plurality of insulating plates 22, and each of the two spacers 23. support. A plurality of feeders 10, a plurality of insulating plates 22, and two spacers 23 are supported by support rods 21 in a mutually integrated state. Also, the support rod 21 penetrates the center of each feeder 10 , the center of each insulating plate 22 , and the center of each spacer 23 . The plurality of feeders 10, the plurality of insulating plates 22 and the two spacers 23 are coaxially arranged. The plurality of feeders 10, the plurality of insulating plates 22, and the two spacers 23 are arranged in a line in the direction of the central axis of the support rod 21 and integrated with each other. In the following description, the direction of the central axis of the support rod 21 may be referred to as the axial direction. By providing the insulating plate 22 and the spacer 23, the feeder unit 20 can arrange each of the plurality of feeders 10 according to the position of the wire portion 2a.

Feeder 10 is a disc-shaped object with a hole in the center through which support rod 21 passes. Cemented carbide is used as the material of the feeder 10 . A groove through which the filamentous portion 2a passes is formed on the outer surface of the disk shape. The groove is formed over the entire circumference of the disk shape. The groove has a V-shaped cross-section. In the following description, such grooves will be referred to as V-grooves. Since the wire portion 2a travels in a state where the wire portion 2a is in the V-groove, it is possible to prevent the wire portion 2a from falling off from the feeder 10. As shown in FIG. In addition, contact of the wire portion 2a with the feeder 10 is ensured by sliding the wire portion 2a on the inner wall of the V-groove. The contact between the feeder 10 and the wire portion 2a enables the supply of current from the feeder 10 to the wire portion 2a. By using cemented carbide, which is a metal with excellent wear resistance, for the material of the feeder 10 , it is possible to reduce wear due to sliding of the wire portion 2 a on the feeder 10 .

The insulating plate 22 is a disc-shaped object having a hole in the center through which the support rod 21 passes. The insulating plate 22 electrically insulates the feeder terminals 10 adjacent to each other. Also, the insulating plate 22 maintains the interval between the feeder terminals 10 adjacent to each other. Spacer 23 is a cylindrical object through which support rod 21 passes. The support rod 21 is a cylindrical object. The support rod 21 electrically insulates each of the plurality of feeders 10 supported on the support rod 21 .

The number of feeders 10 provided in the feeder unit 20 is not limited to the number shown in FIG. The number of feeders 10 provided in the feeder unit 20 can be arbitrarily changed according to the number of wire portions 2a to be subjected to electric discharge machining.

The wire electric discharge machine 100 has a holder 30 that holds the power supply unit 20 . The holder 30 holds the feeder unit 20 by fitting the end of the support rod 21 into the holder 30 . The pressing portion 31 prevents the support rod 21 from coming off the holder 30 by being combined with the holder 30 . In addition, in FIG. 2, the holder 30 and the pressing portion 31 are represented by broken lines.

The holder 30 is provided with a plurality of leaf springs 32 that are conductors. In a state where the feeder unit 20 is held by the holder 30 , each of the plurality of feeders 10 contacts each of the plurality of plate springs 32 . An end of the power supply line 11 is connected to each of the leaf springs 32 . The plate spring 32 and the feeder line 11 are electrically connected by soldering the end of the feeder line 11 to the end of the leaf spring 32 . Further, the plate spring 32 electrically connects the feeder 10 to the feeder line 11 by bringing the feeder 10 into contact with the plate spring 32 . The end of the power supply line 11 opposite to the end connected to the leaf spring 32 is connected to the machining power supply unit 12 .

FIG. 3 is a diagram showing how the feeder unit shown in FIG. 2 is attached to a holder. The holder 30 has a recess 35 into which the support rod 21 can be fitted. A positioning pin 33 is provided on the surface of the holder 30 that contacts the pressing portion 31 . The holding portion 31 has a concave portion 36 formed so that the support rod 21 can be fitted therein. A hole 34 into which a positioning pin 33 can be inserted is provided in the surface of the pressing portion 31 that contacts the holder 30 . FIG. 3 shows a cross section of the holder 30 at the position where the positioning pin 33 is provided and a cross section of the pressing portion 31 at the position where the hole 34 is provided.

With the support rod 21 placed on the recess 35 formed in the holder 30 , the holding portion 31 is superimposed on the holder 30 while inserting the positioning pin 33 into the hole 34 . As a result, the support rod 21 is positioned by the recesses 35 and 36 , and the feeder unit 20 is held by the holder 30 and the pressing portion 31 .

In the process in which the pressing portion 31 is placed on the holder 30 and the support rod 21 enters the recess 35 , the feeder 10 contacts the top of the plate spring 32 . The plate spring 32 is in contact with a portion of the feeder 10 opposite to the portion in contact with the filament portion 2a. Further, in a state in which the feeder unit 20 is positioned on the holder 30 by the pressing portion 31 coming into contact with the holder 30 , the plate spring 32 presses the feeder 10 against the feeder 10 . deformation while maintaining the contact of The plate spring 32 is deformable by being pressed by the feeder 10 when the feeder unit 20 is positioned on the holder 30 . The plate spring 32 is made of a metal material that is conductive and elastically deformable. In this manner, the plurality of feeders 10 of the feeder unit 20 contact each of the plurality of leaf springs 32 in a state in which the leaf springs 32 are deformed by being pressed against the leaf springs 32 . .

The leaf spring 32 is deformed by being pressed by the feeder 10 . The contact of the feeder 10 with the leaf spring 32 is ensured by the deformation of the leaf spring 32 . The contact between the feeder 10 and the plate spring 32 enables current to be supplied from the plate spring 32 to the feeder 10 .

Positioning the feeder unit 20 on the holder 30 allows each of the plurality of feeders 10 to simultaneously contact each of the plurality of leaf springs 32 . Thereby, the wire electric discharge machine 100 can electrically connect each of the plurality of power feeders 10 to each of the plurality of power feeders 11 in a state where the power feeder unit 20 is held by the holder 30 . Note that the leaf spring 32 may be provided on an element other than the holder 30 in the wire electric discharge machine 100 . The leaf spring 32 may be provided at a position where it can come into contact with the power feeder 10 .

As the linear portion 2a of the feeder 10 continues to slide, the portion of the feeder 10 that contacts the linear portion 2a gradually wears out. Maintenance of rotating the feeder 10 around the axis of the support rod 21 so that, when the portion in contact with the wire portion 2a is worn, the portion of the feeder 10 other than the worn portion is in contact with the wire portion 2a. is carried out. In this way, the same feeder 10 can be used for a long period of time by making the portion of the feeder 10 that is not used for contact with the filamentary portion 2a newly brought into contact with the filamentous portion 2a. be able to. Maintenance for rotating the feeder 10 in this way is performed by loosening the fastening of the feeder unit 20 .

Further, in the wire electric discharge machine 100 , the interval between the filament portions 2 a is adjusted according to the thickness of the plate-like body cut out from the workpiece 7 . When the interval between the linear portions 2a is changed, maintenance is performed to change the interval between the feeders 10 in the feeder unit 20 in accordance with the interval between the linear portions 2a. Maintenance for changing the interval of each feeder 10 is also performed by loosening the fastening of the feeder unit 20 . Also, when maintenance to replace the power feeder 10 fastened to the power feeder unit 20 or maintenance to clean the power feeder 10 is performed, the fastening of the power feeder unit 20 is released.

In Embodiment 1, each feeder 10 is connected to the feeder line 11 via the plate spring 32 . The feeder unit 20 can be removed independently of the holder 30 to which the feeder 11 is fixed. Therefore, the wire electric discharge machine 100 can prevent the power supply line 11 from interfering with maintenance work of the power supply unit 20 .

Further, in Embodiment 1, it is not necessary to provide the feeder unit 20 with a feeder conductor, which is one of the structures that elastically deform when the feeder unit 20 is fastened. The feeder unit 20 can reduce spacing errors of the feeder 10 by not requiring feeder conductors. The feeder unit 20 does not require work for adjusting the interval between the feeders 10 when the fastening is loosened and then fastened again. In the feeder unit 20, the spacing between the feeders 10 can be adjusted by arranging the feeders 10 via the insulating plate 22 without adjusting by using a measuring instrument. As described above, the wire electric discharge machine 100 enables easy maintenance of the power supply unit 20 .

Each of the leaf springs 32 is slidable in a direction parallel to the axial direction of the feeder unit 20 . That is, the position of each leaf spring 32 is adjustable in the direction parallel to the axial direction. When the position of each feeder 10 in the axial direction is adjusted in accordance with the adjustment of the spacing between the linear portions 2a, the position of each leaf spring 32 is adjusted in accordance with the position of each feeder 10. . In the wire electric discharge machining apparatus 100, when the position of the feeder 10 is adjusted as the position of the filament portion 2a is changed, the leaf spring 32 is positioned in accordance with the feeder 10, whereby the leaf spring 32 and the feeder are positioned. Contact with the electron 10 can be maintained.

In the wire electric discharge machine 100 , one feeder unit 20 is held by one holder 30 . The wire electric discharge machine 100 may have a holder 30 capable of holding a plurality of power supply units 20 .

According to Embodiment 1, the wire electric discharge machine 100 is provided with a plurality of leaf springs 32 that electrically connect the feeder 10 to the feeder 11 . Further, when the feeder unit 20 is held by the holder 30 , each of the plurality of feeders 10 contacts each of the plurality of leaf springs 32 . As a result, the wire electric discharge machining apparatus 100 has the effect of enabling easy maintenance of the feeder unit 20 having the plurality of feeders 10 .

Embodiment 2.
In Embodiment 2, a detailed configuration example of the power supply unit 20 will be described. FIG. 4 is a diagram showing a feeder unit included in a wire electric discharge machine according to a second embodiment of the present invention. 5 is an exploded view of the feeder unit shown in FIG. 4. FIG. In the second embodiment, the same reference numerals are assigned to the same components as in the first embodiment, and the configuration different from the first embodiment will be mainly described.

A base 24 is provided at one end of the support rod 21 in the axial direction. The width of the base 24 in the direction perpendicular to the axial direction is greater than the width of the rest of the support rod 21 . A nut 27 as a fastening component is fastened to the other end of the support rod 21 in the axial direction. A plurality of feeders 10 , a plurality of insulating plates 22 and two spacers 23 are arranged in a row between the base 24 and the nut 27 . A leaf spring 26 is sandwiched between the nut 27 and the spacer 23 . The plurality of feeders 10 , the plurality of insulating plates 22 , the two spacers 23 and the leaf springs 26 are fixed between the base 24 and the nuts 27 by fastening the nuts 27 to the support rods 21 . In FIG. 5, illustration of part of the feeder 10 and the insulating plate 22 shown in FIG. 4 is omitted.

Insulating ceramics such as silicon nitride is used as the material of the insulating plate 22 . The insulating plate 22 can be a structure made of insulating ceramics. In this case, the entire insulating plate 22 is made of an insulating material. By using insulating ceramics with small elastic deformation as the material of the insulating plate 22, when the feeding pin 10 and the insulating plate 22 are integrated and the nut 27 is fastened, the power feeding pin due to the strength of fastening. A reduction in spacing error of 10 is possible.

The insulating plate 22 may be a structure having a core material and an insulating hard film formed on the surface of the core material. In this manner, the insulating plate 22 is not limited to being entirely made of an insulating material, and may be made of an insulating material only on the surface. A material having high hardness such as cemented carbide or stainless steel is used for the core material. A material capable of forming a high-resistance hard film, such as diamond-like carbon (DLC), is used as the insulating material. In this case, the insulating plate 22 is formed by coating the core material with an insulating material. Also in this case, the insulating plate 22 can reduce the spacing error of the feeder 10 caused by the fastening strength when the nut 27 is fastened.

The spacer 23 is a component provided for the feeders 10 between the base 24 and the nut 27 . The two spacers 23 are fixed to the support rod 21 with the plurality of feeders 10 and the plurality of insulating plates 22 sandwiched therebetween. Each feeder 10 is positioned by a plurality of insulating plates 22 and two spacers 23 in the axial direction of the support rod 21 .

Similar to the insulating plate 22, the spacer 23 is made of insulating ceramics such as silicon nitride. The spacer 23 can be a structure made of insulating ceramics. Due to the use of insulating ceramics with small elastic deformation as the material of the spacer 23, when the feeder 10, the insulating plate 22 and the spacer 23 are integrated and the nut 27 is fastened, the fastening strength is increased. It is possible to reduce the positional error of the feeder 10 .

Moreover, the spacer 23 may be a structure having a core material and an insulating hard film formed on the surface of the core material, similarly to the insulating plate 22 . A material having high hardness such as cemented carbide or stainless steel is used for the core material. A material capable of forming a high-resistance hard film, such as DLC, is used as the insulating material. In this case, the spacer 23 is formed by coating the core material with an insulating material. Also in this case, the spacer 23 can reduce the position error of the feeder 10 caused by the tightening strength when the nut 27 is tightened.

Insulating ceramics such as silicon nitride is used as the material of the support rods 21 . The support rod 21 can be a structure made of insulating ceramics. The support rod 21 may be a structure having a core material and an insulating hard film formed on the surface of the core material. A material having high hardness such as cemented carbide or stainless steel is used for the core material. A material capable of forming a high-resistance hard film, such as DLC, is used as the insulating material. In this case, the support rod 21 is formed by coating the core with an insulating material. The support rod 21 may be formed by coating a core material made of a metal material such as aluminum with hard alumite. Alternatively, the support rod 21 may be a structure in which a core made of stainless steel or the like is inserted into a hollow tube made of an insulating material such as insulating ceramics.

In the second embodiment, it is not necessary to provide the feeder unit 20 with a feeder conductor, which is one of the structures elastically deformed when the feeder unit 20 is fastened. Since the feeder unit 20 does not require a feeder conductor and is provided with an insulating plate 22 with small elastic deformation, the gap error of the feeder 10 can be reduced. In the feeder unit 20, when the fastening of the nut 27 is loosened and the spacing between the feeders 10 is changed and then the nut 27 is fastened again, the spacing between the feeders 10 is linearly adjusted regardless of the fastening strength. It is possible to accurately match the interval between the portions 2a. Therefore, the feeder unit 20 eliminates the need to adjust the interval between the feeders 10 by using a measuring instrument during maintenance.

Here, a plane of the base 24 that contacts the spacer 23 is defined as a reference plane 25 for positioning each feeder 10 in the feeder unit 20 . Since the feeder unit 20 is provided with the spacer 23 with small elastic deformation, the positional error of each feeder 10 from the reference surface 25 can be reduced. In the feeder unit 20, when the fastening of the nut 27 is loosened and the interval between the feeders 10 is changed and then the nut 27 is fastened again, the position of each feeder 10 is adjusted to each wire regardless of the fastening strength. The position of the portion 2a can be matched accurately. Therefore, the feeder unit 20 does not need to adjust the position of each feeder 10 during maintenance. As described above, the wire electric discharge machine 100 enables easy maintenance of the power supply unit 20 .

The insulating plate 22 provided in the feeder unit 20 is arranged so that when the interval between the wire portions 2a is adjusted in accordance with the thickness of the plate-like body cut out from the workpiece 7, the insulating plate 22 is provided at the interval between the wire portions 2a. 22 can be exchanged to match the thickness. Thereby, the wire electric discharge machine 100 can match the interval between the filament portions 2 a and the interval between the feeders 10 . In addition, since the spacer 23 provided in the feeder unit 20 can also be replaced, the wire electric discharge machining apparatus 100 can change the position of each feeder 10 from the reference plane 25 .

The feeder unit 20 may be provided with the feeder 10 coated with an insulating material instead of the feeder 10 and the insulating plate 22, which are separate components. An insulator formed by such a coating process functions similarly to the insulating plate 22 . A material capable of forming a high-resistance hard film, such as DCL, is used as the insulating material. Also in this case, the feeder unit 20 can accurately match the spacing between the feeders 10 to the spacing between the linear portions 2a.

Embodiment 3.
Embodiment 3 describes a modification of the power supply unit. FIG. 6 is a diagram showing a power supply unit included in a wire electric discharge machine according to Embodiment 3 of the present invention. 7 is an exploded view of the feeder unit shown in FIG. 6. FIG. In the third embodiment, the same components as in the first and second embodiments are denoted by the same reference numerals, and the configuration different from the first and second embodiments will be mainly described.

The feeder unit 60 shown in FIG. 6 has three feeder groups 61 . The feeder group 61 has three feeders 10 and an insulating plate 22 provided between the feeders 10 . Further, the feeder unit 60 has three mutually connectable support bolts 62 instead of the support rods 21 of the second embodiment. Each of the three support bolts 62 is a base on which the feeder 10 is arranged. The three support bolts 62 constitute an integrated support component by being connected to each other. The supporting part consisting of the three supporting bolts 62 connected to each other may be a structure made of insulating ceramics, a structure having a core material and an insulating hard film formed on the surface of the core material, or a structure made of an insulating material. It is a structure in which a core material is inserted into a hollow tube.

Each support bolt 62 has a cylindrical shape. One of the three support bolts 62 is provided with a base portion 63 similar to the base portion 24 of the second embodiment. The other two of the three support bolts 62 are provided with circular flanges 65 . The circular diameter of the flange portion 65 is smaller than the diameter of the feeder 10 at the bottom of the V-groove. Both ends of each support bolt 62 are threaded so that they can be connected by fastening. The three support bolts 62 can be connected to each other by fastening the support bolts 62 together. Also, the degree of tightening between the support bolts 62 is adjustable.

A nut 73 is fastened to the end of the structure composed of the three support bolts 62 connected to each other, which is opposite to the base 63 . A reinforcing rod 69 is inserted inside the structure composed of the three support bolts 62 connected to each other. The structure consisting of three support bolts 62 is reinforced by inserting reinforcing rods 69 .

A spacer 67 and a coil spring 68 are provided between the base portion 63 and the flange portion 65 for positioning the feeder group 61 between the base portion 63 and the flange portion 65 . A spacer 67 and a coil spring 68 for positioning the feeder group 61 between the two flanges 65 are provided between the two flanges 65 . Between the collar portion 65 and the nut 73 are a spacer 67 and a coil spring 68 for positioning the feeder group 61 between the collar portion 65 and the nut 73, and two washers 72 sandwiching the coil spring 68. is provided.

A plane of the base portion 63 that contacts the spacer 67 is used as a reference surface 64 for positioning each feeder 10 on the support bolt 62 having the base portion 63 . The reference plane 64 is also a reference plane for positioning each feeder group 61 in the entire feeder unit 60 . A plane of the flange portion 65 that contacts the spacer 67 is used as a reference surface 66 for positioning each feeder 10 on the support bolt 62 having the flange portion 65 .

At the support bolt 62 with the base 63 , each feeder 10 is positioned with respect to the reference plane 64 . Each feeder 10 is positioned on a support bolt 62 having a flange portion 65 with reference to a reference plane 66 . Furthermore, each feed group 61 is positioned with reference to a reference plane 64 . By adjusting the position of each feeder 10 for each support bolt 62 and further adjusting the position of each feeder group 61, the feeder unit 60 can be operated by accumulating positional errors in each feeder group 61. A positional error of each feeder 10 can be suppressed. Accordingly, the feeder unit 60 can accurately match the position of each feeder 10 with the position of the linear portion 2a.

The feeder unit 60 can finely adjust the spacing between the feeder groups 61 and the position of each feeder group 61 by adjusting the amount of tightening between the support bolts 62 . Also, since the coil springs 68 are provided, the feeders 10, the insulating plates 22, and the spacers 67 are always pressed against the reference surface 64 side. As a result, the feeder unit 60 can eliminate the gap due to the fine adjustment described above. A plate spring may be provided in the feeder unit 60 instead of the coil spring 68 .

The number of support bolts 62 provided in the feeder unit 60 is not limited to three. The number of support bolts 62 can be arbitrarily changed according to the number of feeder groups 61 in the feeder unit 60 . The number of feeders 10 provided in the feeder group 61 can be arbitrarily changed according to the number of wire portions 2a to be subjected to electrical discharge machining.

Embodiment 4.
In Embodiment 4, a modification of the conductor provided on the holder 30 will be described. FIG. 8 is a diagram showing a holding mechanism, which is a conductor, included in a wire electric discharge machine according to a fourth embodiment of the present invention. In the fourth embodiment, the same reference numerals are assigned to the same components as in the first to third embodiments, and the configuration different from the first to third embodiments will be mainly described.

FIG. 8 shows a side view of the four feeder units 20 and the feeder 10 held by the holding mechanism 41 among the feeder units 20 . The holding mechanism 41 is provided on the bottom surface portion 40 of the holder 30 . FIG. 8 shows four feeder units 20 arranged such that the feeders 10 are staggered.

9 is a view showing the configuration shown in FIG. 8 viewed from a direction different from that of FIG. 8. FIG. 10 is a perspective view of the holding mechanism shown in FIG. 8. FIG. FIG. 11 is a view showing the configuration shown in FIG. 8 viewed from a direction different from that of FIGS. 8 and 9. FIG. 12 is a diagram showing a configuration of the feeder unit shown in FIG. 11 excluding the feeder. FIG. 11 shows the feeders 10 arranged alternately in the four feeder units 20 and the holding mechanisms 41 arranged alternately. FIG. 12 shows the insulating plates 22 arranged alternately in the four feeder units 20 .

The holding mechanism 41 is a structure having two leaf spring-like portions facing each other. The feeder 10 is inserted into the gap 42 between the two leaf spring-like parts. The holding mechanism 41 holds the feeder 10 by inserting the feeder 10 into the gap 42 . In a state where the feeder unit 20 is held by the holder 30 , each of the plurality of feeders 10 is held by each of the plurality of holding mechanisms 41 . A metal material that is conductive and elastically deformable is used as the material of the holding mechanism 41 . Note that FIG. 10 shows the holding mechanism 41 that is in contact with each power feeder 10 for one of the four power feeder units 20 surrounded by a dashed line in FIG. 9 .

An end of the feeder line 11 is connected to each of the plurality of holding mechanisms 41 . The holding mechanism 41 and the power supply line 11 are electrically connected by soldering the end of the power supply line 11 to the holding mechanism 41 . Further, the holding mechanism 41 electrically connects the feeder 10 to the feeder line 11 by bringing the feeder 10 into contact with the holding mechanism 41 . The end of the power supply line 11 opposite to the end connected to the holding mechanism 41 is connected to the machining power supply unit 12 .

The holding mechanism 41 is deformed by inserting the feeder 10 into the holding mechanism 41 . The deformation of the holding mechanism 41 ensures contact of the feeder 10 with the holding mechanism 41 . By inserting the feeder 10 into the gap 42 between the two leaf spring-like portions, it is possible to ensure contact between the feeder 10 and the holding mechanism 41 on both sides of the feeder 10 . The contact between the feeder 10 and the holding mechanism 41 enables current to be supplied from the holding mechanism 41 to the feeder 10 .

Positioning the feeder unit 20 on the holder 30 allows each of the plurality of feeders 10 to simultaneously contact each of the plurality of holding mechanisms 41 . Thereby, the wire electric discharge machine 100 can electrically connect each of the plurality of power feeders 10 to each of the plurality of power feeders 11 in a state where the power feeder unit 20 is held by the holder 30 . Note that the holding mechanism 41 may be provided in an element other than the holder 30 in the wire electric discharge machine 100 . The position of the holding mechanism 41 may be any position that allows the feeder 10 to be inserted into the holding mechanism 41 .

Each of the plurality of holding mechanisms 41 is slidable in a direction parallel to the axial direction of the feeder unit 20 . That is, the position of each holding mechanism 41 is adjustable in the direction parallel to the axial direction. When the position of each feeder 10 in the axial direction is adjusted in accordance with the adjustment of the spacing between the linear portions 2a, the position of each holding mechanism 41 is adjusted in accordance with the position of each feeder 10. . In the wire electric discharge machining apparatus 100, when the position of the feeder 10 is adjusted as the position of the wire portion 2a is changed, the leaf spring 32 is positioned in accordance with the feeder 10, whereby the holding mechanism 41 and the feeder are held together. Contact with the electron 10 can be maintained.

According to Embodiment 4, the wire electric discharge machine 100 is provided with a plurality of holding mechanisms 41 that electrically connect the feeder 10 to the feeder 11 . Further, when the feeder unit 20 is held by the holder 30 , each of the plurality of feeders 10 contacts each of the plurality of holding mechanisms 41 . As a result, the wire electric discharge machining apparatus 100 has the effect of enabling easy maintenance of the feeder unit 20 having the plurality of feeders 10 .

Embodiment 5.
Embodiment 5 describes a modification of the holder and the conductor. FIG. 13 is a diagram showing a holder and a power supply wire as a conductor included in a wire electric discharge machine according to a fifth embodiment of the present invention. In Embodiment 5, the same components as those in Embodiments 1 to 4 are denoted by the same reference numerals, and configurations different from those in Embodiments 1 to 4 will be mainly described.

A holder 50 shown in FIG. 13 is provided with a concave portion 53 . The power supply wire 51 is stretched over the recess 53 . The power supply wire 51 is a wire that can be bent by pressing the power supply terminal 10 . One end of the power supply wire 51 is fixed to the holder 50 with a fixing screw 54 . The other end of the power supply wire 51 is fixed to an insulating material 52 arranged on the holder 50 . By connecting the end of the power supply wire 11 to the other end of the power supply wire 51 , the power supply wire 51 and the power supply wire 11 are electrically connected. The holder 50 is provided with a plurality of power supply wires 51 arranged in the depth direction in FIG.

The feeder unit 20 is held by the holder 50 . FIG. 13 shows how the feeder unit 20 is attached to the holder 50 . 14 is a diagram showing the power supply unit and the power supply wire in a state where the power supply unit is attached to the holder shown in FIG. 13. FIG.

When the feeder unit 20 is attached to the holder 50 , the feeder 10 reaches the feeder wire 51 in the process of moving the feeder unit 20 downward from above the recess 53 . The feeder unit 20 is positioned in the holder 50 by further moving the feeder unit 20 downward after the feeder 10 reaches the feeder wire 51 . When the feeder unit 20 is positioned on the holder 50 , the feeder wire 51 is pressed by the feeder 10 and bends downward. The feeder wire 51 enters a groove provided on the outer surface of the feeder 10 .

The feeder wire 51 is inserted into the groove of the feeder 10 and the feeder 10 is pressed against the feeder wire 51 , thereby ensuring the contact of the feeder 10 with the feeder wire 51 . The contact between the feeder 10 and the feeder wire 51 enables power supply from the feeder wire 51 to the feeder 10 .

Positioning the feeder unit 20 on the holder 50 allows each of the plurality of feeders 10 to simultaneously contact each of the plurality of feeder wires 51 . Thereby, the wire electric discharge machine 100 can electrically connect each of the plurality of power feeders 10 to each of the plurality of power feeders 11 in a state where the power feeder unit 20 is held by the holder 50 .

15A and 15B are diagrams showing another example in which a power supply wire is attached to the holder in Embodiment 5. FIG. Each feed wire 51 is stretched over the recess 53 by passing through a groove 55 formed in the holder 50 . By passing the power supply wire 51 through the groove 55 , the holder 50 can suppress positional deviation of the power supply wire 51 in the holder 50 when the power supply wire 51 is pressed against the power supply wire 51 .

It should be noted that the power supply wire 51 may be provided on an element other than the holder 30 in the wire electric discharge machine 100 . The power supply wire 51 may be provided at a position where it can come into contact with the power supply terminal 10 .

Each of the plurality of power supply wires 51 is slidable in a direction parallel to the axial direction of the power supply unit 20 . That is, the position of each power supply wire 51 is adjustable in the direction parallel to the axial direction. When the position of each feeder 10 in the axial direction is adjusted in accordance with the adjustment of the spacing between the linear portions 2a, the position of each feeder wire 51 is adjusted in accordance with the position of each feeder 10. be. In the wire electric discharge machining apparatus 100, when the position of the feeder 10 is adjusted as the position of the wire portion 2a is changed, the feeder wire 51 is positioned in accordance with the feeder 10, whereby the feeder wire 51 is positioned. can be maintained in contact with the feeder 10 .

According to Embodiment 5, the wire electric discharge machine 100 is provided with a plurality of power supply wires 51 that electrically connect the power supply terminals 10 to the power supply lines 11 . Further, in a state where the feeder unit 20 is held by the holder 30 , each of the plurality of feeders 10 contacts each of the plurality of feeder wires 51 . As a result, the wire electric discharge machining apparatus 100 has the effect of enabling easy maintenance of the feeder unit 20 having the plurality of feeders 10 .

The configuration shown in the above embodiment shows an example of the content of the present invention, and it is possible to combine it with another known technology, and one configuration can be used without departing from the scope of the present invention. It is also possible to omit or change the part.

1A first bobbin, 1B second bobbin, 2 wire electrode, 2a wire portion, 3a, 3b, 3c, 3d guide roller, 4A, 4B damping guide roller, 5 guide groove, 6A, 6B nozzle, 7 cover Workpiece 8 Machining groove 10, 10A, 10B Feeder 11 Feeder 12 Machining power supply unit 13 Stage 14 Machining power supply 15 Pulse oscillator 16 Machining control device 17A, 17B Rotation drive unit 18A, 18B traverse drive unit 19 stage drive unit 20,60 feeder unit 21 support rod 22 insulating plate 23,67 spacer 24,63 base 25,64,66 reference surface 26,32 leaf spring 27, 73 Nut, 30, 50 Holder, 31 Pressing Part, 33 Positioning Pin, 34 Hole, 35, 36, 53 Recess, 40 Bottom Part, 41 Holding Mechanism, 42 Gap, 51 Feeding Wire, 52 Insulating Material, 54 Fixing Screw, 55 groove, 61 feeder group, 62 support bolt, 65 flange, 68 coil spring, 69 reinforcing rod, 72 washer, 100 wire electric discharge machine.

Claims (12)

a first guide roller and a second guide roller around which the wire electrode is wound a plurality of times to guide the traveling of the wire electrode;
Individually contacting a plurality of filamentary portions that are portions parallel to each other between the first guide roller and the second guide roller of the wire electrode, and making contact with the filamentary portions and the workpiece. a feeder for applying a voltage between objects;
a holder holding a feeder unit having a plurality of the feeders integrated with each other;
a pressing portion combined with the holder;
a conductor connected to an end of a feeder line through which a machining current supplied by a machining power supply flows, and electrically connecting the feeder to the feeder by contact with the feeder;
with
A wire electric discharge machining apparatus, wherein each of the plurality of power feeders is pressed against the conductor by positioning and holding the power feeder unit by the holder and the pressing portion . 2. The wire electric discharge machine according to claim 1, wherein the plurality of conductors are provided on the holder. 3. The wire electric discharge machine according to claim 1, wherein said conductor is a leaf spring deformable by pressing said feeder. Each of the plurality of feeder terminals of the feeder unit is adapted to contact each of the plurality of leaf springs in a state in which the leaf springs are deformed by being pressed against the leaf springs. The wire electric discharge machine according to claim 3. 3. The wire discharge according to claim 1, wherein the conductor is a holding mechanism that holds the feeder by inserting the feeder into a gap between two leaf spring-shaped portions facing each other. processing equipment. 3. The wire electric discharge machine according to claim 1, wherein the conductor is a wire that can be bent by pressing the feeder. The power supply unit is
an insulating plate that maintains an interval between the feeders adjacent to each other and insulates the feeders from each other;
a support member that supports the plurality of power supply terminals and the plurality of insulating plates by penetrating each of the plurality of power supply terminals and each of the plurality of insulating plates;
a fastening part that fixes the plurality of feeders and the plurality of insulating plates to the supporting part by fastening to the supporting part;
has
7. The apparatus according to any one of claims 1 to 6, wherein the plurality of feeders and the plurality of insulating plates are integrated with each other while being arranged in a row in the axial direction of the support component. A wire electrical discharge machine as described. The plurality of feeders and the plurality of insulating plates are fastened to a base provided at one end of the support component in the axial direction and to the other end of the support component in the axial direction. fixed between said fastening parts,
8. The wire electric discharge machine according to claim 7, wherein the feeder unit has spacers for positioning the plurality of feeders between the base and the fastening part. 8. The insulating plate and the spacer are a structure made of insulating ceramics, or a structure having a core material and an insulating hard film formed on the surface of the core material. The wire electric discharge machine according to . The support component may be a structure made of insulating ceramics, a structure having a core material and an insulating hard film formed on the surface of the core material, or a hollow tube made of an insulating material with the core material inserted therein. 9. The wire electric discharge machine according to claim 8, wherein the wire electric discharge machine is a structured body. The support component has a plurality of base materials that can be connected to each other,
11. The wire electric discharge machine according to any one of claims 7 to 10, wherein the feeder is arranged on each of the plurality of substrates. The plurality of base materials can be connected to each other by fastening the base materials together,
12. The wire electric discharge machine according to claim 11, wherein the degree of tightening between the base materials is adjustable.

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