JP7162400B2 - 研磨物品及びその形成方法 - Google Patents
研磨物品及びその形成方法 Download PDFInfo
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- JP7162400B2 JP7162400B2 JP2020573303A JP2020573303A JP7162400B2 JP 7162400 B2 JP7162400 B2 JP 7162400B2 JP 2020573303 A JP2020573303 A JP 2020573303A JP 2020573303 A JP2020573303 A JP 2020573303A JP 7162400 B2 JP7162400 B2 JP 7162400B2
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- 238000000034 method Methods 0.000 title description 69
- 239000000203 mixture Substances 0.000 claims description 126
- 239000000463 material Substances 0.000 claims description 90
- 239000002245 particle Substances 0.000 claims description 84
- 125000002091 cationic group Chemical group 0.000 claims description 30
- 239000003795 chemical substances by application Substances 0.000 claims description 30
- 239000002243 precursor Substances 0.000 claims description 29
- 239000003349 gelling agent Substances 0.000 claims description 28
- 239000011148 porous material Substances 0.000 claims description 15
- 229910010272 inorganic material Inorganic materials 0.000 claims description 13
- 239000011147 inorganic material Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000000919 ceramic Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims description 5
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 claims description 2
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 claims description 2
- 150000004677 hydrates Chemical class 0.000 claims description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims 1
- 229910002651 NO3 Inorganic materials 0.000 claims 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims 1
- QAOWNCQODCNURD-UHFFFAOYSA-L sulfate group Chemical group S(=O)(=O)([O-])[O-] QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims 1
- 239000000499 gel Substances 0.000 description 43
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- 239000004615 ingredient Substances 0.000 description 8
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- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- -1 but not limited to Substances 0.000 description 6
- 238000005266 casting Methods 0.000 description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 239000011734 sodium Substances 0.000 description 6
- 229910052708 sodium Inorganic materials 0.000 description 6
- 238000002604 ultrasonography Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- VBICKXHEKHSIBG-UHFFFAOYSA-N 1-monostearoylglycerol Chemical compound CCCCCCCCCCCCCCCCCC(=O)OCC(O)CO VBICKXHEKHSIBG-UHFFFAOYSA-N 0.000 description 4
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 4
- 239000001768 carboxy methyl cellulose Substances 0.000 description 4
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 150000001247 metal acetylides Chemical class 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 229920000058 polyacrylate Polymers 0.000 description 4
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical group [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 3
- 229920001353 Dextrin Polymers 0.000 description 3
- 239000004375 Dextrin Substances 0.000 description 3
- 229920002148 Gellan gum Polymers 0.000 description 3
- 239000003082 abrasive agent Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000001110 calcium chloride Substances 0.000 description 3
- 229910001628 calcium chloride Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 235000019425 dextrin Nutrition 0.000 description 3
- 235000010492 gellan gum Nutrition 0.000 description 3
- 239000000216 gellan gum Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000001814 pectin Substances 0.000 description 3
- 235000010987 pectin Nutrition 0.000 description 3
- 229920001277 pectin Polymers 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- RYYKJJJTJZKILX-UHFFFAOYSA-M sodium octadecanoate Chemical class [Na+].CCCCCCCCCCCCCCCCCC([O-])=O RYYKJJJTJZKILX-UHFFFAOYSA-M 0.000 description 3
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 2
- 229920001817 Agar Polymers 0.000 description 2
- 229920000936 Agarose Polymers 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229920002907 Guar gum Polymers 0.000 description 2
- 244000147568 Laurus nobilis Species 0.000 description 2
- 235000017858 Laurus nobilis Nutrition 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 229920000161 Locust bean gum Polymers 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 2
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 2
- 229920002125 Sokalan® Polymers 0.000 description 2
- 235000005212 Terminalia tomentosa Nutrition 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000008272 agar Substances 0.000 description 2
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 2
- 150000003863 ammonium salts Chemical class 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
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- 239000008112 carboxymethyl-cellulose Substances 0.000 description 2
- 235000010418 carrageenan Nutrition 0.000 description 2
- 239000000679 carrageenan Substances 0.000 description 2
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- 229940113118 carrageenan Drugs 0.000 description 2
- 239000012876 carrier material Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 description 2
- 239000008344 egg yolk phospholipid Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- YQEMORVAKMFKLG-UHFFFAOYSA-N glycerine monostearate Natural products CCCCCCCCCCCCCCCCCC(=O)OC(CO)CO YQEMORVAKMFKLG-UHFFFAOYSA-N 0.000 description 2
- SVUQHVRAGMNPLW-UHFFFAOYSA-N glycerol monostearate Natural products CCCCCCCCCCCCCCCCC(=O)OCC(O)CO SVUQHVRAGMNPLW-UHFFFAOYSA-N 0.000 description 2
- 235000010417 guar gum Nutrition 0.000 description 2
- 239000000665 guar gum Substances 0.000 description 2
- 229960002154 guar gum Drugs 0.000 description 2
- 230000000887 hydrating effect Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 235000010420 locust bean gum Nutrition 0.000 description 2
- 239000000711 locust bean gum Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 229920001495 poly(sodium acrylate) polymer Polymers 0.000 description 2
- 239000004584 polyacrylic acid Substances 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920000193 polymethacrylate Polymers 0.000 description 2
- 229920000136 polysorbate Polymers 0.000 description 2
- 229950008882 polysorbate Drugs 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 108700004121 sarkosyl Proteins 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 2
- 229940082004 sodium laurate Drugs 0.000 description 2
- KSAVQLQVUXSOCR-UHFFFAOYSA-M sodium lauroyl sarcosinate Chemical group [Na+].CCCCCCCCCCCC(=O)N(C)CC([O-])=O KSAVQLQVUXSOCR-UHFFFAOYSA-M 0.000 description 2
- 229940045885 sodium lauroyl sarcosinate Drugs 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 2
- 235000010491 tara gum Nutrition 0.000 description 2
- 239000000213 tara gum Substances 0.000 description 2
- 229910000314 transition metal oxide Inorganic materials 0.000 description 2
- 229920001285 xanthan gum Polymers 0.000 description 2
- 235000010493 xanthan gum Nutrition 0.000 description 2
- 239000000230 xanthan gum Substances 0.000 description 2
- 229940082509 xanthan gum Drugs 0.000 description 2
- UHVMMEOXYDMDKI-JKYCWFKZSA-L zinc;1-(5-cyanopyridin-2-yl)-3-[(1s,2s)-2-(6-fluoro-2-hydroxy-3-propanoylphenyl)cyclopropyl]urea;diacetate Chemical compound [Zn+2].CC([O-])=O.CC([O-])=O.CCC(=O)C1=CC=C(F)C([C@H]2[C@H](C2)NC(=O)NC=2N=CC(=CC=2)C#N)=C1O UHVMMEOXYDMDKI-JKYCWFKZSA-L 0.000 description 2
- HDZNCKLMVPZWDN-UHFFFAOYSA-N 1-benzyl-n-[(2-fluorophenyl)methyl]-3,5-dimethylpyrazole-4-carboxamide Chemical compound CC1=C(C(=O)NCC=2C(=CC=CC=2)F)C(C)=NN1CC1=CC=CC=C1 HDZNCKLMVPZWDN-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910000323 aluminium silicate Inorganic materials 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical class CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 150000008040 ionic compounds Chemical class 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000787 lecithin Substances 0.000 description 1
- 235000010445 lecithin Nutrition 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- NNMHYFLPFNGQFZ-UHFFFAOYSA-M sodium polyacrylate Chemical compound [Na+].[O-]C(=O)C=C NNMHYFLPFNGQFZ-UHFFFAOYSA-M 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0072—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using adhesives for bonding abrasive particles or grinding elements to a support, e.g. by gluing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
- B24D3/18—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings for porous or cellular structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1436—Composite particles, e.g. coated particles
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Description
実施形態1.研磨物品であって、
少なくとも260mmの直径及び少なくとも20立方センチメートルの体積を含む本体を有する結合研磨剤を含み、本体が、
無機材料を含む結合材料、
本体内に含まれる、少なくとも40ミクロンの平均粒径(D50)を有する研磨粒子、及び
85以下の均一性係数
をさらに含む、
研磨物品。
研磨粒子、結合前駆体材料及びゲル化剤を含む混合物を形成すること、
混合物から結合研磨体を形成し、結合研磨体が、無機材料を含む結合材料を含み、85以下の均一性係数をさらに含むこと
を含む、方法。
研磨粒子、結合前駆体材料及びゲル化剤を含む混合物を形成すること、
カチオン剤を混合物に添加して、ゲルを形成すること、
ゲルからグリーン体を形成すること、及び
グリーン体から結合研磨体を形成すること
を含む、方法。
a)ゲルと水とを含む混合物を形成すること、
b)ステップa)の後に、結合前駆体材料、研磨粒子、又は添加剤のうちの1つを混合物に添加すること、及び
c)ステップb)の後に混合物にカチオン剤を添加すること
を含む、実施形態42及び43のいずれか1つに記載の方法。
混合物からゲルを形成すること、及び
ゲルからグリーン体を形成すること
をさらに含む、実施形態42に記載の方法。
代表的なサンプル(サンプルS1)は、以下のプロセスに従って作成する。脱イオン水の担体を入手し、約3000kgの水を測定する。約220ミクロンの平均粒径(D50)を有し、Saint-Gobain Corporation社から白色溶融アランダムとして市販されている約10,000kgの研磨粒子を準備する。Saint-Gobain Corporation社からVitriumとして市販されている約2200kgの結合前駆体材料も準備する。Schill&Seilacher GmbH社からPerlastan L30として市販されている約20gの界面活性剤も準備する。CP Kelco Corporation社からKelcogelとして市販されている約120gのゲル化剤を準備する。Vanderbilt Minerals社からDarvan 821Aとして市販されている約60gの分散剤も準備する。Fisher Scientific社から塩化カルシウムとして市販されている約20gのカチオン剤を準備する。
従来のサンプル(サンプルC1)は、以下のプロセスに従って形成する。研磨剤を計量し、結合剤としてデキストリンを用いて大型ミキサーで混合する。内容物を5分間混合する。次に、動物膠を混合物に添加し、3分間混合する。動物膠が砥粒の表面を濡らしてデキストリンが表面に均一にコーティングされたら、混合を停止する。次に、接着剤を混合物に加え、接着剤が砥粒を均一にコーティングするまで内容物を5分間混合する。圧縮ステップに耐えるために必要なグリーン強度を付与するために、別のラウンドでデキストリンを混合物に添加する。次に、混合物をふるいにかけて大きな塊を除去し、次に型に均一に分配する。次に、型を傾斜させて空気を除去し、混合物を圧縮/プレスして(80トンの力を加えて)目的の体積にする。次に、ホイールを80℃で12時間乾燥させ、915℃で100℃/hrの上昇速度で焼成し、8時間浸漬する。次に、ホイールを許容寸法に仕上げ、超音波技術を使用して分析する。
サンプルS2及びC2は、サンプルS1の成分と同じ成分を含めて形成した。すべての成分は、例1に記載されたのと同じ様式で混合した。サンプルS2及びC2のゲルを型に注入した。サンプルS2のゲルのみを脱気して、成形中に気泡を除去した。グリーン体は、例1に記載されたのと同じ条件で焼成した。
サンプルS3は、例1に記載されたのと同じ様式で、少なくとも260mmの直径、少なくとも2mmの厚さ、及び85以下の均一性係数を有するように形成する。サンプルS3は、同じ条件下で試験した従来通りに成形された研磨物品と比較して、研削工具の同じカートリッジを使用して少なくとも5~10個のワークピースを研削して試験した場合、一貫性が向上し、ワークピースごとに新しいカートリッジを使用したワークピースの表面仕上げが向上することが期待される。
Claims (15)
- 結合研磨体を含む研磨物品であって、
前記結合研磨体が、
前記結合研磨体の全体積に対して少なくとも1体積%で35体積%以下の含有量で無機材料を含む結合材料、
前記結合研磨体の全体積に対して少なくとも25体積%で65体積%以下の含有量で前記結合研磨体内に含まれる、少なくとも130ミクロンの平均粒径(D50)を有する研磨粒子、
前記結合研磨体の全体積に対して少なくとも20体積%で最大で65体積%の孔、及び
85以下の均一性係数
を含み、
前記結合研磨体が少なくとも2mmの厚さを含む、
研磨物品。 - 前記結合研磨体が、少なくとも260mmの直径及び少なくとも20cm3の体積を含む、請求項1に記載の研磨物品。
- 前記結合研磨体が、少なくとも4mmで500mm以下の範囲内の厚さを含む、請求項1又は2に記載の研磨物品。
- 前記結合研磨体が、少なくとも0.5で10以下の範囲内のABR係数(Cb/Cap)を含み、Cbが、前記結合研磨体の全体積に対する前記結合材料の体積%を表し、Capが、前記結合研磨体の全体積に対する前記研磨粒子の体積%を表す、請求項1又は2に記載の研磨物品。
- 前記結合研磨体が、少なくとも10ミクロンで1000ミクロン以下の範囲内の平均孔径(D50)を含む、請求項1又は2に記載の研磨物品。
- 前記結合研磨体が、少なくとも60ミクロンで700ミクロン以下の範囲内の平均孔径(D50)を含む、請求項1又は2に記載の研磨物品。
- 前記孔の少なくとも一部が開放孔であり、前記開放孔が前記結合研磨体を通って延びる相互接続されたチャネルを定義し、前記孔の少なくとも一部が閉鎖孔であり、前記閉鎖孔が前記結合材料に含まれる離散的で孤立したボイドを定義する、請求項1又は2に記載の研磨物品。
- 孔の過半数が、閉鎖孔である、請求項1又は2に記載の研磨物品。
- 前記研磨粒子が少なくとも200ミクロンの平均粒径(D50)を有する、請求項1又は2に記載の研磨物品。
- 前記研磨粒子が少なくとも220ミクロンの平均粒径(D50)を有する、請求項1又は2に記載の研磨物品。
- 前記結合研磨体が、前記結合研磨体の全体積に対して少なくとも1体積%で15体積%以下の範囲内の含有量の前記結合材料を含む、請求項1又は2に記載の研磨物品。
- 前記結合材料が、金属、金属合金、セラミック、ガラス質、又はそれらの任意の組み合わせからなる群から選択される無機材料を含む、請求項1又は2に記載の研磨物品。
- 前記結合材料が、多結晶相、アモルファス相、単結晶相、又はそれらの任意の組み合わせを含む、請求項1又は2に記載の研磨物品。
- 研磨物品を製造する方法であって、
研磨粒子、結合前駆体材料及びゲル化剤を含む混合物を形成することであって、前記研磨粒子が少なくとも130ミクロンの平均粒径(D50)を有する、混合物を形成すること、
前記混合物から結合研磨体を形成し、前記結合研磨体が、少なくとも2mmの厚さ、及び無機材料を含む結合材料を含み、85以下の均一性係数を含むこと
を含む、方法。 - 混合物を形成することが、カチオン剤を前記混合物に添加してゲルを形成することをさらに含み、前記カチオン剤が、硫酸塩、塩化物、クロム酸塩、硝酸塩、炭酸塩(例えば、重炭酸塩)、水和物又はそれらの任意の組み合わせを含む化合物を含む、請求項14に記載の方法。
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