JP7153902B2 - Fluid heating device - Google Patents

Description

TECHNICAL FIELD The present invention relates to the technology of a fluid heating device, and more particularly, a flow path unit in which a flow path for a fluid to be heated is formed from a fluid inlet to a fluid outlet, and a resistance heating element accommodated in the flow path. A fluid heating device comprising:

2. Description of the Related Art Conventionally, as a fluid heating device for heating a fluid, there is known a fluid heating device that exchanges heat from a low-temperature fluid, which is a fluid to be heated, with a high-temperature fluid such as steam or a heat medium. However, for example, in a fluid heating apparatus such as a boiler that utilizes the combustion energy of combustion gas, auxiliary equipment such as a fuel supply system and proper exhaust gas treatment equipment are required, resulting in the problem of increasing the size of the equipment. there were. On the other hand, as an economical system suitable for miniaturization of the apparatus, a heating system using a resistance heating element capable of relatively quickly heating the fluid to be heated to a desired temperature is adopted.

As a conventional heating-type fluid heating device described above, for example, as disclosed in Patent Document 1, an electric heater such as a sheathed heater as a resistance heating element is arranged in a flow path, and a resistance heating element A configuration has been proposed in which heat is directly supplied to the fluid to be heated, and the temperature of the fluid to be heated is gradually raised to a target temperature from the fluid inlet to the fluid outlet. Generally, this type of fluid heating device is used for the purpose of heating water to generate hot water, and for the purpose of reheating saturated steam generated by a separate steam generator to generate superheated steam.

However, in the configuration in which heating is performed by a single resistance heating element as in the conventional fluid heating device described above, for example, when generating high-temperature superheated steam from water as the fluid to be heated, liquid heating and latent heat of vaporization , and the energy required for gas heating are different, there is a problem that it is difficult to control the target temperature of the superheated steam (outlet temperature of the fluid) when configured as an electric boiler. In addition, in the conventional fluid heating device described above, a coil-shaped resistance heating element was used to increase the contact surface area with the fluid to be heated. In order to raise the temperature to a relatively high temperature (90°C or higher) in a short time and generate high-temperature water, increase the diameter of the resistance heating element or form a complicated flow path in the flow path unit (pipe). There is a problem that it is difficult to reduce the size of the device.

JP-A-2004-69256

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a fluid heating apparatus capable of efficiently generating fluid at a target temperature while reducing the size of the apparatus.

The problems to be solved by the present invention are as described above, and the means for solving the problems will now be described.

That is, in claim 1, a fluid heating apparatus comprising a flow path unit in which a fluid flow path is formed from a fluid inlet to a fluid outlet, and a resistance heating element disposed in the flow path. , the flow path unit contains water as a fluid to be heated that has flowed into the flow path from a fluid inlet and is heated to a set temperature by a columnar ceramic heater as a resistance heating element to generate saturated steam. and a columnar ceramic heater which is connected to a position above the first heating unit and which uses the saturated steam generated in the first heating unit as a resistance heating element and is separate from the first heating unit. a second heating unit that heats to a temperature higher than the set temperature of the first heating unit to generate superheated steam and discharges it out of the flow path from a fluid outlet, and the ceramic of the first heating unit A temperature sensor is embedded in the tip portion of the heater as a means for detecting the level of water contained in the flow path .

In claim 2, the flow path unit is disposed between the first heating section and the second heating section, and branches the fluid heated by the first heating section to the fluid outlet. It has a fluid extraction part for taking out.

In claim 3, the ceramic heater is a coated ceramic heater in which the surface of the ceramic heater main body is coated with a metal layer.

In claim 4, the ceramic heater protrudes from the inner wall and is exposed in the flow path.

As an effect of the present invention, it is possible to efficiently generate a fluid having a target temperature while downsizing the device.

1 is a front view showing the overall configuration of a fluid heating device according to one embodiment of the present invention; FIG. It is a partial cross-sectional view of the first heating unit. It is a partial cross-sectional view of a second heating unit. 3 is an enlarged cross-sectional view of a fixed portion of the ceramic heater of FIG. 2; FIG. 4 is an enlarged cross-sectional view of a fixed portion of the ceramic heater of FIG. 3; FIG. It is a front view of a ceramic heater. 1 is a longitudinal sectional view of a ceramic heater; FIG. It is a horizontal sectional view of a ceramic heater. It is a front view of the fluid heating apparatus of another Example. It is a horizontal sectional view of the 1st heating part of the fluid heating apparatus of another Example.

Next, a mode for carrying out the invention will be described. In the following examples, the up-down direction of the paper surface of FIG. 1 is the up-down direction of the fluid heating apparatus.

First, the overall configuration of the fluid heating device of this embodiment will be outlined below.
As shown in FIG. 1, the fluid heating device 1 of this embodiment includes a flow path unit 2 in which a fluid flow path is formed from a fluid inlet 10 to a fluid outlet 11, and a resistor disposed in the flow path. In this embodiment, the ceramic heaters 3 and 4 heat the water flowing in from the fluid inlet 10, and the fluid outlet 11 is heated. It is configured as an electric boiler that can be discharged as more superheated steam.

As shown in FIGS. 1 to 5, the channel unit 2 is composed of channel bodies 20 and 21, and a fluid inlet pipe 22, a fluid discharge pipe 23, a fluid take-out pipe 24, etc. connected to both ends thereof. In this embodiment, the first heating unit 2a heats the fluid to be heated to the set temperature by the ceramic heater 3 in a state in which the fluid to be heated that has flowed into the flow path body 20 from the fluid inlet 10 is accommodated, and the first heating unit 2a A second heating section 2b is provided which heats the fluid heated in the section 2a to a temperature higher than a predetermined temperature by the ceramic heater 4 and discharges it out of the flow path through the fluid outlet 11 .

The channel bodies 20 and 21 are configured as tubular bodies having a circular cross section and hollow inside, and a channel through which a fluid flows is formed in the internal space. The fluid inflow pipe 22 is connected to the side of the lower end of the flow channel body 20 in an internal communication manner, and the flow channel body 21 is connected to the upper end of the flow channel body 21 in an internal communication manner via the fluid take-out pipe 24 . , a fluid discharge pipe 23 is connected to the upper end laterally in an internal communication manner. In the fluid heating device 1 of this embodiment, the flow channel body 20 and the flow channel body 21 are arranged in series so as to be positioned on the same straight line along the vertical direction.

A fixing member 25 for attaching a ceramic heater is fitted to the lower end of the channel body 20 , and the ceramic heater 3 fixed to the fixing member 25 protrudes upward and is exposed in the channel body 20 . there is The fixing member 25 has a washer 25b and a packing 25c housed in a casing 25a so as to sandwich the flange portion 31a of the ceramic heater 3. By fitting the casing 25a to the end portion of the flow path body 20, the washer 25b is fixed. And the ceramic heater 3 is fixed to the end portion of the flow channel body 20 along the vertical direction via the packing 25c (see FIG. 4).

A fixing member 26 for attaching a ceramic heater is fitted to the upper end of the channel body 21 , and the ceramic heater 4 fixed to the fixing member 26 protrudes downward and is exposed in the channel body 21 . there is The fixed member 26 has a washer 26b and a packing 26c housed in a casing 26a so as to sandwich the flange portion 41a of the ceramic heater 4. By fitting the casing 26a to the end portion of the flow path body 21, the washer 26b is fixed. And the ceramic heater 4 is fixed to the end portion of the flow path body 21 along the vertical direction via the packing 26c (see FIG. 5).

The fluid inlet 10 is opened to the side of the fluid inflow pipe 22 , and the heated fluid supplied from a fluid supply device (not shown) while its flow rate is adjusted flows into the fluid inflow pipe 22 through the fluid inlet 10 . inflow. The fluid discharge pipe 23 has a fluid outlet 11 that opens sideways, and the fluid heated in the flow channel body 21 is discharged to a connecting pipe (not shown) through the fluid outlet 11. .

The fluid take-out pipe 24 has a fluid take-out port 12 opening sideways, and the fluid heated in the flow channel body 20 can be taken out to a connection pipe (not shown) through the fluid take-out port 12 . configured to allow Specifically, the fluid take-out pipe 24 is internally provided with a well-known channel switching valve (three-way valve) (not shown), which closes the fluid take-out port 12 so that the channel body 20 and the channel body 21 are separated. are communicated to allow the fluid heated in the flow path body 20 to be fed to the flow path body 21, and the fluid outlet 12 is opened by cutting the flow path body 20 and the flow path body 21. , and a state in which the fluid heated in the channel body 20 can be fed to the fluid outlet 12 .

The fluid inflow pipe 22, the fluid discharge pipe 23, and the fluid extraction pipe 24 are preferably provided with check valves, flow control valves, and the like.

As shown in FIGS. 6 to 8, the ceramic heater 3 is configured as a coated ceramic heater in which the surface of the ceramic heater main body 30 is covered with a metal layer 32. Specifically, the ceramic heater main body 30 is fitted and inserted. and a metal body layer 32 formed by sintering and/or melting metal powder between the ceramic heater main body 30 and the case member 31, The outer surface and the lower surface of the ceramic heater body 30 are covered with the metal layer 32, and the ceramic heater body 30 and the case member 31 are fixed.

The ceramic heater main body 30 is configured as a known ceramic heater having a columnar shape with a circular cross section. A heating wire (heating element) made of a high-melting-point metal such as tungsten (not shown) is embedded in the ceramic heater main body 30, and leads 33 are connected to both ends of the heating wire by brazing. The leads 33, 33 are connected to a power supply device (not shown), and the above-described hot wire generates heat by being energized with the power supply device.

The ceramic heater 3 of this embodiment has a temperature sensor 34 embedded in the tip (top) of the ceramic heater main body 30 . The temperature sensor 34 is configured as temperature detecting means for detecting the temperature near the tip of the ceramic heater 3 and is connected to lead wires (not shown) embedded in the ceramic heater main body 30 .

As the material of the ceramic heater main body 30, known materials can be used, such as alumina, silicon nitride, aluminum nitride, and boron nitride. As the ceramic heater 3 of this embodiment, a high-temperature ceramic heater that can be used at high temperatures of 900° C. to 1200° C. is preferably used.

The case member 31 is configured as a member made of metal or ceramics and formed in a hollow cylindrical shape with one end closed and having a bottom. The material of the case member 31 can be appropriately selected according to the heat capacity of the ceramic heater main body 30 and the melting point of the metal powder forming the metal layer 32 described later.・Metal materials and ceramics with high thermal conductivity, such as copper-based materials such as nickel silver, or alloys thereof, can be used. In the ceramic heater 3 of this embodiment, stainless steel is preferably used in terms of heat resistance and corrosion resistance, and ceramics is preferably used in terms of chemical resistance.

The case member 31 is formed to have an inner diameter larger than the outer diameter of the ceramic heater main body 30, and the ceramic heater main body 30 is fitted into the case member 31 and positioned coaxially. there is A metal layer 32 , which will be described later, is formed in a gap formed between the outer and lower surfaces of the ceramic heater main body 30 and the inner and inner bottom surfaces of the case member 31 . The clearance between the ceramic heater main body 30 and the case member 31 is large enough to insert the ceramic heater main body 30 into the case member 31 while maintaining a predetermined distance, and to effectively form the metal layer 32 in the gap. It's fine.

The metal layer 32 is formed between the ceramic heater main body 30 and the case member 31, and is formed as a lump of metal in which predetermined metal powder is partially or completely sintered and/or melted. As the material of the metal powder, a material that does not melt when the ceramic heater 3 is energized and has a lower melting point than the material of the case member 31 is used. based, aluminum-based, iron-based, or alloys thereof, or the like can be used. The ceramic heater 3 of this embodiment preferably contains at least one selected from copper and aluminum as a main component because it has a high thermal conductivity and a relatively small dimensional change and is inexpensive.

The method of forming the metal layer 32 is not particularly limited. , is formed by sintering and/or melting the filled metal powder by heat generation of the ceramic heater main body 30 .

The thickness of the metal layer 32 is appropriately and preferably set according to the dimensions of the device from the viewpoint of heat transfer efficiency. That is, in order to increase the heat transfer efficiency of the ceramic heater 3, the thinner the better, but if it is too thin, it becomes difficult to uniformly fill the gap between the ceramic heater main body 30 and the case member 31 with the metal powder. If the filling of the metal powder is insufficient, the strength and density of the metal layer 32 become uneven, and when the ceramic heater 3 is energized, the heat transfer efficiency is lowered at the uneven portions, and the performance of the ceramic heater 3 is reduced. This is because, along with the decrease in the thermal stress, local thermal stress or thermal shock may cause cracks in the ceramic heater main body 30 . On the other hand, the heat transfer efficiency of the ceramic heater 3 decreases as the metal layer 32 becomes thicker.

The ceramic heater 4 has a metal or ceramic case member 41 in which a ceramic heater main body 40 is inserted, similarly to the ceramic heater 3 described above. and/or a metal body layer 42 formed by melting, and since each member is formed in the same manner as the ceramic heater 3, detailed description thereof will be omitted.

Here, the configurations of the first heating section 2a and the second heating section 2b will be described in detail below.
As shown in FIGS. 1 and 2, in the first heating portion 2a, the ceramic heater 3 fixed to the fixing member 25 of the flow path body 20 protrudes into the flow path body 20, and the surface of the ceramic heater 3 (case The surface of the member 31 is exposed, and the ceramic heater 3 heats the flow path body 20 to generate saturated steam while containing water as the fluid to be heated that has flowed into the flow path body 20. is configured as

In the first heating part 2a, the ceramic heater 3 is arranged on the side of the fluid inflow pipe 22 (fluid inlet 10), and is arranged with a predetermined distance from the inner wall of the flow path body 20. Thus, an accommodation space S<b>1 for the fluid to be heated is formed in the flow path body 20 . By arranging the ceramic heater 3 in this way, the water as the fluid to be heated which has flowed into the fluid inflow pipe 22 from the fluid inlet 10 flows along the surface of the ceramic heater 3 (the surface of the case member 31). 20 to the downstream side (upward in FIG. 2) and stored in the storage space S1.

Further, in the first heating part 2a, the tip of the ceramic heater 3 is positioned below the upper end of the flow path body 20, and is arranged so as to have a predetermined distance from the fluid take-out pipe 24 described above. A preliminary space S2 is formed in the internal space above the flow path body 20 . In the first heating unit 2a, water as the fluid to be heated is flowed into the flow passage body 20 to compensate for the decrease due to evaporation, and the surface of the tip portion of the ceramic heater 3 (the surface of the case member 31) is not exposed. water as a fluid to be heated is stored from the storage space S1 to the preliminary space S2, and the ceramic heater 3 is constantly immersed in water as the fluid to be heated, thereby enhancing thermal efficiency (see FIG. 2). reference).

At this time, in the first heating unit 2a, the temperature sensor 34 detects the temperature of (near) the tip of the ceramic heater 3 (ceramic heater main body 30), and the temperature sensor 34 is accommodated in the first heating unit 2a. It acts as a water level detection means for detecting that the amount of the heated fluid (water amount) has decreased. When the amount of water in the first heating part 2a decreases and the surface of the tip of the ceramic heater 3 is exposed in the flow path body 20, only the tip rises in temperature due to empty heating, and is detected by the temperature sensor 34. When the temperature reaches a predetermined temperature or higher, it is detected that the supply amount of the fluid to be heated is insufficient. Control such as emergency stop is performed.

In the first heating unit 2a, the fluid to be heated is heated to the set temperature T1 by heat input from the ceramic heater 3 while the fluid to be heated is accommodated in the accommodation space S1 as described above. The set temperature T1 in this embodiment refers to the temperature at which water, which is the fluid to be heated, is boiled to generate saturated steam. The temperature control in the first heating section 2a is performed by controlling the (surface) temperature of the ceramic heater 3 while detecting it with a temperature sensor (not shown).

The saturated steam generated in the first heating unit 2a is switched by a flow path switching valve (three-way valve) (not shown) in the fluid take-out pipe 24 described above, and the flow path body 20 and the flow path body 21 are cut off. Since the fluid outlet 12 is opened while the liquid is being discharged, the fluid can be discharged to the outside of the flow path through the fluid outlet 12 and taken out.

As shown in FIGS. 1 and 3, in the second heating part 2b, the ceramic heater 4 fixed to the fixing member 26 of the flow path body 21 protrudes into the flow path body 21, and the surface of the ceramic heater 4 (case The surface of the member 41 is exposed, and the ceramic heater 4 heats the saturated steam flowing into the flow path body 21 to generate superheated steam.

In the second heating part 2b, the ceramic heater 4 is arranged on the side of the fluid outflow pipe 23 (fluid outlet 11), and is arranged with a predetermined distance from the inner wall of the flow path body 21. Thus, a heating space S3 is formed inside the flow path body 21 . By arranging the ceramic heater 4 in this way, the saturated steam generated in the first heating part 2a flows along the surface of the ceramic heater 4 (the surface of the case member 41) to the flow path downstream side of the flow path body 21. (Upward in FIG. 3), and eventually discharged from the fluid outlet 11 of the fluid discharge pipe 23 to the outside of the flow path.

At this time, in the second heating unit 2b, the temperature sensor 44 detects the temperature of (near) the tip of the ceramic heater 4 (ceramic heater main body 40), and the temperature sensor 44 is saturated in the flow path body 21. It acts as inflow detection means for detecting the inflow of steam. When saturated steam flows into the flow path body 21 and contacts the surface of the tip of the ceramic heater 4, the temperature of the tip rises. When it is detected that the saturated steam has started to flow from the heating part 2a, for example, control is performed such that the ceramic heater 4 is interlocked with this to start heating the saturated steam by causing it to generate heat.

In the second heating part ba, when the saturated steam is supplied to the heating space S3 as described above, the heat input from the ceramic heater 4 heats the saturated steam to a temperature T2 (T2>T1) higher than the set temperature T1. heated. The temperature T2 in this embodiment means a temperature (up to 400° C.) at which superheated steam having a target temperature is generated from saturated steam. The temperature control in the second heating part 2b is to control the (surface) temperature of the ceramic heater 4 while detecting the temperature (outlet temperature) of superheated steam from the fluid outlet 11 with a temperature sensor (not shown). is done in

As described above, the fluid heating device 1 of this embodiment includes the flow channel unit 2 in which the fluid flow channel is formed from the fluid inlet 10 to the fluid outlet 11, and the resistance heating element disposed in the flow channel. In the fluid heating device 1, the flow path unit 2 is set with a columnar ceramic heater 3 as a resistance heating element in a state in which the fluid to be heated which has flowed into the flow path from the fluid inlet 10 is accommodated. A first heating unit 2a that heats up to a temperature T1, and a columnar ceramic heater 4 that uses the fluid heated by the first heating unit 2a as a resistance heating element and is separate from the first heating unit 2b to a temperature higher than the predetermined temperature T1. Since the second heating part 2b is provided to heat the fluid to T2 and discharge it out of the flow path from the fluid outlet 11, the fluid at the target temperature can be efficiently generated while miniaturizing the apparatus as an electric boiler.

That is, the fluid heating device 1 of this embodiment uses the ceramic heaters 3 and 4 as resistance heating elements, and the heating elements can be electrically heated to a high temperature, so that the temperature can be precisely controlled. can. For example, when water as a fluid to be heated is heated to generate superheated steam, the energy required to heat the liquid (water) to obtain saturated steam is higher than the energy required to heat the saturated steam to obtain superheated steam. is smaller, the fluid to be heated is first heated to the set temperature T1 by the ceramic heater 3 in the first heating unit 2a, and then the second By configuring the second heating unit 2b to further heat to a temperature T2 higher than the set temperature T1 with a different ceramic heater 4, the output of the ceramic heater 4 of the second heating unit 2b on the downstream side is adjusted to the temperature of the superheated steam. Good control can be obtained, and the fluid at the target temperature can be efficiently generated. Further, by using ceramic heaters for high temperature as the ceramic heaters 3 and 4, the temperature of the fluid to be heated can be raised to the target temperature in a short time, and the apparatus can be easily miniaturized as an electric boiler.

In particular, the fluid heating device 1 of the present embodiment is arranged between the first heating section 2a and the second heating section 2b in the channel unit 2, and the fluid heated in the first heating section 2a is branched. Since it has a fluid take-out pipe 24 for taking out from the fluid take-out port 12, the fluid (saturated steam in this embodiment) heated to a somewhat lower set temperature T1 in the first heating part 2a can be efficiently It can be produced well and can be employed in a given application as an electric boiler.

Further, in the fluid heating device 1 of the present embodiment, coated ceramic heaters in which the surfaces of the ceramic heater main bodies 30 and 40 are coated with the metal layers 32 and 42 are used as the ceramic heaters 3 and 4. (ceramic layer), it is possible to effectively prevent the surface (ceramic layer) from cracking due to thermal stress or thermal shock, or the ceramic heater itself from cracking.

In addition, in the fluid heating device 1 of this embodiment, the ceramic heaters 3 and 4 protrude from the inner wall and are exposed in the flow path. By feeding the fluid to be heated downstream along the surface, it is possible to heat the fluid to be heated with heat input with good thermal efficiency.

It should be noted that the fluid heating device of this embodiment is not limited to the embodiment described above, and various modifications are possible without departing from the object of the present invention.

That is, the fluid heating device 1 of the above-described embodiment (see FIG. 1, etc.) heats water, which is the fluid to be heated, which flows in from the fluid inlet 10 by the ceramic heaters 3 and 4, and converts it into superheated steam from the fluid outlet 11. Although the case has been described in which the heating device is configured to be able to discharge water, as another configuration, for example, as shown in FIG. 4 may be configured so that high temperature water (90° C. or higher) can be discharged from the fluid outlet 11 after being heated in 4, and low temperature water (up to 60° C.) can be taken out from the fluid outlet 12.

When configured as the heating apparatus shown in FIG. 9, the first heating unit 2a accommodates water as the fluid to be heated that has flowed into the channel body 20, and the ceramic heater 3 heats the set temperature T1 (to 60° C.). ) and stored as low-temperature water. Then, if necessary, the low-temperature water is supplied from the first heating unit 2a to the second heating unit 2b, and heated to a temperature T2 (90 ° C. or higher) higher than the set temperature T1 by the ceramic heater 4 to form high-temperature water. The fluid is discharged out of the path from the fluid outlet 11 . The low-temperature water in the first heating unit 2a is branched from the fluid outlet 12 via the fluid outlet pipe 24 and taken out of the path. By using the fluid heating device 1 of this embodiment in this way, it is possible to effectively generate hot water at a target temperature from water as a fluid to be heated with a simple configuration.

In addition, although the fluid heating device 1 of the above-described embodiment (see FIG. 1 and the like) has been described with a configuration in which one ceramic heater 3 and 4 is disposed in each of the first heating section 2a and the second heating section 2b, , the arrangement configuration of the ceramic heaters 3 and 4 is not limited to this. For example, as shown in FIG. 10, a plurality of (three in FIG. 10) ceramic heaters may be arranged in each heating part, and in such a case, a heater body in which a plurality of ceramic heaters are gathered in a bundle is formed. may be used. When a plurality of ceramic heaters are arranged in one flow path body, the output of each ceramic heater (amount of heat generated and ON/OFF switching) is controlled, or a separate shutter mechanism or the like is provided to control the output of each ceramic heater. You may comprise so that the inflow of the to-be-heated fluid may be controlled.

Further, in the fluid heating device 1 of the above-described embodiment (see FIG. 1, etc.), in the channel unit 2, the channel bodies 20 and 21 are arranged in series so as to be positioned on the same straight line along the vertical direction. Although the configuration in which the ceramic heaters 3 and 4 are arranged along the vertical direction in the internal spaces of the channel bodies 20 and 21 has been described, the configuration of the channel unit 2 is not limited to this. For example, the flow path bodies 20 and 21 arranged sideways along the horizontal direction are connected in the vertical direction, and one or more ceramic heaters 3 and 4 are horizontally arranged in the inner spaces of the flow path bodies 20 and 21. may be configured to be provided. In such a case, the temperature sensor 34 is embedded on the upper surface side of the ceramic heater 3 and the temperature sensor 44 is embedded on the lower surface side of the ceramic heater 4 . Further, the shape of the flow path bodies 20 and 21 is not only formed as tubular bodies having a circular cross section, but also formed as container-shaped storage tanks for the fluid to be heated. may be arranged sideways.

Further, the fluid heating device 1 of the above-described embodiment (see FIG. 1, etc.) has been described in the case where the channel body 20 and the channel body 21 are connected in series in the channel unit 2. The arrangement configuration of the body is not limited to this. For example, each heating part may be composed of a plurality of flow path bodies. You can use things.

Further, in the fluid heating device 1 of the above-described embodiment (see FIG. 7, etc.), the case member 31 made of a hollow metal or ceramics is used as the frame of the ceramic heater 3, and the metal body layer 32 is formed as the molded product. However, the structure of the ceramic heater 3 is not limited to this. Alternatively, the ceramic heater main body 30 may be covered only with the metal layer 32 without the case member 31 . Note that the same applies to the ceramic heater 4 as well.

Reference Signs List 1 fluid heating device 2 channel unit 2a first heating unit 2b second heating unit 3 ceramic heater 4 ceramic heater 10 fluid inlet 11 fluid outlet 12 fluid outlet 20 channel body 21 channel body 22 fluid inflow pipe 23 fluid discharge pipe 24 fluid take-out pipe (fluid take-out part)
25 fixing member 26 fixing member 30 heater main body 31 case member 31a flange portion 32 metal layer 33 lead 34 temperature sensor 40 heater main body 41 case member 42 metal layer 43 lead 44 temperature sensor

Claims (4)

A fluid heating device comprising: a flow path unit in which a fluid flow path is formed from a fluid inlet to a fluid outlet; and a resistance heating element disposed in the flow path,
The channel unit is
A fluid to be heated that has flowed into the flow path from the fluid inletwater asis stored and heated to the set temperature with a columnar ceramic heater as a resistance heating element.generate saturated steama first heating unit;
connected to the upper position of the first heating unit, At the first heating sectionSaturated steam generatedwith a columnar ceramic heater separate from the first heating unit as a resistance heating elementSet temperature of the first heating unitheated to a higher temperatureproduce superheated steam,a second heating unit that discharges out of the flow path from the fluid outlet,
A temperature sensor is embedded in the tip of the ceramic heater of the first heating unit as a means for detecting the level of water contained in the flow path.
A fluid heating device characterized by: The flow path unit has a fluid take-out part disposed between the first heating part and the second heating part, for branching the fluid heated by the first heating part and taking it out from the fluid take-out port. 2. The fluid heating device according to claim 1. 3. The fluid heating apparatus according to claim 1, wherein the ceramic heater is a covered ceramic heater in which the surface of the ceramic heater main body is covered with a metal layer. 4. The fluid heating device according to claim 1, wherein the ceramic heater protrudes from the inner wall and is exposed in the flow path.

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