JP7148232B2 - Sensor device and its control method - Google Patents

Description

The present invention relates to a sensor device and its control method, and more particularly to a technology for increasing the readout speed of a sensor array.

A touch panel capable of detecting the position coordinates of a user's touch operation is widely used in displays and mobile terminals as an excellent user interface that realizes intuitive operations. For example, the touch panel described in Patent Document 1 detects position coordinates of a touch operation based on signals output from a plurality of sensors arranged two-dimensionally.

JP 2017-120418 A JP 2017-049659 A

As displays and mobile terminals have become larger in recent years, touch panels have also become larger. However, in the touch panel of Patent Document 1, since a plurality of sensors arranged two-dimensionally are sequentially scanned, it takes time to read out the sensor array when the total number of sensors arranged in the sensor array increases. There was a problem that the response speed of the touch panel would decrease.

According to one aspect of the present invention, a sensor array in which a plurality of sensors are arranged two-dimensionally, a readout circuit for reading signals from the plurality of sensors, and a readout circuit for reading out signals from the plurality of sensors by controlling the readout circuit a control calculation unit that detects position coordinates at which the change in the signal occurs in the sensor array based on the signal; Scanning is performed, and based on the plurality of signals read out in the primary scanning, a next scanning region including the position coordinates is set, and in the scanning region, scanning intervals of 2 are smaller than those of the primary scanning. A sensor device is provided for performing a next scan.

According to another aspect of the present invention, a sensor array in which a plurality of sensors are arranged two-dimensionally, a readout circuit for reading signals from the plurality of sensors, and a readout circuit for reading out signals from the plurality of sensors by controlling the readout circuit A control method for a sensor device, comprising: a control calculation unit that detects, based on a signal, position coordinates in the sensor array at which the change in the signal occurs, wherein the control calculation unit includes: , performing primary scanning while thinning out rows and columns; setting a next scanning region including the position coordinates based on a plurality of signals read out in the primary scanning; and performing secondary scanning with a smaller scanning interval than the primary scanning.

ADVANTAGE OF THE INVENTION According to this invention, the sensor apparatus which can speed up the read-out speed of a sensor array, and its control method can be provided.

1 is a block diagram schematically showing the configuration of a sensor device according to a first embodiment; FIG. FIG. 4 is a diagram schematically showing a method of controlling the sensor device according to the first embodiment; 4 is a diagram schematically showing the configuration of a readout circuit in the sensor device according to the first embodiment; FIG. FIG. 4 is a diagram showing examples of shapes of electrodes of a sensor in the sensor device according to the first embodiment; 4 is a timing chart of signals read out from a sensor array in a conventional sensor device; 4 is a timing chart of signals read out from the sensor array in the sensor device according to the first embodiment; 4 is a flow chart showing a control method of the sensor device according to the first embodiment; FIG. 7 is a block diagram schematically showing the configuration of a sensor device according to a second embodiment; FIG.

Preferred embodiments of the present invention will be described below with reference to the drawings. It should be noted that the present invention is not limited to the following embodiments, and can be modified as appropriate without departing from the scope of the invention. Also, in each figure, the same reference numerals are given to the parts having the same or corresponding functions, and the explanation thereof may be omitted or simplified.

(First embodiment)
FIG. 1 is a block diagram schematically showing the configuration of the sensor device according to the first embodiment. The sensor device of this embodiment comprises a sensor array 1 , a readout circuit 2 , and a control calculation section 3 . The sensor device shown in FIG. 1 can be applied, for example, as a display or a touch panel for mobile terminals.

The sensor array 1 has a plurality of sensors 10 that are two-dimensionally arranged and receive touch scanning by a user. In principle, the sensor 10 should be capable of detecting a touch operation by a user. In the following description, it is assumed that the sensor 10 is of a self-capacitance type or a mutual-capacitance type having electrodes, and measures changes in capacitance to detect position coordinates of a touch operation.

The readout circuit 2 reads out signals from the sensor array 1 through signal output lines 11 . The readout circuit 2 of the present embodiment has a configuration capable of performing scanning while thinning out rows and columns of the sensor array 1 or in units of predetermined scanning blocks. A specific configuration of the readout circuit 2 will be described later with reference to FIG.

The control calculation unit 3 is a semiconductor IC including a microprocessor and memory. The control calculation unit 20 executes a program recorded in a storage unit (not shown) to control the readout circuit 2, and based on a plurality of signals read out from the sensor array 1, detects the position coordinates of the user's touch operation. . The control calculation unit 20 is typically mounted on a substrate different from the sensor array 1 and the readout circuit 2, but the control calculation unit 20 may be mounted on the same substrate as the sensor array 1 or the readout circuit 2. good.

For the sake of convenience, FIG. 1 shows only a total of 16 sensors 10 of 4 rows×4 columns of the sensor array 1 , but a general sensor array 1 has more sensors 10 . Some sensor arrays 1 , especially for large displays, have more than tens of thousands of sensors 10 .

As described above, in the conventional control method of the sensor device, the plurality of sensors 10 arranged two-dimensionally are sequentially scanned. Therefore, when the total number of sensors 10 arranged in the sensor array 1 increases, it takes time to read out the sensor array 1, and there is a problem that the response speed of the touch panel decreases.

However, the area touched by the user at the same time is sufficiently small compared to the area of the sensor array 1 even if a multi-touch of about 10 points is performed. Therefore, in a sensor device such as a touch panel, it is not always necessary to sequentially scan the entire area of the sensor array 1 . Therefore, in the present embodiment, scanning of the sensor array 1 is divided into coarse scanning performed over the entire area and fine scanning performed in a partial area including touch operations, thereby increasing the readout speed of the sensor array 1. Let

FIG. 2 is a diagram schematically showing the control method of the sensor device according to the first embodiment. 2(b) to 2(d) will be described below as an example of detecting the position coordinate P0 of the touch operation shown in FIG. Description will be made with reference to this.

For convenience, FIG. 2 shows the sensor array 1 having a total of 144 sensors 10 of 12 rows×12 columns, but the number of sensors 10 is not particularly limited in this embodiment. However, as will be described later, the reading method of the sensor array 1 according to the present embodiment provides particularly excellent effects when the total number of sensors 10 arranged in the sensor array 1 is large.

First, the control calculation unit 3 thins out rows and columns of the sensor array 1 as indicated by arrows in FIG. scan. FIG. 2B shows an example in which both the row thinning interval a1 and the column thinning interval b1 in the first scan are three. Here, the value of the thinning interval is a value in units of the arrangement intervals of the sensors 10, and the same applies to the following description.

The row thinning interval a1 and the column thinning interval b1 in the first scan are determined by the following formula (1 ) is set to satisfy
a1 < a0,
b1 < b0 (1)

In the above formula (1), the row range a0 and the column range b0 of the sensor array 1 detectable by the sensor 10 are used. For example, in FIG. 2B, row range a0 and column range b0 are both 4 or more. Here, the value of the row range and the value of the column range are values in units of the arrangement intervals of the sensors 10, and the same applies to the following description.

Subsequently, the control calculation unit 3 detects the position coordinate P1 of the sensor 10 where the magnitude of the signal read out in the first scan is greater than or equal to a predetermined value or the maximum. Then, the control calculation unit 3 sets a rectangular area having a predetermined size centered on the position coordinates P1 as a second scanning area R2 for the next second scanning. The second scanning region R2 includes the position coordinates P0 of the touch operation by the user.

In FIG. 2B, the size of the second scanning region R2 is set to 5 rows×5 columns, but the row range of the second scanning region R2 is 2× using the row thinning interval a1 in the first scanning. A1+1 or less is sufficient. Also, the row range of the second scanning region R2 may be 2×b1+1 or less using the row thinning interval b1 in the first scanning.

Next, as indicated by arrows in FIG. 2(c), the control calculation unit 3 thins out rows and columns in the second scanning region R2 at a smaller thinning interval than in the first scan, while A second scan is performed to scan the plurality of sensors 10 shaded in FIG. At this time, in the second scan, the scan of the sensor 10 read out in the previous first scan may be omitted. FIG. 2C shows an example in which both the row thinning interval a2 and the column thinning interval b2 in the second scan are 1. FIG.

The row thinning interval a2 and the column thinning interval b2 in the second scan are set so as to satisfy the following formula (2).
a2 < a1,
b2 < b1 (2)

Subsequently, the control calculation unit 3 detects the position coordinate P2 of the sensor 10 where the magnitude of the signal read out in the second scan is greater than or equal to a predetermined value or the maximum. Then, the control calculation unit 3 sets a rectangular area having a predetermined size centered on the position coordinate P2 as a third scanning area R3 in which the next third scanning is performed. The third scanning region R3 includes the position coordinates P0 of the touch operation by the user.

In FIG. 2(c), the size of the third scanning region R3 is 3 rows×3 columns, but the row range of the third scanning region R3 is 2× using the row thinning interval a2 in the second scanning. It may be a2+1 or less. Also, the row range of the third scanning region R3 may be 2×b2+1 or less using the row thinning interval b2 in the second scanning.

Next, as shown in FIG. 2(d), the control calculation unit 3 performs a third scan in which the plurality of sensors 10 indicated by diagonal lines in FIG. 2(d) are sequentially scanned without thinning in the third scanning region R3. I do. At this time, the scanning of the sensor 10 read out in the previous second scanning may be omitted in the third scanning.

Subsequently, the control calculation unit 3 detects the position coordinate P0 of the user's touch operation shown in FIG. . At this time, the control calculation unit 3 calculates the center of gravity G of the user's touch operation using the following formula (3), and detects the position coordinate P0 of the touch operation with an accuracy smaller than the arrangement interval of the sensors 10 .
G=Σ(S(Pij)· _Pij )/ _ΣS ( _Pij ) (3)

Here, the center of gravity G and position coordinates P _ij are vectors. A signal S(P _ij ) is a signal value read from the sensor 10 arranged at the position coordinate P _ij , and the suffix of the position coordinate P _ij indicates the row number i and the column number j of the sensor 10 . Σ represents the sum of all position coordinates P _ij within the third scanning region R3.

In this manner, in the sensor array 1 readout method of the present embodiment, coarse scanning (primary scanning, first scanning) is performed while thinning out rows and columns in the sensor array 1 . Then, the next scanning area is set based on a plurality of signals read out by coarse scanning, and fine scanning (secondary scanning, second and third scans).

As a result, for example, in the reading method of the sensor array 1 shown in FIG. 2, instead of sequentially scanning the 12×12 sensors 10 of the sensor array 1 as in the conventional art, the 9 sensors are read in each of the first to third scans. Just scan 10. In particular, only 8 sensors 10 need to be scanned in each of the second to third scans if the sensors 10 read out in the previous scan are not scanned in the next scan. As a result, the number of sensors 10 scanned when reading out the sensor array 1 can be reduced to (9+8+8)/(12×12)≈1/6.

More generally, when M×N sensors 10 are arranged in the sensor array 1, instead of sequentially scanning the M×N sensors 10 of the sensor array 1 as in the conventional art, the first scan Only (M/a1)*(N/b1) sensors 10 need to be scanned. Also, in the second to third scans, only eight sensors 10 need to be scanned. As a result, the number of sensors 10 scanned when reading out the sensor array 1 can be reduced as shown in the following formula (4).
{(M/a1)×(N/b1)+8+8}/(M×N)
=1/(a1×b1)+16/(M×N) (4)

As the total number M×N of sensors 10 arranged in the sensor array 1 increases, the second term in the above equation (4) can be neglected relative to the first term. Therefore, the readout method of the sensor array 1 of the present embodiment is particularly effective when the total number of sensors 10 arranged in the sensor array 1 is large.

Further, the row thinning interval a1 and the column thinning interval b1 in the above equation (4) are, as shown in the above equation (1), the row range a0 and the column range a0 of the sensor array 1 that can be detected by the sensor 10. Defined from b0. Therefore, the larger the row range a0 and the column range b0 of the sensor array 1 that can be detected by the sensor 10, the more the number of sensors 10 scanned when reading out the sensor array 1 can be reduced.

FIG. 2 shows an example of single touch in which the number of touches operated simultaneously by the user is one. Morphological techniques can be applied.

FIG. 3 is a diagram schematically showing the configuration of the readout circuit 2 in the sensor device according to the first embodiment. The readout circuit 2 of this embodiment includes a plurality of row selection circuits 21 and column selection circuits 22 . The readout circuit 2 may further include a filter circuit or the like for reducing noise in the readout signal.

A row selection circuit 21 is provided for each column of the sensor array 1 and connected to the plurality of sensors 10 in the same column via signal output lines 11 . Also, the column selection circuit 22 is connected to a plurality of row selection circuits 21 . The row selection circuit 21 and column selection circuit 22 each have a switch circuit for selecting a row or column and an amplifier circuit for amplifying the signal output from the selected sensor 10 .

The control operation unit 3 is connected to a row selection circuit 21 and a column selection circuit 22 and controls the row selection circuit 21 and the column selection circuit 22 to select rows and columns of the sensor array 1 .

Row selection circuit 21 selects one row from a plurality of sensors 10 in the same column of sensor array 1 . Also, the column selection circuit 22 selects one column from the plurality of sensors 10 selected by the row selection circuit 21 of each column. The column selection circuit 22 includes, for example, a selection circuit similar to the row selection circuit 21 . The control calculation unit 3 sequentially reads signals from the sensors 10 selected by the row selection circuit 21 and the column selection circuit 22 .

FIG. 4 is a diagram showing an example of the electrode shape of the sensor 10 in the sensor device according to the first embodiment. 1 to 3 described above, it is assumed that the shape of the electrodes of the sensor 10 is a rectangle as shown in FIG. 4A, but the electrodes of the sensor 10 of the present embodiment are not limited to such a shape . For example, as shown in FIGS. 4(b) to 4(h), diamond, cross, triangle, step, uneven, H-shaped, and fish bone electrode shapes may be used.

Moreover, the sensors 10 do not necessarily have to be arranged in a matrix on the sensor array 1 as described above. The sensors 10 may be arranged approximately two-dimensionally in the sensor array 1 and have a configuration read by the readout circuit 2 shown in FIG. The actual layout of the sensors 10 in the sensor array 1 can be variously devised as described in Patent Document 2, for example, in order to improve the detection accuracy of the position coordinates of the user's touch operation.

FIG. 5 is a timing chart of signals read out from the sensor array 1 in the conventional sensor device. FIG. 5 shows signals read out from the sensors 10 in the first to sixth rows and the first to sixth columns of the sensor array 1 in the conventional sensor device. The row numbers of the readout signals are shown only in the first column.

In the conventional sensor device, scanning is performed sequentially from the first row and first column of the sensor array 1 using a shift register or the like, as shown in FIG. Although FIG. 5 shows that the signals on the same row are read out in parallel at the same timing, the signals are actually read out in order. Therefore, in the conventional control method of the sensor device, when the total number of sensors 10 arranged in the sensor array 1 increases, the scanning period T of the sensor array 1 increases, and the response speed of the touch panel decreases.

However, the area touched by the user at the same time is sufficiently small compared to the area of the sensor array 1 even if a multi-touch of about 10 points is performed. Therefore, in a sensor device such as a touch panel, it is not always necessary to sequentially scan the entire area of the sensor array 1 . Therefore, in the present embodiment, scanning of the sensor array 1 is divided into coarse scanning performed over the entire area and fine scanning performed in a partial area including touch operations, thereby increasing the readout speed of the sensor array 1. Let

FIG. 6 is a timing chart of signals read from the sensor array 1 in the sensor device according to the first embodiment. FIG. 6 shows signals read from the sensors 10 in the first to sixth rows and the first to sixth columns of the sensor array 1 when the control method of the sensor device shown in FIG. 2 is used. showing. The row number of the signal to be read out is indicated above each signal.

In the sensor device of this embodiment, as described with reference to FIG. 2, scanning of the sensor array 1 is performed by dividing it into first to third scanning. The first to third scans are performed in scan periods T1 to T3 shown in FIG. 6, respectively. Although FIG. 6 shows that the signals on the same row are read out in parallel at the same timing, the signals are actually read out sequentially.

In the timing chart shown in FIG. 6, as described with reference to FIG. 2, the scanning periods T1 to T3 are shortened from the scanning period T of the sensor array 1 in the conventional sensor device as shown in the above equation (4). As a result, even when the total number of sensors 10 arranged in the sensor array 1 is large, the scanning period T of the sensor array 1 can be shortened and the readout speed of the sensor array 1 can be increased.

FIG. 7 is a flow chart showing the control method of the sensor device according to the first embodiment. A control method for the sensor device shown in FIG. 2 will be described below with reference to FIG.

First, the control calculation unit 3 performs a first scan while thinning out rows and columns of the sensor array 1 (step S101). In the first scan, the entire area of the sensor array 1 is roughly scanned. Subsequently, based on the plurality of signals read in the first scan, the control calculation unit 3 scans the second scan region R2 including the position coordinate P0 of the touch operation by the user for the next second scan. Set as an area (step S102).

Next, the control calculation unit 3 performs a second scan in the second scan region R2 with a smaller thinning interval than the first scan (step S103). In the second scanning, the second scanning region R2 is finely scanned. Subsequently, based on the plurality of signals read out in the second scan, the control calculation unit 3 scans the third scan region R3 including the position coordinate P0 of the touch operation by the user for the next third scan. Set as an area (step S104).

Next, the control calculation unit 3 performs the third scanning without thinning in the third scanning region R3 (step S105). Then, the control calculation unit 3 calculates the center of gravity G of the user's touch operation using the above equation (3) based on the signal read out in the third scan (step S106).

In this manner, the sensor device of the present embodiment performs rough scanning (primary scanning, first scanning) while thinning rows and columns in the sensor array 1 . Then, the next scanning area is set based on a plurality of signals read out by coarse scanning, and fine scanning (secondary scanning, second and third scans).

With such a configuration, it is possible to provide a sensor device capable of increasing the readout speed of the sensor array 1 and a control method thereof. Particularly, the sensor device and the control method thereof according to the present embodiment provide excellent effects when the total number of sensors 10 arranged in the sensor array 1 is large.

(Second embodiment)
FIG. 8 is a block diagram schematically showing the configuration of the sensor device according to the second embodiment. The sensor device of this embodiment comprises a sensor array 1 , a vertical scanning circuit 2 a , a readout circuit 2 b and a control calculation section 3 . The sensor device of this embodiment shown in FIG. 8 is characterized in that it includes a vertical scanning circuit 2a and a readout circuit 2b instead of the readout circuit 2, as compared with the sensor device of the first embodiment.

Conventional vertical scanning circuits and readout circuits are configured using shift registers and the like, and sequentially scan rows and columns of a sensor array. On the other hand, the vertical scanning circuit 2a of the present embodiment shown in FIG. 8 has a configuration capable of performing scanning while thinning out rows of the sensor array 1 or in units of a predetermined row range. Further, the readout circuit 2b of the present embodiment has a configuration capable of performing scanning while thinning out columns of the sensor array 1 or in units of a predetermined column range.

More specifically, the vertical scanning circuit 2a and the readout circuit 2b of this embodiment are configured with the row selection circuit 21 and the column selection circuit 22 as shown in FIG. Since other configurations are the same as those of the first embodiment, description thereof is omitted.

Even with such a configuration, as in the first embodiment, the scanning of the sensor array 1 is divided into coarse scanning performed over the entire area and fine scanning performed in a partial area including touch operations. 1 can be read out at high speed.

(Other embodiments)
All of the above-described embodiments merely show specific examples for carrying out the present invention, and the technical scope of the present invention should not be construed to be limited by these. That is, the present invention can be embodied in various forms without departing from its technical concept or main features.

The sensor 10 may be, for example, a pressure sensor using a pressure-sensitive conductive rubber or the like whose resistance value changes according to pressure, in addition to the capacitance type. In this case the pressure sensors are an active matrix and can be controlled by the configuration of the second embodiment shown in FIG. Moreover, in addition to the touch sensor, a temperature sensor, a humidity sensor, or the like may be further included.

Also, in the above-described embodiment, an example in which the first to third scans are performed three times has been shown, but the number of scans is not particularly limited in the present invention. For example, the second scan may be omitted, or a plurality of scans may be performed while reducing the scan area stepwise in the second scan. Alternatively, the third scan may be omitted and the position coordinates of the touch operation may be detected based on the plurality of signals read out in the second scan.

A program for realizing one or more functions of the above embodiments is also included in the scope of the present invention. The program can be supplied to the system or device via a network or recording medium. In a computer included in the system or apparatus, one or more processors read and execute programs to implement one or more functions of the above-described embodiments. Also, one or more functions of the above-described embodiments may be implemented by circuits such as ASICs, FPGAs, and the like.

Reference Signs List 1: sensor arrays 2, 2b: readout circuit 2a: vertical scanning circuit 3: control operation unit 10: sensor 11: signal output line 20: control operation unit 21: row selection circuit 22: column selection circuit

Claims (14)

a sensor array in which a plurality of sensors are arranged two-dimensionally;
a readout circuit having a row selection circuit including an amplifier circuit for each column and reading out signals from the plurality of sensors;
a control calculation unit that controls the readout circuit and detects position coordinates at which the signal changes in the sensor array based on the signals read from the plurality of sensors;
with
The control calculation unit is
performing primary scanning while thinning out rows and columns in a first scanning region of the sensor array;
setting a next second scanning region containing the position coordinates based on the plurality of signals read out in the primary scanning;
performing secondary scanning with a smaller scanning interval than the primary scanning in the second scanning region;
setting a next third scanning region that includes the position coordinates and is smaller than the second scanning region, based on the plurality of signals read out in the secondary scanning;
performing tertiary scanning in the third scanning region;
selecting one row from the plurality of sensors in the same column of the sensor array via the row selection circuit;
amplifying the signal for each column output from the sensor corresponding to the one selected row through the amplification circuit;
the tertiary scanning is scanning without thinning rows and columns;
In the secondary scanning, the control operation unit does not scan the sensor read out in the primary scanning, and in the tertiary scanning it does not scan the sensor read out in the secondary scanning. configured as
sensor device. 2. The second scanning area according to claim 1, wherein the second scanning area is a rectangular area of a predetermined size centered on the sensor whose magnitude of the signal read by the primary scanning is greater than or equal to a predetermined value or is maximum. sensor device. 3. The sensor device according to claim 1, wherein the sensor is of a capacitive type. 4. The sensor device according to any one of claims 1 to 3, wherein the control calculation unit calculates a center of gravity of changes in the signals based on the plurality of signals read out in the secondary scanning. The sensor device according to any one of claims 1 to 4, wherein the control calculation unit does not scan the sensor read out in the primary scanning in the secondary scanning. 6. The sensor device according to any one of claims 1 to 5, wherein the secondary scanning is scanning performed while thinning rows and columns. a row thinning interval in the secondary scanning is smaller than a row range of the sensor array detectable by the sensor;
7. The sensor device according to claim 6, wherein a column thinning interval in said secondary scanning is smaller than a column range of said sensor array detectable by said sensor. 8. The sensor device according to claim 1, wherein a row thinning interval and a column thinning interval in the primary scanning or the secondary scanning are equal. 9. The sensor device according to any one of claims 1 to 8, wherein in the secondary scanning, the control calculation unit performs a plurality of scanning operations while reducing the second scanning area stepwise. 10. The sensor device according to any one of claims 1 to 9, wherein said readout circuit has a column selection circuit for selecting one column from said plurality of said sensors selected by said row selection circuit for each column. 6. The sensor device according to any one of claims 1 to 5, wherein the secondary scanning is scanning without thinning rows and columns. a sensor array in which a plurality of sensors are arranged two-dimensionally;
a readout circuit having a row selection circuit including an amplifier circuit for each column and reading out signals from the plurality of sensors;
a control calculation unit that controls the readout circuit and detects position coordinates at which the signal changes in the sensor array based on the signals read from the plurality of sensors;
A control method for a sensor device comprising:
performing primary scanning while thinning out rows and columns in a first scanning region of the sensor array;
setting a next second scanning region including the position coordinates based on the plurality of signals read out in the primary scanning;
performing secondary scanning with a smaller scanning interval than the primary scanning in the second scanning region;
setting a next third scanning area that includes the position coordinates and is smaller than the second scanning area, based on the plurality of signals read out in the secondary scanning;
performing tertiary scanning in the third scanning region;
selecting a row from the plurality of sensors in the same column of the sensor array via the row selection circuit;
amplifying, via the amplification circuit, signals for each column output from the sensors corresponding to the one selected row;
has
the tertiary scanning is scanning without thinning rows and columns;
The step of performing the secondary scanning does not scan the sensor read out in the primary scanning, and the step of performing the tertiary scanning does not scan the sensor read out in the secondary scanning. ,
control method. a sensor array in which a plurality of sensors are arranged two-dimensionally;
a readout circuit having a row selection circuit including an amplifier circuit for each column and reading out signals from the plurality of sensors;
a control calculation unit that controls the readout circuit and detects position coordinates at which the signal changes in the sensor array based on the signals read from the plurality of sensors;
in a sensor device comprising a computer,
means for performing primary scanning while thinning out rows and columns in a first scanning region of the sensor array;
means for setting a next second scanning region including the position coordinates based on the plurality of signals read out in the primary scanning;
means for performing secondary scanning with a smaller scanning interval than the primary scanning in the second scanning region;
means for setting a next third scanning area that includes the position coordinates and is smaller than the second scanning area, based on the plurality of signals read out in the secondary scanning;
means for performing tertiary scanning in the third scanning region;
means for selecting one row from the plurality of sensors in the same column of the sensor array via the row selection circuit;
means for amplifying a column-by-column signal output from the sensor corresponding to the one selected row through the amplifier circuit;
A program that functions as
the tertiary scanning is scanning without thinning rows and columns;
The means for performing secondary scanning does not scan the sensor read by the primary scanning, and the means for performing tertiary scanning does not scan the sensor read by the secondary scanning. ,
program. A computer-readable recording medium recording the program according to claim 13 .

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