JP7125860B2 - 高解像プリンティングが可能な汎用有機蒸気ジェットデポジタ、及びovjpプリンティングのための方法 - Google Patents
高解像プリンティングが可能な汎用有機蒸気ジェットデポジタ、及びovjpプリンティングのための方法 Download PDFInfo
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- JP7125860B2 JP7125860B2 JP2018099259A JP2018099259A JP7125860B2 JP 7125860 B2 JP7125860 B2 JP 7125860B2 JP 2018099259 A JP2018099259 A JP 2018099259A JP 2018099259 A JP2018099259 A JP 2018099259A JP 7125860 B2 JP7125860 B2 JP 7125860B2
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Description
本願は、非仮出願であり、その内容の全体を参照によって援用する、2017年5月26日出願の米国仮特許出願第62/511,730号の利益を主張する。
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電荷発生層(CGL)
Claims (14)
- 基板上に堆積される有機材料のソース及びキャリアガスと流体連通している搬送アパチャと;
前記搬送アパチャの前方に配置されている第1の排出アパチャと;
前記搬送アパチャの後方に配置されている第2の排出アパチャと;
前記搬送アパチャの側方向に隣接して配置されている第1の閉じ込めガスアパチャと;
前記第1の閉じ込めガスアパチャに対して、前記搬送アパチャの側方向に隣接し、前記第1の閉じ込めガスアパチャの反対に配置されている第2の閉じ込めガスアパチャと、
を含むことを特徴とする有機蒸気ジェットプリンティング(OVJP)デポジタ。 - 前記搬送アパチャ、前記第1の排出アパチャ及び第2の排出アパチャ、及び前記第1の閉じ込めガスアパチャ及び第2の閉じ込めガスアパチャが、前記デポジタの表面に並べられ、それによって前記デポジタが操作され、基板上に有機材料を堆積するときに、前記搬送アパチャから前記第1の排出アパチャ及び第2の排出アパチャの少なくとも1つへの材料の第1の流れが、前記第1の閉じ込めガスアパチャ及び第2の閉じ込めガスアパチャの少なくとも1つからの材料の第2の流れと平行である請求項1に記載のデポジタ。
- 前記デポジタが操作され、基板上に材料を堆積するときに、前記デポジタと前記基板との相対運動方向に平行な前記搬送アパチャの寸法が、前記第2の排出アパチャに最も近い前記搬送アパチャのエッジと前記搬送アパチャから最も遠い前記第2の排出アパチャのエッジとの距離よりも短い請求項1に記載のデポジタ。
- 前記デポジタが操作され、基板上に材料を堆積するときに、前記第1の排出アパチャが、前記基板上にプリントされるフィーチャの幅よりも小さい幅を有する請求項1に記載のデポジタ。
- 前記第1の排出アパチャ及び前記第2の排出アパチャが、楕円形又は円形である請求項1に記載のデポジタ。
- 前記第1の排出アパチャ及び前記第2の排出アパチャが、長方形である請求項1に記載のデポジタ。
- 前記搬送アパチャが、面取りされた側壁を有する請求項1に記載のデポジタ。
- 前記デポジタの搬送~排出間隔DEが、400μm以下である請求項1に記載のデポジタ。
- 前記第1の排出アパチャ及び第2の排出アパチャの幅が、前記搬送アパチャの幅よりも大きい請求項1に記載のデポジタ。
- 基板上に材料を堆積する操作のときに、前記第1の排出アパチャ及び第2の排出アパチャを通る不活性ガスの総量のモル流量が、前記搬送アパチャを通る不活性ガスのモル流量よりも大きい請求項1に記載のデポジタ。
- 前記第1の排出アパチャ及び第2の排出アパチャのそれぞれが、500μm以下の最大幅を有する請求項1に記載のデポジタ。
- 線状アレイに配列された、請求項1に記載のデポジタを複数含むことを特徴とするOVJPノズルブロック。
- OVJPデポジタを操作する方法であって、前記方法が、
OVJPデポジタ中の搬送アパチャから、基板上に堆積される有機材料を含む搬送ガスを提供することと;
前記搬送アパチャの側方向に隣接して配置されている第1の閉じ込めガスアパチャ及び前記第1の閉じ込めガスアパチャに対して、前記搬送アパチャの側方向に隣接し、前記第1の閉じ込めガスアパチャの反対に配置されている第2の閉じ込めガスアパチャを介して、前記OVJPデポジタと前記基板との間の領域に閉じ込めガスを提供することと;
前記搬送アパチャの前方に配置されている第1の排出アパチャ及び前記搬送アパチャの後方に配置されている第2の排出アパチャを介して、前記OVJPデポジタと前記基板との間の前記領域から材料を除去することと、
を含むことを特徴とする方法。 - 前記第1の排出アパチャ及び第2の排出アパチャを通る不活性ガスの総量のモル流量が、前記搬送アパチャを通る不活性ガスのモル流量よりも大きい請求項13に記載の方法。
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