JP7112287B2 - 素子基板、記録ヘッド、記録装置、及び素子基板の製造方法 - Google Patents

素子基板、記録ヘッド、記録装置、及び素子基板の製造方法 Download PDF

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JP7112287B2
JP7112287B2 JP2018160602A JP2018160602A JP7112287B2 JP 7112287 B2 JP7112287 B2 JP 7112287B2 JP 2018160602 A JP2018160602 A JP 2018160602A JP 2018160602 A JP2018160602 A JP 2018160602A JP 7112287 B2 JP7112287 B2 JP 7112287B2
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Prior art keywords
insulating film
interlayer insulating
electrical connection
connection member
substrate
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JP2018160602A
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Japanese (ja)
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JP2019072999A (ja
JP2019072999A5 (enExample
Inventor
英雄 菅野
信之 平山
貞好 佐久間
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Canon Inc
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Canon Inc
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Priority to EP18195040.3A priority Critical patent/EP3470228B1/en
Priority to US16/150,373 priority patent/US10493774B2/en
Priority to CN201811181010.4A priority patent/CN109649012B/zh
Publication of JP2019072999A publication Critical patent/JP2019072999A/ja
Publication of JP2019072999A5 publication Critical patent/JP2019072999A5/ja
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JP2018160602A 2017-10-11 2018-08-29 素子基板、記録ヘッド、記録装置、及び素子基板の製造方法 Active JP7112287B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP18195040.3A EP3470228B1 (en) 2017-10-11 2018-09-18 Element substrate, manufacturing method thereof, printhead, and printing apparatus
US16/150,373 US10493774B2 (en) 2017-10-11 2018-10-03 Element substrate, manufacturing method thereof, printhead, and printing apparatus
CN201811181010.4A CN109649012B (zh) 2017-10-11 2018-10-11 元件基板、元件基板的制造方法、打印头和打印装置

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JP2017197771 2017-10-11
JP2017197771 2017-10-11

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JP2019072999A JP2019072999A (ja) 2019-05-16
JP2019072999A5 JP2019072999A5 (enExample) 2021-09-24
JP7112287B2 true JP7112287B2 (ja) 2022-08-03

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7551348B2 (ja) * 2019-07-30 2024-09-17 キヤノン株式会社 素子基板、液体吐出ヘッドおよび素子基板の製造方法
JP7575888B2 (ja) 2020-05-29 2024-10-30 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
JP7530214B2 (ja) * 2020-05-29 2024-08-07 キヤノン株式会社 記録素子基板、記録ヘッドおよび記録装置
JP7764173B2 (ja) * 2021-09-17 2025-11-05 キヤノン株式会社 液体吐出ヘッド

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6382773B1 (en) 2000-01-29 2002-05-07 Industrial Technology Research Institute Method and structure for measuring temperature of heater elements of ink-jet printhead
JP2009248517A (ja) 2008-04-09 2009-10-29 Canon Inc 記録ヘッド、液体吐出装置、及び記録ヘッドの製造方法
JP2015214079A (ja) 2014-05-09 2015-12-03 キヤノン株式会社 基板、液体吐出ヘッド、記録装置及び液体の吐出状態の判定方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07323577A (ja) * 1994-05-31 1995-12-12 Canon Inc 記録ヘッドおよびこれを搭載する液体噴射記録装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6382773B1 (en) 2000-01-29 2002-05-07 Industrial Technology Research Institute Method and structure for measuring temperature of heater elements of ink-jet printhead
JP2009248517A (ja) 2008-04-09 2009-10-29 Canon Inc 記録ヘッド、液体吐出装置、及び記録ヘッドの製造方法
JP2015214079A (ja) 2014-05-09 2015-12-03 キヤノン株式会社 基板、液体吐出ヘッド、記録装置及び液体の吐出状態の判定方法

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