JP7089820B1 - Fixing jig and observation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily exchange an object to be placed. SOLUTION: A mounting table 20 on which a mounting object 200 is mounted, and a positioning member 30 which is movable along a mounting surface 20a of the mounting table 20 and whose end abuts on the mounting object 200. A countersunk screw 51 for tightening the positioning member 30 to the mounting table 20 and a lever 51 for varying the fastening amount of the countersunk screw 51 are provided, and the lever 52 changes the fastening amount of the countersunk screw 51 from below. [Selection diagram] FIG. 2B

Description

The present invention relates to a fixing jig for fixing a semiconductor chip and an observation device.

The electrical characteristics of a semiconductor wafer or semiconductor chip mounted on a mounting table are measured via a probe, and observation is performed with a camera from above. At this time, a chuck (fixing jig) for fixing the semiconductor wafer or the semiconductor chip to the mounting table is used. Patent Document 1 discloses a wafer chuck unit that grips a semiconductor wafer from both sides with a fixed clamp and a movable clamp. This wafer chuck unit is configured to fix a fixing clamp for positioning a semiconductor wafer with a screw.

Japanese Patent No. 6441435 (Fig. 2)

Electrical measurements and observations on semiconductor chips and semiconductor wafers (hereinafter referred to as semiconductor chips, etc.) may be performed in a high-temperature heating state. Further, wire bonding for bonding a wire to a semiconductor chip may also be performed in a high temperature heating state. In the fixing jig of Patent Document 1, when the distance between the fixed clamp and the movable clamp does not match the size of the semiconductor chip or the like, the operator needs to manually change the fixing position of the fixed clamp. Even in such a case, when the fixing jig is at a high temperature, it is necessary to carry out the work while being careful not to touch the fixing clamp or the movable clamp.

When changing the distance between the fixed clamp heated to a high temperature and the movable clamp, for example, a screwdriver holding the screw fixing the fixed clamp with the right hand while releasing the fixing of the movable clamp with the left hand. Loosen using. Then, with the movable clamp released, the right hand is replaced with tweezers or the like, and the semiconductor chip or the like is replaced with the fixed clamp moved by the tweezers or the like. After the replacement, with the semiconductor chip etc. fixed with the movable clamp, hold the right hand with the screwdriver and tighten the screw of the fixed clamp with the screwdriver. That is, the tweezers and the like are switched between the driver and the driver with the right hand.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a fixing jig and an observation device capable of easily exchanging an object to be placed.

In order to achieve the above object, the fixing jig (100) of the present invention moves along the mounting table (20) on which the mounting object (200) is placed and the mounting surface (20a) of the mounting table. Possible, a positioning member (30) whose end abuts on the mounting object (200), and a fastening member (eg, countersunk screw 51) that fastens the positioning member (30) to the mounting table (20). A fastening amount variable member (for example, a lever 52) for adjusting the fastening amount of the fastening member (51) is provided, and the fastening amount variable member (52) is connected to the lower portion of the fastening member (51). It is characterized in that it can rotate around. The symbols and characters in parentheses are the symbols and the like attached in the embodiments, and do not limit the present invention.

The fixing jig (100), a transport mechanism (for example, XYZ stage 160) for transporting the object to be mounted (200) to the mounting surface (20a) of the mounting table (20), and the mounting surface (20a). The mounting surface (20a) of the mounting table (20) is mirror-polished, and the camera (150) is the mounting object (200). It can also be an observation device that images the back surface (200b) of the object to be placed (200) during transportation.

According to the present invention, it is possible to easily replace the object to be placed.

It is an external view of the fixing jig which is 1st Embodiment of this invention. It is a top view of the fixing jig which is 1st Embodiment of this invention, and shows the state which moved the positioning member which positions the position of the object to be placed to the outer peripheral side. It is a top view of the fixing jig which is 1st Embodiment of this invention, and shows the state which moved the positioning member which positions the position of the object to be placed toward the center part. FIG. 2 is a cross-sectional view taken along the line AA (FIG. 2A) of the fixing jig according to the first embodiment of the present invention. It is a perspective view which looked at the inside of the fixing jig which is 1st Embodiment of this invention from diagonally above. It is a perspective view which looked at the inside of the fixing jig which is 1st Embodiment of this invention from diagonally below. It is a block diagram of the observation apparatus which is 2nd Embodiment of this invention.

Hereinafter, embodiments of the present invention (hereinafter referred to as “the present embodiment”) will be described in detail with reference to the drawings. It should be noted that each figure is merely shown schematically to the extent that the present embodiment can be fully understood. Further, in each figure, common components and similar components are designated by the same reference numerals, and duplicate description thereof will be omitted.

(First Embodiment)
FIG. 1 is an external view of a fixing jig according to a first embodiment of the present invention. The directions of X, Y, and Z follow the arrow.
The fixing jig 100 is used for fixing a semiconductor chip, for example, in the case of wire bonding or measuring electrical characteristics. The fixing jig 100 includes a cover 10, a mounting table 20, a positioning member 30, a locking means 40, a fastening amount variable means 50, and a base member 60 (see FIG. 3-5). .. The cover 10 has a substantially cylindrical shape, and the upper portion of the outer peripheral surface is an inclined surface. Since the cover 10 has a substantially cylindrical shape, the operator can freely move it by hand. Therefore, the operator can freely orient the wire bonding.

The mounting table 20 is a table on which the mounting object 200 (FIG. 2B) is placed, and is substantially cylindrical. Two groove rails 21 and 21 are formed on the mounting table 20, and the positioning member 30 can slide and move in the Y direction. The mounting table 20 is made of SKD 11 (Steel Kougu Dice 11), and the mounting surface 20a is mirror-polished with a surface roughness (surface roughness) of about 0.03. As a result, the frictional force acting between the mounting object 200 and the mounting surface 20a becomes small, and even when the mounting object 200 slides on the mounting surface 20a, the mounting object 200 The 200 is not easily scratched. SKD11 is a steel material having excellent wear resistance, and is specified in JIS G 4404 “Alloy tool steel material”. The mounting table 20 is supported by the base member 60.

The positioning member 30 is a rectangular plate material. Convex rails 32, 32 (FIG. 5) that move along the groove rails 21 and 21 are formed on the lower surface of the positioning member 30. Further, the positioning member 30 is formed with a long hole 31 in the Y direction (that is, a long hole 31 extending in parallel with the convex rail 32). A countersunk screw 51 as a fastening member is inserted into the elongated hole 31. As a result, the positioning member 30 can slide and move in parallel with the elongated hole 31. The elongated hole 31 is formed with an inclined surface having a full angle of 90 ° so as to abut on the inclined surface of the head of the countersunk screw 51.

The locking means 40 locks one side 200a (FIG. 2B) of the mounting object 200 positioned by the positioning member 30. The locking means 40 is configured such that when the operator presses the button 42, the locking is released, and when the button 42 is released, the locking member 41 locks the object 200 to be mounted.

2A and 2B are plan views of the fixing jig according to the first embodiment of the present invention.
FIG. 2A is a plan view showing a state in which the positioning member 30 is positioned on the outer peripheral side of the mounting table 20. The mounting table 20 is formed with a front-view U-shaped (substantially U-shaped) groove 20b for accommodating the lever member 45 (see FIG. 1) so as to be swingable in the Y direction. The groove 20b extends in the Z direction (the normal direction of the mounting surface 20a).

FIG. 2B is a plan view showing a state in which the positioning member 30 is positioned on the central portion side of the mounting table 20. The countersunk screw 51 is screwed into the mounting table 20 and is in the same position as in FIG. 2A. The mounting object 200 shown in FIG. 2B is mounted on the mounting surface 20a in a state where one side thereof is in contact with the contact surface 30a of the positioning member 30. The mounting object 200 is a plate material having a rectangular shape in a plan view, and is, for example, a semiconductor chip. The other side 200a of the mounting object 200 parallel to the contact surface 30a is locked to the locking member 41. That is, one side of the mounting object 200 is in contact with the contact surface 30a of the positioning member 30, and the other side facing the one side is in contact with the locking member 41 (locking with the positioning member 30). It is mounted on the mounting surface 20a in a state of being sandwiched between the members 41).

Returning to the description of FIG. 1, the fastening amount variable means 50 includes a countersunk screw 51 as a fastening member and a lever 52 as a fastening amount variable member. The fastening amount variable means 50 adjusts the fastening amount of the countersunk screw 51 for fixing the positioning member 30 to the mounting table 20 with the lever 52. The lever 52 rotates the countersunk screw 51, and tightens or loosens the countersunk screw 51 to adjust the tightening amount of the countersunk screw 51. In the present embodiment, the countersunk screw 51 penetrates the mounting table 20, and the lever 52 is connected to the tip portion 51a of the countersunk screw 51 protruding below the mounting table 20. The lever 52 rotates about the countersunk screw 51 in a plane parallel to the mounting surface 20a. A lever rotation hole 11 for rotating the lever 52 is formed on the side peripheral surface of the cover 10. The lever rotation hole 11 extends in the circumferential direction of the cover 52.

FIG. 3 is a sectional view taken along the line AA (FIG. 2A) of the fixing jig according to the first embodiment of the present invention. FIG. 4 is a perspective view of the inside of the fixing jig according to the first embodiment of the present invention as viewed from diagonally above, and shows a state in which the cover 10 is removed from the fixing jig 100. As in FIG. 2A, the positioning member 30 shows a state in which it has moved most toward the Y direction.
The locking means 40 includes a locking member 41, a button 42, a support shaft 43, a spring member 44, and a lever member 45. The lever member 45 is a substantially prismatic body, and the portion below the support shaft 43 is formed in a triangular shape in cross-sectional view. The lever member 45 has a locking member 41 fixed to the upper end (end in the Z direction).

The locking member 41 is a plate material having a square shape in a plan view, and an inclined surface 41a is formed on one side on the Y direction side. That is, the length of the locking member 41 in the Y direction is longer on the upper surface than on the lower surface. The button 42 is a substantially cylindrical body and is inserted into the hole 12 of the cover 10. Further, the button 42 is formed with a protrusion 42a so as not to come out of the hole 12. The support shaft 43 is a shaft that swings the lever member 45, and is supported by the base member 60. The spring member 44 is a compression coil spring. One end of the spring member 44 is housed in the spring storage portion 22 formed in the lower part of the mounting table 20, and the other end urges the lower end portion 45a of the lever member 45 to the radial outer side of the cover 10.

That is, in the locking means 40, the spring member 44 urges the lower end portion 45a of the lever member 45 in the −Y direction, so that the lever member 45 rotates about the support shaft 43 and the locking member 41 is Y. Move in the direction. As a result, the locking member 41 locks the mounting object 200 (FIG. 2B). Further, when the button 42 is pressed by the operator, the lower end portion 45a of the lever member 45 resists the pressing force of the spring member 44 and moves in the Y direction. As a result, the locking member 41 moves in the −Y direction, and the mounting object 200 (FIG. 2B) is unlocked.

FIG. 5 is a perspective view of the inside of the fixing jig as viewed from diagonally below. As in the perspective view of FIG. 4, the positioning member 30 shows a state in which it has moved most in the Y direction.
The fastening amount variable means 50 includes a countersunk screw 51 as a fastening member and a lever 52. The lever 52 is composed of a cylindrical body 52a serving as a knob portion and a rectangular parallelepiped base portion 52b extending to the end portion of the cylindrical body 52a. The tip portion 51a of the countersunk screw 51 is fixed to the base portion 52b. Further, the countersunk screw 51 is inserted into the elongated hole 31 (FIGS. 2A and 2B) of the positioning member 30 and is screwed into the mounting table 20. As a result, when the operator rotates the lever 52, the countersunk screw 51 rotates, and the positioning member 30 is tightened or loosened. As a result, the positioning member 30 is fixed to the mounting table 20 or can be moved in the Y direction.

As described above, according to the fixing jig 100 of the first embodiment, the tip portion 51a (FIG. 3) of the countersunk screw 51 is rotated by the lever 52. When the countersunk screw 51 is loosened by the rotation of the lever 52, the positioning member 30 can slide and move in the Y direction. Further, when the countersunk screw 51 tightens the mounting table 20 and the positioning member 30, the positioning member 30 is fixed to the mounting table 20. Further, when the button 42 is pressed by the operator, the locking member 41 is released from the locking member 41, and the mounting object 200 can be replaced. Further, when the button 42 is released, the locking member 41 locks the mounting object 200, and the mounting target 200 is fixed.

Next, a case where the operator adjusts the distance between the positioning member 30 and the locking member 41 while the fixing jig 100 of the embodiment is at a high temperature will be described. When the fixing jig 100 is at a high temperature, the operator cannot directly touch the mounting table 20 or the positioning member 30 with his / her fingers. In order to adjust the distance between the positioning member 30 and the locking member 41 under such a situation, first, the button 42 is pressed with one hand (for example, the left hand) to lock the mounting object 200. While releasing the above, rotate the lever 52 around the countersunk screw 51 with the other hand. As a result, the tip portion 51a of the countersunk screw 51 rotates, and the countersunk screw 51 is loosened. Next, with the operator pressing the button 42, the tweezers or the like is held by the right hand, and the positioning member 30 is moved in the Y direction by the tweezers or the like to replace the mounting object 200. After the replacement, with the button 42 pressed with the left hand, the lever 52 may be rotated with the right hand and the countersunk screw 51 may be tightened.

(Comparative example)
The fixing jig 100 of the first embodiment is provided with a lever 52, and the countersunk screw 51 is tightened or loosened by the rotation of the lever 52. However, the fixing jig of the comparative example is a countersunk by turning a screwdriver. Tighten or loosen the screw 51.
Although the configuration of the fixing jig of the comparative example is not shown, the lever 52 is not provided as compared with the fixing jig 100 of the embodiment. In other words, in the fixing jig 100 of the above embodiment, since the lever 52 is fixed to the tip portion 51a of the countersunk screw 51, the tip portion 51a of the countersunk screw 51 is rotated, whereas the tip portion 51a of the comparative example is compared. The fixing jig differs in that the head of the countersunk screw 51 is rotated. Further, in the fixing jig of the comparative example, the groove rail 21 and the convex rail 32 are not formed.

Next, it is considered that the operator replaces the mounting object 200 with an object having a different size in a heated state in which the fixing jig of the comparative example is heated to a high temperature state.
The operator presses the button 42 with his left hand to release the fixing of the object to be placed 200, grasps the driver with his right hand, turns the countersunk screw 51 with the driver, and loosens the countersunk screw 51. Further, with the button 42 pressed, the operator switches to tweezers or the like with his right hand, moves the positioning member 30 in the Y direction with the tweezers or the like, and replaces the object to be placed 200.
After the replacement, the operator releases the button 42, and with the object 200 fixed, the right hand is switched to the driver, and the operator turns the countersunk screw 51 with the screwdriver and tightens the countersunk screw 51. That is, as compared with the fixing jig 100 of the above embodiment, in the comparative example, the tweezers or the like and the driver are switched with the right hand.

Since the groove rail 21 and the convex rail 32 are not formed in the fixing jig of the comparative example, it is necessary for the operator to move the positioning member 30 in the Y direction while adjusting the rotation angle. In this regard, there is also a method in which the elongated holes 31 formed in the positioning member 30 are arranged in two rows and the countersunk screws 51 are arranged in two rows. However, in the method of using two combinations of the countersunk screw 51 and the elongated hole 31, there is a gap between the outer diameter of the countersunk screw 51 and the hole diameter of the elongated hole 31, so that the rotation angle of the positioning member 30 is deviated. Will occur. In that respect, by using the groove rail 21 and the convex rail 32 as in the above-described embodiment, the positioning member 30 can be slid and moved in parallel without causing a deviation in the rotation angle of the positioning member 30.

(Second Embodiment)
In the first embodiment, the fixing jig 100 is used as a jig for fixing the mounting object 200 to the mounting table 20, but since the mounting surface 20a of the mounting table 20 is mirror-finished, the mounting object 200 is used. The back surface 200b of the mounting object 200 can be observed with the camera 150 during the transporting to the mounting table 20.

FIG. 6 is a block diagram of an observation device according to a second embodiment of the present invention.
The observation device 1000 includes a fixing jig 100, a camera 150, an XYZ stage 160 as a transfer mechanism, and a suction collet 170.
As described in the first embodiment, the fixing jig 100 has a mounting table 20 on which the mounting surface 20a is mirror-polished. The camera 150 is arranged above the mounting table 20. The XYZ stage 160 conveys the object 200 adsorbed by the adsorption collet 170. In the present embodiment, the XYZ stage 160 conveys the mounting object 200 to the mounting surface 20a of the mounting table 20.

As described above, since the mounting surface 20a of the mounting table 20 is mirror-polished, the image of the back surface 200b of the mounting object 200 being transported is reflected. The camera 150 observes the upper surface of the mounting object 200 mounted on the mounting table 20, but in the present embodiment, the reflected image reflected by the mounting surface 20a of the mounting table 20 can also be observed. can. That is, the camera 150 can observe the reflected image of the back surface 200b of the object to be placed 200 being conveyed by the XYZ stage 160. As a result, dust and the like adhering to the back surface 200b during transportation can be confirmed without being reflected by a mirror or the like.

(Modification example)
The present invention is not limited to the above-described embodiment, and various modifications such as the following are possible.
(1) In the fixing jig 100 of the first embodiment, the countersunk screw 51 is rotated by using the lever 52, but the electric motor is used as a fastening amount variable member, and the tip portion of the countersunk screw 51 is used by an actuator such as an electric motor. You may rotate 51a.
(2) The mounting table 20 of the fixing jig 100 of the first embodiment is formed of SKD11 and the mounting surface 20a is mirror-polished, but a non-reflective material or a metal such as stainless steel may be used. .. In SUS304 and SUS304, the roughness is limited to about 0.3 to 0.14. Further, in the observation device 1000 of the second embodiment, although the temperature is limited in a high temperature state, the surface of the mounting portion 20 may be plated and specularly reflected.
(3) Although the camera 150 of the second embodiment is arranged above the mounting table 20, it may be moved above the mounting table 20 by a transport mechanism such as an XYZ stage. That is, the camera 150 is arranged above the mounting surface 20a of the mounting table 20.

10 Cover 20 Mounting base 20a Mounting surface 21 Groove rail 30 Positioning member 31 Long hole 32 Convex rail 40 Locking means 41 Locking member 42 Button 44 Spring member 45 Lever member 50 Leverage member 50 Fastening amount variable means 51 Countersunk screw (fastening member)
51a Tip 52 Lever (Variable fastening amount member)
100 Fixing jig 150 Camera 160 XYZ stage (conveyance mechanism)
200 Object to be placed 200b Back side 1000 Observation device

Claims (4)

A mounting table on which the object to be mounted is placed,
A positioning member that is movable along the mounting surface of the previously described stand and whose end abuts on the previously described object,
A fastening member that fastens the positioning member to the above-mentioned stand, and
A fastening amount variable member for adjusting the fastening amount of the fastening member is provided.
A fixing jig characterized in that the fastening amount variable member is connected to a lower portion of the fastening member and is rotatable around the fastening member. The fixing jig according to claim 1.
The fastening member has a head formed at one end of a screw.
The positioning member is a plate material having an elongated hole through which the screw is inserted.
The screw is screwed into the above-mentioned stand.
The fastening amount variable member is a fixing jig characterized by being a lever fixed to the tip of the screw. The fixing jig according to claim 1 .
A rail for sliding and moving the positioning member in one direction is formed between the positioning member and the above-mentioned pedestal.
The fastening member has a head formed at one end of a screw.
The positioning member is a plate material having an elongated hole through which the screw is inserted.
A fixing jig characterized in that the elongated hole is formed parallel to the rail. The fixing jig according to any one of claims 1 to 3 and the fixing jig.
A transport mechanism that transports the previously described object to the mounting surface of the previously described stand, and
Equipped with a camera located above the above-mentioned mounting surface,
The mounting surface of the above-mentioned stand is mirror-polished.
The camera is an observation device characterized by capturing a reflected image of the back surface of the previously described object while transporting the previously described object.

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