JP7054140B2 - Nozzle clogging inspection method and equipment - Google Patents

Nozzle clogging inspection method and equipment Download PDF

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JP7054140B2
JP7054140B2 JP2018074574A JP2018074574A JP7054140B2 JP 7054140 B2 JP7054140 B2 JP 7054140B2 JP 2018074574 A JP2018074574 A JP 2018074574A JP 2018074574 A JP2018074574 A JP 2018074574A JP 7054140 B2 JP7054140 B2 JP 7054140B2
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nozzle
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flow rate
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賢登 明元
芳和 佐竹
繁博 古池
良光 松本
辰彦 今井
吉則 西田
隆 廣木
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Denso Corp
NIC Autotec Inc
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特許法第30条第2項適用 平成29年10月18日にポートメッセなごや名古屋市国際展示場で開催された「メカトロテックジャパン2017」にて公開Application of Article 30, Paragraph 2 of the Patent Law Published at "Mechatronics Japan 2017" held at Port Messe Nagoya International Exhibition Center on October 18, 2017.

この発明は、金属製品等の種々のワークを洗浄するためのノズルの詰まりを検出する検査方法とノズル詰まり検査装置に関する。 The present invention relates to an inspection method for detecting nozzle clogging for cleaning various workpieces such as metal products and a nozzle clogging inspection device.

従来、高圧洗浄液を噴出するノズルにより、各種のワークを自動的に洗浄する洗浄装置が種々用いられている。洗浄液による自動洗浄は、洗浄工程の効率化に貢献するが、ノズル孔が異物により詰まっていると、洗浄効果が得られず、洗浄工程の前にノズル孔の詰まりを検査する工程が必要であった。この検査工程は、一般に目視により異物の有無を検査したり、洗浄液の圧力や流量を計測して詰まりを検査している。 Conventionally, various cleaning devices that automatically clean various workpieces with a nozzle that ejects a high-pressure cleaning liquid have been used. Automatic cleaning with a cleaning liquid contributes to the efficiency of the cleaning process, but if the nozzle holes are clogged with foreign matter, the cleaning effect cannot be obtained, and a process of inspecting the nozzle holes for clogging is required before the cleaning process. rice field. In this inspection process, the presence or absence of foreign matter is generally visually inspected, and the pressure and flow rate of the cleaning liquid are measured to inspect for clogging.

その他、特許文献1に開示されているように、分析装置の洗浄ノズル詰まりを検知する方法として、吸引ノズルと配管の中間に設けられた電極により、その電極との間の静電容量を測定して詰まりを検知する方法があった。この検知方法は、静電容量が所定の閾値を越えたか否かを検知する検知手段を設け、先ず吸引ノズルに詰りがない場合に、所定の閾値を越える静電容量となるまでの時間を測定する。そして、ノズル詰まり判定時に、所定の閾値を越える静電容量となる時間までとの時間を測り、両者の時間差が所定の時間差閾値以上の場合に、吸引ノズルが詰まっていると判定する検査方法である。 In addition, as disclosed in Patent Document 1, as a method of detecting clogging of the cleaning nozzle of the analyzer, the capacitance between the suction nozzle and the pipe is measured by an electrode provided between the suction nozzle and the pipe. There was a way to detect clogging. In this detection method, a detection means for detecting whether or not the capacitance exceeds a predetermined threshold is provided, and first, when the suction nozzle is not clogged, the time until the capacitance exceeds the predetermined threshold is measured. do. Then, at the time of nozzle clogging determination, the time up to the time when the capacitance exceeds a predetermined threshold is measured, and when the time difference between the two is equal to or greater than the predetermined time difference threshold, it is determined by the inspection method that the suction nozzle is clogged. be.

また、特許文献2に開示されているように、分析装置の分注ノズルの詰まりを検知する方法として、分注ノズルを接続した配管内における分注ノズルの吸引または噴出時の圧力変化を検出し、検出した圧力変化から圧力変化波形の山の数を演算して、演算した山の数に基づいて、分注ノズル内径汚れや詰まりを検出する検出方法も提案されている。 Further, as disclosed in Patent Document 2, as a method of detecting the clogging of the dispensing nozzle of the analyzer, the pressure change at the time of suction or ejection of the dispensing nozzle in the pipe connected to the dispensing nozzle is detected. , A detection method is also proposed in which the number of peaks of the pressure change waveform is calculated from the detected pressure change, and the dispensing nozzle inner diameter is dirty or clogged based on the calculated number of peaks.

国際公開WO2009/001324号公報International Publication WO2009 / 00324 特開2010-14364号公報Japanese Unexamined Patent Publication No. 2010-14364

上記従来の技術のうち目視による検査では、細いノズル孔の場合に見落としが生じる可能性がある上、検査効率も良くないものであった。さらに、見落としや一部のノズル孔の詰まりにより、洗浄結果にバラツキが生じると、製品の品質向上の妨げにもなっていた。そこで、高精度の検査が可能になる特許文献1,2に開示されているような、自動化したノズル詰まり検査方法が求められている。 In the visual inspection among the above-mentioned conventional techniques, oversight may occur in the case of a narrow nozzle hole, and the inspection efficiency is not good. Furthermore, if the cleaning results vary due to oversight or clogging of some nozzle holes, it also hinders the improvement of product quality. Therefore, there is a demand for an automated nozzle clogging inspection method as disclosed in Patent Documents 1 and 2, which enables high-precision inspection.

しかし、特許文献1に開示された検出方法の場合は、測定用に電極を備えるものであり、ノズル孔の数が多い場合には、構造が複雑になり、検査装置のコストも上昇すると言う問題がある。さらに、洗浄液が電極に達する時間を比較するので、微妙な差を捉えにくく、特に細いノズルで高圧の洗浄液を噴射する装置の場合には、ノズルの詰まりを検出することは難しいものである。 However, in the case of the detection method disclosed in Patent Document 1, an electrode is provided for measurement, and if the number of nozzle holes is large, the structure becomes complicated and the cost of the inspection device increases. There is. Furthermore, since the time it takes for the cleaning liquid to reach the electrodes is compared, it is difficult to capture subtle differences, and it is difficult to detect nozzle clogging, especially in the case of a device that injects a high-pressure cleaning liquid with a thin nozzle.

特許文献2に開示されたノズル詰まりの検査方法は、ノズルの吸引又は噴出時の圧力の変化を検知しているが、ノズルに繋がる配管内の圧力の変化は微妙であり、特許文献1の場合と同様に、ノズルが細い場合や多数のノズルを備えた装置の場合、ノズルの詰まりを正確に検出することは難しいものであった。 The nozzle clogging inspection method disclosed in Patent Document 2 detects a change in pressure at the time of suction or ejection of the nozzle, but the change in pressure in the pipe connected to the nozzle is subtle, and in the case of Patent Document 1. Similarly, in the case of a device having a thin nozzle or a device having a large number of nozzles, it is difficult to accurately detect the clogging of the nozzles.

この発明は、上記従来技術の問題に鑑みて成されたもので、比較的簡単な方法でコストが掛からず、容易に正確な検査が可能なノズル詰まり検査方法と装置を提供することを目的とする。 The present invention has been made in view of the above-mentioned problems of the prior art, and an object of the present invention is to provide a nozzle clogging inspection method and an apparatus capable of easily and accurately inspecting by a relatively simple method at low cost. do.

この発明は、複数の洗浄ノズルを備えた洗浄装置の前記洗浄ノズルの詰まりを検知するノズル詰まり検査方法であって、前記洗浄ノズルの詰まりがない状態で、前記洗浄ノズルへの洗浄液の流量の、一定時間内での複数回の測定結果の初期積算値を、通常状態での閾値とし、ノズル詰まりの測定時に、洗浄液の流量が一定になった後の前記流量を前記一定時間内で複数回測定する測定ステップと、前記複数回の測定結果を積算して測定積算値を演算する測定値積算ステップと、前記測定値積算ステップを複数回繰り返して前記測定積算値の平均値である積算平均値を求める積算平均値算出ステップと、前記積算平均値をノズル詰まりのない通常状態の前記閾値と比較して、所定値以上の差がある場合にノズル詰まりと判断するノズル詰まり判定ステップとを備えたノズル詰まり検査方法である。 The present invention is a nozzle clogging inspection method for detecting clogging of the cleaning nozzle of a cleaning device provided with a plurality of cleaning nozzles, wherein the flow rate of the cleaning liquid to the cleaning nozzle is not clogged. The initial integrated value of the results of multiple measurements within a fixed time is used as the threshold value in the normal state, and the flow rate after the flow rate of the cleaning liquid becomes constant at the time of measuring nozzle clogging is measured multiple times within the fixed time. The measurement step to be performed, the measurement value integration step for integrating the measurement results of the plurality of times to calculate the measurement integration value, and the measurement value integration step are repeated a plurality of times to obtain the integrated average value which is the average value of the measurement integration values. A nozzle provided with a step of calculating the integrated average value to be obtained and a nozzle clogging determination step of comparing the integrated average value with the threshold value in a normal state without nozzle clogging and determining that the nozzle is clogged when there is a difference of a predetermined value or more. It is a clogging inspection method.

前記ノズル詰まりの測定は、前記洗浄液の流量が一定になった直後に行い、前記測定ステップを40回以上の回数で行い、前記測定結果を積算するものである。また、前記ノズル詰まりの測定時に、前記測定値積算ステップを10回以上の回数で行うと良い。 The nozzle clogging is measured immediately after the flow rate of the cleaning liquid becomes constant, the measurement step is performed 40 times or more, and the measurement results are integrated. Further, when measuring the nozzle clogging, it is preferable to perform the measured value integration step 10 times or more.

さらに、通常状態での前記閾値は、前記洗浄ノズルに供給する前記洗浄液の圧力を一定の範囲に維持し、ノズル詰まりがない状態で、前記洗浄液の流量が一定になった後の前記流量を一定時間内で複数回測定して測定結果の初期積算値を演算し、前記一定時間内での複数回の測定結果の前記初期積算値の演算を複数回繰り返して、ノズル詰まりがない状態での前記初期積算値の初期平均値を求め、この初期平均値をノズル詰まりのない通常状態での閾値とするものである。 Further, the threshold value in the normal state keeps the pressure of the cleaning liquid supplied to the cleaning nozzle within a constant range, and keeps the flow rate after the flow rate of the cleaning liquid becomes constant in a state where the nozzle is not clogged. The initial integrated value of the measurement result is calculated by measuring multiple times within the time, and the calculation of the initial integrated value of the multiple measurement results within the fixed time is repeated a plurality of times, and the nozzle is not clogged. The initial average value of the initial integrated value is obtained, and this initial average value is used as the threshold value in the normal state without nozzle clogging.

またこの発明は、複数の洗浄ノズルを備えた洗浄装置の前記洗浄ノズルの詰まりを検知するノズル詰まり検査装置であって、洗浄液を供給するポンプと、前記ポンプに接続された配管とを有する洗浄液供給部材と、前記配管の途中に設けられ、前記洗浄ノズルに供給する前記洗浄液の圧力を一定の範囲に維持する定圧制御装置と、前記洗浄ノズルに供給される前記洗浄液の流量を検出する流量センサと、前記流量センサの出力を記憶するとともに、記憶した前記流量を積算し、前記積算した値の平均値を算出する演算処理装置とを備え、前記演算処理装置は、前記洗浄ノズルの詰まりがない状態で、前記流量の一定時間内での複数回の測定結果の初期積算値を通常状態での閾値とし、ノズル詰まりの測定時に、前記洗浄液の流量が一定になった後の前記流量を前記一定時間内で複数回測定し、測定結果の測定積算値を演算して、これを複数回繰り返して前記測定積算値の平均値である積算平均値を求め、前記積算平均値をノズル詰まりのない通常状態の前記閾値と比較して、所定値以上の差がある場合にノズル詰まりと判断するノズル詰まり検査装置である。 Further, the present invention is a nozzle clogging inspection device for detecting clogging of the cleaning nozzle of a cleaning device provided with a plurality of cleaning nozzles, the cleaning liquid supply having a pump for supplying the cleaning liquid and a pipe connected to the pump. A member, a constant pressure control device provided in the middle of the pipe and maintaining the pressure of the cleaning liquid supplied to the cleaning nozzle within a certain range, and a flow sensor for detecting the flow rate of the cleaning liquid supplied to the cleaning nozzle. A state in which the output of the flow sensor is stored, the stored flow rate is integrated, and an arithmetic processing device for calculating the average value of the integrated values is provided. The arithmetic processing apparatus is in a state where the cleaning nozzle is not clogged. Then, the initial integrated value of the measurement results of a plurality of times within a fixed time of the flow rate is set as the threshold value in the normal state, and the flow rate after the flow rate of the cleaning liquid becomes constant at the time of measuring the nozzle clogging is used for the fixed time. Measured multiple times within, calculate the measured integrated value of the measurement result, repeat this multiple times to obtain the integrated average value which is the average value of the measured integrated value, and the integrated average value is in a normal state without nozzle clogging. This is a nozzle clogging inspection device for determining nozzle clogging when there is a difference of a predetermined value or more as compared with the above-mentioned threshold value.

この発明のノズル詰まり検査方法と装置によれば、簡単な方法で検査対象の洗浄ノズルの詰まりを正確に検出することができ、洗浄ノズルに多数のノズル孔を備えた洗浄装置でも、一つのノズル孔の詰まりでも正確に検出することができる。これにより、洗浄ノズルによる洗浄工程の自動化をより効率化することができ、洗浄作業効率をさらに高くすることができる。さらに、洗浄ノズルの詰まりのない状態で確実な洗浄が可能となり、洗浄不良をなくすことができ、不良品の発生を防止し、洗浄品の品質を安定させることができる。 According to the nozzle clogging inspection method and device of the present invention, clogging of the cleaning nozzle to be inspected can be accurately detected by a simple method, and even in a cleaning device having a large number of nozzle holes in the cleaning nozzle, one nozzle is used. Even if the hole is clogged, it can be detected accurately. As a result, the automation of the cleaning process by the cleaning nozzle can be made more efficient, and the cleaning work efficiency can be further improved. Further, reliable cleaning can be performed without clogging of the cleaning nozzle, cleaning defects can be eliminated, the occurrence of defective products can be prevented, and the quality of the cleaned products can be stabilized.

この発明の一実施形態のノズル詰まり検査装置の配管図である。It is a piping diagram of the nozzle clogging inspection apparatus of one Embodiment of this invention. この実施形態のノズル詰まり検査方法により検査される洗浄ノズルを備えた洗浄装置の正面図である。It is a front view of the cleaning apparatus provided with the cleaning nozzle which is inspected by the nozzle clogging inspection method of this embodiment. この実施形態のノズル詰まり検査方法により検査される洗浄ノズルを示す縦断面図(a)、上面図(b)である。It is a vertical sectional view (a) and a top view (b) which show the cleaning nozzle inspected by the nozzle clogging inspection method of this embodiment. この実施形態のノズル詰まり検査方法を示すフローチャートである。It is a flowchart which shows the nozzle clogging inspection method of this embodiment.

以下、この発明のノズル詰まり検査方法とノズル詰まり検査装置の一実施形態について、図1~図4を基にして説明する。この実施形態のノズル詰まり検査装置10は、種々の金属製品である加工品12の内面12a及び外面12bの塵や汚れを除去する洗浄装置14の洗浄ノズル20の詰まりを検査するものである。 Hereinafter, an embodiment of the nozzle clogging inspection method and the nozzle clogging inspection apparatus of the present invention will be described with reference to FIGS. 1 to 4. The nozzle clogging inspection device 10 of this embodiment inspects the clogging of the cleaning nozzle 20 of the cleaning device 14 for removing dust and dirt on the inner surface 12a and the outer surface 12b of the processed product 12 which is various metal products.

ノズル詰まり検査装置10によりノズル詰まりが検査される洗浄装置14は、図2に示すように、略矩形の筐体15内に各装置が配置され、筐体15のフレーム16に各装置が取り付けられている。筐体15内上部の洗浄部17には、回転軸を中心に複数、例えば3個の洗浄用カバー筒18が、同心状に水平方向に回動可能に設けられ、洗浄用カバー筒18内に、ノズル部材22が収容されている。洗浄用カバー筒18内では、ノズル部材22が洗浄用カバー筒18の中心軸を中心に、回転可能に設けられている。筐体15の側方には、後述する制御部46等が設けられ、制御部46及び図示しない演算処理装置は、後述する演算結果等を表示するモニタ19に接続されている。また、筐体15の上部に液晶ディプレイを配置して、演算結果等を表示するようにしても良い。 As shown in FIG. 2, in the cleaning device 14 in which nozzle clogging is inspected by the nozzle clogging inspection device 10, each device is arranged in a substantially rectangular housing 15, and each device is attached to a frame 16 of the housing 15. ing. A plurality of, for example, three cleaning cover cylinders 18 are concentrically rotatably provided in the cleaning portion 17 at the upper part of the housing 15 in the cleaning cover cylinder 18 around the axis of rotation. , The nozzle member 22 is housed. In the cleaning cover cylinder 18, the nozzle member 22 is rotatably provided around the central axis of the cleaning cover cylinder 18. A control unit 46 and the like, which will be described later, are provided on the side of the housing 15, and the control unit 46 and an arithmetic processing unit (not shown) are connected to a monitor 19 for displaying an arithmetic result and the like, which will be described later. Further, a liquid crystal display may be arranged on the upper part of the housing 15 to display the calculation result or the like.

洗浄装置18の洗浄部17には、図2、図3に示すように、加工品12や洗浄用カバー筒18内壁に向けてノズル孔24が多数形成されたノズル部材22が設けられている。ノズル部材22は、中空状に形成されて内部空間23を有し、コ字状に組み立てられ、回転可能に洗浄装置14の洗浄部17に取り付けられている。コ字状のノズル部材22は、図3に示すように、一対の垂直部22a,22bと、1本の水平部22cとを備えている。一方の垂直部22aには、図面上で斜め下方に洗浄液Wを噴射する複数のノズル孔24が内外面に形成され、他方の垂直部22bには、水平方向内側に向いて洗浄液Wを噴射するノズル孔24と、斜め下方外方に洗浄液Wを噴射するノズル孔24が設けられている。さらに、水平部22cにも、洗浄液Wを真下に噴射するノズル孔24が形成されている。 As shown in FIGS. 2 and 3, the cleaning unit 17 of the cleaning device 18 is provided with a nozzle member 22 having a large number of nozzle holes 24 formed toward the inner wall of the processed product 12 and the cleaning cover cylinder 18. The nozzle member 22 is formed in a hollow shape and has an internal space 23, is assembled in a U shape, and is rotatably attached to the cleaning portion 17 of the cleaning device 14. As shown in FIG. 3, the U-shaped nozzle member 22 includes a pair of vertical portions 22a and 22b and a single horizontal portion 22c. A plurality of nozzle holes 24 for injecting the cleaning liquid W diagonally downward on the drawing are formed on the inner and outer surfaces of one vertical portion 22a, and the cleaning liquid W is injected diagonally inward on the other vertical portion 22b. A nozzle hole 24 and a nozzle hole 24 for injecting the cleaning liquid W diagonally downward and outward are provided. Further, the horizontal portion 22c is also formed with a nozzle hole 24 for injecting the cleaning liquid W directly below.

ノズル部材22の水平部22cの中央部には、垂直下方に延びた中心ノズル部22dが設けられ、中心ノズル部22dも、内部空間23を有し水平方向及び下端部から洗浄液Wを噴射するノズル孔24と、下端部から下方に噴射するノズル孔24が設けられている。ノズル部材22の一方の垂直部22aの上端部には、側方から斜め下に洗浄液Wを噴射する上方ノズル部25が設けられ、ノズル孔24が下方を向いて形成されている。ノズル部材22は、垂直方向に設けられた回転軸26に回転自在に取り付けられ、図示しない駆動装置により、所定の回転数で回転する。 A central nozzle portion 22d extending vertically downward is provided in the central portion of the horizontal portion 22c of the nozzle member 22, and the central nozzle portion 22d also has an internal space 23 and is a nozzle that injects the cleaning liquid W from the horizontal direction and the lower end portion. A hole 24 and a nozzle hole 24 for ejecting downward from the lower end portion are provided. An upper nozzle portion 25 for injecting the cleaning liquid W diagonally downward from the side is provided at the upper end portion of one vertical portion 22a of the nozzle member 22, and the nozzle hole 24 is formed so as to face downward. The nozzle member 22 is rotatably attached to a rotation shaft 26 provided in the vertical direction, and is rotated at a predetermined rotation speed by a drive device (not shown).

回転軸26は、筒状に形成され、洗浄液Wの入り口29が設けられ、図示しない配管が接続されている。回転軸26の内部空間27は、水平部22cの内部空間23に連通し、水平部22cの内部空間23は、垂直部22a,22b及び中心ノズル部22dの各内部空間23に連通し、各々のノズル孔24に繋がっている。また、中心ノズル部22dと対向するように、洗浄部17の底面に、底洗浄部28が設けられ、底洗浄部28も中空に形成されて内部空間23を有し、上方に開口したノズル孔24が形成されている。底洗浄部28には、中心ノズル部22dに対向した裏面側に、洗浄液Wの入り口29が設けられ、図示しない配管が接続されている。 The rotary shaft 26 is formed in a cylindrical shape, is provided with an inlet 29 for the cleaning liquid W, and is connected to a pipe (not shown). The internal space 27 of the rotation shaft 26 communicates with the internal space 23 of the horizontal portion 22c, and the internal space 23 of the horizontal portion 22c communicates with the internal spaces 23 of the vertical portions 22a and 22b and the central nozzle portion 22d, respectively. It is connected to the nozzle hole 24. Further, a bottom cleaning portion 28 is provided on the bottom surface of the cleaning portion 17 so as to face the central nozzle portion 22d, and the bottom cleaning portion 28 is also formed hollow to have an internal space 23, and a nozzle hole opened upward. 24 is formed. The bottom cleaning portion 28 is provided with an inlet 29 for the cleaning liquid W on the back surface side facing the central nozzle portion 22d, and a pipe (not shown) is connected to the bottom cleaning portion 28.

洗浄装置14内には、図1の配管図に示すように、洗浄液Wを供給するポンプ30と、ポンプ30に接続された供給配管32が設けられている。ポンプ30と供給配管32は、洗浄液供給部材を構成している。ポンプ30は、洗浄液Wを溜めた洗浄液タンク34に、吸引管35を介して接続されている。供給配管32は、ポンプ30から洗浄ノズル20まで設けられ、途中に洗浄液Wをろ過するフィルタ36が設けられている。 As shown in the piping diagram of FIG. 1, the cleaning device 14 is provided with a pump 30 for supplying the cleaning liquid W and a supply pipe 32 connected to the pump 30. The pump 30 and the supply pipe 32 constitute a cleaning liquid supply member. The pump 30 is connected to the cleaning liquid tank 34 in which the cleaning liquid W is stored via a suction pipe 35. The supply pipe 32 is provided from the pump 30 to the cleaning nozzle 20, and a filter 36 for filtering the cleaning liquid W is provided on the way.

供給配管32のフィルタ36の下流側には、定圧制御装置40が設けられている。定圧制御装置40は、供給配管32の流量を検知する流量センサ42、供給配管32の洗浄液Wの圧力を検知する圧力センサ44、流量センサ42とフィルタ36との間に接続された比例弁45、及び比例弁45を制御するPLC等の制御部46から成る。比例弁45は、圧力センサ44の信号を基に、制御部46により弁の開度が制御される。制御は、供給配管32の洗浄液Wの圧力を一定の範囲になるように、洗浄液Wの圧力高いときは開度を上げて、圧力が下がるように調整される。比例弁45には、洗浄液タンク34に洗浄液Wを戻す戻し配管47が接続され、洗浄液Wを戻し配管47に戻すことにより、供給配管32の圧力を調整する。圧力センサ44と洗浄ノズル20との間には、洗浄液バルブ43設けられ、洗浄部17への洗浄液Wの供給及び停止を切り替え可能に形成されている。 A constant pressure control device 40 is provided on the downstream side of the filter 36 of the supply pipe 32. The constant pressure control device 40 includes a flow rate sensor 42 that detects the flow rate of the supply pipe 32, a pressure sensor 44 that detects the pressure of the cleaning liquid W of the supply pipe 32, and a proportional valve 45 connected between the flow rate sensor 42 and the filter 36. It also includes a control unit 46 such as a PLC that controls the proportional valve 45. The opening degree of the proportional valve 45 is controlled by the control unit 46 based on the signal of the pressure sensor 44. The control is adjusted so that the pressure of the cleaning liquid W of the supply pipe 32 is within a certain range, and when the pressure of the cleaning liquid W is high, the opening degree is increased and the pressure is decreased. A return pipe 47 for returning the cleaning liquid W to the cleaning liquid tank 34 is connected to the proportional valve 45, and the pressure of the supply pipe 32 is adjusted by returning the cleaning liquid W to the return pipe 47. A cleaning liquid valve 43 is provided between the pressure sensor 44 and the cleaning nozzle 20, and is formed so that the supply and stop of the cleaning liquid W to the cleaning unit 17 can be switched.

さらに、ポンプ30に接続された供給配管32には、リリーフバルブ48が接続され、リリーフバルブ48は、洗浄液タンク34にリリーフ配管49を介して接続され、待機時のリリーフ動作により、洗浄液Wが洗浄液タンク34に戻される。また、洗浄部17と洗浄液タンク34の間には、排出管38が設けられ、洗浄用カバー筒18内で使用された洗浄液Wは、洗浄液タンク34に戻されて循環可能に形成されている。 Further, a relief valve 48 is connected to the supply pipe 32 connected to the pump 30, the relief valve 48 is connected to the cleaning liquid tank 34 via the relief pipe 49, and the cleaning liquid W is cleaned by the relief operation during standby. It is returned to the tank 34. Further, a discharge pipe 38 is provided between the cleaning unit 17 and the cleaning liquid tank 34, and the cleaning liquid W used in the cleaning cover cylinder 18 is returned to the cleaning liquid tank 34 and is formed so as to be circulated.

定圧制御装置40は、流量センサ42の出力を記憶するとともに、記憶した流量を積算し、積算した値の平均値を算出する図示しない演算処理装置を備えている。演算処理装置は、ノズル詰まりがない状態で、洗浄液Wの流量が一定になった後、洗浄液Wの流量が一定になった直後、例えばポンプ30の作動1.5秒後の流量を、一定期間、例えば2秒間で複数回、例えば1/100秒毎に200回測定し、測定結果を積算し、さらにこの積算動作を20回繰り返して積算値の平均を算出するプログラムを有する。 The constant pressure control device 40 includes an arithmetic processing unit (not shown) that stores the output of the flow rate sensor 42, integrates the stored flow rates, and calculates the average value of the integrated values. The arithmetic processing device sets the flow rate of the cleaning liquid W immediately after the flow rate of the cleaning liquid W becomes constant, for example, 1.5 seconds after the operation of the pump 30, for a certain period of time in a state where the nozzle is not clogged. For example, there is a program that measures a plurality of times in 2 seconds, for example, 200 times every 1/100 second, integrates the measurement results, and repeats this integration operation 20 times to calculate the average of the integrated values.

次に、この実施形態の定圧制御装置40によるノズル詰まり検査方法について説明する。定圧制御装置40は、ノズル詰まりによる流量低下を検出するために、フィルタ36の目詰まりによる圧力損失を打ち消すように制御する。洗浄ノズル20の流量は下記式(1)により算出される。
Q=0.658×√p×n×d22 (1)
ここで、流量:Q L/min、圧力:p MPa、穴数:n 個、穴径:d mm、係数:η
式(1)より、洗浄ノズル20は、ノズル孔径、係数が一定であるので、圧力を一定に制御できれば、流量の低下分が、ノズル孔の詰まりとすることができる。そこで、先ず、ノズル詰まりの判別をするための閾値を求める。閾値は、ノズル詰まりのない状態での供給配管32の流量の値であり、次のように求める。
Next, a nozzle clogging inspection method using the constant pressure control device 40 of this embodiment will be described. The constant pressure control device 40 controls so as to cancel the pressure loss due to the clogging of the filter 36 in order to detect the decrease in the flow rate due to the clogging of the nozzle. The flow rate of the cleaning nozzle 20 is calculated by the following formula (1).
Q = 0.658 × √p × n × d 2 / η 2 (1)
Here, flow rate: QL / min, pressure: p MPa, number of holes: n, hole diameter: d mm, coefficient: η
From the formula (1), since the nozzle hole diameter and the coefficient of the cleaning nozzle 20 are constant, if the pressure can be controlled to be constant, the decrease in the flow rate can be regarded as the clogging of the nozzle hole. Therefore, first, a threshold value for determining nozzle clogging is obtained. The threshold value is the value of the flow rate of the supply pipe 32 in a state where the nozzle is not clogged, and is obtained as follows.

洗浄ノズル20の詰まりがないことを目視等により確認した後、ポンプ30を作動させ、洗浄ノズル20に洗浄液Wの供給を開始する。供給配管32の流量は、ポンプ30の作動後、例えば1.5秒でほぼ一定になる。洗浄液Wの流量が一定になった後、定圧制御装置40は、供給配管32の流量を流量センサ42により、例えば2秒間で1/100秒毎に測定し、測定結果を積算する。ここで積算した値を、初期積算値として記憶し、これを一定サイクル繰り返す。例えば40秒間で、積算結果の初期積算値を求める演算を、20回繰り返す。そして、ノズル詰まりがない状態での40秒間で、20サイクルの初期積算値の平均値である初期平均値を求める。定圧制御装置40は、この初期平均値を、ノズル詰まりのない通常状態での閾値として記憶する。なお、ノズル詰まりのない通常状態での閾値は、上記以外に、後のノズル詰まり検査の閾値になる値であれば、1回の演算により求めた閾値でも良い。 After visually confirming that the cleaning nozzle 20 is not clogged, the pump 30 is operated to start supplying the cleaning liquid W to the cleaning nozzle 20. The flow rate of the supply pipe 32 becomes substantially constant, for example, 1.5 seconds after the operation of the pump 30. After the flow rate of the cleaning liquid W becomes constant, the constant pressure control device 40 measures the flow rate of the supply pipe 32 by the flow rate sensor 42, for example, every 1/100 second for 2 seconds, and integrates the measurement results. The integrated value here is stored as an initial integrated value, and this is repeated for a certain cycle. For example, in 40 seconds, the operation of obtaining the initial integrated value of the integrated result is repeated 20 times. Then, the initial average value, which is the average value of the initial integrated values of 20 cycles, is obtained in 40 seconds without nozzle clogging. The constant pressure control device 40 stores this initial average value as a threshold value in a normal state without nozzle clogging. In addition to the above, the threshold value in the normal state without nozzle clogging may be a threshold value obtained by one calculation as long as it is a value that becomes the threshold value for the subsequent nozzle clogging inspection.

次に、加工品12の洗浄を行う際に、事前にノズル詰まり検査を実行する。ノズル詰まり検査は、図4のフローチャートに示すように、ポンプ30を作動させて、洗浄液Wの供給を開始して、例えば流量が一定になる1.5秒経過したところで、流量センサ42からの流量データを一定期間毎、例えば1/100秒毎に測定して取得する(s1)。この流量データの取得を一定期間、例えば2秒間行い、流量データの取得を停止する(s2)。流量データは、ここでは200個であり多い方が良いが、微妙な流量の変化が顕在化する個数であれば良く、40個以上あれば良い。この流量データの取得を一定期間行う測定ステップの後、測定結果の全ての値を積算し、これを測定積算値として内部メモリに記憶する(s3)。 Next, when cleaning the processed product 12, a nozzle clogging inspection is performed in advance. In the nozzle clogging inspection, as shown in the flowchart of FIG. 4, the pump 30 is operated, the supply of the cleaning liquid W is started, and for example, 1.5 seconds after the flow rate becomes constant, the flow rate from the flow rate sensor 42 has elapsed. Data is measured and acquired at regular intervals, for example, every 1/100 second (s1). The acquisition of the flow rate data is performed for a certain period of time, for example, 2 seconds, and the acquisition of the flow rate data is stopped (s2). Here, the flow rate data should be as many as 200, but any number may be sufficient as long as the number of subtle changes in the flow rate becomes apparent, and 40 or more may be sufficient. After the measurement step in which the flow rate data is acquired for a certain period of time, all the values of the measurement results are integrated and stored in the internal memory as the measured integrated values (s3).

さらに、上述の測定積算値を演算する測定値積算ステップを複数回、例えば20回繰り返して、測定積算値の平均値である積算平均値を求める(s4)。積算値の取得も、多い方が良いが、少なくとも10個以上であれば良い。そして、積算平均値を求める積算平均値算出ステップの後、その積算平均値を、ノズル詰まりのない通常状態の閾値と比較して、両者の差が所定の異常発報値を越えた場合、ノズル詰まりと判断する。ノズル詰まりと判断されると、洗浄装置14の演算処理装置は異常を発報する(s5)。異常を発報するノズル詰まり判定ステップでは、モニタ19に異常を表示しても良く、別の表示装置や音等で発報しても良い。 Further, the measured value integration step for calculating the above-mentioned measured integrated value is repeated a plurality of times, for example, 20 times to obtain an integrated average value which is an average value of the measured integrated values (s4). It is better to acquire a large number of integrated values, but it is sufficient if at least 10 or more are acquired. Then, after the integrated average value calculation step for obtaining the integrated average value, the integrated average value is compared with the threshold value in the normal state without nozzle clogging, and when the difference between the two exceeds a predetermined abnormal alarm value, the nozzle Judge as a blockage. When it is determined that the nozzle is clogged, the arithmetic processing unit of the cleaning device 14 issues an abnormality (s5). In the nozzle clogging determination step for notifying an abnormality, the abnormality may be displayed on the monitor 19, or the abnormality may be notified by another display device, sound, or the like.

この実施形態のノズル詰まり検査方法と装置によれば、簡単な方法で検査対象である洗浄装置14の洗浄ノズル20のノズル孔24の詰まりを、正確に検出することができる。特に、多数のノズル孔24を備えた洗浄ノズル20において、一つのノズル孔24の詰まりでも正確に検出することができる。これにより、洗浄ノズル20による洗浄工程をより正確且つ効率よく行うことができる。また、洗浄装置14の自動化をより進めることができ、洗浄作業効率をさらに高くすることができる。しかも、洗浄ノズル20の詰まりのない状態で確実な洗浄が可能となり、洗浄不良をなくすことができ、加工品12の洗浄不良等の不良の発生を防止し、品質を安定させることができる。 According to the nozzle clogging inspection method and device of this embodiment, clogging of the nozzle hole 24 of the cleaning nozzle 20 of the cleaning device 14 to be inspected can be accurately detected by a simple method. In particular, in the cleaning nozzle 20 provided with a large number of nozzle holes 24, even if one nozzle hole 24 is clogged, it can be accurately detected. Thereby, the cleaning process by the cleaning nozzle 20 can be performed more accurately and efficiently. In addition, the automation of the cleaning device 14 can be further promoted, and the cleaning work efficiency can be further improved. Moreover, reliable cleaning is possible without clogging of the cleaning nozzle 20, cleaning defects can be eliminated, defects such as cleaning defects of the processed product 12 can be prevented, and quality can be stabilized.

なお、この発明のノズル詰まり検査方法と装置は上記実施形態に限定されるものではなく、流量を積算する期間や回数は適宜設定されるものであり、積算値の平均を取るための積算の繰り返し数も適宜選定可能なものである。 The nozzle clogging inspection method and apparatus of the present invention are not limited to the above-described embodiment, and the period and the number of times for integrating the flow rate are appropriately set, and the integration is repeated to take the average of the integrated values. The number can be selected as appropriate.

10 ノズル詰まり検査装置
12 加工品
14 洗浄装置
17 洗浄部
18 洗浄用カバー筒
20 洗浄ノズル
22 ノズル部材
24 ノズル孔
30 ポンプ
32 供給配管
40 定圧制御装置
42 流量センサ42
44 圧力センサ
45 比例弁
46 制御部
W 洗浄液
10 Nozzle clogging inspection device 12 Processed product 14 Cleaning device 17 Cleaning unit 18 Cleaning cover cylinder 20 Cleaning nozzle 22 Nozzle member 24 Nozzle hole 30 Pump 32 Supply pipe 40 Constant pressure control device 42 Flow sensor 42
44 Pressure sensor 45 Proportional valve 46 Control unit W Cleaning liquid

Claims (5)

複数の洗浄ノズルを備えた洗浄装置の前記洗浄ノズルの詰まりを検知するノズル詰まり検査方法であって、
前記洗浄ノズルの詰まりがない状態で、前記洗浄ノズルへの洗浄液の流量の、一定時間内での複数回の測定結果の初期積算値を通常状態での閾値とし、
ノズル詰まりの測定時に、洗浄液の流量が一定になった後の前記流量を前記一定時間内で複数回測定する測定ステップと、前記複数回の測定結果を積算して測定積算値を演算する測定値積算ステップと、前記測定値積算ステップを複数回繰り返して前記測定積算値の平均値である積算平均値を求める積算平均値算出ステップと、前記積算平均値をノズル詰まりのない通常状態の前記閾値と比較して、所定値以上の差がある場合にノズル詰まりと判断するノズル詰まり判定ステップとを備えたことを特徴とするノズル詰まり検査方法。
A nozzle clogging inspection method for detecting clogging of the cleaning nozzles of a cleaning device provided with a plurality of cleaning nozzles.
When the cleaning nozzle is not clogged, the initial integrated value of the measurement results of the flow rate of the cleaning liquid to the cleaning nozzle a plurality of times within a certain period of time is set as the threshold value in the normal state.
At the time of measuring nozzle clogging, a measurement step in which the flow rate after the flow rate of the cleaning liquid becomes constant is measured a plurality of times within the fixed time, and a measurement value in which the measurement results are integrated and the measured integrated value is calculated. The integration step, the integrated average value calculation step for obtaining the integrated average value which is the average value of the measured integrated values by repeating the measured value integration step a plurality of times, and the integrated average value as the threshold value in a normal state without nozzle clogging. A nozzle clogging inspection method comprising a nozzle clogging determination step for determining a nozzle clogging when there is a difference of a predetermined value or more in comparison.
前記ノズル詰まりの測定は、前記洗浄液の流量が一定になった直後に行い、前記測定ステップを40回以上の回数で行い、前記測定結果を積算する請求項1記載のノズル詰まり検査方法。 The nozzle clogging inspection method according to claim 1, wherein the nozzle clogging is measured immediately after the flow rate of the cleaning liquid becomes constant, the measurement step is performed 40 times or more, and the measurement results are integrated. 前記ノズル詰まりの測定時に、前記測定値積算ステップを10回以上の回数で行う請求項1又は2記載のノズル詰まり検査方法。 The nozzle clogging inspection method according to claim 1 or 2, wherein the measured value integration step is performed 10 times or more at the time of measuring the nozzle clogging. 通常状態での前記閾値は、前記洗浄ノズルに供給する前記洗浄液の圧力を一定の範囲に維持し、ノズル詰まりがない状態で、前記洗浄液の流量が一定になった後の前記流量を一定時間内で複数回測定して測定結果の初期積算値を演算し、前記一定時間内での複数回の測定結果の前記初期積算値の演算を複数回繰り返して、ノズル詰まりがない状態での前記初期積算値の初期平均値を求め、この初期平均値をノズル詰まりのない通常状態での閾値とする1、2又は3記載のノズル詰まり検査方法。 The threshold value in the normal state maintains the pressure of the cleaning liquid supplied to the cleaning nozzle within a certain range, and the flow rate after the flow rate of the cleaning liquid becomes constant in a state where the nozzle is not clogged is within a certain period of time. The initial integrated value of the measurement result is calculated by measuring multiple times with, and the calculation of the initial integrated value of the multiple measurement results within a certain period of time is repeated a plurality of times to perform the initial integrated value without nozzle clogging. The nozzle clogging inspection method according to 1, 2 or 3, wherein an initial average value of values is obtained, and this initial average value is used as a threshold value in a normal state without nozzle clogging. 複数の洗浄ノズルを備えた洗浄装置の前記洗浄ノズルの詰まりを検知するノズル詰まり検査装置であって、
洗浄液を供給するポンプと、前記ポンプに接続された配管とを有する洗浄液供給部材と、
前記配管の途中に設けられ、前記洗浄ノズルに供給する前記洗浄液の圧力を一定の範囲に維持する定圧制御装置と、
前記洗浄ノズルに供給される前記洗浄液の流量を検出する流量センサと、
前記流量センサの出力を記憶するとともに、記憶した前記流量を積算し、前記積算した値の平均値を算出する演算処理装置とを備え、
前記演算処理装置は、
前記洗浄ノズルの詰まりがない状態で、前記流量の一定時間内での複数回の測定結果の初期積算値を通常状態での閾値とし、
ノズル詰まりの測定時に、前記洗浄液の流量が一定になった後の前記流量を前記一定時間内で複数回測定し、測定結果の測定積算値を演算して、これを複数回繰り返して前記測定積算値の平均値である積算平均値を求め、前記積算平均値をノズル詰まりのない通常状態の前記閾値と比較して、所定値以上の差がある場合にノズル詰まりと判断することを特徴とするノズル詰まり検査装置。
A nozzle clogging inspection device for detecting clogging of the cleaning nozzle of a cleaning device provided with a plurality of cleaning nozzles.
A cleaning liquid supply member having a pump for supplying the cleaning liquid and a pipe connected to the pump, and a cleaning liquid supply member.
A constant pressure control device provided in the middle of the pipe and maintaining the pressure of the cleaning liquid supplied to the cleaning nozzle within a certain range.
A flow rate sensor that detects the flow rate of the cleaning liquid supplied to the cleaning nozzle, and
It is provided with an arithmetic processing unit that stores the output of the flow rate sensor, integrates the stored flow rate, and calculates the average value of the integrated values.
The arithmetic processing unit is
With the cleaning nozzle not clogged, the initial integrated value of the results of multiple measurements of the flow rate within a certain period of time is set as the threshold value in the normal state.
At the time of measuring nozzle clogging, the flow rate after the flow rate of the cleaning liquid becomes constant is measured a plurality of times within the fixed time, the measurement integrated value of the measurement result is calculated, and this is repeated a plurality of times to perform the measurement integration. The integrated average value, which is the average value of the values, is obtained, the integrated average value is compared with the threshold value in a normal state without nozzle clogging, and when there is a difference of a predetermined value or more, it is determined that the nozzle is clogged. Nozzle clogging inspection device.
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