JP7039257B2 - Control device, lens device, image pickup device, control method, and program - Google Patents

Description

The present invention relates to a control device for a vibration type actuator such as an ultrasonic motor.

The vibration type actuator is an actuator that drives by generating vibration by a piezoelectric element. The vibration type actuator is driven by applying a voltage having a phase difference to the piezoelectric element. Further, the drive speed of the vibration type actuator can be controlled by changing the phase difference, amplitude, and frequency of the voltage applied to the piezoelectric element. By the way, since the characteristics of the piezoelectric element used in the vibration type actuator change due to environmental changes such as temperature changes, it is necessary to take measures against it.

Patent Document 1 discloses a method of obtaining the optimum gain for control by referring to a table prepared in advance based on the amount of change in frequency when the vibration type actuator is feedback-controlled to a constant speed. Patent Document 2 describes a method for correcting characteristics changed due to the influence of environmental changes based on the relationship between the phase difference of the voltage applied to the piezoelectric element and the speed and the relationship between the frequency and the speed of the voltage. Is disclosed.

Japanese Unexamined Patent Publication No. 2000-287469 Japanese Unexamined Patent Publication No. 2008-54448

However, since the method disclosed in Patent Document 1 needs to drive the vibration type actuator at a constant speed, it is difficult to apply the method when the driving period at a constant speed is short, such as when the focus of a lens is driven. In the method disclosed in Patent Document 2, the characteristic is corrected on the premise that the proportionality constant is constant, but it is difficult to correct the characteristic because the proportionality constant also changes when the environmental change is large. Therefore, it is difficult to stably control the vibration type actuator when the characteristics change due to changes in the environment.

Therefore, an object of the present invention is to provide a control device, a lens device, an image pickup device, a control method, and a program capable of stably controlling a vibration type actuator even when the characteristics change due to environmental changes. do.

The control device as one aspect of the present invention is a control device for a vibration type actuator, and is a generation means for generating a target value of the vibration type actuator and feedback for feedback control of the vibration type actuator based on the target value. It has a control means, an estimation means for estimating a disturbance, and a correction means for correcting the gain of the feedback control means based on the target value and the disturbance, and the generation means has the vibration as the target value. The feedback control means generates the target acceleration and the target position of the type actuator, the feedback control means multiplies the difference between the target position and the current position of the vibration type actuator by the gain, and the correction means increases the target acceleration and the disturbance. The gain is corrected based on the above .

The lens device as another aspect of the present invention includes the control device and a lens driven by the vibration type actuator.

The image pickup device as another aspect of the present invention includes the lens device and an image pickup device that photoelectrically converts an optical image formed via the lens device.

The control method as another aspect of the present invention includes a generation step of generating a target value of the vibrating actuator, a control step of feedback-controlling the vibrating actuator based on the target value, and an estimation step of estimating a disturbance. It has a correction step for correcting the gain of the feedback control based on the target value and the disturbance, and in the generation step, the target acceleration and the target position of the vibration type actuator are generated as the target value. In the control step, the gain is multiplied by the difference between the target position and the current position of the vibration type actuator, and in the correction step, the gain is corrected based on the target acceleration and the disturbance .

The program as another aspect of the present invention causes a computer to execute the control method.

Other objects and features of the present invention will be described in the following embodiments.

According to the present invention, it is possible to provide a control device, a lens device, an image pickup device, a control method, and a program capable of stably controlling a vibration type actuator even when the characteristics change due to environmental changes. ..

It is a block diagram of the drive control part in each embodiment. It is a block diagram of the lens drive part in each embodiment. It is a graph which shows the relationship between the frequency and the speed in 1st Embodiment. It is a graph which shows the relationship between the operation amount and speed in 1st Embodiment. It is a block diagram from the operation amount to the speed in 1st Embodiment. It is a block diagram from the operation amount to the position in 1st Embodiment. It is a block diagram from the differential value of the manipulated variable to the position in 1st Embodiment. FIG. 7 is a block diagram obtained by converting FIG. 7. It is a block diagram which added the disturbance to FIG. It is a block diagram of the disturbance observer in 1st Embodiment. It is a graph which shows the relationship between the estimated disturbance and the inclination change rate in 1st Embodiment. It is a graph which shows the relationship between the phase difference and the speed in the 2nd Embodiment. It is a block diagram of the drive control part in 3rd Embodiment. It is an orbital profile in the fourth embodiment. It is a figure which shows the relationship between acceleration, estimated disturbance, and gain correction amount in 4th Embodiment. It is a block diagram of the image pickup apparatus in 5th Embodiment.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(First Embodiment)
First, the lens driving unit according to the first embodiment of the present invention will be described with reference to FIG. FIG. 2 is a block diagram of the lens driving unit 10. In the present embodiment, the driving target (driven portion) by the vibration type actuator is a lens, but the driving target is not limited to this.

The lens drive unit 10 includes a drive control unit 1, a drive circuit 11, a vibration type actuator 2, and a position detecting means 13 for detecting the current position (actual position) of the lens 12. The drive control unit 1 is a control device for a vibration type actuator. The drive circuit 11 supplies a voltage (drive voltage) to the vibration type actuator 2 according to the drive command value (control signal) 3 output from the drive control unit 1. Specifically, the drive circuit 11 is configured to include a PWM driver and a booster circuit. The vibration type actuator 2 is an actuator such as an ultrasonic motor that generates vibration by a piezoelectric element to obtain a propulsive force in a rotational direction or a translational direction. The position detecting means 13 is a sensor that detects the position information (position signal) 4 indicating the current position of the lens 12. The position detecting means 13 detects the current position of the lens 12 by using an encoder, a laser displacement meter, or the like, and sends the position information 4 to the drive control unit 1.

Next, the drive control unit 1 will be described with reference to FIG. FIG. 1 is a block diagram of the drive control unit 1. The target value generation unit (generation means) 101 is a target position of the vibration type actuator 2 (lens 12) according to a lens drive amount and a speed (drive command) output from a host controller (not shown) such as a lens CPU. Generate target values (target value signals) such as target speed and target acceleration. In the present embodiment, the drive control unit 1 is a position feedback control system (the feedback signal is a position signal), but the present invention is not limited to this. For example, when the feedback signal is a speed signal, the target value generation unit 101 outputs the target speed.

The FF controller (feedforward control means) 102 receives the target position pt (target position signal) output from the target value generation unit 101, and outputs a feedforward signal (performs feedforward control). The FF controller 102 generates a speed feed forward signal by differentiating the target position pt, calculating the target speed, and multiplying the target speed by the gain. Alternatively, the FF controller 102 may generate an acceleration feed forward signal by second-order differentializing the target position signal to calculate the target acceleration and multiplying the target acceleration by the gain. In this embodiment, feedforward control is not essential, and the FF controller 102 may not be provided in the drive control unit 1.

The subtractor 104 calculates the position deviation e (= pt-pc) which is the difference between the target position pt output from the target value generation unit 101 and the position information 4 (current position pc) output from the position detection means 13. do. The _FB controller (feedback control means) 103 receives the position deviation e calculated by the subtractor 104, and outputs an operation amount (feedback signal SFB) that reduces the position deviation e. Specifically, the FB controller 103 is a feedback controller such as a PID controller, and feedback-controls the vibration type actuator 2 based on the target value. In the present embodiment, the FB controller 103 multiplies the difference (position deviation e) between the target position pt and the current position pc of the vibration type actuator 2 by the gain (proportional gain). The adder 105 adds the feedforward signal S _FF output from the FF controller 102 and the feedback signal S _FB output from the FB controller 103, and obtains the manipulated variable u (= S _FF + S _FB ).

The frequency calculation unit (calculation means) 109 calculates the frequency set in the drive circuit 11 based on the operation amount u, and outputs the frequency drive command value 3b. That is, the frequency calculation unit 109 calculates the frequency (drive frequency) of the voltage applied to the vibration type actuator 2 based on the reference frequency 108 set in the vibration type actuator 2 and the operation amount u.

FIG. 3 is a graph showing the relationship (characteristic data, fv characteristic) between the drive frequency (frequency f) and the drive speed (speed v) of the vibration type actuator 2. The horizontal axis shows the frequency f (kHz), and the vertical axis shows the speed v (mm / s). Here, the reference frequency (fr) 108 is defined as a frequency (driving frequency) for reaching the reference speed Vr of the vibration type actuator 2. The reference frequency (fr) 108 is a preset value as a nominal value of the vibration type actuator 2. Alternatively, it can be obtained by acquiring the characteristic data as shown in FIG. 3 when assembling the lens driving unit 10. The frequency calculation unit 109 calculates the frequency drive command value 3b as represented by the following equation (1).

Frequency drive command value = reference frequency (fr) -operation amount (u) ... (1)
In the present embodiment, the phase difference calculation unit 110 outputs a fixed value (for example, 90 °) as the phase difference drive command value 3a. The disturbance observer (estimation means) 107 estimates and outputs the disturbance based on the position information 4 and the manipulated variable u. That is, the disturbance observer 107 includes a position signal (position information 4) indicating the current position of the vibration type actuator 2, an output signal of the FB controller 103 (feedback signal S _FB ), and an output signal of the FF controller 102 (feedforward signal S _FF ). ) And estimate the disturbance. Here, the disturbance corresponds to the slope of the characteristic data (fp characteristic) shown in FIG. Therefore, it can be said that the disturbance observer 107 is a means for estimating the slope of the fv characteristic. The details of the disturbance observer 107 will be described later. The gain correction amount calculator (correction means) 106 is a FF controller 102 and an FB controller based on the disturbance estimated by the disturbance observer 107 and the target value (target acceleration) generated by the target value generation unit 101. Each gain (proportional gain) of 103 is corrected.

Next, the concept of the model for designing the disturbance observer 107 will be described. FIG. 4 is a graph showing the relationship between the manipulated variable u and the velocity v in the present embodiment. In FIG. 4, the horizontal axis represents the manipulated variable u, and the vertical axis represents the velocity v. From the equation (1) and FIG. 3, when the manipulated variable u is 0, the frequency drive command value 3b becomes the reference frequency fr. Therefore, the graph of FIG. 4 has a characteristic that the graph of FIG. 3 is inverted left and right.

FIG. 5 is a block diagram from the operation amount u to the speed v. Assuming that the slope (dashed line in FIG. 4) at the manipulated variable u = 0 in FIG. 4 is α, the calculation from the manipulated variable u to the velocity v can be expressed as shown in FIG. FIG. 6 is a block diagram expressing the calculation from the manipulated variable u to the position p using the Laplace operator s, and is as shown in the following equation (2) using the position p, the velocity v, and the manipulated variable u. Can be expressed in.

Here, consider converting the equation (2) into the representation of the equation of state represented by the equation (3).

When the state quantity x is the position p and the output y is also the position p, the block diagram (system state equation) shown in FIG. 6 is expressed by the following equation (4).

Since the system matrix A is 0 in the equation (4), the system of FIG. 6 cannot satisfy the observability. Therefore, as shown in FIG. 7, consider an expansion system in which an integrator is connected to the input end of the system. FIG. 7 is a block diagram from the differential value of the manipulated variable u to the position p. Since the calculation of the integral and the calculation of the gain α are commutative, FIG. 7 can be regarded as the system shown in FIG. FIG. 8 is a block diagram obtained by converting FIG. 7. When the equation of state is derived for the system of FIG. 8, it is expressed as the following equation (5).

In order to satisfy the observability in the equation (5), the disturbance observer 107 can be designed by using the pole arrangement method and the optimal control theory. In this embodiment, in order to design the disturbance observer 107, it is considered to further expand the system of FIG.

FIG. 9 is a block diagram in which a disturbance (estimated disturbance) d is added to the system of FIG. When the equation of state considering the disturbance d is derived, it is expressed as the following equation (6).

In order to satisfy the observability in the equation (6), the disturbance observer 107 can be designed. Since the state variable of the equation (6) includes the disturbance d, the disturbance d can be estimated by the disturbance observer 107.

FIG. 10 is a block diagram of the disturbance observer 107. In the present embodiment, the disturbance observer 107 constitutes the same-dimensional observer. The symbol “^” in FIG. 10 indicates that it is an estimated value. A, B, C, C', and L are each defined as the following equation (7).

In equation (7), L _p , L _v , and L _d are observer gains, which are gains designed to stabilize the system (A-LC). F is a filter (low-pass filter). By passing the low-pass filter F before differentiating the manipulated variable u, it is possible to prevent the differential value of the manipulated variable u from becoming excessive.

The gain correction amount calculator 106 of the FF controller 102 and the FB controller 103, respectively, based on the disturbance (estimated disturbance) d output from the disturbance observer 107 and the target acceleration output from the target value generation unit 101. Correct the gain (proportional gain) of. Here, a specific calculation method of the gain correction amount will be described. For convenience of explanation, it is assumed that the target acceleration is a fixed value. The relationship with the disturbance d (estimated disturbance) estimated by the disturbance observer 107 when the gain of the vibration type actuator 2 changes is as shown in FIG. FIG. 11 is a graph showing the relationship between the estimated disturbance and the slope change rate (gain change rate y). In FIG. 11, the horizontal axis shows the estimated disturbance, and the vertical axis shows the inclination change rate (gain change rate). The gain change rate y can be approximated by a cubic polynomial such that the gain change rate becomes 0 when the estimated disturbance is 0, as expressed by the following equation (8).

The cubic polynomial represented by the equation (8) can be calculated by simulation from the design result of the model of FIG. 6 and the disturbance observer 107 of FIG. The coefficients f ₁ , f ₂ , and f ₃ of the equation (8) are inversely proportional to the third, second, and first power ratios of the target accelerations, respectively. Therefore, the gain correction amount calculator 106 sets the coefficients f ₁ , f ₂ , and f ₃ based on the target value acceleration, and calculates the gain change rate y from the estimated disturbance (disturbance d) using the equation (8). can do.

In the present embodiment, the gain correction amount calculator 106 calculates the gain correction amount (correction gain) as the reciprocal of the gain change rate y and outputs it to the FF controller 102 and the FB controller 103. That is, in the present embodiment, when the disturbance is the first disturbance, the gain correction amount calculator 106 corrects the gain set in each controller to the first gain. On the other hand, in the case of the second disturbance in which the disturbance is larger than the first disturbance, the gain set in each controller is corrected to the second gain smaller than the first gain. According to this embodiment, by multiplying the FF controller 102 and the FB controller 103 by a gain correction amount (correction gain), an appropriate gain (proportional gain) is set for a change in the characteristics of the vibration type actuator 2. Will be done.

In the present embodiment, the gain correction amount calculator 106 calculates the correction gain as the gain correction amount, and corrects the gain of each controller by giving the calculated correction gain to the FF controller 102 and the FB controller 103. , Not limited to this. For example, the gain correction amount calculator 106 may calculate a change amount (gain change amount) with respect to the gain set in each controller as a gain correction amount and output it to each controller. In this case, each controller can correct the gain by multiplying the currently set gain by the gain correction amount calculator 106 or the output gain change amount.

(Second embodiment)
Next, a second embodiment of the present invention will be described. In the first embodiment, the phase difference drive command value 3a output from the phase difference calculation unit 110 is a fixed value, and the configuration in which the frequency drive command value 3b output from the frequency calculation unit 109 is used as the operation amount u will be described. did. On the other hand, in the present embodiment, a case where the phase difference drive command value 3a is used as the manipulated variable u will be described.

FIG. 12 is a graph showing the relationship between the phase difference drive command value 3a and the speed v. In FIG. 12, the horizontal axis represents the phase difference (degree), and the vertical axis represents the velocity v (mm / s). Further, in FIG. 12, the solid line is an approximate straight line of the actual characteristic, and the dotted line is an approximate straight line of the characteristic in the used area. Assuming that the slope of the approximate straight line is α', the relationship between the phase difference and the velocity is expressed by the following equation (9).

Velocity = α'× phase difference ... (9)
It can be seen that the equation (9) is equivalent to FIG. 5 by replacing α in FIG. 5 with α'and the manipulated variable u with the phase difference. Therefore, the disturbance observer 107 can be designed even if the phase difference drive command value 3a is considered as the manipulated variable u. Further, it is generally known that the speed v can be changed by changing the amplitude of the applied voltage and the PWM duty (duty ratio) as the operation amount u of the vibration type actuator 2. Even when the speed v is controlled by such an operation amount u, the disturbance observer 107 can be configured by the same idea. In a control device that controls while switching at least one of the frequency, phase difference, and amplitude of the voltage applied to the vibration type actuator 2 as the operation amount u, a disturbance observer corresponding to each operation amount is configured. It is also possible to correct the gain for each operation amount.

(Third embodiment)
Next, a third embodiment will be described with reference to FIG. FIG. 13 is a block diagram of the drive control unit (control device) 1a in the present embodiment. The drive control unit 1a of the present embodiment is further provided with a posture detecting means (detection means) 111 and a subtractor 112 for the drive control unit 1 of each of the above-described embodiments. The disturbance estimated by the disturbance observer 107 is proportional to the acceleration a, as shown in FIG. When the driving direction of the vibrating actuator 2 changes depending on how the user holds the lens 12, such as the lens 12 of a camera, the disturbance estimated by the disturbance observer 107 includes gravity. The attitude detecting means 111 can detect gravity by a sensor such as an accelerometer. The posture detecting means 111 detects the angle difference (posture) between the detected gravity and the driving direction of the vibration type actuator 2, and calculates the disturbance (posture information) due to gravity. The subtractor 112 subtracts the influence of gravity (disturbance due to gravity, that is, attitude information) calculated by the attitude detecting means 111 from the disturbance estimated by the disturbance observer 107, and outputs the result to the gain correction amount calculator 106. .. As a result, even if the posture of the lens 12 which is the driven portion changes, the influence of the change in the posture can be reduced, and an appropriate gain (proportional gain) can be set for the characteristic change of the vibration type actuator 2. can.

(Fourth Embodiment)
Next, the procedure of gain correction in the fourth embodiment will be described with reference to FIGS. 14 and 15. FIG. 14 is an example of an orbital profile generated by the target value generation unit 101. In FIG. 14, the horizontal axis represents time, and the vertical axis represents acceleration, velocity, and position. The orbital profile of FIG. ₁₄ shows _a state in which acceleration is performed in the section of _time t1 to t2 _, the section of _time t2 to t3 is driven at a constant speed _, and the section of time t3 to t4 is decelerated. ing. FIG. 15 is a diagram showing an acceleration profile, an estimated disturbance by the disturbance observer 107, and a gain correction value output from the gain correction amount calculator 106, respectively. In FIG. 15, the horizontal axis represents time, the vertical axis represents acceleration, estimated disturbance, and gain correction value, respectively.

In the present embodiment, the gain correction amount is calculated in the acceleration section (time t ₁ to t ₂ ), and the gain correction amount is set in the constant velocity section (time t ₂ to t ₃ ). First, in the acceleration section, when the vibration type actuator 2 starts accelerating, an estimated disturbance is output from the disturbance observer 107. The gain correction amount calculator 106 calculates the gain correction amount using the value of the estimated disturbance at the end of the acceleration section (time t ₂ ). If the gain correction amount is directly applied to the FF controller 102 and the FB controller 103, the position and speed of the vibration type actuator 2 may jump due to a sudden change in the parameters.

Therefore, in the present embodiment, as shown in FIG. 15, the gain correction amount is smoothly changed in the section from the end of calculation of the gain correction amount (time t ₅ ) to the start of deceleration (time t ₃ ) (time t 3). Alternatively, it is preferable to change it step by step). For example, if the gain correction amount is 1.1, the gain is smoothly (stepwise) changed from 0 to 1.1. Since the gain correction is completed at the start of deceleration, it can be driven by the gain corresponding to the characteristic change of the vibration type actuator 2 in the deceleration section.

(Fifth Embodiment)
Next, the image pickup apparatus according to the fifth embodiment will be described with reference to FIG. FIG. 16 is a configuration diagram of an image pickup device 200 (single-lens reflex camera). In FIG. 16, the lens barrel (interchangeable lens) 201 has an imaging optical system (lens unit) 202. The image pickup optical system 202 includes a lens 12 driven by a lens driving unit 10.

The camera body (imaging apparatus main body) 203 includes a quick return mirror 204, a focal plate 205, a pentadha prism 206, an eyepiece lens 207, and the like. The quick return mirror 204 upwardly reflects the light flux formed through the imaging optical system 202. The focal plate 205 is arranged at an image forming position of the imaging optical system 202. The Pentadaha prism 206 converts the inverted image formed on the focal plate 205 into an upright image. The user can observe the erect image through the eyepiece lens 207.

The image pickup element 208 includes a CCD sensor and a CMOS sensor, and photoelectrically converts an optical image (subject image) formed via the image pickup optical system 202 to output image data. At the time of shooting, the quick return mirror 204 retracts from the optical path, and an optical image is formed on the image pickup device 208 via the image pickup optical system 202. The control unit 209 has a CPU and controls the operation of each unit of the image pickup apparatus 200. Further, the lens driving unit 10 drives the lens 12 based on the command from the control unit 209.

The image pickup device 200 is composed of a camera body 203 having an image pickup element 208 and a lens barrel 201 detachably attached to the camera body 203, but the image pickup device 200 is not limited thereto. It may be an image pickup device in which a camera body and a lens barrel are integrally configured, or it may be a mirrorless single-lens reflex camera (mirrorless camera) without a quick return mirror.

(Other embodiments)
The present invention supplies a program that realizes one or more functions of the above-described embodiment to a system or device via a network or storage medium, and one or more processors in the computer of the system or device reads and executes the program. It can also be realized by the processing to be performed. It can also be realized by a circuit (for example, ASIC) that realizes one or more functions.

According to each embodiment, it is possible to provide a control device, a lens device, an image pickup device, a control method, and a program capable of stably controlling a vibration type actuator even when the characteristics change due to environmental changes. can.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited to these embodiments, and various modifications and modifications can be made within the scope of the gist thereof.

1 Drive control unit (control device)
101 Target value generation unit (generation means)
103 FB controller (feedback control means)
106 Gain correction amount calculator (correction means)
107 Disturbance Observer (estimation means)

Claims (13)

It is a control device for vibration type actuators.
A generation means for generating a target value of the vibration type actuator, and
A feedback control means that feedback-controls the vibration type actuator based on the target value,
An estimation method for estimating disturbance, and
It has a correction means for correcting the gain of the feedback control means based on the target value and the disturbance.
The generation means generates the target acceleration and the target position of the vibration type actuator as the target value.
The feedback control means multiplies the difference between the target position and the current position of the vibration type actuator by the gain.
The correction means is a control device characterized in that the gain is corrected based on the target acceleration and the disturbance . The control device according to claim 1, wherein the gain is a proportional gain of the feedback control means. The control device according to claim 1 , wherein the estimation means estimates the disturbance based on a position signal indicating the current position of the vibration type actuator and an output signal of the feedback control means. Claim 1 to further include a calculation means for calculating the frequency of the voltage applied to the vibration type actuator based on the reference frequency set in the vibration type actuator and the output signal of the feedback control means. The control device according to any one of 3 . Further, it has a feedforward control means for feedforward control of the vibration type actuator.
The control device according to any one of claims 1 to 4, wherein the feedforward control means multiplies the target speed or the target acceleration obtained from the target position by a gain for the feedforward control means. .. The estimation means according to any one of claims 1 to 5 , wherein the estimation means is a disturbance observer for at least one of the frequency, amplitude, and phase difference of the voltage applied to the vibration type actuator. Control device. It also has a detection means to detect posture information,
The control device according to any one of claims 1 to 6 , wherein the correction means corrects the gain based on the disturbance and the posture information. The control device according to any one of claims 1 to 7 , wherein the correction means corrects the gain so that the gain of the feedback control means changes stepwise. The correction means
If the disturbance is the first disturbance, the gain is corrected to the first gain.
One of claims 1 to 8 , wherein when the disturbance is a second disturbance larger than the first disturbance, the gain is corrected to a second gain smaller than the first gain. The control device described in the section. The control device according to any one of claims 1 to 9 ,
A lens device comprising a lens driven by the vibration type actuator. The lens device according to claim 10 and
An image pickup device comprising: an image pickup element that photoelectrically converts an optical image formed via the lens device. The generation step to generate the target value of the vibration type actuator, and
A control step that feedback-controls the vibration type actuator based on the target value,
Estimating steps to estimate disturbance and
It has a correction step that corrects the gain of the feedback control based on the target value and the disturbance.
In the generation step, the target acceleration and the target position of the vibration type actuator are generated as the target values.
In the control step, the gain is multiplied by the difference between the target position and the current position of the vibrating actuator.
A control method comprising correcting the gain based on the target acceleration and the disturbance in the correction step . The generation step to generate the target value of the vibration type actuator, and
A control step that feedback-controls the vibration type actuator based on the target value,
Estimating steps to estimate disturbance and
A program that causes a computer to execute a correction step of correcting the gain of the feedback control based on the target value and the disturbance.
In the generation step, the target acceleration and the target position of the vibration type actuator are generated as the target values.
In the control step, the gain is multiplied by the difference between the target position and the current position of the vibrating actuator.
A program comprising correcting the gain based on the target acceleration and the disturbance in the correction step .

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