JP2014236532A - Driving control device for vibration actuator and optical equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the driving control device of a vibration actuator capable of accurately positioning a driven part while suppressing the occurrence of a drive sound.SOLUTION: A driving control device 100 includes: a first frequency calculation part 105 for calculating a first frequency for driving an actuator 220; a second frequency calculation part 106 for setting a second frequency to be supplied in the case of starting or stopping the driving of the actuator 220; determination selection parts 107 and 108 for selecting the frequency of a drive signal to be supplied to the vibration actuator 220 as either the first frequency or the second frequency; and a drive signal generation part 109 for generating a drive signal having the frequency selected by the determination selection parts 107 and 108. After the driving of the vibration actuator 220 is substantially stopped, the second frequency calculation part 106 continues the setting of the second frequency, and the drive signal generation part 109 generates the drive signal having the second frequency.

Description

  The present invention relates to a drive control device for a vibration actuator and an optical apparatus.

Conventionally, a technique for positioning and driving a focus adjustment lens at high speed and with high accuracy using an ultrasonic motor as a drive actuator for a focus adjustment lens (driven portion) in a camera lens has been shown.
In these techniques, when this driven part is stopped at the target position, after detecting that the vicinity of the target position has been reached while moving at a low speed, the power supply to the ultrasonic motor is shut off and stopped ( Patent Document 1).

JP 2008-79396 A

In recent years, products capable of shooting moving images even with digital still cameras are becoming popular. During movie shooting, a function that keeps the focus on the subject normally works, so the focus adjustment lens is frequently driven. For this reason, if the driving sound of the focus adjustment lens is large, the driving sound is recorded as unpleasant noise during moving image shooting.
Since the ultrasonic motor is driven using a frequency in a region beyond the audible sound range, the drive sound of the motor alone is relatively small. However, the conventional drive control system disclosed in Patent Document 1 has a problem in that drive sound is recorded when the motor drive is started and stopped.

  An object of the present invention is to provide a drive control device and an optical apparatus for a vibration actuator capable of accurately positioning a driven part at a target position while suppressing generation of drive sound at the start and stop of motor drive. There is.

The present invention solves the above problems by the following means.
The invention according to claim 1 is a drive control device for a vibration actuator, which is supplied when a first frequency calculation unit for calculating a first frequency for driving the actuator is started or when the drive of the actuator is started or stopped. A second frequency calculating section for setting a second frequency to be performed; a determination selecting section for selecting either the first frequency or the second frequency for the frequency of the drive signal supplied to the vibration actuator; and the determination selection A drive signal generation unit that generates a drive signal having a frequency selected by the unit, and after the drive of the vibration actuator has substantially stopped, the second frequency calculation unit continues to set the second frequency The drive signal generator generates a drive signal having the second frequency, and is a drive control device for a vibration actuator.
The invention according to claim 2 is the drive control apparatus for the vibration actuator according to claim 1, wherein when the drive of the vibration actuator is stopped, the determination selection unit is based on the drive state of the vibration actuator. The drive control device for a vibration actuator, wherein the frequency is switched from the first frequency to the second frequency.
A third aspect of the present invention is the vibration actuator drive control apparatus according to the first or second aspect, wherein a speed detection unit that detects a drive speed of the vibration actuator and a target speed of the vibration actuator are calculated. A target speed calculation unit, and when the drive of the vibration actuator is stopped, the determination selection unit detects the frequency when the speed detection unit detects that the drive speed of the vibration actuator is zero. The vibration actuator drive control device is characterized in that the first frequency is switched to the second frequency.
A fourth aspect of the present invention is the vibration actuator drive control device according to any one of the first to third aspects, further comprising a target speed calculation unit that calculates a target speed of the vibration actuator, wherein the vibration When stopping the driving of the actuator, the determination / selection unit switches the frequency from the first frequency to the second frequency when the target speed calculated by the target speed calculation unit becomes zero. It is a drive control apparatus of a vibration actuator.
A fifth aspect of the present invention is the vibration actuator drive control apparatus according to any one of the first to fourth aspects, further comprising a position detection unit that detects a drive position of the vibration actuator, and the vibration actuator When the position detection unit detects that the driving position of the vibration actuator has reached a predetermined distance from the driving target position, the determination selection unit sets the frequency to the first frequency. The vibration actuator drive control device is characterized by switching to the second frequency.
A sixth aspect of the present invention is the vibration actuator drive control apparatus according to any one of the first to fifth aspects, further comprising a speed detection unit that detects a drive speed of the vibration actuator, wherein the determination selection unit is Selecting the second frequency at the start of driving of the vibration actuator, and switching the frequency from the second frequency to the first frequency after detecting the activation of the vibration actuator by the speed detection unit; This is a drive control device for a vibration actuator.
According to a seventh aspect of the present invention, in the vibration actuator drive control device according to any one of the first to sixth aspects, a target speed calculation unit that calculates a target speed of the vibration actuator, and a drive of the vibration actuator A speed detection unit that detects a speed, and the first control method is configured to apply the vibration actuator to the vibration actuator based on the target speed generated by the target speed calculation unit and the drive speed detected by the speed detection unit. A control method for determining a frequency of a drive signal to be supplied, wherein the second control method is a control method for determining a frequency of a drive signal supplied to the vibration actuator by a method different from the first control method; The vibration actuator drive control device characterized by the above.
According to an eighth aspect of the present invention, in the vibration actuator drive control device according to any one of the first to seventh aspects, a position detection unit that detects a drive position of the vibration actuator, and a target speed of the vibration actuator A target speed calculation unit that calculates a drive speed of the vibration actuator, and the target speed calculation unit includes a target position of the vibration actuator and the vibration obtained by the position detection unit. A target speed is generated based on a difference from the current drive position of the actuator, and the speed detection unit is configured to generate the drive speed based on a change amount per unit time of the drive position of the vibration actuator obtained from the position detection unit. It is a vibration actuator drive control device characterized by detecting.
According to a ninth aspect of the present invention, in the vibration actuator drive control device according to any one of the first to eighth aspects, the second control method changes the frequency of the vibration actuator at a constant rate of change. It is a vibration actuator drive control device characterized by being a control system.
According to a tenth aspect of the present invention, in the drive control device for a vibration actuator according to the ninth aspect, the drive control device includes a plurality of operation modes, and the rate of change differs depending on the operation mode. This is a vibration actuator drive control device.
According to an eleventh aspect of the present invention, in the vibration actuator drive control device according to the ninth or tenth aspect, when there are a plurality of determination conditions in the determination selection section, the rate of change in frequency depends on the actually selected conditions. Is a drive control device for a vibration actuator, characterized in that.
A twelfth aspect of the invention is an optical apparatus comprising the drive device according to any one of the first to eleventh aspects and a vibration actuator driven by the drive device.
In addition, the said structure may be improved suitably, and at least one part may substitute for another structure.

  ADVANTAGE OF THE INVENTION According to this invention, the drive control apparatus and optical apparatus of a vibration actuator which can position a to-be-driven part correctly in a target position can be provided, suppressing generation | occurrence | production of a drive sound.

It is a drive control block diagram of the focus adjustment lens of this embodiment. It is the figure which showed the fN characteristic of the ultrasonic motor of this embodiment. It is the figure which showed the switching timing of the drive control method in this embodiment. It is a figure showing the judgment processing at the time of the end of driving. It is a figure showing the judgment processing at the time of the end of driving. It is a figure showing the judgment processing at the time of the end of driving. It is the flowchart which showed the switching determination process at the time of a drive stop.

[First Embodiment]
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a drive control block diagram of a focus adjustment lens 200 in a lens barrel 1 according to an embodiment of the present invention.
The lens barrel 1 includes a lens microcomputer (drive control device) 100, a focus adjustment lens 200, a lens drive mechanism 300, and a lens position detection mechanism 400.

  The focus adjustment lens 200 is driven in the optical axis direction integrally with a lens holding frame (not shown). Hereinafter, the focus adjustment lens 200 and the lens holding frame are collectively referred to as a lens movable portion 200A.

  The lens driving mechanism 300 converts the ultrasonic motor 220, the ultrasonic motor driving circuit 230 that drives the ultrasonic motor 220, and the rotational motion of the ultrasonic motor 220 into linear motion in the optical axis direction of the lens movable unit 200A. A power transmission mechanism 210 is provided.

The lens position detection mechanism 400 includes a rotary encoder 240 that detects a displacement in the rotation direction of the rotation mechanism section in the power transmission mechanism 210, and an origin position detection sensor 250 of the lens movable section 200A.
The rotary encoder 240 outputs a digital pulse train that can be directly captured by the lens microcomputer 100.

  The lens microcomputer 100 includes a position detection unit 101, a speed detection unit 102, a target speed calculation unit 103 that calculates a target rotation speed (target rotation speed) of the ultrasonic motor 220, a speed control unit 104, a drive frequency sweep unit 106, and a drive frequency. A calculation unit 105, a drive frequency selection unit 108, a drive pulse generation unit 109, and a speed control switching determination unit 107 are provided.

The position detection unit 101 and the speed detection unit 102 calculate the rotational position and the rotational speed of the ultrasonic motor 220 from the digital pulse train captured by the lens microcomputer 100, respectively.
In general, the rotary encoder is an incremental type, and the absolute position of the lens movable portion 200A is calculated based on the output of the origin position detection sensor 250.

  The target speed calculation unit 103 calculates a target rotation speed based on the drive target position of the focus adjustment lens instructed from the camera body and the current rotation position calculated by the position detection unit 101.

The speed control unit 104 is a block that calculates a control operation amount based on the target rotation speed calculated by the target speed calculation unit 103 and the current rotation speed detected by the speed detection unit 102.
In this embodiment, the sum of the feedback calculation amount calculated from the difference (speed error) between the target rotation speed and the current rotation speed and the feedforward calculation amount determined only by the target rotation speed is used as the control operation amount. Yes.

The drive frequency calculation unit 105 calculates the drive frequency applied to the ultrasonic motor 220 based on the control operation amount that is the calculation result in the speed control unit 104.
The drive frequency calculation unit 105 has a conversion table based on the fN characteristic (applied frequency to rotation speed characteristic) of the ultrasonic motor, and corresponds to the control operation amount (control rotation speed) using this conversion table. The obtained driving frequency is acquired.

  On the other hand, the drive frequency sweep unit 106 determines a drive frequency based on a specified frequency change rate (sweep rate). That is, a process for changing the drive frequency by a constant change amount is performed regardless of the speed error and the target rotation speed.

The speed control switching determination unit 107 determines a timing at which the speed control calculation becomes valid from invalid at the start of driving, and a timing at which the speed control calculation becomes invalid from the valid at the time of driving stop.
The speed control calculation is valid when the ultrasonic motor 220 is driven using a drive pulse of the drive frequency calculated by the drive frequency calculation unit 105, and the speed control calculation is invalid. This is a case where the ultrasonic motor 220 is driven using a driving pulse having a driving frequency calculated by the driving frequency sweeping unit 106.

The drive frequency selection unit 108 selects the drive frequency output to the drive pulse generation unit 109 according to the determination result of the speed control switching determination unit 107.
That is, after the speed control switching determination unit 107 determines that “speed control calculation is enabled”, the drive frequency calculated by the drive frequency calculation unit 105 is selected, and conversely, “speed control calculation is disabled. ”Is selected, the drive frequency set by the drive frequency sweep unit 106 is selected. Details of the processing of the speed control switching determination unit 107 will be described later.

The drive pulse generator 109 generates a two-phase drive pulse train to be supplied to the ultrasonic motor drive circuit 230 based on the drive frequency and drive direction selected by the drive frequency selector 108.
The ultrasonic motor drive circuit 230 generates a periodic signal synchronized with the two-phase drive pulse output from the microcomputer, supplies the periodic signal to the ultrasonic motor 220, and rotates the ultrasonic motor 220. The rotation of the ultrasonic motor 220 is transmitted to the lens movable unit 200A via the power transmission mechanism 210, and drives the lens movable unit 200A in the optical axis direction.

Next, details of the determination process of the speed control switching determination unit 107 will be described.
In the following description, for the sake of simplification, the rotation direction is not taken into consideration and all driving is performed in the positive direction.

[Determination process at the start of driving]
FIG. 2 is a graph showing an example of the fN characteristic of the ultrasonic motor 220. FIG. 3 is a diagram showing the switching timing of the drive control method in the present embodiment.
First, when the driving of the ultrasonic motor 220 shown in FIG. 3 is started, the speed control calculation is in an invalid state, and the speed control switching determination unit 107 determines the timing for switching from the invalid state to the valid state.

That is, since the speed control calculation is invalid at the beginning of driving of the ultrasonic motor 220, the selecting unit 108 selects the driving frequency determined by the driving frequency sweeping unit 106, and the driving pulse generating unit 109 sets the driving frequency. A drive pulse is generated and supplied to the ultrasonic motor 220.
The supplied frequency starts from a frequency fDstop at which the ultrasonic motor 220 does not rotate, gradually becomes a low frequency by the sweep process, and eventually reaches a frequency fDstart at which the ultrasonic motor starts to rotate.

In the embodiment, the speed control switching determination unit 107 instructs the selection unit 108 to select the output of the drive frequency calculation unit 105 at the timing when it is detected that the ultrasonic motor 220 starts to rotate, and the speed control is performed. The computation switches to the valid state.
Thereafter, the drive frequency is calculated based on the control operation amount calculated by the speed control unit 104 and supplied to the ultrasonic motor 220.

Note that the drive frequency (fDstart) at which the ultrasonic motor 220 actually starts to rotate does not necessarily match the drive frequency fD0 at the rotation speed 0 in the fN characteristic.
Therefore, if the switching is simply performed, the driving frequency may become discontinuous before and after the switching of the speed control calculation.
Processing for avoiding this, for example, correction processing is performed in which the difference between fDstart and fD0 is stored as an offset value fDofs, and thereafter, fDofs is added to the drive frequency obtained by the drive frequency calculation unit 105.

[Determination process at the end of driving]
4 to 6 are diagrams showing determination processing at the end of driving.
At the end of driving, the speed control calculation becomes invalid from the valid state, and the speed control switching determination unit 107 determines the timing for switching to the frequency sweep process.
Immediately before the rotation stops, the ultrasonic motor 220 is decelerated to the stop preparation speed (minimum controllable rotation speed or a speed close thereto), and the current position is a predetermined distance from the stop target position at that speed (stop deceleration start position). Wait for it to reach the range.
After the current position reaches a predetermined distance range from the stop target position, the target rotational speed is gradually reduced to zero while speed control is enabled.

Here, as shown in FIG. 4, when the normal operation, that is, when the actual rotation speed of the ultrasonic motor 220 appropriately follows the target rotation speed and stops rotating, the lens movable portion 200 </ b> A is a position substantially close to the stop target position. (That is, the ultrasonic motor 220 is stopped at a position substantially close to the target drive position).
Therefore, at the timing when the target rotation speed of the ultrasonic motor 220 becomes zero, the speed control is switched to the drive frequency sweep control (the speed control is switched from valid to invalid), and the drive frequency is finally set to the stop frequency fDstop.

  However, as shown in FIGS. 5 and 6, the ultrasonic motor 220 is unstable at a rotational speed equal to or lower than the stop preparation speed, and stops rotating before the target rotational speed becomes zero, or On the other hand, even if the target rotation speed becomes zero, it may continue to rotate for a while.

When the rotation stops before the target rotation speed becomes zero as shown in FIG. 5, the operation amount is calculated so as to rotate the motor again by the speed feedback control. If it is within the stop allowable range, it is not necessary to rotate again.
That is, the control to the ultrasonic motor 220 may be stopped at this point.

  However, there is no guarantee that the ultrasonic motor 220 will continue to stop stably even if the drive frequency at this point is simply maintained. Accordingly, the speed control is invalidated and switched to the drive frequency sweep control to gradually increase the drive frequency to the stop frequency fDstop.

On the other hand, if the motor continues to rotate even if the target rotational speed becomes zero as shown in FIG. 6, the motor should stop rotating due to the speed feedback control, but it may exceed the target stop range. There is sex.
Furthermore, when the speed control error during deceleration is large, it is conceivable that the stop target position may be exceeded before the target rotational speed becomes zero.
Considering such a case, a speed control forced end position is provided at a position away from the stop target rotation speed by a predetermined amount. If the speed control forced end position is reached during the target rotational speed deceleration, the speed control is forcibly ended even before the target rotational speed reaches zero, and the driving frequency sweep process is switched.

The processing of the lens microcomputer 100 at the end of driving is shown in the flowchart of FIG.
This process is periodically performed in the lens microcomputer 100, but is not limited thereto, and may be continuously repeated.

  First, the lens microcomputer 100 determines whether or not the speed control calculation is currently valid (step S201). When it is not valid (that is, when the speed control calculation is already invalid), the process at the end of driving ends. If it is valid, the process proceeds to step S202.

In step S202, it is determined whether or not the target rotation speed has become zero.
If the target rotational speed is zero (step S202, YES), the speed control is invalidated (step S207) and the process ends. That is, it is the case of FIG.

  If the target rotational speed is not zero (step S202, NO), it is determined whether the speed control forced end position has been exceeded (step S203). If the speed forcible end position has been exceeded (step S203, YES), that is, if it is closer to the stop target position than the speed forcible end position, the speed control is invalidated (step S207) and the process ends. That is, it is the case of FIG.

If the speed forced end position has not been exceeded (step S203, NO), it is determined whether the ultrasonic motor 220 has already stopped (step S204). If already stopped (step S204, YES), it is determined whether or not the stopped position is within an allowable range with respect to the stop target position (step S205).
If it is within the allowable range (step S205, YES), the speed control is invalidated (step S207) and the process ends. That is, it is the case of FIG.

  In step S204, if the ultrasonic motor 220 has not yet stopped (step S204, NO), or is outside the allowable range (step S205, NO), the speed control valid state is maintained (step S206), and the process ends. To do.

As described above, this embodiment has the following effects.
As described above, in this embodiment, the frequency sweep control by the drive frequency sweep unit 106 is performed until the lens movable unit 200A starts to move from the stopped state. Then, after the lens movable unit 200A starts moving, the control method is switched from the frequency sweep control to the speed feedback control method by the drive frequency calculation unit 105, and the speed control including acceleration and deceleration is performed.
At the time of stop, the lens movable portion 200A is decelerated from a sufficiently decelerated state so that the moving speed becomes zero in the vicinity of the stop target position, or when the target rotation speed becomes zero, or the allowable range of the stop target position The drive control method is switched from the speed feedback control method to the frequency sweep control method again when it is determined that the value has been reached.
Further, the frequency sweep process is continued until the drive frequency reaches a predetermined frequency even after the lens movable portion 200A is stopped.
According to the control method as described above, the acceleration and deceleration can be controlled to values below the level at which noise is not generated, and the generation of impact sound at the start and stop of driving of the ultrasonic motor is suppressed.
Also, positioning accuracy can be ensured by performing stop deceleration processing in a state where speed feedback control is applied until just before reaching the stop target position and preparing a plurality of conditions for switching to frequency sweep processing.
Thus, according to the present embodiment, it is possible to realize a vibration actuator drive control device that can be accurately positioned at the target position while suppressing the generation of drive sound.

(Deformation)
The present invention is not limited to the above-described embodiment, and various modifications and changes as described below are possible, and these are also within the scope of the present invention.
(1) For example, when there are a plurality of speed control end conditions as shown in FIGS. 4 to 6, the sweep rate of the subsequent drive frequency may be changed depending on the established end condition.
For example, if the forced speed control end position is reached and the speed control is ended as in the case of FIG. 6, it is necessary to stop more quickly and reliably than in the case where it is ended under other conditions. The sweep rate may be increased compared to That is, the slope in the graph of the drive frequency and time may be increased as shown by the alternate long and short dash line in the drive frequency graph of FIG.

(2) Further, in a camera system having a plurality of operation modes, the sweep rate may be changed for each operation mode. That is, since the generation of sound is not a problem in the still image shooting mode, the sweep rate is set larger than that in the moving image shooting mode.

(3) In the present embodiment, the control method is described in which power is continuously supplied to the ultrasonic motor 220 until the drive stop is completed. However, after the drive stop is completed, the power may be continuously supplied as it is. Either the method of generating no sound (for example, the amplitude sweeping process) may be used so that the supply of power is stopped and turned on again during driving.
In addition, although embodiment and a deformation | transformation form can also be used in combination suitably, detailed description is abbreviate | omitted. Further, the present invention is not limited to the embodiment described above.

  1: lens barrel, 100: lens microcomputer, 100: drive control device, 101: position detection unit, 102: speed detection unit, 103: target speed calculation unit, 104: speed control unit, 105: drive frequency calculation unit, 106 : Driving frequency sweep unit, 107: speed control switching determination unit, 108: driving frequency selection unit, 109: driving pulse generation unit, 200: focus adjustment lens, 200A: lens movable unit, 210: power transmission mechanism, 220: ultrasonic wave Motor: 230: Ultrasonic motor drive circuit, 240: Rotary encoder, 250: Origin position detection sensor, 300: Lens drive mechanism, 400: Lens position detection mechanism

Claims (12)

A drive control device for a vibration actuator,
A first frequency calculation unit for calculating a first frequency for driving the actuator;
A second frequency calculating unit for setting a second frequency to be supplied when starting or stopping driving of the actuator;
A determination selection unit that selects one of the first frequency and the second frequency as the frequency of the drive signal supplied to the vibration actuator;
A drive signal generation unit that generates a drive signal having a frequency selected by the determination selection unit,
After the driving of the vibration actuator is substantially stopped, the second frequency calculation unit continues to set the second frequency, and the drive signal generation unit generates a drive signal having the second frequency.
A drive control device for a vibration actuator characterized by the above. The vibration actuator drive control device according to claim 1,
When the drive of the vibration actuator is stopped, the determination selection unit is
Switching the frequency from the first frequency to the second frequency based on a driving state of the vibration actuator;
A drive control device for a vibration actuator characterized by the above. A drive control device for a vibration actuator according to claim 1 or 2,
A speed detector for detecting a driving speed of the vibration actuator;
A target speed calculator for calculating a target speed of the vibration actuator,
When the drive of the vibration actuator is stopped, the determination selection unit is
Switching the frequency from the first frequency to the second frequency when the speed detection unit detects that the driving speed of the vibration actuator is zero;
A drive control device for a vibration actuator characterized by the above. A drive control device for a vibration actuator according to any one of claims 1 to 3,
A target speed calculator for calculating a target speed of the vibration actuator;
When the drive of the vibration actuator is stopped, the determination selection unit is
When the target speed calculated by the target speed calculation unit becomes zero, switching the frequency from the first frequency to the second frequency,
A drive control device for a vibration actuator characterized by the above. The vibration actuator drive control device according to any one of claims 1 to 4,
A position detection unit for detecting a drive position of the vibration actuator;
When the drive of the vibration actuator is stopped, the determination selection unit is
Switching the frequency from the first frequency to the second frequency when the position detection unit detects that the drive position of the vibration actuator has reached a predetermined distance from the drive target position;
A drive control device for a vibration actuator characterized by the above. A drive control device for a vibration actuator according to any one of claims 1 to 5,
A speed detecting unit for detecting a driving speed of the vibration actuator;
The determination selection unit includes:
Selecting the second frequency at the start of driving the vibration actuator;
After the activation of the vibration actuator is detected by the speed detector, the frequency is switched from the second frequency to the first frequency;
A drive control device for a vibration actuator characterized by the above. In the drive control apparatus of the vibration actuator of any one of Claim 1 to 6,
A target speed calculator for calculating a target speed of the vibration actuator;
A speed detection unit that detects a driving speed of the vibration actuator,
The first control method is a control method that determines the frequency of the drive signal supplied to the vibration actuator based on the target speed generated by the target speed calculation unit and the drive speed detected by the speed detection unit. Yes,
The second control method is a control method for determining a frequency of a drive signal supplied to the vibration actuator by a method different from the first control method;
A vibration actuator drive control device characterized by the above. In the drive control apparatus of the vibration actuator of any one of Claim 1 to 7,
A position detector for detecting a drive position of the vibration actuator;
A target speed calculator for calculating a target speed of the vibration actuator;
A speed detector for detecting a driving speed of the vibration actuator;
With
The target speed calculation unit generates a target speed based on a difference between a target position of the vibration actuator and a current drive position of the vibration actuator obtained by the position detection unit,
The speed detector detects the drive speed based on a change amount per unit time of the drive position of the vibration actuator obtained from the position detector;
A vibration actuator drive control device characterized by the above. In the drive control apparatus of the vibration actuator of any one of Claim 1 to 8,
The second control method is a control method for changing the frequency of the vibration actuator at a constant change rate;
A vibration actuator drive control device characterized by the above. In the drive control apparatus of the vibration actuator according to claim 9,
The drive control device includes a plurality of operation modes, and the rate of change varies depending on the operation modes;
A vibration actuator drive control device characterized by the above. In the drive control apparatus of the vibration actuator according to claim 9 or 10,
When there are a plurality of determination conditions in the determination selection unit, the frequency change rate varies depending on the actually selected conditions.
A drive control device for a vibration actuator characterized by the above. The drive device according to any one of claims 1 to 11,
A vibration actuator driven by the driving device;
An optical instrument comprising:

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