JP7030494B2 - Discharge material Discharge device - Google Patents

Description

The present invention relates to a discharge device that discharges a liquid or a liquid discharge material.

Conventionally, there is known a discharge device that discharges a discharge material contained in a storage container for containing a liquid or a liquid discharge material onto a medium from a discharge port of a discharge head. In Patent Document 1, the inside of the storage container is divided into two storage parts by a flexible member, the discharge material is stored in one storage part, the other liquid is stored in the other storage part, and the inside of the other storage part is stored. A configuration is described in which the internal pressures of both are adjusted to the same pressure by adjusting the pressure of.

Further, as the discharge head used in the discharge device, a plurality of discharge ports, a plurality of pressure chambers communicating with each discharge port, an actuator for generating discharge energy in each pressure chamber, and an actuator for generating discharge energy in each pressure chamber are common to each pressure chamber. A configuration including a common liquid chamber for communication is generally used. Discharge material is supplied from the common liquid chamber to each pressure chamber, and the actuator corresponding to each pressure chamber is driven to generate discharge energy in each pressure chamber and discharge from each discharge port communicating with each pressure chamber. Droplets of material are ejected. When the droplets are ejected, the pressure fluctuations generated in the individual pressure chambers propagate to the common liquid chamber. When this pressure fluctuation further propagates to the adjacent pressure chamber and mutual interference of the pressure fluctuation occurs in the pressure chamber, an unstable discharge state such as leakage of the discharge material from the discharge port or unintended discharge is induced. Therefore, the discharge performance may deteriorate. In Patent Document 2, in order to solve such a problem, a damper filled with air having a pressure higher than the atmospheric pressure is arranged in a common liquid chamber, and the damper receives a pressure wave propagating from the pressure chamber, and the damper is deformed. A configuration is described in which the pressure wave is attenuated by doing so.

JP-A-2015-092549 Japanese Unexamined Patent Publication No. 2007-118312

By the way, in recent years, a resin is applied to a region called a shot on a substrate, and a mold with a pattern is pressed against the applied resin to form a resin pattern on the substrate, which is also called an imprint technique. Processing technology is attracting attention. When creating a semiconductor device using imprint technology, the pattern of the mold is fine, so if the application position shifts, the resin applied in the shot will have uneven thickness, and the filling property of the resin in the mold will decrease. , The accuracy of the resin pattern may decrease. Therefore, high accuracy is required for the position where the resin is applied to the substrate.

In the discharge device of Patent Document 1, when trying to suppress mutual interference of pressure fluctuations due to the discharge operation of the discharge material, for example, it is necessary to weaken the impact or transmit vibration to the flexible member that divides the inside of the storage container. It is conceivable to have a configuration that has a damper function to suppress it. However, when the flexible member is provided with the function of a damper, the change in internal pressure is not quickly transmitted between the two accommodating portions separated by the flexible member, and the internal pressures of both are adjusted to the same pressure. It will take time. For smooth transmission of changes in internal pressure between accommodating portions, it may be effective to reduce the rigidity by thinning the flexible member, but on the other hand, when the rigidity of the flexible member is small. It becomes difficult to obtain a high damper effect.

Therefore, the present invention has a function of adjusting the internal pressures of the two storage portions in the discharge material storage container separated from each other by the flexible member without delay, and is caused by the pressure fluctuation when the discharge material is discharged. It is an object of the present invention to provide a discharge material discharge device in which deterioration of discharge performance is suppressed.

The discharge material discharge device of the present invention for that purpose is separated into a discharge head that discharges the discharge material, a first storage space that is filled with the discharge material and communicates with the discharge head, and a second storage space that is filled with the hydraulic fluid. A discharge material discharge device including a storage container and a pressure control means that communicates with the second storage space and controls the internal pressure of the second storage space, wherein the first storage space and the second storage space are , It is possible to buffer the pressure received from the first accommodation space or the second accommodation space , and it is interposed between the first film, the second film, and the first film and the second film. It is characterized in that it is separated by a flexible partition wall composed of an intermembrane space containing a gas and an elastic member arranged in the intermembrane space .

According to the present invention, it is caused by the pressure fluctuation when the discharge material is discharged while having the function of adjusting the internal pressures of the two storage portions in the discharge material storage container separated from each other by the flexible member without delay. It is possible to provide a discharge material discharge device in which deterioration of the discharge performance is suppressed.

It is a figure which shows the structure of the discharge device of 1st Embodiment. It is a block diagram which shows the structure of the control system of the discharge device of 1st Embodiment. It is a figure which shows the structure of the vicinity of the discharge head of the discharge device shown in FIG. It is a figure which shows the structure of the discharge device of 2nd Embodiment.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. It should be noted that the components described in the following embodiments are merely examples, and the scope of the present invention is not limited to them.

<First Embodiment>
(Configuration of discharge material discharge device)
FIG. 1 is a schematic view showing a configuration of a discharge material discharge device according to a first embodiment of the present invention. The ejection material ejection device of the present embodiment is an ejection material ejection device applicable to an inkjet printing device capable of ejecting a liquid such as ink with a liquid amount of about 1 pL (picolitre) or less. The discharge material discharge device is also simply referred to as a discharge device below.

As shown in FIG. 1, the discharge device of the present embodiment has a main tank 34 for storing the atmospheric communication hydraulic fluid 35, a sub tank 26 that can communicate with the atmospheric communication main tank 34, and a discharge material that communicates with the sub tank 26. It includes a containment unit 100 and.

The discharge material storage unit 100 includes a discharge material storage container (hereinafter, also simply referred to as a storage container) 13 for storing the discharge material, and a discharge head 14 mounted on the storage container 13. The storage container 13 and the discharge head 14 may be configured as separate bodies or integrally. The storage container 13 may be a cartridge type. The discharge head 14 can discharge the discharge material from the discharge port 15 that opens on the outer surface (discharge surface) of the discharge head. The discharge ports 15 of this example are arranged on the discharge surface of the discharge head 14 at a density of 500 to 1000 pieces per inch.

As shown in FIG. 1, the transport unit 62 mounted on the base plate 63 is arranged so as to face the discharge surface of the discharge head 14. The transport unit 62 can move on the base plate 63 while sucking and holding the medium 61, which is a discharge target, by a suction means (not shown) to move the position of the medium 61 relative to the discharge head 14. The discharge material contained in the storage container 13 is adsorbed from the discharge port 15 of the discharge head 14 to the discharge material application region of the medium 61 which is transported to a position facing the discharge port 15 while being adsorbed by the transport unit 62. It is discharged. As a result, a desired discharge material pattern (for example, a recorded image) is formed.

(Discharge material)
Unlike a solid, the discharge material does not have a fixed shape and exhibits fluidity when discharged in the container 13 and from the discharge head 14, but the volume change is not as large as that of a gas. It is a liquid or a liquid substance. The discharge material may be a substance such as a paste-like substance or a polymer material. Ink can be used as the ejection material of the present embodiment. Non-limiting examples of inks include various inks such as inks for image recording, conductive inks for manufacturing electronic circuits, and UV curable inks. Examples of the conductive ink include inks containing metal particles, particularly metal nanoinks in which metal nanoparticles having a particle size of several to several tens of nanometers are dispersed in a liquid, for example, silver nanoinks. In the manufacturing process of semiconductor devices and the like, there is a so-called imprint technique in which a mold having a pattern formed on an imprint material on a substrate is brought into contact with the imprint material and the shape of the mold is transferred to the imprint material to form a pattern. As the imprint material, a resist such as a photocurable resin or a thermosetting resin is used. Another example of the discharge material is such an imprint material.

(Hydraulic fluid)
The hydraulic fluid is an incompressible substance in which the change in density (volume) due to external temperature and pressure is negligible as compared with a gas. Therefore, even if the air temperature or atmospheric pressure around the discharge device changes, the volume of the hydraulic fluid hardly changes. As the hydraulic fluid, for example, a liquid such as water and a substance selected from a gel-like substance can be used. Usually, the difference between the density of the discharged material and the density of the hydraulic fluid is smaller than the difference between the density of the discharged material and the density of the gas.

For example, when the ejection device according to the present invention is used as an ink ejection device for a printing apparatus, ink is naturally used as the ejection material, but it is not necessary to use expensive ink as the working fluid, and the ink and ink are used. Water with a similar specific gravity can be used. More specifically, water to which an additive having an antiseptic action is added can be used as a hydraulic fluid for the purpose of preventing water spoilage and propagation of various germs.

(Control system)
A control system according to the present embodiment will be described with reference to FIG. FIG. 2 is a block diagram showing a configuration of a control system according to the present embodiment. The CPU 202 controls the transport drive unit 210 and the discharge drive unit 208 according to the control program stored in the ROM 204. Information such as discharge data (recorded data) is input to the CPU 202 from the host device 220 via the input interface 216. The input information is written to RAM 206.

As will be described later, the CPU 202 drives the control valve 31 and the pump 32 via the liquid amount adjusting drive unit 212 based on the detection result of the liquid level sensor 41 provided in the sub tank 26. The CPU 202 also drives the transport unit 62 via the transport drive unit 210, drives the discharge head 14 via the discharge drive unit 208, and drives the control valve 21 and the pump 22 via the circulation drive unit 214.

FIG. 3 is an enlarged view of the vicinity of the discharge port 15. In the discharge head 14, an actuator (not shown) is mounted in a pressure chamber 19 provided corresponding to each of the discharge ports 15. The actuator may be any as long as it can generate energy capable of ejecting the ejecting material as fine droplets, for example, droplets such as 1 pL, and specific examples thereof include a piezo element (piezoelectric element) and a heat generating resistor element. Can be mentioned. When the piezo element is used, the influence on the discharge characteristics due to the temperature change (temperature rise) is smaller than that when the heat generation resistor element is used, so that the piezo element can be used at a high temperature. Therefore, a wide variety of discharge materials such as highly viscous resins can be used. Further, when a heat-generating resistor element is used, the manufacturing cost can generally be relatively low. The actuator of this example is a piezo element, and by controlling the drive of the piezo element, the volume in the pressure chamber 19 is changed, and the discharge material in the discharge port is discharged to the outside. The piezo element may be mounted using MEMS (Micro Electro Electrical System) technology.

As shown in FIG. 3, in the discharge head 14, each pressure chamber 19 communicates with the common liquid chamber 20. Further, the common liquid chamber 20 communicates with the first storage space 5 of the storage container 13. The discharge material to be discharged from the discharge port 15 is supplied from the first accommodation space 5 to the pressure chamber 19 via the common liquid chamber 20. The discharge head 14 does not have a control valve between the discharge head 14 and the first accommodation space 5. Therefore, the internal pressure of the first accommodation space 5 is controlled to be slightly negative than the atmospheric pressure (external pressure) outside the discharge port 15 of the discharge head 14. By this negative pressure control, the discharge material in the discharge port 15 forms a meniscus 17 at the interface with the outside air, and leakage (dropping) of the discharge material from the discharge port at an unintended timing is prevented. In this example, the internal pressure of the first accommodation space 5 is controlled to be a negative pressure by 0.40 ± 0.04 kPa from the external pressure.

As shown in FIG. 1, the outer and inner volumes of the storage container 13 are defined by the housing 11 and the housing 12. A flexible member (flexible partition wall) is arranged between the housing 11 and the housing 12. The flexible member has a multilayer structure including a flexible film (first film) 1 and a flexible film (second film) 2 in a layer structure. The first film 1 and the second film 2 are thin films having a thickness of 10 to 100 micrometers, respectively, and are fixed to each other by a bonding portion 3 so as to be interlocked with each other. Although the bonding portion 3 is formed by welding the film in the present embodiment, it may be formed by means such as an adhesive. The bonding portion 3 is partially provided on the bonding surface between the first film 1 and the second film 2. The shape of the joint portion 3 may be any shape such as a dot shape or a linear shape, and the plurality of joint portions 3 may have different shapes from each other. The first film 1 and the second film 2 have non-fixed regions that are not fixed with respect to each other on the joint surface.

The housing 11 has a first opening that opens on the side facing the housing 12, and a second opening that opens on the side facing the discharge head 14. The entire surface of the first opening is covered with the first film 1 and sealed, and the first accommodation space 5 is formed between the inner surface of the housing 11 and the first film 1. The second opening communicates with the common liquid chamber 20 of the discharge head 14, whereby the first accommodation space 5 communicates with the external space via the discharge head 14. The first accommodation space 5 is filled with the discharge material, and the interface between the discharge material and the outside air is positioned in the discharge port 15.

The housing 12 has an opening that opens on the side facing the housing 11. The entire surface of this opening is covered with the second film 2 and sealed, and a second accommodating space 6 is formed between the inner surface of the housing 12 and the second film 2. The second accommodating space 6 is filled with the hydraulic fluid 35, and communicates with the inside of the sub tank 26, which is a liquid accommodating portion for accommodating the hydraulic fluid 35, via the pipe 24, as well as the control valve 21 and the control valve 21. Communication is possible via a pipe 23 provided with a pump 22 in the middle.

The hydraulic fluid 35 functions as a liquid filler in the second storage space. The first film 1 and the second film each function as a partition wall between the first accommodation space and the second accommodation space.

(the film)
The material of the first film 1 and the second film 2 may be any material that is resistant to the discharge material and the hydraulic fluid from the viewpoint of liquid contactability and the like. For example, fluororesins such as PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer), ETFE (ethylene tetrafluoroethylene), PTFE (polytetrafluoroethylene) and the like can be used. Moreover, for example, a polyamide synthetic resin such as PE (polyethylene), PVC (polyvinyl chloride), PET (polyethylene terephthalate), PVAL (polyvinyl alcohol), PVDC (polyvinylidene chloride), nylon and the like can be mentioned. The first film 1 and the second film 2 may be made of the same material (material, thickness) or may be made of different materials. For example, a material such as PTFE that is resistant to the ejection material can be used for the first film 1, and a nylon-based material that is resistant to the hydraulic fluid can be used for the second film 2.

According to the above configuration, when a difference in internal pressure occurs between the first accommodating space 5 and the second accommodating space 6, the first film 1 and the second film 2, which have flexibility, respectively, are integrally subjected to the internal pressure. It moves to the lower side and repeats the movement to stop the movement when the internal pressure difference disappears. Therefore, the internal pressures of the first accommodation space 5 and the second accommodation space 6 can be kept equal to each other. A soft material or a thin thickness is used for at least one of the first film and the second film to reduce the rigidity of the flexible member as a whole so that the first film and the second film can be smoothly moved integrally. You may.

A more specific explanation will be given. When the discharge material is discharged from the discharge head 14, the volume of the discharge material in the first accommodation space 5 is reduced by the amount of the discharged material, and the internal pressure of the first accommodation space 5 is reduced by that amount. At this time, since the volume of the hydraulic fluid in the second accommodation space 6 has not changed, the internal pressure of the second accommodation space 6 is relatively higher than the internal pressure of the first accommodation space 5. The first film 1 and the second film 2 are flexible and are interlockably bonded by the bonding portion 3. Therefore, in the storage container 13, the first film 1 and the second film 2 are integrated and move to the first storage space 5 side by the volume integral of the discharged material. At the same time, the hydraulic fluid 35 is sucked up into the second accommodating space 6 from the sub tank 26 via the pipe 24. As a result, the internal pressures of the first accommodation space 5 and the second accommodation space 6 become equal again and are in an equilibrium state.

As shown in FIG. 1, since the sub tank 26 communicates with the external space by the pipe 25, the pressure in the sub tank is equal to the atmospheric pressure. The hydraulic fluid 35 is stored in the sub tank 26. The hydraulic fluid 35 in the sub tank 26 is continuous with the hydraulic fluid 35 that continuously fills the pipe 24 and the second accommodating space 6, and the liquid level position (hereinafter, also referred to as liquid level height) in the vertical direction is continuous. It is adjusted to be lower than the discharge port 15 of the discharge head 14.

Let ΔH be the difference in height (distance in the vertical direction) between the liquid level position of the hydraulic fluid 35 in the sub tank 26 and the position of the discharge surface where the discharge port 15 opens. In the discharge device of the present embodiment, the discharge material in the discharge head 14 is intended to maintain the state of forming the meniscus 17 in the discharge port 15 (the state shown in FIG. 3). That is, it is intended to prevent the discharge material from leaking or dripping from the discharge port to the outside and the meniscus from being excessively drawn into the inner part (for example, near the common liquid chamber). Therefore, since it is desired to control the internal pressure of the first accommodation space 5 to a value 0.40 ± 0.04 kPa lower than the external air pressure, the height difference ΔH is adjusted to be 41 ± 4 mm.

As described above, the present embodiment is a discharge material discharge device applicable to a printing device capable of discharging a liquid amount of about 1 pL (picolitre) or less. In this example, the ejection material is ink for image recording, and the diameter of the ejection port 15 is about 10 μm (micron) in diameter. Further, in this example, it is assumed that the discharge material and the hydraulic fluid each have a density substantially equal to that of water. Under such conditions, in the present embodiment, the liquid level position of the hydraulic fluid 35 in the sub tank 26 and the position of the discharge surface at which the discharge port 15 opens so that the meniscus 17 of the discharge material is formed in the discharge port 15. The value of the height difference ΔH from the above is set in the range of 41 mm ± 4 mm described above. On the other hand, for example, in the case of a printing device having a coarse resolution, the diameter of the ejection port 15 is several tens of μm, and the diameter of the ejection port in a 3D printer using a resin or the like as an ejection material is several hundred μm. As described above, the diameter of the discharge port 15 differs depending on the applicable model of the discharge device, and the physical characteristics (for example, density, viscosity, etc.) of the discharge material also differ. Therefore, due to the influence of gravity, capillary force, surface tension, etc., the discharge device The numerical value of the height difference ΔH can be changed depending on the application target of.

The liquid level height of the hydraulic fluid in the sub tank is within a predetermined range (reference in this embodiment) with respect to the reference liquid level height (height 41 mm lower than the discharge port 15 in this embodiment). If the height deviates from the range of ± 4 mm), the correction operation is activated. The correction operation refers to an operation of "liquid level adjustment" in which the liquid level height of the hydraulic fluid in the sub tank 26 is kept within a predetermined range by exchanging (moving) the hydraulic fluid between the main tank 34 and the sub tank 26.

A liquid level sensor 41 is installed in the sub tank 26. The liquid level sensor 41 applicable to the present embodiment is a sensor capable of detecting the liquid level height of the hydraulic fluid in the sub tank 26 and its change (displacement).

The main tank 34 and the sub tank 26 can communicate with each other via a pipe 33 having a control valve 31 and a pump 32 in the middle. The control valve 31 and the pump 32 are driven to control the liquid level height within a desired range (the liquid level is adjusted). Specifically, when the liquid level sensor 41 detects that the liquid level height of the hydraulic fluid 35 in the sub tank 26 has fallen below the lower limit of the predetermined range, the control valve 31 is opened and the pump 32 is driven. Then, the hydraulic fluid is supplied from the main tank 34 toward the sub tank 26. When the liquid level sensor 41 detects that the liquid level height of the hydraulic fluid 35 in the sub tank 26 exceeds the upper limit of the predetermined range, the control valve 31 is opened and the pump 32 is driven to drive the sub tank 26. The hydraulic fluid is returned from the main tank 34 to the main tank 34. When the liquid level sensor 41 detects that the liquid level height of the hydraulic fluid 35 in the sub tank 26 is within a predetermined range, the driving of the pump 32 is stopped and the control valve 31 is closed. As a result, the liquid level height in the sub tank 26 is maintained within a predetermined range.

(Circular system)
As described above, the second accommodating space 6 and the sub tank 26 communicate with each other via the pipe 24, and also communicate with each other via the pipe 23 provided with the control valve 21 and the pump 22 in the middle. If the storage container 13 is once removed and reattached with respect to the discharge device, bubbles may enter the pipe 24. In that case, the control valve 21 is opened to operate the pump 22, and the hydraulic fluid 35 is circulated through the pipe 24, the second accommodating space 6 and the pipe 23 and sent to the sub tank 26 to blow bubbles in the pipe 24. Can be removed. The control valve 21 is closed when the pump 22 is not used. When using the pump 22, the control valve 21 is opened.

(pump)
Examples of the pump 22 and the pump 32 include a syringe pump, a tube pump, a diaphragm pump, a gear pump and the like. However, since the pump 22 and the pump 32 need only have the function of the liquid feeding means, the pump 22 and the pump 32 are not limited to the pump, and it is possible to select the liquid feeding means suitable for the discharge material discharge device.

As described above, in the discharge device shown in FIG. 1, the internal space of the storage container 13 is a first storage space 5 and a second storage space 6 by a flexible member including two films functioning as a partition wall. It is separated into. If the first film 1 and the second film 2 can be deformed and moved independently, even if the liquid level height in the sub tank 26 is adjusted, the pressure in the discharge head 14 is thereby adjusted. Cannot be controlled as described above. However, in the embodiment of the present invention, since the first film 1 and the second film 2 can be integrally deformed and moved in conjunction with each other, the pressure in the discharge head 14 can be controlled. .. This will be described in detail below.

In a configuration in which the first film 1 and the second film 2 are independently deformed and moved, the liquid level position (liquid level height) of the hydraulic fluid in the sub tank 26 is set from the position of the discharge surface where the discharge port 15 opens. The case of trying to adjust to a low height will be described. The hydraulic fluid in the second accommodation space 6 tends to move into the sub tank 26 by gravity. Since the second film 2 can move independently of the first film 1, as the hydraulic fluid 35 in the second accommodating space 6 moves to the sub tank 26, it moves in the X direction in the figure. continue. When the height difference ΔH becomes smaller than a predetermined value, the liquid level adjusting function of the sub tank 26 is activated, and the hydraulic fluid 35 is further sent from the sub tank 26 to the main tank 34 by the pump 32. Alternatively, the hydraulic fluid 35 in the system overflows to the outside from the atmospheric communication pipe 25 that also functions as the intake port of the sub tank 26. In either case, finally, the hydraulic fluid that can flow out from the second accommodation space 6 disappears, and the second film 2 reaches a state of being stuck to the inner wall surface of the housing 12. At this time, since the first film 1 does not move even if the second film 2 moves, the internal pressure of the first accommodation space 5 does not change in conjunction with the liquid level height of the hydraulic fluid in the sub tank 26. ..

As described above, in the case where the first film 1 and the second film 2 are not interlocked with each other, the pressure in the discharge head 14 cannot be controlled by adjusting the liquid level position of the hydraulic fluid 35.

On the other hand, in the embodiment of the present invention, since the first film 1 and the second film 2 are connected at a plurality of points by the bonding portions 3 distributed on the bonding surface, the first film 1 and the second film 2 are connected. It moves in the same direction at the same time in conjunction.

Here, the first accommodation space 5 communicates with the outside air through the discharge port 15 of the discharge head. At the interface between the discharge material in the discharge port and the outside air, a force such as atmospheric pressure at the height of the discharge material, gravity of the discharge material, and flow resistance and surface tension due to the inner wall of the discharge port acts on the discharge material. Due to the balance of forces, the discharge material tends to flow out from the discharge port, and the first film 1 tries to move in the −X direction opposite to the X direction in the drawing.

According to the configuration of the present embodiment, the balance between the force for moving the second film 2 in the X direction in the drawing and the force for moving the first film 1 in the opposite direction −X direction. As a result, the internal pressures of the first accommodation space 5 and the second accommodation space 6 are maintained at the same level. Therefore, by keeping the height difference ΔH within a predetermined range, the internal pressures of the first accommodation space 5 and the second accommodation space 6 are balanced by the negative pressure at which the meniscus 17 is formed in the discharge port 15. .. Therefore, the pressure in the discharge head 14 can be controlled by adjusting the liquid level position of the hydraulic fluid 35 in the sub tank 26.

(Suppression of mutual interference of pressure fluctuations)
With reference to FIG. 3, the suppression of mutual interference of pressure fluctuations when ejecting droplets of the ejection material will be described. As described above, the discharge head 14 that discharges the droplets of the discharge material has a plurality of pressure chambers 19 and a plurality of discharge ports 15. When ejecting a droplet, a voltage is applied to a piezo element (not shown) arranged in each pressure chamber 19 to generate a pressure fluctuation in the pressure chamber 19, and the droplet is ejected from the ejection port. A part of the energy of the pressure fluctuation generated in the pressure chamber 19 is used to eject the droplet, but the remaining energy of the pressure fluctuation travels as a pressure wave in the direction opposite to the discharge port 15, and the first accommodation space. Proceed within 5. In the first accommodation space 5, the pressure wave moves in a complicated manner while being reflected by the wall surface, and a part of the pressure wave enters the pressure chamber 19 different from the discharged pressure chamber 19. If a droplet is to be ejected from the pressure chamber when a pressure wave has invaded, the desired pressure fluctuation cannot be obtained in the pressure chamber, and the ejection performance is deteriorated. Therefore, it is required to suppress the pressure fluctuation due to the propagation of the pressure wave entering the first accommodation space 5 and suppress the mutual interference of the pressure fluctuation.

Here, when a damper is provided as shown in Patent Document 2 in order to suppress mutual interference of pressure fluctuations, it is conceivable to arrange the dampers so as to suppress the pressure fluctuations in the first accommodation space 5. For example, it is conceivable that the flexible member among the members forming the first accommodation space 5 has a damper function of buffering the received pressure and absorbing the pressure fluctuation. Since the flexible member forming the first accommodation space 5 includes the first film 1 and the second film 2, it is conceivable that the first film 1 and the second film 2 absorb the pressure fluctuation.

On the other hand, the first film 1 and the second film 2 have a thickness of 10 to 100 micrometers so that they can smoothly move toward the first accommodation space 5 as the amount of discharged material in the first accommodation space 5 decreases. Yes, the rigidity is small. Therefore, the first film 1 and the second film 2 are easily deformed when they receive a pressure wave, and there is a possibility that the pressure fluctuation cannot be completely absorbed and escapes. Therefore, the effect of suppressing the pressure fluctuation propagated in the common liquid chamber may be small only by relying on the physical characteristics of the film.

Therefore, in the present embodiment, as shown in FIG. 1, a sealing member 101 for sealing the space (hereinafter, also referred to as an intermembrane space) 4 between the first film 1 and the second film 2 is arranged. do. Then, a gas is sealed in the intermembrane space 4 to form a closed space, and the internal pressure thereof is set to be higher than the internal pressures of the first accommodating space 5 and the second accommodating space 6 to form the damper portion 103. That is, the damper portion 103 according to the present embodiment is configured to include a first film, a second film, and a gas contained in a closed space interposed between the first film and the second film. .. Air can be used as the gas, and the type of gas is not particularly limited as long as it is a highly stable and easy-to-handle gas. As described above, the internal pressures of the first accommodation space 5 and the second accommodation space 6 are controlled to a negative pressure lower than the atmospheric pressure. Therefore, the internal pressure of the intermembrane space 4 may be a pressure equal to or higher than the negative pressure, for example, a pressure equal to the atmospheric pressure or a pressure higher than the atmospheric pressure.

Since the intermembrane space 4 is formed of a film that has a higher pressure than the surroundings and is easily deformed, as shown in FIG. 1, the joint portion 3 is closed and the other portion is the first accommodation space 5. The shape is bulged so as to be convex toward each side of the second accommodation space 6.

The bonding portion 3 in the present embodiment is simply welded two films. Therefore, the damper portion 103 has the same rigidity as that of two films, can be easily deformed, and smoothly transmits the pressure change between the first accommodation space and the second accommodation space. Can be done. Further, when the joint portion 3 is formed by means such as an adhesive, the damper portion 103 can be similarly easily provided by appropriately setting the type and amount of the adhesive, the number of the joint portions 3, the arrangement, and the like. The pressure change can be smoothly transmitted between the first accommodation space and the second accommodation space. Therefore, even in the configuration including the damper portion 103 according to the present embodiment, it is possible to quickly adjust the internal pressure in the discharge material storage container 13.

When the pressure wave propagating from the pressure chamber 19 to the first accommodation space 5 via the common liquid chamber 20 hits the damper portion 103, the air in the intermembrane space constituting the closed space is compressed. That is, the energy of the pressure wave propagating in the first accommodation space 5 is received not only by the first film 1 having a relatively low rigidity but also by the air in the closed space having a relatively large compressibility. As a result, the pressure fluctuation in the first accommodation space 5 can be suppressed, and the interference of the pressure fluctuation due to the pressure fluctuation propagating to each pressure chamber is suppressed. When the pressure fluctuation occurs in the second accommodation space, the damper portion 103 receives not only the second film 2 but also the air in the closed space as in the case where the pressure fluctuation occurs in the first accommodation space. Thereby, the pressure fluctuation can be suppressed.

Therefore, according to the discharge material discharge device of the present embodiment, it is possible to achieve both an excellent internal pressure adjusting function and suppression of deterioration of discharge performance due to pressure fluctuation based on the discharge operation.

<Second embodiment>
Hereinafter, a second embodiment of the present invention will be described with reference to the drawings. Since the basic configuration of this embodiment is the same as that of the first embodiment, only the characteristic configuration will be described below.

FIG. 4 shows a second embodiment according to the present invention. In the second embodiment, the elastic member 102 is arranged in the intermembrane space 4 between the first film 1 and the second film 2 of the flexible member to form the damper portion 103. In the first embodiment, the sealing member 101 is arranged at the ends of the first film 1 and the second film 2 to make the intermembrane space 4 a closed space, but in the second embodiment, the intermembrane space is used. 4 is an open space open to the outside air. That is, the damper portion 103 according to the present embodiment includes the first film, the second film, the gas in the open space interposed between the first film and the second film, and the elastic member arranged in the open space. And is configured to include.

The intermembrane space 4 communicates with the atmosphere and has an internal pressure equal to that of atmospheric pressure. The internal pressure of the first accommodation space 5 and the second accommodation space 6 is controlled to a negative pressure as described above. Further, the intermembrane space 4 is formed of a film that is easily deformed. Therefore, as shown in FIG. 4, the intermembrane space 4 is closed at the joint portion 3 and bulges so as to be convex toward the respective sides of the first accommodation space 5 and the second accommodation space 6 at the other portions. It becomes a shape.

The elastic member 102 may be a spring-like one such as a leaf spring or a coil spring, or may be a hollow body such as a sponge-like one. The elastic member 102 may be made of metal or resin. Examples of metals include general iron, stainless steel, aluminum and the like. Examples of the resin include polypropylene, polyethylene, fluororesin and the like.

In the elastic member 102 applicable to the present embodiment, the damper portion 103 in which the elastic member 102 is incorporated can be easily deformed while optimizing the damper effect, and the first accommodating space and the second accommodating space can be easily deformed. It is selected to have rigidity that allows smooth transmission of pressure changes between them. Regarding the rigidity of the elastic member 102 itself, the rigidity can be adjusted by selecting a material, changing the plate thickness for a leaf spring, the diameter for a coil spring, and changing the porosity for a hollow body. Even in the configuration including the damper portion 103 according to the present embodiment, it is possible to quickly adjust the internal pressure in the discharge material storage container 13.

When the pressure wave propagating from the pressure chamber 19 to the first accommodation space 5 via the common liquid chamber 20 hits the damper portion 103, the elastic member in the intermembrane space is compressed. That is, the energy of the pressure wave propagating in the first accommodation space 5 is received not only by the first film 1 having a relatively low rigidity but also by an elastic member having a relatively high compressibility. As a result, the pressure fluctuation in the first accommodation space 5 can be suppressed, and the interference of the pressure fluctuation due to the pressure fluctuation propagating to each pressure chamber is suppressed. When the pressure fluctuation occurs in the second accommodation space, the damper portion 103 receives not only the second film 2 but also the air in the closed space as in the case where the pressure fluctuation occurs in the first accommodation space. Thereby, the pressure fluctuation can be suppressed.

Therefore, according to the discharge material discharge device of the present embodiment, it is possible to achieve both an excellent internal pressure adjusting function and suppression of deterioration of discharge performance due to pressure fluctuation based on the discharge operation.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited to these embodiments, and various modifications and modifications can be made within the scope of the gist thereof. A combination of a part or all of the configurations shown in each embodiment is also included in the scope of the embodiment of the present invention.

<Other embodiments>
In the second embodiment, the intermembrane space 4 is an open space, but as in the first embodiment, the intermembrane space 4 may be a closed space by arranging the sealing member 101 at the end. In that case, the effect of suppressing the pressure fluctuation can be improved by adding the damper function by the gas and the damper function by the elastic member 102, which have higher compressibility than the film.

In the first embodiment, by arranging the sealing member 101 at the ends of the first film 1 and the second film 2, the entire area of the intermembrane space 4 between the first film 1 and the second film 2 is covered. It was a closed space. However, the present invention is not limited to this, and the intermembrane space 4 may be divided into a plurality of space regions, one of which may be a closed space and the rest may be an open space. The enclosed space can be formed, for example, by creating a closed area between the films due to the shape and arrangement of the joints 3. In the flexible member, an open space is arranged in a region where relatively large deformation is desired for internal pressure adjustment, and a closed space is arranged in a region where large deformation is not desired, and the pressure change at the time of internal pressure adjustment is transmitted. May be smoother.

In the above-described embodiment, the flexible member has been described as including two films, a first film and a second film, in the layer structure. However, in the present invention, the number of films contained in the flexible member is such that an intermembrane space configured to function as a damper can be formed and the pressure change can be smoothly transmitted. As long as it is, the number is not limited to two, and may be three or more.

1 1st film 2 2nd film 4 Intermembrane space
5 1st accommodation space 6 2nd accommodation space
13 Storage container
14 Discharge head
19 Pressure chamber 35 Hydraulic fluid
100 Discharge material discharge device

Claims (10)

A discharge head that discharges the discharge material and
A storage container separated into a first storage space filled with a discharge material and communicating with the discharge head, and a second storage space filled with a hydraulic fluid.
A pressure control means that communicates with the second accommodation space and controls the internal pressure of the second accommodation space.
It is a discharge material discharge device provided with
The first accommodating space and the second accommodating space can buffer the pressure received from the first accommodating space or the second accommodating space, and the first film, the second film, and the first accommodating space. It is separated by a flexible partition wall formed by interposing between one film and the second film and containing an intermembrane space containing a gas and an elastic member arranged in the intermembrane space. Discharge material discharge device characterized by this. The flexible partition wall is configured to include a first film, a second film, and an intermembrane space that is interposed between the first film and the second film and contains a gas. The discharge material discharge device according to claim 1, wherein at least a part of the space is a closed space. A discharge head that discharges the discharge material and
A storage container separated into a first storage space filled with a discharge material and communicating with the discharge head, and a second storage space filled with a hydraulic fluid.
A pressure control means that communicates with the second accommodation space and controls the internal pressure of the second accommodation space.
It is a discharge material discharge device provided with
The first accommodation space and the second accommodation space can buffer the pressure received from the first accommodation space or the second accommodation space, and the first film, the second film, and the first. It is configured to include an intermembrane space that contains a gas and has an internal pressure equal to the atmospheric pressure, which is interposed between the 1 film and the second film, and at least a part of the intermembrane space is a closed space. A discharge material discharge device characterized by being separated by a sex partition. A discharge head that discharges the discharge material and
A storage container separated into a first storage space filled with a discharge material and communicating with the discharge head, and a second storage space filled with a hydraulic fluid.
A pressure control means that communicates with the second accommodation space and controls the internal pressure of the second accommodation space.
It is a discharge material discharge device provided with
The first accommodation space and the second accommodation space can buffer the pressure received from the first accommodation space or the second accommodation space, and the first film, the second film, and the second accommodation space can be buffered. Flexibility configured by interposing between the 1 film and the 2nd film, including an intermembrane space containing a gas and having an internal pressure equal to the atmospheric pressure, and an elastic member arranged in the intermembrane space. A discharge material discharge device characterized by being separated by a partition wall. A discharge head that discharges the discharge material and
A storage container separated into a first storage space filled with a discharge material and communicating with the discharge head, and a second storage space filled with a hydraulic fluid.
A pressure control means that communicates with the second accommodation space and controls the internal pressure of the second accommodation space.
It is a discharge material discharge device provided with
The first accommodation space and the second accommodation space can buffer the pressure received from the first accommodation space or the second accommodation space, and the first film, the second film, and the first. It is configured to include an intermembrane space that is interposed between the 1 film and the 2nd film and contains a gas and has an internal pressure higher than the internal pressure of the 1st accommodation space and the 2nd accommodation space and equal to the atmospheric pressure. A discharge material discharge device, characterized in that at least a part of the intermembrane space is separated by a flexible partition wall which is a closed space. The flexible partition wall was arranged in the intermembrane space, which is interposed between the first film, the second film, the first film and the second film, and contains a gas. The discharge material discharge device according to claim 3 or 5, further comprising an elastic member. The intermembrane space includes at least one of an open space and a closed space open to the outside air, and the elastic member is arranged in at least one of the open space and the closed space according to claim 1, 4, or 6. Discharge material discharge device. The discharge material discharge device according to any one of claims 1 to 7, wherein the first film and the second film are partially joined to each other so as to be interlockable with each other. The discharge according to any one of claims 1 to 8, wherein the pressure control means controls the internal pressure of the second accommodation space by the movement of the hydraulic fluid between the pressure control means and the second accommodation space. Material discharge device. The discharge material discharge device according to any one of claims 1 to 9, wherein the pressure control means controls the internal pressure of the second accommodation space to a pressure lower than the atmospheric pressure.

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