JP7027390B2 - Connection body and manufacturing method of connection body - Google Patents

Connection body and manufacturing method of connection body Download PDF

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JP7027390B2
JP7027390B2 JP2019209099A JP2019209099A JP7027390B2 JP 7027390 B2 JP7027390 B2 JP 7027390B2 JP 2019209099 A JP2019209099 A JP 2019209099A JP 2019209099 A JP2019209099 A JP 2019209099A JP 7027390 B2 JP7027390 B2 JP 7027390B2
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conductive particles
particles
electrode
film
liquid crystal
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JP2020038993A (en
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賢一 猿山
恭志 阿久津
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Dexerials Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member

Description

本発明は、電子部品と回路基板とが接続された接続体及び接続体の製造方法に関し、特に導電性粒子を含有する接着剤を介して電子部品が回路基板に接続された接続体及び接続体の製造方法に関する。 The present invention relates to a method for manufacturing a connector and a connector in which an electronic component and a circuit board are connected, and in particular, the connector and a connector in which the electronic component is connected to the circuit board via an adhesive containing conductive particles. Regarding the manufacturing method of.

従来から、テレビやPCモニタ、携帯電話やスマートホン、携帯型ゲーム機、タブレット端末やウェアラブル端末、あるいは車載用モニタ等の各種表示手段として、液晶表示装置や有機ELパネルが用いられている。近年、このような表示装置においては、ファインピッチ化、軽量薄型化等の観点から、駆動用ICを直接表示パネルのガラス基板上に実装するいわゆるCOG(chip on glass)が採用されている。 Conventionally, a liquid crystal display device or an organic EL panel has been used as various display means such as a television, a PC monitor, a mobile phone, a smart phone, a portable game machine, a tablet terminal, a wearable terminal, or an in-vehicle monitor. In recent years, in such a display device, a so-called COG (chip on glass) in which a drive IC is directly mounted on a glass substrate of a display panel has been adopted from the viewpoint of fine pitch, light weight and thinness.

例えばCOG実装方式が採用された液晶表示パネルにおいては、図12(A)(B)に示すように、ガラス基板等からなる透明基板101に、ITO(酸化インジウムスズ)等からなる透明電極102が複数形成され、これら透明電極102上に液晶駆動用IC103等の電子部品が接続される。液晶駆動用IC103は、実装面に、透明電極102に対応して複数の電極端子104が形成され、異方性導電フィルム105を介して透明基板101上に熱圧着されることにより、電極端子104と透明電極102とが接続される。 For example, in a liquid crystal display panel in which a COG mounting method is adopted, as shown in FIGS. 12A and 12B, a transparent substrate 101 made of a glass substrate or the like has a transparent electrode 102 made of ITO (indium tin oxide) or the like. A plurality of them are formed, and electronic components such as a liquid crystal drive IC 103 are connected on these transparent electrodes 102. In the liquid crystal drive IC 103, a plurality of electrode terminals 104 corresponding to the transparent electrodes 102 are formed on the mounting surface, and the electrode terminals 104 are thermocompression bonded onto the transparent substrate 101 via the anisotropic conductive film 105. And the transparent electrode 102 are connected.

異方性導電フィルム105は、バインダー樹脂に導電性粒子を混ぜ込んでフィルム状としたもので、2つの導体間で加熱圧着されることにより導電性粒子で導体間の電気的導通がとられ、バインダー樹脂にて導体間の機械的接続が保持される。異方性導電フィルム105を構成する接着剤としては、通常、信頼性の高い熱硬化性のバインダー樹脂が用いられるが、光硬化性のバインダー樹脂又は光熱併用型のバインダー樹脂であってもよい。 The anisotropic conductive film 105 is formed by mixing conductive particles with a binder resin to form a film. By heat-pressing between two conductors, the conductive particles take electrical conduction between the conductors. The binder resin maintains the mechanical connection between the conductors. As the adhesive constituting the anisotropic conductive film 105, a highly reliable thermosetting binder resin is usually used, but a photocurable binder resin or a photoheat-combined type binder resin may be used.

このような異方性導電フィルム105を介して液晶駆動用IC103を透明電極102へ接続する場合は、先ず、透明基板101の透明電極102上に異方性導電フィルム105を図示しない仮圧着手段によって仮貼りする。続いて、異方性導電フィルム105を介して透明基板101上に液晶駆動用IC103を搭載し仮接続体を形成した後、熱圧着ヘッド106等の熱圧着手段によって液晶駆動用IC103を異方性導電フィルム105とともに透明電極102側へ加熱押圧する。この熱圧着ヘッド106による加熱によって、異方性導電フィルム105は熱硬化反応を起こし、これにより液晶駆動用IC103が透明電極102上に接着される。 When connecting the liquid crystal drive IC 103 to the transparent electrode 102 via such an anisotropic conductive film 105, first, the anisotropic conductive film 105 is placed on the transparent electrode 102 of the transparent substrate 101 by a temporary crimping means (not shown). Temporarily paste. Subsequently, the liquid crystal drive IC 103 is mounted on the transparent substrate 101 via the anisotropic conductive film 105 to form a temporary connector, and then the liquid crystal drive IC 103 is anisotropic by a thermocompression bonding means such as a thermocompression bonding head 106. It is heated and pressed toward the transparent electrode 102 side together with the conductive film 105. By heating by the thermocompression bonding head 106, the anisotropic conductive film 105 undergoes a thermosetting reaction, whereby the liquid crystal drive IC 103 is adhered onto the transparent electrode 102.

特許第4789738号公報Japanese Patent No. 4789738 特開2004-214374号公報Japanese Unexamined Patent Publication No. 2004-214374 特開2005-203758号公報Japanese Unexamined Patent Publication No. 2005-203758

近年の液晶表示装置その他の電子機器の小型化、高精細化に伴い、回路基板の配線ピッチや電子部品の電極端子のファインピッチ化も進み、異方性導電フィルムを用いて、電極端子がファインピッチ化された回路基板上にICチップ等の電子部品をCOG接続する場合、狭小化された電極端子間においても確実に導電性粒子が挟持され導通を確保するために、導電性粒子を高密度に充填する必要がある。 With the recent miniaturization and higher definition of liquid crystal display devices and other electronic devices, the wiring pitch of circuit boards and the fine pitch of electrode terminals of electronic components have become finer, and the electrode terminals have become finer using anisotropic conductive films. When electronic components such as IC chips are COG-connected on a pitched circuit board, the conductive particles are densely packed to ensure conduction even between the narrowed electrode terminals. Need to be filled.

しかし、図13に示すように、回路基板の配線ピッチや電子部品の電極端子のファインピッチ化が進むなかで導電性粒子107を高密度に充填すると、電極端子104間に分散された導電性粒子107が連続することによる端子間ショートの発生率が高まる。 However, as shown in FIG. 13, when the conductive particles 107 are packed at a high density while the wiring pitch of the circuit board and the fine pitch of the electrode terminals of the electronic components are increasing, the conductive particles dispersed between the electrode terminals 104 are dispersed. The occurrence rate of short circuit between terminals increases due to the continuation of 107.

なお、一般に回路基板に形成される電極は印刷等により数十nm~数μmオーダーの薄さで形成されるため、回路基板側の電極間におけるショートは問題にならない。 In general, the electrodes formed on the circuit board are formed to be as thin as several tens of nm to several μm by printing or the like, so that a short circuit between the electrodes on the circuit board side does not matter.

そこで、本発明は、回路基板の配線ピッチや電子部品の電極端子がファインピッチ化されても、電子部品と回路基板との導通性を確保するとともに、電子部品の電極端子間におけるショートを防止することができる接続体及び接続体の製造方法を提供することを目的とする。 Therefore, the present invention secures continuity between the electronic component and the circuit board and prevents a short circuit between the electrode terminals of the electronic component even if the wiring pitch of the circuit board or the electrode terminal of the electronic component is made fine pitch. It is an object of the present invention to provide a connecting body which can be manufactured and a method for manufacturing the connecting body.

上述した課題を解決するために、本発明に係る接続体は、回路基板上に異方性導電接着剤を介して電子部品が接続された接続体において、上記異方性導電接着剤は、バインダー樹脂に導電性粒子が配列され、上記電子部品に形成された接続電極と上記回路基板に形成された基板電極とが、上記接続電極及び上記基板電極の配列方向にずれており、上記接続電極及び上記基板電極の配列方向における最小距離が上記導電性粒子の粒子径の4倍未満であり、上記電子部品に形成された上記接続電極間のスペースにおける上記導電性粒子同士の粒子間距離は、上記回路基板に形成された上記基板電極と上記接続電極との間に捕捉された上記導電性粒子同士の粒子間距離よりも長く、上記回路基板に形成された上記基板電極と上記接続電極との間に捕捉された上記導電性粒子の上記基板電極の長手方向の外接線が、該長手方向に隣接して捕捉された上記導電性粒子を貫くものである。 In order to solve the above-mentioned problems, the connection body according to the present invention is a connection body in which electronic components are connected via an anisotropic conductive adhesive on a circuit board, and the anisotropic conductive adhesive is a binder. Conductive particles are arranged on the resin, and the connection electrode formed on the electronic component and the substrate electrode formed on the circuit board are displaced in the arrangement direction of the connection electrode and the substrate electrode, and the connection electrode and the substrate electrode are arranged. The minimum distance in the arrangement direction of the substrate electrodes is less than four times the particle diameter of the conductive particles, and the distance between the particles of the conductive particles in the space between the connection electrodes formed on the electronic component is the above . It is longer than the interparticle distance between the conductive particles captured between the substrate electrode formed on the circuit board and the connection electrode, and is between the substrate electrode formed on the circuit board and the connection electrode. The extrinsic line in the longitudinal direction of the substrate electrode of the conductive particles captured in the above penetrates the conductive particles captured adjacent to the longitudinal direction.

また、本発明に係る接続体の製造方法は、回路基板上に、導電性粒子を含有した接着剤を介して電子部品を搭載し、上記電子部品を上記回路基板に対して押圧するとともに、上記接着剤を硬化させることにより、上記電子部品を上記回路基板上に接続する接続体の製造方法において、上記接着剤は、バインダー樹脂に導電性粒子が配列され、上記電子部品に形成された接続電極と上記回路基板に形成された基板電極とが、上記接続電極及び上記基板電極の配列方向にずれており、上記接続電極及び上記基板電極の配列方向における最小距離が上記導電性粒子の粒子径の4倍未満であり、上記接続電極間のスペースにおける上記導電性粒子同士の粒子間距離は、上記回路基板に形成された上記基板電極と上記電子部品に形成された上記接続電極との間に捕捉された上記導電性粒子同士の粒子間距離よりも長く、上記回路基板に形成された上記基板電極と上記接続電極との間に捕捉された上記導電性粒子の上記基板電極の長手方向の外接線が、該長手方向に隣接して捕捉された上記導電性粒子を貫くものである。 Further, in the method for manufacturing a connector according to the present invention, an electronic component is mounted on a circuit board via an adhesive containing conductive particles, and the electronic component is pressed against the circuit board and described above. In the method for manufacturing a connector for connecting the electronic component to the circuit board by curing the adhesive, the adhesive is a connection electrode formed on the electronic component by arranging conductive particles on a binder resin. And the substrate electrode formed on the circuit board are displaced in the arrangement direction of the connection electrode and the substrate electrode, and the minimum distance in the arrangement direction of the connection electrode and the substrate electrode is the particle diameter of the conductive particles. It is less than four times, and the interparticle distance between the conductive particles in the space between the connection electrodes is captured between the substrate electrode formed on the circuit board and the connection electrode formed on the electronic component. The extrinsic line in the longitudinal direction of the substrate electrode of the conductive particles captured between the substrate electrode formed on the circuit board and the connection electrode, which is longer than the interparticle distance between the conductive particles. Penetrates the conductive particles captured adjacently in the longitudinal direction.

本発明によれば、隣接する電極端子間の端子間スペースにおける導電性粒子同士の粒子間距離は、接続電極と基板電極との間に捕捉された導電性粒子同士の粒子間距離よりも長い。したがって、ファインピッチ化された接続電極の端子間スペースにおいて導電性粒子が連なることによる端子間ショートを防止することができる。 According to the present invention, the inter-particle distance between the conductive particles in the inter-terminal space between the adjacent electrode terminals is longer than the inter-particle distance between the conductive particles captured between the connection electrode and the substrate electrode. Therefore, it is possible to prevent a short circuit between terminals due to a series of conductive particles in the space between terminals of the connection electrode having a fine pitch.

図1は、接続体の一例として示す液晶表示パネルの断面図である。FIG. 1 is a cross-sectional view of a liquid crystal display panel shown as an example of a connector. 図2は、液晶駆動用ICと透明基板との接続工程を示す断面図である。FIG. 2 is a cross-sectional view showing a connection process between the liquid crystal drive IC and the transparent substrate. 図3は、液晶駆動用ICの電極端子(バンプ)及び端子間スペースを示す平面図である。FIG. 3 is a plan view showing the electrode terminals (bumps) of the liquid crystal drive IC and the space between the terminals. 図4は、液晶駆動用ICと透明基板において、電極端子及び端子部の配列方向における最小距離Dを示す断面図である。FIG. 4 is a cross-sectional view showing the minimum distance D in the arrangement direction of the electrode terminals and the terminal portions in the liquid crystal drive IC and the transparent substrate. 図5は、異方性導電フィルムを示す断面図である。FIG. 5 is a cross-sectional view showing an anisotropic conductive film. 図6は、導電性粒子が格子状に規則配列された異方性導電フィルムを示す平面図である。FIG. 6 is a plan view showing an anisotropic conductive film in which conductive particles are regularly arranged in a grid pattern. 図7は、導電性粒子が規則配列された異方性導電フィルムと、ランダム分散された異方性導電フィルムを用いた接続体における電極端子の粒子捕捉数の分布を示すグラフである。FIG. 7 is a graph showing the distribution of the number of captured particles of the electrode terminals in the anisotropic conductive film in which the conductive particles are regularly arranged and the anisotropic conductive film in which the conductive particles are randomly dispersed. 図8(A)は、導電性粒子が長手方向に疎、幅方向に密に配列された異方性導電フィルムを示す平面図であり、図8(B)は、導電性粒子が長手方向に密、幅方向に疎に配列された異方性導電フィルムを示す平面図である。FIG. 8A is a plan view showing an anisotropic conductive film in which the conductive particles are sparse in the longitudinal direction and densely arranged in the width direction, and FIG. 8B is a plan view in which the conductive particles are arranged in the longitudinal direction. It is a top view which shows the anisotropic conductive film which is densely arranged loosely in the width direction. 図9は、導電性粒子をフィルム長手方向及び幅方向に対して傾斜して配列させた異方性導電フィルムを、フィルム長手方向を端子部の配列方向に沿って端子部上に配置した状態を示す平面図である。FIG. 9 shows a state in which an anisotropic conductive film in which conductive particles are arranged in an inclined manner with respect to the longitudinal direction and the width direction of the film is arranged on the terminal portion along the arrangement direction of the terminal portion in the longitudinal direction of the film. It is a plan view which shows. 図10は、導電性粒子をフィルム長手方向及び幅方向に対して傾斜して配列させた他の異方性導電フィルムを、フィルム長手方向を端子部の配列方向に沿って端子部上に配置した状態を示す平面図である。In FIG. 10, another anisotropic conductive film in which conductive particles are arranged so as to be inclined with respect to the longitudinal direction and the width direction of the film is arranged on the terminal portion in the longitudinal direction of the film along the arrangement direction of the terminal portion. It is a top view which shows the state. 図11は、導電性粒子をフィルム長手方向及び幅方向に対して傾斜して配列させた他の異方性導電フィルムを、フィルム長手方向を端子部の配列方向に沿って端子部上に配置した状態を示す平面図である。In FIG. 11, another anisotropic conductive film in which conductive particles are arranged so as to be inclined with respect to the longitudinal direction and the width direction of the film is arranged on the terminal portion in the longitudinal direction of the film along the arrangement direction of the terminal portion. It is a top view which shows the state. 図12は、液晶表示パネルの透明基板にICチップを接続する工程を示す断面図であり、(A)接続前の工程、(B)は接続工程を示す。FIG. 12 is a cross-sectional view showing a step of connecting an IC chip to a transparent substrate of a liquid crystal display panel, where (A) a step before connection and (B) show a connection step. 図13は、従来の透明基板とICチップとの接続状態を示す断面図である。FIG. 13 is a cross-sectional view showing a connection state between the conventional transparent substrate and the IC chip.

以下、本発明が適用された接続体及び接続体の製造方法について、図面を参照しながら詳細に説明する。なお、本発明は、以下の実施形態のみに限定されるものではなく、本発明の要旨を逸脱しない範囲内において種々の変更が可能であることは勿論である。また、図面は模式的なものであり、各寸法の比率等は現実のものとは異なることがある。具体的な寸法等は以下の説明を参酌して判断すべきものである。また、図面相互間においても互いの寸法の関係や比率が異なる部分が含まれていることは勿論である。 Hereinafter, the connecting body to which the present invention is applied and the manufacturing method of the connecting body will be described in detail with reference to the drawings. It should be noted that the present invention is not limited to the following embodiments, and it goes without saying that various modifications can be made without departing from the gist of the present invention. In addition, the drawings are schematic, and the ratio of each dimension may differ from the actual one. Specific dimensions, etc. should be determined in consideration of the following explanation. In addition, it goes without saying that parts having different dimensional relationships and ratios are included between the drawings.

[液晶表示パネル]
以下では、本発明が適用された接続体として、ガラス基板に、電子部品として液晶駆動用のICチップが実装された液晶表示パネルを例に説明する。この液晶表示パネル10は、図1に示すように、ガラス基板等からなる二枚の透明基板11,12が対向配置され、これら透明基板11,12が枠状のシール13によって互いに貼り合わされている。そして、液晶表示パネル10は、透明基板11,12によって囲繞された空間内に液晶14が封入されることによりパネル表示部15が形成されている。
[Liquid crystal display panel]
Hereinafter, as a connector to which the present invention is applied, a liquid crystal display panel in which an IC chip for driving a liquid crystal as an electronic component is mounted on a glass substrate will be described as an example. As shown in FIG. 1, in the liquid crystal display panel 10, two transparent substrates 11 and 12 made of a glass substrate or the like are arranged to face each other, and the transparent substrates 11 and 12 are bonded to each other by a frame-shaped seal 13. .. The liquid crystal display panel 10 is formed by enclosing the liquid crystal 14 in the space surrounded by the transparent substrates 11 and 12.

透明基板11,12は、互いに対向する両内側表面に、ITO(酸化インジウムスズ)等からなる縞状の一対の透明電極16,17が、互いに交差するように形成されている。そして、両透明電極16,17は、これら両透明電極16,17の当該交差部位によって液晶表示の最小単位としての画素が構成されるようになっている。 The transparent substrates 11 and 12 are formed on both inner surfaces facing each other so that a pair of striped transparent electrodes 16 and 17 made of ITO (indium tin oxide) or the like intersect each other. The two transparent electrodes 16 and 17 are configured to have pixels as the minimum unit of the liquid crystal display by the intersections of the two transparent electrodes 16 and 17.

両透明基板11,12のうち、一方の透明基板12は、他方の透明基板11よりも平面寸法が大きく形成されており、この大きく形成された透明基板12の縁部12aには、電子部品として液晶駆動用IC18が実装されるCOG実装部20が設けられている。なお、COG実装部20には、透明電極17の端子部17a、及び液晶駆動用IC18に設けられたIC側アライメントマーク22と重畳させる基板側アライメントマーク21が形成されている。 Of the two transparent substrates 11 and 12, one of the transparent substrates 12 is formed to have a larger plane dimension than the other transparent substrate 11, and the edge portion 12a of the large transparent substrate 12 is used as an electronic component. A COG mounting unit 20 on which the liquid crystal drive IC 18 is mounted is provided. The COG mounting portion 20 is formed with a terminal portion 17a of the transparent electrode 17 and a substrate-side alignment mark 21 superimposed on the IC-side alignment mark 22 provided on the liquid crystal display driving IC 18.

液晶駆動用IC18は、画素に対して液晶駆動電圧を選択的に印加することにより、液晶の配向を部分的に変化させて所定の液晶表示を行うことができるようになっている。また、図2に示すように、液晶駆動用IC18は、透明基板12への実装面18aに、透明電極17の端子部17aと導通接続される複数の電極端子19(バンプ)が形成されている。電極端子19は、例えば銅バンプや金バンプ、あるいは銅バンプに金メッキを施したもの等が好適に用いられる。 The liquid crystal drive IC 18 can display a predetermined liquid crystal display by partially changing the orientation of the liquid crystal by selectively applying the liquid crystal drive voltage to the pixels. Further, as shown in FIG. 2, in the liquid crystal drive IC 18, a plurality of electrode terminals 19 (bumps) conductively connected to the terminal portion 17a of the transparent electrode 17 are formed on the mounting surface 18a on the transparent substrate 12. .. As the electrode terminal 19, for example, a copper bump, a gold bump, or a copper bump plated with gold is preferably used.

[電極端子]
液晶駆動用IC18は、例えば、図3に示すように、実装面18aの一方の側縁に沿って電極端子19(入力バンプ)が一列で配列され、一方の側縁と対向する他方の側縁に沿って電極端子19(出力バンプ)が複数列で千鳥状に配列されている。電極端子19と、透明基板12のCOG実装部20に設けられている端子部17aとは、それぞれ同数かつ同ピッチで形成され、透明基板12と液晶駆動用IC18とが位置合わせされて接続されることにより、接続される。
[Electrode terminal]
In the liquid crystal drive IC 18, for example, as shown in FIG. 3, electrode terminals 19 (input bumps) are arranged in a row along one side edge of the mounting surface 18a, and the other side edge facing one side edge is arranged. Electrode terminals 19 (output bumps) are arranged in a plurality of rows in a staggered manner along the line. The electrode terminals 19 and the terminal portions 17a provided on the COG mounting portion 20 of the transparent substrate 12 are formed in the same number and at the same pitch, respectively, and the transparent substrate 12 and the liquid crystal drive IC 18 are aligned and connected to each other. By doing so, it is connected.

なお、近年の液晶表示装置その他の電子機器の小型化、高機能化に伴い、液晶駆動用IC18等の電子部品も小型化、低背化が求められ、電極端子19もその高さが低くなっている(例えば6~15μm)。 With the recent miniaturization and higher functionality of liquid crystal displays and other electronic devices, electronic components such as the liquid crystal drive IC 18 are also required to be smaller and lower in height, and the height of the electrode terminal 19 is also lowered. (For example, 6 to 15 μm).

また、上述したように、近年の液晶表示装置その他の電子機器の小型化、高精細化に伴い、回路基板の配線ピッチや電子部品の電極端子のファインピッチ化も進んでいる。例えば、液晶駆動用IC18は、電極端子19の端子部17aと接続される接続面の大きさが、幅8~60μm、長さ400μm以下で下限が幅と同距離(8~60μm)又は導電性
粒子径の7倍未満とされている。また、電極端子19間の最小距離も、電極端子19の幅に準じ、例えば8~30μmとされる。また、例えば、図4に示す電極端子19及び端子部17aの配列方向における最小距離D(この距離は、異方性接続が可能な範囲で配列方向にずれていてもよい。)が導電性粒子径の4倍未満とすることができる。
Further, as described above, with the recent miniaturization and higher definition of liquid crystal display devices and other electronic devices, the wiring pitch of circuit boards and the fine pitch of electrode terminals of electronic components are also becoming finer. For example, in the liquid crystal drive IC 18, the size of the connection surface connected to the terminal portion 17a of the electrode terminal 19 is 8 to 60 μm in width, 400 μm or less in length, and the lower limit is the same distance as the width (8 to 60 μm) or conductive. It is said to be less than 7 times the particle size. Further, the minimum distance between the electrode terminals 19 is also set to, for example, 8 to 30 μm according to the width of the electrode terminals 19. Further, for example, the minimum distance D in the arrangement direction of the electrode terminal 19 and the terminal portion 17a shown in FIG. 4 (this distance may be deviated in the arrangement direction within a range where anisotropic connection is possible) is the conductive particle. It can be less than 4 times the diameter.

また、後述するように、液晶駆動用IC18は、透明基板12のCOG実装部20に実装されることにより、異方性導電フィルム1のバインダー樹脂の流動性が電極端子19上と、隣接する電極端子19間のスペース23とで異なり、この端子間スペース23におけるバインダー樹脂の流動性の方が高く、流動しやすい。この流動性に起因して、液晶表示パネル10は、端子部17aと接続される電極端子19上における導電性粒子4の最も近接する粒子との距離(以下、「粒子間距離」とも言う。)よりも、端子間スペース23における導電性粒子4の粒子間距離が長くなる。 Further, as will be described later, the liquid crystal drive IC 18 is mounted on the COG mounting portion 20 of the transparent substrate 12, so that the fluidity of the binder resin of the anisotropic conductive film 1 is on the electrode terminal 19 and the adjacent electrodes. Unlike the space 23 between the terminals 19, the fluidity of the binder resin in the space 23 between the terminals is higher and easier to flow. Due to this fluidity, the liquid crystal display panel 10 is the distance between the conductive particles 4 and the closest particles on the electrode terminal 19 connected to the terminal portion 17a (hereinafter, also referred to as “inter-particle distance”). The interparticle distance of the conductive particles 4 in the inter-terminal space 23 is longer than that of the above.

また、液晶駆動用IC18は、実装面18aに、基板側アライメントマーク21と重畳させることにより、透明基板12に対するアライメントを行うIC側アライメントマーク22が形成されている。なお、透明基板12の透明電極17の配線ピッチや液晶駆動用IC18の電極端子19のファインピッチ化が進んでいることから、液晶駆動用IC18と透明基板12とは、高精度のアライメント調整が求められている。 Further, the liquid crystal drive IC 18 has an IC-side alignment mark 22 for aligning with the transparent substrate 12 by superimposing the liquid crystal drive IC 18 on the mounting surface 18a with the substrate-side alignment mark 21. Since the wiring pitch of the transparent electrode 17 of the transparent substrate 12 and the fine pitch of the electrode terminal 19 of the liquid crystal drive IC 18 are becoming finer, high-precision alignment adjustment is required between the liquid crystal drive IC 18 and the transparent substrate 12. Has been done.

基板側アライメントマーク21及びIC側アライメントマーク22は、組み合わされることにより透明基板12と液晶駆動用IC18とのアライメントが取れる種々のマークを用いることができる。 As the substrate-side alignment mark 21 and the IC-side alignment mark 22, various marks that can be combined to align the transparent substrate 12 and the liquid crystal drive IC 18 can be used.

COG実装部20に形成されている透明電極17の端子部17a上には、回路接続用接着剤として異方性導電フィルム1を用いて液晶駆動用IC18が接続される。異方性導電フィルム1は、導電性粒子4を含有しており、液晶駆動用IC18の電極端子19と透明基板12の縁部12aに形成された透明電極17の端子部17aとを、導電性粒子4を介して電気的に接続させるものである。この異方性導電フィルム1は、熱圧着ヘッド33により熱圧着されることによりバインダー樹脂が流動化して導電性粒子4が端子部17aと液晶駆動用IC18の電極端子19との間で押し潰され、この状態でバインダー樹脂が硬化する。これにより、異方性導電フィルム1は、透明基板12と液晶駆動用IC18とを電気的、機械的に接続する。 A liquid crystal display driving IC 18 is connected to the terminal portion 17a of the transparent electrode 17 formed on the COG mounting portion 20 by using an anisotropic conductive film 1 as a circuit connecting adhesive. The anisotropic conductive film 1 contains the conductive particles 4, and the electrode terminal 19 of the liquid crystal drive IC 18 and the terminal portion 17a of the transparent electrode 17 formed on the edge portion 12a of the transparent substrate 12 are made conductive. It is electrically connected via the particles 4. The anisotropic conductive film 1 is thermocompression-bonded by the thermocompression-bonding head 33, so that the binder resin is fluidized and the conductive particles 4 are crushed between the terminal portion 17a and the electrode terminal 19 of the liquid crystal drive IC 18. , The binder resin is cured in this state. As a result, the anisotropic conductive film 1 electrically and mechanically connects the transparent substrate 12 and the liquid crystal drive IC 18.

また、両透明電極16,17上には、所定のラビング処理が施された配向膜24が形成されており、この配向膜24によって液晶分子の初期配向が規制されるようになっている。さらに、両透明基板11,12の外側には、一対の偏光板25,26が配設されており、これら両偏光板25,26によってバックライト等の光源(図示せず)からの透過光の振動方向が規制されるようになっている。 Further, an alignment film 24 subjected to a predetermined rubbing treatment is formed on both the transparent electrodes 16 and 17, and the initial orientation of the liquid crystal molecules is regulated by the alignment film 24. Further, a pair of polarizing plates 25 and 26 are arranged on the outside of both transparent substrates 11 and 12, and the light transmitted from a light source (not shown) such as a backlight is transmitted by these polarizing plates 25 and 26. The vibration direction is regulated.

[異方性導電フィルム]
次いで、異方性導電フィルム1について説明する。異方性導電フィルム(ACF:Anisotropic Conductive Film)1は、図5に示すように、通常、基材となる剥離フィルム2上に導電性粒子4を含有するバインダー樹脂層(接着剤層)3が形成されたものである。異方性導電フィルム1は、熱硬化型あるいは紫外線等の光硬化型の接着剤であり、液晶表示パネル10の透明基板12に形成された透明電極17上に貼着されるとともに液晶駆動用IC18が搭載され、熱圧着ヘッド33により熱加圧されることにより流動化して導電性粒子4が相対向する透明電極17の端子部17aと液晶駆動用IC18の電極端子19との間で押し潰され、加熱あるいは紫外線照射により、導電性粒子が押し潰された状態で硬化する。これにより、異方性導電フィルム1は、透明基板12と液晶駆動用IC18とを接続し、導通させることができる。
[Animate conductive film]
Next, the anisotropic conductive film 1 will be described. As shown in FIG. 5, the anisotropic conductive film (ACF) 1 usually has a binder resin layer (adhesive layer) 3 containing conductive particles 4 on a release film 2 as a base material. It was formed. The anisotropic conductive film 1 is a thermosetting type or a photocurable adhesive such as ultraviolet rays, and is attached on a transparent electrode 17 formed on a transparent substrate 12 of a liquid crystal display panel 10 and is a liquid crystal drive IC18. Is mounted and fluidized by being thermally pressurized by the thermal crimping head 33, and the conductive particles 4 are crushed between the terminal portion 17a of the transparent electrode 17 facing each other and the electrode terminal 19 of the liquid crystal drive IC 18. The conductive particles are cured in a crushed state by heating or irradiation with ultraviolet rays. Thereby, the anisotropic conductive film 1 can connect the transparent substrate 12 and the liquid crystal drive IC 18 and make them conductive.

また、異方性導電フィルム1は、膜形成樹脂、熱硬化性樹脂、潜在性硬化剤、シランカップリング剤等を含有する通常のバインダー樹脂層3に導電性粒子4が所定のパターンで規則的に配列されている。 Further, in the anisotropic conductive film 1, the conductive particles 4 are regularly arranged in a predetermined pattern on a normal binder resin layer 3 containing a film-forming resin, a thermosetting resin, a latent curing agent, a silane coupling agent and the like. It is arranged in.

バインダー樹脂層3を支持する剥離フィルム2は、例えば、PET(Poly Ethylene Terephthalate)、OPP(Oriented Polypropylene)、PMP(Poly-4-methylpentene-1)、PTFE(Polytetrafluoroethylene)等にシリコーン等の剥離剤を塗布してなり、異方性導電フィルム1の乾燥を防ぐとともに、異方性導電フィルム1の形状を維持する。 The release film 2 that supports the binder resin layer 3 is, for example, a release agent such as silicone applied to PET (Poly Ethylene Terephthalate), OPP (Oriented Polypropylene), PMP (Poly-4-methylpentene-1), PTFE (Polytetrafluoroethylene) and the like. It is coated to prevent the anisotropic conductive film 1 from drying and to maintain the shape of the anisotropic conductive film 1.

バインダー樹脂層3に含有される膜形成樹脂としては、平均分子量が10000~80000程度の樹脂が好ましい。膜形成樹脂としては、エポキシ樹脂、変形エポキシ樹脂、ウレタン樹脂、フェノキシ樹脂等の各種の樹脂が挙げられる。中でも、膜形成状態、接続信頼性等の観点からフェノキシ樹脂が特に好ましい。 As the film-forming resin contained in the binder resin layer 3, a resin having an average molecular weight of about 10,000 to 80,000 is preferable. Examples of the film-forming resin include various resins such as epoxy resin, modified epoxy resin, urethane resin, and phenoxy resin. Of these, phenoxy resin is particularly preferable from the viewpoint of film formation state, connection reliability and the like.

熱硬化性樹脂としては、特に限定されず、例えば、市販のエポキシ樹脂、アクリル樹脂等が挙げられる。 The thermosetting resin is not particularly limited, and examples thereof include commercially available epoxy resins and acrylic resins.

エポキシ樹脂としては、特に限定されないが、例えば、ナフタレン型エポキシ樹脂、ビフェニル型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、ビスフェノール型エポキシ樹脂、スチルベン型エポキシ樹脂、トリフェノールメタン型エポキシ樹脂、フェノールアラルキル型エポキシ樹脂、ナフトール型エポキシ樹脂、ジシクロペンタジエン型エポキシ樹脂、トリフェニルメタン型エポキシ樹脂等が挙げられる。これらは単独でも、2種以上の組み合わせであってもよい。 The epoxy resin is not particularly limited, but for example, a naphthalene type epoxy resin, a biphenyl type epoxy resin, a phenol novolac type epoxy resin, a bisphenol type epoxy resin, a stillben type epoxy resin, a triphenol methane type epoxy resin, and a phenol aralkyl type epoxy resin. , Naftor type epoxy resin, dicyclopentadiene type epoxy resin, triphenylmethane type epoxy resin and the like. These may be used alone or in combination of two or more.

アクリル樹脂としては、特に制限はなく、目的に応じてアクリル化合物、液状アクリレート等を適宜選択することができる。例えば、メチルアクリレート、エチルアクリレート、イソプロピルアクリレート、イソブチルアクリレート、エポキシアクリレート、エチレングリコールジアクリレート、ジエチレングリコールジアクリレート、トリメチロールプロパントリアクリレート、ジメチロールトリシクロデカンジアクリレート、テトラメチレングリコールテトラアクリレート、2-ヒドロキシ-1,3-ジアクリロキシプロパン、2,2-ビス[4-(アクリロキシメトキシ)フェニル]プロパン、2,2-ビス[4-(アクリロキシエトキシ)フェニル]プロパン、ジシクロペンテニルアクリレート、トリシクロデカニルアクリレート、トリス(アクリロキシエチル)イソシアヌレート、ウレタンアクリレート、エポキシアクリレート等を挙げることができる。なお、アクリレートをメタクリレートにしたものを用いることもできる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。 The acrylic resin is not particularly limited, and an acrylic compound, a liquid acrylate, or the like can be appropriately selected depending on the intended purpose. For example, methyl acrylate, ethyl acrylate, isopropyl acrylate, isobutyl acrylate, epoxy acrylate, ethylene glycol diacrylate, diethylene glycol diacrylate, trimethylolpropane triacrylate, dimethyloltricyclodecanediacrylate, tetramethylene glycol tetraacrylate, 2-hydroxy-. 1,3-Diacryloxypropane, 2,2-bis [4- (acryloxymethoxy) phenyl] propane, 2,2-bis [4- (acryloxyethoxy) phenyl] propane, dicyclopentenyl acrylate, tricyclo Examples thereof include decanyl acrylate, tris (acryloxyethyl) isocyanurate, urethane acrylate, and epoxy acrylate. In addition, what made acrylate into methacrylate can also be used. These may be used alone or in combination of two or more.

潜在性硬化剤としては、特に限定されないが、例えば、加熱硬化型、UV硬化型等の各種硬化剤が挙げられる。潜在性硬化剤は、通常では反応せず、熱、光、加圧等の用途に応じて選択される各種のトリガにより活性化し、反応を開始する。熱活性型潜在性硬化剤の活性化方法には、加熱による解離反応などで活性種(カチオンやアニオン、ラジカル)を生成する方法、室温付近ではエポキシ樹脂中に安定に分散しており高温でエポキシ樹脂と相溶・溶解し、硬化反応を開始する方法、モレキュラーシーブ封入タイプの硬化剤を高温で溶出して硬化反応を開始する方法、マイクロカプセルによる溶出・硬化方法等が存在する。熱活性型潜在性硬化剤としては、イミダゾール系、ヒドラジド系、三フッ化ホウ素-アミン錯体、スルホニウム塩、アミンイミド、ポリアミン塩、ジシアンジアミド等や、これらの変性物があり、これらは単独でも、2種以上の混合体であってもよい。中でも、マイクロカプセル型イミダゾール系潜在性硬化剤が好適である。 The latent curing agent is not particularly limited, and examples thereof include various curing agents such as a heat curing type and a UV curing type. The latent curing agent does not normally react, but is activated by various triggers selected according to the application such as heat, light, and pressurization to initiate the reaction. The method of activating the heat-active latent curing agent is a method of generating active species (cations, anions, radicals) by a dissociation reaction by heating, and a method of stably dispersing in an epoxy resin near room temperature and epoxy at a high temperature. There are a method of incompatible / dissolving with a resin to start a curing reaction, a method of eluting a molecular sieve-encapsulated type curing agent at a high temperature to start a curing reaction, a method of eluting / curing with microcapsules, and the like. Thermally active latent curing agents include imidazole type, hydrazide type, boron trifluoride-amine complex, sulfonium salt, amineimide, polyamine salt, dicyandiamide and the like, and modified products thereof. The above mixture may be used. Of these, a microcapsule type imidazole-based latent curing agent is preferable.

シランカップリング剤としては、特に限定されないが、例えば、エポキシ系、アミノ系、メルカプト・スルフィド系、ウレイド系等を挙げることができる。シランカップリング剤を添加することにより、有機材料と無機材料との界面における接着性が向上される。 The silane coupling agent is not particularly limited, and examples thereof include epoxy-based, amino-based, mercapto-sulfide-based, and ureido-based. By adding the silane coupling agent, the adhesiveness at the interface between the organic material and the inorganic material is improved.

[導電性粒子]
導電性粒子4としては、異方性導電フィルム1において使用されている公知の何れの導電性粒子を挙げることができる。導電性粒子4としては、例えば、ニッケル、鉄、銅、アルミニウム、錫、鉛、クロム、コバルト、銀、金等の各種金属や金属合金の粒子、金属酸化物、カーボン、グラファイト、ガラス、セラミック、プラスチック等の粒子の表面に金属をコートしたもの、或いは、これらの粒子の表面に更に絶縁薄膜をコートしたもの等が挙げられる。樹脂粒子の表面に金属をコートしたものである場合、樹脂粒子としては、例えば、エポキシ樹脂、フェノール樹脂、アクリル樹脂、アクリロニトリル・スチレン(AS)樹脂、ベンゾグアナミン樹脂、ジビニルベンゼン系樹脂、スチレン系樹脂等の粒子を挙げることができる。導電性粒子4の大きさは1~10μmが好ましいが、本発明はこれに限定されるものではない。
[Conductive particles]
Examples of the conductive particles 4 include any known conductive particles used in the anisotropic conductive film 1. Examples of the conductive particles 4 include particles of various metals such as nickel, iron, copper, aluminum, tin, lead, chromium, cobalt, silver, and gold, particles of metal alloys, metal oxides, carbon, graphite, glass, and ceramics. Examples thereof include those in which the surface of particles such as plastic is coated with metal, and those in which the surface of these particles is further coated with an insulating thin film. When the surface of the resin particles is coated with a metal, the resin particles include, for example, epoxy resin, phenol resin, acrylic resin, acrylonitrile-styrene (AS) resin, benzoguanamine resin, divinylbenzene resin, styrene resin and the like. Particles can be mentioned. The size of the conductive particles 4 is preferably 1 to 10 μm, but the present invention is not limited thereto.

[導電性粒子の規則配列]
異方性導電フィルム1は、導電性粒子4が平面視において所定の配列パターンで規則的に配列され、例えば図6に示すように、格子状かつ均等に配列されるものがある。平面視において規則的に配列されることにより、異方性導電フィルム1は、導電性粒子4がランダムに分散されている場合に比して、液晶駆動用IC18の隣接する電極端子19間がファインピッチ化し端子間面積が狭小化するとともに、導電性粒子4が高密度に充填されていても、液晶駆動用IC18の接続工程において、導電性粒子4の凝集体による電極端子19間のショートを防止することができる。
[Regular arrangement of conductive particles]
In the anisotropic conductive film 1, the conductive particles 4 are regularly arranged in a predetermined arrangement pattern in a plan view, and some are arranged in a grid pattern and evenly, for example, as shown in FIG. Due to the regular arrangement in the plan view, the anisotropic conductive film 1 is finer between the adjacent electrode terminals 19 of the liquid crystal drive IC 18 than in the case where the conductive particles 4 are randomly dispersed. Even if the area between the terminals is pitched and the area between the terminals is narrowed, and even if the conductive particles 4 are packed at high density, short-circuiting between the electrode terminals 19 due to the aggregates of the conductive particles 4 is prevented in the connection process of the liquid crystal drive IC 18. can do.

また、異方性導電フィルム1は、導電性粒子4が規則的に配列されることにより、バインダー樹脂層3に高密度に充填した場合にも、導電性粒子4の凝集による疎密の発生が防止されている。したがって、異方性導電フィルム1によれば、ファインピッチ化された端子部17aや電極端子19においても導電性粒子4を捕捉することができる。導電性粒子4の均等配列パターンは、任意に設定することができる。液晶駆動用IC18の接続工程については後に詳述する。 Further, in the anisotropic conductive film 1, the conductive particles 4 are regularly arranged, so that even when the binder resin layer 3 is filled with high density, the occurrence of sparse and dense due to the aggregation of the conductive particles 4 is prevented. Has been done. Therefore, according to the anisotropic conductive film 1, the conductive particles 4 can be captured even in the terminal portion 17a and the electrode terminals 19 having a fine pitch. The uniform arrangement pattern of the conductive particles 4 can be arbitrarily set. The connection process of the liquid crystal drive IC 18 will be described in detail later.

このような異方性導電フィルム1は、例えば、延伸可能なシート上に粘着剤を塗布し、その上に導電性粒子4を単層配列した後、当該シートを、所望の延伸倍率で延伸させる方法、導電性粒子4を基板上に所定の配列パターンに整列させた後、剥離フィルム2に支持されたバインダー樹脂層3に導電性粒子4を転写する方法、あるいは剥離フィルム2に支持されたバインダー樹脂層3上に、配列パターンに応じた開口部が設けられた配列板を介して導電性粒子4を供給する方法等により製造することができる。 In such an anisotropic conductive film 1, for example, a pressure-sensitive adhesive is applied onto a stretchable sheet, conductive particles 4 are arranged in a single layer on the adhesive, and then the sheet is stretched at a desired stretching ratio. Method, a method of transferring the conductive particles 4 to the binder resin layer 3 supported by the release film 2 after arranging the conductive particles 4 in a predetermined arrangement pattern on the substrate, or a method of transferring the conductive particles 4 to the binder resin layer 3 supported by the release film 2. It can be manufactured by a method of supplying the conductive particles 4 via an arrangement plate provided with openings corresponding to the arrangement pattern on the resin layer 3.

[粒子個数密度]
ここで、透明基板12の透明電極17の配線ピッチや液晶駆動用IC18の電極端子19のファインピッチ化が進んでいることから、透明基板12上に液晶駆動用IC18をCOG接続する場合、ファインピッチ化された電極端子19及び端子部17aとの間においても確実に導電性粒子が挟持され導通を確保するために、異方性導電フィルム1は、導電性粒子4が高密度で配列されている。
[Particle number density]
Here, since the wiring pitch of the transparent electrode 17 of the transparent substrate 12 and the fine pitch of the electrode terminal 19 of the liquid crystal drive IC 18 are becoming finer, when the liquid crystal drive IC 18 is COG-connected on the transparent substrate 12, the fine pitch is increased. In order to ensure conduction by sandwiching the conductive particles between the electrode terminal 19 and the terminal portion 17a, the anisotropic conductive film 1 has the conductive particles 4 arranged at a high density. ..

具体的に、異方性導電フィルム1は、導電性粒子4が5000~60000個/mm2の個数密度で配列されている。粒子個数密度が5000個/mm2よりも少ないとファインピッチ化された電極端子19及び端子部17aとの間における粒子捕捉数が減少し、導通抵抗が上がってしまう。また、粒子個数密度が60000個/mm2よりも多いと狭小
化された電極端子19間の端子間スペース23にある導電性粒子4が連なってしまい、隣接する電極端子19間をショートさせるおそれがある。なお、これらは一例であり、粒子個数密度は導電性粒子4の大きさから任意に調整するものであり、本発明はこれに限定されるものではない。
Specifically, in the anisotropic conductive film 1, the conductive particles 4 are arranged at a number density of 5000 to 60,000 particles / mm 2 . If the particle number density is less than 5000 particles / mm 2 , the number of particles captured between the fine-pitched electrode terminal 19 and the terminal portion 17a decreases, and the conduction resistance increases. Further, if the particle number density is more than 60,000 particles / mm 2 , the conductive particles 4 in the narrowed space between the terminals 19 between the electrode terminals 19 will be connected, and there is a possibility that the adjacent electrode terminals 19 will be short-circuited. be. It should be noted that these are examples, and the particle number density is arbitrarily adjusted from the size of the conductive particles 4, and the present invention is not limited thereto.

なお、異方性導電フィルム1の形状は、特に限定されないが、例えば、図5に示すように、巻取リール6に巻回可能な長尺テープ形状とし、所定の長さだけカットして使用することができる。 The shape of the anisotropic conductive film 1 is not particularly limited, but for example, as shown in FIG. 5, a long tape shape that can be wound around the take-up reel 6 is used, and the length is cut by a predetermined length. can do.

また、上述の実施の形態では、異方性導電フィルム1として、バインダー樹脂層3に導電性粒子4を規則配列した熱硬化性樹脂組成物をフィルム状に成形した接着フィルムを例に説明したが、本発明に係る接着剤は、これに限定されず、例えばバインダー樹脂3のみからなる絶縁性接着剤層と導電性粒子4を規則配列したバインダー樹脂3からなる導電性粒子含有層とを積層した構成とすることができる。また、異方性導電フィルム1は、導電性粒子4が平面視で規則配列されていれば、図5に示すように単層配列されている他、複数のバインダー樹脂層3にわたって導電性粒子4が配列されるとともに平面視において規則配列されるものでもよい。また、異方性導電フィルム1は、多層構成の少なくとも一つの層内で、所定距離で単一に分散されたものでもよい。 Further, in the above-described embodiment, as the anisotropic conductive film 1, an adhesive film obtained by molding a thermosetting resin composition in which conductive particles 4 are regularly arranged on a binder resin layer 3 into a film shape has been described as an example. The adhesive according to the present invention is not limited to this, and for example, an insulating adhesive layer made of only the binder resin 3 and a conductive particle-containing layer made of the binder resin 3 in which the conductive particles 4 are regularly arranged are laminated. It can be configured. Further, in the anisotropic conductive film 1, if the conductive particles 4 are regularly arranged in a plan view, they are arranged in a single layer as shown in FIG. 5, and the conductive particles 4 are arranged over a plurality of binder resin layers 3. Are arranged and may be regularly arranged in a plan view. Further, the anisotropic conductive film 1 may be singly dispersed at a predetermined distance in at least one layer having a multilayer structure.

[接続工程]
次いで、透明基板12に液晶駆動用IC18を接続する接続工程について説明する。先ず、透明基板12の端子部17aが形成されたCOG実装部20上に異方性導電フィルム1を仮貼りする。次いで、この透明基板12を接続装置のステージ上に載置し、透明基板12の実装部上に異方性導電フィルム1を介して液晶駆動用IC18を配置する。
[Connection process]
Next, a connection step of connecting the liquid crystal drive IC 18 to the transparent substrate 12 will be described. First, the anisotropic conductive film 1 is temporarily attached onto the COG mounting portion 20 on which the terminal portion 17a of the transparent substrate 12 is formed. Next, the transparent substrate 12 is placed on the stage of the connecting device, and the liquid crystal drive IC 18 is arranged on the mounting portion of the transparent substrate 12 via the anisotropic conductive film 1.

次いで、バインダー樹脂層3を硬化させる所定の温度に加熱された熱圧着ヘッド33によって、所定の圧力、時間で液晶駆動用IC18上から熱加圧する。これにより、異方性導電フィルム1のバインダー樹脂層3は流動性を示し、液晶駆動用IC18の実装面18aと透明基板12のCOG実装部20の間から流出するとともに、バインダー樹脂層3中の導電性粒子4は、液晶駆動用IC18の電極端子19と透明基板12の端子部17aとの間に挟持されて押し潰される。 Next, the binder resin layer 3 is heat-pressed from the liquid crystal drive IC 18 at a predetermined pressure and time by a thermocompression bonding head 33 heated to a predetermined temperature. As a result, the binder resin layer 3 of the anisotropic conductive film 1 exhibits fluidity, flows out from between the mounting surface 18a of the liquid crystal drive IC 18 and the COG mounting portion 20 of the transparent substrate 12, and is in the binder resin layer 3. The conductive particles 4 are sandwiched between the electrode terminal 19 of the liquid crystal drive IC 18 and the terminal portion 17a of the transparent substrate 12 and crushed.

その結果、電極端子19と端子部17aとの間で導電性粒子4を挟持することにより電気的に接続され、この状態で熱圧着ヘッド33によって加熱されたバインダー樹脂が硬化する。これにより、液晶駆動用IC18の電極端子19と透明基板12に形成された端子部17aとの間で導通性を確保された液晶表示パネル10を製造することができる。 As a result, the conductive particles 4 are electrically connected by sandwiching the conductive particles 4 between the electrode terminal 19 and the terminal portion 17a, and the binder resin heated by the thermocompression bonding head 33 is cured in this state. As a result, it is possible to manufacture the liquid crystal display panel 10 in which the conductivity is ensured between the electrode terminal 19 of the liquid crystal driving IC 18 and the terminal portion 17a formed on the transparent substrate 12.

電極端子19と端子部17aとの間にない導電性粒子4は、隣接する電極端子19間の端子間スペース23においてバインダー樹脂に分散されており、電気的に絶縁した状態を維持している。これにより、液晶駆動用IC18の電極端子19と透明基板12の端子部17aとの間のみで電気的導通が図られる。なお、バインダー樹脂として、ラジカル重合反応系の速硬化タイプのものを用いることで、短い加熱時間によってもバインダー樹脂を速硬化させることができる。また、異方性導電フィルム1としては、熱硬化型に限らず、加圧接続を行うものであれば、光硬化型もしくは光熱併用型の接着剤を用いてもよい。 The conductive particles 4 that are not between the electrode terminal 19 and the terminal portion 17a are dispersed in the binder resin in the space between the terminals 23 between the adjacent electrode terminals 19, and maintain an electrically insulated state. As a result, electrical conduction is achieved only between the electrode terminal 19 of the liquid crystal drive IC 18 and the terminal portion 17a of the transparent substrate 12. By using a radical polymerization reaction system, which is a fast-curing type, as the binder resin, the binder resin can be quickly cured even with a short heating time. Further, the anisotropic conductive film 1 is not limited to the thermosetting type, and a photocuring type or a photothermal combined type adhesive may be used as long as it is pressure-connected.

[導電性粒子間距離]
ここで、本発明においては、隣接する電極端子19間の端子間スペース23における導電性粒子4同士の粒子間距離は、電極端子19と端子部17aとの間に捕捉された導電性粒子4同士の粒子間距離よりも長い。したがって、液晶表示パネル10は、ファインピッチ化された電極端子19の端子間スペース23において導電性粒子4が連なることによる
端子間ショートを防止することができる。
[Distance between conductive particles]
Here, in the present invention, the interparticle distance between the conductive particles 4 in the inter-terminal space 23 between the adjacent electrode terminals 19 is the distance between the conductive particles 4 captured between the electrode terminal 19 and the terminal portion 17a. Longer than the interparticle distance of. Therefore, the liquid crystal display panel 10 can prevent a short circuit between terminals due to a series of conductive particles 4 in the space 23 between terminals of the finely pitched electrode terminals 19.

すなわち、本発明においては、異方性導電フィルム1の導電性粒子4が規則的に配置されている。また、熱圧着ヘッド33による熱加圧時において、液晶駆動用IC18は、電極端子19上よりも、端子間スペース23の方がバインダー樹脂の流動性が高く流動しやすい。さらに、電極端子19と端子部17aとの間に捕捉された導電性粒子4は、バインダー樹脂の流動による影響が低い。 That is, in the present invention, the conductive particles 4 of the anisotropic conductive film 1 are regularly arranged. Further, at the time of thermal pressurization by the thermocompression bonding head 33, the liquid crystal drive IC 18 has higher fluidity of the binder resin in the space 23 between the terminals than on the electrode terminals 19, and is more likely to flow. Further, the conductive particles 4 captured between the electrode terminal 19 and the terminal portion 17a are less affected by the flow of the binder resin.

一方、端子間スペース23における導電性粒子4は、電極端子19や端子部17aに挟持されておらず、熱圧着ヘッド33による熱加圧によって流動するバインダー樹脂の影響を相対的に大きく受ける。このため、端子間スペース23における導電性粒子4は、粒子間距離が相対的に大きくなる。したがって、液晶表示パネル10は、電極端子19と端子部17aとの間に確実に導電性粒子4を捕捉して導通性を確保することができ、かつ、隣接する電極端子19間の端子間スペース23において、粒子間距離を保持するため、電極端子19間のショートを防止することができる。 On the other hand, the conductive particles 4 in the space between terminals 23 are not sandwiched between the electrode terminals 19 and the terminal portions 17a, and are relatively greatly affected by the binder resin that flows due to the thermal pressurization by the thermocompression bonding head 33. Therefore, the distance between the conductive particles 4 in the space between terminals 23 is relatively large. Therefore, the liquid crystal display panel 10 can surely capture the conductive particles 4 between the electrode terminal 19 and the terminal portion 17a to secure the conductivity, and the space between the terminals between the adjacent electrode terminals 19 can be ensured. In 23, since the distance between particles is maintained, a short circuit between the electrode terminals 19 can be prevented.

また、上述したように、導電性粒子の個数密度は5000~60000個/mm2とされていることが好ましい。当該個数密度を有することにより、液晶表示パネル10は、狭小化された端子間スペース23において導電性粒子4が連続することによる端子間ショートを防止するとともに、ファインピッチ化された電極端子19と端子部17aとの間に導電性粒子4を確実に捕捉し、導通性を向上させることができる。 Further, as described above, the number density of the conductive particles is preferably 5000 to 60,000 particles / mm 2 . By having the number density, the liquid crystal display panel 10 prevents a short circuit between terminals due to the continuation of the conductive particles 4 in the narrowed space between terminals 23, and at the same time, the fine pitched electrode terminals 19 and terminals. Conductive particles 4 can be reliably captured between the portions 17a and the conductivity can be improved.

図7は、導電性粒子4が規則的に配置された異方性導電フィルム1(個数密度:28000個/mm2)と導電性粒子がランダムに分散されている異方性導電フィルム(個数密度:60000個/mm2)とを用いてそれぞれ異方性導電接続された接続体における一つの電極端子19の導電性粒子捕捉数の分布を対比したグラフである。電極端子19のサイズは14μm×50μm(=700μm2)、電極端子19間の距離は14μmである。また、異方性導電フィルム1のバインダー及び接続条件は、下記の実施例及び比較例に準ずる。 FIG. 7 shows an anisotropic conductive film 1 (number density: 28,000 / mm 2 ) in which the conductive particles 4 are regularly arranged and an anisotropic conductive film (number density) in which the conductive particles are randomly dispersed. : 60,000 pieces / mm 2 ) is a graph comparing the distribution of the number of conductive particles captured by one electrode terminal 19 in the anisotropically conductively connected connectors. The size of the electrode terminals 19 is 14 μm × 50 μm (= 700 μm 2 ), and the distance between the electrode terminals 19 is 14 μm. The binder and connection conditions of the anisotropic conductive film 1 are the same as those in the following examples and comparative examples.

図7に示すように、異方性導電フィルム1を用いて製造された接続体では、捕捉の確実性が向上されていることがわかる。 As shown in FIG. 7, it can be seen that the capture reliability is improved in the connection body manufactured by using the anisotropic conductive film 1.

[フィルム長手方向に疎密配列]
また、図8(A)に示すように、異方性導電フィルム1は、端子部17a及び電極端子19の配列方向を長手方向とするフィルム状に形成され、導電性粒子4が、長手方向にわたって疎、幅方向に亘って密に配列されていてもよい。
[Sparsely dense arrangement in the longitudinal direction of the film]
Further, as shown in FIG. 8A, the anisotropic conductive film 1 is formed in a film shape having the arrangement direction of the terminal portion 17a and the electrode terminals 19 in the longitudinal direction, and the conductive particles 4 are formed in the longitudinal direction. It may be sparse and densely arranged in the width direction.

異方性導電フィルム1は、長手方向を端子部17a及び電極端子19の配列方向に沿って貼着される。したがって、異方性導電フィルム1は、COG実装部20に貼り合われることにより、導電性粒子4が端子部17a及び電極端子19の配列方向にわたって疎に配列され、端子部17a及び電極端子19の長さ方向にわたって密に配列される。 The anisotropic conductive film 1 is attached in the longitudinal direction along the arrangement direction of the terminal portion 17a and the electrode terminals 19. Therefore, in the anisotropic conductive film 1, the conductive particles 4 are sparsely arranged along the arrangement direction of the terminal portion 17a and the electrode terminal 19 by being bonded to the COG mounting portion 20, and the terminal portion 17a and the electrode terminal 19 are arranged. It is densely arranged in the length direction.

このような異方性導電フィルム1は、相対的に導電性粒子4が端子部17a及び電極端子19の配列方向にわたって疎に配列されることにより、端子間スペース23において隣接する電極端子19間にわたる導電性粒子4の数が減り、粒子間距離が広がるため、より電極端子19間のショートを防止することができる。 In such an anisotropic conductive film 1, the conductive particles 4 are relatively sparsely arranged in the arrangement direction of the terminal portion 17a and the electrode terminals 19, so that the anisotropic conductive film 1 extends between the adjacent electrode terminals 19 in the terminal-to-terminal space 23. Since the number of the conductive particles 4 is reduced and the distance between the particles is widened, it is possible to further prevent a short circuit between the electrode terminals 19.

また、異方性導電フィルム1は、相対的に導電性粒子4が幅方向に亘って密に配列されているため、端子部17a及び電極端子19の間における導電性粒子4の粒子捕捉率が上
がる。したがって、液晶駆動用IC18との導通性を損なうこともない。
Further, in the anisotropic conductive film 1, since the conductive particles 4 are relatively densely arranged in the width direction, the particle capture rate of the conductive particles 4 between the terminal portion 17a and the electrode terminal 19 is high. Go up. Therefore, the continuity with the liquid crystal drive IC 18 is not impaired.

なお、図8(B)に示すように、異方性導電フィルム1は、端子部17a及び電極端子19の配列方向を長手方向とするフィルム状に形成され、導電性粒子4が、長手方向にわたって密、幅方向に亘って疎に配列されていてもよい。 As shown in FIG. 8B, the anisotropic conductive film 1 is formed in a film shape having the arrangement direction of the terminal portion 17a and the electrode terminals 19 in the longitudinal direction, and the conductive particles 4 are formed in the longitudinal direction. It may be densely and sparsely arranged in the width direction.

この場合も、端子間スペース23における導電性粒子4は、熱圧着ヘッド33による熱加圧によって流動するバインダー樹脂の影響を大きく受け、粒子間距離が相対的に大きくなる。そのため、液晶表示パネル10は、電極端子19間のショートを防止することができる。 Also in this case, the conductive particles 4 in the space between terminals 23 are greatly affected by the binder resin that flows due to the thermal pressurization by the thermocompression bonding head 33, and the distance between the particles becomes relatively large. Therefore, the liquid crystal display panel 10 can prevent a short circuit between the electrode terminals 19.

また、液晶表示パネル10は、相対的に導電性粒子4がフィルムの長さ方向に亘って密に配列されているため、端子部17a及び電極端子19の間において導電性粒子4を確実に捕捉することができ、液晶駆動用IC18との導通性を損なうこともない。 Further, in the liquid crystal display panel 10, since the conductive particles 4 are relatively densely arranged in the length direction of the film, the conductive particles 4 are reliably captured between the terminal portion 17a and the electrode terminals 19. This can be done, and the continuity with the liquid crystal drive IC 18 is not impaired.

[高密度充填配列]
また、図9~図11に示すように、異方性導電フィルム1は、フィルムの長手方向Lfと直交する幅方向Ltに対して、導電性粒子4を傾斜させて配列し、フィルムの長手方向Lfを端子部17aの配列方向と平行、且つフィルムの幅方向Ltを端子部17aの長手方向と平行に配置させることにより、異方導電性フィルム1の長手方向Lfに直交する方向の、導電性粒子Pの外接線(二点鎖線)が、その導電性粒子Pに隣接する導電性粒子Pc、Peを貫いてもよい。
[High density filling array]
Further, as shown in FIGS. 9 to 11, the anisotropic conductive film 1 is arranged by inclining the conductive particles 4 with respect to the width direction Lt orthogonal to the longitudinal direction Lf of the film, and is arranged in the longitudinal direction of the film. By arranging Lf parallel to the arrangement direction of the terminal portions 17a and the width direction Lt of the film parallel to the longitudinal direction of the terminal portions 17a, the anisotropic conductive film 1 is conductive in the direction orthogonal to the longitudinal direction Lf. The extrinsic line (two-point chain line) of the particle P may penetrate the conductive particles Pc and Pe adjacent to the conductive particle P.

これにより、透明電極17の端子部17aに異方導電性フィルム1を重ねた平面図において、端子部17aの幅方向(フィルムの長手方向Lf)に対する隣接する導電性粒子4の粒子間距離が密となり、ファインピッチ化された端子部17aの接続面に占める導電性粒子4の捕捉率を向上することができる。よって、異方性導電フィルム1は、異方導電接続時に対向する電極端子19との間で挟持されて端子部17aに押し込まれ、電極端子19と端子部17aとの間を導通させる導電性粒子Pの数が不十分になることを防止することができる。 As a result, in the plan view in which the anisotropic conductive film 1 is superposed on the terminal portion 17a of the transparent electrode 17, the interparticle distance between the adjacent conductive particles 4 in the width direction (longitudinal direction Lf of the film) of the terminal portion 17a is close. Therefore, it is possible to improve the capture rate of the conductive particles 4 in the connection surface of the terminal portion 17a having a fine pitch. Therefore, the anisotropic conductive film 1 is sandwiched between the opposite electrode terminals 19 at the time of the anisotropic conductive connection and pushed into the terminal portion 17a, and the conductive particles are made conductive between the electrode terminals 19 and the terminal portions 17a. It is possible to prevent the number of Ps from becoming insufficient.

なお、図9~図11に示す異方性導電フィルム1は、導電性粒子がフィルム幅方向Ltへの第2配列方向L2がフィルム幅方向Ltに対して傾斜するとともに、フィルムの長手方向Lfへの第1配列方向L1がフィルム長手方向Lfに対して傾斜することにより、端子部17aの幅方向及び長手方向に対する隣接する導電性粒子間距離が密とされ、より捕捉率が向上されている。 In the anisotropic conductive film 1 shown in FIGS. 9 to 11, the conductive particles are inclined in the second arrangement direction L2 in the film width direction Lt with respect to the film width direction Lt, and are inclined toward the film longitudinal direction Lf. By inclining the first arrangement direction L1 of the film with respect to the film longitudinal direction Lf, the distance between adjacent conductive particles in the width direction and the longitudinal direction of the terminal portion 17a is made dense, and the capture rate is further improved.

次いで、本発明の実施例について説明する。本実施例では、導電性粒子が規則配列された異方性導電フィルムと、導電性粒子がランダムに分散された異方性導電フィルムを用いて、評価用ガラス基板に評価用ICを接続した接続体サンプルを作成し、それぞれ評価用ガラス基板に形成された基板電極と評価用ICに形成されたICバンプとの間に捕捉された導電性粒子の数及び導電性粒子の最も近接する粒子との距離(粒子間距離)、隣接するICバンプ間に亘るバンプ間スペースにおける導電性粒子の数及び導電性粒子の最も近接する粒子との距離(粒子間距離)、初期導通抵抗、隣接するICバンプ間のショート発生率を測定した。 Next, examples of the present invention will be described. In this embodiment, an anisotropic conductive film in which the conductive particles are regularly arranged and an anisotropic conductive film in which the conductive particles are randomly dispersed are used, and the evaluation IC is connected to the evaluation glass substrate. A body sample was prepared, and the number of conductive particles captured between the substrate electrode formed on the evaluation glass substrate and the IC bump formed on the evaluation IC and the closest particle of the conductive particles were used. Distance (inter-particle distance), number of conductive particles in the inter-bump space between adjacent IC bumps, distance from the closest particles of the conductive particles (inter-particle distance), initial conduction resistance, between adjacent IC bumps The short circuit rate was measured.

[異方性導電フィルム]
評価用ICの接続に用いる異方性導電フィルムのバインダー樹脂層は、フェノキシ樹脂(商品名:YP50、新日鐵化学社製)60質量部、エポキシ樹脂(商品名:jER828、三菱化学社製)40質量部、カチオン系硬化剤(商品名:SI‐60L、三新化学工業社製)2質量部を溶剤に加えたバインダー樹脂組成物を調整し、このバインダー樹脂組成物を剥離フィルム上に塗布、焼成することにより形成した。
[Animate conductive film]
The binder resin layer of the anisotropic conductive film used to connect the evaluation IC is a phenoxy resin (trade name: YP50, manufactured by Nippon Steel Chemical Co., Ltd.) by 60 parts by mass, and an epoxy resin (trade name: jER828, manufactured by Mitsubishi Chemical Co., Ltd.). A binder resin composition was prepared by adding 40 parts by mass and 2 parts by mass of a cationic curing agent (trade name: SI-60L, manufactured by Sanshin Chemical Industry Co., Ltd.) to a solvent, and this binder resin composition was applied onto a release film. , Formed by firing.

[評価用IC]
評価素子として、外形;1.8mm×20mm、厚み0.5mm、バンプ(Au‐plated);幅30μ×長さ85μm、高さ15μm、バンプ間スペース幅;50μmの評価用ICを用いた。
[Evaluation IC]
As the evaluation element, an evaluation IC having an outer shape; 1.8 mm × 20 mm, a thickness of 0.5 mm, a bump (Au-plated); a width of 30 μ × a length of 85 μm, a height of 15 μm, and a space width between bumps: 50 μm was used.

[評価用ガラス基板]
評価用ICが接続される評価用ガラス基板として、外形;30mm×50mm、厚み0.5mm、評価用ICのバンプと同サイズ同ピッチの櫛歯状の電極パターンが形成されたITOパターングラスを用いた。
[Glass substrate for evaluation]
As the evaluation glass substrate to which the evaluation IC is connected, an ITO pattern glass having an outer shape; 30 mm × 50 mm, a thickness of 0.5 mm, and a comb-shaped electrode pattern having the same size and pitch as the bump of the evaluation IC is used. board.

この評価用ガラス基板に異方性導電フィルムを仮貼りした後、ICバンプと基板電極とのアライメントを取りながら評価用ICを搭載し、熱圧着ヘッドにより180℃、80MPa、5secの条件で熱圧着することにより接続体サンプルを作成した。各接続体サンプルについて、ICバンプと基板電極との間に挟持されている導電性粒子の捕捉数及び粒子間距離、隣接するICバンプ間に亘るバンプ間スペースにある導電性粒子の数及び粒子間距離、初期導通抵抗、隣接するICバンプ間のショート発生率を測定した。 After temporarily attaching the anisotropic conductive film to this evaluation glass substrate, the evaluation IC is mounted while aligning the IC bump and the substrate electrode, and thermocompression bonding is performed at 180 ° C., 80 MPa, and 5 sec by the thermocompression bonding head. By doing so, a connection sample was created. For each connector sample, the number of trapped conductive particles and the distance between particles sandwiched between the IC bump and the substrate electrode, the number of conductive particles in the space between bumps between adjacent IC bumps, and the distance between particles. The distance, initial conduction resistance, and short circuit occurrence rate between adjacent IC bumps were measured.

ICバンプと基板電極との間に挟持されている導電性粒子の捕捉数は、各接続体サンプルについて、基板電極に現れる圧痕を評価用ガラス基板の裏面から観察し、1対のICバンプ及び基板電極の間に捕捉された導電性粒子の数を、任意の100個のICバンプ及び基板電極について計測して、その平均を求めた。同様に、ICバンプと基板電極との間に捕捉された導電性粒子の粒子間距離は、基板電極に現れる圧痕を評価用ガラス基板の裏面から観察し、任意の100個のICバンプ及び基板電極について計測し、その平均及び最小距離を求めた。 The number of trapped conductive particles sandwiched between the IC bump and the substrate electrode is determined by observing the indentation appearing on the substrate electrode from the back surface of the evaluation glass substrate for each connector sample, and pairing the IC bump and the substrate. The number of conductive particles trapped between the electrodes was measured for any 100 IC bumps and substrate electrodes, and the average was calculated. Similarly, for the interparticle distance of the conductive particles captured between the IC bump and the substrate electrode, the indentation appearing on the substrate electrode is observed from the back surface of the evaluation glass substrate, and any 100 IC bumps and the substrate electrode are observed. Was measured, and the average and minimum distances were calculated.

バンプ間スペースにある導電性粒子の数は、各接続体サンプルについて、評価用ガラス基板の裏面から観察し、任意の100個のバンプ間スペースについて計測し、その平均を求めた。同様に、バンプ間スペースにある導電性粒子の粒子間距離は、評価用ガラス基板の裏面から観察し、任意の100個のバンプ間スペースについて計測し、その平均及び最小距離を求めた。なお、同一観察面において深さ方向でずれているものは、計測値から概算して求めた。 The number of conductive particles in the inter-bump space was observed from the back surface of the evaluation glass substrate for each connection sample, measured for any 100 inter-bump spaces, and the average was calculated. Similarly, the inter-particle distance of the conductive particles in the inter-bump space was observed from the back surface of the evaluation glass substrate, measured for any 100 inter-bump spaces, and the average and minimum distances were obtained. It should be noted that, on the same observation surface, those deviated in the depth direction were roughly calculated from the measured values.

また、各接続体サンプルは、初期導通抵抗が0.5Ω以下、ICバンプ間のショート発生率が50ppm以下を良好と評価した。 Further, each connected sample was evaluated as having a good initial conduction resistance of 0.5 Ω or less and a short circuit occurrence rate between IC bumps of 50 ppm or less.

[実施例1]
実施例1では、導電性粒子がバインダー樹脂層に規則配列された異方性導電フィルムを用いた。実施例1で用いた異方性導電フィルムは、延伸可能なシート上に粘着剤を塗布し、その上に導電性粒子を格子状かつ均等に単層配列した後、当該シートを所望の延伸倍率で延伸させた状態で、バインダー樹脂層をラミネートすることにより製造した。使用した導電性粒子(商品名:AUL704、積水化学工業社製)は粒子径4μmで、接続前における粒子間距離は0.5μm、粒子個数密度は28000個/mm2である。
[Example 1]
In Example 1, an anisotropic conductive film in which conductive particles were regularly arranged in a binder resin layer was used. In the anisotropic conductive film used in Example 1, an adhesive is applied on a stretchable sheet, conductive particles are arranged in a lattice pattern and evenly in a single layer, and then the sheet is subjected to a desired draw ratio. It was produced by laminating a binder resin layer in a state of being stretched in. The conductive particles used (trade name: AUL704, manufactured by Sekisui Chemical Co., Ltd.) have a particle diameter of 4 μm, a distance between particles before connection is 0.5 μm, and a particle number density is 28,000 particles / mm 2 .

[実施例2]
実施例2では、接続前における粒子間距離が1μm、粒子個数密度が16000個/mm2の異方性導電フィルムを用いた他は、実施例1と同じ条件とした。
[Example 2]
In Example 2, the same conditions as in Example 1 were used except that an anisotropic conductive film having a particle distance of 1 μm and a particle number density of 16000 / mm 2 before connection was used.

[実施例3]
実施例3では、接続前における粒子間距離が1.5μm、粒子個数密度が10500個/mm2の異方性導電フィルムを用いた他は、実施例1と同じ条件とした。
[Example 3]
In Example 3, the same conditions as in Example 1 were used except that an anisotropic conductive film having a particle-to-particle distance of 1.5 μm and a particle number density of 10500 / mm 2 before connection was used.

[実施例4]
実施例4では、接続前における粒子間距離が3μm、粒子個数密度が5200個/mm2の異方性導電フィルムを用いた他は、実施例1と同じ条件とした。
[Example 4]
In Example 4, the same conditions as in Example 1 were used except that an anisotropic conductive film having a particle distance of 3 μm and a particle number density of 5200 particles / mm 2 before connection was used.

[実施例5]
実施例5では、接続前における粒子間距離が0.5μm、粒子個数密度が50000個/mm2の異方性導電フィルムを用いた他は、実施例1と同じ条件とした。
[Example 5]
In Example 5, the same conditions as in Example 1 were used except that an anisotropic conductive film having a particle distance of 0.5 μm and a particle number density of 50,000 particles / mm 2 before connection was used.

[比較例1]
比較例1では、バインダー樹脂組成物に導電性粒子を加えて調整し、剥離フィルム上に塗布、焼成することにより、バインダー樹脂層に導電性粒子がランダムに分散されている異方性導電フィルムを用いた。使用した導電性粒子(商品名:AUL704、積水化学工業社製)は粒子径4μmで、粒子個数密度は100000個/mm2である。
[Comparative Example 1]
In Comparative Example 1, an anisotropic conductive film in which conductive particles are randomly dispersed in a binder resin layer is obtained by adding conductive particles to a binder resin composition to prepare the binder resin composition, applying the mixture onto a release film, and firing the mixture. Using. The conductive particles used (trade name: AUL704, manufactured by Sekisui Chemical Co., Ltd.) have a particle diameter of 4 μm and a particle number density of 100,000 particles / mm 2 .

[比較例2]
比較例2では、粒子個数密度は16000個/mm2である他は、比較例1と同じ条件とした。
[Comparative Example 2]
In Comparative Example 2, the conditions were the same as those in Comparative Example 1 except that the particle number density was 16000 particles / mm 2 .

Figure 0007027390000001
Figure 0007027390000001

表1に示すように、実施例1~5に係る接続体サンプルでは、1対の評価用ICのICバンプ及び評価用ガラス基板の基板電極の間に挟持された導電性粒子の数が平均8.1以上であり、初期導通抵抗が0.4Ω以下と良好であった。1対のICバンプ及び基板電極の間に挟持された導電性粒子の粒子間距離は、平均1.2μm以上で、最小でも0.2μm以上であった。 As shown in Table 1, in the connector samples according to Examples 1 to 5, the number of conductive particles sandwiched between the IC bumps of the pair of evaluation ICs and the substrate electrodes of the evaluation glass substrate is 8 on average. It was 0.1 or more, and the initial conduction resistance was 0.4Ω or less, which was good. The interparticle distance of the conductive particles sandwiched between the pair of IC bumps and the substrate electrodes was 1.2 μm or more on average, and 0.2 μm or more at the minimum.

また、実施例1~5に係る接続体サンプルでは、隣接するICバンプ間に亘るバンプ間スペースにおける導電性粒子の数が平均で14.3~194.2と分かれたが、導電性粒子の粒子間距離は、平均で1.4μm以上、最小でも0.3μmとなり、ICバンプ間のショート発生率は50ppmよりも低く、絶縁性も良好であった。 Further, in the connection sample according to Examples 1 to 5, the number of conductive particles in the space between bumps extending between adjacent IC bumps was divided into 14.3 to 194.2 on average, but the particles of conductive particles. The average distance was 1.4 μm or more, and the minimum was 0.3 μm. The short-circuit occurrence rate between IC bumps was lower than 50 ppm, and the insulating property was also good.

一方、比較例1では、個数密度が100000個/mm2で充填された導電性粒子がバインダー樹脂層にランダムに分散されているため、基板電極とICバンプとの間に挟持された導電性粒子数は平均48個、粒子間距離は、平均で0.5μm、最小距離は0μmであり、初期導通抵抗は0.2Ωと問題は無かった。一方、バンプ間スペースにおいては、導電性粒子の数が平均80個、粒子間距離は平均で0.7μm、最小距離は0μm、すなわち導電性粒子同士の接触がみられ、バンプ間ショートの発生率が1000ppm以上となった。 On the other hand, in Comparative Example 1, since the conductive particles filled with the number density of 100,000 / mm 2 are randomly dispersed in the binder resin layer, the conductive particles sandwiched between the substrate electrode and the IC bump. The number was 48 on average, the distance between particles was 0.5 μm on average, the minimum distance was 0 μm, and the initial conduction resistance was 0.2 Ω, which was not a problem. On the other hand, in the space between bumps, the number of conductive particles is 80 on average, the distance between particles is 0.7 μm on average, and the minimum distance is 0 μm, that is, contact between conductive particles is observed, and the occurrence rate of short circuit between bumps is observed. Was 1000 ppm or more.

また、比較例2では、個数密度が16000個/mm2で充填された導電性粒子がランダムに分散されているため、バンプ間スペースにおいては、導電性粒子の数が平均12.8個、粒子間距離は平均で2.6μm、最小距離は0μm、すなわち導電性粒子同士の接触がみられたが、バンプ間ショートの発生率は50ppm以下となった。一方、基板電極とICバンプとの間に挟持された導電性粒子数は平均7.7個、粒子間距離は、平均で2.1μm、最小距離は0μmであり、導通抵抗が5Ωと高くなった。 Further, in Comparative Example 2, since the conductive particles filled with a number density of 16000 / mm 2 are randomly dispersed, the average number of conductive particles in the space between bumps is 12.8, and the particles are particles. The average distance was 2.6 μm and the minimum distance was 0 μm. That is, although conductive particles were in contact with each other, the occurrence rate of short circuit between bumps was 50 ppm or less. On the other hand, the number of conductive particles sandwiched between the substrate electrode and the IC bump is 7.7 on average, the distance between particles is 2.1 μm on average, the minimum distance is 0 μm, and the conduction resistance is as high as 5Ω. rice field.

なお、実施例4では、導電性粒子の個数密度が5000個/mm2であるが、導通抵抗が0.5Ωより大きい場合が不良であるところ、0.4Ωであり、実用上問題なかった。また実施例5では、導電性粒子の個数密度が50000個/mm2であるが、バンプ間のショート数が50ppmより大きい場合が不良であるところ、50ppm以下であり、実用上問題なかった。すなわち、異方性導電フィルムの接着前における導電性粒子の個数密度は、5000~60000個/mm2とすることが好ましいことが分かる。 In Example 4, the number density of the conductive particles was 5000 particles / mm 2 , but when the conduction resistance was larger than 0.5 Ω, it was a defect, but it was 0.4 Ω, which was not a problem in practical use. Further, in Example 5, the number density of the conductive particles was 50,000 particles / mm 2 , but when the number of shorts between the bumps was larger than 50 ppm, it was defective, but it was 50 ppm or less, and there was no problem in practical use. That is, it can be seen that the number density of the conductive particles before the adhesion of the anisotropic conductive film is preferably 5000 to 60,000 / mm 2 .

なお、圧痕からバンプに捕捉された導電性粒子の個数をカウントする場合、上述のように基板側から観察するのが一般的である。このとき、バンプ間スペースの導電性粒子は、バンプに捕捉された導電性粒子と同一平面上に存在しているものは少ない。これは、流動による影響と推測される。 When counting the number of conductive particles captured by the bumps from the indentation, it is common to observe from the substrate side as described above. At this time, few of the conductive particles in the space between the bumps are present on the same plane as the conductive particles captured by the bumps. This is presumed to be the effect of flow.

1 異方性導電フィルム、2 剥離フィルム、3 バインダー樹脂層、4 導電性粒子、6 巻取リール、10 液晶表示パネル、11,12 透明基板、12a 縁部、13 シール、14 液晶、15 パネル表示部、16,17 透明電極、17a 端子部、18 液晶駆動用IC、18a 実装面、19 電極端子、20 COG実装部、21 基板側アライメントマーク、22 IC側アライメントマーク、23 端子間スペース、33 熱圧着ヘッド 1 Anisotropic conductive film, 2 Peeling film, 3 Binder resin layer, 4 Conductive particles, 6 Winding reel, 10 Liquid crystal display panel, 11, 12 transparent substrate, 12a edge, 13 seal, 14 liquid crystal, 15 panel display , 16,17 Transparent electrode, 17a terminal part, 18 LCD drive IC, 18a mounting surface, 19 electrode terminal, 20 COG mounting part, 21 board side alignment mark, 22 IC side alignment mark, 23 terminal space, 33 heat Crimping head

Claims (6)

回路基板上に異方性導電接着剤を介して電子部品が接続された接続体において、
上記異方性導電接着剤は、バインダー樹脂に導電性粒子が配列され、
上記電子部品に形成された接続電極と上記回路基板に形成された基板電極とが、上記接続電極及び上記基板電極の配列方向にずれており、上記接続電極及び上記基板電極の配列方向における最小距離が上記導電性粒子の粒子径の4倍未満であり、
上記電子部品に形成された上記接続電極間のスペースにおける上記導電性粒子同士の粒子間距離は、上記回路基板に形成された上記基板電極と上記接続電極との間に捕捉された上記導電性粒子同士の粒子間距離よりも長く、
上記回路基板に形成された上記基板電極と上記接続電極との間に捕捉された上記導電性粒子の上記基板電極の長手方向の外接線が、該長手方向に隣接して捕捉された上記導電性粒子を貫く接続体。
In a connector in which electronic components are connected on a circuit board via an anisotropic conductive adhesive,
In the above anisotropic conductive adhesive, conductive particles are arranged on a binder resin, and the conductive particles are arranged.
The connection electrode formed on the electronic component and the substrate electrode formed on the circuit board are displaced in the arrangement direction of the connection electrode and the substrate electrode, and the minimum distance in the arrangement direction of the connection electrode and the substrate electrode. Is less than 4 times the particle size of the conductive particles.
The interparticle distance between the conductive particles in the space between the connection electrodes formed on the electronic component is the distance between the conductive particles captured between the substrate electrode formed on the circuit board and the connection electrode. Longer than the distance between particles,
The extrinsic line in the longitudinal direction of the substrate electrode of the conductive particles captured between the substrate electrode formed on the circuit board and the connection electrode is captured adjacent to the longitudinal direction. A connector that penetrates particles.
上記異方性導電接着剤は、上記導電性粒子が規則配列された異方性導電フィルムである請求項1に記載の接続体。 The connector according to claim 1, wherein the anisotropic conductive adhesive is an anisotropic conductive film in which the conductive particles are regularly arranged. 上記導電性粒子は、フィルム幅方向への配列方向が該フィルム幅方向に対して傾斜するとともに、フィルム長手方向への配列方向が該フィルム長手方向に対して傾斜している請求項2に記載の接続体。 The second aspect of claim 2, wherein the conductive particles are arranged in the film width direction and inclined with respect to the film width direction, and the arrangement direction in the film longitudinal direction is inclined with respect to the film longitudinal direction. Connection body. 回路基板上に、導電性粒子を含有した接着剤を介して電子部品を搭載し、
上記電子部品を上記回路基板に対して押圧するとともに、上記接着剤を硬化させることにより、上記電子部品を上記回路基板上に接続する接続体の製造方法において、
上記接着剤は、バインダー樹脂に導電性粒子が配列され、
上記電子部品に形成された接続電極と上記回路基板に形成された基板電極とが、上記接続電極及び上記基板電極の配列方向にずれており、上記接続電極及び上記基板電極の配列方向における最小距離が上記導電性粒子の粒子径の4倍未満であり、
上記接続電極間のスペースにおける上記導電性粒子同士の粒子間距離は、上記回路基板に形成された上記基板電極と上記電子部品に形成された上記接続電極との間に捕捉された上記導電性粒子同士の粒子間距離よりも長く、
上記回路基板に形成された上記基板電極と上記接続電極との間に捕捉された上記導電性粒子の上記基板電極の長手方向の外接線が、該長手方向に隣接して捕捉された上記導電性粒子を貫く接続体の製造方法。
Electronic components are mounted on the circuit board via an adhesive containing conductive particles.
In a method for manufacturing a connector for connecting an electronic component on a circuit board by pressing the electronic component against the circuit board and curing the adhesive.
In the above adhesive, conductive particles are arranged on the binder resin, and the adhesive particles are arranged.
The connection electrode formed on the electronic component and the substrate electrode formed on the circuit board are displaced in the arrangement direction of the connection electrode and the substrate electrode, and the minimum distance in the arrangement direction of the connection electrode and the substrate electrode. Is less than 4 times the particle size of the conductive particles.
The interparticle distance between the conductive particles in the space between the connection electrodes is the distance between the conductive particles captured between the substrate electrode formed on the circuit board and the connection electrode formed on the electronic component. Longer than the distance between particles,
The extrinsic line in the longitudinal direction of the substrate electrode of the conductive particles captured between the substrate electrode formed on the circuit board and the connection electrode is captured adjacent to the longitudinal direction. A method for manufacturing a connector that penetrates particles.
上記接着剤は、上記導電性粒子が規則配列された異方性導電フィルムである請求項4に記載の接続体の製造方法。 The method for manufacturing a connector according to claim 4, wherein the adhesive is an anisotropic conductive film in which the conductive particles are regularly arranged. 上記導電性粒子は、フィルム幅方向への配列方向が該フィルム幅方向に対して傾斜するとともに、フィルム長手方向への配列方向が該フィルム長手方向に対して傾斜している請求項5に記載の接続体の製造方法。 The fifth aspect of claim 5, wherein the conductive particles are arranged in the film width direction and inclined with respect to the film width direction, and the arrangement direction in the film longitudinal direction is inclined with respect to the film longitudinal direction. How to make a connection.
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Publication number Priority date Publication date Assignee Title
JP2007035743A (en) 2005-07-25 2007-02-08 Asahi Kasei Electronics Co Ltd Circuit connection method and connection structure
JP2007165052A (en) 2005-12-12 2007-06-28 Sumitomo Bakelite Co Ltd Anisotropic conductive film

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