JP7025368B2 - Solenoid valve manifold - Google Patents

Description

The present invention relates to a solenoid valve manifold.

For example, as disclosed in Patent Document 1, the solenoid valve manifold is provided with a plurality of valve blocks arranged side by side in one direction and each of which is provided with a solenoid valve. Further, the solenoid valve manifold includes a wiring block from which a plurality of wirings for supplying electric power to each solenoid valve are drawn out. The plurality of valve blocks are arranged side by side on only one side of the plurality of valve blocks in the parallel direction with respect to the wiring block. Each valve block is formed with a wiring hole that penetrates in the juxtaposed direction of the plurality of valve blocks and into which the wiring drawn from the wiring block is inserted. Then, each solenoid valve is driven by supplying electric power to each solenoid valve provided in each valve block via each wiring inserted through each wiring hole.

Japanese Unexamined Patent Publication No. 2010-1749464

By the way, as in Patent Document 1, when a plurality of valve blocks are arranged side by side only on one side of a plurality of valve blocks in a parallel direction with respect to the wiring block, the position closest to the wiring block is obtained. All the wiring drawn out from the wiring block is inserted into the wiring hole of the arranged valve block. Here, if an attempt is made to increase the number of solenoid valves, the wiring drawn out from the wiring block will also increase accordingly, so that all the wiring holes of the valve block located closest to the wiring block will be used. It may be necessary to increase the cross-sectional area of the wiring hole in order to allow the wiring of the wiring to be inserted. Increasing the cross-sectional area of the wiring hole is a factor in increasing the size of the valve block.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a solenoid valve manifold capable of increasing the number of wirings drawn from a wiring block without increasing the size of the valve block. There is something in it.

The electromagnetic valve manifolds that solve the above problems are a plurality of valve blocks that are arranged side by side in one direction and are provided with electromagnetic valves, and a wiring block from which a plurality of wirings for supplying power to each electromagnetic valve are drawn out. The electromagnetic valve manifold is provided with, and each of the valve blocks is formed with a wiring hole that penetrates the plurality of valve blocks in the juxtaposed direction and through which the wiring drawn from the wiring block is inserted. The wiring is drawn from a plurality of first wirings drawn from a first side surface located on one side of the parallel arrangement direction in the wiring block and a second side surface located on the other side of the parallel arrangement direction in the wiring block. Includes a plurality of second wires.

In the solenoid valve manifold, in the wiring block, a first board electrically connected to the plurality of first wirings and a second board electrically connected to the plurality of second wirings are provided. It should be built-in.

According to the present invention, it is possible to increase the number of wirings drawn from the wiring block without increasing the size of the valve block.

The side view which shows typically the solenoid valve manifold in embodiment. The perspective view which shows the part of the solenoid valve manifold by disassembling. The perspective view which shows the part of the solenoid valve manifold by disassembling. Side view of valve block and solenoid valve. The perspective view which shows the part of the solenoid valve manifold in another embodiment disassembled.

Hereinafter, an embodiment in which the solenoid valve manifold is embodied will be described with reference to FIGS. 1 to 4.
As shown in FIG. 1, the solenoid valve manifold 10 includes a first end block 11, a second end block 12, a first air supply / exhaust block 13, a second air supply / exhaust block 14, a plurality of valve blocks 20, and a wiring block 30. I have. The first end block 11, the second end block 12, the first air supply / exhaust block 13, the second air supply / exhaust block 14, the plurality of valve blocks 20, and the wiring block 30 are arranged side by side in one direction. Therefore, the plurality of valve blocks 20 are arranged side by side in one direction.

Each valve block 20 is provided with a solenoid valve 21. Each solenoid valve 21 is mounted on each valve block 20. Therefore, the valve body of each solenoid valve 21 and each valve block 20 are separate members.

As shown in FIGS. 1, 2 and 3, the first end block 11, the second end block 12, the first air supply / exhaust block 13, the second air supply / exhaust block 14, the plurality of valve blocks 20, and the wiring block 30 are , Each is a long square block. The wiring block 30 has a block shape that is thicker than the first end block 11, the second end block 12, the first air supply / exhaust block 13, the second air supply / exhaust block 14, and the plurality of valve blocks 20. The first end block 11, the second end block 12, the first air supply / exhaust block 13, the second air supply / exhaust block 14, the plurality of valve blocks 20, and the wiring block 30 are arranged side by side so that their thickness directions coincide with each other. Has been done. Therefore, the juxtaposed direction of the plurality of valve blocks 20 coincides with the thickness direction of the valve blocks 20.

The first air supply / exhaust block 13 is arranged on one side of the plurality of valve blocks 20 in the parallel direction with respect to the wiring block 30. The first air supply / exhaust block 13 is arranged with respect to the wiring block 30 in a state of being in contact with the first side surface 31 located on one side of the plurality of valve blocks 20 in the parallel arrangement direction in the wiring block 30. The second air supply / exhaust block 14 is arranged on the other side of the plurality of valve blocks 20 in the parallel direction with respect to the wiring block 30. The second air supply / exhaust block 14 is arranged with respect to the wiring block 30 in a state of being in contact with the second side surface 32 located on the other side of the plurality of valve blocks 20 in the parallel arrangement direction in the wiring block 30.

The first air supply / exhaust block 13 is provided with a supply port 13a and an exhaust port 13b. Further, the first supply / exhaust block 13 is formed with a supply flow path 13c, a first discharge flow path 13d, and a second discharge flow path 13e penetrating in the thickness direction of the first supply / exhaust block 13. The supply flow path 13c communicates with the supply port 13a. The first discharge flow path 13d and the second discharge flow path 13e communicate with the discharge port 13b. The supply port 13a is connected to a fluid supply source (not shown) via a pipe. The discharge port 13b communicates with the atmosphere through a pipe.

The second air supply / exhaust block 14 is provided with a supply port 14a and an exhaust port 14b. Further, the second supply / exhaust block 14 is formed with a supply flow path 14c, a first discharge flow path 14d, and a second discharge flow path 14e penetrating in the thickness direction of the second supply / exhaust block 14. The supply flow path 14c communicates with the supply port 14a. The first discharge flow path 14d and the second discharge flow path 14e communicate with the discharge port 14b. The supply port 14a is connected to a fluid supply source (not shown) via a pipe. The discharge port 14b communicates with the atmosphere through a pipe.

A plurality of valve blocks 20 are arranged on the side of the first air supply / exhaust block 13 opposite to the wiring block 30. Further, a plurality of valve blocks 20 are arranged on the side of the second air supply / exhaust block 14 opposite to the wiring block 30. The plurality of valve blocks 20 arranged on the side opposite to the wiring block 30 in the first air supply / exhaust block 13 form the first block group B1 and are arranged on the side opposite to the wiring block 30 in the second air supply / exhaust block 14. The plurality of valve blocks 20 formed form the second block group B2. The number of valve blocks 20 forming the first block group B1 is the same as the number of valve blocks 20 forming the second block group B2.

Each valve block 20 is provided with a first output port 20a and a second output port 20b. The first output port 20a and the second output port 20b are connected to a fluid pressure device (not shown) via a pipe. Further, each valve block 20 is formed with a supply flow path 20c, a first discharge flow path 20d, and a second discharge flow path 20e penetrating in the thickness direction of the valve block 20. The supply flow paths 20c of the valve blocks 20 adjacent to each other in the juxtaposed direction of the plurality of valve blocks 20 communicate with each other. The first discharge flow paths 20d of the valve blocks 20 adjacent to each other in the juxtaposed direction of the plurality of valve blocks 20 communicate with each other. The second discharge flow paths 20e of the valve blocks 20 adjacent to each other in the juxtaposed direction of the plurality of valve blocks 20 communicate with each other.

Of the plurality of valve blocks 20 forming the first block group B1, the supply flow path 20c of the valve block 20 arranged at the position closest to the first air supply / exhaust block 13 is the supply flow of the first air supply / exhaust block 13. It communicates with the road 13c. Of the plurality of valve blocks 20 forming the first block group B1, the first discharge flow path 20d of the valve block 20 arranged at the position closest to the first air supply / exhaust block 13 is the first air supply / exhaust block 13. It communicates with the first discharge flow path 13d. Of the plurality of valve blocks 20 forming the first block group B1, the second discharge flow path 20e of the valve block 20 arranged at the position closest to the first air supply / exhaust block 13 is the first air supply / exhaust block 13. It communicates with the second discharge flow path 13e.

Of the plurality of valve blocks 20 forming the first block group B1, the supply flow path 20c, the first discharge flow path 20d, and the second discharge flow path 20c of the valve block 20 arranged at the position farthest from the first air supply / exhaust block 13. The discharge flow path 20e is blocked by the first end block 11.

Of the plurality of valve blocks 20 forming the second block group B2, the supply flow path 20c of the valve block 20 arranged at the position closest to the second air supply / exhaust block 14 is the supply flow of the second air supply / exhaust block 14. It communicates with the road 14c. Of the plurality of valve blocks 20 forming the second block group B2, the first discharge flow path 20d of the valve block 20 arranged at the position closest to the second air supply / exhaust block 14 is the second air supply / exhaust block 14. It communicates with the first discharge flow path 14d. Of the plurality of valve blocks 20 forming the second block group B2, the second discharge flow path 20e of the valve block 20 arranged at the position closest to the second air supply / exhaust block 14 is the second air supply / exhaust block 14. It communicates with the second discharge flow path 14e.

Of the plurality of valve blocks 20 forming the second block group B2, the supply flow path 20c, the first discharge flow path 20d, and the second discharge flow path 20c of the valve block 20 arranged at the position farthest from the second air supply / exhaust block 14. The discharge flow path 20e is blocked by the second end block 12.

As shown in FIGS. 2, 3 and 4, each valve block 20 is formed with a wiring hole 22 penetrating in the thickness direction of the valve block 20. Therefore, the wiring hole 22 penetrates the valve block 20 in the parallel direction of the plurality of valve blocks 20. The wiring holes 22 of the valve blocks 20 adjacent to each other in the juxtaposed direction of the plurality of valve blocks 20 communicate with each other. The wiring holes 22 formed in each valve block 20 all have the same cross-sectional area.

As shown in FIGS. 1, 2 and 3, the first air supply / exhaust block 13 is arranged at the position closest to the first air supply / exhaust block 13 among the plurality of valve blocks 20 forming the first block group B1. A communication hole 13h that communicates with the wiring hole 22 of the valve block 20 is formed. The communication hole 13h penetrates the first air supply / exhaust block 13 in the thickness direction. Further, in the second air supply / exhaust block 14, among the plurality of valve blocks 20 forming the second block group B2, the wiring hole 22 of the valve block 20 arranged at the position closest to the second air supply / exhaust block 14 A communication hole 14h for communication is formed. The communication hole 14h penetrates the second air supply / exhaust block 14 in the thickness direction.

The wiring block 30 is provided with a power supply connector 33. The power supply connector 33 projects from the upper surface 30a of the wiring block 30. The power supply connector 33 projects from a surface different from the first side surface 31 and the second side surface 32, which are located on both sides of the plurality of valve blocks 20 in the parallel direction in the wiring block 30. An external control device such as a programmable logic controller (PLC) is connected to the power supply connector 33.

As shown in FIG. 1, a first board 41 and a second board 42 are built in the wiring block 30. The power supply connector 33 and the first board 41 are electrically connected to each other via the first connection line 41a. The power supply connector 33 and the second board 42 are electrically connected to each other via the second connection line 42a. The first substrate 41 and the second substrate 42 each have facing surfaces facing each other in the parallel direction of the plurality of valve blocks 20 in the wiring block 30, and the facing surfaces are arranged so as to extend in parallel with each other. There is.

As shown in FIGS. 1, 2 and 3, a plurality of wirings 50 for supplying electric power to each solenoid valve 21 are drawn out from the wiring block 30. The wiring 50 includes a plurality of first wirings 51 drawn from the first side surface 31 of the wiring block 30, and a plurality of second wirings 52 drawn out from the second side surface 32 of the wiring block 30. The first substrate 41 is electrically connected to a plurality of first wirings 51. The plurality of first wirings 51 are connected to the surface of the first substrate 41 opposite to the surface facing the second substrate 42. The second substrate 42 is electrically connected to the plurality of second wirings 52. The plurality of second wirings 52 are connected to the surface of the second substrate 42 opposite to the surface facing the first substrate 41.

As shown in FIG. 2, the plurality of first wirings 51 are inserted into the wiring holes 22 of the plurality of valve blocks 20 forming the first block group B1 through the communication holes 13h of the first air supply / exhaust block 13. .. Of the plurality of valve blocks 20 forming the first block group B1, the wiring hole 22 of the valve block 20 arranged at the position closest to the wiring block 30 has the first wiring 51 drawn out from the wiring block 30. Are all inserted. Then, in the plurality of valve blocks 20 forming the first block group B1, the number of the first wiring 51 inserted into the wiring hole 22 is as large as the valve block 20 arranged at a position away from the wiring block 30. Is few.

As shown in FIG. 3, the plurality of second wirings 52 are inserted into the wiring holes 22 of the plurality of valve blocks 20 forming the second block group B2 via the communication holes 14h of the second air supply / exhaust block 14. .. Therefore, the wiring 50 drawn from the wiring block 30 is inserted into the wiring hole 22. Of the plurality of valve blocks 20 forming the second block group B2, the wiring hole 22 of the valve block 20 arranged at the position closest to the wiring block 30 has the second wiring 52 drawn out from the wiring block 30. Are all inserted. Then, in the plurality of valve blocks 20 forming the second block group B2, the number of the second wiring 52 inserted into the wiring hole 22 is as large as the valve block 20 arranged at a position away from the wiring block 30. Is few.

As shown in FIG. 2, each first wiring 51 is electrically connected to a solenoid of each solenoid valve 21 mounted on a plurality of valve blocks 20 forming the first block group B1. Then, the electric power from the external control device is supplied to the solenoid of each solenoid valve 21 on the first block group B1 side via the power supply connector 33, the first connection line 41a, the first board 41, and each first wiring 51. As a result, each solenoid valve 21 is driven.

As shown in FIG. 3, each second wiring 52 is electrically connected to the solenoid of each solenoid valve 21 mounted on the plurality of valve blocks 20 forming the second block group B2. Then, the electric power from the external control device is supplied to the solenoid of each solenoid valve 21 on the second block group B2 side via the power supply connector 33, the second connection line 42a, the second board 42, and each second wiring 52. As a result, each solenoid valve 21 is driven.

Next, the operation of this embodiment will be described.
Each solenoid valve 21 is in the first switching state when electric power is supplied to the solenoid. When the solenoid valve 21 is in the first switching state, the supply flow path 20c of the valve block 20 and the first output port 20a communicate with each other via the solenoid valve 21, and the second output port 20b and the second discharge flow path 20e become connected. It communicates through the solenoid valve 21. Further, when the solenoid valve 21 is in the first switching state, the communication between the supply flow path 20c and the second output port 20b is cut off by the solenoid valve 21, and the first output port 20a and the first discharge flow path 20d are cut off. Communication is cut off by the solenoid valve 21. Further, each solenoid valve 21 is in the second switching state when the electric power is not supplied to the solenoid. When the solenoid valve 21 is in the second switching state, the supply flow path 20c and the second output port 20b communicate with each other via the solenoid valve 21, and the first output port 20a and the first discharge flow path 20d connect the solenoid valve 21. Communicate through. Further, when the solenoid valve 21 is in the second switching state, the communication between the supply flow path 20c and the first output port 20a is cut off by the solenoid valve 21, and the second output port 20b and the second discharge flow path 20e are connected to each other. Communication is cut off by the solenoid valve 21.

For example, when the solenoid valve 21 on the first block group B1 side is in the first switching state, the fluid from the fluid supply source is connected to the piping, the supply port 13a of the first supply / exhaust block 13, the supply flow path 13c, and the valve block 20. The fluid is supplied to the fluid pressure device via the supply flow path 20c, the solenoid valve 21, the first output port 20a, and the piping. Further, the fluid from the fluid pressure device connects the pipe, the second output port 20b, the solenoid valve 21, the second discharge flow path 20e, the second discharge flow path 13e of the first supply / exhaust block 13, the discharge port 13b, and the pipe. It is discharged to the atmosphere through.

Further, for example, when the solenoid valve 21 on the first block group B1 side is in the second switching state, the fluid from the fluid supply source is supplied to the piping, the supply port 13a of the first supply / exhaust block 13, the supply flow path 13c, and the valve block. The fluid is supplied to the fluid pressure device via the supply flow path 20c of 20, the solenoid valve 21, the second output port 20b, and the piping. Further, the fluid from the fluid pressure device connects the pipe, the first output port 20a, the solenoid valve 21, the first discharge flow path 20d, the first discharge flow path 13d of the first supply / exhaust block 13, the discharge port 13b, and the pipe. It is discharged to the atmosphere through.

For example, when the solenoid valve 21 on the second block group B2 side is in the first switching state, the fluid from the fluid supply source is connected to the piping, the supply port 14a of the second supply / exhaust block 14, the supply flow path 14c, and the valve block 20. The fluid is supplied to the fluid pressure device via the supply flow path 20c, the solenoid valve 21, the first output port 20a, and the piping. Further, the fluid from the fluid pressure device connects the pipe, the second output port 20b, the solenoid valve 21, the second discharge flow path 20e, the second discharge flow path 14e of the second supply / exhaust block 14, the discharge port 14b, and the pipe. It is discharged to the atmosphere through.

Further, for example, when the solenoid valve 21 on the second block group B2 side is in the second switching state, the fluid from the fluid supply source is supplied to the piping, the supply port 14a of the second supply / exhaust block 14, the supply flow path 14c, and the valve block. The fluid is supplied to the fluid pressure device via the supply flow path 20c of 20, the solenoid valve 21, the second output port 20b, and the piping. Further, the fluid from the fluid pressure device connects the pipe, the first output port 20a, the solenoid valve 21, the first discharge flow path 20d, the first discharge flow path 14d of the second supply / exhaust block 14, the discharge port 14b, and the pipe. It is discharged to the atmosphere through. Each solenoid valve 21 of this embodiment is a 5-port solenoid valve.

In the above embodiment, the following effects can be obtained.
(1) For example, consider a case where a plurality of valve blocks 20 are arranged only on one side of a plurality of valve blocks 20 in a parallel direction with respect to the wiring block 30. In this case, if an attempt is made to increase the number of solenoid valves 21, the wiring 50 drawn out from the wiring block 30 will also increase accordingly, so that the wiring of the valve block 20 arranged at the position closest to the wiring block 30 will be increased. In order to allow all wiring 50 to be inserted through the hole 22, it may be necessary to increase the cross-sectional area of the wiring hole 22. Increasing the cross-sectional area of the wiring hole 22 causes an increase in the size of the valve block 20.

Therefore, a plurality of first wirings 51 are drawn out from the first side surface 31 of the wiring block 30, and a plurality of second wirings 52 are drawn out from the second side surface 32 of the wiring block 30. The plurality of first wirings 51 supply electric power to each solenoid valve 21 provided in each of the plurality of valve blocks 20 arranged on one side of the plurality of valve blocks 20 in the parallel direction with respect to the wiring block 30. do. The plurality of second wirings 52 supply electric power to each solenoid valve 21 provided in each of the plurality of valve blocks 20 arranged on the other side of the plurality of valve blocks 20 in the parallel direction with respect to the wiring block 30. do. Therefore, in order to increase the number of solenoid valves 21, a plurality of valve blocks 20 can be arranged on one side of the plurality of valve blocks 20 in the parallel direction with respect to the wiring block 30.

Of the plurality of valve blocks 20 arranged on one side of the plurality of valve blocks 20 in the parallel direction with respect to the wiring block 30, the wiring holes of the valve blocks 20 arranged at the positions closest to the wiring block 30. The first wiring 51 drawn from the first side surface 31 of the wiring block 30 is all inserted into the 22. Further, among the plurality of valve blocks 20 arranged on the other side of the plurality of valve blocks 20 in the parallel direction with respect to the wiring block 30, the valve block 20 arranged at the position closest to the wiring block 30. All the second wiring 52 drawn out from the second side surface 32 of the wiring block 30 is inserted into the wiring hole 22. Therefore, even if the number of wirings 50 drawn out from the wiring block 30 increases, for example, when a plurality of valve blocks 20 are arranged only on one side of the plurality of valve blocks 20 in the parallel direction with respect to the wiring block 30. As such, all the wiring 50 drawn out from the wiring block 30 is not inserted into one wiring hole 22. Therefore, it is not necessary to increase the cross-sectional area of the wiring hole 22. As a result, the number of wirings 50 drawn out from the wiring block 30 can be increased without increasing the size of the valve block 20.

(2) In the wiring block 30, a first board 41 electrically connected to the plurality of first wiring 51 and a second board 42 electrically connected to the plurality of second wiring 52 are built-in. Has been done. According to this, since the substrate having the existing configuration can be diverted to the first substrate 41 and the second substrate 42, it is not necessary to use the substrate having a new configuration by increasing the solenoid valves 21, and the cost is reduced. can do.

(3) According to the present embodiment, in order to increase the number of solenoid valves 21, a plurality of valve blocks 20 are arranged on the other side in addition to one side of the plurality of valve blocks 20 in the parallel arrangement direction with respect to the wiring block 30. Therefore, it is not necessary to newly provide the wiring block 30, and the overall body size of the solenoid valve manifold 10 can be reduced.

The above embodiment can be modified and implemented as follows. The above embodiment and the following modified examples can be implemented in combination with each other within a technically consistent range.

-In the embodiment, the first board 41 and the second board 42 may not be built in the wiring block 30. Then, for example, the plurality of first wirings 51 and the plurality of second wirings 52 may be electrically connected to the power feeding connector 33.

-In the embodiment, the wiring block 30 may not have the first board 41 and the second board 42 built-in, but may have only one board built-in. Further, for example, even in a configuration in which the plurality of first wirings 51 are electrically connected to one surface of the substrate and the plurality of second wirings 52 are electrically connected to the other surface of the substrate. good.

-In the embodiment, the first substrate 41 and the second substrate 42 may be arranged in the wiring block 30 so that, for example, their facing surfaces extend in a direction in which they are oblique to each other.

As shown in FIG. 5, for example, the relay connector 53 that functions as wiring may be fitted in the wiring hole 22. Further, in the adjacent valve blocks 20, the relay connectors 53 fitted in the wiring holes 22 may be electrically connected to each other in a plug-in manner.

-In the embodiment, the solenoid valve manifold 10 may have, for example, a configuration in which the first air supply / exhaust block 13 is arranged between the valve block 20 and the first end block 11. In this case, the communication hole 13h may not be formed in the first air supply / exhaust block 13.

-In the embodiment, the solenoid valve manifold 10 may have, for example, a configuration in which the second air supply / exhaust block 14 is arranged between the valve block 20 and the second end block 12. In this case, the communication hole 14h may not be formed in the second air supply / exhaust block 14.

-In the embodiment, the solenoid valve manifold 10 may be configured not to include, for example, the first air supply / exhaust block 13. In this case, the wiring block 30 includes the supply flow path 14c of the second supply / exhaust block 14, the first discharge flow path 14d, and the plurality of valve blocks 20 forming the second discharge flow path 14e and the first block group B1. Among them, a flow path communicating with the supply flow path 20c, the first discharge flow path 20d, and the second discharge flow path 20e of the valve block 20 closest to the wiring block 30 is formed.

-In the embodiment, the power supply connector 33 does not have to protrude from the upper surface 30a of the wiring block 30. In short, the power supply connector 33 may project from a surface different from the first side surface 31 and the second side surface 32, which are located on both sides of the plurality of valve blocks 20 in the parallel direction in the wiring block 30.

-In the embodiment, the valve body of the solenoid valve 21 and the valve block 20 may be integrally formed.
-In the embodiment, the solenoid valve 21 may be, for example, a 3-port solenoid valve.

10 ... Solenoid valve manifold, 20 ... Valve block, 21 ... Solenoid valve, 22 ... Wiring hole, 30 ... Wiring block, 31 ... First side surface, 32 ... Second side surface, 41 ... First board, 42 ... Second board, 50 ... wiring, 51 ... first wiring, 52 ... second wiring, 53 ... relay connector as wiring.

Claims (2)

Multiple valve blocks arranged side by side in one direction and each equipped with solenoid valves,
A wiring block from which a plurality of wirings for supplying electric power to each solenoid valve are drawn out is provided.
A solenoid valve manifold in which each valve block is formed with a wiring hole that penetrates the plurality of valve blocks in a parallel direction and into which the wiring drawn from the wiring block is inserted.
The wiring is
A plurality of first wirings drawn from the first side surface located on one side of the parallel arrangement direction in the wiring block, and
A solenoid valve manifold comprising a plurality of second wirings drawn from a second side surface located on the other side of the wiring block in the parallel direction. In the wiring block,
A first board that is electrically connected to the plurality of first wirings,
The solenoid valve manifold according to claim 1, wherein a second substrate electrically connected to the plurality of second wirings is incorporated.

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