JP7025178B2 - Cooling member - Google Patents

Description

The present disclosure relates to cooling members.

A large amount of organic solvent is used in the manufacturing process of electronic parts such as semiconductors, capacitors, lithium ion batteries, pastes for various electronic parts, packages and the like. These organic solvents volatilize in the manufacturing process and are discharged as gas. Therefore, a cooling member has been devised for reusing this gas as an organic solvent by cooling it and liquefying it. For example, Patent Document 1 exemplifies a facility for recovering a volatile component of an organic solvent, which comprises providing a ceramic coating layer on the side of the cooling member in contact with the liquid organic solvent.

Japanese Patent Application Laid-Open No. 3-238002

Such a cooling member may be damaged if used for a long period of time. In this case, it was necessary to replace the entire cooling member even if only a part of the damaged part was damaged.

The present disclosure has been devised in view of such circumstances, and an object of the present invention is to provide a cooling member capable of replacing only a damaged portion when a partial damage occurs.

The cooling member of the present disclosure includes a plurality of plate-shaped first members and a second member having a tubular portion . The first member has a first surface and a second surface located opposite to the first surface. When one end of the first surface is the first end and the other end is the second end, the first surface and the second surface have openings on the first end side. It has a first flow path extending toward the second end between the first surface and the second surface and communicating with the opening. The second member has a second flow path inside, and the cylinder portion is located between the first members so as to cover the opening portion, and the first flow path and the second flow are provided. The road is communicating. The first member includes a first portion in contact with the second member and a second portion not in contact with the second member. The first member has a protruding portion protruding toward the adjacent first member at the second portion, and the protruding portion has an inclined surface inclined toward the center side of the second end. Have.

When a part of the cooling member of the present disclosure is damaged, only the damaged part can be replaced.

An example of the cooling member of the present disclosure is shown, (a) is an external perspective view, (b) is a cross-sectional view taken along the line AA'in (a), and (c) is a B- in (a). It is sectional drawing in the B'line. It is an external perspective view which shows the other example of the cooling member of this disclosure. It is a top view which shows an example of the 1st member of the cooling member of this disclosure. It is a top view which shows the other example of the 1st member of the cooling member of this disclosure. (A) is an external perspective view, and (b) is a sectional view taken along the line CC'in (a), showing still another example of the cooling member of the present disclosure. It is an enlarged view of the surface of the 2nd part in the 1st member of the cooling member of this disclosure.

Hereinafter, the cooling member of the present disclosure will be described in detail with reference to the drawings.

As shown in FIG. 1, the cooling member 10 of the present disclosure includes a plate-shaped first member 1 having a flow path 4 located inside and an opening 5 connected to the flow path 4. Further, the second member 2 having the tubular portion 6 is provided. Further, the first member 1 is a plurality of, and the first end, the second end facing the first end, the first portion in contact with the second member 2, and the second portion not in contact with the second member 2. And prepare. Then, the second member 2 is located between the first members 1 so that the tubular portion 6 covers the opening 5. Note that FIG. 1 shows an example consisting of five first members 1 and four second members 2, and when the number of first members 1 is n, the number of second members 2 is n-1. .. Further, in FIGS. 1 (a) and 1 (b), the end portion where the second member 2 is located is the first end, and the end portion located far from the second member 2 is the second end. ..

In the cooling member 10 of the present disclosure, when the volatilized gas of the organic solvent passes between the first members 1, heat exchange is performed between the refrigerant and the gas flowing through the flow path 4 of the first member 1, and the gas is cooled. By being liquefied, the liquid organic refrigerant can be recovered.

Further, in the cooling member 10 of the present disclosure, since the first member 1 and the second member 2 are separate members and are not integral bodies, for example, one of the plurality of first members 1 is attached to the first member 1. When damage occurs, only the damaged first member 1 can be removed and replaced. It should be noted that the first member 1 and the second member 2 may be connected in any way as long as they are detachably connected. For example, as shown in FIG. 1 (b), the first member 1 and the second member 2 may be screwed together by one screw 7. With such a structure, the first member 1 and the second member 2 can be easily removed.

Further, if an O-ring is interposed between the opening 5 of the first member 1 and the tubular portion 6 of the second member 2, the O-ring will be formed when the first member 1 and the second member 2 are connected. It serves as a cushioning material and can reduce the possibility that the first member 1 and the second member 2 are damaged.

The cooling member 10 of the present disclosure has a mechanism for introducing and discharging a refrigerant. For example, as shown in FIGS. 1A and 1B, a cap provided with an introduction port 11 for introducing a refrigerant into a flow path 4 of the first member 1 and an discharge port 12 for discharging the refrigerant. The member 9 corresponds to this. Further, FIGS. 1A and 1B show an example in which a pressing member 8 adjacent to the first member 1 located farthest from the cap member 9 is provided. It should be noted that the configuration is not limited to that shown in FIG. 1 as long as the refrigerant can be introduced and discharged and the fluid cannot leak.

Further, as shown in FIGS. 1A and 1B, the second member 2 of the cooling member 10 of the present disclosure may be located on the first end side between the first members 1. As shown in FIGS. 1 (a) and 1 (b), if the second member 2 is located on the first end side and on the upper side, the portion of the first member 1 other than the portion in contact with the second member 2 is excluded. The organic solvent, which becomes a contact portion with the gas and is cooled and liquefied, falls downward along the surface of the first member 1, so that the organic solvent can be easily recovered.

Further, the shape of the flow path 4 of the first member 1 may be a meandering shape, a spiral shape, or the like, which may match the mechanical strength and cooling efficiency of the first member 1.

Further, as shown in FIG. 2, the thickness of the second portion of the first member 1 in the cooling member 10 of the present disclosure may be thinner than that of the first portion. If such a structure is satisfied, the strength of the connection between the first member 1 and the second member 2 is impaired as compared with the case where the thickness of the first portion and the thickness of the second portion are the same. The cooling efficiency is improved.

Further, the first member 1 in the cooling member 10 of the present disclosure has a protruding portion 13 on the second end side, and the protruding portion 13 intersects the second portion and is an inclined surface 14 inclined toward the second end. May have. If such a structure is satisfied, the cooled and liquefied organic solvent flows along the inclined surface 14 of the protrusion 13, so that the recovery of the organic solvent becomes easier. For example, in FIG. 3, on the second end side of the first member 1, two projecting portions 13 are provided at locations other than the central portion of the first member 1, and an inclined surface 14 inclined toward the central portion is provided. Is shown as an example of having. In this case, the cooled and liquefied organic solvent flows along the inclined surface 14 of the protruding portion 13, collects at the central portion of the second end of the first member 1, and then falls downward.

Further, the first member 1 in the cooling member 10 of the present disclosure may have a larger arithmetic mean roughness Ra value of the second portion than that of the first portion. If such a configuration is satisfied, the surface area of the second portion in contact with the gas containing the organic solvent is increased, and the recovery efficiency of the organic solvent is improved. Further, in the first portion, since the value of the arithmetic mean roughness Ra is smaller than that in the second portion, the connection between the first member 1 and the second member 2 can be further strengthened.

Here, the comparison of the arithmetic mean roughness Ra of the first part and the second part is made in the same first member 1 based on JIS B 0601-2001 using a contact type or non-contact type roughness measuring instrument. The arithmetic mean roughness Ra of the first member and the second part may be measured and compared.

Further, as shown in FIG. 4, the first member 1 in the cooling member 10 of the present disclosure may have a plurality of protrusions 15 on the surface of the second portion. Here, the protrusion 15 refers to a portion of the surface of the second portion that protrudes from the line connecting the portions that do not have the protrusion 15. If such a configuration is satisfied, the cooling member 10 of the present disclosure can increase the area of contact with the gas containing the organic solvent by the plurality of protrusions 15, and the recovery efficiency of the organic solvent is improved. The protrusion 15 has, for example, an average diameter of 10 μm or more and 40 μm or less in a plan view of the surface of the second portion.

Further, as shown in FIG. 5, the cooling member 10 of the present disclosure may include a third member 3 located on the second end side between the first members 1. If such a configuration is satisfied, the first member 1 is constrained also on the second end side, so that even when the flow velocity of the volatilized gas of the organic solvent passing between the first members 1 is high. The first member 1 is less likely to be damaged. In addition, damage to the first member 1 during transportation is reduced. Such a configuration is particularly useful when the thickness of the first member 1 is reduced in order to improve the cooling efficiency. Further, the protruding portion 13 may also serve as the third member 3.

Further, the first member 1 and the third member 3 may be connected in any way. For example, as shown in FIG. 5B, the first member 1 and the third member 3 may be screwed together by one screw 7.

Further, the material constituting the first member 1 in the cooling member 10 of the present disclosure may be selected based on the durability against an organic solvent. For example, if the first member 1 is made of ceramics, it has excellent corrosion resistance and high durability. Here, as the ceramics, for example, silicon carbide ceramics, corgerite ceramics, aluminum oxide ceramics, zirconium oxide ceramics, silicon nitride ceramics, aluminum nitride ceramics, mulite ceramics and the like can be used. In particular, aluminum oxide ceramics are low in cost and easy to process, so that the first member 1 can be easily manufactured.

Here, the aluminum oxide ceramics are ceramics containing aluminum oxide as a main component, and contain 70% by mass or more of aluminum oxide out of 100% by mass of all the components constituting the ceramics. The material of the first member 1 can be confirmed by the following method. First, the presence of alumina is confirmed by measuring using an X-ray diffractometer (XRD) and identifying the obtained 2θ (2θ is a diffraction angle) value with a JCPDS card. Next, quantitative analysis of aluminum (Al) is performed using an ICP (Inductively Coupled Plasma) emission spectroscopic analyzer (ICP) or a fluorescent X-ray analyzer (XRF). If the content converted from the Al content measured by ICP or XRF into aluminum oxide (Al ₂ O ₃ ) is 70% by mass or more, the aluminum oxide ceramics are used. The same applies to other ceramics.

Further, if the first member 1 is made of ceramics, when the surface of the second portion is observed, as shown in FIG. 6, the broken line D passing through the most recessed portion on the surface of the second portion and the most protruding ceramics. The length of the perpendicular line with the broken line E passing through the apex of the crystal particles of the above may be 0.5 μm or more. If such a configuration is satisfied, the surface area of the second portion in contact with the gas containing the organic solvent can be further increased, so that the heat exchange efficiency between the refrigerant and the gas flowing in the flow path 4 of the first member 1 1 is satisfied. It is possible to improve the recovery efficiency of the organic solvent.

Further, the materials constituting the second member 2, the third member 3, the pressing member 8 and the cap member 9 in the cooling member 10 of the present disclosure may be selected based on the durability against an organic solvent. For example, fluororesin, polyethylene resin, SUS, ceramics and the like may be used. Further, the material constituting the screw may be selected based on a material having a coefficient of thermal expansion close to that of the first member 1 and having durability against an organic solvent. For example, SUS, ceramics, etc. may be used.

Further, the material constituting the protrusion 15 in the heat radiating member 10 of the present disclosure may be selected based on the durability against an organic solvent, but the main component of the protrusion 15 is the same as the main component of the first member 1. You may. Here, the main component is a component that occupies 70% by mass or more of 100% by mass of all the components constituting the protrusion 15 and the first member 1. If such a configuration is satisfied, the difference in the coefficient of thermal expansion between the protrusion 15 and the first member 1 is approximated, the possibility that the protrusion 15 can be removed from the first member 1 is reduced, and the organic solvent is used for a long period of time. It becomes possible to maintain the recovery efficiency.

Examples of the organic solvent that can be recovered by the cooling member 10 of the present disclosure include alcohols such as acetone, methanol, ethanol and propanol, those having a low saturated vapor pressure at a low temperature such as hexane, tetrahydrofuran and benzene, and NMP (N-). Methyl-pyrrolidone) and the like are examples, but this is not the case.

Hereinafter, a method for manufacturing the cooling member 10 of the present disclosure will be described.

First, a method for manufacturing the first member 1 will be described. In the following description, a case where the first member 1 is made of ceramics will be described as an example.

First, a sintering aid, a binder, a solvent, a dispersant and the like are added to the powder of the raw material (silicon carbide, aluminum oxide, etc.) as the main component and appropriately mixed to prepare a slurry. Next, using this slurry, a ceramic green sheet is formed by the doctor blade method. Then, a molded body, which is a laminated body, is produced by laminating ceramic green sheets that have been punched out by a die or laser-processed according to the shape of the product. Then, the first member 1 is manufactured by firing this molded body.

By laminating ceramic green sheets in this way to produce a molded body, it becomes easy to produce the flow path 4 inside the first member 1. Further, the thickness of the first member 1 can be adjusted by adjusting the number of ceramic green sheets to be laminated. Then, by punching or laser processing the ceramic green sheet with a die, it is possible to produce a ceramic green sheet having a protruding portion 13 inclined so as to have a narrow width.

Further, in order for the first member 1 to have a plurality of protrusions 15 on the surface of the second portion, a portion to be the protrusions 15 may be formed in advance on the surface of the ceramic green sheet to be the second portion. good. For example, a portion to be a protrusion 15 may be formed by pressing a mold having a concave portion against a surface to be a second portion or scraping the surface to be a second portion by laser processing or blasting. Alternatively, the powder to be the protrusions 15 may be sprinkled on the surface to be the second portion by using a sieve or the like. Alternatively, a solvent or the like may be added to the powder to be the protrusions 15 to form a slurry, which may be applied to the surface to be the second portion using a brush, a roller or the like.

As another method for producing the ceramic green sheet, granules may be produced by spray-drying the slurry by a spray granulation method (spray-drying method) to granulate the granules, and the granules may be produced by a roll compaction method. good.

Further, the first member 1 may be polished or ground after firing. Then, in the first member 1, polishing or grinding may be performed so that the value of the arithmetic average roughness Ra of the second portion becomes larger than the value of the arithmetic average roughness Ra of the first portion. When the surface of the first member 1 is polished or ground, the crystal particles of the ceramics are scraped, and the heights of the crystal particles of the adjacent ceramics are easily aligned. Therefore, in the second portion, as shown in FIG. 6, the length of the vertical line of the broken line D passing through the most recessed part on the surface and the dashed line E passing through the apex of the most protruding ceramic crystal particles is set to 0.5 μm or more. It is not necessary to polish or grind the second portion after firing.

Next, a second member 2 having a structure that can be screwed with a screw is prepared by manufacturing it by a known method. By adjusting the thickness of the second member 2, the width between the first members 1 through which the gas containing the organic solvent passes can be adjusted. Then, the cooling member 10 of the present disclosure is obtained by arranging the second member 2 between the first members 1 and screwing them with screws while pressing them from both sides.

The structure may be such that an O-ring is necessaryly interposed between the second member 2 and the first member 1. Further, if necessary, the third member 3, the pressing member 8 and the cap member 9 may be provided.

The present disclosure is not limited to the above-described embodiment, and various changes and improvements can be made without departing from the gist of the present disclosure.

1: 1st member 2: 2nd member 3: 3rd member
4: Flow path 5: Opening 6: Cylinder 7: Screw 8: Holding member 9: Cap member 10, 10a, 10b, 10c: Cooling member 11: Introducing port 12: Discharge port 13: Protruding part 14: Inclined surface 15 :protrude

Claims (6)

A cooling member having a plurality of plate-shaped first members and a second member having a tubular portion.
The first member is
It has a first surface and a second surface located opposite to the first surface.
When one end of the first surface is the first end and the other end is the second end,
It has openings on the first surface and the first end side of the second surface.
It has a first flow path extending toward the second end between the first surface and the second surface and communicating with the opening.
The second member is
It has a second flow path inside,
The tubular portion is located between the first members so as to cover the opening .
The first flow path and the second flow path are in communication with each other.
The first member includes a first portion in contact with the second member and a second portion not in contact with the second member.
The first member is
The second portion has a protruding portion that protrudes toward the adjacent first member.
The protrusion is
A cooling member having an inclined surface inclined toward the center side of the second end . The cooling member according to claim 1 , wherein the thickness of the second portion is thinner than that of the first portion. The cooling member according to claim 1 or 2 , wherein the second portion has a larger arithmetic mean roughness Ra value than the first portion. The cooling member according to any one of claims 1 to 3 , wherein the second portion has a plurality of protrusions on the surface. The cooling member according to claim 4 , wherein the main component of the protrusion is the same as the main component of the first member. The cooling member according to any one of claims 1 to 5 , further comprising a third member located on the second end side between the first members and connecting the adjacent first members to each other .

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