JP7009699B1 - Manufacturing method of reflective device, lens device, imaging device, imaging system, mobile body, and reflective device - Google Patents

Abstract

A reflective device includes a reflective member having a reflective surface that bends an optical path of an optical system, a leaf spring that is arranged facing the bottom surface of the reflective member on the opposite side of the reflective surface, and supports the reflective member. The base member that oscillates the reflective member and the leaf spring are arranged so as to face the surface opposite to the reflective member of the leaf spring and intersect the reflective surface when a voltage is applied. It may be provided with a piezoelectric element that expands and contracts to swing the reflective member via a leaf spring. [Selection diagram] FIG. 4

Description

The present invention relates to a reflection device, a lens device, an image pickup device, an image pickup system, a moving body, and a method for manufacturing a reflection device.

Patent Document 1 describes that an actuator including a magnet and a coil that supports a mirror via a ball compensates for the movement of a user's hand by tilting the mirror that bends an optical path with the ball as a fulcrum. ing.
[Prior Art Document]
[Patent Document]
[Patent Document 1] US Patent Application Publication No. 2019/0146283

When the mirror is supported by a ball as in Patent Document 1, there is a possibility that the mirror cannot be driven accurately due to the influence of friction between the ball and the mirror.

The reflective device according to one aspect of the present invention may include a reflective member having a reflective surface that bends the optical path of the optical system. The reflective device may be disposed facing the bottom surface opposite the reflective surface of the reflective member and may include a leaf spring that supports the reflective member. The reflective device may include a base member that swingably holds the reflective member via a leaf spring. The reflective device is arranged so as to face the surface opposite to the surface of the leaf spring facing the reflective member, and when a voltage is applied, the reflective device expands and contracts in a direction intersecting the reflective surface to move the reflective member via the leaf spring. A piezoelectric element that swings may be provided.

The base member may have a first through hole penetrating from the first surface of the base member facing the leaf spring to the second surface opposite to the first surface at a position facing the piezoelectric element. The piezoelectric element may be fixed to the base member via the adhesive in the first through hole.

The reflective device may be disposed at the tip of the piezoelectric element facing the leaf spring and may include a cap having a curved surface in contact with the leaf spring.

The reflective device may include a pressing member that presses the reflective member against the base member via a leaf spring.

The base member may have a second through hole that penetrates from the first surface facing the leaf spring to the second surface opposite the first surface. The leaf spring may have a third through hole at a position facing the second through hole. The reflective member may have a protruding portion that protrudes from the bottom surface and fits into the third through hole. The pressing member is a rod-shaped member having a fixed portion fixed to the protruding portion of the reflective member via the second through hole, an extension portion extending from the fixed portion, and a head portion on the opposite side of the fixed portion of the extension portion. And may have. The pressing member may have an elastic member that is arranged around the extension portion and exerts a force on the head portion that presses the reflective member against the base member via a leaf spring.

The fixed portion may have threads on the outer peripheral surface. The overhang may have a threaded groove that fits the thread.

The reflective device may include a plurality of piezoelectric elements. The plurality of piezoelectric elements may be arranged around the rod-shaped member.

The reflective device may be disposed at a tip portion of a plurality of piezoelectric elements facing each leaf spring and may include a plurality of caps having a curved surface in contact with the leaf spring.

The plurality of caps may be integrally configured.

The reflective device may be disposed adjacent to the piezoelectric element and include a pair of terminals electrically connected to the piezoelectric element. The base member may be made of resin and the pair of terminals may be made of metal. The pair of terminals may be integrally configured with the base member.

The lens device according to one aspect of the present invention may include the above-mentioned reflection device and an optical system.

The image pickup apparatus according to one aspect of the present invention may include the lens apparatus and an image sensor that receives light from the lens apparatus.

The image pickup system according to one aspect of the present invention may include the above image pickup device and a support mechanism for supporting the image pickup device so that the posture of the image pickup device can be controlled.

The moving body according to one aspect of the present invention may be a moving body provided with the above-mentioned imaging system.

The method for manufacturing a reflective device according to one aspect of the present invention includes a reflective member having a reflective surface that bends the optical path of the optical system, a leaf spring arranged so as to face the bottom surface of the reflective member opposite to the reflective surface, and a plate. The base member that oscillates the reflective member via the spring is arranged so as to face the surface opposite to the surface of the leaf spring facing the reflective member, and intersects the reflective surface when a voltage is applied. It may be a manufacturing method for manufacturing a reflective device including a piezoelectric element that expands and contracts in a direction and swings a reflective member via a leaf spring. The manufacturing method may include a step of arranging the piezoelectric element in a predetermined region of the first surface facing the leaf spring of the base member. The manufacturing method is to inject an adhesive from the second surface side into a first through hole that penetrates from the first surface to the second surface on the opposite side of the first surface, which is provided in a predetermined area. , The step of fixing the piezoelectric element to the base member may be provided.

According to one aspect of the present invention, the driving accuracy of the reflective device can be improved.

The outline of the above invention does not list all the features of the present invention. A subcombination of these feature groups can also be an invention.

It is a figure which shows an example of the appearance of an unmanned aerial vehicle and a remote control device. It is a figure which shows the internal structure of a part of an image pickup apparatus. It is a perspective view which looked at the reflection device from the back surface side opposite to the reflection surface. It is an exploded perspective view seen from the back side of a reflective device. It is a perspective view which looked at the reflection device from the reflection surface side. It is an exploded perspective view seen from the reflection surface side of a reflection device. It is a top view which looked at the reflection device from the reflection surface side. It is a top view which looked at the reflection device from the side surface side. FIG. 7 is a cross-sectional view taken along the line AA shown in FIG. 7A of the reflective device. It is a top view which looked at the reflection device from the back side. FIG. 8B is a cross-sectional view taken along the line BB shown in FIG. 8A of the reflective device. It is a figure for demonstrating the terminal 170 embedded in the base member 130.

Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention to which the claims are made. Also, not all combinations of features described in the embodiments are essential to the means of solving the invention.

The claims, description, drawings, and abstracts include matters subject to copyright protection. The copyright holder will not object to any person's reproduction of these documents as long as they appear in the Patent Office files or records. However, in other cases, all copyrights are reserved.

FIG. 1 shows an example of the appearance of an unmanned aerial vehicle (UAV) 1000 and a remote control device 300. The UAV 1000 includes a UAV main body 20, a plurality of image pickup devices 60, and an image pickup system 10. The image pickup system 10 includes a gimbal 50 and an image pickup device 100. The UAV1000 is an example of a moving body. The moving body is a concept including a flying body moving in the air, a vehicle moving on the ground, a ship moving on the water, and the like. An airship that moves in the air is a concept that includes UAVs, other aircraft that move in the air, airships, helicopters, and the like.

The UAV main body 20 includes a plurality of rotary wings. The plurality of rotor blades are an example of a propulsion unit. The UAV main body 20 flies the UAV 1000 by controlling the rotation of a plurality of rotary blades. The UAV body 20 flies the UAV 1000 using, for example, four rotor blades. The number of rotor blades is not limited to four. Further, the UAV1000 may be a fixed-wing aircraft having no rotor blades.

The image pickup apparatus 100 is a camera for taking an image of a subject included in a desired imaging range. The gimbal 50 rotatably supports the image pickup device 100. The gimbal 50 is an example of a support mechanism. For example, the gimbal 50 rotatably supports the image pickup device 100 on a pitch axis using an actuator. The gimbal 50 further rotatably supports the image pickup device 100 around each of the roll axis and the yaw axis by using an actuator. The gimbal 50 may change the posture of the image pickup device 100 by rotating the image pickup device 100 around at least one of the yaw axis, the pitch axis, and the roll axis.

The plurality of image pickup devices 60 are sensing cameras that image the surroundings of the UAV 1000 in order to control the flight of the UAV 1000. Two image pickup devices 60 may be provided in front of the nose of the UAV 1000. Yet two other imaging devices 60 may be provided on the bottom surface of the UAV 1000. The two image pickup devices 60 on the front side may be paired and function as a so-called stereo camera. The two image pickup devices 60 on the bottom side may also be paired and function as a stereo camera. Three-dimensional spatial data around the UAV 1000 may be generated based on the images captured by the plurality of image pickup devices 60. The number of image pickup devices 60 included in the UAV 1000 is not limited to four. The UAV 1000 may include at least one image pickup device 60. The UAV1000 may be equipped with at least one image pickup device 60 on each of the nose, aft, side surface, bottom surface, and ceiling surface of the UAV1000. The angle of view that can be set by the image pickup device 60 may be wider than the angle of view that can be set by the image pickup device 100. The image pickup apparatus 60 may have a single focus lens or a fisheye lens.

The remote control device 300 communicates with the UAV 1000 to remotely control the UAV 1000. The remote control device 300 may wirelessly communicate with the UAV 1000. The remote control device 300 transmits to the UAV 1000 instruction information indicating various commands related to the movement of the UAV 1000 such as ascending, descending, accelerating, decelerating, advancing, reversing, and rotating. The instruction information includes, for example, instruction information for raising the altitude of the UAV 1000. The instruction information may indicate the altitude at which the UAV 1000 should be located. The UAV 1000 moves so as to be located at an altitude indicated by the instruction information received from the remote control device 300. The instruction information may include an ascending instruction to ascend the UAV 1000. The UAV1000 rises while accepting the rise order. Even if the UAV1000 accepts an ascending order, the ascending may be restricted if the altitude of the UAV1000 has reached the upper limit altitude.

FIG. 2 shows a part of the internal structure of the image pickup apparatus 100. The image pickup apparatus 100 includes a first lens group 101, a second lens group 102, a reflection device 110, and an image sensor 103. The reflection device 110 is arranged between the first lens group 101 and the second lens group 102. The reflection device 110 bends the optical path of the optical system including the first lens group 101 and the second lens group 102. The light incident from the first lens group 101 is reflected by the reflection device 110, is incident on the second lens group 102, and is received by the image sensor 103. The reflection device 110 changes the direction of the light emitted from the first lens group 101 in a different direction, and causes the light from the first lens group 101 to be incident on the second lens group 102.

The reflection device 110 functions as an optical image shake correction mechanism (OIS). The image pickup apparatus 100 drives the reflection device 110 based on the vibration signal indicating the vibration of the image pickup apparatus 100 detected by the vibration sensor, and executes the image shake correction. The vibration sensor may be an acceleration sensor that detects the vibration of the image pickup apparatus 100. The gyro sensor detects, for example, angular runout and rotational runout. The accelerometer detects, for example, shift deviation in the X direction or the Y direction. Even with a gyro sensor, angles and rotations can be converted into components in the X direction and components in the Y direction. The accelerometer can also convert shift blur in the X direction and Y direction into angular blur and rotational blur. The vibration sensor may be a combination of an acceleration sensor and a gyro sensor. The vibration sensor may be provided on the gimbal 50.

The image pickup system 10 configured in this way may perform image shake correction by combining the gimbal 50 and the reflection device 110. The gimbal 50 may correct the image shake in the first frequency band. The reflection device 110 may correct the image shake in the second frequency band different from the first frequency band. The gimbal 50 may correct image shake in a frequency band of about 1 kHz to 10 kHz. The reflection device 110 may correct image shake in a frequency band of about 10 kHz to 150 kHz.

FIG. 3 is a perspective view of the reflective device 110 as viewed from the back surface side opposite to the reflective surface. FIG. 4 is an exploded perspective view of the reflective device 110 as viewed from the back surface side. FIG. 5 is a perspective view of the reflective device 110 as viewed from the reflective surface side. FIG. 6 is an exploded perspective view of the reflective device 110 as viewed from the reflective surface side. FIG. 7A is a plan view of the reflective device 110 as viewed from the reflective surface side. FIG. 7B is a plan view of the reflective device 110 as viewed from the side surface side. FIG. 7C is a cross-sectional view taken along the line AA shown in FIG. 7A of the reflective device 110. FIG. 8A is a plan view of the reflective device 110 as viewed from the back surface side. FIG. 8B is a sectional view taken along the line BB shown in FIG. 8A of the reflective device 110.

The reflective device 110 includes a reflective member 120, a leaf spring 122, and a base member 130. The reflective member 120 has a reflective surface 120a that bends the optical path of the optical system of the image pickup apparatus 100. The reflective member 120 has an optical element 112 that constitutes the reflective surface 120a, and a holding member 114 that holds the optical element 112. The leaf spring 122 is arranged to face the bottom surface 120b on the opposite side of the reflective surface 120a of the reflective member 120, and supports the reflective member 120. By supporting the reflective member 120 with the leaf spring 122, the reflective member 120 is not easily affected by friction as in the case of supporting the reflective member 120 with a ball, and is not easily affected by hysteresis in driving the reflective member 120. 120 can be driven.

The base member 130 swingably holds the reflective member 120 via the leaf spring 122. The base member 130 has a pair of protrusions 132 for positioning the leaf spring 122 on the surface 130a facing the leaf spring 122. The leaf spring 122 has a pair of guide holes 125 at positions facing the pair of protrusions 132. The pair of guide holes 125 fits into the pair of protrusions 132. The leaf spring 122 is fixed to the base member 130 with an adhesive in a state where the pair of protrusions 132 are fitted into the pair of guide holes 125.

The reflection device 110 includes a plurality of piezoelectric elements 140 for swinging the reflection member 120. The plurality of piezoelectric elements 140 are arranged so as to face the surface 122b opposite to the surface 122a facing the reflective member 120 of the leaf spring 122. When a voltage is applied, the piezoelectric element 140 expands and contracts in a direction intersecting the reflecting surface 120a to swing the reflecting member 120 via the leaf spring 122. The piezoelectric element 140 may expand and contract in a direction perpendicular to the reflecting surface 120a.

On a straight line perpendicular to the reflection surface 120a passing through the center of gravity of the reflection member 120, a polygonal center of gravity having each of the plurality of piezoelectric elements 140 as vertices may exist. In the present embodiment, there is a triangular center of gravity having each of the three piezoelectric elements 140 as an apex on a straight line perpendicular to the reflecting surface 120a passing through the center of gravity of the reflecting member 120.

The reflective device 110 further comprises a cap 142. The cap 142 is arranged at the tip portion 140a facing the leaf spring 122 of the piezoelectric element 140, and has a curved surface in contact with the leaf spring 122. The surface of the cap 142 facing the leaf spring 122 may be spherical. The piezoelectric element 140 is made of a relatively hard material such as ceramic. Therefore, if the piezoelectric element 140 comes into direct contact with the leaf spring 122, the piezoelectric element 140 may be worn and the piezoelectric element 140 may be damaged. Therefore, the portion in contact with the leaf spring 122 is covered with the cap 142 made of a resin or the like that is not harder than the piezoelectric element 140. By making the surface in contact with the leaf spring 122 a curved surface, the area in contact with the leaf spring 122 is reduced to prevent wear of the cap 142 and the leaf spring 122.

The plurality of caps 142 arranged at the respective tip portions 140a of the plurality of piezoelectric elements 140 are integrally configured. By integrally configuring the plurality of caps 142, the work of assembling the caps 142 to the piezoelectric element 140 can be simplified. In the connecting portion 142a connecting each of the plurality of caps 142, when any one of the piezoelectric elements 140 expands and contracts and the cap 142 corresponding to the piezoelectric element 140 moves along the direction perpendicular to the reflection surface 120a. It is composed of a member having flexibility so that the other cap 142 does not move together with the cap 142. The plurality of caps 142 and the plurality of connecting portions 142a may be integrally formed of resin. The plurality of caps 142 may be configured separately.

The reflective device 110 further includes a pressing member 160 that presses the reflective member 120 against the base member 130 via a leaf spring 122. The base member 130 has a through hole 133 penetrating from the surface 130a facing the leaf spring 122 to the surface 130b on the opposite side of the surface 130a.

The base member 130 has a through hole 133 penetrating from the surface 130a facing the leaf spring 122 to the surface 130b on the opposite side of the surface 130a. The center of the through hole 133 exists on a straight line perpendicular to the reflection surface 120a passing through the center of gravity of the reflection member 120. The leaf spring 122 has a through hole 123 at a position facing the through hole 133. The through hole 123 may be provided at the center of the leaf spring 122.

The holding member 114 has a protruding portion 116 that protrudes from the bottom surface 120b and fits into the through hole 123 of the leaf spring 122. By fitting the protruding portion 116 of the reflective member 120 into the through hole 123 of the leaf spring 122, the reflective member 120 is restricted from moving in the direction along the reflective surface 120a.

The holding member 114 further has a protruding portion 118 protruding from the bottom surface 120b. The diameter of the protruding portion 118 may be smaller than the diameter of the protruding portion 116. The leaf spring 122 further has a through hole 124 that fits into the protruding portion 118. By fitting the protruding portion 116 into the through hole 123 and fitting the protruding portion 118 into the through hole 124, it is possible to limit the rotation of the leaf spring 122 with respect to the base member 130. The holding member 114 further has a pad 119 at a position facing each of the plurality of caps 142 on the bottom surface 120b.

The pressing member 160 has a screw 150. The screw 150 has a fixed portion 151 fixed to the protruding portion 116 of the reflective member 120 via the through hole 133, an extension portion 152 extending from the fixed portion 151, and a head on the side opposite to the fixed portion 151 of the extension portion 152. It has a portion 153 and. The fixed portion 151 has a thread on the outer peripheral surface. The protruding portion 116 has a hole 117 into which the fixing portion 151 is inserted, and has a threaded groove on the inner peripheral surface of the hole that fits the thread of the screw 150. The screw 150 is an example of a rod-shaped member.

The pressing member 160 further has a spring 156. The spring 156 is arranged around the extension portion 152 of the screw 150. One end of the spring 156 is arranged at a step portion provided on the surface 130b of the base member 130 along the edge of the through hole 133. The spring 156 exerts a force on the head portion 153 to press the reflective member 120 against the base member 130 via the leaf spring 122. The spring 156 is an example of an elastic member. By adjusting the screwing amount of the screw 150, the magnitude of the force with which the spring 156 presses the reflective member 120 against the base member 130 via the leaf spring 122 can be adjusted. By adjusting the magnitude of the force of the spring 156 that presses the reflective member 120 against the base member 130, the band of the resonance frequency of the reflective member 120 pressed against the base member 130 can be adjusted.

The plurality of piezoelectric elements 140 are arranged radially around the extension portion 152 of the screw 150. The base member 130 has a plurality of elliptical through holes 134 penetrating from the surface 130a facing the leaf spring 122 of the base member 130 to the surface opposite to the surface 130a at positions facing each of the plurality of piezoelectric elements 140. Has. Each of the plurality of piezoelectric elements 140 is fixed to the base member 130 via an adhesive in the through hole 134.

The piezoelectric element 140 may be fixed to the base member 130 by the following procedure.

A plurality of piezoelectric elements 140 are arranged in a predetermined region of the surface 130a facing the leaf spring 122 of the base member 130. Next, the adhesive is injected from the surface 130b side into each of the plurality of through holes 134 provided in the predetermined region and penetrating from the surface 130a to the surface 130b on the opposite side of the surface 130a. Each of the piezoelectric elements 140 is fixed to the base member 130.

By making the through hole 134 oval, it is possible to easily visually confirm whether the adhesive reaches the mounting surface 140b of the piezoelectric element 140 when the adhesive is injected into the through hole 134.

Here, without providing the through hole 134 in the base member 130, the adhesive is applied to the mounting surface 140b of the piezoelectric element 140 and arranged on the surface 130a of the base member 130, and the piezoelectric element 140 is placed on the base member 130. It is also possible to fix it. However, with such a fixing method, the height of the piezoelectric element 140 with respect to the base member 130 may change depending on the amount of the adhesive applied to the mounting surface 140b of the piezoelectric element 140. When the height of the piezoelectric element 140 with respect to the base member 130 changes, the inclination of the reflective surface 120a of the reflective member 120 with respect to the base member 130 also changes. Then, the optical characteristics of the optical system including the first lens group 101 and the second lens group 102 also change.

On the other hand, when the piezoelectric element 140 is fixed to the base member 130 with the adhesive injected into the through hole 134, the mounting surface 140b of the piezoelectric element 140 may be arranged in direct contact with the surface 130a of the base member 130. can. This makes it possible to prevent variations in the height of the piezoelectric element 140 with respect to the base member 130.

The reflection device 110 further includes a pair of terminals 170 that apply a voltage to each of the plurality of piezoelectric elements 140. A voltage is applied to the piezoelectric element 140 via the pair of terminals 170, the piezoelectric element 140 expands and contracts, and the reflective member 120 swings with respect to the base member 130. When the voltage is no longer applied to the piezoelectric element 140, or when the magnitude of the voltage applied to the piezoelectric element 140 becomes less than or equal to a predetermined value, the restoring force of the leaf spring 122 causes the reflecting member 120 to tilt with respect to the base member 130. Returns to the original tilt.

As shown in FIG. 9, the plurality of pairs of terminals 170 are embedded and arranged inside the base member 130. The base member 130 is made of resin, and the pair of terminals 170 are made of metal. The pair of terminals 170 may be integrally configured with the base member 130. The base member 130 and the pair of terminals 170 may be integrally configured by insert molding.

The pair of terminals 170 and the electrodes provided on the side surfaces of the piezoelectric element 140 are electrically connected via a silver paste. The silver paste is applied to the exposed region adjacent to the piezoelectric element 140 on the surface of the terminal 170 on the leaf spring 122 side, and electrically connects the exposed region of the terminal 170 and the electrode on the side surface of the piezoelectric element 140.

When the distance between the piezoelectric element 140 and the terminal 170 is large, the amount of silver paste for electrically connecting the piezoelectric element 140 and the terminal 170 increases. By embedding the terminal 170 in the base member 130 in advance by insert molding, it is possible to suppress variations in the positional relationship between the piezoelectric element 140 and the terminal 170. Therefore, the distance between the piezoelectric element 140 and the terminal 170 can be minimized, and the amount of silver paste can be reduced.

After the piezoelectric element 140 is fixed to the base member 130 with the adhesive injected into the through hole 134, from the surface 130a side of the base member 130 to the region adjacent to the electrode on the side surface of the piezoelectric element 140 in the exposed region of the terminal 170. , Apply silver paste. As a result, the piezoelectric element 140 and the terminal 170 are electrically connected. After that, the plurality of caps 142 are fitted to the tip portions 140a of the plurality of piezoelectric elements 140. Then, the pair of protrusions 132 on the surface 130a of the base member 130 are fitted into the pair of guide holes 125 of the leaf spring 122, and the leaf spring 122 is fixed to the base member 130 with an adhesive.

Next, the protruding portion 116 of the holding member 114 that holds the optical element 112 is fitted into the through hole 123 of the leaf spring 122. Then, the spring 156 is arranged at the step portion around the through hole 133 of the surface 130b of the base member 130, and the screw 150 is inserted into the through hole 133 from the surface 130b side of the base member 130 to insert the hole 117 of the protruding portion 116. Insert the fixing portion 151 of the screw 150 into the screw 150. Then, the screw 150 is screwed to the protruding portion 116. Thereby, the reflection device 110 can be manufactured.

Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various changes or improvements can be made to the above embodiments. It is clear from the description of the claims that the form with such changes or improvements may be included in the technical scope of the present invention.

The order of execution of each process such as operation, procedure, step, and step in the apparatus, system, program, and method shown in the claims, specification, and drawings is particularly "before" and "prior to". It should be noted that it can be realized in any order unless the output of the previous process is used in the subsequent process. Even if the scope of claims, the specification, and the operation flow in the drawings are explained using "first", "next", etc. for convenience, it means that it is essential to carry out in this order. It's not a thing.

10 Imaging system 20 UAV main unit 50 Gimbal 60 Imaging device 1000 UAV
100 Image pickup device 101 First lens group 102 Second lens group 103 Image sensor 110 Reflective device 112 Optical element 114 Holding member 116, 118 Protruding portion 119 Pad 120 Reflective member 120a Reflective surface 120b Bottom surface 122 Leaf spring 123, 124 Through hole 125 Guide Hole 130 Base member 132 Protrusion part 133, 134 Through hole 134 Through hole 140 Piezoelectric element 140a Tip part 140b Mounting surface 142 Cap 142a Connecting part 150 Screw 151 Fixed part 152 Extension part 153 Head part 156 Spring 160 Pushing member 170 Terminal 300 Remote Operating device

Claims (15)

A reflective member having a reflective surface that bends the optical path of the optical system,
A leaf spring, which is arranged to face the bottom surface of the reflective member opposite to the reflective surface and supports the reflective member,
A base member that swingably holds the reflective member via the leaf spring, and
The leaf spring is arranged so as to face the surface opposite to the surface facing the reflective member, and when a voltage is applied, the leaf spring expands and contracts in a direction intersecting the reflective surface, and the reflective member is inserted through the leaf spring. A reflective device with a piezoelectric element that swings. The base member has a first through hole penetrating from a first surface of the base member facing the leaf spring to a second surface opposite to the first surface at a position facing the piezoelectric element. ,
The reflective device according to claim 1, wherein the piezoelectric element is fixed to the base member via an adhesive in the first through hole. The reflective device according to claim 1, further comprising a cap having a curved surface which is arranged at a tip portion of the piezoelectric element facing the leaf spring and has a curved surface in contact with the leaf spring. The reflective device according to claim 1, further comprising a pressing member that presses the reflective member against the base member via the leaf spring. The base member has a second through hole that penetrates from the first surface facing the leaf spring to the second surface opposite to the first surface.
The leaf spring has a third through hole at a position facing the second through hole.
The reflective member has a protruding portion that protrudes from the bottom surface and fits into the third through hole.
The pressing member is
It has a fixed portion fixed to the protruding portion of the reflective member via the second through hole, an extension portion extending from the fixed portion, and a head portion of the extension portion on the opposite side of the fixed portion. With a rod-shaped member,
The reflective device according to claim 4, further comprising an elastic member arranged around the extended portion and applying a force for pressing the reflective member against the base member via the leaf spring to the head portion. The fixed portion has a thread on the outer peripheral surface and has a thread.
The reflective device of claim 5, wherein the protruding portion has a threaded groove that fits the thread. Equipped with the plurality of the piezoelectric elements,
The reflective device according to claim 5, wherein the plurality of piezoelectric elements are arranged around the rod-shaped member. The reflective device according to claim 7, further comprising a plurality of caps arranged at a tip portion of each of the plurality of piezoelectric elements facing the leaf spring and having a curved surface in contact with the leaf spring. The reflective device according to claim 8, wherein the plurality of caps are integrally configured. Further provided with a pair of terminals arranged adjacent to the piezoelectric element and electrically connected to the piezoelectric element.
The base member is made of resin, and the pair of terminals are made of metal.
The reflective device according to claim 1, wherein the pair of terminals is integrally configured with the base member. The reflective device according to any one of claims 1 to 10.
A lens device including the optical system. The lens device according to claim 11 and
An image pickup device including an image sensor that receives light from the lens device. The image pickup apparatus according to claim 12, and the image pickup apparatus according to claim 12.
An imaging system including a support mechanism that supports the imaging device so that the posture of the imaging device can be controlled. A mobile body that moves with the imaging system according to claim 13. A reflective member having a reflective surface that bends the optical path of the optical system, a leaf spring arranged facing the bottom surface of the reflective member opposite to the reflective surface, and the reflective member can be swung via the leaf spring. The base member held in the plate and the leaf spring are arranged to face the surface of the leaf spring facing the surface facing the reflective member, and when a voltage is applied, the plate expands and contracts in a direction intersecting the reflective surface. A manufacturing method for manufacturing a reflective device including a piezoelectric element that swings the reflective member via a spring.
A step of arranging the piezoelectric element in a predetermined region on the first surface of the base member facing the leaf spring, and
The adhesive is injected from the second surface side into the first through hole that penetrates from the first surface to the second surface opposite to the first surface, which is provided in the predetermined region. , A method of manufacturing a reflective device comprising a step of fixing the piezoelectric element to the base member.

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