JP7004401B2 - 高温使用のための物品 - Google Patents
高温使用のための物品 Download PDFInfo
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- JP7004401B2 JP7004401B2 JP2019504726A JP2019504726A JP7004401B2 JP 7004401 B2 JP7004401 B2 JP 7004401B2 JP 2019504726 A JP2019504726 A JP 2019504726A JP 2019504726 A JP2019504726 A JP 2019504726A JP 7004401 B2 JP7004401 B2 JP 7004401B2
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
- F01D5/288—Protective coatings for blades
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0694—Halides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
- C23C14/226—Oblique incidence of vaporised material on substrate in order to form films with columnar structure
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Turbine Rotor Nozzle Sealing (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Description
以下の実施例は、本発明の実施形態をさらに説明するために提示されており、本発明の範囲を限定すると見なされるべきではない。
EB-PVD(クロミア;20重量パーセントのイットリアを有するジルコニア(「20YSZ」);および8重量パーセントのイットリアを有するジルコニア(「8YSZ」))によって堆積した3つの異なるコーティング材料を、2つの異なる堆積角度(基材法線に対して0度および80度)で調査した。すべての試料を、上述のダスト曝露試験を使用して試験した。0度で堆積したコーティングと比較して80度で堆積したコーティングでは、蓄積したダストの量の有意な減少が観察された。クロミアおよび8YSZ試料は、80度で堆積したコーティングについて10%~20%の蓄積の減少を示したが、80度で堆積した20YSZコーティングは、0度で堆積したその対応物と比較して40%を超える減少を示した。
[実施態様1]
可視光に対して実質的に不透明である基材(110)と、
前記基材(110)に配置されたコーティング(120)とを含み、前記コーティング(120)は、固有の屈折率を有するコーティング材料を含み、前記コーティング(120)は、前記固有の屈折率よりも小さい有効屈折率を有し、前記有効屈折率は、1.8未満である、物品(100)。
[実施態様2]
前記基材(110)が、金属材料、セラミック材料、または金属間材料を含む、実施態様1に記載の物品(100)。
[実施態様3]
前記基材(110)が、チタン合金、超合金、またはセラミックマトリックス複合材を含む、実施態様1に記載の物品(100)。
[実施態様4]
前記物品(100)が、タービンアセンブリ用の構成要素を含む、実施態様1記載の物品(100)。
[実施態様5]
前記構成要素が、圧縮機ブレードまたは圧縮機ベーンである、実施態様4に記載の物品(100)。
[実施態様6]
前記コーティング(120)が、柱状構造(130)の長手方向軸(135)が前記基材(110)の接線方向(145)に対して90度未満の角度(140)を形成するように配向された複数の柱状構造(130)を含む、実施態様1に記載の物品(100)。
[実施態様7]
前記角度(140)が、80度未満である、実施態様6に記載の物品(100)。
[実施態様8]
前記角度(140)が、60度未満である、実施態様6に記載の物品(100)。
[実施態様9]
前記複数の柱状構造(130)が、約5マイクロメートル未満の公称柱間間隔(150)を有する、実施態様6に記載の物品(100)。
[実施態様10]
前記公称柱間間隔(150)が、約2マイクロメートル未満である、実施態様9に記載の物品(100)。
[実施態様11]
前記公称柱間間隔(150)が、約0.5マイクロメートル未満である、実施態様9に記載の物品(100)。
[実施態様12]
前記複数の柱状構造(130)が、約2.5マイクロメートル未満の公称柱幅(155)を有する、実施態様6に記載の物品(100)。
[実施態様13]
前記公称柱幅(155)が、約1マイクロメートル未満である、実施態様12に記載の物品(100)。
[実施態様14]
前記公称柱幅(155)が、約0.25マイクロメートル未満である、実施態様12に記載の物品(100)。
[実施態様15]
前記コーティング(120)が、前記コーティング材料の固有の剛性値よりも低いコーティング剛性値を有する、実施態様1に記載の物品(100)。
[実施態様16]
前記コーティング材料が、酸化物またはフッ化物を含む、実施態様1に記載の物品(100)。
[実施態様17]
前記コーティング材料が、アルミナ、シリカ、ジルコニア、クロミア、またはこれらの1つまたは複数を含む組合せを含む、実施態様1に記載の物品(100)。
[実施態様18]
前記コーティング(120)が、1つまたは複数のアルカリ土類元素のフッ化物を含む、実施態様1に記載の物品(100)。
[実施態様19]
前記コーティング(120)が、100マイクロメートル未満の厚さ(160)を有する、実施態様1に記載の物品(100)。
[実施態様20]
前記コーティング(120)が、25マイクロメートル未満の厚さ(160)を有する、実施態様1に記載の物品(100)。
[実施態様21]
前記コーティング(120)が、10マイクロメートル未満の厚さ(160)を有する、実施態様1に記載の物品(100)。
[実施態様22]
前記基材(110)が、前記物品(100)の内側表面を含む、実施態様1に記載の物品(100)。
[実施態様23]
前記基材(110)が、前記物品(100)の外側表面を含む、実施態様1に記載の物品(100)。
[実施態様24]
前記基材(110)と前記コーティング(120)との間に配置された少なくとも1つの介在コーティング層をさらに含む、実施態様1に記載の物品(100)。
[実施態様25]
前記コーティング(120)が、少なくとも約40体積パーセントの多孔性を有する、実施態様1に記載の物品(100)。
[実施態様26]
チタン合金、超合金、またはセラミックマトリックス複合材を含む基材(110)と、
前記基材(110)に配置されたコーティング(120)とを含み、前記コーティング(120)は、(a)1つまたは複数のアルカリ土類元素のフッ化物、(b)アルミナ、シリカ、ジルコニア、もしくはクロミア、または(c)前述の代替物の任意の1つまたは複数を含む組合せを含み、
前記コーティング(120)は、柱状構造(130)の長手方向軸(135)が前記基材(110)の接線方向(145)に対して60度未満の角度(140)を形成するように配向された複数の柱状構造(130)をさらに含む、物品(100)。
110 基材
120 コーティング
130 柱状構造、柱状特徴、柱
135 長手方向軸
140 角度
145 接線方向、基材接線
150 柱間の間隔
155 幅
160 コーティング厚さ
Claims (7)
- 可視光に対して実質的に不透明である基材(110)と、
前記基材(110)に配置されたコーティング(120)とを含み、前記コーティング(120)は、固有の屈折率を有するコーティング材料を含み、前記コーティング(120)は、前記固有の屈折率よりも小さい有効屈折率を有し、前記有効屈折率は、1.8未満であり、
前記コーティング(120)が、柱状構造(130)の長手方向軸(135)が前記基材(110)の接線方向(145)に対して90度未満の角度(140)を形成するように配向された複数の柱状構造(130)を含み、
前記コーティング(120)が、希土類酸化物として20重量パーセントのイットリアのみを含むイットリア含有ジルコニア(20YSZ)である、物品(100)であって、
前記コーティング(120)が、前記物品(100)の最外層である、物品(100)。 - 前記基材(110)が、金属材料、セラミック材料、または金属間材料を含む、請求項1に記載の物品(100)。
- 前記基材(110)が、チタン合金、超合金、またはセラミックマトリックス複合材を含む、請求項1に記載の物品(100)。
- 前記コーティング(120)が、前記コーティング材料の固有の剛性値よりも低いコーティング剛性値を有する、請求項1に記載の物品(100)。
- 前記コーティング(120)が、100マイクロメートル未満の厚さ(160)を有する、請求項1に記載の物品(100)。
- 前記基材(110)と前記コーティング(120)との間に配置された少なくとも1つの介在コーティング層をさらに含む、請求項1に記載の物品(100)。
- チタン合金、超合金、またはセラミックマトリックス複合材を含む基材(110)と、
前記基材(110)に配置されたコーティング(120)とを含み、前記コーティング(120)は、希土類酸化物として20重量パーセントのイットリアのみを含むイットリア含有ジルコニア(20YSZ)であり、
前記コーティング(120)は、柱状構造(130)の長手方向軸(135)が前記基材(110)の接線方向(145)に対して60度未満の角度(140)を形成するように配向された複数の柱状構造(130)をさらに含む、物品(100)であって、
前記コーティング(120)が、前記物品(100)の最外層である、物品(100)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US15/199,084 | 2016-08-01 | ||
US15/199,084 US10995624B2 (en) | 2016-08-01 | 2016-08-01 | Article for high temperature service |
PCT/US2017/042029 WO2018026494A1 (en) | 2016-08-01 | 2017-07-14 | Article for high temperature service |
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JP2019532170A JP2019532170A (ja) | 2019-11-07 |
JP7004401B2 true JP7004401B2 (ja) | 2022-01-21 |
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JP2019504726A Active JP7004401B2 (ja) | 2016-08-01 | 2017-07-14 | 高温使用のための物品 |
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US (1) | US10995624B2 (ja) |
EP (1) | EP3491163A1 (ja) |
JP (1) | JP7004401B2 (ja) |
CN (1) | CN109642311B (ja) |
CA (1) | CA3031228A1 (ja) |
WO (1) | WO2018026494A1 (ja) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2019532170A (ja) | 2019-11-07 |
CA3031228A1 (en) | 2018-02-08 |
US10995624B2 (en) | 2021-05-04 |
CN109642311B (zh) | 2023-04-18 |
EP3491163A1 (en) | 2019-06-05 |
WO2018026494A1 (en) | 2018-02-08 |
US20180030839A1 (en) | 2018-02-01 |
CN109642311A (zh) | 2019-04-16 |
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