JP6989416B2 - Linear scan ultrasonic flaw detector and linear scan ultrasonic flaw detector method - Google Patents

Description

Embodiments of the present invention relate to a linear scan ultrasonic flaw detector and a linear scan ultrasonic flaw detector method.

Ultrasonic testing (UT) is a non-destructive technology that can confirm the soundness of the surface and inside of structural materials, and is an indispensable inspection technology in various fields. A phased array ultrasonic flaw detection test (PAUT:) that can form an arbitrary waveform by arranging piezoelectric elements as small ultrasonic elements for transmitting and receiving ultrasonic waves and transmitting ultrasonic waves by shifting the timing (delay time) for each piezoelectric element. The Phased Array UT) is also widely used in industrial applications. Compared to monocular probes that can emit ultrasonic waves only at a predetermined angle, phased array ultrasonic flaw detection technology can detect a wide range with a single flaw detection, detect flaws at multiple angles, and handle complex shapes. There is a possibility that it can be done. Therefore, the phased array ultrasonic flaw detection technology is very attractive in that it can reduce the work man-hours.

Japanese Patent No. 5889742

In the linear scanning method, the element to be driven is electronically scanned while forming an ultrasonic beam in a fixed direction with a phased array. When this linear scan method is used, the larger the number of channels of the array probe, the larger the area of the image in the depth direction of the obtained linear scan result, and the clearer the evaluation becomes possible.

However, if an array probe with a small number of elements has to be used due to restrictions on the probe installation position, a linear scan result with a sufficient area for evaluation cannot be obtained. Therefore, the main operation is sector scan, which scans the beam in a fan shape around the array probe. In the case of sector scan, for example, in the case of anisotropy material, the speed of sound differs depending on the angle at which the beam is scanned, so a linear scan that can measure at the same angle may be more effective.

Therefore, it is an object of the present invention to enable a wide range of linear scans.

In order to achieve the above object, the linear scan ultrasonic flaw detector according to the present embodiment is arranged along the first direction of transmitting ultrasonic waves to the inspection target and receiving the ultrasonic waves reflected by the inspection target. An ultrasonic array probe having a plurality of ultrasonic elements, a potential difference applying portion capable of applying a potential difference that causes vibration to generate ultrasonic waves to each of the plurality of ultrasonic elements, and a third along the surface of the inspection target. The first digital ultrasonic waveform data obtained and digitized by the ultrasonic array probe at one probe installation position, and the ultrasonic array probe at a second probe installation position including a region overlapping with the first probe installation position. an input unit obtained receiving signal processing information storage unit for storing the digitized second digital ultrasound waveform data, the installation position information data regarding the installation position of the previous SL ultrasonic array probe externally by, before Symbol first A surface shape calculation unit that accepts the digital ultrasonic waveform data of 1 , the second digital ultrasonic waveform data , and the installation position information data of the inspection target, and calculates an acquired shape that is the surface shape of the inspection target. , The delay time calculation unit that accepts the acquired shape calculated by the surface shape calculation unit, calculates the delay time for irradiating and receiving ultrasonic waves focused on the focal point, and outputs the delay time, and the above. The delay time is received from the delay time calculation unit, the ultrasonic waveform received by the ultrasonic element is received, and the digital ultrasonic waveform data obtained by the ultrasonic array probe is moved along the time axis according to the delay time. The superimposed image in the overlapping region of the first probe installation position and the second probe installation position of the ultrasonic array probe displaced from each other in the first direction and the composition calculation unit that obtains the composition signal. The first probe installation position and the second probe including the superposed region adjusting unit for setting the conditions for obtaining, the combined signal calculated by the synthetic calculation unit, and the superposed region based on the set conditions. An integrated image calculation unit that generates data for a flaw detection image corresponding to a probe installation position is provided, and the superimposing region adjustment unit uses the surface shape used by the delay time calculation unit to calculate the delay time as the surface shape. The adjustment shape is calculated using the first acquisition shape at the first probe installation position and the second acquisition shape at the second probe installation position calculated by the calculation unit, and is output to the delay time calculation unit. Alternatively, based on both the first integrated image generated by the integrated image calculation unit using the first acquired shape and the second integrated image generated by the integrated image calculation unit using the second acquired shape. It is characterized in that it is set by either a method of selecting one as an adjustment image or a method of calculating the adjustment image using both.

Further, the linear scan ultrasonic flaw detection method according to the present embodiment is a first digitized data obtained by an ultrasonic array probe having a plurality of ultrasonic elements at a position where the first probe is installed along the surface of an inspection target. The ultrasonic array probe is used at the first digital ultrasonic waveform data acquisition step in which the signal processing information storage unit stores the digital ultrasonic waveform data and the second probe installation position including the area overlapping with the first probe installation position. the resulting second digital ultrasonic waveform data acquiring step of the signal processing information storage unit stores the digitized second digital ultrasound waveform data, input unit, the installation for the installation position of the ultrasonic array probe receiving a position information receiving step of receiving the location data, the surface shape calculation unit, before Symbol first digital ultrasound waveform data, said second digital ultrasound waveform data, and the installation position information data of said object The acquisition shape calculation step for calculating the acquisition shape which is the surface shape of the inspection target, the condition setting step for setting the conditions for creating the image data in the superimposing region by the superimposing region adjusting unit, and the delay time calculation. A delay time calculation step in which the unit accepts the acquired shape calculated by the surface shape calculation unit, calculates the delay time for focusing the ultrasonic waves on the focal point, irradiating and receiving the ultrasonic waves, and outputs the delay time. The synthesis calculation unit receives the delay time from the delay time calculation unit, receives the digital ultrasonic waveform data obtained by the ultrasonic array probe, and receives the digitized digital ultrasonic waveform data according to the delay time. The first unit including a synthesis calculation step of moving the digital ultrasonic waveform data on the time axis to obtain a synthesis signal, and the superimposing region based on the synthesis signal obtained in the synthesis calculation step and the set conditions. It has an image data creation step in which the integrated image calculation unit calculates the flaw detection image data corresponding to the probe installation position and the second probe installation position. For the surface shape used by the time calculation unit to calculate the delay time, the first acquisition shape at the first probe installation position and the second acquisition shape at the second probe installation position calculated by the surface shape calculation unit are used. The adjusted shape is calculated and output to the delay time calculation unit, or the integrated image generated by the integrated image calculation unit using the first acquisition shape and the integrated image using the second acquisition shape. It is characterized in that it is set by either a method of selecting one as an adjustment image based on both of the second integrated images generated by the calculation unit or a method of calculating the adjustment image using both.

According to the embodiment of the present invention, a wide range of linear scans is possible.

It is a block diagram which shows the structure of the linear scan ultrasonic flaw detector which concerns on 1st Embodiment. It is a perspective view which shows the structure of the array probe driving apparatus in the linear scan ultrasonic flaw detection apparatus which concerns on 1st Embodiment. It is a vertical cross-sectional view which shows the example of the shape acquisition part of the linear scan ultrasonic flaw detection apparatus which concerns on 1st Embodiment. It is a side view which shows the example of the shape acquisition part of the linear scan ultrasonic flaw detector which concerns on 1st Embodiment. It is a flow chart which shows the procedure in the linear scan ultrasonic flaw detection method which concerns on 1st Embodiment. It is a vertical cross-sectional view which shows the 1st combination of the ultrasonic array probe of the linear scan ultrasonic flaw detector which concerns on 1st Embodiment, and the plate-shaped inspection object. It is a vertical cross-sectional view which shows the 2nd combination of the ultrasonic array probe of the linear scan ultrasonic flaw detector which concerns on 1st Embodiment, and the plate-shaped inspection object. It is a vertical cross-sectional view which shows the 3rd combination of the ultrasonic array probe of the linear scan ultrasonic flaw detector which concerns on 1st Embodiment, and the plate-shaped inspection object. The state of each transmission / reception of ultrasonic waves in the linear scan ultrasonic flaw detection method according to the first embodiment is shown. The left side is a block diagram, and the right side is a reception signal in each piezoelectric element when transmitted from the first piezoelectric element. It is a figure which shows. The state of each transmission / reception of ultrasonic waves in the linear scan ultrasonic flaw detection method according to the first embodiment is shown. The left side is a block diagram, and the right side is a reception signal in each piezoelectric element when transmitted from the second piezoelectric element. It is a figure which shows. The state of each transmission / reception of ultrasonic waves in the linear scan ultrasonic flaw detection method according to the first embodiment is shown. The left side is a block diagram, and the right side is a reception signal at each piezoelectric element when transmitted from the Nth piezoelectric element. It is a figure which shows. The left side is a block diagram, and the right side is a waveform diagram showing a part of an echo waveform, showing a state of transmission and reception of ultrasonic waves in the linear scan ultrasonic flaw detection method according to the first embodiment. It is a waveform diagram explaining the delay time at the time of transmission and reception of ultrasonic waves in the linear scan ultrasonic flaw detection method which concerns on 1st Embodiment. It is a waveform diagram which shows the synthetic waveform of the echo by the linear scan ultrasonic flaw detection method which concerns on 1st Embodiment. It is a conceptual vertical sectional view for demonstrating the traveling direction of the ultrasonic wave of the linear scan ultrasonic flaw detector which concerns on 1st Embodiment. It is a longitudinal depth flaw detection image which shows the example of the flaw detection result by the linear scan ultrasonic flaw detector which concerns on 1st Embodiment. It is a conceptual vertical sectional view explaining the integration of images when the surface shape data of an inspection object is obtained at two installation positions of an ultrasonic array probe. It is a block diagram explaining the function of the superimposition area adjustment part. It is a conceptual vertical sectional view which shows the progress state of an ultrasonic wave with respect to the integration of an image when the surface shape data of an inspection object is obtained at two installation positions of an ultrasonic array probe. It is a conceptual vertical sectional view explaining the 1st superposition method of the flaw detection image by the linear scan ultrasonic flaw detection apparatus which concerns on 1st Embodiment. It is a conceptual vertical sectional view explaining the 2nd superimposition method of the flaw detection image by the linear scan ultrasonic flaw detection apparatus which concerns on 1st Embodiment. It is a conceptual vertical sectional view explaining the third superimposition method of the flaw detection image by the linear scan ultrasonic flaw detection apparatus which concerns on 1st Embodiment. It is a conceptual vertical sectional view explaining the 4th superimposition method of the flaw detection image by the linear scan ultrasonic flaw detection apparatus which concerns on 1st Embodiment. It is a conceptual vertical sectional view explaining the 5th superimposition method of the flaw detection image by the linear scan ultrasonic flaw detection apparatus which concerns on 1st Embodiment. It is a conceptual vertical sectional view explaining the 1st flaw detection method about the inspection object which has a curved surface by the linear scan ultrasonic flaw detector according to 1st Embodiment. It is a conceptual vertical sectional view explaining the 2nd flaw detection method about the inspection object which has a curved surface by the linear scan ultrasonic flaw detector according to 1st Embodiment. It is a block diagram which shows the structure of the linear scan ultrasonic flaw detector which concerns on 2nd Embodiment. It is explanatory drawing which conceptually shows 1st example of the depth flaw detection image in the longitudinal direction and the depth direction by the linear scan ultrasonic flaw detector which concerns on 2nd Embodiment. It is explanatory drawing which conceptually shows the 2nd example of the depth flaw detection image in the longitudinal direction and the depth direction by the linear scan ultrasonic flaw detector which concerns on 2nd Embodiment. It is a conceptual diagram explaining the flaw detection of a nozzle by the linear scan ultrasonic flaw detector which concerns on 2nd Embodiment. It is a conceptual explanatory drawing which shows the case of the search in the circumferential direction of a nozzle. It is a conceptual explanatory drawing which shows the case of the search in the axial direction of a nozzle.

Hereinafter, the linear scan ultrasonic flaw detector and the linear scan ultrasonic flaw detector method according to the embodiment of the present invention will be described with reference to the drawings. Here, common reference numerals are given to parts that are the same as or similar to each other, and the description of superimposition will be omitted.

[First Embodiment]
FIG. 1 is a block diagram showing a configuration of a linear scan ultrasonic flaw detector according to the first embodiment. The linear scan ultrasonic flaw detector 100 includes an ultrasonic array probe 10, an array probe driving device 80, a shape acquisition unit 90, and a monitoring panel 110. The ultrasonic array probe 10 and the monitoring panel 110 are connected by a transmission unit 10a. Further, the shape acquisition unit 90 is connected to the input unit 70 of the monitoring panel 110. The linear scan ultrasonic flaw detector 100 aims to non-destructively detect the defect 2 inherent in the inspection target 1.

The ultrasonic array probe 10 has a plurality of (N) ultrasonic elements 11 and a holding unit 12 for holding them. The ultrasonic elements 11 are one-dimensionally arranged in the longitudinal direction according to the element pitch which is a predetermined interval from each other.

The ultrasonic element 11 is a piezoelectric element capable of generating ultrasonic waves by the piezoelectric effect of a ceramic, composite material, or other material, a piezoelectric element made of a polymer film, or a mechanism capable of generating ultrasonic waves other than that. It is configured to have a damping material for damping ultrasonic waves, a part or all of the front plate attached to the oscillating surface of ultrasonic waves, and is generally called an ultrasonic probe.

The ultrasonic element 11 emits an ultrasonic wave when a potential difference is applied, and also generates a voltage signal when the ultrasonic wave is received. Therefore, the ultrasonic element 11 has a receiving function as well as an ultrasonic transmitting function.

Although the example in which the ultrasonic array probe 10 has the ultrasonic element 11 that is arranged one-dimensionally has been described, the present invention is not limited to this. For example, a 1.5-dimensional array probe in which piezoelectric elements are divided into non-uniform sizes in the depth direction of a linear array probe, a matrix array probe in which piezoelectric elements are arranged in two dimensions, and ring-shaped piezoelectric elements are concentric. Arranged ring array probe, split type ring array probe in which the piezoelectric element of the ring array probe is divided in the circumferential direction, non-uniform array probe in which the piezoelectric element is non-uniformly arranged, and a circle in which the element is arranged in the circumferential position of the arc. An arc-shaped array probe, a spherical array probe in which an element is arranged on the surface of a spherical surface, or the like may be used.

Further, so-called tandem flaw detection may be performed in which a plurality of these array probes are used in combination regardless of the type. In addition, the above array probes include those that can be used in air or underwater by caulking or packing.

At the time of inspection of the inspection target 1, an acoustic propagation medium 5 also called a wedge is provided between the ultrasonic array probe 10 and the inspection target 1. The acoustic propagation medium 5 is for incidenting ultrasonic waves on the inspection target 1 at an angle having high directivity. As the acoustic propagation medium 5, an isotropic material capable of propagating ultrasonic waves and whose acoustic impedance can be grasped is used. When the surface of the inspection target 1 is flat, the acoustic propagation medium 5 may not be used.

Examples of the isotropic material used as the acoustic propagation medium 5 include acrylic, polyimide, gel, and other polymers. It is possible to use a material having an acoustic impedance close to or the same as that of the front plate (not shown) of the ultrasonic element 11, or a material having an acoustic impedance close to or the same as that of the inspection target 1. Further, a composite material may be used in which the acoustic impedance is gradually or gradually changed.

Further, in order to prevent the multiple reflection waves in the acoustic propagation medium 5 from affecting the flaw detection result, a damping material is arranged inside and outside the acoustic propagation medium 5, a mountain-shaped wave canceling shape is provided, and a multiple reflection reduction mechanism is provided. May have. In the following description, the display of the acoustic propagation medium 5 may be omitted in the explanatory diagram when the ultrasonic waves are incident on the inspection target 1 from the ultrasonic array probe 10.

The contact portion of the path from the ultrasonic array probe 10 to the inspection target 1, that is, the contact portion between the ultrasonic array probe 10 and the acoustic propagation medium 5, the contact portion between the acoustic propagation medium 5 and the inspection target 1, or the acoustic. An acoustic contact medium (not shown) is used for propagating ultrasonic waves at the contact portion between the ultrasonic array probe 10 and the inspection target 1 when the propagation medium 5 is not used. The acoustic contact medium 5 is a medium capable of propagating ultrasonic waves, such as water, glycerin, machine oil, castor oil, acrylic, polystyrene, and gel.

FIG. 2 is a perspective view showing a configuration of an array probe driving device in the linear scan ultrasonic flaw detector according to the first embodiment. In FIG. 2, the shape acquisition unit 90 is not shown.

The ultrasonic array probe 10 of the linear scan ultrasonic flaw detector 100 is installed on the inspection target 1. The array probe driving device 80 drives the ultrasonic array probe 10. The array probe driving device 80 fixes and supports the ultrasonic array probe 100 at a predetermined installation position for flaw detection of the inspection target 1. In addition, when searching at a plurality of installation positions, the movement drive between the installation positions is performed. When moving, the transmission and reception of ultrasonic waves are basically stopped.

The array probe drive device 80 includes a drive shaft 82, a first support unit 83, a first support unit drive shaft 83a, a first support unit drive unit 83b, a second support unit 84, a second support unit drive shaft 84a, and a second support. It has a unit drive unit 84b and a frame 81 that supports them.

Now set the axis for explanation. Specifically, the longitudinal direction of the ultrasonic array probe 10 is the x direction (first direction), and the depth direction from the ultrasonic array probe 10 toward the inspection target 1 is the z direction, the depth perpendicular to the x direction and the z direction. The direction is the y direction (second direction). Hereinafter, the inspection target 1 will be described assuming that one surface on the wide side thereof is installed in a direction along the xy plane.

The ultrasonic array probe 10 is coupled to one end of a drive shaft 82 extending in the z direction via a pad 82a. If the drive shaft 82 can be directly coupled to the ultrasonic array probe 10, the pad 82a is unnecessary. The drive shaft 82 is supported so as to be constrained in the x direction and the y direction at the intersection of the first support portion 83 extending in the x direction and the second support portion 84 extending in the y direction. The drive shaft 82 is movable in the axial direction, that is, in the z direction.

The first support portion 83 can be moved in the y direction by the first support portion drive portion 83b via the first support portion drive shaft 83a extending in the y direction in a rod shape. The second support portion 84 can be moved in the x direction by the second support portion drive portion 84b via the second support portion drive shaft 84a extending in the x direction in a rod shape. At the portion where the first support portion 83 and the second support portion 84 intersect with each other, the first support portion 83 and the second support portion 84 can slide with each other. It should be noted that the portion where the first support portion 83 and the second support portion 84 intersect with each other may be fixed at a certain place, that is, at a certain place with each other, and the whole may move in parallel.

As shown in FIG. 1, the monitoring panel 110 includes a transmission / reception unit 20, a calculation unit 30, a storage unit 40, a control unit 50, a display unit 60, and an input unit 70.

The transmitting / receiving unit 20 includes a potential difference applying unit 21, an on / off unit 22, and an AD conversion unit 23. The potential difference application unit 21 applies a potential difference that causes vibration to the ultrasonic element 11 to the ultrasonic element 11 connected so that the potential difference can be applied.

Based on a command from the control unit 50, the on / off unit 22 applies a potential difference to one or more of the ultrasonic elements 11 in a state of being connected to the potential difference applying unit 21 and a state of not being connected to the potential difference applying unit 21, that is, a potential difference is applied. Switching between the applied state and the non-applied state, that is, switching the application of the potential difference on and off is performed. If transmission is performed from one ultrasonic element 11 and each ultrasonic element 11 receives and attenuates the reflected wave, even if transmission from the next ultrasonic element 11 is performed, it is possible to distinguish from the previous time. be. Therefore, when the ultrasonic array probe 10 is fixed at the installation location, the on / off interval by the on / off portion 22 can be automatically performed by the electronic circuit. Therefore, for example, the transmission interval of each ultrasonic element 11 is set to 0. If it is about 1 second, it means that the transmission / reception time at the installation location is about 2 seconds when N = 20.

The AD conversion unit 23 digitizes the signal (echo signal) received by each of the ultrasonic elements 11 and outputs the digital ultrasonic waveform to the storage unit 40.

The potential difference applying unit 21 has a function of applying a potential difference and a voltage of an arbitrary waveform to the ultrasonic element 11 conducted by the on / off unit 22. The waveform of the applied voltage may be a sine wave, a sawtooth wave, a square wave, a spike pulse, or the like, and may be a so-called bipolar having both positive and negative pole values, or may be a unipolar of either positive or negative. Further, an offset may be added to either positive or negative. Further, the waveform can be increased or decreased in the applied time and the number of repeated waves such as a single pulse, a burst or a continuous wave.

The calculation unit 30 includes an installation position calculation unit 31, a surface shape calculation unit 32, a delay time calculation unit 33, a composition calculation unit 34, an integrated image calculation unit 35, and a superimposition area adjustment unit 36.

The installation position calculation unit 31 calculates the relative position between the inspection target 1 and the ultrasonic array probe 10. Here, the relative position is a relative position between the inspection target 1 and the ultrasonic array probe 10. Specifically, when the coordinate axes (FIG. 2) with the longitudinal direction of the array probe as the x-axis are set, the intervals in each of the x-direction, y-direction, and z-direction, or the x-axis, y-axis, and z-axis respectively. The difference in rotation angle around it.

The installation position information data related to these coordinates and angles are stored in the signal processing information storage unit 41 or the installation position information storage unit 42 of the storage unit 40, which will be described later, and the installation position calculation unit 31 can use the installation position information from these. The data is read out, and the relative position between the inspection target 1 and the ultrasonic array probe 10 is calculated.

The surface shape calculation unit 32 calculates the surface shape of the inspection target 1 in the vicinity of the installation position of the ultrasonic array probe 10. In calculating the surface shape, it is necessary to obtain necessary information from the outside.

The information source for the surface shape calculation unit 32 to calculate the surface shape of the inspection target 1 is basically the same as that of the installation position calculation unit 31. That is, the first is the shape information data acquired by the shape acquisition unit 90 and stored in the installation position information storage unit 42. The second is information on the surface wave included in the digital ultrasonic waveform data (echo waveform signal data) stored in the signal processing information storage unit 41. Using either or both of these, the surface shape calculation unit 32 calculates the acquired shape which is the surface shape of the inspection target 1.

FIG. 3 is a vertical sectional view showing an example of a shape acquisition portion of the linear scan ultrasonic flaw detector according to the first embodiment. Further, FIG. 4 is a side view of the device of FIG. The shape acquisition unit 90 is provided to acquire information on the surface shape of the inspection target 1 and information on the positional relationship between the inspection target 1 and the ultrasonic array probe 10.

3 and 4 show a case where two cameras 8 are attached to the end portion of the holding portion 12 of the ultrasonic array probe 10 as the shape acquisition portion 90. The video signal of the camera 8 is received by the input unit 70 and stored in the installation position information storage unit 42.

The number of cameras 8 installed is not limited to two, and may be one or three or more. Further, the camera 8 may be provided at another position of the holding portion 12, or may be attached to a drive shaft 82 or other portion of the array probe driving device 80, for example, other than the ultrasonic array probe 10. By using stereoscopic viewing by two cameras 8, it is possible to estimate the positional relationship before and after imaging depending on the position of the angle of view where the feature quantities of the plurality of images are present. It is also possible to measure how far the ultrasonic array probe 10 and the inspection target 1 are from the range of the angle of view.

In addition, a scanner or an encoder that can be driven at a specified pitch may be used as the shape acquisition unit 90. By using these, it is possible to determine how much the ultrasonic array probe 10 has moved from the reference start position. The shape information data acquired by these shape acquisition units 90 is read by the input unit 70 and stored in the installation position information storage unit 42. Alternatively, the input unit 70 may read the shape information data such as an existing drawing and the installation position information storage unit 42 may store the data. The shape information data includes information on the surface shape of the inspection target 1.

The installation position calculation unit 31 and the surface shape calculation unit 32 read necessary shape information data from the installation position information storage unit 42, perform an installation position calculation and a surface shape calculation, respectively, to obtain an acquired shape.

Alternatively, digital ultrasonic waveform data generated by ultrasonic waves emitted from the ultrasonic array probe 10 and stored in the signal processing information storage unit 41 may be used. As will be described later with reference to FIGS. 6 to 8, when the thickness of the inspection target 1 is inclined, there is a time difference in the echo that should be a common propagation path for each ultrasonic element 11 if it is a uniform flat plate. Occurs. Therefore, it is possible to determine how much the distance difference is generated between the piezoelectric elements by the product of the sound velocity of the acoustic propagation medium 5 and the delay time. Similarly, it is possible to measure the inclination of the ultrasonic array probe installed on the flat plate.

Further, by using the information on the surface echo included in the digital ultrasonic waveform data, the distribution of the distance between the inspection target 1 and the ultrasonic array probe 10 can be calculated. The surface shape calculation unit 32 can read digital ultrasonic waveform data from the signal processing information storage unit 41 and calculate an acquired shape which is the surface shape of the inspection target 1.

As described above, either or both of the digital ultrasonic waveform data stored in the signal processing information storage unit 41 of the storage unit 40 and the shape information data stored in the installation position information storage unit 42, as needed. After reading the data, the installation position calculation unit 31 calculates the installation position, and the surface shape calculation unit 32 performs a calculation for obtaining the acquired shape.

The delay time calculation unit 33 calculates the delay time for irradiating and receiving the ultrasonic beam focused on the focal point. When actually irradiating a plurality of ultrasonic elements 11 with a time difference, the on / off portion 22 is switched based on this delay time, and each ultrasonic element 11 is put into a voltage application state. Further, when the ultrasonic element 11 is individually driven, the synthesis calculation unit 34, which will be described later, synthesizes each digital ultrasonic waveform after taking this delay time into consideration.

The delay time calculation unit 33 acquires the relative positional relationship (difference in coordinate axis direction and angle difference) between the ultrasonic array probe 10 and the inspection target 1, the flaw detection refraction angle β, the focus depth (focus), and the inspection target 1. , The delay time is calculated based on the sound velocity in the acoustic propagation medium 5 and the inspection target 1.

At this time, even if the acquired shape of the inspection target 1 is not a general plane or an inclined plane but has a curvature or an uneven portion, it is possible to perform geometric calculation in consideration of it. As described above, the surface shape of the inspection target 1 may be calculated by the surface shape calculation unit 32 using the propagation time of the ultrasonic wave emitted from the ultrasonic element 11, or the shape information of an existing drawing or the like. You can also read the data. Further, the shape acquisition unit 90 such as a camera or a laser rangefinder may be attached to the ultrasonic array probe 10 or may be separately provided near the ultrasonic array probe 10. Further, the delay time itself, which has been calculated in advance, can be read and used.

When inspecting the inspection target 1, for example, there is a case where the inspection is performed for each region of the inspection target 1, and instead of using all the ultrasonic elements 11 possessed by the ultrasonic array probe 10, some ultrasonic elements thereof are used. 11 may be used simultaneously as the same group, and the groups may be moved sequentially. As described above, the ultrasonic element 11 used in the same group is referred to as a drive element group. The drive element group may be the case of all ultrasonic elements 11 in the ultrasonic array probe 10.

Further, the delay time calculation unit 33 also calculates the delay time for shifting the timing on the receiving side in the same manner. The delay time is the delay time for receiving the ultrasonic wave after converging the ultrasonic wave at this focal point based on the relative position coordinates and inclination of the set focal point and each ultrasonic wave element 11 forming the driving element group. Calculate. Here, the position of the focal point may be set to, for example, the position of the back surface of the inspection target 1 as viewed from the ultrasonic array probe 10. Alternatively, it may be set at a position sufficiently farther than that. In this way, the position of the focal point can be appropriately selected according to the situation.

The synthesis calculation unit 34 synthesizes a signal using the data of each digital ultrasonic waveform received by the ultrasonic element 11 of the drive element group and stored in the signal processing information storage unit 41. Specifically, each digital ultrasonic waveform data received according to the delay time on the receiving side of each ultrasonic element 11 is moved on the time axis, and the combined signal (combined echo signal) is added or averaged. obtain. The composition may be a method other than addition or addition averaging.

The integrated image calculation unit 35 uses the obtained waveforms at two or more x-direction installation positions of the ultrasonic array probes 10 superimposed on each other for the inspection target 1 for an image of each x-z cross section. That is, the data for the longitudinal depth flaw detection image is calculated. Further, after calculating the longitudinal depth flaw detection image for the superimposed region by the method set by the superimposed region adjusting unit 36 described below, the data for one integrated longitudinal depth integrated image is calculated. That is, the longitudinal depth integrated image data for displaying the flaw detection image (longitudinal depth position image) along the plane parallel to the x-axis and the z-axis is created.

Imaging is a method generally called B-scan or S-scan. This image is reconstructed by the refractive angle and the flaw detection refraction angle according to the flaw detection conditions at the time of flaw detection. The following example will be described using B-scan.

The superimposition area adjusting unit 36 relates to the inspection target 1 obtained at each installation position of the ultrasonic array probe 10 when there is a superimposing area on the search area by the ultrasonic array probe 10 at two or more installation positions. The method of creating the flaw detection image for the superimposed region is determined based on the acquired shape, that is, with reference to the acquired shape for the inspection target 1 based on the signal of each transmission / reception position. As a result, the integrated image calculation unit 35 can obtain an integrated longitudinal depth image in which two or more longitudinal depth flaw detection images, which are the results of the search at each installation position, are integrated into one.

Here, the acquired shapes for the same region obtained at different positions of the ultrasonic array probe 10 do not always completely match. That is, if there is a curved surface on the surface of the inspection target 1, or if the arrangement in the longitudinal direction (x direction) of the ultrasonic element 11 and the surface of the inspection target 1 are not parallel to each other, the respective regions are the same. In the case of ultrasonic flaw detection, since the relationship between the ultrasonic element 11 and the incident angle is opposite to each other, the influence thereof gives different results to each other. Therefore, the propagation path and delay time of ultrasonic waves in each of the two are different.

For the calculation of the delay time, the group of ultrasonic elements 11 to be driven at the same time, that is, the setting of the driving element group, the coordinates and angles with respect to the position of each ultrasonic element 11 forming the driving element group, and the position where the ultrasonic wave is incident. The surface shape information of the inspection target 1 is required. The coordinates and angles of the ultrasonic element 11 are obtained by the installation position calculation unit 31, and the surface shape S of the inspection target 1 is obtained by the surface shape calculation unit 32.

Based on each coordinate, the time for the ultrasonic wave to reach the coordinate of the focal point to be formed in the inspection target 1 from each ultrasonic element 11 in the shortest time is calculated, and each ultrasonic element 11 forming a group of the ultrasonic element 11 is formed. The time difference between them is obtained as the delay time. At the time of this delay time calculation, it is also possible to use the acquired shape obtained from the digital ultrasonic waveform data when the ultrasonic array probe 10 is placed next to it.

The storage unit 40 has a signal processing information storage unit 41 and an installation position information storage unit 42.

The signal processing information storage unit 41 stores digital ultrasonic waveform data obtained by processing the ultrasonic echo signal received by the transmission / reception unit 20 by the AD conversion unit 23.

The installation position information storage unit 42 inputs the installation position information data related to the relative positional relationship between the inspection target 1 and the ultrasonic array probe 10 and the shape information data related to the shape including the acquired shape for the inspection target 1 to the input unit 70. Accept and memorize from the outside through. Further, it is output to the installation position calculation unit 31.

The display unit 60 displays the data stored in the signal processing information storage unit 41 and the installation position information storage unit 42, and the calculation results in each part of the calculation unit 30. The display unit 60 further has a flaw detection condition such as an ultrasonic echo synthesis signal, a visualization result, coordinates of the ultrasonic array probe 10 and a relative position with respect to the inspection target 1, delay time, focal depth, and flaw detection / refraction angle. Etc. may be further displayed. The display unit 60 can display one or more or a combination of the longitudinal depth flaw detection image, the longitudinal depth integrated image, and the acquired shape for the inspection target 1 of the ultrasonic array probe 10 at a certain installation position. ..

The display unit 60 may be any one that can display digital data, and may be a so-called PC monitor, a television, a projector, or the like, and may be one such as a cathode ray tube that is once converted into an analog signal and then displayed. Further, the display unit 60 may have a user interface function for generating an alarm by sound or light emission according to a set condition or inputting an operation as a touch panel.

The input unit 70 receives the above-mentioned installation position information data and shape information data from the outside, and also receives data on physical properties and acoustic characteristics necessary for the calculation in the calculation unit 30 from the outside.

The control unit 50 controls the transmission / reception unit 20, the calculation unit 30, the storage unit 40, the display unit 60, and the input unit 70 to match the timing between them. The control unit 50 may be a device having a function of performing general-purpose calculation and data communication as typified by a so-called PC (personal computer). In this case, the PC has a configuration in which a portion other than the ultrasonic array probe 10, the array probe driving device 80, and the shape acquisition unit 90, that is, the one possessed by the monitoring panel 110 can be connected by inclusion or a communication cable.

FIG. 5 is a flow chart showing a procedure in the linear scan ultrasonic flaw detection method according to the first embodiment. Hereinafter, the linear scan ultrasonic flaw detection method according to the present embodiment will be sequentially described.

When inspecting the inspection target 1, an ultrasonic array probe 10 is installed to transmit and receive ultrasonic waves. In this case, when the inspection target is larger than that of the ultrasonic array probe 10, the ultrasonic array probe 10 is sequentially moved to a plurality of locations in the x direction for measurement. Therefore, first, the installation position of the ultrasonic array probe 10 is selected (step S01). Next, the ultrasonic array probe 10 is installed at the selected location (step S02).

Next, the installation position and the surface shape are calculated (step S03). That is, the installation position calculation unit 31 calculates the relative position between the inspection target 1 and the ultrasonic array probe 10. Further, the surface shape calculation unit 32 calculates the surface shape of the inspection target in the range facing the ultrasonic array probe 10 to obtain the acquired shape. Hereinafter, step S03 will be specifically described with reference to an example in which ultrasonic waves are used by the installed ultrasonic array probe 10.

FIG. 6 is a vertical cross-sectional view showing a first combination of an ultrasonic array probe of a linear scan ultrasonic flaw detector according to a first embodiment and a flat plate-shaped inspection target.

FIG. 7 is a vertical cross-sectional view showing a second combination of the ultrasonic array probe of the linear scan ultrasonic flaw detector according to the first embodiment and a flat plate-shaped inspection target. In the case shown in FIG. 7, the thickness of the inspection target 1 changes in the longitudinal direction (x direction).

Further, FIG. 8 is a vertical cross-sectional view showing a third combination of the ultrasonic array probe of the linear scan ultrasonic flaw detector according to the first embodiment and a flat plate-shaped inspection target. In the case shown in FIG. 8, the ultrasonic array probe 10 is installed so as to be tilted with respect to the x-axis in the x-axis direction.

First, the ultrasonic array probe 10 is installed so as to face the surface of the inspection target 1 via the acoustic propagation medium 5. Next, a potential difference is sequentially applied to each of the N ultrasonic elements 11, and the reflected wave is received by the N ultrasonic elements 11. Here, the sound is transmitted from the nth (n = 1, 2, ..., N) ultrasonic element 11 until the same nth ultrasonic element 11 receives the reflected wave from the surface of the inspection target 1. The time interval is set to the surface time interval t _1n . Further, the n-th ultrasonic element 11 emits light, and the same n-th ultrasonic element 11 is at the bottom of the inspection target 1, that is, the surface opposite to the incident surface (front surface) of the ultrasonic waves in the inspection target 1 (front surface). The time interval until the reflected wave from the back surface) is received is defined as the back surface time interval t _2n .

As a result, for example, for all n (n = 1, 2, ..., N), _{each of the anti-front} surface time interval t 1n and each of the anti-back surface time interval t _2n match within the range of measurement accuracy. This corresponds to the case where the distance between the ultrasonic array probe 10 and the front surface 1a and the back surface 1b of the inspection target 1 is constant as shown in FIG.

For example, if the time interval t _1n with respect to the front surface decreases monotonically as n approaches from 1 to N, while the time interval t _2n with respect to the back surface does not change so much, the interval between the front surface surface 1 a of the inspection target 1 is n. While it narrows as it approaches N from 1, the distance from the surface 1b on the back side of the inspection target 1 does not change even if n changes from 1 to N. This is because, as shown in FIG. 7, as n approaches N from 1, the thickness of the inspection target 1 increases, and the ultrasonic array probe 10 is installed in parallel with the surface 1b on the back side of the inspection target 1. Corresponds to the case where it is done.

For example, if the time interval t _1n with respect to the front surface decreases monotonically as n approaches from 1 to N, and the time interval t _2n with respect to the back surface also decreases monotonically with the same slope, the front surface surface 1a of the inspection target 1 decreases. And the distance from the back surface 1b becomes narrower as n approaches from 1 to N, and the thickness of the inspection target 1 does not change. This corresponds to the case where the ultrasonic array probe 10 is tilted and installed with respect to the inspection target 1 having a constant thickness, as shown in FIG.

Since the ultrasonic elements 11 of the ultrasonic array probe 10 are arranged without unevenness in the longitudinal direction (direction of arrangement from n = 1 to N), the inspection is performed in the range facing the ultrasonic array probe 10 as described above. The unevenness of the front surface 1a and the back surface 1b of the object 1, that is, the surface shape in the longitudinal direction can be measured. Similarly, the relative positional relationship between the ultrasonic array probe 10 and the inspection target 1 can be measured.

_{The front} surface time interval t 1n and the back surface time interval t _2n are installed positions based on the data stored in the signal processing information storage unit 41 that stores the digital ultrasonic waveform from the AD conversion unit 23 of the transmission / reception unit 20. The calculation unit 31 and the surface shape calculation unit 32 calculate.

Now, on the front side of the inspection target 1, the ultrasonic waves directed in the direction perpendicular to the longitudinal direction (z direction) of the ultrasonic array probe 10 from the ultrasonic element 11 at n = 1 in the case shown in FIGS. 7 and 8. Consider the reflection on surface 1a. In this case, since the normal for reflection is on the outside in the longitudinal direction (left side in FIG. 7), the reflected wave is directed to the outside in the longitudinal direction (left side in FIGS. 7 and 8).

In this case, the return of the reflected wave of the ultrasonic wave from the ultrasonic element 11 with n = 1 is relatively weaker than the others. Therefore, in this case, the ultrasonic waves transmitted from the ultrasonic element 11 with n = 1 may not be reliable as the data for calculation by the installation position calculation unit 31 and the surface shape calculation unit 32. When the degree of unevenness on the surface of the inspection target 1 is large, there are cases where n = 2 or the like adjacent to n = 1 is also unreliable.

As described above, in measuring the unevenness of the front surface 1a and the back surface 1b of the inspection target 1, that is, the surface shape in the longitudinal direction, the region of the inspection target 1 corresponding to the end portion of the ultrasonic array probe 10 How to measure is important. Therefore, when the ultrasonic array probe 10 is set to the next installation position shifted in the longitudinal direction, the installation position is set so as to generate a region (superimposition region) that overlaps with the previous installation position. Therefore, a plurality of acquired shape data can be obtained for the superimposed region.

FIG. 9 is a block diagram showing the state of each transmission / reception of ultrasonic waves, and the right side is a diagram showing a reception signal in each piezoelectric element when transmitted from the first piezoelectric element. FIG. 10 is a block diagram showing the state of each transmission / reception of ultrasonic waves, and the right side is a diagram showing a reception signal in each piezoelectric element when transmitted from the second piezoelectric element. 11 is a block diagram showing the state of each transmission / reception of ultrasonic waves, and FIG. 11 is a diagram showing a reception signal at each piezoelectric element when transmitted from the Nth piezoelectric element.

When transmitting ultrasonic waves, a sequence in which ultrasonic waves are transmitted from one or more ultrasonic elements 11 in the ultrasonic array probe 10 and ultrasonic waves are received by one or more ultrasonic elements 11 respectively. A response waveform can be obtained by transmitting and receiving while changing the ultrasonic element 11 that transmits ultrasonic waves. That is, as shown in FIG. 9, the ultrasonic element 11 to be used may be all N elements of the ultrasonic element 11 included in the ultrasonic array probe 10, or may be a part thereof.

FIG. 9 shows a case where the on / off portion 22 of the transmitting / receiving unit 20 transmits ultrasonic waves one by one to all the ultrasonic elements 11 used, that is, the first element to the Nth element. ..

When transmission is performed from the first element as shown in FIG. 9, each ultrasonic element 11 from n = 1 to N receives the signal shown on the right side of FIG. Next, when transmission is performed from the second element as shown in FIG. 10, each ultrasonic element 11 from n = 1 to N receives the signal shown on the right side of FIG. Finally, when transmission is performed from the Nth element as shown in FIG. 11, each ultrasonic element 11 from n = 1 to N receives the signal shown on the right side of FIG.

When the ultrasonic array probe 10 having N ultrasonic elements 11 is used, the basic waveform of N × N pattern is recorded at the maximum by changing the ultrasonic element 11 to be transmitted. Here, it is also possible to have a plurality of ultrasonic elements 11 used for transmission while maintaining the function of holding the waveform independently for each ultrasonic element 11. In this case, the ultrasonic waves can be made into a plane wave, focused, diffused, or the like over a delay time.

The ultrasonic waves incident on the inspection target 1 are reflected and scattered by the defect 2 represented by the surface of the inspection target 1, cracks and inclusions existing inside or on the surface of the inspection target 1, and the reflected ultrasonic waves are reflected. The sound wave is received by the ultrasonic element 11 of the ultrasonic array probe 10.

The waveform transmitted from each ultrasonic element 11 and received by all the ultrasonic elements 11 including the transmitted ultrasonic element 11 itself is processed each time, and the signal processing information storage unit 41 of the storage unit 40 processes it. Remember.

FIG. 12 is a waveform diagram showing a state of transmission and reception of ultrasonic waves, a block diagram on the left side, and a part of an echo waveform on the right side. For the sake of brevity, the case where the number of elements is three as shown in FIG. 12 will be described. Further, the case where the defect 2 is present in the inspection target 1 and the ultrasonic wave is emitted in the direction of the defect 2 is shown. Here, the ultrasonic waves from the first element to the third element are transmitted with a time delay from each other so as to converge at a certain point in a certain direction. Alternatively, the echo waveforms individually transmitted, processed by the AD conversion unit 23 each time, and stored in the signal processing information storage unit 41 are signal-processed and then combined with each other with a time delay.

The transmission and reception of ultrasonic waves will be described below assuming that they are actually transmitted from the three ultrasonic elements 11 with a time delay from each other, but response waveforms may be synthesized after being individually transmitted. In any case, the direction and the convergence point (focus) are determined by the mutual time delay of the transmission from the three ultrasonic elements 11. The number of ultrasonic elements 11 transmitted together is not limited to three, and may be four or more. Alternatively, there may be two.

In this case, the focal position is set to a certain position on the surface 1b on the back side of the inspection target 1 as viewed from the ultrasonic array probe 10, or is set to a position sufficiently far from it, as described above. It can be set appropriately according to the situation.

First, the waveform as it is is called the basic waveform without considering the delay time. Hereinafter, the ultrasonic waveform signal obtained by ultrasonic transmission / reception is described as basic waveforms Ufp, q, where the number of the transmitted ultrasonic element 11 is p and the number of the received ultrasonic element 11 is q.

As shown in FIG. 12, the ultrasonic waves transmitted from the first element and received by the first element to the third element are referred to as Uf1, 1, Uf1, 2, and Uf1, 3, respectively. The ultrasonic waves transmitted from the second element and received by the first element to the third element are referred to as Uf2,1, Uf2,2, and Uf2,3, respectively. Similarly, the ultrasonic waves transmitted from the third element and received by the first element to the third element are referred to as Uf3,1, Uf3,2, and Uf3,3, respectively.

FIG. 13 is a waveform diagram illustrating a delay time during transmission and reception of ultrasonic waves in the linear scan ultrasonic flaw detection method according to the first embodiment. The delay time shown here is the sum of the transmitter delay time required to focus the transmitted ultrasonic waves and the receiver delay time required to focus the received ultrasonic waves. be. At this time, the ultrasonic element 11 used for transmission and the ultrasonic element 11 used for reception do not necessarily have to be the same.

After step S03, the delay time calculation unit 33 determines the relative position (coordinates, angles) and focus between the inspection target 1 and the drive element group of the ultrasonic array probe 10 calculated by the installation position calculation unit 31. For each combination of the transmitted ultrasonic element 11 and the received ultrasonic element 11, the increase / decrease of the total value of the transmission delay time and the reception delay time with respect to the reference time (reference time) is defined as the delay time T. Calculate (step S04).

Following step S04, ultrasonic waves are transmitted and received according to the flaw detection conditions (step S05). Specifically, the ultrasonic waves are transmitted by shifting the timing from each other by the respective delay times calculated by the delay time calculation unit 33 in step S04. For example, first, the first to third elements of the ultrasonic element 11 transmit with a predetermined time delay from each other. Next, the second element to the fourth element transmit each other with a predetermined time delay. In this way, the set of ultrasonic elements 11 that are sequentially transmitted along the longitudinal direction of the ultrasonic array probe 10 are sequentially moved, and finally, they are transmitted from the (N-2) element to the Nth element with a time lag from each other. ..

Next, the synthesis calculation unit 34 synthesizes each digital ultrasonic waveform data thus obtained (step S06). Specifically, as shown in FIG. 13, each delay time T obtained by the delay time calculation unit 33 or the relative delay time which is the difference from the reference value of the delay time is applied to each basic waveform. And shift in the time axis direction. A synthesized waveform M is obtained by synthesizing each waveform at the same time after the shift. As a result of such an operation, the timings at which the reflected waves are generated are aligned with each other.

FIG. 14 is a waveform diagram showing a composite waveform of echoes by the linear scan ultrasonic flaw detection method according to the first embodiment. As this synthesis method, addition, averaging, or the like can be used, but the synthesis method is not limited to this, and other synthesis methods may be used.

The method for obtaining this composite waveform M is not limited to this, and for example, as typified by a general phased array UT, a group of elements to be driven and a delay time for transmission / reception given to the group are determined, and transmission and reception are performed. Occasionally, a means for exciting and synthesizing with a time delay on the circuit may be used.

As a result of synthesizing the digital ultrasonic waveform data to create the synthesized waveform data, the S / N ratio of the reflected wave becomes sufficiently large, and the time Tr of the reflected wave generation, and as a result, the position of the defect 2 is accurately obtained. Can be done.

Next, the control unit 50 confirms whether or not the scanning by the ultrasonic array probe 10 is performed at all predetermined positions and the scanning is completed (step S07). When it is determined that the scanning is not completed (step S07 NO), the process returns to step S01, the position of the ultrasonic array probe 10 is selected to the position moved in the longitudinal direction, and step S02 or lower is performed. At this time, the area where the ultrasonic array probe 10 covers the inspection target 1 at the new installation position of the ultrasonic array probe 10 and the area where the ultrasonic array probe 10 at the previous installation position covers the inspection target 1. A common region, that is, a superposed region, is created between them.

When it is determined that the scanning is completed (step S07 YES), the composite waveform data is imaged (step S08). That is, based on the composite waveform data calculated by the composite calculation unit 34 in step S06, the integrated image calculation unit 35 guides the longitudinal depth image data for display for the display unit 60 to display the integrated image. The display unit 60 displays an integrated image based on the longitudinal depth flaw detection image data.

FIG. 15 is a conceptual vertical sectional view for explaining the traveling direction of ultrasonic waves of the linear scan ultrasonic flaw detector according to the first embodiment. The length of the flaw detection space region 6 in the x direction is longer than the range covered by the ultrasonic element 11 of the ultrasonic array probe 10.

In order to obtain an image of the depth flaw detection image in the longitudinal direction, which is the result of the linear scan, the information of the ultrasonic beam propagation path L, which is the path through which the composite waveform is propagated, is used in addition to the composite waveform M. When there are a plurality of transmission source ultrasonic elements 11 used to generate the composite waveform, for example, the path from the central ultrasonic element 11 is used as the propagation path of the composite waveform.

The ultrasonic beam propagation path L is determined by the incident angle α and the flaw detection refraction angle β of the composite waveform M.

FIG. 16 is a longitudinal depth flaw detection image showing an example of flaw detection results by the linear scan ultrasonic flaw detector according to the first embodiment. As described above, the longitudinal depth flaw detection image is visualized and displayed by the display unit 60 as shown in FIG. 16 based on the longitudinal depth flaw detection image data obtained by the calculation of the integrated image calculation unit 35. Will be done. Further, when flaw detection is performed at two installation positions of the ultrasonic array probe 10, the integrated image calculation unit 35 calculates a longitudinal depth flaw detection image for each of them.

Next, the superimposing area adjusting unit 36 adjusts and sets the conditions for calculating the longitudinal depth flaw detection image for the superimposing area (step S09).

FIG. 17 is a conceptual vertical cross-sectional view illustrating image integration when surface shape data to be inspected is obtained at two installation positions of the ultrasonic array probe. When the installation position of the ultrasonic array probe 10 is in the first probe installation position, the region in the longitudinal direction (x direction) covered by the ultrasonic element 11 and when the installation position of the second probe is in the second probe installation position, the ultrasonic element 11 It shows the case where there is a portion overlapped with the area in the longitudinal direction (x direction) to be covered.

The delay time is the sum of the transmission delay time and the reception delay time. Here, the transmission delay time is the time for the ultrasonic wave to propagate along the path from the transmitted ultrasonic element 11 to the path incident on the inspection target 1 and the path from the incident to the defect 2 in the inspection target 1. be. Further, the reception delay time is determined by the ultrasonic wave traveling along the route from the reflection source to the inspection target 1 propagating in the inspection target 1 and exiting the inspection target 1, and the route from passing through the inspection target 1 to the received ultrasonic element 11. It is time to propagate.

These times depend on the surface shape of the object to be inspected. That is, if the surface shape changes, the distance to the inspection target 1 changes, or the angle of the normal changes, so that the propagation path changes.

In order for the delay time calculation unit 33 to calculate the delay time, as described above, the coordinates and angles of each ultrasonic element 11 forming a group of ultrasonic elements 11 driven at the same time, and the position where the ultrasonic waves are incident are incident. The acquired shape S for the inspection target 1 of the above is used. The surface shape S of the inspection target 1 is calculated by the surface shape calculation unit 32. Based on each coordinate, the time for the ultrasonic wave to reach the coordinate of the focal point to be formed in the inspection target 1 from each ultrasonic element 11 in the shortest time is calculated, and each ultrasonic element 11 forming a group of the ultrasonic element 11 is formed. The time difference that occurs between them is obtained as the delay time.

As a result, the first acquired shape Sa for the inspection target 1 calculated by the surface shape calculation unit 32 based on the synthetic waveform data obtained at the first probe installation position, and the synthetic waveform data obtained at the second probe installation position. A range that overlaps with the second acquired shape Sb for the inspection target 1 calculated by the surface shape calculation unit 32 based on the above is generated. Therefore, it is necessary to set the surface shape Sc of the inspection target 1 in this portion, and the superimposing region adjusting unit 36 determines the surface shape Sc.

Therefore, when the ultrasonic array probes 10 are sequentially moved along the longitudinal direction (x direction) of the ultrasonic array probes 10 while partially superimposing each other, the delay time calculation is performed. The unit 33 calculates the delay time based on the surface shape of the superimposed region determined in step S04.

FIG. 18 is a block diagram illustrating the function of the superimposed area adjusting unit. Since FIG. 18 is for showing the stage of adjustment by the superimposing area adjusting unit 36 and the functional procedure for each condition set by the superimposing area adjusting unit 36, a plurality of display units are displayed for each arithmetic unit. Has been done.

The superimposing area adjusting unit 36 obtains the surface shape used by the delay time calculation unit 33 to calculate the delay time at either or both of the first probe installation position and the second probe installation position at the first probe installation position. Both the first acquired shape and the second acquired shape obtained at the second probe installation position are used for setting.

As shown in FIG. 18, there are two stages of adjustment by the superimposing area adjusting unit 36, adjustment A and adjustment B shown in FIG.

Adjustment A is a step between steps S03 and S04. As described above, in step S03, the surface shape calculation unit 32 determines the first acquisition shape Sa and the second acquisition shape at the first probe installation position and the second probe installation position, which are two overlapping probe installation positions, respectively. Sb and are obtained. Therefore, it is necessary to determine how to acquire the image in the superimposed region by using the first acquired shape Sa and the second acquired shape Sb.

Here, regarding the superposed region, in the adjustment A, the superposed region adjusting unit 36 has the following three selection methods regarding how to derive the adjusted shape based on the first acquired shape Sa and the second acquired shape Sb. Select from.

In the first selection method, as shown by the white arrows 1a and 2a in FIG. 18, the first adjustment shape Sa is the first adjustment shape, the second acquisition shape Sb is the second adjustment shape, and the first adjustment shape and the second are The procedure is to carry out step S04 and subsequent steps for each of the adjusted shapes. In this case, the first integrated image is obtained based on the first acquired shape Sa, and the second integrated image is obtained based on the second acquired shape Sb. Therefore, with respect to the superimposed region, two types of images, a first integrated image and a second integrated image, can be obtained. Therefore, in the adjustment B, the superimposed region adjusting unit 36 is selected from a plurality of methods as described later. You will choose a method to further integrate these. The flow chart shown in FIG. 5 shows a procedure based on this flow.

On the other hand, in the second selection policy in the adjustment A, the setting of the surface shape which is the basis of the delay time calculation at the first probe setting position including the superposed region is shown by the white arrow 1b in FIG. This is performed based on both the acquired shape Sa and the second acquired shape Sb. In this case, in the adjustment C1, the superimposing region adjusting unit 36 determines the first adjustment shape as a result of the adjustment of the surface shape from among several options. Regarding the first adjustment shape determined by the superimposing area adjusting unit 36, for example, the first acquired shape Sa is used for the portion outside the superimposing region, and as an option in the adjustment C1, the first acquired shape Sa is not used in the superimposing region. 2 A method using the acquired shape Sb, a method of averaging the first acquired shape Sa and the second acquired shape Sb in the superimposed region, or a method of weighting and adding the first acquired shape Sa and the second acquired shape Sb in the superimposed region. There is a way to do it. In this example, the method of acquiring the surface shape of the superposed region is selected in the adjustment C1, but the method is not limited to the superposed region, for example, a predetermined ratio on the second acquired shape Sb side in the range of the first acquired shape Sa. The range may be set as a part for selecting the surface shape acquisition method. As described above, by using the second acquired shape Sb particularly at the position on the end side of the first acquired shape Sa, the first adjusted shape can be given more accurately. When the second selection policy is selected, the calculation in the delay time calculation unit 33, the composition calculation unit 34, and the integrated image calculation unit 35 is set using both the first acquisition shape Sa and the second acquisition shape Sb. It is done based only on the first adjusted shape and the final prepared image is also obtained alone.

Further, in the third selection policy in the adjustment A, as shown by the white arrow 2b in FIG. 18, the setting of the surface shape which is the basis of the delay time calculation at the second probe setting position including the overlapping region is the first. This is performed based on both the acquired shape Sa and the second acquired shape Sb. In this case, in the adjustment C2, the superimposing region adjusting unit 36 determines the second adjustment shape as a result of the adjustment of the surface shape from among several options. Regarding the second adjustment shape determined by the superimposing area adjusting unit 36, for example, the second acquired shape Sb is used for the portion outside the superimposing region, and as an option in the adjustment C2, the second acquired shape Sb is not used in the superimposing region. A method using 1 acquired shape Sa, a method of averaging the first acquired shape Sa and the second acquired shape Sb in the superimposed region, or a method of weighting and adding the first acquired shape Sa and the second acquired shape Sb in the superimposed region. There is a way to do it. Similar to the second selection policy, the range targeted for the choice of the surface shape acquisition method in the adjustment C2 is not limited to the superposed region, and is determined in advance on the first acquisition shape Sa side in the range of the second acquisition shape Sb, for example. A range such as a ratio may be set as a part for selecting a surface shape acquisition method. As described above, by using the first acquired shape Sa particularly at the position on the end side of the second acquired shape Sb, the second adjusted shape can be given more accurately. When the third selection policy is selected, the calculation in the delay time calculation unit 33, the composition calculation unit 34, and the integrated image calculation unit 35 is performed based only on the second adjustment shape, and the final prepared image is also displayed. Obtained alone.

The second selection policy and the third selection policy may be selected at the same time. Alternatively, the second selection policy may be selected for the first adjustment shape and the first selection policy may be selected only for the second adjustment shape, or conversely, the first selection policy may be selected only for the first adjustment shape. You may select and select the third selection policy for the second adjustment shape. In this way, when the first selection policy is combined with the second selection policy or the third selection policy, when the prepared image is obtained in the adjustment B described later, the first selection is made for the image of the superimposed region. It is preferable to use the integrated image integrated using the second selection policy or the third selection policy instead of the integrated image using the policy.

Hereinafter, the procedure will be described according to the procedure shown in FIG. 5, that is, according to the flow when the superimposing area adjusting unit 36 selects the first selection policy in the adjustment A as described above.

FIG. 19 is a conceptual vertical cross-sectional view showing the progress state of ultrasonic waves with respect to image integration when surface shape data to be inspected is obtained at two probe installation positions of the ultrasonic array probe. When the range to be calculated for the delay time includes the superposed portion of the linear scan ultrasonic flaw detector, the superimposed area adjusting unit 36 is the surface of the superposed portion based on the content of an external instruction or its own policy. Determine the shape.

With respect to this superimposed region, the integrated image calculation unit 35 calculates data for the depth integrated image in the longitudinal direction based on the surface shape set by the superimposed region adjusting unit 36. The display unit 60 displays the longitudinal depth integrated image based on this result (step S10).

Although the case of setting the surface shape as setting the condition for calculating the longitudinal depth flaw detection image for the superimposed region has been described, the present invention is not limited to this. The setting policy of the condition for calculating the longitudinal depth flaw detection image for the superimposed region may be specified from the outside via the input unit 70, or may be owned by the inside of the superimposed region adjusting unit 36.

The settings include, for example, selecting one longitudinal depth flaw detection image, using the appropriate result, or averaging both. As a suitable example, when the incident direction of the ultrasonic wave transmitted from the ultrasonic element 11 to the inspection target 1 is inward, that is, as shown in FIGS. 7 and 8, n in FIG. It is conceivable to adopt the one corresponding to the side of n = N in FIG. 7 or the side of n = N in FIG. 8 instead of the side of = 1 or n = 1 in FIG.

Below, some specific examples of setting the condition for calculating the longitudinal depth flaw detection image for the superimposed region will be described.

If there are probe installation positions of two or more ultrasonic array probes 10 that are partially overlapped here, a longitudinal depth flaw detection image is drawn based on each coordinate system. A series of the two longitudinal depth flaw detection images is a longitudinal depth integrated image, and a portion where a part of each longitudinal depth flaw detection image is superimposed is a longitudinal depth superimposed image. Such data for displaying the depth integrated image in the longitudinal direction is obtained by the integrated image calculation unit 35.

Here, the integrated image is a longitudinal depth flaw detection image for a planar region extending in the x and z directions along the center of the y direction of the position of installation and movement of the ultrasonic array probe 10. The width of this image in the x direction corresponds to the area corresponding to the position of installation and movement of the ultrasonic array probe 10. Further, the width of this image in the z direction corresponds to the range sandwiched between the front surface 1a and the back surface 1b of the inspection target 1.

In steps S03 to S08, for each superimposed region of the inspection target 1, synthetic waveform data at two probe installation positions adjacent to each other of the ultrasonic array probe 10 are present. Since these two synthetic waveform data are obtained by separate measurements and calculations made in step S03 in the measurement procedure at different probe installation positions, the surface shapes are not the same but basically different from each other.

Therefore, as a result of the procedure up to step S08, two types of longitudinal depth flaw detection images are obtained for each superimposed region of the inspection target 1.

In the adjustment B shown in FIG. 18, the superimposed region adjusting unit 36 selects one of the following five policies to obtain a flaw detection image in the superimposed region. Note that the five are examples, and the present invention is not limited to this, and other appropriate methods can be used as the synthesis method.

FIG. 20 is a conceptual vertical sectional view illustrating a first superimposing method of flaw detection images by the linear scan ultrasonic flaw detector according to the first embodiment. When there is a superimposition region between the two first probe installation positions and the second probe installation position of the ultrasonic array probe 10 as shown in FIG. 20, the longitudinal depth superimposition image has both flaw detection result information. .. That is, individually, a longitudinal depth flaw detection image Ga shown by a dotted line is created based on the flaw detection result information at the first probe installation position of the ultrasonic array probe 10, and the second probe installation position of the ultrasonic array probe 10 is created. The longitudinal depth flaw detection image Gb shown by the broken line is created based on the flaw detection result information in.

For the overlapping region between the longitudinal depth flaw detection image Ga and the longitudinal depth flaw detection image Gb, that is, a longitudinal depth overlap image is created based on both composite waveforms M and is shown by a two-dot chain line. Such an overall longitudinal depth integrated image Gt is created.

FIG. 21 is a conceptual vertical sectional view illustrating a second method of superimposing a flaw detection image by the linear scan ultrasonic flaw detector according to the first embodiment. In this example, when there is a superimposition region between the two first probe installation positions and the second probe installation position of the ultrasonic array probe 10, the longitudinal depth superimposition image has only one flaw detection result information. .. That is, a longitudinal depth superimposed image is created based on one of the two composite waveforms M. At this time, either the result of the first probe installation position of the ultrasonic array probe 10 or the result of the second probe installation position of the ultrasonic array probe 10 is selected.

A longitudinal depth flaw detection image Gb as shown by a broken line is created based on the flaw detection result information at the second probe installation position of the ultrasonic array probe 10 including the overlapping region. Further, except for the overlapping region, a longitudinal depth flaw detection image Ga as shown by a dotted line is created based on the flaw detection result information at the first probe installation position of the ultrasonic array probe 10. The longitudinal depth flaw detection image Ga and the longitudinal depth flaw detection image Gb constitute the longitudinal depth integrated image Gt as shown by the two-dot chain line.

FIG. 22 is a conceptual vertical sectional view illustrating a third method of superimposing a flaw detection image by the linear scan ultrasonic flaw detector according to the first embodiment. When there is a superposed region between the two first probe installation positions and the second probe installation position of the ultrasonic array probe 10, the process of integrating both information such as the averaging of each composite waveform M and the peak hold. Can also be provided.

First, based on the flaw detection result information at the first probe installation position of the ultrasonic array probe 10, a synthetic waveform Ma is created as shown by a dotted line at a predetermined interval da, and the ultrasonic array probe 10 is the first. 2 Based on the flaw detection result information at the probe installation position, a synthetic waveform Mb is created as shown by a broken line at a predetermined interval db. At this time, especially in the overlapping region, the values of the predetermined interval da and the predetermined interval db are matched, and the positions where the synthetic waveform Ma and the synthetic waveform Mb are generated are also set to be the same position, and both at the same position. Information is integrated using the composite waveform Mc of the above or the information for creating the composite waveform, and the longitudinal depth flaw detection image Gc at the superposed portion is created.

FIG. 23 is a conceptual vertical sectional view illustrating a fourth superimposing method of flaw detection images by the linear scan ultrasonic flaw detector according to the first embodiment. As shown in FIG. 23, the composite waveform Ma based on the flaw detection result at the first probe installation position of the ultrasonic array probe 10 and the composite waveform Mb based on the flaw detection result at the second probe installation position of the ultrasonic array probe 10 are arranged in parallel. Can also be displayed.

First, based on the flaw detection result information at the first probe installation position of the ultrasonic array probe 10, a synthetic waveform Ma is created as shown by a dotted line at a predetermined interval da. Further, based on the flaw detection result information at the second probe installation position of the ultrasonic array probe 10, a synthetic waveform Mb is created as shown by a broken line at a predetermined interval db. At this time, especially in the overlapping region, the positions where the synthetic waveform Ma and the synthetic waveform Mb are generated are set to be different from each other. As a result, in the overlapping region, the synthetic waveform Mc has both the synthetic waveform Ma and the synthetic waveform Mb. The longitudinal depth flaw detection image Gc at the superimposition portion is created by using the composite waveform Ma and the composite waveform Mb.

FIG. 24 is a conceptual vertical sectional view illustrating a fifth superimposition method of flaw detection images by the linear scan ultrasonic flaw detector according to the first embodiment.

Half the pitch of the ultrasonic element 11 arranged in the ultrasonic array probe 10 after obtaining the flaw detection result information such as the synthetic waveform Ma1 as shown by the dotted line at the first probe installation position of the ultrasonic array probe 10, that is, As shown by the solid line, the flaw detection result information such as the synthetic waveform Ma2 is acquired at the first A probe installation position shifted by half the distance between the ultrasonic elements 11 adjacent to each other. By doing so, it is possible to obtain a synthetic waveform with twice the density as compared with the case where only the first probe is installed.

Similarly, after obtaining flaw detection result information such as the synthetic waveform Mb1 at the second probe installation position of the ultrasonic array probe 10 in the region partially overlapping with the first probe installation position as shown by the broken line, the ultrasonic array probe 10 As shown by the two-dot chain line at the second A probe installation position shifted by half the pitch of the ultrasonic elements 11 arranged inside, the flaw detection result information such as the synthetic waveform Mb2 is acquired. By doing so, it is possible to obtain a synthetic waveform with twice the density as compared with the case where only the second probe is installed.

The integration method in the superimposed region is any of the methods shown so far, but in any case, it is possible to obtain a longitudinal depth integrated image Gt having a sound line having a pseudo-double density.

FIG. 25 is a conceptual vertical sectional view illustrating a first flaw detection method for an inspection target having a curved surface by the linear scan ultrasonic flaw detector according to the first embodiment.

The probe installation position of the ultrasonic array probe 10 is sequentially moved in the circumferential direction of the inspection target 1 having a curved surface. The synthetic waveform Ma is obtained at the first probe installation position, the synthetic waveform Mb is obtained at the second probe installation position, and the synthetic waveform Mc is obtained at the third probe installation position.

Here, the directions of the synthetic waveform Ma, the synthetic waveform Mb, and the synthetic waveform Mc in the inspection target 1 are aligned. As described above, the longitudinal depth integrated image Gt was obtained at which probe installation position of the ultrasonic array probe 10 based on the flaw detection refraction angle at a reference probe installation position (for example, B) of the ultrasonic array probe 10. Even if it is the result, it is drawn so as to draw parallel sound lines inside the inspection target 1.

FIG. 26 is a conceptual vertical sectional view illustrating a second flaw detection method for an inspection target having a curved surface by the linear scan ultrasonic flaw detector according to the first embodiment.

As shown in FIG. 26, the refraction directions defined at each probe installation position of the ultrasonic array probe 10 are drawn in a unified manner.

In the case of the above examples shown in FIGS. 25 and 26, when the longitudinal depth integrated image Gt is displayed, the position of the reference probe of the ultrasonic array probe 10 is displayed and specified in conjunction with the specified angle. , It is also possible to provide a function to follow the results of other probe installation positions in conjunction with each other. Of course, any flaw detection refraction angle can be set for each array probe probe installation position.

As described above, according to the linear scan ultrasonic flaw detector 100 according to the present embodiment, even when the ultrasonic array probe 10 having a small number of channels is used, the ultrasonic array probe 10 is sequentially moved while providing a superposed region. If ultrasonic flaw detection is performed, the entire image can be created by appropriately adjusting the image of the superimposed region, and a wide range of linear scanning becomes possible.

[Second Embodiment]
FIG. 27 is a block diagram showing a configuration of a linear scan ultrasonic flaw detector according to a second embodiment.

This embodiment is a modification of the first embodiment. The ultrasonic array probe 10 in the first embodiment has a configuration having a plurality of ultrasonic elements 11 arranged in a row in the x direction (first direction), whereas the ultrasonic array probe 10 in the second embodiment has a plurality of ultrasonic elements 11. The ultrasonic array probe 10 in the above has a plurality of ultrasonic elements 11 that are two-dimensionally arranged in the x-direction and the y-direction (second direction). That is, a two-dimensional array (for example, a matrix array or the like) capable of beam control in the depth direction is used. Therefore, the on / off portion 22 is also two-dimensionally switched. Further, the calculation unit 30 further includes a depth image calculation unit 37 having a two-dimensional array. As a result, the display unit 60 can display up to the depth image. In other respects, it is the same as the first embodiment.

FIG. 28 is an explanatory diagram conceptually showing a first example of a depth flaw detection image in the longitudinal direction and the depth direction by the linear scan ultrasonic flaw detector according to the present embodiment. According to the linear scan ultrasonic flaw detector 100 according to the present embodiment having the configuration shown in FIG. 27, the ultrasonic array probe 10 having a two-dimensional array enables flaw detection not only in the x direction but also in the y direction. .. FIG. 28 shows a case where beam scanning parallel to each other is performed in the y direction, such as a linear scanning.

The integrated image calculation unit 35 creates longitudinal depth flaw detection images, that is, longitudinal depth flaw detection image data for displaying flaw detection images in x-direction and z-direction cross sections (x-z-direction cross sections). Similarly, the depth image calculation unit 37 creates depth direction depth image data for displaying the depth direction depth flaw detection image Gyz, which is a flaw detection image in the y direction and z direction cross sections (yz direction cross section).

As a result, in the second embodiment, the flaw detection image data is three-dimensionally created for the scanned range in the inspection target 1. These flaw detection image data are stored in the signal processing information storage unit 41.

FIG. 28A is a longitudinal depth flaw detection image, that is, a flaw detection image in the x-direction and z-direction cross sections (x-z direction cross sections), and is the longitudinal length of the ultrasonic array probe 10 at the first probe installation position. The directional depth flaw detection image Gxza and the longitudinal depth flaw detection image Gxzb at the second probe installation position of the ultrasonic array probe 10 are shown. The integrated image calculation unit 35 reads out the flaw detection image data for the target x-z direction cross section from the signal processing information storage unit 41, creates the longitudinal depth flaw detection image data, and displays it on the display unit 60.

The longitudinal depth flaw detection image Gxza and the longitudinal depth flaw detection image Gxzb have a portion that overlaps with each other. The creation conditions for creating data for the depth superimposed image Gxzd are determined by the superimposed area adjusting unit 36.

FIG. 28B shows a depth flaw detection image Gyza on a plane parallel to the y-axis containing the composite waveform M at a portion of the longitudinal depth flaw detection image Gxza. It should be noted that this image is not on the yz plane but on a plane inclined from the yz plane, but is described as Gyz for convenience. That is, the depth flaw detection image Gyza in the depth direction is a diagram in which image data perpendicular to the x-z plane and spreading on a plane including the sound line Pa is projected in the x direction.

(C) of FIG. 28 is a diagram similar to (b) of FIG. 26, and is a depth direction depth on a plane parallel to the y-axis including the composite waveform M at a certain portion of the longitudinal depth flaw detection image Gxzb. The flaw detection image Gyzb is shown. The depth-direction depth flaw detection image Gyzb is a diagram in which image data extending in the x-direction is projected on a plane including the sound line Pb, which is perpendicular to the x-z plane and is similar to the depth-direction depth flaw detection image Gyzb.

FIG. 29 is an explanatory diagram conceptually showing a second example of a depth flaw detection image in the longitudinal direction and the depth direction. FIG. 29 is similar to FIG. 28, but shows a case where a fan-shaped beam scan is performed in the y direction as in a sector scan.

FIG. 30 is a conceptual diagram illustrating flaw detection of a nozzle by the linear scan ultrasonic flaw detector according to the present embodiment. The central axis direction of the nozzle 4 is the z direction, the radial direction is the r direction, and the circumferential direction is the θ direction.

The base of the nozzle 4 is a three-dimensional curved surface, and the ultrasonic array probe 10 is set with its longitudinal direction set to the θ direction. The ultrasonic array probe 10 is moved at a predetermined position in the z direction while providing regions that overlap each other in the θ direction. After going around in the θ direction, move while providing a region superimposed in the z direction, and move in the θ direction again. This is repeated to search for the required range of the nozzle 4.

FIG. 31 is a conceptual explanatory diagram showing the case of searching in the circumferential direction of the nozzle. That is, the case of searching at each probe installation position of the first probe installation position, the second probe installation position (reference), and the third probe installation position in the r−θ direction is shown. Further, FIG. 32 is a conceptual explanatory view showing the case of searching in the axial direction of the nozzle. That is, the case of searching in the r-z direction of the probe installation positions B and B1 at each probe installation position in the r-θ direction is shown.

The integrated image calculation unit 35 performs an image generation calculation in the θ direction, and the depth image calculation unit 37 performs an image generation calculation in the z direction. Regarding the region superimposed in the θ direction, the superimposed region adjusting unit 36 determines the conditions and outputs the condition to the integrated image calculation unit 35. Further, for the region superimposed in the z direction, the superimposed region adjusting unit 36 determines the condition and outputs the condition to the depth image calculation unit 37.

Regarding the method of determining the conditions, a method of performing a delay time calculation transition using the surface shape obtained at one probe installation position, a method of creating a superimposed image using the composite waveform obtained at both probe installation positions, and a method of creating a superimposed image using the composite waveform obtained at both probe installation positions. As described in the first embodiment, from the method of synthesizing the composite waveforms obtained at both probe installation positions at the same position, external conditions or superimposition received via the input unit 70. An appropriate method is selected based on the conditions stored in the area adjusting unit 36.

As described above, according to the linear scan ultrasonic flaw detector 100 according to the second embodiment, three-dimensional linear scanning is possible while using an ultrasonic array probe having a small number of channels.

[Other embodiments]
Although some embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention.

Moreover, you may combine the features of each embodiment. Furthermore, these embodiments can be implemented in various other embodiments, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and variations thereof are included in the scope of the invention described in the claims and the equivalent scope thereof, as are included in the scope and gist of the invention.

1 ... Inspection target, 1a ... Front side surface, 1b ... Back side surface, 2 ... Defect, 4 ... Nozzle, 5 ... Acoustic propagation medium, 6 ... flaw detection space area, 8 ... Camera, 10 ... Ultrasonic array probe, 10a ... Transmission unit, 11 ... Ultrasonic element, 12 ... Holding unit, 20 ... Transmission / reception unit, 21 ... Potential difference application unit, 22 ... On / off unit, 23 ... AD conversion unit, 30 ... Calculation unit, 31 ... Installation position calculation unit, 32 ... Surface shape calculation unit, 33 ... Delay time calculation unit, 34 ... Composite calculation unit, 35 ... Integrated image calculation unit, 36 ... Superimposition area adjustment unit, 37 ... Depth image calculation unit, 40 ... Storage unit, 41 ... Signal processing information Storage unit, 42 ... Installation position information storage unit, 50 ... Control unit, 60 ... Display unit, 70 ... Input unit, 80 ... Array probe drive device, 81 ... Frame, 82 ... Drive shaft, 82a ... Pad, 83 ... First Support unit, 83a ... 1st support unit drive shaft, 83b ... 1st support unit drive unit, 84 ... 2nd support unit, 84a ... 2nd support unit drive shaft, 84b ... 2nd support unit drive unit, 90 ... shape acquisition Unit, 100 ... Linear scan ultrasonic flaw detector, 110 ... Monitoring panel, Gxza, Gxzb ... Longitudinal depth flaw detection image, Gxzd ... Longitudinal depth superimposed image, Gt ... Longitudinal depth integrated image, Gyz, Gyza, Gyzb … Depth flaw detection image in the depth direction

Claims (8)

An ultrasonic array probe having a plurality of ultrasonic elements arranged along a first direction for transmitting ultrasonic waves to an inspection target and receiving ultrasonic waves reflected by the inspection target.
A potential difference application unit capable of applying a potential difference that causes vibration that generates ultrasonic waves to each of the plurality of ultrasonic elements, and a potential difference application unit.
A second including a first digital ultrasonic waveform data obtained and digitized by the ultrasonic array probe at a first probe installation position along the surface of the inspection target, and a region overlapping with the first probe installation position. A signal processing information storage unit that stores the second digital ultrasonic waveform data obtained by the ultrasonic array probe at the probe installation position and digitized.
An input unit for receiving the installation position information data regarding the installation position of the previous SL ultrasonic array probe from the outside,
Before SL first digital ultrasound waveform data, said second digital ultrasound waveform data, and receives the installation position information data of the test object, the surface shape calculating the acquisition geometry is a surface shape of said object The arithmetic unit and
A delay time calculation unit that accepts the acquired shape calculated by the surface shape calculation unit, calculates a delay time for irradiating and receiving ultrasonic waves at a focal point, and outputs the delay time.
The delay time is received from the delay time calculation unit, the ultrasonic waveform received by the ultrasonic element is received, and the digital ultrasonic waveform data obtained by the ultrasonic array probe according to the delay time is used as a time axis. A synthetic calculation unit that moves and obtains a synthetic signal,
A superimposing area adjusting unit for setting conditions for obtaining a superimposing image in the superimposing region between the first probe installation position and the second probe installation position of the ultrasonic array probe deviated from each other in the first direction. ,
Integration to generate data for flaw detection images corresponding to the first probe installation position and the second probe installation position including the superimposed region based on the composite signal calculated by the synthesis calculation unit and the set conditions. Image calculation unit and
Equipped with
The superimposition area adjusting unit uses the surface shape used by the delay time calculation unit to calculate the delay time as the first acquisition shape and the second probe at the first probe installation position calculated by the surface shape calculation unit. The adjusted shape is calculated using the second acquired shape at the installation position and output to the delay time calculation unit, or the first integrated image and the first integrated image generated by the integrated image calculation unit using the first acquired shape. 2 Set by either a method of selecting either as an adjustment image based on both of the second integrated images generated by the integrated image calculation unit using the acquired shape, or a method of calculating the adjusted image using both. do,
A linear scan ultrasonic flaw detector characterized by this. The superimposing area adjusting unit refers to the superimposing area.
The first aspect of claim 1, wherein the superimposed image is created by using the first composite waveform obtained at the first probe installation position and the second composite waveform obtained at the second probe installation position. Linear scan ultrasonic flaw detector. The second probe installation position is such that the ultrasonic beam propagation path of the second synthetic waveform in the superimposed region overlaps with the ultrasonic beam propagation path of the first synthetic waveform in the superimposed region. The linear scan ultrasonic flaw detector according to claim 2, wherein the linear scan ultrasonic flaw detector is set to. The superimposing region adjusting unit is characterized in that the first acquired shape and the second acquired shape are obtained based on the first digital ultrasonic waveform data and the second digital ultrasonic waveform data. The linear scan ultrasonic flaw detector according to any one of claims 3. The linear scan according to any one of claims 1 to 3, further comprising a shape acquisition unit that obtains the first acquired shape and the second acquired shape and outputs the shape to the surface shape calculation unit. Ultrasonic flaw detector. The ultrasonic array probe, is positioned on a plurality of probe installation position for testing the test object, claims 1, characterized in that between pre-Symbol plurality of probe installation positions further comprises an array probe driving device moving drive The linear scan ultrasonic flaw detector according to any one of claims 5. The ultrasonic array probe has a plurality of ultrasonic elements two-dimensionally arranged in the first direction and a second direction different from the first direction.
1. The first aspect of the present invention is characterized by further comprising a depth image calculation unit that generates depth image data in the depth direction on a plane extending in the second direction perpendicular to the depth direction of the first direction and the inspection target. The linear scan ultrasonic flaw detector according to any one of claims 6. At the first probe installation position along the surface of the inspection target, the signal processing information storage unit stores the first digital ultrasonic waveform data obtained and digitized by the ultrasonic array probe having a plurality of ultrasonic elements. 1 Digital ultrasonic waveform data acquisition step and
At the second probe installation position including the region overlapping with the first probe installation position, the signal processing information storage unit stores the second digital ultrasonic waveform data obtained and digitized by the ultrasonic array probe. 2 Digital ultrasonic waveform data acquisition step and
Input unit includes a positional information receiving step of receiving the installation position information data regarding the installation position of the ultrasonic array probe,
Obtaining surface shape calculation unit, before Symbol first digital ultrasound waveform data, said second digital ultrasound waveform data, and receives the installation position information data of said object is a surface shape of said object The acquisition shape calculation step to calculate the shape and
A condition setting step in which the superimposing area adjusting unit sets conditions for creating image data in the superimposing area, and
The delay time calculation unit accepts the acquired shape calculated by the surface shape calculation unit, calculates the delay time for irradiating and receiving the ultrasonic waves focused on the focal point, and outputs the delay time. Calculation steps and
The synthesis calculation unit receives the delay time from the delay time calculation unit, receives the digital ultrasonic waveform data obtained by the ultrasonic array probe, and receives the digitized digital ultrasonic waveform data according to the delay time. A synthesis calculation step of moving the digital ultrasonic waveform data on the time axis to obtain a composite signal, and
The integrated image calculation unit integrates the flaw detection image data corresponding to the first probe installation position and the second probe installation position including the overlapping region based on the composite signal obtained in the synthesis calculation step and the set conditions. Image data creation step calculated by
Have,
In the condition setting step, the superimposing region adjusting unit obtains the surface shape used by the delay time calculation unit for calculating the delay time in the first probe installation position calculated by the surface shape calculation unit. The adjusted shape is calculated using the shape and the second acquired shape at the second probe installation position and output to the delay time calculation unit, or the first acquired shape is generated by the integrated image calculation unit. 1 A method of selecting one as an adjustment image based on both an integrated image and a second integrated image generated by the integrated image calculation unit using the second acquired shape, and calculating the adjusted image using both. Set by one of the methods,
A linear scan ultrasonic flaw detection method characterized by this.

Images