JP6988661B2 - Two-axis integrated motor and actuator - Google Patents

Description

The present invention relates to a two-axis integrated motor and actuator.

A two-axis integrated motor including two rotors each independently rotatably provided and two detection units for individually detecting the rotation angles of the two rotors is known (for example, Patent Document 1).

JP-A-2002-238234

It is desirable that the two detectors can be adjusted individually. That is, it is desirable that the two detection units are arranged so that the access for the adjustment work to one of the two detection units does not affect the other. However, in the conventional two-axis integrated motor, such an arrangement is difficult.

An object of the present invention is to provide a two-axis integrated motor and actuator in which two detection units can be individually adjusted.

The present invention for achieving the above object has an inner shaft rotor and an outer shaft rotor which are rotatably provided and have the same rotation axis direction, respectively, and the output shaft of the inner shaft rotor and the outer shaft rotor of the outer shaft rotor. A two-axis integrated motor in which the output shaft is located on one end side in the rotation axis direction, the inner shaft stator which is the stator core of the inner shaft rotor, the outer shaft stator which is the stator core of the outer shaft rotor, and the inner shaft A first bearing portion that is arranged on one end side of the shaft stator and rotates in conjunction with the inner shaft rotor, and a first bearing portion that is arranged on one end side of the outer shaft stator and interlocks with the outer shaft rotor. With respect to the rotating second bearing portion, the third bearing portion arranged on the opposite side of the first bearing portion with respect to the inner shaft stator and rotating in conjunction with the inner shaft rotor, and the outer shaft stator. A fourth bearing portion that is arranged on the opposite side of the second bearing portion and rotates in conjunction with the outer shaft rotor, a first detection portion that detects the rotation angle of the inner shaft rotor, and rotation of the outer shaft rotor. A second detection unit for detecting an angle is provided, and the first bearing unit, the inner shaft stator, the third bearing unit, and the first detection unit are provided on the outer peripheral side of the inner shaft rotor in order from the one end side. The second detection portion, the second bearing portion, the outer shaft stator, and the fourth bearing portion are arranged on the inner peripheral side of the outer shaft rotor in order from the one end side.

Therefore, the adjustment of the second detection unit can be performed from one end side (output end side of the motor). Further, the adjustment of the first detection unit can be performed from the other end side. In this way, the two detection units can be adjusted individually. Further, since the bearings are provided on one end side and the other end side of the stator, it is possible to suppress the expansion of the influence of the moment load due to the extension of the axial length of the rotor and the stator. Therefore, it becomes easier to improve the output torque by extending the shaft lengths of the rotor and the stator.

In the present invention, the first bearing portion and the second bearing portion have preloaded bearings, and the third bearing portion and the fourth bearing portion have unpreloaded bearings.

Therefore, the displacement of the inner shaft rotor and the outer shaft rotor due to the load from the outside can be further reduced. That is, the displacement of the positional relationship between the inner shaft rotor and the inner shaft stator and the displacement of the positional relationship between the outer shaft rotor and the outer shaft stator can be made smaller. Further, the third bearing portion can secure a margin for displacement of the positional relationship between the inner shaft rotor and the inner shaft stator due to expansion in the rotation axis direction due to heat. Similarly, the fourth bearing portion can secure a margin for displacement of the positional relationship between the outer shaft rotor and the outer shaft stator.

In the present invention, the inner shaft rotor and the outer shaft rotor have a rotor yoke and a magnet, and the inner shaft stator and the outer shaft stator have a coil.

Therefore, the configuration of the rotating inner shaft rotor and outer shaft rotor can be simplified.

In the present invention, the inner shaft rotor, the inner shaft stator, the outer shaft stator, and the outer shaft rotor are arranged in this order in the radial direction from the rotating shaft, and between the inner shaft stator and the outer shaft stator. It is provided with a non-magnetic material provided in the above and interposed at an adjacent position between the inner shaft stator and the outer shaft stator along the circumferential direction about the rotation axis.

Therefore, since the non-magnetic material is interposed at the position adjacent to the inner shaft stator and the outer shaft stator, the non-magnetic material suppresses the interference of the magnetic fields generated in each of the inner shaft stator and the outer shaft stator by the non-magnetic material. Can be done. Therefore, the interference of the magnetic field can be further suppressed.

In the present invention, the inner shaft stator has an inner shaft motor core provided with the coil, the outer shaft stator has an outer shaft motor core provided with the coil, and the non-magnetic material is the inner shaft. It is located between the shaft motor core and the outer shaft motor core.

Therefore, since the non-magnetic material is interposed between the inner shaft motor core provided with the coil that generates the magnetic field and the outer shaft motor core, it is possible to more reliably suppress the interference of the magnetic field.

In the present invention, the inner shaft stator has a cylindrical inner shaft stator back yoke provided outside the inner shaft motor core, and the outer shaft stator has a cylindrical shape provided inside the outer shaft motor core. The non-magnetic material has an outer shaft stator back yoke, and is located between the inner shaft stator back yoke and the outer shaft stator back yoke.

Therefore, the shape of the non-magnetic material may be any shape as long as it fits between the cylindrical inner shaft stator back yoke and the outer shaft stator back yoke. Therefore, the non-magnetic material can be provided more easily.

In the present invention, the non-magnetic material is an arc-shaped member whose cross-sectional shape in the direction orthogonal to the rotation axis is centered on the rotation axis.

Therefore, it becomes easy to fit the two-axis integrated motor into a cylindrical shape centered on the rotating shaft.

In the present invention, the non-magnetic material is a non-magnetic alloy or resin.

Therefore, the interference of the magnetic field can be more reliably suppressed by the non-magnetic material. In addition, a non-magnetic material can be provided with a material that is relatively easy to obtain, and magnetic field interference can be suppressed at a lower cost.

In the present invention, the magnet provided in the inner shaft rotor and the inner shaft stator have a longer axial length in the rotation axis direction than the magnet provided in the outer shaft rotor and the outer shaft stator.

Therefore, it becomes easier to make the difference between the output torque of the outer shaft rotor and the output torque of the inner shaft rotor smaller.

In the actuator of the present invention, any of the above two-axis integrated motors, a housing containing the two-axis integrated motor, and the inner shaft rotor are arranged so as to penetrate the inner shaft rotor in the direction of the rotation axis. A shaft member having a threaded portion in a first portion protruding in one direction in the rotation axis direction and a groove portion along the rotation axis direction in a second portion protruding from the inner shaft rotor to the other in the rotation axis direction. A nut that is arranged outside the one in the rotation axis direction with respect to the inner shaft rotor, is screwed into the screw portion, and rotates together with the inner shaft rotor to move the shaft member in the rotation axis direction. And, it is arranged outside the other side in the rotation axis direction with respect to the inner shaft rotor, guides the shaft member in the rotation axis direction along the groove portion, and rotates with the outer shaft rotor to the shaft. It is provided with a spline outer cylinder that rotates the member in the axial direction.

Therefore, since the nut and the spline outer cylinder are arranged outside in the rotation axis direction with respect to the inner shaft rotor, the inner shaft rotor and the outer shaft rotor can be miniaturized in the radial direction. This makes it possible to reduce the footprint. Further, the spline outer cylinder makes it possible to suppress the rotation of the shaft member when rotating the outer shaft rotor.

In the present invention, the inner diameter of the inner shaft rotor is smaller than the outer diameter of the nut and the spline outer cylinder.

Therefore, by making the inner diameter of the inner shaft rotor smaller than the outer diameter of the nut and the spline outer cylinder, the inner shaft rotor and the outer shaft rotor can be miniaturized in the radial direction.

The present invention further includes an arm mounting member that is connected to the tip of the second portion and mounts the arm.

Therefore, the transport device can be configured by attaching the arm to the arm attachment member.

In the present invention, the housing has a spline outer cylinder housing that accommodates the ball spline and covers a part of the second portion, and the arm mounting member extends toward the ball spline side for the spline outer cylinder. It has a tubular portion that accommodates the tip of the housing in the direction of the rotation axis, and the tubular portion has a gap between the housing and the spline outer cylinder housing.

Therefore, the gap can ensure the sealing property from the external environment. Further, since resistance is received in the rotation direction of the spline outer cylinder housing in the gap, the rotation of the shaft member can be suppressed.

In the present invention, the nut is supported by the housing via the fifth bearing portion, and the spline outer cylinder is supported by the housing via the sixth bearing portion.

Therefore, when a force is applied to the shaft member in a direction orthogonal to the rotation axis direction, the force can be received by the housing via the rolling bearing, so that the displacement of the nut and the spline outer cylinder can be suppressed.

The present invention further comprises a negatively actuated electromagnetic brake connected to the nut.

Therefore, the fall of the shaft member can be suppressed.

In the actuator of the present invention, any of the above two-axis integrated motors, a housing containing the two-axis integrated motor, and the inner shaft rotor are arranged so as to penetrate the inner shaft rotor in the direction of the rotation axis. A shaft member having a threaded portion in a first portion protruding from the rotor in one direction in the rotation axis direction and a groove portion along the rotation axis direction in a second portion protruding from the inner shaft rotor to the other in the rotation axis direction. A nut that is screwed into the screw portion and rotates together with the inner shaft rotor to move the shaft member in the rotation axis direction, and guides the shaft member in the rotation axis direction along the groove portion, and It is provided with a spline outer cylinder that rotates together with the outer shaft rotor to rotate the shaft member in the axial direction.

Therefore, the spline outer cylinder makes it possible to suppress the rotation of the shaft member when rotating the outer shaft rotor.

According to the present invention, it is possible to provide a two-axis integrated motor and an actuator in which two detection units can be individually adjusted.

FIG. 1 is a cross-sectional view showing an example of a specific configuration of the two-axis integrated motor according to the first embodiment. FIG. 2 is a diagram showing an example of a stator core portion. FIG. 3 is a diagram showing an example of a specific shape of a non-magnetic material and a shape different from that of FIG. 2. FIG. 4 is a diagram showing an example of a specific shape of a non-magnetic material and a shape different from that of FIG. 2. FIG. 5 is a diagram showing an example of a specific shape of a non-magnetic material and a shape different from that of FIG. 2. FIG. 6 is a diagram showing an example of a specific structure of the stator (stator) according to the first embodiment. FIG. 7 is a diagram showing a laminated structure of an electromagnetic steel sheet layer included in the outer shaft motor core according to the first embodiment. FIG. 8 is a diagram showing one electrical steel sheet according to the first embodiment. FIG. 9 is a diagram showing one of two phases of arrangement of a plurality of electrical steel sheets in one electrical steel sheet layer. FIG. 10 is a diagram showing the other of the two phases of the arrangement of a plurality of electrical steel sheets in one electrical steel sheet layer. FIG. 11 is a diagram showing an example of a case where electromagnetic steel sheet layers having the same phase are continuously laminated. FIG. 12 is a diagram showing one of two phases of arrangement of a plurality of electrical steel sheets in one electrical steel sheet layer. FIG. 13 is a diagram showing the other of the two phases of the arrangement of the plurality of electrical steel sheets in one electrical steel sheet layer. FIG. 14 is a partial cross-sectional view of the actuator of the second embodiment. FIG. 15 is a cross-sectional view of a main part showing the main part in FIG. FIG. 16 is a cross-sectional view of a two-axis integrated motor having a plane orthogonal to the rotation axis. FIG. 17 is a diagram showing a state in which the screw shaft is raised from the state shown in FIG.

Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The requirements of each embodiment described below can be combined as appropriate. In addition, some components may not be used.

(Embodiment 1)
FIG. 1 is a cross-sectional view showing an example of a specific configuration of the two-axis integrated motor 1. The two-axis integrated motor 1 includes an inner shaft rotor 110 and an outer shaft rotor 10 which are individually rotatable rotors, and an inner shaft stator 120 and an outer shaft stator 20 which are stators. Hereinafter, in relation to the description of the embodiment with reference to the drawings, the rotation axis direction of the two-axis integrated motor 1 may be described as the Z direction. Further, two directions orthogonal to each other along a plane orthogonal to the Z direction may be described as an X direction and a Y direction.

The inner shaft rotor 110 and the outer shaft rotor 10 are rotatably provided and have the same rotation axis direction. Specifically, the inner shaft rotor 110 has a cylindrical inner shaft rotor yoke 111 and magnets 112 arranged in an annular shape along the outer peripheral surface of the inner shaft rotor yoke 111. The outer shaft rotor 10 has a cylindrical outer shaft rotor yoke 11 and magnets 12 arranged in an annular shape along the inner peripheral surface of the outer shaft rotor yoke 11. The inner shaft rotor 110 and the outer shaft rotor 10 of the first embodiment share the same axis of the ideal rotating shaft P at the time of design, but the positions of the rotating shafts are different between the inner shaft rotor 110 and the outer shaft rotor 10. You may.

The inner shaft stator 120 has an inner shaft motor core 130 provided with a coil 150. The inner shaft rotor 110 rotates according to the power supply to the coil 150 of the inner shaft motor core 130. The outer shaft stator 20 has an outer shaft motor core 30 provided with a coil 50. The outer shaft rotor 10 rotates according to the power supply to the coil 50 of the outer shaft motor core 30.

The inner shaft stator 120 of the first embodiment has a cylindrical inner shaft stator back yoke 140 provided on the outer side of the inner shaft motor core 130. Further, the outer shaft stator 20 of the first embodiment has a cylindrical outer shaft stator back yoke 40 provided inside the outer shaft motor core 30. The inner shaft stator back yoke 140 and the outer shaft stator back yoke 40 of the first embodiment are cylindrical members provided as an integral member in the rotation axis direction, and are made of, for example, iron or a dust core.

In the two-axis integrated motor 1 of the first embodiment, the inner shaft rotor 110, the inner shaft stator 120, the outer shaft stator 20, and the outer shaft rotor 10 are arranged in this order from the inside to the outside of the diameter centered on the rotating shaft P. The configuration of is arranged.

The magnitude of the output torque of the motor is related to the magnitude of the distance from the rotating shaft P to the thrust generation position (between the magnet and the coil). Therefore, the torque of the outer shaft rotor 10 tends to be larger than that of the inner shaft rotor 110. In the first embodiment, the shaft length of the magnet 112 and the inner shaft stator 120 provided on the inner shaft rotor 110 is made longer than the magnet 12 and the outer shaft stator 20 provided on the outer shaft rotor 10, so that the outer shaft rotor 10 is formed. The thrust of the inner shaft rotor 110 is made larger than the thrust. As a result, in the first embodiment, the difference between the output torque of the outer shaft rotor 10 and the output torque of the inner shaft rotor 110 is made smaller. Further, for this reason, the inner shaft stator 120 has a longer shaft length in the rotation axis direction than the outer shaft stator 20.

Holes 11b and 111b are provided in the output ends 11a and 111a of the inner shaft rotor 110 and the outer shaft rotor 10 located on one end side of the inner shaft rotor yoke 111 and the outer shaft rotor yoke 11, respectively. By connecting and fixing the driven body to each of the inner shaft rotor 110 and the outer shaft rotor 10 provided with the holes 11b and 111b, the rotational driving force is transmitted to the driven body. The specific shapes of the holes 11b and 111b correspond to the specific shapes of the members that connect and fix the driven body. For example, if the member is a screw, the hole is a screw hole that is screwed into the screw. Further, when the member is a pin-shaped member having no thread, the hole is a hole into which the pin-shaped member is fitted. The one end side is the upper side in FIG. 1 (the output end side of the two-axis integrated motor 1). When described as the other end side, it refers to the opposite side (lower side in FIG. 1) of the one end side.

A bearing portion 260 is arranged on one end side of the outer shaft stator back yoke 40. The bearing portion 260 has a first bearing portion 261 and a second bearing portion 265. The first bearing portion 261 rotates in conjunction with the inner shaft rotor 110. The second bearing portion 265 rotates in conjunction with the outer shaft rotor 10. The first bearing portion 261 is provided at a position on the inner peripheral side with respect to the extending portion 299 extending to one end side from the outer shaft stator back yoke 40 and on the outer peripheral side with respect to the inner shaft rotor 110. Since the first bearing portion 261 is interposed between the inner shaft rotor 110 and the extension portion 299, the inner shaft rotor 110 is rotatably supported. The second bearing portion 265 is provided on the outer peripheral side with respect to the extension portion 299 and on the inner peripheral side with respect to the outer shaft rotor 10. Since the second bearing portion 265 is interposed between the outer shaft rotor 10 and the extension portion 299, the outer shaft rotor 10 is rotatably supported. The extending portion 299 is interposed between the first bearing portion 261 and the second bearing portion 265.

In the two-axis integrated motor 1, the position in the rotation axis direction of the end portion on one end side of the first bearing portion 261 and the position in the rotation axis direction of the end portion on one end side of the second bearing portion 265 are the same. Specifically, for example, as shown in FIG. 1, one end of the first bearing portion 261 including two bearings 262 and 263 and the second bearing portion 265 including two bearings 266 and 267 is relatively closer to one end. The ends of the bearing 262 and the bearing 266 on one end side are along the same plane orthogonal to the rotation axis P.

The first bearing portion 261 has preloaded bearings 262,263. The second bearing portion 265 has preloaded bearings 266,267. The bearings 262, 263, 266, and 267 of the first embodiment are subjected to a fixed position preload, but may be a constant pressure preload or other preload. Since the bearings 262,263,266,267 are preloaded, the displacement of the outer shaft rotor yoke 11 and the inner shaft rotor yoke 111 due to an external load can be further reduced. That is, the displacement of the positional relationship between the outer shaft rotor 10 and the outer shaft stator 20 and the displacement of the positional relationship between the inner shaft rotor 110 and the inner shaft stator 120 can be made smaller.

Further, as shown in FIG. 1, the bearing 262 and the bearing 263 are back-to-back combination with respect to the outer peripheral side. Further, the bearing 266 and the bearing 267 are a back combination with respect to the outer peripheral side. As a result, the first bearing portion 261 and the second bearing portion 265 can have smaller displacements with respect to the radial load on the outer shaft rotor yoke 11 and the inner shaft rotor yoke 111, and the axial load and moment load from the outer peripheral side.

In the first embodiment, the first bearing portion 261 and the second bearing portion 265 are configured to include bearings 262, 263 and bearings 266, 267, which are two ball bearings, respectively, which are the first bearing portion 261 and the first bearing portion 261. 2 This is an example of a specific configuration of the bearing portion 265 and is not limited to this. The first bearing portion 261 and the second bearing portion 265 may each have one or more bearings.

An extension 303 is provided on the other end side of the outer shaft stator back yoke 40. The extension portion 303 shown in FIG. 1 is inclined toward the outer peripheral side, but the specific shape of the extension portion 303 is not limited to this, and can be appropriately changed. For example, the extending portion 303 may have a cylindrical shape toward the other end side. The outer peripheral side refers to the outside in the radial direction about the rotation axis P. When it is described as the inner peripheral side of something, it means the inside in the radial direction about the rotation axis P with respect to something.

A base 281 is fixed to the other end side of the extending portion 303. The outer peripheral end of the base 281 extends to a position in non-contact with the outer shaft rotor yoke 11 on the other end side of the outer shaft rotor yoke 11. An annular fitting portion 304 extending from the base 281 is fitted on the inner peripheral side near the other end side of the extending portion 303.

Further, a backup bearing portion 300 is provided on the other end side of the stator core portion 70 in which the extension portion 303 extends. The backup bearing portion 300 has a third bearing portion 302 and a fourth bearing portion 305. The third bearing portion 302 is interposed between the fitting portion 304 and the inner shaft rotor yoke 111. The third bearing portion 302 rotates in conjunction with the inner shaft rotor 110 on the opposite side of the first bearing portion 261 with the outer shaft stator 120 interposed therebetween. The fourth bearing portion 305 is interposed between the extension portion 303 and the outer shaft rotor yoke 11. The fourth bearing portion 305 rotates in conjunction with the outer shaft rotor 10 on the opposite side of the second bearing portion 265 with the outer shaft stator 20 interposed therebetween. The fourth bearing portion 305 is surrounded by an extension portion 303, a base 281 and an outer shaft rotor yoke 11. The third bearing portion 302 and the fourth bearing portion 305 shown in FIG. 1 have one bearing that has not been preloaded. The third bearing portion 302 and the fourth bearing portion 305 may have a plurality of bearings.

The diameter of the ring formed by the outer peripheral surface of the extending portion 281 is the same as the diameter of the outer shaft rotor yoke 11. Further, in the first embodiment, a hole 282 used for fixing the two-axis integrated motor 1 to the mounting target of the two-axis integrated motor 1 is provided on the other end side of the base 280.

The first detection unit 240 is arranged on the inner peripheral side of the base 281. That is, the first detection unit 240 is arranged on the other end side of the inner shaft stator 120. The first detection unit 240 detects the rotation angle of the inner shaft rotor 110. Specifically, the first detection unit 240 has a first rotation unit 241 and a first fixing unit 242. The first rotating portion 241 is an annular magnetized body fixed to the inner shaft rotor 110 and rotating together with the inner shaft rotor 110. N poles and S poles are alternately magnetized in the first rotating portion 241 along the circumferential direction. The first rotating portion 241 is fixed to the inner shaft rotor 110 at a position where the inner shaft rotor 110 and the rotating shaft P are the same. The first fixing portion 242 is a magnetic detection circuit provided on the substrate 242a. The substrate 242a is fixed to the base 281 with fasteners (not shown). That is, the first fixing portion 242 detects the rotation angle of the first rotating portion 241 provided so as to be relatively repositionable with respect to the first fixing portion 242 in a state of being fixed to the outer shaft stator back yoke 40. do.

More specifically, the first rotating portion 241 is fixed to the outer peripheral side of the inner shaft rotor 110 via the fixture 241a. The fixture 241a includes a planar surface portion orthogonal to the rotation axis P, a cylindrical portion extending to one end side with respect to the surface portion, and a curved portion curved or bent so as to make the surface portion and the cylindrical portion continuous. including. The first rotating portion 241 is fixed to the other end side of the surface portion of the fixture 241a. Further, the cylindrical portion of the fixture 241a is fitted and fixed to the outer peripheral surface side of the inner shaft rotor yoke 111. As a result, the first rotating portion 241 is fixed so as to face the other end side on the outer peripheral side of the inner shaft rotor yoke 111. The first fixing portion 242 is provided on the surface on one end side of the substrate 242a and faces the first rotating portion 241.

The first rotating portion 241 and the first fixing portion 242 are non-contact. As described above, since the first detection unit 240 has a configuration in which the rotation angle is detected in the positional relationship between the first rotation unit 241 and the first fixing unit 242 having an axial gap, a moment load is applied to the two-axis integrated motor 1. In addition, even if a moment displacement occurs in the inner shaft rotor yoke 111, it is possible to suppress the influence on the detection accuracy of the rotation angle.

As described above, the third bearing portion 302 is arranged between the first detection portion 240 and the inner shaft stator 120. The third bearing portion 302 can further reduce the magnetic influence of the inner shaft stator 120 on the first detection portion 240. Further, a backup bearing portion 300 is provided between the first rotating portion 241 and the outer shaft stator 20, and the backup bearing portion 300 includes the third bearing portion 302 and the fitting portion 304. Therefore, the magnetic influence of the outer shaft stator 20 on the first detection unit 240 can be further reduced. Therefore, the first detection unit 240 can detect the rotation angle of the inner shaft rotor yoke 111 with higher accuracy.

In the first embodiment, a cover 295 that covers the inner peripheral side and the other end side of the first detection unit 240 is provided. The cover 295 is a plate-shaped ring orthogonal to the rotation axis P. The surface portion of the cover 295 faces the substrate 242a on the other end side of the substrate 242a. The cover 295 covers the first detection unit 240 from the other end side by fixing the position with respect to the base 281 by the fixing member 298.

The cover 295 is separate from the base 281. Therefore, by removing the cover 295, the first detection unit 240 can be easily accessed from the other end side. Therefore, the first detection unit 240 can be easily adjusted, such as adjusting the mounting position of the first rotating portion 241 with respect to the inner shaft rotor yoke 111 and adjusting the mounting position of the first fixing portion 242 with respect to the base 281. Further, since the access to the first detection unit 240 is performed from the other end side, the first detection unit 240 can be accessed without unnecessary access to the configuration on one end side (second detection unit 250 described later).

The inner peripheral surface and the outer peripheral surface of the extending portion 299 are provided with steps, protrusions, recessed portions, holes, etc. according to the configuration of each portion of the bearing portion 260. Further, a support member 231 is fixed to one end side of the extension portion 299. The support member 231 and the extension portion 299 are connected and fixed by a fastener 232. On the other end side of the extension portion 299, a hole is provided for the tip of the fastener 232 to enter inside. The specific shape of the hole corresponds to the specific shape of the fastener 232 as in the holes 11b and 111b.

A second detection unit 250 is arranged on one end side of the bearing unit 260. The second detection unit 250 detects the rotation angle of the outer shaft rotor 10. Specifically, the second detection unit 250 has a second rotation unit 251 and a second fixing unit 252. The second rotating portion 251 is an annular magnetized body fixed to the outer shaft rotor 10 and rotating together with the outer shaft rotor 10. N poles and S poles are alternately magnetized in the second rotating portion 251 along the circumferential direction. The second rotating portion 251 is fixed to the outer shaft rotor 10 at a position where the outer shaft rotor 10 and the rotating shaft P are the same. The second fixing portion 252 is a magnetic detection circuit provided on the substrate 252a. The substrate 252a is fixed to the support member 231 by the fastener 252b. That is, the second fixing portion 252 is fixed to the extending portion 299 via the substrate 252a, the fastener 252b, the support member 231 and the fastener 232, and the position is changed relative to the second fixing portion 252. The rotation angle of the second rotating portion 251 provided as possible is detected.

More specifically, the second rotating portion 251 is fixed to the inner peripheral side of the outer shaft rotor 10 via the base portion 251a. The base portion 251a has a planar surface portion orthogonal to the rotation axis P, a cylindrical portion extending to one end side with respect to the surface portion, and a curved portion curved or bent so as to make the surface portion and the cylindrical portion continuous. include. The second rotating portion 251 is fixed to one end side of the surface portion of the base portion 251a. Further, the surface portion of the base portion 251a is fixed to the protruding portion 11c protruding inward from the outer shaft rotor yoke 11. The base portion 251a and the projecting portion 11c are connected and fixed by a fastener 251b. A hole is provided on the surface of the protrusion 11c on one end side for the tip of the fastener 251b to enter inside. The specific shape of the hole corresponds to the specific shape of the fastener 251b as in the holes 11b and 111b.

The second rotating portion 251 is fixed so as to face one end side on the inner peripheral side of the outer shaft rotor yoke 11. The second fixing portion 252 is provided on the other end side surface of the substrate 252a and faces the second rotating portion 251. The second rotating portion 251 and the second fixed portion 252 are non-contact. As described above, since the second detection unit 250 has a configuration in which the rotation angle is detected in the positional relationship between the second rotation unit 251 and the second fixing unit 252 having an axial gap, a moment load is applied to the two-axis integrated motor 1. Even if a moment displacement occurs in the outer shaft rotor yoke 11 in addition to this, it is possible to suppress the influence on the detection accuracy of the rotation angle. Further, no other configuration is arranged between the second detection unit 250 and the bearing unit 260. Therefore, even if a moment load is applied, the degree of influence of the moment displacement with the bearing portion 260 as a fulcrum on the second detection portion 250 can be suppressed to a smaller level. Further, since the bearing portion 260 is arranged between the second detection unit 250 and the stator core portion 70, the magnetic influence of the stator core portion 70 on the second detection unit 250 can be further reduced. As a result, the second detection unit 250 can detect the rotation angle of the outer shaft rotor yoke 11 with higher accuracy.

A cover 291 is provided on one end side with respect to the second detection unit 250. The cover 291 is, for example, a plate-shaped ring arranged between the ring formed by the output end portion 11a and the ring formed by the output end portion 111a, and is arranged along a plane orthogonal to the rotation axis P. .. The cover 291 is fixed to one end side of the second detection unit 250 by using, for example, a fastener 292. The fastener 292 is provided so as to be fixed to, for example, one end side of the fastener 252b. The fastener 292 may be configured to be connected and fixed to the support member 231 at a position different from that of the fastener 252b.

By removing the cover 291, the second detection unit 250 can be easily accessed from one end side. Therefore, the second detection unit 250 can be easily adjusted, such as adjusting the mounting position of the second rotating portion 251 with respect to the outer shaft rotor yoke 11 and adjusting the mounting position of the second fixing portion 252 with respect to the support member 231. Further, since the access to the second detection unit 250 is performed from one end side, the second detection unit 250 can be accessed without unnecessary access to the first detection unit 240 on the other end side.

As described above and as shown in FIG. 1, a first bearing portion 261, an inner shaft stator 120, a third bearing portion 302, and a first detection portion 240 are arranged in order from one end side on the outer peripheral side of the inner shaft rotor yoke 111. ing. Further, on the inner peripheral side of the outer shaft rotor yoke 11, a second detection unit 250, a second bearing portion 265, an outer shaft stator 20, and a fourth bearing portion 305 are arranged in order from one end side.

FIG. 2 is a diagram showing an example of the stator core portion 70 according to the first embodiment. The coil 150 included in the inner shaft stator 120 is electrically connected to the first driver 421. The first driver 421 drives the first rotor 20 by supplying the first drive current I1 to the coil 150.

The coil 50 included in the outer shaft stator 20 is electrically connected to the second driver 422. The second driver 422 drives the second rotor 30 by supplying the second drive current I2 to the coil 50.

The first driver 421 and the second driver 422 are electrically connected to the controller 420. The controller 420 independently controls the first driver 421 and the second driver 422. The controller 420 independently controls the amount of the first drive current I1 and the amount of the second drive current I2. The rotation angle of the first rotor 20 is controlled by the amount of the first drive current I1. The rotation angle of the second rotor 30 is controlled by the amount of the second drive current I2. The controller 420 independently controls the rotation angle of the first rotor 20 and the rotation angle of the second rotor 30.

The first detection unit 240 detects the rotation angle of the inner shaft rotor yoke 111 with respect to the inner shaft stator 120 and supplies it to the controller 420. The controller 420 adjusts the amount of the first drive current I1 based on the detection result of the first detection unit 240 so that the inner shaft rotor 110 can obtain a desired rotation angle.

The second detection unit 250 detects the rotation angle of the outer shaft rotor yoke 11 with respect to the outer shaft stator 20 and supplies it to the controller 420 (see FIG. 2). The controller 420 adjusts the amount of the second drive current I2 based on the detection result of the second detection unit 250 so that the outer shaft rotor 10 can obtain a desired rotation angle.

The two-axis integrated motor 1 has a non-magnetic body 45 provided between the inner shaft stator 120 and the outer shaft stator 20. The non-magnetic body 45 of the first embodiment is located, for example, between the inner shaft motor core 130 and the outer shaft motor core 30. More specifically, the non-magnetic material 45 is located between the inner shaft stator back yoke 140 and the outer shaft stator back yoke 40, and is located on at least one of the inner shaft stator back yoke 140 and the outer shaft stator back yoke 40. It is fixed. As described above, the non-magnetic material 45 is interposed at the position adjacent to the inner shaft stator 120 and the outer shaft stator 20 along the circumferential direction about the rotation shaft P.

The non-magnetic material 45 is, for example, a member using a non-magnetic alloy, a resin, or both. More specifically, the non-magnetic material 45 is cylindrical using any one or more materials such as an aluminum alloy, a non-magnetic stainless alloy of austenitic stainless steel (for example, SUS316, SUS316, SUS305, etc.), and a synthetic resin. It is a member formed in. The cylinder of the non-magnetic material 45 has a cross-sectional shape in a direction orthogonal to the rotation axis P centered on the rotation axis P. When the non-magnetic material 45 is an alloy, it is fixed by a method such as adhesion with an adhesive or shrink fitting. When the non-magnetic material 45 is a resin, the non-magnetic material 45 formed in a cylindrical shape in advance between the inner shaft stator back yoke 140 and the outer shaft stator back yoke 40 may be fitted and fixed by a method of adhering. However, the resin may be fixedly formed between the inner shaft stator back yoke 140 and the outer shaft stator back yoke 40 by filling the resin.

3, FIG. 4, and FIG. 5 are diagrams showing examples of specific shapes of non-magnetic materials and different shapes from those of FIG. 2. The non-magnetic material according to the present invention does not have to be a continuous cylindrical shape without interruption in the cross-sectional shape in the direction orthogonal to the rotation axis P, and may be an arc-shaped member. Specifically, as shown in FIG. 3, for example, the non-magnetic material 45a may have a shape in which one part of the ring drawn by the cross-sectional shape is interrupted and discontinuous. In this case, for example, when the non-magnetic material 45a is an alloy, the cylindrical non-magnetic material 45a can be more easily formed by bending the plate-shaped alloy into an arc shape. Further, as shown in FIGS. 4 and 5, for example, the non-magnetic material may be formed into a cylindrical shape as a whole by combining a plurality of arcuate members. FIG. 4 shows an example in which the non-magnetic material has two non-magnetic members 45b, 45b, and FIG. 5 shows an example in which the non-magnetic material has three non-magnetic members 45c, 45c, 45c. Is an example and is not limited to this. The non-magnetic material may be composed of four or more members. Further, the non-magnetic material may have a configuration in which a plurality of members are provided side by side also in the rotation axis direction. The discontinuous point APs in FIGS. 3 to 5 may be voids, or the non-magnetic bodies facing each other with the discontinuous point AP sandwiched between them may be in contact with each other. Further, the discontinuous portion AP may be filled with an adhesive or the like. Hereinafter, the non-magnetic materials 45, 45a and the non-magnetic members 45b, 45c constituting the non-magnetic material may be collectively referred to as a non-magnetic material 45 or the like.

FIG. 6 is a diagram showing an example of a specific structure of the stator (stator) according to the first embodiment. A specific configuration example of the stator (stator) included in the two-axis integrated motor 1 will be described with reference to FIGS. 2 and 6 by taking the outer shaft stator 20 as an example. The outer shaft motor core 30 has an annular edge portion 31 located on the outer peripheral side, and four or more core portions 32 protruding inward from the edge portion 31. A coil 50 is provided in each of the core portions 32. The outer shaft motor core 30 has a laminated structure in which an electromagnetic steel sheet layer in which an electromagnetic steel sheet 60 described later is arranged in an annular shape is laminated. The edge portion 31 is positioned along a cylindrical shape with the rotation axis P as the central axis as a whole due to the laminated structure. Further, the four or more core portions 32 and the coil 50 are arranged in an annular shape with the rotation axis P as the central axis inside the edge portion 31. The outer shaft stator back yoke 40 is located on the opposite side of the outer shaft rotor 10 with respect to the core portion 32.

In FIG. 6, the outer shaft stator 20 and the inner shaft stator 120 are viewed from the Z direction. Further, in FIG. 6, for the purpose of clearly indicating the teeth 61 and 161 constituting the core portion 32, a part of the windings of the coils 50 and 150 surrounding the core portion 32 in FIG. 2 is omitted. There is. FIG. 7 is a diagram showing a laminated structure of an electromagnetic steel sheet layer included in the outer shaft motor core 30 according to the first embodiment. In FIG. 7, the outer axis motor core 30 is viewed from one direction (for example, the Y direction) orthogonal to the Z direction. FIG. 8 is a diagram showing one electrical steel sheet 60 according to the first embodiment.

As shown in FIG. 7, for example, the outer shaft motor core 30 has a structure in which a plurality of electrical steel sheet layers are laminated in the Z direction. As shown in FIGS. 6 and 7, a plurality of electrical steel sheets 60 are arranged in an annular shape on one electrical steel sheet layer. As shown in FIGS. 6 and 8, the electrical steel sheet 60 has two teeth 61. The outer shaft motor core 30 forms the core portion 32 of the coil 50 by laminating the teeth 61 of the electromagnetic steel sheet 60 possessed by each of the plurality of electromagnetic steel sheet layers due to the laminated structure. That is, for example, as shown in FIG. 7, the core portion 32 that functions as the core of the coil 50 provided in the outer shaft stator 20 is composed of teeth 61 laminated in the Z direction.

One electrical steel sheet 60 has a base 62 that physically connects two teeth 61, for example, as shown in FIG. Specifically, the base 62 has an arcuate shape in which, for example, two teeth 61 of one electrical steel sheet 60 are positioned at a predetermined distance from each other. A plurality of electrical steel sheets 60 are arranged in an annular shape in one electrical steel sheet layer, and the plurality of electrical steel sheet layers are laminated so that the base portions 62 come into contact with each other to form an edge portion 31. In the first embodiment, the two teeth 61 of the electrical steel sheet 60 are discontinuous on the opposite side of the outer shaft rotor 10. Specifically, for example, as shown in FIG. 8, on the opposite side of the base 62, the tip of the teeth 61 is arranged with a gap with respect to other adjacent teeth 61. As described above, a gap (slot) is provided between the teeth 61 provided so as to project from the base portion 62 in the radial direction of the outer shaft motor core 30. Further, in the electromagnetic steel sheet 60 arranged on the electromagnetic steel sheet layer, the two teeth 61 project from the base portion 62 located on the rotor side with respect to the two teeth 61 on the opposite side of the outer shaft rotor 10.

More specifically, in a so-called outer rotor motor such as a motor on the outer shaft side, two teeth 61 projecting inward of the arc of the base 62 are provided on the electrical steel sheet 60. The shape of the base 62 does not necessarily have to be arcuate. For example, as shown in FIG. 8 and the like, the protruding side of the base 62 with the teeth 61 may be a straight line orthogonal to the protruding direction of the teeth 61. For example, the electrical steel sheet 60 shown in FIG. 8 has a shape in which two T-shaped upper sides are connected by projecting two teeth 61 from a base 62. The base portion 62, which protrudes on both sides in the circumferential direction like the upper side of the T-shape with respect to the teeth 61 constituting the core portion 32, engages the coil 50 in the radial direction. As a result, it is possible to suppress the extension and protrusion of the winding of the coil 50 in the direction in which the outer shaft rotor 10 is located. Further, the base portion 62 has an arc shape on the side of the upper side of the connected T-shape where the teeth 61 does not protrude.

The portion of the base portion 62 corresponding to the midpoint between the two teeth 61 of the one electromagnetic steel sheet 60 is thinner than the other portions. More specifically, for example, the intermediate portion 63, which is a portion corresponding to the intermediate point, is curved inward in the radial direction like a bay-shaped shape of a concave lens cross section, and the thickness of the base portion 62 in the radial direction. Is thin. The teeth 61 has a configuration in which a plurality of teeth 61 are laminated along the rotation axis direction to form a core portion 32 and a coil 50 is provided. However, a magnetic field generated by magnetism wrapping around between adjacent coils 50. Interference can occur. It is desirable that the interference of the magnetic field is further reduced from the viewpoint of further increasing the efficiency of the two-axis integrated motor 1. The magnetic wraparound tends to occur relatively strongly in the closed slot HS in which the teeth 61 are physically connected than in the open slot KS in which the teeth 61 are not physically connected to each other. Further, the magnetic wraparound tends to occur relatively strongly as the degree of physical continuity in the closed slot HS increases. Therefore, in the first embodiment, the portion corresponding to the intermediate point between the teeth 61 is made thinner than the other portions to suppress the wraparound of the magnetism. As a result, the decrease in efficiency due to the interference of the magnetic field can be suppressed, and the efficiency of the two-axis integrated motor 1 can be made higher. In FIG. 6, the intermediate portion 63 with parentheses is arranged in an electromagnetic steel sheet layer different from the electromagnetic steel sheet layer in which the electromagnetic steel sheet 60 having the intermediate portion 63 without parentheses is arranged. It is an intermediate portion 63 of the magnetic steel sheet 60.

FIG. 9 is a diagram showing one of the two phases of the arrangement of the plurality of electrical steel sheets 60 in one electrical steel sheet layer. FIG. 10 is a diagram showing the other of the two phases of the arrangement of the plurality of electrical steel sheets 60 in one electrical steel sheet layer. The difference between FIGS. 9 and 10 shows the difference in the arrangement of the electromagnetic steel sheets 60 having different phases when viewed from the same direction. Hereinafter, one of the phases shown in FIG. 9 will be referred to as a first phase. Further, the other phase shown in FIG. 10 is referred to as a second phase. Reference numeral PS1 indicates a first phase electromagnetic steel sheet layer. Reference numeral PS2 indicates a second phase electromagnetic steel sheet layer.

There are two phases of arrangement of the plurality of electrical steel sheets 60 in one electrical steel sheet layer. The outer shaft stator 20 has two phases of electrical steel sheet layers. Specifically, the phases of the arrangement of the electrical steel sheets 60 are shifted by one tooth between the two phases. Since the phases of the arrangement of the electrical steel sheets 60 are shifted by one phase between the two phases, the arrangement of the two teeth 61 possessed by one electrical steel sheet 60 is staggered between the two phases. Specifically, for example, at a position where one of the teeth 61a and 61b, which are the two teeth 61 of the one electromagnetic steel sheet 60 in the first phase, (the teeth 61a) is arranged, the other (the teeth) is arranged in the second phase. 61b) is located. Further, at the position where one (teeth 61a) of the teeth 61a and 61b of the one electromagnetic steel sheet 60 is arranged in the second phase, the other (teeth 61b) is located in the first phase. In FIGS. 9 and 10, for the purpose of distinguishing the phases, one of the two teeth 61 is designated by the reference numeral 61a, and the other is designated by the reference numeral 61b.

In the first embodiment, the plurality of electrical steel sheets 60 in one electrical steel sheet layer are arranged with a gap. Specifically, the electromagnetic steel sheets 60 arranged in a ring shape in one electromagnetic steel sheet layer are not in contact with each other. More specifically, the distance between two teeth 61 of two different electromagnetic steel sheets 60 and adjacent to each other in a non-contact state, and the distance between two teeth 61 of one electrical steel sheet 60. The electromagnetic steel sheets 60 are arranged along the annular arrangement direction in one electromagnetic steel sheet layer so that they are the same. As described above, the gap (slot) between the two teeth 61 is the gap (closed slot HS) between the two teeth 61s of the one electromagnetic steel sheet 60, or the gap between the two teeth 61s of the different electrical steel sheets 60. Regardless of whether it is (open slot KS), the distance between the teeth 61 arranged in a ring shape is the same.

In the first embodiment, the shape of the electrical steel sheet 60 is two teeth 61 possessed by different electrical steel sheets 60, and the distance between adjacent teeth 61 in a non-contact state and the two teeth 61 possessed by one electrical steel sheet 60. It is a shape that can make the distance between each other the same. Specifically, the extension length of the portion of the base 62 that is extended so as to connect the two teeth 61 of one of the magnetic steel sheets 60 is from the teeth 61 toward the opposite side in the extension direction. It is more than twice the total length of the protruding part.

In the first embodiment, the phases of the arrangement of the plurality of electrical steel sheets 60 between the adjacent electrical steel sheet layers are different. Specifically, as shown in FIG. 7, for example, the outer shaft motor core 30 is formed by alternately stacking the first phase electromagnetic steel sheet layer PS1 and the second phase electromagnetic steel sheet layer PS2. Therefore, the open slot KS and the closed slot HS are alternately arranged in the axial direction. Further, in the first embodiment, for example, as shown in FIG. 7, the number of each of the two phase electromagnetic steel sheet layers is equal. In this case, the slot of the outer shaft motor core 30 is a slot (semi-closed slot) in which one layer is an open slot KS and one layer is a closed slot HS for each of two magnetic steel sheet layers in the rotation axis direction. According to such a structure, the weight is lighter than that of a structure in which one layer of electrical steel sheets is a completely closed slot HS in which one layer is completely continuous in an annular shape. Further, according to the structure, it is possible to reduce the magnetic wraparound between the coils 50 provided in the core portion 32 in which the teeth 61 are laminated, so that the efficiency of the two-axis integrated motor 1 can be further improved. Can be enhanced.

FIG. 11 is a diagram showing an example of a case where electromagnetic steel sheet layers having the same phase are continuously laminated. In the example shown in FIG. 7, the phases of the arrangement of the plurality of electrical steel sheets 60 between the magnetic steel sheet layers adjacent to each other in the rotation axis direction are different, but this is an example of the phase relationship between the laminated electrical steel sheet layers. It is an indication and is not limited to this. For example, as shown in FIG. 11, the number of consecutive parts having the same phase may be 2 or more. The continuous number of the same phase is the number of continuous electromagnetic steel sheet layers having the same phase along the rotation axis direction. In the case of the example shown in FIG. 11, the continuous number of the same phase is 5, but it may be any natural number of 4 or less or 6 or more.

Except for special matters relating to the difference between the electric motor of the in-rotor and the electric motor of the outer rotor, among the explanations relating to the outer shaft stator 20, the outer shaft stator 20, the outer shaft motor core 30, the edge portion 31, the core portion 32, and the coil 50. , Electrical Steel Sheet 60, Teeth 61, 61a, 61b, Base 62, Intermediate Part 63, Closed Slot HS, Open Slot KS, First Phase Electromagnetic Steel Sheet Layer PS1, Second Phase Electromagnetic Steel Sheet Layer PS2. In each configuration, the reference numerals are given to the inner shaft stator 120, the inner shaft motor core 130, the edge portion 131, the core portion 132, the coil 150, the electrical steel sheet 160, the teeth 161, 161a, 161b, the base portion 162, the intermediate portion 163, and the closed slot. By substituting hs, open slot ks, first-phase electrical steel sheet layer ps1, and second-phase electrical steel sheet layer ps2, it can be read as an explanation relating to the inner shaft stator 120.

FIG. 12 is a diagram showing one of two phases of arrangement of a plurality of electrical steel sheets 160 in one electrical steel sheet layer. FIG. 13 is a diagram showing the other of the two phases of the arrangement of the plurality of electrical steel sheets 160 in one electrical steel sheet layer. In the inner shaft stator 120 included in the so-called in-rotor motor such as the motor on the inner shaft side, the coil 150 is provided on the outside of the inner shaft motor core 130. Specifically, the electromagnetic steel sheet 160 is provided with two teeth 161 projecting toward the outside of the arc of the base 162. The shape of the base 162 does not necessarily have to be arcuate. For example, the protruding side of the base 162 with the teeth 161 may be a straight line orthogonal to the protruding direction of the teeth 161. Further, the inner shaft stator back yoke 140 is provided on the outer side of the inner shaft motor core 130.

As described above, according to the first embodiment, the adjustment of the second detection unit 250 can be performed from one end side (the output end side of the two-axis integrated motor 1). Further, the adjustment of the first detection unit 240 can be performed from the other end side of the two-axis integrated motor 1. In this way, the two detection units can be adjusted individually. Further, since the bearing portion 260 is located on one end side and the backup bearing portion 300 is located on the other end side of the stator core portion 70, the influence of the moment load due to the extension of the axial length of the magnets 12, 112 and the stator core portion 70 is expanded. Can be suppressed. Therefore, it becomes easier to improve the output torque by extending the axial lengths of the magnets 12, 112 and the stator core portion 70.

Further, by preloading the bearings 262,263,266,267, the displacement of the inner shaft rotor 110 and the outer shaft rotor 10 due to the load from the outside can be further reduced. Further, the third bearing portion 302 can secure a margin for displacement of the positional relationship between the inner shaft rotor 10 and the inner shaft stator 20 due to expansion in the rotation axis direction due to heat. Similarly, the fourth bearing portion 305 can secure a margin for displacement of the positional relationship between the outer shaft rotor 110 and the outer shaft stator 120.

Further, since the inner shaft stator 120 has the coil 150 and the outer shaft stator 20 has the coil 50, the configuration of the rotating inner shaft rotor 110 and the outer shaft rotor 10 can be made simpler.

Further, the inner shaft rotor 110, the inner shaft stator 120, the outer shaft stator 20, and the outer shaft rotor 10 are arranged in this order from the rotating shaft P in the radial direction, and the inner shaft stator 120 and the outer shaft stator 20 are arranged in this order. Since the non-magnetic body 45 or the like is interposed at the adjacent position, the interference of the magnetic field generated in each of the inner shaft stator 120 and the outer shaft stator 20 by the non-magnetic body 45 or the like can be suppressed by the non-magnetic body 45 or the like. Therefore, the interference of the magnetic field can be further suppressed.

Further, the inner shaft stator 120 has an inner shaft motor core 130 provided with a coil 150, the outer shaft stator 20 has an outer shaft motor core 30 provided with a coil 50, and the non-magnetic material 45 and the like have an inner shaft motor core 30 and the like. It is located between the shaft motor core 130 and the outer shaft motor core 30. Therefore, since the non-magnetic material 45 or the like is interposed between the inner shaft motor core 130 provided with the coils 50 and 150 that generate the magnetic field and the outer shaft motor core 30, interference of the magnetic field can be suppressed more reliably.

Further, the inner shaft stator 120 has a cylindrical inner shaft stator back yoke 140 provided outside the inner shaft motor core 130, and the outer shaft stator 20 has a cylindrical shape provided inside the outer shaft motor core 30. The outer shaft stator back yoke 40 is provided, and the non-magnetic material 45 or the like is located between the inner shaft stator back yoke 140 and the outer shaft stator back yoke 40. Therefore, the shape of the non-magnetic material 45 or the like may be any shape as long as it fits between the cylindrical inner shaft stator back yoke 140 and the outer shaft stator back yoke 40. Therefore, the non-magnetic material 45 or the like can be provided more easily.

Further, the non-magnetic material 45 or the like is an arc-shaped member whose cross-sectional shape in the direction orthogonal to the rotation axis P is centered on the rotation axis P. Therefore, it becomes easy to accommodate the two-axis integrated motor 1 in a cylindrical shape centered on the rotating shaft P.

The non-magnetic material 45 and the like are non-magnetic alloys or resins. Therefore, the interference of the magnetic field can be more reliably suppressed by the non-magnetic material 45 or the like. Further, the non-magnetic material 45 or the like can be provided with a material that is relatively easy to obtain, and the interference of the magnetic field can be suppressed at a lower cost.

Further, since the second detection unit 250 is located on one end side of the bearing unit 260 and the stator core unit 70, that is, on the output shaft side of the inner shaft rotor 110 and the outer shaft rotor 10, the first detection unit 240 and the second detection unit 240 and the second detection unit 250 are located. The centering of the detection unit 250 and the gap adjustment of the rotation angle at which the inner shaft rotor 110 and the outer shaft rotor 10 are each detected as 0 degrees can be performed on the output shaft of the two-axis integrated motor 1. Therefore, it is possible to suppress the influence of physical shielding due to the arrangement of the bearing portion 260 and the stator core portion 70 when accessing the second detection unit 250 in the centering and gap adjustment performed on the output shaft side. It is possible to more easily secure the detection accuracy of the second detection unit 250 that detects the rotation angle of the rotor. Further, since the bearing portion 260 is located between the second detection portion 250 and the stator core portion 70, the second detection portion 250 and the stator core portion 70 can be separated from each other, and the magnetism from the stator core portion 70 with respect to the second detection portion 250 can be obtained. The impact can be further reduced.

Further, since the magnitude of the output torque of the electric motor is related to the magnitude of the distance from the rotating shaft P to the thrust generation position (between the magnet and the coil), the output torque of the outer shaft rotor 10 is relatively higher than that of the inner shaft rotor 110. Considering that it tends to be large, the magnet 112 and the inner shaft stator 120 provided on the inner shaft rotor 110 are made longer than the magnet 12 and the outer shaft stator 20 provided on the outer shaft rotor 10 in the axial length in the rotation axis direction. ing. Therefore, the thrust of the inner shaft rotor 110 can be made larger than the thrust of the outer shaft rotor 10, and the difference between the output torque of the outer shaft rotor 10 and the output torque of the inner shaft rotor 110 can be made smaller easily. ..

Further, the position of the first detection unit 240 in the rotation axis direction and the position of the second detection unit 250 in the rotation axis direction are the same. Therefore, the shaft length of the two-axis integrated motor 1 can be made more compact. Further, since one of the first detection unit 240 and the second detection unit 250 does not shield the other in the rotation axis direction, the detection accuracy of the second detection unit 250 that detects the rotation angles of the two rotors is ensured. It can be done more easily.

Further, the position of the end portion of the first bearing portion 261 on the one end side in the rotation axis direction and the position of the end portion of the second bearing portion 265 on the one end side in the rotation axis direction are the same. Therefore, the shaft length of the two-axis integrated motor 1 can be made more compact.

Further, the inner shaft rotor 110, the stator core portion 70, and the outer shaft rotor 10 are arranged in this order from the rotation shaft P toward the outside in the radial direction. Therefore, since the inner shaft stator 120 and the outer shaft stator 20 can be centrally arranged between the inner shaft rotor 110 and the outer shaft rotor 10, the diameter of the two-axis integrated motor 1 can be made more compact. can.

Further, the first rotating portion 241 and the first fixed portion 242, the second fixed portion 252, and the second rotating portion 251 are arranged in this order from the rotation shaft P toward the outside in the radial direction. Therefore, since the first fixed portion 242 and the second fixed portion 252 can be centrally arranged between the first rotating portion 241 and the second rotating portion 251, the diameter of the two-axis integrated motor 1 can be made more compact. Can be.

Further, a cover 291 that covers the first detection unit 240 and the second detection unit 250 is provided on one end side of the first detection unit 240 and the second detection unit 250. Therefore, the second detection unit 250 can be protected by providing the cover 291 after the centering and the gap adjustment are completed.

Further, by arranging the related electromagnetic steel sheets 60 in an annular shape with two teeth 61 possessed by one electromagnetic steel sheet 60, more teeth 61 are provided in one electromagnetic steel sheet layer, so that the shape of the teeth 61 can be further varied. Can be reduced. That is, since the number of integrally formed teeth 61 is two for each electrical steel sheet 60, the consistency of the shapes of all the teeth 61 can be obtained by ensuring the accuracy of the shapes of the two teeth 61. Accuracy can be ensured. Further, by arranging a plurality of electrical steel sheets 60 in an annular shape on one electrical steel sheet layer, even if one electrical steel sheet 60 has a magnetic directionality, one electrical steel sheet layer is one electrical steel sheet. It becomes difficult to be controlled by the magnetic directionality of the 60, and the variation in the magnetic characteristics of each tooth 61 can be further reduced. Further, since the electromagnetic steel sheet layer in which the electromagnetic steel sheet 60 having two teeth 61 is arranged in an annular shape is laminated in two different phases, sufficient rigidity is ensured by the three-dimensional structure by laminating the electromagnetic steel sheet layers having different phases. Can be done.

Further, in the two phases, the phase of the arrangement of the electromagnetic steel sheet 60 is shifted by 1 tooth 61 minutes. Therefore, the electromagnetic steel sheets 60 having the two teeth 61 are staggered at the positions where the electromagnetic steel sheet layers having different phases are laminated. Therefore, since the electromagnetic steel sheets 60 having different phases can be laminated to form an annularly continuous structure, sufficient rigidity can be ensured as an annular structure.

Further, the two teeth 61 of the electrical steel sheet 60 are discontinuous on the opposite side of the outer shaft rotor 10. Therefore, the coil 50 formed in advance can be fitted into the core on which the teeth 61 are laminated, and the coil 50 can be easily provided.

Further, the plurality of electrical steel sheets 60 in one electrical steel sheet layer are arranged with a gap. Therefore, the weight can be reduced as compared with the structure in which the electromagnetic steel sheet layer is completely continuous in an annular shape. Further, since the magnetic wraparound between the coils 50 can be reduced, the efficiency of the two-axis integrated motor 1 can be further improved.

Further, the number of each of the two phase electromagnetic steel sheet layers is equal. Therefore, it becomes easy to balance the strength and the magnetic characteristics of the entire outer shaft stator 20.

Further, the phases of the arrangement of the plurality of electrical steel sheets 60 between the magnetic steel sheet layers adjacent to each other in the rotation axis direction are different. Therefore, the electrical steel sheets 60 having the two teeth 61 are staggered at the positions where the two electrical steel sheet layers are laminated. Therefore, since the electrical steel sheets 60 having different phases can be laminated to form an annularly continuous structure, it is possible to more reliably secure sufficient rigidity as an annular structure.

Further, in the base portion 62 in which the two teeth 61 are physically continuous in one electromagnetic steel sheet 60, the portion corresponding to the intermediate point between the two teeth 61 is thinner than the other portions. Therefore, it is possible to reduce the magnetic wraparound between the coils 50 adjacent to each other in the annular direction, and the efficiency of the two-axis integrated motor 1 can be made higher.

Further, the outer shaft stator 20 has a cylindrical yoke provided on the opposite side of the outer shaft rotor 10 with respect to the teeth 61, and the yoke is integrated in the rotation axis direction. Therefore, since the outer shaft stator 20 is supported by the yoke that is integral with the stacking direction of the electrical steel sheet layer, sufficient rigidity can be more reliably ensured.

The second detection unit 250 in the above embodiment is a magnetic encoder, but this is an example and is not limited to this. The second detection unit 250 may be, for example, an optical encoder or the like.

The two-axis integrated motor according to the first embodiment may be used as an actuator of various industrial machines such as a small component transfer device, an electronic component inspection device, and a semiconductor inspection device, but is not limited thereto.

(Embodiment 2)
FIG. 14 is a partial cross-sectional view of the actuator 301 of the second embodiment. The cross section of FIG. 14 is a cross section formed by a plane including the rotation axis P, but the internal configuration of the nut 351 described later is omitted. In the cross section of FIG. 14, in order to show the position of the fixing member, a partial cross section is shown so that another cross section can be seen as appropriate. FIG. 15 is a cross-sectional view of a main part (two-axis integrated motor 1) shown in FIG. FIG. 16 is a cross-sectional view of a main part showing a main part (housing for a spline outer cylinder described later) in FIG. FIG. 17 is a diagram showing a state in which the screw portion is raised.

The actuator 301 shown in FIG. 14 is used, for example, as a pick-and-place device. The actuator 301 has an arm portion 380 for transferring the work, a biaxial integrated motor 1 for driving the arm portion 380, and a ball screw 350 and a ball spline 360 connected to the biaxial integrated motor 1. Hereinafter, the direction parallel to the Z axis, the direction from the two-axis integrated motor 1 toward the arm portion 380 will be described as upward, and the direction from the arm portion 380 toward the two-axis integrated motor 1 will be described as downward.

The arm portion 380 is, for example, a cantilevered arm having only a single arm. The actuator 301 is fixed to, for example, a support base (not shown) with the rotation axis P of the arm portion 380 facing in the Z direction. As shown in FIG. 14, the actuator 301 moves the arm portion 380 in the Z direction (linear motion direction) to move the arm portion 380 up and down in the Z direction, and moves the arm portion 380 in an arbitrary plane orthogonal to the Z direction. , Rotate or rotate the rotation axis P in the axial direction to transfer the work to a desired position.

The actuator 301 has a connecting bracket 323,324 connected to a nut 351 described later. The inner shaft rotor yoke 111 is provided in a cylindrical shape around the rotating shaft P. The inner shaft rotor yoke 111 can also be said to be a cylindrical output shaft on the inner diameter side. The inner diameter of the inner shaft rotor 110 is smaller than the outer diameter of the nut 351 and the spline outer cylinder 361 described later.

The connecting bracket 323 is formed in a cylindrical shape and is arranged on the inner peripheral side of the inner shaft rotor yoke 111. In the second embodiment, the connecting bracket 323 is fixed to the upper end of the inner shaft rotor yoke 111 and extends downward along the inner circumference of the inner shaft rotor yoke 111. The connecting bracket 324 is fixed to the lower end of the connecting bracket 323 and extends downward from the connecting bracket 323. Therefore, between the inner shaft rotor yoke 111 and the nut 351 described later, the connecting brackets 323 and 324 are connected so as to be folded back inward and downward from the upper end of the inner shaft rotor yoke 111.

The ball screw 350 has a nut 351 and a screw shaft (first portion) 352, and a rolling element (not shown). The nut 351 is arranged below the inner shaft rotor yoke 111. That is, the nut 351 is arranged on the lower outer side in the rotation axis direction with respect to the inner shaft rotor 110. The nut 351 is arranged coaxially with the inner shaft rotor 110 and rotates with the rotation of the inner shaft rotor 110. The nut 351 has a flange portion 351a. The flange portion 351a is fixed to the connecting bracket 324 by the fixing member 351b. The nut 351 is connected to the inner shaft rotor yoke 111 via the connecting bracket 324 and the connecting bracket 323. For example, the inner shaft rotor yoke 111 and the connecting bracket 323 are fixed by a fixing member 326. Further, the connecting bracket 323 and the connecting bracket 324 are fixed by a fixing member 327. As the fixing members 326 and 27, for example, bolts and the like are used. The nut 351 is provided integrally with the inner shaft rotor yoke 111 by the connecting brackets 323 and 324. Therefore, when the inner shaft rotor 110 rotates, the nut 351 rotates integrally with the inner shaft rotor 110 in the axial direction of the rotating shaft P.

The screw shaft 352 projects downward from the inner shaft rotor 110. The screw shaft 352 is inserted on the inner diameter side of the nut 351. The screw shaft 352 is screwed with the nut 351. When the nut 351 rotates, the screw shaft 352 moves in the axial direction (Z direction) according to the rotation. A rolling element is arranged inside the nut 351.

The ball screw 350 is provided with a negatively actuated electromagnetic brake 353. The negatively actuated electromagnetic brake 353 has a field 353a, a side plate 353b, an armature 353c, a brake disc 353d, and an electromagnetic coil 353e. A coil spring (not shown) is arranged in the field 353a. The coil spring presses the armature 353c toward the brake disc 353d. When the electromagnetic coil 353e is energized, the armature 353b is attracted to the field 353a side by a force stronger than the elastic force of the coil spring, and the brake disc 353d is released. Further, when the electromagnetic coil 353e is not energized, the attractive force of the electromagnetic coil 353e does not act, so that the armature 353c is rapidly pressed toward the brake disc 353d by the elastic force of the coil spring. The brake disc 353d is connected to the lower end 324a of the connecting bracket 324 and is connected to the nut 351 via the connecting bracket 324. When the brake disc 353d is released, the nut 351 can rotate. Further, when the armature 353c is pressed against the brake disc 353d, the rotation of the brake disc 353d is restricted, which regulates the rotation of the nut 351. Therefore, when the electromagnetic coil 353e is not energized, the screw shaft 352 is suppressed from falling. The configuration of the negatively actuated electromagnetic brake 353 is not limited to the above configuration, and may be another configuration.

A stopper 354 is attached to the lower end of the screw shaft 352. The stopper 354 regulates the rise of the screw shaft 352.

The ball spline 360 has a spline outer cylinder 361, a shaft (second portion) 362, and a rolling element (not shown). The spline outer cylinder 361 is arranged above the outer shaft rotor yoke 11. That is, the spline outer cylinder 361 is arranged on the outer side above the rotation axis direction with respect to the inner shaft rotor 110. The spline outer cylinder 361 is arranged coaxially with the outer shaft rotor 10 and rotates with the rotation of the outer shaft rotor 10. The spline outer cylinder 361 is connected to the outer shaft rotor yoke 11 via the connecting bracket 333. For example, the outer shaft rotor yoke 11 and the connecting bracket 333 are fixed by a fixing member 36. As the fixing member 36, for example, a bolt or the like is used. The spline outer cylinder 361 is provided integrally with the outer shaft rotor yoke 11 by the connecting bracket 333. Therefore, when the outer shaft rotor 10 rotates, the spline outer cylinder 361 rotates integrally with the outer shaft rotor 10 in the axial direction of the rotating shaft P.

A connecting bracket 334 is arranged at the upper end of the spline outer cylinder 361. The connecting bracket 334 is fixed to the connecting bracket 333 by a fixing member 337. As the fixing member 337, for example, a bolt or the like is used.

The shaft 362 projects upward from the inner shaft rotor 110. The shaft 362 is inserted on the inner diameter side of the spline outer cylinder 361. The lower end side of the shaft 362 is integrally connected to the screw shaft 352 via the connecting portion 356. In the second embodiment, the screw shaft 352 and the shaft 362 are press-fitted at the connecting portion 356 and integrally form the shaft member SF. The connecting portion 356 is provided with a hole portion 356a that allows air to escape when the screw shaft 352 and the shaft 362 are press-fitted. The shaft 362 is provided with a plurality of groove portions 362a parallel to the rotation axis direction side by side in the circumferential direction. The shaft 362 has a reduced diameter portion 362b at the upper end. The reduced diameter portion 362b is fixed to the arm mounting member 370 described later.

Further, on the inner peripheral surface of the spline outer cylinder 361, a plurality of protruding portions corresponding to the groove portions 362a of the shaft 362 are provided side by side in the circumferential direction. By inserting the protruding portion of the spline outer cylinder 361 into the groove portion 362a of the shaft 362, the relative movement of the spline outer cylinder 361 and the shaft 362 in the axial direction of the rotating shaft P is restricted, and the spline in the rotating shaft direction is restricted. Relative movement between the outer cylinder 361 and the shaft 362 is allowed. Therefore, when the spline outer cylinder 361 rotates, the shaft 362 moves in the axial direction (Z direction) according to the rotation. Further, when the screw shaft 352 moves in the rotation axis direction due to the rotation of the nut 351 without rotating the spline outer cylinder 361, the shaft 362 moves in the rotation axis direction together with the screw shaft 352. A rolling element is arranged inside the spline outer cylinder 361.

The housing 340 has a motor housing 341, a nut housing 342, and a spline outer cylinder housing 343. The motor housing 341 is formed in a cylindrical shape, for example, and accommodates the two-axis integrated motor 1.

The nut housing 342 has a flange portion 342a and a tubular portion 342b. The flange portion 342a is formed in an annular shape and is fixed to the lower end of the motor housing 341 by the fixing member 44. A fixing member 45 for fixing the stator core fixing housing 17 is attached to the flange portion 342a. The fixing member 45 fixes the stator core 11 to the housing 340. The tubular portion 342b extends downward from the inner circumference of the flange portion 342a. The tubular portion 342b accommodates the nut 351 of the ball screw 350. A negatively actuated electromagnetic brake 353 is fixed to the lower end of the tubular portion 342b.

Further, the nut housing 342 holds the fifth bearing portion 328 between the nut housing 342 and the connecting bracket 324. The fifth bearing portion 328 has one or more rolling bearings. The fifth bearing portion 328 rotatably supports the nut 351. The fifth bearing portion 328 is, for example, a rolling bearing. The fifth bearing portion 328 is supported by the flange portion 342a via a wave washer 329a and a holding member 329b. The fifth bearing portion 328 is pressed against the tubular portion 342b by the wave washer 329a and the pressing member 329. For example, when the object is supported by the arm portion 380 and the center of gravity of the load of the arm portion 380 and the object does not match the rotation axis P, or when the rotation moment of the arm portion 380 and the object is received, the shaft member SF is the rotation axis P. There is a possibility of receiving a force in the direction of tilting. On the other hand, since the fifth bearing portion 328 is radially supported by the nut housing 342 and the fixing base ST via the wave washer 329a and the holding member 329b, the nut 351 in the direction orthogonal to the rotation axis direction. Displacement or vibration is suppressed.

The spline outer cylinder housing 343 has a flange portion 343a, a first tubular portion 343b, and a second tubular portion 343c. The flange portion 343a is formed in an annular shape and is fixed to the upper end of the motor housing 341 by a fixing member 346. Further, the flange portion 343a is fixed to the fixing base ST by the fixing member 347. By fixing the flange portion 343a to the fixed base ST, the actuator 301 is fixed to the fixed base ST.

The first tubular portion 343b is formed in a cylindrical shape and extends upward from the inner circumference of the flange portion 343a. The first tubular portion 343b accommodates the spline outer cylinder 361 of the ball spline 360. The first cylindrical portion 343b is connected to the second tubular portion 343c via the first step portion 343d and the second step portion 343e.

The first cylindrical portion 343b holds the sixth bearing portion 338 with the connecting bracket 334 in the first step portion 343d. The sixth bearing portion 338 has one or more rolling bearings. The sixth bearing portion 338 rotatably supports the spline outer cylinder 361. The sixth bearing portion 338 is, for example, a rolling bearing. The sixth bearing portion 338 is supported by the second stage portion 343e via a wave washer 339a and a holding member 339b. The sixth bearing portion 338 is pressed against the connecting bracket 334 by the wave washer 339a and the pressing member 339b. Further, the sixth bearing portion 338 is radially supported by the spline outer cylinder housing 343 and the fixed base ST (see FIG. 14). For example, when the object is supported by the arm portion 380 and the center of gravity of the load of the arm portion 380 and the object does not match the rotation axis P, or when the rotation moment of the arm portion 380 and the object is received, the shaft member SF is the rotation axis P. There is a possibility of receiving a force in the direction of tilting. On the other hand, since the sixth bearing portion 338 is radially supported by the spline outer cylinder housing 343 and the fixed base ST via the wave washer 339a and the holding member 339b, the sixth bearing portion 338 is supported in the radial direction in the direction orthogonal to the rotation axis direction. The displacement or vibration of the spline outer cylinder 361 is suppressed.

The second stage portion 343e is provided with an air supply portion 343f. The air supply unit 343f can be attached with an air joint for air purging. The air supply unit 343f communicates between the outside and the space formed between the second cylindrical portion 343c and the shaft 362. The air supply unit 343f is provided with a bolt for closing 343 g. The bolt 343g is detachably attached to the air supply unit 343f. The bolt 343g is closed so that foreign matter such as dust does not enter the air supply unit 343f.

The second tubular portion 343c is formed in a cylindrical shape and extends upward from the upper end of the first tubular portion 343b. The diameter of the second tubular portion 343c is smaller than that of the first tubular portion 343b. The second cylindrical portion 343c is arranged so as to cover a part of the outer peripheral surface of the shaft 362. For example, as shown in FIG. 14, the dimensions of the second tubular portion 343c in the rotation axis direction are such that the upper end of the second tubular portion 343c and the shaft member SF are arranged in the state where the shaft member SF is arranged at the lowermost end. It is set so that the upper end (the upper end of the shaft 362) is flush with the upper end.

The arm mounting member 370 is connected to the tip (upper end) of the shaft 362. The arm mounting member 370 has a connecting portion 371, a cylindrical portion 372, and a lid portion 373. The connecting portion 371 is connected to the reduced diameter portion 362b of the shaft 362. The connecting portion 371 has a penetrating portion 371a for penetrating the reduced diameter portion 362b, a recessed portion 371b for inserting the connecting member 374, an arm mounting surface 371c for mounting the arm 380, and a lid mounting surface 371d for mounting the lid portion 373. Have.

The penetrating portion 371a is formed corresponding to the shape of the reduced diameter portion 362b. The depressed portion 371b forms a space between the depressed portion 371b and the reduced diameter portion 362b in a state where the reduced diameter portion 362b is inserted into the penetrating portion 371a. A connecting member 374 is arranged in this space. The connecting member 374 has a concave member 374a and a convex member 374b formed with opposing tapered surfaces of equal inclination. The concave member 374a is formed in an annular shape and is arranged in contact with the inner circumference of the recessed portion 371b. The convex member 374b is formed in an annular shape and is inserted inside the recessed portion 371b. The inner circumference of the convex member 374b is arranged in contact with the outer circumference of the reduced diameter portion 362b. In the connecting member 374, the convex member 374b is press-fitted into the concave member 374a by the fixing member 75 and fixed. As a result, between the inner circumference of the depressed portion 371b and the outer circumference of the concave member 374a, between the tapered surface of the concave member 374a and the tapered surface of the convex member 374b, and the inner circumference and the reduced diameter portion of the convex member 374b. The space between the outer circumference and the outer circumference of 362b is in a state of being pressed against each other. Therefore, a frictional force is generated between the depressed portion 371b, the concave member 374a, the convex member 374b, and the reduced diameter portion 362b, respectively. Due to this frictional force, the arm mounting member 370 is integrally connected to the reduced diameter portion 362b.

The arm 380 is attached to the arm mounting surface 371c. The arm mounting surface 371c is provided with an insertion hole 371e for inserting a fixing member (not shown) for fixing the arm 380. The lid portion 373, which will be described later, is attached to the lid portion mounting surface 371d.

The tubular portion 372 is formed in a cylindrical shape and is provided in a state of extending from the connecting portion 371 toward the spline outer cylinder 361 side (downward). The tubular portion 372 is arranged outside the second tubular portion 343c of the spline outer cylinder housing 343 and accommodates the tip end (upper end) of the second tubular portion 343c. The tubular portion 372 has a stepped portion 372a at the lower end portion. The step portion 372a has a configuration in which the lower end of the inner peripheral surface is enlarged in diameter. A seal portion 377 is arranged on the step portion 372a. The sealing portion 377 seals a gap formed between the tubular portion 372 and the second tubular portion 343c of the spline outer cylinder housing 343. Examples of the seal portion 377 include a structure in which a U-shaped or U-shaped member is formed in a ring shape in a cross-sectional view. The seal portion 377 is formed using, for example, an elastically deformable material. The seal portion 377 is arranged in a state of being elastically deformed by being abutted between the inner peripheral surface of the step portion 372a and the outer peripheral surface of the second tubular portion 343c. The seal portion 377 keeps the shaft 362 protected from the outside. A protrusion protruding inward is formed at the lower end of the step portion 372a. This protrusion suppresses the fall of the seal portion 377. Further, when the power is cut off, the rotation of the shaft 362 (shaft member SF) is suppressed by the seal resistance of the seal portion 377.

Further, as shown in FIGS. 14 and 16, a cylindrical gap is formed between the tubular portion 372 and the second tubular portion 343c. Due to this gap, a labyrinth structure is formed between the shaft 362 and the outside, so that dustproofness and waterproofness are enhanced.

The lid portion 373 is attached to the lid portion mounting surface 371d of the connecting portion 371 by a fixing member 376 such as a bolt. The lid portion 373 protects the reduced diameter portion 362b of the shaft 362 from the external environment.

When the arm 380 is moved in the rotation axis direction (Z direction) in the actuator 301, the controller 420 moves the inner shaft rotor 110 to one or the other of the rotation axis P without rotating the outer shaft rotor 10. Rotate. In this case, the nut 351 of the ball screw 350 rotates integrally with the rotation of the inner shaft rotor 110. Due to the rotation of the nut 351 the nut 351 and the screw shaft 352 rotate relatively in the axial direction of the rotation shaft P, so that the screw shaft 352 moves in the Z direction. By moving the screw shaft 352, the shaft 362 integrally connected to the screw shaft 352, that is, the shaft member SF moves in the Z direction. Due to the movement of the shaft member SF, the arm mounting member 370 and the arm 380 connected to the upper end of the shaft 362 move in the Z direction. When the shaft member SF is moved upward, as shown in FIG. 17, the stopper 354 at the lower end of the screw shaft 352 abuts on the lower end of the connecting bracket 324, and the upward movement of the shaft member SF is restricted. Further, when the shaft member SF is moved downward, as shown in FIGS. 14 and 16, the connecting portion 371 abuts on the upper end of the second tubular portion 343c of the spline outer cylinder bracket 343, and is below the shaft member SF. Movement to is restricted.

In the actuator 301, when the arm 380 is moved in the direction around the axis of the rotation axis P, the controller 420 rotates the inner shaft rotor 110 and the outer shaft rotor 10 in synchronization with each other. In this case, the nut 351 of the ball screw 350 rotates integrally with the rotation of the inner shaft rotor 110. Further, as the outer shaft rotor 10 rotates, the spline outer cylinder 361 of the ball spline 360 rotates integrally. Due to the rotation of the spline outer cylinder 361, the shaft 362 rotates integrally with the spline outer cylinder 361. The rotation of the shaft 362 causes the screw shaft 362 connected to the shaft 362, that is, the shaft member SF to rotate. Therefore, in the ball screw 350, the nut 351 and the screw shaft 352 do not rotate relatively, and the screw shaft 352 of the ball screw 350 does not move in the Z direction with respect to the nut 351. That is, the shaft member SF rotates in the axial direction of the rotating shaft P without moving in the Z direction. Due to the rotation of the shaft member SF, the arm mounting member 370 and the arm 380 rotate in the axial direction of the rotation shaft P.

The actuator 301 of the second embodiment described above includes a housing 340, an inner shaft rotor 110, an outer shaft rotor 10, a shaft member SF (screw shaft 352 and a shaft 362), a nut 351 and a spline outer cylinder 361. To prepare for. The inner shaft rotor 110 is rotatable with respect to the housing 340. The outer shaft rotor 10 is arranged radially outside the inner shaft rotor 110 and is rotatable with respect to the housing 340. The shaft member SF is arranged so as to pass through the inner shaft rotor 110 in the rotation axis direction of the inner shaft rotor 110, has a screw shaft 352 protruding from the inner shaft rotor 110 in one direction in the rotation axis direction, and has a screw shaft 352 from the inner shaft rotor 110. The shaft 362 projecting to the other side in the rotation axis direction has a groove portion 362a along the rotation axis direction. The nut 351 is arranged outside the lower side in the rotation axis direction with respect to the inner shaft rotor 110, is screwed into the screw shaft 352, and rotates together with the inner shaft rotor 110 to move the shaft member SF in the rotation axis direction. The spline outer cylinder 361 is arranged on the outer side above the inner shaft rotor 110 in the rotation axis direction, guides the shaft member SF in the rotation axis direction along the groove portion 362a, and rotates together with the outer shaft rotor 10 to rotate the shaft. The member SF is rotated in the axial direction of the rotating shaft P of the outer shaft rotor 10.

According to this configuration, since the nut 351 and the spline outer cylinder 361 are arranged outside the inner shaft rotor 110 in the rotation axis direction, the inner shaft rotor 110 and the outer shaft rotor 10 can be miniaturized in the radial direction. can. This makes it possible to reduce the footprint. Further, the spline outer cylinder 361 makes it possible to suppress the rotation of the shaft member SF when rotating the outer shaft rotor 10.

In the actuator 301 of the second embodiment, the inner diameter of the inner shaft rotor 110 is smaller than the outer diameter of the nut 351 and the spline outer cylinder 361. According to this configuration, the inner shaft rotor 110 and the outer shaft rotor 10 can be miniaturized in the radial direction.

The actuator 301 of the second embodiment is further provided with an arm mounting member 370 which is connected to the tip of the shaft 362 and mounts the arm 380. According to this configuration, the transport device can be configured by attaching the arm 380 to the arm attachment member 370.

In the actuator 301 of the second embodiment, the housing 340 has a spline outer cylinder housing 343 that accommodates the spline outer cylinder 361 and covers a part of the shaft 362, and the arm mounting member 370 extends toward the spline outer cylinder 361 side. It has a tubular portion 372 that accommodates the tip of the spline outer cylinder housing 343 in the direction of the rotation axis, and the tubular portion 372 has a gap 72b that seals the shaft 362 with the spline outer cylinder housing 343. According to this configuration, the sealing property from the external environment can be ensured.

In the actuator 301 of the second embodiment, the nut 351 is supported by the housing 340 via the fifth bearing portion 328, and the spline outer cylinder 361 is supported by the housing 340 via the sixth bearing portion 338. According to this configuration, the displacement of the nut 351 and the spline outer cylinder 361 can be suppressed.

The actuator 301 of the second embodiment further includes a negatively actuated electromagnetic brake 353 connected to the nut 351. According to this configuration, it is possible to suppress the fall of the shaft member SF.

Further, the actuator 301 of the second embodiment includes a housing 340, an inner shaft rotor 110, an outer shaft rotor 10, a shaft member SF (screw shaft 352 and a shaft 362), a nut 351 and a spline outer cylinder 361. Be prepared. The inner shaft rotor 110 is rotatable with respect to the housing 340. The outer shaft rotor 10 is arranged radially outside the inner shaft rotor 110 and is rotatable with respect to the housing 340. The shaft member SF is arranged so as to pass through the inner shaft rotor 110 in the rotation axis direction of the inner shaft rotor 110, has a screw shaft 51 protruding from the inner shaft rotor 110 in one direction in the rotation axis direction, and has a screw shaft 51 protruding from the inner shaft rotor 110. The shaft 362 projecting to the other side in the rotation axis direction has a groove portion 362a along the rotation axis direction. The nut 351 is screwed onto the screw shaft 352 and rotates together with the inner shaft rotor 110 to move the shaft member SF in the rotation axis direction. The spline outer cylinder 361 guides the shaft member SF in the rotation axis direction along the groove portion 362a, and rotates together with the outer shaft rotor 10 to rotate the shaft member SF in the axial direction of the rotation shaft P of the outer shaft rotor 10. ..

According to this configuration, the spline outer cylinder 361 makes it possible to suppress the rotation of the shaft member SF when rotating the outer shaft rotor 10.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited to those described in the above embodiments. For example, in the above embodiment, the nut 351 of the ball screw 350 is connected to the inner inner shaft rotor 110, and the spline outer cylinder 361 of the ball spline 360 is connected to the outer outer shaft rotor 10. Not limited. For example, the spline outer cylinder 361 of the ball spline 360 may be connected to the inner inner shaft rotor 110, and the nut 351 of the ball screw 350 may be connected to the outer outer shaft rotor 10.

Further, in the above embodiment, the ball spline 360 is arranged on the upper side and the ball screw 350 is arranged on the lower side with respect to the two-axis integrated motor 1, but the present invention is not limited to this. For example, the ball screw 350 may be arranged on the upper side and the ball spline 360 may be arranged on the lower side with respect to the two-axis integrated motor 1.

1 Two-axis integrated motor 10 Outer shaft rotor 11 Outer shaft rotor yoke 11a, 111a Output end 12, 112 Magnet 20 Outer shaft stator 30 Outer shaft motor core 40 Outer shaft stator Back yoke 45, 45a Non-magnetic material 45b, 45c Non-magnetic member 50, 150 Coil 70 Stator core 110 Inner shaft rotor 111 Inner shaft rotor yoke 120 Inner shaft stator 130 Inner shaft motor core 140 Inner shaft stator back yoke 240 1st detection section 250 2nd detection section 261 1st bearing section 265 2nd bearing section 302 3rd bearing part 305 4th bearing part 301 Actuary 328 5th bearing part 338 6th bearing part 340 Housing 341 Motor housing 342 Nut housing 342a, 343a Flange part 342b, 372 Cylindrical part 343 Spline outer cylinder housing 343b 1 Cylindrical part 343c 2nd tubular part 350 Ball screw 351 Nut 352 Screw shaft 353 Negative actuated electromagnetic brake 354 Stopper 356,371 Connecting part 360 Ball spline 361 Spline outer cylinder 362 Shaft 362a Groove 362b Reduced diameter part 370 Arm mounting member 372a Step 372b Gap 374 Connecting member 374a Concave member 374b Convex member 380 Arm, arm P Rotating shaft SF Shaft member ST fixing base

Claims (16)

Each has an inner shaft rotor and an outer shaft rotor that are rotatably provided and have the same rotation axis direction, and the output shaft of the inner shaft rotor and the output shaft of the outer shaft rotor are located on one end side in the rotation axis direction. It is a two-axis integrated motor
The inner shaft stator, which is the stator core of the inner shaft rotor,
The outer shaft stator, which is the stator core of the outer shaft rotor,
A first bearing portion that is arranged on one end side of the inner shaft stator and rotates in conjunction with the inner shaft rotor.
A second bearing portion that is arranged on one end side of the outer shaft stator and rotates in conjunction with the outer shaft rotor.
A third bearing portion that is arranged on the opposite side of the first bearing portion with respect to the inner shaft stator and rotates in conjunction with the inner shaft rotor.
A fourth bearing portion that is arranged on the opposite side of the second bearing portion with respect to the outer shaft stator and rotates in conjunction with the outer shaft rotor.
A first detection unit that detects the rotation angle of the inner shaft rotor, and
A second detection unit for detecting the rotation angle of the outer shaft rotor is provided.
The first bearing portion, the inner shaft stator, the third bearing portion, and the first detection portion are arranged on the outer peripheral side of the inner shaft rotor in order from the one end side.
The second detection portion, the second bearing portion, the outer shaft stator, and the fourth bearing portion are arranged on the inner peripheral side of the outer shaft rotor in order from the one end side .
The first bearing portion and the second bearing portion have preloaded bearings.
The third bearing portion and the fourth bearing portion are two-axis integrated motors having bearings that are not preloaded. The first bearing portion is interposed between the first extending portion extending to one end side from the stator back yoke provided inside the outer shaft stator and the inner shaft rotor.
The second bearing portion is interposed between the first extension portion and the outer shaft rotor.
The third bearing portion is interposed between the annular fitting portion fitted inside the second extension portion extending from the stator back yoke to the other end side and the inner shaft rotor.
The fourth bearing portion is interposed between the first extension portion and the outer shaft rotor.
The two-axis integrated motor according to claim 1. The inner shaft rotor and the outer shaft rotor have a rotor yoke and a magnet.
The two-axis integrated motor according to claim 1 or 2, wherein the inner shaft stator and the outer shaft stator have a coil. The inner shaft rotor, the inner shaft stator, the outer shaft stator, and the outer shaft rotor are arranged in this order from the rotating shaft in the radial direction.
A claim comprising a non-magnetic material provided between the inner shaft stator and the outer shaft stator and interposed at an adjacent position between the inner shaft stator and the outer shaft stator along the circumferential direction around the rotation axis. Item 2. The two-axis integrated motor according to any one of Items 1 to 3. The inner shaft stator has inner shaft motor core coils are provided,
The outer shaft stator has an outer shaft motor core coils are provided,
The two-axis integrated motor according to claim 4, wherein the non-magnetic material is located between the inner shaft motor core and the outer shaft motor core. The inner shaft stator has a cylindrical inner shaft stator back yoke provided on the outside of the inner shaft motor core.
The outer shaft stator has a cylindrical outer shaft stator back yoke provided inside the outer shaft motor core.
The two-axis integrated motor according to claim 5, wherein the non-magnetic material is located between the inner shaft stator back yoke and the outer shaft stator back yoke. The two-axis integrated motor according to any one of claims 4 to 6, wherein the non-magnetic material is an arc-shaped member whose cross-sectional shape in a direction orthogonal to the rotation axis is an arc shape centering on the rotation axis. The two-axis integrated motor according to any one of claims 4 to 7, wherein the non-magnetic material is a non-magnetic alloy or resin. The magnet provided in the inner shaft rotor and the inner shaft stator are any one of claims 1 to 8 in which the axial length in the rotation axis direction is longer than that of the magnet provided in the outer shaft rotor and the outer shaft stator. Two-axis integrated motor described in. The two-axis integrated motor according to any one of claims 1 to 8.
A housing containing the two-axis integrated motor and
It is arranged so as to pass through the inner shaft rotor in the rotation axis direction, has a screw portion in a first portion protruding from the inner shaft rotor in one direction in the rotation axis direction, and has a screw portion in the rotation axis direction from the inner shaft rotor. A shaft member having a groove portion along the rotation axis direction in the second portion protruding to the other side,
A nut that is arranged outside the one in the rotation axis direction with respect to the inner shaft rotor, is screwed into the screw portion, and rotates together with the inner shaft rotor to move the shaft member in the rotation axis direction.
The shaft member is arranged outside the other side in the rotation axis direction with respect to the inner shaft rotor, guides the shaft member in the rotation axis direction along the groove portion, and rotates with the outer shaft rotor to rotate the shaft member. An actuator equipped with a spline outer cylinder that rotates in the axial direction. The actuator according to claim 10, wherein the inner diameter of the inner shaft rotor is smaller than the outer diameter of the nut and the spline outer cylinder. The actuator according to claim 10 or 11, further comprising an arm mounting member that is connected to the tip of the second portion and mounts an arm. The housing has a spline outer cylinder housing which accommodates a ball Lumpur spline cover a portion of the second portion,
The arm mounting member has a tubular portion that extends toward the ball spline and accommodates the tip of the spline outer cylinder housing in the direction of the rotation axis.
The actuator according to claim 12, wherein the tubular portion has a gap between the tubular portion and the housing for the spline outer cylinder. The nut is supported by the housing via a fifth bearing portion.
The actuator according to any one of claims 10 to 13, wherein the spline outer cylinder is supported by the housing via a sixth bearing portion. The actuator according to any one of claims 10 to 14, further comprising a negatively actuated electromagnetic brake connected to the nut. The two-axis integrated motor according to any one of claims 1 to 8.
A housing containing the two-axis integrated motor and
It is arranged so as to pass through the inner shaft rotor in the rotation axis direction, has a screw portion in a first portion protruding from the inner shaft rotor in one direction in the rotation axis direction, and has a screw portion in the rotation axis direction from the inner shaft rotor. A shaft member having a groove portion along the rotation axis direction in the second portion protruding to the other side,
A nut that is screwed into the threaded portion and rotates together with the inner shaft rotor to move the shaft member in the direction of the rotation axis.
An actuator including a spline outer cylinder that guides the shaft member in the rotation axis direction along the groove portion and rotates together with the outer shaft rotor to rotate the shaft member in the axial direction.

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