JP6970702B2 - Method for manufacturing ferroelectric ceramics - Google Patents
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- 239000000919 ceramic Substances 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 title description 12
- 239000011162 core material Substances 0.000 claims description 44
- 239000011257 shell material Substances 0.000 claims description 39
- 239000011258 core-shell material Substances 0.000 claims description 31
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 27
- 229910052721 tungsten Inorganic materials 0.000 claims description 27
- 239000010937 tungsten Substances 0.000 claims description 27
- 238000010304 firing Methods 0.000 description 23
- 229910000906 Bronze Inorganic materials 0.000 description 21
- 239000010974 bronze Substances 0.000 description 21
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 21
- 239000000203 mixture Substances 0.000 description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
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- 239000002245 particle Substances 0.000 description 10
- 101100454129 Caenorhabditis elegans ksr-2 gene Proteins 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 6
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- 238000009792 diffusion process Methods 0.000 description 6
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- 238000010586 diagram Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 235000021438 curry Nutrition 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
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- 239000002994 raw material Substances 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 3
- 229910002113 barium titanate Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 150000003482 tantalum compounds Chemical class 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 244000291564 Allium cepa Species 0.000 description 1
- 235000002732 Allium cepa var. cepa Nutrition 0.000 description 1
- 235000001537 Ribes X gardonianum Nutrition 0.000 description 1
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- 241000220317 Rosa Species 0.000 description 1
- KWVFUTDPKIKVQW-UHFFFAOYSA-N [Sr].[Na] Chemical compound [Sr].[Na] KWVFUTDPKIKVQW-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical group [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
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- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 1
- LJTHRDIGXSIYMM-UHFFFAOYSA-N propan-1-olate tantalum(5+) Chemical compound [Ta+5].CCC[O-].CCC[O-].CCC[O-].CCC[O-].CCC[O-] LJTHRDIGXSIYMM-UHFFFAOYSA-N 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
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Description
本発明は、例えば車載用や航空宇宙用等、過酷な環境下での利用を想定したキャパシタに用いられる強誘電体セラミックスの作製方法に関するものである。 The present invention relates to a method for manufacturing a ferroelectric ceramic used for a capacitor which is supposed to be used in a harsh environment such as an in-vehicle use or an aerospace use.
従来、この種の強誘電体セラミックスとして、図7、図8の如く、コア材にシェル材を添加し焼成してなるコアシェル構造の強誘電体セラミックスにおいて、上記コア材としてBaTiO3(チタン酸バリウム)、上記シェル材としてたとえばZrO2(二酸化ジルコニウム)がそれぞれ用いられ、このBaTiO3粉末に少量のZrO2を添加して焼成することにより作製されたものが知られている(非特許文献1)。 Conventionally, as this kind of strong dielectric ceramics, as shown in FIGS. 7 and 8, in a strong dielectric ceramic having a core-shell structure in which a shell material is added to a core material and fired, BaTIO 3 (barium titanate) is used as the core material. ), For example, ZrO 2 (zirconium dioxide) is used as the shell material, and those produced by adding a small amount of ZrO 2 to this BaTiO 3 powder and firing it are known (Non-Patent Document 1). ..
すなわち、BaTiO3粉末に少量の上記ZrO2を添加して焼成することによりジルコニウム成分がBaTiO3の周囲から拡散し、BaTi1−xZrxO3で与えられる相がBaTiO3粒子の周囲に形成され、図7の如く、BaTiO3粒子をコアとし、BaTi1−xZrxO3をシェルとするコアシェル構造の強誘電体セラミックスGが作製されることになる。 That is, by adding a small amount of the above ZrO 2 to the BaTiO 3 powder and firing it, the zirconium component diffuses from the periphery of the BaTiO 3 , and the phase given by BaTi 1-x Zr x O 3 is formed around the BaTiO 3 particles. Then, as shown in FIG. 7, a ferroelectric ceramic G having a core-shell structure having BaTiO 3 particles as a core and BaTi 1-x Zr x O 3 as a shell is produced.
ここに、上記強誘電体セラミックスの化学組成は、表面に近づくほど、BaTi1−xZrxO3中の変数xが高く、すなわち、Zr成分濃度が高く、中心に近づくほど純粋なBaTiO3に近くなる状態となる。 Here, in the chemical composition of the ferroelectric ceramics, the closer to the surface, the higher the variable x in BaTi 1-x Zr x O 3 , that is, the higher the concentration of the Zr component, and the closer to the center, the more pure BaTIO 3 . It will be in a close state.
一方、BaTiO3粒子をコアとし、BaTi1−xZrxO3をシェルとするコアシェル構造の強誘電体セラミックスにあっては、リラクサー誘電体としても知られ、このようなリラクサー誘電体にあっては、幅広なピークを有した比誘電率温度特性を示すと共に、化学組成BaTi1−xZrxO3中の変数xの変化に従いピーク位置も連続的に変化する特徴を有し、比誘電率温度特性における最高温度はコア材のキュリー温度によって定まることから、約−55℃の低温度からコア材のキュリー温度をやや上回る約125℃に至る温度範囲において、比誘電率変動が25℃の比誘電率を基準として±15%以内に維持可能な安定した高温域特性が得られることが知られており、また添加酸化物もZrO2に限らず各種の酸化物およびそれらを組み合わせることで、上記の比誘電率温度特性はEIA X7R規格として確立されているとともに、商品化されるに至っている。 On the other hand, a strong dielectric ceramic having a core-shell structure having BaTiO 3 particles as a core and BaTi 1-x Zr x O 3 as a shell is also known as a relaxer dielectric, and such a relaxer dielectric has. , together show a having a broad peak dielectric constant-temperature characteristics, has characteristics that change continuously peak position in accordance with changes in the chemical composition BaTi 1-x Zr x O 3 in variable x, relative dielectric constant Since the maximum temperature in the temperature characteristics is determined by the curry temperature of the core material, the relative permittivity fluctuation is 25 ° C in the temperature range from a low temperature of about -55 ° C to about 125 ° C, which is slightly higher than the curry temperature of the core material. dielectric constant stable high temperature range characteristics are known to be obtained can be maintained within 15% ± to as reference, also additional oxide also by various oxides not limited to ZrO 2 and combining them, the Relative permittivity temperature characteristics have been established as the EIA X7R standard and have been commercialized.
その後、我々は安定した高温域特性のさらなる拡大を目指し、図7、図8の如く、コア材にシェル材を添加し焼成してなるコアシェル構造の強誘電体セラミックスにおいて、特許文献1に記すように、上記コア材としてBaTiO3より高いキュリー温度を有すKSr2Nb5O15(ニオブ酸ストロンチウムカリウム)、上記シェル材としてZrO2(二酸化ジルコニウム)から構成される強誘電体セラミックスを発明した。
After that, with the aim of further expanding the stable high-temperature region characteristics, as shown in FIGS. 7 and 8, in the ferroelectric ceramics having a core-shell structure obtained by adding a shell material to the core material and firing it, as described in
すなわち、上記KSr2Nb5O15粉末に少量の上記ZrO2を添加して焼成することによりジルコニウム成分がKSr2Nb5O15の周囲から拡散し、K1−xSr2+xNb5−xZrxO15で与えられる相がKSr2Nb5O15粒子の周囲に形成され、図7の如く、KSr2Nb5O15粒子をコアとし、K1−xSr2+xNb5−xZrxO15をシェルとするコアシェル構造の強誘電体セラミックスGが作製されることになる。 That is, by adding a small amount of ZrO 2 to the KSr 2 Nb 5 O 15 powder and firing, the zirconium component diffuses from the periphery of KSr 2 Nb 5 O 15 and K 1-x Sr 2 + x Nb 5-x Zr. given phase x O 15 is formed around the KSr 2 Nb 5 O 15 particles, as shown in FIG. 7, the core KSr 2 Nb 5 O 15 particles, K 1-x Sr 2 + x Nb 5-x Zr x O A strong dielectric ceramics G having a core-shell structure having 15 as a shell will be manufactured.
ここに、上記強誘電体セラミックスGの化学組成は、表面に近づくほど、K1−XSr2+XNb5−XZrxO15中の変数xが高く、すなわち、Zr成分濃度が高く、中心に近づくほど純粋なKSr2Nb5O15に近くなる状態となる。 Here, in the chemical composition of the ferroelectric ceramics G, the closer to the surface, the higher the variable x in K1-X Sr 2 + X Nb 5-X Zr x O 15 , that is, the higher the concentration of the Zr component, and the center. The closer it is, the closer it becomes to pure KSr 2 Nb 5 O 15.
KSr2Nb5O15粒子をコアとし、K1−XSr2+XNb5−XZrxO15をシェルとするコアシェル構造の強誘電体セラミックスGにあっては、リラクサー誘電体としても知られ、このようなリラクサー誘電体にあっては、幅広なピークを有した比誘電率温度特性を示すと共に、化学組成K1−XSr2+XNb5−XZrxO15中の変数xの変化に従いピーク位置も連続的に変化する特徴を有し、比誘電率温度特性における最高温度はコア材のキュリー温度156℃によって定まることから、約−55℃の低温度からコア材のキュリー温度をやや上回る約195℃に至る温度範囲において平坦な温度特性を得るに至った。 The ferroelectric ceramics G having a core-shell structure having a core of KSr 2 Nb 5 O 15 particles and a shell of K 1-X Sr 2 + X Nb 5-X Zr x O 15 is also known as a relaxer dielectric. Such a relaxor dielectric exhibits a relative permittivity temperature characteristic having a wide peak, and peaks according to a change in the variable x in the chemical composition K 1-X Sr 2 + X Nb 5-X Zr x O 15. The position also has the characteristic of continuously changing, and the maximum temperature in the relative permittivity temperature characteristics is determined by the Curie temperature of the core material of 156 ° C. Flat temperature characteristics have been obtained in the temperature range up to 195 ° C.
なお、コアシェル構造とは、典型的なものとしては単一粒子中に一つのコアをシェルで包み込むような組成上の不均一構造を意味してきたが、近年においては、このような構造以外にも、例えば、単一粒子中において一つのシェルが複数のコアを包含する構造や、一つのコアを複数層のシェルがあたかも玉ねぎのように包み込む構造や、粒状でなく棒状あるいはワイヤ状のコアをシェルが囲む一次元的構造など、各種のコアシェル構造の存在が非特許文献2にまとめられており、本文で扱うコアシェル構造もこのような成分のナノサイズの組成の不均質性を有すセラミックスをも含むものとする。 The core-shell structure has typically meant a non-uniform structure in composition such that one core is wrapped in a shell in a single particle, but in recent years, other than such a structure has been used. For example, a structure in which one shell contains multiple cores in a single particle, a structure in which a shell having multiple layers wraps one core like an onion, or a shell in which a rod-shaped or wire-shaped core is not granular. The existence of various core-shell structures such as the one-dimensional structure surrounded by is summarized in Non-Patent Document 2, and the core-shell structure dealt with in the text also includes ceramics having nano-sized composition inhomogeneities of such components. It shall include.
上記とは別に、Sr2NaNb5O15におけるNbの一部をTaにおきかえた組成Sr2NaNb5−xTaxO15のタングステンブロンズセラミックスの比誘電率温度特性の検討を行い、詳細を非特許文献3に示した。 Separately from the above, the relative permittivity temperature characteristics of the tungsten bronze ceramics of Sr 2 NaNb 5-x Ta x O 15 having a composition in which a part of Nb in Sr 2 NaNb 5 O 15 was replaced with Ta were examined, and the details are not described. It is shown in Patent Document 3.
原料酸化物SrCO3、Na2CO3、Nb2O5およびTa2O5を化学量論比に秤量し、遊星ボールミルを用いて十分混合したものを1,150℃で7時間仮焼し、得られた仮焼生成物をX線回折によりタングステンブロンズ単相で同窓以外の異相の存在が認められないことを確認したのち、当該仮焼生成物を再度遊星ボールミルを用いて粉砕処理を施し、得られた粉末を円盤状に加圧成形したものを、酸素雰囲気中の電気炉に投入し1,250℃から1,350℃の温度で8時間焼成することによりセラミックス試料を作製した。 The raw material oxides SrCO 3 , Na 2 CO 3 , Nb 2 O 5 and Ta 2 O 5 were weighed to a chemical quantitative ratio, sufficiently mixed using a planetary ball mill, and calcined at 1,150 ° C. for 7 hours. After confirming by X-ray diffraction that the obtained calcined product had no different phases other than the same window in the tungsten bronze single phase, the calcined product was again pulverized using a planetary ball mill. The obtained powder was pressure-molded into a disk shape and charged into an electric furnace in an oxygen atmosphere and fired at a temperature of 1,250 ° C to 1,350 ° C for 8 hours to prepare a ceramic sample.
X線回折により、該セラミックスは結晶性の良いタングステンブロンズ単相であり、その格子定数はSr2NaNb5−xTaxO15タングステンブロンズのxの値によりほぼ直線的に変化しつつもそれぞれのxの値により一位的に定まることが認められたことから、得られたセラミックスはコアシェル構造などナノサイズの組成不均一性を有さない均一なセラミックスであることが示された。 By X-ray diffraction, the ceramic is a tungsten bronze single phase with good crystallinity, and its lattice constant changes almost linearly depending on the value of x of Sr 2 NaNb 5-x Ta x O 15 tungsten bronze. Since it was found that the value of x was determined in a primary manner, it was shown that the obtained ceramics are uniform ceramics having no nano-sized composition non-uniformity such as core-shell structure.
上記セラミックスの両面にスパッタリングにより金電極を形成し、これをLCRメータに接続し、1kHzから1MHzに至る各周波数での比誘電率を液体窒素の沸点から最大400℃の温度範囲において評価した結果、非特許文献3に記すように、概ね−100℃から0℃に至る温度範囲において出現する幅広の比誘電率ピークと、同じく概ね−150℃から300℃に至る温度範囲において出現する幅広の比誘電率ピークの二つのピークから成る概ね平坦な比誘電率温度特性が得られた。 Gold electrodes were formed on both sides of the ceramics by sputtering, connected to an LCR meter, and the relative permittivity at each frequency from 1 kHz to 1 MHz was evaluated in the temperature range of up to 400 ° C from the boiling point of liquid nitrogen. As described in Non-Patent Document 3, a wide relative permittivity peak that appears in a temperature range of approximately -100 ° C to 0 ° C and a wide relative permittivity that appears in a temperature range of approximately −150 ° C to 300 ° C. A generally flat relative permittivity temperature characteristic consisting of two peaks of rate peak was obtained.
比誘電率ピークのピーク位置は、化学組成Sr2NaNb5−xTaxO15のxの値の増大に伴いそれぞれ連続的に低温側に遷移する特徴を有し、たとえば組成x=0において高温側に出現するピーク位置の最高点はSr2NaNb5O15のキュリー温度に相当すると考えられる273℃にあり、組成x=0.2においては低温側に出現するピーク位置はほぼ−150℃であるなど広範な温度領域を包含しているが、各組成セラミックス個々に関しては比誘電率変動は依然として大きく、KSr2Nb5O15で実現した−55℃から195℃より広い温度領域中で比誘電率変動を25℃基準で±15%内に抑えるには至らなかった。 The peak position of the relative permittivity peak has the characteristic of continuously transitioning to the low temperature side as the value of x in the chemical composition Sr 2 NaNb 5-x Ta x O 15 increases, and is characterized by a high temperature at, for example, composition x = 0. The highest point of the peak position appearing on the side is at 273 ° C, which is considered to correspond to the Curie temperature of Sr 2 NaNb 5 O 15 , and at the composition x = 0.2, the peak position appearing on the low temperature side is approximately -150 ° C. Although it covers a wide temperature range such as some, the relative permittivity fluctuation is still large for each composition ceramic, and the relative permittivity is realized in the temperature range wider than -55 ° C to 195 ° C realized by KSr 2 Nb 5 O 15. The rate fluctuation could not be suppressed within ± 15% on the basis of 25 ° C.
上記KSr2Nb5O15粉末に少量のZrO2を添加して焼成することにより作製された従来の強誘電体セラミックスの場合、図8に示す比誘電率温度特性の如く、温度が195℃以上になると、比誘電率が著しく低下することになり、このような従来の強誘電体セラミックスを車載用や航空宇宙用のキャパシタ材においては、−55℃から195℃の温度範囲よりもより広い温度範囲において比誘電率の変動が±15%以内の特性以上の高温域特性を必要とする、より厳しい要求に応えることができないことがあるという不都合を有している。 In the case of conventional ferroelectric ceramics produced by adding a small amount of ZrO 2 to the above KSr 2 Nb 5 O 15 powder and firing, the temperature is 195 ° C. or higher as shown in the relative permittivity temperature characteristic shown in FIG. In this case, the relative permittivity is significantly reduced, and such conventional ferroelectric ceramics are used as a capacitor material for automobiles and aerospace at a temperature wider than the temperature range of -55 ° C to 195 ° C. It has the inconvenience that it may not be possible to meet stricter requirements, which require characteristics in the high temperature range where the fluctuation of the relative permittivity is within ± 15% in the range.
本発明はこのような不都合を解決することを目的とするもので、請求項1記載の発明は、コア材にシェル材を添加し二段階焼成してなるコアシェル構造の強誘電体セラミックスの作製方法であって、上記コア材はタングステンブロンズ型酸化物であり、該タングステンブロンズ型酸化物はSr2NaNb5O15(ニオブ酸ストロンチウムナトリウム)であり、上記シェル材はTa2O5(五酸化二タンタル)であることを特徴とし、ZrO2を添加したKSr2Nb5O15コアシェル構造セラミックスや、非特許文献1にその一例が示されている既に実用化されたZrO2その他を添加したチタン酸バリウムコアシェル構造セラミックスの比誘電率温度特性の発現と同様、Sr2NaNb5−xTaxO15組成xに依存して変化を示す比誘電率温度特性がセラミックスの中で総和されることにより、原理的には−150℃からSr2NaNb5O15のキュリー温度に相当すると考えられる273℃をやや上回る広い温度領域において、たとえば比誘電率変動を25℃基準で±15%内に抑え得る平坦な比誘電率温度特性を有し得る強誘電体セラミックスの作製方法である。
The present invention aims to solve such inconveniences, and the invention according to
本発明は上述の如く、請求項1記載の発明にあっては、コア材にシェル材を添加し二段階焼成してなるコアシェル構造の強誘電体セラミックスの作製方法であって、シェル材Mがイオンの拡散によりコア材Sに固溶することで、コア材をタングステンブロンズ型酸化物とするコアシェル構造の強誘電体セラミックスを低コストで得ることができ、上記コア材はタングステンブロンズ型酸化物Sr2NaNb5O15であり、上記シェル材はTa2O5であるから、その機能として、−150℃からSr2NaNb5O15のキュリー温度に相当すると考えられる273℃をやや上回る温度条件下においても、比誘電率の変動が±15%以内に維持可能な安定した高温域特性をもつ強誘電体セラミックスを得ることができ、高温域特性が要求される車載用や航空宇宙用のキャパシタ材等に用いることができる。
As described above, in the invention according to
図1乃至図4は本発明の実施の形態例を示し、図5、図6は参考形態例である。1 to 4 show examples of embodiments of the present invention, and FIGS. 5 and 6 are reference examples.
図1乃至図4の実施の形態例において、タングステンブロンズ型酸化物からなるコア材Sに少量のシェル材Mを添加して焼成することによりコアシェル構造の強誘電体セラミックスGが作製される。 In the examples of the embodiments of FIGS. 1 to 4, a ferroelectric ceramic G having a core-shell structure is produced by adding a small amount of the shell material M to the core material S made of a tungsten bronze oxide and firing it.
この場合、タングステンブロンズ型酸化物としてSr2NaNb5O15(ニオブ酸ストロンチウムナトリウム)が用いられ、シェル材MとしてTa2O5(五酸化二タンタル)が用いられている。 In this case, Sr 2 NaNb 5 O 15 (sodium niobate strontium) is used as the tungsten bronze type oxide, and Ta 2 O 5 (ditantalum pentoxide) is used as the shell material M.
この場合、強誘電体セラミックスGの作製に際し、図1の如く、先ず、タングステンブロンズ型酸化物の原料として、原料酸化物Na2CO3、SrCO3、Nb2O5を化学量論比で秤量し、これら原料を遊星ボールミルを用いて24時間混合し、1,150℃で8時間かけて仮焼して、コア材Sとしてのタングステンブロンズ型酸化物を作製することになる。 In this case, in the production of the ferroelectric ceramics G, as shown in FIG. 1, first, as the raw material of the tungsten bronze type oxide, the raw material oxides Na 2 CO 3 , SrCO 3 and Nb 2 O 5 are weighed by the chemical quantitative ratio. Then, these raw materials are mixed for 24 hours using a planetary ball mill and calcined at 1,150 ° C. for 8 hours to prepare a tungsten bronze type oxide as the core material S.
そして、この作製されたタングステンブロンズ型酸化物の仮焼粉末がSr2NaNb5O15単相であることをX線回折法で確認することになる。 Then, it is confirmed by the X-ray diffraction method that the prepared calcined powder of the tungsten bronze type oxide is Sr 2 NaNb 5 O 15 single phase.
次いで、上記コア材Sとしてのタングステンブロンズ型酸化物の仮焼粉末に上記シェル材MとしてのTa2O5をそのまま投入し、例えば、遊星ボールミルを用いて十分に撹拌処理し、得られた混合粉末を圧力196MPa程度で加圧してペレットを形成し、このペレットを加熱炉内に投入し、加熱炉内の酸素雰囲気中で、温度1,300℃で約1分〜3分程度保持したのち1,200℃まで冷却し同温度で8時間かけて焼成する二段階焼成法により焼成し、これによりTa2O5からイオンの拡散が起こり、図2に示す如く、上記タングステンブロンズ型酸化物をコアとし、Sr2NaNb5−xTaxO15をシェルとするコアシェル構造の強誘電体セラミックスGが作製されることになる。 Next, Ta 2 O 5 as the shell material M was directly added to the calcined powder of the tungsten bronze type oxide as the core material S, and the mixture was sufficiently stirred using, for example, a planetary ball mill, and the resulting mixture was obtained. The powder is pressurized at a pressure of about 196 MPa to form pellets, and the pellets are put into a heating furnace and held at a temperature of 1,300 ° C. for about 1 to 3 minutes in an oxygen atmosphere in the heating furnace. , Cooled to 200 ° C. and fired at the same temperature for 8 hours by a two-step firing method, which causes ion diffusion from Ta 2 O 5 , and as shown in FIG. 2, the above tungsten bronze type oxide is used as a core. Then, a strong dielectric ceramic G having a core-shell structure having Sr 2 NaNb 5-x T x O 15 as a shell will be produced.
二段階焼成法は、たとえば非特許文献4に述べられているように、通常の焼成法に比して低い焼成温度条件下でも緻密なセラミックスを作製できると同時に、焼結の最終段階で生ずる粒成長を抑止できることでも知られている。 As described in Non-Patent Document 4, for example, the two-step firing method can produce dense ceramics even under conditions of a lower firing temperature than a normal firing method, and at the same time, grains produced in the final stage of sintering. It is also known to be able to curb growth.
焼結最終段階での粒成長が著しい場合、非特許文献1でも示されているように、粒成長に伴うコア−シェル間での成分の拡散が促進される結果、コアシェル構造が失われ均一化学組成のセラミックスとなり、コアシェル構造特有の比誘電率温度特性が失われ、当該セラミックス、例えばSr2NaNb5−xTaxO15組成の場合コアシェル構造のそれでなくSr2NaNb5−xTaxO15均一組成の比誘電率温度特性が発現し、先述したように、KSr2Nb5O15で実現した−55℃から195℃より広い温度領域中で比誘電率変動を25℃基準で±15%内に抑えるには至らないことになるが、二段階焼成を行うと通常の一段階焼成に比して容易にこの問題を解決できる。
When the grain growth in the final stage of sintering is remarkable, as shown in Non-Patent
このようにして作製された強誘電体セラミックスGにあっては、その表面は、図3に示す走査電子顕微鏡像となった。 In the ferroelectric ceramics G thus produced, the surface thereof was a scanning electron microscope image shown in FIG.
上記セラミックスの両面にスパッタリングにより金電極を形成し、LCRメータを用い周波数1kHzでの比誘電率を液体窒素温度から最大250℃の温度範囲においては加熱装置付き試料台に試料を固定し液体窒素で冷却しながら比誘電率測定を行い、かつ室温から最大450℃の温度の温度範囲においては大気中の加熱炉内に設置した試料固定台に試料を固定しそれぞれ比誘電率測定を行った。 Gold electrodes are formed on both sides of the ceramics by sputtering, and the relative permittivity at a frequency of 1 kHz is fixed in a sample table with a heating device in the temperature range from the liquid nitrogen temperature to a maximum of 250 ° C using an LCR meter, and liquid nitrogen is used. Relative permittivity was measured while cooling, and in the temperature range from room temperature to a maximum of 450 ° C., the sample was fixed on a sample fixing table installed in a heating furnace in the atmosphere, and the relative permittivity was measured for each.
その結果、図4に示す横軸を温度(℃)、縦軸を比誘電率とし、周波数1kHzの条件で示す比誘電率温度特性図の如く、比誘電率は最大で1,578程度を示し、温度25℃において比誘電率は約1,531となり、温度150℃にて極小1,316を示したのち温度200℃程度まで比誘電率の値は安定し、温度230℃を超えた頃から比誘電率は再度少しの上昇を示したのち低下傾向を見せた。 As a result, the horizontal axis shown in FIG. 4 is the temperature (° C), the vertical axis is the relative permittivity, and the relative permittivity shows a maximum of about 1,578 as shown in the relative permittivity temperature characteristic diagram shown under the condition of a frequency of 1 kHz. The relative permittivity becomes about 1,531 at a temperature of 25 ° C, and after showing a minimum of 1,316 at a temperature of 150 ° C, the value of the relative permittivity stabilizes up to a temperature of about 200 ° C, and from the time when the temperature exceeds 230 ° C. The relative permittivity showed a slight increase again and then showed a decreasing tendency.
氷点下において、温度の上昇と共に比誘電率は上昇し、約−70℃において温度25℃の比誘電率1,531の15%減に相当する1,301に達し、温度252℃において同じく温度25℃の比誘電率1,531の15%減に相当する1,301を示したのち温度上昇に伴い比誘電率低下を示す一方、逆に温度25℃の比誘電率1,531の15%増に相当する1,760には温度−70℃から252℃全域にわたり到達せず、結果としてこの誘電体は、−70℃から252℃の広い温度範囲にわたり比誘電率変動が+25℃の比誘電率基準で±15%以内に収まることが確認された。 Below the freezing point, the relative permittivity rises with increasing temperature, reaching 1,301 at about -70 ° C, which corresponds to a 15% decrease in the relative permittivity of 1,531 at a temperature of 25 ° C, and at a temperature of 252 ° C, the temperature is also 25 ° C. After showing 1,301, which corresponds to a 15% decrease in the relative permittivity of 1,531, it shows a decrease in the relative permittivity as the temperature rises, while conversely, it increases by 15% in the relative permittivity of 1,531 at a temperature of 25 ° C. The corresponding 1,760 did not reach the entire temperature range of -70 ° C to 252 ° C, and as a result, this dielectric has a relative permittivity reference with a relative permittivity variation of + 25 ° C over a wide temperature range of -70 ° C to 252 ° C. It was confirmed that it was within ± 15%.
この実施の形態例にあっては、図1、図2の如く、コア材Sにシェル材Mを添加し二段階焼成してなるコアシェル構造の強誘電体セラミックスGの作製方法であって、シェル材Mがイオンの拡散によりコア材Sに固溶することで、コア材Sをタングステンブロンズ型酸化物とするコアシェル構造の強誘電体セラミックスGを低コストで得ることができるうえ、上記コア材Sはタングステンブロンズ型酸化物Sr2NaNb5O15であり、上記シェル材MはTa2O5であるから、コア材Sの中心部から表面部に向かうほどシェル材Mの成分濃度が高くなるコアシェル構造の強誘電体セラミックスGが作製される結果、その機能としてタングステンブロンズ型酸化物はSr2NaNb5O15であるから、原理的には−150℃から273℃をやや上回る広い温度範囲においても、比誘電率の変動が±15%以内に維持可能な安定した高温域特性をもつ強誘電体セラミックスGを得ることができる。 In this embodiment , as shown in FIGS. 1 and 2, a method for producing a ferroelectric ceramic G having a core-shell structure, which is obtained by adding a shell material M to a core material S and firing in two stages, is a method of producing a shell. By dissolving the material M in the core material S by diffusion of ions, a ferroelectric ceramic G having a core shell structure in which the core material S is a tungsten bronze type oxide can be obtained at low cost, and the core material S can be obtained at low cost. Is a tungsten bronze type oxide Sr 2 NaNb 5 O 15 , and the shell material M is Ta 2 O 5 , so that the component concentration of the shell material M increases from the center to the surface of the core material S. As a result of producing the ferroelectric ceramics G having a structure, the tungsten bronze type oxide is Sr 2 NaNb 5 O 15 as its function. Therefore, in principle, even in a wide temperature range slightly higher than −150 ° C. to 273 ° C. It is possible to obtain the ferroelectric ceramics G having stable high temperature region characteristics in which the fluctuation of the relative permittivity can be maintained within ± 15%.
現実に得られた実施の形態例においては−70℃から254℃に至る温度条件下においても、25℃の比誘電率に対する変動が±15%以内に維持可能な安定した高温域特性をもつ強誘電体セラミックスGを得ることができ、結果としてZrO2添加KSr2Nb5O15コアシェル構造で実現した−55℃から195℃に至る温度範囲よりも広い温度範囲においても、比誘電率の変動が±15%以内に維持可能な安定した高温域特性をもつ強誘電体セラミックスGを得ることができ、高温域特性が要求される車載用や航空宇宙用のキャパシタ材等に用いることができる。 In the actually obtained embodiment , even under the temperature condition from −70 ° C. to 254 ° C., the variation with respect to the relative permittivity of 25 ° C. can be maintained within ± 15%. Dielectric ceramics G can be obtained, and as a result, the relative permittivity fluctuates even in a temperature range wider than the temperature range from -55 ° C to 195 ° C realized by the ZrO 2 added KSr 2 Nb 5 O 15 core shell structure. It is possible to obtain a ferroelectric ceramic G having stable high temperature region characteristics that can be maintained within ± 15%, and it can be used as a capacitor material for automobiles and aerospace where high temperature region characteristics are required.
図5、図6は参考形態例であって、上記実施の形態例と同様に、図1、図
2の如く、上記コア材Sとしてのタングステンブロンズ型酸化物がSr2NaNb5O15、上記シェル材MがTa2O5であり、コア材Sにシェル材Mを添加し、1,250℃の加熱炉内に投入し、加熱炉内の酸素雰囲気中で8時間掛けて焼成する通常の一段階焼成法によって図2に示すごとくタングステンブロンズ型酸化物からなるコア材Sの中心部から表面部に向かうほどシェル材Mの成分濃度が高くなるコアシェル構造の強誘電体セラミックスGが作製されることとなる。
5, FIG. 6 is a reference embodiment, similarly to the embodiment of the above embodiment, FIG. 1, as shown in FIG. 2, a tungsten bronze-type oxide as the core material S Sr 2 NaNb 5 O 15, the The shell material M is Ta 2 O 5 , and the shell material M is added to the core material S, put into a heating furnace at 1,250 ° C., and fired in an oxygen atmosphere in the heating furnace for 8 hours. As shown in FIG. 2, the one-step firing method produces a ferroelectric ceramic G having a core-shell structure in which the component concentration of the shell material M increases from the center to the surface of the core material S made of a tungsten bronze-type oxide. It will be.
このように作成された、強誘電体セラミックスGにおいては、その表面は、図5に示す走査電子顕微鏡像となった。 In the ferroelectric ceramics G thus prepared, the surface thereof was a scanning electron microscope image shown in FIG.
上記セラミックスの両面にスパッタリングにより金電極を形成し、LCRメータを用い周波数1kHzでの比誘電率を液体窒素温度から最大250℃の温度範囲においては加熱装置付き試料台に試料を固定し液体窒素で冷却しながら比誘電率測定を行い、かつ室温から最大450℃の温度の温度範囲においては大気中の加熱炉内に設置した試料固定台に試料を固定しそれぞれ比誘電率測定を行った。 Gold electrodes are formed on both sides of the ceramics by sputtering, and the relative permittivity at a frequency of 1 kHz is fixed in a sample table with a heating device in the temperature range from the liquid nitrogen temperature to a maximum of 250 ° C using an LCR meter, and liquid nitrogen is used. Relative permittivity was measured while cooling, and in the temperature range from room temperature to a maximum of 450 ° C., the sample was fixed on a sample fixing table installed in a heating furnace in the atmosphere, and the relative permittivity was measured for each.
その結果、図6に示す横軸を温度(℃)、縦軸を比誘電率とし、周波数1kHzの条件で示す比誘電率温度特性図の如く、比誘電率は最大で1,249程度を示し、温度25℃において比誘電率は1,216となり、温度130℃にて極小1,041を示したのち温度200℃程度まで比誘電率の値は安定して変化せず、温度220℃を超えた頃から比誘電率は少し上昇したのち低下傾向を見せた。 As a result, the horizontal axis shown in FIG. 6 is the temperature (° C.) and the vertical axis is the relative permittivity. The relative permittivity becomes 1,216 at a temperature of 25 ° C, and after showing a minimum of 1,041 at a temperature of 130 ° C, the value of the relative permittivity does not change stably until the temperature is about 200 ° C, and exceeds the temperature of 220 ° C. From around that time, the relative permittivity rose a little and then showed a downward trend.
氷点下において、温度の上昇と共に比誘電率は上昇し、約−65℃において温度25℃の比誘電率1,216の15%減に相当する1,034程度に達し、温度263℃において同じく温度25℃の比誘電率1,216の15%減に相当する1,034を示したのち、温度上昇に伴い比誘電率低下を示す一方、逆に温度25℃の比誘電率1,216の15%増に相当する1,398には温度−65℃から263℃の全域にわたり到達せず、結果としてこの強誘電体セラミックスGは、−65℃から263℃の広い温度範囲にわたり比誘電率変動が+25℃の比誘電率基準で±15%以内に収まることが確認された。 Below the freezing point, the relative permittivity rises as the temperature rises, reaching about 1,034, which corresponds to a 15% decrease in the relative permittivity of 1,216 at a temperature of 25 ° C at about -65 ° C, and the same temperature 25 at a temperature of 263 ° C. After showing 1,034, which corresponds to a 15% decrease in the relative permittivity of 1,216 at ° C, the relative permittivity decreases as the temperature rises, while conversely, 15% of the relative permittivity 1,216 at a temperature of 25 ° C. The increase of 1,398 was not reached over the entire temperature range of -65 ° C to 263 ° C, resulting in a relative permittivity variation of +25 over a wide temperature range of -65 ° C to 263 ° C. It was confirmed that it was within ± 15% based on the relative permittivity at ° C.
なお、図6の比誘電率温度特性図では、約50℃において比誘電率の不連続的変化が認められるが、これは、液体窒素温度から50℃においては加熱装置付き試料台に試料を固定し液体窒素で冷却しながら比誘電率測定を行ったのに対し、50℃以上の温度領域では加熱炉中に設置した試料固定台に試料を固定し比誘電率測定を行った結果、装置の浮遊誘電率の変化などが原因となり誤差として生じたものであるが、この誤差がなければ比誘電率の変動はむしろ小さくなるが、全体の結論に影響を及ぼすものではない。 In the relative permittivity temperature characteristic diagram of FIG. 6, a discontinuous change in the relative permittivity is observed at about 50 ° C., which means that the sample is fixed on a sample table with a heating device from the liquid nitrogen temperature to 50 ° C. Relative permittivity was measured while cooling with liquid nitrogen, whereas in the temperature range of 50 ° C or higher, the sample was fixed on a sample fixing table installed in a heating furnace and the relative permittivity was measured. It was caused as an error due to a change in the floating permittivity, etc. Without this error, the fluctuation in the relative permittivity would be rather small, but it would not affect the overall conclusion.
この参考形態例にあっては、上記実施の形態例と同様に、コア材Sにシェル材Mを添加し一段階焼成してなるコアシェル構造の強誘電体セラミックスGの作製方法であって、上記コア材Sはタングステンブロンズ型酸化物Sr2NaNb5O15であり、上記シェル材MはTa2O5であるから、シェル材Mがイオンの拡散によりコア材Sに固溶することで、コア材Sをタングステンブロンズ型酸化物とするコアシェル構造の強誘電体セラミックスGを低コストで得ることができるうえ、その機能としてタングステンブロンズ型酸化物はSr2NaNb5O15であるから、原理的には−150℃から273℃をやや上回る広い温度範囲においても、比誘電率の変動が±15%以内に維持可能な安定した高温域特性をもつ強誘電体セラミックスGを得ることができる。 The reference embodiment is a method for producing a ferroelectric ceramic G having a core-shell structure, which is obtained by adding a shell material M to a core material S and firing it in one step, as in the above-described embodiment. Since the core material S is a tungsten bronze type oxide Sr 2 NaNb 5 O 15 and the shell material M is Ta 2 O 5 , the shell material M dissolves in the core material S by the diffusion of ions to form a core. A ferroelectric ceramic G having a core-shell structure using the material S as a tungsten bronze-type oxide can be obtained at low cost, and as its function, the tungsten bronze-type oxide is Sr 2 NaNb 5 O 15 , in principle. Can obtain ferroelectric ceramics G having stable high temperature range characteristics in which the fluctuation of the relative permittivity can be maintained within ± 15% even in a wide temperature range slightly higher than −150 ° C. to 273 ° C.
図6に示すように、現実に得られた参考形態例においても−65℃から263℃に至る温度条件下においても、25℃の比誘電率に対する変動が±15%以内に維持可能な安定した高温域特性をもつ強誘電体セラミックスGを得ることができ、高温域特性が要求される車載用や航空宇宙用のキャパシタ材等に用いることができ、図8の従来例であるZrO2添加KSr2Nb5O15コアシェル構造で実現した−55℃から195℃に至る温度範囲よりも広い温度範囲においても、比誘電率の変動が±15%以内に維持可能な安定した高温域特性をもつ強誘電体セラミックスGを得ることができ、高温域特性が要求される車載用や航空宇宙用のキャパシタ材等に用いることができる。 As shown in FIG. 6, even in the actually obtained reference embodiment , the fluctuation with respect to the relative permittivity of 25 ° C. can be maintained within ± 15% under the temperature conditions from −65 ° C. to 263 ° C. and is stable. it is possible to obtain a ferroelectric ceramics G having a high temperature region characteristics, it can be used for a capacitor material or the like for automotive and aerospace high-temperature zone properties are required, ZrO 2 added KSr a conventional example of FIG. 8 Strong with stable high temperature characteristics that the fluctuation of the relative permittivity can be maintained within ± 15% even in a temperature range wider than the temperature range from -55 ° C to 195 ° C realized by the 2 Nb 5 O 15 core shell structure. Dielectric ceramics G can be obtained, and can be used as a capacitor material for automobiles and aerospace where high temperature region characteristics are required.
参考形態例で採用された熱処理形態としての一段階焼成法は、二段階焼成法に比して焼成パラメータが少なく操作性が容易となる一方、持続的焼成温度が相対的に高くなるため、粒成長が起こりやすくコアシェル構造の破壊につながりやすい欠点も有するが、焼成パラメータを適切に選べば、本例に示すように十分安定した比誘電率温度特性を得ることができる。 The one-step firing method as the heat treatment form adopted in the reference form example has fewer firing parameters and is easier to operate than the two-step firing method, but the continuous firing temperature is relatively high, so that the grains are grains. Although it has the drawback of being prone to growth and leading to the destruction of the core-shell structure, sufficiently stable relative permittivity temperature characteristics can be obtained as shown in this example if the firing parameters are properly selected.
なお、コア材Sとしてのタングステンブロンズ型酸化物の仮焼粉末に上記シェル材MとしてのTa2O5の添加に際し、上記実施の形態例および参考形態例においてはいずれもTa2O5粉末添加からの固相反応法によったが、次に述べる液相法、すなわちタンタルペンタプロポキシド、その他のタンタルの可溶性化合物を例えばエタノールやイソプロピルアルコール等の溶剤に溶解し、その溶解液中にタングステンブロンズ型酸化物としてのSr2NaNb5O15の仮焼粉末を投入し、粉末粒子表面に上記タンタル化合物を塗布したのち、これを600℃以上で約10分〜30分程度空気中に加熱することにより当該粒子表面にシェル材MとしてのTa2O5の層を形成してもよい。 When adding Ta 2 O 5 as the shell material M to the tantalum bronze-type oxide calcined powder as the core material S, Ta 2 O 5 powder was added to both the above-described embodiment and the reference embodiment. The liquid phase method described below, that is, tantalum pentapropoxide and other soluble compounds of tantalum, are dissolved in a solvent such as ethanol or isopropyl alcohol, and tungsten bronze is contained in the solution. A calcined powder of Sr 2 NaNb 5 O 15 as a mold oxide is added, the above tantalum compound is applied to the surface of the powder particles, and then the tantalum compound is heated in the air at 600 ° C. or higher for about 10 to 30 minutes. May form a layer of Ta 2 O 5 as the shell material M on the surface of the particles.
この粉末を圧力196MPa程度で加圧してペレットを作り、このペレットを焼成温度としての炉内温度1,200℃〜1,300℃の加熱炉内に投入し、加熱炉内の酸素雰囲気中で7時間保持するか、その他所定の熱処理条件に従って焼成し、これによりTa2O5からイオンの拡散が起こり、図2に示す如く、上記タングステンブロンズ型酸化物をコアとし、Sr2NaNb5−XTaxO15をシェルとするコアシェル構造の強誘電体セラミックスGが得られる。
This powder is pressurized at a pressure of about 196 MPa to make pellets, and the pellets are put into a heating furnace having a furnace temperature of 1,200 ° C to 1,300 ° C as the firing temperature, and in an oxygen atmosphere in the
なお、本発明は上記実施の形態例に限られるものではなく、コア材S及びシェル材Mの内容により強誘電体セラミックスGの作製条件は適宜変更して設計されるものである。 The present invention is not limited to the above embodiment, and is designed by appropriately changing the manufacturing conditions of the ferroelectric ceramics G depending on the contents of the core material S and the shell material M.
以上の如く、所期の目的を充分達成することができる。 As described above, the intended purpose can be sufficiently achieved.
S コア材
G 強誘電体セラミックス
M シェル材
S core material G ferroelectric ceramics M shell material
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