JP6970592B2 - Storage medium for storing inspection equipment, inspection systems, and programs - Google Patents

Description

The present invention relates to an inspection device, an inspection system, and a storage medium for storing a program.

An inspection method is known in which a measurement object is measured with three-dimensional coordinates and compared with design data to determine whether or not the measurement object has an appropriate shape. For example, in the configuration described in Patent Document 1, the probe is brought into contact with the surface of the work to be measured, the coordinates of the contour shape of the work are measured, and the measurement data is interpolated by a triangular mesh to obtain the measurement points and the measurement points. The error from the design data of the work is calculated by comparing the coordinates of the interpolated points with the design data. Further, in the system described in Patent Document 2, in an NC machine that processes an object that changes three-dimensionally in a complicated manner such as a Cabran water turbine blade, the shape of the workpiece material before processing is measured and the design data is applied. A device for determining whether or not to enter the work material is described. In this device, the material of the workpiece is optically measured while rotating by a measuring instrument attached to the tool post of the NC machine, and the measurement result is compared with the design data. There is also a method of inspecting the shape of the object to be measured by using a commercially available portable three-dimensional scanner and comparative inspection software.

Japanese Unexamined Patent Publication No. 2003-114121 Japanese Unexamined Patent Publication No. 6-17297

The configurations described in Patent Documents 1 and 2 do not consider shortening the time required for measurement and comparison processing. Further, in the configurations described in Patent Documents 1 and 2, the ease of operation of the software used for the measurement and the comparison processing is not considered. In addition, in the measurement by a commercially available three-dimensional scanner with high versatility, a huge amount of point cloud data is often acquired, and it takes time to process the data thereafter. Further, in the process up to the comparative inspection with the CAD data which is the design data, a difficult and complicated software operation may be required. You may also need a works-grade computer to run the software.

An object of the present invention is to solve at least a part of the above-mentioned problems.

According to one aspect of the present invention, there is provided an inspection device for inspecting a three-dimensional measurement object having a plurality of surfaces. This inspection device has a measurement execution unit that causes a measuring instrument to measure the shape of one of the plurality of surfaces of the measurement object, and the measured point data of the one surface from the measuring instrument. The data acquisition unit to be acquired, the measurement data processing unit that applies the thinning process to the point data, and the point data after the thinning process are compared with the design data of the measurement object, and the error of the measurement object is calculated. It includes a comparison processing unit and an inspection result output unit that outputs information on the calculated error as an inspection result.

It is a perspective view of the inspection system which concerns on one Embodiment. It is a top view of the guide vanes arranged on the trolley. It is a side view of the guide vane arranged on the bogie. It is a top view explaining the installation of a guide vane to a measuring instrument. It is a schematic block diagram which shows the structure of a control device. It is a schematic block diagram which shows the structure of an inspection apparatus. It is a schematic diagram which shows the data structure in memory. It is a perspective view of a guide vane. It is explanatory drawing explaining the thinning process of the measurement data. It is explanatory drawing explaining the calculation method of the thinning pitch. It is explanatory drawing explaining the principle of the processing of position / posture adjustment. It is a flowchart of measurement and comparative inspection. This is an example of an isoline diagram showing the inspection results. It is a flowchart of measurement and comparative inspection which concerns on a comparative example.

FIG. 1 is a perspective view of an inspection system according to an embodiment. The inspection system 1 includes a measuring instrument 2 which is a three-dimensional measuring instrument and a control device 3. The measuring device 2 includes a Cartesian robot 10 and a sensor 20. The Cartesian robot 10 includes an X-axis slider 11 and a Y-axis slider 12. The X-axis slider 11 includes a rail that guides the movement of the Y-axis slider 12. The Y-axis slider 12 is movably engaged on the rail of the X-axis slider 11 and is arranged so as to be guided in the X-axis direction along the rail. The X-axis slider 11 is provided with a motor (not shown) and a linear motion conversion mechanism (for example, a ball screw mechanism) that converts the rotation of the motor into the linear motion of the Y-axis slider 12. The Y-axis slider 12 is reciprocated along the X-axis direction. The X-axis slider 12 includes a rail that guides the movement of the holder 23. A sensor 20 is attached to the holder 23. The holder 23 is engaged with the rail of the Y-axis slider 12 and is arranged so as to be guided in the Y-axis direction along the rail. The Y-axis slider 12 is provided with a motor (not shown) and a linear motion conversion mechanism (for example, a ball screw mechanism) that converts the rotation of the motor into the linear motion of the holder 23, and the holder 23 is provided by the motor and the linear motion conversion mechanism. Is reciprocated along the Y-axis direction. As a Cartesian robot, IAI's Cartesian robot (model: ICSB2-BF4S-A-150AQ-T2-3L-CT-CT, drive method: both X-axis and Y-axis power source servo motor, ball screw drive, Encoding (position data integration) method: absolute) can be used.

The sensor is an optical sensor that measures the distance to the measurement target by irradiating the measurement target with laser light and receiving the reflected light. As the optical sensor, for example, Keyence's ultra-high-speed inline profile measuring instrument LJ-V7300 can be used.

A guide vane 60 of a pump, which is a measurement target (work), is arranged on the measuring machine 2 in a state of being installed on a carriage 70. The guide vane 60 is a curved plate-shaped member having an equal thickness, and is formed based on predetermined design data. The material of the guide vanes 60 is a flat plate-shaped member having the same thickness, and the change in plate thickness is small before and after molding. Here, the equal thickness means having substantially the same thickness over the entire region of the plate-shaped member. The molded guide vane 60 has substantially the same thickness as the plate-shaped member of the material, and has substantially the same thickness over the entire region. The guide vane 60 is a member of a welded structure and has a relatively loose dimensional tolerance. In this embodiment, the dimensional tolerance is ± 2 mm. This embodiment can be suitably used for shape inspection of a plate-shaped member having an equal thickness and a relatively loose dimensional tolerance.

FIG. 2A is a plan view of the guide vanes arranged on the bogie. FIG. 2B is a side view of the guide vane arranged on the bogie. FIG. 2C is a plan view illustrating the installation of the guide vane on the measuring instrument. As shown in FIG. 2A, the guide vane 60 has an inlet side side 61a which is the inlet side of the fluid, an outlet side side 61d which is the outlet side of the fluid, and an inner body side when the guide vane 60 is attached to the pump. It has a body side side 61b and an outer body side side 61c which is the outer body side. The guide vanes 60 have corners at the intersections of adjacent sides. The corners may have an R. The guide vanes 60 are arranged so as to project downward with the pressure surface 61 on the upper side and the negative pressure surface 62 on the lower side in a state of being installed on the carriage 70. The outer body side side 61c of the guide vane 60 includes a substantially linear portion, and the guide vane 60 is arranged on the carriage 70 so that this linear portion coincides with one side of the carriage 70 (FIG. 2A). .. Further, the outlet side side 61d of the guide vane 60 is arranged so as to abut on the standing plate 71 of the carriage 70. The entrance side side 61a and the exit side side 61d of the guide vane 60 are arranged on the trolley 70 so that the respective sides are substantially the same height within the height range of the standing plate 71 of the trolley 70 (Fig.). 2B). This is to maximize the projected area of the pressure surface 61 of the guide vane 60, which is the object to be measured, on the XY plane, and to make the density of the measurement points on the pressure surface 61 uniform. The Cartesian robot 10 is provided with stoppers 15a and 15b on the X-axis slider 11 and stoppers 15c on the Y-axis slider 12 as a configuration for positioning the carriage 70 (FIG. 2C). The dolly 70 is provided with positioning bolts 72a, 72b, 72c as a configuration for positioning. The dolly 70 is arranged and positioned on the Cartesian robot 10 so that the bolts 72a to 72c abut on the stoppers 15a to 15c, respectively.

FIG. 3A is a schematic block diagram showing the configuration of the control device. As shown in FIG. 1, the control device 3 is connected to the measuring instrument 2 with a cable and arranged. Specifically, the robot control device 32 and the orthogonal robot 10 are connected by a cable. The robot control device 32 is configured to supply a drive current to each motor of the orthogonal robot 10 via a cable and receive X and Y coordinates of the sensor 20 from the orthogonal robot 10. Further, the sensor control device 33 and the sensor 20 are connected by a cable. The sensor control device 33 sends a drive signal to the sensor 20 via a cable and receives a detection signal from the sensor 20. In this example, the control device 3 is arranged in the box, but is not limited to this configuration. As shown in FIG. 3A, the control device 3 includes a personal computer (PC) 31 as a main control device, a robot control device 32, and a sensor control device 33. The PC 31, the robot control device 32, and the sensor control device 33 are connected to each other so as to be able to communicate with each other by wire or wirelessly. The robot control device 32 is a control device that controls the operation of the orthogonal robot 10. The sensor control device 33 is a control device that controls the operation of the sensor 20. The PC 31 controls the operation of the orthogonal robot 10 and the sensor 20 via the robot control device 32 and the sensor control device 33, and scans the measurement target (guide vane).

In the following description, the PC 31 may be referred to as an inspection device or a comparative inspection device. Further, the Cartesian robot 10 and the robot control device 32 may be collectively referred to as a Cartesian robot. Further, the sensor 20 and the sensor control device 33 may be collectively referred to as a sensor. Further, the orthogonal robot 10, the robot control device 32, the sensor 20, and the sensor control device 33 may be collectively referred to as the measuring device 2.

The PC 31 includes a CPU 34, a memory 35, and a display 36. The CPU 34 is configured to execute an inspection program (FIG. 3C) stored in the memory 35, store the processing result in the memory 35, and / or display it on the display 36. The memory 35 includes a non-volatile storage medium (ROM, flash memory, etc.) and a volatile storage medium (RAM, etc.). The memory 35 may be a memory built in the PC 31 or a separate memory connected to the PC 31 by wire or wirelessly. The memory 35 stores at least the design data, the measurement data, the isoline map data, and the inspection program (FIG. 3C). The design data is, for example, CAD data. The measurement data is, for example, point cloud data (a set of point data). The isoline map data is a diagram showing the height distribution of the object to be measured, and is also called a contour diagram. Further, the inspection program and other data (design data, measurement data, contour map data, etc.) may be distributed and stored in a plurality of memories, and the inspection program and other data (design data, measurement data, etc.) may be stored. A part of each of the high-figure data, etc.) may be distributed and stored in a plurality of memories. In the present embodiment, the display 36 has a touch panel and is configured to be able to receive input from a user (worker) via the screen of the display 36. Further, in the present embodiment, the PC 31 is a tablet-type PC, and as shown in FIG. 1, the PC 31 is installed so that the screen of the display 36 is exposed from the front surface of the control device box. By using a tablet-type PC as the PC 31, the configuration including the input / output interface can be miniaturized. However, the display may be provided separately from the PC, and the input interface may be separate from the display as other input devices such as a keyboard and a mouse.

In this embodiment, the CPU 34 executes an inspection program and functions as an inspection device. FIG. 3B shows a schematic configuration of a comparative inspection device realized by the CPU 34. As shown in the figure, the inspection device includes a design data input unit 51, a measurement execution unit 52, a measurement data processing unit 53, a position / orientation adjustment unit 54, and a comparison processing unit (equal height map creation unit) 55. , The inspection result recording unit 56 is provided. In the present embodiment, the comparison processing unit 55 creates an isoline diagram, but the present invention is not limited to this, and any information regarding an error between the measurement data and the design data may be output in some form.

The design data input unit 51 reads design data (CAD data) from an external memory such as a USB memory and stores it in the memory 35 (FIG. 3C). The design data input unit 51 may be configured to acquire design data via wired or wireless communication. The design data is the design data of the measurement object, and the measurement object is formed based on the design data. In the present embodiment, the design data input unit 51 reads the design data (CAD data) of the guide vane 60 of the pump.

The measurement execution unit 52 transmits a control signal (drive current, drive signal) to the robot control device 32 and the sensor control device 33, and the guide vane 60 by the measuring device 2 is transmitted via the robot control device 32 and the sensor control device 33. The shape of the pressure surface 61 is scanned (measured). Specifically, while the sensor 20 is moved in the X-axis and Y-axis directions on the pressure surface 61 of the guide vane 60 by the orthogonal robot 10, the height of each measurement position of the pressure surface 61 of the guide vane 60 by the sensor 20 ( The height in the Z-axis direction) is detected, and the point group data (set of point data) at each measurement position is acquired. Each point data has X, Y, Z axis coordinates. When the measurement execution unit 52 acquires the measurement data (point data) of the shape of the pressure surface 61 of the guide vane 60, the measurement execution unit 52 stores the measurement data in the memory 35 (FIG. 3C). The measurement data is a set of point data (point cloud data) at each measurement position on the pressure surface 61 of the guide vane 60. FIG. 4 is a perspective view of the guide vane. In this embodiment, the point data of the pressure surface 61 of the guide vane 60 is measured, and the point data of the side surface 63 is not measured.

The measurement data processing unit 53 executes thinning processing on the point data acquired from the measuring machine 2. FIG. 5 is an explanatory diagram illustrating a thinning process of measurement data. FIG. 5A shows measurement data (point data) P1 to P5 acquired from the measuring instrument 2. Reference numeral 81 indicates the surface of the object to be measured (pressure surface of the guide vane, curved surface). FIG. 5B is a cross-sectional profile of a mesh in which each data is connected by a line segment 82. FIG. 5C is a cross-sectional profile of a mesh in which the point data after the thinning process are connected by a line segment 83. FIG. 5D shows a comparison of the cross-sectional profiles of the mesh before and after the thinning process. In FIG. 5 (d), e indicates a design tolerance width. Here, when the cross-sectional profile before the thinning process (FIG. 5b) and the cross-sectional profile after the thinning process (FIG. 5c) are compared, the thinning error Δd occurs in the profile after the thinning process with respect to the profile before the thinning process. You can see that. In the present embodiment, the thinning pitch 84 (see FIG. 6), which is the distance between the point data after the thinning process, is controlled as follows to evaluate the molding accuracy (comparative inspection) of the object to be measured (guide vane). Avoid practical problems. Specifically, the thinning pitch 84 (see FIG. 6) is obtained so that the thinning error Δd is within the design tolerance width and is equal to or less than the effective accuracy of the sensor 20 (measuring instrument 2). actually,
Since the effective accuracy of the sensor is selected to be smaller than the design tolerance width, the thinning pitch may be obtained so as to be equal to or less than the effective accuracy of the sensor.

FIG. 6 is an explanatory diagram illustrating a method of calculating the thinning pitch. First, as shown in FIG. 6A, a line segment 91 connecting arbitrary positions at both ends of the guide vane 70 is drawn based on the design data. Next, as shown in FIG. 6B, a plane 92 parallel to the plate thickness (Z-axis direction) direction including the line segment 91 is defined. As shown in FIG. 6 (c), the line of intersection 93 between the surface (curved surface) of the guide vane 70 and the plane 92 is divided into two, and the end points a1, a2, and a3 of each part of the line of intersection 93 are obtained. Next, as shown in FIG. 6D, the radius of the circle 94 passing through the three endpoints a1, a2, and a3 (the approximate radius of curvature of the free curved surface) is obtained. As shown in FIG. 6 (e), the point data b1 and b2 are set on the circumference of the circle 94 at equal distances on both sides of the point data a2, and the line segment connecting the point data b1 and b2 and the circle 94. The distance between the point data a2 and the tangent line is defined as the thinning error 85. The thinning pitch 84 is obtained so that the thinning error 85 is equal to or less than the design tolerance width e and the effective accuracy of the sensor (measuring instrument). In the present embodiment, the design tolerance width e of the guide vane is ± 2 mm, and the effective accuracy of the measuring instrument is ± 0.5 mm. Therefore, the thinning error 85 may be 0.5 mm or less. Therefore, the thinning pitch 84 can be set as the maximum value at which the thinning error 85 is less than 0.5 mm. Specifically, the thinning error 85 is changed while moving the point data b1 and b2 on the circumference of the circle 94, and the thinning pitch 84 between the point data b1 and b2 where the thinning error 85 is less than 0.5 mm. Ask for. If the thinning process is executed on the point data acquired from the measuring instrument 2 using the thinning pitch set in this way, the comparison process is required while avoiding practical problems in the molding accuracy evaluation (comparative inspection). The load and time can be significantly reduced.

In FIG. 3B, the position / orientation adjusting unit 54 executes a process of aligning the position and orientation between the measurement data surface composed of the point data after the thinning process and the design data surface obtained from the design data. FIG. 7 is an explanatory diagram illustrating the principle of the position / attitude alignment process. The design data surface 100 is a normal shape of the design obtained from the CAD data. The measurement data surface 110 is a set shape (mesh) of minute planes created from a set of point data acquired by measurement. For example, it is created by connecting point data with a line segment. In the position and orientation alignment process, as shown in FIG. 7A, the center of gravity 101 of the design data surface is calculated, and the center of gravity 101 is projected onto the design data surface 100 in the normal direction of the design data surface 100. Is calculated. Then, a line segment 104 connecting an arbitrary corner portion 103 of the design data surface 100 and the projection center of gravity 102 is calculated. In this example, the corner portion where the entrance side side 61a and the outer body side side 61c of the guide vane 60 are adjacent to each other is selected. Further, as shown in FIG. 7B, the center of gravity 111 of the measurement data surface 110 is calculated, and the projected center of gravity 112 obtained by projecting the center of gravity 111 onto the measurement data surface 110 in the normal direction of the measurement data surface 110 is calculated. Then, the line segment 114 connecting the corner portion of the measurement data surface 110 (corresponding to the corner portion selected in the design data) and the projection center of gravity 112 is calculated. Then, as shown in FIG. 7 (c), the design data surface 100 and / or the measurement data surface 110 is moved so that the projected center of gravity 102 of the design data surface 100 and the projected center of gravity 112 of the measurement data surface 110 coincide with each other. , The design data surface 100 and the measurement data surface 110 are aligned. Further, the design data surface 100 and / or the measurement data surface 110 is rotated so that the line segment 104 of the design data surface 100 and the line segment 114 of the measurement data surface 110 coincide with each other to adjust the posture. Further, when it is necessary to increase the matching area of each surface, the measurement data surface 110 and / or the design data surface 100 is slightly moved in the longitudinal direction and / or the width direction to move the matching area of each surface. increase. Alternatively or in addition to this, the measurement data surface 110 and / or the design data surface 100 may be rotated around the line segments 104 and 114 to increase the matching area of each surface. .. When R is provided at the corner portion, the intersection point obtained by extending the straight line portion of each adjacent side may be used as the coordinates of the corner portion.

In order to compare and inspect the design data (CAD data) and the measurement data, it is necessary to match the position and orientation of both data in advance. The conventional comparative inspection software responsible for this has a problem that it is difficult to process unless the measurement data has a three-dimensional shape of a polyhedron. Therefore, in some cases, it is necessary to measure the object to be measured several times from different directions, acquire the shape data of the polyhedron, and then integrate the plurality of measurement data. On the other hand, in the present embodiment, by limiting the object to be measured to a plate-shaped member having the same thickness, as described above, the pressure surface 61 as a single surface is measured without measuring the side surface 63 of the guide vane 60. The position and orientation of the data and the design data can be adjusted. As a result, the inspection time is shortened.

In FIG. 3B, the comparison processing unit 55 compares the measurement data (point data) after the position and orientation alignment processing with the design data, and calculates an error from the design data of each point data. Further, the comparison processing unit 55 classifies the error into an error category. The error is a positive value when the measurement data (point data) is larger than the design data, and the error is negative when the measurement data (point data) is smaller than the design data. For example, the error is calculated by subtracting the Z coordinate of the design data from the Z coordinate of the measurement data (point data). As shown in FIG. 9, the error classification is, for example, -5 mm, -4 mm, -3 mm, -2 to +2 mm (tolerance range), +3 mm, +4 mm, +5 mm, and every 1 mm from the tolerance range. It can be set to the defined category. Here, the error classification of 3 mm corresponds to the range in which the error is more than 2 mm and 3 mm or less. The tolerance range and the pitch of the division may be accepted from the operator and the settings may be changed.

The comparison processing unit 55 creates image data of an isoline diagram (contour diagram) as an inspection result and displays it on the display 36. That is, the comparison processing unit 55 displays the image of the measurement data (in this example, the XY projection plane) together with the information (color, shading, characters, numbers, symbols, etc.) for identifying the error classification. FIG. 9 is an example of an isoline diagram showing the inspection results. In the example of FIG. 9, green (G) is assigned to the categories of -2 to +2 mm (tolerance range), and cold colors B1, B2, and B3 are assigned to the categories of -3 mm, -4 mm, and -5 mm, respectively. Warm colors R1, R2, and R3 are assigned to the + 3 mm, + 4 mm, and + 5 mm categories, respectively. As a result, as shown in the isoline diagram of FIG. 9, the measurement data surface can be displayed together with the color corresponding to the error classification. That is, color mapping processing (color-coded high-level drawing) for comparing the measurement data and the design data is performed. According to such contour drawing, as shown in FIG. 9, it is possible to visually recognize what kind of error (positive or negative, magnitude) exists in which region of the measurement data surface, so that the type of defect And its countermeasures can be easily confirmed. For example, in the contour diagram of FIG. 9, in the vicinity of the exit side side 61d, the color R1 and the color R2 exist on the inner body side 61b side and there is a positive error, and the color B3 on the outer body side 61c side. Color B1 is present and there is a negative error. As a result, it can be seen that there is insufficient twist in the vicinity of the exit side 61d. Further, in the vicinity of the corner where the entrance side side 61a and the inner body side side 61b are adjacent to each other, the colors B3 to B1 are present and there is a negative error. It can be seen that there is excessive bending near this corner. If it is found that there is such a defect, it is easy to correct the shape of the guide vane thereafter. The information indicating the error classification is not limited to the color, but may be a shade (gradation), or may be a character, a number, a symbol, or the like.

In FIG. 3B, the inspection result unit 56 stores the data of the isolines as an inspection result in the memory 35 (FIG. 3C).

FIG. 8 is a flowchart of measurement and comparative inspection. In this flowchart, the preparation process (S1) and the withdrawal process (S3) for measurement and comparative inspection are included. The process or operation of the measurement and comparative inspection includes a preparation step (S1), a scan (measurement) step (S2), a post-treatment (comparative inspection) step (S3), and a withdrawal step (S3).

In the preparation step of step S1, the work of installing the guide vane as a work in the inspection system is performed (step S11). In this step, the guide vanes 60 are installed on the trolley 70 (FIG. 2A), the posture of the guide vanes 60 is adjusted on the trolley 70 (FIG. 2B), and the trolley 70 is positioned and arranged on the Cartesian robot 10 (FIG. 2B). 2C). The time required for this work is about 3 minutes. The working time indicates the working time by the work of a beginner. The same applies hereinafter.

Specifically, in the measurement step (S2) and the comparative inspection step (S3), the processes of steps S21 to S24 are executed. In step S21, CAD data as design data is input to the PC 31 (design data input unit 51 in FIG. 3B). The operation of the software by the operator is as follows, for example. The operator selects the menu button [CAD file] on the display 36 of the PC 31, and selects the design data (IGES format) file to be compared and inspected from the [Open file] dialog. The file name of the design data of the selected part is displayed in the graphic area of the software (for example, CAD file name: "" serial number "_" machine name "" format). The time required for this work is 0.5. It's about a minute.

In step S22, the measuring device 2 gives an execution instruction to scan (measure) the shape of the pressure surface 61 of the guide vane 60 (measurement execution unit 52 in FIG. 3B). The operator selects, for example, the menu button [Measurement] on the display 36 of the PC31. In addition, set the maximum and minimum values of the color coding of the isolines (contour diagram) in the [Contour diagram color setting] dialog as appropriate. You can also set a design tolerance value that fills with green. After that, select the menu button [Start]. The time required for this work is about 0.5 minutes.

In step S23, the measuring instrument 2 scans the shape of the pressure surface 61 of the guide vane 60, and after appropriately performing predetermined processing (thinning processing, position and orientation matching processing) on the measured data, An error between the measurement data and the design data is calculated (measurement data processing unit 53, position / orientation adjustment unit 54 in FIG. 3B). Further, in step S23, an isoline diagram (contour diagram) is created based on the error information and displayed on the screen of the display 36 (comparison processing unit 55 in FIG. 3B, FIG. 9). The time required for this process is about 1 minute. After the instruction to execute the scan in step S22, the creation and display of the isolines are automatically performed, and the operation by the operator in step S23 is not necessary. When the operator drags the crosshairs when displaying the crosshairs on the isolines and checking the inspection results, the X and Y coordinate values (from the origin) of the positions are displayed, which is the main. The amount of deviation (error) from the design value of the point may also be displayed on the screen.

In step S24, the isoline map data is recorded in the memory 35 as the inspection result. When the operator selects the menu button [Record], a confirmation dialog for the file name is displayed. Check the contents and press the [Register] button. Confirmation of the file name may be omitted. The time required for this work is about 0.5 minutes.

In the withdrawal step of step S3, the trolley 70 on which the measurement object (guide vane 60) is placed is carried out from the orthogonal robot 10 (step S31). The time required for this work is about 1 minute.

From the above, the work time required for measurement and comparative inspection is about 6.5 minutes including the preparation and withdrawal steps. According to this embodiment, the work time required for measurement and comparative inspection can be significantly shortened. Further, as will be described later in the comparative example, the gloss prevention process, the marker affixing process, and the like on the measurement object are unnecessary, and the labor and time required for the preparation and withdrawal work by the operator are shortened. Also, the operation of the software is simple.

FIG. 10 is a flowchart of measurement and comparative inspection according to a comparative example. As a comparative example, CREAFOM's HANDYSCAN 3D as a scanner, VxScan attached to the scanner as measurement software, and 3D SYSTEMS's Geo as comparative inspection software.
Magic Life was used. In the comparative example, a gloss prevention step (S51), a marker sticking step (S52), and a work installation step (S53) are required as the preparation steps. These steps are performed manually by a worker, and each step requires 3 minutes, 15 minutes, and 2 minutes for a total of 20 minutes. The anti-gloss treatment is a treatment necessary for reducing the influence of the gloss on the surface of the object to be measured. The sensor (laser profile measuring device) used in the inspection system of the present embodiment described above has a characteristic that the effect of gloss on the object to be measured is small, and the work of preventing gloss and wiping the work is not required. The marker is an item that determines the distance and posture to the object to be measured. The inspection system 1 of the present embodiment described above is unnecessary because the position information of the orthogonal robot can be used. The work of attaching the marker and removing the marker becomes unnecessary.

In the scan step S2, a scan setting preparation operation (S61), a marker scan (S62), a surface scan (S63), and a meshing process (S64) are executed. The scan setting preparation operation (S61) and the marker scan (S62) are processes for determining the distance and posture to the object to be measured by the marker, and the operator needs to check the screen of the PC while performing the time and effort. It takes. Further, in the surface scan (S63), in the case of a plate-shaped thin measurement object, the surface of the peripheral end of the measurement object is also carefully captured, so that the amount of measurement data is large. Therefore, the meshing process (S64) also takes time. The total time required for the scanning step S2 is about 30 minutes.

In the post-processing step S3, CAD data input (S71), mesh data input (S72), mesh data unnecessary data deletion (S73), CAD and mesh data alignment (S74), total deviation analysis (S75), and report generation (S75). S76) is executed. Since the measurement software and the comparison software are different software, it is necessary to transfer mesh data between the software by the operation of the operator, which requires time and effort. In addition, other processes also require complicated operations for the operator and are time-consuming. The total time required for the post-treatment step S3 is about 10 minutes. The total time required for the measurement and inspection processing of the above comparative examples is 74 minutes. The time required for the measurement and the inspection process by the inspection system of the present embodiment described above was 6.5 minutes, and it can be seen that the time was significantly shortened as compared with the case of the comparative example. In the measurement and inspection processing by the inspection system of the present embodiment, the operations required for the operator are selection of design data data, instruction of measurement execution, instruction of display of isolines, and the like, and the operation is extremely easy.

According to the above-mentioned inspection system according to the present embodiment, by specializing in the measurement and evaluation of a single member (for example, a bent plate) of a welded structure, the measurement and inspection processing can be performed as compared with a general-purpose three-dimensional structure. The time required can be significantly reduced. In addition, a series of work can be completed with a simple operation. The inspection system according to this embodiment has the following features.
(1) Sufficient comparative inspection accuracy was achieved by measuring only a single surface (curved surface) on the premise that the object to be measured is a plate-shaped member of equal thickness and there is almost no change in plate thickness after molding. In the above example, it is limited to the pressure surface of the guide vane. It should be noted that only the negative pressure surface of the guide vane may be measured.
(2) Since the dimensional tolerances of the members of the welded structure are relatively loose, the amount of data to be processed has been reduced by significantly thinning out the point cloud data acquired by measurement (measurement data processing unit 53 in FIG. 3B).
(3) By narrowing down the objects to be measured and aligning the positions and orientations of the measurement data and design data using a unique method, the processing before the comparative inspection processing was automated and the processing speed was increased (position and orientation in FIG. 3B). Adjustment unit 54). That is, the position and orientation of the measurement data and the design data can be automatically and with sufficient accuracy without the intervention of an operator's operation.

At least the following embodiments can be grasped from the above embodiments.

According to the first aspect, an inspection device for inspecting a plate-shaped member is provided. This inspection device has a measurement execution unit that causes a three-dimensional measuring machine to measure the shape of one of the plurality of surfaces of the plate-shaped member, and the measuring machine that collects point data of the measured one curved surface. The data acquisition unit acquired from the above, the comparison processing unit that compares the point data with the design data of the plate-shaped member, and calculates the error of the point data from the design data, and inspects the information regarding the calculated error. An inspection device including an inspection result output unit that outputs as a result.
To prepare for.

According to the first embodiment, by limiting the measurement target to the plate-shaped member and limiting the measurement point to one curved surface, the time required for the measurement process and the load and time required for the comparison process between the point data and the design data can be reduced. It can be significantly reduced. Focusing on the fact that if the plate-shaped member has the same thickness, it is possible to determine with sufficient accuracy whether or not the plate-shaped member has the shape as designed by measuring the shape of one curved surface. ..

According to the second embodiment, the inspection device of the first embodiment further includes a measurement data processing unit that applies the thinning process to the point data, and in the thinning process, the point data after the thinning process is connected by a line segment. The interval of the point data after the thinning process is set so that the error between the contour and the contour connecting all the point data acquired by the data acquisition unit with a line segment is equal to or less than the effective accuracy value of the measuring instrument. Has been done.

According to the second embodiment, by executing the thinning process on the measured point data, the load and time required for the comparison process can be further reduced. In addition, by making the error of the contour consisting of the point data after the thinning process less than the effective accuracy of the measuring instrument, the load and time required for the comparison process between the point data and the design data while ensuring the accuracy of the inspection. Can be significantly reduced.

According to the third aspect, in the inspection device of the first or second form, the inspection device aligns and postures the measurement data surface composed of the point data and the design data surface based on the design data. Further equipped with a part. The point data may be either the point data before or after the thinning process.

According to the third embodiment, the measured point data and the design data are aligned with each other in position and orientation, and then the two are compared. Therefore, the accuracy of the comparison processing result can be improved.

According to the fourth aspect, in the inspection device of the third aspect, when the plate-shaped member has a corner portion, the measured curved surface has the corner portion, and the position / posture adjusting portion is the measurement data surface and the measurement data surface. The center of gravity of the design data surface is aligned so that the projected centers of gravity projected in the normal direction of each surface coincide with each other, and the line segments connecting the projected center of gravity of each surface and the corners of each surface are mutually aligned. Adjust the posture so that they match.

According to the fourth embodiment, the position is aligned by the projected center of gravity, and the posture is aligned by the line segment connecting the projected center of gravity and one corner, so that one curved surface does not require measurement of the surface (side surface, etc.) of the peripheral end. It is possible to accurately align and align the measurement data of the above with the design data. Thereby, the accuracy of the comparison processing result can be improved.

According to the fifth aspect, in the inspection device of the fourth aspect, the position / attitude adjusting unit further moves the measurement data surface along the longitudinal direction and / or the width direction, and / or the said. By rotating the measurement data surface around the line segment, the matching area between the measurement data surface and the design data surface is increased.

According to the fifth embodiment, for example, when it is desired to further increase the matching area of the surface as a result of the position and orientation alignment by the projection center of gravity and the line segment between the projection center of gravity and one corner, the longitudinal direction and / Alternatively, by moving in the width direction and / or rotating around the line segment, the matching area of the surface can be further increased. Thereby, the accuracy of the comparison processing result can be improved.

According to the sixth embodiment, the inspection device according to any one of the first to fifth embodiments further includes an error classification unit that classifies the error of the point data into one of a plurality of error categories, and further includes the point data and the error classification unit. It further includes a contour map creation unit that generates a contour map based on the error classification corresponding to each point data.

According to the sixth embodiment, since the inspection result is displayed as an isoline diagram, it is possible to visually recognize the region where a positive or negative error exists. This makes it possible to easily grasp defects such as excessive twisting or insufficient twisting of the plate-shaped member, excessive bending or insufficient bending, excessive warpage or insufficient warpage, and the shape of the object to be measured can be corrected by additional molding. It will be easier.

According to the seventh aspect, in the inspection apparatus of the first to sixth forms, the plate-shaped member is a plate-shaped member having the same thickness. Since the measurement target is a plate-shaped member having the same thickness, it is possible to determine with high accuracy whether or not the plate-shaped member is appropriately formed based on the design by measuring the shape of one surface.

According to the eighth aspect, in the inspection apparatus of the seventh aspect, the inspection object is a guide vane of a pump. Since the guide vane of the pump has a relatively loose manufacturing tolerance, the accuracy of inspection can be sufficiently ensured even if the shape of one surface is measured and the measured point data is thinned out. As a result, the inspection of the guide vane within the necessary and sufficient range can be performed quickly and easily.

According to the ninth aspect, an inspection system including the measuring instrument and the inspection device according to any one of the first to eighth embodiments is provided. According to this inspection system, the above-mentioned effects are exhibited in the first to eighth forms.

According to the tenth aspect, in the inspection system of the ninth aspect, the measuring instrument has a two-dimensional orthogonal robot and an optical sensor attached to the orthogonal robot. In this case, since the optical sensor is moved to measure the object to be measured, it is not necessary to attach a marker for determining the distance and posture to the object to be measured to the object to be measured. The labor and time required can be reduced.

According to the eleventh embodiment, a non-volatile storage medium in which a program for causing a computer to execute a method for inspecting a plate-shaped member is stored is provided. This program causes a three-dimensional measuring instrument to measure the shape of a curved surface of one of a plurality of surfaces of the plate-shaped member, acquires the measured point data of the one curved surface from the measuring instrument, and obtains the measured point data. The computer is made to compare the point data with the design data of the plate-shaped member, calculate the error of the point data from the design data, and output the information regarding the calculated error as the inspection result. According to the eleventh form, the operation and effect of the first form can be realized by software.

According to the twelfth embodiment, a method for inspecting a plate-shaped member by a computer is provided. In this method, a three-dimensional measuring instrument is made to measure the shape of a curved surface of one of a plurality of surfaces of the plate-shaped member, and the measured point data of the one curved surface is acquired from the measuring instrument. It includes comparing the point data with the design data of the plate-shaped member, calculating an error of the point data from the design data, and outputting information on the calculated error as an inspection result. According to the twelfth form, the same action and effect as those of the first form are obtained.

Although the embodiments of the present invention have been described above based on some examples, the above-described embodiments of the present invention are for facilitating the understanding of the present invention and do not limit the present invention. .. The present invention can be modified and improved without departing from the spirit thereof, and it goes without saying that the present invention includes an equivalent thereof. For example, the shape of the large substrate is not limited to a rectangle, and may be a square, or may be another polygonal shape, for example, a pentagon or a hexagon. Of course, the present invention can also be applied to a plating apparatus for processing a circular substrate. In addition, any combination or omission of the claims and the components described in the specification is possible within the range in which at least a part of the above-mentioned problems can be solved, or in the range in which at least a part of the effect is exhibited. Is.

1 Inspection system 2 Measuring machine 3 Control device 10 Cartesian robot 11 X-axis slider 12 Y-axis slider 15a to 15c Stopper 20 Sensor 31 PC
32 Robot control device 33 Sensor control device 34 CPU
35 Memory 36 Display 51 CAD data input unit 52 Measurement execution unit 53 Measurement data processing unit 54 Position / orientation adjustment unit 55 Comparison processing unit (equal height map creation unit)
56 Inspection result recording unit 60 Work (measurement target)
61 Pressure surface 62 Negative pressure surface 63 Side surface 70 Cart 71 Stand plate 72a to 72c Positioning bolt 81 Surface (surface) of the object to be measured
82, 83 Line segment 84 Thinning pitch 85 Thinning error 86 Tangent 91 Line segment 92 Plane 93 Intersection line 94 Arc 100 CAD data 101 Center of gravity 102 Projected center of gravity 103 Angle 110 Measurement data 111 Center of gravity 112 Projected center of gravity 113 Angle

Claims (14)

An inspection device that inspects plate-shaped members.
A measurement execution unit that causes a three-dimensional measuring machine to measure the shape of one of the plurality of surfaces of the plate-shaped member.
A data acquisition unit that acquires the measured point data of the one curved surface from the measuring instrument, and
A comparison processing unit that compares the point data with the design data of the plate-shaped member and calculates an error of the point data from the design data.
An inspection result output unit that outputs information on the calculated error as an inspection result,
Equipped with
The inspection device further includes a measurement data processing unit that applies thinning processing to the point data.
In the thinning process, the error between the contour connecting the point data after the thinning process with a line segment and the contour connecting all the point data acquired by the data acquisition unit with a line segment is the effective accuracy of the measuring instrument. The interval of the point data after the thinning process is set so as to be less than or equal to the value.
Inspection equipment. An inspection device that inspects plate-shaped members.
A measurement execution unit that causes a three-dimensional measuring machine to measure the shape of one of the plurality of surfaces of the plate-shaped member.
A data acquisition unit that acquires the measured point data of the one curved surface from the measuring instrument, and
A comparison processing unit that compares the point data with the design data of the plate-shaped member and calculates an error of the point data from the design data.
An inspection result output unit that outputs information on the calculated error as an inspection result,
Equipped with
The inspection device further includes a position / posture adjusting unit that aligns and postures the measurement data surface composed of the point data and the design data surface based on the design data.
When the plate-shaped member has corners, the measured curved surface has corners.
The position / attitude adjusting unit aligns the center of gravity of the measurement data surface and the design data surface so that the projected centers of gravity projected in the normal direction of each surface coincide with each other, and the projected center of gravity of each surface and each surface are aligned. The posture is adjusted so that the normals connecting the corners of the above are aligned with each other.
Inspection equipment. In the inspection device according to claim 1,
The inspection device further includes a position / posture adjusting unit that aligns and postures the measurement data surface composed of the point data and the design data surface based on the design data.
Inspection equipment. In the inspection device according to claim 3,
When the plate-shaped member has corners, the measured curved surface has corners.
The position / attitude adjusting unit aligns the center of gravity of the measurement data surface and the design data surface so that the projected centers of gravity projected in the normal direction of each surface coincide with each other, and the projected center of gravity of each surface and each surface are aligned. An inspection device that adjusts the posture so that the line segments connecting to the corners of the above are aligned with each other. In the inspection device according to claim 2 or 4.
The position / orientation adjusting unit further moves the measurement data surface along the longitudinal direction and / or the width direction, and / or rotates the measurement data surface around the line segment. An inspection device that increases the matching area between the measurement data surface and the design data surface. In the inspection device according to any one of claims 1 to 5.
Further provided with an error classification unit that classifies the error of the point data into one of a plurality of error categories.
An isoline map creation unit that generates an isoline map based on the point data and the error classification corresponding to each point data,
Inspection device further equipped with. In the inspection device according to any one of claims 1 to 6.
The plate-shaped member is an inspection device which is a plate-shaped member having an equal thickness. In the inspection device according to claim 7,
The plate-shaped member is an inspection device that is a guide vane of a pump. With the measuring instrument
The inspection device according to any one of claims 1 to 8.
Equipped with an inspection system. In the inspection system according to claim 9,
The measuring instrument is an inspection system including a two-dimensional Cartesian robot and an optical sensor attached to the Cartesian robot. A non-volatile storage medium in which a program for causing a computer to execute a method for inspecting a plate-shaped member is stored.
A three-dimensional measuring machine is made to measure the shape of a curved surface of one of the plurality of surfaces of the plate-shaped member.
The point data of the one curved surface measured is acquired from the measuring instrument, and the point data is obtained.
A thinning process on the point data, and the contour of connecting the points data after the thinning process in line, before the error between the contour connected by line segments all points data Quito obtained, the measuring instrument The thinning process, in which the interval of the point data after the thinning process is set so as to be equal to or less than the effective accuracy value, is applied to the point data.
The point data is compared with the design data of the plate-shaped member, and the error of the point data from the design data is calculated.
A storage medium in which a program for causing a computer to output information on the calculated error as an inspection result is stored. A non-volatile storage medium in which a program for causing a computer to execute a method for inspecting a plate-shaped member is stored.
A three-dimensional measuring machine is made to measure the shape of a curved surface of one of a plurality of surfaces of a plate-shaped member having corners.
The point data of the one curved surface measured is acquired from the measuring instrument, and the point data is obtained.
The center of gravity of the measurement data surface consisting of the point data and the design data surface based on the design data of the plate-shaped member are aligned in the normal direction of each surface so that the center of gravity of each projection coincides with each other, and the projection of each surface is performed. Adjust the posture so that the normals connecting the center of gravity and the corners of each surface coincide with each other.
The point data is compared with the design data of the plate-shaped member, and an error of the point data from the design data is calculated.
A storage medium in which a program for causing a computer to output information on the calculated error as an inspection result is stored. It is a method of inspecting plate-shaped members with a computer.
A three-dimensional measuring machine is made to measure the shape of a curved surface of one of the plurality of surfaces of the plate-shaped member.
The point data of the one curved surface measured is acquired from the measuring instrument, and the point data is obtained.
A thinning process on the point data, and the contour of connecting the points data after the thinning process in line, before the error between the contour connected by line segments all points data Quito obtained, the measuring instrument The thinning process, in which the interval of the point data after the thinning process is set so as to be equal to or less than the effective accuracy value, is applied to the point data.
The point data is compared with the design data of the plate-shaped member, and the error of the point data from the design data is calculated.
To output the information about the calculated error as an inspection result,
How to include. It is a method of inspecting plate-shaped members with a computer.
A three-dimensional measuring machine is made to measure the shape of a curved surface of one of a plurality of surfaces of a plate-shaped member having corners.
The point data of the one curved surface measured is acquired from the measuring instrument, and the point data is obtained.
The center of gravity of the measurement data surface consisting of the point data and the design data surface based on the design data of the plate-shaped member are aligned in the normal direction of each surface so that the center of gravity of each projection coincides with each other, and the projection of each surface is performed. Adjust the posture so that the normals connecting the center of gravity and the corners of each surface coincide with each other.
The point data is compared with the design data of the plate-shaped member, and the error of the point data from the design data is calculated.
To output the information about the calculated error as an inspection result,
How to include.

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