JP6969625B2 - Glass plate cutting method and its cutting device - Google Patents

Description

The present invention relates to a method for cutting a glass plate and a cutting device thereof.

The disk-shaped glass is used in various fields as a support member for a semiconductor wafer in a semiconductor wafer manufacturing process.

Disc-shaped glass is generally manufactured by cutting out from a glass plate as a base material. Examples of the method for cutting the glass plate as the base material include the method disclosed in Patent Document 1. In the cutting method disclosed in Patent Document 1, after forming a scribe line along a circumferential line on one main surface of a glass plate, the outer portion is formed with a heater in contact with the other main surface of the outer portion of the scribe line. By heating and expanding, cracks are extended from the scribe wire in the thickness direction, and the outer portion and the inner portion of the scribe wire are separated. According to such a cutting method, the cut end surface constituting the outer peripheral surface of the disk-shaped glass composed of the inner portion has a split cross section, and has an advantage that it becomes a smooth surface with fewer defects than when mechanically cut with a cutter or the like. be.

Japanese Unexamined Patent Publication No. 2011-14423

However, as disclosed in Patent Document 1, when cracks are extended from the scribe wire only by heating and expanding the outer portion of the scribe wire, the cracks do not extend from the scribe wire in the thickness direction, or the amount of crack elongation is not sufficient. Sometimes it is not enough to separate the inner and outer parts of the scribe line. As a result, there is a problem that cutting defects are likely to occur and productivity is deteriorated. Such a tendency becomes particularly remarkable when the diameter of the disk-shaped glass is large or when the thickness of the glass plate is large.

It should be noted that the same applies not only when the disk-shaped glass is cut out from the glass plate which is the base material, but also when the glass plate having a closed curved shape (for example, an ellipse) other than the circle is cut out from the glass plate which is the base material. Problems can occur.

It is a technical subject of the present invention to surely extend a crack from a scribe wire in order to cut out an inner portion of the scribe wire from a glass plate having a closed curved scribe wire formed on one main surface.

The present invention, which was devised to solve the above problems, comprises a glass plate having a closed curved scribe line formed on the first main surface among the first main surface and the second main surface facing in the thickness direction. It is a method of cutting a glass plate that cuts into an inner part and an outer part with a scribe line as a boundary. In a state where the first main surface and the second main surface are sandwiched by a pair of sandwiching portions of the bending means, only the sandwiching portion of the supporting means and the sandwiching portion is tilted to make a part of the outer portion first. It is characterized in that a bending process of bending so that the main surface side becomes convex and extending a crack from a part of the scribe line is performed at a plurality of places along the scribe line.

In the above configuration, the bending means bends a part of the outer portion by turning and tilting the sandwiching portion around the intersection of the virtual straight line downward from the scribe line in the thickness direction and the second main surface. Is preferable.

In the above configuration, it is preferable that the supporting means adsorbs and holds the second main surface of the inner portion.

In the above configuration, the scribe line is preferably formed in a circular, oval, elliptical, or polygonal closed curve in plan view.

In the above configuration, the bending steps at a plurality of locations may be sequentially performed at each location.

In the above configuration, the support means includes a rotary table that supports the second main surface and rotates the glass plate, and by repeating the procedure of rotating the rotary table after the bending step, the bending step at a plurality of locations can be performed. It is preferable to perform this in order from place to place.

In the above configuration, a part of the outer portion sandwiched by the pair of sandwiching portions in the second and subsequent bending steps overlaps with a part of the crack forming range in the previous bending process, or the crack forming range. It is preferable to be in close proximity to.

In the above configuration, it is preferable that the bending speed by the folding means in the first bending step is lower than the bending speed by the folding means in the second and subsequent bending steps.

In the above configuration, of the pair of pinching portions, the pinching portion in contact with the second main surface is located at the position where the virtual straight line descended from the scribe line in the thickness direction and the intersection of the second main surface are in contact with each other, or is separated outward from the intersection. It is preferable to make contact with the second main surface at a vertical position.

The present invention, which was devised to solve the above problems, comprises a glass plate having a closed curved scribe line formed on the first main surface among the first main surface and the second main surface facing in the thickness direction. A glass plate cutting device that cuts into an inner part and an outer part with a scribe line as a boundary. It is provided with a bending means having a pair of holding portions for sandwiching one main surface and a second main surface, and by tilting only the sandwiching portion among the supporting means and the sandwiching portion at a plurality of locations along the scribe line. It is characterized in that a part of the outer portion is bent so as to be convex on the first main surface side.

According to the present invention, in order to cut out the inner portion of the scribe wire from the glass plate having the closed curved scribe wire formed on one main surface, the crack can be reliably extended from the scribe wire. In particular, the effect of the present invention becomes more remarkable on a glass plate having a thickness of 0.7 mm to 50 mm and a diameter of 50 mm to 500 mm.

It is sectional drawing which shows the scribe device which forms a scribe line on a glass plate. It is a top view which shows the glass plate in which the scribe line was formed. It is a side view which shows the folding apparatus which bends a glass plate (retraction position). It is a side view which shows the folding apparatus which bends a glass plate (working position). It is sectional drawing for demonstrating the folding process by a folding apparatus. It is sectional drawing for demonstrating the folding process by a folding apparatus. It is sectional drawing which shows the state of a glass plate after a bending process. (A) It is a plan view for demonstrating the first folding process by a folding apparatus, and (b) is a plan view for demonstrating the second folding process by a folding apparatus. It is sectional drawing which shows the heating device which heats a glass plate.

Hereinafter, an embodiment of a glass plate cutting device and a cutting method thereof according to the present invention will be described.

The glass plate cutting device according to the present embodiment includes a scribe device for forming a scribe wire on the glass plate, a bending device for bending the glass plate, and a heating device for heating the glass plate. Further, the method for cutting a glass plate according to the present embodiment includes, in order, a scribing step of forming a scribing wire on the glass plate, a bending step of bending the glass plate, and a heating step of heating the glass plate. Hereinafter, the configurations of each device and each process will be described in order.

(Scribing device and scribe process)
As shown in FIG. 1, the scribe device 1 includes a tool 2 for forming a scribe line S on a first main surface G1 of a glass plate G as a base material, and a flat surface portion for supporting a second main surface G2 of the glass plate G. It is provided with a rotary table 3 having 3a. Here, the first main surface G1 and the second main surface G2 face each other in the thickness direction of the glass plate G. In this embodiment, the first main surface G1 is the upper surface and the second main surface G2 is the lower surface.

The tool 2 holds a carbide tip such as a diamond tip at its tip. The tool 2 is not limited to the carbide tip. For example, it may be a cutter wheel (carbide wheel), or it may be one that forms a scribe line S by laser irradiation.

The flat surface portion 3a of the rotary table 3 supports the glass plate G in a horizontal posture. The flat surface portion 3a of the rotary table 3 is larger than the glass plate G and sucks and holds the entire surface of the second main surface G2 by negative pressure. The size and support mode of the flat surface portion 3a are not limited to this.

In the scribe step by the scribe device 1 configured as described above, the glass plate G is rotated together with the rotary table 3 in a state where the tip portion of the tool 2 is pressed against the first main surface G1. As a result, as shown in FIG. 2, a circular scribe line S is formed on the first main surface G1. The glass plate G is divided into an inner portion Ga which becomes a disk-shaped glass and an outer portion Gb other than the scribe line S as a boundary. The scribe line S is not limited to a circular shape. For example, it may be another closed curve such as an oval, an ellipse or a polygon.

(Bending device and folding process)
As shown in FIGS. 3 and 4, the folding device 4 includes a rotary table (corresponding to a supporting means) 5 having a flat surface portion 5a that supports the inner portion Ga of the glass plate G, and an outer portion Gb of the glass plate G. It is provided with a folding mechanism (corresponding to the folding means) 6 for bending and a pressing mechanism (corresponding to the pressing means) 7 for pressing the first main surface G1 of the outer portion Gb toward the flat surface portion 5a of the rotary table 5.

The flat surface portion 5a of the rotary table 5 supports the glass plate G in a horizontal posture. The flat surface portion 5a of the rotary table 5 is smaller than the glass plate G, and sucks and holds the inner portion Ga of the scribe line S of the glass plate G by negative pressure. The outer portion Gb of the scribe line S of the glass plate G is in a state of protruding to the outside of the flat surface portion 5a of the rotary table 5. Each time the bending process is completed at one place, the rotary table 5 is rotated by a predetermined angle to change the place where the bending process is performed in order. The rotation angle of the rotary table 5 is adjustable. The support mode of the flat surface portion 5a is not limited to suction holding.

The folding mechanism 6 includes a head unit 8, a first drive unit 9, and a second drive unit 10.

The head portion 8 is a pair of sandwiching portions that sandwich the first main surface G1 and the second main surface G2 of a partial region X (see FIG. 8) along the scribe line S of the outer portion Gb of the glass plate G from both sides. It includes 11, 12, a pair of third drive portions 13, 14 that support the respective sandwiching portions 11, 12, and a base portion 15 that supports the third drive portions 13, 14, respectively. The sandwiching portions 11 and 12 open and close by driving the third driving portions 13 and 14. The third drive units 13 and 14 are, for example, piston type air cylinders. The distance between the pinching position of the pinching portions 11 and 12 and the scribe line S can be adjusted by changing the mounting position itself of the pinching portions 11 and 12.

The first drive unit 9 is, for example, a slider type electric cylinder, and includes a slider 16. The slider 16 horizontally moves between the retracted position S1 (position in FIG. 3) and the working position S2 (position in FIG. 4). The horizontal positions of the retracted position S1 and the working position S2 can be adjusted by the first drive unit 9.

The base end portion of the second drive unit 10 is pivotally supported by the slider 16 by a pin 17, and the second drive unit 10 can swing around the pin 17.

The second drive unit 10 is, for example, a piston type electric cylinder, and includes a piston rod 18. The tip portion 18a of the piston rod 18 is supported by the guide rail 19 and is movable along the guide rail 19. A base portion 15 is fixed to the tip portion 18a of the piston rod 18. As shown in FIG. 4, when the second drive portion 10 is driven at the working position S2 to move the tip portion 18a of the piston rod 18 along the guide rail 19, the base portion 15 tilts. At this time, the holding portions 11 and 12 attached to the base portion 15 via the third drive portions 13 and 14 move with the tilting operation of the base portion 15 and bend a part region X of the outer portion Gb. The bending angle of the partial region X of the outer portion Gb by the sandwiching portions 11 and 12 can be adjusted by the second driving portion 10. The bending angle adjustment range is, for example, 0 ° to 90 °. Here, 0 ° is the horizontal direction and 90 ° is the vertical direction.

As shown in FIGS. 4 and 5, the guide rail 19 is an arc-shaped member. The center line of the guide rail 19 is a circle of a virtual circle having a radius R centered on the intersection P of the virtual straight line Ls drawn in the thickness direction (vertical direction) from the scrib line S and the second main surface G2 at the working position S2. It coincides with the peripheral line Lc. When the second drive portion 10 is driven at the working position S2 to move the tip portion 18a of the piston rod 18 along the guide rail 19, the base portion 15 tilts while rotating around the intersection P. Along with this tilting motion, the holding portion 12 in contact with the second main surface G2 of the outer portion Gb moves on the circumference of a virtual circle having a radius smaller than the radius R centered on the intersection P, and the outer portion Gb The holding portion 11 in contact with the first main surface G1 of the above follows the movement of the holding portion 12. Due to the movement of the sandwiching portions 11 and 12, a partial region X of the outer portion Gb is bent along a virtual circle centered on the intersection P.

Here, the guide rail 19 is fixed to the slider 16 of the first drive unit 9. When the first drive unit 9 is driven to move the slider 16 horizontally, the head unit 8, the second drive unit 10, and the guide rail 19 are integrally moved between the retracted position S1 and the working position S2.

The presser mechanism 7 includes a presser portion 20 and a fourth drive portion 21 that supports the presser portion 20. By driving the fourth drive unit 21, the pressing unit 20 moves up and down with respect to the first main surface G1 of the inner portion Ga. The fourth drive unit 21 is, for example, a piston type air cylinder. The pressing mechanism 7 moves between the retracted position S1 and the working position S2 together with the head portion 8 of the bending mechanism 6 by driving the first driving portion 9. The distance between the pressing position of the pressing portion 20 and the scribe line S can be adjusted by changing the mounting position of the pressing portion 20 itself. The presser mechanism 7 may be driven by a drive unit different from that of the first drive unit 9. Further, the presser mechanism 7 may be omitted.

As shown in FIG. 5, the contact portion 20a of the pressing portion 20 in contact with the first main surface G1 of the inner portion Ga is formed of an elastic body such as rubber. Similarly, the contact portion 11a of the holding portion 11 in contact with the first main surface G1 of the outer portion Gb and the contact portion 12a of the holding portion 12 in contact with the second main surface G2 of the outer portion Gb are also elastic bodies such as rubber. Is formed of. The contact portions 20a of the pressing portion 20 and the contact portions 11a and 12a of the holding portions 11 and 12 are arc-shaped members along the scribe line S. The contact portion 20a of the pressing portion 20 is longer in the direction (circumferential direction) along the scribe line S than the contact portions 11a and 12a of the holding portions 11 and 12 (FIGS. 8A and 8B). See). The shape and length of the contact portions 20a of the pressing portion 20 and the contact portions 11a and 12a of the holding portions 11 and 12 are not particularly limited as long as the outer portion Gb can be accurately bent.

The inner end surface 12b of the sandwiching portion 12 is an inclined surface that shifts outward as it moves downward from the second main surface G2. This prevents the inner end surface 12b of the holding portion 12 from coming into contact with the outer end surface 5b of the rotary table 5 when the outer portion Gb is bent. Instead of using the inner end surface 12b of the sandwiching portion 12 as an inclined surface, the outer end surface 5b of the rotary table 5 may be used as an inclined surface that shifts inward as it moves downward from the second main surface G2. The shape of the inner end surface 12b of the holding portion 12 and the outer end surface 5b of the rotary table 5 is not particularly limited as long as it can avoid mutual interference.

The folding process by the folding device 4 configured as described above is as follows.

First, as shown in FIG. 5, the second main surface G2 of the inner portion Ga of the glass plate G is sucked and held by the flat surface portion 5a of the rotary table 5. In this state, the pressing portion 20 presses the first main surface G1 of the inner portion Ga toward the rotary table 5, and the second main surface G2 of the inner portion Ga is brought into close contact with the flat surface portion 5a of the rotary table 5. At the same time, the pair of sandwiching portions 11 and 12 sandwich a part of the outer portion Gb of the glass plate G from both the front and back sides. Before mounting the glass plate G on the rotary table 5, the bending mechanism 6 and the pressing mechanism 7 are retracted to the retracting position S1 as shown in FIG. 3, and the glass plate G is mounted on the rotary table 5. After the placement, as shown in FIG. 4, the bending mechanism 6 and the pressing mechanism 7 are advanced to the working position S2.

When the outer portion Gb of the glass plate G is sandwiched between the pair of sandwiching portions 11 and 12, the contact portion 12a of the sandwiching portion 12 in contact with the second main surface G2 of the outer portion Gb is as shown in an enlarged manner in FIG. , It is preferable to contact the second main surface G2 at a position in contact with the intersection P or a position distant from the intersection P to the outside. The distance between the contact portion 12a and the intersection P is preferably, for example, 0 mm to 50 mm, and more preferably 0 mm to 5 mm.

Next, as shown in FIG. 6, the sandwiching portions 11 and 12 bend a part of the region X of the outer portion Gb along the virtual circle centered on the intersection P to make the first main surface G1 side convex. As a result, the bending stress centered on the scribe line S surely acts, and the crack C is formed in the thickness direction from a part of the scribe line S corresponding to the partial region X of the outer portion Gb sandwiched by the sandwiching portions 11 and 12. Extend along.

After the partial region X of the outer portion Gb is bent by the sandwiching portions 11 and 12, as shown in FIG. 7, the second main surface G2 side of the inner portion Ga and the second main surface G2 side of the outer portion Gb are continuous. It is preferable to leave the non-separable portion Gx. The non-separable portion Gx may be formed over the entire circumference in the direction along the scribe line S, or may be partially formed. The thickness of the non-separable portion Gx is preferably, for example, 0.01 mm to 0.5 mm, more preferably 0.01 mm to 0.1 mm. In the bending step, the crack C may be extended to the second main surface G2 of the glass plate G without leaving the non-separable portion Gx.

When the bending operation is completed, the sandwiching portions 11 and 12 return to their original positions while sandwiching the outer portion Gb, and separate from the first main surface G1 and the second main surface G2. At the same time, the pressing portion 20 of the pressing mechanism 7 also returns to the original position before pressing and separates from the first main surface G1. After that, the rotary table 5 is rotated by a predetermined angle, and the place where the bending process is performed is changed by the holding portions 11 and 12. Then, the above procedure is repeated, and the bending process is sequentially performed at a plurality of points along the scribe line S.

As shown in FIG. 8A, the expansion of cracks in the first bending step occurs in the thickness direction of the glass plate G and in the circumferential direction (arrow A direction) along the scribe line S. The degree of crack extension varies depending on, for example, the glass composition of the glass plate G, the thickness of the glass plate G, the area of the inner portion Ga, and the like.

As shown in FIG. 8B, a part region X of the outer portion Gb sandwiched by the contact portions 11a and 12a of the sandwiching portions 11 and 12 in the second bending step is crack-forming in the first bending step. It is preferable that it overlaps with a part of the range Cx. Such a relationship is the same from the third time onward. That is, the partial region X of the outer portion Gb sandwiched by the contact portions 11a and 12a of the sandwiching portions 11 and 12 in the second and subsequent bending steps overlaps with a part of the crack formation range Cx in the previous bending steps. It is preferable to do. By doing so, the cracks can be reliably continued in the direction along the scribe line S. Note that FIG. 8B exemplifies a state in which the glass plate G is rotated by 90 ° counterclockwise from the state of FIG. 8A, but the rotation angle is not limited to this.

Here, the partial region X of the outer portion Gb sandwiched by the contact portions 11a and 12a of the sandwiching portions 11 and 12 in the second and subsequent bending steps does not overlap with the crack formation range Cx in the previous bending steps. May be in close proximity to. In the case of close proximity, the distance from the crack formation range Cx in the direction along the scribe line S (circumferential direction) is preferably, for example, 0.01 mm to 30 mm, more preferably 0.01 mm to 5 mm. .. Further, after all the bending steps are completed, the crack formation range Cx may have a slight discontinuity in the direction along the scribe line S.

The folding speed of the folding mechanism 6 in the first bending step is preferably lower than the bending speed of the folding mechanism 6 in the second and subsequent bending steps. By doing so, when the bending mechanism 6 is bent, defects such as chipping are less likely to occur on the cut end surface of the inner portion Ga. The bending speed in the first bending step is preferably 0.1 to 0.95 times the bending speed in the second and subsequent bending steps. If it is larger than 0.95 times, the above effect is difficult to obtain, and if it is smaller than 0.1 times, productivity tends to decrease.

(Heating device and heating process)
As shown in FIG. 9, the heating device 22 includes an elevating table 23 having a flat surface portion 23a that supports the second main surface G2 of the inner portion Ga of the glass plate G, and the second main surface of the outer portion Gb of the glass plate G. It is equipped with a heater (corresponding to a heating means) 24 that comes into contact with G2.

In the heating step by the heating device 22 configured as described above, the outer portion Gb is heated and expanded by the heater 24 to separate the non-separable portion Gx of the inner portion Ga and the outer portion Gb. After separating the non-separable portion Gx, the elevating table 23 is raised (or lowered) to extract the inner portion Ga from the outer portion Gb. At this time, due to the thermal expansion of the outer portion Gb, the cut end face (inner end face) Gbx of the outer portion Gb and the cut end face (outer end face) Gax of the inner portion Ga are separated from each other. There is no rubbing. The outer portion Gb may be raised or lowered to extract the inner portion Ga. Further, when the inner portion Ga and the outer portion Gb are completely separated in the bending step, the heating step may be omitted.

The present invention is not limited to the configuration of the above embodiment, and is not limited to the above-mentioned action and effect. The present invention can be modified in various ways without departing from the gist of the present invention.

In the above embodiment, the case where the glass plate G is moved with respect to the tool 2 to form the scribe line S has been described. However, for example, the tool 2 may be moved with respect to the glass plate G, or the tool 2 may be moved. And the glass plate G may be moved.

In the above embodiment, the case where the folding step is sequentially performed at a plurality of locations of the glass plate G by using one folding mechanism 6 has been described. However, for example, the glass plate G is used by using the plurality of bending mechanisms 6. The bending process may be performed in order at a plurality of locations of the above, or may be performed at the same time.

In the above embodiment, the case where the glass plate G is moved with respect to the folding mechanism 6 when the position where the folding step of the glass plate G is performed is changed has been described. The bending mechanism 6 may be moved, or both the bending mechanism 6 and the glass plate G may be moved.

In the above embodiment, the case where the heating step of heating and expanding the outer portion Gb is performed after the bending step has been described, but for example, the cooling step of cooling and shrinking the inner portion Ga may be performed after the bending step. Alternatively, a heating step of heating and expanding the outer portion Gb and a cooling step of cooling and contracting the inner portion Ga may be used in combination.

The present application also includes the following inventions.

In the present invention, of the first main surface and the second main surface facing in the thickness direction, a glass plate having a closed curved scribe line formed on the first main surface is divided into an inner portion and an outer portion with the scribe line as a boundary. It is a method of cutting a glass plate to be cut into a glass plate, in which the second main surface of the inner part is supported by a supporting means, and the first main surface and the second main surface are folded in a part area along the scribe line of the outer part. A folding process in which a part of the outer part is bent so that the first main surface side is convex by the folding means while being sandwiched between a pair of holding portions of the bending means, and a crack is extended from a part of the scribe line. It is characterized by performing at multiple locations along the scribe line. According to such a configuration, a part of the outer portion sandwiched by the folding means is bent, so that even if the area of the inner portion is large or the thickness of the glass plate is large, the scribe line can be formed. Cracks can be reliably extended from a part. Since the bending process by this bending means is performed at a plurality of locations along the scribe line, cracks can be reliably extended on the entire circumference or substantially the entire circumference of the scribe line.

In the above configuration, in the folding process at a plurality of locations, a non-separable portion in which the second main surface side of the inner portion and the second main surface side of the outer portion are continuous is left at least in a part, and the folding is performed at the plurality of locations. After the bending step, it is preferable to perform a heating step of heating and expanding the outer portion and separating the non-separable portion. In this way, in the bending process, the inner part and the outer part remain slightly connected by the non-separable part, so that the inner part largely moves in the thickness direction with respect to the outer part, and the inner part becomes It is possible to prevent a situation in which the cut end face and the cut end face of the outer portion rub against each other. On the other hand, in the heating step, only a small amount of the remaining non-separable portion needs to be separated, so that the inner portion and the outer portion can be reliably separated. Further, in the heating step, since the outer portion is separated from the inner portion due to thermal expansion, the inner portion can be taken out without the cut end face of the inner portion and the cut end face of the outer portion rubbing against each other.

In the above configuration, it is preferable that the bending means bends a part of the outer portion with the intersection of the virtual straight line downward from the scribe line in the thickness direction and the second main surface as a fulcrum. By doing so, an appropriate bending stress can be applied around the scribe line, and cracks are likely to extend in the thickness direction from the scribe line.

In the above configuration, the bending steps at a plurality of locations may be sequentially performed at each location. By doing so, it is possible to perform all the folding processes at a plurality of locations with only one folding means. In this case, the glass plate side may be moved with respect to the bending means at a predetermined position, the folding means side may be moved with respect to the glass plate at a predetermined position, or the folding means and the glass may be moved. Both sides of the board may be moved.

In the above configuration, a part of the outer portion sandwiched by the pair of sandwiching portions in the second and subsequent bending steps overlaps with a part of the crack forming range in the previous bending process, or the crack forming range. It is preferable to be in close proximity to. By doing so, the cracks can be reliably continued in the direction along the scribe line. In particular, this method is suitable when the bending step is performed four or more times.

In the above configuration, it is preferable that the bending speed by the folding means in the first bending step is lower than the bending speed by the folding means in the second and subsequent bending steps. By doing so, defects such as chipping are less likely to occur on the cut end face when bending by the bending means.

In the above configuration, of the pair of pinching portions, the pinching portion in contact with the second main surface is located at the position where the virtual straight line downward from the scribe line in the thickness direction and the intersection of the second main surface are in contact with each other, or outward from the intersection. It is preferable to contact the second main surface at a distant position. By doing so, it is possible to prevent the crack from extending diagonally inward from the scribe line.

In the above configuration, it is preferable that the supporting means has a flat surface portion that attracts and holds the second main surface of the inner portion. By doing so, since the inner portion can be reliably held by the supporting means, it becomes easy to apply bending stress centered on the scribe wire in the bending process.

In the above configuration, it is preferable to press the first main surface of the inner portion toward the support means side by the pressing means in the bending step. By doing so, since the inner portion can be reliably held by the supporting means, it becomes easy to apply bending stress centered on the scribe wire in the bending process.

In the present invention, of the first main surface and the second main surface facing in the thickness direction, a glass plate having a closed curved scribe line formed on the first main surface is divided into an inner portion and an outer portion with the scribe line as a boundary. It is a cutting device for a glass plate that cuts into a glass plate, and sandwiches the first main surface and the second main surface in a support means that supports the second main surface of the inner part and a part of the area along the scribe line of the outer part. A folding means having a pair of holding portions is provided, and the folding means is configured to bend a part of the outer portion at a plurality of points along the scribe line so that the first main surface side is convex. It is characterized by being. With such a configuration, the same effect as the corresponding configuration already described can be enjoyed.

In the above configuration, it is preferable to provide a heating means for heating and expanding the outer portion bent by the bending means.

In the above configuration, it is preferable that the bending means is configured to bend a part of the outer portion with the intersection of the virtual straight line downward from the scribe line in the thickness direction and the second main surface as a fulcrum.

In the above configuration, it is preferable that the supporting means has a flat surface portion that attracts and holds the second main surface of the inner portion.

In the above configuration, it is preferable to provide a pressing means for pressing the first main surface of the inner portion toward the supporting means side.

1 scribe device 2 tool 3 rotary table 3a flat surface 4 folding device 5 rotary table (support means)
5a Flat part 6 Bending mechanism 7 Pressing mechanism 8 Head part 9 First driving part 10 Second driving part 11, 12 Holding part 13, 14 Third driving part 15 Base part 16 Slider 18 Piston rod 19 Guide rail 20 Holding part 21 Fourth drive unit 22 Heating device 23 Lifting table 24 Heater G Glass plate G1 First main surface G2 Second main surface Ga Inner part Gb Outer part S Scrivener wire

Claims (10)

Of the first and second main surfaces facing each other in the thickness direction, a glass plate having a closed curved scribe line formed on the first main surface is cut into an inner portion and an outer portion with the scribe line as a boundary. It is a method of cutting a glass plate
The second main surface of the inner portion is supported by the supporting means, and the first main surface and the second main surface are sandwiched by a pair of bending means in a partial region along the scribe line of the outer portion. With the part sandwiched between them,
By tilting only the pinching portion of the supporting means and the pinching portion, the partial region of the outer portion is bent so that the first main surface side is convex and cracked from a part of the scribe line. The bending process for extending the song is performed at multiple points along the scribe line.
A method for cutting a glass plate , wherein the edge portion on the scribe line side of the contact portion of the sandwiching portion that comes into contact with the glass plate has a curved shape along the scribe line. The bending means swivels and tilts the sandwiching portion around the intersection of the virtual straight line downward from the scribe line in the thickness direction and the second main surface, whereby the partial region of the outer portion is formed. The method for cutting a glass plate according to claim 1, wherein the glass plate is bent. The method for cutting a glass plate according to claim 1 or 2, wherein the supporting means sucks and holds the second main surface of the inner portion. The method for cutting a glass plate according to any one of claims 1 to 3, wherein the scribing line is formed in a circular, oval, elliptical, or polygonal closed curve in a plan view. The method for cutting a glass plate according to any one of claims 1 to 4, wherein the bending steps at a plurality of locations are sequentially performed at each location. The support means includes a rotary table that supports the second main surface and rotates the glass plate, and by repeating the procedure of rotating the rotary table after the bending step, the bending step at a plurality of locations can be performed. The method for cutting a glass plate according to claim 5, wherein the process is performed one by one in order. The partial region of the outer portion sandwiched by the pair of sandwiching portions in the second and subsequent bending steps overlaps with a part of the crack forming range in the previous bending step, or the crack forming. The method for cutting a glass plate according to claim 5 or 6, wherein the glass plate is close to a range. The seventh aspect of claim 7, wherein the bending speed by the folding means in the first bending step is lower than the bending speed by the folding means in the second and subsequent bending steps. How to cut a glass plate. Of the pair of sandwiching portions, the sandwiching portion in contact with the second main surface is located at a position where the virtual straight line descended from the scrib line in the thickness direction and the intersection of the second main surface are in contact with each other, or is separated outward from the intersection. The method for cutting a glass plate according to any one of claims 1 to 8, wherein the second main surface is in contact with the second main surface at a position. Of the first and second main surfaces facing each other in the thickness direction, a glass plate having a closed curved scribe line formed on the first main surface is cut into an inner portion and an outer portion with the scribe line as a boundary. It is a cutting device for glass plates
A support means for supporting the second main surface of the inner portion, and
A folding means having a pair of sandwiching portions for sandwiching the first main surface and the second main surface in a part of the outer portion along the scribe line.
Of the contact portions of the sandwiching portion that come into contact with the glass plate, the edge portion on the scribe line side has a curved shape along the scribe line.
By tilting only the pinching portion of the supporting means and the pinching portion at a plurality of locations along the scribe line, the partial region of the outer portion is made convex on the first main surface side. A glass plate cutting device characterized by being configured to be folded.

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