JP6965122B2 - Data processing equipment, measurement system and data processing program - Google Patents

Description

The present invention includes a data processing device and a data processing program that generate data for specifying the presence or absence of discharge for specifying whether or not a discharge waveform component is included in the signal waveform of waveform data, and such a data processing device. It relates to a measurement system configured with a measuring device for generating waveform data.

For example, the following patent documents disclose a coil test device and a coil test method (hereinafter, also simply referred to as “test device” and “test method”) for inspecting the quality of the coil to be measured. In this test device and test method, a high-pressure impulse voltage is applied to the coil under test to generate a damped vibration voltage waveform, and various characteristics (damped vibration time, effective value, and integrated value of absolute values of measured values, etc.) are measured. However, a configuration / method for determining the quality of the coil to be measured based on the measurement result is adopted. Specifically, in this test device and test method, it is determined whether or not a "lear short defect" has occurred based on how much the measurement result fluctuates in a plurality of measurements, and the measurement result and the reference value are used. A configuration / method is adopted in which it is determined whether or not a "coil turn defect" has occurred by comparing with the above.

Japanese Unexamined Patent Publication No. 6-88849 (Page 5-8, Fig. 1-5)

However, the test apparatus and test method disclosed in the above patent document have the following problems. Specifically, in the test apparatus and test method disclosed in the above patent document, a configuration is adopted in which it is determined whether or not a "rear short defect" has occurred in the coil to be measured based on the magnitude of the fluctuation range of the measurement result. Has been done.

In this case, in the above-mentioned test (measurement) using this type of device / method, it is caused by changes in the measurement environment such as the temperature of the measurement target and the measurement device, and the state of the power supplied to the measurement device. Therefore, the measurement results may vary. Therefore, when the measurement process for one measurement target is performed a plurality of times, the measurement environment for each measurement process may be different and the measurement result for each measurement process may vary. As a result, in the test apparatus and test method disclosed in the above patent document, the fluctuation range of the measurement result is a specified value due to the change in the measurement environment even though "rear short defect" does not actually occur. There is a risk that it will be erroneously determined that a "lear short defect" has occurred.

In this case, instead of the judgment based on the fluctuation range of the measurement result in the multiple measurement processes, "rear short defect" occurs based on the difference between the measurement result and the reference value as in the test method of "coil turn failure". Even when it is judged whether or not it is, if the measurement environment is different between the measurement process for acquiring the reference value and the measurement process for the measurement target to be judged as good or bad, the measurement result is different. , There is a risk of erroneously determining the presence or absence of "rear short defect".

Further, in the above-mentioned test (measurement) using this type of device / method, the measurement result is slightly different for each individual even if the measurement target is the same type (measured coil of the same type, etc.). Therefore, in order to obtain a reference value in consideration of these variations, it is necessary to execute a plurality of measurement processes on a plurality of non-defective product measurement targets to specify the optimum value. In this case, the amount of variation in the measurement results due to individual differences in the measurement targets of a plurality of non-defective products is the amount of difference in the measurement results caused by whether or not one individual (one of the measurement targets) is defective. May be as good as or better than. For this reason, it becomes difficult to obtain a reference value that enables accurate judgment of quality.

The present invention has been made in view of such a problem, and is a data processing apparatus and a data processing program capable of providing data capable of accurately determining the quality of a measurement target without separately performing a process of acquiring a reference value. , As well as providing a measurement system configured with such a data processing device.

In order to achieve the above object, the data processing apparatus according to claim 1 has a discharge waveform in the signal waveform of the waveform data based on waveform data in which a plurality of measured values measured in a predetermined sampling cycle are recorded. A data processing device including a processing unit that generates data for specifying the presence or absence of discharge for specifying whether or not a component is contained, and the processing unit determines whether or not the discharge waveform component is contained. Based on the waveform data, the measurement value range data of the measurement value range that serves as a specific reference and the comparison value data that can specify whether or not the discharge waveform component is included by comparison with the measurement value range are generated. Then, in the process of generating the discharge presence / absence identification data including the generated measurement value range data and the comparison value data, within N sampling continuous from each measurement value of the waveform data (N is in advance). The first process of extracting the first value in which the amount of change of (2 or more specified natural numbers) is equal to or more than the predetermined amount to generate the first data, and the measured values of the waveform data are described. A second data is generated by replacing the measured values of the continuous M sampling portion (M is a predetermined natural number of 2 or more) including the measured value of the target with the averaged second value. The third data is obtained by extracting a third value from the second values of the second data and the second data in which the amount of change in the continuous N sampling is equal to or greater than the predetermined amount. The third process of generating the third data, the fourth process of calculating the fourth value obtained by converting each third value of the third data into an absolute value, and generating the fourth data, and the waveform data. Each of the above-mentioned measurement values of the above is replaced with an averaged value of the measurement value of a continuous L sampling portion (L is a predetermined natural number of 2 or more) including the measurement value of the target, and the measurement after replacement. The fifth process of calculating the fifth value obtained by differentiating the values to generate the fifth data, and the sixth value obtained by differentiating the fifth value of the fifth data are calculated to generate the sixth value. The sixth process of generating the data of the above, and the seventh process of calculating the seventh value obtained by normalizing the absolute value of each of the sixth values of the sixth data to generate the seventh data. , The eighth process of calculating the eighth value obtained by absoluteizing each of the first values of the first data to generate the eighth data, and either the vertical axis or the horizontal axis of the two-dimensional graph. Correspond to each of the fourth values of the fourth data with one of the predetermined values, and sampling timing of each of the fourth values with the other of the vertical and horizontal axes of the two-dimensional graph. A ninth value in which the seventh value of the seventh data corresponding to the data is associated with the fourth value and the first corresponding point of the seventh value is plotted on the two-dimensional graph, respectively. The processing and the respective eighth values of the eighth data are made to correspond to one of the vertical axis and the horizontal axis of the two-dimensional graph, whichever is predetermined, and the vertical axis and the horizontal axis of the two-dimensional graph are associated with each other. On the other hand, the 7th value of the 7th data corresponding to the sampling timing of the 8th value is associated with the 8th value and the 2nd corresponding point of the 7th value. A first determination region in which the second corresponding point corresponding to the measured value of the discharge waveform component is not plotted when plotted on a two-dimensional graph, and the first determination area corresponding to the measured value of the discharge waveform component. At least one of the second determination regions on which the two corresponding points are plotted is plotted on the two-dimensional graph according to a predetermined region defining procedure based on the arrangement of the first corresponding points on the two-dimensional graph. The tenth process defined above as the measured value range is executed, and the area data that can identify at least one of the areas defined by the tenth process is used as the measured value range data, and the seventh process is performed. Data and the eighth data are used as the comparison value data to generate the discharge presence / absence identification data .

Further, the data processing apparatus according to claim 2 is the data processing apparatus according to claim 1 , wherein the processing unit is an absolute value of each fifth value of the fifth data prior to the ninth processing. The ninth value is calculated so that the maximum value is 1, and the ninth data is generated. At the same time, the coefficient Ka (Ka is defined in advance) is added to each of the ninth values of the ninth data. The value obtained by multiplying the value obtained by multiplying the positive number of 1 or less) and the 7th value of the 7th data corresponding to the sampling timing of the 9th value, whichever is larger, is the new 7th value. The eleventh process of generating the seventh data as a value is executed.

Further, the data processing apparatus according to claim 3, wherein the data process unit according to claim 1, wherein the processing unit, prior to the ninth process, the respective seventh value of said seventh data, subject 7 values from the 7th value before Ja sampling (Ja is an arbitrary natural number defined in advance) to the 7th value of the target (Ja + 1) with respect to the 7th value of , And the (Jb + 1) number of the 7th value from the 7th value of the object to the 7th value after Jb sampling (Jb is an arbitrary natural number defined in advance) with respect to the 7th value of the object. The new seventh data is replaced with the maximum value of the seventh value of the predetermined Jc pieces (Jc is two or more predetermined natural numbers) including at least one of the values of 7. The twelfth process to be generated is executed.

Further, the data processing apparatus according to claim 4 is the data processing apparatus according to claim 1 , wherein the processing unit has, prior to the ninth processing, among the seventh values of the seventh data. The 7th value, which is smaller than the 7th value before I sampling (I is an arbitrary natural number defined in advance), is combined with the 7th value, which is smaller than the 7th value before I sampling. The new seventh data is replaced with the tenth value obtained by multiplying the seventh value before the I sampling by the coefficient Kb (Kb is a predetermined positive number of 1 or less), whichever is larger. The thirteenth process to be generated is executed.

Further, the data processing apparatus according to claim 5 is the data processing apparatus according to any one of claims 1 to 4 , wherein the processing unit performs the first of the seventh data prior to the ninth processing. The 7th value corresponding to the measured value sampled after the measured value corresponding to the maximum value among the 7 values is set to the target 7th value before Ha sampling (Ha is The 7th value of the predetermined arbitrary natural number) is the 7th value of the continuous Hb sampling portion (Hb is 2 or more predetermined natural numbers) including the 7th value of the object. When the value is equal to or less than the 11th value obtained by multiplying the averaged value by the coefficient Kc (Kc is an arbitrary positive number defined in advance), the 7th value of the target and the 7th value before the Ha sampling are performed. The new seventh data is replaced with the twelfth value obtained by multiplying the value of by a predetermined coefficient Kd (Kd is an arbitrary positive number larger than Kc) and whichever is smaller. The 14th process to be generated is executed.

Further, the data processing apparatus according to claim 6, wherein the data process unit according to claim 5, wherein the processing unit, in the process of the first 14, the seventh value before the Ha sampling, the Hb samplings When it is smaller than the thirteenth value obtained by multiplying the averaged value of the seventh value by the coefficient Ke (Ke is an arbitrary positive number defined in advance), the seventh value of the object is the thirteenth value. Replace with a value.

Furthermore, the data processing apparatus according to claim 7, wherein the data process unit according to any one of claims 1 to 6, wherein the processing unit prior to the ninth process, first each of the seventh data The 7th value corresponding to the measured value sampled before the measured value corresponding to the maximum value among the 7 values is the 7th value of the target and the 7th value of the target. Which is the 14th value obtained by multiplying the 7th value before Hc sampling (Hc is an arbitrary natural number specified in advance) by the coefficient Kf (Ke is an arbitrary positive number specified in advance). The fifteenth process of generating the new seventh data by replacing it with one of the larger ones is executed.

Further, the data processing device according to claim 8 is the data processing device according to claim 7 , and the processing unit uses both the seventh value and the fourteenth value of the target in the fifteenth process. , The coefficient Kg (Kg is predetermined) to the value obtained by averaging the 7th value of the continuous Hd sampling portion (Hd is a predetermined natural number of 2 or more) including the 7th value of the object. When it is smaller than the fifteenth value multiplied by any positive number), the seventh value of the object is replaced with the fifteenth value.

Further, the data processing apparatus according to claim 9 is the data processing apparatus according to any one of claims 1 to 8 , wherein the processing unit passes through the origin of the two-dimensional graph in the tenth process. The regression line of each first corresponding point is specified, and the vertical axis and the horizontal axis of the two-dimensional graph when the other value of the vertical axis and the horizontal axis of the two-dimensional graph in the specified regression line is 1. One of the predetermined values is specified as the 16th value, and the origin of the two-dimensional graph, the predetermined one value is the 16th value, and the other value is 1. A triangular region having the three points of the first point and the second point where the predetermined one value is 0 and the other value is 1 is specified, and based on the specified triangular region. At least one of the above areas is defined.

The data processing apparatus according to claim 10 is the data processing apparatus according to claim 9 , wherein the processing unit is the first one of the vertical axis and the horizontal axis of the two-dimensional graph, whichever is predetermined. Corresponds to the first value of the data of the above, and corresponds to the other of the vertical axis and the horizontal axis of the two-dimensional graph of the seventh of the seventh data corresponding to the sampling timing of the first value. The first value and the third corresponding point of the seventh value are plotted on the two-dimensional graph by associating the values, and the other value on the vertical axis and the horizontal axis is "0.5". The third corresponding point, which is equal to or less than the following predetermined 17th value, is extracted, and the value of either the vertical axis or the horizontal axis at each of the extracted third corresponding points is defined in advance. The standard deviation nσ (n is an arbitrary natural number defined in advance) is calculated, and the origin, the first point, and one of the predetermined values are the standard deviation nσ and the 16th value. A first point having four points of the sum of the third point where the other value is 1 and the fourth point where the predetermined one value is the standard deviation nσ and the other value is 0. A rectangular region is specified, and at least one of the regions is defined based on the identified first rectangular region and the triangular region.

Furthermore, the data processing apparatus according to claim 11, wherein the data process unit according to any one of claims 1 to 8, wherein the processing unit, in the process of the tenth, includes all of the first corresponding point The smallest square region is specified, and at least one of the regions is defined based on the specified square region.

Further, the data processing apparatus according to claim 12 is the data processing apparatus according to any one of claims 1 to 11 , wherein the processing unit has the second corresponding point and the said based on the data for specifying the presence or absence of discharge. Judgment processing that specifies the positional relationship with at least one region and determines whether or not the discharge waveform component is included in the signal waveform of the waveform data is executed, and the determination result of the determination processing can be specified. Generate result data.

The data processing device according to claim 13 is the data processing device according to claim 12 , wherein the processing unit is the total number of the second corresponding points when the first determination area is at least one of the areas. When the ratio of the second corresponding point not included in the first determination area to the first determination area is specified and the second determination area is set to at least one of the areas, it occupies the total number of the second corresponding points. The ratio of the second corresponding point included in the second determination area is specified, and when the specified ratio is equal to or more than the predetermined ratio, the predetermined notification process is executed.

Further, the data processing apparatus according to claim 14 is the data processing apparatus according to claim 12 , wherein the processing unit displays the two-dimensional graph in the other direction of the vertical axis and the horizontal axis in advance. When Ga second rectangular regions divided into (defined two or more natural numbers) are specified and the first determination region is at least one of the regions, the region other than the first determination region is the first. When the number of the second rectangular regions including the corresponding points of 2 is specified and the second determination region is at least one of the regions, the second determination region is used as the second correspondence point. Is specified, and when the specified number is equal to or greater than the predetermined number, the predetermined notification process is executed.

Further, the data processing apparatus according to claim 15 is the data processing apparatus according to any one of claims 12 to 14 , wherein the processing unit has the two-dimensional graph in which the second corresponding points are plotted and at least one of the two-dimensional graphs. The area display indicating the area of is displayed on the display unit together with the determination result of the determination process.

Further, the measurement system according to claim 16 executes measurement of the measurement target with the data processing device according to any one of claims 1 to 15 at the predetermined sampling cycle, and outputs the waveform data. It is configured to be equipped with a measuring device.

Further, the data processing program according to claim 17 includes a discharge waveform component in the signal waveform of the waveform data based on waveform data in which a plurality of measured values measured in a predetermined sampling cycle are recorded. It is a data processing program that causes the processing unit of the data processing apparatus to execute a process of generating data for specifying whether or not there is discharge, and specifies whether or not the discharge waveform component is included. Based on the waveform data, the measurement value range data of the reference measurement value range and the comparison value data capable of specifying whether or not the discharge waveform component is included by comparison with the measurement value range are generated. In the process of generating the discharge presence / absence identification data including the generated measurement value range data and the comparison value data, within N sampling continuous from each measurement value of the waveform data (N is defined in advance). The first process of extracting the first value in which the amount of change of (2 or more natural numbers) is equal to or more than a predetermined amount to generate the first data, and the measured values of the waveform data of the target. A second data is generated by replacing the measured values of consecutive M samplings (M is a predetermined natural number of 2 or more) with the averaged second value including the measured values. Processing and extracting a third value from the second values of the second data in which the amount of change in the continuous N sampling is equal to or greater than the predetermined amount to generate the third data. The third process of calculating the third value, the fourth process of calculating the fourth value obtained by converting each third value of the third data into an absolute value, and generating the fourth data, and the said waveform data. Each measurement value is replaced with an averaged value of the measurement value of a continuous L sampling portion (L is a predetermined natural number of 2 or more) including the measurement value of the target, and the measurement value after replacement is used. The fifth process of calculating the differentiated fifth value to generate the fifth data, and the sixth data obtained by calculating the sixth value obtained by differentiating each of the fifth values of the fifth data. The sixth process of generating the sixth data, the seventh process of calculating the seventh value obtained by normalizing the absolute value of each of the sixth values of the sixth data, and the seventh process of generating the seventh data. The eighth process of calculating the eighth value obtained by converting each of the first values of the first data into absolute values to generate the eighth data, and either the vertical axis or the horizontal axis of the two-dimensional graph in advance. Each of the fourth values of the fourth data is associated with the specified one, and the sun of each of the fourth values is associated with the other of the vertical and horizontal axes of the two-dimensional graph. A ninth value in which the seventh value of the seventh data corresponding to the pulling timing is associated with each other, and the first corresponding point of the fourth value and the seventh value is plotted on the two-dimensional graph, respectively. And the 8th value of the 8th data correspond to one of the vertical axis and the horizontal axis of the 2D graph, whichever is predetermined, and the vertical axis and the horizontal axis of the 2D graph. The other of the axes is associated with each of the seventh values of the seventh data corresponding to the sampling timing of each of the eighth values, and the eighth value and the second corresponding point of the seventh value are set. The first determination region in which the second corresponding point corresponding to the measured value of the discharge waveform component is not plotted when plotted on the two-dimensional graph, and the measurement value corresponding to the measured value of the discharge waveform component. At least one of the second determination regions on which the second corresponding points are plotted is placed in the two dimensions according to a predetermined region defining procedure based on the arrangement of the first corresponding points on the two-dimensional graph. The processing unit is made to execute the tenth process defined as the measured value range on the graph, and the area data capable of specifying at least one of the areas defined by the tenth process is set as the measured value range data. In addition, the processing unit is made to execute a process of generating the discharge presence / absence identification data by using the seventh data and the eighth data as the comparison value data.

Further, in the data processing program according to claim 18 , whether the second corresponding point is included in the at least one region based on the discharge presence / absence identification data in the data processing program according to claim 17. The determination process of determining whether or not the signal waveform of the waveform data includes the discharge waveform component, and the process of generating determination result data capable of specifying the determination result of the determination process are described above. Let the processing unit execute it.

In the data processing apparatus according to claim 1, the processing unit compares the measured value range data of the measured value range, which is a reference for specifying whether or not the discharge waveform component is contained, with the measured value range data to discharge the discharge waveform. Comparison value data that can specify whether or not a component is included is generated based on the waveform data, and discharge presence / absence identification data is generated including the generated measurement value range data and comparison value data. Specifically, processing unit, the processing from the first processing to the processing of the 10 sequentially performed using the waveform data, a first determination as a measure range specified by the processing of the 10 The area data that can identify at least one of the area and the second determination area is used as the measured value range data, and the seventh data generated by the seventh process and the eighth data generated by the eighth process. Is used as the comparison value data to generate data for specifying the presence or absence of discharge. Further, the data processing program according to claim 17 causes the processing unit of the data processing apparatus to execute each of the above processes.

Accordingly, claim 1 Symbol placement of the data processing apparatus, and according to claim 17, wherein the data processing program, the determination based on a single waveform data obtained for the measurement object, whether the discharge waveform component is present Whether or not the discharge waveform component exists by comparing the region data (measured value range data) for the purpose and the determination region of the region data (first determination region and / or second determination region: measurement value range). It is possible to generate a seventh data and an eighth data (comparison value data) capable of determining. For this reason, it is not necessary to perform a plurality of measurement processes, and it is not affected by individual differences for a plurality of measurement targets or variations in measured values due to differences in the measurement environment for each measurement process. Not only can the accuracy of determining whether or not is occurring is sufficiently improved, but it is not necessary to separately perform a process for generating a reference value (threshold) for determination, so that the burden on the user is sufficient. Can be mitigated.

In the data processing apparatus according to claim 2 , the processing unit normalizes the absolute value of each fifth value of the fifth data so that the maximum value becomes 1, prior to the ninth processing. To generate the ninth data, the value obtained by multiplying each ninth value of the ninth data by the coefficient Ka, and each of the seventh data corresponding to the sampling timing of each ninth value. The eleventh process of generating new seventh data is executed with the larger one of the values of 7 as the new seventh value.

Further, in the data processing apparatus according to claim 3 , the processing unit sets each 7th value of the 7th data to the 7th value of the target 7th value before Ja sampling prior to the 9th processing. (Ja + 1) 7th values from the value of the target to the 7th value of the target, and (Jb + 1) from the 7th value of the target to the 7th value after Jb sampling for the 7th value of the target. ) The twelfth process of generating new seventh data by replacing each with the maximum value of Jc seventh values including at least one of the seventh values is executed.

Further, in the data processing apparatus according to claim 4 , prior to the ninth processing, the processing unit has a seventh value of each of the seventh values of the seventh data, which is smaller than the seventh value before I sampling. Replace the value with the 7th value, which is smaller than the 7th value before I sampling, or the 10th value, which is the 7th value before I sampling multiplied by the coefficient Kb, whichever is larger. The thirteenth process of generating the data of 7 is executed.

Therefore, according to the data processing apparatus according to claims 2 to 4 and the data processing program that executes such processing, the number of singular points at which the seventh value is close to "0" is sufficiently reduced. This makes it possible to define a first determination region and / or a second determination region in which the presence / absence of the discharge waveform component can be determined with higher accuracy, and based on the discharge presence / absence identification data. When determining the presence or absence of the discharge waveform component, it is possible to determine the presence or absence of the discharge waveform component with higher accuracy by plotting the second corresponding point on the two-dimensional graph based on the new seventh data. It becomes.

In the data processing apparatus according to claim 5 , the processing unit sets the measured value sampled after the measured value corresponding to the maximum value of each of the seventh values of the seventh data prior to the ninth processing. The corresponding 7th value was obtained by averaging the 7th value of the target 7th value with respect to the 7th value of the continuous Hb sampling including the 7th value of the target. Either the 7th value of interest or the 12th value obtained by multiplying the 7th value before Ha sampling by the predetermined coefficient Kd when the value is equal to or less than the 11th value obtained by multiplying the value by the coefficient Kc. The 14th process of replacing with the smaller one and generating the new 7th data is executed.

Therefore, according to the data processing apparatus according to claim 5 and the data processing program that executes such processing, the rate of change decreases when the target is waveform data in which the rate of change of the measured value gradually decreases. A change state in which the seventh value suddenly changes to a large value disproportionately to the degree of change can be changed to an appropriate change state according to the degree of decrease in the rate of change, whereby the discharge waveform component can be set. It is possible to define a first determination region and / or a second determination region that can determine the presence / absence of the discharge with higher accuracy, and when determining the presence / absence of the discharge waveform component based on the discharge presence / absence identification data. By plotting the second corresponding point on the two-dimensional graph based on the new seventh data, it is possible to determine the presence or absence of the discharge waveform component with higher accuracy.

In the data processing apparatus according to claim 6 , in the 14th process, the processing unit multiplies the value obtained by averaging the 7th value for Hb sampling with the 7th value before Ha sampling multiplied by the coefficient Ke. When it is smaller than the value of 13, the seventh value of interest is replaced with the thirteenth value. Therefore, according to the data processing apparatus according to claim 6 and the data processing program for executing such processing, the change state of the seventh value can be made a more suitable state.

In the data processing apparatus according to claim 7 , the processing unit performs a measurement value sampled prior to the measurement value corresponding to the maximum value of each of the seventh values of the seventh data prior to the ninth processing. The 7th value corresponding to is the larger of the 7th value of the target and the 14th value obtained by multiplying the 7th value of the target by the 7th value before Hc sampling and the coefficient Kf. Is replaced with, and the fifteenth process of generating new seventh data is executed.

Therefore, according to the data processing apparatus according to claim 7 , and the data processing program that executes such processing, the seventh value is used when targeting waveform data in which the rate of change of the measured value gradually increases. The number of singular points where is close to "0" can be sufficiently reduced, whereby the presence or absence of the discharge waveform component can be determined with higher accuracy in the first determination region and / or the second determination. The region can be defined, and the second corresponding point is plotted on the two-dimensional graph based on the new seventh data when determining the presence or absence of the discharge waveform component based on the discharge presence / absence identification data. This makes it possible to determine the presence or absence of the discharge waveform component with higher accuracy.

In the data processing apparatus according to claim 8 , in the fifteenth process, the processing unit has a continuous Hd sampling portion in which both the seventh value and the fourteenth value of the target include the seventh value of the target. When it is smaller than the fifteenth value obtained by multiplying the averaged value of the seventh value by the coefficient Kg, the seventh value of interest is replaced with the fifteenth value. Therefore, according to the data processing apparatus according to claim 8 and the data processing program that executes such processing, the number of singular points at which the seventh value is close to "0" can be further reduced. can.

In the data processing apparatus according to claim 9 , in the tenth process, the processing unit specifies a regression line of each first corresponding point passing through the origin of the two-dimensional graph, and the two-dimensional graph in the specified regression line When the other value of the vertical axis and the horizontal axis is 1, one of the predetermined values of the vertical axis and the horizontal axis of the two-dimensional graph is specified as the sixteenth value, and the origin of the two-dimensional graph, The apex is the first point where one of the predetermined values is the 16th value and the other value is 1, and the second point where one of the predetermined values is 0 and the other value is 1. In addition to specifying the triangular area to be defined, at least one area is specified based on the specified triangular area.

Therefore, according to the data processing apparatus according to claim 9 and the data processing program that executes such processing, it is extremely unlikely that a second corresponding point corresponding to the value of the discharge waveform component will be plotted. The region can be reliably and easily specified, and based on this triangular region, the first determination region and / or the second determination region can be easily specified to generate region data.

In the data processing apparatus according to claim 10 , the processing unit associates each first value of the first data with either the vertical axis or the horizontal axis of the two-dimensional graph, whichever is predetermined, and the two-dimensional graph. The other of the vertical axis and the horizontal axis is associated with each seventh value of the seventh data corresponding to the sampling timing of each first value, and the third corresponding point of the first value and the seventh value is set to 2. Each of the extracted third points is plotted on a dimensional graph, and the other value of the vertical axis and the horizontal axis is "0.5" or less and is equal to or less than a predetermined 17th value. The standard deviation nσ of one of the predetermined values on the vertical axis and the horizontal axis at the corresponding points of 3 is calculated, and the origin, the first point, and one of the predetermined values are the standard deviation nσ and the 16th. A first point having a third point having the other value of 1 as the sum of the values of, and a fourth point having a predetermined deviation of nσ and the other value of 0 as vertices. A rectangular area is specified and at least one area is defined based on the identified first rectangular area and triangular area.

Therefore, according to the data processing apparatus according to claim 10 , and the data processing program that executes such processing, the first determination area and / or the second determination area is based on the specified first rectangular area and triangular area. The region of the first determination region and / or the region of the second determination region, which can easily identify the determination region of the above and can determine with high accuracy whether or not the signal waveform of the waveform data contains a discharge waveform component. Data can be easily generated.

In the data processing apparatus according to claim 11 , in the tenth process, the processing unit identifies the smallest square area including all the first corresponding points, and at least one area based on the specified square area. To specify. Therefore, according to the data processing apparatus according to claim 11 , and the data processing program that executes such processing, the area data of the first determination area and / or the second determination area can be obtained by a very simple process. Can be generated.

In the data processing apparatus according to claim 12 , the processing unit specifies the positional relationship between the second corresponding point and at least one region based on the discharge presence / absence identification data, and the discharge waveform component is added to the signal waveform of the waveform data. Judgment processing for determining whether or not it is included is executed, and determination result data capable of specifying the determination result of the determination process is generated. Further, the data processing program according to claim 18 causes the processing unit of the data processing apparatus to execute the above processing.

Therefore, according to the data processing apparatus according to claim 12 and the data processing program according to claim 18 , a plurality of measurement processes are not required, the influence of individual differences on a plurality of measurement targets, and each measurement process. Since it is not affected by the variation in the measured values due to the difference in the measurement environment, the accuracy of determining whether or not the discharge phenomenon has occurred can be sufficiently improved. Further, unlike the judgment by comparison with the reference value (threshold value), it is possible to avoid the erroneous judgment due to the influence of the change in the measurement environment and sufficiently improve the judgment accuracy.

In the data processing apparatus according to claim 13 , when the processing unit sets the first determination area as at least one area, the second corresponding point is not included in the first determination area occupying the total number of the second corresponding points. And when the second determination area is at least one area, the ratio of the second correspondence point included in the second determination area to the total number of the second correspondence points is specified and specified. When the ratio is equal to or higher than the predetermined ratio, the predetermined notification process is executed.

Further, in the data processing apparatus according to claim 14 , the processing unit identifies Ga second rectangular regions obtained by dividing the two-dimensional graph into Ga in the other directions of the vertical axis and the horizontal axis, and first. When the determination area is at least one area, the number of the second rectangular areas in which the second corresponding point is included in the area other than the first determination area is specified, and the second determination area is at least one of them. When the area is set, the number of the second rectangular areas in which the second corresponding point is included in the second determination area is specified, and when the specified number is equal to or more than the predetermined number, the predetermined notification is given. Execute the process.

Therefore, according to the data processing apparatus according to claims 13 and 14 , and the data processing program that executes such processing, it is possible to reliably determine whether or not the signal waveform of the waveform data contains a discharge waveform component. And it can be easily recognized.

In the data processing apparatus according to claim 15 , the processing unit causes the display unit to display a two-dimensional graph plotting the second corresponding points and an area display indicating at least one area together with the determination result of the determination process. Therefore, according to the data processing apparatus according to claim 15 , and the data processing program that executes such processing, it is more reliable to determine whether or not the signal waveform of the waveform data contains a discharge waveform component. It can be recognized more easily.

In the measurement system according to claim 16, the data processing device according to any one of claims 1 to 15 and a measuring device that executes measurement of a measurement target at a predetermined sampling cycle and outputs waveform data. It is configured with. Therefore, according to the measurement system according to claim 16, a series of processes from acquisition (generation) of waveform data to generation of discharge presence / absence identification data (or generation of discharge presence / absence identification data and determination result data) is performed in 1 It can be run on one system.

It is a block diagram which shows the structure of the measurement system 1. It is a signal waveform diagram which shows an example of the waveform W0 of the waveform data D0 output from the measuring apparatus 2. It is a signal waveform diagram which shows an example of the waveform W1 of the waveform data D1. It is a signal waveform diagram which shows an example of the waveform W0 of the waveform data D0 and the waveform W2 of the waveform data D2. It is a signal waveform diagram which shows an example of the waveform W3 of the waveform data D3. It is a signal waveform diagram which shows an example of the waveform W4 of the waveform data D4. It is a signal waveform diagram which shows an example of the waveform W0 of the waveform data D0 and the waveform W0f of the waveform data D0f. It is a signal waveform diagram which shows an example of the waveform W5 of the waveform data D5. It is a signal waveform diagram which shows an example of the waveform W6 of the waveform data D6. It is a signal waveform diagram which shows an example of the waveform W7 of the waveform data D7. It is a signal waveform diagram which shows an example of the waveform W8 of the waveform data D8. It is a signal waveform diagram which shows an example of the waveform W9 of the waveform data D9. It is a signal waveform diagram which shows an example of the waveform W9a of the value generated based on the value of the waveform data D9, the waveform W7 of the waveform data D7, and the waveform W7a of the value extracted from each value of waveform data D9a, D7. It is a signal waveform diagram which shows an example of the waveform W7b of the value extracted from each value of the waveform W9 of the waveform data D9, the waveform W7 of the waveform data D7, and the waveform data D9, D7. It is a signal waveform diagram which shows an example of the waveform W7c of the new waveform data D7. It is a signal waveform diagram which shows an example of the waveform W7d of the new waveform data D7. It is a signal waveform diagram which shows an example of the waveform W7e of the waveform data D7 before processing, and the waveform W7f of new waveform data D7. It is a figure which shows an example of the 2D graph which plotted the "first correspondence point" of the value of waveform data D4 and the value of waveform data D7. It is a figure which shows an example of the 2D graph which plotted the "second correspondence point" of the value of waveform data D8 and the value of waveform data D7. It is a figure which shows another example of the 2D graph which plotted the "second correspondence point" of the value of waveform data D8 and the value of waveform data D7. It is a figure which shows an example of the relationship of the waveform Wa which shows the threshold of whether or not each value of the waveform W0 of the waveform data D0, W1 of the waveform data D1 and the waveform data D1 is a discharge waveform component. It is explanatory drawing for demonstrating the definition method of the determination area Aa, Ab, and the relationship between the defined determination area Aa, Ab and "the first correspondence point" and "the second correspondence point". It is another explanatory diagram for demonstrating the definition method of the determination area Aa, Ab, and the relationship between the defined determination area Aa, Ab and a "first correspondence point" and a "second correspondence point". It is a figure which shows another example of the 2D graph which plotted the correspondence point of the value of the waveform data D1 and the value of the waveform data D7. It is explanatory drawing for demonstrating the definition method of the determination area Ac, Ad, and the relationship between the defined determination area Ac, Ad and "the first correspondence point" and "the second correspondence point". It is explanatory drawing for demonstrating the relationship between the "second correspondence point" of the value of the waveform data D8 and the value of the waveform data D7 plotted on the two-dimensional graph, and the determination area Aa, Ab and the rectangular area A10-A19. ..

Hereinafter, embodiments of a data processing apparatus, a measurement system, and a data processing program will be described with reference to the accompanying drawings.

First, the configuration of the measurement system 1 will be described. The measurement system 1 shown in FIG. 1 inspects the quality of the inspection target (measurement target) X based on the "measurement system" having the "measurement device" and the "data processing device" and the "data for specifying the presence or absence of discharge" described later. It is an "impulse test system" configured to include an "inspection device", and is configured to include a measuring device 2 and a data processing device 3. In this case, the inspection target X is an example of the “measurement target”, and in this example, an example of executing various processes with the winding component (coil) as the inspection target X will be described.

The measuring device 2 corresponds to a “measuring device”, and as an example, is configured to be capable of executing various measurement processes targeting the inspection target X under the control of the data processing device 3. Specifically, the measuring device 2 includes a measurement signal generation unit 11, an A / D conversion unit 12, a processing unit 13, a storage unit 14, and the like. The measurement signal generation unit 11 applies an impulse voltage as a measurement signal between both ends of the inspection target X according to the control of the processing unit 13. As an example, the A / D conversion unit 12 performs A / D conversion (sampling) of the current value of the current flowing through the measurement target in a specified cycle (“predetermined sampling cycle: measurement cycle) under the control of the processing unit 13. : Measurement) and the measured value Ds (sampling value: an example of "measured value") is sequentially output to the processing unit 13. Instead of sampling the current value, it is also possible to adopt a configuration in which the voltage value between both ends of the measurement target is A / D converted (sampling: measured) and the measured value Ds is output at a specified cycle.

The processing unit 13 comprehensively controls the measuring device 2. Specifically, the processing unit 13 controls the measurement signal generation unit 11 to apply an impulse voltage to the measurement target, and also controls the A / D conversion unit 12 to perform A / D conversion of the current value at an arbitrary cycle. The process (sampling process) is executed. Further, the processing unit 13 stores the measured value Ds output from the A / D conversion unit 12 in the storage unit 14, and generates waveform data D0 (an example of “waveform data”) based on the measured value Ds. It is stored in the storage unit 14, and the generated waveform data D0 is output to the data processing device 3. The storage unit 14 stores the operation program of the processing unit 13, the above-mentioned measured value Ds (waveform data D0), and the like. The actual measuring device 2 is configured to include various operation switches for instructing the operating conditions of the measuring device 2, and a display unit for displaying a measurement condition setting screen, a measurement value display screen, and the like. However, illustration and description of these will be omitted.

On the other hand, the data processing device 3 corresponds to a "data processing device", and the inspection data Dc ("waveform") for inspecting the inspection target X based on the waveform data D0 acquired from the measuring device 2 as described later. An example of "data for specifying the presence or absence of discharge for specifying whether or not the signal waveform of the data contains a discharge waveform component") is generated. Further, the data processing device 3 corresponds to an "inspection device" and inspects the quality of the inspection target X based on the generated inspection data Dc. In this case, in the measurement system 1 of this example, as an example, the data processing program Dp corresponding to the "data processing program" is installed in an existing personal computer to configure the data processing device 3.

Specifically, the data processing device 3 includes an operation unit 21, a display unit 22, a processing unit 23, and a storage unit 24. The operation unit 21 includes a keyboard and pointing devices such as a mouse and a touch panel (not shown), and outputs an operation signal corresponding to the operation for these to the processing unit 23. The display unit 22 is an example of the “display unit” and displays various display screens showing measurement results, inspection results (results of pass / fail determination), and the like under the control of the processing unit 23.

The processing unit 23 is an example of the “processing unit” and controls the data processing device 3 in a comprehensive manner. Specifically, the processing unit 23 controls the measuring device 2 to execute the measurement processing targeting the inspection target X according to the data processing program Dp as described later, and the waveform output from the measuring device 2. A data generation process for generating inspection data Dc based on the data D0 is executed. Further, the processing unit 23 executes an inspection process (good / bad determination process) for inspecting the quality of the inspection target X based on the inspection data Dc according to the data processing program Dp, and generates the inspection result data Dr.

The storage unit 24 stores the data processing program Dp (data of the operation program of the processing unit 23), the waveform data D0 output from the measurement system 1, and various data generated by the processing unit 23.

Next, the inspection method of the inspection target X by the measurement system 1 will be described with reference to the attached drawings. It is assumed that the work of installing the data processing program Dp in the data processing device 3 and the work of connecting the measuring device 2 and the data processing device 3 have already been completed.

When inspecting the inspection target X, first, the measurement process of the inspection target X by the measuring device 2 is executed. Specifically, the inspection target X is connected to the measuring device 2, and the operation unit 21 of the data processing device 3 is operated to instruct the start of the measurement process. In response to this, the processing unit 23 controls the measuring device 2 according to the data processing program Dp to start the measurement processing for the inspection target X.

At this time, in the measuring device 2, the processing unit 13 first controls the A / D conversion unit 12 to sample (measure) the current value in the sampling cycle instructed by the data processing device 3 (processing unit 23). To start. As a result, the measured value Ds (current value of the current flowing through the inspection target X) for the inspection target X is sequentially output from the A / D conversion unit 12 and stored in the storage unit 14. Further, the processing unit 13 controls the measurement signal generation unit 11 to apply an impulse voltage to the inspection target X. At this time, the measured value Ds (current value) for the current flowing through the inspection target X changes like the waveform W0 (an example of the “signal waveform of waveform data”) shown in FIG.

Next, as an example, the processing unit 13 has an A / D conversion unit 12 within this time when the time instructed by the processing unit 23 has elapsed from the time immediately before starting the application of the impulse voltage to the inspection target X. A plurality of measured values Ds, Ds ... Output from the above are recorded to generate waveform data D0, and the generated waveform data D0 is stored in the storage unit 14. Further, the processing unit 13 outputs the generated waveform data D0 to the data processing device 3. Further, in the data processing device 3, the processing unit 23 stores the waveform data D0 output from the measuring device 2 in the storage unit 24 in association with the inspection target X. As a result, the measurement process for the inspection target X is completed.

On the other hand, in the data processing device 3, when the acquisition of the waveform data D0 is completed, the processing unit 23 obtains the inspection data Dc for inspecting whether the inspection target X is a non-defective product or a defective product according to the data processing program Dp. Start the "data generation process" to generate.

In this "data generation process", the processing unit 23 first measures a measured value ("first value") in which the amount of change in continuous N sampling from each measured value Ds of the waveform data D0 is equal to or greater than a predetermined amount. 1) is extracted to generate waveform data D1 (an example of the "first data"), and the "first process" is executed. Specifically, the processing unit 23 performs filtering processing using a high-pass filter, a one-dimensional Laplacian filter, or the like as an example, and the amount of change within continuous N = 2 sampling from each measured value Ds of the waveform data D0. Extracts the measured value Ds exceeding the specified amount to generate the waveform data D1. As a result, as shown in the waveform W1 shown in FIG. 3, the waveform of the sharp change corresponding to the component of the discharge phenomenon generated in the inspection target X at the time of generating the waveform data D0 (during the measurement process) and the component such as large noise. The measured value of the component is acquired as the waveform data D1, and the "first process" is completed.

Further, the processing unit 23 sets each measured value Ds of the waveform data D0 into a value obtained by averaging the measured values Ds of the continuous M sampling including the target measured value Ds (an example of "second value"). The "second process" for generating the waveform data D2 (an example of the "second data") is executed by replacing each of them. Specifically, as an example, the processing unit 23 sets the measured value Ds of the nth sampling value of each measured value Ds of the waveform data D0 as the measured value Dsn, and sets the value of the above "M" to "3". When specified, the total value of the measured value Ds (n-1) before one sampling of the measured value Dsn, the measured value Ds (n + 1) after one sampling of the measured value Dsn, and the measured value Dsn is set to "M =". The value divided by "3" (the average value of the measured values Ds for three consecutive samplings) is calculated as the "second value" to generate the waveform data D2.

As a result, as shown by the waveform W2 shown by the broken line in FIG. 4, in the waveform data D0, the sudden change corresponding to the component of the discharge phenomenon and the component such as large noise extracted in the above-mentioned "first process" The waveform data D2 of the measured value with the influence of the “waveform component” sufficiently reduced is generated, and the “second process” is completed. In the figure, in order to facilitate understanding of the "second process", a part of the waveform W0 shown in FIG. 2 in the time axis direction is enlarged and calculated based on the measured value Ds of the waveform W0. The waveform W2 of the value to be obtained is shown superimposed on the waveform W0. Further, the "second process" is not limited to the process of obtaining the three-point average value of M = 3 values as in the above example, but also the process of obtaining the average value of a plurality of values other than M = 3 and humming. The averaging process using a window or the like may be executed as a "second process".

Subsequently, the processing unit 23 extracts from each measured value of the waveform data D2 a measured value (an example of a "third value") in which the amount of change in continuous N sampling is equal to or greater than a predetermined amount. The "third process" for generating the waveform data D3 (an example of the "third data") is executed. Specifically, the processing unit 23 performs a filtering process using the same filter as the filter used in the above-mentioned "first process", so that the continuous N = 2 sampling from each measured value of the waveform data D2 is performed. Waveform data D3 is generated by extracting measured values in which the amount of change exceeds a specified amount. As a result, as in the waveform W3 shown in FIG. 5, the waveform data D2 in which the influence of the “waveform component of abrupt change” is sufficiently reduced in the above “second processing” is obtained in the “first processing”. Waveform data D3 filtered using the same filter as the one used is generated, and the "third process" is completed.

Next, the processing unit 23 calculates the absolute value of each measured value of the waveform data D3 (an example of the “fourth value”) to generate the waveform data D4 (an example of the “fourth data”). The "fourth process" is executed. As a result, waveform data D4 having a waveform like the waveform W4 shown in FIG. 6 is generated, and the "fourth process" is completed.

Subsequently, the processing unit 23 replaces each measured value Ds of the waveform data D0 with a value obtained by averaging the measured values Ds for continuous L sampling including the target measured value Ds, and replaces the replaced measured values. The "fifth process" of calculating the differentiated value (an example of the "fifth value") and generating the waveform data D5 (an example of the "fifth data") is executed. Specifically, as an example, the processing unit 23 first sets the target measured value Ds from the measured value Ds before 5 samplings of the target measured value Ds to the measured value Ds after 5 samplings of the target measured value Ds. The waveform data D0f is generated by substituting the average value of the measured values Ds for L = 5 + 5 + 1 = 11 samplings. As a result, as in the waveform W0f shown in FIG. 7, the waveform data D0f of the measured value having a small degree of variation for each sampling is generated.

In the figure, in order to facilitate understanding of the "fifth process", a part of the waveform W0 shown in FIG. 2 in the time axis direction is enlarged and calculated based on the measured value Ds of the waveform W0. The waveform W0f of the average value to be measured is shown superimposed on the waveform W0. Further, when generating the waveform data D0f, instead of the above-mentioned processing of replacing with the average value of 11 samplings, a processing of replacing with an average value of a plurality of samplings other than 11 samplings and an averaging processing using a humming window or the like are performed. You may do it.

Next, the processing unit 23 calculates the value obtained by differentiating each measured value of the waveform data D0f (first derivative value: fifth value) to generate the waveform data D5. As a result, waveform data D5 such as the waveform W5 shown in FIG. 8 is generated, and the "fifth process" is completed. Regarding this "fifth process", instead of the above process of differentiating the value of the waveform data D0f, a process of replacing the value of the waveform data D0f with a "value indicating the rate of change" by the least squares method or the like is executed. You can also do it.

Subsequently, the processing unit 23 calculates a value (second derivative value: sixth value) obtained by differentiating each value (fifth value) of the waveform data D5, and calculates an example of the waveform data D6 (“sixth data””. ) Is generated. As a result, waveform data D6 such as the waveform W6 shown in FIG. 9 is generated, and the "sixth process" is completed. Also for this "sixth process", instead of the above process of differentiating the value of the waveform data D5, a process of replacing the value of the waveform data D5 with a "value indicating the rate of change" by the least squares method or the like is executed. You can also do it.

Next, the processing unit 23 calculates a value obtained by normalizing the absolute value of each value of the waveform data D6 (an example of the "seventh value") to generate the waveform data D7 (an example of the "seventh data"). Execute the "seventh process". As a result, waveform data D7 such as the waveform W7 shown in FIG. 10 is generated, and the "seventh process" is completed.

Subsequently, the processing unit 23 calculates the absolute value of each measured value of the waveform data D1 (an example of the "eighth value") to generate the waveform data D8 (an example of the "eighth data"). The "eighth process" is executed. As a result, waveform data D8 such as the waveform W8 shown in FIG. 11 is generated, and the "eighth process" is completed.

Next, the processing unit 23 receives any one or any of the processes from the "11th process" to the "13th process" described below prior to the start of the "9th process" described later. A plurality of executions are performed to reduce the number of the following singular points existing in each value of the waveform data D7 before processing. Specifically, in the waveform data D7 generated by the above-mentioned "seventh process", as shown in FIG. 10, when the rate of change of each value of the corresponding waveform data D6 is about the same for two consecutive values. At (when the slope of the waveform W6 is the same for two consecutive samplings), a singular point occurs in which the value (seventh value) is close to "0" (very small value). Since this singular point (value close to "0") hinders accurate judgment in the subsequent pass / fail judgment, new waveform data in which the singular point is reduced by processing each value according to a predetermined condition It is preferable to generate D7.

In this case, as one of the processes for reducing the singularity, the "11th process" described below is executed. First, the absolute value of each value (fifth value) of the waveform data D5 is normalized so that the maximum value is "1" (an example of the "ninth value"), and the waveform data D9 (An example of "9th data") is generated. As a result, waveform data D9 such as the waveform W9 shown in FIG. 12 is generated. Next, the processing unit 23 multiplies each value (9th value) of the waveform data D9 by a coefficient Ka (Ka = 0.1 as an example) (value of the waveform W9a shown in FIG. 13) and a waveform. One of the larger one of the waveform data D7 value (7th value: the value of the waveform W7 shown in FIG. 13) corresponding to the sampling timing of the data D9 value (9th value) is a new value (new value). New waveform data D7 is generated as the seventh value). At this time, waveform data D7 (new waveform data D7) such as the waveform W7a shown by the thick line in FIG. 13 is generated, and the “11th process” is completed.

The "coefficient Ka" used in the "11th process" can be any positive number other than "0.1" with "1" or less. Further, instead of the above "11th process", each value (9th value) of the waveform data D9 is not multiplied by the coefficient Ka (that is, the 9th value: the value of the waveform W9 shown in FIG. 14). ) And the value of the waveform data D7 (7th value: the value of the waveform W7 shown in FIG. 14) corresponding to the sampling timing of the value of the waveform data D9 (9th value), whichever is larger, is new. It is also possible to execute a process of generating new waveform data D7 as a value (a new seventh value). At this time, new waveform data D7 such as the waveform W7b shown by the thick line in the figure is generated.

Further, as one of the processes for reducing the singularity, the "twelfth process" described below is executed. In this "12th process", each value (7th value) of the waveform data D7 is set to (Ja + 1) values from the value before Ja sampling to the target value with respect to the target value, and the target value. New waveform data by replacing each with the maximum value of the predetermined Jc seventh values including at least one of the (Jb + 1) values from the value to the value after Jb sampling with respect to the target value. Generate D7.

Specifically, as an example, each value (seventh value) of the waveform data D7 is set to (Ja + 1) values from the value before Ja = 2 sampling to the target value with respect to the target value, and the target. Replaced with the maximum value of the predetermined Ja + Jb + 1 = Jc = 5 values including both (Jb + 1) values from the value of to the value after Jb = 2 sampling with respect to the target value. Waveform data D7 is generated. At this time, new waveform data D7 such as the waveform W7c shown in FIG. 15 is generated. Note that "Ja" and "Jb" can be defined as any natural number other than "2", and "Jc" can also be any natural number other than "5".

Further, as still one of the processes for reducing the singularity, the "thirteenth process" described below is executed. In this "thirteenth process", among each value (seventh value) of the waveform data D7, a value smaller than the value before I sampling is selected as the value (seventh value) and the value before I sampling. Is replaced with a value obtained by multiplying by a coefficient Kb (as an example, Kb = 0.9) (an example of the "tenth value"), whichever is larger, to generate new pre-waveform data D7. At this time, new waveform data D7 such as the waveform W7d shown in FIG. 16 is generated. The "coefficient Kb" used in the "thirteenth process" can be any positive number other than "0.9" with "1" or less.

Further, when the inspection data Dc is generated based on the waveform data D0 of the damped vibration waveform as in this example, the "14th process" described below is performed prior to the start of the "9th process" described later. It is preferable to carry out. In this case, in the waveform data D7 generated based on the damped vibration waveform such as the waveform data D0, the amount of change in the waveform becomes smaller with the passage of time after the time when the value (seventh value) becomes the maximum value. .. Therefore, when the amount of change of each value (7th value) after the maximum value becomes extremely large, it is not a normal transient phenomenon, but the measured value Ds including the discharge waveform component is measured during the measurement process. By processing the value of the waveform data D7 so that the determination can be made, the determination accuracy can be improved. Therefore, the values after the maximum value among the values of the waveform data D7 are processed as follows.

Specifically, in the "14th process", the value corresponding to the measured value Ds sampled after the measured value Ds corresponding to the maximum value of each value (7th value) of the waveform data D7. For (7th value), the value (7th value) before Ha sampling (for example, 1 sampling before) with respect to the target value (7th value) is continuous including the target value. The coefficient Kc (as an example, Kc = 1.0) is added to the value obtained by averaging the value (seventh value) of the Hb sampling amount (for example, Hb = 101 sampling amount including the value before Ha = 1 sampling). When it is less than or equal to the multiplied value (11th value) (that is, when the value obtained by multiplying the average value of the values for Hb sampling by the coefficient Kc is larger than the value before Ha sampling of the target value: the target value The value (12th value) obtained by multiplying the target value by the value before Ha sampling and the predetermined coefficient Kd (1.4 as an example) when the value of the included Hb sampling suddenly increases). ) And the smaller one, and new waveform data D7 is generated.

At this time, the value before Ha sampling (7th value) is a coefficient Ke (for example, Ke = 0.1) obtained by averaging the value for Hb sampling (7th value). When it is smaller than the value multiplied by (an example of "13th value"), the target value (7th value) is replaced with the value obtained by multiplying the averaged value by the coefficient Ke (13th value). Thereby, the number of singular points can be reduced. By executing such "14th process", the values after the maximum value among the values of the waveform data D7 (that is, each value whose change amount should be gradually reduced) are shown by a solid line in FIG. When the value suddenly increases like the value of the waveform W7e, the amount of increase is limited and replaced with the waveform W7f shown by the broken line in the figure, and new waveform data D7 is generated.

The "coefficient Kc" used in the "14th process" can be any positive number other than "1", and the "coefficient Kd" is larger than the "coefficient Kc". It can be any positive number other than "4", and the "coefficient Ke" can be any positive number other than "0.1". In addition, the "value before Ha sampling" can also be the "value before multiple samplings of 2 samplings or more", and the "value obtained by averaging the Hb samplings" is also "the value of 100 samplings or less for multiple samplings". It can be an "averaged value" or an "averaged value of a plurality of samplings of 102 samplings or more".

Further, when the inspection data Dc is generated based on the waveform data D0 of the damped vibration waveform as in this example, the "15th process" described below is also performed prior to the start of the "9th process" described later. It is preferable to carry out. In this case, in the waveform data D7 generated based on a plurality of measured values Ds including the measured values Ds before the voltage is applied to the inspection target X, which is a vibration waveform such as the waveform data D0, the value (7th). The amount of change in the waveform tends to gradually increase with the passage of time before the time when the value) reaches the maximum value. Therefore, for each value (7th value) before the maximum value, when the amount of change is locally extremely small disproportionately to the degree of increase in the rate of change, it is such extremely small due to the influence of noise or the like. By assuming that a change in the rate of change has occurred and processing the value of the waveform data D7 so as to sufficiently reduce the influence of such a change, it is possible to improve the determination accuracy. Therefore, the values before the maximum value among the values of the waveform data D7 are processed as follows.

Specifically, in the "15th process", it corresponds to the measured value Ds sampled before the measured value Ds corresponding to the maximum value of each value (7th value) of the waveform data D7. For the value (7th value), the coefficient Kf (7th value) is added to the target value and the value (7th value) before Hc sampling (for example, before Hc = 1 sampling) with respect to the target 7th value. As an example, new waveform data D7 is generated by substituting one of the values multiplied by Ke = 0.9) (an example of the “14th value”), whichever is larger.

At this time, both the target value (7th value) and the value before Hc sampling (7th value) multiplied by the coefficient Kf (14th value) are continuous including the target value. The value (7th value) obtained by multiplying the averaged value (7th value) of the Hd sampling amount (for example, Hd = 101 sampling amount) is multiplied by the coefficient Kg (for example, Kg = 1) (of the "15th value"). When it is smaller than (1 example), the target value can be replaced with a value (15th value) obtained by multiplying the averaged value of Hd sampling by the coefficient Kg. By executing such "15th process", when the increase amount of the value before the maximum value of the waveform data D7 is excessively small, the increase amount is the original increase amount. Is replaced with a reinforced value corresponding to, and new waveform data D7 is generated.

The "coefficient Kg" used in the "15th process" can be any positive number other than "1". Further, the "value before Hc sampling" can be set to "the value before multiple samplings of 2 samplings or more", and the "value obtained by averaging the Hd samplings" can also be set to "multiple samplings of 100 samplings or less". Can be an averaged value or a value obtained by averaging a plurality of samplings of 102 samplings or more.

On the other hand, when the processing unit 23 completes the predetermined processing among the above-mentioned "11th processing" to "13th processing" and "14th processing" and "15th processing". , "Ninth process" is started. When it is specified not to execute each process from the "11th process" to the "15th process", the "9th process" is started when the above-mentioned "8th process" is completed. do.

Specifically, in this "nineth process", as shown in FIG. 18, the processing unit 23 associates the value of the waveform data D4 (fourth value) with the vertical axis of the two-dimensional graph as an example. (Example in which "either the vertical axis or the horizontal axis is predetermined" is the "vertical axis"), and the horizontal axis of the two-dimensional graph is the waveform data D7 corresponding to the sampling timing of each value of the waveform data D4. Corresponding points of the values of the waveform data D4 and the values of the waveform data D7 (“the seventh value”) by associating each value (seventh value) (an example in which the “other of the vertical axis and the horizontal axis” is the “horizontal axis”). An example of "corresponding point of 1") is plotted on a two-dimensional graph. In the figure, the corresponding point (first corresponding point) of both values is represented by "◆".

At this time, the value of the waveform data D4 generated in the above-mentioned "fourth process", that is, the value of the measured value Ds of the waveform data D0, is as short as the "change amount to be determined as the discharge component". The value that has changed significantly with time "is averaged and absoluteized (fourth value), and the value of waveform data D7 generated in" seventh processing "or the value of waveform data D7. On the other hand, the value of the new waveform data D7 that has undergone various processing, that is, the "value that has changed significantly in a short time as much as the amount of change that should be determined as the discharge component" among the measured values Ds of the waveform data D0. The corresponding points of the second-order differential values of the averaged and absolute values with the absolute values (seventh value) are plotted as "first corresponding points" on the two-dimensional graph. ..

That is, each "first corresponding point" on the two-dimensional graph is a value excluding the influence of the discharge waveform component even if the waveform W0 of the waveform data D0 contains the discharge waveform component (fourth). The "correspondence point" based on (the value of and the seventh value) will be plotted in the area to be plotted. Therefore, the processing unit 23 is on the two-dimensional graph according to the predetermined "area defining procedure" based on the arrangement of each "first corresponding point" plotted in the above "ninth processing" on the two-dimensional graph. The "judgment area" is defined in (execution of the "tenth process").

The specific procedure of this "tenth process" will be described in detail later, but in the measurement system 1 (data processing device 3) of this example, the waveform W0 of the waveform data D0 includes a discharge waveform component. When the data corresponds to the discharge waveform component, the "second corresponding point" described later is not plotted in the determination area Aa (an example of the "first determination area" as the "measurement value range"). When the waveform W0 of the waveform data D0 contains a discharge waveform component, the determination region Ab (as the “measured value range”” on which the “second corresponding point” described later of the value corresponding to the discharge waveform component is plotted. A process that defines at least one of the "second determination area") is executed as the "tenth process".

Subsequently, the processing unit 23 uses the area data Da (an example of "area data" as "measured value range data") capable of specifying the determination area Aa and / or the determination area Ab defined by the "tenth process". Along with the generation, the generated area data Da and waveform data D7 and D8 (an example of "comparison value data") are recorded in association with the inspection target X, and the inspection data Dc (an example of "discharge presence / absence identification data") is recorded. It is generated and stored in the storage unit 14. With the above, the "data generation process" is completed.

Next, the processing unit 23 determines whether or not the discharge waveform component is included in the waveform W0 of the waveform data D0 measured for the inspection target X based on the generated inspection data Dc (that is, the inspection target X is Inspection process of whether it is a good product or a defective product) ”is executed.

Specifically, the processing unit 23 first defines the determination area Aa and / or the determination area Ab on the two-dimensional graph based on the area data Da recorded in the inspection data Dc. Further, the processing unit 23 plots the "second corresponding point" on the two-dimensional graph based on the waveform data D7 and D8 recorded in the inspection data Dc, respectively. At this time, in the measurement system 1 (data processing device 3) of this example, as an example, each value (eighth value) of the waveform data D8 is associated with the vertical axis of the two-dimensional graph (“vertical axis and horizontal axis”). An example in which "one of the axes defined in advance" is defined as the "vertical axis") The horizontal axis of the two-dimensional graph is each value of the waveform data D7 corresponding to the sampling timing of the value of the waveform data D8 (seventh value). (Example in which "the other of the vertical axis and the horizontal axis" is the "horizontal axis"), and the corresponding points (second corresponding points) of the values of the waveform data D8 and the values of the waveform data D7 are displayed on the two-dimensional graph. Plot each.

Further, in the measurement system 1 (data processing device 3) of this example, as shown in FIGS. 19 and 20, the above two-dimensional graph and the determination area Aa and / or the determination area Ab defined on the two-dimensional graph are displayed. The display unit 22 is displayed, and each time a new "second corresponding point" is plotted, a symbol or symbol indicating the "second corresponding point" is displayed on the two-dimensional graph. In the examples of both figures, an example in which "■", which is an example of a symbol indicating a "second corresponding point", is displayed (plotted) on a two-dimensional graph is shown.

In this case, the waveform data D8 is a measured value (first) in which the amount of change in continuous N sampling from each measured value Ds of the waveform data D0 in the above-mentioned "first process" is equal to or larger than a predetermined amount. Value: A value that is abruptly changed in N sampling like the value constituting the discharge waveform component) is converted into an absolute value in the "eighth process".

Therefore, when each measured value Ds of the waveform data D0, which is the source of the waveform data D8, does not change sharply within N sampling, that is, the waveform W0 of the waveform data D0 does not contain a discharge waveform component. Occasionally, as shown in FIG. 19, all "second corresponding points" are plotted in the determination area Aa (outside the determination area Ab). On the other hand, when each measured value Ds of the waveform data D0, which is the source of the waveform data D8, changes sharply within N sampling, that is, when the waveform W0 of the waveform data D0 contains a discharge waveform component. , As shown in FIG. 20, some "second corresponding points" (corresponding points of the waveform data D7 and 8 corresponding to the measured value Ds of the discharge waveform component) are outside the determination area Aa (inside the determination area Ab). It will be plotted.

Therefore, when the processing unit 23 completes the plotting of all the "second corresponding points", first, the positional relationship between the above "second corresponding points" and the determination area Aa and / or the determination area Ab. To identify. At this time, when all the "second corresponding points" are plotted in the determination area Aa (when all the "second corresponding points" are plotted outside the determination area Ab), the processing unit. 23 determines that the waveform W0 of the waveform data D0 does not contain a discharge waveform component. Further, when some "second corresponding points" are plotted outside the determination area Aa (when some "second corresponding points" are plotted inside the determination area Ab), the processing unit. 23 determines that the waveform W0 of the waveform data D0 contains a discharge waveform component.

Further, the processing unit 23 is shown in FIG. 21 in place of (or together with the two-dimensional graphs shown in both figures) the two-dimensional graphs shown in FIGS. 19 and 20 above according to the instruction from the user by the operation of the operation unit 21. The two-dimensional graph is displayed on the display unit 22. In this two-dimensional graph, the waveform W0 of the waveform data D0, the waveform W1 of the waveform data D1, and the above-mentioned determination area Aa, the determination area Ab, and the waveform Wa corresponding to the boundary are superimposed and displayed. Therefore, as shown in the figure, when a part of the waveform W1 of the waveform data D1 is drawn above the waveform Wa, a part of the waveform W0 corresponding to the portion is a discharge waveform component, and the waveform data. With respect to the portion of the waveform W1 of D1 drawn below the waveform Wa, it is possible to intuitively recognize that the portion of the waveform W0 corresponding to that portion is not a discharge waveform component.

After that, the processing unit 23 sets the determination result of the determination process for the presence / absence of the discharge waveform component as the inspection target X together with the result of the determination process for other inspection items performed separately from the determination process for the presence / absence of the discharge waveform component. The inspection result data Dr is generated by associating and recording. Further, when it is determined that there is no defect in all the inspection items, the item that the inspection target X is a non-defective product is recorded in the inspection result data Dr, and when it is determined that there is a defect in any of the inspection items, the inspection target X is recorded. Record the matter that is a defective product in the inspection result data Dr. As described above, a series of inspection processes for the inspection target X is completed.

Next, the "tenth process (process for defining the determination areas Aa and Ab on the two-dimensional graph)" in the above series of processes for the inspection target X will be described in detail with reference to the attached drawings. ..

When the determination area Aa (or the determination area Ab) is defined in the above "10th process", the processing unit 23 first plots "9th process" as shown in FIGS. 22 and 23. The position of the "first corresponding point" (the position of each "◇" in both figures) is specified, and the "regression straight line of each first corresponding point" passing through the origin P0 of the two-dimensional graph is specified. In this case, as an example, the alternate long and short dash line L shown in both figures is specified as a “regression straight line”. Next, the processing unit 23 determines that the value of the horizontal axis (an example of "the other of the vertical axis and the horizontal axis") of the two-dimensional graph on the specified regression line (dashed-dotted line L) is "1". The value of the vertical axis (an example of "one of the vertical axis and the horizontal axis defined in advance") (in this example, about 0.08: an example of the "16th value") is specified.

Next, the origin P0 of the two-dimensional graph, the point P1 where the value on the vertical axis is the "16th value" and the value on the horizontal axis is "1" (an example of the "first point"), and the value on the vertical axis are A triangle region A1 having three points of "0" and a value of "1" on the horizontal axis of "1" (an example of a "second point") as vertices is specified, and a determination region is determined based on the specified triangle region A1. Aa and / or the determination area Ab is defined.

Specifically, as shown in FIG. 24, the processing unit 23 sets the value of the waveform data D1 (the first) on the vertical axis of the two-dimensional graph (an example of "one of the vertical axis and the horizontal axis defined in advance"). The value of waveform data D7 (7th) corresponding to the sampling timing of each value of waveform data D1 on the horizontal axis of the two-dimensional graph (an example of "the other of the vertical axis and the horizontal axis"). The corresponding points of the waveform data D1 and the values of the waveform data D7 (an example of the "third corresponding point") are plotted on a two-dimensional graph in correspondence with each other. In the figure, the corresponding point (third corresponding point) of both values is represented by "■".

In this case, the "third corresponding point" based on the value of the damped vibration waveform (waveform of the transient phenomenon) such as the waveform data D0 has many values with a small rate of change. , A large number of "third corresponding points" will be plotted on the part on the origin side in the horizontal axis direction. Further, since each "third corresponding point" plotted on the part on the origin side in the horizontal axis direction has a small corresponding "first value" itself, its distribution is in the vertical axis direction on the two-dimensional graph. It becomes a dense state without being separated greatly.

Therefore, as an example, the processing unit 23 has a value on the horizontal axis of "0.1 (an example of" a predetermined 17th value in which the other value of the vertical axis and the horizontal axis is "0.5" or less)). The "third corresponding point" below, that is, the "third corresponding point" (discharge waveform component and large noise) corresponding to the normal measured value Ds which occupies most of each "third corresponding point". When a component is present, a "third corresponding point") corresponding to the measured value Ds excluding such a peculiar measured value Ds is extracted. The above "17th value" can be any positive number other than "0.1" which is "0.5" or less.

Next, the processing unit 23 calculates the standard deviation nσ of the value on the vertical axis at each of the extracted “third corresponding points”. In this case, for "n", an arbitrary natural number is defined in advance according to the number of measured values Ds (sampling number). Specifically, as an example, when the number of measured values Ds in the waveform data D0 is "10,000" and there is no discharge waveform component in the waveform W0 of the waveform data D0, the standard deviation nσ = 3σ. The measured value Ds included in the range is "10,000 x about 99.73% ≒ 9,973 value", and "10,000-9,973 = 27 value" may be outside the range of the standard deviation nσ. The measured value Ds included in the range of standard deviation nσ = 4σ is “10,000 × about 99.994% ≒ 9,999.4 value” and “10,000-9,999.4 = 0”. The "0.6 value" may be outside the range of the standard deviation nσ.

Further, the measured value Ds included in the range of the standard deviation nσ = 5σ is “10,000 × about 99.99999% ≒ 9,999.99 value” and “10,000-9,999.99 = 0. The “01 value” may be outside the range of the standard deviation nσ, and the measured value Ds included in the range of the standard deviation nσ = 6σ is “10,000 × about 99.999999% ≈ 9,999.9999 value”. , "10,000-9,999.99999999 = 0.000001 value" may be outside the range of standard deviation nσ. Therefore, in this "tenth process", by calculating the standard deviation nσ (n ≧ 3), preferably the standard deviation 5σ, or the standard deviation 6σ, it is erroneously determined that the discharge waveform component exists. It is possible to define a determination area Aa (or a determination area Ab) that is sufficiently unlikely.

Subsequently, as shown in FIGS. 22 and 23, the processing unit 23 has the origin P0 and the point P1 described above, and the values on the vertical axis have the standard deviation nσ and the “16th value (about 0.08 in this example). ) ”, A point P3 with a value of“ 1 ”on the horizontal axis (an example of a“ third point ”), and a point P4 with a standard deviation nσ on the vertical axis and a value of“ 0 ”on the horizontal axis. A rectangular region A2 (an example of the "first rectangular region") having four points as vertices with the "fourth point") is specified. Further, in the processing unit 23, when the processing unit 23 defines the determination area Aa, the area obtained by adding the triangular area A1 and the rectangular area A2 is defined as the determination area Aa, and when the determination area Ab is defined, 2 In the dimensional graph, the area other than the triangular area A1 and the rectangular area A2 is defined as the determination area Ab, and the data capable of identifying these determination areas Aa and / or the determination area Ab is recorded in the inspection data Dc as the area data Da. As described above, the "tenth process" for defining the determination area Aa and / or the determination area Ab is completed.

In this case, as shown in FIG. 22, when the waveform W0 of the waveform data D0 does not contain the discharge waveform component, the value of the waveform data D8 and the value of the waveform data D7 recorded in the inspection data Dc are "th. When the two corresponding points (points "■" shown in the figure) are plotted on the two-dimensional graph, all the "second corresponding points" are plotted in the judgment area Aa (outside the judgment area Ab). Will be done. On the other hand, as shown in FIG. 23, when the waveform W0 of the waveform data D0 contains a discharge waveform component, the value of the waveform data D8 and the value of the waveform data D7 recorded in the inspection data Dc When the "second corresponding point (point" ■ "shown in the figure)" is plotted on the two-dimensional graph, some "second corresponding points" (corresponding to the measured value Ds of the discharge waveform component). The "second corresponding point") is plotted outside the determination area Aa (inside the determination area Ab). Therefore, by defining the determination area Aa and / or the determination area Ab by the procedure as described above, the discharge waveform is added to the waveform W0 of the waveform data D0 based on such area data Da and the waveform data D7 and D8. It can be suitably determined whether or not the component is contained.

On the other hand, the "tenth process" that defines "at least one region of the first determination region and the second determination region" is not limited to the above procedure, and "at least one region" is defined as follows. It can also be specified simply. Specifically, the processing unit 23 first, as the "tenth process", first plots the positions of the "first corresponding points" in the "ninth process" as shown in FIG. 25 (each "1st corresponding point" in the figure). The position of "◇") is specified, and the smallest square area A3 (an example of the "minimum square area") including all the specified "first corresponding points" is specified. Next, as an example, the standard deviation nσ is calculated according to the same procedure as the procedure specified in defining the determination areas Aa and Ab above.

Subsequently, the square region A3 is expanded in the vertical direction of the two-dimensional graph by the standard deviation nσ, and the enlarged square region is a determination region which is another example of the “first determination region” as the “measurement value range”. The area excluding the determination area Ac in the two-dimensional graph is defined as Ac and is defined as the determination area Ad which is another example of the "second determination area" as the "measured value range", and these determination areas Ac and / Alternatively, data that can identify the determination area Ad is recorded in the inspection data Dc as the area data Da. As described above, the "tenth process" for defining the determination area Ac and / or the determination area Ad is completed.

Next, with respect to the "judgment process" (determination of whether or not the waveform W0 of the waveform data D0 contains a discharge waveform component) in the series of processes described above for the inspection target X described above, refer to the attached drawing. Will be explained in detail.

When determining whether or not the waveform W0 of the waveform data D0 contains a discharge waveform component based on the region data Da and the waveform data D7 and D8 in the inspection data Dc, in the "10th process", the determination region Aa or When the determination area Ac is specified excessively narrowly (when the determination area Ab or the determination area Ad is specified excessively wide), a noise component or the like that is not a discharge waveform component may be erroneously determined to be a discharge waveform component. .. Therefore, in the measurement system 1 (data processing device 3) of this example, when the presence or absence of the discharge waveform component is determined in the "determination process", the following "notification process" is performed to perform the determination areas Aa to Ad. Is adopted so that the user can understand whether or not is preferably specified.

Specifically, as an example, when the determination area Aa and the determination area Ac (first determination area) are set to "at least one area", the processing unit 23 first sets the total number of "second corresponding points". When specifying the ratio of the "second corresponding point" that is not included in the judgment area Aa or the judgment area Ac, and setting the judgment area Ab or the judgment area Ad (second judgment area) as "at least one area" , The ratio of the "second corresponding point" included in the determination area Ab and the determination area Ad to the total number of "second corresponding points" is specified. That is, the ratio of the "second corresponding point determined to correspond to the discharge waveform component" to each "second corresponding point" is specified.

Next, when the specified ratio is "predetermined ratio (10% as an example)" or more, the message "The number of points determined to be the discharge waveform component has exceeded 10%" is displayed on the display unit 22. (An example of "predetermined notification processing"). Therefore, when the user who sees this message determines that so many discharge phenomena should not have occurred when measuring the waveform data D0, the determination areas Aa and Ac are defined too narrowly (determination area Ab). , Ad was defined too broadly), and the size of the judgment areas Aa, Ac, and / or the judgment areas Ab, Ad was manually adjusted, or each coefficient in the above series of procedures was changed to make a new one. Judgment areas Aa, Ac, and / or judgment areas Ab, Ad are defined. The above-mentioned "predetermined ratio" can be defined as any ratio other than "10%" within a range larger than "0%" and smaller than "100%".

Further, as the "notification process", the following process can be performed instead of the above process. Specifically, as an example, in the "determination process", as shown in FIG. 26, the processing unit 23 first plots the two-dimensional graph in the direction of the horizontal axis (an example of "an example of" the other of the vertical axis and the horizontal axis "). Specify Ga = 10 rectangular regions A10 to A19 (an example of the "second rectangular region") divided into 10 (example of "Ga = 10"). Next, when the determination area Aa is set to "at least one area", the processing unit 23 specifies the number of rectangular areas A10 to A19 in which the "second corresponding point" is included in the area other than the determination area Aa. When the determination area Ab is set to "at least one area", the number of rectangular areas A10 to A19 in which the determination area Ab includes the "second corresponding point" is specified. That is, the number of regions in the rectangular regions A10 to A19 in which the "second corresponding point determined to correspond to the discharge waveform component" exists is specified. At this time, in the example shown in the figure, the corresponding region is specified as one of the rectangular regions A10.

Subsequently, the processing unit 23 positions a "point determined to be a discharge waveform component" when the number of the specified regions is "a predetermined number (for example, Ga = 10/2 = 5)" or more. The message "The area has exceeded 50%" is displayed on the display unit 22 (another example of "predetermined notification processing"). In the example shown in the figure, since the number of the specified regions is only one, the above-mentioned determination result is displayed on the display unit 22 without displaying the above-mentioned message. When the above message is displayed, the user who sees the message narrowly defines the determination area Aa when it is determined that so many discharge phenomena should not have occurred when measuring the waveform data D0. It is judged that the judgment area Ab is too wide (the judgment area Ab is defined too broadly), and the size of the judgment area Aa and / or the judgment area Ab is manually adjusted, or each coefficient in the above series of procedures is changed. A new determination area Aa and / or a determination area Ab may be defined. The above-mentioned "Ga" can be defined as any natural number of 2 or more other than 10. Further, the "predetermined number" can be defined as any natural number other than 5 and Ga or less.

As described above, in the data processing device 3, the "measured value range data" of the "measured value range", which is a reference for specifying whether or not the discharge waveform component is included, is compared with the "measured value range data". "Comparison value data" that can specify whether or not the discharge waveform component is included is generated based on the waveform data D0, and the generated "measurement value range data" and "comparison value data" are included for inspection. Generate data Dc. Specifically, the processing unit 23 sequentially executes each process from the "first process" to the "tenth process" using the waveform data D0, and the "measurement" defined by the "tenth process". At least one area as the value range (in this example, the determination area Aa (or determination area Ac) as the "first determination area", and the determination area Ab (or determination) as the "second determination area". Area data Da (measured value range data) that can specify "both areas Ad)", waveform data D7 generated by "seventh process", and waveform data D8 (comparison) generated by "eighth process". The inspection data Dc including the value data) is generated. Further, the data processing program Dp causes the processing unit 23 of the data processing device 3 to execute each of the above processes.

Therefore, according to the data processing device 3 and the data processing program Dp, the area data Da for determining whether or not a discharge waveform component exists is provided based on one waveform data D0 acquired for the inspection target X. , Waveform data D7 and D8 that can determine whether or not a discharge waveform component exists can be generated by comparing the region data Da with the determination region (determination regions Aa to Ad). For this reason, it is not necessary to perform a plurality of measurement processes, and the influence of individual differences on a plurality of "measurement targets" and the variation of the measured value Ds due to the difference in the measurement environment for each measurement process are not affected. Not only can the accuracy of determining whether or not a discharge phenomenon has occurred be sufficiently improved, but it is not necessary to separately perform a process for generating a reference value (threshold) for determination, which is a burden on the user. Can be sufficiently reduced.

Further, in the data processing device 3, the processing unit 23 normalizes the absolute value of each “fifth value” of the waveform data D5 so that the maximum value becomes “1” prior to the “ninth processing”. Waveform data D9 is generated by calculating the "9th value", and the value obtained by multiplying each "9th value" by the coefficient Ka and the waveform data corresponding to the sampling timing of each "9th value". The "11th process" for generating new waveform data D7 is executed with the larger one of each "seventh value" of D7 as a new "seventh value".

Further, in the data processing device 3, the processing unit 23 sets each "seventh value" of the waveform data D7 with respect to the target "seventh value" before Ja sampling prior to the "nineth processing". For (Ja + 1) "7th values" from the "7th value" of the target to the "7th value" of the target, and for the "7th value" of the target from the "7th value" of the target Replaced with the maximum value of the predetermined Jc "7th values" including at least one of the (Jb + 1) "7th values" up to the "7th value" after Jb sampling. The "12th process" for generating new waveform data D7 is executed.

Further, in the data processing device 3, the processing unit 23 is smaller than the "seventh value" before I sampling among each "seventh value" of the waveform data D7 prior to the "ninth processing". The "seventh value" is the "seventh value" that is smaller than the "seventh value" before I sampling, and the "seventh value" before I sampling multiplied by the coefficient Kb. The "thirteenth process" for generating new waveform data D7 is executed by replacing it with one of the larger ones.

Therefore, according to the data processing device 3 and the data processing program Dp, the number of singular points at which the "seventh value" is close to "0" can be sufficiently reduced, thereby causing the discharge waveform. A determination area Aa and / or a determination area Ab that can determine the presence or absence of a component with higher accuracy can be defined, and new waveform data is used when determining the presence or absence of a discharge waveform component based on the inspection data Dc. By plotting the "second corresponding point" on the two-dimensional graph based on D7, it is possible to determine the presence or absence of the discharge waveform component with higher accuracy.

Further, in the data processing device 3, the processing unit 23 is sampled prior to the “9th process” and after the measured value Ds corresponding to the maximum value of each “7th value” of the waveform data D7. The "seventh value" corresponding to the measured value Ds is continuously obtained by including the target "seventh value" and the "seventh value" before Ha sampling with respect to the target "seventh value". When the value is equal to or less than the "11th value" obtained by multiplying the averaged value of the "7th value" of the Hb sampling to be performed by the coefficient Kc, the target "7th value" and the "7th value" before Ha sampling are applied. The "14th process" of generating new waveform data D7 is executed by substituting the "value of" with the "12th value" obtained by multiplying the predetermined coefficient Kd by whichever is smaller.

Therefore, according to the data processing device 3 and the data processing program Dp, when the waveform data D0 in which the rate of change of the measured value gradually decreases is targeted, the degree of decrease in the rate of change is disproportionately “third”. The change state in which the "value of 7" suddenly changes to a large value can be changed to an appropriate change state according to the degree of decrease in the rate of change, whereby the presence or absence of the discharge waveform component can be made more accurate. A determination area Aa and / or a determination area Ab that can be determined can be defined, and when determining the presence or absence of a discharge waveform component based on the inspection data Dc, on a two-dimensional graph based on the new waveform data D7. By plotting the "second corresponding point", the presence or absence of the discharge waveform component can be determined with higher accuracy.

Further, in the data processing device 3, the processing unit 23 sets the "seventh value" before Ha sampling to the average value of the "seventh value" for Hb sampling in the "14th processing". When it is smaller than the "13th value" multiplied by the coefficient Ke, the target "7th value" is replaced with the "13th value". Therefore, according to the data processing device 3 and the data processing program Dp, the changed state of the "seventh value" can be made a more suitable state.

Further, in the data processing device 3, the processing unit 23 samples before the measured value Ds corresponding to the maximum value of each “7th value” of the waveform data D7 prior to the “9th processing”. The "7th value" corresponding to the measured value Ds is converted into the "7th value" of the target and the "7th value" before Hc sampling with respect to the "7th value" of the target, and the coefficient Kf. Is replaced with the larger one of the "14th value" multiplied by, and the "15th process" for generating new waveform data D7 is executed.

Therefore, according to the data processing device 3 and the data processing program Dp, when the waveform data D0 in which the rate of change of the measured value gradually increases is targeted, the "seventh value" is a value close to "0". The number of singular points that become When determining the presence or absence of the discharge waveform component based on the data Dc, the presence or absence of the discharge waveform component can be more accurately determined by plotting the "second corresponding point" on the two-dimensional graph based on the new waveform data D7. It becomes possible to judge.

Further, in the data processing device 3, the processing unit 23 sets the target "seventh value" by both the target "seventh value" and the target "seventh value" in the "fifteenth process". When the value is smaller than the "15th value" obtained by multiplying the averaged value of the "7th value" of the continuous Hd sampling including the product by the coefficient Kg, the target "7th value" is set to the "15th value". Replace with "value". Therefore, according to the data processing device 3 and the data processing program Dp, the number of singular points at which the "seventh value" is close to "0" can be further reduced.

Further, in the data processing device 3, the processing unit 23 performs a regression line (two points in FIGS. 22 and 23) of each “first corresponding point” passing through the origin P0 of the two-dimensional graph in the “tenth processing”. The chain line L) is specified, the value on the vertical axis when the value on the horizontal axis of the two-dimensional graph in the specified regression line is "1" is specified as the "16th value", and the origin P0 of the two-dimensional graph is specified. , The point P1 where the vertical axis value is "16th value" and the horizontal axis value is "1", and the point P2 where the vertical axis value is "0" and the horizontal axis value is "1". The triangular region A1 to be the apex is specified, and "at least one region" is defined based on the specified triangular region A1.

Therefore, according to the data processing device 3 and the data processing program Dp, the triangular region A1 in which the "second corresponding point" corresponding to the value of the discharge waveform component is extremely unlikely to be plotted is reliably and easily identified. Based on this triangular region A1, the determination region Aa and / or the determination region Ab can be easily specified and the region data Da can be generated.

Further, in the data processing device 3, the processing unit 23 associates each "first value" of the waveform data D1 with the vertical axis of the two-dimensional graph and each "first value" with the horizontal axis of the two-dimensional graph. The "third corresponding point" of the "first value" and the "seventh value" is plotted on a two-dimensional graph by associating each "seventh value" of the waveform data D7 corresponding to the sampling timing of. At the same time, a "third corresponding point" in which the value on the horizontal axis is "0.5" or less and is equal to or less than the predetermined "17th value" is extracted, and in each extracted "third corresponding point". While calculating the standard deviation nσ of the value on the vertical axis, the origin P0, the point P1, the value on the vertical axis is the sum of the standard deviation nσ and the "16th value", and the value on the horizontal axis is the point P3 with "1". A rectangular region A2 having four points of points P4 having a standard deviation nσ on the vertical axis and a value of “0” on the horizontal axis is specified, and “at least one of them” is specified based on the specified rectangular region A2 and triangular region A1. The area of "is defined.

Therefore, according to the data processing device 3 and the data processing program Dp, the determination area Aa and / or the determination area Ab can be easily specified based on the specified rectangular area A2 and triangular area A1, and the waveform data D0. It is possible to easily generate the determination region Aa and / or the region data Da of the determination region Ab, which can determine with high accuracy whether or not the discharge waveform component is included in the waveform W0.

Further, in the data processing device 3, the processing unit 23 specifies the smallest square area A3 including all the "first corresponding points" in the "tenth process", and in the specified square area A3. Define "at least one area" based on. Therefore, according to the data processing device 3 and the data processing program Dp, the area data Da of the determination area Ac and / or the determination area Ad can be generated by a very simple process.

Further, in the data processing device 3, the processing unit 23 specifies the positional relationship between the “second corresponding point” and the “at least one region” based on the inspection data Dc, and converts the waveform data D0 into the waveform W0. The "determination process" for determining whether or not the discharge waveform component is included is executed, and the inspection result data Dr capable of specifying the determination result of the "determination process" is generated. Further, the data processing program Dp causes the processing unit 23 of the data processing device 3 to execute the above processing.

Therefore, according to the data processing device 3 and the data processing program Dp, it is not necessary to perform a plurality of measurement processes, which affects the influence of individual differences on a plurality of "measurement targets" and the difference in the measurement environment for each measurement process. Since it is not affected by the variation of the measured value Ds due to the occurrence, the accuracy of determining whether or not the discharge phenomenon has occurred can be sufficiently improved. Further, unlike the judgment by comparison with the reference value (threshold value), it is possible to avoid the erroneous judgment due to the influence of the change in the measurement environment and sufficiently improve the judgment accuracy.

Further, in the data processing device 3, when the processing unit 23 sets the determination area Aa (or the determination area Ac) as the "at least one area", the determination area Aa (or the determination area Aa (or) occupies the total number of "second corresponding points". , When the ratio of the "second corresponding point" not included in the determination area Ac) is specified and the determination area Ab (or the determination area Ad) is set to "at least one area", the "second corresponding point" is specified. The ratio of the "second corresponding point" included in the determination area Ab (or the determination area Ad) to the total number of the data is specified, and when the specified ratio is equal to or more than the predetermined ratio, the predetermined "notification" is specified. Execute "processing".

Further, in the data processing device 3, the processing unit 23 identifies Ga rectangular areas A10 to A19 obtained by dividing the two-dimensional graph into Ga pieces in the direction of the horizontal axis, and determines the determination area Aa (or the determination area Ac). When is set to "at least one region", the number of rectangular regions A10 to A19 in which the "second corresponding point" is included in the region other than the determination region Aa (or the determination region Ac) is specified, and the determination region is specified. When the Ab (or determination area Ad) is set to "at least one area", the number of rectangular areas A10 to A19 in which the determination area Ab (or determination area Ad) includes the "second corresponding point" is specified. Then, when the specified number is equal to or greater than the predetermined number, the predetermined "notification process" is executed.

Therefore, according to the data processing device 3 and the data processing program Dp, it is possible to reliably and easily recognize the determination result of whether or not the waveform W0 of the waveform data D0 contains a discharge waveform component.

Further, in the data processing device 3, the processing unit 23 displays a two-dimensional graph plotting the "second corresponding point" and the "area display" indicating the "at least one area" together with the determination result of the "determination process". It is displayed on the display unit 22. Therefore, according to the data processing device 3 and the data processing program Dp, it is possible to more reliably and more easily recognize the determination result of whether or not the waveform W0 of the waveform data D0 contains the discharge waveform component.

Further, the measurement system 1 includes the above-mentioned data processing device 3 and a measurement device 2 that executes measurement of a measurement target (inspection target X) at a predetermined sampling cycle and outputs waveform data D0. It is composed of. Therefore, according to this measurement system 1, a series of processes from acquisition (generation) of waveform data D0 to generation of inspection data Dc (or generation of inspection data Dc and inspection result data Dr) can be performed by one system. Can be executed.

The configuration of the "data processing device" and the "measurement system" and the processing procedure by the "data processing program" are the above-mentioned configuration of the data processing device 3 and the measurement system configured including the data processing device 3. It is not limited to the example of the configuration of 1 and the example of the description of the data processing program Dp. For example, when plotting from the "first corresponding point" to the "third corresponding point", "one of the vertical axis and the horizontal axis defined in advance" is set as the "vertical axis", and the "vertical axis and the horizontal axis" are set. Although the example in which "the other of the vertical axis" is set to "horizontal axis" is described, "one of the vertical axis and the horizontal axis defined in advance" is set to "horizontal axis", and "the other of the vertical axis and the horizontal axis" is set to "vertical axis". It may be plotted as an "axis".

Further, the configuration in which both the generation process of the inspection data Dc and the "determination process of whether or not the discharge waveform component is present" based on the inspection data Dc is executed in the data processing device 3 has been described as an example. It is also possible to adopt a configuration in which a "determination process" based on the inspection data Dc is executed in a "data processing device" separate from the data processing device 3 that generates the inspection data Dc. Further, the configuration in which the determination result of the "determination process" is displayed on the display unit 22 which is a component of the data processing device 3 has been described as an example, but the determination result is displayed on the display device (display unit) as an external device. It is also possible to adopt a configuration that allows.

Further, an example in which the measuring device 2 and the data processing device 3 separate from the measuring device 2 are provided to configure the measuring system 1 has been described, but the device in which the “measuring device” and the “data processing device” are integrated has been described. Can also be configured as a "measurement system". In addition, an example of processing and inspecting data about a wound component as a "measurement target" has been described, but this includes the target of data processing by the "data processing device" and the target of inspection by the "measurement system". Not limited to this, data processing and inspection processing can be executed based on various electronic components such as capacitors and resistors, and "waveform data" between arbitrary inspection points on the circuit board.

1 Measurement system 2 Measuring device 3 Data processing device 21 Operation unit 22 Display unit 23 Processing unit 24 Storage unit Aa to Ad Judgment area A1 Triangular area A2, A10 to A19 Rectangular area A3 Square area Ds Measured values D0, D0f, D1 to D9 Waveform data Da area data Dc Inspection data Dp Data processing program Dr Inspection result data P0 Origin P1 to P4 points W0, W0f, W1 to W7, W7a to W7f, W8, W9, Wa Waveform X Inspection target

Claims (18)

For specifying the presence or absence of discharge to specify whether or not a discharge waveform component is included in the signal waveform of the waveform data based on waveform data in which a plurality of measured values measured in a predetermined sampling cycle are recorded. A data processing device equipped with a processing unit that generates data.
Whether or not the processing unit includes the discharge waveform component by comparing the measured value range data of the measured value range, which is a specific reference for whether or not the discharge waveform component is included, with the measured value range. In the process of generating the comparison value data that can be specified based on the waveform data, and generating the discharge presence / absence identification data including the generated measurement value range data and the comparison value data .
From each of the measured values of the waveform data, a first value in which the amount of change in continuous N sampling (N is a predetermined natural number of 2 or more) is equal to or greater than a predetermined amount is extracted and the first value is extracted. The first process to generate the data of
Each of the measured values of the waveform data is converted into a second value obtained by averaging the measured values of a continuous M sampling portion (M is a predetermined natural number of 2 or more) including the measured value of the target. The second process of replacing and generating the second data,
A third value in which the amount of change in the continuous N sampling is equal to or greater than the predetermined amount is extracted from each of the second values of the second data to generate the third data. Processing and
A fourth process of calculating a fourth value obtained by converting each third value of the third data into an absolute value to generate a fourth data, and
After each measurement value of the waveform data is replaced with an averaged value of the measurement value of a continuous L sampling portion (L is a predetermined natural number of 2 or more) including the measurement value of the target. The fifth process of calculating the fifth value obtained by differentiating the measured value of the above to generate the fifth data, and
A sixth process of calculating the sixth value obtained by differentiating each of the fifth values of the fifth data to generate the sixth data, and
A seventh process of calculating the seventh value obtained by normalizing the absolute value of each of the sixth values of the sixth data to generate the seventh data, and
An eighth process of calculating an eighth value obtained by converting each first value of the first data into an absolute value to generate an eighth data, and
Correspond to each of the fourth values of the fourth data with either the vertical axis or the horizontal axis of the two-dimensional graph, and the other of the vertical axis and the horizontal axis of the two-dimensional graph with each of the fourth values. Corresponding each of the 7th values of the 7th data corresponding to the sampling timing of the 4 values, the 4th value and the 1st corresponding point of the 7th value are displayed on the two-dimensional graph, respectively. Ninth process to plot and
One of the vertical axis and the horizontal axis of the two-dimensional graph is associated with each of the eighth values of the eighth data, and the other of the vertical axis and the horizontal axis of the two-dimensional graph is associated with the other. The two-dimensional graph shows the eighth value and the second corresponding point of the seventh value by associating the seventh value of the seventh data corresponding to the sampling timing of the eighth value. A first determination region in which the second corresponding point corresponding to the measured value of the discharge waveform component is not plotted when plotted above, and the second correspondence corresponding to the measured value of the discharge waveform component. At least one region of the second determination region on which the points are plotted is placed on the two-dimensional graph according to a predetermined region defining procedure based on the arrangement of the first corresponding points on the two-dimensional graph. Execute the tenth process specified as the measured value range,
The region data that can identify at least one region defined by the tenth process is used as the measured value range data, and the seventh data and the eighth data are used as the comparison value data to identify the presence or absence of discharge. A data processing device that generates data for use. Prior to the ninth process, the processing unit calculates a ninth value obtained by normalizing the absolute value of each fifth value of the fifth data so that the maximum value is 1, and the ninth value. The value obtained by multiplying each of the 9th values of the 9th data by a coefficient Ka (Ka is a predetermined positive number of 1 or less) and sampling of each of the 9th values. 1 The data processing device described. Prior to the ninth process, the processing unit sets each of the seventh values of the seventh data to the target seventh value before Ja sampling (Ja is an arbitrary predetermined value). Jb sampling from the 7th value of the natural number) to the 7th value of the object (Ja + 1) and the 7th value of the object to the 7th value of the object. Pre-defined Jc pieces (Jc is pre-defined) including at least one of the (Jb + 1) 7th values up to the 7th value after (Jb is any pre-defined natural number). the data processing apparatus according to claim 1, wherein replacing each performing a twelfth process of generating a new said seventh data to the maximum value of among the seventh value of a natural number of 2 or more). Prior to the ninth processing, the processing unit uses the seventh value of the seventh data of the seventh data before I sampling (I is an arbitrary natural number defined in advance). The 7th value, which is also smaller than the 7th value before the I sampling, is combined with the 7th value, which is smaller than the 7th value before the I sampling, and the 7th value before the I sampling. 10 value and the data processing apparatus according to claim 1, wherein replacing either one large executes thirteenth process of generating a new said seventh data in multiplied by a positive number) of. The processing unit corresponds to the measured value sampled after the measured value corresponding to the maximum value of each of the seventh values of the seventh data prior to the ninth process. The value of 7 is continuously obtained by the 7th value before Ha sampling (Ha is an arbitrary natural number defined in advance) with respect to the 7th value of the target including the 7th value of the target. The eleventh value obtained by multiplying the value obtained by averaging the seventh value of the Hb sampling amount (Hb is a predetermined natural number of two or more) by the coefficient Kc (Kc is an arbitrary positive number prescribed in advance). When it is less than or equal to the value, the 7th value of the target is multiplied by the 7th value before Ha sampling and the predetermined coefficient Kd (Kd is an arbitrary predetermined positive number larger than Kc). The data processing apparatus according to any one of claims 1 to 4 , wherein the fourteenth process of generating the new seventh data by substituting the twelfth value with the smaller one is executed. In the 14th process, the processing unit uses a coefficient Ke (Ke is an arbitrary predetermined value) to a value obtained by averaging the 7th value of the Hb sampling before the 7th value of the Ha sampling. The data processing apparatus according to claim 5 , wherein the seventh value of the target is replaced with the thirteenth value when the value is smaller than the thirteenth value multiplied by a positive number). The processing unit corresponds to the measured value sampled prior to the measured value corresponding to the maximum value of each of the seventh values of the seventh data prior to the ninth process. A coefficient Kf (Hc is an arbitrary natural number defined in advance) is added to the 7th value of the target and the 7th value of the target before Hc sampling (Hc is an arbitrary natural number). Claims 1 to 6 execute the fifteenth process of generating new seventh data by replacing Ke with one of the fourteenth values multiplied by (arbitrarily a predetermined positive number), whichever is larger. The data processing apparatus according to any one of. In the fifteenth process, the processing unit has a continuous Hd sampling amount (Hd is defined in advance) including the seventh value of the target and the fourteenth value of the target. When it is smaller than the fifteenth value obtained by multiplying the averaged value of the seventh value of (two or more natural numbers) by the coefficient Kg (Kg is an arbitrary positive number defined in advance), the subject is concerned. The data processing apparatus according to claim 7 , wherein the seventh value is replaced with the fifteenth value. In the tenth process, the processing unit identifies a regression line of each of the first corresponding points passing through the origin of the two-dimensional graph, and the vertical axis of the two-dimensional graph in the identified regression line and the vertical axis of the two-dimensional graph. When the other value on the horizontal axis is 1, either the vertical axis or the horizontal axis of the two-dimensional graph is specified as the 16th value, and the origin of the two-dimensional graph, The first point where one of the predetermined values is the 16th value and the other value is 1, and the second point where the predetermined one value is 0 and the other value is 1. The data processing apparatus according to any one of claims 1 to 8 , which specifies a triangular region having the three points as vertices and defines at least one region based on the specified triangular region. The processing unit associates each of the first values of the first data with one of the vertical axis and the horizontal axis of the two-dimensional graph, whichever is predetermined, and the vertical axis and the horizontal axis of the two-dimensional graph. The other of the horizontal axes is associated with each of the seventh values of the seventh data corresponding to the sampling timing of the first value, and the first value and the third corresponding point of the seventh value are associated with each other. Is plotted on the two-dimensional graph, and the third corresponding point in which the other value of the vertical axis and the horizontal axis is "0.5" or less and is equal to or less than the predetermined 17th value is extracted. , The standard deviation nσ (n is an arbitrary predetermined natural number) of one of the predetermined values of the vertical axis and the horizontal axis at each of the extracted third corresponding points is calculated, and the origin is described. , The first point, the third point where the one predetermined value is the sum of the standard deviation nσ and the sixteenth value and the other value is 1, and the one defined in advance. A first rectangular region having four points of the fourth point whose value is the standard deviation nσ and the other value is 0 is specified, and the first rectangular region and the triangular region are specified. The data processing apparatus according to claim 9, which defines at least one area. The processing unit specifies the smallest square region including all the first corresponding points in the tenth process, and defines at least one region based on the identified square region. The data processing apparatus according to any one of 1 to 8. Based on the discharge presence / absence identification data, the processing unit specifies the positional relationship between the second corresponding point and the at least one region, and whether the signal waveform of the waveform data includes the discharge waveform component. The data processing apparatus according to any one of claims 1 to 11 , which executes a determination process for determining whether or not to perform, and generates determination result data capable of specifying the determination result of the determination process. When the first determination region is at least one of the regions, the processing unit specifies the ratio of the second correspondence points not included in the first determination region to the total number of the second correspondence points. At the same time, when the second determination area is set to the at least one area, the ratio of the second correspondence point included in the second determination area to the total number of the second correspondence points is specified and specified. The data processing apparatus according to claim 12 , wherein when the ratio is equal to or higher than a predetermined ratio, the predetermined notification processing is executed. The processing unit identifies Ga second rectangular regions obtained by dividing the two-dimensional graph into Ga (Ga is two or more natural numbers defined in advance) in the other direction of the vertical axis and the horizontal axis. When the first determination area is set to at least one of the areas, the number of the second rectangular areas in which the second corresponding point is included in the area other than the first determination area is specified, and the number of the second rectangular areas is specified. When the second determination region is set to at least one of the regions, the number of the second rectangular regions in which the second corresponding point is included in the second determination region is specified, and the specified number is predetermined. The data processing apparatus according to claim 12 , wherein a predetermined notification process is executed when the number is equal to or more than a specified number. Any of claims 12 to 14 , wherein the processing unit displays the two-dimensional graph plotting the second corresponding points and the area display indicating the at least one area on the display unit together with the determination result of the determination process. The data processing apparatus described in 1. The data processing device according to any one of claims 1 to 15.
A measurement system including a measuring device that executes measurement of a measurement target at a predetermined sampling cycle and outputs the waveform data. For specifying the presence or absence of discharge to specify whether or not a discharge waveform component is included in the signal waveform of the waveform data based on waveform data in which a plurality of measured values measured in a predetermined sampling cycle are recorded. A data processing program that causes the processing unit of a data processing device to execute data generation processing.
It is possible to specify whether or not the discharge waveform component is included by comparing the measured value range data of the measured value range, which is a specific reference for whether or not the discharge waveform component is included, with the measured value range. In the process of generating the comparison value data based on the waveform data and generating the discharge presence / absence identification data including the generated measurement value range data and the comparison value data .
From each of the measured values of the waveform data, a first value in which the amount of change in continuous N sampling (N is a predetermined natural number of 2 or more) is equal to or greater than a predetermined amount is extracted and the first value is extracted. The first process to generate the data of
Each of the measured values of the waveform data is converted into a second value obtained by averaging the measured values of a continuous M sampling portion (M is a predetermined natural number of 2 or more) including the measured value of the target. The second process of replacing and generating the second data,
A third value in which the amount of change in the continuous N sampling is equal to or greater than the predetermined amount is extracted from each of the second values of the second data to generate the third data. Processing and
A fourth process of calculating a fourth value obtained by converting each third value of the third data into an absolute value to generate a fourth data, and
After each measurement value of the waveform data is replaced with an averaged value of the measurement value of a continuous L sampling portion (L is a predetermined natural number of 2 or more) including the measurement value of the target. The fifth process of calculating the fifth value obtained by differentiating the measured value of the above to generate the fifth data, and
A sixth process of calculating the sixth value obtained by differentiating each of the fifth values of the fifth data to generate the sixth data, and
A seventh process of calculating the seventh value obtained by normalizing the absolute value of each of the sixth values of the sixth data to generate the seventh data, and
An eighth process of calculating an eighth value obtained by converting each first value of the first data into an absolute value to generate an eighth data, and
Correspond to each of the fourth values of the fourth data with either the vertical axis or the horizontal axis of the two-dimensional graph, and the other of the vertical axis and the horizontal axis of the two-dimensional graph with each of the fourth values. Corresponding each of the 7th values of the 7th data corresponding to the sampling timing of the 4 values, the 4th value and the 1st corresponding point of the 7th value are displayed on the two-dimensional graph, respectively. Ninth process to plot and
One of the vertical axis and the horizontal axis of the two-dimensional graph is associated with each of the eighth values of the eighth data, and the other of the vertical axis and the horizontal axis of the two-dimensional graph is associated with the other. The two-dimensional graph shows the eighth value and the second corresponding point of the seventh value by associating the seventh value of the seventh data corresponding to the sampling timing of the eighth value. A first determination region in which the second corresponding point corresponding to the measured value of the discharge waveform component is not plotted when plotted above, and the second correspondence corresponding to the measured value of the discharge waveform component. At least one region of the second determination region on which the points are plotted is placed on the two-dimensional graph according to a predetermined region defining procedure based on the arrangement of the first corresponding points on the two-dimensional graph. In addition to having the processing unit execute the tenth process defined as the measured value range,
The region data that can identify at least one region defined by the tenth process is used as the measured value range data, and the seventh data and the eighth data are used as the comparison value data to specify the presence or absence of discharge. A data processing program that causes the processing unit to execute a process for generating data for data. Based on the discharge presence / absence identification data, it is determined whether or not the second corresponding point is included in the at least one region, and whether or not the discharge waveform component is included in the signal waveform of the waveform data. The data processing program according to claim 17 , wherein the processing unit executes a determination process for determining the above and a process for generating determination result data capable of specifying the determination result of the determination process.

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