JP6959773B2 - Room pressure control system - Google Patents

Description

The present invention relates to a room pressure control system that holds the room pressure of an air-conditioned room at a target room pressure.

As shown in FIG. 10, the existing room pressure control system that holds the room pressure of the air-conditioned room in which a plurality of local exhaust fans are installed at the target room pressure is an air supply duct that supplies air to the air-conditioned room 11. 12, the return air duct 13 that returns the air of the air conditioning target room 11 to the air supply duct 12, and the exhaust duct 14 that exhausts a part of the air that has flowed into the return air duct 13 from the air conditioning target room 11 to the atmosphere. Local exhaust ducts 15a and 15b connected to the air-conditioning target room 11 and exhausting a part of the air of the air-conditioning target room 11 to the atmosphere, an air supply fan 16 installed in the air supply duct 12, and an exhaust duct 14 installed. The exhaust fan 17 and the local exhaust fans 18a and 18b installed in the local exhaust ducts 15a and 15b are installed in the return air duct 13 extending between the air conditioning target chamber 11 and the connection point 29 of the exhaust duct 14. A pressure control damper 19 that adjusts the amount of air flowing through the return air duct 13, a pressure sensor 33 that is installed in the exhaust duct 14 and measures the pressure inside the exhaust duct, and an extension between the air supply fan 16 and the air-conditioned room 11. It includes an air volume sensor 21 installed in the air supply duct 12 to measure the air volume in the air supply duct, and a room pressure sensor 22 installed in the air conditioning target room 11 to measure the room pressure of the air conditioning target room 11.

In this chamber pressure control system, the target pressure in the exhaust duct of the exhaust duct 14 is set, the target air volume in the air supply duct of the air flowing through the air supply duct 12 is set, and the target chamber pressure of the air conditioning target chamber 11 is set. Will be done. The air supply duct 12, the return air duct 13, the exhaust duct 14, the local exhaust ducts 15a and 15b include motor dampers 24 (MD), volume dampers 25a to 25i (VD), non-leak dampers 28a and 28b (NLD), and chambers. 26a and 26b are installed. Indicators 27, 31, and 34 are connected to the motor damper 24 (MD), the exhaust fan 17, and the air volume sensor 21.

In the chamber pressure control system shown in FIG. 10, the exhaust air volume of the exhaust fan 17 is adjusted so that the pressure inside the exhaust duct measured by the pressure sensor 33 becomes the target pressure inside the exhaust duct, and the inside of the air supply duct measured by the air volume sensor 21. The air supply air volume of the air supply fan 16 is adjusted so that the air volume becomes the target air volume in the air supply duct, and the pressure is controlled so that the room pressure of the air conditioning target room 11 measured by the room pressure sensor 22 becomes the target room pressure. The amount of air flowing through the return air duct 13 is adjusted by the damper 19. Patent Document 1 discloses a room pressure control system that exhausts a part of the air in the air-conditioned room and circulates a part of the air in the air-conditioned room to the air-conditioned room again.

Japanese Unexamined Patent Publication No. 2010-107064

In the existing room pressure control system shown in FIG. 10, when the amount of local exhaust air exhausted to the atmosphere from the local exhaust ducts 15a and 15b changes due to the start and stop (ON / OFF) of the local exhaust fans 18a and 18b, for example. As shown in FIG. 11, the air supply air volume to the air-conditioned room 11 is 1500 m ³ / h, and the local exhaust air volume is 400 m ³ / h (operation mode 1) to 300 m ³ / h (operation mode 2). When the target pressure in the exhaust duct is changed from -30Pa to -40Pa and the local exhaust air volume is changed from 300m ³ / h (operation mode 2) to 200m ³ / h (operation mode 3). The target pressure in the exhaust duct must be changed from -40 Pa to -50 Pa, and the amount of air supplied to the air-conditioned room ^{is changed from 1500 m 3} / h to 750 m ³ / h (operation mode 4). When the local exhaust air volume was 400 m ³ / h, the target pressure in the exhaust duct was changed to -150 Pa, and the local exhaust air volume was changed from 400 m ³ / h (operation mode 4) to 300 m ³ / h (operation mode 5). In this case, the target pressure in the exhaust duct must be changed from -150 Pa to -160 Pa.

In the existing room pressure control system, when adjusting the trial run of the room pressure control system, not only the target pressure in the exhaust duct must be changed at any time according to the change in the local exhaust air volume, but also the target pressure in the exhaust duct is changed. After that, the dampers of the volume dampers 25a to 25i installed in the air supply duct 12, the return air duct 13, the exhaust duct 14, and the local exhaust ducts 15a and 15b so that the room pressure of the air-conditioned room 11 becomes the target room pressure. The opening must be finely adjusted by repeating trial and error, and a large amount of adjustment time and labor is required to maintain the room pressure of the air-conditioned room 11 at the target room pressure.

An object of the present invention is the total exhaust air volume exhausted from the exhaust duct and the local exhaust duct and the outside air and return air duct flowing into the air supply duct even when the local exhaust air volume exhausted from the local exhaust duct to the atmosphere is changed. It is not necessary to change the target air volume in the return air duct that equalizes the total air supply air volume consisting of the air returned from the air, and the damper opening of the volume damper installed in each duct is finely adjusted by repeating trial and error. It is an object of the present invention to provide a room pressure control system that can save work and maintain the room pressure of an air-conditioned room at a target room pressure without requiring time and effort.

The premise of the present invention for solving the above problems is a room pressure control system that holds the room pressure of at least one air-conditioned room at the target room pressure.

The first feature of the present invention in the above premise is that the room pressure control system is connected to the air-conditioned room to supply air to the air-conditioned room, and is connected to the air-conditioned room to supply air to the air-conditioned room. The return air duct that returns air to the air supply duct, the first exhaust duct that is connected to the return air duct and exhausts a part of the air that has flowed into the return air duct from the air conditioning target room to the atmosphere, and the air conditioning target room. At least one second exhaust duct that is connected and exhausts a part of the air in the air-conditioned room to the atmosphere, an air supply fan installed in the air supply duct, and a first exhaust fan installed in the first exhaust duct. And the pressure that adjusts the amount of air flowing through the return air duct that is installed in the return air duct that extends between the second exhaust fan installed in the second exhaust duct and the branch point of the air conditioning target room and the first exhaust duct. A control damper, a first air volume sensor installed in the return air duct extending from the branch point between the return air duct and the first exhaust duct toward the air supply fan, and measuring the air volume in the return air duct, an air supply fan and air conditioning. It has a second air volume sensor installed in the air supply duct extending between the target room and measuring the air volume in the air supply duct, and a room pressure sensor installed in the air conditioning target room to measure the room pressure of the air conditioning target room. However, in the room pressure control system, a target air volume in the return air duct that equalizes the total exhaust air volume exhausted from the first and second exhaust ducts and the outside air volume flowing into the air supply duct is set and flows to the air supply duct. The target air volume in the air supply duct is set, the target chamber pressure in the air conditioning target room is set, and the air volume in the return air duct measured by the first air volume sensor becomes the target air volume in the return air duct. The air supply air volume of the air supply fan is adjusted so that the first exhaust air volume of the exhaust fan becomes a predetermined air volume and the air volume in the air supply duct measured by the second air volume sensor becomes the target air volume in the air supply duct. The amount of air flowing through the return air duct is adjusted by the pressure control damper so that the room pressure of the air-conditioned room measured by the room pressure sensor becomes the target room pressure.

As an example of the present invention having the first feature, the chamber pressure control system includes adjustment of the first exhaust air volume in the first exhaust fan, adjustment of the air supply air volume in the air supply fan, and adjustment of the air air volume in the pressure control damper. At the same time, the adjustment speed of the air air volume in the pressure control damper is the fastest, the adjustment speed of the air supply air volume in the air supply fan is the second fastest, and the adjustment speed of the first exhaust air volume in the first exhaust fan is the pressure. It is slower than the adjustment speed of the air volume in the control damper and the adjustment speed of the air supply air volume in the air supply fan.
As another example of the present invention having the first feature, in the room pressure control system, the amount of outside air flowing into the air supply duct is kept constant, and a plurality of second exhaust ducts connected to the air-conditioned room are used. The amount of second exhaust air exhausted from the second exhaust duct is changed by starting and stopping of the plurality of installed second exhaust fans, or a plurality of installed second exhaust ducts are connected to the air-conditioned room. When the second exhaust air volume exhausted from the second exhaust duct is changed by changing the exhaust air volume of the second exhaust fan, and the chamber pressure control system changes the second exhaust air volume exhausted from the second exhaust duct. When the air volume in the return air duct measured by the first air volume sensor becomes the target air volume in the return air duct, the first exhaust air volume of the first exhaust fan changes to a predetermined air volume.

The second feature of the present invention in the above premise is that the room pressure control system is connected to the air-conditioned room to supply air to the air-conditioned room, and is connected to the air-conditioned room to supply air to the air-conditioned room. The return air duct that returns air to the air supply duct, the first exhaust duct that is connected to the return air duct and exhausts a part of the air that has flowed into the return air duct from the air conditioning target room to the atmosphere, and the air conditioning target room. At least one second exhaust duct that is connected and exhausts a part of the air in the air-conditioned room to the atmosphere, an air supply fan installed in the air supply duct, and a first exhaust fan installed in the first exhaust duct. And the second exhaust fan installed in the second exhaust duct, the constant air volume device or variable air volume device installed in the air supply duct extending between the air supply fan and the air conditioning target room, the air conditioning target room and the first A pressure control damper installed in the return air duct extending between the branch point of the exhaust duct and adjusting the amount of air flowing through the return air duct, and the branch point between the return air duct and the first exhaust duct toward the air supply fan. It has an air volume sensor installed in the return air duct that extends to measure the air volume in the return air duct, and a room pressure sensor installed in the air conditioning target room to measure the room pressure of the air conditioning target room. , The target air volume in the return air duct that equalizes the total exhaust air volume exhausted from the first and second exhaust ducts and the outside air volume flowing into the air supply duct is set, and the target room pressure of the air conditioning target room is set. , The air supply air volume of the air supplied to the air-conditioned room is maintained at a predetermined air supply air volume by the constant air volume device or the variable air volume device, and the air volume in the return air duct measured by the air volume sensor becomes the target air volume in the return air duct. As a result, the first exhaust air volume of the first exhaust fan becomes a predetermined air volume, and the air air volume flowing through the return air duct by the pressure control damper so that the room pressure of the air-conditioned room measured by the room pressure sensor becomes the target room pressure. Is to be adjusted.

As an example of the present invention having the second feature, the chamber pressure control system can adjust the exhaust air volume in the first exhaust fan, adjust the air volume in the constant air volume device or the variable air volume device, and adjust the air air volume in the pressure control damper. At the same time, the adjustment speed of the air volume in the pressure control damper is the fastest, the air volume adjustment speed in the constant air volume device or the variable air volume device is the second fastest, and the adjustment speed of the first exhaust air volume in the first exhaust fan is the pressure. It is slower than the air volume adjustment speed in the control damper and the air volume adjustment speed in the constant air volume device or variable air volume device.

As another example of the present invention having the second feature, in the room pressure control system, the amount of outside air flowing into the air supply duct is kept constant, and a plurality of second exhaust ducts connected to the air-conditioned room are used. The amount of second exhaust air exhausted from the second exhaust duct is changed by starting and stopping of the plurality of installed second exhaust fans, or a plurality of installed second exhaust ducts are connected to the air-conditioned room. When the second exhaust air volume exhausted from the second exhaust duct is changed by changing the exhaust air volume of the second exhaust fan, and the chamber pressure control system changes the second exhaust air volume exhausted from the second exhaust duct. When the air volume in the return air duct measured by the air volume sensor becomes the target air volume in the return air duct, the first exhaust air volume of the first exhaust fan changes to a predetermined air volume.

As another example of the present invention having the first and second features, in the room pressure control system, the supply air amount of the air supplied to the air-conditioned room is changed, and in the room pressure control system, the supply air amount is changed. When changed, the target air volume in the return air duct is changed.

The third feature of the present invention in the above premise is that the room pressure control system is connected to the air-conditioned room to supply air to the air-conditioned room, and is connected to the air-conditioned room to supply air to the air-conditioned room. The return air duct that returns air to the air supply duct, the first exhaust duct that is connected to the return air duct and exhausts a part of the air that has flowed into the return air duct from the air conditioning target room to the atmosphere, and the air conditioning target room. At least one second exhaust duct that is connected and exhausts a part of the air in the air-conditioned room to the atmosphere, an air supply fan installed in the air supply duct, and a first exhaust fan installed in the first exhaust duct. And the pressure that adjusts the amount of air flowing through the return air duct that is installed in the return air duct that extends between the second exhaust fan installed in the second exhaust duct and the branch point of the air conditioning target room and the first exhaust duct. A control damper, a pressure sensor installed in the return air duct extending from the branch point between the return air duct and the first exhaust duct toward the air supply fan to measure the pressure inside the return air duct, and the air supply fan and the air conditioning target room. It has an air volume sensor installed in the air supply duct extending between the air supply duct to measure the air volume in the air supply duct and a room pressure sensor installed in the air conditioning target room to measure the room pressure of the air conditioning target room. In the control system, a target pressure in the return air duct that equalizes the total amount of exhaust air exhausted from the first and second exhaust ducts and the amount of outside air flowing into the air supply duct is set, and the air supplied to the air supply duct is supplied. The target air volume in the duct is set, the target room pressure in the air-conditioned room is set, and the pressure in the return air duct measured by the pressure sensor becomes the target pressure in the return air duct, so that the first exhaust of the first exhaust fan The air supply air volume of the air supply fan is adjusted so that the air volume becomes a predetermined air volume and the air volume in the air supply duct measured by the air volume sensor becomes the target air volume in the air supply duct, and the air conditioning target measured by the room pressure sensor. The amount of air flowing through the return air duct is adjusted by the pressure control damper so that the chamber pressure becomes the target chamber pressure.

As an example of the present invention having the third feature, the chamber pressure control system includes adjustment of the first exhaust air volume in the first exhaust fan, adjustment of the air supply air volume in the air supply fan, and adjustment of the air air volume in the pressure control damper. At the same time, the adjustment speed of the air air volume in the pressure control damper is the fastest, the adjustment speed of the air supply air volume in the air supply fan is the second fastest, and the adjustment speed of the first exhaust air volume in the first exhaust fan is the pressure. It is slower than the adjustment speed of the air volume in the control damper and the adjustment speed of the air supply air volume in the air supply fan.

The fourth feature of the present invention in the above premise is that the room pressure control system is connected to the air-conditioned room to supply air to the air-conditioned room, and is connected to the air-conditioned room to supply air to the air-conditioned room. The return air duct that returns air to the air supply duct, the first exhaust duct that is connected to the return air duct and exhausts a part of the air that has flowed into the return air duct from the air conditioning target room to the atmosphere, and the air conditioning target room. At least one second exhaust duct that is connected and exhausts a part of the air in the air-conditioned room to the atmosphere, an air supply fan installed in the air supply duct, and a first exhaust fan installed in the first exhaust duct. And the second exhaust fan installed in the second exhaust duct, the constant air volume device or variable air volume device installed in the air supply duct extending between the air supply fan and the air conditioning target room, the air conditioning target room and the first A pressure control damper installed in the return air duct extending between the branch point of the exhaust duct and adjusting the amount of air flowing through the return air duct, and the branch point between the return air duct and the first exhaust duct toward the air supply fan. It has a pressure sensor installed in the return air duct that extends to measure the pressure inside the return air duct and a room pressure sensor installed in the air-conditioned room to measure the room pressure of the air-conditioned room. , The target pressure in the return air duct that equalizes the total exhaust air volume exhausted from the first and second exhaust ducts and the outside air volume flowing into the air supply duct is set, and the target room pressure of the air conditioning target room is set. , The air supply air volume of the air supplied to the air-conditioned room is maintained at a predetermined air supply air volume by the constant air volume device or the variable air volume device, and the pressure in the return air duct measured by the pressure sensor becomes the target pressure in the return air duct. As a result, the first exhaust air volume of the first exhaust fan becomes a predetermined air volume, and the air air volume flowing through the return air duct by the pressure control damper so that the room pressure of the air-conditioned room measured by the room pressure sensor becomes the target room pressure. Is to be adjusted.

As an example of the present invention having the fourth feature, the chamber pressure control system can adjust the exhaust air volume in the first exhaust fan, adjust the air volume in the constant air volume device or the variable air volume device, and adjust the air air volume in the pressure control damper. At the same time, the air air volume adjustment speed in the pressure control damper is the fastest, the air volume adjustment speed in the variable air volume device is the second fastest, and the exhaust air volume adjustment speed in the first exhaust fan is the air air volume adjustment speed in the pressure control damper. Adjustment speed and slower than the air volume adjustment speed in a constant air volume device or variable air volume device.

As another example of the present invention having the third and fourth features, in the room pressure control system, the amount of outside air flowing into the air supply duct is kept constant, and a plurality of second units connected to the air-conditioned room are connected. The amount of second exhaust air exhausted from the second exhaust duct is changed by starting and stopping of a plurality of second exhaust fans installed in the exhaust duct, or installed in a plurality of second exhaust ducts connected to the air conditioning target room. The second exhaust air volume exhausted from the second exhaust duct is changed by changing the exhaust air volume of the plurality of second exhaust fans, and the chamber pressure control system changes the second exhaust air volume exhausted from the second exhaust duct. If this is the case, the pressure inside the return air duct measured by the pressure sensor becomes the target pressure inside the return air duct, so that the first exhaust air volume of the first exhaust fan changes to a predetermined air volume.

As another example of the present invention having the third and fourth features, in the room pressure control system, the supply air volume of the air supplied to the air-conditioned room is changed, and in the room pressure control system, the supply air volume is changed. When changed, the target pressure in the return air duct is changed.

According to the room pressure control system of the present invention having the first feature, the air volume in the return air duct measured by the first air volume sensor becomes the target air volume in the return air duct, so that the first exhaust air volume of the first exhaust fan Becomes a predetermined air volume, so that the total exhaust air volume exhausted from the first exhaust duct and the second exhaust duct becomes equal to the outside air air volume flowing into the air supply duct, and the air volume balance between the total exhaust air volume and the outside air volume becomes equal. Since it is maintained, even if the second exhaust air volume discharged to the atmosphere from the second exhaust duct is changed, it is not necessary to change the target air volume in the return air duct, and the dampers of the volume dampers installed in each duct are opened. It is possible to omit the work of finely adjusting the degree by repeating trial and error, and it is possible to maintain the room pressure of the air-conditioned room at the target room pressure without requiring adjustment time and labor. In the room pressure control system, the air supply air volume of the air supply fan is adjusted so that the air volume in the air supply duct measured by the second air volume sensor becomes the target air volume in the air supply duct while adjusting the first exhaust air volume of the first exhaust fan. Since the amount of air flowing through the return air duct is adjusted by the pressure control damper so that the room pressure of the air-conditioned room that is adjusted and measured by the room pressure sensor becomes the target room pressure, the room pressure of the air-conditioned room is set as the target room pressure. Can be securely and easily held.

The adjustment of the first exhaust air volume in the first exhaust fan, the adjustment of the air supply air volume in the air supply fan, and the adjustment of the air air volume in the pressure control damper are performed at the same time, and the adjustment speed of the air air volume in the pressure control damper is the fastest. , The adjustment speed of the air supply air volume in the air supply fan is the second fastest, and the adjustment speed of the first exhaust air volume in the first exhaust fan is the adjustment speed of the air air volume in the pressure control damper and the adjustment speed of the air supply air volume in the air supply fan. The slower room pressure control system is subject to air conditioning by making the adjustment speed of the air air volume of the pressure control damper that sets the room pressure of the room to be air-conditioned to the target room pressure in conjunction with the measurement result of the room pressure sensor. The chamber pressure can be quickly set to the target chamber pressure, and the air volume in the air supply duct is set to the target air volume in the air supply duct in conjunction with the measurement result of the second air volume sensor. The adjustment speed is set to the second fastest, and the air volume in the return air duct is set to the target air volume in the return air duct in conjunction with the measurement result of the first air volume sensor. By doing so, it is possible to stabilize the air volume of the air circulating in the system, stabilize the room pressure of the air-conditioned room, and reliably maintain the room pressure of the air-conditioned room at the target room pressure.

According to the room pressure control system of the present invention having the second feature, the first exhaust air volume of the first exhaust fan is determined by the air volume in the return air duct measured by the air volume sensor becoming the target air volume in the return air duct. As a result, the total exhaust air volume exhausted from the first exhaust duct and the second exhaust duct becomes equal to the outside air volume flowing into the air supply duct, and the air volume balance between the total exhaust air volume and the outside air volume is maintained. Therefore, even if the second exhaust air volume exhausted to the atmosphere from the second exhaust duct is changed, it is not necessary to change the target air volume in the return air duct, and the damper opening of the volume damper installed in each duct can be changed. It is possible to omit the work of finely adjusting by repeating trial and error, and it is possible to maintain the room pressure of the air-conditioned room at the target room pressure without requiring adjustment time and labor. In the room pressure control system, the air supply air volume of the air supplied to the air-conditioned room is maintained at a predetermined air supply air volume by a constant air volume device or a variable air volume device while adjusting the first exhaust air volume of the first exhaust fan. Since the amount of air flowing through the return air duct is adjusted by the pressure control damper so that the room pressure of the air-conditioned room measured by the pressure sensor becomes the target room pressure, the room pressure of the air-conditioned room can be reliably and easily set to the target room pressure. Can be held in.

The adjustment of the exhaust air volume in the first exhaust fan, the air volume adjustment in the constant air volume device or the variable air volume device, and the adjustment of the air air volume in the pressure control damper are performed at the same time, and the adjustment speed of the air air volume in the pressure control damper is the fastest. The air volume adjustment speed in the constant air volume device or variable air volume device is the second fastest, and the adjustment speed of the first exhaust air volume in the first exhaust fan is the adjustment speed of the air air volume in the pressure control damper and the air volume adjustment in the constant air volume device or variable air volume device. The room pressure control system, which is slower than the speed, air-conditions by making the adjustment speed of the air volume of the pressure control damper that sets the room pressure of the air-conditioned room to the target room pressure in conjunction with the measurement result of the room pressure sensor. The room pressure of the target room can be quickly set to the target room pressure, and the air volume adjustment speed in the constant air volume device or variable air volume device is the second fastest, and the air volume in the return air duct is linked to the measurement result of the air volume sensor. By setting the adjustment speed of the first exhaust air volume of the first exhaust fan to the third, the air volume of the air circulating in the system can be stabilized, and the room of the air-conditioned room The pressure is stable, and the room pressure of the air-conditioned room can be reliably maintained at the target room pressure.

The amount of outside air flowing into the air supply duct is kept constant, and is exhausted from the second exhaust duct by starting and stopping a plurality of second exhaust fans installed in the plurality of second exhaust ducts connected to the air-conditioned room. A second exhaust from the second exhaust duct due to a change in the second exhaust air volume or a change in the exhaust air volume of a plurality of second exhaust fans installed in the plurality of second exhaust ducts connected to the air-conditioned room. When the exhaust air volume is changed and the second exhaust air volume exhausted from the second exhaust duct is changed, the air volume in the return air duct measured by the first air volume sensor or the air volume sensor becomes the target air volume in the return air duct. The chamber pressure control system in which the first exhaust air volume of the first exhaust fan changes to a predetermined air volume is provided in the first exhaust duct and the second exhaust even when the second exhaust air volume exhausted to the atmosphere from the second exhaust duct is changed. Since the first exhaust air volume of the first exhaust fan changes to a predetermined air volume so that the total exhaust air volume exhausted from the duct and the outside air air volume flowing into the supply air duct become equal, the target air volume in the return air duct is changed. It is not necessary, and it is possible to omit the work of finely adjusting the damper opening of the volume damper installed in each duct by repeating trial and error, and the target is the room pressure of the air-conditioned room without the need for adjustment time and labor. Can be maintained at room pressure.

When the air supply air volume of the air supplied to the air-conditioned room is changed, the target air volume in the return air duct is changed. In the room pressure control system, the air supply air volume of the air supplied to the air-conditioned room is changed. As a result, the target air volume in the return air duct that equalizes the total exhaust air volume and the outside air volume is changed, but even if the second exhaust air volume exhausted to the atmosphere from the second exhaust duct is changed, the changed return There is no need to further change the target air volume in the air duct, and it is possible to omit the work of finely adjusting the damper opening of the volume damper installed in each duct by repeating trial and error, and it does not require adjustment time and labor. In addition, the room pressure of the air-conditioned room can be maintained at the target room pressure.

According to the room pressure control system of the present invention having the third feature, the pressure in the return air duct measured by the pressure sensor becomes the target pressure in the return air duct, so that the exhaust air volume of the exhaust fan becomes a predetermined air volume. As a result, the total exhaust air volume exhausted from the first exhaust duct and the second exhaust duct becomes equal to the outside air volume flowing into the supply air duct, and the air volume balance between the total exhaust air volume and the outside air volume is maintained. 2 Even if the second exhaust air volume discharged from the exhaust duct to the atmosphere is changed, it is not necessary to change the target pressure in the return air duct, and the damper opening of the volume damper installed in each duct is repeated by trial and error. However, the work of fine adjustment can be omitted, and the room pressure of the air-conditioned room can be maintained at the target room pressure without requiring adjustment time and labor. In the chamber pressure control system, the air supply air volume of the air supply fan is adjusted so that the air volume in the air supply duct measured by the air volume sensor becomes the target air volume in the air supply duct as well as the adjustment of the first exhaust air volume of the first exhaust fan. Since the air air volume flowing through the return air duct is adjusted by the pressure control damper so that the room pressure of the air-conditioned room measured by the room pressure sensor becomes the target room pressure, the room pressure of the air-conditioned room is surely set to the target room pressure. And it can be easily held.

The adjustment of the first exhaust air volume in the first exhaust fan, the adjustment of the air supply air volume in the air supply fan, and the adjustment of the air air volume in the pressure control damper are performed at the same time, and the adjustment speed of the air air volume in the pressure control damper is the fastest. , The adjustment speed of the air supply air volume in the air supply fan is the second fastest, and the adjustment speed of the first exhaust air volume in the first exhaust fan is the adjustment speed of the air air volume in the pressure control damper and the adjustment speed of the air supply air volume in the air supply fan. The slower room pressure control system is subject to air conditioning by making the adjustment speed of the air air volume of the pressure control damper that sets the room pressure of the room to be air-conditioned to the target room pressure in conjunction with the measurement result of the room pressure sensor. The room pressure can be quickly set to the target room pressure, and the air volume in the air supply duct is set to the target air volume in the air supply duct in conjunction with the measurement result of the air volume sensor. Is the second fastest, and the pressure inside the return air duct is set to the target pressure inside the return air duct in conjunction with the measurement result of the pressure sensor. The air volume can be stabilized, the room pressure in the air-conditioned room is stabilized, and the room pressure in the air-conditioned room can be reliably maintained at the target room pressure.

According to the chamber pressure control system of the present invention having the fourth feature, the pressure in the return air duct measured by the pressure sensor becomes the target pressure in the return air duct, so that the first exhaust air volume of the first exhaust fan is determined. As a result, the total exhaust air volume exhausted from the first exhaust duct and the second exhaust duct becomes equal to the outside air volume flowing into the air supply duct, and the air volume balance between the total exhaust air volume and the outside air volume is maintained. Therefore, even if the amount of the second exhaust air exhausted from the second exhaust duct to the atmosphere is changed, it is not necessary to change the target pressure in the return air duct, and the damper opening of the volume damper installed in each duct can be changed. It is possible to omit the work of finely adjusting by repeating trial and error, and it is possible to maintain the room pressure of the air-conditioned room at the target room pressure without requiring adjustment time and labor. In the room pressure control system, the air supply air volume of the air supplied to the air-conditioned room is maintained at a predetermined air supply air volume by a constant air volume device or a variable air volume device while adjusting the first exhaust air volume of the first exhaust fan. Since the amount of air flowing through the return air duct is adjusted by the pressure control damper so that the room pressure of the air-conditioned room measured by the pressure sensor becomes the target room pressure, the room pressure of the air-conditioned room can be reliably and easily set to the target room pressure. Can be held in.

The adjustment of the exhaust air volume in the first exhaust fan, the air volume adjustment in the constant air volume device or the variable air volume device, and the adjustment of the air air volume in the pressure control damper are performed at the same time, and the adjustment speed of the air air volume in the pressure control damper is the fastest. The air volume adjustment speed in the variable air volume device is the second fastest, and the adjustment speed of the exhaust air volume in the first exhaust fan is slower than the air volume adjustment speed in the pressure control damper and the air volume adjustment speed in the constant air volume device or variable air volume device. The control system adjusts the room pressure of the air-conditioned room to the target room pressure in conjunction with the measurement result of the room pressure sensor. In addition to being able to quickly reach the target chamber pressure, the air volume adjustment speed in the constant air volume device or variable air volume device is the second fastest, and the pressure inside the return air duct is set to the target inside the return air duct in conjunction with the measurement result of the pressure sensor. By setting the adjustment speed of the exhaust air volume of the first exhaust fan to be the pressure, it is possible to stabilize the air volume of the air circulating in the system, stabilize the room pressure of the air conditioning target room, and make the air conditioning target room stable. The room pressure can be reliably maintained at the target room pressure.

The amount of outside air flowing into the air supply duct is kept constant, and is exhausted from the second exhaust duct by starting and stopping a plurality of second exhaust fans installed in the plurality of second exhaust ducts connected to the air-conditioned room. A second exhaust from the second exhaust duct due to a change in the second exhaust air volume or a change in the exhaust air volume of a plurality of second exhaust fans installed in the plurality of second exhaust ducts connected to the air-conditioned room. When the exhaust air volume is changed and the second exhaust air volume exhausted from the second exhaust duct is changed, the pressure in the return air duct measured by the pressure sensor becomes the target pressure in the return air duct, so that the first exhaust fan The chamber pressure control system in which the first exhaust air volume changes to a predetermined air volume is exhausted from the first exhaust duct and the second exhaust duct even when the second exhaust air volume exhausted to the atmosphere from the second exhaust duct is changed. Since the first exhaust air volume of the first exhaust fan changes to a predetermined air volume so that the total exhaust air volume and the outside air volume flowing into the air supply duct become equal, it is not necessary to change the target pressure in the return air duct. It is possible to omit the work of finely adjusting the damper opening of the volume damper installed in the duct by repeating trial and error, and keep the room pressure of the air-conditioned room at the target room pressure without requiring adjustment time and labor. be able to.

When the air supply air volume of the air supplied to the air-conditioned room is changed, the target pressure in the return air duct is changed. In the room pressure control system, the air supply air volume of the air supplied to the air-conditioned room is changed. As a result, the target pressure in the return air duct that equalizes the total exhaust air volume and the outside air volume is changed, but even if the second exhaust air volume exhausted to the atmosphere from the second exhaust duct is changed, the changed return There is no need to further change the target pressure in the air duct, and it is possible to omit the work of finely adjusting the damper opening of the volume damper installed in each duct by repeating trial and error, and it does not require adjustment time and labor. In addition, the room pressure of the air-conditioned room can be maintained at the target room pressure.

The block diagram of the room pressure control system shown as an example. The block diagram of the room pressure control system shown in the operating state. The figure which shows the relationship between the air volume target value and the air volume of each air volume measuring part in each operation mode of the room pressure control system of FIG. The block diagram of the room pressure control system shown as another example. The figure which shows the relationship between the target value and the air volume in the room pressure control system of FIG. The block diagram of the room pressure control system shown as another example. The figure which shows the relationship between the target value, the air volume and the pressure in the room pressure control system of FIG. The block diagram of the room pressure control system shown as another example. The figure which shows the relationship between the target value, the air volume and the pressure in the room pressure control system of FIG. The block diagram of the room pressure control system which shows an example of the prior art. The figure which shows the relationship between the target value, the air volume and the pressure in the room pressure control system of the prior art of FIG.

The details of the room pressure control system according to the present invention will be described below with reference to the attached drawings such as FIG. 1 which is a block diagram of the room pressure control system 10A shown as an example. Note that FIG. 2 is a configuration diagram of the room pressure control system 10A shown in the operating state, and FIG. 3 shows the relationship between the air volume target value and the air volume of each air volume measuring unit in each operation mode of the room pressure control system 10A. It is a figure. In FIG. 2, the flow of air (outside air, air-fuel mixture, return air, exhaust gas, local exhaust gas) is indicated by arrows.

The room pressure control system 10A (including the room pressure control system 10B to the room pressure control system 10D) sets the room pressure of the clean room 11 (air-conditioned room) installed in a corner of the building to the target room pressure (for example, 45 Pa (positive)). Hold at pressure)). Although only one clean room 11 (air-conditioned room) is shown in FIG. 1, the clean room 11 is not limited to one room, and the room pressure control system of the present invention is applied to two or more clean rooms 11. The room pressure of 10A (including the room pressure control system 10B to the room pressure control system 10D) can be controlled, and the room pressures of the plurality of clean rooms 11 can be maintained at the target room pressure.

The room pressure control system 10A includes an air supply duct 12 and a return air duct 13 connected to the clean room 11, an exhaust duct 14 (first exhaust duct) connected to the return air duct 13, and 2 connected to the clean room 11. The local exhaust ducts 15a and 15b (second exhaust duct) of the book, the air supply fan 16 installed in the air supply duct 12, the exhaust fan 17 (first exhaust fan) installed in the exhaust duct 14, and the local exhaust. Local exhaust fans 18a and 18b (second exhaust fan) installed in ducts 15a and 15b, pressure control damper 19 and first air volume sensor 20 installed in return air duct 13, and air supply duct 12 installed. It includes a second air volume sensor 21 and a room pressure sensor 22 installed in the clean room 11.

The air supply duct 12 is connected to the clean room 11 and supplies air (a mixture of outside air and return air) to the clean room 11. A motor damper 24 (MD) is installed in the air supply duct 12 extending in the vicinity of the outside air intake port 23. A volume damper 25a (VD) is installed in the air supply duct 12 extending in the vicinity of the clean room 11. A chamber 26a is installed in the air supply duct 12 extending to the wake side of the motor damper 14, and a chamber 26b is installed in the air supply duct 12 extending between the air supply fan 12 and the second air volume sensor 21. There is. The opening degree of the swirling vane of the volume damper 25a (VD) is set to a predetermined opening degree, and the air flow path of the air supply duct 12 is fixed to the open area of the opening degree. In the chamber 26a, the outside air of a predetermined air volume taken in by the air supply duct 12 and the return air of a predetermined air volume returning from the return air duct 13 are mixed.

An indicator controller 27 is connected to the control unit of the motor damper 24. The indicator controller 27 has a built-in computer having a central processing unit (CPU or MPU) and a memory, and a setting display (display, touch panel, etc.) (not shown) is installed. The set air volume (air volume of the outside air) is stored (set) in the memory of the indicator controller 27. In the indicator controller 27, the set air volume can be input or changed by the setting display, and the input or changed set air volume can be confirmed on the setting display.

The indicator controller 27 calculates (calculates) the opening degree of the swivel blade of the motor damper 24 corresponding to the input air volume, and transmits the calculated opening degree to the control unit of the motor damper 24. The control unit of the motor damper 24 swivels the swivel blade to the opening degree received from the indicator controller 27, and opens the air flow path of the air supply duct 12 to the open area of the opening degree. In the air supply duct 12, the amount of outside air flowing into the duct 12 is adjusted by the motor damper 24.

The return air duct 13 is connected to the clean room 11 and the chamber 26a, and returns the air in the clean room 11 (air having a predetermined return air amount) to the air supply duct 12. A volume damper 25b (VD) is installed in the return air duct 13 extending in the vicinity of the clean room 11, and a volume damper 25c (VD) is installed in the return air duct 13 extending in the vicinity of the chamber 26a. The opening degree of the swirling blades of the volume dampers 25b and 25c (VD) is set to a predetermined opening degree, and the air flow path of the return air duct 13 is fixed to the open area of the opening degree.

The exhaust duct 14 (first exhaust duct) is connected to a return air duct 13 extending between the pressure control damper 19 (volume damper 25b) and the first air volume sensor 20, and branches from the return air duct 13. The exhaust duct 14 exhausts (releases) a part of the air (air having a predetermined exhaust air volume (first exhaust air volume)) that has flowed into the return air duct 13 from the clean room 11 to the atmosphere. A volume damper 25d (VD) is installed in the exhaust duct 14 extending between the return air duct 13 and the exhaust fan 17, and a volume damper 25e (VD) is installed in the exhaust duct 14 extending to the wake side of the exhaust fan 17. Is installed. The opening degree of the swirling vane of the volume dampers 25d and 25e (VD) is set to a predetermined opening degree, and the air flow path of the exhaust duct 14 is fixed to the open area of the opening degree.

The local exhaust ducts 15a and 15b (second exhaust ducts) are connected to the clean room 11 and exhaust (release) a part of the air in the clean room 11 (air having a predetermined local exhaust air volume (second exhaust air volume)) to the atmosphere. .. Although two local exhaust ducts 15a and 15b are shown in FIGS. 1 and 2, only one local exhaust duct may be connected to the clean room 11, and three or more local exhaust ducts may be connected. It may be connected to the clean room 11.

Non-leak dampers 28a and 28b (NLD) are installed in the local exhaust ducts 15a and 15b extending in the vicinity of the clean room 11. The non-leak dampers 28a and 28b (NLD) prevent air from passing through the clean room 11 and backflow when the local exhaust fans 18a and 18b are stopped. Volume dampers 25f, 25g (VD) are installed in the local exhaust ducts 15a, 15b extending between the non-leak dampers 28a, 28b (NLD) and the local exhaust fans 18a, 18b, and after the local exhaust fans 18a, 18b. Volume dampers 25h and 25i (VD) are installed in the local exhaust ducts 15a and 15b extending to the flow side. The opening degrees of the swirling blades of the volume dampers (VD) 25f to 25i are set to a predetermined opening degree, and the air flow paths of the local exhaust ducts 15a and 15b are fixed to the open area of the opening degree.

The air supply fan 16 is installed in an air supply duct 12 extending between the chamber 26a and the chamber 26b, and forcibly supplies the air-fuel mixture of the outside air and the return air mixed by the chamber 26a to the clean room 11. The output of the air supply fan 16 is controlled by inverter control. The exhaust fan 17 (first exhaust fan) is installed in an exhaust duct 14 extending between the volume damper 25d (VD) and the volume damper 25e (VD), and is a part of the air flowing into the return air duct 13 from the clean room 11. Is forcibly exhausted to the air. The output of the exhaust fan 17 is controlled by inverter control.

The local exhaust fans 18a and 18b (second exhaust fans) are installed in the local exhaust ducts 15a and 15b extending between the volume dampers 25f and 25g (VD) and the volume dampers 25h and 25i (VD), and are installed in the local exhaust ducts 15a and 15b of the clean room 11. Forcibly exhaust some air to the atmosphere. The outputs of the local exhaust fans 18a and 18b are controlled by inverter control.

In FIGS. 1 and 2, two local exhaust fans 18a and 18b installed in the local exhaust ducts 15a and 15b are illustrated, but when only one local exhaust duct is connected to the clean room 11, local exhaust is performed. When there is one fan and three or more local exhaust ducts are connected to the clean room 11, there are three or more local exhaust fans. In addition to the local exhaust fans 18a and 18b, an irregular exhaust device that is used irregularly may be used (the same applies to the systems 10B to 10D). The irregular exhaust device is installed in the second exhaust duct (local exhaust ducts 15a and 15b).

The pressure control damper 19 is a return air duct 13 extending between the clean room 11 and the branch point 29 of the exhaust duct, and is installed in the vicinity of the clean room 11. The pressure control damper 19 has a built-in computer having a central processing unit (CPU or MPU) and a memory, and a setting display (not shown) is installed. The target chamber pressure is stored (set) in the memory of the pressure control damper 19. In the pressure control damper 19, the target chamber pressure can be input or changed by the setting indicator, and the input or changed target chamber pressure can be confirmed by the setting indicator.

The pressure control damper 19 adjusts the amount of air flowing through the return air duct 13 to maintain the room pressure of the clean room 11 at the target room pressure. The pressure control damper 19 directly feeds back the chamber pressure measured by the chamber pressure sensor 22, controls the exhaust damper so as to reach the target chamber pressure, and makes the difference pressure between the chamber pressure and the reference pressure the target chamber pressure. Adjust the exhaust air volume.

The first air volume sensor 20 is a connection point between the return air duct 13 (connection point between the air supply fan 16 and the exhaust duct 14) extending from the branch point 29 between the return air duct 13 and the exhaust duct 14 toward the air supply fan 16 (volume damper 25c). It is installed in a return air duct 13) extending between 29 and 29. The first air volume sensor 20 measures the air volume in the return air duct of the return air flowing from the return air duct 13 toward the air supply duct 12 (chamber 26a). An indicator controller 30 is connected to the first air volume sensor 20. The first air volume sensor 20 transmits the measured air volume in the return air duct to the indicator controller 30.

The indicator controller 30 has a built-in computer having a central processing unit (CPU or MPU) and a memory, and a setting display (not shown) is installed. The target air volume in the return air duct is stored (set) in the memory of the indicator controller 30. The target air volume in the return air duct is equal to the total exhaust air volume, which is the sum of the exhaust air volume exhausted from the exhaust duct 14 and the local exhaust air volumes exhausted from the local exhaust ducts 15a and 15b, and the outside air volume flowing into the supply air duct 12. The amount of air to be used.

In the indicator controller 30, the target air volume in the return air duct can be input or changed by the setting indicator, and the input or changed target air volume in the return duct can be confirmed by the setting indicator. The indicator controller 30 calculates (calculates) the output of the exhaust fan 17 for setting the air volume in the return air duct received from the first air volume sensor 20 to the input target air volume in the return air duct, and exhausts the calculated output. It transmits to the control unit of the fan 17. The control unit of the exhaust fan 17 adjusts the output of the exhaust fan 17 to the output transmitted from the indicator controller 30 by controlling the exhaust fan 17 with an inverter.

The second air volume sensor 21 is installed in an air supply duct 12 extending between the air supply fan 12 (chamber 26b) and the clean room 11 (volume damper 25a). The second air volume sensor 21 measures the air volume in the air supply duct of the air supply that flows through the air supply duct 12 from the air supply fan 16 toward the clean room 11. The second air volume sensor 21 is connected to the indicator controller 31 and transmits the measured air volume in the air supply duct to the indicator controller 31.

The indicator controller 31 has a built-in computer having a central processing unit (CPU or MPU) and a memory, and a setting display (not shown) is installed. The target air volume in the air supply duct is stored (set) in the memory of the indicator controller 31. In the indicator controller 31, the target air volume in the air supply duct can be input or changed by the setting indicator, and the input or changed target air volume in the air supply duct can be confirmed by the setting indicator.

The indicator controller 31 calculates (calculates) the output of the air supply fan 16 for setting the air volume in the air supply duct received from the second air volume sensor 21 to the input target air volume in the air supply duct, and calculates the calculated output. It is transmitted to the control unit of the air supply fan 16. The control unit of the air supply fan 16 adjusts the output of the air supply fan 16 to the output transmitted from the indicator controller 31 by controlling the air supply fan 16 with an inverter. The room pressure sensor 22 is installed in the room of the clean room 11 and measures the room pressure of the clean room 11. The chamber pressure sensor 22 transmits the measured chamber pressure to the pressure control damper 19.

In the chamber pressure control system 10A, it is assumed that the local exhaust operation mode (1) shown in FIG. 3 is set. The target air volume in the return air duct is set to 1000 m ³ / h, the target air volume in the air supply duct is set to 1500 m ³ / h, and the target room pressure in the air-conditioned room is set to 45 Pa. Further, the outside air volume is ^{set to 500 m 3} / h, and the local exhaust air volume is ^{set to 400 m 3} / h. When the room pressure control system 10A operates, the air supply fan 16, the exhaust fan 17, the local exhaust fans 18a and 18b, the pressure control damper 19, the first air volume sensor 20, the second air volume sensor 21, and the room pressure sensor 22 operate.

In the chamber pressure control system 10A, as shown in FIG. 2, ^{outside air having an outside air volume of 500 m 3} / h flows into the air supply duct 12 from the outside air intake port 23, and the outside air and the return air are mixed in the chamber 26a. The air-fuel mixture (air) of the outside air and the return air passes through the volume damper 25a through the air supply duct 12 and is supplied to the clean room 11. The air volume in the air supply duct of the air-fuel mixture flowing through the air supply duct 12 is measured by the second air volume sensor 21, and the air volume in the air supply duct is transmitted from the second air volume sensor 21 to the indicator controller 31.

The indicator controller 31 that has received the air volume in the air supply duct from the second air volume sensor 21 compares the target air volume in the air supply duct stored in the memory with the air volume in the air supply duct received from the second air volume sensor 21 and supplies the air. When the air volume in the air duct is the target air volume in the air supply duct, the output of the air supply fan 16 is maintained at the current level. When the air volume in the air supply duct is different from the target air volume in the air supply duct, the indicator controller 31 calculates the output of the air supply fan 16 for setting the air volume in the air supply duct to the target air volume in the air supply duct, and calculates the output. Is transmitted to the control unit of the air supply fan 16. The control unit of the air supply fan 16 that receives the output of the air supply fan 16 from the indicator controller 31 controls the air supply fan 16 with an inverter, and sets the air supply air volume of the air supply fan 16 to 1500 m ³ / h. When the air supply air volume of the air supply fan 16 becomes 1500 m ³ / h, the air volume in the air supply duct becomes the target air volume in the air supply duct (1500 m ³ / h).

^{In the clean room 11, some of the air in the clean room 11 (air having an exhaust air volume of 400 m 3} / h (second exhaust air volume)) is removed by the local exhaust fans 18a and 18b (second exhaust fan) from the local exhaust ducts 18a and 18b. It passes through the non-leak dampers 28a and 28b and the volume dampers 25f to 25i, and is exhausted (released) to the air. The room pressure sensor 22 installed in the clean room 11 measures the room pressure in the clean room 11 and transmits the measured room pressure to the pressure control damper 19. The pressure control damper 19 calculates the differential pressure between the chamber pressure and the reference pressure received from the chamber pressure sensor 22, and swivel blades (open / close) of the exhaust damper so that the differential pressure between the chamber pressure and the reference pressure becomes the target chamber pressure. It controls the opening and closing operation of the mechanism) and adjusts the damper opening of the exhaust damper. The chamber pressure of the clean room 11 is maintained at the target chamber pressure (45 Pa) by adjusting the damper opening degree of the exhaust damper so that the differential pressure between the chamber pressure and the reference pressure becomes the target chamber pressure. ..

The return air that has passed through the pressure control damper 19 passes through the volume damper 25b through the return air duct 13 and heads for the branch point 29 to which the exhaust duct 14 (first exhaust duct) is connected. A part of the return air (air with ^{an exhaust air volume of 100 m 3} / h (first exhaust air volume)) flows into the exhaust duct 14 from the branch point 29, and the volume dampers 25d and 25e and the exhaust fan 17 (the volume dampers 25d and 25e) and the exhaust fan 17 ( It passes through the second exhaust fan) and is exhausted (exhausted) to the atmosphere. The residual return air excluding the air that has flowed into the exhaust duct 14 flows into the return air duct 13 from the branch portion 29. The return air that has flowed into the return air duct 13 from the branch portion 29 passes through the volume damper 25c and flows into the chamber 26a.

The air volume in the return air duct of the return air flowing through the return air duct 13 is measured by the first air volume sensor 20, and the measured air volume in the return air duct is transmitted from the first air volume sensor 20 to the indicator controller 30. The indicator controller 30 that received the air volume in the return air duct from the first air volume sensor 20 compares the target air volume in the return air duct stored in the memory with the air volume in the return air duct received from the first air volume sensor 20, and returns. When the air volume in the air duct is the target air volume in the return air duct, the output of the exhaust fan 17 is maintained at the current level.

When the air volume in the return air duct is different from the target air volume in the return air duct, the indicator controller 30 ^{calculates the exhaust air volume (100 m 3} / h) of the exhaust fan 17 in which the air volume in the return air duct becomes the target air volume in the return air duct. Then, the output of the exhaust fan 17 that makes the exhaust air volume of the exhaust fan 17 100 m ³ / h is calculated, and the calculated output is transmitted to the control unit of the exhaust fan 17. The control unit of the exhaust fan 17 that received the output of the exhaust fan 17 from the indicator controller 30 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller 30 to make it the exhaust fan 17. The exhaust air volume of is 100 m ³ / h. In the chamber pressure control system 10A, when the air volume in the return air duct is different from the target air volume in the return air duct, the air volume in the return air duct ^{becomes the target air volume in the return air duct (1000 m 3} / h), so that the exhaust fan 17 The exhaust air volume of is 100 m ³ / h (predetermined air volume).

In the chamber pressure control system 10A, the exhaust air volume of the exhaust fan 17 is adjusted, the air supply air volume of the air supply fan 16 is adjusted, and the air air volume of the pressure control damper 19 is adjusted at the same time. In the room pressure control system 10A, the adjustment speed of the air air volume of the pressure control damper 19 linked to the measurement result of the room pressure sensor 22 is the fastest, and the air supply of the air supply fan 16 linked to the measurement result of the second air volume sensor 21 is the fastest. The air volume adjustment speed is the second fastest, and the exhaust air volume adjustment speed of the exhaust fan 17 linked to the measurement result of the first air volume sensor 20 is the air air volume adjustment speed of the pressure control damper 19 and the air supply air volume of the air supply fan 16. Slower than the adjustment speed of. Therefore, the control operation starts at the same time as the exhaust fan 17, the air supply fan 16, and the pressure control damper 19, but the time until the control operation stabilizes is the pressure control damper 19 → the air supply fan 16 → the exhaust fan 17. It becomes in order.

In the room pressure control system 10A, one of the local exhaust fans 18a and 18b is stopped, or the output of the local exhaust fans 18a and 18b is reduced, and as shown in FIG. 3, the local exhaust air volume is 400 m ³ / h. after being changed to 300 meters ³ / h is changed from the local exhaust operation mode (1) to the local exhaust operation mode (2), a target air volume in the air supply duct is 1500 m ³ / h, the return air target airflow duct is 1000m ^{If there is no change at 3} / h, the indicator controller 30 to which the first air volume sensor 20 is connected exhausts the exhaust fan 17 so that the target air volume in the return air duct becomes the target air volume in the return air duct (1000 m ^{3 / h).} calculates the air volume (200m ³ / h), the exhaust air of the exhaust fan 17 indexing the output of the exhaust fan 17 to 200m ³ / h, and transmits the indexing output to the control unit of the exhaust fan 17.

The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, receives the output of the exhaust fan 17 from the indicator controller 30, and makes the exhaust air volume of the exhaust fan 17 200 m ³ / h. In the room pressure control system 10A, when the local exhaust air volume is ^{changed from 400 m 3} / h to 300 m ³ / h, the air volume in the return air duct is maintained at the ^{target air volume in the return air duct (1000 m 3 / h).} (By making the air volume in the return air duct the target air volume in the return air duct), the exhaust air volume of the exhaust fan 17 changes from 100 m ³ / h to 200 m ³ / h (predetermined air volume).

Further, in the room pressure control system 10A, the local exhaust air volume is ^{changed from 300 m 3} / h to 200 m ³ / h, and the local exhaust operation mode (2) is changed to the local exhaust operation mode (3). When the air volume is 1000 m ³ / h and the target air volume in the air supply duct is 1500 m ³ / h and there is no change, the indicator controller 30 to which the first air volume sensor 20 is connected has the target air volume in the return air duct in the return air duct. calculates the target air volume exhaust air volume of (1000m ³ / h) to become the exhaust fan 17 (300m ³ / h), indexing the output of the exhaust fan 17 to the exhaust air of the exhaust fan 17 to 300m ³ / h, indexing output Is transmitted to the control unit of the exhaust fan 17.

The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, receives the output of the exhaust fan 17 from the indicator controller 30, and makes the exhaust air volume of the exhaust fan 17 300 m ³ / h. In the room pressure control system 10A, when the local exhaust air volume is ^{changed from 300 m 3} / h to 200 m ³ / h, the air volume in the return air duct is maintained at the ^{target air volume in the return air duct (1000 m 3 / h).} (By making the air volume in the return air duct the target air volume in the return air duct), the exhaust air volume of the exhaust fan 17 changes from 200 m ³ / h to 300 m ³ / h (predetermined air volume).

In the room pressure control system 10A, the local exhaust air volume is changed from 400 m ³ / h (local exhaust operation mode (1)) to 300 m ³ / h (local exhaust operation mode (2)), and the local exhaust air volume is 300 m ³ Even if the / h (local exhaust operation mode (2)) is changed to 200 m ³ / h (local exhaust operation mode (3)), the target air volume (1000 m ³ / h) in the return air duct will change due to the change. However, the air volume in the return air duct is maintained at the target air volume in the return air duct (1000 m ³ / h), so that the exhaust air volume of the exhaust fan 17 becomes a predetermined air volume.

In the room pressure control system 10A, when the target air volume in the air supply duct ^{is changed from 1500 m 3} / h to 750 m ³ / h, the target air volume in the return air duct ^{is changed from 1000 m 3} / h to 250 m ³ / h locally. The exhaust operation mode (1) is changed to the local exhaust operation mode (4). In the local exhaust operation mode (4), when the target air volume in the air supply duct reaches 750 m ³ / h, the indicator controller 31 to which the second air volume sensor 21 is connected sets the air volume in the air supply duct to the target air volume in the air supply duct. The output of the air supply fan 16 is transmitted to the control unit of the air supply fan 16. The control unit of the air supply fan 16 controls the air supply fan 16 with an inverter, and receives the output of the air supply fan 16 from the indicator controller to make the air volume in the air supply duct the target air volume in the air supply duct (750 m). ^{Set to 3} / h).

When the target air volume in the return air duct reaches 250 m ³ / h, the indicator controller 30 to which the first air volume sensor 20 is connected exhausts the output of the exhaust fan 17 in which the air volume in the return air duct becomes the target air volume in the return air duct. It transmits to the control unit of the fan 17. The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller to make the exhaust air volume of the exhaust fan 17 100 m ³ / h. The local exhaust air volume exhausted from the local exhaust ducts 18a and 18b is 400 m ³ / h. In the room pressure control system 10A, when the target air volume in the return air duct ^{is changed from 1000 m 3} / h to 250 m ³ / h, the air volume in the return air duct ^{becomes the target air volume in the return air duct (250 m 3} / h). As a result, the exhaust air volume of the exhaust fan 17 becomes 100 m ³ / h (predetermined air volume).

In the room pressure control system 10A, one of the local exhaust fans 18a and 18b is stopped, or the output of the local exhaust fans 18a and 18b is reduced, and the local exhaust air volume is ^{changed from 400 m 3} / h to 300 m ³ / h. The local exhaust operation mode (4) was changed to the local exhaust operation mode (5), and the target air volume in the return air duct was 250 m ³ / h, and the target air volume in the air supply duct was 750 m ³ / h, and there was no change. If the instruction adjusting meter 30 first flow rate sensor 20 is connected, the return air duct target air volume return air duct target airflow exhaust air volume of (250m ³ / h) to become an exhaust fan 17 (200m ³ / h) ^{Is calculated, the output of the exhaust fan 17 that makes the exhaust air volume of the exhaust fan 17 200 m 3} / h is calculated, and the calculated output is transmitted to the control unit of the exhaust fan 17.

The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, receives the output of the exhaust fan 17 from the indicator controller 30, and makes the exhaust air volume of the exhaust fan 17 200 m ³ / h. In the room pressure control system 10A, when the local exhaust air volume is ^{changed from 400 m 3} / h to 300 m ³ / h, the air volume in the return air duct is maintained at the ^{target air volume in the return air duct (250 m 3 / h).} (By making the air volume in the return air duct the target air volume in the return air duct), the exhaust air volume of the exhaust fan 17 changes from 100 m ³ / h to 200 m ³ / h (predetermined air volume).

In the room pressure control system 10A, when the target air volume in the air supply duct is changed, it is necessary to change the target air volume in the return air duct, but after that, the local exhaust air volume is 400 m ³ / h (local exhaust operation mode (1). )) To 300 m ³ / h (local exhaust operation mode (2)), the target air volume in the return air duct (250 m ³ / h) does not change due to the change, and the air volume in the return air duct increases. By being held at the target air volume (250 m ³ / h) in the return air duct, the exhaust air volume of the exhaust fan 17 becomes a predetermined air volume.

Even when the target air volume in the air supply duct is changed and the local exhaust air volume is changed, the exhaust air volume in the exhaust fan 17 is adjusted, the air supply air volume in the air supply fan 16 is adjusted, and the air air volume in the pressure control damper 19 is adjusted. At the same time, the adjustment speed of the air air volume of the pressure control damper 19 linked to the measurement result of the chamber pressure sensor 22 is the fastest, and the air supply of the air supply fan 16 linked to the measurement result of the second air volume sensor 21 is the fastest. The adjustment speed of the air volume is the second fastest, and the adjustment speed of the exhaust air volume of the exhaust fan 17 linked to the measurement result of the first air volume sensor 20 is the adjustment speed of the air air volume in the pressure control damper 19 and the air supply air volume in the air supply fan 16. Slower than the adjustment speed of.

In the chamber pressure control system 10A, the air volume in the return air duct measured by the first air volume sensor 20 becomes the target air volume in the return air duct, so that the exhaust air volume of the exhaust fan 17 (first exhaust fan) (first exhaust air volume). Is a predetermined air volume, so that the total exhaust air volume exhausted from the exhaust duct 17 and the local exhaust ducts 18a and 18b (second exhaust fan) becomes equal to the outside air air volume flowing into the air supply duct 16 and the total exhaust air volume. Since the air volume balance between the air volume and the outside air volume is maintained, the target air volume in the return air duct is changed even if the local exhaust air volume (second exhaust air volume) exhausted to the atmosphere from the local exhaust ducts 18a and 18b is changed. It is not necessary, and during the trial run after the local exhaust air volume (second exhaust air volume) is changed, the damper opening of the volume dampers 25a to 25i installed in each duct 12 to 15a and 15b is finely adjusted by repeating trial and error. The work to be performed can be omitted, and the room pressure of the clean room 11 (air-conditioned room) can be maintained at the target room pressure without requiring adjustment time and labor.

In the chamber pressure control system 10A, the exhaust air volume (first exhaust air volume) of the exhaust fan 17 (first exhaust fan) is adjusted, and the air volume in the air supply duct measured by the second air volume sensor 21 becomes the target air volume in the air supply duct. The air supply air volume of the air supply fan 16 is adjusted so that the room pressure of the clean room 11 (air-conditioned room) measured by the room pressure sensor 22 becomes the target room pressure by the pressure control damper 19 in the return air duct 13. Since the amount of air flowing is adjusted, the room pressure of the clean room 11 can be reliably and easily maintained at the target room pressure.

The room pressure control system 10A maximizes the adjustment speed of the air volume of the pressure control damper 19 that sets the room pressure of the clean room 11 (air-conditioned room) to the target room pressure in conjunction with the measurement result of the room pressure sensor 22. Therefore, the room pressure of the clean room 11 can be quickly set to the target room pressure, and the air supply fan 16 that sets the air volume in the air supply duct to the target air volume in the air supply duct in conjunction with the measurement result of the second air volume sensor 21. The adjustment speed of the air supply air volume is set to the second fastest, and the air volume in the return air duct is set to the target air volume in the return air duct in conjunction with the measurement result of the first air volume sensor 20. By setting the adjustment speed of the exhaust air volume (first exhaust air volume) to the third, it is possible to stabilize the air volume of the air circulating in the system 10A (each duct 12 to 15a, 15b), and the room pressure of the clean room 11 can be stabilized. Is stable, and the room pressure of the clean room 11 can be reliably maintained at the target room pressure.

FIG. 4 is a configuration diagram of the chamber pressure control system 10B shown as another example, and FIG. 5 is a diagram showing the relationship between the target value and the air volume in the chamber pressure control system 10B. In FIG. 4, the flow of air (outside air, air-fuel mixture, return air, exhaust gas, local exhaust gas) is indicated by arrows. The difference between the chamber pressure control system 10B and that in FIG. 1 is that a constant air volume device 32 (CAV) is used instead of the second air volume sensor 21. Since the other configurations of the room pressure control system 10B except for the constant air volume device 32 are the same as those of the room pressure control system 10A of FIG. 1, they are designated by the same reference numerals as those of FIG. 1 and the room pressure control of FIG. By referring to the description of the system 10A, the description of other configurations of the room pressure control system 10B will be omitted. A variable air volume device (VAV) can also be used instead of the second air volume sensor 21.

The room pressure control system 10B includes an air supply duct 12 and a return air duct 13 connected to the clean room 11 (air-conditioned room), an exhaust duct 14 (first exhaust duct) connected to the return air duct 13, and a clean room 11. Two local exhaust ducts 15a and 15b (second exhaust duct) connected to, an air supply fan 16 installed in the air supply duct 12, and an exhaust fan 17 (first exhaust fan) installed in the exhaust duct 14. ), Local exhaust fans 18a and 18b (second exhaust fan) installed in the local exhaust ducts 15a and 15b, pressure control damper 19 and air volume sensor 20 installed in the return air duct 13 (first air volume in FIG. 1). It is provided with the same as the sensor 20), a constant air volume device 32 (CAV) installed in the air supply duct 12, and a room pressure sensor 22 installed in the clean room 11.

The constant air volume device 32 (or variable air volume device) is installed in an air supply duct 12 extending between the air supply fan 16 (chamber 26b) and the clean room 11 (volume damper 25a). The constant air volume device 32 keeps the air volume of the air-fuel mixture flowing through the air supply duct 12 from the air supply fan 16 toward the clean room 11 constant. Therefore, a constant amount of air-fuel mixture is supplied from the air supply fan 16 to the clean room 11.

In the chamber pressure control system 10B, it is assumed that the local exhaust operation mode (1) shown in FIG. 5 is set. The target air volume in the return air duct is set to 1000 m ³ / h, the target air volume in the air supply duct is set to 1500 m ³ / h, and the target room pressure in the air-conditioned room is set to 45 Pa. Further, the outside air volume is ^{set to 500 m 3} / h, and the local exhaust air volume is ^{set to 400 m 3} / h. The flow of outside air, air-fuel mixture, return air, and exhaust gas in the local exhaust operation mode (1) to the local exhaust operation mode (3) of the chamber pressure control system 10B is the same as that of the system 10A of FIG.

In the room pressure control system 10B, the room pressure sensor 22 installed in the clean room 11 measures the room pressure in the clean room 11 and transmits the measured room pressure to the pressure control damper 19. The pressure control damper 19 adjusts the damper opening degree of the exhaust damper so that the difference pressure between the chamber pressure and the reference pressure received from the chamber pressure sensor 22 becomes the target chamber pressure. The chamber pressure of the clean room 11 is maintained at the target chamber pressure (45 Pa) by adjusting the damper opening degree of the exhaust damper so that the differential pressure between the chamber pressure and the reference pressure becomes the target chamber pressure. ..

When the air volume in the return air duct is different from the target air volume in the return air duct, the indicator controller 30 to which the air volume sensor 20 is connected determines the exhaust air volume of the exhaust fan 17 (the air volume in the return air duct becomes the target air volume in the return air duct). 100 m ³ / h) is calculated, and the exhaust air of the exhaust fan 17 indexing the output of the exhaust fan 17 to 100 m ³ / h, and transmits the indexing output to the control unit of the exhaust fan 17. The control unit of the exhaust fan 17 that received the output of the exhaust fan 17 from the indicator controller 30 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller 30 to make it the exhaust fan 17. The exhaust air volume of is 100 m ³ / h. In the chamber pressure control system 10B, when the air volume in the return air duct is different from the target air volume in the return air duct, the air volume in the return air duct ^{becomes the target air volume in the return air duct (1000 m 3} / h), so that the exhaust fan 17 The exhaust air volume of is 100 m ³ / h (predetermined air volume).

In the chamber pressure control system 10B, the exhaust air volume in the exhaust fan 17 is adjusted, the air volume in the constant air volume device 32 (or the variable air volume device) is adjusted, and the air air volume in the pressure control damper 19 is adjusted at the same time. In the room pressure control system 10B, the adjustment speed of the air air volume of the pressure control damper 19 linked to the measurement result of the room pressure sensor 22 is the fastest, and the air volume adjustment speed of the constant air volume device 32 (or the variable air volume device) is the second. The adjustment speed of the exhaust air volume of the exhaust fan 17 linked to the measurement result of the air volume sensor 20 is faster than the adjustment speed of the air air volume in the pressure control damper 19 and the air volume adjustment speed in the constant air volume device 32 (or the variable air volume device). Therefore, the control operation starts at the same time as the exhaust fan 17, the constant air volume device 32 (or the variable air volume device), and the pressure control damper 19, but the time until the control operation stabilizes is the pressure control damper 19 → the constant air volume device. The order is 32 (or variable air volume device) → exhaust fan 17.

In the room pressure control system 10B, one of the local exhaust fans 18a and 18b is stopped, or the output of the local exhaust fans 18a and 18b is reduced, and as shown in FIG. 5, the local exhaust air volume is 400 m ³ / h. after being changed to 300 meters ³ / h is changed from the local exhaust operation mode (1) to the local exhaust operation mode (2), a target air volume in the air supply duct is 1500 m ³ / h, the return air target airflow duct is 1000m ^{If there is no change at 3} / h, the indicator controller 30 to which the air volume sensor 20 is connected has the exhaust air volume of the exhaust fan 17 ^{(1000 m 3} / h) at which the target air volume in the return air duct becomes the target air volume in the return air duct (1000 m 3 / h). 200m ³ / h) is calculated, and the exhaust air of the exhaust fan 17 indexing the output of the exhaust fan 17 to 200 meters ³ / h, and transmits the indexing output to the control unit of the exhaust fan 17.

The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, receives the output of the exhaust fan 17 from the indicator controller 30, and makes the exhaust air volume of the exhaust fan 17 200 m ³ / h. In the room pressure control system 10B, when the local exhaust air volume is ^{changed from 400 m 3} / h to 300 m ³ / h, the air volume in the return air duct is maintained at the ^{target air volume in the return air duct (1000 m 3 / h).} (By making the air volume in the return air duct the target air volume in the return air duct), the exhaust air volume of the exhaust fan 17 changes from 100 m ³ / h to 200 m ³ / h (predetermined air volume).

Further, in the room pressure control system 10B, the local exhaust air volume is ^{changed from 300 m 3} / h to 200 m ³ / h, and the local exhaust operation mode (2) is changed to the local exhaust operation mode (3). When the air volume is 1000 m ³ / h and the target air volume in the air supply duct is 1500 m ³ / h and there is no change, the indicator controller 30 to which the air volume sensor 20 is connected has the target air volume in the return air duct in the return air duct. calculates the target air volume exhaust air volume of (1000m ³ / h) to become the exhaust fan 17 (300m ³ / h), indexing the output of the exhaust fan 17 to the exhaust air of the exhaust fan 17 to 300m ³ / h, indexing output Is transmitted to the control unit of the exhaust fan 17.

The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, receives the output of the exhaust fan 17 from the indicator controller 30, and makes the exhaust air volume of the exhaust fan 17 300 m ³ / h. In the room pressure control system 10B, when the local exhaust air volume is ^{changed from 300 m 3} / h to 200 m ³ / h, the air volume in the return air duct is maintained at the ^{target air volume in the return air duct (1000 m 3 / h).} (By making the air volume in the return air duct the target air volume in the return air duct), the exhaust air volume of the exhaust fan 17 changes from 200 m ³ / h to 300 m ³ / h (predetermined air volume).

In the room pressure control system 10B, the local exhaust air volume is changed from 400 m ³ / h (local exhaust operation mode (1)) to 300 m ³ / h (local exhaust operation mode (2)), and the local exhaust air volume is 300 m ³ Even if the / h (local exhaust operation mode (2)) is changed to 200 m ³ / h (local exhaust operation mode (3)), the target air volume (1000 m ³ / h) in the return air duct will change due to the change. However, the air volume in the return air duct is maintained at the target air volume in the return air duct (1000 m ³ / h), so that the exhaust air volume of the exhaust fan 17 becomes a predetermined air volume.

In the chamber pressure control system 10B, the exhaust air volume (first exhaust air volume) of the exhaust fan 17 (first exhaust fan) is determined by the air volume in the return air duct measured by the air volume sensor 20 becoming the target air volume in the return air duct. As a result, the total exhaust air volume exhausted from the exhaust duct 14 and the local exhaust ducts 15a and 15b (second exhaust duct) becomes equal to the outside air volume flowing into the air supply duct 12, and the total exhaust air volume and the outside air become equal. Since the air volume balance with the air volume is maintained, even if the local exhaust air volume exhausted to the atmosphere from the local exhaust ducts 15a and 15b is changed, it is not necessary to change the target air volume in the return air duct, and the local exhaust air volume ( During the trial run after the second exhaust air volume is changed, it is possible to omit the work of finely adjusting the damper opening of the volume dampers 25a to 25i installed in the ducts 12 to 15a and 15b by repeating trial and error. The room pressure of the clean room 11 (air-conditioned room) can be maintained at the target room pressure without requiring adjustment time and labor.

In the chamber pressure control system 10B, the exhaust air volume (first exhaust air volume) of the exhaust fan 17 (first exhaust fan) is adjusted, and the air supply air volume of the air supplied to the clean room 11 (air conditioning target room) is a constant air volume device 32. (Or a variable air volume device) maintains a predetermined air supply air volume, and the air air volume flowing through the return air duct 13 by the pressure control damper 19 so that the room pressure of the clean room 11 measured by the room pressure sensor 22 becomes the target room pressure. Since it is adjusted, the room pressure of the clean room 11 can be reliably and easily maintained at the target room pressure.

The room pressure control system 10B maximizes the adjustment speed of the air volume of the pressure control damper 19 that sets the room pressure of the clean room 11 (air-conditioned room) to the target room pressure in conjunction with the measurement result of the room pressure sensor 22. Therefore, the room pressure of the clean room 11 can be quickly set to the target room pressure, and the air volume adjustment speed in the constant air volume device 32 (or variable air volume device) is made second fastest, which is linked to the measurement result of the air volume sensor 20. Set the air volume in the return air duct to the target air volume in the return air duct. By setting the adjustment speed of the exhaust air volume (first exhaust air volume) of the exhaust fan 17 (first exhaust fan) to the third, the system 10B (each duct 12). It is possible to stabilize the air volume of the air circulating in ~ 15a, 15b), stabilize the room pressure of the clean room 11, and reliably maintain the room pressure of the clean room 11 at the target room pressure.

FIG. 6 is a configuration diagram of the chamber pressure control system 10C shown as another example, and FIG. 7 is a diagram showing the relationship between the target value, the air volume, and the pressure in the chamber pressure control system 10C of FIG. In FIG. 6, the flow of air (outside air, air-fuel mixture, return air, exhaust gas, local exhaust gas) is indicated by arrows. The difference between the chamber pressure control system 10C and that in FIG. 1 is that the pressure sensor 33 is used instead of the first air volume sensor 20. Since the other configurations of the room pressure control system 10C except for the pressure sensor 33 are the same as those of the room pressure control system 10A of FIG. 1, they are designated by the same reference numerals as those of FIG. By referring to the description of 10A, the description of other configurations of the room pressure control system 10C will be omitted.

The room pressure control system 10C includes an air supply duct 12 and a return air duct 13 connected to the clean room 11 (air-conditioned room), an exhaust duct 14 (first exhaust duct) connected to the return air duct 13, and a clean room 11. Two local exhaust ducts 15a and 15b (second exhaust duct) connected to, an air supply fan 16 installed in the air supply duct 12, and an exhaust fan 17 (first exhaust fan) installed in the exhaust duct 14. ), The local exhaust fans 18a and 18b (second exhaust fan) installed in the local exhaust ducts 15a and 15b, the pressure control damper 19 and the pressure sensor 33 installed in the return air duct 13, and the air supply duct 12. It includes an installed air volume sensor 21 (second air volume sensor 21 in FIG. 1) and a room pressure sensor 22 installed in the clean room 11.

The pressure sensor 33 is a return air duct 13 (air supply fan 12 and exhaust duct) extending from the branch point 29 between the return air duct 13 and the exhaust duct 14 (first exhaust duct) toward the air supply fan 12 (volume damper 25c). It is installed in a return air duct 13) extending between the connection point 29 of the 14th. The pressure sensor 33 measures the pressure inside the return air duct of the return air flowing from the return air duct 13 toward the air supply duct 12 (chamber 26a). An indicator controller 34 is connected to the pressure sensor 33. The pressure sensor 33 transmits the measured pressure in the return air duct to the indicator controller 34.

The indicator controller 34 has a built-in computer having a central processing unit (CPU or MPU) and a memory, and a setting display (not shown) is installed. The target pressure in the return air duct is stored (set) in the memory of the indicator controller 34. The target pressure in the return air duct is equal to the total exhaust air volume, which is the sum of the exhaust air volume exhausted from the exhaust duct 14 and the local exhaust air volumes exhausted from the local exhaust ducts 15a and 15b, and the outside air volume flowing into the supply air duct 12. The pressure to do.

In the indicator controller 34, the target pressure in the return air duct can be input or changed by the setting indicator, and the input or changed target pressure in the return duct can be confirmed by the setting indicator. The indicator controller 34 calculates (calculates) the output of the exhaust fan 17 for setting the pressure in the return air duct received from the pressure sensor 33 to the input target pressure in the return air duct, and uses the calculated output as the exhaust fan 17. Send to the control unit of. The control unit of the exhaust fan 17 adjusts the output of the exhaust fan 17 to the output transmitted from the indicator controller 34 by controlling the exhaust fan 17 with an inverter.

In the chamber pressure control system 10C, it is assumed that the local exhaust operation mode (1) shown in FIG. 7 is set. The target pressure in the return air duct is set to -70 Pa, the target air volume in the air supply duct is set to 1500 m ³ / h, and the target room pressure in the air-conditioned room is set to 45 Pa. Further, the outside air volume is ^{set to 500 m 3} / h, and the local exhaust air volume is ^{set to 400 m 3} / h. The flow of outside air, air-fuel mixture, return air, and exhaust gas in the local exhaust operation mode (1) to the local exhaust operation mode (5) of the chamber pressure control system 10C is the same as that of the system 10A of FIG.

In the room pressure control system 10C, the room pressure sensor 22 installed in the clean room 11 measures the room pressure in the clean room 11 and transmits the measured room pressure to the pressure control damper 19. The pressure control damper 19 adjusts the damper opening degree of the exhaust damper so that the difference pressure between the chamber pressure and the reference pressure received from the chamber pressure sensor 22 becomes the target chamber pressure. The chamber pressure of the clean room 11 is maintained at the target chamber pressure (45 Pa) by adjusting the damper opening degree of the exhaust damper so that the differential pressure between the chamber pressure and the reference pressure becomes the target chamber pressure. ..

When the pressure inside the return air duct is different from the target pressure inside the return air duct, the indicator controller 34 ^{calculates the exhaust air volume (100 m 3} / h) of the exhaust fan 17 at which the pressure inside the return air duct becomes the target pressure inside the return air duct. Then, the output of the exhaust fan 17 that makes the exhaust air volume of the exhaust fan 17 100 m ³ / h is calculated, and the calculated output is transmitted to the control unit of the exhaust fan 17. The control unit of the exhaust fan 17 that received the output of the exhaust fan 17 from the indicator controller 30 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller 30 to make it the exhaust fan 17. The exhaust air volume of is 100 m ³ / h. In the chamber pressure control system 10C, when the pressure inside the return air duct is different from the target pressure inside the return air duct, the pressure inside the return air duct becomes the target pressure inside the return air duct (-70 Pa), so that the exhaust fan 17 is exhausted. The air volume becomes 100 m ³ / h (predetermined air volume).

In the chamber pressure control system 10C, the exhaust air volume of the exhaust fan 17 is adjusted, the air supply air volume of the air supply fan 16 is adjusted, and the air air volume of the pressure control damper 19 is adjusted at the same time. In the room pressure control system 10C, the adjustment speed of the air air volume of the pressure control damper 19 linked to the measurement result of the room pressure sensor 22 is the fastest, and the air supply air volume of the air supply fan 16 linked to the measurement result of the air volume sensor 21 is the fastest. The adjustment speed is the second fastest, and the adjustment speed of the exhaust air volume in the exhaust fan 17 linked to the measurement result of the pressure sensor 33 is higher than the adjustment speed of the air air volume in the pressure control damper 19 and the adjustment speed of the air supply air volume in the air supply fan 16. Is also slow. Therefore, the control operation starts at the same time as the exhaust fan 17, the air supply fan 16, and the pressure control damper 19, but the time until the control operation stabilizes is the pressure control damper 19 → the air supply fan 16 → the exhaust fan 17. It becomes in order.

In the room pressure control system 10C, one of the local exhaust fans 18a and 18b is stopped, or the output of the local exhaust fans 18a and 18b is reduced, and as shown in FIG. 7, the local exhaust air volume is 400 m ³ / h. after being changed to 300 meters ³ / h is changed from the local exhaust operation mode (1) to the local exhaust operation mode (2), a return air duct target pressure -70Pa, the supply duct target airflow is 1500 m ³ / ^{If there is no change in h, the indicator controller 34 to which the pressure sensor 33 is connected has an exhaust air volume (200 m 3} / h) of the exhaust fan 17 at which the target pressure in the return air duct becomes the target pressure in the return air duct (-70 Pa). ) Is calculated to calculate ^{the output of the exhaust fan 17 that makes the exhaust air volume of the exhaust fan 17 200 m 3} / h, and the calculated output is transmitted to the control unit of the exhaust fan 17.

The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller 34, so that the exhaust air volume of the exhaust fan 17 ^{becomes 200 m 3} / h. In the chamber pressure control system 10C, when the local exhaust air volume is ^{changed from 400 m 3} / h to 300 m ³ / h, the pressure inside the return air duct is maintained at the target pressure inside the return air duct (-70 Pa) (return). When the pressure in the air duct becomes the target pressure in the return air duct), the exhaust air volume of the exhaust fan 17 changes from 100 m ³ / h to 200 m ³ / h (predetermined air volume).

Further, in the room pressure control system 10C, the local exhaust air volume is ^{changed from 300 m 3} / h to 200 m ³ / h, and the local exhaust operation mode (2) is changed to the local exhaust operation mode (3). When the pressure is -70 Pa and the target air volume in the air supply duct is 1500 m ³ / h and there is no change, the indicator controller 34 to which the pressure sensor 33 is connected has the target pressure in the return air duct as the target pressure in the return air duct. calculates the exhaust air of the exhaust fan 17 becomes ^{(-70Pa) (300m 3 / h} ), the exhaust of the exhaust air volume of the fan 17 indexing the output of the exhaust fan 17 to 300m ³ / h, exhaust indexing output fan 17 Send to the control unit of.

The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller 34, so that the exhaust air volume of the exhaust fan 17 ^{becomes 300 m 3} / h. In the chamber pressure control system 10C, when the local exhaust air volume is ^{changed from 300 m 3} / h to 200 m ³ / h, the pressure inside the return air duct is maintained at the target pressure inside the return air duct (-70 Pa) (return). When the pressure in the air duct becomes the target pressure in the return air duct), the exhaust air volume of the exhaust fan 17 changes from 200 m ³ / h to 300 m ³ / h (predetermined air volume).

In the room pressure control system 10C, the local exhaust air volume is changed from 400 m ³ / h (local exhaust operation mode (1)) to 300 m ³ / h (local exhaust operation mode (2)), and the local exhaust air volume is 300 m ³ Even if the / h (local exhaust operation mode (2)) is changed to 200 m ³ / h (local exhaust operation mode (3)), the target pressure (-70 Pa) in the return air duct does not change due to the change. By keeping the pressure inside the return air duct at the target pressure inside the return air duct (-70 Pa), the exhaust air volume of the exhaust fan 17 becomes a predetermined air volume.

In the room pressure control system 10C, when the target air volume in the air supply duct ^{is changed from 1500 m 3} / h to 750 m ³ / h, the target pressure in the return air duct is changed from -70 Pa to -180 Pa and the local exhaust operation mode ( The mode is changed from 1) to the local exhaust operation mode (4). In the local exhaust operation mode (4), when the target air volume in the air supply duct reaches 750 m ³ / h, the indicator controller 31 to which the air volume sensor 21 is connected sets the air volume in the air supply duct to the target air volume in the air supply duct. The output of the air supply fan 16 for this purpose is transmitted to the control unit of the air supply fan 16. The control unit of the air supply fan 16 controls the air supply fan 16 with an inverter, and receives the output of the air supply fan 16 from the indicator controller 31 to make the air volume in the air supply duct the target air volume in the air supply duct ( 750m ³ / h).

When the target pressure in the return air duct reaches −180 Pa, the indicator controller 34 to which the pressure sensor 33 is connected controls the output of the exhaust fan 17 in which the pressure in the return air duct becomes the target pressure in the return air duct. Send to the department. The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller 34, so that the exhaust air volume of the exhaust fan 17 ^{becomes 100 m 3} / h. The local exhaust air volume exhausted from the local exhaust ducts 18a and 18b is 400 m ³ / h. In the chamber pressure control system 10C, when the target pressure in the return air duct is changed from -70 Pa to -180 Pa, the pressure in the return air duct becomes the target pressure in the return air duct (-180 Pa), so that the exhaust fan 17 The exhaust air volume of is 100 m ³ / h (predetermined air volume).

In the room pressure control system 10C, one of the local exhaust fans 18a and 18b is stopped, or the output of the local exhaust fans 18a and 18b is reduced, and the local exhaust air volume is ^{changed from 400 m 3} / h to 300 m ³ / h. When the local exhaust operation mode (4) is changed to the local exhaust operation mode (5), the target pressure in the return air duct is -180 Pa, and the target air volume in the air supply duct is 750 m ³ / h and there is no change. ^{The indicator controller 34 to which the pressure sensor 33 is connected calculates the exhaust air volume (200 m 3} / h) of the exhaust fan 17 at which the target pressure in the return air duct becomes the target pressure in the return air duct (-180 Pa), and the exhaust fan. The output of the exhaust fan 17 that sets the exhaust air volume of the 17 to 200 m ³ / h is calculated, and the calculated output is transmitted to the control unit of the exhaust fan 17.

The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller 34, so that the exhaust air volume of the exhaust fan 17 ^{becomes 200 m 3} / h. In the chamber pressure control system 10C, when the local exhaust air volume is ^{changed from 400 m 3} / h to 300 m ³ / h, the pressure inside the return air duct is maintained at the target pressure inside the return air duct (-180 Pa) (return). When the pressure in the air duct becomes the target pressure in the return air duct), the exhaust air volume of the exhaust fan 17 changes from 100 m ³ / h to 200 m ³ / h (predetermined air volume).

In the chamber pressure control system 10C, when the target pressure in the air supply duct is changed, it is necessary to change the target pressure in the return air duct, but after that, the local exhaust air volume is 400 m ³ / h (local exhaust operation mode (4). )) To 300 m ³ / h (local exhaust operation mode (5)), the target pressure in the return air duct (-180 Pa) does not change due to the change, and the pressure in the return air duct returns. By being held at the target pressure (-180 Pa) in the duct, the exhaust air volume of the exhaust fan 17 becomes a predetermined air volume.

Even when the target pressure in the air supply duct is changed and the local exhaust air volume is changed, the exhaust air volume in the exhaust fan 17 is adjusted, the air supply air volume in the air supply fan 16 is adjusted, and the air air volume in the pressure control damper 19 is adjusted. At the same time, the adjustment speed of the air air volume of the pressure control damper 19 linked to the measurement result of the chamber pressure sensor 22 is the fastest, and the air supply air volume of the air supply fan 16 linked to the measurement result of the air volume sensor 21 is the fastest. The adjustment speed is the second fastest, and the adjustment speed of the exhaust air volume of the exhaust fan 17 linked to the measurement result of the pressure sensor 33 is higher than the adjustment speed of the air air volume in the pressure control damper 19 and the adjustment speed of the air supply air volume in the air supply fan 16. Is also slow.

In the chamber pressure control system 10C, the exhaust air volume (first exhaust air volume) of the exhaust fan 17 (first exhaust fan) is determined by the pressure in the return air duct measured by the pressure sensor 33 becoming the target pressure in the return air duct. As a result, the total exhaust air volume exhausted from the exhaust duct 17 and the local exhaust ducts 15a and 15b (second exhaust fan) becomes equal to the outside air volume flowing into the air supply duct 12, and the total exhaust air volume and the outside air become equal. Since the air volume balance with the air volume is maintained, it is necessary to change the target pressure in the return air duct even if the local exhaust air volume (second exhaust air volume) exhausted to the atmosphere from the local exhaust ducts 15a and 15b is changed. No work to finely adjust the damper opening of the volume dampers 25a to 25i installed in the ducts 12 to 15a and 15b during the trial run after the local exhaust air volume (second exhaust air volume) is changed by repeating trial and error. Can be omitted, and the room pressure of the clean room 11 (air-conditioned room) can be maintained at the target room pressure without requiring adjustment time and labor.

The chamber pressure control system 10C adjusts the exhaust air volume (first exhaust air volume) of the exhaust fan 17 (first exhaust fan) so that the air volume in the air supply duct measured by the air volume sensor 21 becomes the target air volume in the air supply duct. The air supply air volume of the air supply fan 16 is adjusted, and the air flowing through the return air duct 13 by the pressure control damper 19 so that the room pressure of the clean room 11 (air-conditioned room) measured by the room pressure sensor 22 becomes the target room pressure. Since the air volume is adjusted, the room pressure of the clean room 11 can be reliably and easily maintained at the target room pressure.

The room pressure control system 10C maximizes the adjustment speed of the air volume of the pressure control damper 19 that sets the room pressure of the clean room 11 (air-conditioned room) to the target room pressure in conjunction with the measurement result of the room pressure sensor 22. Therefore, the room pressure of the clean room 11 can be quickly set to the target room pressure, and the supply of the air supply fan 16 that sets the air volume in the air supply duct to the target air volume in the air supply duct in conjunction with the measurement result of the air volume sensor 21. The adjustment speed of the air volume is set to the second fastest, and the pressure in the return air duct is set to the target pressure in the return air duct in conjunction with the measurement result of the pressure sensor 33. The adjustment speed of the exhaust air volume of the exhaust fan 17 is set to the third. As a result, the air volume of the air circulating in the system 10C (each duct 12 to 15a, 15b) can be stabilized, the room pressure of the clean room 11 is stabilized, and the room pressure of the clean room 11 is surely set to the target room pressure. Can be retained.

FIG. 8 is a configuration diagram of the chamber pressure control system 10D shown as another example, and FIG. 9 is a diagram showing the relationship between the target value, the air volume, and the pressure in the chamber pressure control system 10D of FIG. In FIG. 8, the flow of air (outside air, air-fuel mixture, return air, exhaust gas, local exhaust gas) is indicated by arrows. The difference between this chamber pressure control system 10D and that in FIG. 1 is that a constant air volume device 32 (CAV) is used instead of the second air volume sensor 21, and a pressure sensor 33 is used instead of the first air volume sensor 20. It is in the point of doing. Since the other configurations of the chamber pressure control system 10D except for the constant air volume device 32 and the pressure sensor 33 are the same as those of the chamber pressure control system 10A of FIG. 1, they are designated by the same reference numerals as those of FIG. By referring to the description of the room pressure control system 10A, the description of other configurations of the room pressure control system 10D will be omitted. A variable air volume device (VAV) can also be used instead of the second air volume sensor 21.

The room pressure control system 10D includes an air supply duct 12 and a return air duct 13 connected to the clean room 11 (air-conditioned room), an exhaust duct 14 (first exhaust duct) connected to the return air duct 13, and a clean room 11. Two local exhaust ducts 15a and 15b (second exhaust duct) connected to, an air supply fan 16 installed in the air supply duct 12, and an exhaust fan 17 (first exhaust fan) installed in the exhaust duct 14. ), The local exhaust fans 18a and 18b (second exhaust fan) installed in the local exhaust ducts 15a and 15b, the pressure control damper 19 and the pressure sensor 33 installed in the return air duct 13, and the air supply duct 12. It includes an installed constant air volume device 32 (CAV) and a room pressure sensor 22 installed in the clean room 11.

The constant air volume device 32 (or variable air volume device) is the same as that in FIG. 4, and is installed in the air supply duct 12 extending between the air supply fan 12 (chamber 26b) and the clean room 11 (volume damper 25a). .. The pressure sensor 33 is the same as that in FIG. 6, and is installed in the return air duct 13 extending between the air supply fan 12 (volume damper 25c) and the connection point 29 of the exhaust duct 14 (first exhaust duct). .. The indicator controller 34 connected to the pressure sensor 33 is the same as that in FIG. The target pressure in the return air duct is stored (set) in the memory of the indicator controller 34.

In the chamber pressure control system 10D, it is assumed that the local exhaust operation mode (1) shown in FIG. 9 is set. The target pressure in the return air duct is set to -70 Pa, the target air volume in the air supply duct is set to 1500 m ³ / h, and the target room pressure in the air-conditioned room is set to 45 Pa. Further, the outside air volume is ^{set to 500 m 3} / h, and the local exhaust air volume is ^{set to 400 m 3} / h. The flow of outside air, air-fuel mixture, return air, and exhaust gas in the local exhaust operation mode (1) to the local exhaust operation mode (3) of the chamber pressure control system 10C is the same as that of the system 10A of FIG.

In the room pressure control system 10D, the room pressure sensor 22 installed in the clean room 11 measures the room pressure in the clean room 11 and transmits the measured room pressure to the pressure control damper 19. The pressure control damper 19 adjusts the damper opening degree of the exhaust damper so that the difference pressure between the chamber pressure and the reference pressure received from the chamber pressure sensor 22 becomes the target chamber pressure. The chamber pressure of the clean room 11 is maintained at the target chamber pressure (45 Pa) by adjusting the damper opening degree of the exhaust damper so that the differential pressure between the chamber pressure and the reference pressure becomes the target chamber pressure. ..

When the pressure in the return air duct is different from the target pressure in the return air duct, the indicator controller 34 to which the pressure sensor 33 is connected tells the exhaust air volume of the exhaust fan 17 that the pressure in the return air duct becomes the target pressure in the return air duct. 100 m ³ / h) is calculated, and the exhaust air of the exhaust fan 17 indexing the output of the exhaust fan 17 to 100 m ³ / h, and transmits the indexing output to the control unit of the exhaust fan 17. The control unit of the exhaust fan 17 that has received the output of the exhaust fan 17 from the indicator controller 34 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller 34, thereby making the exhaust fan 17 The exhaust air volume of is 100 m ³ / h. In the chamber pressure control system 10D, when the pressure inside the return air duct is different from the target pressure inside the return air duct, the pressure inside the return air duct becomes the target pressure inside the return air duct (-70 Pa), so that the exhaust fan 17 is exhausted. The air volume becomes 100 m ³ / h (predetermined air volume).

In the chamber pressure control system 10D, the exhaust air volume in the exhaust fan 17 is adjusted, the air volume in the constant air volume device 32 (or the variable air volume device) is adjusted, and the air air volume in the pressure control damper 19 is adjusted at the same time. In the room pressure control system 10D, the adjustment speed of the air air volume of the pressure control damper 19 linked to the measurement result of the room pressure sensor 22 is the fastest, and the air volume adjustment speed of the constant air volume device 32 (or the variable air volume device) is the second. The adjustment speed of the exhaust air volume in the exhaust fan 17 linked to the measurement result of the pressure sensor 33 is faster than the adjustment speed of the air air volume in the pressure control damper 19 and the air volume adjustment speed in the constant air volume device 32 (or the variable air volume device). Therefore, the control operation starts at the same time as the exhaust fan 17, the constant air volume device 32 (or the variable air volume device), and the pressure control damper 19, but the time until the control operation stabilizes is the pressure control damper 19 → the constant air volume device. The order is 32 (or variable air volume device) → exhaust fan 17.

In the room pressure control system 10D, one of the local exhaust fans 18a and 18b is stopped, or the output of the local exhaust fans 18a and 18b is reduced, and as shown in FIG. 9, the local exhaust air volume is 400 m ³ / h. after being changed to 300 meters ³ / h is changed from the local exhaust operation mode (1) to the local exhaust operation mode (2), a return air duct target pressure -70Pa, the supply duct target airflow is 1500 m ³ / If there is no change in h, indicating controller meter 34 by the pressure sensor 33 is connected, the exhaust air volume of the exhaust fan 17 made of the return air duct pressure return air duct target pressure ^{(-70Pa) (200m 3 / h} ) ^{Is calculated, the output of the exhaust fan 17 that makes the exhaust air volume of the exhaust fan 17 200 m 3} / h is calculated, and the calculated output is transmitted to the control unit of the exhaust fan 17.

The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller 34, so that the exhaust air volume of the exhaust fan 17 ^{becomes 200 m 3} / h. In the room pressure control system 10D, when the local exhaust air volume is ^{changed from 400 m 3} / h to 300 m ³ / h, the pressure inside the return air duct is maintained at the target pressure inside the return air duct (-70 Pa) (return). When the pressure in the air duct becomes the target pressure in the return air duct), the exhaust air volume of the exhaust fan 17 changes from 100 m ³ / h to 200 m ³ / h (predetermined air volume).

Further, in the room pressure control system 10D, the local exhaust air volume is ^{changed from 300 m 3} / h to 200 m ³ / h, and the local exhaust operation mode (2) is changed to the local exhaust operation mode (3). When the pressure is -70 Pa and the target air volume in the air supply duct is 1500 m ³ / h and there is no change, the indicator controller 34 to which the pressure sensor 33 is connected has the target pressure in the return air duct as the target pressure in the return air duct. calculates the exhaust air of the exhaust fan 17 becomes ^{(-70Pa) (300m 3 / h} ), the exhaust of the exhaust air volume of the fan 17 indexing the output of the exhaust fan 17 to 300m ³ / h, exhaust indexing output fan 17 Send to the control unit of.

The control unit of the exhaust fan 17 controls the exhaust fan 17 with an inverter, and receives the output of the exhaust fan 17 from the indicator controller 34, so that the exhaust air volume of the exhaust fan 17 ^{becomes 300 m 3} / h. In the room pressure control system 10D, when the local exhaust air volume is ^{changed from 300 m 3} / h to 200 m ³ / h, the pressure inside the return air duct is maintained at the target pressure inside the return air duct (-70 Pa) (return). When the pressure in the air duct becomes the target pressure in the return air duct), the exhaust air volume of the exhaust fan 17 changes from 200 m ³ / h to 300 m ³ / h (predetermined air volume).

In the room pressure control system 10D, the local exhaust air volume is changed from 400 m ³ / h (local exhaust operation mode (1)) to 300 m ³ / h (local exhaust operation mode (2)), and the local exhaust air volume is 300 m ³ Even if the / h (local exhaust operation mode (2)) is changed to 200 m ³ / h (local exhaust operation mode (3)), the target pressure (-70 Pa) in the return air duct does not change due to the change. By keeping the pressure inside the return air duct at the target pressure inside the return air duct (-70 Pa), the exhaust air volume of the exhaust fan 17 becomes a predetermined air volume.

In the chamber pressure control system 10D, the exhaust air volume (first exhaust air volume) of the exhaust fan 17 (first exhaust fan) is determined by the pressure in the return air duct measured by the pressure sensor 33 becoming the target pressure in the return air duct. As a result, the total exhaust air volume exhausted from the exhaust duct 17 and the local exhaust ducts 15a and 15b (second exhaust duct) becomes equal to the outside air volume flowing into the air supply duct 12, and the total exhaust air volume and the outside air become equal. Since the air volume balance with the air volume is maintained, even if the local exhaust air volume exhausted to the atmosphere from the local exhaust ducts 15a and 15b is changed, it is not necessary to change the target pressure in the return air duct, and the local exhaust air volume ( During the trial run after the second exhaust air volume is changed, it is possible to omit the work of finely adjusting the damper opening of the volume dampers 25a to 25i installed in the ducts 12 to 15a and 15b by repeating trial and error. The room pressure of the clean room 11 (air-conditioned room) can be maintained at the target room pressure without requiring adjustment time and labor.

In the chamber pressure control system 10D, the exhaust air volume (first exhaust air volume) of the exhaust fan 17 (first exhaust fan) is adjusted, and the air supply air volume of the air supplied to the clean room 11 (air conditioning target room) is a constant air volume device 32. The amount of air flowing into the return air duct 13 by the pressure control damper 19 so that the room pressure of the empty clean room 11 measured by the room pressure sensor 22 becomes the target room pressure while being maintained at a predetermined air supply air volume by (or a variable air volume device). Is adjusted, so that the room pressure of the clean room 11 can be reliably and easily maintained at the target room pressure.

The room pressure control system 10D maximizes the adjustment speed of the air volume of the pressure control damper 19 that sets the room pressure of the clean room 11 (air-conditioned room) to the target room pressure in conjunction with the measurement result of the room pressure sensor 22. Therefore, the room pressure of the clean room 11 can be quickly set to the target room pressure, and the air volume adjustment speed in the constant air volume device 32 (or variable air volume device) is made second fastest, which is linked to the measurement result of the pressure sensor 33. The pressure inside the return air duct is set to the target pressure inside the return air duct. By setting the adjustment speed of the exhaust air volume of the exhaust fan 17 to the third, the air volume of the air circulating in the system 10D (each duct 12 to 15a, 15b) can be adjusted. Stabilization can be achieved, the room pressure of the clean room 11 is stabilized, and the room pressure of the clean room 11 can be reliably maintained at the target room pressure.

10A Room pressure control system 10B Room pressure control system 10C Room pressure control system 10D Room pressure control system 11 Clean room (air-conditioned room)
12 Air supply duct 13 Return air duct 14 Exhaust duct (1st exhaust duct)
15a Local exhaust duct (second exhaust duct)
15b Local exhaust duct (second exhaust duct)
16 Air supply fan 17 Exhaust fan (1st exhaust fan)
18a Local exhaust fan (second exhaust fan)
18b Local exhaust fan (second exhaust fan)
19 Pressure control damper 20 1st air volume sensor (air volume sensor)
21 2nd air volume sensor 22 Room pressure sensor 23 Outside air intake 24 Motor damper 25a to 25i Volume damper 26a, 26b Chamber 27 Indicator regulator 28a, 28b Non-leak damper 29 Connection point 30 Indicator controller 31 Indicator controller 32 Constant air volume device 33 Pressure sensor 34 Indicator damper

Claims (13)

In a room pressure control system that maintains the room pressure of at least one air-conditioned room at the target room pressure.
The room pressure control system is connected to the air-conditioned room to supply air to the air-conditioned room, and is connected to the air-conditioned room to supply air to the air-conditioned room to the air supply duct. The return air duct for returning air, the first exhaust duct connected to the return air duct and exhausting a part of the air flowing into the return air duct from the air conditioning target room to the atmosphere, and the air conditioning target room are connected to each other. At least one second exhaust duct that exhausts a part of the air in the air-conditioned room to the atmosphere, an air supply fan installed in the air supply duct, and a first exhaust installed in the first exhaust duct. Air flowing through the fan, the second exhaust fan installed in the second exhaust duct, and the return air duct installed in the return air duct extending between the air conditioning target room and the branch point of the first exhaust duct. A first pressure control damper that adjusts the air volume and a first air volume that is installed in the return air duct that extends from the branch point between the return air duct and the first exhaust duct toward the air supply fan and measures the air volume in the return air duct. An air volume sensor, a second air volume sensor installed in an air supply duct extending between the air supply fan and the air conditioning target room to measure the air volume in the air supply duct, and a second air volume sensor installed in the air conditioning target room to be the air conditioning target. It has a room pressure sensor that measures the room pressure of the room.
In the chamber pressure control system, a target air volume in the return air duct is set so that the total exhaust air volume exhausted from the first and second exhaust ducts and the outside air air volume flowing into the air supply duct are equal to each other, and the air supply duct is set. The target air volume in the air supply duct of the air flowing through the air supply duct is set, the target chamber pressure of the air-conditioned room is set, and the air volume in the return air duct measured by the first air volume sensor becomes the target air volume in the return air duct. As a result, the first exhaust air volume of the first exhaust fan becomes a predetermined air volume, and the air volume in the air supply duct measured by the second air volume sensor becomes the target air volume in the air supply duct. The air supply air volume is adjusted, and the air air volume flowing through the return air duct is adjusted by the pressure control damper so that the room pressure of the air-conditioned room measured by the room pressure sensor becomes the target room pressure. A featured room pressure control system. In the chamber pressure control system, the adjustment of the first exhaust air volume in the first exhaust fan, the adjustment of the air supply air volume in the air supply fan, and the adjustment of the air air volume in the pressure control damper are performed at the same time, and the pressure control is performed. The adjustment speed of the air air volume in the damper is the fastest, the adjustment speed of the air supply air volume in the air supply fan is the second fastest, and the adjustment speed of the first exhaust air volume in the first exhaust fan is the air air volume in the pressure control damper. The room pressure control system according to claim 1, wherein the adjustment speed is slower than the adjustment speed of the air supply fan and the adjustment speed of the air supply air volume in the air supply fan. In the room pressure control system, the amount of outside air flowing into the air supply duct is kept constant, and a plurality of second exhaust fans installed in the plurality of second exhaust ducts connected to the air-conditioned room are started and stopped. The second exhaust air volume exhausted from the second exhaust duct is changed, or the exhaust air volume of a plurality of second exhaust fans installed in the plurality of second exhaust ducts connected to the air-conditioned room is changed. The second exhaust air volume exhausted from the second exhaust duct is changed, and the chamber pressure control system uses the first air volume sensor when the second exhaust air volume exhausted from the second exhaust duct is changed. The chamber pressure control system according to claim 1 or 2, wherein when the measured air volume in the return air duct becomes the target air volume in the return air duct, the first exhaust air volume of the first exhaust fan changes to a predetermined air volume. In a room pressure control system that maintains the room pressure of at least one air-conditioned room at the target room pressure.
The room pressure control system is connected to the air-conditioned room to supply air to the air-conditioned room, and is connected to the air-conditioned room to supply air to the air-conditioned room to the air supply duct. The return air duct for returning air, the first exhaust duct connected to the return air duct and exhausting a part of the air flowing into the return air duct from the air conditioning target room to the atmosphere, and the air conditioning target room are connected to each other. At least one second exhaust duct that exhausts a part of the air in the air-conditioned room to the atmosphere, an air supply fan installed in the air supply duct, and a first exhaust installed in the first exhaust duct. A fan, a second exhaust fan installed in the second exhaust duct, a constant air volume device or a variable air volume device installed in an air supply duct extending between the air supply fan and the air conditioning target room, and the air conditioning. A pressure control damper installed in a return air duct extending between a target chamber and a branch point of the first exhaust duct to adjust the amount of air flowing through the return air duct, the return air duct, and the first exhaust duct. An air volume sensor installed in the return air duct extending from the branch point toward the air supply fan to measure the air volume in the return air duct, and an air volume sensor installed in the air conditioning target room to measure the room pressure of the air conditioning target room. Has a room pressure sensor
In the chamber pressure control system, a target air volume in the return air duct that equalizes the total exhaust air volume exhausted from the first and second exhaust ducts and the outside air air volume flowing into the air supply duct is set, and the air conditioning is performed. The target room pressure of the target room is set, the supply air volume of the air supplied to the air conditioning target room is maintained at a predetermined supply air volume by the constant air volume device or the variable air volume device, and the return air measured by the air volume sensor. When the air volume in the duct becomes the target air volume in the return air duct, the first exhaust air volume of the first exhaust fan becomes a predetermined air volume, and the room pressure of the air-conditioned room measured by the room pressure sensor becomes the target room. A room pressure control system characterized in that the amount of air flowing through the return air duct is adjusted by the pressure control damper so as to become a pressure. In the chamber pressure control system, the adjustment of the exhaust air volume in the first exhaust fan, the air volume adjustment in the constant air volume device or the variable air volume device, and the adjustment of the air air volume in the pressure control damper are performed at the same time, and the pressure control damper. The air volume adjustment speed in the first exhaust fan is the fastest, the air volume adjustment speed in the constant air volume device or the variable air volume device is the second fastest, and the adjustment speed of the first exhaust air volume in the first exhaust fan is the air air volume in the pressure control damper. The room pressure control system according to claim 4, wherein the adjustment speed is slower than the adjustment speed of the above and the air volume adjustment speed in the constant air volume device or the variable air volume device. In the room pressure control system, the amount of outside air flowing into the air supply duct is kept constant, and a plurality of second exhaust fans installed in the plurality of second exhaust ducts connected to the air-conditioned room are started and stopped. The second exhaust air volume exhausted from the second exhaust duct is changed, or the exhaust air volume of a plurality of second exhaust fans installed in the plurality of second exhaust ducts connected to the air-conditioned room is changed. The second exhaust air volume exhausted from the second exhaust duct is changed, and the chamber pressure control system measures the air volume sensor when the second exhaust air volume exhausted from the second exhaust duct is changed. The chamber pressure control system according to claim 4 or 5, wherein when the air volume in the return air duct becomes the target air volume in the return air duct, the first exhaust air volume of the first exhaust fan changes to a predetermined air volume. In the room pressure control system, the air supply air volume of the air supplied to the air-conditioned room is changed, and in the room pressure control system, the target air volume in the return air duct is changed when the air supply air volume is changed. The room pressure control system according to any one of claims 1 to 6. In a room pressure control system that maintains the room pressure of at least one air-conditioned room at the target room pressure.
The room pressure control system is connected to the air-conditioned room to supply air to the air-conditioned room, and is connected to the air-conditioned room to supply air to the air-conditioned room to the air supply duct. The return air duct for returning air, the first exhaust duct connected to the return air duct and exhausting a part of the air flowing into the return air duct from the air conditioning target room to the atmosphere, and the air conditioning target room are connected to each other. At least one second exhaust duct that exhausts a part of the air in the air-conditioned room to the atmosphere, an air supply fan installed in the air supply duct, and a first exhaust installed in the first exhaust duct. Air flowing through the fan, the second exhaust fan installed in the second exhaust duct, and the return air duct installed in the return air duct extending between the air conditioning target room and the branch point of the first exhaust duct. A pressure control damper that adjusts the air volume and a pressure sensor that is installed in the return air duct that extends from the branch point between the return air duct and the first exhaust duct toward the air supply fan and measures the pressure inside the return air duct. An air volume sensor installed in the air supply duct extending between the air supply fan and the air conditioning target room to measure the air volume in the air supply duct, and a room pressure of the air conditioning target room installed in the air conditioning target room. Has a room pressure sensor to measure
In the chamber pressure control system, a target pressure in the return air duct that equalizes the total exhaust air volume exhausted from the first and second exhaust ducts and the outside air air volume flowing into the air supply duct is set, and the air supply duct is set. The target air volume in the air supply duct of the air flowing into the air supply duct is set, the target chamber pressure of the air-conditioned room is set, and the pressure in the return air duct measured by the pressure sensor becomes the target pressure in the return air duct. The air supply air volume of the air supply fan is adjusted so that the first exhaust air volume of the first exhaust fan becomes a predetermined air volume and the air volume in the air supply duct measured by the air volume sensor becomes the target air volume in the air supply duct. A chamber characterized in that the amount of air flowing through the return air duct is adjusted by the pressure control damper so that the chamber pressure of the air-conditioned chamber measured by the chamber pressure sensor becomes the target chamber pressure. Pressure control system. In the chamber pressure control system, the adjustment of the first exhaust air volume in the first exhaust fan, the adjustment of the air supply air volume in the air supply fan, and the adjustment of the air air volume in the pressure control damper are performed at the same time, and the pressure control is performed. The adjustment speed of the air air volume in the damper is the fastest, the adjustment speed of the air supply air volume in the air supply fan is the second fastest, and the adjustment speed of the first exhaust air volume in the first exhaust fan is the air air volume in the pressure control damper. The room pressure control system according to claim 8, wherein the adjustment speed is slower than the adjustment speed of the air supply fan and the adjustment speed of the air supply air volume in the air supply fan. In a room pressure control system that maintains the room pressure of at least one air-conditioned room at the target room pressure.
The room pressure control system is connected to the air-conditioned room to supply air to the air-conditioned room, and is connected to the air-conditioned room to supply air to the air-conditioned room to the air supply duct. The return air duct for returning air, the first exhaust duct connected to the return air duct and exhausting a part of the air flowing into the return air duct from the air conditioning target room to the atmosphere, and the air conditioning target room are connected to each other. At least one second exhaust duct that exhausts a part of the air in the air-conditioned room to the atmosphere, an air supply fan installed in the air supply duct, and a first exhaust installed in the first exhaust duct. A fan, a second exhaust fan installed in the second exhaust duct, a constant air volume device or a variable air volume device installed in an air supply duct extending between the air supply fan and the air conditioning target room, and the air conditioning. A pressure control damper installed in a return air duct extending between a target chamber and a branch point of the first exhaust duct to adjust the amount of air flowing through the return air duct, the return air duct, and the first exhaust duct. A pressure sensor installed in the return air duct extending from the branch point toward the air supply fan to measure the pressure inside the return air duct, and a pressure sensor installed in the air conditioning target room to measure the room pressure of the air conditioning target room. Has a room pressure sensor
In the chamber pressure control system, a target pressure in the return air duct that equalizes the total exhaust air volume exhausted from the first and second exhaust ducts and the outside air air volume flowing into the air supply duct is set, and the air conditioning is performed. The target chamber pressure of the target room is set, the supply air volume of the air supplied to the air conditioning target room is maintained at a predetermined supply air volume by the constant air volume device or the variable air volume device, and the return air measured by the pressure sensor. When the pressure in the duct becomes the target pressure in the return air duct, the first exhaust air volume of the first exhaust fan becomes a predetermined air volume, and the chamber pressure of the air conditioning target chamber measured by the chamber pressure sensor becomes the target chamber. A room pressure control system characterized in that the amount of air flowing through the return air duct is adjusted by the pressure control damper so as to become a pressure. In the chamber pressure control system, the adjustment of the exhaust air volume in the first exhaust fan, the air volume adjustment in the constant air volume device or the variable air volume device, and the adjustment of the air air volume in the pressure control damper are performed at the same time, and the pressure control damper. The air volume adjustment speed in the first exhaust fan is the fastest, the air volume adjustment speed in the variable air volume device is the second fastest, and the adjustment speed of the exhaust air volume in the first exhaust fan is the adjustment speed of the air air volume in the pressure control damper and the constant. The room pressure control system according to claim 10, which is slower than the air volume adjusting speed in the air volume device or the variable air volume device. In the room pressure control system, the amount of outside air flowing into the air supply duct is kept constant, and a plurality of second exhaust fans installed in the plurality of second exhaust ducts connected to the air-conditioned room are started and stopped. The second exhaust air volume exhausted from the second exhaust duct is changed, or the exhaust air volume of a plurality of second exhaust fans installed in the plurality of second exhaust ducts connected to the air-conditioned room is changed. The second exhaust air volume exhausted from the second exhaust duct is changed, and the chamber pressure control system measures the pressure sensor when the second exhaust air volume exhausted from the second exhaust duct is changed. The chamber pressure control system according to any one of claims 8 to 11, wherein the first exhaust air volume of the first exhaust fan changes to a predetermined air volume when the pressure in the return air duct becomes the target pressure in the return air duct. In the room pressure control system, the amount of air supplied to the air-conditioned room is changed, and in the room pressure control system, the target pressure in the return air duct is changed when the amount of air supplied is changed. The room pressure control system according to any one of claims 8 to 12.

Images