JP6939113B2 - Adhesive for fixing polishing members, adhesive sheet for fixing polishing members, and laminated body of polishing members - Google Patents
Adhesive for fixing polishing members, adhesive sheet for fixing polishing members, and laminated body of polishing members Download PDFInfo
- Publication number
- JP6939113B2 JP6939113B2 JP2017117405A JP2017117405A JP6939113B2 JP 6939113 B2 JP6939113 B2 JP 6939113B2 JP 2017117405 A JP2017117405 A JP 2017117405A JP 2017117405 A JP2017117405 A JP 2017117405A JP 6939113 B2 JP6939113 B2 JP 6939113B2
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- JP
- Japan
- Prior art keywords
- resin
- weight
- adhesive
- fixing
- polishing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000853 adhesive Substances 0.000 title claims description 99
- 230000001070 adhesive effect Effects 0.000 title claims description 98
- 238000005498 polishing Methods 0.000 title claims description 91
- 229920005989 resin Polymers 0.000 claims description 162
- 239000011347 resin Substances 0.000 claims description 162
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 63
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims description 47
- 229920000346 polystyrene-polyisoprene block-polystyrene Polymers 0.000 claims description 38
- 150000003505 terpenes Chemical class 0.000 claims description 33
- 235000007586 terpenes Nutrition 0.000 claims description 33
- 239000003795 chemical substances by application Substances 0.000 claims description 29
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 claims description 24
- 150000003097 polyterpenes Chemical class 0.000 claims description 24
- 239000008096 xylene Substances 0.000 claims description 24
- 229920003051 synthetic elastomer Polymers 0.000 claims description 22
- 239000005061 synthetic rubber Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 18
- 125000003118 aryl group Chemical group 0.000 claims description 11
- 239000002480 mineral oil Substances 0.000 claims description 11
- 235000010446 mineral oil Nutrition 0.000 claims description 10
- 239000012790 adhesive layer Substances 0.000 claims description 9
- 239000000178 monomer Substances 0.000 claims description 5
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 claims description 2
- 125000003011 styrenyl group Chemical group [H]\C(*)=C(/[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 claims 1
- 230000003712 anti-aging effect Effects 0.000 description 19
- 125000000905 polyterpene group Polymers 0.000 description 19
- 238000000034 method Methods 0.000 description 18
- -1 isocyanate compound Chemical class 0.000 description 17
- 239000002585 base Substances 0.000 description 16
- 239000012298 atmosphere Substances 0.000 description 14
- 239000010410 layer Substances 0.000 description 13
- 229920002633 Kraton (polymer) Polymers 0.000 description 11
- 229920002799 BoPET Polymers 0.000 description 9
- 229920001971 elastomer Polymers 0.000 description 9
- 239000005060 rubber Substances 0.000 description 9
- 229910001220 stainless steel Inorganic materials 0.000 description 9
- 239000010935 stainless steel Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 239000003513 alkali Substances 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 239000012948 isocyanate Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000002985 plastic film Substances 0.000 description 5
- 229920006255 plastic film Polymers 0.000 description 5
- 229920005862 polyol Polymers 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 244000043261 Hevea brasiliensis Species 0.000 description 4
- 239000004743 Polypropylene Substances 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 230000001771 impaired effect Effects 0.000 description 4
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- 229920003052 natural elastomer Polymers 0.000 description 4
- 229920001194 natural rubber Polymers 0.000 description 4
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- 229920002367 Polyisobutene Polymers 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 3
- 239000013522 chelant Substances 0.000 description 3
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- 230000000694 effects Effects 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
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- 150000003077 polyols Chemical class 0.000 description 3
- 229920001155 polypropylene Polymers 0.000 description 3
- 238000009864 tensile test Methods 0.000 description 3
- FKTHNVSLHLHISI-UHFFFAOYSA-N 1,2-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC=C1CN=C=O FKTHNVSLHLHISI-UHFFFAOYSA-N 0.000 description 2
- ROGIWVXWXZRRMZ-UHFFFAOYSA-N 2-methylbuta-1,3-diene;styrene Chemical compound CC(=C)C=C.C=CC1=CC=CC=C1 ROGIWVXWXZRRMZ-UHFFFAOYSA-N 0.000 description 2
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- 239000003963 antioxidant agent Substances 0.000 description 2
- 230000003078 antioxidant effect Effects 0.000 description 2
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- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 229920005549 butyl rubber Polymers 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- XMGQYMWWDOXHJM-UHFFFAOYSA-N limonene Chemical compound CC(=C)C1CCC(C)=CC1 XMGQYMWWDOXHJM-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000012188 paraffin wax Substances 0.000 description 2
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- 229920000468 styrene butadiene styrene block copolymer Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 2
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 2
- NNOZGCICXAYKLW-UHFFFAOYSA-N 1,2-bis(2-isocyanatopropan-2-yl)benzene Chemical compound O=C=NC(C)(C)C1=CC=CC=C1C(C)(C)N=C=O NNOZGCICXAYKLW-UHFFFAOYSA-N 0.000 description 1
- ZXHZWRZAWJVPIC-UHFFFAOYSA-N 1,2-diisocyanatonaphthalene Chemical compound C1=CC=CC2=C(N=C=O)C(N=C=O)=CC=C21 ZXHZWRZAWJVPIC-UHFFFAOYSA-N 0.000 description 1
- IVIDDMGBRCPGLJ-UHFFFAOYSA-N 2,3-bis(oxiran-2-ylmethoxy)propan-1-ol Chemical compound C1OC1COC(CO)COCC1CO1 IVIDDMGBRCPGLJ-UHFFFAOYSA-N 0.000 description 1
- WWUCYCYSEUEANO-UHFFFAOYSA-N 2-(aziridin-1-yl)acetamide Chemical compound NC(=O)CN1CC1 WWUCYCYSEUEANO-UHFFFAOYSA-N 0.000 description 1
- SYEWHONLFGZGLK-UHFFFAOYSA-N 2-[1,3-bis(oxiran-2-ylmethoxy)propan-2-yloxymethyl]oxirane Chemical compound C1OC1COCC(OCC1OC1)COCC1CO1 SYEWHONLFGZGLK-UHFFFAOYSA-N 0.000 description 1
- AOBIOSPNXBMOAT-UHFFFAOYSA-N 2-[2-(oxiran-2-ylmethoxy)ethoxymethyl]oxirane Chemical compound C1OC1COCCOCC1CO1 AOBIOSPNXBMOAT-UHFFFAOYSA-N 0.000 description 1
- VSKJLJHPAFKHBX-UHFFFAOYSA-N 2-methylbuta-1,3-diene;styrene Chemical compound CC(=C)C=C.C=CC1=CC=CC=C1.C=CC1=CC=CC=C1 VSKJLJHPAFKHBX-UHFFFAOYSA-N 0.000 description 1
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 1
- ORTNTAAZJSNACP-UHFFFAOYSA-N 6-(oxiran-2-ylmethoxy)hexan-1-ol Chemical compound OCCCCCCOCC1CO1 ORTNTAAZJSNACP-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- KXDHJXZQYSOELW-UHFFFAOYSA-N Carbamic acid Chemical compound NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 1
- 239000005058 Isophorone diisocyanate Substances 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- QORUGOXNWQUALA-UHFFFAOYSA-N N=C=O.N=C=O.N=C=O.C1=CC=C(C(C2=CC=CC=C2)C2=CC=CC=C2)C=C1 Chemical compound N=C=O.N=C=O.N=C=O.C1=CC=C(C(C2=CC=CC=C2)C2=CC=CC=C2)C=C1 QORUGOXNWQUALA-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 229920000538 Poly[(phenyl isocyanate)-co-formaldehyde] Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
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- 239000004698 Polyethylene Substances 0.000 description 1
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- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 239000012963 UV stabilizer Substances 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
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- HIFVAOIJYDXIJG-UHFFFAOYSA-N benzylbenzene;isocyanic acid Chemical class N=C=O.N=C=O.C=1C=CC=CC=1CC1=CC=CC=C1 HIFVAOIJYDXIJG-UHFFFAOYSA-N 0.000 description 1
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- 150000002148 esters Chemical class 0.000 description 1
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- 239000000945 filler Substances 0.000 description 1
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- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
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- 150000002513 isocyanates Chemical class 0.000 description 1
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
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- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
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- SJPFBRJHYRBAGV-UHFFFAOYSA-N n-[[3-[[bis(oxiran-2-ylmethyl)amino]methyl]phenyl]methyl]-1-(oxiran-2-yl)-n-(oxiran-2-ylmethyl)methanamine Chemical compound C1OC1CN(CC=1C=C(CN(CC2OC2)CC2OC2)C=CC=1)CC1CO1 SJPFBRJHYRBAGV-UHFFFAOYSA-N 0.000 description 1
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Description
本発明は、研磨部材の固定用途に好適に用いることができる、粘着剤組成物に関する。更に詳しくは、適度な粘着性能と、高温環境下で用いてもズレや剥がれなどが生じ難い耐熱性を有し、研磨後に研磨部材を研磨機定盤から剥がす際に、糊残りし難く、容易に剥離することが可能な性能を有する粘着剤層を形成できる粘着剤組成物に関するものである。 The present invention relates to a pressure-sensitive adhesive composition that can be suitably used for fixing a polishing member. More specifically, it has appropriate adhesive performance and heat resistance that does not easily shift or peel off even when used in a high temperature environment, and when the polishing member is peeled off from the polishing machine surface plate after polishing, it is difficult for adhesive to remain and it is easy. It relates to a pressure-sensitive adhesive composition capable of forming a pressure-sensitive adhesive layer having a performance capable of being peeled off.
従来、液晶ガラス、ハードディスク用基板、光学レンズ、シリコンウェハ、集積回路等は、研磨部材等を用いて研磨されており、研磨部材の固定には、例えば、研磨部材に粘着テープを貼り合わせ一体化し、積層体とした後、粘着テープ付きの研磨部材積層体を、研磨機の定盤に貼り合せるなどして使用されている。この研磨部材の固定には、様々な被着体に対し、適度な粘着力を発現することが可能なゴム系粘着剤が使用されているが、研磨工程では、粘着剤層に対して強い剪断力がかかり、さらに研磨中の摩擦熱などにより高温となることがあるため、高温環境下で用いてもズレや剥がれなどが生じ難い耐熱性が求められるが、アクリル系などに比較して凝集力の劣る従来のゴム系粘着剤では、高圧力の研磨に使用することは困難であった。また、研磨後には研磨部材積層体を研磨機定盤から剥がすことが必要となるが、その際、研磨機定盤に粘着剤層が残る（糊残り）ことがあり、研磨機定盤の洗浄が必要となることで、総生産時間が長くなるため、研磨後に、研磨機定盤側に粘着剤が残らない、再剥離性も求められていた。更に、研磨工程では酸性やアルカリ性の薬品（スラリーともいう）を用いることもあるため、耐薬品性も求められており、様々な被着体に対し適度な粘着力を発現させ、高圧力の研磨に使用できる凝集力と耐熱性を持ち合わせたゴム系粘着剤が求められている。 Conventionally, liquid crystal glass, hard disk substrates, optical lenses, silicon wafers, integrated circuits, etc. have been polished using polishing members, etc., and for fixing the polishing members, for example, an adhesive tape is attached to the polishing members and integrated. After forming the laminated body, the laminated body of the polishing member with the adhesive tape is used by laminating it on the surface plate of the polishing machine. A rubber-based pressure-sensitive adhesive capable of exhibiting an appropriate adhesive force on various adherends is used for fixing the polishing member, but in the polishing step, strong shearing against the pressure-sensitive adhesive layer is used. Since force is applied and the temperature may rise due to frictional heat during polishing, heat resistance is required to prevent slippage and peeling even when used in a high temperature environment, but cohesive force is required compared to acrylics. It has been difficult to use conventional rubber-based adhesives, which are inferior in quality, for high-pressure polishing. Further, after polishing, it is necessary to peel off the polishing member laminate from the polishing machine surface plate, but at that time, an adhesive layer may remain on the polishing machine surface plate (glue residue), and the polishing machine surface plate is cleaned. Since the total production time becomes long due to the need for the above, there is also a demand for removability so that no adhesive remains on the surface plate side of the polishing machine after polishing. Furthermore, since acidic or alkaline chemicals (also called slurry) may be used in the polishing process, chemical resistance is also required, and appropriate adhesive strength is exhibited to various adherends, and high-pressure polishing is performed. There is a demand for a rubber-based adhesive having cohesive power and heat resistance that can be used in the above.
この様に、ゴム系の研磨部材固定用粘着剤には多種の性能が求められ、例えば、特許文献１では、研磨部材用としてゴム系粘着剤が用いられているが、スチレン含有量やジブロック含有量に関わる設計が考慮されておらず、近年求められる要求性能からは十分ではない。また特許文献２では、天然ゴムと放射状構造を有するスチレン−イソプレン−スチレンブロック共重合体（ＳＩＳ）が用いられているが、粘着付与樹脂に関わる設計が考慮されておらず、近年求められる要求性能を満足できていないのが現状である。この様に、様々な被着体に対し、優れた粘着力を発現し、凝集力と耐熱性を持ち合わせた研磨部材固定用粘着剤は見出されていなかった。 As described above, various performances are required for the rubber-based adhesive for fixing the polishing member. For example, in Patent Document 1, the rubber-based adhesive is used for the polishing member, but the styrene content and diblock The design related to the content is not taken into consideration, and it is not sufficient from the required performance required in recent years. Further, in Patent Document 2, a styrene-isoprene-styrene block copolymer (SIS) having a radial structure with natural rubber is used, but the design related to the tackifier resin is not considered, and the required performance required in recent years is not taken into consideration. The current situation is that we are not satisfied with. As described above, no adhesive for fixing a polishing member has been found, which exhibits excellent adhesive force to various adherends and has cohesive force and heat resistance.
本発明の研磨部材固定用粘着剤は、粘着剤層の凝集力を高めることが可能であり、高温環境下でもズレなどが生じることなく、従来よりも高圧力の研磨に使用でき、また、耐酸性や耐アルカリ性を持ち合わせ、研磨終了後の研磨部材を研磨機定盤から容易に再剥離することが可能で糊残りし難い、研磨部材固定用粘着剤を提供することを目的とする。 The pressure-sensitive adhesive for fixing a polishing member of the present invention can increase the cohesive force of the pressure-sensitive adhesive layer, can be used for polishing at a higher pressure than before without causing deviation even in a high-temperature environment, and is acid-resistant. It is an object of the present invention to provide an adhesive for fixing a polishing member, which has properties and alkali resistance, can easily re-peel the polishing member from the polishing machine surface plate after polishing, and does not easily leave adhesive residue.
本発明者らは、前記諸問題を解決するために鋭意研究を重ねた結果、スチレン含有量とジブロック含有量が特定範囲であることとを必須としたスチレンイソプレンブロック共重合体と、特定含有量のポリテルペン樹脂と、芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかとを用いることで、上記課題を解決し得ることを見出し、本発明に至った。 As a result of diligent research to solve the above-mentioned problems, the present inventors have made it essential that the styrene content and the diblock content be within a specific range, and the styrene isoprene block copolymer and the specific content. We have found that the above problems can be solved by using an amount of the polyterpene resin and at least one of an aromatic-modified terpene resin and a xylene resin, and have arrived at the present invention.
すなわち、本発明は、合成ゴムと、粘着付与樹脂とを含有する研磨部材固定用粘着剤において、前記合成ゴムが、スチレン含有量２０〜４０重量％、かつジブロック含有量１５〜７０重量％であるスチレンイソプレンブロック共重合体（Ａ）を含み、前記粘着付与樹脂が、ポリテルペン樹脂（Ｂ１）と、芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかである粘着付与樹脂（Ｂ２）とを含み、前記ポリテルペン樹脂（Ｂ１）の含有量が、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、１０〜６０重量部であって、前記芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかである粘着付与樹脂（Ｂ２）の含有量が、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、０．１〜１０重量部であることを特徴とした研磨部材固定用粘着剤に関する。 That is, in the present invention, in the pressure-sensitive adhesive for fixing a polishing member containing a synthetic rubber and a tackifier resin, the synthetic rubber has a styrene content of 20 to 40% by weight and a diblock content of 15 to 70% by weight. A styrene isoprene block copolymer (A) is contained, and the tackifier resin contains a polyterpene resin (B1) and a tackifier resin (B2) which is at least one of an aromatic-modified terpene resin and a xylene resin. The content of the polyterpene resin (B1) is 10 to 60 parts by weight with respect to 100 parts by weight of the styrene isoprene block copolymer (A), and is at least one of the aromatic-modified terpene resin and the xylene resin. The present invention relates to a pressure-sensitive adhesive for fixing a polishing member, wherein the content of the tackifier resin (B2) is 0.1 to 10 parts by weight with respect to 100 parts by weight of the styrene isoprene block copolymer (A).
本発明によれば、粘着剤層の凝集力を高めることができることにより、高温環境下でもズレや剥がれなどが生じ難く、従来よりも高圧力の研磨に使用でき、耐酸性や耐アルカリ性をも持ち合わせた、研磨部材固定用粘着剤とすることができる。また、研磨終了後の研磨部材の再剥離性に優れ、糊残りし難い、研磨部材固定用粘着剤の供給が可能となる。 According to the present invention, since the cohesive force of the adhesive layer can be increased, it is less likely to be displaced or peeled off even in a high temperature environment, it can be used for polishing at a higher pressure than before, and it also has acid resistance and alkali resistance. It can also be used as an adhesive for fixing a polishing member. In addition, it is possible to supply an adhesive for fixing the polishing member, which is excellent in removability of the polishing member after polishing and does not easily leave adhesive residue.
本発明の研磨部材固定用粘着剤は、合成ゴムと、粘着付与樹脂とを含有する研磨部材固定用粘着剤において、前記合成ゴムが、スチレン含有量２０〜４０重量％、かつジブロック含有量１５〜７０重量％であるスチレンイソプレンブロック共重合体（Ａ）を含み、前記粘着付与樹脂が、ポリテルペン樹脂（Ｂ１）と、芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかである粘着付与樹脂（Ｂ２）とを含み、前記ポリテルペン樹脂（Ｂ１）の含有量が、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、１０〜６０重量部であって、前記芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかである粘着付与樹脂（Ｂ２）の含有量が、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、０．１〜１０重量部である粘着剤である。 The adhesive for fixing a polishing member of the present invention is an adhesive for fixing a polishing member containing a synthetic rubber and a tackifier resin, wherein the synthetic rubber has a styrene content of 20 to 40% by weight and a diblock content of 15. A tackifier resin (B2) containing a styrene isoprene block copolymer (A) in an amount of about 70% by weight, wherein the tackifier resin is at least one of a polyterpene resin (B1) and an aromatic-modified terpene resin and a xylene resin. The content of the polyterpene resin (B1) is 10 to 60 parts by weight with respect to 100 parts by weight of the styrene isoprene block copolymer (A). The pressure-sensitive adhesive has a content of at least one of the tackifier resin (B2) of 0.1 to 10 parts by weight with respect to 100 parts by weight of the styrene isoprene block copolymer (A).
本発明の研磨部材固定用粘着剤は、塗工することで粘着剤層を形成し、基材を備えた粘着シートとして使用することができる。
すなわち、基材の片面または両面に、研磨部材固定用粘着剤から形成されてなる粘着剤層を備えた、研磨部材固定用粘着シートとして用いることができる。
なお本発明で粘着シート、粘着テープ、粘着フィルムは同義語である。
The pressure-sensitive adhesive for fixing a polishing member of the present invention can be used as a pressure-sensitive adhesive sheet provided with a base material by forming a pressure-sensitive adhesive layer by coating.
That is, it can be used as an adhesive sheet for fixing a polishing member, which is provided with an adhesive layer formed of an adhesive for fixing the polishing member on one side or both sides of the base material.
In the present invention, the pressure-sensitive adhesive sheet, the pressure-sensitive adhesive tape, and the pressure-sensitive adhesive film are synonyms.
ゆえに、本発明において、研磨部材固定用粘着剤とは、研磨部材に粘着シートを貼り合わせ一体化された、研磨部材積層体を研磨機に貼り合わせるために用いる粘着シートを形成することが出来る粘着剤のことである。
また、本発明の研磨部材固定用粘着剤は、粘着剤層の凝集力を高めることができることにより、高温環境下でもズレや剥がれなどが生じ難く、従来よりも高圧力の研磨に使用でき、耐酸性や耐アルカリ性をも持ち合わせているため、定盤側、および研磨部材側のいずれにも用いることができ、基材の片面または両面に、本発明の研磨部材固定用粘着剤から形成されてなる粘着剤層を備えた、研磨部材用粘着シートであればよい。また、定盤側に本発明の研磨部材固定用粘着剤を用いた場合、再剥離性に優れるため、研磨機の定盤から容易に再剥離が可能である。
この時、他方の面の粘着剤層を形成する粘着剤は、従来公知の粘着剤を用いることができる。
Therefore, in the present invention, the adhesive for fixing the polishing member is an adhesive capable of forming an adhesive sheet used for adhering the polishing member laminate to the polishing machine, which is integrated by adhering the adhesive sheet to the polishing member. It is an agent.
Further, the pressure-sensitive adhesive for fixing a polishing member of the present invention is less likely to be displaced or peeled even in a high-temperature environment because it can increase the cohesive force of the pressure-sensitive adhesive layer, and can be used for polishing at a higher pressure than before, and is acid-resistant. Since it also has properties and alkali resistance, it can be used on both the platen side and the polishing member side, and is formed on one or both sides of the base material from the adhesive for fixing the polishing member of the present invention. Any adhesive sheet for polishing members provided with an adhesive layer may be used. Further, when the adhesive for fixing a polishing member of the present invention is used on the surface plate side, it can be easily peeled off from the surface plate of the polishing machine because of its excellent removability.
At this time, a conventionally known pressure-sensitive adhesive can be used as the pressure-sensitive adhesive that forms the pressure-sensitive adhesive layer on the other surface.
また、本発明において、研磨部材とは、例えば、ウレタン系研磨部材、不織布系研磨部材、スウェード系研磨部材などが挙げられ、研磨部材であれば、これらに限定されるものではない。 Further, in the present invention, the polishing member includes, for example, a urethane-based polishing member, a non-woven fabric-based polishing member, a suede-based polishing member, and the like, and the polishing member is not limited thereto.
《研磨部材固定用粘着剤》
本発明の研磨部材固定用粘着剤は、合成ゴムと、粘着付与樹脂とを含有する研磨部材固定用粘着剤において、前記合成ゴムが、スチレン含有量２０〜４０重量％、かつジブロック含有量１５〜７０重量％であるスチレンイソプレンブロック共重合体（Ａ）を含み、前記粘着付与樹脂が、ポリテルペン樹脂（Ｂ１）と、芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかである粘着付与樹脂（Ｂ２）とを含み、前記ポリテルペン樹脂（Ｂ１）の含有量が、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、１０〜６０重量部であって、前記芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかである粘着付与樹脂（Ｂ２）の含有量が、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、０．１〜１０重量部である。
<< Adhesive for fixing polishing members >>
The pressure-sensitive adhesive for fixing a polishing member of the present invention is a pressure-sensitive adhesive for fixing a polishing member containing a synthetic rubber and a tackifier resin, wherein the synthetic rubber has a styrene content of 20 to 40% by weight and a diblock content of 15. A tackifier resin (B2) containing a styrene isoprene block copolymer (A) in an amount of about 70% by weight, wherein the tackifier resin is at least one of a polyterpene resin (B1) and an aromatic-modified terpene resin and a xylene resin. The content of the polyterpene resin (B1) is 10 to 60 parts by weight with respect to 100 parts by weight of the styrene isoprene block copolymer (A). The content of the tackifier resin (B2), which is at least one of them, is 0.1 to 10 parts by weight with respect to 100 parts by weight of the styrene isoprene block copolymer (A).
＜合成ゴム＞
合成ゴムは、スチレン含有量が２０〜４０重量％、かつジブロック含有量が１５〜７０重量％であるスチレンイソプレンブロック共重合体（Ａ）を含む。
<Synthetic rubber>
The synthetic rubber contains a styrene isoprene block copolymer (A) having a styrene content of 20 to 40% by weight and a diblock content of 15 to 70% by weight.
また、スチレンイソプレンブロック共重合体（Ａ）は、リニア構造、または放射状構造（ラジアル構造）を有するものが存在するが、リニア構造を有する場合、柔軟性が高い構造であるため、様々な被着体に対する密着性に優れ、粘着性能と耐熱性とに、より優れた効果がみられる。そのため、スチレン−イソプレン−スチレンブロックのトリブロック体（ＳＩＳ）、スチレン−イソプレンのジブロック体（ＳＩ）からなるリニア構造であることが好ましい。
リニア構造であるスチレンイソプレンブロック共重合体とは、スチレンのブロックとイソプレンのブロックとが結合した線状共重合体をさす。
Further, some styrene isoprene block copolymers (A) have a linear structure or a radial structure (radial structure), but when they have a linear structure, they have a highly flexible structure and therefore are variously adhered. It has excellent adhesion to the body, and has more excellent effects on adhesive performance and heat resistance. Therefore, it is preferable to have a linear structure composed of a styrene-isoprene-styrene block triblock body (SIS) and a styrene-isoprene diblock body (SI).
The styrene isoprene block copolymer having a linear structure refers to a linear copolymer in which a styrene block and an isoprene block are bonded.
本発明においては、スチレンイソプレンブロック共重合体（Ａ）全量（１００重量％）中の、ジブロック含有量が、１５〜７０重量％であり、好ましくは１５〜５０重量％であり、更に好ましくは、１５〜２５重量％である。ジブロック体の含有量がこの範囲にあることで、凝集力と再剥離性とに優れたものとすることができる。 In the present invention, the diblock content in the total amount (100% by weight) of the styrene isoprene block copolymer (A) is 15 to 70% by weight, preferably 15 to 50% by weight, and more preferably 15 to 50% by weight. It is 15 to 25% by weight. When the content of the diblock body is in this range, the cohesive force and the removability can be made excellent.
スチレン含有量は、２０〜４０重量％であり、好ましくは２２〜４０重量％である。この範囲にあることで、凝集力に優れた接着剤とすることができる。 The styrene content is 20 to 40% by weight, preferably 22 to 40% by weight. Within this range, an adhesive having excellent cohesive force can be obtained.
一般的に合成ゴム系粘着剤は、高極性から低極性の幅広い被着体に対し、優れた粘着性能を発現することが知られている。本発明では、合成ゴムのスチレン含有量％を一定範囲とすることで、スチレンブロック体の物理架橋により、凝集力を付与することができる。さらにジブロック含有量％を一定範囲とすることで、末端にスチレンブロック体のないジブロック体が一定量存在することとなり、密着性や粘着力を向上させることが可能となる。本来、ゴム系粘着剤では、多くの粘着付与樹脂を添加しないと、タック性が発現しないため、粘着付与樹脂の添加を必須とするが、凝集力低下の原因となってしまうことが多い。しかし、本発明のスチレンイソプレンブロック共重合体（Ａ）であれば、粘着付与樹脂の添加量を少なくすることが可能であり、粘着付与樹脂を加えたことによる凝集力の低下等を抑えることが可能となり、高い粘着力と凝集力をバランスよく保持することが可能である。 In general, synthetic rubber adhesives are known to exhibit excellent adhesive performance on a wide range of adherends from high polarity to low polarity. In the present invention, by setting the styrene content% of the synthetic rubber within a certain range, cohesive force can be imparted by physical cross-linking of the styrene block body. Further, by setting the diblock content% in a certain range, a certain amount of diblock without a styrene block is present at the end, and it is possible to improve the adhesiveness and adhesive strength. Originally, in a rubber-based pressure-sensitive adhesive, tackiness is not exhibited unless a large amount of tack-imparting resin is added, so that it is essential to add a tack-imparting resin, but it often causes a decrease in cohesive force. However, with the styrene isoprene block copolymer (A) of the present invention, it is possible to reduce the amount of the tackifier resin added, and it is possible to suppress a decrease in cohesive force due to the addition of the tackifier resin. This makes it possible to maintain high adhesive strength and cohesive strength in a well-balanced manner.
このようなスチレンイソプレンブロック共重合体（Ａ）としては、例えば、Ｑuintac３２８０（日本ゼオン社製、スチレン量２５％、ジブロック量１７％、リニア構造）、Ｑuintac３２７０（日本ゼオン社製、スチレン量２４％、ジブロック量６７％、リニア構造）、Ｋraton Ｄ１１１９（クレイトン社製、スチレン量２２％、ジブロック量６６％、リニア構造）、Ｋraton Ｄ１１２６（クレイトン社製、スチレン量２１％、ジブロック量３０％、ラジアル構造）、Ｋraton Ｄ１１９３（クレイトン社製、スチレン量２４％、ジブロック量２０％、リニア構造）などが挙げられるが、これらに限定するものではなく、このようなスチレンイソプレンブロック共重合体は、求められる性能を損なわない範囲で必要に応じて使用することができ、２種以上を組み合わせて使用しても良い。 Examples of such a styrene isoprene block copolymer (A) include Quintac3280 (manufactured by Nippon Zeon, 25% styrene, 17% diblock, linear structure) and Quintac3270 (manufactured by Nippon Zeon, 24% styrene). , Diblock amount 67%, linear structure), Kraton D1119 (Kraton, styrene amount 22%, diblock amount 66%, linear structure), Kraton D1126 (Kraton, styrene amount 21%, diblock amount 30%) , Radial structure), Kraton D1193 (Kraton, 24% styrene, 20% diblock, linear structure), etc., but are not limited to these, and such styrene isoprene block copolymers are , It can be used as needed within a range that does not impair the required performance, and two or more types may be used in combination.
また、求められる性能を損なわない範囲であれば、上記特定のスチレンイソプレンブロック共重合体（Ａ）以外のその他の合成ゴムを含んでも良い。その他の合成ゴムとしては、例えば、スチレン−ブタジエン−スチレンブロック共重合体（ＳＢＳ）、スチレン−ブタジエンゴム（ＳＢＲ）、ポリイソプレンゴム（ＩＲ）、ポリイソブチレン（ＰＩＢ）、またはブチルゴム（ＩＩＲ）などが挙げられる。 Further, synthetic rubber other than the above-mentioned specific styrene isoprene block copolymer (A) may be contained as long as the required performance is not impaired. Examples of other synthetic rubbers include styrene-butadiene-styrene block copolymer (SBS), styrene-butadiene rubber (SBR), polyisobutylene rubber (IR), polyisobutylene (PIB), and butyl rubber (IIR). Can be mentioned.
合成ゴムが、スチレンイソプレンブロック共重合体（Ａ）以外の合成ゴムを含有する場合には、合成ゴム１００重量％中、スチレンイソプレンブロック共重合体（Ａ）を５０〜１００重量％含有することが、粘着力と凝集力のバランスの点で好ましく、より好ましくは、８０〜１００重量％である。 When the synthetic rubber contains a synthetic rubber other than the styrene isoprene block copolymer (A), the styrene isoprene block copolymer (A) may be contained in an amount of 50 to 100% by weight in 100% by weight of the synthetic rubber. It is preferable from the viewpoint of the balance between the adhesive force and the cohesive force, and more preferably 80 to 100% by weight.
また、求められる性能を損なわない範囲であれば、天然ゴムを併用してもよい。天然ゴムとしては、特に限定されないが、素練ロールにて素練りし、ムーニー粘度をたとえば１０〜１００程度になるよう調整して用いることができればよい。
その他の合成ゴムや天然ゴムは、これらに限定されることなく、２種以上を組み合わせて使用しても良い。
In addition, natural rubber may be used in combination as long as the required performance is not impaired. The natural rubber is not particularly limited, but it may be used as long as it can be kneaded with a kneading roll and adjusted so that the Mooney viscosity is, for example, about 10 to 100.
Other synthetic rubbers and natural rubbers are not limited to these, and two or more kinds may be used in combination.
＜粘着付与樹脂＞
本発明において、粘着付与樹脂は、ポリテルペン樹脂（Ｂ１）と、芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかである粘着付与樹脂（Ｂ２）とを含む。これにより、合成ゴムに適度な密着性を付与する事が可能となり、粘着剤層とした場合に、粘着性能と凝集力のバランスが得やすく、高温環境下でもズレなどが生じることなく、従来よりも高圧力の研磨に使用できる粘着剤とすることができる。
<Adhesive-imparting resin>
In the present invention, the tackifier resin includes a polyterpene resin (B1) and a tackifier resin (B2) which is at least one of an aromatic-modified terpene resin and a xylene resin. This makes it possible to impart appropriate adhesion to the synthetic rubber, and when it is used as an adhesive layer, it is easy to obtain a balance between adhesive performance and cohesive force, and there is no deviation even in a high temperature environment, as compared to the past. Can also be an adhesive that can be used for high pressure polishing.
［ポリテルペン樹脂（Ｂ１）］
ポリテルペン樹脂（Ｂ１）を用いることで、密着性を向上させる効果が得られ、適度な粘着性と凝集性を付与することが可能となる。
[Polyterpen resin (B1)]
By using the polyterpene resin (B1), the effect of improving the adhesiveness can be obtained, and it becomes possible to impart appropriate adhesiveness and cohesiveness.
また、ポリテルペン樹脂（Ｂ１）の軟化点は、８０〜１７０℃であることが好ましい。軟化点がこの範囲であることにより、粘着付与樹脂を起因とした凝集力の低下を抑制し、研磨部材の再剥離性が向上する。上記の観点から軟化点が９５〜１５０℃がより好ましい。 The softening point of the polyterpene resin (B1) is preferably 80 to 170 ° C. When the softening point is within this range, the decrease in cohesive force caused by the tackifier resin is suppressed, and the re-peelability of the polished member is improved. From the above viewpoint, the softening point is more preferably 95 to 150 ° C.
本発明においてポリテルペン樹脂（Ｂ１）の含有量は、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、１０〜６０重量部である。上記範囲とすることで、粘着性能と凝集力のバランスが得やすい。上記の観点から、１５〜５５重量部がより好ましい。
特に、５５重量部以下である場合、保持力により優れたものとすることができる。
In the present invention, the content of the polyterpene resin (B1) is 10 to 60 parts by weight with respect to 100 parts by weight of the styrene isoprene block copolymer (A). Within the above range, it is easy to obtain a balance between adhesive performance and cohesive force. From the above viewpoint, 15 to 55 parts by weight is more preferable.
In particular, when it is 55 parts by weight or less, it can be made more excellent in holding power.
ポリテルペン樹脂（Ｂ１）としては、例えば、SｙlvaresTRA１２５（アリゾナケミカル社製ポリテルペン樹脂、軟化点２５℃）、SｙlvaresTRB１１５（アリゾナケミカル社製ポリテルペン樹脂、軟化点１１５℃）、SｙlvaresTRB１１１５T（アリゾナケミカル社製ポ
リテルペン樹脂、軟化点１１５℃）、SｙlvaresTR７１１５（アリゾナケミカル社製ポリ
テルペン樹脂、軟化点１１５℃）、SｙlvaresTRM１１１５（アリゾナケミカル社製ポリテルペン樹脂、軟化点１１５℃）、SｙlvaresTR７１２５（アリゾナケミカル社製ポリテル
ペン樹脂、軟化点１２５℃）、SｙlvaresTRB１２５（アリゾナケミカル社製ポリテルペン樹脂、軟化点１２５℃）、SｙlvaresTRB１１３５（アリゾナケミカル社製ポリテルペン樹脂、軟化点１３５℃）、SｙlvaresTR９０（アリゾナケミカル社製ポリテルペン樹脂、軟
化点９０℃）、SｙlvaresTR１０５（アリゾナケミカル社製ポリテルペン樹脂、軟化点１
０５℃）、YSレジンPX１２５０（ヤスハラケミカル社製ポリテルペン樹脂、軟化点１２５℃）、YSレジンPX１１５０（ヤスハラケミカル社製ポリテルペン樹脂、軟化点１１５℃）、YSレジンPX１０００（ヤスハラケミカル社製ポリテルペン樹脂、軟化点１００℃）、YSレジンPX８００（ヤスハラケミカル社製ポリテルペン樹脂、軟化点８０℃）などを例示することができる。ポリテルペン樹脂として、これらに限定するものではなく、このようなポリテルペン樹脂は、求められる性能を損なわない範囲で必要に応じて２種以上を組み合わせて使用しても良い。
Examples of the polyterpen resin (B1) include SylvaresTRA125 (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point 25 ° C.), SylvaresTRB115 (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point 115 ° C.), SylvaresTRB1115T (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point). SylvaresTR7115 (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point 115 ° C.), SylvaresTRM1115 (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point 115 ° C.), SylvaresTR7125 (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point 125 ° C.), CylvaresTRB125 (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point 125 ° C), CylvaresTRB1135 (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point 135 ° C.), CylvaresTR90 (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point 90 ° C.) Polyterpen resin, softening point 1
05 ° C), YS Resin PX1250 (Yasuhara Chemical Polyterpen Resin, Softening Point 125 ° C), YS Resin PX1150 (Yasuhara Chemical Polyterpen Resin, Softening Point 115 ° C), YS Resin PX1000 (Yasuhara Chemical Polyterpen Resin, Softening Point 100 ° C) ), YS resin PX800 (polyterpen resin manufactured by Yasuhara Chemical Co., Ltd., softening point 80 ° C.) and the like can be exemplified. The polyterpene resin is not limited to these, and such a polyterpene resin may be used in combination of two or more as necessary within a range that does not impair the required performance.
［粘着付与樹脂（Ｂ２）］
本発明の粘着付与樹脂は、ポリテルペン樹脂（Ｂ１）に加えて、さらに芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかである粘着付与樹脂（Ｂ２）を含有することで、適度なタック性と再剥離性を付与することが可能となる。
芳香族変性テルペン樹脂とは、テルペンと芳香族モノマーとを共重合した樹脂であり、芳香族単量体としては、スチレン、α−メチルスチレンなどが挙げられる。
[Adhesive-imparting resin (B2)]
The tackifier resin of the present invention contains, in addition to the polyterpene resin (B1), a tackifier resin (B2) which is at least one of an aromatic-modified terpene resin and a xylene resin, thereby providing appropriate tackiness and re-tackiness. It is possible to impart peelability.
The aromatic-modified terpene resin is a resin obtained by copolymerizing a terpene and an aromatic monomer, and examples of the aromatic monomer include styrene and α-methylstyrene.
粘着付与樹脂（Ｂ２）の含有量は、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、０．１〜１０重量部であることが好ましい。上記範囲とすることで、タック性と再剥離性をバランスよく得やすい。上記の観点から、０．３〜８重量部がより好ましい。
特に、８重量部以下である場合、保持力により優れたものとすることができる。
また、芳香族変性テルペン樹脂およびキシレン樹脂の両方を含んでも良く、この場合、芳香族変性テルペン樹脂およびキシレン樹脂の合計量が、０．１〜１０重量部の範囲内である。
The content of the tackifier resin (B2) is preferably 0.1 to 10 parts by weight with respect to 100 parts by weight of the styrene isoprene block copolymer (A). Within the above range, it is easy to obtain a good balance between tackiness and removability. From the above viewpoint, 0.3 to 8 parts by weight is more preferable.
In particular, when it is 8 parts by weight or less, it can be made more excellent in holding power.
Further, both the aromatic-modified terpene resin and the xylene resin may be contained, and in this case, the total amount of the aromatic-modified terpene resin and the xylene resin is in the range of 0.1 to 10 parts by weight.
また、芳香族変性テルペン樹脂の軟化点は、８０〜１６０℃であることが好ましい。
軟化点がこの範囲であることにより、粘着付与樹脂を起因とした凝集力の低下を抑制し、研磨部材の再剥離性が向上する。上記の観点から軟化点が９５〜１４０℃がより好ましい。
The softening point of the aromatic-modified terpene resin is preferably 80 to 160 ° C.
When the softening point is within this range, the decrease in cohesive force caused by the tackifier resin is suppressed, and the re-peelability of the polished member is improved. From the above viewpoint, the softening point is more preferably 95 to 140 ° C.
芳香族変性テルペン樹脂としては、例えば、SｙlvaresZT１０５LT（アリゾナケミカル
社製芳香族変性テルペン樹脂、軟化点１０５℃）、YSレジンTO１２５（ヤスハラケミカル社製芳香族変性テルペン樹脂、軟化点１２５℃）、YSレジンTO１１５（ヤスハラケミカル社製芳香族変性テルペン樹脂、軟化点１１５℃）、YSレジンTO１０５（ヤスハラケミカル社製芳香族変性テルペン樹脂、軟化点１０５℃）、YSレジンTO８５（ヤスハラケミカル社製芳香族変性テルペン樹脂、軟化点８５℃）、YSレジンLP（ヤスハラケミカル社製芳香族変性テルペン樹脂、鉱物油50％希釈品）が挙げられる。
Examples of the aromatic-modified terpene resin include Cylvares ZT105LT (Aromatic modified terpene resin manufactured by Arizona Chemical Co., Ltd., softening point 105 ° C.), YS resin TO125 (Aromatic modified terpene resin manufactured by Yasuhara Chemical Co., Ltd., softening point 125 ° C.), YS resin TO115. (Aromatic modified terpene resin manufactured by Yasuhara Chemical Co., Ltd., softening point 115 ° C), YS resin TO105 (Aromatic modified terpene resin manufactured by Yasuhara Chemical Co., Ltd., softening point 105 ° C.), YS resin TO85 (Aromatic modified terpene resin manufactured by Yasuhara Chemical Co., Ltd., softening point) 85 ° C.), YS resin LP (aromatically modified terpene resin manufactured by Yasuhara Chemical Co., Ltd., 50% diluted mineral oil).
キシレン樹脂としては、例えば、ニカノールL（フドー社製キシレン樹脂）、ニカノー
ルLL（フドー社製キシレン樹脂）、ニカノールLLL（フドー社製キシレン樹脂）、ニカノ
ールY-５０（フドー社製キシレン樹脂）、ニカノールY-１００（フドー社製キシレン樹脂）、ニカノールY-１０００（フドー社製キシレン樹脂）、ニカノールH（フドー社製キシレン樹脂）、ニカノールG（フドー社製キシレン樹脂）、などを例示することができる。
Examples of the xylene resin include nicanol L (xylene resin manufactured by Fudo), nicanol LL (xylene resin manufactured by Fudo), nicanol LLL (xylene resin manufactured by Fudo), nicanol Y-50 (xylene resin manufactured by Fudo), and nicanol. Examples thereof include Y-100 (xylene resin manufactured by Fudo Co., Ltd.), Nicanol Y-1000 (xylene resin manufactured by Fudo Co., Ltd.), Nicanol H (xylene resin manufactured by Fudo Co., Ltd.), Nicanol G (xylene resin manufactured by Fudo Co., Ltd.), and the like. ..
芳香族変性テルペン樹脂およびキシレン樹脂は、これらに限定されるものではなく、このような粘着付与樹脂（Ｂ２）は、求められる性能を損なわない範囲で必要に応じて２種以上を組み合わせて使用しても良い。 The aromatic-modified terpene resin and xylene resin are not limited to these, and such a tackifier resin (B2) may be used in combination of two or more as necessary within a range that does not impair the required performance. You may.
［その他の粘着付与樹脂］
本発明において、その他の粘着付与樹脂も、求められる性能を損なわない範囲で必要に応じて、使用することができる。その他の粘着付与樹脂として、例えば、ロジンエステル、重合ロジン、水添ロジン、不均化ロジン、マレイン酸変性ロジン、フマル酸変性ロジン、ロジンフェノール樹脂などのロジン系樹脂；、α−ピネン樹脂、β−ピネン樹脂、ジペンテン樹脂、水添テルペン樹脂、テルペンフェノール樹脂、酸変性テルペン樹脂、スチレン化テルペン樹脂などのテルペン系樹脂、アルキルフェノール樹脂、クマロン系樹脂、スチレン系樹脂、石油系樹脂またはその共重合体などが挙げられるが、これらに限定するものではなく、これら、その他の粘着付与樹脂は、２種以上を組み合わせて使用しても良い。
[Other adhesive-imparting resins]
In the present invention, other tackifier resins can also be used, if necessary, as long as the required performance is not impaired. Other tackifier resins include, for example, rosin-based resins such as rosin esters, polymerized rosins, hydrogenated rosins, disproportionate rosins, maleic acid-modified rosins, fumaric acid-modified rosins, and rosinphenol resins; -Pinen resin, dipentene resin, hydrogenated terpene resin, terpene phenol resin, acid-modified terpene resin, terpene resin such as styrenated terpene resin, alkylphenol resin, kumaron resin, styrene resin, petroleum resin or copolymer thereof However, the present invention is not limited to these, and two or more kinds of these and other tackifier resins may be used in combination.
＜鉱物油＞
本発明の粘着剤は、必要に応じて鉱物油を含むことができる。鉱物油を用いることで、適度なタック性と再剥離性を付与することが可能となる。
鉱物油としては、例えば、パラフィン系、ナフテン系、芳香族系の鉱物油が挙げられ、また、これらの混合物を使用することができる。一般市販品としては、ダイアナプロセスＰＷ−３８０（出光興産社製、ナフテン系）、ダイアナプロセスＮＭ２８０（出光興産社製、パラフィン系）などが挙げられる。
<Mineral oil>
The pressure-sensitive adhesive of the present invention may contain mineral oil, if necessary. By using mineral oil, it is possible to impart appropriate tackiness and removability.
Examples of the mineral oil include paraffin-based, naphthenic-based, and aromatic-based mineral oils, and mixtures thereof can be used. Examples of general commercial products include Diana Process PW-380 (manufactured by Idemitsu Kosan Co., Ltd., naphthenic type), Diana Process NM280 (manufactured by Idemitsu Kosan Co., Ltd., paraffin type) and the like.
鉱物油の含有量は、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、０．１〜１０重量部であることが好ましい。上記範囲とすることで、タック性と再剥離性をバランスよく得やすい。上記の観点から、０．３〜８重量部がより好ましい。 The content of the mineral oil is preferably 0.1 to 10 parts by weight with respect to 100 parts by weight of the styrene isoprene block copolymer (A). Within the above range, it is easy to obtain a good balance between tackiness and removability. From the above viewpoint, 0.3 to 8 parts by weight is more preferable.
＜硬化剤＞
更に、本発明において、必要に応じて、硬化剤を使用することができる。研磨機定盤から剥離する際の剥離力は、高い粘着力から低い粘着力まで、求められる数値が様々であるため、粘着力をコントロールすること目的で硬化剤を添加することが可能である。硬化剤としては、求めうる性能を損なわない範囲で、必要に応じて、イソシアネート化合物、アジリジン化合物、金属キレート化合物、およびエポキシ化合物等を使用できる。
<Hardener>
Further, in the present invention, a curing agent can be used if necessary. Since the peeling force required for peeling from the polishing machine surface plate varies from high adhesive force to low adhesive force, it is possible to add a curing agent for the purpose of controlling the adhesive force. As the curing agent, an isocyanate compound, an aziridine compound, a metal chelate compound, an epoxy compound and the like can be used, if necessary, as long as the required performance is not impaired.
イソシアネート化合物としては、例えばトリレンジイソシアネート、ヘキサメチレンジイソシアネート、イソホロンジイソシアネート、キシリレンジイソシアネート、水添キシリレンジイソシアネート、ジフェニルメタンジイソシアネート、水添ジフェニルメタンジイソシアネート、テトラメチルキシリレンジイソシアネート、ナフタレンジイソシアネート、トリフェニルメタントリイソシアネート、ポリメチレンポリフェニルイソシアネートなどのポリイソシアネート化合物、及びこれらイソシアネート化合物とトリメチロールプロパン等のポリオール化合物とのアダクト体やビュレット体、またイソシアヌレート体、更にはこれらイソシアネート化合物と公知のポリエーテルポリオールやポリエステルポリオール、アクリルポリオール、ポリブタジエンポリオール、ポリイソプレンポリオール等とのアダクト体等が挙げられるが、イソシアネート化合物として好ましくは、トリレンジイソシアネートトリメチロールプロパンのアダクト体である。 Examples of the isocyanate compound include tolylene diisocyanate, hexamethylene diisocyanate, isophorone diisocyanate, xylylene diisocyanate, hydrogenated xylylene diisocyanate, diphenylmethane diisocyanate, hydrogenated diphenylmethane diisocyanate, tetramethylxylylene diisocyanate, naphthalene diisocyanate, and triphenylmethane triisocyanate. Polyisocyanate compounds such as polymethylene polyphenyl isocyanate, adducts and bullets of these isocyanate compounds and polyol compounds such as trimethylolpropane, isocyanurates, and these isocyanate compounds and known polyether polyols and polyester polyols. , Acrylic polyol, polybutadiene polyol, polyisoprene polyol and the like, and the isocyanate compound is preferably an adduct body of tolylene diisocyanate trimethylolpropane.
アジリジン化合物としては、例えば、Ｎ，Ｎ’−ヘキサメチレン−１，６−ビス（１−アジリジンカルボキシアミド、トリメチロールプロパン−トリ−β−アジリジニルプロピオネート、Ｎ，Ｎ’−ジフェニルメタン４，４’−ビス（１−アジリジンカルボキシアミド）、トリメチロールプロパン−トリ−β−（２−メチルアジリジン）プロピオネート等が挙げられる。 Examples of the aziridine compound include N, N'-hexamethylene-1,6-bis (1-aziridinecarboxyamide, trimethylolpropane-tri-β-aziridinyl propionate, N, N'-diphenylmethane 4, Examples thereof include 4'-bis (1-aziridine carboxylamide) and trimethylolpropane-tri-β- (2-methylaziridine) propionate.
金属キレート化合物としては、例えば、金属錯体化合物を使用できる。金属は、ニッケル、アルミニウム、クロム、鉄、チタン、亜鉛、コバルト、マンガン、銅、スズ、ジルコニウム等が挙げられる。金属キレート化合物は、例えば第二鉄トリスアセチルアセトネート、アルミニウムトリスアセチルアセトネート、アルミニウムモノアセチルアセトネートビス（エチルアセトアセテート）、アルミニウムトリス（エチルアセトアセテート）等が挙げられるが、これらの中でのアルミニウムトリスアセチルアセトネートがより好ましい。 As the metal chelate compound, for example, a metal complex compound can be used. Examples of the metal include nickel, aluminum, chromium, iron, titanium, zinc, cobalt, manganese, copper, tin and zirconium. Examples of the metal chelate compound include ferric trisacetylacetonate, aluminumtrisacetylacetonate, aluminum monoacetylacetonate bis (ethylacetate acetate), aluminum tris (ethylacetacetate), and the like. Aluminum trisacetylacetonate is more preferred.
エポキシ化合物としては、例えば、ビスフェノールＡ、エピクロルヒドリン型のエポキシ系樹脂、エチレングリシジルエーテル、ポリエチレングリコールジグリシジルエーテル、グリセリンジグリシジルエーテル、グリセリントリグリシジルエーテル、１，６−ヘキサンジオールグリシジルエーテル、トリメチロールプロパントリグリシジルエーテル、ジグリシジルアニリン、ジアミングリシジルアミン、Ｎ，Ｎ，Ｎ’，Ｎ’−テトラグリシジル−ｍ−キシリレンジアミンおよび１，３−ビス（Ｎ，Ｎ’−ジアミングリシジルアミノメチル）シクロヘキサン等が挙げられる。 Examples of the epoxy compound include bisphenol A, epichlorohydrin type epoxy resin, ethylene glycidyl ether, polyethylene glycol diglycidyl ether, glycerin diglycidyl ether, glycerin triglycidyl ether, 1,6-hexanediol glycidyl ether, and trimethylol propantri. Examples include glycidyl ether, diglycidyl aniline, diamine glycidyl amine, N, N, N', N'-tetraglycidyl-m-xylylenediamine and 1,3-bis (N, N'-diamine glycidyl aminomethyl) cyclohexane. Be done.
これら硬化剤は、単独で用いても、２種類以上を組み合わせ用いてもよい。 These curing agents may be used alone or in combination of two or more.
＜老化防止剤＞
更に、本発明において、必要に応じて老化防止剤を使用することができる。老化防止剤は、ゴム成分の劣化等を防止する目的で使用され、このような老化防止剤としては、例えば、ノンフレックスＷＳ（精工化学社製、老化防止剤）、ノンフレックスＷＳ−Ｐ（精工化学社製、老化防止剤）、ノンフレックスＭＢＰ（精工化学社製、老化防止剤）、ノンフレックスＣＢＰ（精工化学社製、老化防止剤）、ノンフレックスＥＢＰ（精工化学社製、老化防止剤）、ノンフレックスＴＮＰ（精工化学社製、老化防止剤）、ノンフレックスＭＢ（精工化学社製、老化防止剤）、ノンフレックスＲＤ（精工化学社製、老化防止剤）、ノンフレックスＯＳ（精工化学社製、老化防止剤）、ノンフレックスＤＣＤ（精工化学社製、老化防止剤）などを例示することができるが、老化防止剤であれば、これらに限定するものではなく、このような老化防止剤は、求められる性能を損なわない範囲で必要に応じて使用することができ、２種以上を組み合わせて使用しても良い。
<Anti-aging agent>
Further, in the present invention, an anti-aging agent can be used if necessary. Anti-aging agents are used for the purpose of preventing deterioration of rubber components, and examples of such anti-aging agents include non-flex WS (manufactured by Seiko Kagaku Co., Ltd., anti-aging agent) and non-flex WS-P (Seiko). Chemical company, anti-aging agent), non-flex MBP (Seiko Chemical company, anti-aging agent), non-flex CBP (Seiko Chemical company, anti-aging agent), non-flex EBP (Seiko Chemical company, anti-aging agent) , Non-flex TNP (Seiko Kagaku Co., Ltd., anti-aging agent), Non-flex MB (Seiko Kagaku Co., Ltd., anti-aging agent), Non-flex RD (Seiko Kagaku Co., Ltd., anti-aging agent), Non-flex OS (Seiko Kagaku Co., Ltd., anti-aging agent) , Non-flex DCD (manufactured by Seiko Kagaku Co., Ltd., anti-aging agent), etc., but the anti-aging agent is not limited to these, and such anti-aging agent. Can be used as needed within a range that does not impair the required performance, and two or more types may be used in combination.
尚、本発明において、老化防止剤とは、酸化等による劣化を防止する目的や、熱による劣化等を防止する目的で使用されるもので、酸化防止剤、酸化劣化防止剤、熱劣化防止剤は同義語である。 In the present invention, the anti-aging agent is used for the purpose of preventing deterioration due to oxidation or the like and for the purpose of preventing deterioration due to heat or the like, and is used as an antioxidant, an antioxidant or a thermal deterioration inhibitor. Is a synonym.
＜その他添加剤＞
本発明の粘着剤には、必要に応じて公知の粘着剤に配合される充填剤、顔料、染料、希釈剤、重合禁止剤、紫外線吸収剤、紫外線安定剤、カップリング剤等、各種添加剤を含んでもよく、また、２種類以上を用いてもよい。また、添加剤の添加量は、必要な物性が得られる量とすればよく、特に限定されるものではない。
<Other additives>
The pressure-sensitive adhesive of the present invention includes various additives such as fillers, pigments, dyes, diluents, polymerization inhibitors, UV absorbers, UV stabilizers, coupling agents, etc., which are blended with known pressure-sensitive adhesives as needed. May be included, or two or more types may be used. Further, the amount of the additive added may be an amount that can obtain the required physical properties, and is not particularly limited.
《研磨部材固定用粘着シート》
本発明の研磨部材固定用粘着シートは、基材の片面または両面に、本発明の研磨部材固定用粘着剤から形成されてなる粘着剤層を備えた、粘着シートである。
粘着剤層の厚みは、１０〜１５０μｍが好ましく、１５〜１００μｍがより好ましい。粘着剤層を上記範囲にすることで、研磨部材の再剥離に優れた粘着テープを得ることが出来る。
<< Adhesive sheet for fixing polishing members >>
The pressure-sensitive adhesive sheet for fixing a polishing member of the present invention is a pressure-sensitive adhesive sheet provided with a pressure-sensitive adhesive layer formed of the pressure-sensitive adhesive for fixing a polishing member of the present invention on one side or both sides of a base material.
The thickness of the pressure-sensitive adhesive layer is preferably 10 to 150 μm, more preferably 15 to 100 μm. By setting the pressure-sensitive adhesive layer in the above range, it is possible to obtain an pressure-sensitive adhesive tape that is excellent in re-peeling of the polishing member.
粘着剤の塗工は、例えばロールコーター法、コンマコーター法、リップコーター法、ダイコーター法、リバースコーター法、シルクスクリーン法、グラビアコーター法等の公知の方法が使用できる。塗工後は、熱風オーブン、赤外線ヒーター等で乾燥することができる。 As the coating of the adhesive, known methods such as a roll coater method, a comma coater method, a lip coater method, a die coater method, a reverse coater method, a silk screen method, and a gravure coater method can be used. After coating, it can be dried in a hot air oven, an infrared heater, or the like.
基材としては、不織布、紙、プラスチックフィルム、合成紙等粘着剤の基材として使用できる部材が使用できる。粘着シートの基材（芯材）として使用する場合は、不織布およびプラスチックフィルムが好ましい。前記プラスチックフィルムは、例えばポリエチレンおよびポロプロピレン等のポリオレフィン、ポリエチレンテレフタレート等のポリエステル、ＰＰＳ（ポリフェニレンサルファイド）、ナイロン、トリアセチルセルロース、シクロオレフィン、ポリイミドおよびポリアミド等をフィルムにしたものが挙げられる。また基材は、前記プラスチックフィルムに所望塗工液を塗工した、反射防止（ＡＲ）フィルム、偏光板、位相差板など光学部材であっても良い。また、基材は、粘着剤層との密着性を高めるため易接着処理を施しても良い。前記易接着処理は、コロナ放電を行う乾式法およびアンカーコート剤と塗工する湿式法等の公知の方法を使用できる。また、基材は、帯電防止層を形成することができる。帯電防止剤は上段で説明した帯電防止剤の他に、導電性カーボン粒子、導電性金属粒子および導電性ポリマー等の少なくともいずれかを必要に応じて樹脂と配合した組成物が好ましい、または基材に金属蒸着または金属メッキを施すことで帯電防止層を形成できる。本発明で基材の厚さは特に制限されないが、５〜３００μｍが好ましい。前記基材の中で、易接着処理等の施されていないフィルムを用いることがより好ましい。ゴム系粘着剤の場合、コロナ放電を行う易接着処理が施されていると、基材から粘着剤が剥がれやすくなるため、コロナ放電を行う易接着処理の施されていない面にゴム系粘着剤を塗布することが好ましい。 As the base material, a member that can be used as a base material for an adhesive such as non-woven fabric, paper, plastic film, and synthetic paper can be used. When used as a base material (core material) for an adhesive sheet, a non-woven fabric and a plastic film are preferable. Examples of the plastic film include films made of polyolefins such as polyethylene and polypropylene, polyesters such as polyethylene terephthalate, PPS (polyphenylene sulfide), nylon, triacetyl cellulose, cycloolefin, polyimide and polyamide. Further, the base material may be an optical member such as an antireflection (AR) film, a polarizing plate, or a retardation plate obtained by applying a desired coating liquid to the plastic film. Further, the base material may be subjected to an easy adhesive treatment in order to improve the adhesion with the pressure-sensitive adhesive layer. For the easy-adhesion treatment, known methods such as a dry method of performing corona discharge and a wet method of coating with an anchor coating agent can be used. In addition, the base material can form an antistatic layer. As the antistatic agent, in addition to the antistatic agent described above, a composition in which at least one of conductive carbon particles, conductive metal particles, conductive polymer and the like is blended with a resin as necessary is preferable, or a base material is used. An antistatic layer can be formed by subjecting the material to metal vapor deposition or metal plating. In the present invention, the thickness of the base material is not particularly limited, but is preferably 5 to 300 μm. Among the base materials, it is more preferable to use a film that has not been subjected to an easy adhesion treatment or the like. In the case of rubber-based adhesives, if the easy-adhesive treatment that performs corona discharge is applied, the adhesive will easily peel off from the base material. Is preferably applied.
粘着シートを作製する際の剥離ライナーには、紙、プラスチックフィルム、合成紙等の基材に、剥離剤を塗工して形成した剥離層を有する。剥離剤は、例えばシリコーン、アルキド樹脂、メラミン樹脂、フッ素樹脂、アクリル樹脂等が挙げられる。なお、剥離ライナーの厚さは特に制限はないが１０〜２００μｍ程度である。 The release liner for producing the pressure-sensitive adhesive sheet has a release layer formed by applying a release agent to a base material such as paper, plastic film, or synthetic paper. Examples of the release agent include silicone, alkyd resin, melamine resin, fluororesin, acrylic resin and the like. The thickness of the release liner is not particularly limited, but is about 10 to 200 μm.
以下に、本発明を実施例によってより具体的に説明するが、本発明は以下の実施例に限定されるものではない。なお例中、「部」は「重量部」を、「％」は「重量％」を意味するものとする。 Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited to the following Examples. In the example, "part" means "part by weight" and "%" means "% by weight".
また、粘着付与樹脂の軟化点の測定方法は以下の通りである。
粘着付与樹脂の軟化点： ＪＩＳＫ５９０２およびＪＩＳＫ２２０７に準じて測定した。
The method for measuring the softening point of the tackifier resin is as follows.
Softening point of tackifier resin: Measured according to JISK5902 and JISK2207.
［実施例１］
（研磨部材固定用粘着剤１）
攪拌機、温度計、還流冷却器、滴下装置、窒素導入管を備えた４口フラスコに、窒素雰囲気下で、合成ゴムとしてＤ１１９３（クレイトン社製）を１００重量部、溶剤としてメチルエチルケトン、トルエンを適量仕込んだ。次いでフラスコを徐々に加熱し、内温約５０℃で３時間加熱を継続した。加熱終了後、冷却し、内温約４０℃以下で、粘着付与樹脂として、SｙlvaresTRB１１５（アリゾナケミカル社製）を２０重量部と、YSレジンLP（ヤスハラケミカル社製）、を５重量部、老化防止剤としてノンフレックスＥＢＰ（精工化学社製）を２重量部仕込み、メチルエチルケトン、トルエンで希釈し、粘着付与樹脂が溶解するまで攪拌を継続し、不揮発分５０．０重量％、粘度２０００ｍＰａ・ｓの研磨部材固定用粘着剤（粘着剤１）溶液を得た。
[Example 1]
(Adhesive for fixing polishing members 1)
In a 4-neck flask equipped with a stirrer, a thermometer, a reflux condenser, a dropping device, and a nitrogen introduction tube, 100 parts by weight of D1193 (manufactured by Clayton) as a synthetic rubber and an appropriate amount of methyl ethyl ketone and toluene as a solvent are charged in a nitrogen atmosphere. is. Then, the flask was gradually heated, and heating was continued for 3 hours at an internal temperature of about 50 ° C. After heating is completed, the mixture is cooled, and at an internal temperature of about 40 ° C. or lower, 20 parts by weight of CylvaresTRB115 (manufactured by Arizona Chemical Co., Ltd.) and 5 parts by weight of YS resin LP (manufactured by Yasuhara Chemical Co., Ltd.) are used as an anti-aging agent. As a non-flex EBP (manufactured by Seiko Kagaku Co., Ltd.), 2 parts by weight was charged, diluted with methyl ethyl ketone and toluene, and stirring was continued until the tackifier resin was dissolved. A fixing adhesive (adhesive 1) solution was obtained.
［実施例２〜２０、比較例１〜９］
（研磨部材固定用粘着剤２〜２９）
粘着性樹脂、硬化剤、粘着付与樹脂の種類、および配合量（不揮発分重量部）を表２、３に記載したように変更する以外は、研磨部材固定用粘着剤１と同様にして、研磨部材固定用粘着剤２〜２９を得た。
[Examples 2 to 20, Comparative Examples 1 to 9]
(Adhesive for fixing polishing members 2-29)
Polishing in the same manner as the polishing member fixing adhesive 1 except that the types of the adhesive resin, the curing agent, and the tackifying resin, and the blending amount (nonvolatile content weight part) are changed as shown in Tables 2 and 3. Adhesives 2-29 for fixing members were obtained.
表２、３中の略号は下記の通りである。また、配合量は、合成ゴムの固形分に対する不揮発分換算の添加量（重量部）である。
＜合成ゴム：スチレンイソプレンブロック共重合体（重量％）＞
・Ｋraton Ｄ１１９３
（クレイトン社製、スチレン量２４重量％、ジブロック量２０％重量、リニア構造）
・Ｑuintac３２８０
（日本ゼオン社製、スチレン量２５重量％、ジブロック量１７重量％、リニア構造）
・Ｋraton Ｄ１１２６
（クレイトン社製、スチレン量２１重量％、ジブロック量３０重量％、ラジアル構造）
・ＱuintacＳＬ-１６５
（日本ゼオン社製、スチレン量３０重量％、ジブロック量６０重量％、リニア構造）
・Ｋraton Ｄ１１１９
（クレイトン社製、スチレン量２２重量％、ジブロック量６６重量％、リニア構造）
・Quintac３２７０
（日本ゼオン社製、スチレン量２４重量%、ジブロック量６７重量%、リニア構造）
・Ｑuintac３６２０
（日本ゼオン社製、スチレン量１４重量％、ジブロック量１２重量％、リニア構造）
・Ｋraton Ｄ１１６１
（クレイトン社製、スチレン量１５重量％、ジブロック量１９重量％、リニア構造）
・Ｋraton ＤＸ４０６
（クレイトン社製、スチレン量１６重量％、ジブロック量５２重量％、リニア構造）
・Ｑuintac３５２０
（日本ゼオン社製、スチレン量１５重量％、ジブロック量７８重量％、リニア構造）
・Ｑuintac３４５０
（日本ゼオン社製、スチレン量１９重量％、ジブロック量３０重量％、ラジアル構造）
The abbreviations in Tables 2 and 3 are as follows. The blending amount is the amount (parts by weight) of the synthetic rubber added in terms of non-volatile content with respect to the solid content.
<Synthetic rubber: Styrene isoprene block copolymer (% by weight)>
・ Kraton D1193
(Clayton, 24% by weight styrene, 20% weight diblock, linear structure)
・ Quintac3280
(Manufactured by Zeon Corporation, 25% by weight of styrene, 17% by weight of diblock, linear structure)
・ Kraton D1126
(Made by Clayton, 21% by weight styrene, 30% by weight diblock, radial structure)
・ Quintac SL-165
(Manufactured by Zeon Corporation, styrene amount 30% by weight, diblock amount 60% by weight, linear structure)
・ Kraton D1119
(Clayton, 22% by weight styrene, 66% by weight diblock, linear structure)
・ Quintac3270
(Manufactured by Zeon Corporation, styrene amount 24% by weight, diblock amount 67% by weight, linear structure)
・ Quintac3620
(Manufactured by Zeon Corporation, styrene amount 14% by weight, diblock amount 12% by weight, linear structure)
・ Kraton D1161
(Clayton, 15% by weight styrene, 19% by weight diblock, linear structure)
・ Kraton DX406
(Clayton, 16% by weight styrene, 52% by weight diblock, linear structure)
・ Quintac3520
(Manufactured by Zeon Corporation, styrene amount 15% by weight, diblock amount 78% by weight, linear structure)
・ Quintac3450
(Manufactured by Zeon Corporation, 19% by weight of styrene, 30% by weight of diblock, radial structure)
＜粘着付与樹脂＞
［ポリテルペン樹脂（Ｂ１）］
・SｙlvaresTRB１１５（アリゾナケミカル社製ポリテルペン樹脂、軟化点１１５℃）
・SｙlvaresTRB１２５（アリゾナケミカル社製ポリテルペン樹脂、軟化点１２５℃）
・YSレジンPX１１５０（ヤスハラケミカル社製、ポリテルペン樹脂、軟化点１１５℃）
・YSレジンPX１２５０（ヤスハラケミカル社製、ポリテルペン樹脂、軟化点１２５℃）［粘着付与樹脂（Ｂ２）］
・YSレジンTO１２５（ヤスハラケミカル社製、芳香族変性テルペン樹脂、軟化点１２５℃）
・YSレジンLP（荒川化学社製、テルペン系液状粘着付与樹脂）
・ニカノールL（フドー社製、キシレン系液状粘着付与樹脂）
・ニカノールLLL（フドー社製、キシレン系液状粘着付与樹脂）
＜鉱物油＞
・ダイアナプロセスPW３８０（出光興産社製、鉱物油）
＜添加剤＞
・ノンフレックスＥＢＰ（精工化学社製、老化防止剤）
<Adhesive-imparting resin>
[Polyterpen resin (B1)]
-Sylvares TRB115 (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point 115 ° C)
-Sylvares TRB125 (Polyterpen resin manufactured by Arizona Chemical Co., Ltd., softening point 125 ° C)
・ YS resin PX1150 (manufactured by Yasuhara Chemical Co., Ltd., polyterpene resin, softening point 115 ° C)
-YS resin PX1250 (manufactured by Yasuhara Chemical Co., Ltd., polyterpene resin, softening point 125 ° C) [adhesive-imparting resin (B2)]
・ YS resin TO125 (manufactured by Yasuhara Chemical Co., Ltd., aromatic-modified terpene resin, softening point 125 ° C)
・ YS resin LP (manufactured by Arakawa Chemical Co., Ltd., terpene-based liquid adhesive-imparting resin)
・ Nikanol L (manufactured by Fudo Co., Ltd., xylene-based liquid adhesive-imparting resin)
・ Nicanol LLL (manufactured by Fudo Co., Ltd., xylene-based liquid adhesive-imparting resin)
<Mineral oil>
・ Diana Process PW380 (Mineral oil manufactured by Idemitsu Kosan Co., Ltd.)
<Additives>
・ Non-flex EBP (manufactured by Seiko Kagaku Co., Ltd., anti-aging agent)
ポリテルペン樹脂（Ｂ１）／共重合体（Ａ）100重量部
＝スチレンイソプレンブロック共重合体（Ａ）１００重量部に対するポリテルペン樹脂（Ｂ１）の含有量（重量部）
粘着付与樹脂（Ｂ２）／共重合体（Ａ）100重量部
＝スチレンイソプレンブロック共重合体（Ａ）１００重量部に対する粘着付与樹脂（Ｂ２）の含有量（重量部）
100 parts by weight of polyterpene resin (B1) / copolymer (A) = content (parts by weight) of polyterpene resin (B1) with respect to 100 parts by weight of styrene isoprene block copolymer (A)
100 parts by weight of tackifier resin (B2) / copolymer (A) = content (parts by weight) of tackifier resin (B2) with respect to 100 parts by weight of styrene isoprene block copolymer (A)
＜粘着シートの評価＞
得られた研磨部材固定用粘着剤を用いて粘着シートを形成し、下記方法で評価した。表４〜８に評価結果を示す。
（粘着シートの作製）
表４〜７記載の通りに、得られた研磨部材固定用粘着剤を用い、乾燥後の厚みが４０μｍになるよう２５μｍの剥離ライナーに塗工（研磨部材側粘着剤層）し、１００℃で２分間乾燥した後、ＰＥＴフィルム基材を貼り合わせ、次いで得られた研磨部材固定用粘着剤を、乾燥後の厚さが２０μｍになるよう剥離ライナーに塗工（定盤側粘着剤層）し、１００℃で２分間乾燥した後、ＰＥＴフィルム基材の粘着剤が塗布されていない面に貼り合わせ、２３℃-５０％で１週間放置し、粘着シートを得た。
なお、実施例１−Ａは、定盤側に粘着剤１を、研磨部材側にトーヨーケム社製ＢＰＳ３１５６Ｄ（アクリル系粘着剤）１００重量部に、トーヨーケム社製ＢＨＳ８５１５（イソシアネート硬化剤）を４．０重量部配合し攪拌した粘着剤３０を用いて得られた粘着シートである。
<Evaluation of adhesive sheet>
A pressure-sensitive adhesive sheet was formed using the obtained pressure-sensitive adhesive for fixing the polishing member, and evaluated by the following method. The evaluation results are shown in Tables 4 to 8.
(Making an adhesive sheet)
As shown in Tables 4 to 7, the obtained adhesive for fixing the polishing member was used and applied to a 25 μm release liner (adhesive layer on the polishing member side) so that the thickness after drying became 40 μm, and at 100 ° C. After drying for 2 minutes, the PET film base material is bonded, and then the obtained adhesive for fixing the polishing member is applied to the release liner so that the thickness after drying becomes 20 μm (adhesive layer on the platen side). After drying at 100 ° C. for 2 minutes, the PET film substrate was attached to a surface not coated with an adhesive and left at 23 ° C. to 50% for 1 week to obtain an adhesive sheet.
In Example 1-A, the pressure-sensitive adhesive 1 was applied to the surface plate side, and Toyochem's BHS8515 (isocyanate curing agent) was applied to 100 parts by weight of Toyochem's BPS3156D (acrylic adhesive) on the polishing member side. It is a pressure-sensitive adhesive sheet obtained by using the pressure-sensitive adhesive 30 which was mixed and stirred by weight.
（粘着力）
得られた粘着シートの測定しない面の剥離ライナーを剥がし、２５μｍのＰＥＴフィルムを貼り合せた後、幅２５ｍｍ・長さ１００ｍｍの大きさに準備し試料とした。次いで２３℃−５０％ＲＨ雰囲気下にて、得られた試料から、２５μｍのＰＥＴフィルムを貼り合せた面と逆の剥離ライナーを剥がし、露出した粘着剤層をステンレス板（対ＳＵＳ粘着力）またはポリプロピレン板（対ＰＰ粘着力）に２ｋｇのローラーで1往復圧着し、２０分
または２４時間放置後、引張試験機を使用して剥離角度１８０度、剥離速度０．３ｍ／ｍｉｎの条件で粘着力を測定した。同様の方法にて両面の粘着力を測定した。
(Adhesive force)
The release liner on the non-measured surface of the obtained adhesive sheet was peeled off, a 25 μm PET film was attached, and then a sample having a width of 25 mm and a length of 100 mm was prepared. Next, under a 23 ° C.-50% RH atmosphere, the peeling liner opposite to the surface to which the 25 μm PET film was bonded was peeled off from the obtained sample, and the exposed adhesive layer was removed from a stainless steel plate (with respect to SUS adhesive strength) or. Adhesive strength is applied to a polypropylene plate (adhesive strength against PP) once with a 2 kg roller, left for 20 minutes or 24 hours, and then using a tensile tester under the conditions of a peeling angle of 180 degrees and a peeling speed of 0.3 m / min. Was measured. The adhesive strength on both sides was measured by the same method.
（保持力）
得られた粘着シートの測定しない面の剥離ライナーを剥がし、２５μｍのＰＥＴフィルムを貼り合せた後、幅２５ｍｍ・長さ１００ｍｍの大きさに準備し試料とした。次いで２３℃−５０％ＲＨ雰囲気下にて、得られた試料から２５μｍのＰＥＴフィルムを貼り合せた面と逆の剥離ライナーを長さ２５ｍｍ×幅２５ｍｍ剥がしステンレス板に２ｋｇロールで１往復圧着し、２３℃−５０％ＲＨの雰囲気下で２０分間放置した。その後、８０℃の雰囲気下で１kgの重りを付け１８０度の方向に力が加わるようセットし、２４時間後に粘着シートが被着体から何ミリずれているか、もしくは完全にずれ落ちた落下秒数を測定した。同様の方法にて両面の保持力を測定した。
なお、保持力の結果は、定盤側は１．０ｍｍ未満であれば特に優れているといえ、研磨部材側は１．２ｍｍ未満であれば特に優れているといえる。
(Holding power)
The release liner on the non-measured surface of the obtained adhesive sheet was peeled off, a 25 μm PET film was attached, and then a sample having a width of 25 mm and a length of 100 mm was prepared. Next, under a 23 ° C.-50% RH atmosphere, a peeling liner opposite to the surface to which the 25 μm PET film was bonded was peeled off from the obtained sample by 25 mm in length and 25 mm in width, and pressure-bonded to a stainless steel plate once with a 2 kg roll. It was left for 20 minutes in an atmosphere of 23 ° C.-50% RH. After that, a weight of 1 kg was attached in an atmosphere of 80 ° C, and the force was set so that a force was applied in the direction of 180 degrees. Was measured. The holding force on both sides was measured by the same method.
It can be said that the result of the holding force is particularly excellent if the surface plate side is less than 1.0 mm, and the polishing member side is particularly excellent if it is less than 1.2 mm.
（耐酸性）
得られた粘着シートの測定しない面の剥離ライナーを剥がし、２５μｍのＰＥＴフィルムを貼り合せた後、幅２５ｍｍ・長さ１００ｍｍの大きさに準備し試料とした。次いで２３℃−５０％ＲＨの雰囲気下で長さ１０ｍｍ×幅２５ｍｍの粘着シートの剥離ライナーを剥がし、ステンレス板へ貼着し、２３℃−５０％ＲＨの雰囲気下で２４時間放置した。その後、硫酸を用いてｐＨ１．５に調整した水溶液中に浸し、４０℃の環境下で、さらに２４時間放置した。その後、水溶液より試料を取り出し、水洗浄後、２３℃−５０％ＲＨの雰囲気下にて１時間放置した。その後、２３℃−５０％ＲＨの雰囲気下でＪＩＳＺ１５２８の測定方法に準拠して、引張り試験を用いて剥離速度３００ｍｍ／ｍｉｎで硫酸浸漬後の粘着力を測定した。（粘着力）の評価において測定した、ステンレス板に対する１８０度粘着力２４時間後の値との差が小さいほど耐酸性に優れるといえる。
粘着力差＝（ｐＨ１．５水溶液浸漬後の粘着力）−（ステンレス板に対する１８０度２４時間後の粘着力）
(Acid resistance)
The release liner on the non-measured surface of the obtained adhesive sheet was peeled off, a 25 μm PET film was attached, and then a sample having a width of 25 mm and a length of 100 mm was prepared. Next, the release liner of the adhesive sheet having a length of 10 mm and a width of 25 mm was peeled off in an atmosphere of 23 ° C.-50% RH, attached to a stainless steel plate, and left to stand in an atmosphere of 23 ° C.-50% RH for 24 hours. Then, it was immersed in an aqueous solution adjusted to pH 1.5 with sulfuric acid, and left in an environment of 40 ° C. for another 24 hours. Then, the sample was taken out from the aqueous solution, washed with water, and left to stand in an atmosphere of 23 ° C.-50% RH for 1 hour. Then, in an atmosphere of 23 ° C.-50% RH, the adhesive strength after immersion in sulfuric acid was measured at a peeling speed of 300 mm / min using a tensile test according to the measurement method of JISZ1528. It can be said that the smaller the difference between the 180-degree adhesive force to the stainless steel plate after 24 hours and the value measured in the evaluation of (adhesive force), the better the acid resistance.
Adhesive strength difference = (Adhesive strength after immersion in pH 1.5 aqueous solution)-(Adhesive strength after 180 degrees 24 hours for stainless steel plate)
（耐アルカリ性）
得られた粘着シートの測定しない面の剥離ライナーを剥がし、２５μｍのＰＥＴフィルムを貼り合せた後、幅２５ｍｍ・長さ１００ｍｍの大きさに準備し試料とした。次いで２３℃−５０％ＲＨの雰囲気下で長さ１０ｍｍ×幅２５ｍｍの粘着シートの剥離ライナーを剥がし、ステンレス板へ貼着し、２３℃−５０％ＲＨの雰囲気下で２４時間放置した。その後、水酸化ナトリウムを用いてｐＨ１１．５に調整した水溶液中に浸し、４０℃の環境下で、さらに２４時間放置した。その後、水溶液より試料を取り出し、水洗浄後、２３℃−５０％ＲＨの雰囲気下にて１時間放置。その後、２３℃−５０％ＲＨの雰囲気下でＪＩＳＺ１５２８の測定方法に準拠して、引っ張り試験を用いて剥離速度３００ｍｍ／ｍｉｎで粘着力を測定した。（粘着力）の評価において測定した、ステンレス板に対する１８０度粘着力２４時間後の値との差が小さいほど耐アルカリ性に優れるといえる。
粘着力差＝（ｐＨ１１．５水溶液浸漬後の粘着力）−（ステンレス板に対する１８０度２４時間後の粘着力）
(Alkali resistance)
The release liner on the non-measured surface of the obtained adhesive sheet was peeled off, a 25 μm PET film was attached, and then a sample having a width of 25 mm and a length of 100 mm was prepared. Next, the release liner of the adhesive sheet having a length of 10 mm and a width of 25 mm was peeled off in an atmosphere of 23 ° C.-50% RH, attached to a stainless steel plate, and left to stand in an atmosphere of 23 ° C.-50% RH for 24 hours. Then, it was immersed in an aqueous solution adjusted to pH 11.5 with sodium hydroxide, and left to stand for another 24 hours in an environment of 40 ° C. Then, the sample was taken out from the aqueous solution, washed with water, and left to stand in an atmosphere of 23 ° C.-50% RH for 1 hour. Then, the adhesive strength was measured at a peeling speed of 300 mm / min using a tensile test in accordance with the measurement method of JISZ1528 under an atmosphere of 23 ° C. to 50% RH. It can be said that the smaller the difference between the 180-degree adhesive force to the stainless steel plate after 24 hours and the value measured in the evaluation of (adhesive strength), the better the alkali resistance.
Adhesive strength difference = (Adhesive strength after immersion in pH 11.5 aqueous solution)-(Adhesive strength after 180 degrees 24 hours for stainless steel plate)
（再剥離性）
得られた粘着シートの研磨部材面の剥離ライナーを剥がし、２５μｍのＰＥＴフィルムを貼り合せた後、幅２５ｍｍ・長さ１００ｍｍの大きさに準備し試料とした。次いで２３℃−５０％ＲＨの雰囲気下で長さ１０ｍｍ×幅２５ｍｍの粘着シートの定盤側面の剥離ライナーを剥がしステンレス板へ貼着し、２ｋｇロールで１往復圧着し、すぐに８０℃の温水中に投入し、２４時間放置した。２４時間経過後、温水中より試料を取り出し、水洗浄後、２３℃−５０％ＲＨの雰囲気下にて１時間放置。その後、ＪＩＳＺ１５２８の測定方法に準拠して、引っ張り試験を用いて剥離速度３００ｍｍ／ｍｉｎで剥離した。剥離後のＳＵＳ板の表面を目視で評価することで再剥離性を評価した。評価基準は以下の通りである。
◎：ＳＵＳ板を汚染せず粘着シートを剥離できた。（非常に良好）
〇：ＳＵＳ板を極わずかに汚染した。（良好）
△：ＳＵＳ板をわずかに汚染した。 （実用上、問題なし）
×：ＳＵＳ板を汚染した。 （実用不可）
(Removability)
The release liner on the surface of the polished member of the obtained adhesive sheet was peeled off, a 25 μm PET film was attached, and then a sample having a width of 25 mm and a length of 100 mm was prepared. Next, in an atmosphere of 23 ° C-50% RH, the peeling liner on the side of the surface plate of the adhesive sheet with a length of 10 mm and a width of 25 mm was peeled off, attached to a stainless steel plate, crimped once with a 2 kg roll, and immediately warm water at 80 ° C. It was put inside and left for 24 hours. After 24 hours, the sample was taken out from warm water, washed with water, and left to stand in an atmosphere of 23 ° C.-50% RH for 1 hour. Then, according to the measurement method of JISZ1528, the peeling was performed at a peeling speed of 300 mm / min using a tensile test. The re-peelability was evaluated by visually evaluating the surface of the SUS plate after peeling. The evaluation criteria are as follows.
⊚: The adhesive sheet could be peeled off without contaminating the SUS plate. (Very good)
〇: The SUS board was slightly contaminated. (Good)
Δ: The SUS plate was slightly contaminated. (Practically, there is no problem)
X: The SUS board was contaminated. (Not practical)
表４〜表８の結果から、本発明の粘着テープは、スチレン含有量２０〜４０重量％、かつジブロック含有量１５〜７０重量％であるスチレンイソプレンブロック共重合体（Ａ）と、前記粘着付与樹脂が、ポリテルペン樹脂（Ｂ１）と、芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかである粘着付与樹脂（Ｂ２）とを含み、前記ポリテルペン樹脂（Ｂ）の含有量が、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、１０〜６０重量部であって、前記芳香族変性テルペン樹脂（Ｃ）またはキシレン樹脂（Ｄ）の含有量が、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、０．１〜１０重量部である粘着剤から形成されることで、優れた粘着性能と高い凝集力を併せ持つことが確認できた。さらに本願発明の粘着シートは、高温環境下でもズレなどが生じることなく、従来よりも高圧力の研磨に使用でき、また、耐酸性や耐アルカリ性を持ち合わせていた。 From the results of Tables 4 to 8, the adhesive tape of the present invention has the adhesive with the styrene isoprene block copolymer (A) having a styrene content of 20 to 40% by weight and a diblock content of 15 to 70% by weight. The imparting resin contains a polyterpene resin (B1) and a tackifier resin (B2) which is at least one of an aromatic-modified terpene resin and a xylene resin, and the content of the polyterpene resin (B) is the same as that of the styrene isoprene block. The content of the aromatic-modified terpene resin (C) or xylene resin (D) is 10 to 60 parts by weight with respect to 100 parts by weight of the polymer (A), and the content of the styrene isoprene block copolymer (A) 100 It was confirmed that by forming the adhesive from 0.1 to 10 parts by weight with respect to the weight part, it has both excellent adhesive performance and high cohesive force. Further, the adhesive sheet of the present invention can be used for polishing at a higher pressure than before without causing deviation even in a high temperature environment, and has acid resistance and alkali resistance.
特に、スチレンイソプレンブロック共重合体（Ａ）がリニア構造を有する場合には、ポリプロピレン板に対する粘着力も良好であり、様々な被着体に対する密着性に優れ、粘着性能に優れることが確認できた。
なかでも、スチレンイソプレンブロック共重合体（Ａ）のジブロック含有量が１５〜２５重量％である場合、再剥離性について、より優れた効果が確認できた。
In particular, when the styrene isoprene block copolymer (A) has a linear structure, it has been confirmed that the adhesive strength to the polypropylene plate is good, the adhesiveness to various adherends is excellent, and the adhesive performance is excellent.
In particular, when the diblock content of the styrene isoprene block copolymer (A) was 15 to 25% by weight, a more excellent effect on removability was confirmed.
Claims (7)
前記合成ゴムが、スチレン含有量２０〜４０重量％、かつジブロック含有量１５〜７０重量％であるスチレンイソプレンブロック共重合体（Ａ）を含み、
前記粘着付与樹脂が、ポリテルペン樹脂（Ｂ１）と、テルペンと芳香族モノマーとを共重合した芳香族変性テルペン樹脂およびキシレン樹脂の少なくともいずれかである粘着付与樹脂（Ｂ２）とを含み、
前記芳香族モノマーは、スチレンおよびα−メチルスチレンからなる群より選ばれ、
前記ポリテルペン樹脂（Ｂ１）の含有量が、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、１０〜６０重量部であって、
前記粘着付与樹脂（Ｂ２）の含有量が、スチレンイソプレンブロック共重合体（Ａ）１００重量部に対し、０．１〜１０重量部であることを特徴とした研磨部材固定用粘着剤。
（但し、前記ポリテルペン樹脂（Ｂ１）はテルペンと芳香族モノマーとを共重合した芳香族変性テルペン樹脂を除く）
In a pressure-sensitive adhesive for fixing a polishing member, which contains a synthetic rubber and a pressure-imparting resin.
The synthetic rubber contains a styrene isoprene block copolymer (A) having a styrene content of 20 to 40% by weight and a diblock content of 15 to 70% by weight.
The tackifier resin contains a polyterpene resin (B1) and a tackifier resin (B2) which is at least one of an aromatic-modified terpene resin obtained by copolymerizing a terpene and an aromatic monomer and a xylene resin.
The aromatic monomer is selected from the group consisting of styrene and α-methylstyrene.
The content of the polyterpene resin (B1) is 10 to 60 parts by weight with respect to 100 parts by weight of the styrene isoprene block copolymer (A).
Before the content of Kineba adhesive imparting resin (B2) is styrene isoprene block copolymer (A) 100 parts by weight of contrast, abrasive member fixing pressure-sensitive adhesive agent characterized in that 0.1 to 10 parts by weight.
(However, the polyterpene resin (B1) excludes an aromatic-modified terpene resin obtained by copolymerizing a terpene and an aromatic monomer).
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