JP6915393B2 - Adhesive for fixing polishing members, adhesive sheet for fixing polishing members, and laminated body of polishing members - Google Patents

Description

The present invention relates to an adhesive that can be suitably used for fixing a polishing member. More specifically, a rubber-based adhesive that exhibits excellent adhesive performance on various adherends and can form an adhesive layer having cohesive force and heat resistance that is unlikely to be displaced or peeled off even when used in a high temperature environment. It is about.

Conventionally, liquid crystal glass, hard disk substrates, optical lenses, silicon wafers, integrated circuits, etc. have been polished using polishing members, etc., and for fixing the polishing members, for example, an adhesive tape is attached to the polishing members and integrated. After forming the laminated body, the laminated body of the polishing member with the adhesive sheet is used by laminating it on the surface plate of the polishing machine. A rubber-based pressure-sensitive adhesive that can exhibit excellent adhesive strength to various adherends is used to fix the polishing member, but in the polishing process, strong shearing to the pressure-sensitive adhesive layer is used. Force is applied, and the temperature may rise due to frictional heat during polishing. Therefore, heat resistance is required to prevent slippage and peeling even when used in a high temperature environment, and conventional rubber adhesives, which are inferior in cohesive force to acrylic adhesives, are used for high-pressure polishing. It was difficult. Furthermore, acidic or alkaline chemicals (also called slurry) may be used in the polishing process, and chemical resistance is also required. It exhibits excellent adhesive strength to various adherends and is suitable for high-pressure polishing. There is a demand for a rubber-based adhesive having usable cohesive force and heat resistance.

As described above, various performances are required for the rubber-based adhesive for fixing the polishing member. For example, in Patent Document 1, the rubber-based adhesive is used for the polishing member, but the styrene content and diblock The design related to the content is not taken into consideration, and it is not sufficient from the required performance required in recent years. Further, in Patent Document 2, a styrene-isoprene-styrene block copolymer (SIS) having a radial structure with natural rubber is used, but the design related to the tackifier resin is not considered, and the required performance required in recent years is not taken into consideration. The current situation is that we are not satisfied with. As described above, no adhesive for fixing a polishing member has been found, which exhibits excellent adhesive force to various adherends and has cohesive force and heat resistance.

Japanese Unexamined Patent Publication No. 2007-245276 Japanese Unexamined Patent Publication No. 2000-290609

Since the adhesive for fixing a polishing member of the present invention can have both excellent adhesive performance and high cohesive force, it can be used for polishing at a higher pressure than before without causing deviation even in a high temperature environment. Another object of the present invention is to provide an adhesive for fixing a polishing member, which has acid resistance and alkali resistance.

As a result of diligent research to solve the above-mentioned problems, the present inventors have made it essential that the styrene content and the diblock content are within a specific range, and the styrene isoprene block copolymer and the specific content. We have found that the above problems can be solved by using a terpenphenol resin having a hydroxyl value of 70 mgKOH / g or less, and have arrived at the present invention.

That is, in the present invention, in the pressure-sensitive adhesive for fixing a polishing member containing a synthetic rubber and a tackifier resin, the synthetic rubber has a styrene content of 20 to 40% by weight and a diblock content of 15 to 70% by weight. A certain styrene isoprene block copolymer (A) is contained, the tackifier resin contains a terpenephenol resin (B) having a hydroxyl value of 70 mgKOH / g or less, and the content of the terpenephenol resin (B) is a synthetic rubber. The present invention relates to a pressure-sensitive adhesive for fixing a polishing member, which is 20 to 60 parts by weight with respect to 100 parts by weight.

According to the present invention, since the cohesive force of the adhesive layer can be increased, it is less likely to be displaced or peeled off even in a high temperature environment, it can be used for polishing at a higher pressure than before, and it also has acid resistance and alkali resistance. In addition, it is possible to supply an adhesive for fixing the polishing member.

The adhesive for fixing a polishing member of the present invention is an adhesive for fixing a polishing member containing a synthetic rubber and a tackifier resin, wherein the synthetic rubber has a styrene content of 20 to 40% by weight and a diblock content of 15. The tackifier resin contains the styrene isoprene block copolymer (A) in an amount of about 70% by weight, the tackifier resin contains the terpenephenol resin (B) having a hydroxyl value of 70 mgKOH / g or less, and the terpenephenol resin (B) is contained. The amount is 20 to 60 parts by weight with respect to 100 parts by weight of the synthetic rubber.

The pressure-sensitive adhesive for fixing a polishing member of the present invention can be used as a pressure-sensitive adhesive sheet provided with a base material by forming a pressure-sensitive adhesive layer by coating.
That is, it can be used as a pressure-sensitive adhesive sheet for a polishing member, which is provided with a pressure-sensitive adhesive layer formed of a pressure-sensitive adhesive for fixing the polishing member on one side or both sides of the base material.
In the present invention, the pressure-sensitive adhesive sheet, the pressure-sensitive adhesive tape, and the pressure-sensitive adhesive film are synonyms.

Therefore, in the present invention, the adhesive for fixing the polishing member is an adhesive capable of forming an adhesive sheet used for adhering the polishing member laminate to the polishing machine, which is integrated by adhering the adhesive sheet to the polishing member. It is an agent.
Further, the pressure-sensitive adhesive for fixing a polishing member of the present invention is less likely to be displaced or peeled even in a high-temperature environment because it can increase the cohesive force of the pressure-sensitive adhesive layer, and can be used for polishing at a higher pressure than before, and is acid-resistant. Since it also has properties and alkali resistance, it can be used on both the platen side and the polishing member side, and is formed from the polishing member fixing adhesive of the present invention on one side or both sides of the base material. Any adhesive sheet for fixing the polishing member, which has an adhesive layer, may be used. Further, when the adhesive for fixing a polishing member of the present invention is used on the surface plate side, it can be easily re-peeled from the surface plate of the polishing machine because of its excellent re-peelability.
At this time, a conventionally known pressure-sensitive adhesive can be used as the pressure-sensitive adhesive that forms the pressure-sensitive adhesive layer on the other surface.

Further, in the present invention, the polishing member includes, for example, a urethane-based polishing member, a non-woven fabric-based polishing member, a suede-based polishing member, and the like, and the polishing member is not limited thereto.

<< Adhesive for fixing polishing members >>
The adhesive for fixing a polishing member of the present invention is an adhesive for fixing a polishing member containing a synthetic rubber and a tackifier resin, wherein the synthetic rubber has a styrene content of 20 to 40% by weight and a diblock content of 15. The tackifier resin contains a styrene isoprene block copolymer (A) in an amount of about 70% by weight, and the tackifier resin contains a terpenephenol resin (B) having a hydroxyl value of 70 mgKOH / g or less, and the content of the terpenephenol resin is high. It is 20 to 60 parts by weight with respect to 100 parts by weight of synthetic rubber.

<Synthetic rubber>
The synthetic rubber contains a styrene isoprene block copolymer (A) having a styrene content of 20 to 40% by weight and a diblock content of 15 to 70% by weight.

Further, some styrene isoprene block copolymers (A) have a linear structure or a radial structure (radial structure), but when they have a linear structure, they have a highly flexible structure and therefore are variously adhered. It has excellent adhesion to the body, and has more excellent effects on adhesive performance and heat resistance. Therefore, it is preferable to have a linear structure composed of a styrene-isoprene-styrene block triblock body (SIS) and a styrene-isoprene diblock body (SI).
The styrene isoprene block copolymer having a linear structure refers to a linear copolymer in which a styrene block and an isoprene block are bonded.

In the present invention, the diblock content in the total amount (100% by weight) of the styrene isoprene block copolymer (A) is 15 to 70% by weight, preferably 25 to 70% by weight, and more preferably 25 to 70% by weight. , 50-70% by weight. When the content of the diblock body is within this range, the structure has high flexibility, so that it has excellent adhesion to various adherends, and it becomes easy to achieve both adhesive performance and heat resistance, resulting in adhesive performance. It can be excellent.

The styrene content is 20 to 40% by weight, preferably 22 to 40% by weight. Within this range, an adhesive having excellent cohesive force can be obtained.

In general, synthetic rubber adhesives are known to exhibit excellent adhesive performance on a wide range of adherends from high polarity to low polarity. In the present invention, by setting the styrene content% of the synthetic rubber within a certain range, cohesive force can be imparted by physical cross-linking of the styrene block body. Further, by setting the diblock content% in a certain range, a certain amount of diblock without a styrene block is present at the end, and it is possible to improve the adhesiveness and adhesive strength. Originally, in a rubber-based pressure-sensitive adhesive, tackiness is not exhibited unless a large amount of tack-imparting resin is added, so that it is essential to add a tack-imparting resin, but it often causes a decrease in cohesive force. However, with the styrene isoprene block copolymer (A) of the present invention, it is possible to reduce the amount of the tackifier resin added, and it is possible to suppress a decrease in cohesive force due to the addition of the tackifier resin. This makes it possible to maintain high adhesive strength and cohesive strength in a well-balanced manner.

Examples of such a styrene isoprene block copolymer (A) include Quintac3280 (manufactured by Nippon Zeon, 25% styrene, 17% diblock, linear structure) and Quintac3270 (manufactured by Nippon Zeon, 24% styrene). , Diblock amount 67%, linear structure), Kraton D1119 (Kraton, styrene amount 22%, diblock amount 66%, linear structure), Kraton D1126 (Kraton, styrene amount 21%, diblock amount 30%) , Radial structure), Kraton D1193 (Kraton, 24% styrene, 20% diblock, linear structure), etc., but are not limited to these, and such styrene isoprene block copolymers are , It can be used as needed within a range that does not impair the required performance, and two or more types may be used in combination.

Further, synthetic rubber other than the above-mentioned specific styrene isoprene block copolymer (A) may be contained as long as the required performance is not impaired. Examples of other synthetic rubbers include styrene-butadiene-styrene block copolymer (SBS), styrene-butadiene rubber (SBR), polyisobutylene rubber (IR), polyisobutylene (PIB), and butyl rubber (IIR). Can be mentioned.

When the synthetic rubber contains a synthetic rubber other than the styrene isoprene block copolymer (A), the styrene isoprene block copolymer (A) may be contained in an amount of 50 to 100% by weight in 100% by weight of the synthetic rubber. It is preferable from the viewpoint of the balance between the adhesive force and the cohesive force, and more preferably 80 to 100% by weight.

In addition, natural rubber may be used in combination as long as the required performance is not impaired. The natural rubber is not particularly limited, but it may be used as long as it can be kneaded with a kneading roll and adjusted so that the Mooney viscosity is, for example, about 10 to 100.
Other synthetic rubbers and natural rubbers are not limited to these, and two or more kinds may be used in combination.

<Adhesive-imparting resin>
In the present invention, the tackifier resin contains a terpene phenol resin (B) having a hydroxyl value of 70 mgKOH / g or less.
It is preferably 10 mgKOH / g or more and 70 mgKOH / g or less, and more preferably 30 mgKOH / g or more and 70 mgKOH / g or less.
When the hydroxyl value is in this range, it is possible to obtain a pressure-sensitive adhesive having excellent adhesive strength.

The terpene phenol resin (B) having a hydroxyl value of 70 mgKOH / g or less can impart adhesive performance to the styrene isoprene block copolymer (A) in a well-balanced manner. Among them, when the styrene content of the styrene isoprene block copolymer (A) is high, the adhesive performance is excellent because the compatibility with the styrene isoprene block copolymer is excellent.
As described above, since the terpene phenol resin (B) has good compatibility, it is difficult to cause a decrease in the cohesive force of the pressure-sensitive adhesive layer due to the tackifier resin, the decrease in the cohesive force is suppressed, and the adhesive performance is imparted. It is possible.
When the hydroxyl value is 70 mgKOH / g or less, when the tackifier resin is blended with the styrene isoprene block copolymer (A), high tackling performance can be imparted and a balance with the cohesive force can be obtained.

The softening point of the terpene phenol resin (B) is preferably 80 to 170 ° C.
When the softening point is in this range, the decrease in the cohesive force caused by the tackifier resin is suppressed, and the re-peelability of the polished member is improved. From the above viewpoint, the softening point is more preferably 95 to 150 ° C.

In the present invention, the content of the terpene phenol resin (B) is 20 to 60 parts by weight with respect to 100 parts by weight of the synthetic rubber. Within this range, it is easy to obtain a balance between the adhesive performance and the cohesive force, and the removability of the polishing member is improved. More preferably, it is 25 to 50 parts by weight.

Examples of the terpenphenol resin (B) having a hydroxyl value of 70 mgKOH / g or less include SylVaresTP95 (manufactured by Arizona Chemical Co., Ltd., softening point 95 ± 5 ° C., hydroxyl value 40 mgKOH / g), SylVaresTP105 (manufactured by Arizona Chemical Co., Ltd., softening point 105). ± 5 ° C, hydroxyl value 40 mgKOH / g), SylVaresTP115 (manufactured by Arizona Chemical Co., Ltd., softening point 115 ± 5 ° C, hydroxyl value 50 mgKOH / g), (YS Polystar U115 (manufactured by Yasuhara Chemical Co., Ltd., softening point 115 ± 5 ° C., hydroxyl value) 35 mgKOH / g), YS Polystar T80 (manufactured by Yasuhara Chemical Co., Ltd., softening point 80 ± 5 ° C., hydroxyl value 60 mgKOH / g), YS Polystar T100 (manufactured by Yasuhara Chemical Co., Ltd., softening point 100 ± 5 ° C., hydroxyl value 60 mgKOH / g), YS Polystar T115 (manufactured by Yasuhara Chemical Co., Ltd., softening point 115 ± 5 ° C., hydroxyl value 60 mgKOH / g), YS Polystar T130 (manufactured by Yasuhara Chemical Co., Ltd., softening point 130 ± 5 ° C., hydroxyl value 60 mgKOH / g), YS Polystar T145 (manufactured by Yasuhara Chemical Co., Ltd.) , Softening point 145 ± 5 ° C., Hydroxyl value 60 mgKOH / g), etc. It can be used in combination of two or more.

The pressure-sensitive adhesive of the present invention can be used in combination with other pressure-imparting resins other than the terpene phenol resin (B) having a hydroxyl value of 70 mgKOH / g or less, if necessary, as long as the required performance is not impaired. .. Other tackifier resins include, for example, rosin-based resins such as rosin esters, polymerized rosins, hydrogenated rosins, disproportionate rosins, maleic acid-modified rosins, fumaric acid-modified rosins, and rosin phenol resins; -Pinene resin, zipentene resin, aromatic-modified terpene resin, hydrogenated terpene resin, terpene phenol resin, acid-modified terpene resin, sterpene resin such as styrene terpene resin, alkylphenol resin, kumaron resin, styrene resin, petroleum-based Examples thereof include resins and copolymers thereof, but the present invention is not limited to these, and two or more kinds of other tackifier resins may be used in combination.

<Hardener>
Further, in the present invention, a curing agent can be used if necessary. Since the peeling force required for peeling from the polishing machine surface plate varies from high adhesive force to low adhesive force, it is possible to add a curing agent for the purpose of controlling the adhesive force. As the curing agent, an isocyanate compound, an aziridine compound, a metal chelate compound, an epoxy compound and the like can be used, if necessary, as long as the required performance is not impaired.

Examples of the isocyanate compound include tolylene diisocyanate, hexamethylene diisocyanate, isophorone diisocyanate, xylylene diisocyanate, hydrogenated xylylene diisocyanate, diphenylmethane diisocyanate, hydrogenated diphenylmethane diisocyanate, tetramethylxylylene diisocyanate, naphthalene diisocyanate, and triphenylmethane triisocyanate. Polyisocyanate compounds such as polymethylene polyphenyl isocyanate, adducts and bullets of these isocyanate compounds and polyol compounds such as trimethylolpropane, isocyanurates, and these isocyanate compounds and known polyether polyols and polyester polyols. , Acrylic polyol, polybutadiene polyol, polyisoprene polyol and the like, and the isocyanate compound is preferably an adduct body of tolylene diisocyanate trimethylolpropane.

Examples of the aziridine compound include N, N'-hexamethylene-1,6-bis (1-aziridinecarboxamide, trimethylpropan-tri-β-aziridinyl propionate, N, N'-diphenylmethane 4, Examples thereof include 4'-bis (1-aziridine carboxamide), trimethylpropan-tri-β- (2-methylaziridine) propionate and the like.

As the metal chelate compound, for example, a metal complex compound can be used. Examples of the metal include nickel, aluminum, chromium, iron, titanium, zinc, cobalt, manganese, copper, tin and zirconium. Examples of the metal chelate compound include ferric trisacetylacetoneate, aluminumtrisacetylacetoneate, aluminum monoacetylacetoneate bis (ethylacetate acetate), aluminum tris (ethylacetate acetate), and the like. Aluminum trisacetylacetoneate is more preferred.

Examples of the epoxy compound include bisphenol A, epichlorohydrin type epoxy resin, ethylene glycidyl ether, polyethylene glycol diglycidyl ether, glycerin diglycidyl ether, glycerin triglycidyl ether, 1,6-hexanediol glycidyl ether, and trimethyl propantri. Examples include glycidyl ether, diglycidyl aniline, diamine glycidyl amine, N, N, N', N'-tetraglycidyl-m-xylylene diamine and 1,3-bis (N, N'-diamine glycidyl aminomethyl) cyclohexane. Be done.

These curing agents may be used alone or in combination of two or more.

<Anti-aging agent>
Further, in the present invention, an anti-aging agent can be used if necessary. Anti-aging agents are used for the purpose of preventing deterioration of rubber components, and examples of such anti-aging agents include non-flex WS (manufactured by Seiko Kagaku Co., Ltd., anti-aging agent) and non-flex WS-P (Seiko). Chemical company, anti-aging agent), non-flex MBP (Seiko Chemical company, anti-aging agent), non-flex CBP (Seiko Chemical company, anti-aging agent), non-flex EBP (Seiko Chemical company, anti-aging agent) , Non-flex TNP (Seiko Kagaku Co., Ltd., anti-aging agent), Non-flex MB (Seiko Kagaku Co., Ltd., anti-aging agent), Non-flex RD (Seiko Kagaku Co., Ltd., anti-aging agent), Non-flex OS (Seiko Kagaku Co., Ltd., anti-aging agent) , Non-flex DCD (manufactured by Seiko Kagaku Co., Ltd., anti-aging agent), etc., but the anti-aging agent is not limited to these, and such anti-aging agent. Can be used as needed within a range that does not impair the required performance, and two or more types may be used in combination.

In the present invention, the anti-aging agent is used for the purpose of preventing deterioration due to oxidation or the like and for the purpose of preventing deterioration due to heat or the like, and is an antioxidant, an antioxidant or a thermal deterioration inhibitor. Is a synonym.

<Other additives>
The pressure-sensitive adhesive of the present invention includes various additives such as fillers, pigments, dyes, diluents, polymerization inhibitors, UV absorbers, UV stabilizers, coupling agents, etc., which are blended with known pressure-sensitive adhesives as needed. May be included, or two or more types may be used. Further, the amount of the additive added may be an amount that can obtain the required physical properties, and is not particularly limited.

<< Adhesive sheet for fixing polishing members >>
The pressure-sensitive adhesive sheet for fixing a polishing member of the present invention is a pressure-sensitive adhesive sheet provided with a pressure-sensitive adhesive layer formed of the pressure-sensitive adhesive for fixing a polishing member of the present invention on one side or both sides of a base material.
The thickness of the pressure-sensitive adhesive layer is preferably 10 to 150 μm, more preferably 15 to 100 μm. By setting the pressure-sensitive adhesive layer in the above range, it is possible to obtain an pressure-sensitive adhesive tape that is excellent in re-peeling of the polishing member.

As the coating of the pressure-sensitive adhesive, known methods such as a roll coater method, a comma coater method, a lip coater method, a die coater method, a reverse coater method, a silk screen method, and a gravure coater method can be used. After coating, it can be dried in a hot air oven, an infrared heater, or the like.

As the base material, a member that can be used as a base material for an adhesive such as non-woven fabric, paper, plastic film, and synthetic paper can be used. When used as a base material (core material) for an adhesive sheet, a non-woven fabric and a plastic film are preferable. Examples of the plastic film include films made of polyolefins such as polyethylene and polypropylene, polyesters such as polyethylene terephthalate, PPS (polyphenylene sulfide), nylon, triacetyl cellulose, cycloolefin, polyimide and polyamide. Further, the base material may be an optical member such as an antireflection (AR) film, a polarizing plate, or a retardation plate obtained by applying a desired coating liquid to the plastic film. Further, the base material may be subjected to an easy adhesive treatment in order to improve the adhesion with the pressure-sensitive adhesive layer. For the easy-adhesion treatment, known methods such as a dry method of performing corona discharge and a wet method of coating with an anchor coating agent can be used. In addition, the base material can form an antistatic layer. As the antistatic agent, in addition to the antistatic agent described above, a composition in which at least one of conductive carbon particles, conductive metal particles, conductive polymer and the like is blended with a resin as necessary is preferable, or a base material is used. An antistatic layer can be formed by subjecting the material to metal vapor deposition or metal plating. In the present invention, the thickness of the base material is not particularly limited, but is preferably 5 to 300 μm. Among the base materials, it is more preferable to use a film that has not been subjected to an easy adhesion treatment or the like. In the case of rubber-based adhesives, if the easy-adhesive treatment that performs corona discharge is applied, the adhesive will easily peel off from the base material. Is preferably applied.

The release liner for producing the pressure-sensitive adhesive sheet has a release layer formed by applying a release agent to a base material such as paper, plastic film, or synthetic paper. Examples of the release agent include silicone, alkyd resin, melamine resin, fluororesin, acrylic resin and the like. The thickness of the release liner is not particularly limited, but is about 10 to 200 μm.

Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited to the following Examples. In the example, "part" means "part by weight" and "%" means "% by weight".

The method for measuring the softening point and the hydroxyl value of the tackifier resin is as follows.
Softening point of tackifier resin: Measured according to JISK5902 and JISK2207.
The hydroxyl value of the tackifier resin was measured according to JIS K0070: 1992.

[Example 1]
(Adhesive for fixing polishing members 1)
In a 4-port flask equipped with a stirrer, thermometer, reflux condenser, dropping device, and nitrogen introduction tube, under a nitrogen atmosphere, Clayton's synthetic rubber, 100.0 parts by weight of D1119, and methyl ethyl ketone and toluene as solvents are appropriate amounts. I prepared it. Then, the flask was gradually heated, and heating was continued for 3 hours at an internal temperature of about 50 ° C. After the heating is completed, the mixture is cooled, and at an internal temperature of about 40 ° C. or lower, 30.0 parts by weight of YS Polystar T130 (manufactured by Yasuhara Chemical Co., Ltd.) is charged as an adhesive resin, and 2.0 parts by weight of non-flex EBP is charged as an antiaging agent. It was diluted with methyl ethyl ketone and toluene, and stirring was continued until the tackifier resin was dissolved to obtain a pressure-sensitive adhesive (adhesive 1) solution for fixing polishing members having a non-volatile content of 50.0% and a viscosity of 2000 mPa · s.

[Examples 2 to 3, Reference Example 4, Examples 5 to 23, Comparative Examples 1 to 13]
(Adhesive for fixing polishing members 2-26)
Polishing in the same manner as the polishing member fixing pressure-sensitive adhesive 1 except that the types of the pressure-sensitive adhesive resin, the curing agent, and the pressure-imparting resin, and the blending amount (nonvolatile content weight part) are changed as shown in Tables 2 to 4. Adhesives 2-26 for fixing members were obtained. In addition, Example 4 in Table 1 means Reference Example 4.

The abbreviations in Tables 2-4 are as follows. The blending amount is the amount (parts by weight) of the synthetic rubber added in terms of non-volatile content with respect to the solid content.
[Synthetic rubber: Styrene isoprene block copolymer (% by weight)]
・ Kraton D1119
(Made by Clayton, 22% styrene, 66% diblock, linear structure)
・ Quintac3270
(Manufactured by Zeon Corporation, 24% styrene, 67% diblock, linear structure)
・ Quintac SL-165
(Manufactured by Zeon Corporation, 30% styrene, 60% diblock, linear structure)
・ Kraton D1126
(Made by Clayton, 21% styrene, 30% diblock, radial structure)
・ Kraton D1193
(Clayton, 24% styrene, 20% diblock, linear structure)
・ Quintac3280
(Manufactured by Zeon Corporation, 25% styrene, 17% diblock, linear structure)
・ Quintac3620
(Manufactured by Zeon Corporation, 14% styrene, 12% diblock, linear structure)
・ Kraton D1161
(Clayton, 15% styrene, 19% diblock, linear structure)
・ Kraton DX406
(Made by Clayton, 16% styrene, 52% diblock, linear structure)
・ Quintac3520
(Manufactured by Zeon Corporation, 15% styrene, 78% diblock, linear structure)
・ Quintac3450
(Manufactured by Zeon Corporation, 19% styrene, 30% diblock, radial structure)

[Adhesive-imparting resin]
-SylVares TP115
(Made by Arizona Chemical Co., Ltd., terpene phenol resin, softening point 115 ± 5 ° C, hydroxyl value 50 mgKOH / g)
・ YS Polystar T130
(Made by Yasuhara Chemical Co., Ltd., terpene phenol resin, softening point 130 ° C, hydroxyl value 60 mgKOH / g)
・ YS Polystar T145
(Made by Yasuhara Chemical Co., Ltd., terpene phenol resin, softening point 145 ° C, hydroxyl value 60 mgKOH / g)
・ YS Polystar S145
(Made by Yasuhara Chemical Co., Ltd., terpene phenol resin, softening point 160 ° C, hydroxyl value 100 mgKOH / g)
・ YS Polystar N125
(Made by Yasuhara Chemical Co., Ltd., terpene phenol resin, softening point 160 ° C, hydroxyl value 160 mgKOH / g)
・ SylVaresTP2040HM
(Made by Arizona Chemical Co., Ltd., terpene phenol resin, softening point 125 ± 5 ° C, hydroxyl value 140 mgKOH / g)
・ Pencel D125
(Arakawa Chemical Co., Ltd., rosin ester resin, softening point 125 ° C, hydroxyl value 40 mgKOH / g)
[Additive]
・ Non-flex EBP (manufactured by Seiko Kagaku Co., Ltd., anti-aging agent)

<Evaluation of adhesive sheet>
A pressure-sensitive adhesive sheet was formed using the obtained pressure-sensitive adhesive for fixing the polishing member, and evaluated by the following method. The evaluation results are shown in Tables 5-7.
(Making an adhesive sheet)
As shown in Tables 5 to 7, the obtained adhesive for fixing the polishing member was used and coated on a 25 μm PET film base material (adhesive layer on the polishing member side) so that the thickness after drying became 40 μm. After drying at ° C for 2 minutes, a release liner is attached, and then the obtained adhesive for fixing the polishing member is applied to the release liner so that the thickness after drying is 30 μm (adhesive layer on the platen side). After drying at 100 ° C. for 2 minutes, the PET film substrate was attached to a surface not coated with an adhesive and left at 23 ° C. to 50% for 1 week to obtain an adhesive sheet.
In Example 1-A, the pressure-sensitive adhesive 1 was placed on the polishing member side, 100 parts by weight of BPS3156D (acrylic pressure-sensitive adhesive) manufactured by Toyochem Co., Ltd. and BHS8515 (isocyanate curing agent) manufactured by Toyochem Co., Ltd. 4.0 on the surface plate side. It is a pressure-sensitive adhesive sheet obtained by using the pressure-sensitive adhesive 27 which was mixed with a weight portion and stirred.
Further, Example 4 in Table 4 means Reference Example 4.

(Adhesive force)
The peeling liner on the non-measured surface of the obtained adhesive sheet was peeled off, PET 25μ was bonded, and then prepared into a size of 25 mm in width and 100 mm in length to prepare a sample. Next, under a 23 ° C.-50% RH atmosphere, the peeling liner opposite to the surface to which PET25 was bonded was peeled off from the obtained sample, and the exposed adhesive layer was pressure-bonded to a stainless steel plate once with a 2 kg roller. After leaving for 20 minutes or 24 hours, the adhesive strength was measured using a tensile tester under the conditions of a peeling angle of 180 degrees and a peeling speed of 0.3 m / min. The adhesive strength on both sides was measured by the same method.

(Holding power)
The peeling liner on the non-measured surface of the obtained adhesive sheet was peeled off, PET 25μ was bonded, and then prepared into a size of 25 mm in width and 100 mm in length to prepare a sample. Next, under a 23 ° C.-50% RH atmosphere, a peeling liner opposite to the surface to which PET25 was bonded was peeled off from the obtained sample by 25 mm in length and 25 mm in width, and crimped to a stainless steel plate once with a 2 kg roll, and then pressed back and forth at 23 ° C.- It was left for 20 minutes in a 50% atmosphere. After that, a 1 kg weight was attached in an atmosphere of 80 ° C. 18
The force was set so as to apply a force in the direction of 0 degrees, and after 24 hours, the number of millimeters of the adhesive sheet displaced from the adherend, or the number of seconds of falling completely displaced was measured. The holding force on both sides was measured by the same method.

(Acid resistance)
The release liner on the non-measured surface of the obtained adhesive sheet was peeled off, a 25 μm PET film was attached, and then a sample having a width of 25 mm and a length of 100 mm was prepared. Next, the release liner of the adhesive sheet having a length of 10 mm and a width of 25 mm was peeled off in an atmosphere of 23 ° C.-50% RH, attached to a stainless steel plate, and left to stand in an atmosphere of 23 ° C.-50% RH for 24 hours. Then, it was immersed in an aqueous solution adjusted to pH 1.5 with sulfuric acid, and left for another 24 hours in an environment of 40 ° C. Then, the sample was taken out from the aqueous solution, washed with water, and left to stand in an atmosphere of 23 ° C.-50% RH for 1 hour. Then, in an atmosphere of 23 ° C.-50% RH, the adhesive strength after immersion in sulfuric acid was measured at a peeling speed of 300 mm / min using a tensile test according to the measurement method of JISZ1528. It can be said that the smaller the difference between the 180-degree adhesive force to the stainless steel plate after 24 hours and the value measured in the evaluation of (adhesive force), the better the acid resistance.

Adhesive strength difference = (Adhesive strength after immersion in pH 1.5 aqueous solution)-(Adhesive strength after 180 degrees 24 hours for stainless steel plate)

(Alkali resistance)
The release liner on the non-measured surface of the obtained adhesive sheet was peeled off, a 25 μm PET film was attached, and then a sample having a width of 25 mm and a length of 100 mm was prepared. Next, the release liner of the adhesive sheet having a length of 10 mm and a width of 25 mm was peeled off in an atmosphere of 23 ° C.-50% RH, attached to a stainless steel plate, and left to stand in an atmosphere of 23 ° C.-50% RH for 24 hours. Then, it was immersed in an aqueous solution adjusted to pH 11.5 with sodium hydroxide, and left for another 24 hours in an environment of 40 ° C. Then, the sample was taken out from the aqueous solution, washed with water, and left to stand in an atmosphere of 23 ° C.-50% RH for 1 hour. Then, the adhesive strength was measured at a peeling speed of 300 mm / min using a tensile test in accordance with the measurement method of JISZ1528 under an atmosphere of 23 ° C. to 50% RH. It can be said that the smaller the difference between the 180-degree adhesive force to the stainless steel plate after 24 hours and the value measured in the evaluation of (adhesive force), the better the alkali resistance.

Adhesive strength difference = (Adhesive strength after immersion in pH 11.5 aqueous solution)-(Adhesive strength after 180 degrees 24 hours for stainless steel plate)

From the results in Tables 5 to 8, the adhesive tape of the present invention contains a styrene isoprene block copolymer (A) having a styrene content of 20 to 40% by weight and a diblock content of 15 to 70% by weight, and a hydroxyl value. It contains 70 mgKOH / g or less of terpenphenol resin (B), and the content of terpenphenol resin (B) is formed from an adhesive that is 20 to 60 parts by weight with respect to 100 parts by weight of synthetic rubber. It was confirmed that it has both excellent adhesive performance and high cohesiveness. Further, the adhesive sheet of the present invention can be used for polishing at a higher pressure than the conventional one without causing deviation even in a high temperature environment, and has acid resistance and alkali resistance.

In particular, when the styrene isoprene block copolymer (A) has a linear structure, it has excellent adhesion, and more excellent effects on adhesive performance and heat resistance have been confirmed.

Claims (5)

In a pressure-sensitive adhesive for fixing a polishing member containing synthetic rubber and a pressure-imparting resin,
The synthetic rubber, a styrene content of 22 to 40 wt%, and a diblock content of 15 to 70 wt%, including styrene-isoprene block copolymer of a linear structure (A),
The tackifier resin contains a terpene phenol resin (B) having a hydroxyl value of 70 mgKOH / g or less.
A pressure-sensitive adhesive for fixing a polishing member, wherein the content of the terpene phenol resin (B) is 20 to 60 parts by weight with respect to 100 parts by weight of synthetic rubber. The pressure-sensitive adhesive for fixing a polishing member according to claim 1, wherein the styrene isoprene block copolymer (A) has a diblock content of 50 to 70% by weight. The pressure-sensitive adhesive for fixing a polishing member according to claim 1 or 2, wherein the terpene phenol resin (B) has a softening point of 80 to 170 ° C. A pressure-sensitive adhesive sheet for fixing a polishing member, comprising a pressure-sensitive adhesive layer formed from the pressure-sensitive adhesive for fixing the polishing member according to any one of claims 1 to 3 on one side or both sides of the base material. A polishing member laminate in which the adhesive sheet for fixing the polishing member according to claim 4 is attached to the polishing member and integrated.