JP6925028B2 - How to fix the electromagnetic vibration type diaphragm pump and the electromagnetic vibration type diaphragm pump - Google Patents

Description

The present invention relates to an electromagnetic vibration type diaphragm pump and a method for fixing an electromagnetic vibration type diaphragm pump.

A vibrator having a magnet is reciprocated by an alternating drive of an electromagnet, and a diaphragm fixed to both ends of the vibrator is vibrated to suck and discharge a fluid such as a gas or a liquid. For example, an electromagnetic vibration type diaphragm. Pumps are known. For example, in the pumps shown in Patent Documents 1 to 3, a plurality of vibrators are arranged in order to increase the output of the pump. In such a pump, there is a desire to suppress the vibration generated by the reciprocating motion of the vibrator.

In response to such a request, in the pump of Patent Document 1, the two vibrators are arranged in a straight line, and the two vibrators are controlled to move in opposite directions. As a result, the vibration generated by each vibrator is canceled out and reduced. However, if the two vibrators are arranged in a straight line as in Patent Document 1, there arises a problem that the size of the housing becomes large. Therefore, in the pumps of Patent Documents 2 and 3, two or more oscillators are arranged in parallel with the same moving direction, and one or more oscillators move in opposite directions to the other oscillators. The drive is controlled. As a result, the vibration generated by the reciprocating motion of the vibrator is reduced while suppressing the increase in the size of the housing.

Japanese Unexamined Patent Publication No. 61-207883 Japanese Unexamined Patent Publication No. 2000-054964 Japanese Unexamined Patent Publication No. 2006-307813

However, a pump having a configuration in which two or more oscillators are arranged in parallel in the same moving direction has a vibration caused by the above-mentioned drive control of the oscillators as compared with a pump having a configuration in which two or more oscillators are arranged in a straight line. The reduction effect is inferior. Therefore, there is room for further improvement.

Therefore, an object of the present invention is electromagnetic vibration capable of reducing vibration generated by the reciprocating motion of the vibrator while suppressing an increase in the size of the housing even when having two or more vibrators. It is an object of the present invention to provide a method for fixing a type diaphragm pump and an electromagnetic vibration type diaphragm pump.

The electromagnetic vibration type diaphragm pump of the present invention is an electromagnetic vibration type diaphragm pump that can be accommodated in the cover while being supported by the cover, and extends in the first direction and has an electromagnet fixed to it, and at least one end in the first direction. A vibrator provided with a diaphragm in the part, an electromagnet that reciprocates the vibrator in the first direction by attracting and repelling the magnet, and a third that controls the energization of the electromagnet and intersects in the first direction. A control unit that moves at least one oscillator of a plurality of oscillators arranged in two directions and the other oscillators in opposite directions, a frame that accommodates at least the oscillators and electromagnets, and a frame is supported by a cover. The support portion extends in the third direction intersecting the first direction and the second direction, and is provided on the rotation axis of the rotational moment generated by the reciprocating motion of the plurality of vibrators. Has been done.

In the electromagnetic vibration type diaphragm pump having this configuration, since a plurality of vibrators are arranged in the second direction intersecting the first direction in which the vibrators extend, it is possible to suppress an increase in the size of the housing. Further, in the electromagnetic vibration type diaphragm pump having this configuration, at least one of the plurality of oscillators and the other oscillators are driven so as to move in opposite directions, so that the vibration is generated by the reciprocating movement of the oscillators. The vibrations in the first direction can be reduced because some of them cancel each other out. On the other hand, in the electromagnetic vibration type diaphragm pump having the present configuration in which at least one of the plurality of oscillators arranged in parallel and the other oscillators are moved in opposite directions to each other, the first direction and the second direction intersect with each other. A rotational moment is generated around three directions, and vibration due to the rotational moment is generated in the support portion that supports the frame. Therefore, in the electromagnetic vibration type diaphragm pump of the present invention, the support portion is provided on the rotation shaft. As a result, vibration in the rotational direction of the support portion due to the rotational moment can be reduced. As a result, even when having two or more vibrators, it is possible to reduce the vibration generated by the reciprocating motion of the vibrators while suppressing the increase in size of the housing.

In the electromagnetic vibration type diaphragm pump of the present invention, two vibrators are arranged, and the support portion may be arranged between the positions of the centers of gravity of the respective vibrators. In the electromagnetic vibration type diaphragm pump having this configuration, the support portion can be easily arranged at a position on the rotation axis of the rotation moment.

The electromagnetic vibration type diaphragm pump of the present invention is an electromagnetic vibration type diaphragm pump that can be accommodated in the cover while being supported by the cover, and extends in the first direction and has an electromagnet fixed to it, and at least one end in the first direction. Two vibrators with diaphragms in the part, an electromagnet that reciprocates each of the vibrators in the first direction by attracting and repelling the magnet, and a first direction by controlling the energization of the electromagnet. A control unit that moves two oscillators arranged in the second direction intersecting with each other in opposite directions, a frame that houses at least two oscillators and an electromagnet, and a support unit that supports the frame on a cover. , And the support portion is arranged between the positions of the center of gravity of each vibrator.

In the electromagnetic vibration type diaphragm pump having this configuration, since a plurality of vibrators are arranged in the second direction intersecting the first direction in which the vibrators extend, it is possible to suppress an increase in the size of the housing. Further, in the electromagnetic vibration type diaphragm pump having this configuration, at least one of the plurality of oscillators and the other oscillators are driven so as to move in opposite directions, so that the vibration is generated by the reciprocating movement of the oscillators. The vibrations in the first direction can be reduced because some of them cancel each other out. On the other hand, in the electromagnetic vibration type diaphragm pump of this configuration that moves at least one oscillator of a plurality of oscillators arranged in parallel and the other oscillators in opposite directions, they intersect in the first direction and the second direction. A rotational moment is generated around the third direction, and vibration due to the rotational moment is generated in the support portion that supports the frame. Therefore, in the electromagnetic vibration type diaphragm pump of the present invention, the support portion is provided between the positions of the centers of gravity of the respective vibrators. As a result, vibration in the rotational direction of the support portion due to the rotational moment can be reduced. As a result, even when having two or more vibrators, it is possible to reduce the vibration generated by the reciprocating motion of the vibrators while suppressing the increase in size of the housing.

The electromagnetic vibration type diaphragm pump of the present invention is formed in a frame, and connects at least one of a suction port and a discharge port that communicate with a compression chamber formed including a diaphragm and a flow path formed in a cover. A connecting flow path may be further provided, and the connecting flow path may be arranged in a range within a radius of 20 mm centered on the rotation axis or a region having a width within 40 mm centered on a straight line connecting the positions of the centers of gravity. In the electromagnetic vibration type diaphragm pump having this configuration, it is possible to suppress the vibration caused by the rotational moment from being transmitted to the connecting flow path.

In the electromagnetic vibration type diaphragm pump of the present invention, a plurality of connection flow paths are provided, and the plurality of connection flow paths may be arranged point-symmetrically about the rotation axis. In the electromagnetic vibration type diaphragm pump having this configuration, even when the connection flow path is arranged at a position away from the rotation axis, the vibrations transmitted through the connection flow path cancel each other out, so that the vibration is generated by the reciprocating motion of the vibrator. Vibration can be reduced.

In the electromagnetic vibration type diaphragm pump of the present invention, the support portion may be formed integrally with the connecting flow path. In the electromagnetic vibration type diaphragm pump having this configuration, the number of parts can be reduced and the assembly workability becomes easy.

In the electromagnetic vibration type diaphragm pump of the present invention, the connecting flow path may be a double pipe composed of a circular first flow path and an annular second flow path arranged so as to surround the first flow path. In the electromagnetic vibration type diaphragm pump having this configuration, the support portion can also serve as the connecting flow path, and the connecting flow path can be arranged close to the rotation axis.

In the electromagnetic vibration type diaphragm pump of the present invention, only the flow path connecting the discharge port and the flow path formed on the cover may be formed as the connection flow path. In this electromagnetic vibration type diaphragm pump, the number of parts to which vibration caused by the rotational moment is transmitted can be reduced, so that the entire connection flow path is made into a region less susceptible to the vibration (that is, a region closer to the rotation axis). Can be placed. Further, even in an electromagnetic vibration type diaphragm pump having a configuration in which only a flow path connecting the discharge port and the flow path formed on the cover is formed as the connection flow path, vibration is transmitted to the connection flow path. Can be reduced.

The electromagnetic vibration type diaphragm pump of the present invention may further include a cover for supporting the frame and accommodating the frame. In this case, the vibration transmitted to the cover via the support portion can be suppressed.

The electromagnetic vibration type diaphragm pump of the present invention further includes the cover that supports the frame and houses the frame, and the covers include a bottomed box-shaped upper cover and a plate-shaped lower cover that covers the opening of the upper cover. , A support portion may be interposed between the frame and the upper cover, and a support portion and a connection flow path may be interposed between the frame and the lower cover. In this case, the frame can be firmly fixed to the upper cover and the lower cover, and the vibration transmitted to the upper cover via the support portion can be suppressed. In addition, vibration transmitted to the lower cover via the support portion and the connecting flow path can be suppressed.

The electromagnetic vibration type diaphragm pump of the present invention further includes a cover that supports the frame and houses the frame, and the covers include a bottomed box-shaped upper cover and a plate-shaped lower cover that covers the opening of the upper cover. A support portion and a connecting flow path may be interposed between the frame and the upper cover and between the frame and the lower cover. In this case, the frame can be firmly fixed to the upper cover and the lower cover. In addition, vibration transmitted to the upper cover and the lower cover via the support portion and the connecting flow path can be suppressed.

In the electromagnetic vibration type diaphragm pump of the present invention, the support portion may have a locking portion that is locked to the locked portion formed on the cover. In the electromagnetic vibration type diaphragm pump having this configuration, it is possible to suppress the relative displacement of the frame with respect to the cover due to the rotational vibration caused by the rotational moment. As a result, it is possible to prevent the frame from coming into contact with the cover.

In the electromagnetic vibration type diaphragm pump of the present invention, the magnetic path of the electromagnet is composed of a substantially C-type iron core and an I-type iron core, and the I-type iron core is arranged between both open facing surfaces of the substantially C-type iron core to form a C-type. A coil is wound around both ends of the iron core and the I-type iron core to form the first and second electromagnets and the central electromagnet, and the I-type iron core and the substantially C-type iron core are not mechanically joined and vibrate. The child may be provided so as to be movable between the I-type iron core and the substantially C-type iron core. The electromagnetic vibration type diaphragm pump having this configuration improves assembly workability.

In the method of fixing the electromagnetic vibration type diaphragm pump of the present invention, the vibrator is fixed while extending in the first direction, and the vibrator is provided with the diaphragm at at least one end in the first direction, and the magnet is attracted and repelled. An electromagnet that reciprocates the oscillator in the first direction by causing the oscillator, and at least one oscillator of a plurality of oscillators arranged in the second direction that intersect the first direction by controlling the energization of the oscillator and others. A method for fixing an electromagnetic vibration type diaphragm pump, which comprises fixing an electromagnetic vibration type diaphragm pump including a control unit for moving the vibrators in opposite directions and at least a frame for accommodating the vibrator and an electromagnet to a supported portion. A support portion is arranged on the rotation axis of the rotational moment generated by the reciprocating motion of a plurality of vibrators extending in the third direction intersecting the first direction and the second direction, and the support portion is arranged via the support portion. Fix the frame to the supported part.

In the method of fixing the electromagnetic vibration type diaphragm pump, the support portion is provided on the rotation shaft. As a result, vibration in the rotational direction of the support portion due to the rotational moment can be reduced. As a result, even in an electromagnetic vibration type diaphragm pump having two or more vibrators, the vibration generated by the reciprocating motion of the vibrators can be reduced.

The method for fixing the electromagnetic vibration type diaphragm pump of the present invention is to attract and repel a vibrator that extends in the first direction and a magnet is fixed and a diaphragm is provided at at least one end in the first direction, and the magnet. An electromagnet that causes the vibrator to reciprocate in the first direction, and at least one of the plurality of vibrators arranged in the second direction that intersects the first direction and another vibrator that controls the energization of the electromagnet. This is a method for fixing an electromagnetic vibration type diaphragm pump, which fixes an electromagnetic vibration type diaphragm pump including a control unit for moving the two in opposite directions and at least a frame for accommodating a vibrator and an electromagnet to a supported part. , A support portion is arranged between the positions of the center of gravity of each vibrator, and the frame is fixed to the supported portion via the support portion.

In the method of fixing the electromagnetic vibration type diaphragm pump, the support portion is provided between the positions of the centers of gravity of the respective vibrators. As a result, vibration in the rotational direction of the support portion due to the rotational moment can be reduced. As a result, even in an electromagnetic vibration type diaphragm pump having two or more vibrators, the vibration generated by the reciprocating motion of the vibrators can be reduced.

According to the present invention, even when two or more vibrators are provided, it is possible to reduce the vibration generated by the reciprocating motion of the vibrators while suppressing the increase in size of the housing.

It is an exploded perspective view which shows the electromagnetic vibration type diaphragm pump of one Embodiment. It is a top view which shows the structure of the electromagnetic vibration type diaphragm pump. It is sectional drawing which shows the structure of the electromagnet included in the electromagnetic vibration type diaphragm pump of FIG. Each of (a) to (d) is a figure which shows the modification of the electromagnet. It is a perspective view which shows the electromagnetic vibration type diaphragm pump in the state taken out from a frame. It is explanatory drawing which shows the operating principle of the electromagnetic vibration type diaphragm pump of FIG. It is a top view which shows the partition part of the lid-shaped case part. It is a top view which shows the base part of the lid-shaped case part. It is explanatory drawing which shows the air flow of the electromagnetic vibration type diaphragm pump of FIG. (A) is a perspective view showing a support portion in the electromagnetic vibration type diaphragm pump according to the present embodiment, and (b) is a perspective view showing a support portion in the electromagnetic vibration type diaphragm pump according to a modified example. Each of (a) to (c) is a perspective view which shows the support part which concerns on the modified example. It is a top view which showed the structure of the electromagnet which concerns on the modification. It is sectional drawing which showed the structure of the upper support part which concerns on a further modification.

Hereinafter, the electromagnetic vibration type diaphragm pump 1 (hereinafter, simply referred to as “diaphragm pump 1”) according to the embodiment will be described with reference to the drawings. In the description of the drawings, the same elements are designated by the same reference numerals, and duplicate description will be omitted. 1, FIG. 2, FIG. 3, FIG. 5, FIG. 6, FIG. 7 and FIG. 8 show the X-axis (first direction), the Y-axis (second direction) and the Z-axis which are orthogonal to each other for convenience of explanation. (Third direction) is set. The electromagnetic vibration type diaphragm pump 1 is mainly used for air suction / exhaust to moving indoor or general indoor air mats of automobiles and ships, oxygen supply in fish tanks, household septic tanks, etc., sampling of inspection gas in pollution monitoring, etc. Can be done.

As shown in FIG. 1, the diaphragm pump 1 of the present embodiment is a pump used in a state of being supported by a cover (supported portion) 90 and housed in the cover 90. As shown in FIG. 2, the diaphragm pump 1 includes a frame 2, two oscillators 7 and 7 holding permanent magnets (magnets) 6A and 6B, an electromagnet 3 and both ends of the oscillators 7 and 7, respectively. Pump casing parts PCR1, PCL1, PCR2, PCL2 provided via diaphragms 8 and 8 connected to, a power supply circuit (control part) 60 (see FIG. 6), and an upper support part (support part) 70 (FIG. 6). 1), a lower support portion (support portion) 80 (see FIG. 1), a suction connection flow path (connection flow path) 83, and a discharge connection flow path (connection flow path) 85. ..

Returning to FIG. 1, the frame 2 has a bottomed box-shaped box-shaped case portion 21 and a lid-shaped case portion 23 that covers the opening of the box-shaped case portion 21. The box-shaped case portion 21 and the lid-shaped case portion 23 may be formed of a magnetic material that is excellent from the viewpoint of preventing electromagnetic waves. The frame 2 houses at least the electromagnet 3, the vibrator 7, the pump casing portions PCR1, PCL1, PCR2, PCL2, and the power supply circuit 60. The lid-shaped case portion 23 will be described in detail later.

The electromagnet 3 shown in FIG. 2 reciprocates the vibrator 7 in the X-axis direction by attracting and repelling the permanent magnets 6A and 6B provided on the vibrator 7. As shown in FIG. 3, the electromagnet 3 is arranged to face each of the two vibrators 7 and 7. The electromagnet 3 is driven by, for example, an alternating current, and the energization is controlled by the power supply circuit 60. In the electromagnet 3, an exciting coil is formed by winding an electric wire around an iron core (core). The polarity of the exciting coil changes depending on the phase of the alternating current flowing through the coil.

The electromagnet 3 of the present embodiment is formed of a first electromagnet 3A, a second electromagnet 3B, and a central electromagnet 3C. The magnetic paths of the first electromagnet 3A and the second electromagnet 3B are configured to include a substantially C-type iron core 9, and the magnetic paths of the central electromagnet 3C are configured to include an I-type iron core 10. The first electromagnet 3A, the second electromagnet 3B, and the central electromagnet 3C are formed by winding the coil 12 around both ends of the substantially C-type iron core 9 and the I-type iron core 10. The I-type iron core 10 is arranged between the open facing surfaces 9a and 9b of the substantially C-type iron core 9. The I-type iron core 10 and the substantially C-type iron core 9 are not mechanically joined, and the vibrators 7 and 7 are provided so as to be movable in the X-axis direction between the I-type iron core 10 and the substantially C-type iron core 9. Has been done.

The diaphragm pump 1 has no coil wound around the I-shaped iron core 10 of the central electromagnet 3C as shown in FIG. 4 (a), and is an abbreviation for the electromagnet as shown in FIG. 4 (b). A coil is not wound around both ends of the C-shaped iron core 9. Further, the substantially C-shaped iron core 9 may be integrally formed, or may be formed by combining two or more members. For example, as shown in FIG. 4 (d), two substantially C-shaped iron cores 9x and 9y having a shape in which one end of a substantially U-shape (U-shape) is elongated can be brought into contact with each other, or in FIG. 4 (d). ), Two substantially C-shaped iron cores 9x, 9y having a shape in which one end of a substantially U-shape (U-shape) is elongated may be abutted against each other.

As shown in FIG. 2, each of the vibrators 7 and 7 has a main body 7A extending in the X-axis direction, two permanent magnets 6A and 6B fixed to the main body 7A, and screws at both ends in the X-axis direction. It has diaphragms 8 and 8 fixed by 7B and 7B. The vibrators 7 and 7 are arranged in the Y-axis direction orthogonal to (crossing) the X-axis. In this embodiment, the two vibrators 7 and 7 are arranged in parallel in the Y-axis direction. Diaphragms 8 and 8 that airtightly block the internal space of the pump casing portions PCR1 and PCL1 are fixed to both ends of one of the vibrators 7, respectively. Diaphragms 8 and 8 that airtightly block the internal space of the pump casing portions PCR2 and PCL2 are fixed to both ends of the other vibrator 7. As shown in FIG. 5, the winding frame 3D of the central electromagnet 3C is provided with unevenness 3E. The vibrators 7 and 7 are mounted and fixed to the unevenness 3E with a structure in which the pump casing portions PCR1 and PCL1 and the pump casing portions PCR2 and PCL2 are bridged.

As shown in FIG. 2, each of the pump casing portions PCR1 (PCL1, PCR2, PCL2) has the compression chamber C1 (C2, C3, C4), the suction chamber SR, the discharge chamber DR, and the discharge chamber DR as the internal spaces. Is formed. The compression chambers C1 (C2, C3, C4) and the suction chamber SR communicate with each other via a check valve NR that prevents air or the like from flowing from the compression chamber C1 to the suction chamber SR. The compression chambers C1 (C2, C3, C4) and the discharge chamber DR communicate with each other via a check valve NR that prevents air or the like from flowing from the discharge chamber DR to the compression chamber C1.

As shown in FIG. 5, suction nozzles S1a (S1b, S2a, S2b) are provided in each of the suction chambers SR of the pump casing portion PCR1 (PCL1, PCR2, PCL2), and the pump casing portion PCR1 (PCL1, PCR2) is provided. , PCL2), each of the discharge chambers DR is provided with discharge nozzles D1a (D1b, D2a, D2b). The suction nozzle S1a (S1b, S2a, S2b) and the suction flow path 97A provided on the cover 90 communicate with each other. The discharge nozzle D1a (D1b, D2a, D2b) and the discharge flow path 97B provided on the cover 90 communicate with each other. These communication configurations will be described in detail later.

The diaphragms 8 and 8 are made of an elastic material such as polyethylene propylene rubber (EPDM), fluororubber, silicon (Si), natural rubber (NR), or nitrile rubber (NBR), and have a circular plate shape. Is formed in.

As shown in FIG. 6, the power supply circuit 60 is housed in the frame 2. The power supply circuit 60 controls energization of the electromagnet 3 (coil 12), and one (at least one) oscillator 7 and the other of the two (plurality) oscillators 7 and 7 arranged in the Y-axis direction. The vibrator 7 is reciprocated so as to move in opposite directions.

Next, the lid-shaped case portion 23 that covers the opening of the box-shaped case portion 21 that houses the electromagnet 3, the vibrator 7, the pump casing portions PCR1, PCL1, PCR2, PCL2, and the power supply circuit 60 will be described. .. As shown in FIG. 1, the lid-shaped case portion 23 has a partition portion 25 (see FIG. 7) and a base portion 27 (see FIG. 8).

As shown in FIG. 7, the partition portion 25 covers the opening of the box-shaped case portion 21 and is arranged in contact with the box-shaped case portion 21. The partition portion 25 is a plate-shaped plate-shaped portion 26a, a first wall portion 26b that is erected along the peripheral edge of the plate-shaped portion 26a and is in contact with the base portion 27 (see FIG. 8), and a first wall portion. The partition portion 25 and the base portion 27 are fixed to the box-shaped case portion 21 which is formed on the plate-shaped portion 26a and the second wall portion 26c which is erected from the plate-shaped portion 26a inside the 26b and is in contact with the base portion 27. Holes 25c for bolts, holes 25e, 25i, 25f, 25j for inserting discharge nozzles D1a, D1b, D2a, D2b, and holes 25d, 25h for inserting suction nozzles S1a, S1b, S2a, S2b. , 25g, 25k, a hole 25m formed in the plate-shaped portion 26a, and a hole 25a formed in the plate-shaped portion 26a and communicating with the suction connection flow path 83.

As shown in FIG. 8, the base portion 27 is formed in a plate-shaped portion 28 and a plate-shaped portion 28, and a bolt hole portion 27a for fixing the partition portion 25 and the base portion 27 to the box-shaped case portion 21. And a hole portion 27b formed in the plate-shaped portion 28 and communicating with the suction connection flow path 83, and a hole portion 27c formed in the plate-shaped portion 28 and communicating with the discharge connection flow path 85. There is. Note that FIG. 8 shows a lower support portion 80 that is arranged in contact with each other.

By fixing the partition portion 25 and the base portion 27 to the box-shaped case portion 21, an internal space S3 (see FIGS. 2 and 9) surrounded by the box-shaped case portion 21 and the partition portion 25 is formed, and is plate-shaped. An internal space S1 (see FIGS. 7 and 9) surrounded by the portion 26a, the second wall portion 26c, and the plate-shaped portion 28 is formed, and the plate-shaped portion 26a, the first wall portion 26b, and the second wall portion 26c are formed. An internal space S2 (see FIGS. 7 and 9) surrounded by the plate-shaped portion 28 is formed.

The cover 90 shown in FIG. 1 supports the diaphragm pump 1 via the upper support portion 70 and the lower support portion 80, and houses the diaphragm pump 1. The cover 90 can be formed from a magnetic material. The cover 90 has a bottomed box-shaped upper cover 91 and a plate-shaped lower cover 95 that covers the opening of the upper cover 91. The lower cover 95 is formed with a suction flow path 97A and a discharge flow path 97B communicating with the compression chambers C1 (C2, C3, C4) formed in each of the pump casing portions PCR1 (PCL1, PCR2, PCL2). .. In the present embodiment, the upper support portion 70 is interposed between the frame 2 and the upper cover 91, and the lower support portion 80, the suction connection flow path 83, and the discharge connection flow are interposed between the frame 2 and the lower cover 95. The road 85 is interposed.

The upper support portion 70 and the lower support portion 80 are members for supporting the frame 2 with respect to the cover 90, and are, for example, polyethylene propylene rubber (EPDM), fluororubber, silicon (Si), natural rubber (NR), and the like. Alternatively, it is formed from an elastic material such as nitrile rubber (NBR). The upper support portion 70 is formed in a square columnar shape. The lower support portion 80 is formed in an annular shape, and is arranged so as to interpolate the suction connection flow path 83 and the discharge connection flow path 85.

As shown in FIG. 10A, the upper support portion 70 has a locking portion 71 that is locked to a locked portion 91a (see FIG. 1) formed on the upper cover 91. The locked portion 91a is formed in a concave shape, and is formed so that the planar shape seen from the Z-axis direction is substantially the same as the planar shape seen from the Z-axis direction of the upper support portion 70. That is, the locked portion 91a is formed so that the upper support portion 70 can be fitted. As shown in FIG. 8, the lower support portion 80 has a locking portion 81a that is locked to a locked portion 95a (see FIG. 1) formed on the lower cover 95. The locked portion 95a is formed in a concave shape, and is formed so that the planar shape seen from the Z-axis direction is substantially the same as the planar shape seen from the Z-axis direction of the lower support portion 80. That is, the locked portion 91a is formed so that the lower support portion 80 can be fitted.

As shown in FIG. 1, the upper support portion 70 is provided on the rotation axis A of the rotational moment extending in the Z-axis direction generated by the reciprocating motion of the two vibrators 7 and 7. Further, as shown in FIG. 8, the lower support portion 80 is provided on the rotation axis A of the rotational moment extending in the Z-axis direction generated by the reciprocating motion of the two vibrators 7 and 7. In the present embodiment, "the upper support portion 70 and the lower support portion 80 are provided on the rotation axis A" means the inside of the outer shape of the upper support portion 70 and the lower support portion 80 as viewed from the Z-axis direction. It means that a part of the portion is located on the rotation axis A, and does not ask whether the upper support portion 70 and the lower support portion 80 are solid or hollow. The upper support portion 70 of the present embodiment shows an example of being solidly formed, and the lower support portion 80 is an example of being formed hollow.

Further, in the present embodiment, the upper support portion 70 and the lower support portion 80 are arranged between the center-of-gravity positions CG1 and CG2 of the respective vibrators 7 and 7, respectively. In this case as well, it means that a part of the inner portion of the outer shape of the upper support portion 70 and the lower support portion 80 as viewed from the Z-axis direction is located between the center of gravity positions CG1 and CG2.

The suction connection flow path 83 includes a hole (suction port) 25a that communicates with the compression chamber C1 (C2, C3, C4) formed including the diaphragm 8 and a suction flow path 97A formed in the lower cover 95. , Is a conduit that connects. The discharge connection flow path 85 includes a hole (discharge port) 27a that communicates with the compression chamber C1 (C2, C3, C4) formed including the diaphragm 8 and a discharge flow path 97B formed in the lower cover 95. , Is a conduit that connects. The suction connection flow path 83 and the discharge connection flow path 85 have elasticity of, for example, polyethylene propylene rubber (EPDM), fluororubber, silicon (Si), natural rubber (NR), or nitrile rubber (NBR). It is made of a certain material.

As shown in FIGS. 2 and 8, the suction connection flow path 83 and the discharge connection flow path 85 are arranged in the range AR1 in which the radius r centered on the rotation axis A is within 20 mm. Further, the suction connection flow path 83 and the discharge connection flow path 85 of the present embodiment have a width w within 40 mm centered on a straight line CL connecting the center-of-gravity positions CG1 and CG2 of the respective vibrators 7 and 7. It is located in AR2. Two suction connection channels 83 and two discharge connection channels 85 are provided as connection channels, and these four connection channels are arranged point-symmetrically about the rotation axis A. ing.

As shown in FIG. 9, the suction connection flow path 83 and the discharge connection flow path 85 are arranged in the hollow portion 80a of the lower support portion 80. The hollow portion 80a of the lower support portion 80 has a hole for inserting the suction connection flow path 83 and the discharge connection flow path 85, and is provided with a stretchable rubber member 89. The rubber member 89 airtightly shields the frame 2 side from the lower cover 95 side.

Next, the operation of the diaphragm pump 1 will be described. As shown in FIG. 6, the vibrator 7 is fixed to the magnetic poles of the first electromagnet 3A, the second electromagnet 3B, and the central electromagnet 3C excited by the application of an electric current to the vibrators 7 and 7, respectively. The permanent magnets 6A and 6B alternately attract and repel each other to reciprocate. In the present embodiment, the power supply circuit 60 controls the energization of the electromagnet 3 (coil 12), and one oscillator 7 of the two oscillators 7 and 7 arranged in the Y-axis direction and the other oscillator 7 Are moved in opposite directions. Specifically, the polarities of the permanent magnets 6A and 6B fixed to the vibrator 7 provided between the first electromagnet 3A and the central electromagnet 3C by the application control of the power supply circuit 60, and the central electromagnet 3C and the second electromagnet 3C. The polarities of the permanent magnets 6A and 6B fixed to the vibrator 7 provided between the 3B and the 3B are alternately reversed. As a result, the vibrators 7 and 7 are moved in opposite directions (arrow X1 direction and arrow X2 direction) in the direction perpendicular to the facing surfaces of the substantially C-shaped iron cores 9 of the first electromagnet 3A and the second electromagnet 3B (active drive). Can be made to.

The diaphragms 8 and 8 supported by the pump casing portions PCR1 and PCL1 vibrate with the reciprocating motion of the vibrator 7, and the compression chambers C1 and C2 (see FIG. 2) are expanded and contracted. As a result, a fluid such as air is sucked into the compression chambers C1 and C2 via the suction nozzles S1a and S1b, and is discharged from the compression chambers C1 and C2 via the discharge nozzles D1a and D1b.

The suction of the fluid into the compression chambers C1 and C2 is performed through the suction flow path 97A provided in the lower cover 95. That is, as shown in FIG. 9, the fluid sucked from the suction flow path 97A flows into the internal space S3 via the suction connection flow path 83. Next, the fluid flows from the internal space S3 into the internal space S2 via the hole 25 m. The fluid flowing into the internal space S2 is sucked into the compression chambers C1 and C2 via the suction nozzles S1a and S1b. The fluid is discharged from the compression chambers C1 and C2 to the outside through the discharge flow path 97B provided in the lower cover 95. That is, the fluid discharged from the compression chambers C1 and C2 to the internal space S1 via the discharge nozzles D1a and D1b flows into the discharge connection flow path 85 through the hole 27c. The fluid that has flowed into the discharge connection flow path 85 flows into the discharge flow path 97B and is discharged to the outside of the lower cover 95.

Although not shown, similarly, the diaphragms 8 and 8 supported by the pump casing portions PCR2 and PCL2 vibrate with the reciprocating motion of the vibrator 7, and the compression chambers C3 and C4 (see FIG. 2) are expanded and contracted. NS. As a result, a fluid such as air is sucked into the compression chambers C3 and C4 via the suction nozzles S2a and S2b, and is discharged from the compression chambers C3 and C4 via the discharge nozzles D2a and D2b.

The suction of the fluid into the compression chambers C3 and C4 is performed through the suction flow path 97A provided in the lower cover 95. That is, the fluid sucked from the suction flow path 97A flows into the internal space S3 via the suction connection flow path 83. The fluid that has flowed into the internal space S3 flows from the internal space S3 into the internal space S2 via the hole 25 m. The fluid flowing into the internal space S2 is sucked into the compression chambers C3 and C4 via the suction nozzles S2a and S2b. The fluid is discharged from the compression chambers C3 and C4 to the outside through the discharge flow path 97B provided in the lower cover 95. That is, the fluid discharged from the compression chambers C1 and C2 to the internal space S1 via the discharge nozzles D2a and D2b flows into the discharge connection flow path 85 through the hole 27c. The fluid that has flowed into the discharge connection flow path 85 flows into the discharge flow path 97B and is discharged to the outside of the lower cover 95.

Next, the operation and effect of the diaphragm pump 1 of the above embodiment will be described. As shown in FIG. 2, in the diaphragm pump 1 of the present embodiment, the two vibrators 7 and 7 are arranged in the Y-axis direction orthogonal to the X-axis direction in which the vibrator 7 extends, so that the frame 2 is enlarged. Can be suppressed. Further, in the diaphragm pump 1 of the present embodiment, since one of the two vibrators 7 and 7 and the other vibrator 7 are driven so as to move in opposite directions, the vibrators 7 and 7 are driven. The vibration in the X-axis direction generated by the reciprocating movement of the above can be reduced by canceling some of them with each other. On the other hand, in the diaphragm pump 1 having the present configuration in which the two transducers 7 and 7 arranged in parallel are moved in opposite directions, rotation with the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction as the rotation axis A. A moment is generated, and vibration due to the rotational moment is generated in the upper support portion 70 and the lower support portion 80 that support the frame 2. Therefore, as shown in FIG. 1, in the diaphragm pump 1 of the present embodiment, the upper support portion 70 and the lower support portion 80 are provided on the rotation shaft A. As a result, vibration of the upper support portion 70 and the lower support portion 80 in the rotational direction due to the rotational moment can be reduced. As a result, even when the two vibrators 7 and 7 are provided, the vibration generated by the reciprocating motion of the vibrators 7 and 7 can be reduced while suppressing the increase in size of the frame 2.

In the above embodiment, as shown in FIGS. 1 and 2, the upper support portion 70 and the lower support portion 80 are rotated by arranging the upper support portion 70 and the lower support portion 80 between the center-of-gravity positions CG1 and CG2 of the respective vibrators 7 and 7. The upper support portion 70 and the lower support portion 80 can be easily arranged at positions on the rotation axis A of the moment.

In the above embodiment, as shown in FIGS. 1 and 2, the suction connection flow path 83 and the discharge connection flow path 85 are arranged in the range AR1 in which the radius r about the rotation axis A is within 20 mm. Therefore, it is possible to suppress the vibration caused by the rotational moment from being transmitted to the suction connection flow path 83 and the discharge connection flow path 85. Further, the suction connection flow path 83 and the discharge connection flow path 85 are arranged in a region AR2 having a width w within 40 mm centered on a straight line CL connecting the center-of-gravity positions CG1 and CG2 of the respective vibrators 7 and 7. Therefore, it is possible to suppress the vibration caused by the rotational moment from being transmitted to the suction connection flow path 83 and the discharge connection flow path 85.

In the above embodiment, as shown in FIG. 1, since the cover 90 that supports the frame 2 and accommodates the frame 2 is further provided, the vibration transmitted to the cover 90 via the upper support portion 70 and the lower support portion 80. Can be suppressed.

In the above embodiment, as shown in FIG. 1, an upper support portion 70 is interposed between the frame 2 and the upper cover 91, and a lower support portion 80 and a suction portion are provided between the frame 2 and the lower cover 95. The connection flow path 83 and the discharge connection flow path 85 are interposed. Therefore, the frame 2 can be firmly fixed to the upper cover 91 and the lower cover 95. Further, the vibration transmitted to the upper cover 91 via the upper support portion 70 can be suppressed, and is transmitted to the lower cover 95 via the lower support portion 80, the suction connection flow path 83, and the discharge connection flow path 85. Vibration can be suppressed.

In the above embodiment, as shown in FIG. 1, the upper support portion 70 and the lower support portion 80 are locked to the locked portions 91a and 95a formed on the upper cover 91 and the lower cover 95, respectively. It has locking portions 71 and 81a. As a result, the relative positional deviation of the frame 2 with respect to the upper cover 91 and the lower cover 95 can be suppressed due to the rotational vibration caused by the rotational moment. As a result, it is possible to prevent the frame 2 from coming into contact with the upper cover 91 and the lower cover 95, respectively.

In the above embodiment, as shown in FIG. 5, since the magnetic path of the electromagnet 3 has the above-mentioned configuration including the substantially C-type iron core 9 and the I-type iron core 10, the assembly workability is improved.

Although one embodiment has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the invention.

In the above embodiment, an example in which two suction connection flow paths 83 and two discharge connection flow paths 85 are provided as connection flow paths has been described, but the present invention is not limited to this. For example, as shown in FIG. 11A, as a connecting flow path, a first pipeline 183 forming a circular first flow path 183a and an annular second conduit formed so as to surround the first pipeline 183. It may be a double pipe composed of a second pipe 181 forming the flow path 181a. The first line 183 and the second line 181 are made of an elastic material such as polyethylene propylene rubber (EPDM), fluorine rubber, silicon (Si), natural rubber (NR), or nitrile rubber (NBR). It is formed. The first pipeline 183 and the second pipeline 181 also have a function as a support portion for supporting the frame 2 on the cover 90. According to this modified example, the first pipeline 183 and the second pipeline 181 can be arranged close to the rotation axis A.

In the above-described embodiment or modified example, as the upper support portion 70, a prism member as shown in FIG. 10 (a) has been described as an example, but for example, a cross shape as shown in FIG. 10 (b) has been described. It may be a member of. The upper support portion 70A has a locking portion 72A that is locked to a locked portion formed on the upper cover 91. If the upper support portion 70A is arranged, the relative positional deviation of the frame 2 with respect to the upper cover 91 can be suppressed due to the rotational vibration caused by the rotational moment generated by the reciprocating motion of the two vibrators 7 and 7. .. As a result, it is possible to prevent the frame 2 and the upper cover 91 from coming into contact with each other.

In the above embodiment or modified example, as shown in FIG. 1, an upper support portion 70 having only a function as a support portion is interposed between the frame 2 and the upper cover 91, and the frame 2 and the lower cover 95 are interposed. An example is given in which a lower support portion 80 having a function as a support portion and a suction connection flow path 83 and a discharge connection flow path 85 having a function as a connection flow path are interposed between the two. As described above, for example, both the support portion and the connection flow path may be interposed between the frame 2 and the upper cover 91, and between the frame 2 and the lower cover 95.

For example, a support portion 170A having a function as a support portion and a function as a connection flow path as shown in FIG. 11B may be arranged in place of the upper support portion 70 and the lower support portion 80. The support portion 170A has a configuration in which a hollow portion 175a as a flow path is provided with respect to the upper support portion 70 of the above embodiment. Further, the support portion 170B having a function as a support portion and a function as a connection flow path as shown in FIG. 11C may be arranged in place of the upper support portion 70 and the lower support portion 80. The support portion 170B has the same shape as the lower support portion 80 of the above embodiment, except that the hollow portion 175b is used as a flow path. By appropriately using the support portions having the hollow portions 175a and 175b as the flow paths as shown in FIGS. 11B and 11C, the direction in which the upper cover 91 is arranged and the lower cover 95 are arranged. It becomes possible to provide a suction flow path and a discharge flow path in both directions. Further, since the support portion having the hollow portions 175a and 175b is formed integrally with the connection flow path, the number of parts can be reduced and the assembly workability is facilitated.

In the above-described embodiment or modified example, an example in which both the suction connection flow path 83 and the discharge connection flow path 85 are provided as the connection flow paths has been described. The nozzle S1a (S1b, S2a, S2b) may be configured to directly suck the fluid around it.

In the above-described embodiment or modification, the diaphragm pump 1 that can be accommodated in the cover 90 while being supported by the cover 90 has been described as an example, but the upper support portion 70 and the lower support portion 80 as described above, or the modification It may be a diaphragm pump equipped with a cover 90 that supports the frame 2 by the upper support portions 70A and the support portions 180, 170A, 170B as described as an example.

The electromagnet 3 of the above embodiment or modification is formed of a first electromagnet 3A, a second electromagnet 3B and a central electromagnet 3C, and the magnetic paths of the first electromagnet 3A and the second electromagnet 3B include a substantially C-shaped iron core 9. Although the magnetic path of the central electromagnet 3C is described by giving an example including the I-type iron core 10, the present invention does not ask the shape of the iron core and the arrangement position of the coil. For example, as shown in FIG. 12, an electromagnet 3F formed by an E-type iron core 11 and a coil 12 incorporated in two recesses of the E-type iron core 11 and an I-type iron core 10A around which the coil 12 is wound. , The electromagnets 3G arranged on both sides of the electromagnet 3G formed by the I-type iron core 10B in which the coil 12 is not wound are arranged so as to face each other, and the vibrator 7 is placed between the pair of electromagnets 3F and 3G. It may be configured to be arranged. In this modified example, two sets of a pair of electromagnets 3F and 3G are provided, but the electromagnet 3G in the middle shown in FIG. 12 is configured to be shared by these two sets. Even in this case, by controlling the energization of the electromagnet 3 (coil 12) by the power supply circuit 60, one vibrator 7 and the other of the two vibrators 7 and 7 arranged in the Y-axis direction are controlled. The vibrator 7 can be moved in opposite directions.

Instead of the upper support portions 70, 70A and the like of the above embodiment or the modified example, the upper support portion 272 shown below may be adopted. As shown in FIG. 13, the upper support portion 272 has a main body portion 272a and a mounting portion 272b. The main body portion 272a and the mounting portion 272b are formed of an elastic material such as polyethylene propylene rubber (EPDM), fluororubber, silicon (Si), natural rubber (NR), or nitrile rubber (NBR). .. The mounting portion 272b is fixed to the upper cover 91 by being inserted into the hole portion 91c formed in the upper cover 91 in a deformed state, and is inserted into the hole portion 2c formed in the frame 2 to form the frame 2. Is fixed to.

With the above configuration, the frame 2 is suspended from the upper cover 91, and the load in the Z-axis direction (third direction / vertical direction) of the diaphragm pump 1 can be distributed to the upper cover 91. Further, by arranging the upper support portion 272 closer to the center of the rotation axis A than the lower support portion, the upper support portion 272 suppresses vibration while receiving a load, and the load applied to the lower support portion is reduced. Vibration is suppressed. For example, the upper support portion 272 may be arranged point-symmetrically in a range of a radius of 10 mm from the center of the rotation axis A, and the lower support portion may be arranged point-symmetrically in a range of a radius of 20 mm from the center of the rotation axis A. As a result, as shown in FIG. 12, the vibration of the lower support is suppressed and the upper support is suppressed as compared with the upper support portion 272 which does not have the mounting portion 272b inserted into the hole portion 91c formed in the upper cover 91. Since the portion 272 is arranged close to the rotation axis A, the vibration of the upper support portion 272 can also be suppressed.

Such a configuration is particularly effective in a configuration in which the upper support portion is arranged between the upper cover 91 and the frame 2, and the lower support portion and the connection flow path are arranged between the lower cover 95 and the frame 2. .. That is, the upper support portion 272 in which the connection flow path is not arranged can receive all the load of the diaphragm pump 1, and the lower support portion is arranged at a position where the radius becomes larger than the rotation axis A because the connection flow path is formed. A configuration capable of supporting a force other than the rotational vibration (that is, the load of the diaphragm pump 1) without vibration has an extremely high effect of suppressing the rotational vibration.

Further, also in this case, as in the above embodiment or the modified example, the locked portion 91b which is arranged in contact with at least a part of the outer shape of the upper support portion 272 when viewed from the rotation axis A direction may be formed. Also in this case, the relative positional deviation of the frame 2 with respect to the upper cover 91 can be suppressed by the rotational vibration caused by the rotational moment generated by the reciprocating motion of the vibrator. As a result, it is possible to prevent the frame 2 and the upper cover 91 from coming into contact with each other.

In the above-described embodiment or modification, the example in which two vibrators 7 and 7 are arranged has been described, but three or more vibrators may be arranged. In this case, the power supply circuit 60 moves the electromagnet 3 ( The energization of the coil 12) may be controlled.

The various embodiments and modifications described above may be combined in various ways without departing from the spirit of the present invention.

1 ... Electromagnetic vibration type diaphragm pump, 2 ... Frame, 3 ... Electromagnet, 6A, 6B ... Permanent magnet (magnet), 7 ... Oscillator, 8, 8 ... Diaphragm, 9 ... Approximately C-shaped iron core 10, 10A, 10B ... I-type iron core, 12 ... coil, 21 ... box-shaped case, 23 ... lid-shaped case, 25 ... partition, 27 ... base, 60 ... power supply circuit (control), 70 ... upper support (support) , 71, 81a ... Locking part, 80 ... Lower support part (support part), 83 ... Suction connection flow path (connection flow path), 85 ... Discharge connection flow path (connection flow path), 90 ... Cover, 91 ... Upper cover, 95 ... Lower cover, 91a, 95a ... Locked portion, 181 ... Second pipeline, 183 ... First pipeline, A ... Rotating shaft, C1, C2, C3, C4 ... Compression chamber, CG1, CG2 ... Center of gravity position, PCR1, PCL1, PCR2, PCL2 ... Pump casing.

Claims (15)

An electromagnetic vibration type diaphragm pump that can be accommodated in the cover while being supported by the cover.
An oscillator that extends in the first direction, has a magnet fixed, and has a diaphragm at at least one end in the first direction.
An electromagnet that reciprocates the vibrator in the first direction by attracting and repelling the magnet.
By controlling the energization of the electromagnet, at least one of the plurality of oscillators arranged in the second direction intersecting the first direction and the other oscillator are moved in opposite directions to each other. Control unit and
At least a frame that houses the vibrator and the electromagnet,
A support portion for supporting the frame on the cover is provided.
The support portion extends in the first direction and the third direction intersecting the second direction, and is provided on the rotation axis of the rotational moment generated by the reciprocating motion of the plurality of vibrators. Type diaphragm pump. Two of the oscillators are arranged,
The electromagnetic vibration type diaphragm pump according to claim 1, wherein the support portion is arranged between the positions of the centers of gravity of the respective vibrators. An electromagnetic vibration type diaphragm pump that can be accommodated in the cover while being supported by the cover.
Two oscillators that extend in the first direction and have a magnet fixed and a diaphragm at at least one end in the first direction.
An electromagnet that reciprocates each of the vibrators in the first direction by attracting and repelling the magnet.
A control unit that controls energization of the electromagnet and moves two vibrators arranged in the second direction intersecting the first direction in opposite directions.
A frame accommodating at least two oscillators and an electromagnet,
A support portion for supporting the frame on the cover is provided.
The support portion is an electromagnetic vibration type diaphragm pump arranged between the positions of the centers of gravity of the respective vibrators. Further, a connecting flow path for connecting at least one of a suction port and a discharge port formed in the frame and communicating with the compression chamber formed including the diaphragm and a flow path formed in the cover is provided.
The electromagnetic vibration according to claim 1 or 2 , wherein the connection flow path is arranged in a range within a radius of 20 mm centered on the rotation axis or a region having a width within 40 mm about a straight line connecting the positions of the centers of gravity. Type diaphragm pump. A plurality of the connection flow paths are provided.
The electromagnetic vibration type diaphragm pump according to claim 4, wherein the plurality of connection flow paths are arranged point-symmetrically about the rotation axis. The electromagnetic vibration type diaphragm pump according to claim 4 or 5, wherein the support portion is integrally formed with the connection flow path. The electromagnetic vibration type diaphragm pump according to claim 6, wherein the connecting flow path is a double pipe including a circular first flow path and an annular second flow path arranged so as to surround the first flow path. The electromagnetic vibration type diaphragm pump according to any one of claims 4 to 6, wherein only a flow path connecting the discharge port and the flow path formed on the cover is formed as the connection flow path. The electromagnetic vibration type diaphragm pump according to any one of claims 1 to 8, further comprising the cover for supporting the frame and accommodating the frame. Further provided with the cover for supporting the frame and accommodating the frame.
The cover has a bottomed box-shaped upper cover and a plate-shaped lower cover that covers the opening of the upper cover.
The support portion is interposed between the frame and the upper cover.
The electromagnetic vibration type diaphragm pump according to any one of claims 4 to 8, wherein the support portion and the connection flow path are interposed between the frame and the lower cover. Further provided with the cover for supporting the frame and accommodating the frame.
The cover has a bottomed box-shaped upper cover and a plate-shaped lower cover that covers the opening of the upper cover.
The electromagnetic wave according to any one of claims 4 to 8, wherein the support portion and the connection flow path are interposed between the frame and the upper cover and between the frame and the lower cover. Vibration type diaphragm pump. The electromagnetic vibration type diaphragm pump according to any one of claims 1 to 11, wherein the support portion has a locking portion that is locked to a locked portion formed on the cover. The magnetic path of the electromagnet is composed of a substantially C-type iron core and an I-type iron core.
The I-type iron core is arranged between the open facing surfaces of the substantially C-type iron core, and the I-type iron core is arranged.
A coil is wound around both ends of the substantially C-shaped iron core and the I-shaped iron core to form first and second electromagnets and a central electromagnet.
Claims 1 to 1, wherein the I-type iron core and the substantially C-type iron core are not mechanically joined, and the vibrator is provided so as to be movable between the I-type iron core and the substantially C-type iron core. The electromagnetic vibration type diaphragm pump according to any one of No. 12. An oscillator that extends in the first direction, has a magnet fixed, and has a diaphragm at at least one end in the first direction.
An electromagnet that reciprocates the vibrator in the first direction by attracting and repelling the magnet.
A control unit that controls energization of the electromagnet to move at least one of a plurality of oscillators arranged in a second direction intersecting the first direction in a direction opposite to that of the other oscillators. ,
A method for fixing an electromagnetic vibration type diaphragm pump, which fixes the electromagnetic vibration type diaphragm pump including at least the vibrator and a frame for accommodating the electromagnet to a supported portion.
A support portion is arranged on the rotation axis of the rotational moment generated by the reciprocating motion of the plurality of vibrators extending in the first direction and the third direction intersecting the second direction, and the support portion is arranged via the support portion. A method for fixing an electromagnetic vibration type diaphragm pump, in which the frame is fixed to the supported portion. Two oscillators that extend in the first direction and have a magnet fixed and a diaphragm at at least one end in the first direction.
An electromagnet that reciprocates each of the two vibrators in the first direction by attracting and repelling the magnet.
By controlling the energization of the electromagnet, and a control unit that moves in the opposite direction to the two transducers arranged in a second direction crossing the first direction to each other physician,
A method for fixing an electromagnetic vibration type diaphragm pump, which fixes an electromagnetic vibration type diaphragm pump including at least the two vibrators and a frame for accommodating the electromagnet to a supported portion.
The two supporting portions between each centroid position location of the vibrator is disposed, via the supporting portion for securing the frame to the supported portion, the method of fixing the electromagnetic vibrational diaphragm pump.

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