JP6543325B2 - Electromagnetic vibration type diaphragm pump and electromagnetic vibration type diaphragm pump system - Google Patents

Description

  The present invention relates to an electromagnetic vibrating diaphragm pump and an electromagnetic vibrating diaphragm pump system.

  A vibrator having a magnet is vibrated by alternating current drive of an electromagnet, and a diaphragm fixed to both ends of the vibrator is vibrated to suck and discharge a fluid such as gas or liquid, for example, an electromagnetic vibration type diaphragm pump It has been known. For example, in Patent Document 1, a vibrator to which a magnet made of a permanent magnet or the like is fixed, a diaphragm made of rubber or the like provided at both ends of the vibrator, and an electromagnet arranged to face the magnet An electromagnetic vibration type diaphragm pump is disclosed, which is contained in the inside of a housing.

JP 2012-225200 A

  In such an electromagnetic vibration type diaphragm pump, when the gap between the vibrator and the electromagnet is narrowed, the vibrator and the electromagnet may be in contact with each other, and the breakage or the pump performance may be deteriorated. For this reason, the thickness or material of the diaphragm is selected and arranged such that the gap between the vibrator and the electromagnet opposed to the vibrator becomes substantially constant. However, diaphragms selected in this way generally require a lot of energy for reciprocating movement through the diaphragm.

  Therefore, an object of the present invention is to provide an electromagnetic vibration type diaphragm pump and an electromagnetic vibration type diaphragm pump system excellent in energy efficiency.

  The electromagnetic vibration type diaphragm pump of the present invention comprises: a vibrator to which a magnet is fixed; an electromagnet which is provided to face the magnet of the vibrator and reciprocates the vibrator in a first direction; An electromagnetic vibration type diaphragm pump comprising a diaphragm provided at at least one end and a vibrator, an electromagnet and a housing for accommodating the diaphragm, the plate comprising a plate spring formed of a plate-like member for supporting the vibrator, The springs are arranged such that the thickness direction of the leaf spring coincides with the first direction, and when viewed from the first direction, the springs extend in a second direction orthogonal to the first direction and are arranged parallel to each other A pair of extending portions, a turn-back portion connecting one end of the pair of extending portions, and an end of the pair of extending portions opposite to one end of the one extending portion Provided in the vicinity, A fulcrum portion to be fixed, and a moving point portion provided in the vicinity of an end portion on the opposite side to one end portion of the other extending portion of the pair of extending portions and fixed to the vibrator The fulcrum portion and the movement point portion are disposed on a straight line in a direction orthogonal to the first direction and the second direction.

  Since the vibrator is supported by the plate spring, the electromagnetic vibration type diaphragm pump reduces the strength of the diaphragm as compared to the case where only the diaphragm has a function of restricting the movement in directions other than the reciprocating movement. It is possible, therefore, to reduce the energy in the case of causing the oscillator to reciprocate. Furthermore, in the electromagnetic vibration type diaphragm pump, the fulcrum portion fixed to the housing and the moving point portion fixed to the vibrator are disposed on a straight line in the direction orthogonal to the first direction and the second direction. Thus, the rotational moment generated at the fulcrum portion when the vibrator reciprocates decreases. As a result, it is possible to further reduce the energy in the case of making the oscillator exert a reciprocating motion. As a result of these, it is possible to provide an electromagnetic vibration type diaphragm pump excellent in energy efficiency. Here, “parallel”, “match”, and “straight on straight” are concepts including “substantially parallel”, “substantially match”, and “substantially on straight”. Also, “end” is a concept including “near end”.

  The plate spring uses the fulcrum as a fulcrum for the force acting in the first direction, and when the force in the first direction acts on the moving point, the pair of extending portions respectively in the first direction The deformation amounts of may be formed to be equal to each other. In the reciprocating motion of the vibrator, movement (motion) in the direction perpendicular to the first direction, which is the reciprocating motion direction, is suppressed in the reciprocating motion of the vibrator. Thereby, energy can be effectively converted to reciprocating motion in the first direction. As a result, it is possible to provide an electromagnetic vibration type diaphragm pump which is further excellent in energy efficiency.

  The electromagnetic vibration type diaphragm pump of the present invention comprises: a vibrator to which a magnet is fixed; an electromagnet which is provided to face the magnet of the vibrator and reciprocates the vibrator in a first direction; An electromagnetic vibration type diaphragm pump comprising a diaphragm provided at at least one end and a vibrator, an electromagnet and a housing for accommodating the diaphragm, the plate comprising a plate spring formed of a plate-like member for supporting the vibrator, The springs are arranged such that the thickness direction of the leaf spring coincides with the first direction, and when viewed from the first direction, the springs extend in a second direction orthogonal to the first direction and are arranged parallel to each other A pair of extending portions, a turn-back portion connecting one end of the pair of extending portions, and an end of the pair of extending portions opposite to one end of the one extending portion Fixed in the A fulcrum portion to be fixed, and a moving point portion provided at an end opposite to one end of the other extending portion of the pair of extending portions and fixed to the vibrator, The spring has a fulcrum portion as a fulcrum for a force acting in the first direction, and when a force in the first direction is exerted on the moving point portion, each of the pair of extending portions in the first direction The deformation amounts are formed to be equal to each other.

  Since the vibrator is supported by the plate spring, the electromagnetic vibration type diaphragm pump reduces the strength of the diaphragm as compared to the case where only the diaphragm has a function of restricting the movement in directions other than the reciprocating movement. It is possible, therefore, to reduce the energy in the case of causing the oscillator to reciprocate. Further, in the above-mentioned electromagnetic vibration type diaphragm pump, in the reciprocating motion of the vibrator, it is possible to suppress the motion (motion) in the direction orthogonal to the first direction which is the reciprocating motion direction. Thereby, energy can be effectively converted to reciprocating motion in the first direction. As a result of these, it is possible to provide an electromagnetic vibration type diaphragm pump excellent in energy efficiency. Here, “parallel”, “match”, and “equal” are concepts including “substantially parallel”, “substantially match”, and “approximately equal”.

  The vibrator and the electromagnet may be opposed to each other in a direction orthogonal to the first direction and the second direction. In the electromagnetic vibration type diaphragm pump of this configuration, the direction orthogonal to the first direction and the second direction can be made to coincide with the magnetic field direction.

  The shape of the leaf spring as viewed from the first direction may be line symmetrical with respect to the second direction. In this electromagnetic vibration type diaphragm pump, the amount of deformation in the first direction in the pair of extension portions becomes equal to each other when the force in the first direction acts on the moving point portion with the fulcrum portion as the fulcrum. A leaf spring can be easily formed.

  A plurality of leaf springs may be arranged in the first direction. In the electromagnetic vibration type diaphragm pump of this configuration, it is possible to further reduce the burden of the function of restricting the movement of the diaphragm in the direction other than the reciprocating movement.

  The electromagnetic vibration type diaphragm pump further includes a holding portion disposed between the adjacent plate springs and fixed to at least a part of each of the turning back portions, and the plurality of plate springs are held by the holding portions. Integrated. The electromagnetic vibration type diaphragm pump of this configuration can reduce the occurrence of abnormal vibration in the plate spring.

  The holder may be an elastic member. In this case, the occurrence of abnormal vibration in the plate spring can be more effectively reduced.

  The plurality of leaf springs may be disposed at the fulcrum portion and the moving point portion via a spacing holding member which holds the spacing therebetween. In the electromagnetic vibration type diaphragm pump of this configuration, contact between adjacent plate springs can be avoided.

  The fulcrum portion and the electromagnet may be disposed across the vibrator in the direction orthogonal to the first direction and the second direction. In the electromagnetic vibration type diaphragm pump of this configuration, it is possible to suppress problems such as resonance between the vibration generated at the fulcrum and the vibration generated at the electromagnet.

  The housing has a main body having an opening in one of the first direction and a direction orthogonal to the second direction, and a lid covering the opening, and is orthogonal to the first direction and the second direction The direction is vertical, the opening has an opening vertically above the housing, the plate spring, the vibrator and the lid are integrally configured as a vibration unit, and the lid is a plate The fulcrum of the spring may be fixed. Assembling a vibrator in which an electromagnet and a magnet are arranged is often difficult because it becomes an operation while receiving a magnetic force. In the electromagnetic vibration type diaphragm pump configured as described above, the diaphragm spring and vibrator of the vibration unit are inserted into the opening of the housing in which the electromagnet is assembled, and the diaphragm is a simple operation of fixing the lid to the housing. The pump can be assembled. As a result, it is possible to provide an electromagnetic vibration type diaphragm pump excellent in workability at the time of assembly.

  The fulcrum portion and the electromagnet may be disposed on the same side with respect to the vibrator in the direction orthogonal to the first direction and the second direction. In the electromagnetic vibration type diaphragm pump of this configuration, the generation position of the vibration generated at the fulcrum can be made close to the generation position of the vibration generated at the electromagnet. For this reason, the vibration point becomes close to the center of gravity, and it is possible to suppress that the region where the influence of the vibration occurs is spread over a wide range.

  The direction orthogonal to the first direction and the second direction is the vertical direction, and the electromagnet and the fulcrum may be disposed below the vibrator. In the electromagnetic vibration type diaphragm pump of this configuration, since the vibration source can be located below the housing, the stability during operation is superior to when the vibration source is above the housing. In particular, the effect is large in a diaphragm pump with a large output.

  The electromagnetic vibration type diaphragm pump includes an input portion for current provided to one of a motion point portion and a fulcrum portion, an output portion for current provided to the other of the motion point portion and the fulcrum portion, an input portion and an output portion of a plate spring And a determination unit that determines the presence or absence of damage to the leaf spring based on the presence or absence of detection of the current in the current detection unit. In the electromagnetic vibration type diaphragm pump of this configuration, since the presence or absence of damage to the plate spring can be determined by the simple configuration, the maintenance property is excellent. The “moving point portion” and the “fulcrum portion” referred to here are concepts including “near the moving point portion” and “near the fulcrum portion”.

  According to the present invention, an electromagnetic vibration type diaphragm pump excellent in energy efficiency can be provided.

It is a sectional view showing an electromagnetic vibration type fluid pump of a first embodiment. It is sectional drawing seen from the II-ii line of FIG. It is a top view which expands and shows the vibrator | oscillator support body of FIG. 1, a vibrator | oscillator, a diaphragm, and an electromagnet. It is a front view which expands and shows the vibrator | oscillator support body of FIG. 1, a vibrator | oscillator, a diaphragm, and an electromagnet. It is a side view which expands and shows the vibrator | oscillator support body of FIG. 1, a vibrator | oscillator, a diaphragm, and an electromagnet. It is a perspective view which expands and shows the vibrator | oscillator support body of FIG. 1, a vibrator | oscillator, a diaphragm, and an electromagnet. It is the top view which looked at the leaf spring at the time of deformation | transformation of FIG. 1 from upper direction. It is a top view expanding and showing a vibrator supporter, a vibrator, a diaphragm, and an electromagnet of a second embodiment. It is a side view expanding and showing a vibrator supporter, a vibrator, a diaphragm, and an electromagnet of a second embodiment. It is a perspective view which expands and shows the vibrator | oscillator support body of 2nd embodiment, a vibrator | oscillator, a diaphragm, and an electromagnet. It is a side view expanding and showing a vibrator supporter, a vibrator, a diaphragm, and an electromagnet concerning a modification. It is a functional block diagram showing functional composition of a diaphragm pump concerning a modification. It is a top view expanding and showing a vibrator supporter, a vibrator, and an electromagnet concerning a modification.

First Embodiment
Hereinafter, an electromagnetic vibration type diaphragm pump 1 (hereinafter, simply referred to as "diaphragm pump 1") according to the first embodiment will be described with reference to the drawings. In the description of the drawings, the same elements will be denoted by the same reference symbols, without redundant description. Hereinafter, as shown in FIG. 1, the extension direction (reciprocation direction) of the vibrator 4 is defined as the X-axis direction, and the extension direction of the plate spring 51 is defined as the Y-axis direction. As shown in 2, the first embodiment will be described by defining the direction (vertical direction) in which the magnets 4B and 4B and the electromagnet 3 face each other as the Z-axis direction. The X axis, the Y axis, and the Z axis constitute an orthogonal coordinate system orthogonal to one another.

  As shown in FIGS. 1 and 2, the diaphragm pump 1 includes an electromagnet 3, a vibrator 4, a diaphragm 5, a frame (casing) 10, a pump casing 30, and a vibrator support portion 50. Have.

  The electromagnet 3 is disposed to face the main surface of the flat plate member 4C of the vibrator 4. The electromagnet 3 is driven by, for example, an alternating current. The electromagnet 3 has an exciting coil formed by winding an electric wire around an iron core (core). In the exciting coil, the alternating current flows, and the polarity appearing in the core changes according to the phase of the alternating current. The pair of electromagnets 3 are formed to have opposite polarities to each other. The electromagnet 3 is fixed to the frame 10.

  The vibrator 4 is disposed to face the electromagnet 3 in a Z-axis direction (vertical direction) orthogonal to the X-axis direction (first direction) and the Y-axis direction (second direction). The vibrator 4 includes shaft members 4A and 4A extending in the X-axis direction, magnets 4B and 4B, a flat plate member 4C, and holding members 4D and 4D. The shaft members 4A, 4A are, for example, rod-like bodies made of nonmagnetic material. The magnets 4B and 4B are, for example, permanent magnets, and two magnets 4B and 4B are disposed so that an S pole and an N pole appear on one main surface of the flat plate member 4C. The flat plate member 4C is, for example, a plate made of a nonmagnetic material. The holding members 4D, 4D hold the diaphragm 5 described in detail later. The holding members 4D, 4D are circular plate members having an outer edge larger in size than the outer edge of the hole 5A.

  The diaphragms 5 are provided at both ends of the vibrator 4 in the X-axis direction. Specifically, the diaphragm 5 is fixed to the pump casing 30 in a state of being held by the holding members 4D, 4D. The diaphragm 5 is made of, for example, an elastic material such as polyethylene propylene rubber (EPDM) or fluorine rubber. The diaphragm 5 is an annular plate-like body having a hole 5A formed substantially in the center.

  The frame 10 is made of, for example, a metal such as aluminum or a resin such as polybutylene terephthalate resin (PBT resin), and is formed so as to be able to accommodate the electromagnet 3, the vibrator 4 and the diaphragm 5. The frame 10 has an opening 11A formed at the upper side, a main body 11 having openings 11B and 11B formed at both ends in the reciprocation direction of the vibrator 4, that is, the X-axis direction, and an opening 10A. And a lid 13 covering the The openings 11B and 11B are covered by a pump casing 30 which will be described in detail later. A flat plate 14 made of a metal material such as iron is in contact with the lid 13. The flat plate 14 is disposed mainly for the purpose of reinforcing the lid 13. The flat plate 14 may be disposed so as to cover the entire lid 13 in plan view, or may be disposed so as to cover a part of the lid 13.

  The pump casing 30 is made of, for example, a metal such as aluminum or a resin such as PBT resin, and includes a discharge pipe 48A, a discharge chamber 48, and a suction chamber 49. The pump casing 30 is connected to the frame 10 to form a compression chamber 47. Further, a suction valve 45 is disposed between the suction chamber 49 and the compression chamber 47. The suction valve 45 is a valve that opens when the pressure in the compression chamber 47 is lower than that in the suction chamber 49, and allows fluid to flow from the suction chamber 49 to the compression chamber 47 in one direction. The discharge valve 46 is disposed between the discharge chamber 48 and the compression chamber 47. The discharge valve 46 is a valve that opens when the pressure in the compression chamber 47 becomes higher than that in the discharge chamber 48, and allows fluid to flow from the compression chamber 47 to the discharge chamber 48 in one direction. That is, the fluid sucked through the suction pipe (not shown) by the diaphragm 5 vibrating by the reciprocating motion of the vibrator 4 enters the compression chamber 47 from the suction chamber 49 through the suction valve 45. Next, the fluid sucked into the compression chamber 47 enters the discharge chamber 48 from the compression chamber 47 through the discharge valve 46, and is discharged from the discharge chamber 48 to the outside through the discharge pipe 48A.

  The vibrator supporting portion 50 is configured to include a plurality of plate springs 51 formed of a plate-like member for supporting the vibrator 4. The first embodiment is characterized in that the vibrator 4 is not supported by only the diaphragm 5 but is supported by the vibrator supporting portion 50, that is, a plurality of leaf springs 51.

  As shown in FIG. 5, the plate spring 51 is a plate-like member made of a metal material such as stainless steel, for example, and having a uniform thickness as a whole. The leaf spring 51 extends in the Y axis direction (second direction) orthogonal to the thickness direction when viewed from the thickness direction of the leaf spring 51 (X axis direction orthogonal to the main surface of the leaf spring 51). There are a pair of extending portions 51A and 51B arranged in parallel (including approximately parallel), and a folded portion 51C connecting one end 51F of the pair of extending portions 51A and 51B to each other. doing. In other words, the plate spring 51 extends from the end 51D to the end 51F along the Y-axis direction, is folded back from the end 51F, and extends again from the end 51G to the end 51E in the Y-axis direction. It is formed of the extending portion 51A, the folded portion 51C, and the extending portion 51B. Furthermore, in other words, the plate spring 51 is formed in a U-shape when viewed in the thickness direction. The shape of the plate spring 51 viewed from the thickness direction may be, for example, a U-shape.

  The leaf spring 51 is further provided in the vicinity of an end 51D opposite to one end 51F of one of the extension parts 51A and 51B in the pair of extension parts 51A and 51B, and is fixed to the frame 10 FP, a moving point portion MP provided in the vicinity of an end portion 51E opposite to one end portion 51G of the other extending portion 51B of the pair of extending portions 51A and 51B and fixed to the vibrator 4 ,have. As shown in FIG. 7, the plate spring 51 has a fulcrum FP as a fulcrum, and extends a pair of force F acting on the moving point MP in the axial direction (X-axis direction) of the vibrator 4. The deformation amounts L1 and L2 in the axial direction of the vibrator 4 at the existing portions 51A and 51B are formed to be equal to each other. The fulcrum FP is provided on the end 51D side of the central position of the extension 51A in the Y-axis direction, and the movement point MP is on the end 51E side of the central position of the extension 51B in the Y-axis Provided in

  As described above, in the first embodiment, as shown in FIG. 5, a straight line BL extending in the Y-axis direction as viewed from the X-axis direction as a plate spring in which the deformation amounts L1 and L2 are equal to each other. A plate spring 51 formed so as to be line symmetrical with respect to is adopted. The plate spring 51 of the first embodiment is an example, and the deformation amounts L1 and L2 are equal to each other by appropriately combining, for example, the thickness of the plate-like member, the shape viewed from the thickness direction, and the material. A leaf spring may be used.

  As shown in FIG. 2, the plate spring 51 is fixed to the lid 13 of the frame 10 via the first fixing portion 15. The plate spring 51 with the fulcrum portion FP fixed to the first fixing portion 15 is arranged such that the thickness direction of the plate spring 51 matches the X-axis direction. In addition, a plurality of plate springs 51 are arranged in the X-axis direction. As shown in FIGS. 4 and 6, in the first embodiment, three plate springs 51 (a total of six plate springs 51) are disposed with the first fixing portion 15 interposed therebetween. The three plate springs 51 respectively disposed on both sides of the first fixing portion 15 in the X-axis direction maintain a distance between each other at the fulcrum portion FP, that is, at a portion fixed to the first fixing portion 15 One spacing member 57 is disposed. The first spacing member 57 is made of, for example, a material such as polyacetal resin.

  The plate spring 51 is fixed to the flat plate member 4 </ b> C of the vibrator 4 via the second fixing portion 17. The plate spring 51 in which the movement point portion MP is fixed to the second fixing portion 17 is arranged such that the thickness direction of the plate spring 51 matches the X-axis direction. The three leaf springs 51 arranged on one side in the X-axis direction hold the second spacing holding members 55 for holding the mutual spacing at the movement point portion MP, that is, at the portion fixed to the second fixing portion 17 It is arranged through. The second spacing member 55 is made of, for example, a material such as polyacetal resin.

  As shown in FIG. 3, between the leaf springs 51 adjacent to each other, a holding portion 53 is fixed to a part of each of the folded back portions 51 </ b> C. The holding portion 53 and the plate spring 51 are fixed to each other, for example, by being fitted to each other (fitting structure). The three plate springs 51 disposed respectively on both sides of the second fixed portion 17 in the X-axis direction are integrated by the holding portion 53. The holding portion 53 is formed of, for example, an elastic member such as rubber.

  As shown in FIG. 4, the fulcrum portion FP and the pivot point portion MP of each of the six plate springs 51 are in the X-axis direction when the vibrator 4 is stopped (when the diaphragm pump 1 is not operating). It is disposed on a straight line in a direction perpendicular to the (first direction) and the Y-axis direction (second direction), that is, in the Z-axis direction (vertical direction).

  The vibrator supporting portion 50 configured to include the plurality of leaf springs 51, the vibrator 4, and the lid 13 are integrally configured as a vibration unit 7. The fulcrum portion FP of the plate spring 51 is fixed to the lid 13 via the first fixing portion 15. The first fixing portion 15 is formed of, for example, a material such as PBT resin. The fulcrum portion FP of the plate spring 51 is fixed to the vibrator 4 via the second fixing portion 17. The second fixing portion 17 is formed of, for example, a member such as PBT resin. Further, as shown in FIG. 5 and FIG. 6, the fulcrum portion FP of each of the plurality of plate springs 51 and the electromagnet 3 are disposed sandwiching the vibrator 4 in the Z-axis direction (vertical direction).

  In the diaphragm pump 1, the vibration unit 7 is inserted from the opening 11A of the frame 10 to which the electromagnet 3 is fixed. In detail, the vibration unit 7 is inserted from above the frame 10 disposed with the opening 11A upward, with the vibrator 4 disposed below. Then, the lid 13 is fixed to the main body 11. Thereby, the positioning of the vibrator 4 with respect to the electromagnet 3 is completed. Next, the holding members 4D. The diaphragm 5 is fixed to 4D. In detail, the diaphragm 5 is configured to hold the holding member 4D. It is pinched and fixed so that hole 5A may be covered by 4D. Next, the outer edge 5 </ b> B of the diaphragm 5 is fixed to the pump casing 30, and the fixed pump casing 30 is fixed to the frame 10. Thereby, the diaphragm pump 1 is completed.

  Next, the operation and effect of the diaphragm pump 1 of the first embodiment will be described. In the diaphragm pump 1 of the first embodiment, since the vibrator 4 is supported by the plate spring 51, the diaphragm 5 has a function (role) to restrict movement in directions other than the reciprocation movement (X-axis direction). The strength of the diaphragm 5 can be reduced as compared with the case where the vibrator 4 is used, and hence the energy in the case of causing the vibrator 4 to reciprocate can be reduced. Furthermore, in the diaphragm pump 1 described above, the fulcrum portion FP fixed to the frame 10 and the moving point portion MP fixed to the vibrator 4 are in the X-axis direction (first direction) and the Y-axis direction (second direction). Because they are disposed on a straight line in the orthogonal Z-axis direction (vertical direction), the rotational moment generated at the fulcrum FP when the vibrator 4 reciprocates is reduced. As a result, the energy in the case of causing the oscillator 4 to reciprocate can be reduced. As a result of these, the diaphragm pump 1 excellent in energy efficiency can be provided.

  Further, when the leaf spring 51 has the fulcrum FP as a fulcrum and the force F is applied to the moving point portion MP in the X-axis direction, the amount of deformation in the X-axis direction in the pair of extension portions 51A, 51B is They are formed to be equal to one another. For this reason, in the reciprocating motion of the vibrator 4, the motion (motion) in the direction orthogonal to the X axis direction (first direction) which is the reciprocating motion direction is suppressed. Thereby, energy can be effectively converted to reciprocating motion in the X-axis direction (first direction). As a result, it is possible to provide the diaphragm pump 1 further excellent in energy efficiency.

  Moreover, the shape seen from the X-axis direction (1st direction) of the leaf | plate spring 51 of 1st embodiment is formed in line symmetry with respect to the straight line BL of a Y-axis direction (2nd direction). Thereby, with the fulcrum portion FP as the fulcrum, when the force F is applied to the moving point portion MP in the X-axis direction, the deformation amounts L1 and L2 in the X-axis direction in the pair of extension portions 51A and 51B are mutually different. The leaf springs 51 can be easily formed to be equal.

  Further, since the plurality of leaf springs 51 of the first embodiment are arranged in the X-axis direction (first direction), the burden of the function of restricting the movement of the diaphragm 5 in directions other than reciprocation is further reduced. Be done.

  Further, the plurality of leaf springs 51 of the first embodiment are integrated by the holding portion 53. Thereby, generation | occurrence | production of the abnormal vibration in the leaf | plate spring 51 can be reduced.

  Moreover, since the holding | maintenance part 53 of 1st embodiment is an elastic member, generation | occurrence | production of the abnormal vibration in the leaf | plate spring 51 can be reduced more effectively.

  Further, the plurality of leaf springs 51 of the first embodiment are disposed at the fulcrum portion FP via the first spacing holding member 57 that holds the spacing therebetween, and the spacing between the plurality of leaf springs 51 at the movement point portion MP. It arrange | positions via the 2nd spacing member 55 to hold | maintain. Thereby, it can be avoided that the plate springs 51, 51 adjacent to each other are in contact with each other.

  Further, since the fulcrum portion FP and the electromagnet 3 are disposed sandwiching the vibrator 4 in the Z-axis direction (vertical direction), the resonance of the vibration generated in the fulcrum portion FP and the vibration generated in the electromagnet 3 or the like Problems can be suppressed.

  Further, the plate spring 51, the vibrator 4 and the lid 13 are integrally configured as the vibration unit 7, and a fulcrum FP of the plate spring 51 is fixed to the lid 13. In the diaphragm pump 1 configured as described above, the plate spring 51 and the vibrator 4 of the vibration unit 7 are inserted into the opening 11A of the frame 10 in which the electromagnet 3 is assembled, and the cover 13 is easily fixed to the main body 11 The diaphragm pump 1 can be assembled by various operations. Thereby, diaphragm pump 1 excellent in workability at the time of assembly can be provided.

  The fulcrum portion FP and the electromagnet 3 are disposed on the same side with respect to the vibrator 4. In the diaphragm pump 1 of this configuration, since the generation position of the vibration generated at the fulcrum portion FP and the generation position of the vibration generated at the electromagnet 3 can be brought close to each other, the generation of the influence of the vibration extends over a wide range. It can be suppressed.

Second Embodiment
Hereinafter, the electromagnetic vibration type diaphragm pump 1 according to the second embodiment will be described mainly with reference to FIGS. In addition, description is abbreviate | omitted about the part of the structure same as the electromagnetic vibration type diaphragm pump 1 which concerns on 1st embodiment here. In the electromagnetic vibration type diaphragm pump 1 according to the first embodiment, as shown in FIG. 5, the fulcrum FP and the electromagnet 3 vibrate in the Z-axis direction (the linear direction connecting the fulcrum FP and the moving point M). In the electromagnetic vibration type diaphragm pump 1 according to the second embodiment, the fulcrum portion FP and the electromagnet 3 are Z with respect to the vibrator 4 as shown in FIG. They are arranged on the same side in the axial direction. The details will be described below.

  As shown in FIG. 9, the vibrator 4 includes shaft members 4A and 4A extending in the X-axis direction, magnets 4B and 4B, a flat plate member 4C, holding members 4D and 4D, and connection members 4E and 4E. And. The connection members 4E and 4E are, for example, plate-like members made of nonmagnetic material, and connect the shaft member 4A and the flat plate member 4C. The shaft members 4A and 4A, the magnets 4B and 4B, the flat plate member 4C, and the holding members 4D and 4D are the same as those in the first embodiment, and thus detailed description will be omitted.

  The material, the shape, the thickness, and the amount of deformation with respect to the acting force F (see FIG. 7) and the like shown in FIG. 10 are the same as in the first embodiment. The flat spring 51 is provided in the vicinity of an end 51D opposite to the one end 51F of the one extension 51A of the pair of the extensions 51A and 51B, and a fulcrum FP to be fixed to the electromagnet 3 A moving point portion MP provided in the vicinity of an end 51E opposite to the one end 51G of the other extending portion 51B of the pair of the extending portions 51A and 51B and fixed to the vibrator 4; Have.

  As shown in FIG. 9, the plate spring 51 whose fulcrum FP is fixed to the electromagnet 3 is arranged such that the thickness direction of the plate spring 51 matches the X-axis direction. In addition, a plurality of plate springs 51 are arranged in the X-axis direction. As shown in FIGS. 8 and 9, in the second embodiment, three plate springs 51 (a total of six plate springs 51) are disposed with the electromagnet 3 interposed therebetween. The three plate springs 51 arranged respectively on both sides of the electromagnet 3 in the X-axis direction are the first spacing holding members 57 which maintain the mutual spacing at the fulcrum FP, that is, at the portion fixed to the electromagnet 3. It is arranged through. The first spacing member 57 is made of, for example, a material such as polyacetal resin.

  The plate spring 51 is fixed to the flat plate member 4C of the vibrator 4 via the connection member 4E. The plate spring 51 in which the movement point portion MP is fixed to the connection member 4E is arranged such that the thickness direction of the plate spring 51 matches the X-axis direction. The three plate springs 51 arranged on one side in the X-axis direction are arranged at the movement point portion MP, that is, at the portion fixed to the connecting member 4E, via the second spacing holding member 55 which holds the mutual spacing. It is arranged. The second spacing member 55 is made of, for example, a material such as polyacetal resin.

  As shown in FIG. 8, between the leaf springs 51 adjacent to each other, holding portions 53 are fixed to parts of the respective folded portions 51C (see FIG. 10). The holding portion 53 and the plate spring 51 are fixed to each other, for example, by being fitted to each other (fitting structure). As shown in FIG. 9, the three plate springs 51 disposed respectively on both sides of the electromagnet 3 in the X-axis direction are integrated by the holding portion 53. The holding portion 53 is formed of, for example, an elastic member such as rubber.

  As shown in FIG. 10, the fulcrum portion FP and the pivot point portion MP of each of the six plate springs 51 are in the X-axis direction when the vibrator 4 is stopped (when the diaphragm pump 1 is not operating). It is disposed on a straight line in a direction perpendicular to the (first direction) and the Y-axis direction (second direction), that is, in the Z-axis direction (vertical direction).

  The vibrator supporting portion 50 configured to include the plurality of leaf springs 51, the vibrator 4, and the electromagnet 3 are integrally configured as a vibration unit 7. The fulcrum portion FP of the plate spring 51 is fixed to the frame 10 via the electromagnet 3. The moving point portion MP of the plate spring 51 is fixed to the vibrator 4 via the connection member 4E. The connection member 4E is made of, for example, a nonmagnetic material or the like.

  Also with the diaphragm pump 1 of the second embodiment, the same effects as those of the diaphragm pump 1 of the first embodiment can be obtained. Further, as shown in FIG. 10, the diaphragm pump 1 of the second embodiment in which the fulcrum portion FP and the electromagnet 3 are disposed on the same side in the Z-axis direction with respect to the vibrator 4 is shown in FIG. As shown in FIG. 5, the fulcrum portion FP and the electromagnet 3 have unique operational effects not included in the configuration of the first embodiment in which the vibrator 4 is disposed in the Z-axis direction (vertical direction). There is. That is, in the diaphragm pump 1 of the second embodiment, the generation position of the vibration generated at the fulcrum FP can be made close to the generation position of the vibration generated at the electromagnet 3. For this reason, it can suppress that the site | part which the influence of a vibration generate | occur | produce spreads widely. Further, since the electromagnet 3 and the moving point portion MP are disposed below the vibrator 4, the generation source of the vibration can be made below the frame 10. Therefore, compared to the case where the vibration source is located above the frame 10, the stability during operation is excellent. In particular, the effect is large in a diaphragm pump with a large output.

  Description will be given taking the diaphragm pump 1 of the second embodiment as an example, as an example of the diaphragm pump 1 having a configuration in which the fulcrum portion FP and the electromagnet 3 are disposed on the same side with respect to the vibrator 4 in the Z axis direction. However, it is not limited to this configuration. The movement point portion MP of the diaphragm pump 1 according to the second embodiment described above is provided below the vibrator 4, but may be provided above the vibrator 4, for example, as shown in FIG. 11. . In the second embodiment, the fulcrum portion FP is described as an example provided on the electromagnet 3, but may be directly fixed to the main body portion 11 of the frame 10.

  As mentioned above, although 1st and 2nd embodiment was described, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the meaning of invention.

(Modification 1)
In the first or second embodiment, as shown in FIG. 7, the plurality of leaf springs 51 constituting the vibrator support portion 50 have the fulcrum FP as a fulcrum and in the X axis direction with respect to the movement point MP. Although the example which employ | adopted the leaf spring formed so that the deformation amount in the X-axis direction in a pair of extension part 51A, 51B may mutually become equal, when the force F is made to act was demonstrated, this invention Is not limited to this. As long as the fulcrum portion FP and the moving point portion MP are disposed in a straight line in the direction orthogonal to the thickness direction (first direction) of the plate spring 51 and the extension direction (second direction) of the plate spring 51, The energy in the case of causing the oscillator 4 to reciprocate can be reduced, so that the diaphragm pump 1 excellent in energy efficiency can be provided.

(Modification 2)
In the first embodiment, the second embodiment, or the modification, as shown in FIG. 4, when the vibrator 4 is stopped, the fulcrum portion FP and the moving point portion MP in the six plate springs 51 (When diaphragm pump 1 is not in operation), arranged in a straight line in a direction orthogonal to the X axis direction (first direction) and the Y axis direction (second direction), that is, in the Z axis direction (vertical direction) However, the present invention is not limited thereto. As described above, even if the fulcrum portion FP and the moving point portion MP are not arranged on a straight line, the plurality of leaf springs 51 constituting the vibrator supporting portion 50 can be a pair of extending portions 51A, 51B in the X axis direction. As long as the deformation amounts in the X-axis direction at the same time are formed to be equal to each other, the energy in the case of causing the oscillator 4 to reciprocate can be further reduced, so the diaphragm pump 1 with excellent energy efficiency Can be provided.

(Modification 3)
In addition to the configuration of the first embodiment, the second embodiment, or the modification, as shown in FIG. 12, the diaphragm pump 1 has a current provided in one of the vicinity of the movement point portion MP and the vicinity of the fulcrum portion FP. A current detection unit for detecting the current flowing between the input unit 91, the current output unit 92 provided near the movement point unit MP and the other near the fulcrum unit FP, and the input unit 91 and the output unit 92 in the plate spring 51 A determination device (determination unit) 94 that determines the presence or absence of damage to the plate spring 51 based on the presence or absence of detection of current by the current detection unit 93 may be provided.

  The determination device 94 is configured of a central processing unit (CPU), a read only memory (ROM), a random access memory (RAM), and the like. The determination device 94 executes various control processes in the diaphragm pump 1. Such various control processes are performed, for example, by loading a program stored in the ROM onto the RAM and executing the program by the CPU. The current detection unit 93 and the determination device (determination unit) 94 are communicably connected to each other by wire or wirelessly. In the diaphragm pump 1 of this configuration, since the presence or absence of damage to the plate spring 51 can be determined by a simple configuration, the maintenance property is excellent.

  Furthermore, the determination device 94 may not only be incorporated as the diaphragm pump 1 but also be a determination device 94 separate from the diaphragm pump 1 and constitute an electromagnetic vibration diaphragm pump system as a whole. In this case, it is possible to monitor the state of the diaphragm pump 1 remotely. Further, in such a configuration, not only is one determination device 94 connected to one diaphragm pump 1, but one determination device 94 for a plurality of diaphragm pumps 1. Can also be connected.

(Other modifications)
In the first embodiment, the second embodiment, or the modification, an example in which the moving point portion MP in the plate spring 51 is fixed to the flat plate member 4C of the vibrator 4 via the second fixing portion 17 is given. Although described, for example, as shown in FIG. 13, it may be fixed to the shaft members 4A and 4A of the vibrator 4.

  The various first embodiment, the second embodiment, and the modifications described above may be combined in various or part or all without departing from the spirit of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... electromagnetic vibration type diaphragm pump, 3 ... electromagnet, 4 ... vibrator, 5 ... diaphragm, 7 ... vibration unit, 10 ... frame (housing), 11 ... main-body part, 13 ... lid part, 30 ... pump casing, 50 ... Vibrator supporting part, 51, 51 ... leaf spring, 51A, 51B ... extended part, 51C ... folded back part, 53 ... holding part, 55 ... second space holding member (space holding member), 57 ... first space holding Member (space holding member) 91: input portion 92: output portion 93: current detection portion 94: determination device (determination portion) FP: fulcrum portion MP: movement point portion

Claims (19)

A vibrator having a magnet fixed thereto, an electromagnet provided opposite to the magnet of the vibrator and causing the vibrator to reciprocate in a first direction, and provided at least one end of the vibrator in the first direction An electromagnetic vibration type diaphragm pump comprising: a diaphragm; and a housing that accommodates the vibrator, the electromagnet, and the diaphragm.
A plate spring formed of a plate-like member for supporting the vibrator;
The plate spring is
The thickness direction of the plate spring is arranged to coincide with the first direction,
When viewed from the first direction, a pair of extending portions extending in a second direction orthogonal to the first direction and arranged parallel to each other, and one end of the pair of extending portions And a turnaround to connect
A fulcrum portion provided at an end opposite to the one end of one of the pair of extending portions and being fixed to the housing,
A moving point portion provided at an end opposite to the one end in the other extending portion of the pair of extending portions, and fixed to the vibrator;
The electromagnetic vibration type diaphragm pump, wherein the fulcrum portion and the movement point portion are disposed on a straight line in a direction orthogonal to the first direction and the second direction. A vibrator having a magnet fixed thereto, an electromagnet provided opposite to the magnet of the vibrator and causing the vibrator to reciprocate in a first direction, and provided at least one end of the vibrator in the first direction An electromagnetic vibration type diaphragm pump comprising: a diaphragm; and a housing that accommodates the vibrator, the electromagnet, and the diaphragm.
A plate spring formed of a plate-like member for supporting the vibrator;
The plate spring is
The thickness direction of the plate spring is arranged to coincide with the first direction,
When viewed from the first direction, a pair of extending portions extending in a second direction orthogonal to the first direction and arranged parallel to each other, and one end of the pair of extending portions And a turnaround to connect
A fulcrum portion provided at an end opposite to the one end of one of the pair of extending portions and being fixed to the housing,
A moving point portion provided at an end opposite to the one end in the other extending portion of the pair of extending portions, and fixed to the vibrator;
The fulcrum portion and the movement point portion are disposed on a straight line in a direction orthogonal to the first direction and the second direction,
The electromagnetic vibrating diaphragm pump, wherein the plate spring is formed in a U-shape or a U-shape when viewed in the first direction. The leaf spring has the fulcrum as a fulcrum, and when the force in the first direction is applied to the moving point, the deformation amounts in the first direction of the pair of extending parts are mutually different. The electromagnetic vibrating diaphragm pump according to claim 1 or 2 , which is formed to be equal. A vibrator having a magnet fixed thereto, an electromagnet provided opposite to the magnet of the vibrator and causing the vibrator to reciprocate in a first direction, and provided at least one end of the vibrator in the first direction An electromagnetic vibration type diaphragm pump comprising: a diaphragm; and a housing that accommodates the vibrator, the electromagnet, and the diaphragm.
A plate spring formed of a plate-like member for supporting the vibrator;
The plate spring is
The thickness direction of the plate spring is arranged to coincide with the first direction,
When viewed from the first direction, a pair of extending portions extending in a second direction orthogonal to the first direction and arranged parallel to each other, and one end of the pair of extending portions And a turnaround to connect
A fulcrum portion provided at an end opposite to the one end of one of the pair of extending portions and being fixed to the housing,
A moving point portion provided at an end opposite to the one end in the other extending portion of the pair of extending portions, and fixed to the vibrator;
The leaf spring has the fulcrum as a fulcrum, and when the force in the first direction is applied to the moving point, the deformation amounts in the first direction of the pair of extending parts are mutually different. An electromagnetic vibrating diaphragm pump that is configured to be equal. A vibrator having a magnet fixed thereto, an electromagnet provided opposite to the magnet of the vibrator and causing the vibrator to reciprocate in a first direction, and provided at least one end of the vibrator in the first direction An electromagnetic vibration type diaphragm pump comprising: a diaphragm; and a housing that accommodates the vibrator, the electromagnet, and the diaphragm.
A plate spring formed of a plate-like member for supporting the vibrator;
The plate spring is
The thickness direction of the plate spring is arranged to coincide with the first direction,
When viewed from the first direction, a pair of extending portions extending in a second direction orthogonal to the first direction and arranged parallel to each other, and one end of the pair of extending portions And a turnaround to connect
A fulcrum portion provided at an end opposite to the one end of one of the pair of extending portions and being fixed to the housing,
A moving point portion provided at an end opposite to the one end in the other extending portion of the pair of extending portions, and fixed to the vibrator;
The leaf spring has the fulcrum as a fulcrum, and when the force in the first direction is applied to the moving point, the deformation amounts in the first direction of the pair of extending parts are mutually different. Formed to be equal,
The electromagnetic vibrating diaphragm pump, wherein the plate spring is formed in a U-shape or a U-shape when viewed in the first direction.   The electromagnetic vibrating diaphragm pump according to any one of claims 1 to 5, wherein a plurality of the plate springs are arranged in the first direction. And a holding portion disposed between the adjacent plate springs and fixed to at least a part of each of the turning portions.
The electromagnetic vibration type diaphragm pump according to claim 6, wherein the plurality of leaf springs are integrated by the holding portion. A vibrator having a magnet fixed thereto, an electromagnet provided opposite to the magnet of the vibrator and causing the vibrator to reciprocate in a first direction, and provided at least one end of the vibrator in the first direction An electromagnetic vibration type diaphragm pump comprising: a diaphragm; and a housing that accommodates the vibrator, the electromagnet, and the diaphragm.
A plate spring formed of a plate-like member for supporting the vibrator;
The plate spring is
The thickness direction of the plate spring is arranged to coincide with the first direction,
When viewed from the first direction, a pair of extending portions extending in a second direction orthogonal to the first direction and arranged parallel to each other, and one end of the pair of extending portions And a turnaround to connect
A fulcrum portion provided at an end opposite to the one end of one of the pair of extending portions and being fixed to the housing,
A moving point portion provided at an end opposite to the one end in the other extending portion of the pair of extending portions, and fixed to the vibrator;
The fulcrum portion and the movement point portion are disposed on a straight line in a direction orthogonal to the first direction and the second direction,
The plurality of plate springs are arranged in the first direction,
And a holding portion disposed between the adjacent plate springs and fixed to at least a part of each of the turning portions.
The electromagnetic vibrating diaphragm pump, wherein the plurality of plate springs are integrated by the holding portion. A vibrator having a magnet fixed thereto, an electromagnet provided opposite to the magnet of the vibrator and causing the vibrator to reciprocate in a first direction, and provided at least one end of the vibrator in the first direction An electromagnetic vibration type diaphragm pump comprising: a diaphragm; and a housing that accommodates the vibrator, the electromagnet, and the diaphragm.
A plate spring formed of a plate-like member for supporting the vibrator;
The plate spring is
The thickness direction of the plate spring is arranged to coincide with the first direction,
When viewed from the first direction, a pair of extending portions extending in a second direction orthogonal to the first direction and arranged parallel to each other, and one end of the pair of extending portions And a turnaround to connect
A fulcrum portion provided at an end opposite to the one end of one of the pair of extending portions and being fixed to the housing,
A moving point portion provided at an end opposite to the one end in the other extending portion of the pair of extending portions, and fixed to the vibrator;
The leaf spring has the fulcrum as a fulcrum, and when the force in the first direction is applied to the moving point, the deformation amounts in the first direction of the pair of extending parts are mutually different. Formed to be equal,
The plurality of plate springs are arranged in the first direction,
And a holding portion disposed between the adjacent plate springs and fixed to at least a part of each of the turning portions.
The electromagnetic vibrating diaphragm pump, wherein the plurality of plate springs are integrated by the holding portion. The electromagnetic vibration type diaphragm pump according to any one of claims 7 to 9 , wherein the holding portion is an elastic member. The electromagnetic vibration type diaphragm according to any one of claims 7 to 10 , wherein the plurality of leaf springs are disposed at the fulcrum portion and the movement point portion via spacing holding members for holding the spacing therebetween. pump. The electromagnetic vibration type diaphragm pump according to any one of claims 1 to 11 , wherein the vibrator and the electromagnet face each other in a direction orthogonal to the first direction and the second direction. The electromagnetic vibration type diaphragm pump according to any one of claims 1 to 12 , wherein the shape of the leaf spring as viewed from the first direction is axisymmetric with respect to the second direction. The electromagnetic vibration diaphragm according to any one of claims 1 to 13 , wherein the fulcrum portion and the electromagnet are disposed across the vibrator in a direction orthogonal to the first direction and the second direction. pump. The housing includes a main body having an opening in one of the first direction and a direction orthogonal to the second direction, and a lid covering the opening.
The direction orthogonal to the first direction and the second direction is a vertical direction, and the opening has an opening vertically above the housing,
The plate spring, the vibrator, and the lid are integrally configured as a vibration unit,
The electromagnetic vibration type diaphragm pump according to any one of claims 1 to 14 , wherein a fulcrum portion of the plate spring is fixed to the lid portion. The electromagnet according to any one of claims 1 to 13 , wherein the fulcrum portion and the electromagnet are disposed on the same side with respect to the vibrator in a direction orthogonal to the first direction and the second direction. Vibratory diaphragm pump. The direction orthogonal to the first direction and the second direction is a vertical direction,
The electromagnetic vibration type diaphragm pump according to claim 16 , wherein the electromagnet and the movement point portion are disposed below the vibrator. A current input unit provided at one of the moving point unit and the fulcrum unit;
An output portion of current provided to the other of the moving point portion and the fulcrum portion;
A current detection unit that detects a current flowing between the input unit and the output unit of the leaf spring;
The electromagnetic vibration type according to any one of claims 1 to 17 , further comprising: a determination unit that determines the presence or absence of damage to the leaf spring based on the presence or absence of detection of the current in the current detection unit. Diaphragm pump. A current input unit provided at one of the moving point unit and the fulcrum unit;
An output portion of current provided to the other of the moving point portion and the fulcrum portion;
The electromagnetic vibration type diaphragm pump according to any one of claims 1 to 17 , further comprising: a current detection unit that detects a current flowing between the input unit and the output unit in the plate spring.
An electromagnetic vibration type diaphragm pump system, comprising: a determination unit that determines the presence or absence of damage to the leaf spring based on the presence or absence of detection of the current in the current detection unit.

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