JP6909709B2 - Sensor sheet - Google Patents

Description

The present invention relates to a sensor sheet, and more particularly to a sensor sheet used for detecting a temperature distribution and a pressure distribution.

Patent Document 1 (Patent No. 5928859) discloses a sensor sheet used for detecting a temperature distribution and a pressure distribution. FIG. 16 is an enlarged plan view of a part of the sensor sheet disclosed in Patent Document 1. FIG. 17 is a cross-sectional view taken along the line XVII-XVII of FIG. The reference numerals attached to each component are not necessarily the same as those in Patent Document 1.

As shown in FIGS. 16 and 17, the first wiring electrode group 300 is arranged on the film base material 200 included in the sensor sheet 100 (in FIG. 16, below the third wiring electrode group 600). overlapping.). Each of the second wiring electrode group 400 is arranged above the first wiring electrode group 300 at a position orthogonal to the first wiring electrode group 300. In the region between the first wiring electrode group 300 and the second wiring electrode group 400, the conductive temperature sensitive material 500 is arranged at each of the intersections of the first wiring electrode group 300 and the second wiring electrode group 400. There is. Further, above the second wiring electrode group 400, each of the third wiring electrode group 600 is arranged at a position orthogonal to the second wiring electrode group 400. In the region between the second wiring electrode group 400 and the third wiring electrode group 600, the conductive pressure-sensitive material 700 is arranged at each of the intersections of the second wiring electrode group 400 and the third wiring electrode group 600. There is.

With reference to FIG. 17, for example, when the ambient temperature changes, the electromagnetic characteristics of the conductive temperature-sensitive material 500c change, so that the resistance between each of the first wiring electrode group 300 and the second wiring electrode 400c. The value changes. In the system including the sensor sheet 100, the temperature distribution in the sensor sheet 100 is detected by detecting the change in the resistance value in each part of the sensor sheet 100 (between the first wiring electrode group 300 and the second wiring electrode group 400). Is detected. Further, when the pressure applied to the sensor sheet 100 changes, the contact area between each of the third wiring electrode group 600 and the second wiring electrode 400c via the conductive pressure-sensitive material 700 changes. As a result, the resistance value between each of the third wiring electrode group 600 and the second wiring electrode 400c changes. In the system including the sensor sheet 100, the pressure distribution in the sensor sheet 100 is detected by detecting the change in the resistance value in each part of the sensor sheet 100 (between the third wiring electrode group 600 and the second wiring electrode group 400). Is detected.

Patent No. 5928859

FIG. 18 is a cross-sectional view taken along the line XVIII-XVIII of FIG. As shown in FIG. 18, in the sensor sheet disclosed in Patent Document 1, each of the third wiring electrode group 600 and each of the first wiring electrode group 300 are conductive pressure-sensitive materials depending on the site. Facing via only 700. For example, when the sensor sheet 100 is pressurized by a rigid body, each of the third wiring electrode group 600 does not approach the first wiring electrode group 300 any more when it comes into contact with the second wiring electrode group 400. Therefore, no problem occurs.

However, when the pressure on the sensor sheet 100 is applied by the elastic body, the third wiring is performed in the region where the third wiring electrode group 600 and the first wiring electrode group 300 face each other as shown in FIG. The electrode group 600 and the first wiring electrode group 300 come into contact with each other via the conductive pressure-sensitive material 700. When the third wiring electrode group 600 and the first wiring electrode group 300 come into contact with each other, an unintended current flows between the third wiring electrode group 600 and the first wiring electrode group 300, resulting in an erroneous temperature distribution and pressure distribution. Detection occurs.

FIG. 19 is a diagram showing a detection result in the system including the sensor sheet 100. As shown in FIG. 19, the left side shows the temperature distribution detection result and the temperature of each part is shown in color, and the right side shows the pressure distribution detection result and the pressure of each part is shown in color. There is. With reference to the left side of FIG. 19, although the ambient temperatures are generally the same, the detection results show large variations for each part of the sensor sheet 100 (colors of different systems are mixed). ing.). This is because the temperature distribution is erroneously detected. Further, referring to the right side of FIG. 19, the pressure is originally applied only to the region A1, but the pressure is detected not only in the region A1 but also in the regions A2 and A3. This is because the pressure distribution is erroneously detected.

The present invention has been made to solve such a problem, and an object of the present invention is to provide a sensor sheet capable of suppressing false detection of temperature distribution and pressure distribution.

A sensor sheet according to a certain aspect of the present invention includes a plurality of first wiring electrodes, a plurality of second wiring electrodes, a plurality of third wiring electrodes, a conductive temperature-sensitive material, and a conductive pressure-sensitive material. The plurality of first wiring electrodes are arranged in the first layer. The plurality of second wiring electrodes are arranged in the second layer adjacent to the first layer. Each of the plurality of second wiring electrodes intersects the plurality of first wiring electrodes. The plurality of third wiring electrodes are arranged in the third layer adjacent to the second layer. Each of the plurality of third wiring electrodes intersects the plurality of second wiring electrodes. The conductive temperature-sensitive material is arranged between the first and second layers at each position where the first and second wiring electrodes intersect in a plan view. The conductive pressure-sensitive material is arranged between the second and third layers at each position where the second and third wiring electrodes intersect in a plan view. The first and third wiring electrodes are arranged so as not to overlap each other except at the positions where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view.

In this sensor sheet, the first and third wiring electrodes are arranged so as not to overlap each other except at the positions where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view. Therefore, even if pressure is applied to the sensor sheet by the elastic body, the first and third wiring electrodes do not come into contact with each other except at the positions where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged. And the current flowing between the third wiring electrodes is suppressed. As a result, according to this sensor sheet, erroneous detection of temperature distribution and pressure distribution can be suppressed.

Preferably, in the sensor sheet, the first wiring electrode is arranged so as not to overlap with the conductive pressure-sensitive material except at the position where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view. There is.

In this sensor sheet, even if pressure is applied to the sensor sheet by the elastic body, the first wiring electrode and the conductive pressure-sensitive material are used except at the positions where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged. As a result, the current flowing between the first and third wiring electrodes is suppressed. Therefore, according to this sensor sheet, erroneous detection of temperature distribution and pressure distribution can be suppressed.

A sensor sheet according to another aspect of the present invention includes a plurality of first wiring electrodes, a plurality of second wiring electrodes, a plurality of third wiring electrodes, a conductive temperature-sensitive material, a conductive pressure-sensitive material, and a first insulation. It has materials. The plurality of first wiring electrodes are arranged in the first layer. The plurality of second wiring electrodes are arranged in the second layer adjacent to the first layer. Each of the plurality of second wiring electrodes intersects the plurality of first wiring electrodes. The plurality of third wiring electrodes are arranged in the third layer adjacent to the second layer. Each of the plurality of third wiring electrodes intersects the plurality of second wiring electrodes. The conductive temperature-sensitive material is arranged between the first and second layers at each position where the first and second wiring electrodes intersect in a plan view. The conductive pressure-sensitive material is arranged between the second and third layers at each position where the second and third wiring electrodes intersect in a plan view. The first insulating material is configured to cover at least one of the first and third wiring electrodes except at a position where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view.

In this sensor sheet, at least one of the first and third wiring electrodes is coated with the first insulating material except at the position where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view. Therefore, even if pressure is applied to the sensor sheet by the elastic body, the first insulating material is provided between the first and third wiring electrodes except at the position where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged. Is present, so that the current flowing between the first and third wiring electrodes is suppressed. As a result, according to this sensor sheet, erroneous detection of temperature distribution and pressure distribution can be suppressed.

Preferably, the sensor sheet further comprises a second insulating material. The second insulating material is configured to cover at least one of the first and third wiring electrodes at a position where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view. Vias are formed in the insulating layer formed by the second insulating material. Of the first and third wiring electrodes, the wiring electrode coated with the second insulating material is configured to penetrate the via.

In this sensor sheet, at least one of the first and third wiring electrodes is covered with the second insulating material at a position where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view. That is, in this sensor sheet, at least one of the first and third wiring electrodes is covered with the insulating material regardless of whether or not both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged. Therefore, according to this sensor sheet, since the area to which the insulating material is applied is relatively wide, the insulating material can be easily applied. Further, in this sensor sheet, the wiring electrode coated with the second insulating material is configured to penetrate the via. Therefore, according to this sensor sheet, it is possible to prevent each of the first and third wiring electrodes from being electrically insulated from the second wiring electrode.

Preferably, in the sensor sheet, each of the plurality of second wiring electrodes is orthogonal to the plurality of first wiring electrodes in a plan view. Each of the plurality of third wiring electrodes is orthogonal to the plurality of second wiring electrodes in a plan view.

According to the present invention, it is possible to provide a sensor sheet capable of suppressing erroneous detection of temperature distribution and pressure distribution.

FIG. 5 is a perspective view showing a system including a sensor sheet according to the first embodiment. It is an exploded perspective view of a sensor sheet. It is a top view of the sensor sheet. It is an enlarged view of a part of the main part in FIG. It is a VV cross-sectional view of FIG. FIG. 4 is a sectional view taken along line VI-VI of FIG. It is a figure which shows the detection result in the system including a sensor sheet. It is an enlarged view of a part of the main part in the 1st modification. It is an enlarged view of a part of the main part in the 2nd modification. It is an enlarged view of a part of the main part in the 3rd modification. It is an enlarged view of a part of a main part in 4th modification. FIG. 5 is an enlarged view of a part of a main part of the sensor sheet according to the second embodiment. FIG. 12 is a cross-sectional view taken along the line XIII-XIII of FIG. FIG. 5 is an enlarged view of a part of a main part of the sensor sheet according to the third embodiment. It is a cross-sectional view of XV-XV of FIG. It is an enlarged plan view of a part of the sensor sheet disclosed in Patent Document 1. 16 is a cross-sectional view taken along the line XVII-XVII of FIG. 16 is a cross-sectional view taken along the line XVIII-XVIII of FIG. It is a figure which shows the detection result in the system including a sensor sheet.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The same or corresponding parts in the drawings are designated by the same reference numerals, and the description thereof will not be repeated.

[1. Embodiment 1]
<1-1. System configuration>
FIG. 1 is a perspective view showing a system 10 to which the sensor sheet 1 according to the first embodiment is applied. The system 10 is a system for measuring the temperature distribution and the pressure distribution of the measurement target.

As shown in FIG. 1, the system 10 includes a sensor sheet 1, a connector 50, and a PC (Personal Computer) 40. A plurality of temperature-sensitive sensors and a plurality of pressure-sensitive sensors are arranged in a matrix on the sensor sheet 1. The connector 50 is configured so that a voltage can be applied to each temperature sensor and each pressure sensor included in the sensor sheet 1.

The connector 50 is electrically connected to the PC 40, and the sensor sheet 1 is electrically connected to the connector 50. Although the connector 50 is electrically connected to the PC 40 by wire, it may be wirelessly connected.

In the system 10, the sensor sheet 1 is sandwiched between measurement targets. Although the details will be described later, the electromagnetic characteristics of the sensor sheet 1 change according to the applied pressure and temperature distribution. By receiving the signal showing the electromagnetic characteristics from the sensor sheet 1 via the connector 50, the PC 40 measures the temperature distribution and the pressure distribution of the measurement target.

<1-2. Sensor sheet configuration>
FIG. 2 is an exploded perspective view of the sensor sheet 1. As shown in FIG. 2, the sensor sheet 1 is provided on the film base material 2, the first wiring electrode group 3 provided on the film base material 2 (first layer), and on the first wiring electrode group 3. The second wiring electrode group 4 provided in the (second layer) and the conductive temperature-sensitive material 5 provided between the first wiring electrode group 3 and the second wiring electrode group 4 are included. Further, the sensor sheet 1 is provided between the third wiring electrode group 6 provided on the second wiring electrode group 4 (third layer), and between the second wiring electrode group 4 and the third wiring electrode group 6. The conductive pressure-sensitive material 7 provided and a film base material 8 provided on the third wiring electrode group 6 are included.

Each of the first layer, the second layer and the third layer is a layer of a wiring electrode group. The first layer and the second layer are adjacent to each other, and the second layer and the third layer are adjacent to each other. It can be said that the conductive temperature-sensitive material 5 is arranged between the first layer and the second layer. Further, it can be said that the conductive pressure-sensitive material 7 is arranged between the second layer and the third layer.

FIG. 3 is a plan view of the sensor sheet 1. As shown in FIG. 3, the first wiring electrode group 3 is configured such that a plurality of first wiring electrodes (for example, the first wiring electrode 3a) are arranged side by side in the A direction. Further, the second wiring electrode group 4 is configured by arranging a plurality of second wiring electrodes (for example, the second wiring electrode 4a) side by side in the B direction. The third wiring electrode group 6 is configured by arranging a plurality of third wiring electrodes (for example, the third wiring electrode 6a) side by side in the A direction. In the first embodiment, the A direction and the B direction are orthogonal to each other, but they may intersect at other angles.

FIG. 4 is an enlarged view of a part of the main part C in FIG. Although details will be described later with reference to FIG. 4, in the sensor sheet 1, the electromagnetic characteristics of each of the intersections (temperature detection unit 21) of the first wiring electrode group 3 and the second wiring electrode group 4 are determined. It changes depending on the temperature. Further, the electromagnetic characteristics of each of the intersections (pressure detection unit 22) of the third wiring electrode group 6 and the second wiring electrode group 4 change depending on the pressure. In the system 10 (FIG. 1), the sensor sheet is based on the output (signal showing electromagnetic characteristics) via each temperature detection unit (conductive temperature sensitive material) 21 and each pressure detection unit (conductive pressure sensitive material) 22. The temperature distribution and pressure distribution in 1 are measured. That is, in the sensor sheet 1, each temperature detection unit 21 functions as a temperature-sensitive sensor, and each pressure detection unit 22 functions as a pressure-sensitive sensor.

FIG. 5 is a sectional view taken along line VV of FIG. As shown in FIG. 5, each of the first wiring electrode group 3 (for example, the first wiring electrodes 3a, 3b, 3c) faces the second wiring electrode 4c via the conductive temperature-sensitive material 5c. Further, each of the third wiring electrode group 6 (for example, the third wiring electrodes 6a, 6b, 6c) is connected to the second wiring electrode via the conductive pressure sensitive material 7 (for example, the conductive pressure sensitive materials 7a, 7b, 7c). It faces 4c.

The conductive temperature-sensitive material 5 (for example, the conductive temperature-sensitive material 5c) is a material whose electrical resistance changes as the expansion rate changes with temperature. The materials will be described in detail later. In the system 10, a voltage is sequentially applied between each of the first wiring electrode group 3 and each of the second wiring electrode group 4. Then, the resistance value in each temperature detection unit 21 is measured based on each output from the sensor sheet 1 when the voltage is applied, and the temperature in each temperature detection unit 21 is detected based on the measured resistance value. For example, a voltage is applied between the first wiring electrode 3a and the second wiring electrode 4c, and the resistance value of the temperature detection unit 21b (the intersection of the first wiring electrode 3a and the second wiring electrode 4c) is measured. Then, the temperature in the temperature detection unit 21b is detected based on the measured resistance value.

The conductive pressure-sensitive material 7 (for example, the conductive pressure-sensitive materials 7a, 7b, 7c) is a material whose electrical resistance changes as the contact area with the second wiring electrode group 4 changes due to the pressure applied to the sensor sheet 1. Is. In the system 10, a voltage is sequentially applied between each of the third wiring electrode group 6 and each of the second wiring electrode group 4. Then, the resistance value in each pressure detection unit 22 is measured based on the output from the sensor sheet 1 when the voltage is applied, and the pressure in each pressure detection unit 22 is detected based on the measured resistance value. For example, a voltage is applied between the third wiring electrode 6a and the second wiring electrode 4c, and the resistance value of the pressure detection unit 22b (the intersection of the third wiring electrode 6a and the second wiring electrode 4c) is measured. Then, the pressure in the pressure detection unit 22b is detected based on the measured resistance value.

In the first embodiment, each of the second wiring electrode group 4 functions as a common electrode of the temperature sensor and the pressure sensor. That is, only the second wiring electrode group 4 is arranged on the second layer. However, the second layer does not necessarily have to be composed of only one layer of wiring electrodes. For example, two layers of wiring electrodes may be arranged in the second layer. In this case, the wiring electrode group provided in the lower layer in the second layer constitutes a part of the temperature sensor, and the wiring electrode group provided in the upper layer in the second layer is the pressure sensitive sensor. Make up a part of.

Further, the temperature detection unit 21 has a resistance value that increases as the temperature rises, but the resistance value may decrease as the temperature rises. Further, the temperature detection unit 21 may have electromagnetic characteristics other than the resistance value such as the amount of electric charge or the induced current, which change according to the temperature.

Further, the pressure detection unit 22 has a resistance value that decreases as the applied pressure increases, but the resistance value may increase as the applied pressure increases. Further, the pressure detection unit 22 may have electromagnetic characteristics other than the resistance value such as the amount of electric charge or the induced current, which change according to the magnitude of the pressure.

<1-3. Material of each member>
With reference to FIG. 2 again, the film substrates 2 and 8 are made of a flexible material such as polyimide or PET. Each of the first wiring electrode group 3, the second wiring electrode group 4, and the third wiring electrode group 6 is composed of a metal foil such as silver foil, copper foil, or aluminum foil, a conductive polymer, or the like, but is limited thereto. However, it may be made of a material having high conductivity.

Further, the conductive temperature-sensitive material 5 is a material having a characteristic that the electric resistance increases as the temperature rises. For example, in the range of at least 30 ° C. to 200 ° C., the resistance value increases as the temperature rises. It can be provided with a characteristic that the resistance value decreases as the temperature decreases. Further, the conductive temperature-sensitive material 5 contains conductive particles and a resin.

The conductive particles contained in the conductive temperature-sensitive material 5 are not particularly limited as long as they are conductive particles, and conductive particles contained in a known conductive temperature-sensitive material can be used. Specific examples of conductive particles include carbon-based particles (including fibrous materials) such as carbon black, graphite, carbon nanotubes, carbon nanohorns, carbon nanofibers, and carbon nanocoils; iron, nickel, copper, aluminum, magnesium, etc. Metal particles such as platinum, silver, gold, and alloys containing at least one of these metals; tin oxide, zinc oxide, silver iodide, copper iodide, barium titanate, indium tin oxide, strontium titanate, etc. Examples include conductive inorganic material particles. Among these, conductive carbon black is particularly preferable from the viewpoint of providing a temperature-sensitive element capable of measuring the temperature of a subject with high accuracy over a wide temperature range. One type of conductive particles may be used alone, or two or more types may be used in combination.

The resin contained in the conductive temperature-sensitive material 5 is not particularly limited, and a resin contained in a known conductive temperature-sensitive material can be used. The glass transition temperature of the resin can be appropriately selected according to the usage mode of the temperature sensitive element. From the viewpoint of providing a temperature-sensitive element capable of measuring the temperature of a subject with high accuracy over a wide temperature range, the glass transition temperature of the resin is preferably equal to or higher than the upper limit of the temperature measurement range of the temperature detection unit 21. The glass transition temperature of the resin is preferably 80 ° C. to 400 ° C. When the conductive temperature-sensitive material contains a plurality of types of resins, the glass transition temperature of the resin means the glass transition temperature of the resin as a whole contained in the conductive temperature-sensitive material.

Specific examples of the resin include thermosetting resins such as silicone resin, polyimide resin, and epoxy resin; polyamideimide resin, polyetherimide resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyamide resin, polyacetal resin, and polyphenylene sulfide resin. Examples thereof include thermoplastic resins such as polyether ether ketone resins, fluororesins, and polyester resins. Among these, silicone resin, polyimide resin, epoxy resin, polyamideimide resin, polyethylene terephthalate resin, and polyetherimide resin are selected from the viewpoint of providing a temperature-sensitive element capable of measuring the temperature of a subject with high accuracy over a wide temperature range. Polyimide resin and epoxy resin are preferable, and polyimide resin and epoxy resin are particularly preferable. As the resin having a glass transition temperature of 200 ° C. or higher, one type may be used alone, or two or more types may be used in combination.

The conductive temperature-sensitive material 5 may further contain an additive in addition to the conductive particles and the resin. The additive is not particularly limited, and a known additive contained in the conductive temperature-sensitive material 5 having PTC characteristics such as titanium oxide, alumina, and mica can be used.

Further, the conductive pressure-sensitive material 7 is made by adding a binder to the conductive particles, similarly to the conductive temperature-sensitive material 5. In the first embodiment, the conductive temperature-sensitive material 5 and the conductive pressure-sensitive material 7 have the same composition, but may be different.

<1-4. Improvement of detection accuracy>
With reference to FIG. 4 again, it is assumed that the VI-VI cross section is as shown in FIG. The sensor sheet 100 in FIG. 18 corresponds to the sensor sheet 1 in the first embodiment. Further, each of the first wiring electrode group 300 (first wiring electrode 300a, 300b, 300c), each of the third wiring electrode group 600 (third wiring electrode 600a, 600b, 600c), and each of the conductive pressure-sensitive material 700 ( The conductive pressure-sensitive materials 700a, 700b, 700c) are each of the first wiring electrode group 3 (first wiring electrode 3a, 3b, 3c) and each of the third wiring electrode group 6 (third wiring) in the first embodiment. It shall correspond to each of the electrodes 6a, 6b, 6c) and the conductive pressure-sensitive material 7 (conductive pressure-sensitive materials 7a, 7b, 7c), respectively.

In FIG. 18, each of the third wiring electrode group 600 and each of the first wiring electrode group 300 face each other via only the conductive pressure-sensitive material 700. In this case, when the sensor sheet is pressurized by the elastic body, the third wiring electrode group 600 and the first wiring electrode group 300 come into contact with each other via the conductive pressure-sensitive material 700. When the third wiring electrode group 600 and the first wiring electrode group 300 come into contact with each other, a current unintentionally flows between the third wiring electrode group 600 and the first wiring electrode group 300, and the temperature distribution and the pressure distribution change. False positives occur. In the sensor sheet 1 according to the first embodiment, the wiring is devised so that such false detection does not occur.

With reference to FIG. 4 again, in the plan view of the sensor sheet 1, each of the first wiring electrode group 3 has a temperature detection unit 21 and a pressure detection unit 22 (both the conductive temperature-sensitive material 5 and the conductive pressure-sensitive material 7). Other than the arranged position), it is formed thin (the position extending in the B direction (for example, 3a1) is also partially formed thin). Further, each of the third wiring electrode group 6 is formed thin except for the temperature detection unit 21 and the pressure detection unit 22. Each of the first wiring electrode group 3 is arranged so as not to overlap each of the third wiring electrode group 6 except for the temperature detection unit 21 and the pressure detection unit 22. For example, the first wiring electrode 3b overlaps with the third wiring electrode 6b in each temperature detection unit 21 and each pressure detection unit 22, but in the B direction except for the temperature detection unit 21 and the pressure detection unit 22. It is displaced to the outside (left side) of the conductive pressure-sensitive material 7b.

FIG. 6 is a sectional view taken along line VI-VI of FIG. That is, FIG. 6 is a cross-sectional view other than the position where both the conductive temperature-sensitive material 5 and the conductive pressure-sensitive material 7 are arranged in a plan view. As shown in FIG. 6, each of the first wiring electrode group 3 faces each of the third wiring electrode group 6 except at the position where both the conductive temperature-sensitive material 5 and the conductive pressure-sensitive material 7 are arranged. Not done. Further, each of the first wiring electrode group 3 does not face each of the conductive pressure sensitive materials 7. Therefore, even if pressure is applied to the sensor sheet 1 by the elastic body, the first wiring electrode group 3 does not come into contact with the third wiring electrode group 6 and the conductive pressure-sensitive material 7. Therefore, the current flowing between the first and third wiring electrodes is suppressed. As a result, erroneous detection of temperature distribution and pressure distribution in the system 10 (FIG. 1) is suppressed.

For example, even if pressure is applied to the sensor sheet 1 by the elastic body, the first wiring electrode 3a does not come into contact with the third wiring electrode 6a and the conductive pressure-sensitive material 7a. As a result, the current flowing between the first and third wiring electrodes is suppressed, and as a result, erroneous detection of the temperature distribution and the pressure distribution in the system 10 is suppressed.

FIG. 7 is a diagram showing a detection result in the system 10 including the sensor sheet 1. As shown in FIG. 7, the left side shows the temperature distribution detection result and the temperature of each part is shown in color, and the right side shows the pressure distribution detection result and the pressure of each part is shown in color. There is. With reference to the left side of FIG. 7, since the ambient temperatures are generally the same, the colors of the same system are output as a whole. That is, it can be said that the false detection of the temperature distribution is suppressed. Further, referring to the right side of FIG. 7, the pressure is applied only to the region A10, and the pressure is detected only in the region A10 (color appears). That is, it can be said that the false detection of the pressure distribution is suppressed.

<1-5. Manufacturing method>
With reference to FIG. 2 again, the sensor sheet 1 is manufactured, for example, by the following procedure. First, the first wiring electrode group 3 is formed on the film base material 2 by screen printing. Each of the first wiring electrode group 3 is printed so as to have a shape as shown in FIG. 4 in a plan view. Next, a plurality of strip-shaped conductive temperature-sensitive materials 5 are formed in parallel by screen printing so as to be orthogonal to the first wiring electrode group 3. Subsequently, the second wiring electrode group 4 is formed on the conductive temperature-sensitive material 5 by screen printing.

Then, the third wiring electrode group 6 is formed on the film base material 8 by screen printing. Each of the third wiring electrode group 6 is printed so as to have a shape as shown in FIG. 4 in a plan view. Next, a plurality of strip-shaped conductive pressure-sensitive materials 7 are formed in parallel on the third wiring electrode group 6 by screen printing.

Then, at the position where both the conductive temperature-sensitive material 5 and the conductive pressure-sensitive material 7 are arranged, the film base material 2 and the film base so that the first wiring electrode group 3 and the third wiring electrode group 6 face each other. The material 8 and the material 8 are bonded together. As a result, the sensor sheet 1 is completed.

The first wiring electrode group 3, the second wiring electrode group 4, the third wiring electrode group 6, the conductive temperature-sensitive material 5, and the conductive pressure-sensitive material 7 are formed by screen printing, but the present invention is limited to this. Instead, it may be formed by inkjet printing or a transfer method. Further, the first wiring electrode group 3, the second wiring electrode group 4, and the third wiring electrode group 6 may be wired by a substrate wiring technique (copper etching or the like). As a result, the sensor sheet 1 which is very thin (for example, 0.1 mm) and has flexibility can be formed.

<1-6. Features>
As described above, in the sensor sheet 1 according to the first embodiment, in the first wiring electrode group 3 and the third wiring electrode group 6, both the conductive temperature-sensitive material 5 and the conductive pressure-sensitive material 7 are used in a plan view. It is arranged so that it does not overlap except at the position where it is arranged. Therefore, even if pressure is applied to the sensor sheet 1 by the elastic body, the first wiring electrode group 3 and the third wiring electrode are not provided at positions where both the conductive temperature-sensitive material 5 and the conductive pressure-sensitive material 7 are arranged. Since the group 6 does not come into contact with each other, it is possible to suppress an unintended current from flowing between the first wiring electrode group 3 and the third wiring electrode group 6. As a result, according to the sensor sheet 1, erroneous detection of temperature distribution and pressure distribution can be suppressed.

<1-7. Modification example>
Although the first embodiment has been described above, the present invention is not limited to the first embodiment, and various modifications can be made without departing from the spirit of the first embodiment. Hereinafter, a modified example of the first embodiment will be described.

<1-7-1>
In the first embodiment, each of the third wiring electrode group 6 is formed thin except for the temperature detection unit 21 and the pressure detection unit 22. However, each of the third wiring electrode group 6 does not necessarily have to be formed thin except for the temperature detection unit 21 and the pressure detection unit 22.

FIG. 8 is an enlarged view of a part of the main part in the first modification. As shown in FIG. 8, in this modification, the thickness of each of the third wiring electrode group 6 other than the temperature detection unit 21 and the pressure detection unit 22 is the same as the thickness of the temperature detection unit 21 and the pressure detection unit 22. Is. Even with such a configuration, in a plan view, each of the first wiring electrode group 3 and each of the third wiring electrode group 6 may not overlap with each other except for the temperature detection unit 21 and the pressure detection unit 22. ..

<1-7-2>
In the first embodiment, the thickness of each of the first wiring electrode group 3 is formed to be thin even at the position extending in the B direction (see 3a1 in FIG. 4). However, the thickness of each of the first wiring electrode group 3 does not necessarily have to be formed thin at the position extending in the B direction.

FIG. 9 is an enlarged view of a part of the main part in the second modification. As shown in FIG. 9, in this modification, the position extending in the B direction (for example, 3a1) of each of the first wiring electrode group 3 is not thinned. Even with such a configuration, in a plan view, each of the first wiring electrode group 3 and each of the third wiring electrode group 6 may not overlap with each other except for the temperature detection unit 21 and the pressure detection unit 22. ..

<1-7-3>
FIG. 10 is an enlarged view of a part of the main part in the third modification. As shown in FIG. 10, in this modification, the thickness of each of the third wiring electrode group 6 other than the temperature detection unit 21 and the pressure detection unit 22 is the same as the thickness of the temperature detection unit 21 and the pressure detection unit 22. Is. Further, in each of the first wiring electrode group 3, the position extending in the B direction (for example, 3a1) is not thinned. Even with such a configuration, in a plan view, each of the first wiring electrode group 3 and each of the third wiring electrode group 6 may not overlap with each other except for the temperature detection unit 21 and the pressure detection unit 22. ..

<1-7-4>
In the first embodiment, each of the first wiring electrode group 3 and each of the third wiring electrode group 6 have different shapes in a plan view. That is, each of the first wiring electrode group 3 was formed thin at a position extending in the B direction (see 3a1 in FIG. 4), whereas each of the third wiring electrode group 6 was formed at a position extending in the B direction. It was not formed thinly in. As a result, each of the first wiring electrode group 3 and each of the third wiring electrode group 6 did not have a symmetrical shape. Further, in the first embodiment, the conductive pressure-sensitive material 7 is continuously formed in the A direction. However, the shapes of the first wiring electrode group 3 and the third wiring electrode group 6 and the shape of the conductive pressure-sensitive material 7 are not limited to this.

FIG. 11 is an enlarged view of a part of the main part in the fourth modification. As shown in FIG. 11, each of the first wiring electrode group 3 and each of the third wiring electrode group 6 may have a symmetrical shape in a plan view. Further, the conductive pressure-sensitive material 7 does not necessarily have to be formed continuously in the A direction, and may be formed only at a position intersecting each of the second wiring electrode group 4, for example. Even with such a configuration, in the plan view, each of the first wiring electrode group 3 and each of the third wiring electrode group 6 do not overlap with each other except for the temperature detection unit 21 and the pressure detection unit 22. Therefore, even with such a configuration, it is possible to suppress erroneous detection of the temperature distribution and the pressure distribution.

[2. Embodiment 2]
In the first embodiment, each of the first wiring electrode group 3 and each of the third wiring electrode group 6 are heavy except at the positions where both the conductive temperature-sensitive material 5 and the conductive pressure-sensitive material 7 are arranged. It was arranged so as not to be formed, thereby suppressing an unintended current from flowing between the first wiring electrode group 3 and the third wiring electrode group 6. In the second embodiment, unlike the first embodiment, the use of the insulating material suppresses an unintended current from flowing between the first wiring electrode group 3 and the third wiring electrode group 6. NS.

FIG. 12 is an enlarged view of a part of a main part of the sensor sheet 100A according to the second embodiment. Here, the differences between FIGS. 12 and 16 will be mainly described.

As shown in FIG. 12, in the sensor sheet 100A, an insulating layer is formed by the insulating material 900c above the conductive temperature-sensitive material 500a in the A direction. An insulating layer is formed by the insulating material 900a in the region between the conductive temperature-sensitive material 500a and the conductive temperature-sensitive material 500b in the A direction. An insulating layer is formed by the insulating material 900b in the region between the conductive temperature-sensitive material 500b and the conductive temperature-sensitive material 500c in the A direction. An insulating layer is formed by the insulating material 900d below the conductive temperature-sensitive material 500c in the A direction.

The cross section of XVII-XVII is the same as that shown in FIG. 17, and the mechanism for detecting the temperature distribution and the pressure distribution is the same as the conventional one.

FIG. 13 is a cross-sectional view taken along the line XIII-XIII of FIG. As shown in FIG. 13, an insulating layer is formed by the insulating material 900b above each of the first wiring electrode group 300. That is, an insulating layer is formed between each of the first wiring electrode group 300 and each of the third wiring electrode group 600.

Therefore, even if pressure is applied to the sensor sheet 100A by the elastic body, the first wiring electrode group 300 and the third wiring are provided except at the positions where both the conductive temperature-sensitive material 500 and the conductive pressure-sensitive material 700 are arranged. Since the insulating material 900 is present between the electrode group 600 and the electrode group 600, the current flowing between the first and third wiring electrodes is suppressed. As a result, according to the sensor sheet 100A, erroneous detection of temperature distribution and pressure distribution can be suppressed.

In the second embodiment, the insulating layer is above the first wiring electrode group 300 (on the film base material 200 side) except at the position where both the conductive temperature-sensitive material 500 and the conductive pressure-sensitive material 700 are arranged. However, an insulating layer may be formed below the third wiring electrode group 600 (on the film base material 800 side). Further, the insulating layer may be formed not only on one side but on both sides.

[3. Embodiment 3]
In the second embodiment, the insulating layer is formed only in the region between the conductive temperature-sensitive materials 500. In the third embodiment, an insulating layer is formed over the entire film base material 200. Hereinafter, the points different from those of the second embodiment will be mainly described.

FIG. 14 is an enlarged view of a part of a main part of the sensor sheet 100B according to the third embodiment. The cross section of XIII-XIII in FIG. 14 is the same as that of FIG. That is, also in the third embodiment, an unintended current is suppressed from flowing between the first wiring electrode group 300 and the third wiring electrode group 600 by the same mechanism as in the second embodiment.

As described above, in the third embodiment, the insulating layer is formed over the entire film base material 200. Therefore, if no special measures are taken, the first wiring electrode group 300 and the second wiring electrode group 400 will be used even at positions where both the conductive temperature-sensitive material 500 and the conductive pressure-sensitive material 700 are present. Since the insulating layer exists between them, the current flowing between the first wiring electrode group 300 and the second wiring electrode group 400 is suppressed. In this case, the temperature distribution cannot be detected properly. Therefore, in the third embodiment, the device is devised at the position where both the conductive temperature-sensitive material 500 and the conductive pressure-sensitive material 700 exist.

FIG. 15 is a cross-sectional view taken along the line XV-XV of FIG. That is, FIG. 15 is a cross-sectional view including a position where both the conductive temperature-sensitive material 500 and the conductive pressure-sensitive material 700 exist.

As shown in FIG. 15, at positions where both the conductive temperature-sensitive material 500 and the conductive pressure-sensitive material 700 are present, vias V (vias Va, Vb, Vc) are formed in the insulating layer formed by the insulating material 910. It is formed. Each of the first wiring electrode group 300A penetrates each via V and is exposed to the outside (upper side) of the insulating layer. As a result, it is avoided that the first wiring electrode group 300 and the second wiring electrode group 400 are electrically insulated.

As described above, in the sensor sheet 100B according to the third embodiment, the first wiring electrode group regardless of whether or not both the conductive temperature-sensitive material 500 and the conductive pressure-sensitive material 700 are arranged in the plan view. 300 is covered with insulating material 900. Therefore, according to the sensor sheet 100B, since the area to which the insulating material 900 is applied is relatively wide, the insulating material 900 can be applied more easily than in the second embodiment. Further, in the sensor sheet 100B, the first wiring electrode group 300 coated with the insulating material 900 is configured to penetrate the via V. Therefore, according to the sensor sheet 100B, it is possible to prevent the first wiring electrode group 300 and the second wiring electrode group 400 from being electrically insulated.

In the third embodiment, the insulating layer was formed above the first wiring electrode group 300 (on the film base material 200 side), but below the third wiring electrode group 600 (on the film base material 800 side). An insulating layer may be formed. In this case, the third wiring electrode group 600 penetrates the via V formed in the insulating layer at the position where both the conductive temperature-sensitive material 500 and the conductive pressure-sensitive material 700 are arranged. Further, the insulating layer may be formed not only on one side but on both sides.

1,100,100A, 100B sensor sheet, 2,200 film base material, 3,300 first wiring electrode group, 3a, 3b, 3c, 300a, 300b, 300c first wiring electrode, 4,400 second wiring electrode group 4, 4a, 4b, 4c, 400a, 400b, 400c 2nd wiring electrode, 5,5a, 5b, 5c, 500, 500a, 500b, 500c Conductive temperature sensitive material, 6,600 3rd wiring electrode group, 6a, 6b, 6c, 600a, 600b, 600c Third wiring electrode, 7,7a, 7b, 7c, 700, 700a, 700b, 700c Conductive pressure sensitive material, 8,800 film substrate, 10 system, 21,21a temperature detector, 22 , 22a Pressure detector, 40 PC, 50 connector, 900, 900a, 900b, 900c, 910 Insulation material, A1, A2, A3, A10 region, V, Va, Vb, Vc via.

Claims (5)

A plurality of first wiring electrodes arranged in the first layer,
A plurality of second wiring electrodes arranged in a second layer adjacent to the first layer and each intersecting the plurality of first wiring electrodes in a plan view.
A plurality of third wiring electrodes arranged in a third layer adjacent to the second layer and each intersecting the plurality of second wiring electrodes in a plan view.
A conductive temperature-sensitive material arranged between the first and second layers at each position where the first and second wiring electrodes intersect in a plan view.
A conductive pressure-sensitive material is provided between the second and third layers and arranged at each of the positions where the second and third wiring electrodes intersect in a plan view.
A sensor sheet in which the first and third wiring electrodes are arranged so as not to overlap each other except at a position where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view. The first wiring electrode is arranged so as not to overlap with the conductive pressure-sensitive material except at a position where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view. The sensor sheet according to 1. A plurality of first wiring electrodes arranged in the first layer,
A plurality of second wiring electrodes arranged in a second layer adjacent to the first layer and each intersecting the plurality of first wiring electrodes in a plan view.
A plurality of third wiring electrodes arranged in a third layer adjacent to the second layer and each intersecting the plurality of second wiring electrodes in a plan view.
A conductive temperature-sensitive material arranged between the first and second layers at each position where the first and second wiring electrodes intersect in a plan view.
A conductive pressure-sensitive material arranged between the second and third layers at each position where the second and third wiring electrodes intersect in a plan view.
A first insulating material configured to cover at least one of the first and third wiring electrodes except at a position where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view. A sensor sheet to prepare. A second insulating material configured to cover at least one of the first and third wiring electrodes is further provided at a position where both the conductive temperature-sensitive material and the conductive pressure-sensitive material are arranged in a plan view. ,
Vias are formed in the insulating layer formed by the second insulating material.
The sensor sheet according to claim 3, wherein the wiring electrode coated with the second insulating material among the first and third wiring electrodes is configured to penetrate the via. Each of the plurality of second wiring electrodes is orthogonal to the plurality of first wiring electrodes in a plan view.
The sensor sheet according to any one of claims 1 to 4, wherein each of the plurality of third wiring electrodes is orthogonal to the plurality of second wiring electrodes in a plan view.

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