JP6909527B2 - Work holding jig and surface treatment device - Google Patents

Description

The present invention relates to a work holding jig, a surface treatment apparatus, and the like used for surface treatment such as electrolytic plating.

A continuous plating apparatus is known in which a work is hung down by a work holding jig, immersed in a treatment liquid in a treatment tank, and electrolytically plated while continuously transporting the work (Patent Documents 1 and 2). The work holding jig holds the work and sets the work as a cathode.

Japanese Patent No. 5898540 WO2018 / 062259 Gazette

The work holding jig holds the work by the upper clamper and the lower clamper, and is electrically connected to the rectifier via the conductive upper clamper and the lower clamper work to set the work as the cathode. When the work is electrolytically plated in this way, there is a problem that the lower edge portion where the work is held by the lower clamper is locally thick-plated only in the vicinity of the lower clamper which is completely submerged in the treatment liquid. In the upper clamper, only the clamp region at the tip is submerged in the treatment liquid, which causes a problem similar to the problem pointed out by the lower clamper.

Some aspects of the present invention aim to improve the in-plane uniformity of the surface-treated work by adjusting the current flowing through the edge of the work near the region clamped by the clamper.

(1) One aspect of the present invention is a work holding jig capable of hanging and holding a work to be surface-treated, immersing the work in a treatment liquid, and electrically connecting to a rectifier.
A support that can conduct with the rectifier,
A conductive clamper that is supported by the support and clamps the edge of the work,
Have,
The clamper
A fixed portion fixed to the support portion and
A movable portion that is swingably supported with respect to the fixed portion and clamps the edge portion of the work with the first surface of the fixed portion.
The fixing portion has a third surface facing the second surface opposite to the first surface, a fourth surface opposite to the third surface, a base end portion, and a tip end portion. A conductive dummy plate whose base end portion is supported by the fixing portion so that the fourth surface is parallel to the second surface of the fixing portion.
An insulating adjusting member that covers the fourth surface of the dummy plate and is movably supported by the dummy plate.
Including
The adjusting member relates to a work holding jig for adjusting an exposed conductive area on the fourth surface side of the tip portion of the dummy plate.

According to one aspect of the present invention, the exposed conductive surface on the fourth surface side at the tip of the dummy plate is surface-treated together with the work. By changing the exposed conductive area of the dummy plate, the current consumed for the surface treatment of the dummy plate is adjusted. As a result, the current flowing through the fixed portion of the clamper to the edge of the work is adjusted. Without the dummy plate and the adjusting member, the current flowing to the lower edge of the work through the fixing part of the clamper increases, and it is the edge of the work near the area in contact with the fixing part and the side in contact with the fixing part. The current is concentrated on the surface of. As a result, the surface treatment in that region proceeds locally. According to one aspect of the present invention, the in-plane uniformity of the surface-treated work can be improved by adjusting the current flowing in the local region at the edge of the work. The jig according to one aspect of the present invention may be continuously or intermittently conveyed in the processing tank, or may be freely supported in and out of the processing tank without being conveyed.

(2) In one aspect (1) of the present invention, it is preferable that the dummy plate is insulatingly coated except for the fourth surface at the tip portion. As a result, the surface of the tip of the dummy plate other than the fourth surface is not unnecessarily surface-treated.

(3) In one aspect (1) or (2) of the present invention, the dummy plate can change the fixing position of the base end portion with respect to the fixing portion in a direction parallel to the direction in which the adjusting member can move. Can be. In this way, the overlapping area between the second surface of the clamper or the main surface of the work and the dummy plate can be adjusted from the side view seen from the direction orthogonal to the main surface of the work. The position adjustment also adjusts the current consumed for the surface treatment of the dummy plate.

(4) In one aspect (1) to (3) of the present invention, the support portion can be a lower frame arranged below the work, and the clamper is supported by the lower frame. It can be a conductive lower clamper that clamps the lower edge of the work. In this way, the current flowing in the local region of the lower edge of the work can be adjusted to improve the in-plane uniformity of the surface-treated work.

(5) In one aspect (1) to (3) of the present invention, the support portion can be an upper frame arranged above the work, and the clamper is supported by the upper frame. It can be a conductive upper clamper that clamps the upper edge of the work. In this way, the current flowing in the local region of the upper edge of the work can be adjusted to improve the in-plane uniformity of the surface-treated work.

(6) Yet another aspect of the present invention is
With the work holding jig according to any one of (1) to (5) described above,
A power supply unit that is connected to the rectifier and comes into contact with the work holding jig.
A surface treatment tank provided with an anode connected to the rectifier at a position facing at least the fourth surface of the dummy plate.
Have,
The work holding jig relates to a surface treatment device including a contact portion that comes into contact with the power feeding portion and conducts with the lower frame.

According to another aspect of the present invention, the in-plane uniformity of the work to be surface-treated can be enhanced by the action and effect of each of the above-mentioned aspects (1) to (5). When the jig is conveyed in the surface treatment tank, the power feeding unit provided in the surface treatment device and in contact with the jig is a power feeding rail. When the jig is not transported, the feeding portion can be a fixed contact that comes into contact with the conductive member of the jig.

It is a vertical sectional view of the surface treatment apparatus which concerns on embodiment of this invention. It is a partially enlarged view of FIG. It is a side view which saw the work holding jig from the transport direction. It is a figure which shows the support structure of the contact part provided in the work holding jig. It is a front view of the work holding jig. It is a figure which shows typically the jig of the comparative example. It is a characteristic diagram of the comparative example which shows the current flowing through the jig in FIG. It is a figure which shows typically the jig which concerns on embodiment of this invention. It is a characteristic diagram of this embodiment which shows the current flowing through the jig in FIG. It is a figure which shows the upper dummy plate and the insulating plate in an enlarged manner. It is a side view of the upper dummy plate. It is a figure which shows that the upper dummy plate can move between a 1st position and a 2nd position. It is a figure which shows the dummy plate and the adjustment member provided in the lower clamper. It is a top view which shows the state which the adjustment member was put on the dummy plate. FIG. 5 is a view taken along the line DD of FIG. It is a front view of the 1st side dummy member. It is a figure which shows the upper support structure of the 1st and 2nd side dummy members. It is a top view of the upper support structure of the 1st and 2nd side dummy members. It is a figure which shows the lower support structure of the 1st and 2nd side dummy members.

The following disclosures provide many different embodiments and examples for implementing the different features of the presented subject matter. Of course, these are just examples and are not intended to be limited. In addition, the present disclosure may repeat reference numbers and / or letters in various examples. This repetition is for brevity and clarity and does not itself require a relationship with the various embodiments and / or the configurations described. Further, when the first element is described as "connected" or "connected" to the second element, such a description is such that the first element and the second element are directly connected to each other. An embodiment in which the first element and the second element are indirectly connected or connected to each other with one or more other elements intervening between them, including embodiments connected or connected to. Also includes morphology. Also, when the first element is described as "moving" with respect to the second element, such a description is relative to the movement of at least one of the first element and the second element with respect to the other. Includes embodiments of various movements.

1. 1. Outline of Surface Treatment Device FIG. 1 is a vertical cross-sectional view of a surface treatment device, for example, a continuous plating treatment device. In the continuous plating processing device 10, a plurality of transfer jigs 30 for each holding a work 20 such as a circuit board are circulated and transported in a direction perpendicular to the paper surface of FIG. In FIG. 1, one of the circulation transport paths 100 shows two parallel linear transport paths 110 and 120. The two straight transport paths 110 and 120 are connected at both ends to form a loop-shaped circulation transport path 100.

In the circulation transfer path 100, a plating tank (in a broad sense, a surface treatment tank) 200 for surface-treating, for example, plating the work 20 held by each of the plurality of work holding jigs 30, and a plurality of untreated workpieces 20 are conveyed. A carry-in portion (not shown) for carrying in the jig 30 and a carry-out portion (not shown) for carrying out the processed work 20 from the plurality of work holding jigs 30 are provided.

In the present embodiment, the plating tank 200 is provided along the second straight transport path 120, and the carry-in portion and the carry-out portion are provided in the first straight transport path 110. The circulation transport path 100 further includes a pretreatment tank group 230 arranged on the upstream side of the plating tank 200 and a posttreatment tank group (not shown) arranged on the downstream side of the plating tank 200.

As shown in FIG. 1, the continuous plating processing apparatus 10 has a plating tank (surface treatment tank in a broad sense) 200 in which a plating liquid (treatment liquid in a broad sense) is housed and has an upper end opening 201. The continuous plating processing apparatus 10 is further parallel to the longitudinal direction of the plating tank 200 at a position deviated from above the upper end opening 201 of the plating tank 200, as shown in FIG. 2 which shows a part of FIG. 1 in an enlarged manner. It has at least one, for example, two first guide rails 130 and a second guide rail 140 extending along a first direction (direction perpendicular to the paper surface). The plurality of transfer jigs 30 are arranged in the processing liquid of the plating tank 200 to hold the work 20 respectively, and are supported by the first and second guide rails 130 and 140.

As shown in FIG. 3, each of the plurality of work holding jigs 30 has a transport unit 300 and a work holding unit 500. The transport portion 300 includes a horizontal arm portion 301, a first guided portion 310, and a second guided portion 320. The first guided portion 310 is supported by one end side of the horizontal arm portion 301 and is guided by the first guide rail 130. The second guided portion 320 is supported on the other end side of the horizontal arm portion 301 and is guided by the second guide rail 140. The first guided portion 310 includes rollers 311, 312, 313 that are transferred to the upper surface and both side surfaces of the first guide rail 130. The second guided portion 320 includes a roller 321 that is transferred to the upper surface of the second guide rail 140.

In the plating processing apparatus 10, the work 20 is used as a cathode, and the plating tank 200 is provided with anode boxes 202 and 203 for accommodating anodes 410L and 410R on both sides of the transport path of the work 20. An electric field is formed between the cathode and the anode by a rectifier (not shown) to electrolyze the plating solution, and the work 20 is electrolytically plated. Therefore, it is necessary to energize the work 20 being conveyed. A power feeding unit, for example, a power feeding rail 210 is provided to supply power to the work 20. In particular, the power supply rail 210 of the present embodiment has a plurality of, for example, four split power supply rails 210A to be insulated from each other, as shown in FIG. 2, in order to carry out the current control method disclosed in Japanese Patent Application Laid-Open No. 2009-132999. It has 210D. Each of the plurality of work holding jigs 30 has a power supply unit 340 (FIGS. 2 and 3) in which power is supplied in contact with any one of the four split power supply rails 210A to 210D.

FIG. 4 shows the details of the power supply unit 340. The power supply unit 340 has a conductive contact unit (collecting current) 341 that contacts the power supply rail 210 on the support plate 330 fixed to the horizontal arm unit 301. The contact portion 341 is connected to the support plate 330 by a parallel link mechanism 342 having two parallel links 342A and 342B. The two links 342A and 342B are constantly moved and urged in the clockwise direction by the torsion coil springs 343 and 343 which are urging members. As a result, the contact portion 341 can be brought into contact with the power feeding rail 210 with an appropriate contact pressure.

Further, the two parallel links 342A and 342B are inclined so that the upper fulcrum precedes and the lower fulcrum follows with respect to the transport direction A of the jig 30. As a result, the contact portion 341 travels in a form of being pulled by the work holding jig 30, so that the traveling is stable.

2. Work-holding portion As shown in FIG. 5, the work-holding portion 500 has a plurality of conductive upper clampers 510 for clamping the upper edge portion 20a of the rectangular work 20 and conductive portions for clamping the lower edge portion 20b of the rectangular work 20. It has a plurality of lower clampers 520 and a frame body 530 arranged around the rectangular work 20 and supporting the plurality of upper clampers 510 and the plurality of lower clampers 520.

The frame body 530 includes a conductive upper frame 531 that supports a plurality of upper clampers 510, a conductive lower frame 532 that supports a plurality of lower clampers 520, and both ends of the upper frame 531 and both ends of the lower frame 532. It has a pair of conductive vertical frames 533 and 534 that connect the portions to each other. Here, the pair of vertical frames 533 and 534 are electrically insulated from both ends of the upper frame 531 while being electrically connected to both ends of the lower frame 532. The upper frame 531 and / or the lower frame 532 is also referred to as a support portion that supports the clamper (upper clamper 510 and / or lower clamper 520).

3. 3. Conductive member that sets the work as the cathode In the present embodiment, the conductive member provided on the work holding jig 30 that can be electrically connected to the rectifier and the work 20 is the first and second branched conductive members. It includes a member and a common conductive member that is electrically connected to the first and second branched conductive members.

Specifically, as shown in FIG. 5, two pairs of contact portions 341 are arranged at intervals in the transport direction A of the work holding jig 30. The contact portion 341 on the upstream side in the transport direction A is referred to as a first contact portion 341A, and the contact portion 341 on the downstream side in the transport direction A is referred to as a second contact portion 341B. One ends of the pair of first cables 350A and 350B are electrically connected to the first and second contact portions 341A and 341B.

The other ends of the pair of first cables 350A and 350B are commonly connected to the common connection portion 360. The common connecting portion 360, which is a common conductive member, is fixed to both ends of the first conductive member 361 and the first conductive member 361 to which the other ends of the pair of first cables 350A and 350B are electrically connected in common. A pair of second conductive members 362 and 363 can be included. The pair of second conductive members 362 and 363 are located at a position equidistant L from the position where the other ends of the pair of first cables 350A and 350B are electrically connected to the first conductive member 361. It is fixed to both ends of 361. In order to commonly connect the pair of first cables 350A and 350 at positions equidistant L from both ends of the first conductive member 361, one of the pair of first cables 350A and 350 is attached to the surface of the first conductive member 361. It may be connected and the other may be connected to the back surface of the first conductive member 361.

As conductive members provided on the work holding jig 30, a pair of first connecting portions 370A and 370B that electrically connect both ends of the upper frame 531 and the common connecting portion 360, and both ends of the lower frame 532 are electrically connected. It further has a pair of second connecting portions 380A and 380B that electrically connect the pair of vertical frames 533 and 534 connected to the common connecting portion 360. The pair of vertical frames 533 and 534 are electrically insulated from the upper frame 531. By adjusting the resistance value by adjusting the shape, thickness, material, etc. of the pair of second connecting portions 380A and 380B, the current flowing through the upper clamper 510 can be adjusted.

The first branched conductive member is formed of a member that electrically conducts the common connecting portion 360 with one of the plurality of upper clampers 510 via one of the pair of first connecting portions 370A and 370B and the upper frame 531. NS. In this case, the second branched conductive member electrically conducts the common connecting portion 360 with the other one of the pair of first connecting portions 370A and 370B and the other one of the plurality of upper clampers 510 via the upper frame 531. It is formed of a member to be used.

Alternatively, the first branched conductive member connects the common connecting portion 360 to a plurality of lower clampers via one of the pair of second connecting portions 380A and 380B, one of the pair of vertical frames 533 and 534, and the lower frame 532. It is formed of a member that is electrically conductive with one of the 520s. In this case, the second branched conductive member has a plurality of lower sides of the common connecting portion 360 via the other of the pair of second connecting portions 380A and 380B, the other of the pair of vertical frames 533 and 534, and the lower frame 532. It is formed of a member that is electrically conductive with the other one of the clamper 520.

Here, the common connection portion 360 is a common conductive member is a maximum resistance difference 10 ³ times or more the resistance value of ΔRΩ between the first and second branch conductive member, and greater resistance than copper and aluminum Includes high resistance materials of value r. In the present embodiment, in the common connection portion 360, a pair of second conductive members 362 and 363 are formed of a high resistance material, and the first conductive member 361 is formed of a low resistance member.

Examples of the high resistance material include stainless steel (SUS). For example, the volume resistivity (Ω · m) of SUS304 is 73.7, which is more than an order of magnitude larger than 1.7 Ω · m of copper and 2.8 Ω · m of aluminum. Since the measured maximum resistance difference ΔRΩ is 10～20Emuomega, resistance value r of the high-resistance material, meets r ≧ ΔR × 10 ^3. Similarly, for example, 53.3 Ω · m titanium is also suitable as a high resistance material.

Here, the rectifier electrically connected to the work holding jig 30 via the power supply rail 210 causes E = R according to the impedance Z of the closed loop system of the current path in order to pass the set constant current I. Adjust the voltage E so that it becomes × I. In the present embodiment, the closed-loop resistor R includes a high resistance value r of a pair of second conductive members, which are common conductive members, having a resistance value larger than that of copper or aluminum, which is generally regarded as a low resistance. A first branch conductive member, between the second branch conductive member (i.e., a plurality of between the upper clamper 510 or more between the lower clamper 520,) the maximum resistance difference ΔRΩ occurring in, r ≧ 10 ³ × When ΔRΩ, the resistance R of the system including the resistance value r also increases. Therefore, the rectifier adjusts to a relatively large voltage V and supplies a constant current I. In this way, the currents (or electrons) flowing through the first and second branched conductive members are merged at the common connection portion 360, and the variation voltage corresponding to the variation ΔRΩ of the resistance between the first and second branched conductive members. If the current I is passed at a voltage E that greatly exceeds ΔV, the resistance variation ΔRΩ can be ignored.

3.1. Current monitor of the comparative example FIG. 6 schematically shows a jig of the comparative example in which the common connection portion 360 does not include a material having a high resistance value r as in the present embodiment. Let the current A1 flow through the contact portion on the upstream side of the transfer direction A of the jig of the comparative example in FIG. 6 and the current A2 flow through the contact portion on the downstream side of the transfer direction A.

In the measurement shown in FIG. 7, the set current of the rectifier was set to 204 A (= A1 + A2), and the branch set current (A1, A2) that splits and flows in two was set to 102 A. The currents A1 and A2 measured while transporting the work holding jig in the transport direction A in FIG. 6 fluctuated up and down with respect to the branch set current value as shown in FIG. Before and after the times T1 and T2, as disclosed in Japanese Patent Application Laid-Open No. 2009-132999, the jig is transferred from one power supply rail to the other power supply rail through the seam between the power supply rails, so that the jig comes into contact with one power supply rail. The rectifier implements control in which the current value of the contacting portion is gradually reduced and the current value of the contacting portion in contact with the other feeding rail is gradually increased. In the section other than the current gradual decrease / increase control, the rectifier controls the output according to the set current. However, the currents A1 and A2 of the comparative example shown in FIG. 7 fluctuate little by little in the constant current control section, and fluctuate greatly in the current gradual decrease / increase control.

3.2. Current monitor of this embodiment FIG. 8 schematically shows a jig 30 of this embodiment in which a material having a high resistance value r is included in a common connection portion 360. The current A1 flowing through the contact portion 341A on the upstream side of the transfer direction A of the jig 30 in FIG. 8, the current A2 flowing through the contact portion 341B on the downstream side of the transfer direction A, and the pair of first connection portions 370A and 370B. Let the flowing currents A3 and A4 and the currents A5 and A6 flowing through the pair of second connection portions 380A and 380B.

In the measurement shown in FIG. 9, the set current of the rectifier was set to 131A (= A1 + A2), and the branching current (A1, A2) flowing in two was set to 65.5A. Before and after the time T, the current was gradually reduced / increased in the same manner as the times T1 and T2 shown in FIG. 7, and the output was controlled according to the set current in the other sections. As shown in FIG. 9, the currents A3 to A6 measured while transporting the work holding jig 30 in the transport direction A in FIG. 8 have constant branch currents A3 and A4 flowing from the left and right sides of the jig 30 to the upper clamper 510. Therefore, the branch currents A5 and A6 flowing from the left and right sides of the jig 30 to the lower clamper 520 were also constant.

In the present embodiment, in the conduction path between the rectifier and the common connection portion 360, there is a resistance difference due to variations in the contact resistance of the first and second contact portions 341A and 341B caused by local dirt on the power supply rail 210 or the like. Although there is a resistance difference at the time of connecting the power supply rail 210, these adverse effects can be reduced by providing the common connection portion 360 having the resistance value described above.

In the present embodiment, the pair of first connecting portions may include a pair of metal plates 370A, 370B, while the pair of second connecting portions may include a pair of second cables 380A, 380B. In this way, the resistance value from the common connection portion 360 to the upper clamper 510 can be made larger than the resistance value from the common connection portion 360 to the lower clamper 520.

In this way, as compared with the upper clamper 510 in which only the tip portion is immersed in the treatment liquid, the lower clamper generates a current corresponding to the current consumed for the surface treatment of the lower clamper 520 in which the whole is immersed in the treatment liquid. The work can be energized via 520. In FIG. 9, by making the currents A5 and A6 flowing in the lower clamper 520 larger than the currents A3 and A4 flowing in the upper clamper 510, as a result, the current flowing in the work 20 from above and below can be made substantially constant. ..

4. Upper dummy plate / lower dummy plate As shown in FIG. 5, when the upper frame 531 and / or the lower frame 532 is used as a conductive support portion, the upper and / or lower clampers 510 and 520 are added to the support portion. , The conductive upper dummy plate 610 and / or the conductive lower dummy plate 620 can be provided. The upper dummy plate 610 is arranged close to the upper edge portion 20a of the work 20 in a region of the upper edge portion 20a of the work 20 that is not held by the upper clamper 510. The lower dummy plate 620 is arranged close to the lower edge portion 20b of the work 20 in a region of the lower edge portion 20b of the work 20 that is not held by the lower clamper 520.

Each of the upper dummy plate 610 and the conductive lower dummy plate 620 is movably supported on at least one surface, for example, the front and back surfaces so as to cover the front surface and the back surface, respectively, to cover the exposed conductive areas of the dummy plates 610 and 620, respectively. It can have an insulating plate 630 to adjust.

The upper dummy plate 610 is enlarged and shown in FIG. The structure shown in FIG. 10 is also adopted in the lower dummy plate 620. As shown in FIG. 10, the upper dummy plate 610 is fixed to the upper frame 351 via a hinge 611 formed integrally with or separately from the upper dummy plate 610, for example, by a screw 612. The insulating plate 630 covering both sides of the upper dummy plate 610 may have one or both of the insulating plate 630A covering the front surface of the upper dummy plate 610 and the insulating plate 630B covering the back surface of the upper dummy plate 610. The insulating plates 620A and 620B are inserted into the vertical elongated holes 631A and 631B (only the elongated holes 631A are shown in FIG. 10) provided in the insulating plates 630A and 630B and the holes 612 provided in the upper dummy plate 610, respectively. The bolt 641 and the nut 642 screwed into the bolt 641 are fastened together with the upper dummy plate 610, for example.

Each of the insulating plates 620A and 620B can adjust its position in the vertical direction with respect to the upper dummy plate 610 (lower dummy plate 620) within the range of the elongated holes 631A and 631B. As a result, as shown in FIG. 10, the exposed area S of the conductive surface on which the tip portion 610A of the upper dummy plate 610 is exposed can be adjusted independently on the front surface and the back surface. By changing the exposed conductive area S of the upper dummy plate 610, the current consumed for the surface treatment of the upper dummy plate 610 is adjusted. As a result, the current flowing through the upper edge portion 20a of the work 20 via the upper clamper 510 is adjusted. In this way, the in-plane uniformity of the work to be surface-treated can be improved by adjusting the current flowing through the upper edge portion 20a of the work 20. By adjusting the lower dummy plate 620 in the same manner, the current flowing through the lower edge portion 20b of the work 20 can be adjusted to improve the in-plane uniformity of the surface-treated work.

The upper dummy plate 610 can be bent between the first position P1 shown by the solid line in FIG. 12 and the second position P2 shown by the chain line via the hinge 611. At the first position P1, the upper dummy plate 610 approaches the region of the upper edge portion 20a of the work 20 that is not held by the upper clamper 510 and is arranged in parallel with the work 20. At the second position P2 , the upper dummy plate 610 is non-parallel to the main surface of the work 20, for example, intersects the main surface of the work 20 at a right angle.

When the work 20 is surface-treated, the upper dummy plate 610 is set to the first position P1. On the other hand, when the work 20 is attached to and detached from the work holding jig 30 by an automatic machine, the upper dummy plate 610 is set to the second position P2. By setting the upper dummy plate 610 to the second position P2, a gap is secured between the upper edge portion 20a of the work 20 and the upper frame 351. As a result, the upper edge portion of the work 20 can be clamped by an automatic machine at a position different from that of the upper clamper 510 of the work holding jig 30. In this case, the upper dummy plate 610 may be pushed by an automatic machine to move the upper dummy plate 610 from the first position P1 to the second position P2 in the direction of the arrow F1. For example, as shown in FIG. 12, the upper dummy plate 610 may be pushed by the roller 1100 at the tip of the moving arm 1000 provided in the automatic machine. The lower dummy plate 620 can be bent between the first position P1 and the second position P2 in the same manner.

The upper dummy plate 610 may be moved and urged to the first position P1 by the springiness of the hinge 611 itself or by an urging member such as a leaf spring or a coil spring provided on the hinge 611. In this way, the upper dummy plate 610 can be returned from the second position P2 to the first position P1 in the direction of the arrow F2 without applying a return external force. Similarly, the lower dummy plate 620 can be returned in the arrow F2 direction from the second position P2 to the first position P1 without applying a return external force.

When the work holding jig has upper, lower, left and right clampers for clamping the four sides of the rectangular work 20, a dummy plate and an insulating plate may be provided on each of the four sides of the clamper.

5. Dummy plate and adjusting member of the clamper Hereinafter, the dummy plate and the adjusting member provided on one or both of the upper clamper 510 and the lower clamper 520 will be described by taking the lower clamper 520 as an example. The dummy plate and adjusting member provided on the upper clamper 510 are understood by reading "lower clamper 520" as "upper clamper 510" and "lower frame 532" as "upper frame 531" in the following description. NS.

FIG. 13 shows a dummy plate 700 and an adjusting member 720 provided on the lower clamper 520. First, the lower clamper 520 includes a fixed portion 521 fixed to the lower frame 532 and a movable portion 523 oscillatingly supported with respect to the fixed portion 521. The fixing portion 521 has a first surface 521A and a second surface 521B on the opposite side thereof. The second surface 521B of the fixing portion 521 comes into surface contact with the lower frame 532 and is fixed to the lower frame 532 by the bolt 522. The fixing portion 521 has two side walls 521C that stand vertically from the first surface 521A.

The lower edge portion 20b of the work 20 is locally clamped between the swinging movable portion 523 and the first surface 521A of the fixing portion 521. The movable portion 523 can swing around the pin 524 supported by the two side walls 521C of the fixed portion 521. A coil spring 525 is inserted through the pin 524. The movable portion 523 is moved and urged toward the fixed portion 521 by the coil spring 525. The movable portion 523 is electrically connected to the lower frame 532 via the fixing portion 521, the pin 524, or the coil spring 525. In order to lower the resistance value of this conduction path, the coil spring 525 may be changed to a leaf spring or the like.

The conductive dummy plate 700 includes a third surface 700A facing the second surface 521B of the fixing portion 521 and a fourth surface 700B opposite to the third surface 700A. Further, one end of the dummy plate 700 is referred to as a base end portion 701, and the other end portion is referred to as a tip end portion 704. In the dummy plate 700, the base end portion 701 is supported by the fixing portion 521 so that the fourth surface 700B is parallel to the second surface 521B of the fixing portion 521.

Here, as shown in FIG. 14, for example, two elongated holes 702 and 703 can be formed in the base end portion 701 of the dummy plate 700. Bolts 710 are inserted into each of the elongated holes 702 and 703, and the bolts 710 are fastened to the lower frame 532. The elongated holes 702 and 703 allow the dummy plate 700 to adjust its fixed position in the direction of arrow C in FIG.

As shown in FIGS. 13 and 14, the insulating adjusting member 720 covers a part of the fourth surface 700B of the dummy plate 700 and is superposed on the dummy plate 700. The conductive surface that is not always covered by the adjusting member 720 can be only the tip portion 704. As shown by hatching in FIGS. 13 and 14, the other surface not covered by the adjusting member 720 is insulatingly coated.

As shown in FIG. 14, for example, two elongated holes 721 and 722 are formed in the adjusting member 720. Bolts 730 are inserted into each of the elongated holes 721 and 722, and the bolts 730 are fastened to the dummy plate 700. The elongated holes 702 and 703 allow the adjusting member 720 to adjust the fixed position in the direction of arrow C in FIG. As a result, the adjusting member 720 can adjust the exposed conductive area S2 on the fourth surface 700B side of the tip portion 704 of the dummy plate 700.

The exposed conductive surface on the fourth surface 700B side of the tip portion 704 of the dummy plate 700 is surface-treated. By changing the exposed conductive area S2 of the dummy plate 700, the current consumed for the surface treatment of the dummy plate 700 is adjusted. As a result, the current flowing through the lower edge portion 20b of the work 20 via the fixing portion 521 of the lower clamper 520 is adjusted. Without the dummy plate 700 and the adjusting member 720, the current flowing through the fixing portion 521 of the lower clamper 520 to the lower edge portion 20b of the work 20 increases. This is because, as described above, the resistance value between the movable portion 523 and the lower frame 532 is relatively large. Therefore, the current does not concentrate on the lower edge portion 20b of the work 20 near the region in contact with the movable portion 523 and the surface 20b1 (FIG. 13) on the side in contact with the movable portion 523. On the other hand, there is a strong tendency for the current to concentrate on the lower edge portion 20b of the work 20 near the region in contact with the fixed portion 521 and the surface 20b2 (FIG. 13) on the side in contact with the fixed portion 521. As a result, the surface treatment of the work 20 locally proceeds in the region near the fixed portion 521. According to this embodiment, the current flowing in the local region 20b2 of the lower edge portion 20b of the work 20 can be adjusted to improve the in-plane uniformity of the surface-treated work.

Further, the elongated holes 702 and 703 can change the fixing position of the base end portion 701 of the dummy plate 700 with respect to the fixing portion 521 in a direction parallel to the arrow C direction in which the adjusting member 720 can move. In this way, the overlapping area between the second surface 521B of the fixed portion 521 of the lower clamper 520 or the main surface of the work and the dummy plate 700 can be adjusted from the side view seen from the direction orthogonal to the main surface of the work 20. Can be done. The position adjustment also adjusts the current consumed for the surface treatment of the dummy plate 700.

Here, in the processing liquid Q in the processing tank 200 shown in FIG. 1, the liquid level L shown in FIG. 5 is set with respect to the jig 30. Therefore, the entire lower clamper 520 is submerged in the treatment liquid Q. Therefore, the dummy plate 700 is insulatingly coated on the other surfaces that are not covered by the adjusting member 720, as shown by hatching in FIGS. 13 and 14, except for the fourth surface 700B at the tip portion 704. As a result, the surface of the tip portion 704 of the dummy plate 700 other than the fourth surface 700B is not unnecessarily surface-treated.

The structure of the dummy plate 700 and the adjusting member 720 provided on the lower clamper 520 described above can also be applied to the dummy plate and the adjusting member provided on the upper clamper 510. The upper clamper 510 is different from the lower clamper 520 in that the entire upper clamper 510 is not submerged in the treatment liquid Q from the position of the liquid level L of the treatment liquid Q shown in FIG. Therefore, the dummy plate provided on the upper clamper 510 may narrow the insulating coating region to only the region submerged in the treatment liquid Q. This is because the region that is not immersed in the treatment liquid Q is not surface-treated, so that it is not necessary to perform an insulating coating.

6. First and Second Side Dummy Members As shown in FIG. 5, the work holding jig 30 is a conductive first and second side dummy members 800A arranged close to both measuring edges of the work 20. , 800B can be further provided. As shown in FIG. 15, which is a view taken along the line DD of FIG. 5, the first side dummy member 800A is arranged between the side edge portion 20d of the work 20 and the vertical frame 534. The second side dummy member 800B is arranged between the side edge portion 20c of the work 20 and the vertical frame 534.

Here, a pair of first branched conductive members that are electrically connected to the second conductive member 362 of the common conductive member 360, are branched from the common conductive member 360, and are electrically connected to the work 20 via the upper clamper 510. It is defined by the first connecting portions 370A and 370B and the upper frame 531 to which they are connected to both ends. The work holding jig 30 is further electrically connected to the common conductive member 360, and is branched from the common conductive member 360 to be electrically connected to the first and second side dummy members 800A and 800B. It further has 900 (900A, 900B). The first dummy conducting member 900A of the second branched conductive member 900 is branched from the common conductive member 360 and conducts with the first side dummy member 800A. The second dummy conductive member 900B of the second branched conductive member 900 is branched from the common conductive member 360 and conducts with the second side dummy member 800B.

The common conductive member 360 electrically connectable to the rectifier is conducted with the work 20 by the upper clamper 510 via the first branched conductive members 370A, 370B, 531. The common conductive member 360 is conducted with the first and second side dummy members 800A and 800B via the second branched conductive member 900 (900A and 900B). The total current flowing through the work 20, the first and second side dummy members 800A and 800B can be set by the rectifier. Here, it is assumed that the vertical frames 533 and 534 are insulatingly coated. Without the first and second side dummy members 800A and 800B, the electric field is concentrated on both side edge portions 20c and 20d of the work 20, and the current flowing through both side edge portions 20c and 20d of the work 20 increases. When the vertical frames 533 and 534 are not insulatingly coated, current is consumed to plate the conductive vertical frames 533 and 534, and the current flowing through the side edges 20c and 20d of the work 20 is reduced. Therefore, the first dummy conducting member 900A and the second dummy conducting member 900B are provided so that the current flowing through both side edge portions 20c and 20d of the work 20 can be adjusted. Moreover, by independently setting the resistance value of the second branched conductive member 900 (900A, 900B) with respect to the first branched conductive member 370A, 370B, 531, it is independent of the current flowing through the work 20. , The current flowing through the first and second side dummy members 800A and 800B can be set. As a result, the first and second side dummy members arranged close to the side edge portions 20c and 20d of the work 20 are also surface-treated to adjust the current flowing through the side edge portions 20c and 20d of the work 20. It is possible to improve the in-plane uniformity of the work to be surface-treated. Further, by independently setting the resistance values of the first dummy conducting member 900A and the second dummy conducting member 900B, the currents flowing through the first and second side dummy members 800A and 800B can be independently set. Thereby, the current flowing through one side edge portion 20c of the work 20 and the other side edge portion 20d can be adjusted.

The first dummy conductive member 900A includes, for example, a cable 910A having one end connected to the second conductive member 362 of the common conductive member 360, a conductive plate 920A to which the other end of the cable 910A is connected, and one end to the conductive plate. It has a cable 930A that is connected and the other end is connected to the first side dummy member 800A. The second dummy conducting member 900B also has a cable 910B, a conductive plate 920B, and a cable 930B.

The first and second dummy conducting members 900A and 900B can have first and second variable resistors. The first variable resistor provided in the first dummy conducting member 900A is composed of an elongated hole 921A provided in the conductive plate 920A and a movable contact portion 922A that moves along the elongated hole 921A. The elongated hole 921A has a longitudinal direction in which the distance from the connection portion of the cable 910A becomes longer (horizontal direction in FIG. 5). The resistance value can be changed by changing the position of the movable contact portion 922A connected to the cable 930A. The second variable resistor provided in the second dummy conducting member 900B is also composed of the elongated hole 921B and the movable contact portion 922B in the same manner. Then, by adjusting the resistance value with the first and second variable resistors, the resistance value of the first dummy conducting member 900A and the resistance value of the second side dummy member 800B can be adjusted within a predetermined range. It can be adjusted arbitrarily. The positions of the movable contact portion 922A and the movable contact portion 922B are manually or automatically adjusted.

In the present embodiment, as shown in FIG. 5, the first dummy conducting member 900A conducts with the upper portion of the first side dummy member 800A, and the second dummy conducting member 900B is the second side dummy member 800B. Conducts with the upper part of. In this case, as shown in FIG. 16, each of the first side dummy member 800A and the second side dummy member 800B has widths W1, W2, and W3 parallel to the thickness direction of the work 20 above the lower portion. Is preferably formed narrowly (W1 <W2 <W3). The width may be changed stepwise or continuously. Since the upper part of the first and second side dummy members 800A and 800B is closer to the rectifier, the upper part tends to be surface-treated more than the lower part. As a result, the upper portions of the side edges 20c and 20d of the work 20 tend to be difficult to be surface-treated (the plating thickness becomes thin). By narrowing the widths of the first and second side dummy members 800A and 800B at the upper part, the upper parts of the side edge portions 20c and 20d of the work 20 can be easily surface-treated, and the plating film thickness can be secured also at the upper part. As a result, the current flowing from the upper part to the lower part can be effectively adjusted at both side edges of the work 20.

The first and second side dummy support portions provided on the work holding jig 30 will be described with reference to FIGS. 17 to 19. In FIGS. 17 to 19, for the first and second side dummy support portions, for example, as shown in FIG. 15, the first and second side dummy members 800A and 800B are attached to the first and second side dummy members 800A and 800B by arrows E in the width direction of the work 20. It can be changed in the direction and the arrow F direction, which is the thickness direction of the work 20.

17 and 18 are a front view and a plan view of a support portion that supports the upper portion of the first side dummy member 800A. Two mounting pieces 820A extending inward of the work holding jig 30 are provided on the upper portion of the vertical frame 534. An upper support piece 830A that supports the upper part of the first side dummy member 800A is arranged between the two mounting pieces 820A. The two mounting pieces 820A have elongated holes 821 with the direction of arrow E as the longitudinal direction. A bolt 835 inserted through the elongated hole 821 is screwed into the upper support piece 830A. If the bolt 835 is loosened, the upper support piece 830A can move in the direction of arrow E together with the first side dummy member 800A. By tightening the bolt 835, the upper support piece 830A is fixed to the two mounting pieces 820A.

As shown in FIG. 18, the upper support piece 830A has an elongated hole 831 that penetrates vertically and has an arrow F direction as a longitudinal direction. A bolt 810 inserted through the elongated hole 831 is screwed onto the upper portion of the first side dummy member 800A. If the bolt 810 is loosened, the first side dummy member 800A can move in the direction of arrow F. When the bolt 810A is tightened, the first side dummy member 800A is fixed to the upper support piece 830A. Although not shown, the upper portion of the second side dummy member 800B is also supported in the same manner as the upper portion of the first side dummy member 800A.

FIG. 19 shows a support portion that supports the lower portion of the first side dummy member 800A. Two mounting pieces 820A extending inward of the work holding jig 30 are provided on the upper portion of the vertical frame 534. A lower support piece 830B that supports the lower part of the first side dummy member 800A is arranged between the two mounting pieces 820A. The lower support piece 830B has the same structure as the upper support piece 830A, except for a structure that supports the connection portion 850 described later. Further, the lower portion of the second side dummy member 800B is also supported in the same manner as the lower portion of the first side dummy member 800A.

The first and second side dummy members 800A and 800B can be connected to the rectifier by connecting the cables 930A and 930B to the bolt 810 shown in FIG. 18, for example. In order to electrically insulate the first and second side dummy members 800A and 800B from the vertical frames 933 and 934, the mounting pieces 820A and / or the upper and lower support pieces 830A and 830B are formed of an insulator. ..

By moving the first and second side dummy members 800A and 800B in the width direction E of the work 20, the surface treatment amount (plating film thickness) of the work is adjusted at each of the side edge portions 20c and 20d of the work. Can be done. For example, if the first side dummy member 800A is moved to the left in FIG. 15, the plating film thickness of the side edge portion 20d of the work 20 can be reduced. Conversely, if movement of the first side dummy member 800A rightward in FIG. 15, it can increase the plating thickness of the side edge portions 20d of the workpiece 20. Therefore, the structure may be such that the first and second side dummy members 800A and 800B are moved only in the width direction E of the work 20.

By moving the first and second side dummy members 800A and 800B in the thickness direction F of the work 20, each of the side edge portions 20c and 20d of the work 20 has the front surface 20d1 and the back surface of the work 20 shown in FIG. The surface treatment amount (plating film thickness) at 20d2 can be adjusted. For example, if the first side dummy member 800A is moved upward in FIG. 15, the plating film thickness of the surface 20d1 of the work 20 can be reduced. On the contrary, if the first side dummy member 800A is moved downward in FIG. 15, the plating film thickness of the back surface 20d2 of the work 20 can be reduced. Therefore, the structure may be such that the first and second side dummy members 800A and 800B are moved only in the thickness direction F of the work 20.

As shown in FIG. 19, a connecting member 850 that electrically connects the lower portion of the first side dummy member 800A and the lower portion of the second side dummy member 800B can be further provided. By providing the connecting member 850, the current easily flows to the lower parts of the first and second side dummy members 800A and 800B, and the current flowing from the upper part to the lower part at both side edge portions 20c and 20d of the work 20 Adjustments can be made effectively.

Both ends of the connecting member 850 are slidably supported, for example, by the two lower support pieces 830B shown in FIG. Thereby, the movement of the two lower support pieces 830B in the direction of arrow E shown in FIG. 15 is allowed. Further, both ends of the connecting member 850 are electrically connected to the lower portions of the first and second side dummy members 800A and 800B by flexible conductive members. As a result, the first and second side dummy members 800A and 800B are allowed to move in the directions of arrows E and F shown in FIG.

2 0 ... workpiece, 20a ... upper edge, 20b ... lower edge, 20c, 20d ... side edges, 210 ... feeding unit (feeder rail), 30 ... work holding jig, 341A, 341B ... first, second Contact parts, 341A, 350A ... 1st branch conductive member, 341B, 350B ... 2nd branch conductive member, 350A, 350B ... Pair of first cables, 360 ... Common connection part (common conductive member), 361 ... 1st Conductive members, 362, 363 ... A pair of second conductive members, 370A, 370B ... A pair of first connecting portions (a pair of metal plates), 370A, 370B, 531 ... First branch conducting members, 380A, 380B ... A pair 2nd connection part (pair of 2nd cables), 380A, 380B, 533, 534 ... 1st branch conducting member, 410R, 410L ... anode 510 ... upper clamper, 520 ... lower clamper, 521 ... fixed part, 521A ... 1st surface, 521B ... 2nd surface, 523 ... Movable part, 530 ... Frame body, 513 ... Upper frame (support part), 532 ... Lower frame (support part), 533, 534 ... Pair of vertical frames, 610 ... Upper dummy plate, 620 ... Lower dummy plate, 611 ... Hinge, 630, 630A, 630B ... Insulating plate (upper insulating plate, lower insulating plate, front side insulating plate, back side insulating plate), 700 ... Dummy plate, 700A ... 3rd surface, 700B ... 4th surface, 701 ... Base end, 704 ... Tip, 720 ... Adjusting member, 800A ... 1st side dummy member, 800B ... 2nd side dummy member, 850 ... Connecting member, 900 ( 900A, 900B) ... Second branch conducting member, 900A ( 910A, 920A, 922A, 930A ) ... First dummy conducting member, 900B ( 910B, 920B, 922B, 930B ) ... Second dummy conducting member, 920A, 921A, 922A ... 1st variable resistor, 920B, 921B, 922B ... 2nd variable resistor, P1 ... 1st position, P2 ... 2nd position, S, S2 ... Exposed conductive area

Claims (6)

In a work holding jig that hangs and holds the work to be surface-treated, immerses the work in the treatment liquid, and can be electrically connected to the rectifier.
A support that can conduct with the rectifier,
A conductive clamper that is supported by the support and clamps the edge of the work,
Have,
The clamper
A fixed portion fixed to the support portion and
A movable portion that is swingably supported with respect to the fixed portion and clamps the edge portion of the work with the first surface of the fixed portion.
The fixing portion has a third surface facing the second surface opposite to the first surface, a fourth surface opposite to the third surface, a base end portion, and a tip end portion. A conductive dummy plate whose base end portion is supported by the fixing portion so that the fourth surface is parallel to the second surface of the fixing portion.
Wherein not covering a portion of said fourth surface of the dummy plate, and is movably supported along the first direction for the dummy plate, the fourth surface side of the distal end portion of the dummy plate an insulating adjusting member adjust the exposed electrically conductive area,
Work holding fixture according to claim including things. In claim 1,
The work holding jig is characterized in that the dummy plate is insulatingly coated except for the fourth surface at the tip portion. In claim 1 or 2,
The dummy plate is a work holding jig characterized in that the fixing position of the base end portion with respect to the fixing portion can be changed in a direction parallel to the first direction. In any one of claims 1 to 3,
The support portion is a lower frame arranged below the work.
A work holding jig characterized in that the clamper is a conductive lower clamper that is supported by the lower frame and clamps the lower edge portion of the work. In any one of claims 1 to 3,
The support portion is an upper frame arranged above the work.
A work holding jig characterized in that the clamper is a conductive upper clamper that is supported by the upper frame and clamps an upper edge portion of the work. The work holding jig according to any one of claims 1 to 5 and the work holding jig.
A power supply unit that is connected to the rectifier and comes into contact with the work holding jig.
A surface treatment tank provided with an anode connected to the rectifier at a position facing at least the fourth surface of the dummy plate.
Have,
The work holding jig is a surface treatment apparatus including a contact portion that comes into contact with the power feeding portion and conducts with the support portion.

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