JP6905818B2 - Temperature control unit and laser light source device - Google Patents

Description

The present invention relates to a temperature control unit for fixing a temperature control element and a laser light source device.

Conventionally, there is known a device that adjusts the temperature of a controlled object by fixing a temperature control element such as a Pelche element to a controlled object of temperature control (see, for example, Patent Document 1).
The apparatus described in Patent Document 1 discloses a configuration in which a Perche element is provided between a plate-shaped heat transfer member provided with a temperature control target and a radiator via a heat transfer member (grease or the like). ing. In this device, the radiator is fixed to the plate-shaped heat transfer member by the mounting member, so that the perche element is sandwiched and fixed between the radiator and the plate-shaped heat transfer member.

Japanese Unexamined Patent Publication No. 2006-86396

By the way, there are individual differences in the thickness dimension of the temperature control element such as the Perche element.
Therefore, as in Patent Document 1, when the Perche element is sandwiched and fixed, the temperature control efficiency differs for each solid due to the variation in the thickness dimension of the temperature control element, or the Perche element is damaged due to excessive stress. There is a problem that I end up doing.

An object of the present invention is to provide a temperature control unit capable of suppressing damage to a temperature control element and a decrease in temperature control efficiency, and a laser light source device.

The temperature control unit of one aspect according to the present invention includes a control target that controls the temperature, a temperature control element that controls the temperature of the control target, and a fixed portion that sandwiches the temperature control element together with the control target. A fixing mechanism for fixing the control target to the fixing portion is provided, and the fixing mechanism is inserted into a through-screw portion provided in the fixing portion to position the through-screw portion in the axial direction. It has an adjustable adjusting screw and a first surface and a second surface that intersect with respect to the axial direction, and the first surface is connected to one end surface of the adjusting screw that intersects with the axial direction. It is characterized by comprising a spacer whose surface is connected to the controlled object.

Here, the connection between the adjusting screw and the first surface of the spacer means that the first surface of the spacer is in contact with one end surface of the adjusting screw, and other methods such as a washer between the spacer and the adjusting screw. Includes a configuration in which a spacer is held by an adjusting screw with a member interposed therebetween. The same applies to the connection between the second surface of the spacer and the control target, and the second surface of the spacer may be in contact with the control target, or another member may be interposed between the spacer and the control target. May be.
In this embodiment, the position of the spacer held by the adjusting screw can be adjusted by adjusting the position of the adjusting screw in the through screw portion. That is, it is possible to adjust the dimension of the space for sandwiching the temperature control element between the controlled object and the fixed portion. Therefore, even if the thickness dimension of the temperature control element varies, the dimension between the control target and the fixed portion can be adjusted according to each temperature control element. As a result, the temperature control element can be brought into close contact with the controlled object and the fixed portion, the temperature control efficiency can be improved, and damage due to excessive stress applied to the temperature control element can be suppressed.

In the temperature control unit of the present embodiment, the adjusting screw has a first insertion hole coaxial with the through screw portion and penetrating from the surface on the spacer side to the surface on the side opposite to the spacer, and the spacer has a first insertion hole. It has a second insertion hole that is coaxial with the through screw portion and penetrates from the first surface to the second surface, and is inserted into the first insertion hole and the second insertion hole, and the control target and the adjustment. It is preferable to provide a fixing screw for fixing the spacer between the screw and the screw.
In this embodiment, a fixing screw is provided which is fixed to the control target from the first insertion hole provided in the adjusting screw through the second insertion hole provided in the spacer. As a result, by fastening the fixing screw to the control target, the spacer is sandwiched and fixed by the adjusting screw and the control target. Further, since the adjusting screw is fixed at a predetermined adjustment position of the through-thread portion of the fixing portion, the distance between the fixing portion and the control target is kept constant, and the spacer is prevented from coming off. Therefore, the temperature control element can be suitably fixed.

In the temperature control unit of this embodiment, it is preferable that a heat insulating member is provided between the adjusting screw and the fixing screw.
In this embodiment, since the heat insulating member is provided between the fixing screw and the adjusting screw, the heat to be controlled does not escape from the fixing screw to the fixed portion, and the temperature control element can realize highly accurate temperature control. ..

In the temperature control unit of this embodiment, it is preferable that a plurality of the fixing mechanisms are provided at positions surrounding the temperature control element when viewed from the axial direction.
In this embodiment, a spacer held by the adjusting screw is arranged at a position surrounding the temperature control element. Therefore, even if there are variations in the thickness dimension of one temperature control element, the control target and the fixed portion can be brought into close contact with the temperature control element by adjusting each adjusting screw.

The laser light source device according to one aspect of the present invention is characterized by including the above-mentioned temperature control unit and a laser resonator unit which is a controlled object and is fixed to the fixed portion by the temperature control unit. ..
In this embodiment, as described above, the temperature of the laser cavity portion to be controlled can be controlled with high accuracy even when the thickness dimensions of the individual temperature control elements vary. Thereby, the laser beam of a desired frequency can be output with a high output.

In the present invention, the height position of the spacer can be changed by adjusting the adjusting screw, and the distance between the fixed portion and the controlled object can be finely adjusted according to the variation in the thickness dimension of the temperature control element. As a result, the temperature control element and the fixed portion can be brought into close contact with each other, and the temperature control element and the control target can be brought into close contact with each other, and the temperature of the control target can be controlled with high temperature control efficiency. Is not added, so that damage to the temperature control element can be suppressed.

The figure which shows the schematic structure of the laser light source apparatus of this embodiment. An enlarged cross-sectional view of the first fixing mechanism. A plan view of the first fixed portion as viewed from the back surface side. The flowchart which shows the fixing method of the laser cavity part.

Hereinafter, the laser light source device of one embodiment according to the present invention will be described.
FIG. 1 is a diagram showing a schematic configuration of a laser light source device of this embodiment.
The laser light source device 1 of the present embodiment includes a housing 10, an excitation light source 20, and a laser resonator section 30. Further, the laser resonator section 30 is a laser medium (for example, Nd: YVO4 crystal) that emits light of the first wavelength (for example, 1064 nm) from induced radiation, and a part of the light of the first wavelength is used for the second wavelength (for example, 532 nm). Optical elements such as non-linear optical crystals (for example, KTP crystals) that are used as light, etalon that transmits only a specific frequency of laser light, and a reflector that reflects light of the first wavelength and transmits light of the second wavelength, and these. It is configured to include a resonator housing for accommodating optical elements.
In this laser light source device 1, the excitation light emitted from the excitation light source 20 is incident on the laser resonator section 30, and the laser beam of the second wavelength (target wavelength) generated by the laser resonator section 30 is output. ..

The housing 10 has a fixed portion (first fixed portion 11A) to which the laser resonator portion 30 is fixed, and a fixed portion (second fixed portion 11B) to which the excitation light source 20 is fixed. Further, in the laser light source device 1, the output value of the excitation light fluctuates depending on the temperature of the excitation light source 20, and the frequency of the output value of the output laser light fluctuates depending on the temperature of the laser resonator unit 30. Therefore, a thermoelectric cooling element 40A, which is a temperature control element, is provided between the first fixed portion 11A and the laser resonator portion 30, and a temperature control element is provided between the second fixed portion 11B and the excitation light source 20. A certain Perche element 40B is provided.

The first fixing portion 11A and the second fixing portion 11B are members for dissipating heat from the Perche elements 40A and 40B, and are preferably made of, for example, a metal having a high thermal conductivity.
Further, even if a heat radiating member such as a heat radiating fin is appropriately provided on the back surface 112 of the first fixing portion 11A and the second fixing portion 11B (the surface opposite to the fixed surface 111 on which the Perche elements 40A and 40B are provided). good.

The first fixing mechanism 11A is provided with a first fixing mechanism 50A for fixing the laser resonator portion 30 via the Pelche element 40A. Further, the second fixing mechanism 11B is provided with a second fixing mechanism 50B for fixing the excitation light source 20 via the Perche element 40B. Here, the laser cavity portion 30 is a control target for controlling (adjusting) the temperature by the Pelche element 40A, and the first fixing portion 11A, the laser resonator portion 30, the Pelche element 40A, and the first fixing mechanism 50A make the present invention. A temperature control unit is configured. Similarly, the excitation light source 20 is a control target for adjusting the temperature by the Perche element 40B, and the temperature control unit of the present invention is configured by the second fixing portion 11B, the excitation light source 20, the Perche element 40B, and the second fixing mechanism 50B. ..

The surface (fixed surface 111) of the first fixing portion 11A on which the Perche element 40A is provided is a flat surface, and is in close contact with the heat radiating surface 41 of the Perche element 40A via a semi-fixed heat transfer member 411 (for example, heat conductive grease). Be connected. Further, the surface (base surface 32) of the laser resonator unit 30 facing the first fixed portion 11A is also a flat surface, and is closely connected to the temperature control surface 42 of the Perche element 40A via the semi-fixed heat transfer member 411. Will be done. That is, the Perche element 40A is fixed by being sandwiched by the first fixing portion 11A and the laser resonator portion 30 in a state where the semi-fixed heat transfer member 411 is coated on the heat radiating surface 41 and the temperature control surface 42.
Similarly, the surface of the second fixed portion 11B on which the Perche element 40B is provided (fixed surface 111) and the surface of the base 21 facing the second fixed portion 11B of the excitation light source 20 (base surface 22) are flat surfaces, respectively. , It is closely connected to the heat radiating surface 41 and the temperature control surface 42 of the Pelche element 40B via the semi-fixed heat transfer member 411.

Next, the first fixing mechanism 50A will be described. Since the configuration of the second fixing mechanism 50B is the same as the configuration of the first fixing mechanism 50A, the description thereof is omitted here.
FIG. 2 is an enlarged cross-sectional view of the vicinity of the first fixing mechanism 50A of FIG. 1, and FIG. 3 is a plan view of the first fixing portion 11A viewed from the back surface 112 side.
As shown in FIGS. 1 to 3, in the first fixing mechanism 11A, the first fixing mechanism 50A is located at a position facing the base 31 of the laser resonator portion 30 and outside the portion where the perche element 40A is provided. Is provided. More preferably, as shown in FIG. 3, the first fixing mechanism 50A is located at a position where the perche element 40A is sandwiched along the X direction and at a position where the perche element 40A is sandwiched along the Y direction intersecting the X direction, respectively. It is preferable to be provided.

The first fixing portion 11A includes a through screw portion 113 at a position where the first fixing mechanism 50A is provided. Then, as shown in FIG. 2, the first fixing mechanism 50A has an adjusting screw 51 screwed into the through screw portion 113, a spacer 52 whose position is adjusted by the adjusting screw 51, and the adjusting screw 51 and the spacer 52. Is included with a fixing screw 53 for fixing the laser resonator portion 30 (base 31).

The adjusting screw 51 is screwed into the through screw portion 113. One end surface (contact surface 511) of the adjusting screw 51 projects from the fixing surface 111 of the first fixing portion 11A and abuts on the first surface 521 on the first fixing portion 11A side of the spacer 52. The surface of the adjusting screw 51 opposite to the contact surface 511 is the adjusting surface 512. The adjusting surface 512 is provided with a position adjusting groove 513 (for example, a screw hole of a flat-blade screwdriver) for adjusting the position of the adjusting screw 51. Such an adjusting screw 51 moves forward and backward along the axial direction of the through-thread portion 113 by, for example, engaging a dedicated tool with the position adjusting groove 513 and rotating the adjusting screw 51. As a result, the spacer 52 that comes into contact with the contact surface 511 also moves back and forth along the axial direction.
Further, the adjusting screw 51 is provided with a first insertion hole 514 that is coaxial with the through screw portion 113 and penetrates from the contact surface 511 to the adjusting surface 512. A fixing screw 53 is inserted into the first insertion hole 514.

The spacer 52 is formed of a heat insulating member. The spacer 52 has a first surface 521 that abuts on the contact surface 511 of the adjusting screw 51, and a second surface 522 that abuts on the base 31 (base surface 32) of the laser resonator portion 30. Further, the spacer 52 is provided with a second insertion hole 523 that penetrates from the first surface 521 to the second surface 522, and the fixing screw 53 is inserted into the second insertion hole 523.
As described above, the first surface 521 of the spacer 52 abuts on the contact surface 511 of the adjusting screw 51, and the adjusting screw 51 advances and retreats in the axial direction, so that the spacer 52 also advances and retreats along the axial direction. As a result, the base 31 of the laser resonator portion 30 also advances and retreats in the axial direction, and the dimension between the first fixed portion 11A and the laser resonator portion 30 can be finely adjusted.

The fixing screw 53 is a fixing member that fixes the spacer 52 and the laser resonator portion 30 to the adjusting screw 51. The fixing screw 53 is inserted into the first insertion hole 514 of the adjusting screw 51 and the second insertion hole 523 of the spacer 52, and is screwed into the screw hole 33 provided in the base 31 of the laser resonator portion 30.
Further, the screw head 531 of the fixing screw 53 is connected to the adjusting surface 512 of the adjusting screw 51 via a washer 54. Therefore, by tightening the fixing screw 53 with respect to the screw hole 33, the laser resonator portion 30 is fixed to the adjusting screw 51 fixed to the first fixing portion 11A via the spacer 52. That is, the position of the laser cavity portion 30 with respect to the first fixing portion 11A is fixed.
The washer 54 is composed of a heat insulating member. Further, as shown in FIG. 2, the first insertion hole 514 has a diameter dimension sufficiently larger than the shaft diameter of the fixing screw 53. Therefore, the fixing screw 53 does not come into contact with the adjusting screw 51, and the inconvenience that the heat from the laser resonator portion 30 is transferred from the fixing screw 53 to the adjusting screw 51 and dissipated is suppressed.
Further, by inserting the fixing screw 53 into the second insertion hole 523 of the spacer 52, the inconvenience that the spacer 52 is displaced in the direction of intersecting the axial direction is suppressed, and for example, the spacer 52 does not come off.

As described above, the configuration of the second fixing mechanism 50B is the same as that of the first fixing mechanism 50A. That is, the second fixing portion 11B is provided with a through screw portion 113 at a position facing the excitation light source 20 outside the portion where the Pelche element 40B is provided, and the adjusting screw 51 is screwed to the through screw portion 113. Has been done. By adjusting the position of the adjusting screw 51, the position of the spacer 52 that abuts on the adjusting screw 51 changes, and the dimensions of the excitation light source 20 and the second fixing portion 11B are adjusted to the dimensions corresponding to the thickness dimension of the Pelche element 40B. It will be possible.

[Fixing method of Perche element]
Next, a fixing method (fixing method of fixing the temperature control element to the controlled object) for fixing the laser resonator portion 30 to the first fixing portion 11A via the Perche element 40A will be described.
FIG. 4 is a flowchart showing a method of fixing the laser cavity unit 30.
In fixing the laser resonator portion 30, first, the semi-fixed heat transfer member 411 is applied to the heat radiation surface 41 and the temperature control surface 42 of the Pelche element 40A. Then, the perche element 40A is placed on the first fixing portion 11A, the laser resonator portion 30 is placed on the perche element 40A, and the perche element 40A is placed on the first fixing portion 11A and the laser resonator portion 30. (Step S1).
At this time, by arranging the laser resonator portion 30 at the bottom and the first fixing portion 11A at the top, the weight of the first fixing portion 11A is multiplied to make the thickness dimension of the semi-fixed heat transfer member 411 uniform.

Next, a spacer 52 smaller than the thickness standard (specification) of the Perche element 40A to be used is interposed between the adjusting screw 51 and the base 31, and the position of the adjusting screw 51 is adjusted (step S2).
At this time, with the laser resonator portion 30 at the top and the first fixing portion 11A at the bottom, the adjusting screw 51 is rotated to move in the axial direction. Then, the adjusting screw 51 is moved to a position immediately before the laser resonator portion 30 arranged at the upper portion is lifted.

After adjusting the adjusting screw 51, the fixing screw 53 is inserted into the screw hole 33 of the base 31, and the spacer 52 and the laser resonator portion 30 are fixed to the first fixing portion 11A (adjusting screw 51) (step S3). .. As a result, the perche element 40A is sandwiched and fixed by the first fixing portion 11A and the laser resonator portion 30.

[Action and effect of this embodiment]
In the present embodiment, it is sandwiched between the fixed portion (first fixed portion 11A, second fixed portion 11B), the controlled object (laser resonator portion 30, excitation light source 20), and these fixed portions and the controlled object. A perche element 40A, 40B and a fixing mechanism (first fixing mechanism 50A, second fixing mechanism 50B) are provided. The fixing mechanism is provided on the through screw portion 113 provided in the fixing portion, and includes an adjusting screw 51 whose position in the axial direction can be adjusted, and a spacer 52. Further, the spacer 52 has a first surface 521 that is in contact with the contact surface 511 of the adjusting screw 51 and a second surface 522 that is in contact with the base surfaces 32 and 22 to be controlled.
In such a configuration, by adjusting the adjusting screw 51, the height position of the spacer 52 can be adjusted to a position corresponding to the thickness dimension of the Pelche elements 40A and 40B. Therefore, even when the thickness dimensions of the individual perche elements 40A and 40B vary, the height position of the spacer 52 can be adjusted according to the perche elements 40A and 40B to be used.
Therefore, it is not necessary to manufacture spacers according to the thickness dimensions of the Perche elements 40A and 40B, and the standardized spacer 52 can be used. Further, even when the Perche elements 40A and 40B are replaced with other temperature control elements having different thickness dimensions, the dimensions between the control target and the fixed portion can be easily adjusted to the dimensions according to the thickness dimensions of the temperature control element. Can be adjusted.

Further, when the distance between the control target and the fixed portion is set to a preset dimension (non-adjustable configuration), if the thickness dimension of the Pelche elements 40A and 40B is larger than the distance, the Pelche elements 40A and 40B Will be damaged. Further, if the thickness dimension of the perche elements 40A and 40B is smaller than the interval, a gap is generated between the perche elements 40A and 40B and the control target and between the perche elements 40A and 40B and the fixed portion, and the temperature control efficiency is increased. Decreases. On the other hand, in the present embodiment, the dimension between the controlled object and the fixed portion can be easily adjusted to the thickness dimension of the perche elements 40A and 40B. Therefore, it is possible to suppress damage to the Perche elements 40A and 40B and a decrease in temperature control efficiency.

Further, in the present embodiment, the spacer 52 and the control target are fixed to the adjusting screw 51 fixed to the fixing portion by the fixing screw 53. As a result, the height position of the spacer 52 adjusted by the adjusting screw 51 can be fixed, and the perche elements 40A and 40B can be reliably brought into close contact with both the controlled object and the fixed portion.

In the present embodiment, a washer 54, which is a heat insulating member, is provided between the adjusting screw 51 and the fixing screw 53. Therefore, even when the heat from the control target is transferred to the fixing screw 53, the inconvenience that heat is released from the fixing portion from the fixing screw 53 via the adjusting screw 51 can be suppressed.

In the present embodiment, the first fixing mechanism 50A and the second fixing mechanism 50B including the adjusting screw 51, the spacer 52, and the fixing screw 53 as described above are positioned at positions surrounding the perche element 40A and the perche element 40B. There are multiple.
Therefore, in one of the Perche elements 40A and 40B, the thickness dimension varies. For example, even when the heat radiation surface 41 and the temperature control surface 42 are not parallel, the positions of the adjusting screws 51 in the fixing mechanisms 50A and 50B are adjusted, respectively. By doing so, the control target and the fixing portion can be brought into close contact with the Perche elements 40A and 40B and fixed. Therefore, damage to the Perche elements 40A and 40B and a decrease in temperature control efficiency can be further suppressed.

[Modification example]
The present invention is not limited to the above-described embodiment, and modifications, improvements, and the like within the range in which the object of the present invention can be achieved are included in the present invention.
In the above embodiment, an example in which one adjusting screw 51 is screwed into the through screw portion 113 is shown, but the present invention is not limited to this. For example, two or more adjusting screws 51 may be screwed together. In this case, as in the double nut structure, loosening of the adjusting screw 51 can be suppressed, and fluctuation in the height position of the spacer 52 can be suppressed.
Further, the washer 54 may be configured by a spring washer or the like, or an elastic member such as a spring may be interposed between the washer 54 and the screw head 531 of the fixing screw 53 to prevent the adjusting screw 51 from loosening. ..
Further, another member such as an elastic member (for example, a spring) may be provided between the spacer 52 and the control target (laser resonator portion 30 or excitation light source 20), and the spacer 52 and the adjusting screw 51 are elastic. Other members such as members (eg, springs) may be provided.

An example is shown in which a washer 54 made of a heat insulating member is interposed between the screw head 531 of the fixing screw 53 and the adjusting screw 51, but when the fixing screw 53 is made of a heat insulating member, the washer 54 is provided. It does not have to be.
An example has been shown in which the air layer acts as a heat insulating layer by setting the hole diameter of the first insertion hole 514 of the adjusting screw 51 to a size sufficiently larger than the shaft diameter of the fixing screw 53, but the present invention is not limited to this.
For example, the first insertion hole 514 may be filled with another heat insulating member.
Further, as described above, when the fixing screw 53 is composed of the heat insulating member, the fixing screw 53 may come into contact with the first insertion hole 514, and the female screw thread for screwing the fixing screw 53 into the first insertion hole 514. May be formed.

In the above embodiment, the excitation light source 20 and the laser resonator unit 30 are exemplified as the control target, but the control target is not limited to this, and any member whose temperature is controlled by a temperature control element such as a Pelche element may be a control target.
For example, in the laser medium and the nonlinear optical crystal housed in the laser resonator section 30, the oscillation frequency of the laser light changes due to the influence of temperature, and the center wavelength of the transmitted light shifts in the etalon due to the influence of temperature. Therefore, a temperature control element such as a Perche element may be individually arranged for these laser media, nonlinear optical crystals, etalon, and the like. In such a case, a fixing mechanism having an adjusting screw 51, a spacer 52, and a fixing screw 53 as described above is used with the laser medium, the nonlinear optical crystal, and the etalon as control targets and the resonator housing as the fixing portion. , The Perche element may be sandwiched between the controlled object and the fixed portion.
Further, the present invention is not limited to the laser light source device 1, and can be applied to, for example, fixing a Perche element used in a CPU (Central Processing Unit) of a personal computer, a cooling device such as a refrigerator or an air conditioner.
Further, in the present embodiment, as the temperature control element, a Pelche element for adjusting the temperature of the controlled object is illustrated, but other elements may be used. For example, as a temperature control element that controls the temperature of the control target, a Seebeck element or the like that converts the heat of the control target into a voltage and measures the temperature may be used.

In addition, the specific structure for carrying out the present invention can be appropriately changed to another structure or the like within the range in which the object of the present invention can be achieved.

The present invention can be applied to a temperature control module that controls the temperature of a controlled object by a temperature control element.

1 ... Laser light source device, 10 ... Housing, 11A ... First fixed part, 11B ... Second fixed part, 20 ... Excitation light source (control target), 21 ... Base, 30 ... Laser resonator part (control target), 40A , 40B ... Perche element (temperature control element), 50A ... 1st fixing mechanism, 50B ... 2nd fixing mechanism, 51 ... Adjusting screw, 52 ... Spacer, 53 ... Fixing screw, 54 ... Washer, 111 ... Fixed surface, 112 ... Back surface, 113 ... Through screw portion, 411 ... Semi-fixed heat transfer member, 511 ... Contact surface, 512 ... Adjustment surface, 513 ... Position adjustment groove, 514 ... First insertion hole, 521 ... First surface, 522 ... Second Surface, 523 ... Second insertion hole, 513 ... Screw head.

Claims (5)

The control target that controls the temperature and the control target
A temperature control element that controls the temperature of the controlled object, and
A fixed portion that sandwiches the temperature control element together with the control target,
A fixing mechanism for fixing the control target to the fixing portion is provided.
The fixing mechanism
An adjusting screw that is inserted through a through-screw portion provided in the fixing portion and can adjust the position of the through-thread portion with respect to the axial direction.
It has a first surface and a second surface that intersect with respect to the axial direction, the first surface is connected to one end surface of the adjusting screw that intersects with the axial direction, and the second surface is connected to the control target. With spacers ,
The adjusting screw has a contact surface that comes into contact with the first surface, an adjustment surface that is opposite to the contact surface, and a first insertion hole that penetrates from the contact surface to the adjustment surface. A temperature control unit characterized by that. In the temperature control unit according to claim 1,
It said first insertion hole of the adjusting screw is the through screw portion coaxially,
The spacer has a second insertion hole that is coaxial with the through-thread portion and penetrates from the first surface to the second surface.
A temperature control unit that is inserted through the first insertion hole and the second insertion hole and includes a fixing screw that fixes the spacer between the control target and the adjustment screw. In the temperature control unit according to claim 2,
A temperature control unit characterized in that a heat insulating member is provided between the adjusting screw and the fixing screw. In the temperature control unit according to any one of claims 1 to 3.
A temperature control unit characterized in that a plurality of the fixing mechanisms are provided at positions surrounding the temperature control element when viewed from the axial direction. The temperature control unit according to any one of claims 1 to 4.
A laser cavity unit that is the control target and is fixed to the fixed portion by the temperature control unit.
A laser light source device comprising.

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