JP6897004B2 - How to adjust the optical sensor mounting adapter and the mounting position of the optical sensor - Google Patents

Description

The present invention relates to an adapter for mounting an optical sensor at an installation location, and a method of adjusting the mounting position of the optical sensor using the adapter.

The optical system constituting the optical sensor has temperature characteristics. Temperature characteristics cause the measured values to fluctuate over time. Temperature characteristics affect stable and highly accurate measurements. Therefore, a configuration for canceling the temperature characteristics has been conventionally proposed.

For example, Japanese Patent Application Laid-Open No. 07-058909 (Patent Document 1) discloses an imaging apparatus for an image reader. This imaging device includes a high thermal expansion member or a low thermal expansion member as the expansion / contraction member. The coefficient of linear expansion of the telescopic member can prevent the image reader from being out of focus due to thermal expansion.

Japanese Unexamined Patent Publication No. 07-058909

In the conventional technique, the temperature characteristics of the optical sensor are offset by the internal members of the optical sensor. However, the usage environment of the optical sensor differs depending on the user. Therefore, the temperature characteristics of the optical sensor may also differ depending on the usage environment. Even if the temperature characteristics of the sensor itself can be reduced, if the mounting location of the sensor head changes, the measured value may change according to the ambient temperature. It is desirable that the temperature characteristics of the optical sensor can be adjusted according to the usage environment.

An object of the present invention is to provide a configuration for adjusting the temperature characteristics of an optical sensor according to a usage environment and a method for adjusting the configuration.

(1) The optical sensor mounting adapter according to a certain aspect of the present invention is an adapter for mounting the optical sensor at the mounting location, and is provided on the sensor mounting surface for mounting the optical sensor on the adapter and the mounting location. It has a mounting surface located on the opposite side of the sensor mounting surface for mounting the optical sensor together with the adapter. A fixing hole for fixing the optical sensor to the sensor installation surface is formed on the sensor installation surface. The adapter is formed with mounting holes that penetrate the sensor mounting surface and the mounting surface. The mounting holes are formed on the side of the light receiving and receiving surface of the optical sensor with respect to the fixing hole and on the side opposite to the light receiving and receiving surface of the optical sensor.

According to the above configuration, the temperature characteristics of the optical sensor can be adjusted according to the usage environment. Depending on the temperature characteristics of the optical sensor, the mounting position of the adapter when the adapter is mounted at the mounting location is the position on the light receiving surface side of the optical sensor with respect to the fixing hole, and the position with respect to the fixing hole. It can be selected from the position on the opposite side of the light receiving surface. Therefore, the mounting position of the adapter can be determined so as to reduce the temperature characteristics of the optical sensor.

(2) Preferably, the mounting hole is a hole formed continuously from the side of the light receiving / receiving surface to the side opposite to the light receiving / receiving surface.

According to the above configuration, the mounting position of the adapter can be continuously changed from the side of the light receiving / receiving surface of the optical sensor to the side opposite to the light receiving / receiving surface, so that the temperature characteristics of the optical sensor can be reduced. An appropriate mounting position can be determined.

(3) Preferably, the mounting holes are a plurality of holes formed so as to line up in a straight line from the side of the light receiving / receiving surface to the side opposite to the light receiving / receiving surface.

According to the above configuration, the mounting position of the adapter can be selected from a plurality of positions from the light receiving / receiving surface side of the optical sensor to the opposite side of the light receiving / receiving surface, so that the temperature of the optical sensor can be selected. It is possible to facilitate the determination of an appropriate mounting position for reducing the characteristics.

(4) Preferably, the mounting holes are a first hole located on the light receiving / receiving surface side with respect to the fixing hole and a second hole located on the opposite side of the light receiving / receiving surface with respect to the fixing hole. It is divided into.

According to the above configuration, the mounting position of the adapter can be continuously changed from the side of the light emitting / receiving surface of the optical sensor to the side opposite to the light receiving / receiving surface. Therefore, it is possible to determine an appropriate mounting position for reducing the temperature characteristics of the optical sensor.

(5) Preferably, the fixing hole is arranged between the first hole and the second hole.
According to the above configuration, the mounting position of the adapter can be continuously changed from the side of the light receiving / receiving surface of the optical sensor to the fixing hole, or from the opposite side of the light receiving / receiving surface to the fixing hole. it can. Therefore, it is possible to determine an appropriate mounting position for reducing the temperature characteristics of the optical sensor.

(6) The method of adjusting the mounting position of the optical sensor according to another aspect of the present invention is to adjust the mounting position of the optical sensor at the mounting location by using the optical sensor mounting adapter described in (1) above. It is an adjustment method to do. The adjustment method is a step of fixing the optical sensor to the sensor installation surface by inserting the first fixing member that connects the optical sensor and the sensor installation surface into the fixing hole, and the second fixing member in the mounting hole. It includes a step of inserting and fixing the adapter to the mounting location. When the measured value of the optical sensor has a negative temperature characteristic, when the coefficient of linear expansion of the member in contact with the adapter at the mounting position is larger than the coefficient of linear expansion of the adapter, the second fixing member is thrown from the fixing hole. Install at the position on the light receiving surface side. When the coefficient of linear expansion of the member is smaller than the coefficient of linear expansion of the adapter, the second fixing member is attached at a position opposite to the light receiving / receiving surface from the fixing hole. When the measured value of the optical sensor has a positive temperature characteristic, when the coefficient of linear expansion of the member in contact with the adapter at the mounting position is larger than the coefficient of linear expansion of the adapter, the second fixing member is thrown from the fixing hole. On the other hand, when the coefficient of linear expansion of the member is smaller than the coefficient of linear expansion of the adapter, the second fixing member is attached at a position closer to the light receiving surface than the fixing hole.

According to the above method, an appropriate mounting position for reducing the temperature characteristic of the optical sensor can be determined.

According to the present invention, the temperature characteristics of the optical sensor can be adjusted according to the usage environment.

It is a schematic diagram for demonstrating the usage mode of the adapter which concerns on one Embodiment of this invention. It is a figure which showed another example of the use environment of an optical sensor. It is a figure which showed the detail of the sensor head, the adapter and the jig shown in FIG. It is a top view of the adapter which concerns on embodiment of this invention. It is a schematic diagram for demonstrating the cancellation of the temperature characteristic of an optical sensor by the adapter which concerns on embodiment of this invention. It is a figure which showed the condition about the mounting position of the adapter which concerns on embodiment of this invention. It is a figure for demonstrating the effect of reducing the temperature characteristic of an optical sensor by the adapter which concerns on embodiment of this invention. It is a perspective view of the adapter which concerns on other embodiment of this invention. It is a top view of the adapter shown in FIG. It is a perspective view of the adapter which concerns on still another Embodiment of this invention. It is a top view of the adapter shown in FIG. It is a flowchart which showed the adjustment method of the attachment position of a sensor head using the adapter which concerns on embodiment of this invention.

Embodiments of the present invention will be described in detail with reference to the drawings. The same or corresponding parts in the drawings are designated by the same reference numerals and the description thereof will not be repeated.

As used herein, the term "use of an optical sensor" is not limited to use in the field (for example, a manufacturing plant), but also includes use in a laboratory, for example. Therefore, the mode of use of the optical sensor is not particularly limited. Further, in the embodiment described below, the "temperature characteristic" means the amount of change in the measured value of the sensor per unit temperature change (that is, the slope of the measured value with respect to the temperature change). In the present specification, the temperature characteristic may be expressed as ΔH.

FIG. 1 is a schematic diagram for explaining a usage mode of the adapter according to the embodiment of the present invention. With reference to FIG. 1, the optical sensor 10 is, for example, a displacement sensor, for example, measuring the surface shape of a measurement object 51 flowing through a factory line 50. The optical sensor 10 projects light toward the measurement object 51 and receives the reflected light from the measurement object 51. The optical sensor 10 measures the distance from the sensor head to the object to be measured 51 based on the amount of the reflected light received. As a result, for example, the shape of the surface of the object to be measured 51 is measured.

The optical sensor 10 includes a sensor head 11, a controller 12, and a cable 13. The sensor head 11 and the controller 12 are connected by a cable 13. The sensor head 11 is attached to the adapter 1 by a screw (not shown). The adapter 1 is attached to the attachment surface 21 of the arm 20 by a screw (not shown). As a result, the sensor head 11 is fixed to the arm 20 together with the adapter 1. The mounting surface 21 of the arm 20 corresponds to the mounting location of the optical sensor 10. By attaching the optical sensor 10 to the mounting location via the adapter 1, it is possible to reduce the temperature characteristics of the optical sensor 10 regardless of the usage environment of the optical sensor 10.

The optical sensor 10 is, for example, a sensor that employs a coaxial optical system, and is a white confocal type sensor or an interference type sensor. The coaxial optical system means an optical system in which the light projecting axis and the light receiving axis are coaxial. However, the optical displacement sensor is not limited to the coaxial optical system sensor, and may be, for example, a triangular distance measuring displacement sensor.

FIG. 2 is a diagram showing another example of the usage environment of the optical sensor 10. With reference to FIG. 2, the sensor head 11 of the optical sensor 10 is attached to the jig 22 via the adapter 1.

FIG. 3 is a diagram showing details of the sensor head 11, the adapter 1, and the jig 22 shown in FIG. 3 (A) is a top view, FIG. 3 (B) is a side view, and FIG. 3 (C) is a bottom view.

The adapter 1 will be described in detail below with reference to FIGS. 2 and 3. The adapter 1 has a sensor mounting surface 1A and a mounting surface 1B. The sensor installation surface 1A is a surface for installing the optical sensor (sensor head 11) on the adapter 1. The mounting surface 1B is located on the opposite side of the sensor mounting surface 1A. The mounting surface 1B is a surface for mounting the sensor head 11 together with the adapter 1 at the mounting location. In the examples of FIGS. 2 and 3, the mounting location is the installation surface 22A of the jig 22.

The sensor head 11 is fixed to the adapter 1 by screws 31 and 32 penetrating the housing of the sensor head 11. The screws 31 and 32 correspond to the first fixing member that connects the sensor head 11 and the sensor installation surface 1A. As will be described later, the adapter 1 is formed with fixing holes 6 and 7 (see FIG. 4) for inserting the screws 31 and 32.

Mounting holes 3 and 4 are further formed in the adapter 1. The mounting holes 3 and 4 are through holes that penetrate the sensor mounting surface 1A and the mounting surface 1B. For example, as shown in FIG. 3A, each of the mounting holes 3 and 4 receives and receives light on the side of the sensor head 11 on the light receiving / receiving surface 11A with respect to the screws 31 and 32, and on the screws 31 and 32. It is formed on the opposite side of the surface 11A (the side of the back surface 11B). More specifically, the mounting holes 3 and 4 are elongated holes continuously formed from the side of the light emitting / receiving surface 11A of the sensor head 11 to the side opposite to the light receiving / receiving surface 11A. The direction from the light-receiving surface 11A to the opposite side of the light-receiving surface 11A corresponds to the direction of the optical axis of the sensor head 11. Since the mounting holes 3 and 4 are elongated holes, the mounting position of the adapter 1 is continuously changed from the side of the light emitting / receiving surface 11A of the sensor head 11 to the side opposite to the light receiving / receiving surface 11A (the side of the back surface 11B). be able to. Therefore, it is possible to determine an appropriate mounting position for reducing the temperature characteristics of the optical sensor 10.

The elongated holes 23 and 24 are formed in the jig 22. Each of the elongated holes 23 and 24 is a through hole penetrating the jig 22. The screw 33 is passed through the mounting hole 3 of the adapter 1 and the elongated hole 23 of the jig 22. Similarly, the screw 34 is passed through the mounting hole 4 of the adapter 1 and the elongated hole 24 of the jig 22. On the bottom surface 22B of the jig 22, the screws 33 and 34 are coupled to the female screws 35 and 36, respectively. As a result, the adapter 1 is fixed to the installation surface 22A of the jig 22.

The positions of the screws 33 and 34 are determined so as to reduce (preferably minimize) the temperature characteristics of the sensor head 11. As shown in FIGS. 2 and 3, the positions of the screws 33 and 34 may be the positions on the back surface 11B side of the sensor head 11 with respect to the screws 31 and 32. On the contrary, the positions of the screws 33 and 34 may be the positions on the light receiving / receiving surface 11A side of the sensor head 11 with respect to the screws 31 and 32. As shown in FIGS. 3A and 3C, the elongated holes 23 and 24 are longer than the mounting holes 3 and 4 in the optical axis direction of the sensor head 11. Therefore, the adapter 1 can be fixed to the jig 22 by the screws 33 and 34 at a position where the temperature characteristic of the sensor head 11 can be minimized.

According to the examples shown in FIGS. 2 and 3, the adapter 1 is provided with a guide pin 5 for positioning the sensor head 11. Similarly, the jig is provided with a guide pin 25 for positioning the adapter 1. However, the guide pins 5 and 25 are not essential configurations for adjusting the temperature characteristics of the optical sensor 10.

FIG. 4 is a top view of the adapter 1 according to the embodiment of the present invention. With reference to FIG. 4, the sensor installation surface 1A is formed with fixing holes 6 and 7 (screw holes) for fixing the sensor head 11 (shown in FIG. 4 by a broken line) to the sensor installation surface 1A. .. The mounting holes 3 and 4 are on the side of the light emitting / receiving surface 11A of the sensor head 11 with respect to the fixing holes 6 and 7, and on the side opposite to the light receiving / receiving surface 11A with respect to the fixing holes 6 and 7 (the side of the back surface 11B). Is formed in.

The material of the adapter 1 is not particularly limited. From the viewpoint of minimizing the temperature characteristics of the optical sensor 10, the material of the adapter 1 is the material of the housing of the sensor head 11 (for example, aluminum) and the material of the member (jig 22) in contact with the adapter 1 at the mounting position. It may be different from (for example, aluminum, SUS, superinver, etc.). In one example, the material of the adapter 1 is resin (eg, polycarbonate). However, the material of the adapter 1 may be metal.

FIG. 5 is a schematic diagram for explaining the cancellation of the temperature characteristics of the optical sensor 10 by the adapter 1 according to the embodiment of the present invention. With reference to FIG. 5, the sensor head 11 includes an optical system 14 for projecting and receiving light. The optical system 14 includes an optical element such as a light projecting element 15, a light receiving element 16, and a lens 17. Note that FIG. 5 schematically shows some elements of the optical system 14. Therefore, the detailed arrangement of the optical elements constituting the optical system 14 is not shown in FIG.

The value measured by the sensor head 11 has a temperature characteristic mainly because the distance between the optical elements changes depending on the temperature.

The jig 22 has a facing surface 22C facing the light emitting / receiving surface 11A of the sensor head 11. The distance from the light receiving / receiving surface 11A to the facing surface 22C is equal to the distance from the sensor head 11 to the object to be measured 51 (work). The position of the facing surface 22C is hereinafter referred to as a "work position".

When there is no adapter 1 and the sensor head 11 is directly fixed to the jig 22, the temperature characteristic ΔH of the sensor head 11 is expressed according to the following equation (1). Δ indicates the amount of change per 1 ° C. temperature. In the formula (1), the mounting position of the sensor head 11 is used as a reference position. The mounting position of the sensor head 11 is the position of the screw 31.

ΔH = ΔL1 + ΔL3-ΔL2 ... (1)
L1 is the distance from the reference position to the principal point of the optical system 14. L2 is the distance from the reference position to the work position. L3 is the distance from the principal point of the optical system 14 to the work position. A positive value represents the length in the direction approaching the work position, and a negative value represents the length in the direction away from the work position.

ΔL1 represents the length of the housing of the sensor head 11 extending from the reference position. When the coefficient of linear expansion of the housing of the sensor head 11 is expressed as α1, ΔL1 = L1 × α1.

ΔL2 represents the length of the jig 22 extending from the reference position. When the coefficient of linear expansion of the jig 22 is expressed as α2, ΔL2 = L2 × α2.

ΔL3 is the amount of change in the distance from the principal point of the optical system to the work position. ΔL3 can be calculated by a known method such as optical simulation.

Equation (1) is transformed as follows.
ΔH = L1 × α1 + ΔL3-L2 × α2 ・ ・ ・ (2)
In the embodiment of the present invention, the sensor head 11 is attached to the adapter 1, and the adapter 1 is attached to the jig 22. L4 is the distance from the reference position to the position where the adapter 1 is attached to the jig 22. The position where the adapter 1 is attached to the jig 22 is the position of the screw 33.

Assuming that the coefficient of linear expansion of the adapter 1 is α4, the temperature characteristics of the sensor head 11 are expressed as follows.

ΔH = L1 × α1 + ΔL3- (L2 × α2 + L4 × α2) ・ ・ ・ (3)
In order to cancel the temperature characteristics, ΔH = −L4 × α4 may be satisfied. Therefore, the following equation holds.

−L4 × α4 = L1 × α1 + ΔL3- (L2 × α2 + L4 × α2) ・ ・ ・ (4)
By modifying the equation (4), the following equation (5) can be obtained.

−L4 (α4-α2) = L1 × α1 + ΔL3-L2 × α2 ・ ・ ・ (5)
The mounting position of the adapter 1 can be determined as follows according to the case where the temperature characteristic is negative and the case where the temperature characteristic is positive.

<1. When the temperature characteristic is negative (when ΔH <0)>
When ΔH <0, L1 × α1 + ΔL3 <L2 × α2.

In this case, L4> 0 and α4> α2. Alternatively, L4 <0 and α4 <α2. That is, when the linear expansion coefficient α4 of the adapter 1 is larger than the linear expansion coefficient α2 of the jig, the adapter 1 is placed on the jig 22 at a position on the light receiving / receiving surface 11A side of the sensor head 11 rather than the position of the screw 31. It should be fixed to. On the other hand, when the linear expansion coefficient α4 of the adapter 1 is smaller than the linear expansion coefficient α2 of the jig, the adapter 1 is fixed to the jig 22 at a position on the back surface 11B side of the sensor head 11 rather than the position of the screw 31. do it.

<2. When the temperature characteristic is positive (when ΔH>0)>
When ΔH> 0, L1 × α1 + ΔL3> L2 × α2.

In this case, L4 <0 and α4> α2. Alternatively, L4> 0 and α4 <α2. That is, when the linear expansion coefficient α4 of the adapter 1 is larger than the linear expansion coefficient α2 of the jig, the adapter 1 is fixed to the jig 22 at a position on the back surface 11B side of the sensor head 11 rather than the position of the screw 31. do it. Note that FIG. 5 shows the case where L4 <0. On the other hand, when the coefficient of linear expansion α4 of the adapter 1 is smaller than the coefficient of linear expansion α2 of the jig, the adapter 1 is placed on the jig 22 at a position on the light receiving / receiving surface 11A side of the sensor head 11 rather than the position of the screw 31. It should be fixed to.

As can be understood from the above description, in the present embodiment, the temperature characteristics of the sensor head 11 itself and the temperature characteristics of the sensor head 11 itself do not depend on the value of the coefficient of linear expansion of the adapter 1 and the member (for example, the jig 22) in contact with the adapter 1. , The temperature characteristics caused by both the elongation of the member can be offset.

The temperature characteristic of the optical sensor 10 is mainly due to the temperature characteristic of the sensor head 11. However, the temperature characteristic of the optical sensor 10 may include the temperature characteristic caused by the controller 12 side. In this case as well, the temperature characteristics can be offset by the above method.

FIG. 6 is a diagram showing conditions relating to the mounting position of the adapter 1 according to the embodiment of the present invention. Since the values of α2 and α4 are known with reference to FIG. 6, the magnitude of α2 and α4 can be easily determined. By measuring the temperature characteristics of the optical sensor 10, it is possible to determine whether ΔH is a positive value or a negative value. Based on the sign of ΔH, the positions of the screws 33 and the screws 34 are located on the side of the light receiving surface 11A and the side of the back surface 11B with respect to the screws 31 and 32 (fixing holes 6 and 7) according to the conditions shown in FIG. It is possible to determine which side of the. By adjusting the positions of the screws 33 and 34 on the determined side, the temperature characteristic of the optical sensor 10 can be minimized.

FIG. 7 is a diagram for explaining the effect of reducing the temperature characteristics of the optical sensor 10 by the adapter 1 according to the embodiment of the present invention. With reference to FIG. 7, the change in the measured value when the ambient temperature was changed was evaluated with reference to the measured value at the ambient temperature of 25 ° C. When the sensor head 11 was attached to the jig 22 without using the adapter 1 (without the adapter), the temperature characteristic showed a negative characteristic. That is, when the ambient temperature decreased from 25 ° C., the fluctuation amount of the measured value increased in the positive direction. On the other hand, when the ambient temperature rose from 25 ° C., the fluctuation amount of the measured value increased in the negative direction. On the other hand, when the sensor head 11 is attached to the jig 22 via the adapter 1 (with the adapter), the temperature characteristic is set to almost 0 over a wide temperature range (0 ° C to 50 ° C). I was able to do it. Comparing the fluctuation amounts of the measured values in the temperature range from 0 ° C. to 50 ° C., it is shown that the adapter 1 according to the embodiment of the present invention can substantially cancel the temperature characteristics.

In the embodiment of the present invention, the mounting holes 3 and 4 of the adapter 1 are on the side of the light receiving / receiving surface 11A of the sensor head 11 with respect to the fixing holes 6 and 7, and on the back surface 11B with respect to the fixing holes 6 and 7. It suffices if it is formed on the side. Therefore, the shapes of the mounting holes 3 and 4 are not limited as shown in FIGS. 2 to 4.

FIG. 8 is a perspective view of the adapter 1 according to another embodiment of the present invention. FIG. 9 is a top view of the adapter 1 shown in FIG. With reference to FIGS. 8 and 9, each of the mounting holes 3 and 4 is a plurality of holes arranged in a line (straight line) from the side of the light receiving / receiving surface 11A to the side of the back surface 11B of the sensor head 11. is there. The plurality of holes 3A correspond to the mounting holes 3 shown in FIG. 4, and the plurality of holes 4A correspond to the mounting holes 4 shown in FIG. For example, a plurality of holes 3A and 4A are formed at equal intervals. The mounting position of the adapter 1 can be selected from a plurality of positions from the side of the light receiving / receiving surface 11A to the side of the back surface 11B of the sensor head 11. Therefore, it is possible to easily determine an appropriate mounting position for reducing the temperature characteristic of the optical sensor 10.

A plurality of holes 24A are formed in the jig 22 corresponding to the plurality of holes 3A and 4A of the adapter 1. In FIG. 8, only a part of the plurality of holes 24A is shown. However, the holes formed in the jig 22 are not limited to a plurality of holes. For example, as shown in FIG. 3, the elongated holes 23 and 24 may be formed in the jig 22.

FIG. 10 is a perspective view of the adapter 1 according to still another embodiment of the present invention. FIG. 11 is a top view of the adapter 1 shown in FIG. With reference to FIGS. 10 and 11, each of the mounting holes 3 and 4 is the opposite of the first hole located on the light receiving / receiving surface 11A side with respect to the fixing hole and the light receiving / receiving surface 11A with respect to the fixing hole. It is divided into a second hole located on the side of. A fixing hole is located between the first hole and the second hole. That is, the first hole, the fixing hole, and the second hole are arranged in a row.

Specifically, the mounting hole 3 is divided into a first hole 41 and a second hole 42. The first hole 41 is located on the light receiving / receiving surface 11A side of the sensor head 11 with respect to the fixing hole 6. The second hole 42 is located on the back surface 11B side of the sensor head 11 with respect to the fixing hole 6. The first hole 41, the fixing hole 6, and the second hole 42 are arranged in a row along the optical axis direction of the sensor head 11, that is, the direction from the light receiving / receiving surface 11A to the back surface 11B. The mounting position of the adapter 1 is from the side of the light receiving / receiving surface 11A of the sensor head 11 to the fixing hole (fixing hole 6 or fixing hole 7), and from the side of the back surface 11B of the sensor head 11 to the fixing hole (fixing hole 6). Alternatively, it can be continuously changed up to the fixing hole 7). Therefore, an appropriate mounting position for reducing the temperature characteristics of the optical sensor 10 can be determined.

Similarly, the mounting hole 4 is divided into a first hole 43 and a second hole 44. The first hole 43 is located on the light receiving / receiving surface 11A side of the sensor head 11 with respect to the fixing hole 7. The second hole 44 is located on the back surface 11B side of the sensor head 11 with respect to the fixing hole 7. The first hole 43, the fixing hole 7, and the second hole 44 are arranged in a row along the optical axis direction of the sensor head 11.

FIG. 12 is a flowchart showing a method of adjusting the mounting position of the sensor head 11 using the adapter 1 according to the embodiment of the present invention. With reference to FIG. 12, first, in step S1, the sensor head 11 is fixed to the sensor installation surface 1A of the adapter 1. As described above, the sensor head 11 is fixed to the sensor installation surface 1A of the adapter 1 by inserting the screws 31 and 32 into the fixing holes 6 and 7, respectively.

In step S2, the temperature characteristic (ΔH) of the sensor head 11 is acquired. For example, ΔH can be obtained by setting L4 = 0 with the adapter 1 attached to the jig 22.

In step S3, the code of length L4 is determined based on the code of ΔH and the coefficient of linear expansion α2 and α4. That is, it is determined whether the positions where the screws 33 and 34 are attached in the elongated holes 23 and 24 are on the light receiving / receiving surface 11A side or the back surface 11B side of the sensor head 11 with respect to the fixing holes 6 and 7. To. In this decision, the conditions shown in FIG. 6 apply.

In step S4, the positions for mounting the screws 33 and 34 are adjusted. For example, the temperature characteristics of the optical sensor 10 may be measured, and the positions for mounting the screws 33 and 34 may be adjusted based on the result. When the temperature characteristic value reaches the target value, the adjustment of the mounting position is completed.

As described above, according to the embodiment of the present invention, the temperature characteristics of the optical sensor 10 can be offset by the adapter 1 attached to the sensor head 11. As a result, stable measurement can be realized regardless of the usage environment. For example, high-precision measurement is possible even in an environment with large temperature changes.

The embodiments disclosed this time should be considered to be exemplary and not restrictive in all respects. The scope of the present invention is shown by the scope of claims rather than the above description, and it is intended to include all modifications within the meaning and scope equivalent to the scope of claims.

1 Adapter, 1A Sensor mounting surface, 1B, 21 mounting surface, 3,4 mounting hole, 3A, 4A, 24A hole, 5,25 guide pin, 6,7 fixing hole, 10 optical sensor, 11 sensor head, 11A throw Light receiving surface, 11B back surface, 12 controller, 13 cable, 14 optical system, 15 light projecting element, 16 light receiving element, 17 lens, 20 arm, 22 jig, 22A installation surface, 22B bottom surface, 22C facing surface, 23, 24 length Holes, 31-34 screws, 35,36 female threads, 41,43 first holes, 42,44 second holes, 50 lines, 51 objects to be measured, S1-S4 steps.

Claims (5)

An adapter for mounting an optical sensor at the mounting location.
A sensor installation surface for installing the optical sensor on the adapter, and
It has a mounting surface located on the opposite side of the sensor mounting surface for mounting the optical sensor together with the adapter at the mounting location.
A fixing hole for fixing the optical sensor to the sensor installation surface is formed on the sensor installation surface.
The adapter is formed with a mounting hole that penetrates the sensor mounting surface and the mounting surface as a hole for passing a fixing member for fixing the optical sensor to the mounting location.
The mounting hole is
When the measured value of the optical sensor has a negative temperature characteristic and the linear expansion coefficient of the member in contact with the adapter at the mounting position is larger than the linear expansion coefficient of the adapter, or the measured value of the optical sensor is positive. As a hole for passing the fixing member when the linear expansion coefficient of the member is smaller than the linear expansion coefficient of the adapter, the opposite of the light emitting / receiving surface of the optical sensor with respect to the fixing hole. The first hole to which the fixing member is attached and
When the measured value of the optical sensor has a negative temperature characteristic and the linear expansion coefficient of the member in contact with the adapter at the mounting position is smaller than the linear expansion coefficient of the adapter, or of the optical sensor. When the measured value has a positive temperature characteristic and the linear expansion coefficient of the member is larger than the linear expansion coefficient of the adapter, the light emitting / receiving surface is used as a hole for passing the fixing member with respect to the fixing hole. An adapter for mounting an optical sensor, which includes a second hole on which the fixing member is mounted. The mounting hole is a hole formed continuously from the side of the light-receiving surface to the opposite side of the light-receiving surface by connecting the first hole and the second hole. The optical sensor mounting adapter according to claim 1. The first hole portion, the plurality of holes der formed so as to be arranged in a straight line on the opposite side of the light-emitting and light-receiving surfaces of the optical sensor relative to the fixing hole is, the second hole portion The optical sensor mounting adapter according to claim 1, which is a plurality of holes formed so as to be linearly arranged on the light receiving / receiving surface side of the optical sensor with respect to the fixing hole. It said first bore portion and said second of said fixing holes between the holes are arranged, an optical sensor mounting adapter according to claim 1. An adjustment method for adjusting the mounting position of the optical sensor at the mounting location by using the optical sensor mounting adapter according to claim 1.
A step of fixing the optical sensor to the sensor installation surface by inserting a first fixing member connecting the optical sensor and the sensor installation surface into the fixing hole.
A step of inserting a second fixing member into the mounting hole and fixing the adapter to the mounting location is provided.
If the measured value of the optical sensor has a negative temperature characteristic,
When the coefficient of linear expansion of the member in contact with the adapter at the mounting position is larger than the coefficient of linear expansion of the adapter, the second fixing member is mounted at a position opposite to the light receiving / receiving surface from the fixing hole. When the coefficient of linear expansion of the member is smaller than the coefficient of linear expansion of the adapter, the second fixing member is attached at a position closer to the light receiving / receiving surface than the fixing hole.
When the measured value of the optical sensor has a positive temperature characteristic,
When the coefficient of linear expansion of the member in contact with the adapter at the mounting position is larger than the coefficient of linear expansion of the adapter, the second fixing member is mounted at a position closer to the light receiving / receiving surface than the fixing hole, while the member. When the coefficient of linear expansion of the adapter is smaller than the coefficient of linear expansion of the adapter, the second fixing member is mounted at a position opposite to the light receiving / receiving surface of the fixing hole, and the mounting position of the optical sensor is adjusted. Method.

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