JP6893777B2 - Processing equipment and processing method - Google Patents

Description

The present invention relates to a processing apparatus and a processing method for forming a plurality of circular chips.

Patent Document 1 discloses a processing method for penetrating a rotating cup-shaped core drill from one surface to the other surface of a plate-shaped substrate in order to cut out a disk-shaped substrate from the plate-shaped substrate. Further, as a processing method for cutting out the disk-shaped substrate from the plate-shaped substrate, a method in which the router is moved and controlled according to the outer peripheral shape of the disk-shaped substrate and the plate-shaped substrate is cut by the router to cut out the disk-shaped substrate can be considered.

Japanese Unexamined Patent Publication No. 2015-138568

In the processing method using the router described above, as the disk-shaped substrate becomes smaller, the scheduled division line that is the cutting position of the plate-shaped substrate becomes thinner, so that the circular blade in the router also becomes thinner. For this reason, there is a problem that the circular blade is easily broken during machining, the circular blade is broken during machining and the machining is interrupted, or the machining feed time is slowed down and the machining time becomes long. .. Further, in the processing by the core drill, since the disk-shaped substrate is cut out one by one from the plate-shaped substrate, there is a problem that the time required for the processing also becomes long.

The present invention has been made in view of the above points, and one of the objects of the present invention is to provide a processing apparatus and a processing method capable of shortening the processing time for forming a plurality of circular chips.

The processing device of one aspect of the present invention is a processing device that shapes the side surface of a square chip to form a circular chip, and cuts a holding means for holding the square chip and a side surface of the square chip held by the holding means. The holding means is provided with a processing means for processing into a circular shape by stacking a plurality of square chips in the thickness direction and sandwiching and holding the square chips from both the front and back sides, and rotating the holding portion to determine the cutting position of the square chips. The machining means includes a cutting tool having a cutting grindstone having an arcuate cross section, a spindle unit including a rotatable spindle that supports the cutting tool, and a spindle unit and a holding means. It is composed of a machining feed section that feeds machining relative to the axis perpendicular to the axis , and the sandwiching section includes a base and a support shaft for rotatably holding a plurality of square chips. pedestal is characterized Rukoto away from a plurality of square chips held and rotated through the support shaft.

According to this configuration, a plurality of square chips can be collectively shaped with a cutting grindstone having an arc-shaped cross section to form a circular chip, so that a cutting tool such as a router or a core drill that cuts out circular chips one by one is not used. It will be good. As a result, stable machining can be performed, and a plurality of chips can be shaped by one machining feed, and the time required for machining can be shortened as compared with the conventional machining method described above.

Further, the processing method of one aspect of the present invention is a processing method of forming a circular chip by shaping the side surface of the square chip using the above processing apparatus, and is a holding step in which a plurality of square chips are stacked and sandwiched by the holding means. After performing the holding step, the holding means for holding the plurality of square chips and the rotating cutting grindstone are relatively processed and fed, and the side surfaces of the plurality of square chips are cut by the cutting grindstone to form the arc shape of the cutting grindstone. A side cutting step that transfers to the side surface of the square chip, and a square chip rotation step that rotates the support shaft in the holding portion of the holding means and positions the unshaped portion of the square chip that is maintained away from the base. The feature is that the side cutting step and the square tip rotation step are alternately performed and repeated until the square tip is shaped into a circle.

According to the present invention, since the side surfaces of the plurality of square chips are cut and shaped with a cutting grindstone, the processing time for forming the plurality of circular chips can be shortened.

It is external perspective view of the processing apparatus which concerns on this embodiment. 2A is a schematic perspective view of the holding means, FIG. 2B is a side view of the holding means of FIG. 2A in a partially cross-sectional view, and FIG. 2C is a sectional view taken along line AA of FIG. 2B. 3A to 3F are explanatory views of a procedure for processing a square chip into a circle.

Hereinafter, the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is an external perspective view of the processing apparatus according to the present embodiment. In the following description, a cutting device will be illustrated as a processing device, but the present invention is not limited to this configuration. In FIG. 1, for convenience of explanation, some members are omitted, but the configuration normally provided by the cutting apparatus is assumed to be provided.

As shown in FIG. 1, the processing apparatus 1 comprises a first cutting means 5a and a second cutting means 5b constituting the processing means 5 and a chuck table 3 holding the square tip C1 via the holding means 8. It is configured to be moved relative to shape the side surface of the square chip C1.

The center of the support base 10 of the processing apparatus 1 is opened so as to extend in the X-axis direction, and is covered with a moving plate 11 and a bellows-shaped waterproof cover 12 so as to cover the opening. Further, an elevator means 13 and a spinner cleaning means 14 are provided across the opening. A chuck table 3 that can rotate around the Z axis is provided on the moving plate 11. Below the waterproof cover 12 and the moving plate 11, a ball screw type machining feed portion 55 for moving the chuck table 3 in the X-axis direction is provided. The machining feed portion 55 enables the chuck table 3, the holding means 8, and the cutting means 5a and 5b to be machined and fed relative to each other in the X-axis direction, which is the machining feed direction. A holding surface 33 for holding the holding means 8 is formed on the upper surface of the chuck table 3. The central region of the holding surface 33 is a suction region by the porous surface.

On the upper surface of the base 2, a gate-shaped pillar portion 21 is provided so as to straddle an opening extending in the X-axis direction. The gate-shaped pillar portion 21 is provided with indexing feeding means 6 and cutting feeding means 7 for moving the cutting means 5a and 5b relative to the chuck table 3.

The indexing feed means 6 moves the first cutting means 5a and the second cutting means 5b in the indexing feed direction (Y-axis direction) orthogonal to the machining feed direction, whereby the chuck table 3 and the cutting means 5a and 5b are moved. Is relatively moved in the Y-axis direction. The cut feed means 7 moves the first cutting means 5a and the second cutting means 5b in the cut feed direction (Z-axis direction) perpendicular to the holding surface 33. The indexing feed means 6 includes a pair of guide rails 61 parallel to the front surface of the pillar portion 21 in the Y-axis direction, and a pair of motor-driven Y-axis tables 62 slidably installed on the pair of guide rails 61. Have. Further, the cutting feed means 7 includes a pair of guide rails 71 arranged in front of each Y-axis table 62 parallel to the Z-axis direction, and a motor-driven Z-axis table 72 slidably installed on the guide rails 71. And have.

Cutting means 5a and 5b for cutting the square tip C1 are provided at the lower part of each Z-axis table 72. Further, nut portions (not shown) are formed on the back surface side of each Y-axis table 62, and a ball screw 63 is screwed into these nut portions. Further, nut portions (not shown) are formed on the back surface side of each Z-axis table 72, and a ball screw 73 is screwed into these nut portions. Drive motors 64 and 74 are connected to one end of the ball screw 63 for the Y-axis table 62 and the ball screw 73 for the Z-axis table 72, respectively. By rotationally driving the ball screws 63 and 73 by these drive motors 64 and 74, the cutting means 5a and 5b are moved along the guide rails 61 and 71 in the Y-axis direction and the Z-axis direction.

The first cutting means 5a includes a disk-shaped cutting tool 51a and a spindle unit 53a including a spindle 52a (see FIG. 3A) that supports and rotates the cutting tool at its tip. The second cutting means 5b also includes a spindle unit 53b including a spindle (not shown) and a cutting tool (not shown) mounted on the spindle unit 53b. The axes of the spindles 52a of the cutting means 5a and 5b are parallel to the Y-axis direction and are oriented in a direction orthogonal to the X-axis direction, which is the machining feed direction described above. The cutting tool 51a of the first cutting means 5a is used for shaping the side surface of the chip, and the details will be described later. The cutting tool of the second cutting means 5b is used when cutting a plate-shaped substrate (not shown) held on the holding surface 33 in a grid pattern to form a plurality of square chips, for example, a grinding tool such as diamond. The grains are bonded (sintered) with a bonding agent to form a disk shape. Here, the machining means 5 is composed of the first cutting means 5a and the second cutting means 5b, and the machining feed portion 55 that moves the chuck table 3 in the X-axis direction.

Subsequently, the holding means according to the present embodiment will be described with reference to FIG. 2 in addition to FIG. 2A is a schematic perspective view of the holding means, FIG. 2B is a side view of the holding means of FIG. 2A in a partially cross-sectional view, and FIG. 2C is a sectional view taken along line AA of FIG. 2B.

As shown in FIG. 1, the holding means 8 includes a mounting plate 81 formed in a disk shape having a plane size corresponding to the holding surface 33, and a holding portion 82 provided on the upper surface of the mounting plate 81. ing. As shown in FIGS. 2A and 2B, the sandwiching portion 82 holds the plurality of square chips C1 by stacking them in the thickness direction and sandwiching them from both the front and back sides.

The sandwiching portion 82 is inserted into a rectangular parallelepiped base 821 provided on a mounting plate 81 (not shown in FIG. 2, see FIG. 1) and an opening 821a extending in the X-axis direction at the center of the base 821. The movable body 822 is provided, and the fixed body 823 provided on one end side of the base 821 in the X-axis direction is provided.

The movable body 822 and the fixed body 823 are provided with support shafts 822a and 823a that are located on the same axis and face each other. Pads 822b and 823b (pads 822b are not shown in FIG. 2A) that come into contact with a plurality of stacked square chips C1 are provided on the tip sides of the support shafts 822a and 823a, and the pads 822b and 823b are made of elastic members or the like. It is formed so that a buffering action and a non-slip action can be obtained.

As shown in FIGS. 2B and 2C, two shafts 824 extending in the X-axis direction (one not shown in FIG. 2B) are provided in the opening 821a of the base 821, and these shafts 824 are movable bodies 822. The movable body 822 is guided to slide in the X-axis direction through the lower end side of the movable body 822. A coil spring (elastic body) 825 is provided on the shaft 824, and the coil spring 825 is provided so as to constantly exert a force in a direction approaching the fixed body 823 with respect to the movable body 822. Therefore, the elastic force of the coil spring 825 causes the plurality of stacked square chips C1 to be sandwiched between the pads 822b and 823b. Further, a set screw 826 is screwed into the movable body 822 at a position directly above the shaft 824. By screwing the set screw 826 and pressing the tip against the shaft 824, the sliding movement of the movable body 822 can be restricted and positioned.

The holding means 8 further includes a position changing portion 83. The position changing portion 83 is configured such that the base end side of the support shafts 822a and 823a is mounted on the movable body 822 and the fixed body 823 so as to be relatively rotatable. In this configuration, the movable body 822 and the fixed body 823 function as bearings for the support shafts 822a and 823a. The position changing portion 83 rotates the support shafts 822a and 823a and the pads 822b and 823b of the holding portion 82 around the X axis, and changes the cutting position of the square tip C1 as described later. Further, the position changing portion 83 includes a stopper mechanism (not shown) for restricting the rotation of the support shafts 822a and 823a at a predetermined rotation angle in the movable body 822 and the fixed body 823.

Subsequently, the cutting tool 51a of the first cutting means 5a will be described with reference to FIG. 3A. The cutting tool 51a of the first cutting means 5a is formed in a disk shape having a cutting grindstone 511a on the outer circumference, and is mounted on the spindle 52a at the center position of the disk and is rotatably provided. An arc groove 512a formed in a substantially semicircular arc shape is formed on the outer peripheral surface of the cutting tool 51a when viewed from a direction orthogonal to the center position (when viewed in cross section on a plane including the center position). A cutting wheel 511a is formed on the inner peripheral surface of the arc groove 512a. Specifically, a groove corresponding to the arc groove 512a is formed on a base made of stainless steel or aluminum, and diamond abrasive grains are electrodeposited on the groove to form a cutting grindstone 511a.

Next, a processing method for forming a circular chip by shaping the side surface of the square chip using the processing apparatus of the present embodiment will be described. Before carrying out this processing method, it is assumed here that a plurality of square chips C1 having the same shape are formed in advance.

First, as shown in FIG. 2B, a holding step of stacking and sandwiching a plurality of square chips C1 on the holding means 8 is performed. In the holding step, a plurality of square chips C1 are stacked in the thickness direction so that their edges are aligned. Next, the movable body 822 is displaced from the fixed body 823 against the elastic force of the coil spring 825, and the gap between the pads 822b and 823b is made larger than the thickness of the plurality of stacked square chips C1. Then, after arranging a plurality of square chips C1 stacked between the pads 822b and 823b, the movable body 822 is displaced by the elastic force of the coil spring 825. Due to this elastic force, a plurality of square chips C1 are sandwiched between the pads 822b and 823b. In the state of being sandwiched in this way, as shown in FIG. 2C, the set screw 826 is screwed in to press the tip against the shaft 824, and the sliding movement of the movable body 822 is restricted and positioned to maintain the sandwiched state. Is done.

The mounting plate 81 of the holding means 8 holding the plurality of square chips C1 in this way is mounted on the holding surface 33 of the chuck table 3 (see FIG. 1). At this time, by using a jig or the like (not shown), the relative positions and orientations of the holding surface 33 and the holding means 8 are set to be constant. Then, the mounting plate 81 is suction-held on the holding surface 33 by a negative pressure generated by a suction source (not shown). The mounting plate 81 may be held by using other mechanisms such as screw fixing. Further, the suction holding of the mounting plate 81 and the sandwiching of the square chip C1 described above may be performed in the reverse order.

After performing the holding step, the first (first) side cutting step of shaping the upper side surface of the square tip C1 is performed. In this side surface cutting step, as shown in FIG. 3A, the support shafts 822a and 823a are rotated by the position changing portion 83 so that the upper side surfaces of the plurality of square chips C1 are horizontal, and then the rotation is restricted. Then, the cutting tool 51a of the first cutting means 5a and the held square tip C1 are aligned in the Y-axis direction. After that, the first cutting means 5a is lowered while rotating the cutting tool 51a at a high speed, and the holding means 8 for holding the plurality of square chips C1 and the rotating cutting grindstone 511a are relatively machined and fed in the X-axis direction. Then, the cutting grindstone 511a formed on the inner peripheral surface of the arc groove 512a of the cutting grindstone 511a sequentially contacts the upper side surface side of the plurality of square chips C1 in the direction in which the square chips C1 are overlapped. As a result, as shown in FIG. 3B, the upper side surface side of the plurality of square chips C1 is cut, and the arc shape of the arc groove 512a is transferred to the plurality of square chips C1 on the upper portion of each square chip C1.

Here, in the state of FIG. 3B, the side surface of the upper half of the square chip C1 is shaped, and the side surface of the lower half is an unshaped portion Ca. Since the side surface of the square tip C1 is cut as described above, the shape of the square tip C1 does not become square. However, for convenience of explanation below, the square tip C1 will be referred to as the square tip C1 until the present processing method is completed.

After performing the first side cutting step, the first (first) chip rotation step (square chip rotation step) is performed. In this chip rotation step, as shown in FIG. 3C, the support shafts 822a and 823a of the holding means 8 are rotated to position the unshaped portion Ca of the square chip C1 upward. In the present embodiment, the square chip C1 is rotated by 120 ° and positioned around the axes (clockwise) of the support shafts 822a and 823a.

After the first chip rotation step is performed, the second and subsequent side surface cutting steps and the second and subsequent chip rotation steps are alternately performed and repeated in the same manner as described above. In the second side cutting step, one corner of the unshaped portion Ca is turned upward by rotating the square tip C1 by 120 ° in the first tip rotation step immediately before the step. In this state, when the first cutting means 5a is lowered and the plurality of square tips C1 and the cutting tool 51a are relatively machined and fed, as shown in FIG. 3D, the upper side surface side of the square tip C1 is cut. The arc shape is transferred.

Here, since the rotation angle in the first chip rotation step is 120 °, which is smaller than 180 °, the side surfaces to be cut in the first and second side surface cutting steps overlap. Specifically, when the arc groove 512a of the cutting grindstone 511a has a semicircular arc shape, the square tip C1 overlaps in the circumferential direction within an angle range of 30 °. As a result, in the side cutting steps carried out twice, no uncut portion remains between the side surfaces cut into an arc shape, and the side surface having a smooth arc shape between them. Can be.

After performing the second side cutting step, as shown in FIG. 3E, the second chip rotation step of rotating the unshaped portion Ca of the square tip C1 by 120 ° and positioning it upward is carried out.
After performing the second chip rotation step, the third side cutting step is carried out in the same manner as in the first and second steps. By repeating the side surface cutting step and the chip rotation step in this way, as shown in FIG. 3F, all the side surfaces are formed into an arc shape and processed into a circular chip C2.

As described above, according to the processing method of the above embodiment, the arc shape can be transferred to a plurality of square chips C1 overlapping in the thickness direction by the cutting tool 51a in which the arc groove 512a is formed. Further, since the position changing portion 83 of the holding means 8 can rotate the plurality of square tips C1 to sequentially position the uncut portion Ca upward, the square tip C1 to the circular tip C2 can be moved by performing the side cutting step a plurality of times. Can be processed. As described above, in the above embodiment, the plurality of square chips C1 can be processed together to form the plurality of circular chips C2. As a result, the square tip C1 can be machined with one machining feed as compared with the conventional machining of cutting out circular tips one by one such as a router or a core drill, so that the machining time can be shortened. Moreover, when the circular blade in the conventional router is used, if the circular tip C2 is small, the circular blade becomes thin and easily broken, which causes the processing to be interrupted, which causes a long processing time. , It is possible to eliminate such a factor and suppress the processing from taking a long time.

By the way, as a conventional processing method, a method of cutting into a circle by laser processing can be considered, but in this case, the processing edge of the circular tip is dripped by the heat of laser irradiation or the like, and the processing quality deteriorates. In this respect, in the above embodiment, since the cutting is performed by the rotating cutting grindstone 511a, it is possible to prevent the side surface of the circular tip C2 from sagging and improve the finished quality.

The embodiments of the present invention are not limited to the above embodiments, and may be variously modified, replaced, or modified without departing from the spirit of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in another way by the advancement of technology or another technology derived from it, it may be carried out by using that method. Therefore, the scope of claims covers all embodiments that may be included within the scope of the technical idea of the present invention.

In the above embodiment, the case where the holding means 8 is sucked and held on the chuck table 3 has been described, but the chuck table 3 may be omitted and the structure may be movable by the machining feed unit 55. However, as in the above embodiment, by allowing the holding means 8 to be suction-held by the chuck table 3, the circular tip C2 can be machined in the processing apparatus 1 as described above, and the circular tip C2 can be machined by the second cutting means 5b. The substrate to be processed can be sucked and held by the chuck table 3, an existing processing apparatus can be used, and processing variations can be increased.

Further, as long as the side cutting step and the tip rotation step are repeated until there is no uncut portion Ca, the rotation angle of the square tip C1 in the tip rotation step can be appropriately changed such as 90 ° or 135 °. Further, the arc groove 512a is not limited to a semicircular arc shape as long as it has a cross-sectional arc shape, and the arc length, angle range, and the like may be changed, such as by making it a quarter arc shape. Then, the number of repetitions of the side surface cutting step and the chip rotation step is appropriately changed according to various conditions such as the rotation angle.

Further, the holding portion 82 is not limited to the configuration shown in the figure, and the displacement of the movable body 822 may be controlled by using a cylinder, a feed screw shaft, or the like.

Further, the position changing unit 83 may control the rotation of the square chip C1 via a drive source such as a stepping motor.

As described above, the present invention has an effect that the processing time for forming a plurality of circular chips can be shortened, and is useful when forming a plurality of small circular chips.

1 Machining equipment 5 Machining means 51a Cutting tool 511a Cutting grindstone 52a Spindle 53a Spindle unit 55 Machining feed part 8 Holding means 82 Holding part 83 Position change part C1 Square tip C2 Circular tip Ca Unshaped part

Claims (2)

A processing device that shapes the sides of a square chip to form a circular chip.
A holding means for holding the square chip and a processing means for cutting the side surface of the square chip held by the holding means into a circular shape are provided.
The holding means includes a holding portion that stacks a plurality of the square chips in the thickness direction and sandwiches and holds the square chips from both the front and back sides, and a position changing portion that rotates the holding portion to change the cutting position of the square chips. Prepare,
The processing means includes a cutting tool having a cutting grindstone having an arc-shaped cross section, a spindle unit including a spindle that supports and rotates the cutting tool, and the spindle unit and the holding means with respect to the spindle axis. It is composed of a machining feed unit that feeds machining relative to the orthogonal direction .
The holding portion includes a base and support shafts for rotatably holding the plurality of the square chips, and the base is from the plurality of square chips held and rotated via the support shafts. away Ru processing equipment. A processing method for forming a circular chip by shaping the side surface of a square chip using the processing apparatus according to claim 1.
A holding step of stacking and sandwiching a plurality of square chips on the holding means,
After performing the holding step, the holding means for holding the plurality of square chips and the rotating cutting grindstone are relatively processed and fed, and the side surfaces of the plurality of square chips are cut by the cutting grindstone, and the cutting is performed. A side cutting step that transfers the arc shape of the grindstone to the side surface of the square tip,
A square chip rotation step is provided, which rotates the support shaft in the holding portion of the holding means and positions an unshaped portion of the square chip upward while being maintained away from the base.
A processing method characterized in that the side surface cutting step and the square chip rotation step are alternately performed and repeated until the square chip is shaped into a circle.

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