JP6891525B2 - Sensors and sensor systems - Google Patents

Description

The present invention relates to sensors and sensor systems.

In recent years, the number of robots called service robots and collaborative robots that are used in places close to humans is increasing. Therefore, robots are required to have a function to ensure the safety of people around them. As a technique for ensuring safety, for example, providing a sensor for detecting a collision with a person or an object can be mentioned. Examples of the sensor include a contact sensor using a piezoelectric element, and examples of the piezoelectric element include ceramic (PZT) and polymer (PVDF). When a contact sensor (sensor) is provided on a robot, it is often attached to the surface of the robot, but it is desirable that the sensor is flexible in consideration of providing it at any place. Also, from the viewpoint of safety, it is desirable that the surface of the robot is as soft as possible. When the contact sensor is attached to a flexible surface, the contact sensor itself should be soft, and it is necessary to have characteristics that can withstand large deformation. From these viewpoints, the piezoelectric material such as PZT or PVDF is not preferable.
On the other hand, as a flexible contact detection sensor, a sensor using contact charging as described in Patent Document 1 has been proposed.

However, in Patent Document 1, since the contact charging phenomenon between substances is used, it is not possible to obtain a signal for a change in pressure. For example, when the sensor described in Patent Document 1 is provided on the entire body of a service robot that serves customers, it is possible to detect a collision with a person, but it is determined that the collision has occurred even when the head is stroked by the person. Resulting in. Considering more advanced control of robots and interaction with humans, it is required to be able to detect the magnitude of pressure in multiple stages.
The present invention has been made in view of the above problems, and an object of the present invention is to provide a sensor that is flexible and can detect pressure in multiple stages.

In order to achieve the above object, the sensor according to the present invention is arranged between a pair of electrodes and a pair of electrodes, is formed of rubber or a rubber composition , and is on one electrode side with respect to the same deformation applying force. It is characterized in that it has an intermediate layer in which the amount of deformation of the surface and the amount of deformation of the surface on the other electrode side are different, and a plurality of elements that generate power by deformation are laminated via an insulating layer. There is.

According to the present invention, it is possible to provide a sensor that is flexible and can detect the magnitude of pressure in multiple stages.

The side view which shows the power generation element which concerns on 1st Embodiment of this invention. The side view which shows the contact sensor which concerns on 1st Embodiment of this invention. The side view which shows the power generation element which concerns on 2nd Embodiment of this invention. The side view which shows the contact sensor which concerns on 2nd Embodiment of this invention. The side view which shows the contact sensor which concerns on 3rd Embodiment of this invention. The side view which shows the contact sensor which concerns on 4th Embodiment of this invention. Evaluation configuration diagram of the contact sensor. The schematic diagram which shows the deformation when pressure is applied to the contact sensor with a weak force. (Evaluation Result of Example 1) The generated voltage waveform diagram when a load is applied to the contact sensor with a weak force. The schematic diagram which shows the deformation when pressure is applied to the contact sensor with a strong force. (Evaluation Result of Example 1) The generated voltage waveform diagram when pressure is applied to the contact sensor with a strong force. The side view which shows the contact detection system which concerns on 5th Embodiment of this invention. The characteristic figure which shows the XPS measurement result of the intermediate layer (silicone rubber) which performed the surface modification treatment and the inactivation treatment. The graph which shows the change in the thickness direction of the Si2p binding energy of the intermediate layer measured in FIG. The characteristic figure which shows the XPS measurement result of the untreated intermediate layer (silicone rubber). The graph which shows the change in the thickness direction of the Si2p binding energy of the intermediate layer measured in FIG. The cross-sectional schematic diagram for demonstrating the characteristic of the element which has the intermediate layer which performed the surface modification treatment and the inactivation treatment treatment. The figure explaining one embodiment which adopted the contact detection system described in 5th Embodiment. The figure explaining another embodiment which adopted the contact detection system described in 5th Embodiment.

Hereinafter, embodiments according to the present invention will be described with reference to the drawings. In the embodiment, those having the same function and the same configuration are designated by the same reference numerals, and duplicate description will be omitted as appropriate. Drawings may be partially omitted to aid in understanding some configurations.

(First Embodiment)
The first embodiment will be described with reference to FIGS. 1 and 2.
As shown in FIG. 1, the power generation element 4, which is an element, has a pair of electrodes formed by the first electrode 1 and the second electrode 2, and is sandwiched between the first electrode 1 and the second electrode 2. The intermediate layer 3 is provided so as to be used. For convenience, the first electrode 1 may be referred to as an upper electrode, and the second electrode 2 may be referred to as a lower electrode.
The intermediate layer 3 is made of rubber or a rubber composition, and one side 3a (upper electrode side in this embodiment) in the stacking direction (thickness direction) is the one side 3a and the other side 3b (lower electrode side in this embodiment). The surface modification treatment and / or the inactivation treatment is performed so that the degree of deformation with respect to the same deformation applying force (also referred to as an external force) is different and the electric charge can be accumulated. This point will be described in detail later.

FIG. 2 shows the configuration of the sensor 10 using the power generation element 4 according to the present embodiment. The sensor 10 is configured by stacking a plurality of power generation elements 4 via an insulating layer 5. In the present embodiment, the insulating layer 5 is arranged between the two power generation elements 4. In FIG. 2, the power generation element 4 arranged above the insulating layer 5 may be referred to as an upper layer power generation element 6, and the power generation element 4 arranged below the insulating layer 5 may be referred to as a lower layer power generation element 7.
The material, shape, size, thickness, and structure of the insulating layer 5 are not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the material of the insulating layer 5 include a polymer material and rubber which is an elastic body.
Examples of the polymer material include polyethylene, polypropylene, polyethylene terephthalate, polyvinyl chloride, polyimide resin, fluororesin, and acrylic resin.
Examples of the rubber include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluororubber, isoprene rubber, butadiene rubber, and styrene / butadiene rubber. Examples thereof include acrylonitrile-butadiene rubber, ethylene / propylene / diene rubber, chlorosulfonated polyethylene rubber, and polyisobutylene.

(Second Embodiment)
The second embodiment will be described with reference to FIGS. 3 and 4.
As shown in FIG. 3, the power generation element 4A, which is an element, covers the power generation element described in the first embodiment with a cover 8. That is, in the power generation element 4A, a pair of electrodes is formed by the first electrode 1 and the second electrode 2, and the intermediate layer 3 is provided so as to be sandwiched between the first electrode 1 and the second electrode 2. It also has a cover 8 that covers the first electrode 1, the second electrode 2, and the intermediate layer 3.
The main purpose of the cover 8 is to protect the first electrode 1, the second electrode 2, and the intermediate layer 3, and the material, shape, size, thickness, and structure are not particularly limited, depending on the purpose. It can be selected as appropriate.
FIG. 4 shows the configuration of the sensor 10A using the power generation element 4A according to the present embodiment. The sensor 10A is configured by laminating a plurality of power generation elements 4A via an insulating layer 5. In the present embodiment, the insulating layer 5 is arranged between the two power generation elements 4A. In FIG. 4, the power generation element 4 arranged above the insulating layer 5 may be referred to as an upper layer power generation element 6A, and the power generation element 4 arranged below the insulating layer 5 may be referred to as a lower layer power generation element 7A.

(Third Embodiment)
A third embodiment will be described with reference to FIG.
In the sensor 10B according to the present embodiment, the support 11 is arranged between the power generation element 4A and the power generation element 4A to form an air layer to form an insulating layer 5A. That is, the insulating layer 5A according to the present embodiment is formed of an air layer composed of a support 11 arranged between the plurality of power generation elements 4A and a gap 9 generated by the support 11.

The material, form, shape, size, and the like of the support 11 are not particularly limited, and can be appropriately selected depending on the intended purpose. Examples of the material of the support 11 include a polymer material, rubber, metal, a conductive polymer material, and a conductive rubber composition.
Examples of the polymer material include polyethylene, polypropylene, polyethylene terephthalate, polyvinyl chloride, polyimide resin, fluororesin, and acrylic resin. Examples of the rubber include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluororubber, isoprene rubber, butadiene rubber, and styrene / butadiene rubber. Examples thereof include acrylonitrile-butadiene rubber, ethylene / propylene / diene rubber, chlorosulfonated polyethylene rubber, polyisobutylene, and modified silicone.

Examples of the metal include gold, silver, copper, aluminum, stainless steel, tantalum, nickel, phosphor bronze and the like. Examples of the conductive polymer material include polythiophene, polyacetylene, polyaniline and the like. Examples of the conductive rubber composition include a composition containing a conductive filler and rubber. Examples of the conductive filler include carbon materials (for example, Ketjen black, acetylene black, graphite, carbon fiber, carbon fiber, carbon nanofibers, carbon nanotubes, graphene, etc.), metals (for example, gold, silver, platinum, etc.). Conductive polymer materials such as copper, iron, aluminum, and nickel (for example, polythiophene, polyacetylene, polyaniline, polypyrrole, polyparaphenylene, and derivatives of polyparaphenylene vinylene, or these derivatives are represented by anions or cations. Examples include those to which a dopant is added), an ionic liquid, and the like.

Examples of the rubber include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluororubber, isoprene rubber, butadiene rubber, and styrene / butadiene rubber. Examples thereof include acrylonitrile-butadiene rubber, ethylene / propylene / diene rubber, chlorosulfonated polyethylene rubber, polyisobutylene, and modified silicone.
Examples of the form of the support 11 include a sheet, a film, a woven fabric, a non-woven fabric, a mesh, and a sponge.
The shape, size, thickness, and installation location of the support 11 can be appropriately selected according to the structure of the element.

(Fourth Embodiment)
A fourth embodiment will be described with reference to FIG.
The sensor 10C according to the present embodiment is configured by arranging the foam 12 as an insulating layer between the power generation element 4A and the power generation element 4A and laminating them.
The material, form, shape, size, and the like of the foam 12 are not particularly limited and may be appropriately selected depending on the intended purpose. Examples of the material of the foam include urethane, polyethylene, and silicone.

The evaluation result of the signal at the time of contact in the fourth embodiment will be described with reference to FIGS. 7 to 11.

Hereinafter, examples of the fourth embodiment will be described. “Parts” represents “parts by mass” unless otherwise specified. “%” Represents “mass%” unless otherwise specified.
[Middle layer]
The intermediate layer 3 is made of silicone rubber that has undergone surface modification treatment. 100 parts of silicone rubber (TSE3033: manufactured by Momentive Performance Materials Japan, Ltd.) as a base material and barium titanate (Japanese) as an additive are added. Kojunyaku Co., Ltd., 93-5640) 40 parts were mixed. The obtained mixture was blade-coated on a PET (polyethylene terephthalate) film with an average thickness of 150 ± 20 μm and a length of 40 mm and a width of 40 mm to obtain an intermediate layer precursor.
-Surface modification treatment-
After firing it at about 120 ° C. for 30 minutes, plasma treatment was performed under the following conditions as a surface modification treatment.
[Plasma processing conditions]
Equipment: Made by Yamato Scientific: PR-500
Output: 100W
Treatment time: 4 minutes Reaction atmosphere: Argon 99.999%
Reaction pressure: 10 Pa

[electrode]
A non-woven conductive sheet (manufactured by Seiren, size 30 mm × 30 mm) having an average thickness of 30 μm was used for the electrodes 1 and 2.
[cover]
As the cover 8, a PET laminate film having a thickness of 75 μm (made of Fellows, size 50 mm × 50 mm) was used.
The intermediate layer 3 was sandwiched between the two electrodes 1 and 2, further sandwiched between the PET laminate films, and laminated at 80 ° C. to obtain a power generation element 4A.
[Insulation layer]
Urethane foam (manufactured by Fuji Rubber Sangyo Co., Ltd., thickness 2 cm), which is a foam, was used for the insulating layer 12.

[Evaluation]
FIG. 7 shows the evaluation configuration. Load resistors 21 and 22 of 1 MΩ are connected between the electrodes of the upper layer power generation element 6A and the lower layer power generation element 7A, and the voltage between the resistors is recorded by the oscilloscope 20.
FIG. 8 shows a schematic diagram of the sensor 10C when the pressure F is applied from the upper layer power generation element 6A side with a weak force (5.7 kPa) such as stroking, and FIG. 9 shows the generated signal at that time. In FIG. 9, the vertical axis represents the output (voltage V) from the upper layer power generation element 6A and the lower layer power generation element 7A, and the horizontal axis represents the time (s).
As shown in FIG. 8, when a weak force is applied, only the upper layer power generation element 6A is deformed. Therefore, as shown in FIG. 9, a signal is generated only from the upper layer power generation element 6A, and no signal is generated from the lower layer power generation element 7A.

On the other hand, FIG. 10 shows a schematic diagram of the sensor 10C when the pressure F is applied from the upper layer power generation element 6A side with a strong force (57 kPa), and FIG. 11 shows the generated signal at that time. In FIG. 10, the vertical axis represents the output (voltage V) from the upper layer power generation element 6A and the lower layer power generation element 7A, and the horizontal axis represents the time (s).
As shown in FIG. 10, when the pressure F is applied with a strong force, both the upper layer power generation element 6A and the lower layer power generation element 7A are deformed. Therefore, as shown in FIG. 11, signals are generated from both power generation elements.

From such an evaluation result, it is arranged between the first electrode 1 and the second electrode 2 which are a pair of electrodes, and the first electrode 1 and the second electrode 2, and is formed of rubber or a rubber composition. A plurality of power generation elements 4, 4A that have an intermediate layer 3 and generate power by deforming are laminated via insulating layers 5, 5A, (foam 12) to form sensors 10, 10A, 10B, and 10C. Then, since the deformation of the power generation elements 4 and 4A according to the pressure F becomes larger than in the case of the single layer, the magnitude of the pressure F can be detected in multiple stages by one sensor.
Further, since the power generation elements 4 and 4A have flexibility and the insulator also has elasticity, even if the power generation elements 4 and 4A are laminated, the lower layer corresponds to the pressure F (load) applied to the sensor. The power generation elements 7 and 7A can also be sufficiently deformed. Therefore, the magnitude of the pressure F can be detected more stably and in multiple stages. Further, since the intermediate layer 3 is made of rubber or a rubber composition, the volume deformation rate is large, and the output from the power generation elements 4 and 4A is larger than when a metal material is used, so that more reliable detection can be performed.

In FIGS. 7 to 11, the power generation element 4A of the sensor 10C is shown in a two-layer configuration, but the number of layers may be more than that. By increasing the number of layers, it is possible to increase the tonality for discriminating the strength of the force accordingly.

(Fifth Embodiment)
The sensor system 100 according to the fifth embodiment will be described with reference to FIG.
As shown in FIG. 12, the sensor system 100 according to the present embodiment uses a sponge 12A as an insulator and a foam (elastic body) constituting the insulating layer , and two power generation elements laminated via the sponge 12A. A processing unit (hereinafter referred to as "signal processing unit" ) that processes an output signal output from the sensor 10D (power generation element 4A, 4A) when a pressure F, which is an external force, is applied to the sensor 10D provided with 4A and 4A. It is equipped with 30. In the figure, the power generation element 4A located below the sponge 12A is the upper layer power generation element 6A, and the power generation element 4A located below the sponge 12A is the lower layer power generation element 7A.
Power generation elements 4A and 4A (sensor 10D) are connected to the signal processing unit 30 via a signal line. The signal processing unit 30 is not particularly limited as long as it has input terminals for taking in the output signals of the power generation elements 4A and 4A and can process the output signals of the power generation elements 4A and 4A, and is appropriately selected according to the purpose. can do.
Since the sensor 10D outputs a signal (voltage) corresponding to the pressure F in multiple stages, it may be installed on the surface of a robot or the like and used for determining what is in contact with the surface. Alternatively, the sensor 10D may be attached to the vehicle and used for detecting when an object comes into contact with or collides with the vehicle.

FIG. 18 shows a form in which the above sensor system is applied to the robot arm device 200.
In FIG. 18, the robot arm device 200 includes an articulated robot arm 201 and an arm control unit 210 that controls the operation of the robot arm 201. The robot arm 201 performs the work transfer process by grasping the work at a predetermined position and releasing it at another position. The operation of the robot arm 201 is performed by controlling the operation of the arm drive source by the arm control unit 210.
In the place where the robot arm device 200 is installed, the intrusion of a person into the operating area of the robot arm 201 is prohibited. However, at the time of maintenance, when working within the movable range or by mistake, a person intrudes. It may end up. Further, when a plurality of robot arm devices 200 are installed adjacent to each other, contact (interference) between the robot arms must be taken into consideration.

Therefore, in this robot arm device 200, the sensor 10D is installed around the robot arm 201. Specifically, the sensor 10D is mounted on the surfaces of the arm rods 205, 206, and 207 connected by the joints 202, 203, and 204 of the robot arm 201, respectively. In the present embodiment, since the sensor 10D has flexibility, it is mounted so as to be wound around the surface of the arm rods 205 to 207. Each sensor 10D is connected to the signal processing unit 30 via a rectifier circuit 32.
A determination unit 31 that determines the type of an object that has come into contact with the robot arm 201 based on the output of each sensor 10D that has been signal-processed by the signal processing unit 30 is connected to the signal processing unit 30 via a signal line. The determination unit 31 is composed of a computer including a CPU, a ROM, a RAM, and the like. The determination result of the determination unit 31 is transmitted to the arm control unit 210, and is footed back to the operation control of the robot arm 201.
A determination value for determining an object or a state in contact with the robot arm 201 is set in the determination unit 31. The determination unit 31 determines an object in contact with the robot arm 201 or an entity in close proximity to the robot arm 201 by comparing this determination value with the output signal sent from the signal processing unit 30. In the case of the configuration of FIG. 18, the contact target is a person (human body) or an object other than a person. The contact referred to here includes not only direct contact with the sensor 10D but also indirect contact with the sensor 10D via the protective layer when the protective layer is provided on the outside of the sensor 10D.

That is, since the intermediate layer of the sensor 10D is formed of an elastic body such as soft rubber or sponge 12A, it is possible to detect minute movements of the human body including pulsations of the human body. Further, the lower layer power generation element 7A is deformed via the upper layer power generation element 6A, so that it is possible to selectively detect a pressure change or the like larger than the fine motion. Therefore, it is possible to determine the movement of a person or an object by setting a determination value according to the object to be detected and comparing the detected fine motion value with the determination value. That is, the determination unit 31 acquires information on the fine movement including the pulsation of the human body, and determines the existence of a person based on the acquired information on the fine movement.
For example, "light contact between robot arms takes evasive action without stopping the robot arm device 200", "strong contact between robot arms immediately stops", and "contact with a person (detection of the presence of a person) are all The threshold value of the contact state (existence state) for stopping the robot arm 201 such as "immediate stop" can be determined step by step, and as a result, the operational safety of the robot arm device 200 is ensured and the productivity is increased. It can contribute to improvement.

Further, as shown in FIG. 19, the sensor 10D may be installed so that the buttocks of a person are located in the vicinity when sitting on the seating portion 301 of the chair 300. Even in this case, the sensor 10D is connected to the signal processing unit 30 via the rectifier circuit 32 as described with reference to FIG. 18, and the signal processing unit 30 captures the output signal from the sensor 10D. A determination unit 31 is connected to the signal processing unit 30 via a signal line, and determines a contact object according to the output from each sensor 10D. That is, the determination unit 31 acquires information on the fine movement including the pulsation of the human body, and determines the existence of a person based on the acquired information on the fine movement.
When the sensor system is applied to the chair 300 as in the configuration of FIG. 19, the determination unit 31 compares the preset determination value with the output signal sent from the signal processing unit 30, so that the seating unit 301 The object that is in contact with or in close proximity to the sensor 10D is identified above. The target of this contact is a person (human body) or an object other than a person. There are two states to be detected: "existence of a person (contact state)" and "discrimination between a person and an object".
That is, since the intermediate layer of the sensor 10D is formed of an elastic body such as soft rubber or sponge 12A, it is possible to detect minute movements of the human body including pulsations of the human body. Further, the lower layer power generation element 7A is deformed via the upper layer power generation element 6A, so that it is possible to selectively detect a pressure change or the like larger than the fine motion. Therefore, by setting a judgment value according to the object to be detected and comparing the detected minute movement value with the judgment value, the movement of a person or an object is judged, and the change in the center of gravity and the load when sitting are performed. Changes can be detected. That is, the determination unit 31 separately determines whether the presence of a person and the movement of the person due to the change in pressure are based on the output signal output from the sensor 10D. The contact referred to here includes not only the buttocks directly touching the sensor 10D, but also the indirect contact that comes into contact with the sensor 10D via the skin material and the cushion material of the seating portion 301.
Although the signal processing unit 30, the determination unit 31, and the rectifier circuit 32 have been described as separate configurations in FIGS. 18 and 19, the determination unit and the rectifier circuit 32 may be incorporated in the signal processing unit. Further, the rectifier circuit 32 may be provided on the sensor itself.

In each of the above embodiments, a silicone rubber that has undergone a surface modification treatment and an inactivation treatment is used for the intermediate layer 3. By performing the surface modification treatment, the first electrode side of the intermediate layer 3 (the upper electrode side) 3a to the configuration degree of deformation for the same deformation applied force is different from the second electrode side (the lower electrode side) 3b, That is, the configurations have different hardness, and this characteristic improves the power generation efficiency.

Details of the materials of the electrodes and the intermediate layer for exhibiting the above characteristics will be described below.
[First electrode and second electrode]
The material, shape, size, and structure of the first electrode and the second electrode are not particularly limited and may be appropriately selected depending on the intended purpose.
The material, shape, size, and structure of the first electrode and the second electrode may be the same or different, but are preferably the same.
Examples of the material of the first electrode and the second electrode include metals, carbon-based conductive materials, conductive rubber compositions, conductive polymers, and oxides.
Examples of the metal include gold, silver, copper, aluminum, stainless steel, tantalum, nickel, phosphor bronze and the like. Examples of the carbon-based conductive material include carbon nanotubes, carbon fibers, and graphite. Examples of the conductive rubber composition include a composition containing a conductive filler and rubber. Examples of the conductive polymer include polyethylene dioxythiophene (PEDOT), polypyrrole, polyaniline and the like. Examples of the oxide include indium tin oxide (ITO), indium oxide / zinc oxide (IZO), zinc oxide and the like.
Examples of the conductive filler include carbon materials (for example, Ketjen black, acetylene black, graphite, carbon fiber, carbon fiber (CF), carbon nanofiber (CNF), carbon nanotube (CNT), graphene, etc.) and metal. For fillers (gold, silver, platinum, copper, aluminum, nickel, etc.), conductive polymer materials (polythiophene, polyacetylene, polyaniline, polypyrrole, polyparaphenylene, and derivatives of polyparaphenylene vinylene, or derivatives thereof. Anions or those to which a dopant typified by a cation is added), ionic liquids, etc. These may be used alone or in combination of two or more.
Examples of the rubber include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluororubber, isoprene rubber, butadiene rubber, and styrene / butadiene rubber. Examples thereof include acrylonitrile-butadiene rubber, ethylene / propylene / diene rubber, chlorosulfonated polyethylene rubber, polyisobutylene, and modified silicone. These may be used alone or in combination of two or more.
Examples of the shape of the first electrode and the shape of the second electrode include a thin film and the like. The structure of the first electrode and the structure of the second electrode may be, for example, a non-woven fabric formed by overlapping a woven fabric, a non-woven fabric, a knitted fabric, a mesh, a sponge, and a fibrous carbon material.
The average thickness of the electrodes is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.01 μm to 1 mm, more preferably 0.1 μm to 500 μm from the viewpoint of conductivity and flexibility. .. When the average thickness is 0.01 μm or more, the mechanical strength is appropriate and the conductivity is improved. Further, when the average thickness is 1 mm or less, the element can be deformed and the power generation performance is good.

[Middle layer]
The intermediate layer is flexible.
In the intermediate layer, at least one of the following conditions (1) and (2) is satisfied.
Condition (1): When the intermediate layer is pressurized from a direction orthogonal to the surface of the intermediate layer, the amount of deformation of the first electrode side (one side) in the intermediate layer and the second electrode in the intermediate layer. The amount of deformation on the side (the other side) is different.
Condition (2): The universal hardness (H1) at the time of pushing 10 μm on the first electrode side of the intermediate layer and the universal hardness (H2) at the time of pushing 10 μm on the second electrode side of the intermediate layer are different.
In the intermediate layer, as described above, a large amount of power generation can be obtained by different amounts of deformation or hardness on both sides.
In the present invention, the deformation amount is the maximum pressing depth of the indenter when the intermediate layer is pressed under the following conditions.

{Measurement condition}
Measuring machine: Fisher's ultra-fine hardness tester WIN-HUD
Indenter: Square pyramid diamond indenter with a facing angle of 136 ° Initial load: 0.02 mN
Maximum load: 1mN
Load increase time from initial load to maximum load: 10 seconds

The universal hardness is obtained by the following method.
{Measurement condition}
Measuring machine: Fisher's ultra-fine hardness tester WIN-HUD
Indenter: Square pyramid diamond indenter with a facing angle of 136 ° Pushing depth: 10 μm
Initial load: 0.02mN
Maximum load: 100mN
Load increase time from initial load to maximum load: 50 seconds

The ratio (H1 / H2) of the universal hardness (H1) to the universal hardness (H2) is preferably 1.01 or more, more preferably 1.07 or more, and particularly preferably 1.13 or more. The upper limit of the ratio (H1 / H2) is not particularly limited and is appropriately selected depending on, for example, the degree of flexibility required in the used state, the load in the used state, and the like, but 1.70 or less is preferable. Here, H1 is the universal hardness of the relatively hard surface, and H2 is the universal hardness of the relatively soft surface.
The material of the intermediate layer is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include rubber and rubber compositions. Examples of rubber include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluororubber, isoprene rubber, butadiene rubber, styrene / butadiene rubber, and acrylonitrile. -Butadiene rubber, ethylene / propylene / diene rubber, chlorosulfonated polyethylene rubber, polyisobutylene, modified silicone, etc. can be mentioned. These may be used alone or in combination of two or more. Among these, silicone rubber is preferable.
The silicone rubber is not particularly limited as long as it has a siloxane bond, and can be appropriately selected depending on the intended purpose. Examples of the silicone rubber include dimethyl silicone rubber, methylphenyl silicone rubber, fluorosilicone rubber, and modified silicone rubber (for example, acrylic-modified, alkyd-modified, ester-modified, and epoxy-modified). These may be used alone or in combination of two or more.
Examples of the rubber composition include a composition containing a filler and the rubber. Among these, the silicone rubber composition containing the silicone rubber is preferable because it has high power generation performance.

Examples of the filler include an organic filler, an inorganic filler, and an organic-inorganic composite filler. The organic filler is not particularly limited as long as it is an organic compound, and can be appropriately selected depending on the intended purpose. Examples of the organic filler include acrylic fine particles, polystyrene fine particles, melamine fine particles, fluororesin fine particles such as polytetrafluoroethylene, silicone powder (silicone resin powder, silicone rubber powder, silicone composite powder), rubber powder, wood powder, and pulp. , Staples and the like. The inorganic filler is not particularly limited as long as it is an inorganic compound, and can be appropriately selected depending on the intended purpose.

Examples of the inorganic filler include oxides, hydroxides, carbonates, sulfates, silicates, nitrides, carbons, metals, and other compounds.
Examples of the oxide include silica, diatomaceous earth, alumina, zinc oxide, titanium oxide, iron oxide, magnesium oxide and the like.
Examples of the hydroxide include aluminum hydroxide, calcium hydroxide, magnesium hydroxide and the like.
Examples of the carbonate include calcium carbonate, magnesium carbonate, barium carbonate, hydrotalcite and the like.
Examples of the sulfate include aluminum sulfate, calcium sulfate, barium sulfate and the like.
Examples of the silicate include calcium silicate (wollastonite, zonotrite), zircon silicate, kaolin, talc, mica, zeolite, perlite, bentonite, montmoroneite, sericite, activated clay, glass, and hollow glass. Examples include beads.
Examples of the nitride include aluminum nitride, silicon nitride, and boron nitride.
Examples of the carbons include ketjen black, acetylene black, graphite, carbon fiber, carbon fiber, carbon nanofiber, carbon nanotube, fullerene (including derivative), graphene and the like.
Examples of the metal include gold, silver, platinum, copper, iron, aluminum, nickel and the like.
Examples of the other compounds include potassium titanate, barium titanate, strontium titanate, lead zirconate titanate, silicon carbide, molybdenum sulfide, and the like. The inorganic filler may be surface-treated.

The organic-inorganic composite filler can be used without particular limitation as long as it is a compound in which an organic compound and an inorganic compound are combined at the molecular level.
Examples of the organic-inorganic composite filler include silica-acrylic composite fine particles and silsesquioxane.
The average particle size of the filler is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.01 μm to 30 μm, more preferably 0.1 μm to 10 μm. When the average particle size is 0.01 μm or more, the power generation performance may be improved. Further, when the average particle size is 30 μm or less, the intermediate layer can be deformed, and the power generation performance can be increased.

The average particle size can be measured according to a known method using a known particle size distribution measuring device, for example, Microtrac HRA (manufactured by Nikkiso Co., Ltd.).
The content of the filler is preferably 0.1 part by mass to 100 parts by mass, and more preferably 1 part by mass to 50 parts by mass with respect to 100 parts by mass of rubber. When the content is 0.1 parts by mass or more, the power generation performance may be improved. Further, when the content is 100 parts by mass or less, the intermediate layer can be deformed, and the power generation performance can be increased.
The other components are not particularly limited and may be appropriately selected depending on the intended purpose, and examples thereof include additives. The content of the other components can be appropriately selected without impairing the object of the present invention.

Examples of the additive include a cross-linking agent, a reaction control agent, a filler, a reinforcing material, an anti-aging agent, a conductivity control agent, a colorant, a plasticizer, a processing aid, a flame retardant, an ultraviolet absorber, and a tackifier. , Tixogenic agent and the like.
The method for preparing the material constituting the intermediate layer is not particularly limited and may be appropriately selected depending on the intended purpose. For example, as a method for preparing the rubber composition, the rubber, the filler, and if necessary, the other components can be mixed and kneaded and dispersed.
The method for forming the intermediate layer is not particularly limited and may be appropriately selected depending on the intended purpose. For example, as a method for forming a thin film of the rubber composition, a method of applying the rubber composition on a base material by blade coating, die coating, dip coating or the like, and then curing by heat or an electron beam or the like can be mentioned. Be done.
The average thickness of the intermediate layer is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 1 μm to 10 mm, more preferably 20 μm to 1 mm from the viewpoint of deformation followability. Further, when the average thickness is within a preferable range, the film forming property can be ensured and the deformation is not hindered, so that good power generation can be performed.
The intermediate layer is preferably insulating. The insulating, preferably have a volume resistivity of more than 10 ⁸ [Omega] cm, and more preferably has a volume resistivity of more than 10 ¹⁰ [Omega] cm. The intermediate layer may have a multi-layer structure.

(Surface modification treatment and inactivation treatment)
Examples of the method of differentiating the amount of deformation or hardness on both sides of the intermediate layer include a surface modification treatment and an inactivation treatment. Both of these processes may be performed, or only one of them may be performed.
<Surface modification treatment>
Examples of the surface modification treatment include plasma treatment, corona discharge treatment, electron beam irradiation treatment, ultraviolet irradiation treatment, ozone treatment, and radiation (X-ray, α-ray, β-ray, γ-ray, neutron-ray) irradiation treatment. Be done. Among these treatments, plasma treatment, corona discharge treatment, and electron beam irradiation treatment are preferable from the viewpoint of treatment speed, but are not limited to these as long as they have a certain amount of irradiation energy and can modify the material. ..
《Plasma processing》
In the case of plasma processing, the plasma generator can be, for example, a parallel plate type, a capacitively coupled type, an inductively coupled type, or an atmospheric pressure plasma device. From the viewpoint of durability, reduced pressure plasma treatment is preferable.
The reaction pressure in the plasma treatment is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.05 Pa to 100 Pa, more preferably 1 Pa to 20 Pa.
The reaction atmosphere in the plasma treatment is not particularly limited and may be appropriately selected depending on the intended purpose. For example, a gas such as an inert gas, a rare gas, or oxygen is effective, but argon is used in terms of sustainability of the effect. preferable.
At that time, the oxygen partial pressure is preferably 5,000 ppm or less. When the oxygen partial pressure in the reaction atmosphere is 5,000 ppm or less, the generation of ozone can be suppressed and the use of the ozone treatment device can be avoided.
The amount of irradiation power in plasma processing is defined by (output × irradiation time). The irradiation power amount is preferably 5 Wh to 200 Wh, more preferably 10 Wh to 50 Wh. When the amount of irradiation power is within a preferable range, the power generation function can be imparted to the intermediate layer, and the durability is not lowered due to excessive irradiation.

《Corona discharge treatment》
The applied energy in corona discharge treatment (cumulative ^energy), preferably ^{6J / cm 2 ~300J / cm 2} , 12J / cm 2 ~60J / cm 2 is more preferable. When the applied energy is within a preferable range, the power generation function can be imparted to the intermediate layer, and the durability is not lowered due to excessive irradiation.

<< Electron beam irradiation processing >>
The irradiation amount in the electron beam irradiation treatment is preferably 1 kGy or more, and more preferably 300 kGy to 10 MGy. When the irradiation amount is within a preferable range, the power generation function can be imparted to the intermediate layer, and the durability is not lowered due to excessive irradiation.
The reaction atmosphere in the electron beam irradiation treatment is not particularly limited and may be appropriately selected depending on the intended purpose, but is filled with an inert gas such as argon, neon, helium, or nitrogen and has an oxygen partial pressure of 5,000 ppm or less. Is preferable. When the oxygen partial pressure in the reaction atmosphere is 5,000 ppm or less, the generation of ozone can be suppressed and the use of the ozone treatment device can be avoided.

《Ultraviolet irradiation treatment》
The ultraviolet rays in the ultraviolet irradiation treatment are preferably 200 nm or more at a wavelength of 365 nm or less, and more preferably 240 nm or more at a wavelength of 320 nm or less.
The integrated light intensity in the ultraviolet irradiation ^treatment, preferably ^{5J / cm 2 ~500J / cm 2} , 50J / cm 2 ~400J / cm 2 is more preferable. When the integrated light amount is within a preferable range, the power generation function can be imparted to the intermediate layer, and the durability is not lowered due to excessive irradiation.
The reaction atmosphere in the ultraviolet irradiation treatment is not particularly limited and may be appropriately selected depending on the intended purpose, but is filled with an inert gas such as argon, neon, helium, or nitrogen and has an oxygen partial pressure of 5,000 ppm or less. It is preferable to do so. When the oxygen partial pressure in the reaction atmosphere is 5,000 ppm or less, the generation of ozone can be suppressed and the use of the ozone treatment device can be avoided.

As a prior art, it has been proposed to form an active group by exciting or oxidizing by plasma treatment, corona discharge treatment, ultraviolet irradiation treatment, electron beam irradiation treatment, or the like to enhance the interlayer adhesion. However, the technique is limited to inter-layer applications, and it has been found that application to the outermost surface is rather undesirable because it reduces releasability. Moreover, the reaction is carried out under an oxygen-rich state, and the reaction active group (hydroxyl group) is effectively introduced. Therefore, such a prior art is essentially different from the surface modification treatment of the present invention.

Since the surface modification treatment of the present invention is a treatment in a reaction environment in which oxygen is low and the pressure is reduced (for example, plasma treatment), recrosslinking and bonding of the surface are promoted. Durability is improved due to "increase".
Furthermore, it is considered that the releasability is improved due to the "densification by improving the crosslink density". Although some active groups are formed in the present invention as well, the active groups are inactivated by a coupling agent or air-drying treatment described later.

<Inactivation treatment>
The surface of the intermediate layer may be appropriately inactivated using various materials.
The inactivating treatment is not particularly limited as long as it is a treatment for inactivating the surface of the intermediate layer, and can be appropriately selected depending on the intended purpose. For example, an inactivating agent is applied to the surface of the intermediate layer. The processing to be given can be mentioned. Inactivation means changing the surface of the intermediate layer to a property that does not easily cause a chemical reaction. This change causes the surface of the intermediate layer to react with an active group (for example, -OH) generated by excitation or oxidation by plasma treatment, corona discharge treatment, ultraviolet irradiation treatment, electron beam irradiation treatment, etc. with an inactivating agent. It is obtained by lowering the activity of.
Examples of the inactivating agent include an amorphous resin and a coupling agent. Examples of the amorphous resin include a resin having a perfluoropolyether structure in the main chain.

Examples of the coupling agent include metal alkoxides and solutions containing metal alkoxides.
Examples of the metal alkoxide include compounds represented by the following general formula (1), partially hydrolyzed polycondensates thereof having a degree of polymerization of about 2 to 10 or mixtures thereof.
R ¹ _(4-n) Si (OR ² ) _n ... General formula (1)
However, in the general formula (1), R ¹ and R ² independently represent any one of a linear or branched alkyl group having 1 to 10 carbon atoms, an alkyl polyether chain, and an aryl group. .. n represents an integer of 2-4.

The inactivation treatment can be carried out, for example, by subjecting the intermediate layer precursor such as rubber to the surface modification treatment and then impregnating the surface of the intermediate layer precursor with an inactivating agent by coating or dipping. it can.
When silicone rubber is used as the intermediate layer precursor, it may be inactivated by performing the surface modification treatment and then allowing it to stand in the air and air-drying.
The profile of the oxygen concentration in the thickness direction of the intermediate layer preferably has a maximum value. The profile of the carbon concentration in the thickness direction of the intermediate layer preferably has a minimum value.
In the intermediate layer, it is more preferable that the position where the oxygen concentration profile shows the maximum value and the position where the carbon concentration profile shows the minimum value coincide with each other.
The oxygen concentration profile and the carbon concentration profile can be determined by X-ray photoelectron spectroscopy (XPS).
Examples of the measuring method include the following methods.

{Measuring method}
Measuring device: Ulvac-PHI QuanteraSXM, manufactured by ULVAC-PHI, Ltd. Measuring light source: Al (mono)
Measurement output: 100 μmφ, 25.1 W
Measurement area: 500 μm × 300 μm
Path energy: 55eV (narrow scan)
Energy step: 0.1 eV (narrow scan)
Relative sensitivity coefficient: Uses the relative sensitivity coefficient of PHI Sputter source: C60 cluster ion Ion Gun Output: 10 kV, 10 nA
Raster Control: (X = 0.5, Y = 2.0) mm
Sputter rate: 0.9 nm / min (SiO ₂ conversion)
In XPS, it is possible to know the abundance concentration ratio and the bonding state of atoms in the object to be measured by capturing the electrons that are ejected by the photoelectron effect.

Silicone rubber has a siloxane bond and its main components are Si, O, and C. Therefore, when silicone rubber is used as the material in the intermediate layer, the wide scan spectrum of XPS is measured, and the abundance concentration ratio in the depth direction of each atom existing inside from the surface layer is measured from the relative peak intensity ratio of each element. Can be sought. An example thereof is shown in FIG. Here, each atom is Si, O, and C, and the abundance concentration ratio is (atomic%).
FIG. 13 is a sample of the intermediate layer obtained by further performing the surface modification treatment (plasma treatment) and the inert treatment using silicone rubber. In FIG. 13, the horizontal axis is the analysis depth from the surface to the inside, and the vertical axis is the abundance concentration ratio.

Further, in the case of silicone rubber, the element bonded to silicon and the bonded state can be known by measuring the energy at which the electrons in the 2p orbital of Si are ejected. Therefore, peak separation was performed from the narrow scan spectrum in the Si2p orbital showing the bond state of Si, and the chemical bond state was determined.
The result is shown in FIG. The measurement target of FIG. 14 is the sample used for the measurement of FIG. In FIG. 14, the horizontal axis is the binding energy and the vertical axis is the intensity ratio. Moreover, the measurement spectrum in the depth direction is shown from the bottom to the top.
In general, it is known that the amount of peak shift depends on the bonding state, and in the case of the silicone rubber in this case, the fact that the peak shifts to the high energy side in the Si2p orbit means the number of oxygen bonded to Si. Indicates that is increasing.

According to this, when the surface modification treatment and the inactivation treatment are performed on the silicone rubber, oxygen increases from the surface layer to the inside and has a maximum value, and carbon decreases and has a concentration profile having a minimum value. doing. Further analysis in the depth direction reduces oxygen and increases carbon, resulting in an atomic abundance concentration almost equivalent to that of untreated silicone rubber.
Furthermore, the maximum value of oxygen detected at the position α in FIG. 13 coincides with the shift of the Si2p binding energy shift to the high energy side (position α in FIG. 14), and the increase in oxygen is bound to Si. It has been shown to be due to the number of oxygen.

The results of the same analysis of the untreated silicone rubber are shown in FIGS. 15 and 16.
In FIG. 15, the maximum value of oxygen concentration and the minimum value of carbon concentration as seen in FIG. 13 are not seen. Further, from FIG. 16, it was confirmed that the number of oxygen bound to Si did not change because the Si2p binding energy shift did not appear to shift to the high energy side.

As described above, the inactivating agent such as a coupling agent is applied or dipping on the surface of the intermediate layer and permeated, so that the inactivating agent permeates the intermediate layer. When the coupling agent is a compound represented by the general formula (1), polyorganosiloxane is present in the intermediate layer with a concentration distribution, and this distribution is deep in the oxygen atoms contained in the polyorganosiloxane. The distribution has a maximum value in the longitudinal direction.
As a result, the intermediate layer will contain a polyorganosiloxane having silicon atoms bonded to 3-4 oxygen atoms.

The method of the inactivation treatment is not limited to the dipping method. For example, it suffices to realize a distribution in which oxygen atoms contained in polyorganosiloxane have a maximum value in the depth direction (thickness direction) of the intermediate layer, and plasma CVD, PVD, sputtering, vacuum deposition, combustion chemical vapor deposition. It may be a method such as.
The intermediate layer does not need to have an initial surface potential in the stationary state. The initial surface potential in the stationary state can be measured under the following measurement conditions. Here, having no initial surface potential means ± 10 V or less when measured under the following measurement conditions.

{Measurement condition}
Pretreatment: After standing in an atmosphere with a temperature of 30 ° C and a relative humidity of 40% for 24 hours, static elimination is performed for 60 seconds (using Keyence's SJ-F300).
Equipment: Trekk Model 344
Measuring probe: 6000B-7C
Measurement distance: 2 mm
Measurement spot diameter: diameter 10 mm

In the element of the present embodiment, the charge by a mechanism similar to triboelectric charge and the generation of the surface potential difference due to the internal charge reservation are caused by the difference in the amount of deformation based on the difference in hardness on both sides of the intermediate layer. It is presumed that the electric charge moves to generate electricity by creating a bias.
The device preferably has a space between the intermediate layer and at least one of the first electrode and the second electrode. By doing so, the amount of power generation can be increased.
The method for providing the space is not particularly limited and may be appropriately selected depending on the intended purpose. For example, a spacer is arranged between the intermediate layer and at least one of the first electrode and the second electrode. The method etc. can be mentioned.

The material, form, shape, size, and the like of the spacer are not particularly limited, and can be appropriately selected depending on the intended purpose. Examples of the material of the spacer include a polymer material, rubber, metal, a conductive polymer material, and a conductive rubber composition.
Examples of the polymer material include polyethylene, polypropylene, polyethylene terephthalate, polyvinyl chloride, polyimide resin, fluororesin, and acrylic resin. Examples of the rubber include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluororubber, isoprene rubber, butadiene rubber, and styrene / butadiene rubber. Examples thereof include acrylonitrile-butadiene rubber, ethylene / propylene / diene rubber, chlorosulfonated polyethylene rubber, polyisobutylene, and modified silicone.

Examples of the metal include gold, silver, copper, aluminum, stainless steel, tantalum, nickel, phosphor bronze and the like. Examples of the conductive polymer material include polythiophene, polyacetylene, polyaniline and the like. Examples of the conductive rubber composition include a composition containing a conductive filler and rubber. Examples of the conductive filler include carbon materials (for example, Ketjen black, acetylene black, graphite, carbon fiber, carbon fiber, carbon nanofibers, carbon nanotubes, graphene, etc.), metals (for example, gold, silver, platinum, etc.). Conductive polymer materials such as copper, iron, aluminum, and nickel (for example, polythiophene, polyacetylene, polyaniline, polypyrrole, polyparaphenylene, and derivatives of polyparaphenylene vinylene, or these derivatives are represented by anions or cations. Examples include those to which a dopant is added), an ionic liquid, and the like.

Examples of the rubber include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluororubber, isoprene rubber, butadiene rubber, and styrene / butadiene rubber. Examples thereof include acrylonitrile-butadiene rubber, ethylene / propylene / diene rubber, chlorosulfonated polyethylene rubber, polyisobutylene, and modified silicone.
Examples of the form of the spacer include a sheet, a film, a woven fabric, a non-woven fabric, a mesh, a sponge, and the like.
The shape, size, thickness, and installation location of the spacer can be appropriately selected according to the structure of the element.

As shown in FIG. 17, when the first electrode is indicated by a, the intermediate layer is indicated by b, and the second electrode is indicated by c, the surface modification treatment or inactivation treatment is performed on the first electrode a side of the intermediate layer b. When this is performed, the first electrode a side of the intermediate layer b becomes harder than the second electrode c side. Therefore, the universal hardness is H1> H2.
As a result, when the pressing force F, which is the same deformation applying force, acts on the first electrode a side and the second electrode c side, the degree of deformation of the intermediate layer b on the first electrode a side is the second degree. It is smaller than the electrode c side.

In each of the above-described embodiments, the sensors 10 to 10D are configured by laminating a plurality of power generation elements 4 or power generation elements 4A having the same configuration and the same output via the insulating layers 5, 5A, the foam 12, and the sponge 12A. However, as the (element) used for the sensors 10 to 10D, elements having different outputs may be laminated via the insulating layers 5, 5A, the foam 12, and the sponge 12A to form the sensor.
The heat, material, etc. of the intermediate layer 3 made of rubber or rubber composition interposed between the first electrode 1 and the second electrode 2 of each power generation element are controlled by the upper power generation elements 6, 6A side and the lower layer power generation element 7. , 7A side may be different.

By differentiating the characteristics of the elements constituting the upper layer power generation elements 6 and 6A and the lower layer power generation elements 7 and 7A of the sensors 10 to 10D in this way, the output form can be further increased in number and gradation even though it is one sensor. It is preferable because it can be achieved. In particular, by configuring the lower layer power generation elements 7 and 7A so that the output that becomes the detection sensitivity is large, the output when a strong pressure (load) F is applied to the sensor can be increased. Thus, for example, when using this sensor as a collision sensor, for slave have strong output impact force is strong with respect to the sensor is obtained, so as to determine the degree of risk in response to the output signal May be good.

Although the preferred embodiments and examples of the present invention have been described above, the present invention is not limited to such specific embodiments and examples, and the scope of claims is not particularly limited in the above description. Within the scope of the gist of the present invention described in the above, various modifications and changes are possible.
The effects described in the embodiments of the present invention merely list the most preferable effects arising from the present invention, and the effects according to the present invention are limited to those described in the embodiments of the present invention. is not it.

1, 2 Pair of electrodes 3 Intermediate layer 4, 4A Element 5, 5A, 12, 12A Insulation layer 9 Gap 10, 10A, 10B, 10C, 10D Sensor 11 Support 30 Signal processing unit 31 Judgment unit 100 Sensor system

Japanese Unexamined Patent Publication No. 2008-19902

Claims (8)

Arranged between the pair of electrodes and the pair of electrodes, formed from rubber or a rubber composition, the amount of deformation of the surface on one electrode side and the deformation of the surface on the other electrode side with respect to the same deformation applying force. A sensor that has an intermediate layer with a different amount and is configured by stacking a plurality of elements that generate power by deforming through an insulating layer. The sensor according to claim 1, wherein the insulating layer is a gap formed by a support arranged between the elements. The sensor of claim 1 wherein the insulating layer is an elastic body. The sensor according to any one of claims 1 to 3, wherein the intermediate layer is silicone rubber. The silicone rubber has a siloxane bond, oxygen increases from one side and the other side of the intermediate layer with a small degree of deformation toward the inside to have a maximum value, and the degree of deformation is small. The sensor according to claim 4, which has a concentration profile in which carbon is reduced from the side to the inside and has a minimum value. The sensor according to any one of claims 1 to 5.
A sensor system having a processing unit that processes an output signal output from the sensor when an external force is applied to the sensor. The sensor system according to claim 6, further comprising a determination unit that acquires information on minute movements including pulsation of the human body from an output signal output from the sensor and determines the existence of a person based on the acquired information on fine movements. .. The sensor system according to claim 6, further comprising a determination unit that separately determines whether the presence of a person and the movement of a person due to a change in pressure are based on an output signal output from the sensor.

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