JP6887545B2 - Semiconductor system and data editing support method - Google Patents

Description

The present invention relates to a semiconductor system and a data editing support method.

A control system including a plurality of control devices that control a plurality of processing devices that perform a predetermined process on a substrate to be processed and a host computer that controls each control device is known (see, for example, Patent Document 1).

In such a control system, an administrator or the like compares data such as recipes and parameters among a plurality of processing devices in work such as start-up, trouble, and maintenance of a processing device, and data is displayed based on the comparison result. It may be edited. In addition, data may be copied from one processing device to another.

Japanese Unexamined Patent Publication No. 2003-217995

However, conventionally, when editing data based on the comparison result, the administrator or the like confirms the comparison result, temporarily stores the item of the data to be edited, manually starts an appropriate editor, and edits the editor. I am searching for and editing the data item to be edited above. Therefore, the operation is complicated, and there is a risk of inducing mistakes by the administrator or the like.

Therefore, one aspect of the present invention is to provide a semiconductor system capable of reducing the load on the administrator and the like when editing data and reducing operation errors.

In order to achieve the above object, the semiconductor system according to one aspect of the present invention relates to the identification information of the semiconductor manufacturing apparatus to be compared and the semiconductor process performed by the semiconductor manufacturing apparatus in the semiconductor system having the semiconductor manufacturing apparatus. An input receiving unit that accepts a type of process-related information including one or more recipes and parameters, an identification information of the semiconductor manufacturing apparatus to be compared , which is connected to the input receiving unit and received by the input receiving unit, and the process. based on the type of related information to obtain a plurality of process-related information of the comparison, to compare the plurality of process-related information the acquired, a processor that identifies the different data in the plurality of process-related information, the A screen creation unit that is connected to a processor and creates a comparison screen that compares the plurality of process-related information based on the different data specified by the processor, and a screen creation unit that is connected to the screen creation unit and creates the screen creation unit. The screen creation unit has a display unit for displaying the comparison screen, and when the input reception unit receives the identification information of the semiconductor manufacturing apparatus to be compared and the type of the process-related information, the processor Creates the comparison screen based on the plurality of process-related information acquired by the processor and the different data specified by the processor, and the input receiving unit is included in the plurality of process-related information displayed on the comparison screen. When the selection of one or more edit items on the comparison screen, which is the item of, is accepted, an edit screen capable of editing the process-related information including the one or more edit items among the plurality of process-related information is created. Therefore, it is not necessary to manually start the editor before the process-related information is edited, and the edit screen created by the screen creation unit is displayed, and the plurality of process-related information is plural. Contains information about multiple processes between semiconductor manufacturing equipment.

According to the disclosed semiconductor system, it is possible to reduce the load on the administrator and the like when editing data, and reduce operation errors.

Overall configuration diagram showing an example of the semiconductor system according to the embodiment of the present invention. The figure which shows an example of the hardware configuration of a device controller Block diagram showing an example of the functional configuration of the group controller Figure (1) for explaining the screen used when comparing and editing data. Figure (2) for explaining the screen used when comparing and editing data. Figure (3) for explaining the screen used when comparing and editing data. Flow chart for explaining the data editing support method according to the embodiment of the present invention (1) Flow chart for explaining the data editing support method according to the embodiment of the present invention (2)

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. In the present specification and the drawings, substantially the same configurations are designated by the same reference numerals to omit duplicate explanations.

(Semiconductor system)
The semiconductor system according to the embodiment of the present invention will be described. FIG. 1 is an overall configuration diagram showing an example of a semiconductor system according to an embodiment of the present invention.

As shown in FIG. 1, the semiconductor system includes a semiconductor manufacturing apparatus 1 and a group controller 2. In FIG. 1, three semiconductor manufacturing devices 1A, 1B, 1C and one group controller 2 are shown as an example, but the number of the semiconductor manufacturing device 1 and the group controller 2 is not limited to this. Both may be 1 or more.

The semiconductor manufacturing device 1 is a device that performs a predetermined semiconductor process on an object to be processed, and is a device that manufactures a liquid crystal panel, an organic EL (Electroluminescence) display, a plasma display panel, and the like. The object to be processed is a semiconductor wafer, a glass substrate, or the like. The semiconductor process may include at least a process related to the semiconductor, and examples thereof include a film forming process, an etching process, and a thermal oxidation process. The semiconductor manufacturing apparatus 1 may be a batch type apparatus or a single-wafer type apparatus. The semiconductor manufacturing devices 1A, 1B, and 1C are provided with device controllers 10A, 10B, and 10C that control the operation of each part of the device, respectively.

FIG. 2 is a diagram showing an example of the hardware configuration of the device controller 10. As shown in FIG. 2, the apparatus controller 10 includes a CPU (Central Processing Unit) 11, a ROM (Read Only Memory) 12, a RAM (Random Access Memory) 13, and an HDD (Hard Disk) connected to each other via a bus 17. It has a Disk Drive) 14, a connection I / F (Interface) 15, and a communication I / F 16.

The CPU 11 controls the overall operation of the semiconductor manufacturing apparatus 1 by executing a program stored in the ROM 12 or the HDD 14 or the like with the RAM 13 as a work area. Each part of the semiconductor manufacturing apparatus 1 is connected to the connection I / F15. The communication I / F 16 is an interface for communicating with the group controller 2, another device controller 10, and the like by wired or wireless communication.

A program for causing the object to be processed to execute a predetermined semiconductor process is pre-installed in the device controller 10. An administrator, an operator, or the like of the semiconductor manufacturing apparatus 1 (hereinafter referred to as “administrator or the like”) performs an operation of causing the semiconductor manufacturing apparatus 1 in which the program is installed to execute various substrate processes via the apparatus controller 10. It can be carried out.

The group controller 2 is a device constituting a semiconductor system, is connected to one or more semiconductor manufacturing devices 1 so as to be communicable with each other via a wired or wireless communication network, and is transmitted from one or more semiconductor manufacturing devices 1. It is possible to store various types of information to be stored. The communication network may be, for example, a network of a manufacturing execution system (MES) that manages a manufacturing process of the entire factory in which a semiconductor system is installed. Further, the communication network may be, for example, the Internet, an intranet, or a public telephone line network.

FIG. 3 is a block diagram showing an example of the functional configuration of the group controller. As shown in FIG. 3, the group controller 2 has an input reception unit 201, a processing unit 202, a storage unit 203, a screen creation unit 204, and a display unit 205. Further, the group controller 2 may have a transmission / reception unit for transmitting / receiving information to / from the device controller 10 of the semiconductor manufacturing device 1.

The input receiving unit 201 receives various processing request information input from an input device (for example, a keyboard, a mouse, a touch panel). The processing request information includes comparison processing request information for comparing information related to the semiconductor process (hereinafter, referred to as “process-related information”) such as recipes and parameters between the plurality of semiconductor manufacturing apparatus 1. The recipe is information indicating the conditions of the semiconductor process, for example, processing time, temperature, pressure, flow rate of processing gas, and the like. The parameter is information indicating a numerical value required for the operation of the semiconductor manufacturing apparatus 1, for example, a lower limit value or an upper limit value of the set pressure. The comparison processing request information includes the type of identification information and process-related information of the semiconductor manufacturing apparatus 1 to be compared. The identification information of the semiconductor manufacturing apparatus 1 is not particularly limited as long as it is information that can identify the semiconductor manufacturing apparatus 1. The types of process-related information are recipes, parameters, and the like.

The processing unit 202 acquires the process-related information of the semiconductor manufacturing apparatus 1 to be compared stored in the storage unit 203 according to the processing request information received by the input receiving unit 201. Specifically, for example, when the input receiving unit 201 receives the processing request information for comparing the Recipe A of the semiconductor manufacturing apparatus 1A and the Recipe B of the semiconductor manufacturing apparatus 1B, the processing unit 202 receives the processing request information stored in the storage unit 203, and the processing unit 202 receives the semiconductor manufacturing apparatus 1A stored in the storage unit 203. Recipe A and Recipe B stored in the semiconductor manufacturing apparatus 1B are acquired. Further, for example, when the input receiving unit 201 receives the processing request information for comparing the parameter A of the semiconductor manufacturing device 1A and the parameter B of the semiconductor manufacturing device 1B, the processing unit 202 receives the processing request information stored in the storage unit 203 of the semiconductor manufacturing device 1A. The parameter A and the parameter B of the semiconductor manufacturing apparatus 1B are acquired. The processing unit 202 can be realized by, for example, a memory. The processing procedure of the processing unit 202 is realized by software, and the software is recorded on a recording medium such as an HDD (Hard Disk Drive) or a ROM (Read Only Memory). However, it may be realized by hardware (dedicated circuit).

The storage unit 203 stores process-related information such as recipes and parameters used in the semiconductor manufacturing apparatus 1 connected via the communication network. The process-related information stored in the storage unit 203 may be, for example, information transmitted via a communication network or information input via an input device. The storage unit 203 can be realized by a recording medium such as a semiconductor memory, a magnetic disk, or an optical disk.

The screen creation unit 204 creates various screens including a comparison screen and an edit screen. The comparison screen is a screen used when comparing process-related information between a plurality of semiconductor manufacturing apparatus 1. The comparison screen is created when the input receiving unit 201 receives the comparison processing request information. The edit screen is a screen used when editing process-related information, and each item of process-related information is configured to be editable. The edit screen is a comparison screen that displays the comparison result of the process-related information between the plurality of semiconductor manufacturing apparatus 1, and the input receiving unit 201 has accepted the selection of one or a plurality of arbitrary items from the items included in the process-related information. Created in case. The details of the comparison screen and the editing screen will be described later.

The display unit 205 displays various screens including a comparison screen and an edit screen created by the screen creation unit 204. The display unit 205 may or may not include a display device (for example, a liquid crystal display) that displays various images. Further, the display unit 205 may be realized by hardware, or may be realized by software such as a driver that drives the display device.

Next, an example of the comparison screen and the editing screen will be described. FIG. 4 is a diagram for explaining a screen used when comparing and editing data.

The comparison screen Pc is a screen used when comparing process-related information between a plurality of semiconductor manufacturing apparatus 1. The comparison screen Pc is created when the input receiving unit 201 receives the comparison processing request information. The comparison screen Pc has a first region Pc1 and a second region Pc2, for example, as shown in FIG.

The first region Pc1 is an region for displaying process-related information of the semiconductor manufacturing apparatus 1 to be compared. In the example shown in FIG. 4, in the first region Pc1, "RecipeA" which is the process-related information of the semiconductor manufacturing apparatus 1A and "RecipeB" which is the process-related information of the semiconductor manufacturing apparatus 1B are displayed. “Recipe A” and “Recipe B” are information indicating the conditions of the semiconductor process including the steps from “Step 1” to “Step 8”, respectively. Further, in the first region Pc1, different steps are displayed as "*" and "markers" between the "Recipe A" and the "Recipe B" to be compared so as to be distinguished from the other steps. There is. Thereby, the administrator or the like can easily find different steps between the "Recipe A" and the "Recipe B" to be compared by referring to the first region Pc1 of the comparison screen Pc. Specifically, the administrator or the like can easily find out that "Step3", "Step4", "Step5" and "Step8" are different steps between "RecipeA" and "RecipeB". The display indicating that the steps are different is not limited to "*" and "marker". For example, different steps are displayed in the upper row and the same step is displayed in the lower row than the different steps. You may.

The second region Pc2 is an region for displaying detailed conditions of process-related information of the semiconductor manufacturing apparatus 1 to be compared displayed in the first region Pc1. In the example shown in FIG. 4, the second region Pc2 is a step of "Step 4" selected from a plurality of steps of "Recipe A" and "Recipe B" displayed in the first region Pc1. Detailed conditions are listed. In FIG. 4, the selected step "Step 4" is indicated by an arrow. The detailed conditions of "Step 4" are "Step time", "Temperature 1", "Temperature 2", "Temperature 3", "Pressure", "Flow rate 1", "Flow rate 2", "Flow rate 3", "Flow rate". 4 ”and other items are included. Further, in the second region Pc2, different items between "Step 4" of "Recipe A" and "Step 4" of "Recipe B" to be compared are displayed with "*" and "marker" to be different from other items. Created to be distinct. As a result, the administrator or the like can easily find different items between "Step 4" of "Recipe A" and "Step 4" of "Recipe B" by referring to the second area Pc2 of the comparison screen Pc. it can. Specifically, the manager and the like differ between "Temperature 1", "Temperature 2", "Temperature 3" and "Flow rate 2" between "Step 4" of "Recipe A" and "Step 4" of "Recipe B". You can easily find out that it is an item.

Further, the comparison screen Pc may be provided with a button (hereinafter referred to as "recomparison button B1") for recomparing the process-related information between the plurality of semiconductor manufacturing apparatus 1 after editing the process-related information. preferable. As a result, the administrator or the like can confirm whether or not the process-related information is properly edited by selecting the re-comparison button B1 after editing the process-related information.

The edit screen Pe is a screen used when editing process-related information, and each item of process-related information is configured to be editable. The edit screen Pe is a comparison screen Pc for displaying the comparison result of the process-related information between the plurality of semiconductor manufacturing devices 1, and the input receiving unit 201 selects one or a plurality of arbitrary items from the items included in the process-related information. Created when accepted. Further, it is preferable that the items selected on the comparison screen Pc are displayed in the specified state, such that the items selected by the administrator or the like on the comparison screen Pc are displayed in the selected state on the editing screen Pe. .. The editing screen Pe has, for example, as shown in FIG. 4, a first editing screen Pe1 and a second editing screen Pe2.

The first editing screen Pe1 is a screen for displaying a list of detailed conditions in all steps of "Recipe A", and is configured to be editable. As a result, the administrator or the like can directly edit the item to be edited from the detailed conditions of "Recipe A" on the first editing screen Pe1. The method of editing the data is not particularly limited, but may be, for example, a selection / input operation using a keyboard, a mouse, or a touch panel.

The second editing screen Pe2 is a screen for displaying a list of detailed conditions in all steps of "RecipeB", and is configured to be editable. As a result, the administrator or the like can directly edit the item to be edited from the detailed conditions of "RecipeB" on the second editing screen Pe2. The method of editing the data is not particularly limited, but may be, for example, a selection / input operation using a keyboard, a mouse, or a touch panel.

In the example shown in FIG. 4, when "Step time" in "Step 4" of "Recipe A" and "Temperature 1" in "Step 4" of "Recipe B" are selected in the second region Pc2 of the comparison screen Pc (FIG. 4). (Indicated by a thick frame in the middle). In this case, on the first editing screen Pe1, the "Step time" of the "Step 4" selected in the second area Pc2 of the comparison screen Pc is displayed in a selected state (shown in shading in FIG. 4). Will be done. Further, on the second editing screen Pe2, the "temperature 1" of the "Step 4" selected in the second region Pc2 of the comparison screen Pc is displayed in a selected state (shown in shading in FIG. 4). To.

As described above, in the semiconductor system according to the embodiment of the present invention, the input receiving unit 201 is included in the process-related information on the comparison screen Pc for displaying the comparison result of the process-related information between the plurality of semiconductor manufacturing devices 1. When it is accepted that one or more arbitrary items are selected, the edit screen Pe is automatically displayed. As a result, when the process-related information is compared between the plurality of semiconductor manufacturing devices 1 and the process-related information of the specific semiconductor manufacturing device 1 is edited based on the comparison result, the administrator or the like confirms the comparison result and then edits the process-related information. There is no need to temporarily store items of process-related information to be edited. In addition, there is no need to manually start appropriate editing software (editor), and there is no need to search for data items to be edited on the editor. As a result, the load on the administrator and the like when editing the data can be reduced, and operation errors can be reduced.

Next, another example of the comparison screen and the edit screen will be described. FIG. 5 is a diagram for explaining a screen used when comparing and editing data.

The example shown in FIG. 5 differs from the example shown in FIG. 4 in that the process-related information of the semiconductor manufacturing apparatus 1 is a parameter. Since the other configurations are the same as those shown in FIG. 4, a part of the description will be omitted.

In the example shown in FIG. 5, "parameter A" which is the process-related information of the semiconductor manufacturing apparatus 1A and "parameter B" which is the process-related information of the semiconductor manufacturing apparatus 1B are displayed in the first region Pc1. .. "Parameter A" and "parameter B" are necessary for the operation of each part of the semiconductor manufacturing apparatus 1 such as "Loader", "Transport part", "Temperature control", "Pressure control", and "Flow rate control", respectively. Information. Further, in the first region Pc1, it is created so that different items between "parameter A" and "parameter B" to be compared are displayed with "*" and "marker" so as to be distinguished from other items. Has been done. As a result, the administrator or the like can easily find different items between the "parameter A" and the "parameter B" to be compared by referring to the first region Pc1 of the comparison screen Pc. Specifically, the manager or the like can easily find out that "temperature control", "pressure control" and "flow rate control" are different items between "parameter A" and "parameter B". ..

The second region Pc2 is an region for displaying detailed conditions of process-related information of the semiconductor manufacturing apparatus 1 to be compared displayed in the first region Pc1. In the example shown in FIG. 5, in the second region Pc2, "pressure" which is one item selected from a plurality of items in "parameter A" and "parameter B" displayed in the first region Pc1. The detailed conditions of "control" are listed. In FIG. 5, the selected item is indicated by an arrow. The detailed conditions of "pressure control" are "pressure setting 1", "pressure setting 2", "pressure setting 3", "pressure setting 4", "pressure setting 5", "pressure setting 6", "pressure setting 7". , "Pressure setting 8", "Pressure setting 9" and the like. The values of these pressure settings are, for example, a lower limit value, an upper limit value, and the like. Further, in the second region Pc2, different items between the "pressure control" of the "parameter A" and the "pressure control" of the "parameter B" to be compared are displayed by "*" and "marker". It is created to distinguish it from other items. As a result, the administrator or the like can easily select different items between the "pressure control" of the "parameter A" and the "pressure control" of the "parameter B" by referring to the second region Pc2 of the comparison screen Pc. Can be found in. Specifically, the administrator, etc., says that "pressure setting 2", "pressure setting 3", "pressure setting 4" and "pressure setting 7" are different between "parameter A" and "parameter B". You can easily find out what is.

The edit screen Pe is a screen used when editing process-related information, and each item of process-related information is configured to be editable. The edit screen Pe is a comparison screen that displays the comparison result of the process-related information between the plurality of semiconductor manufacturing apparatus 1, and the input receiving unit 201 accepts the selection of one or a plurality of arbitrary items from the items included in the process-related information. Will be created if Further, it is preferable that the items selected on the comparison screen Pc are displayed in the specified state, such that the items selected by the administrator or the like on the comparison screen Pc are displayed in the selected state on the editing screen Pe. .. The editing screen Pe has, for example, as shown in FIG. 5, a first editing screen Pe1 and a second editing screen Pe2.

The first editing screen Pe1 is a screen for displaying a list of detailed conditions for all the items of "parameter A", and is configured to be editable. As a result, the administrator or the like can directly edit the item to be edited from the detailed conditions of "parameter A" on the first editing screen Pe1. The method of editing the data is not particularly limited, but may be, for example, a selection / input operation using a keyboard, a mouse, or a touch panel.

The second editing screen Pe2 is a screen for displaying a list of detailed conditions for all the items of "parameter B", and is configured to be editable. As a result, the administrator or the like can directly edit the item to be edited from the detailed conditions of "parameter B" on the second editing screen Pe2. The method of editing the data is not particularly limited, but may be, for example, a selection / input operation using a keyboard, a mouse, or a touch panel.

In the example shown in FIG. 5, in the second region Pc2 of the comparison screen Pc, "pressure setting 4" in "pressure control" of "parameter A" and "pressure setting 3" in "pressure control" of "parameter B" are selected. (Indicated by a thick frame in FIG. 5) is shown. In this case, in the first editing screen Pe1, the state in which the "pressure setting 4" of the "pressure control" selected in the second region Pc2 of the comparison screen Pc is selected (shown in shading in FIG. 5). Is displayed. Further, on the second editing screen Pe2, the "pressure setting 3" of the "pressure control" selected in the second region Pc2 of the comparison screen Pc is selected (indicated by shading in FIG. 5). Is displayed.

Next, yet another example of the comparison screen and the edit screen will be described. FIG. 6 is a diagram for explaining a screen used when comparing and editing data.

The example shown in FIG. 6 is different from the example shown in FIG. 4 in that the comparison screen Pc is configured to be editable, that is, the comparison screen Pc and the editing screen Pe are configured by the same screen.

The comparison screen Pc is a screen used when comparing process-related information between a plurality of semiconductor manufacturing apparatus 1, and a screen used when editing process-related information, and is configured to be editable. The comparison screen Pc is created when the input receiving unit 201 receives the comparison processing request information.

The comparison screen Pc has a first region Pc1 and a second region Pc2, for example, as shown in FIG. The first region Pc1 is a region for displaying process-related information of the semiconductor manufacturing apparatus 1 to be compared, as in the example shown in FIG. The second region Pc2 is an region for displaying detailed conditions of process-related information of the semiconductor manufacturing apparatus 1 to be compared displayed in the first region Pc1.

The first region Pc1 can be similar to the example shown in FIG.

The second area Pc2 is configured to be editable by a selection / input operation using, for example, a keyboard, a mouse, or a touch panel, and also functions as an edit screen Pe. As a result, the administrator or the like can directly edit the process-related information on the second area Pc2. That is, the administrator or the like can compare and edit process-related information on one screen.

Further, on the comparison screen Pc, a button for overwriting the process-related information of one of the process-related information among the plurality of semiconductor manufacturing devices 1 with the process-related information of the other semiconductor manufacturing device 1 (hereinafter, "" It is preferable that the overwrite button B2 ”is provided. As a result, the administrator or the like can collectively copy the process-related information of one semiconductor manufacturing apparatus 1 to the process-related information of the other semiconductor manufacturing apparatus 1 by selecting the overwrite button B2. Therefore, when the process-related information of one semiconductor manufacturing apparatus 1 is collectively copied to the process-related information of a plurality of other semiconductor manufacturing apparatus 1, the administrator or the like inputs the process-related information in a short time. Can be done. In particular, when starting up a large number of semiconductor manufacturing devices 1, it is necessary to input a large amount of process-related information such as recipes and parameters, but since the overwrite button B2 is provided, it takes a very short time. It can be done without typos.

(Operation of semiconductor system)
Next, an example of the operation of the semiconductor system according to the embodiment of the present invention will be described. FIG. 7 is a flowchart for explaining a data editing support method according to an embodiment of the present invention.

First, when the input receiving unit 201 receives the comparison processing request information (step S11), the processing unit 202 acquires the data to be compared stored in the storage unit 203 (step S12). Specifically, when the input receiving unit 201 receives the type of the identification information and the process-related information of the semiconductor manufacturing apparatus 1 to be compared, the processing unit 202 is based on the type of the identification information and the process-related information of the semiconductor manufacturing apparatus 1. Then, the process-related information of the semiconductor manufacturing apparatus 1 to be compared is acquired from the storage unit 203.

Subsequently, the processing unit 202 compares the data of the process-related information of the semiconductor manufacturing apparatus 1 to be compared acquired in step S12 (step S13), and identifies different data among the process-related information (step S14).

Subsequently, the screen creation unit 204 creates a comparison screen Pc based on the data to be compared acquired by the processing unit 202 in step S12 and the data specified by the processing unit 202 in step S14 (step S15). Then, the display unit 205 displays the comparison screen Pc created by the screen creation unit 204 in step S15 (step S16).

Subsequently, when the input receiving unit 201 accepts the selection of the item to be edited (hereinafter, also referred to as “editing item”) on the comparison screen Pc (step S17), the screen creating unit 204 can edit the selected editing item. Edit screen Pe is created (step S18). Then, the display unit 205 displays the edit screen created by the screen creation unit 204 (step S19).

Subsequently, when the input receiving unit 201 accepts the recomparison operation (step S20), the processing unit 202 recomparates the edited data to be compared (step S21).

Subsequently, when the input receiving unit 201 accepts the operation of ending editing (step S22), the processing unit 202 ends the processing. Before the processing is finished, the content edited on the edit screen Pe may be stored in the storage unit 203, and it is selected whether or not to store the content edited on the edit screen Pe in the storage unit 203. A possible selection screen may be displayed.

As described above, in the data editing support method according to the embodiment of the present invention, the input receiving unit 201 is included in the process-related information on the comparison screen Pc for displaying the comparison result of the process-related information between the plurality of semiconductor manufacturing devices 1. When the selection of one or more of the items is accepted, the edit screen Pe is automatically displayed. As a result, when the process-related information is compared between the plurality of semiconductor manufacturing devices 1 and the process-related information of the specific semiconductor manufacturing device 1 is edited based on the comparison result, the administrator or the like confirms the comparison result and then edits the process-related information. There is no need to temporarily store items of process-related information to be edited. In addition, there is no need to manually start appropriate editing software (editor), and there is no need to search for data items to be edited on the editor. As a result, the load on the administrator and the like when editing the data can be reduced, and operation errors can be reduced.

Next, another example of the operation of the semiconductor system according to the embodiment of the present invention will be described. FIG. 8 is a flowchart for explaining a data editing support method according to an embodiment of the present invention.

In the example shown in FIG. 8, when the input reception unit 201 accepts the selection of the edit item on the second area Pc2 of the comparison screen Pc (step S17), the screen creation unit 204 edits the data of the selected edit item. It differs from the example shown in FIG. 7 in that it shifts to a possible state (step S18A). The other configurations are the same as those shown in FIG. 7.

As described above, in the example shown in FIG. 8, when the input reception unit 201 accepts the selection of the edit item on the second area Pc2 of the comparison screen Pc, the screen creation unit 204 edits the data of the selected edit item. Move to a possible state. As a result, the administrator or the like can directly edit the process-related information on the second area Pc2. That is, the administrator or the like can compare and edit process-related information on one screen.

Although the embodiment for carrying out the present invention has been described above, the above contents do not limit the contents of the invention, and various modifications and improvements can be made within the scope of the present invention.

In the above embodiment, the case where the comparison screen Pc and the edit screen Pe are displayed on the group controller 2 has been described as an example, but the present invention is not limited to this, and the comparison screen Pc and the edit screen Pe are, for example, the semiconductor manufacturing apparatus 1. It may be displayed on the device controller 10. In this case, the device controller 10 may be configured to have the function of the group controller 2 described above.

Further, in the above embodiment, the processing unit 202 acquires the process-related information of the semiconductor manufacturing apparatus 1 to be compared stored in the storage unit 203 according to the processing request information received by the input receiving unit 201. The explanation has been given as an example, but the present invention is not limited to this. For example, the processing unit 202 acquires the process-related information stored in the device controller 10 of the semiconductor manufacturing device 1 to be compared, which is connected via the communication network, in response to the processing request information received by the input receiving unit 201. You may.

Further, in the above embodiment, the case where the process-related information between different semiconductor manufacturing devices 1 is compared and edited has been described as an example, but the present invention is not limited to this, and for example, different times of the same semiconductor manufacturing device 1 are used. You can also compare and edit process-related information in.

Further, in the above embodiment, the case where the process-related information is a recipe or a parameter used in the semiconductor manufacturing apparatus 1 has been described as an example, but the present invention is not limited to this, and the process-related information is in the semiconductor manufacturing apparatus 1. It may be other information related to the semiconductor process.

1 Semiconductor manufacturing equipment 10 Device controller 2 group controller 201 Input reception unit 202 Processing unit 203 Storage unit 204 Screen creation unit 205 Display unit

Claims (5)

In a semiconductor system having a semiconductor manufacturing apparatus,
An input receiving unit that accepts identification information of the semiconductor manufacturing apparatus to be compared and a type of process-related information including one or more recipes and parameters related to the semiconductor process performed by the semiconductor manufacturing apparatus.
A plurality of process-related information to be compared is acquired based on the identification information of the semiconductor manufacturing apparatus to be compared and the type of the process-related information connected to the input receiving unit and received by the input receiving unit. A processor that compares the acquired plurality of process-related information and identifies different data in the plurality of process-related information.
A screen creation unit connected to the processor and creating a comparison screen for comparing the plurality of process-related information based on the different data specified by the processor.
A display unit connected to the screen creation unit and displaying the comparison screen created by the screen creation unit,
Have,
When the input receiving unit receives the identification information of the semiconductor manufacturing apparatus to be compared and the type of the process-related information, the screen creating unit identifies the plurality of process-related information acquired by the processor and the processor. One or more edit items on the comparison screen in which the comparison screen is created based on the different data, and the input receiving unit is an arbitrary item included in the plurality of process-related information displayed on the comparison screen. When the selection of is accepted, an edit screen in which the process-related information including the one or more edit items among the plurality of process-related information can be edited is created, and the editor is displayed before the process-related information is edited. The edit screen created by the screen creation unit is displayed without the need to start it manually.
The plurality of process-related information includes information on a plurality of processes between a plurality of semiconductor manufacturing devices.
Semiconductor system. Further having a storage unit connected to the processor and storing the process-related information,
The processor acquires the process-related information from the storage unit.
The semiconductor system according to claim 1. The plurality of process-related information includes different process-related information of the same semiconductor manufacturing apparatus.
The semiconductor system according to claim 1. The comparison screen includes a recomparison button for recomparing the plurality of process-related information after the process-related information is edited among the plurality of process-related information.
The semiconductor system according to claim 1. In the data editing support method
A step of accepting identification information of a semiconductor manufacturing apparatus to be compared and a type of process-related information including one or more recipes and parameters related to the semiconductor process performed by the semiconductor manufacturing apparatus.
A step of acquiring a plurality of process-related information to be compared based on the identification information of the semiconductor manufacturing apparatus to be compared and the type of the process-related information.
The step of comparing the acquired multiple process-related information and
The step of identifying different data in the plurality of process-related information, and
A step of creating a comparison screen for comparing the plurality of process-related information based on the different data specified in the specifying step, and a step of creating a comparison screen.
A step of displaying the comparison screen created in the step of creating, and a step of displaying the comparison screen.
A step of accepting selection of one or more edit items on the comparison screen, which is an arbitrary item included in the plurality of process-related information displayed on the comparison screen, and
It is necessary to create an edit screen capable of editing the process-related information including the one or more edit items among the plurality of process-related information, and manually start the editor before the process-related information is edited. And the step to display the edit screen created in the step to create
Including
The plurality of process-related information includes information on a plurality of processes between a plurality of semiconductor manufacturing devices.
Data editing support method.

Images