JP6878055B2 - Optical circuit and optical module - Google Patents

Optical circuit and optical module Download PDF

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JP6878055B2
JP6878055B2 JP2017048936A JP2017048936A JP6878055B2 JP 6878055 B2 JP6878055 B2 JP 6878055B2 JP 2017048936 A JP2017048936 A JP 2017048936A JP 2017048936 A JP2017048936 A JP 2017048936A JP 6878055 B2 JP6878055 B2 JP 6878055B2
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optical
optical circuit
circuit
face
leaked light
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JP2018151572A (en
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一也 菅原
一也 菅原
奥野 将之
将之 奥野
啓光 陣内
啓光 陣内
俊 中山
俊 中山
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NTT Electronics Corp
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Description

本開示は、光回路及び光モジュールに関する。 The present disclosure relates to optical circuits and optical modules.

光回路(PLC(Planar Lightwave Circuit))が提案されている(例えば、特許文献1参照。)。特許文献1の光回路は、光が導波路区間において捕らえられないように、更には1つの分岐区間から他方の分岐区間に光が再結合するのを回避するように、導波路区間の角度を設定する。 An optical circuit (PLC (Planar Lightwave Circuit)) has been proposed (see, for example, Patent Document 1). The optical circuit of Patent Document 1 adjusts the angle of the waveguide section so that the light is not captured in the waveguide section and further, the light is prevented from being recombined from one branch section to the other branch section. Set.

PLC(Planar Lightwave Circuit)やSiP(System in a Package)などの光回路に入射した光は、波長板や導波路端、レンズ、PD(Photo Diode)、LD(Laser Diode)などの端部で反射、放射、散乱してクラッド内や基板内を漏洩光として伝搬する。これら漏洩光は、光回路内のあらゆる方向に伝搬し、光回路に接続されている光部品に入斜し、光部品の特性を劣化させる。光回路を用いた光通信モジュールを例にした場合、光回路で散乱された漏洩光はあらゆる方向からモニタPDに向かい、モニタPDの受光感度の劣化を引き起こす。 Light incident on optical circuits such as PLC (Planar Lightwave Circuit) and SiP (System in a Package) is reflected at the ends of wavelength plates, waveguide edges, lenses, PDs (Photodiodes), LDs (Laser Diodes), etc. , Radiates and scatters and propagates as leaked light in the cladding and substrate. These leaked lights propagate in all directions in the optical circuit, enter the optical component connected to the optical circuit, and deteriorate the characteristics of the optical component. Taking an optical communication module using an optical circuit as an example, the leaked light scattered by the optical circuit goes toward the monitor PD from all directions, causing deterioration of the light receiving sensitivity of the monitor PD.

特開2014−211553号公報Japanese Unexamined Patent Publication No. 2014-211553

本開示は、光回路内の漏洩光を減少させ、光部品の特性劣化を防止することを目的とする。 An object of the present disclosure is to reduce leakage light in an optical circuit and prevent deterioration of characteristics of optical components.

光回路の入出射方向の端面は外部回路と光結合させる面であるため端面処理が行われているが、導波路の入出射端がなく外部との光結合が無い面は特に端面の処理は行われていなかった。そこで、本開示は、外部との光結合が無い端面を斜め加工し、散乱された漏洩光を光回路外に導く。 Since the end face in the entrance / exit direction of the optical circuit is a surface that is optically coupled to the external circuit, end face treatment is performed, but the end face treatment is particularly performed on the surface that has no entrance / exit end of the waveguide and no optical coupling with the outside. It wasn't done. Therefore, in the present disclosure, the end face having no optical coupling with the outside is obliquely processed to guide the scattered leaked light to the outside of the optical circuit.

具体的には、本開示の光回路は、
コアがクラッドで覆われた導波路と、
前記導波路の配置されている面に略垂直に配置されている端面のうちの導波路端の配置されていない部分の少なくとも一部に傾斜が施され、前記コアから前記クラッドへ漏洩した漏洩光を光回路の外部に向けて反射させる反射部と、
を備える。
Specifically, the optical circuit of the present disclosure is
A waveguide whose core is covered with a clad,
Leaked light leaked from the core to the clad by inclining at least a part of the end face where the waveguide end is not arranged among the end faces arranged substantially perpendicular to the surface on which the waveguide is arranged. With a reflector that reflects the light toward the outside of the optical circuit,
To be equipped.

前記反射部の前記傾斜が、前記端面のうちの前記導波路端の配置されていない端面の全体に施されていてもよい。 The inclination of the reflecting portion may be applied to the entire end face of the end face where the waveguide end is not arranged.

前記反射部において傾斜している端面と前記導波路の配置されている面に平行な面とのなす角度は略45°であってもよい。 The angle formed by the inclined end surface of the reflecting portion and the surface parallel to the surface on which the waveguide is arranged may be approximately 45 °.

前記光回路の外周面のうちの前記光回路から出射される漏洩光の光路上に配置され、前記光回路から出射された漏洩光を吸収する無反射部をさらに備えていてもよい。 A non-reflective portion which is arranged on the optical path of the leaked light emitted from the optical circuit in the outer peripheral surface of the optical circuit and absorbs the leaked light emitted from the optical circuit may be further provided.

本開示の光モジュールは、本開示の光回路と、前記光回路を覆う筐体と、前記筐体の内壁面のうちの前記光回路から出射される漏洩光の光路上に配置され、前記光回路から出射された漏洩光を吸収する無反射部と、を備える。 The optical module of the present disclosure is arranged on an optical path of the optical circuit of the present disclosure, a housing covering the optical circuit, and light leaked from the optical circuit in the inner wall surface of the housing, and the light is described. It includes a non-reflective part that absorbs the leaked light emitted from the circuit.

なお、上記各開示は、可能な限り組み合わせることができる。 The above disclosures can be combined as much as possible.

本開示によれば、光回路内の漏洩光を減少させ、光部品の特性劣化を防止することができる。 According to the present disclosure, it is possible to reduce the leaked light in the optical circuit and prevent the deterioration of the characteristics of the optical component.

本実施形態に係る光モジュールの一例である。This is an example of an optical module according to this embodiment. 本実施形態における反射部の一例である。This is an example of the reflecting unit in the present embodiment. 本実施形態における無反射部の設置の別例である。This is another example of the installation of the non-reflective portion in the present embodiment.

以下、本開示の実施形態について、図面を参照しながら詳細に説明する。なお、本開示は、以下に示す実施形態に限定されるものではない。これらの実施の例は例示に過ぎず、本開示は当業者の知識に基づいて種々の変更、改良を施した形態で実施することができる。なお、本明細書及び図面において符号が同じ構成要素は、相互に同一のものを示すものとする。 Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The present disclosure is not limited to the embodiments shown below. Examples of these implementations are merely examples, and the present disclosure can be implemented in various modifications and improvements based on the knowledge of those skilled in the art. In addition, the components having the same reference numerals in the present specification and the drawings shall indicate the same components.

図1に、本実施形態に係る光モジュールの一例を示す。本実施形態に係る光モジュールは、本実施形態に係る光回路2が筐体9内に配置されている。本実施形態では、光モジュールの一例として、光モジュールが位相変調された光信号を受信する受信モジュールである場合について説明する。 FIG. 1 shows an example of an optical module according to this embodiment. In the optical module according to the present embodiment, the optical circuit 2 according to the present embodiment is arranged in the housing 9. In the present embodiment, as an example of the optical module, a case where the optical module is a receiving module that receives a phase-modulated optical signal will be described.

本実施形態に係る光モジュールは、光回路2、モニタPD5、受光素子6、バイアス差動検出器7、信号処理部8、筐体9を備える。光回路2、モニタPD5、受光素子6、バイアス差動検出器7、信号処理部8は、筐体9に覆われている。 The optical module according to this embodiment includes an optical circuit 2, a monitor PD 5, a light receiving element 6, a bias differential detector 7, a signal processing unit 8, and a housing 9. The optical circuit 2, the monitor PD5, the light receiving element 6, the bias differential detector 7, and the signal processing unit 8 are covered with a housing 9.

光ファイバ11で伝送された光信号が光回路2に入射される。光回路2は、コアがクラッドで覆われた導波路(不図示)を備え、導波路を用いて光ファイバ11からの光信号をモニタPD5及び受光素子6に導波する。モニタPD5は、光ファイバ11から入射されたモニタ光を受光して、光信号の強度を観測する。受光素子6は、光ファイバ11から入照された光信号を受光し、電気信号に変換する。バイアス差動検出器7は、受光素子6が変換した電気信号の差を検出する。信号処理部8は、バイアス差動検出器7からの出力信号を用いて光信号を復調する。 The optical signal transmitted by the optical fiber 11 is incident on the optical circuit 2. The optical circuit 2 includes a waveguide whose core is covered with a cladding (not shown), and uses the waveguide to guide an optical signal from the optical fiber 11 to the monitor PD 5 and the light receiving element 6. The monitor PD5 receives the monitor light incident from the optical fiber 11 and observes the intensity of the optical signal. The light receiving element 6 receives an optical signal illuminated from the optical fiber 11 and converts it into an electric signal. The bias differential detector 7 detects the difference between the electric signals converted by the light receiving element 6. The signal processing unit 8 demodulates the optical signal using the output signal from the bias differential detector 7.

光回路2の導波路が形成されている面に略垂直の外周の面に、第1の端面21、第2の端面22、第3の端面23、第4の端面24が配置されている。第1の端面21及び第2の端面22に光信号の入出力する導波路端が配置され、第3の端面23及び第4の端面24に導波路端は配置されていない。 A first end face 21, a second end face 22, a third end face 23, and a fourth end face 24 are arranged on an outer peripheral surface substantially perpendicular to the surface on which the waveguide of the optical circuit 2 is formed. A waveguide end for input / output of an optical signal is arranged on the first end face 21 and the second end face 22, and no waveguide end is arranged on the third end face 23 and the fourth end face 24.

第1の端面21に、入射部21−1及び出射部21−3として機能する導波路端が配置されている。入射部21−1は、光ファイバ11と結合され、出射部21−3はモニタPD5と結合される。第2の端面22に、出射部22−1〜22−8として機能する導波路端が配置されている。出射部22−1〜22−8は、それぞれ、受光素子6−1〜6−8に結合される。 On the first end surface 21, a waveguide end that functions as an incident portion 21-1 and an exit portion 21-3 is arranged. The incident portion 21-1 is coupled to the optical fiber 11, and the emitting portion 21-3 is coupled to the monitor PD5. A waveguide end that functions as an emission unit 22-1 to 22-8 is arranged on the second end surface 22. The emitting units 22-1 to 22-8 are coupled to the light receiving elements 6-1 to 6-8, respectively.

本実施形態に係る光回路2は、光回路2の第1の端面21〜第4の端面24のうちの導波路端の配置されていない部分の少なくとも一部に、コアからクラッドへ漏洩した漏洩光を光回路2の外部に向けて反射させる反射部が設けられている。例えば、第3の端面23は反射部23−1を備え、第4の端面24は反射部24−1を備える。反射部は、第3の端面23及び第4の端面24の一部であってもよいが、第3の端面23及び第4の端面24の全体に反射部が設けられていることが好ましい。また、第1の端面21のうちの入射部又は出射部の配置されていない部分に反射部21−2が設けられていてもよい。 The optical circuit 2 according to the present embodiment leaks from the core to the clad to at least a part of the first end faces 21 to the fourth end faces 24 of the optical circuit 2 where the waveguide end is not arranged. A reflecting portion that reflects light toward the outside of the optical circuit 2 is provided. For example, the third end face 23 includes a reflecting portion 23-1, and the fourth end face 24 includes a reflecting portion 24-1. The reflecting portion may be a part of the third end face 23 and the fourth end face 24, but it is preferable that the reflecting portion is provided on the entire third end face 23 and the fourth end face 24. Further, the reflecting portion 21-2 may be provided on the portion of the first end face 21 where the incident portion or the exit portion is not arranged.

図2に、A−A’断面における反射部の一例を示す。反射部23−1は、傾斜が施されており、光回路2と空気の屈折率差を用いて、光回路2のコアからクラッドへ漏洩した漏洩光Bを光回路2の上面25に反射させる。反射部23−1は、導波路の配置されている面と平行な面に対して所定の角度Cで傾斜することで形成される。導波路の配置されている面に平行な面は、例えば上面25である。漏洩光Bが反射部23−1に入射したとき、漏洩光Bは反射部23−1で反射され、反射された漏洩光Bは上面25から光回路2外に出射される。これにより、光回路2において、再びクラッドや基板の光の伝搬方向と結合させないことができる。反射部23−1での反射率を高めるために、反射部23−1にコーティングなどの反射処理を施すことが好ましい。 FIG. 2 shows an example of the reflecting portion in the AA'cross section. Reflecting portion 23-1, the inclination has been applied, using a refractive index difference of the optical circuit 2 and the air, reflecting the leaked light B 1 leaked from the core of the optical circuit 2 to the cladding to the upper surface 25 of the optical circuit 2 Let me. The reflecting portion 23-1 is formed by inclining at a predetermined angle C with respect to a surface parallel to the surface on which the waveguide is arranged. The plane parallel to the plane on which the waveguide is arranged is, for example, the upper surface 25. When the leaked light B 1 is incident on the reflecting portion 23-1, the leaked light B 1 is reflected by the reflecting portion 23-1, and the reflected leaked light B 2 is emitted from the upper surface 25 to the outside of the optical circuit 2. As a result, in the optical circuit 2, it is possible to prevent the optical circuit 2 from being coupled with the light propagation direction of the clad or the substrate again. In order to increase the reflectance of the reflective portion 23-1, it is preferable to apply a reflection treatment such as a coating to the reflective portion 23-1.

所定の角度Cは、反射部の位置に応じた、反射させたい角度に設定する。所定の角度Cは、45°であることが好ましい。PLCの比屈折率差は、例えば、ガラスを用いた場合は1.5、Siを用いた場合は3.0である。比屈折率差が1.5以上の場合、臨界角が45°より小さくなる。このため、所定の角度Cが45°であることで、漏洩光Bが上面25から出射される程度に漏洩光Bを反射することができる。 The predetermined angle C is set to an angle to be reflected according to the position of the reflecting portion. The predetermined angle C is preferably 45 °. The difference in the specific refractive index of the PLC is, for example, 1.5 when glass is used and 3.0 when Si is used. When the difference in specific refractive index is 1.5 or more, the critical angle becomes smaller than 45 °. Therefore, when the predetermined angle C is 45 °, the leaked light B 1 can be reflected to the extent that the leaked light B 1 is emitted from the upper surface 25.

本実施形態の光回路の製造方法は、カット工程と、研磨工程と、順に有する。
カット工程では、複数の光回路2が形成されているウエハから、光回路2をダイシングソーで切り出す。
研磨工程では、切り出した光回路2の端面を研磨して反射部23−1、24−1を形成する。このとき、上面25又は下面26に対して端面が所定の角度Cに傾くように、光回路2の端面23、24を研磨する。研磨方法としては、CMP法による研磨が挙げられる。これにより、本実施形態に係る光回路2を生産することができる。
The method for manufacturing an optical circuit of the present embodiment includes a cutting step and a polishing step in this order.
In the cutting step, the optical circuit 2 is cut out from the wafer on which the plurality of optical circuits 2 are formed with a dicing saw.
In the polishing step, the end face of the cut-out optical circuit 2 is polished to form the reflecting portions 23-1 and 24-1. At this time, the end faces 23 and 24 of the optical circuit 2 are polished so that the end faces are inclined at a predetermined angle C with respect to the upper surface 25 or the lower surface 26. Examples of the polishing method include polishing by the CMP method. Thereby, the optical circuit 2 according to the present embodiment can be produced.

本実施形態では、光回路2から出射された漏洩光Bの光路上の筐体9の内壁面9Aに、漏洩光Bを吸収する無反射部4が設けられていることが好ましい。無反射部4は、例えば、反射防止コーティングが例示できる。これにより、漏洩光Bの筐体9内での散乱を防止することができる。 In the present embodiment, it is preferable that the inner wall surface 9A of the housing 9 on the optical path of the leaked light B 2 emitted from the optical circuit 2 is provided with the non-reflective portion 4 that absorbs the leaked light B 2. For the non-reflective portion 4, for example, an antireflection coating can be exemplified. As a result, it is possible to prevent the leaked light B 2 from being scattered in the housing 9.

図3に、無反射部の設置の別形態を示す。無反射部4は、光回路2の上面25に接して、漏洩光Bの光路上に配置されても良い。これにより、筐体9の構造上の制約により筐体9の内壁面9Aに無反射部4が設けられない場合や光回路2と筐体9の間に部品が配置されている場合でも、漏洩光Bの筐体9内での散乱を防止することができる。 FIG. 3 shows another form of installation of the non-reflective portion. The non-reflective portion 4 may be arranged on the optical path of the leaked light B 2 in contact with the upper surface 25 of the optical circuit 2. As a result, even if the non-reflective portion 4 is not provided on the inner wall surface 9A of the housing 9 due to structural restrictions of the housing 9, or if parts are arranged between the optical circuit 2 and the housing 9, leakage occurs. It is possible to prevent the light B 2 from being scattered in the housing 9.

なお、図2及び図3では、反射部23−1が漏洩光Bを光回路2の上面25に反射させる例を示したが、本実施形態はこれに限定されない。例えば、反射部23−1は、漏洩光Bを光回路2の下面26に反射させてもよい。この場合、下面26に対して第3の端面23を所定の角度C傾けて反射部を形成する。所定の角度Cは、下面26と反射部23−1とのなす角度になる。さらに無反射部4を設ける場合は、下面26から出射された漏洩光Bの光路上の筐体9に無反射部4を配置する。或いは、漏洩光Bの光路上に位置する下面26に配置される。 Although FIGS. 2 and 3 show an example in which the reflecting portion 23-1 reflects the leaked light B 1 on the upper surface 25 of the optical circuit 2, the present embodiment is not limited to this. For example, the reflecting unit 23-1 may reflect the leaked light B 1 on the lower surface 26 of the optical circuit 2. In this case, the third end surface 23 is tilted by a predetermined angle C with respect to the lower surface 26 to form the reflecting portion. The predetermined angle C is an angle formed by the lower surface 26 and the reflecting portion 23-1. Further, when the non-reflective portion 4 is provided, the non-reflective portion 4 is arranged in the housing 9 on the optical path of the leaked light B 2 emitted from the lower surface 26. Alternatively, it is arranged on the lower surface 26 located on the optical path of the leaked light B 2.

また、本実施形態では光モジュールが受光モジュールである例を示したが、送信モジュールなどの光回路を搭載した任意の光モジュールに適用することができる。 Further, in the present embodiment, an example in which the optical module is a light receiving module is shown, but it can be applied to any optical module equipped with an optical circuit such as a transmission module.

以上のように、本実施形態の光回路および光モジュールは、光回路の外部に向けて反射させる反射部が設けられているので筐体内での散乱が防止できるため、モニタPDの受光感度の劣化を防止できる。さらに無反射部を漏洩光の光路上の筐体あるいは光回路の上面に設けることにより漏洩光の散乱をより効果的に抑制できる。 As described above, since the optical circuit and the optical module of the present embodiment are provided with the reflecting portion for reflecting toward the outside of the optical circuit, scattering in the housing can be prevented, so that the light receiving sensitivity of the monitor PD deteriorates. Can be prevented. Further, by providing the non-reflective portion on the housing on the optical path of the leaked light or on the upper surface of the optical circuit, the scattering of the leaked light can be suppressed more effectively.

本開示は情報通信産業に適用することができる。 This disclosure can be applied to the information and communication industry.

11:光ファイバ
2:光回路
21:第1の端面
21−1:入射部
21−2:反射部
21−3:出射部
22:第2の端面
22−1、22−2、22−3、22−4、22−5、22−6、22−7、22−8:出射部
23:第3の端面
23−1:反射部
24:第4の端面
24−1:反射部
25:上面
26:下面
4:無反射部
5:モニタPD
6−1、6−2、6−3、6−4、6−5、6−6、6−7、6−8:受光素子
7−1、7−2、7−3、7−4:バイアス差動検出器
8−1、8−2:信号処理部
9:筐体
9A:筐体の内壁面
11: Optical fiber 2: Optical circuit 21: First end face 21-1: Incident part 21-2: Reflection part 21-3: Exit part 22: Second end face 22-1, 22-2, 22-3, 22-4, 22-5, 22-6, 22-7, 22-8: Exit 23: Third end face 23-1: Reflection 24: Fourth end face 24-1: Reflect 25: Top surface 26 : Bottom surface 4: Non-reflective part 5: Monitor PD
6-1, 6-2, 6-3, 6-4, 6-5, 6-6, 6-7, 6-8: Light receiving elements 7-1, 7-2, 7-3, 7-4: Bias differential detectors 8-1, 8-2: Signal processing unit 9: Housing 9A: Inner wall surface of housing

Claims (3)

コアがクラッドで覆われた導波路が形成されている光回路において、
前記光回路の上面と下面とに挟まれ、外周を形成する4つの面のうち、前記導波路の入出射端の配置されていない2つの面の全体に傾斜が施され、前記コアから前記クラッドへ漏洩した漏洩光を前記光回路の外部に向けて反射させる反射部、
を備える光回路。
In an optical circuit in which a waveguide is formed in which the core is covered with a cladding.
Of the four surfaces sandwiched between the upper surface and the lower surface of the optical circuit and forming the outer circumference, the entire two surfaces on which the entrance / exit ends of the waveguide are not arranged are inclined, and the core to the said core. A reflective part that reflects the leaked light leaked to the clad toward the outside of the optical circuit.
Optical circuit with.
前記反射部で反射されかつ前記光回路から出射される漏洩光の光路上に配置され、前記光回路から出射された漏洩光を吸収する無反射部をさらに備える、
請求項に記載の光回路。
A non-reflective portion which is arranged on the optical path of the leaked light reflected by the reflecting portion and emitted from the optical circuit and absorbs the leaked light emitted from the optical circuit is further provided.
The optical circuit according to claim 1.
請求項に記載の光回路と、
前記光回路を覆う筐体と、
前記筐体の内壁面のうちの前記光回路から出射される漏洩光の光路上に配置され、前記光回路から出射された漏洩光を吸収する無反射部と、
を備える光モジュール。
The optical circuit according to claim 1 and
The housing that covers the optical circuit and
A non-reflective portion of the inner wall surface of the housing, which is arranged on the optical path of the leaked light emitted from the optical circuit and absorbs the leaked light emitted from the optical circuit.
Optical module with.
JP2017048936A 2017-03-14 2017-03-14 Optical circuit and optical module Active JP6878055B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784159A (en) * 1993-06-29 1995-03-31 Hitachi Cable Ltd Bidirectional wavelength multiplexed light transmission module
JP2001154067A (en) * 1999-12-01 2001-06-08 Nec Corp Optical transmitting/receiving module using optical waveguide
JP2002023123A (en) * 2000-07-11 2002-01-23 Fujitsu Ltd Optical circuit provided with optical waveguide for guiding minor light
WO2003058305A1 (en) * 2001-12-28 2003-07-17 Hitachi Chemical Co., Ltd. Optical transmission/reception module of optical waveguide type, and substrate for making the same
JP2004046021A (en) * 2002-07-15 2004-02-12 Omron Corp Optical waveguide device, optical multiplexing demultiplexing device, and optical wavelength-multiplex transmitting device
US6920257B1 (en) * 2003-03-24 2005-07-19 Inplane Photonics, Inc. Resonator cavity for optical isolation
JP5904954B2 (en) * 2013-02-05 2016-04-20 日本電信電話株式会社 Integrated photo detector
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