JP6864401B1 - Tactile sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the size of a tactile sensor A tactile sensor includes a sensor substrate, an elastic member, a supported member, and a light emitting member. The sensor substrate has a first surface on which a plurality of optical sensors capable of detecting light of the first wavelength are arranged. The elastic member is arranged on the first surface side of the sensor substrate and has transparency to the first wavelength. The supported member is supported by the elastic member and has optical characteristics different from those of the elastic member. The light emitting member is arranged so as to be covered with the elastic member on the sensor substrate side of the elastic member, and emits light including the first wavelength toward the elastic member. [Selection diagram] Fig. 1

Description

The present invention relates to a tactile sensor.

The tactile sensor is realized by various configurations. For example, the optical tactile sensor disclosed in Patent Document 1 includes a transparent elastic body arranged at a portion where an object comes into contact. A marker that reflects light is arranged inside the transparent elastic body. When the transparent elastic body receives pressure from the object, the position of the marker changes due to the elastic deformation of the transparent elastic body. By detecting this position change with a camera, the magnitude and direction of the force applied from the object to the transparent elastic body can be measured.

International Publication No. 02/18893

Since the marker needs to be photographed by a camera, the optical tactile sensor requires a light source to irradiate the marker with light. As a result, the optical tactile sensor is configured as a large device. On the other hand, the tactile sensor is used, for example, to adjust the gripping force when the robot grips an object by hand. The tactile sensor is particularly required to be miniaturized when it is assumed that it will be used in such an application. In order to make the tactile sensor smaller without narrowing the pressure detection range, it is necessary to make the tactile sensor thinner.

One of the objects of the present invention is to reduce the size of the tactile sensor.

According to one embodiment of the present invention, a sensor substrate having a first surface on which a plurality of optical sensors capable of detecting light of a first wavelength are arranged, and a sensor substrate arranged on the first surface side of the sensor substrate, said to be described. An elastic member that is transparent to the first wavelength, a supported member that is supported by the elastic member and has optical characteristics different from that of the elastic member, and the elastic member that covers the sensor substrate side of the elastic member. Provided is a tactile sensor comprising a light emitting member that is dislocated and emits light containing the first wavelength toward the elastic member.

The light emitting member may have a light emitting surface, be arranged in a state of being sandwiched between the sensor substrate and the elastic member, and have transparency to the first wavelength.

The light emitting member may include a surface light source sandwiched between the sensor substrate and the elastic member.

The light emitting member includes a light source and a light diffusing plate for diffusing light from the light source and guiding the light to the elastic member, and the light diffusing plate may be sandwiched between the elastic member and the sensor substrate.

The supported member may have a spherical shape.

The supported member may have a mesh shape.

The sensor substrate may include a plurality of light introduction units arranged closer to the light emitting member than the plurality of optical sensors and arranged corresponding to each of the plurality of optical sensors.

The first wavelength may include wavelengths other than visible light.

The first wavelength may include a wavelength of visible light.

The sensor board is an image sensor, and is an analysis device that analyzes an image signal output from the sensor board according to the detection results of the plurality of optical sensors and outputs information related to pressure on the elastic member. May be further provided.

The sensor board is an event detection type sensor, analyzes event information signals output from the sensor board according to the detection results of the plurality of optical sensors, and outputs information related to pressure on the elastic member. An analyzer may be further provided.

According to the present invention, the tactile sensor can be miniaturized.

It is a figure which shows the structure of the tactile sensor in the 1st Embodiment of this invention. It is a figure explaining the structure of the detection apparatus in 1st Embodiment of this invention. It is a figure which shows an example of the position change of the reflective member when a pressure is received from an object with respect to a pressure detection surface. It is a figure which shows an example of the photographed image of the reflection member when a pressure is received from an object with respect to a pressure detection surface. It is a figure which shows an example of the photographed image of the reflection member when a pressure is received from an object with respect to a pressure detection surface. It is a figure explaining the structure of the detection apparatus in 2nd Embodiment of this invention. It is a figure explaining the structure of the detection apparatus in 3rd Embodiment of this invention. It is a figure explaining the structure of the image sensor in 4th Embodiment of this invention. It is a figure explaining the structure of the image sensor in 5th Embodiment of this invention.

Hereinafter, the tactile sensor according to the embodiment of the present invention will be described in detail with reference to the drawings. The embodiments shown below are examples, and the present invention is not construed as being limited to these embodiments. In the drawings referred to in the present embodiment, the same part or a part having a similar function is given the same code or a similar code (a code in which A, B, etc. are simply added after the number), and the process is repeated. The explanation may be omitted. In addition, the dimensional ratio of the drawing may differ from the actual ratio for convenience of explanation, or a part of the configuration may be omitted from the drawing.

<First Embodiment>
[1. Tactile sensor configuration]
FIG. 1 is a diagram showing a configuration of a tactile sensor according to the first embodiment of the present invention. FIG. 2 is a diagram illustrating the structure of the detection device according to the first embodiment of the present invention. The tactile sensor 1 includes a detection device 10 including a pressure detection surface 60a and an analysis device 90. Among the tactile sensors shown in FIG. 1, the detection device 10 is shown assuming a structure having a cross section perpendicular to the pressure detection surface 60a. FIG. 2 is a diagram for explaining each configuration of the detection device 10 in an easy-to-understand manner, and corresponds to an exploded perspective view. The detection device 10 includes an image sensor substrate 20, a light emitting member 40, an elastic member 60, and a reflecting member 80.

The image sensor substrate 20 includes a substrate 21, a light detection unit 25, and a light introduction unit 28. The substrate 21 is made of a rigid material, for example, an inorganic material such as ceramics. The substrate 21 is not limited to ceramics as long as it has a rigidity higher than that of the elastic member 60, and may be formed of, for example, an organic material. The photodetector 25 includes a plurality of photosensors 26. In this example, the plurality of optical sensors 26 are arranged in a matrix on the first surface 20a side of the image sensor substrate 20.

The light introduction unit 28 has a plurality of openings 29 and covers the light detection unit 25. Each of the plurality of openings 29 is arranged at a position corresponding to each of the plurality of optical sensors 26. The opening 29 has a pinhole shape, limits the light arriving from the light emitting member 40 side, and introduces the light into the optical sensor 26 arranged at a position corresponding to the opening 29. Since the opening 29 only needs to be able to introduce light into the optical sensor 26, the inside of the opening 29 may be filled with a transparent member. The shape of the opening 29 may be set so that the reflected light from the reflecting member 80 reaches the optical sensor 26 efficiently, for example.

Hereinafter, when the term "transparent" is used in the present specification, the term "transparent" means that the light emitted from the light emitting member 40 has transparency to at least a part of the wavelengths of light (light of the first wavelength). Say that. As will be described later, this light is not limited to visible light. Having transparency is not clearly defined by the transmittance for that wavelength, and may be within the range of transmittance that can realize the function as a tactile sensor described in the present specification.

The image sensor board 20 outputs a signal according to the detection result by the optical sensor 26. The optical sensor 26 can detect light of the first wavelength. This indicates that the optical sensor 26 can detect at least the light of the first wavelength, and does not detect only the light of the first wavelength. This signal shows an image according to the detection result of the optical sensors 26 arranged in a matrix. This image contains information indicating the position of the reflective member 80, as will be described later.

The light emitting member 40 is a transparent member and is a surface light source arranged on the first surface 20a side of the image sensor substrate 20. In this example, the light emitting member 40 is a light emitting element composed of an organic EL sandwiched between transparent conductive layers, and emits light by receiving power supply. The wavelength of the emitted light may be in another wavelength range other than visible light (for example, infrared light or ultraviolet light), or may be a wavelength of visible light without being limited to a wavelength other than visible light. However, it may be both a wavelength other than visible light and a wavelength of visible light. The light emitting member 40 is not limited to the organic EL element, but may be an inorganic EL element.

The elastic member 60 is a transparent elastic body such as silicon rubber. The elastic member 60 is arranged on the surface of both sides of the light emitting member 40 that is opposite to the surface on which the image sensor substrate 20 faces. Therefore, the light emitting member 40 is sandwiched between the elastic member 60 and the image sensor substrate 20. Of both sides of the elastic member 60, the surface opposite to the light emitting member 40 is the pressure detecting surface 60a. For example, the elastic member 60 is elastically deformed by the pressure of the object 1000 on the pressure detecting surface 60a. At this time, since the surface of the elastic member 60 on the image sensor substrate 20 side (the surface opposite to the pressure detection surface 60a) is supported by the synthesis of the image sensor substrate 20 (substrate 21), the elastic member 60 Is greatly deformed on the pressure detection surface 60a side. The pressure on the pressure detection surface 60a is not limited to the case where the pressure is applied in the direction perpendicular to the surface, and may be applied in the direction along the surface.

The reflective member 80 is an elastic member having a spherical shape and having optical characteristics different from those of the elastic member 60. The sphere shape referred to here is not limited to a perfect sphere, but is a concept that indicates a substantially sphere and allows some distortion. The reflective member 80 does not have to be an elastic member. The reflective member 80 reflects the light from the light emitting member 40 because it has different optical characteristics from the elastic member 60. In other words, the fact that the light emitting member 40 can reflect the light in the reflecting member 80 means that the elastic member 60 surrounding the reflecting member 80 and the reflecting member 80 have different optical characteristics.

The plurality of reflective members 80 are supported by the elastic member 60 in a state of being arranged in a matrix in a plane substantially parallel to the first surface 20a inside the elastic member 60. The plurality of reflective members 80 are not limited to the case where they are arranged inside the elastic member 60, and may be arranged along the pressure detection surface 60a, for example. The plurality of reflective members 80 may be arranged at positions that move following the elastic deformation of the elastic member 60 due to the pressure on the pressure detecting surface 60a, that is, they may be supported by the elastic member 60. The reflective member 80 is not limited to having a spherical shape, and may take various forms.

The explanation will be continued by returning to FIG. The analysis device 90 includes an image analysis unit 95 and a power supply unit 98. The power supply unit 98 supplies the power consumed by the detection device 10. For example, this electric power is used for light emission in the light emitting member 40 and operation of the image sensor substrate 20. The power supply source may be a device different from the analysis device 90.

The image analysis unit 95 analyzes a signal (hereinafter, may be referred to as an image signal) output from the detection device 10 (image sensor substrate 20), and applies the pressure applied to the pressure detection surface 60a of the detection device 10 to the pressure applied to the pressure detection surface 60a of the detection device 10. Relevant information (for example, pressure magnitude, pressure direction) is calculated and output. The specific analysis method will be described later. The above is the description of the structure of the tactile sensor 1.

[Detection principle]
Next, the principle of pressure detection by the tactile sensor 1 will be described. Here, it is assumed that a structural change (change in the elastic member 60 and the reflective member 80) occurs when the pressure detection surface 60a receives pressure from the object 1000.

FIG. 3 is a diagram showing an example of a change in the position of the reflective member when a pressure is received from an object with respect to the pressure detection surface. It is assumed that the object 1000 applies pressure to the pressure detection surface 60a. In this example, the direction in which the pressure is applied is perpendicular to the pressure detection surface 60a. In the following description, this direction is referred to as the z direction, is perpendicular to the z direction, the left direction in FIG. 3 is referred to as the x direction, and the direction perpendicular to the z direction and the x direction is referred to as the y direction.

When the object 1000 applies pressure to the pressure detection surface 60a in the z direction, the elastic member 60 is deformed. When the object 1000 is separated from the pressure detection surface 60a as shown in FIG. 1, the elastic member 60 is restored to its original shape by the elastic force.

When the elastic member 60 is deformed, the reflective member 80 moves following the deformation. In the example shown in FIG. 3, the position of the reflective member 80 after movement is indicated by a solid line, and the original position is indicated by a broken line. As shown in the figure, the reflective member 80 moves relatively in the z direction because the object 1000 compresses the elastic member 60 in the z direction (direction approaching the image sensor substrate 20) due to the elastic deformation of the elastic member 60. In the peripheral portion of the object 1000, the pressure component exists not only in the z direction but also in the xy plane direction such as the x direction. Therefore, the moving direction of the reflecting member 80 existing in the peripheral portion of the object 1000 also has a component other than the z direction (a component in the xy plane direction).

Since the light emitting member 40 is a surface light source as described above, at least the light directed at the image sensor substrate 20 (hereinafter, may be referred to as light Ld1, Ld2, Ld3 as an example) and the light directed at the elastic member 60. (Hereinafter, as an example, it may be referred to as light Lr1, Lr2, Lr3). That is, the light emitting member 40 has a light emitting surface on the image sensor substrate 20 side and the elastic member 60 side.

The light Ld1, Ld2, and Ld3 all reach the photodetector 25. The light Lr1 passes through the elastic member 60 and is emitted to the outside from the pressure detection surface 60a. When the emitted light Lr1 is reflected by some object or reflected on the pressure detection surface 60a, a part of the light Lr1 may be returned to the photodetector 25. For example, a portion of the object 1000 that does not come into contact with the pressure detection surface 60a is assumed. The light Lr2 passes through the elastic member 60, is reflected by the reflective member 80, and reaches the photodetector 25. The light Lr3 passes through the elastic member 60, is reflected by the object 1000 at the portion in contact with the pressure detection surface 60a, and reaches the light detection unit 25. The image obtained by the image sensor substrate 20 when these lights reach the photodetector 25 will be described with reference to FIGS. 4 and 5.

FIG. 4 is a diagram showing an example of a photographed image of the reflective member when pressure is received from an object with respect to the pressure detection surface. In this example, the image obtained by the image sensor substrate 20 in the situation shown in FIG. 3 is shown. The light Ld1, Ld2, and Ld3 from the light emitting member 40 reach the photodetector 25 of the image sensor substrate 20 as the entire light of the surface light source, but the light Lr2 and Lr3 also reach as reflected light. Therefore, by removing the components of the light Ld1, Ld2, and Ld3 as the background, the image of the reflective member 80 can be obtained by extracting the components of the light Lr2. Further, by extracting the component of the light Lr3, an image of the object 1000 (particularly the portion in contact with the pressure detection surface 60a) can be obtained.

According to FIG. 4, the reflective member 80 (for example, 80d1) directly under the object 1000 moves in the z direction and approaches the image sensor substrate 20. As a result, the reflective member 80d1 is obtained as an image larger than the reflective member 80 before movement. Of the reflective members 80 at positions corresponding to the peripheral portion of the object 1000, the reflective member 80d2 moves so as to be pushed outward with respect to the object 1000. As a result, the reflective member 80d2 is obtained as an image moved in the direction away from the object 1000 (X direction in the example of FIG. 4) with respect to the reflective member 80 before the movement. Similarly, the reflective member 80d3 is obtained as an image moved away from the object 1000 with respect to the reflective member 80 before the movement (in the example of FIG. 4, the direction in which the X direction and the Y direction are combined). Since both the reflective members 80d2 and 80d3 include movement in the z direction, an image larger than that of the reflective member 80 before the movement can be obtained as in the case of the reflective member 80d1, but as an image smaller than the reflective member 80d1. can get.

FIG. 5 is a diagram showing an example of a photographed image of a reflective member when pressure is received from an object with respect to the pressure detection surface. In FIG. 4, it was assumed that the object 1000 applies pressure to the pressure detection surface 60a in the z direction, but in FIG. 5, the object 1000 applies pressure to the pressure detection surface 60a not only in the z direction but also in the x direction. Is also supposed to apply pressure. According to FIG. 5, the reflection member 80d4 at the position corresponding to the reflection member 80d1 is obtained as an image moved in the x direction from the reflection member 80d1.

By analyzing the image acquired by the image sensor substrate 20 in this way, the image analysis unit 95 described above analyzes change information (size change, position change, and position change amount) regarding each of the plurality of reflective members 80. ) To get. Since the size of the reflective member 80 changes on the image, the position of the reflective member 80 is treated as the center of gravity of the reflective member 80 (in this example, since the reflective member 80 is a sphere, it corresponds to the center of a circle on the image).

The image analysis unit 95 calculates tactile information regarding the pressure of the object 1000 on the pressure detection surface 60a based on the change information. The tactile information indicates, for example, the magnitude and direction of the pressure corresponding to each coordinate in the xy plane of the pressure detection surface 60a, and can be said to be the vector information of the pressure at each coordinate. At this time, the position of the object 1000 (particularly the portion in contact with the pressure detection surface 60a) obtained from the image may also be used in the calculation.

As described above, the tactile sensor 1 in one embodiment has a configuration in which a light emitting member 40 serving as a surface light source is sandwiched between the image sensor substrate 20 and the elastic member 60. Assuming that the elastic member 60 and the light emitting member 40 are transparent to the light emitted from the light emitting member 40, the light emitting member 40 is sandwiched between the image sensor substrate 20 and the elastic member 60. Also, the image sensor substrate 20 can detect the reflected light from the reflecting member 80 arranged on the elastic member 60.

According to this configuration, the light source that provides light to the reflective member 80 can be arranged as a very thin surface light source, so that the tactile sensor 1 can be miniaturized (thinned). Since the image sensor substrate 20 is more rigid than the elastic member 60, the image sensor substrate 20 (board 21) can function as a member for supporting the elastic member 60 that receives pressure on the pressure detection surface 60a.

When the elastic member 60 covers the light emitting member 40, the light emitting member 40 emits light to the reflecting member 80 from directly below the reflecting member 80 (direction along the z direction), and the reflected light from the reflecting member 80. Proceeds in the z direction to reach the image sensor substrate 20. Therefore, the processing load can be reduced in various image processing (for example, perspective transformation). By making the reflective member 80 spherical, the load of image processing can be reduced. When the light from the light emitting member 40 is light other than visible light such as infrared light, the light leaking from the pressure detection surface 60a can be prevented from being visually recognized.

<Second Embodiment>
In the second embodiment, the detection device 10A having the light emitting member 40A forming a pseudo surface light source instead of the light emitting member 40 which is the surface light source will be described.

FIG. 6 is a diagram illustrating the structure of the detection device according to the second embodiment of the present invention. The detection device 10A includes a light emitting member 40A. Since the configurations other than the light emitting member 40A are the same as those in the first embodiment, the description thereof will be omitted.

The light emitting member 40A includes a light diffusing plate 45 and a light source 48. The light diffusing plate 45 is arranged so as to be sandwiched between the elastic member 60 and the image sensor substrate 20 on the first surface 20a side of the image sensor substrate 20. As for the light source 48, for example, the light diffusing plate 45 provides light from the light source 48, diffuses the light to at least the elastic member 60 side, and has transparency to the light.

The light radiated from the light diffusing plate 45 to the elastic member 60 is reflected by the reflecting member 80. This reflected light passes through the light diffusing plate 45 and reaches the photodetector 25. Since the light diffusing plate 45 has a light diffusing effect, the transmittance may be lower than that of the light emitting member 40 in the first embodiment, but the light provided from the light source 48 is finally obtained. It suffices to reach the light detection unit 25.

Even the detection device 10A having such a configuration can have the same function as the detection device 10 in the first embodiment.

<Third Embodiment>
In the third embodiment, the detection device 10B having a plurality of point light source light emitting members 40B in order to form a pseudo surface light source instead of the surface light source light emitting member 40 will be described.

FIG. 7 is a diagram illustrating the structure of the detection device according to the third embodiment of the present invention. The detection device 10B includes an image sensor substrate 20B and a light emitting member 40B. Since the configurations other than the image sensor substrate 20B and the light emitting member 40B are the same as those in the first embodiment, the description thereof will be omitted.

The photodetector 25B has a configuration in which a part of the photosensors 26 does not exist with respect to the photodetector 25 in the first embodiment. The light emitting member 40B is arranged in a region of the first surface 20Ba of the substrate 21 where the light sensor 26 does not exist. The light emitting member 40B is a light emitting element such as an LED. The light introducing portion 28B has an opening in a portion corresponding to the region where the light emitting member 40B is arranged. The light emitting member 40B may be exposed by this opening. The light emitted from the light emitting member 40B through this opening reaches the elastic member 60. The light emission angle of the light emission member 40B may be determined so that the light emitted from the light emission member 40B reaches the reflection member 80 existing in the pressure detection range. As a part of the light emitting member 40B, the light diffusing plate 45 as in the second embodiment may be provided between the elastic member 60 and the image sensor substrate 20B.

Even the detection device 10B having such a configuration can have the same function as the detection device 10 in the first embodiment.

<Fourth Embodiment>
In the fourth embodiment, the image sensor substrate 20C having the light introduction unit 28C having the function of a collimator instead of the light introduction unit 28 including the pinhole-shaped opening 29 will be described.

FIG. 8 is a diagram illustrating the structure of the image sensor substrate according to the fourth embodiment of the present invention. The image sensor substrate 20C includes an optical introduction unit 28C which is a collimator array. The light introduction unit 28C is arranged on the first surface 20Ca side of the substrate 21 and includes a plurality of holes 29C. Each of the plurality of holes 29C is arranged at a position corresponding to each of the plurality of optical sensors 26. The hole 29C extends perpendicularly to the first surface 20Ca and introduces the light arriving from the light emitting member 40 side into the optical sensor 26 arranged at a position corresponding to the hole 29C. Since the hole 29C only needs to be able to introduce light into the optical sensor 26, the inside of the hole 29C may be filled with a transparent member.

Even the image sensor board 20C having such a configuration can have the same function as the image sensor board 20 in the first embodiment.

<Fifth Embodiment>
In the fifth embodiment, the image sensor substrate 20D having the light introduction unit 28D having a light condensing function by the microlens array instead of the light introduction unit 28 including the pinhole-shaped opening 29 will be described.

FIG. 9 is a diagram illustrating the structure of the image sensor substrate according to the fifth embodiment of the present invention. The image sensor substrate 20D includes an optical introduction unit 28D arranged on the first surface 20Da side. The light introduction unit 28D includes a plurality of sets of the microlens array 27D and the opening 29D. Each of the plurality of sets is arranged at a position corresponding to each of the plurality of optical sensors 26, and the light arriving from the light emitting member 40 side is introduced into the optical sensor 26.

Even the image sensor board 20D having such a configuration can have the same function as the image sensor board 20 in the first embodiment.

<Modification example>
Although one embodiment of the present invention has been described above, one embodiment of the present invention can be transformed into various forms as follows. Further, the above-described embodiment and the modifications described below can be applied in combination with each other.

(1) On the pressure detection surface 60a side (for example, on the pressure detection surface 60a) of the reflection member 80, a light-shielding film that blocks light from the light emitting member 40 and can be deformed following the elastic deformation of the elastic member 60 is arranged. You may. In this case, the image of the object 1000 cannot be acquired depending on the light-shielding performance of the light-shielding film, but the light leaking to the pressure detection surface 60a can be reduced.

(2) As the tactile sensor, an event detection type sensor may be used instead of using the image sensor board 20. The event detection type sensor does not output an image signal obtained from the light detected by the photodetector 25, but event information detected based on a change in the image (for example, there is a change in brightness above a threshold value in the image). Outputs a signal indicating the coordinates). In this case, the analysis device 90 includes an event analysis unit having a function of analyzing event information instead of the function of the image analysis unit 95. The event analysis unit analyzes a signal (event information signal) output from the event detection type sensor, and provides information related to the pressure applied to the pressure detection surface 60a of the detection device 10 (for example, the magnitude of pressure, etc.). The direction of pressure) is calculated and output.

(3) The light introduction unit 28 is arranged closer to the light emitting member 40 than the light sensor 26, and transfers the light from the light emitting member 40 (particularly the light related to the reflecting member 80 such as the light Lr2) to the light sensor 26. Introduce. Although the optical introduction units 28B, 28C, and 28D having the same function have been illustrated, the configuration is not limited to the illustrated configuration as long as it has such a function.

(4) The reflecting member 80 has a function of reflecting light of at least the first wavelength in order to allow the light from the light emitting member 40 to reach the light sensor 26. On the other hand, if the image sensor substrate 20 can recognize the configuration corresponding to the reflection member 80 by allowing the light from the light radiation member 40 to reach the light sensor 26, it does not necessarily have to have this reflection function. The elastic member 60 may not support the reflection member 80, but may support, for example, an absorption member having an absorption function for light of a first wavelength. While the light from the light emitting member 40 is reflected by, for example, the pressure detection surface 60a and reaches the light sensor 26, the light is absorbed by the absorbing member. As a result, the image sensor substrate 20 can obtain an image of the absorbing member.

As described above, the member (supported member) supported by the elastic member 60 so as to be able to move following the elastic deformation of the elastic member 60 is not limited to the reflective member 80, and has optical characteristics different from those of the elastic member 60. It can be adopted from various members. The elastic member 60 may support a plurality of types of supported members (for example, both the reflective member 80 and the absorbing member).

(5) Not only when a plurality of reflective members 80 are supported by the elastic member 60, one reflective member may be supported. One reflective member may have, for example, a mesh shape. The mesh-shaped member referred to here is a surface-shaped member in which a plurality of openings are formed. As an example, the mesh-shaped member has rectangular openings arranged in a matrix and has a grid-like pattern shape. When the surface-shaped member is supported by the elastic member 60, the member is deformed following the elastic deformation of the elastic member 60. The image sensor substrate 20 can obtain, for example, an image in which the shape of the opening portion is changed or the opening portion is moved due to this elastic deformation.

1 ... Tactile sensor, 10,10A, 10B ... Detection device, 20,20B, 20C, 20D ... Image sensor board, 20a, 20Ba, 20Ca, 20Da ... First surface, 21 ... Board, 25, 25B ... Light detector, 26 ... Optical sensor, 27D ... Microlens array, 28, 28B, 28C, 28D ... Light introduction part, 29 ... Opening, 29C ... Hole, 29D ... Opening, 40, 40A, 40B ... Light emitting member, 45 ... Light Diffusing plate, 48 ... light source, 60 ... elastic member, 60a ... pressure detection surface, 80, 80d1, 80d2, 80d3, 80d4 ... reflective member, 90 ... analyzer, 95 ... image analysis unit, 98 ... power supply unit, 1000 ... object

Claims (12)

A sensor substrate having a first surface on which a plurality of optical sensors capable of detecting light of the first wavelength are arranged, and
An elastic member arranged on the first surface side of the sensor substrate and having transparency to the first wavelength,
A supported member that is supported by the elastic member and has optical characteristics different from that of the elastic member.
A light emitting member which is arranged on the sensor substrate side of the elastic member so as to be covered with the elastic member and emits light including the first wavelength toward the elastic member.
Equipped with a,
The sensor substrate includes a plurality of light introduction units arranged closer to the light emitting member than the plurality of optical sensors and arranged corresponding to each of the plurality of optical sensors.
The light radiating member, the tactile sensor that is disposed between the elastic member and the sensor substrate. The first aspect of the present invention, wherein the light emitting member has a light emitting surface, is arranged in a state of being sandwiched between the sensor substrate and the elastic member, and has transparency to the first wavelength. Tactile sensor. A sensor substrate having a first surface on which a plurality of optical sensors capable of detecting light of the first wavelength are arranged, and
An elastic member arranged on the first surface side of the sensor substrate and having transparency to the first wavelength,
A supported member that is supported by the elastic member and has optical characteristics different from that of the elastic member.
A light emitting member which is arranged on the sensor substrate side of the elastic member so as to be covered with the elastic member and emits light including the first wavelength toward the elastic member.
Equipped with a,
The light emitting member has a light emitting surface, is arranged in a state of being sandwiched between the sensor substrate and the elastic member, and has transparency to the first wavelength.
The light emitting surface is arranged between the light sensor and the elastic member.
Tactile sensor wherein light emitting members that will be supported on the sensor substrate. The tactile sensor according to any one of claims 1 to 3, wherein the light emitting member includes a surface light source sandwiched between the sensor substrate and the elastic member. The tactile sensor according to claim 4, wherein the surface light source includes an EL element. The light emitting member includes a light source and a light diffusing plate for diffusing light from the light source and guiding the light to the elastic member.
The tactile sensor according to any one of claims 1 to 3, wherein the light diffusing plate is sandwiched between the elastic member and the sensor substrate. The tactile sensor according to any one of claims 1 to 6 , wherein the supported member has a spherical shape. The tactile sensor according to any one of claims 1 to 6 , wherein the supported member has a mesh shape. The tactile sensor according to any one of claims 1 to 8 , wherein the first wavelength includes a wavelength other than visible light. The tactile sensor according to any one of claims 1 to 8 , wherein the first wavelength includes a wavelength of visible light. The sensor board is an image sensor and
Claims 1 to 3, further comprising an analysis device that analyzes an image signal output from the sensor substrate according to the detection results of the plurality of optical sensors and outputs information related to pressure on the elastic member. 10. The tactile sensor according to any one of 10. The sensor board is an event detection type sensor.
The first aspect of the present invention, further comprising an analysis device that analyzes an event information signal output from the sensor substrate according to the detection results of the plurality of optical sensors and outputs information related to the pressure on the elastic member. Item 2. The tactile sensor according to any one of Item 10.

Images