JP6847075B2 - Gasket and flow path joint structure - Google Patents

Description

The present invention relates to a gasket and a flow path joint structure.

Pumps, valves, accumulators for fluid piping paths such as chemicals, high-purity liquids, ultra-pure water, or cleaning liquids handled in manufacturing processes in various technical fields such as semiconductor manufacturing, medical / pharmaceutical manufacturing, and food processing / chemical industry. , A flow path joint structure provided with a gasket to prevent fluid leakage is adopted as a connection structure for connecting the flow path holes formed in two fluid devices such as a filter, a flow meter, a pressure sensor, and a piping block. ing.
The gasket of this flow path joint structure includes a main body, a pair of annular radial inner press-fitting portions protruding from the inner diameter of each of the axial end portions of the main body portion to the axial outer diameter, and axial end portions of the main body portion, respectively. It is provided with a pair of cylindrical outer diameter press-fitting portions protruding from the outer diameter outer side in the axial direction (see FIG. 14B of Patent Document 1).

The pair of inner diameter press-fitting portions function as primary seals for preventing fluid leakage by being press-fitted into the inner diameter seal grooves formed at the connecting ends of the flow path holes of both fluid devices. Further, the pair of outer diameter outer press-fitting portions are press-fitted into cylindrical outer diameter outer seal grooves formed on the end faces of both fluid devices on the connection end side in the radial direction with respect to the flow path hole. It functions as a secondary seal to prevent fluid leakage.

International Publication No. 2017/176815

When a fluid device is molded by injection molding in the flow path joint structure, the roundness of the cylindrical outer diameter seal groove is reduced due to the shrinkage of the molded body in the cooling step, and the gasket is press-fitted on the outer diameter. There is a problem that the portion cannot be press-fitted into the outer diameter seal groove.

The present invention has been made in view of such circumstances, and even if the roundness of the outer diameter seal groove is lowered during molding of the fluid device, the outer diameter outer seal groove of the gasket can be press-fitted into the outer diameter seal groove. The purpose is to do so.

(1) The gasket of the present invention is a gasket for connecting the flow path holes formed in the two fluid devices, respectively, and is inside the diameter of the annular main body and both ends in the axial direction of the main body. A pair of inner-diameter press-fitting portions that project outward in the axial direction and are press-fitted into the inner-diameter seal grooves formed at the connection ends of the flow path holes of both fluid devices, and both ends in the axial direction of the main body. A pair of cylinders that protrude outward in the axial direction from the outer diameter and are press-fitted into the cylindrical outer diameter seal groove formed on the end surface of both fluid devices on the connection end side in the radial direction with respect to the flow path hole. An annular recess is formed in at least a part of the outer peripheral surface of the main body portion, which comprises a shape-shaped outer diameter press-fitting portion.

According to this gasket, a recess is formed on the outer peripheral surface of the main body portion, which is the thickest portion in the radial direction in the gasket provided with the inner diameter press-fit portion and the outer diameter press-fit portion. The thickness of the main body in the radial direction can be reduced. As a result, the outer-diameter press-fitting portion is easily deformed. Therefore, even if the roundness of the outer-diameter seal groove is reduced during molding of the fluid device, the outer-diameter press-fitting portion is deformed according to the shape of the outer-diameter seal groove. Thereby, the outer diameter outer press-fitting portion can be press-fitted into the outer diameter seal groove.

(2) A part of the outer peripheral surface of the outer diameter press-fitting portion is a seal peripheral surface that closely adheres to the outer peripheral surface of the outer diameter seal groove to exert a sealing function, and the recessed portion is the outer diameter outer press fitting portion. It is preferable that the portion is also formed on the other portion of the outer peripheral surface of the portion.
In this case, since the recessed portion is formed on the outer peripheral surface of the outer diameter press-fitting portion, the thickness of the outer diameter press-fitting portion in the radial direction becomes thinner, so that the outer diameter press-fitting portion is more easily deformed. Further, since the recess is formed on the outer peripheral surface of the outer diameter press-fitting portion except for the peripheral surface of the seal, even if the recess is formed on the outer diameter press-fitting portion, the sealing performance of the outer diameter press-fitting portion is deteriorated. There is no such thing.

(3) The recessed portion preferably has a concave curved surface.
In this case, since the radial thickness of the main body portion can be gradually reduced, the stress acting on the outer peripheral surface of the main body portion when the outer diameter outer press-fitting portion is deformed can be dispersed by the recessed portion.

(4) The flow path joint structure of the present invention includes the gasket according to any one of (1) to (3) above for connecting the flow path holes formed in the two fluid devices, and the flow path joint structure of both fluid devices. A pair of inner diameter seal grooves formed at the connection ends of the flow path holes and press-fitted into each diameter inner press-fitting portion of the gasket, and the flow path holes at each of the end faces on the connection end side of both fluid devices. It is provided with a pair of cylindrical outer diameter seal grooves formed on the outer side in the radial direction and into which each outer diameter outer press-fitting portion of the gasket is press-fitted.

According to this flow path joint structure, a recess is formed on the outer peripheral surface of the main body portion, which is the thickest portion in the radial direction in the gasket provided with the inner diameter press-fitting portion and the outer diameter press-fitting portion. The dented portion makes it possible to reduce the radial thickness of the main body portion. As a result, the cylindrical outer-diameter press-fitting portion is easily deformed. Therefore, even if the roundness of the outer-diameter seal groove is reduced during molding of the fluid device, the outer-diameter press-fitting portion is matched to the shape of the outer-diameter seal groove. By deforming, the outer diameter press-fitting portion can be press-fitted into the outer diameter seal groove.

According to the present invention, even if the roundness of the outer diameter seal groove is reduced during molding of the fluid device, the outer diameter outer seal groove of the gasket can be press-fitted into the outer diameter seal groove.

It is sectional drawing which shows an example of the flow path joint structure which concerns on one Embodiment of this invention. It is an enlarged sectional view of the flow path joint structure. It is an exploded enlarged sectional view of the flow path joint structure. It is an exploded enlarged sectional view of the flow path joint structure which shows the deformation example of the recessed part.

Next, a preferred embodiment of the present invention will be described with reference to the accompanying drawings.
[Flow path joint structure]
FIG. 1 is a cross-sectional perspective view showing an example of a flow path joint structure according to an embodiment of the present invention. In FIG. 1, the flow path joint structure 1 of the present embodiment is formed, for example, in two piping blocks (fluid devices) 11 and 12 that are overlapped with each other in a piping path through which a chemical solution used in a semiconductor manufacturing apparatus flows. It is used as a connection structure for connecting the flow path holes 13 and 14 to each other.

In the example of FIG. 1, a plurality of small second piping blocks 12 and 12 connected to a flow meter, a pressure sensor, and the like are superposed on a large first piping block 11 made of a base block to form the piping path. The circular flow path holes 13 opened at two locations on the upper surface of the first piping block 11 and the circular flow path holes 14 and 14 opened at the lower surfaces of the second piping blocks 12 and 12, respectively. It is connected using the road joint structure 1. In the present embodiment, the flow path holes 13 of the first piping block 11 and the flow path holes 14 and 14 of the second piping blocks 12 and 12 are all formed to have the same diameter.

The flow path joint structure 1 of the present embodiment is used as a connection structure for connecting the flow path holes 13 and 14 of the piping blocks 11 and 12, but other fluids such as a pump, a valve, an accumulator, and a filter. It can also be applied to a connection structure for connecting the flow path holes of the device.

FIG. 2 is an enlarged cross-sectional view of the flow path joint structure 1. FIG. 3 is an exploded enlarged cross-sectional view of the flow path joint structure 1. In FIGS. 2 and 3, for convenience of explanation, the piping blocks 11 and 12 are arranged sideways (the same applies to FIG. 4).
In FIGS. 2 and 3, the flow path joint structure 1 includes a gasket 2 for connecting the flow path holes 13 and 14 of the two piping blocks 11 and 12 and a flow path hole 13 of both piping blocks 11 and 12. The inner diameter seal groove 3 formed at each of the connection ends of 14 and the end faces 11a and 12a of both piping blocks 11 and 12 on the connection end side are formed radially outward of the flow path holes 13 and 14, respectively. The outer diameter seal groove 4 is provided.

[Inner diameter seal groove and outer diameter seal groove]
In FIG. 3, the inner diameter seal groove 3 of the first piping block 11 is notched on the peripheral surface of the connection end of the flow path hole 13 so as to gradually increase in diameter from the inner side in the axial direction to the outer end in the axial direction. It is said to be a tapered groove. Similarly, the inner diameter seal groove 3 of the second piping block 12 is cut out on the peripheral surface of the connection end of the flow path hole 14 so as to gradually increase in diameter from the inner side in the axial direction to the outer end in the axial direction. It is said to be a tapered groove.

The outer diameter outer seal grooves 4 of the first piping block 11 and the second piping block 12 are each formed in a cylindrical shape. The inner peripheral surface 41 of each outer diameter seal groove 4 has a circumferential surface 41a extending straight in the axial direction and a tapered guide peripheral surface 41b formed axially outward from the circumferential surface 41a in a cross-sectional view. have.

The axial inner end of the guide peripheral surface 41b is connected to the axial outer end of the circumferential surface 41a. The guide peripheral surface 41b is formed so as to gradually reduce in diameter from the inner end in the axial direction to the outer end in the axial direction (from the circumferential surface 41a in FIG. 3 to the gasket 2 side described later). As a result, the guide peripheral surface 41b guides the press-fitting of the outer-diameter press-fitting portion 23 of the gasket 2 into the outer-diameter sealing groove 4.
The entire outer peripheral surface 42 of each outer diameter seal groove 4 is a circumferential surface that extends straight in the axial direction in a cross-sectional view.

[gasket]
In FIGS. 2 and 3, the gasket 2 has a pair of diameters that are press-fitted into the main body portion 21 (the portion indicated by cross-hatching in the drawing) and the inner diameter seal grooves 3 of the first and second piping blocks 11 and 12, respectively. It includes an inner press-fitting portion 22 and a pair of outer-diameter press-fitting portions 23 that are press-fitted into the outer-diameter seal grooves 4 of the first and second piping blocks 11 and 12, respectively.

The main body portion 21 is formed in an annular shape at the central portion in the axial direction of the gasket 2, and is a thick portion in which the thickness of the gasket 2 in the radial direction (vertical direction in the drawing) is increased. In the state shown in FIG. 2, the main body 21 is arranged between the end faces 11a and 12a of both piping blocks 11 and 12, and a gap S is provided on the radial outer side of the main body 21 between both end faces 11a and 12a. It is formed.

The pair of inner diameter press-fitting portions 22 are triangular portions in a cross-sectional view formed in an annular shape so as to project from the inner diameter of each of both ends in the axial direction of the main body portion 21 to the outer diameter in the axial direction.
The inner peripheral surface of each diameter inner press-fitting portion 22 is formed to have substantially the same diameter as the inner peripheral surface of the main body portion 21, and is formed to have substantially the same diameter as the flow path holes 13 and 14.

Therefore, the inner peripheral surface of the main body portion 21, the inner peripheral surface of the pair of inner diameter press-fitting portions 22, and the peripheral surfaces of the flow path holes 13 and 14 are formed substantially flush with each other. As a result, inside the main body 21 and the pair of inner diameter press-fitting portions 22, the flow path holes 13 and 14 are connected to each other, and a connection flow path 24 having a circular shape when viewed from the axial direction is formed. .. As described above, since a step is not formed between the flow path holes 13 and 14 and the inner peripheral surface of the gasket 2, it is possible to prevent the fluid flowing in the flow path holes 13 and 14 from staying.

The outer peripheral surface of each diameter inner press-fitting portion 22 is a tapered peripheral surface 221 whose diameter gradually increases from the axial outer end to the axial inner end. The tapered peripheral surface 221 of the pair of inner diameter press-fitting portions 22 is a seal peripheral surface that closely adheres to the peripheral surfaces of the inner diameter seal grooves 3 of the first and second piping blocks 11 and 12, respectively, to exert a sealing function. .. As a result, the pair of inner diameter press-fitting portions 22 of the gasket 2 are press-fitted into the inner diameter seal grooves 3 of the first and second piping blocks 11 and 12, respectively, so that the seal closest to the flow path holes 13 and 14 ( It functions as a primary seal) and prevents the fluid in the flow path holes 13 and 14 from leaking to the outside.

The pair of outer diameter press-fitting portions 23 are formed in a cylindrical shape so as to protrude outward in the axial direction from the outer diameter of each of both ends in the axial direction of the main body portion 21. The axial length of each diameter outer press-fitting portion 23 is formed to be slightly shorter than the axial length (groove depth) of the corresponding diameter outer seal groove 4.

A part of the inner peripheral surface 231 of each outer diameter press-fitting portion 23 (the portion axially outer than the virtual line shown by the alternate long and short dash line in the figure) is in close contact with the circumferential surface 41a of the corresponding outer diameter seal groove 4. It is said that the peripheral surface of the seal is 231a, which exerts a sealing function. The other portion of the inner peripheral surface 231 of the outer diameter press-fitting portion 23 (the portion axially inner side of the virtual line indicated by the alternate long and short dash line in the figure) is predetermined with respect to the guide peripheral surface 41b of the corresponding outer diameter outer seal groove 4. It is said that the non-seal peripheral surface 231b is opposed to each other with a gap between the two and hardly exerts the sealing function. The virtual line indicated by the two-dot chain line is a virtual line extending in the radial direction of the gasket 2 so as to pass through the boundary between the circumferential surface 41a and the guide peripheral surface 41b on the inner peripheral surface 41 of each diameter outer seal groove 4. It is a line (see FIG. 2).

A part of the outer peripheral surface 232 of each outer diameter press-fitting portion 23 (the portion axially outer than the virtual line shown by the alternate long and short dash line in the figure) is in close contact with the outer peripheral surface 42 of the corresponding outer diameter seal groove 4 and seals. The peripheral surface of the seal is 232a, which exerts its function. Other portions of the outer peripheral surface 232 of the radially outward lateral pressure join the club 23 (axially inner portion than the virtual line indicated by a two-dot chain line in the drawing), is a non-sealing peripheral surface 232b hardly exert sheet Lumpur function There is. As a result, the pair of outer diameter outer press-fitting portions 23 of the gasket 2 are press-fitted into the outer diameter outer seal grooves 4 of the first and second piping blocks 11 and 12, respectively, so that the fluid in the flow path holes 13 and 14 is externally pressed. Functions as a secondary seal to prevent leakage to.

[Dent]
In FIG. 3, an annular recess 5 is formed on the outer peripheral surface of the main body 21 of the gasket 2 to reduce the thickness of the main body 21 in the radial direction (vertical direction in the drawing). The recessed portion 5 of the present embodiment is formed of a concave curved surface formed so as to be deepest recessed at the position of the center line C in the axial direction of the main body portion 21 in a cross-sectional view, and is formed on the outer peripheral surface of the main body portion 21 and the outer press-fitting portion of each diameter. It is formed so as to straddle the boundary with the outer peripheral surface 232 of 23. Specifically, the recessed portion 5 is formed in the entire axial direction on the outer peripheral surface of the main body portion 21 and in the axially inner portion of the unsealed peripheral surface 232b on the outer peripheral surface 232 of each diameter outer press-fitting portion 23.

As a result, in the present embodiment, the radial thickness of the main body 21 of the gasket 2 is formed to be thin over the entire axial direction, and the radial thickness of each radial outer press-fitting portion 23 in the axial inner portion is increased. It is thinly formed.
As shown in FIG. 4, the recessed portion 5 may be formed in a concave shape in a cross-sectional view. Further, the recessed portion 5 may be formed on at least a part of the outer peripheral surface of the main body portion 21. Further, the recessed portions 5 may be formed at a plurality of positions in the axial direction on the outer peripheral surface of the main body portion 21.

[effect]
As described above, according to the flow path joint structure 1 of the present embodiment, the outer peripheral surface of the main body portion 21 which is a thick portion having a large radial thickness in the gasket 2 provided with the inner diameter press-fitting portion 22 and the outer diameter press-fitting portion 23. Since the recessed portion 5 is formed, the thickness of the main body portion 21 in the radial direction can be reduced by the recessed portion 5. As a result, the outer diameter press-fitting portion 23 is easily deformed. Therefore, even if the roundness of the outer diameter seal groove 4 is reduced during molding of the first and second piping blocks 11 and 12, the outer diameter seal groove 4 is formed. By deforming the outer-diameter press-fitting portion 23 according to the shape, the outer-diameter press-fitting portion 23 can be press-fitted into the outer-diameter seal groove 4.

At that time, when the outer diameter press-fitting portion 23 is deformed so as to collapse inward in the radial direction, if there is no recessed portion 5, it corresponds to the central portion in the axial direction (that is, the recessed portion 5) of the outer peripheral surface 232 of the outer diameter outer press-fitting portion 23. Since tensile stress is generated at the location), the outer diameter press-fitting portion 23 is less likely to fall. However, in the present embodiment, since the recessed portion 5 is formed in the central portion in the axial direction of the outer peripheral surface 232, the outer diameter press-fitting portion 23 tends to fall inward in the radial direction.

Similarly, when the outer diameter press-fitting portion 23 is deformed so as to collapse outward in the radial direction, if there is no recessed portion 5, it corresponds to the axially central portion (that is, the recessed portion 5) of the outer peripheral surface 232 of the outer diameter outer press-fitting portion 23. Since compressive stress is generated at the location), the outer diameter press-fitting portion 23 is less likely to fall. However, in the present embodiment, since the recessed portion 5 is formed in the central portion in the axial direction of the outer peripheral surface 232, the outer diameter press-fitting portion 23 tends to fall outward in the radial direction.

Even if the recessed portion 5 is formed on the inner peripheral surface of the main body portion 21, the thickness of the main body portion 21 in the radial direction can be reduced, but in this case, the connecting flow formed by the inner peripheral surface of the main body portion 21. Since the peripheral surface of the path 24 is not formed straight in the axial direction, the fluid may not flow smoothly in the connecting flow path 24. On the other hand, since the recessed portion 5 of the present embodiment is formed on the outer peripheral surface of the main body portion 21, it does not obstruct the flow of fluid in the connecting flow path 24.

Further, the recessed portion 5 of the present embodiment is formed not only on the outer peripheral surface of the main body portion 21 but also on the unsealed peripheral surface 232b of the outer peripheral surface 232 of the outer diameter press-fitting portion 23. As a result, the thickness of the outer diameter press-fitting portion 23 in the radial direction becomes thinner, so that the outer diameter outer press-fitting portion 23 is more easily deformed. Further, since the recessed portion 5 is formed on the outer peripheral surface of the outer diameter press-fitted portion 23 on the non-sealed peripheral surface 232b that does not exhibit sealing performance, even if the recessed portion 5 is formed on the outer diameter outer press-fitted portion 23, the diameter is The sealing performance of the outer press-fitting portion 23 does not deteriorate.

Further, since the recessed portion 5 of the present embodiment is formed of a concave curved surface, the thickness of the main body portion 21 in the radial direction can be gradually reduced. Therefore, when the outer diameter press-fitting portion 23 is deformed, the outer circumference of the main body portion 21 is formed. The stress acting on the surface can be dispersed by the recessed portion 5.

The embodiments disclosed this time should be considered to be exemplary in all respects and not restrictive. The scope of the present invention is indicated by the scope of claims, not the above-mentioned meaning, and is intended to include the meaning equivalent to the scope of claims and all modifications within the scope.
For example, in the above embodiment, the flow path joint structure 1 used in the semiconductor field has been described as an example, but the field is not limited to this, and the field is not limited to this, and is related to the liquid crystal / organic EL field, the medical / pharmaceutical field, or the automobile-related field. It can also be used in the field.

1 Flow path joint structure 2 Gasket 3 Diameter inner seal groove 4 Diameter outer seal groove 5 Depression 11 1st piping block (fluid device)
11a End face 12 Second piping block (fluid device)
12a End face 13 Flow hole 14 Flow hole 21 Main body 22 Diameter Inner press-fit 23 Diameter Outer press-fit 42 Diameter Outer seal groove outer circumference 232 Diameter Outer press-fit outer outer surface 232a Seal peripheral surface (part)
232b Unsealed peripheral surface (other part)

Claims (3)

A gasket for connecting the flow path holes formed in each of the two fluid devices.
The ring body and
A pair of inner-diameter press-fitting portions that project from the inner diameter of each of the both ends in the axial direction of the main body portion to the outer diameter in the axial direction and are press-fitted into the inner-diameter seal grooves formed at the connecting ends of the flow path holes of both fluid devices. When,
A cylindrical outer diameter that protrudes from the outer diameter of each of the both ends of the main body in the axial direction to the outer diameter in the axial direction and is formed on the end surface of both fluid devices on the connection end side in the radial direction with respect to the flow path hole. A pair of cylindrical outer diameter press-fitting portions, which are press-fitted into the seal grooves, are provided.
In a state where the pair of outer diameter outer press-fitting portions are press-fitted into the outer diameter outer seal grooves of both fluid devices, a part of the outer peripheral surface of each outer diameter outer press-fitting portion is in close contact with the outer peripheral surface of the outer diameter outer seal groove. The other part on the outer peripheral surface of each diameter outer press-fitting portion, which is axially inside the seal peripheral surface, extends from the inside of the diameter outer seal groove to the main body portion. , It is said to be a non-seal peripheral surface that does not exhibit the sealing function,
In a state where the pair of outer diameter outer press-fitting portions are press-fitted into the outer diameter outer seal grooves of both fluid devices, the non-seal peripheral surface in one of the outer diameter outer seal grooves, the outer peripheral surface of the main body portion, and the other. A gasket in which an annular recess is formed in an axial range including the non-seal peripheral surface in the outer diameter seal groove of the gasket. The gasket according to claim 1, wherein the recessed portion has a concave curved surface. The gasket according to claim 1 or 2 , for connecting the flow path holes formed in the two fluid devices, respectively.
A pair of inner diameter seal grooves formed at the connection ends of the flow path holes of both fluid devices and press-fitted into each diameter inner press-fitting portion of the gasket.
A pair of cylindrical outer-diameter seal grooves formed on each end surface of both fluid devices on the connection end side in the radial direction with respect to the flow path hole and press-fitted into each outer-diameter outer-fitting portion of the gasket. Flow joint structure including .

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